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TWI897446B - Resin molding device, method for manufacturing resin molded product, and computer program product - Google Patents

Resin molding device, method for manufacturing resin molded product, and computer program product

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Publication number
TWI897446B
TWI897446B TW113119747A TW113119747A TWI897446B TW I897446 B TWI897446 B TW I897446B TW 113119747 A TW113119747 A TW 113119747A TW 113119747 A TW113119747 A TW 113119747A TW I897446 B TWI897446 B TW I897446B
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TW
Taiwan
Prior art keywords
resin
resin material
molding
image
control unit
Prior art date
Application number
TW113119747A
Other languages
Chinese (zh)
Other versions
TW202508802A (en
Inventor
上田裕介
笠井俊典
和多田晃樹
岡本良太
Original Assignee
日商Towa股份有限公司
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Publication date
Application filed by 日商Towa股份有限公司 filed Critical 日商Towa股份有限公司
Publication of TW202508802A publication Critical patent/TW202508802A/en
Application granted granted Critical
Publication of TWI897446B publication Critical patent/TWI897446B/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32Component parts, details or accessories; Auxiliary operations
    • B29C43/58Measuring, controlling or regulating

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

本發明提供一種樹脂成形裝置、樹脂成形品的製造方法以及電腦程式產品,可適當地判定被供給至樹脂成形品的成形中應使用的對象物上的樹脂材料的散佈狀態,適當地防止成形不良的產生。樹脂成形裝置包括:拍攝部,拍攝被供給至對象物上的樹脂材料的圖像;成形機構,使用被供給至對象物上的樹脂材料來進行樹脂成形品的成形;以及控制部,獲取圖像,控制成形機構的動作。控制部算出在圖像內所含的多個區塊的各者中,存在樹脂材料的區域或不存在樹脂材料的區域所佔的佔有比例,基於對多個區塊的各者算出的多個佔有比例與對多個區塊的各者預先設定的多個基準比例的類似度,來判定可否藉由成形機構而使用樹脂材料進行成形。The present invention provides a resin molding apparatus, a method for manufacturing a resin molded article, and a computer program product that can appropriately determine the distribution of a resin material supplied to an object to be used in molding a resin molded article, thereby appropriately preventing molding defects. The resin molding apparatus includes: an imaging unit that captures an image of the resin material supplied to the object; a molding mechanism that uses the resin material supplied to the object to mold the resin molded article; and a control unit that acquires the image and controls the operation of the molding mechanism. The control unit calculates the occupancy ratio of the area where the resin material exists or the area where the resin material does not exist in each of the multiple blocks contained in the image, and determines whether the resin material can be used for forming by the forming mechanism based on the similarity between the multiple occupancy ratios calculated for each of the multiple blocks and a multiple reference ratios preset for each of the multiple blocks.

Description

樹脂成形裝置、樹脂成形品的製造方法以及電腦程式產品Resin molding device, method for manufacturing resin molded product, and computer program product

本發明是有關於一種樹脂成形裝置、樹脂成形品的製造方法以及電腦程式產品。The present invention relates to a resin molding device, a method for manufacturing a resin molded product, and a computer program product.

專利文獻1揭示一種壓縮成形裝置。該壓縮成形裝置中,在單片薄膜上平坦地撒放顆粒樹脂,並將撒放有樹脂的單片薄膜搬送至壓製部。在壓製部中,使用撒放在單片薄膜上的樹脂來進行工件的壓縮成形。 [現有技術文獻] [專利文獻] Patent Document 1 discloses a compression molding device. In this compression molding device, granular resin is evenly spread on a single film, and the resin-spread single film is transported to a pressing section. In the pressing section, the resin spread on the single film is used to compress and mold a workpiece. [Prior Art Document] [Patent Document]

專利文獻1:日本專利特開2019-136942號公報Patent document 1: Japanese Patent Publication No. 2019-136942

[發明所欲解決之課題][The problem that the invention aims to solve]

在專利文獻1般的壓縮成形裝置中,成形後的工件的外觀會受到撒放在薄膜上的樹脂如何散佈影響。即,根據被供給至薄膜上的樹脂的散佈狀態,有產生成形不良之虞。例如,在薄膜上樹脂材料大幅偏頗的情況下,有可能產生成形不良。In compression molding devices such as those described in Patent Document 1, the appearance of the finished workpiece is affected by the distribution of the resin applied to the film. Specifically, the distribution of the resin applied to the film can lead to defects in the workpiece. For example, if the resin material is significantly unevenly distributed on the film, this can result in defects.

本發明的目的在於提供一種樹脂成形裝置、樹脂成形品的製造方法以及程式,可適當地判定被供給至樹脂成形品的成形中應使用的對象物上的樹脂材料的散佈狀態,適當地防止成形不良的產生。 [解決課題之手段] The present invention aims to provide a resin molding apparatus, a method for manufacturing a resin molded product, and a program that can appropriately determine the distribution state of a resin material supplied to an object to be used in molding a resin molded product, thereby appropriately preventing the occurrence of molding defects. [Solution]

依據本發明的一方面的樹脂成形裝置包括拍攝部、成形機構及控制部。拍攝部拍攝被供給至對象物上的樹脂材料的圖像。成形機構使用被供給至對象物上的樹脂材料來進行樹脂成形品的成形。控制部獲取圖像,控制成形機構的動作。控制部算出在圖像內所含的多個區塊的各者中,存在樹脂材料的區域或不存在樹脂材料的區域所佔的佔有比例。控制部基於對多個區塊的各者算出的多個佔有比例與對多個區塊的各者預先設定的多個基準比例的類似度,來判定可否藉由成形機構而使用樹脂材料進行成形。According to one aspect of the present invention, a resin forming device includes a photographing unit, a forming mechanism, and a control unit. The photographing unit photographs an image of the resin material supplied to the object. The forming mechanism uses the resin material supplied to the object to form a resin molded product. The control unit obtains the image and controls the operation of the forming mechanism. The control unit calculates the proportion of the area where the resin material exists or the area where the resin material does not exist in each of a plurality of blocks contained in the image. The control unit determines whether the resin material can be used for forming by the forming mechanism based on the similarity between the plurality of proportions calculated for each of the plurality of blocks and a plurality of reference proportions pre-set for each of the plurality of blocks.

依據本發明的另一方面的樹脂成形品的製造方法使用所述的樹脂成形裝置,所述樹脂成形品的製造方法包括下述步驟:在成形模具內配置樹脂材料;以及進行配置有樹脂材料的成形模具的鎖模。According to another aspect of the present invention, a method for manufacturing a resin molded product uses the above-mentioned resin molding apparatus, and the method for manufacturing a resin molded product includes the following steps: arranging a resin material in a molding die; and clamping the molding die in which the resin material is arranged.

依據本發明的又一方面的電腦程式產品使連接於進行樹脂成形品的成形的成形機構的電腦執行下述步驟:獲取被供給至對象物上的樹脂材料的圖像;算出在圖像內所含的多個區塊的各者中,存在樹脂材料的區域或不存在樹脂材料的區域所佔的佔有比例;以及基於對多個區塊的各者算出的多個佔有比例與對多個區塊的各者預先設定的多個基準比例的類似度,來判定可否藉由成形機構而使用樹脂材料進行成形。 [發明的效果] According to another aspect of the present invention, a computer program product causes a computer connected to a molding mechanism that molds a resin molded article to execute the following steps: obtaining an image of a resin material being supplied to an object; calculating the proportion of areas containing or not containing the resin material within each of a plurality of blocks included in the image; and determining whether the molding mechanism can use the resin material for molding based on the similarity between the calculated proportions for each of the plurality of blocks and a plurality of pre-set reference proportions for each of the plurality of blocks. [Effects of the Invention]

根據本發明,可適當地判定被供給至樹脂成形品的成形中應使用的對象物上的樹脂材料的散佈狀態,適當地防止成形不良的產生。According to the present invention, the distribution state of the resin material supplied to the object to be used in molding a resin molded product can be appropriately determined, thereby appropriately preventing the occurrence of molding defects.

以下,使用圖式來詳細說明本發明的一實施方式。再者,對於圖中相同或相當的部分標註相同的符號而不再重複其說明。而且,各附圖中,為了便於理解,適當省略或誇張地示意性地描繪了對象。The following drawings illustrate one embodiment of the present invention in detail. Identical or corresponding parts are denoted by the same reference numerals throughout the drawings, and their descriptions are not repeated. Furthermore, in each of the drawings, objects are schematically depicted with appropriate omissions or exaggerations to facilitate understanding.

[1.樹脂成形裝置的結構] 圖1是示意性地表示依據本實施方式的樹脂成形裝置100的平面圖。樹脂成形裝置100對成形對象物進行樹脂成形。此處的說明中,作為成形對象物,例示搭載有半導體晶片等電子零件的基板W1。樹脂成形裝置100使用樹脂材料P對基板W1實施樹脂密封,製造成為樹脂成形品的基板W2。並不限定於此,此處,對基板W1中的搭載有電子零件的零件搭載面進行樹脂密封。 [1. Structure of Resin Molding Apparatus] Figure 1 is a schematic plan view of a resin molding apparatus 100 according to this embodiment. Resin molding apparatus 100 performs resin molding on an object. In this description, a substrate W1 on which electronic components, such as a semiconductor chip, are mounted is used as an example of the object to be molded. Resin molding apparatus 100 seals substrate W1 with a resin material P, producing substrate W2 as a resin molded article. This is not a limitation; here, the component mounting surface of substrate W1, on which electronic components are mounted, is resin-sealed.

作為基板W1的示例,可列舉矽晶圓等半導體基板、引線框架、印刷配線基板、金屬製基板、樹脂製基板、玻璃製基板、陶瓷製基板等。基板亦可被用於扇出晶圓級封裝(Fan Out Wafer Level Packaging,FOWLP)、扇出面板級封裝(Fan Out Panel Level Packaging,FOPLP)的載體。在基板中,既可已施以有配線,亦可未施以有配線。Examples of substrate W1 include semiconductor substrates such as silicon wafers, lead frames, printed wiring boards, metal substrates, resin substrates, glass substrates, and ceramic substrates. Substrates can also be used as carriers for fan-out wafer-level packaging (FOWLP) and fan-out panel-level packaging (FOPLP). The substrate may or may not have wiring applied.

如圖1所示,樹脂成形裝置100包括主機模組M1、模塑模組M2與樹脂模組M3。模塑模組M2包括成形機構5。成形機構5使用樹脂材料P而以樹脂來對基板W1上的電子零件進行密封,藉此進行加工為基板W2的樹脂成形。主機模組M1對成形機構5供給作為成形對象物的基板W1,並自成形機構5回收成形後的基板W2(樹脂成形品)並予以收納。樹脂模組M3對成形機構5供給樹脂材料P。以上的模組M1~模組M3依序連結為一體的裝置,但模組M1~模組M3各自可拆裝,可更換為其他模組。圖1中,示出了兩台模組M2,但模組M2亦可僅為一台,還可配備三台以上。關於模組M1及模組M3亦同樣,模組M1~模組M3的數量可分別增減。As shown in FIG1 , the resin molding apparatus 100 includes a main module M1, a molding module M2, and a resin module M3. The molding module M2 includes a molding mechanism 5. The molding mechanism 5 uses a resin material P to seal the electronic components on the substrate W1 with resin, thereby performing resin molding to form the substrate W2. The main module M1 supplies the substrate W1, which is the molding object, to the molding mechanism 5 and recovers and stores the molded substrate W2 (resin molded product) from the molding mechanism 5. The resin module M3 supplies the resin material P to the molding mechanism 5. The above modules M1 to M3 are sequentially connected to form an integrated device, but each module M1 to M3 is detachable and can be replaced with another module. In Figure 1, two modules M2 are shown, but there can be only one module M2, or three or more modules can be provided. The same is true for modules M1 and M3; the number of modules M1 to M3 can be increased or decreased.

樹脂成形裝置100進而包括控制部10及記憶部12。控制部10包含中央處理單元(Central Processing Unit,CPU)、隨機存取記憶體(Random Access Memory,RAM)及唯讀記憶體(Read Only Memory,ROM)等,CPU執行記憶於記憶部12及/或ROM內的程式15,藉此來控制模組M1~模組M3的各部的動作。控制部10連接於模組M1~模組M3中所含的成形機構5等各種機構,使該些機構聯動運行。記憶部12包含硬碟、快閃記憶體等任意形態的記憶媒體,亦可將多種記憶媒體加以組合而構成。控制部10既可包含一個單元,亦可包含分散地配置於模組M1~模組M3內或外的多個單元。記憶部12亦可亦包含一個單元,還可包含分散地配置於模組M1~模組M3內或外的多個單元。The resin molding device 100 further includes a control unit 10 and a memory unit 12. The control unit 10 includes a central processing unit (CPU), random access memory (RAM), and read-only memory (ROM). The CPU executes a program 15 stored in the memory unit 12 and/or ROM to control the operation of each component of modules M1 through M3. The control unit 10 is connected to various mechanisms, such as the molding mechanism 5, contained in modules M1 through M3, to coordinate their operation. The memory unit 12 includes any type of storage media, such as a hard drive or flash memory, and can also be a combination of multiple storage media. The control unit 10 may include a single unit or a plurality of units distributed within or outside the modules M1 to M3. The memory unit 12 may also include a single unit or a plurality of units distributed within or outside the modules M1 to M3.

圖1的示例中,在記憶部12中記憶有程式15。再者,程式15亦可使用可讀取地記憶有程式15的非暫時的記憶媒體16來提供給樹脂成形裝置100。記憶媒體16例如為可攜式記憶體。作為可攜式記憶體的示例,可列舉唯讀光碟(Compact Disc Read Only Memory,CD-ROM)、通用串列匯流排(Universal Serial Bus,USB)記憶體,安全數位(Secure Digital,SD)卡、微型SD卡或緊湊快閃((Compact Flash)註冊商標)卡等。在記憶媒體16為可攜式記憶體的情況下,控制部10的CPU亦可使用未圖示的讀取裝置從記憶媒體16讀取程式15。所讀取的程式15被寫入至記憶部12。進而,程式15亦可藉由樹脂成形裝置100的未圖示的通訊部與外部裝置進行通訊而提供給樹脂成形裝置100。此時,控制部10的CPU通過通訊部來獲取程式15。所獲取的程式15被寫入至記憶部12。控制部10所具有的CPU的數量並不限定於一個,亦可為兩個以上。在控制部10具有多個CPU的情況下,多個CPU亦可協同執行模組M1~模組M3的各部的動作。In the example of FIG1 , a program 15 is stored in the memory unit 12. Alternatively, the program 15 can be provided to the resin molding apparatus 100 using a non-temporary storage medium 16 that readable stores the program 15. Storage medium 16 is, for example, a portable memory. Examples of portable memories include CD-ROMs (Compact Disc Read Only Memory), USB (Universal Serial Bus) memory, SD cards, micro SD cards, and Compact Flash (registered trademark) cards. If the storage medium 16 is a portable memory, the CPU of the control unit 10 can also read the program 15 from the storage medium 16 using a reading device (not shown). The read program 15 is written to the memory unit 12. Furthermore, the program 15 can also be provided to the resin molding apparatus 100 by communicating with an external device via a communication unit (not shown) of the resin molding apparatus 100. In this case, the CPU of the control unit 10 obtains the program 15 via the communication unit. The obtained program 15 is written to the memory unit 12. The number of CPUs in the control unit 10 is not limited to one and may be two or more. When the control unit 10 includes a plurality of CPUs, the plurality of CPUs may cooperate to execute the operations of the modules M1 to M3.

而且,樹脂成形裝置100包括輸入裝置、顯示裝置等作為用戶介面(User Interface,UI)機器14。UI機器14例如可作為觸控面板而實現。Furthermore, the resin molding apparatus 100 includes an input device, a display device, and the like as a user interface (UI) device 14. The UI device 14 can be implemented as a touch panel, for example.

主機模組M1包括供給機構1、收納部2、載置部3及搬送機構4。供給機構1將基板W1供給至載置部3上。收納部2收納基板W2。載置部3在跟供給機構1對應的位置與跟收納部2對應的位置之間沿Y方向移動。搬送機構4可在主機模組M1及模塑模組M2內沿X方向、Y方向及Z方向移動。搬送機構4保持載置部3上的基板W1,搬送至模塑模組M2,並交接給成形機構5。而且,搬送機構4從成形機構5回收基板W2,搬送至主機模組M1,並載置於載置部3上。隨後,基板W2被收納至收納部2。X方向及Y方向分別對應於圖1的左右方向及上下方向。Z方向對應於垂直於圖1的紙面的方向。The main module M1 includes a supply mechanism 1, a storage section 2, a loading section 3 and a conveying mechanism 4. The supply mechanism 1 supplies the substrate W1 to the loading section 3. The storage section 2 stores the substrate W2. The loading section 3 moves along the Y direction between a position corresponding to the supply mechanism 1 and a position corresponding to the storage section 2. The conveying mechanism 4 can move along the X direction, the Y direction and the Z direction within the main module M1 and the molding module M2. The conveying mechanism 4 holds the substrate W1 on the loading section 3, transports it to the molding module M2, and hands it over to the molding mechanism 5. In addition, the conveying mechanism 4 recovers the substrate W2 from the molding mechanism 5, transports it to the main module M1, and places it on the loading section 3. Thereafter, the substrate W2 is stored in the storage section 2. The X direction and the Y direction correspond to the left-right direction and the up-down direction in Figure 1, respectively. The Z direction corresponds to the direction perpendicular to the paper surface of FIG. 1 .

成形機構5藉由壓縮成形來製造基板W2。此處使用顆粒狀的樹脂材料P。再者,在壓縮成形中,亦可使用液狀的樹脂材料P等其他形態的樹脂材料P。以下表示使用顆粒狀的樹脂材料P的示例。成形機構5包括成形模具50與鎖模機構53。成形模具50包含上模52(第一模具)及與上模52相向的下模51(第二模具)。上模52可在下表面保持基板W1。基板W1以將零件搭載面朝向下方的狀態受到保持。下模51包括底面構件與框狀的側面構件。在框狀的側面構件的內側配置有底面構件。藉此,形成凹狀的模腔51A。底面構件構成模腔51A的底面,側面構件構成模腔51A的側面。The molding mechanism 5 manufactures the substrate W2 by compression molding. A granular resin material P is used here. Furthermore, in compression molding, other forms of resin material P, such as liquid resin material P, can also be used. The following shows an example of using a granular resin material P. The molding mechanism 5 includes a molding die 50 and a clamping mechanism 53. The molding die 50 includes an upper die 52 (first die) and a lower die 51 (second die) facing the upper die 52. The upper die 52 can hold the substrate W1 on the lower surface. The substrate W1 is held in a state where the part-carrying surface faces downward. The lower die 51 includes a bottom member and a frame-shaped side member. The bottom member is arranged on the inner side of the frame-shaped side member. Thereby, a concave mold cavity 51A is formed. The bottom member constitutes the bottom of the cavity 51A, and the side member constitutes the side of the cavity 51A.

在模腔51A內,樹脂材料P如後所述般以散佈的狀態配置於薄膜73上。藉由未圖示的加熱裝置對模腔51A內的樹脂材料P進行加熱。鎖模機構53在加熱裝置對樹脂材料P進行加熱的狀態下對上模52及下模51進行鎖模以關閉模腔51A,使模腔51A內的樹脂材料P固化。藉此,由上模52所保持的基板W1的零件搭載面由樹脂材料P予以密封。隨後,鎖模機構53進行打開上模52與下模51的開模,自成形模具50取出基板W2。再者,本實施方式中,樹脂材料P具有熱固性,但亦可具有熱塑性。在樹脂材料P具有熱塑性的情況下,在樹脂成形時,對樹脂材料P進行加熱而使其熔融後進行冷卻,藉此來使樹脂材料P固化。In the mold cavity 51A, the resin material P is dispersed on the film 73 as described below. The resin material P in the mold cavity 51A is heated by a heating device (not shown). While the resin material P is heated by the heating device, the clamping mechanism 53 clamps the upper mold 52 and the lower mold 51 to close the mold cavity 51A, thereby solidifying the resin material P in the mold cavity 51A. As a result, the component mounting surface of the substrate W1 held by the upper mold 52 is sealed with the resin material P. Thereafter, the clamping mechanism 53 opens the upper mold 52 and the lower mold 51 to remove the substrate W2 from the forming mold 50. In addition, in this embodiment, the resin material P has thermosetting properties, but it may also have thermoplastic properties. When the resin material P has thermoplastic properties, the resin material P is heated to melt and then cooled during resin molding, thereby solidifying the resin material P.

樹脂模組M3包括移動平台6、收容部7及供給機構8。移動平台6可在樹脂模組M3內沿X方向及Y方向移動。圖2是示意性地表示供給機構8的周圍的側方剖面圖。如圖2所示,在移動平台6上,鋪有自未圖示的薄膜供給機構供給的薄膜73,在該薄膜73上進而載置框體72。藉此,形成具有將薄膜73設為底面、將框體72設為側面的空間71的收容部7。薄膜73為脫模薄膜。空間71朝向上方開放,具有與下模51的模腔51A對應的形狀及大小。本實施方式中,框體72及空間71為矩形形狀。對於收容部7的空間71內,自供給機構8供給樹脂材料P。樹脂材料P以自上方散佈至空間71內的方式進行供給。The resin module M3 includes a movable platform 6, a receiving portion 7, and a supply mechanism 8. The movable platform 6 can move in the X direction and the Y direction within the resin module M3. Figure 2 is a side sectional view schematically showing the periphery of the supply mechanism 8. As shown in Figure 2, a film 73 supplied from a film supply mechanism (not shown) is laid on the movable platform 6, and a frame 72 is further placed on the film 73. Thereby, a receiving portion 7 is formed having a space 71 with the film 73 as the bottom surface and the frame 72 as the side surface. The film 73 is a demolding film. The space 71 is open upward and has a shape and size corresponding to the mold cavity 51A of the lower mold 51. In this embodiment, the frame 72 and the space 71 are rectangular. The resin material P is supplied from the supply mechanism 8 to the space 71 of the storage portion 7. The resin material P is supplied so as to be spread into the space 71 from above.

如圖2所示,供給機構8包括貯存部80、搬送路81及振動機構82。貯存部80暫時貯存樹脂材料P。搬送路81連通於貯存部80,是自貯存部80流出的樹脂材料P的搬送路,具有噴出口85。振動機構82藉由使貯存部80及搬送路81振動而將樹脂材料P自貯存部80送出,進而沿著搬送路81搬送至噴出口85側。樹脂材料P在到達噴出口85後,經由噴出口85掉落並被收容至收容部7內。在振動機構82的動作中,移動平台6相對於噴出口85而沿X方向及Y方向相對移動。藉此,樹脂材料P鋪滿收容部7內。Y方向是在圖2中垂直於紙面的方向。X方向為左右方向。 As shown in Figure 2, the supply mechanism 8 includes a storage section 80, a conveying path 81, and a vibrating mechanism 82. The storage section 80 temporarily stores the resin material P. The conveying path 81 is connected to the storage section 80 and is a conveying path for the resin material P flowing out of the storage section 80. It has a nozzle 85. The vibrating mechanism 82 vibrates the storage section 80 and the conveying path 81 to deliver the resin material P from the storage section 80 and then convey it along the conveying path 81 to the nozzle 85 side. After reaching the nozzle 85, the resin material P falls through the nozzle 85 and is received in the receiving section 7. During the operation of the vibrating mechanism 82, the movable platform 6 moves relative to the nozzle 85 in the X and Y directions. In this way, the resin material P is filled in the container 7. The Y direction is the direction perpendicular to the paper in Figure 2. The X direction is the left-right direction.

供給機構8更包括計量機構83,將預先設定的目標量的樹脂材料P供給至收容部7內。例如,計量機構83對貯存部80及搬送路81內的樹脂材料P的重量進行計量。控制部10基於計量機構83的計量結果來控制振動機構82,以使得對收容部7內的樹脂材料P的供給量成為目標量。The supply mechanism 8 further includes a metering mechanism 83 that supplies a predetermined target amount of resin material P into the storage section 7. For example, the metering mechanism 83 measures the weight of the resin material P in the storage section 80 and the conveying path 81. The control unit 10 controls the vibration mechanism 82 based on the measurement results of the metering mechanism 83 to ensure that the supply amount of resin material P into the storage section 7 reaches the target amount.

若再次參照圖1,則樹脂模組M3包括拍攝部20及搬送機構9。拍攝部20拍攝由供給機構8供給至薄膜73上的樹脂材料P的圖像。換言之,拍攝部20拍攝散佈至收容部7內的樹脂材料P散落於薄膜73上的樣子。由拍攝部20所生成的圖像被發送至控制部10,並被適當保存至記憶部12內。Referring again to Figure 1 , the resin module M3 includes a camera 20 and a conveyor mechanism 9. The camera 20 captures an image of the resin material P supplied by the supply mechanism 8 onto the film 73. In other words, the camera 20 captures the image of the resin material P dispersed within the container 7 and scattered on the film 73. The image generated by the camera 20 is transmitted to the control unit 10 and appropriately stored in the memory unit 12.

圖3是用於說明拍攝部20的拍攝狀態的圖。如圖3所示,拍攝部20例如在移動平台6位於拍攝部20的下方的狀態下,自上方拍攝收容部7內的樹脂材料P。拍攝部20包括一個或多個攝影機模組21。攝影機模組21例如包含電荷耦合元件(Charge Coupled Device,CCD)或互補金氧半導體(Complementary Metal Oxide Semiconductor,CMOS)等影像感測器。而且,拍攝部20包括配置於攝影機模組21的上方的光源22。再者,亦可取代此種光源22而配置背光。即,亦可將光源及導光板等配置於自攝影機模組21觀察為被攝物的背後,換言之為薄膜73的下方。Figure 3 illustrates the camera unit 20's shooting state. As shown in Figure 3 , the camera unit 20 captures the resin material P within the storage portion 7 from above, for example, with the movable platform 6 positioned below the camera unit 20. The camera unit 20 includes one or more camera modules 21. The camera modules 21 may include image sensors such as charge-coupled devices (CCDs) or complementary metal oxide semiconductors (CMOSs). Furthermore, the camera unit 20 includes a light source 22 positioned above the camera module 21. Alternatively, a backlight may be provided in place of the light source 22. That is, the light source and the light guide plate may be arranged behind the object viewed from the camera module 21 , in other words, below the film 73 .

再次參照圖1,搬送機構9可在模塑模組M2及樹脂模組M3內沿X方向、Y方向及Z方向移動。搬送機構9將載有樹脂材料P的薄膜73搬送至模塑模組M2。然後,將載有樹脂材料P的薄膜73配置於成形機構5的下模51的模腔51A內。再者,樹脂材料P被散佈至薄膜73上之後,經由拍攝部20的拍攝,直至被設置於模腔51A內為止,薄膜73上的樹脂材料P以其位置不會大幅移動的方式受到操作。換言之,自樹脂材料P散佈直至被設置於模腔51A內為止,散佈至薄膜73上的樹脂材料P的散佈狀態幾乎不會發生變化。Referring again to FIG. 1 , the conveying mechanism 9 is movable in the X, Y, and Z directions within the molding module M2 and the resin module M3. The conveying mechanism 9 conveys the film 73 carrying the resin material P to the molding module M2. The film 73 carrying the resin material P is then placed within the mold cavity 51A of the lower mold 51 of the molding mechanism 5. Furthermore, after the resin material P is spread onto the film 73, it is photographed by the photographing unit 20 until it is set within the mold cavity 51A. The resin material P on the film 73 is manipulated in such a manner that its position does not significantly shift. In other words, the distribution state of the resin material P spread onto the film 73 hardly changes from the time the resin material P is spread until it is set within the mold cavity 51A.

[2.樹脂成形品的成形不良的抑制] 如上所述,在成形機構5中,使用樹脂材料P對基板W1進行樹脂成形。如前所述,在散佈於薄膜73上的狀態下被收容至下模51的樹脂材料P藉由加熱裝置而熔融。在進行鎖模的期間,熔融的樹脂材料覆蓋由上模52所保持的基板W1的零件搭載面。在此狀態下,樹脂材料P的溫度上升。藉此,樹脂材料P固化,形成對基板W1的零件搭載面進行密封的樹脂層。其結果,製造具有樹脂層的基板W2。薄膜73自基板W2剝離。 [2. Preventing Resin Molded Product Defects] As described above, in the molding mechanism 5, resin material P is used to mold substrate W1. As previously described, resin material P, spread on film 73 and contained in lower mold 51, is melted by the heating device. During mold clamping, the molten resin material covers the component mounting surface of substrate W1, which is held by upper mold 52. In this state, the temperature of resin material P rises. As a result, resin material P solidifies, forming a resin layer that seals the component mounting surface of substrate W1. As a result, substrate W2 with the resin layer is produced. Film 73 is then peeled off from substrate W2.

根據如上所述的成形步驟,成形後的基板W2的外觀會受樹脂材料P如何散佈於薄膜73上影響。即,根據薄膜73上的樹脂材料P的散佈狀態,有基板W2產生成形不良之虞。再者,此處所說的成形不良例如包含一個基板W2上的樹脂層的厚度的偏差大。除此以外,作為對應於樹脂材料P的散佈狀態而產生的成形不良,考慮晶片在零件搭載面上流動等各種成形不良。According to the above-described forming steps, the appearance of the formed substrate W2 is affected by how the resin material P is distributed on the film 73. Specifically, the distribution of the resin material P on the film 73 can lead to defects in the substrate W2. Furthermore, the term "defective forming" here includes, for example, large variations in the thickness of the resin layer on a single substrate W2. In addition, various other defects that may arise due to the distribution of the resin material P include wafer flow on the component mounting surface.

為了抑制如上所述的成形不良,在樹脂成形裝置100中,藉由拍攝部20來拍攝映照樹脂材料P在薄膜73上散佈的樣子的圖像。並且,控制部10基於該圖像來判定薄膜73上的樹脂材料P的散佈狀態的適當與否,並與此相應地判定樹脂成形的可否。即,在根據樹脂材料P的散佈狀態而欲產生成形不良的情況下,控制樹脂成形,適當防止成形不良的產生。關於具體處理,將在下文進行說明。To prevent these molding defects, the imager 20 in the resin molding apparatus 100 captures an image of the resin material P spread across the film 73. Based on this image, the control unit 10 determines the appropriateness of the distribution of the resin material P on the film 73 and, accordingly, determines whether the resin molding process is acceptable. Specifically, if the distribution of the resin material P suggests the possibility of molding defects, the control unit 10 controls the molding process to appropriately prevent these defects. The specific processing will be described below.

[3.樹脂成形裝置的動作] 圖4是表示樹脂成形裝置100中的一部分動作流程的流程圖。該流程圖所示的處理由控制部10來執行。 [3. Resin Molding Apparatus Operation] Figure 4 is a flowchart showing a portion of the operational flow of the resin molding apparatus 100. The processing shown in this flowchart is executed by the control unit 10.

首先,在步驟S1中,控制部10控制供給機構8以對收容部7內供給目標量的樹脂材料P。該控制是在收容部7位於供給機構8的噴出口85的下方的狀態下執行。控制部10使移動平台6移動,以將收容部7配置於噴出口85的下方。在此狀態下,控制部10一邊使振動機構82振動而向收容部7內供給樹脂材料P,一邊藉由計量機構83對樹脂材料P的供給量進行計量。並且,持續振動及計量直至樹脂材料P的供給量達到目標量為止,當達到目標量時,中止振動及計量。而且,控制部10一邊使振動機構82振動,一邊使移動平台6移動以使樹脂材料P遍佈於收容部7內。First, in step S1, the control unit 10 controls the supply mechanism 8 to supply a target amount of resin material P into the storage section 7. This control is performed with the storage section 7 positioned below the nozzle 85 of the supply mechanism 8. The control unit 10 moves the movable platform 6 to position the storage section 7 below the nozzle 85. In this state, the control unit 10 vibrates the vibration mechanism 82 to supply the resin material P into the storage section 7 while simultaneously metering the supply amount of resin material P using the metering mechanism 83. The vibration and metering continue until the supply amount of resin material P reaches the target amount. Once the target amount is reached, the vibration and metering cease. Furthermore, the control unit 10 moves the movable platform 6 while vibrating the vibration mechanism 82 so that the resin material P is spread throughout the storage portion 7.

在接下來的步驟S2中,控制部10使移動平台6移動,將收容有樹脂材料P的收容部7配置於攝影機模組21的下方。並且,在此狀態下,執行拍攝部20的拍攝。拍攝部20自上方拍攝被供給至框體72內的樹脂材料P。藉此,生成映照出樹脂材料P在薄膜73上散佈的樣子的圖像(以下稱作原圖像)。控制部10自拍攝部20獲取原圖像。In the following step S2, the control unit 10 moves the movable platform 6, positioning the container 7 containing the resin material P below the camera module 21. In this state, the camera unit 20 begins capturing images. The camera unit 20 captures the resin material P supplied into the housing 72 from above, thereby generating an image (hereinafter referred to as the original image) that reflects the resin material P spread across the film 73. The control unit 10 acquires the original image from the camera unit 20.

在接下來的步驟S3中,控制部10對原圖像實施灰度處理及二值化。作為一例,本實施方式中,設想攝影機模組21為單色攝影機,原圖像為灰階圖像的情況。此時,例如在灰度處理中,原圖像的各畫素被分類為256階[0(暗)-255(亮)]。對白色的畫素分配「255」,對黑色的畫素分配「0」。在二值化中,各畫素被分類為「白(1)」或「黑(0)」。例如,對於藉由灰度處理所分配的值為臨限值X1(例如200)以上的畫素分配「白」,對於藉由灰度處理所分配的值小於臨限值X1的畫素分配「黑」。藉由以上,原圖像中所含的各畫素值經二值轉換,原圖像被轉換為二值化圖像。In the next step S3, the control unit 10 performs grayscale processing and binarization on the original image. As an example, in this embodiment, it is assumed that the camera module 21 is a monochrome camera and the original image is a grayscale image. At this time, for example, in grayscale processing, each pixel of the original image is classified into 256 levels [0 (dark) - 255 (bright)]. "255" is assigned to white pixels, and "0" is assigned to black pixels. In binarization, each pixel is classified as "white (1)" or "black (0)". For example, "white" is assigned to pixels whose values assigned by grayscale processing are greater than a threshold value X1 (for example, 200), and "black" is assigned to pixels whose values assigned by grayscale processing are less than the threshold value X1. Through the above, each pixel value contained in the original image is converted into a binary image through binary conversion.

二值化中所用的臨限值X1可由用戶適當設定。例如,用戶根據樹脂材料P的顏色、薄膜73的顏色、薄膜73的下方的移動平台6的顏色、光源22的光量等來判斷適當的臨限值X1,並操作UI機器14來輸入該臨限值。控制部10基於用戶的輸入來設定臨限值X1。臨限值X1被保存至記憶部12內。用戶的輸入既可為臨限值X1其自身,亦可為用於確定臨限值X1的資訊。所謂用於確定臨限值X1的資訊,例如是對為了測試用而準備的圖像內的特定畫素進行指定的資訊,當用戶指定特定畫素時,亦可將該畫素的畫素值設定為臨限值X1。The threshold value X1 used in binarization can be set as appropriate by the user. For example, the user can determine an appropriate threshold value X1 based on the color of the resin material P, the color of the film 73, the color of the movable platform 6 below the film 73, the light intensity of the light source 22, and so on, and then operate the UI device 14 to input the threshold value. The control unit 10 sets the threshold value X1 based on the user's input. The threshold value X1 is stored in the memory unit 12. The user input can be the threshold value X1 itself or information used to determine the threshold value X1. The information used to determine the threshold value X1 may be, for example, information specifying a specific pixel within an image prepared for testing. When the user specifies a specific pixel, the pixel value of that pixel may be set as the threshold value X1.

在接下來的步驟S4中,控制部10對原圖像的拍攝範圍(視野整體)A1內設定多個區塊T1~T18。圖5是用於說明原圖像中所含的區塊T1~區塊T18的圖。拍攝範圍A1內中所含的矩形形狀的區域A2對應於框體72內的空間,即,在收容部7內收容樹脂材料P的空間71。區塊T1~區塊T18是在區域A2內呈格柵狀規定的區域。In the following step S4, the control unit 10 sets a plurality of blocks T1 to T18 within the original image's capture range (entire field of view) A1. Figure 5 illustrates blocks T1 to T18 within the original image. The rectangular area A2 within the capture range A1 corresponds to the space within the frame 72, namely, the space 71 within the container 7 that holds the resin material P. Blocks T1 to T18 are defined in a grid-like pattern within area A2.

本實施方式中,控制部10在拍攝範圍A1內確定區域A2的位置,藉由對該區域A2進行分割來進一步設定區塊T1~區塊T18。區域A2的位置的確定方法並無特別限定,例如在拍攝時的攝影機模組21與框體72的位置關係為一定的情況下,可預先設定區域A2的位置。或者,亦可藉由對原圖像實施檢測框體72的邊緣的處理等圖像處理,將配置樹脂材料P的框體72內的區域A2自背景分離而實現自動檢測。再者,區域A2的位置確定亦可在步驟S3中進行。此時,步驟S3的灰度處理及二值化亦可僅對區域A2內的圖像執行。區域A2的分割方法亦無特別限定。例如,控制部10可如圖5的示例般均等地分割區域A2,以使區塊數成為預先規定的分割數。控制部10可基於用戶的輸入來設定用於設定區塊T1~區塊T18的分割數等參數。In this embodiment, the control unit 10 determines the position of area A2 within the shooting range A1 and further sets blocks T1 to T18 by dividing the area A2. The method for determining the position of area A2 is not particularly limited. For example, if the positional relationship between the camera module 21 and the frame 72 is fixed during shooting, the position of area A2 can be pre-set. Alternatively, the area A2 within the frame 72 where the resin material P is arranged can be separated from the background by performing image processing on the original image, such as processing to detect the edge of the frame 72. Furthermore, the position of area A2 can also be determined in step S3. In this case, the grayscale processing and binarization of step S3 can also be performed only on the image within area A2. The method for dividing area A2 is also not particularly limited. For example, the control unit 10 may evenly divide area A2, as shown in the example of FIG5 , so that the number of blocks is a predetermined number. The control unit 10 may set parameters such as the number of blocks to be divided into blocks T1 through T18 based on user input.

在接下來的步驟S5中,控制部10算出多個區塊T1~區塊T18的各者中的佔有比例。本實施方式中,所謂佔有比例,是指在原圖像或二值化圖像中所含的各區塊內,存在樹脂材料P的區域所佔的比例。In the next step S5, the control unit 10 calculates the occupancy ratio of each of the plurality of blocks T1 to T18. In this embodiment, the occupancy ratio refers to the proportion of the area containing the resin material P in each block included in the original image or the binary image.

藉由步驟S3的二值化,對於在區域A2內存在樹脂材料P的區域內的畫素與不存在樹脂材料P的區域內的畫素分配「白」「黑」這兩個值中的不同的值。而且,所謂在區域A2內不存在樹脂材料P的區域,是指在原圖像上映照出薄膜73(或者,若薄膜73為透明,則映照出其下方的移動平台6)的區域。此處,例如設想樹脂材料P為發黑的顏色(或者,深的顏色或暗的顏色),薄膜73或移動平台6為較其淡的顏色或亮的顏色。此時,對於存在樹脂材料P的區域的畫素,藉由二值化來分配「黑」,對於不存在樹脂材料P的區域的畫素則分配「白」。Through binarization in step S3, pixels within area A2 where resin material P exists are assigned a different value, either "white" or "black." Furthermore, the area within area A2 where resin material P does not exist refers to the area where film 73 (or, if film 73 is transparent, the underlying movable platform 6) is reflected in the original image. For example, assume that resin material P is a blackish color (or a dark or dark color), and film 73 or movable platform 6 is a lighter or brighter color. In this case, pixels within the area where resin material P exists are assigned "black" through binarization, while pixels within the area where resin material P does not exist are assigned "white."

在步驟S5中,控制部10對各區塊中所含的、藉由二值化而分配有「黑」的畫素數進行計數。並且,算出分配有「黑」的畫素數相對於所述區塊中所含的總畫素數的比例來作為佔有比例。再者,若樹脂材料P為較薄膜73或移動平台6淡的顏色或亮的顏色,則可將使分配有「白」的畫素數除以總畫素數所得的值設為本實施方式中的佔有比例。In step S5, the control unit 10 counts the number of pixels assigned "black" by binarization in each block. Furthermore, the ratio of the number of pixels assigned "black" to the total number of pixels in the block is calculated as the occupation ratio. Furthermore, if the resin material P is lighter or lighter than the film 73 or the moving platform 6, the occupation ratio in this embodiment can be calculated by dividing the number of pixels assigned "white" by the total number of pixels.

以上的佔有比例是針對多個區塊T1~區塊T18的各者而算出。因而,藉由步驟S5,算出多個佔有比例C1~佔有比例C18的值的組。佔有比例C1~佔有比例C18分別對應於區塊T1~區塊T18。The above occupancy ratios are calculated for each of the plurality of blocks T1 to T18. Therefore, in step S5, a plurality of sets of occupancy ratios C1 to C18 are calculated. Occupancy ratios C1 to C18 correspond to blocks T1 to T18, respectively.

在接下來的步驟S6中,控制部10算出多個佔有比例C1~佔有比例C18的值的組與多個基準比例R1~基準比例R18的值的組的類似度。基準比例R1~基準比例R18是針對區塊T1~區塊T18的各者而預先設定。並不限定於此,但在本實施方式中,算出相關係數來作為類似度。相關係數是將佔有比例C1~佔有比例C18與基準比例R1~基準比例R18的協方差除以佔有比例C1~佔有比例C18的標準偏差與基準比例R1~基準比例R18的標準偏差之積所得的值。In the following step S6, the control unit 10 calculates the similarity between a plurality of sets of values for the occupation ratios C1 to C18 and a plurality of sets of values for the reference ratios R1 to R18. Reference ratios R1 to R18 are pre-set for each of blocks T1 to T18. While not limited to this, in this embodiment, a correlation coefficient is calculated as the similarity. The correlation coefficient is the value obtained by dividing the covariance between the occupation ratios C1 to C18 and the reference ratios R1 to R18 by the product of the standard deviation of the occupation ratios C1 to C18 and the standard deviation of the reference ratios R1 to R18.

圖6是對佔有比例C1~佔有比例C18及基準比例R1~基準比例R18的圖表進行比較的圖。類似度是佔有比例C1~佔有比例C18的值的組與基準比例R1~基準比例R18的值的組的類似度。換言之,可說是圖6所示般的、佔有比例C1~佔有比例C18的圖表與基準比例R1~基準比例R18的圖表的類似度。Figure 6 compares the graphs for occupation ratios C1 to C18 and the reference ratios R1 to R18. The similarity is the similarity between the pair of values for occupation ratios C1 to C18 and the pair of values for reference ratios R1 to R18. In other words, the similarity can be described as the similarity between the graph for occupation ratios C1 to C18 and the graph for reference ratios R1 to R18, as shown in Figure 6.

基準比例R1~基準比例R18是在基準圖像中所含的區塊T1~區塊T18內,存在樹脂材料P的區域分別所佔的比例。再者,基準比例R1~基準比例R18可藉由對基準圖像實施與針對原圖像的步驟S3~步驟S5同樣的處理而算出。所謂基準圖像,是指應比較與原圖像的類似性的圖像。例如,所謂基準圖像,是指對在良好地製造的基板W2的成形前,被用於所述基板W2的成形的樹脂材料P散佈於薄膜73上時的樣子進行拍攝所得的圖像。根據此種基準圖像而算出的基準比例R1~基準比例R18與佔有比例C1~佔有比例C18的類似度高,則意味著基準圖像與原圖像中的、樹脂材料P在薄膜73上的散佈狀態類似。因而,在步驟S6中算出的類似度大於規定值,則意味著在使用映照於原圖像中的散佈狀態的樹脂材料P來使基板W2成形時,不會產生成形不良,使良好的基板W2成形的可能性高。Reference ratios R1 through R18 are the proportions of the area containing the resin material P within blocks T1 through T18, respectively, contained in the reference image. Reference ratios R1 through R18 can be calculated by performing the same processing on the reference image as steps S3 through S5 for the original image. A reference image is an image to be compared for similarity to the original image. For example, a reference image is an image obtained by photographing the resin material P used to form a well-manufactured substrate W2, spread across the film 73, before the substrate W2 is formed. If the similarity between the reference ratios R1 to R18 and the occupation ratios C1 to C18 calculated based on the reference image is high, it means that the distribution of the resin material P on the film 73 in the reference image and the original image is similar. Therefore, if the similarity calculated in step S6 is greater than a predetermined value, it means that when the substrate W2 is formed using the resin material P having the distribution reflected in the original image, there is a high probability that a good substrate W2 will be formed without forming defects.

因此,在接下來的步驟S7中,控制部10基於在步驟S6中算出的類似度來判定可否藉由成形機構5而使用樹脂材料P進行成形。例如,判定類似度是否為臨限值X2以上,若類似度為臨限值X2以上(類似),則判定為可藉由成形機構5進行成形,前進至步驟S8。另一方面,若類似度小於臨限值X2(不類似),則判定為無法藉由成形機構5進行成形,前進至步驟S9。Therefore, in the next step S7, the control unit 10 determines whether the resin material P can be formed using the forming mechanism 5 based on the similarity calculated in step S6. For example, it determines whether the similarity is greater than or equal to a threshold value X2. If the similarity is greater than or equal to the threshold value X2 (similar), it is determined that forming can be performed using the forming mechanism 5, and the process proceeds to step S8. On the other hand, if the similarity is less than the threshold value X2 (not similar), it is determined that forming cannot be performed using the forming mechanism 5, and the process proceeds to step S9.

步驟S7中所用的臨限值X2可由用戶適當設定。例如,相關係數的臨限值X2較佳為設為60%以上的值,亦可設為70%以上的值,還可設為80%以上的值。用戶可操作UI機器14來輸入該臨限值。此時,控制部10基於用戶的輸入來設定臨限值X2。臨限值X2被保存於記憶部12內。The threshold value X2 used in step S7 can be set appropriately by the user. For example, the threshold value X2 of the correlation coefficient is preferably set to a value greater than 60%, but can also be set to a value greater than 70%, or even greater than 80%. The user can operate the UI device 14 to input the threshold value. In this case, the control unit 10 sets the threshold value X2 based on the user input. The threshold value X2 is stored in the memory unit 12.

而且,步驟S6中所用的基準比例R1~基準比例R18的值的組亦可由用戶適當設定。用戶可操作UI機器14來設定該組。此時,控制部10基於用戶對UI機器14的輸入來設定基準比例R1~基準比例R18的組。所設定的基準比例R1~基準比例R18的組被保存於記憶部12內。再者,用戶既可指定基準比例R1~基準比例R18的值其自身,亦可指定基準圖像。在用戶指定基準圖像的情況下,控制部10根據基準圖像來算出基準比例R1~基準比例R18的組,並對其進行設定。而且,控制部10亦可根據用戶所指定的多個基準圖像來算出一組基準比例R1~基準比例R18,並對其進行設定。此時,例如可針對根據多個基準圖像分別算出的多組基準比例R1~基準比例R18,而對應於每個區塊進行平均或取中央值等,從而算出一組基準比例R1~基準比例R18。Furthermore, the set of values for the reference ratios R1 to R18 used in step S6 can also be appropriately set by the user. The user can set this set by operating the UI device 14. In this case, the control unit 10 sets the set of reference ratios R1 to R18 based on the user's input to the UI device 14. The set set of reference ratios R1 to R18 is stored in the memory unit 12. Furthermore, the user can specify either the values for the reference ratios R1 to R18 themselves or a reference image. If the user specifies a reference image, the control unit 10 calculates the set of reference ratios R1 to R18 based on the reference image and sets it. Furthermore, the control unit 10 may calculate and set a set of reference ratios R1 to R18 based on multiple reference images specified by the user. In this case, for example, the multiple sets of reference ratios R1 to R18 calculated based on the multiple reference images may be averaged or median-valued for each block to calculate the single set of reference ratios R1 to R18.

再者,基準比例R1~基準比例R18的值的組亦可設定多個。例如,在基板W2可良好地成形的、樹脂材料P在薄膜73上的散佈方式存在多個類型的情況下,可設定與各個類型對應的基準比例R1~基準比例R18的多個組。此時,在步驟S7中,在佔有比例C1~佔有比例C18與基準比例R1~基準比例R18的多個組之間分別算出的多個類似度中的任一組之間的類似度為臨限值X2以上的情況下,可判定為可成形。相反,在與所有組之間的類似度小於臨限值X2的情況下,可判定為無法成形。而且,此時,臨限值X2亦可對應於每組而設定。Furthermore, multiple sets of values for the reference ratios R1 to R18 may be set. For example, if there are multiple types of distribution patterns of the resin material P on the film 73 that allow for good molding of the substrate W2, multiple sets of reference ratios R1 to R18 corresponding to each type may be set. In this case, in step S7, if the similarity between any of the multiple similarities calculated between the respective sets of the reference ratios R1 to R18 and the respective sets of the reference ratios C1 to C18 exceeds a threshold value X2, molding may be determined to be possible. Conversely, if the similarity between all sets is less than the threshold value X2, molding may be determined to be impossible. Furthermore, the threshold value X2 may be set for each set.

在判定為可成形時的步驟S8中,控制部10使用映照於原圖像中的散佈狀態的樹脂材料P來使成形機構5進行成形。具體而言,控制部10控制搬送機構9將載置有樹脂材料P的薄膜73搬送至成形機構5為止,利用成形機構5來製造基板W2。隨後,控制搬送機構4將基板W2回收至收納部2。If the process is determined to be suitable for forming, in step S8, the control unit 10 causes the forming mechanism 5 to perform forming using the resin material P in the dispersed state reflected in the original image. Specifically, the control unit 10 controls the transport mechanism 9 to transport the film 73 carrying the resin material P to the forming mechanism 5, thereby producing the substrate W2 using the forming mechanism 5. Subsequently, the control unit 10 controls the transport mechanism 4 to retrieve the substrate W2 into the storage unit 2.

另一方面,在判定為無法成形時的步驟S9中,控制部10廢棄映照於原圖像中的散佈狀態的樹脂材料P。例如,控制部10控制搬送機構9將載置有樹脂材料P的薄膜73搬送至未圖示的廢棄箱為止,以廢棄樹脂材料P及薄膜73。On the other hand, if it is determined that forming is impossible, the control unit 10 discards the resin material P in the scattered state reflected in the original image in step S9. For example, the control unit 10 controls the conveying mechanism 9 to convey the film 73 carrying the resin material P to a waste box (not shown) to discard the resin material P and the film 73.

當步驟S8或步驟S9結束時,圖4的處理結束。反覆執行圖4的處理,藉此,連續地製造基板W2。When step S8 or step S9 is completed, the process of Figure 4 is completed. The process of Figure 4 is repeatedly performed, thereby continuously manufacturing substrates W2.

[4.特徵] 所述實施方式中,在基板W2的成形前,基於類似度來適當判定被供給至薄膜73上的樹脂材料P的散佈狀態的適當與否。並且,若判定的結果差,則中止使用此種散佈狀態的樹脂材料P的成形。其結果,可適當地防止成形不良的產生。 [4. Features] In this embodiment, the appropriateness of the distribution of the resin material P supplied to the film 73 is determined based on similarity before forming the substrate W2. If the determination result is poor, forming using the resin material P in this distribution is discontinued. As a result, forming defects can be effectively prevented.

而且,即便在樹脂材料P被大幅偏頗地供給至薄膜73上而未均等地撒放的情況下,亦可有可能製造良品的基板W2。所述實施方式中,在此種情況下亦可判定為可成形,從而亦可防止樹脂材料P的過剩的廢棄。Furthermore, even if the resin material P is supplied to the film 73 with a large deviation and not evenly distributed, it is possible to produce a good substrate W2. In the above embodiment, even in such a case, it can be determined that the substrate is moldable, thereby preventing the resin material P from being wasted excessively.

[5.其他實施方式] 以上,對本發明的一實施方式進行了說明,但本發明並不限定於所述實施方式,只要不脫離其主旨便可進行各種變更。例如可進行以下的變更。而且,以下的變形例的主旨可適當組合。 [5. Other Embodiments] The above describes one embodiment of the present invention. However, the present invention is not limited to the embodiment described above and various modifications are possible without departing from the main purpose. For example, the following modifications are possible. Furthermore, the main purpose of the following modifications can be combined as appropriate.

[5-1] 所述實施方式中,算出相關係數來作為類似度,但並不限於該例,可使用能夠表示佔有比例C1~佔有比例C18的值的組與基準比例R1~基準比例R18的值的組的類似度的任意指標。例如,類似度亦可設為作為相關係數的平方的決定係數,亦可藉由人工智慧(Artificial Intelligence,AI)來算出。而且,為了基於類似度來判定成形的可否,未必需要算出類似度等定量性的指標。例如,亦可藉由AI(人工智慧)來判定佔有比例C1~佔有比例C18的圖表與基準比例R1~基準比例R18的圖表的類似與否,並根據類似與否的判定結果來判定成形的可否。 [5-1] In the above embodiment, a correlation coefficient is calculated as the similarity, but this is not limited to this example. Any indicator that can represent the similarity between the set of values for the occupation ratios C1 to C18 and the set of values for the reference ratios R1 to R18 can be used. For example, the similarity can be a coefficient of determination that is the square of the correlation coefficient, or can be calculated using artificial intelligence (AI). Furthermore, in order to determine the feasibility of forming based on similarity, it is not necessary to calculate a quantitative indicator such as similarity. For example, AI can be used to determine the similarity between a graph of the occupation ratios C1 to C18 and a graph of the reference ratios R1 to R18, and the feasibility of forming can be determined based on the similarity determination result.

[5-2] 所述實施方式中,框體72、收容部7內的空間71、區域A2被設為矩形形狀,但可設為圓形等任意形狀。區塊的形狀亦不限於矩形形狀,可設為任意形狀。 [5-2] In the above embodiment, the frame 72, the space 71 within the housing 7, and the area A2 are rectangular in shape, but they can be any shape, such as a circle. The shape of the block is also not limited to a rectangle and can be any shape.

而且,所述實施方式中,區塊是藉由均等地分割區域A2而設定。但區塊的大小及形狀亦可互不相同。例如,區塊亦可設定為越靠近區域A2內的中心則越大,越遠離中心則越小,亦可相反地設定為越靠近區域A2內的中心則越小,越遠離中心則越大。而且,區塊並不需要在區域A2內無間隙且無重合地設定,亦可彼此局部重疊。區域A2內亦可存在不包含於區塊中的間隙。Furthermore, in the above embodiment, the blocks are created by equally dividing area A2. However, the size and shape of the blocks may vary. For example, blocks may be configured to become larger as they are closer to the center of area A2 and smaller as they are further away from the center, or vice versa. Furthermore, the blocks do not need to be arranged without gaps or overlap within area A2; they may partially overlap. Gaps may exist within area A2 that are not contained within the blocks.

[5-3] 所述實施方式中,佔有比例C1~佔有比例C18及基準比例R1~基準比例R18是設為在區塊T1~區塊T18內,存在樹脂材料P的區域所佔的比例。但佔有比例C1~佔有比例C18及基準比例R1~基準比例R18亦可設為在區塊T1~區塊T18內,不存在樹脂材料P的區域所佔的比例。 [5-3] In the above embodiment, the occupancy ratios C1 to C18 and the reference ratios R1 to R18 are defined as the ratios of the area containing the resin material P within blocks T1 to T18. However, the occupancy ratios C1 to C18 and the reference ratios R1 to R18 may also be defined as the ratios of the area containing no resin material P within blocks T1 to T18.

[5-4] 所述實施方式中,將基準圖像設為良好例的圖像。但亦可將基準圖像設為差例的圖像。即,作為基準圖像,亦可使用對在成形不良的基板W2的成形前,樹脂材料P散佈於薄膜73上時的樣子進行拍攝所得的圖像。再者,在使用差例來作為基準圖像的情況下,在步驟S7中,在類似度為臨限值X2以下(不類似)的情況下,可判定為可成形,而在類似度大於臨限值X2(類似)的情況下,可判定為無法成形。而且,亦可準備良好例的圖像及差例的圖像這兩者來作為基準圖像。 [5-4] In the above embodiment, the reference image is a good example image. However, the reference image may also be a poor example image. Specifically, an image of the resin material P spread on the film 73 before forming on a poorly formed substrate W2 may be used as the reference image. Furthermore, when a poor example image is used as the reference image, in step S7, if the similarity is less than a threshold value X2 (not similar), the image is judged as being formable, while if the similarity is greater than the threshold value X2 (similar), the image is judged as being unformable. Furthermore, both a good example image and a poor example image may be prepared as reference images.

[5-5] 所述實施方式中,在步驟S1中,將被供給至收容部7內的樹脂材料P的量控制成為目標量。此時,預想佔有比例C1~佔有比例C18的合計值與基準比例R1~基準比例R18的合計值大致相等,圖6所示的兩圖表的積分值亦大致相等。另一方面,在步驟S1中,若向收容部7內供給過剩量或過少量的樹脂材料P,則有產生成形不良之虞。然而,即便在產生了樹脂材料P的過剩或過少供給的情況下,亦可能引起如圖7所示般,佔有比例C1~佔有比例C18的圖表與基準比例R1~基準比例R18的圖表的形狀類似的情況。因此,可能存在下述情形(case),即,僅憑步驟S7的基於類似度的判定,無法防止成形不良的發生。 [5-5] In the embodiment described above, in step S1, the amount of resin material P supplied to the container 7 is controlled to a target amount. At this point, it is expected that the total value of the occupation ratios C1 to C18 will be approximately equal to the total value of the reference ratios R1 to R18, and the integral values of the two graphs shown in FIG6 will also be approximately equal. On the other hand, if an excessive or insufficient amount of resin material P is supplied to the container 7 in step S1, there is a risk of forming defects. However, even in the case of excessive or insufficient supply of resin material P, the graphs of the occupation ratios C1 to C18 and the reference ratios R1 to R18 may have similar shapes, as shown in FIG7 . Therefore, there may be cases where the similarity-based determination in step S7 alone cannot prevent the occurrence of poor forming.

除了步驟S7的基於類似度的判定以外,亦可進行如以下般的判定,以備此種情況。即,可針對每個區塊而對佔有比例C1~佔有比例C18分別設定有臨限值(上限值及/或下限值),在與任一區塊對應的佔有比例超過上限值或低於下限值的情況下判定為無法成形,在除此以外的情況下判定為可成形。進而,可取代於此或除此以外,而對佔有比例C1~佔有比例C18的合計值設定有臨限值(上限值及/或下限值),在超過上限值或低於下限值的情況下判定為無法成形,在除此以外的情況下判定為可成形。In addition to the similarity-based determination in step S7, the following determination can be performed to prepare for such situations. Specifically, a threshold value (upper and/or lower limit) can be set for each of the occupation ratios C1 to C18 for each block. If the occupation ratio corresponding to any block exceeds the upper limit or falls below the lower limit, the block is determined to be unformable. Otherwise, the block is determined to be formable. Furthermore, instead of or in addition to this, a threshold value (upper and/or lower limit) can be set for the total of the occupation ratios C1 to C18. If the total exceeds the upper limit or falls below the lower limit, the block is determined to be unformable. Otherwise, the block is determined to be formable.

[5-6] 所述實施方式中,將原圖像設為灰階圖像,但亦可藉由將攝影機模組21設為可見光攝影機而設為彩色圖像。而且,在樹脂材料P與被供給該樹脂材料P的薄膜73或其下方的移動平台6等存在溫度差的情況下,亦可將攝影機模組21設為紅外線攝影機,將原圖像設為紅外線圖像。 [5-6] In the above embodiment, the original image is a grayscale image. However, a color image can be obtained by using a visible light camera as the camera module 21. Furthermore, if there is a temperature difference between the resin material P and the film 73 supplied to the resin material P or the movable platform 6 below it, the camera module 21 can be an infrared camera, and the original image can be an infrared image.

1:供給機構 2:收納部 3:載置部 4:搬送機構 5:成形裝置 6:移動平台 7:收容部 8:供給機構 9:搬送機構 10:控制部 12:記憶部 14:用戶介面機器 15:程式 16:記憶媒體 20:拍攝部 21:攝影機模組 22:光源 50:成形模具 51:下模 51A:模腔 52:上模 53:鎖模機構 71:空間 72:框體 73:薄膜(對象物) 80:貯存部 81:搬送路 82:振動機構 83:計量機構 85:噴出口 100:樹脂成形裝置 A1:拍攝範圍 A2:區域 C1~C18:佔有比例 M1:主機模組 M2:模塑模組 M3:樹脂模組 P:樹脂材料 R1~R18:基準比例 S1~S9:步驟 T1~T18:區塊 W1:成形前的基板 W2:基板(樹脂成形品) X1:臨限值(第一臨限值) X2:臨限值(第二臨限值) 1: Supply mechanism 2: Storage unit 3: Loading unit 4: Transport mechanism 5: Molding device 6: Moving platform 7: Storage unit 8: Supply mechanism 9: Transport mechanism 10: Control unit 12: Memory unit 14: User interface unit 15: Program 16: Storage medium 20: Camera unit 21: Camera module 22: Light source 50: Molding die 51: Lower die 51A: Cavity 52: Upper die 53: Clamping mechanism 71: Space 72: Frame 73: Film (object) 80: Storage unit 81: Transport path 82: Vibration mechanism 83: Measuring mechanism 85: Spray nozzle 100: Resin molding device A1: Shooting range A2: Area C1-C18: Occupancy ratio M1: Main unit module M2: Molding module M3: Resin module P: Resin material R1-R18: Reference ratio S1-S9: Steps T1-T18: Blocks W1: Substrate before molding W2: Substrate (resin molded product) X1: Threshold value (first threshold value) X2: Threshold value (second threshold value)

圖1是示意性地表示樹脂成形裝置的平面圖。 圖2是示意性地表示樹脂材料的供給機構的周圍的側方剖面圖。 圖3是用於說明拍攝部的拍攝狀態的圖。 圖4是表示樹脂成形裝置的動作流程的流程圖。 圖5是用於說明在圖像內設定的區塊的圖。 圖6是對佔有比例及基準比例的圖表進行比較的圖。 圖7是對佔有比例及基準比例的圖表進行比較的另一圖。 Figure 1 is a schematic plan view of a resin molding apparatus. Figure 2 is a schematic side cross-sectional view of the resin material supply mechanism and its surroundings. Figure 3 illustrates the imaging state of the imaging unit. Figure 4 is a flow chart showing the operational flow of the resin molding apparatus. Figure 5 illustrates the blocks set within an image. Figure 6 compares a graph showing an occupation ratio with a reference ratio. Figure 7 is another diagram comparing a graph showing an occupation ratio with a reference ratio.

1:供給機構 1: Supply organization

2:收納部 2: Storage area

3:載置部 3: Loading part

4:搬送機構 4:Transportation mechanism

5:成形裝置 5: Forming device

6:移動平台 6: Mobile Platform

7:收容部 7: Containment Department

8:供給機構 8: Supply Agency

9:搬送機構 9:Transportation mechanism

10:控制部 10: Control Department

12:記憶部 12: Memory

14:用戶介面機器 14: User Interface Machine

15:程式 15: Program

16:記憶媒體 16: Memory Media

20:拍攝部 20: Photography Department

50:成形模具 50: Forming mold

51:下模 51: Lower mold

51A:模腔 51A: Mold cavity

52:上模 52: Upper mold

53:鎖模機構 53: Clamping mechanism

71:空間 71: Space

100:樹脂成形裝置 100: Resin forming device

M1:主機模組 M1: Host module

M2:模塑模組 M2: Molded module

M3:樹脂模組 M3: Resin module

P:樹脂材料 P: Resin material

W1:成形前的基板 W1: Substrate before molding

W2:基板(樹脂成形品) W2: Substrate (resin molded product)

Claims (10)

一種樹脂成形裝置,包括:拍攝部,拍攝被供給至對象物上的樹脂材料的圖像;成形機構,使用被供給至所述對象物上的所述樹脂材料來進行樹脂成形品的成形;以及控制部,獲取所述圖像,控制所述成形機構的動作,所述控制部算出在所述圖像內所含的多個區塊的各者中,存在所述樹脂材料的區域或不存在所述樹脂材料的區域所佔的佔有比例,基於對所述多個區塊的各者算出的多個佔有比例與對所述多個區塊的各者預先設定的多個基準比例的類似度,來判定可否藉由所述成形機構而使用所述樹脂材料進行所述成形。A resin forming device includes: a camera that captures an image of a resin material supplied to an object; a forming mechanism that uses the resin material supplied to the object to form a resin molded product; and a control unit that obtains the image and controls the operation of the forming mechanism, wherein the control unit calculates the occupancy ratio of an area containing the resin material or an area not containing the resin material in each of a plurality of blocks contained in the image, and determines whether the resin material can be used by the forming mechanism to perform the forming based on the similarity between the plurality of occupancy ratios calculated for each of the plurality of blocks and a plurality of reference ratios preset for each of the plurality of blocks. 如請求項1所述的樹脂成形裝置,其中所述控制部對所述圖像進行二值化,算出各區塊中所含的、藉由所述二值化而分配有第一值及第二值中的所述第一值的畫素數的比例,以作為所述佔有比例。The resin molding device according to claim 1, wherein the control unit binarizes the image and calculates the ratio of the number of pixels in each block to which the first value is assigned by the binarization, out of the first value and the second value, as the occupation ratio. 如請求項2所述的樹脂成形裝置,其中所述控制部基於用戶的輸入來設定被用於所述二值化的第一臨限值。The resin molding device as described in claim 2, wherein the control unit sets the first threshold value used for the binarization based on user input. 如請求項1至請求項3中任一項所述的樹脂成形裝置,其中所述控制部算出所述類似度,在所述類似度為第二臨限值以上的情況下,使所述成形機構進行所述成形。The resin molding device according to any one of claims 1 to 3, wherein the control unit calculates the similarity and causes the molding mechanism to perform the molding when the similarity is equal to or greater than a second threshold value. 如請求項4所述的樹脂成形裝置,其中所述控制部基於用戶的輸入來設定所述第二臨限值。The resin forming device as described in claim 4, wherein the control unit sets the second threshold value based on user input. 如請求項1至請求項3中任一項所述的樹脂成形裝置,其中所述控制部基於用戶的輸入來設定所述多個基準比例。The resin forming device as described in any one of claim 1 to claim 3, wherein the control unit sets the multiple reference ratios based on user input. 如請求項1至請求項3中任一項所述的樹脂成形裝置,其中所述類似度為相關係數或決定係數。A resin forming device as described in any one of claim 1 to claim 3, wherein the similarity is a correlation coefficient or a determination coefficient. 如請求項1至請求項3中任一項所述的樹脂成形裝置,其中所述拍攝部對被供給至配置於所述對象物上的矩形形狀的框體內的所述樹脂材料進行拍攝,所述多個區塊是在所述框體內呈格柵狀規定的區域。A resin molding device as described in any one of claims 1 to 3, wherein the photographing unit photographs the resin material supplied into a rectangular frame arranged on the object, and the multiple blocks are areas defined in a grid shape within the frame. 一種樹脂成形品的製造方法,使用如請求項1至請求項8中任一項所述的樹脂成形裝置,所述樹脂成形品的製造方法包括下述步驟:在成形模具內配置所述樹脂材料;以及進行配置有所述樹脂材料的所述成形模具的鎖模。A method for manufacturing a resin molded product, using a resin molding device as described in any one of claims 1 to 8, the method for manufacturing a resin molded product comprising the following steps: arranging the resin material in a molding die; and clamping the molding die in which the resin material is arranged. 一種電腦程式產品,使連接於進行樹脂成形品的成形的成形機構的電腦執行下述步驟:獲取被供給至對象物上的樹脂材料的圖像;算出在所述圖像內所含的多個區塊的各者中,存在所述樹脂材料的區域或不存在所述樹脂材料的區域所佔的佔有比例;以及基於對所述多個區塊的各者算出的多個佔有比例與對所述多個區塊的各者預先設定的多個基準比例的類似度,來判定可否藉由所述成形機構而使用所述樹脂材料進行所述成形。A computer program product causes a computer connected to a molding mechanism that performs molding of a resin molded product to execute the following steps: obtaining an image of a resin material supplied to an object; calculating the proportion of areas where the resin material is present or absent in each of a plurality of blocks contained in the image; and determining whether the molding mechanism can perform molding using the resin material based on the similarity between the plurality of proportions calculated for each of the plurality of blocks and a plurality of pre-set reference proportions for each of the plurality of blocks.
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