TWI894952B - Optical detection apparatus in one-shot mode - Google Patents
Optical detection apparatus in one-shot modeInfo
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- TWI894952B TWI894952B TW113117115A TW113117115A TWI894952B TW I894952 B TWI894952 B TW I894952B TW 113117115 A TW113117115 A TW 113117115A TW 113117115 A TW113117115 A TW 113117115A TW I894952 B TWI894952 B TW I894952B
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Abstract
Description
本發明涉及一種光學檢測設備,尤其涉及一種單站式光學檢測設備。 The present invention relates to an optical inspection device, and more particularly to a single-station optical inspection device.
現有光學檢測設備大多是採用多站式架構來分別對料片的多個側面進行檢測,因而所述料片的整個檢測流程需要耗費較長的時間,並且採用多站式架構的現有光學檢測設備也需佔用較大的空間。於是,本發明人認為上述缺陷可改善,乃特潛心研究並配合科學原理的運用,終於提出一種設計合理且有效改善上述缺陷的本發明。 Most existing optical inspection equipment utilizes a multi-station configuration to inspect multiple sides of a web separately. Consequently, the entire inspection process takes a long time and requires a large amount of space. The inventors, believing these deficiencies can be addressed, conducted intensive research and applied scientific principles to develop the present invention, which has a rational design and effectively addresses these deficiencies.
本發明實施例在於提供一種單站式光學檢測設備,其能有效地改善現有光學檢測設備所可能產生的缺陷。 An embodiment of the present invention provides a single-station optical inspection device that can effectively improve the defects that may occur in existing optical inspection equipment.
本發明實施例公開一種單站式光學檢測設備,其用於檢測一料片的兩個第一側面與兩個第二側面,所述單站式光學檢測設備包括:一承載基座,其包含有:一支架;及一檢測腔體,相連於所述支架並圍繞定義有一配置空間;其中,所述檢測腔體具有用以供所述料片設置的一置物區、及連通於所述配置空間的一第一透光區與一第二透光區;其中,所述置物區與所述第一透光區沿一第一方向配置,而所述第二透光區則配置於垂直所述第一 方向的一第二方向之上;其中,兩個所述第一側面沿所述第二方向位於所述料片的相反兩側,兩個所述第二側面沿垂直所述第一方向與所述第二方向的一第三方向位於所述料片的相反另兩側;一第一檢測模組,其包含:一第一光接收單元,安裝於所述支架且沿所述第一方向面向所述第一透光區;兩個第一光源,面向所述置物區配置;其中,兩個所述第一光源能用以分別朝向兩個所述第一側面發出兩道第一光線;及一第一光傳輸組件,位於所述配置空間之內並定義有兩條第一光路徑,其各由所述配置空間穿過所述第一透光區而抵達所述第一光接收單元;其中,所述第一光傳輸組件能用以將自兩個所述第一側面反射的兩道所述第一光線分別沿兩條所述第一光路徑傳輸至所述第一光接收單元;以及一第二檢測模組,其包含:一第二光接收單元,安裝於所述支架且沿所述第二方向面向所述第二透光區;兩個第二光源,面向所述置物區配置;其中,兩個所述第二光源能用以分別朝向兩個所述第二側面發出兩道第二光線;及一第二光傳輸組件,位於所述配置空間之內並定義有兩條第二光路徑,其各由所述配置空間穿過所述第二透光區而抵達所述第二光接收單元;其中,兩條所述第二光路徑位於兩個所述第一光路徑的外側且彼此未相交;其中,所述第二光傳輸組件能用以將自兩個所述第二側面反射的兩道所述第二光線分別沿兩條所述第二光路徑傳輸至所述第二光接收單元。 The present invention discloses a single-station optical inspection device for inspecting two first sides and two second sides of a web. The single-station optical inspection device comprises: a supporting base including: a bracket; and a detection cavity connected to the bracket and defining a configuration space around the bracket; wherein the detection cavity has a placement area for the web to be placed, and a first light-transmitting area and a second light-transmitting area connected to the configuration space; wherein the placement area and the first light-transmitting area are arranged along a first direction, and the second light-transmitting area is arranged perpendicular to the placement area. The first direction is along a second direction; wherein the two first sides are located on opposite sides of the sheet along the second direction, and the two second sides are located on opposite other sides of the sheet along a third direction perpendicular to the first and second directions; a first detection module comprising: a first light receiving unit mounted on the bracket and facing the first light-transmitting area along the first direction; two first light sources disposed facing the storage area; wherein the two first light sources are capable of emitting two first light beams toward the two first sides, respectively; and ... and a first detection module comprising: a first light receiving unit mounted on the bracket and facing the first light-transmitting area along the first direction; and two first light sources disposed facing the storage area; wherein the two first light sources are capable of emitting two first light beams toward the two first sides, respectively. A light transmission component is located in the configuration space and defines two first light paths, each of which passes through the first light-transmitting area from the configuration space to reach the first light receiving unit; wherein the first light transmission component can be used to transmit the two first light rays reflected from the two first side surfaces along the two first light paths to the first light receiving unit; and a second detection module, which includes: a second light receiving unit, mounted on the bracket and facing the second light-transmitting area along the second direction; two second light sources, arranged facing the storage area; wherein, The two second light sources are configured to emit two second light beams toward the two second side surfaces, respectively. A second light transmission assembly is located within the configuration space and defines two second light paths, each of which passes through the second light-transmitting region from the configuration space to the second light receiving unit. The two second light paths are located outside the two first light paths and do not intersect with each other. The second light transmission assembly is configured to transmit the two second light beams reflected from the two second side surfaces along the two second light paths to the second light receiving unit, respectively.
本發明實施例也公開一種單站式光學檢測設備,其用於檢測一料片的兩個第一側面與兩個第二側面,所述單站式光學檢測設備包括:一承載基座,其定義有一配置空間,並且所述承載基座具有用以供所述料片設置的一置物區、及連通於所述配置空間的一第一透光區與一第二透光區;一第一檢測模組,其包含:一第一光接收單元,安裝於所述承載基座且面向所述第一透光區;兩個第一光源,面向所述置物區配置;其中,兩個所述第一光 源能用以分別朝向兩個所述第一側面發出兩道第一光線;及一第一光傳輸組件,位於所述配置空間之內並定義有兩條第一光路徑,其各由所述配置空間穿過所述第一透光區而抵達所述第一光接收單元;其中,所述第一光傳輸組件能用以將自兩個所述第一側面反射的兩道所述第一光線分別沿兩條所述第一光路徑傳輸至所述第一光接收單元;以及一第二檢測模組,其包含:一第二光接收單元,安裝於所述承載基座且面向所述第二透光區;兩個第二光源,面向所述置物區配置;其中,兩個所述第二光源能用以分別朝向兩個所述第二側面發出兩道第二光線;及一第二光傳輸組件,位於所述配置空間之內並定義有兩條第二光路徑,其各由所述配置空間穿過所述第二透光區而抵達所述第二光接收單元;其中,兩條所述第二光路徑位於兩個所述第一光路徑的外側且彼此未相交;其中,所述第二光傳輸組件能用以將自兩個所述第二側面反射的兩道所述第二光線分別沿兩條所述第二光路徑傳輸至所述第二光接收單元。 The present invention also discloses a single-station optical inspection device for inspecting two first sides and two second sides of a web. The single-station optical inspection device comprises: a supporting base defining a configuration space, wherein the supporting base has a storage area for the web, and a first light-transmitting area and a second light-transmitting area connected to the configuration space; a first inspection module comprising: a first light receiving unit mounted on the first side of the web; The supporting base faces the first light-transmitting area; two first light sources are disposed facing the storage area; wherein the two first light sources are configured to emit two first light beams toward the two first sides, respectively; and a first light transmission component is disposed within the configuration space and defines two first light paths, each of which passes from the configuration space through the first light-transmitting area to the first light receiving unit; wherein the first light transmission component is configured to transmit The two first light rays reflected from the two first side surfaces are respectively transmitted along two first optical paths to the first light receiving unit; and a second detection module comprises: a second light receiving unit mounted on the supporting base and facing the second light-transmitting area; two second light sources disposed facing the storage area; wherein the two second light sources are configured to emit two second light rays toward the two second side surfaces; and a second light transmission assembly disposed within the configuration space and defining two second light paths, each of which passes from the configuration space through the second light-transmitting area to the second light receiving unit; wherein the two second light paths are located outside the two first light paths and do not intersect with each other; wherein the second light transmission assembly is configured to transmit the two second light rays reflected from the two second side surfaces along the two second optical paths to the second light receiving unit.
綜上所述,本發明實施例所公開的單站式光學檢測設備,其通過所述第一檢測模組與所述第二檢測模組妥善地搭配於所述承載基座,以實現兩條所述第二光路徑位於兩個所述第一光路徑外側且彼此未相交的光路配置,進而能夠一次性地對所述料片的兩個所述第一側面與兩個所述第二側面同步進行光學檢測,據以降低檢測流程的耗時、更有助於縮小檢測設備的整體體積。 In summary, the single-station optical inspection equipment disclosed in the embodiments of the present invention utilizes the first inspection module and the second inspection module to be properly aligned with the support base, thereby achieving an optical path configuration in which the two second optical paths are located outside the two first optical paths and do not intersect with each other. This allows for simultaneous optical inspection of the two first sides and two second sides of the web at once, thereby reducing the time required for the inspection process and further helping to reduce the overall size of the inspection equipment.
為能更進一步瞭解本發明的特徵及技術內容,請參閱以下有關本發明的詳細說明與附圖,但是此等說明與附圖僅用來說明本發明,而非對本發明的保護範圍作任何的限制。 To further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, such description and drawings are only used to illustrate the present invention and are not intended to limit the scope of protection of the present invention.
100:單站式光學檢測設備 100: Single-station optical testing equipment
1:第一檢測模組 1: First detection module
11:第一光接收單元 11: First light receiving unit
111:第一透鏡組 111: First lens group
112:第一相機 112: First Camera
113:第一線性滑軌 113: First linear slide rail
12:第一光源 12: First Light Source
13:第一光傳輸組件 13: First optical transmission component
131:第一分光鏡 131: First Spectroscope
132:第一前段反射鏡 132: First front reflector
133:第一後段反射鏡 133: First rear reflector
2:第二檢測模組 2: Second detection module
21:第二光接收單元 21: Second light receiving unit
211:第二透鏡組 211: Second lens group
212:第二相機 212: Second Camera
213:第二線性滑軌 213: Second linear slide rail
22:第二光源 22: Second light source
23:第二光傳輸組件 23: Second optical transmission component
231:第二分光鏡 231: Second Spectroscope
232:第二前段反射鏡 232: Second front reflector
233:第二中段反射鏡 233: Second mid-section reflector
234:第二後段反射鏡 234: Second rear reflector
3:承載基座 3: Supporting base
31:支架 31: Bracket
32:檢測腔體 32: Detection chamber
321:配置空間 321: Configuration Space
322:置物區 322: Storage Area
323:第一透光區 323: First light-transmitting area
324:第二透光區 324: Second light-transmitting area
325:隔板 325: Partition
D1:第一方向 D1: First Direction
D2:第二方向 D2: Second Direction
D3:第三方向 D3: Third direction
L1:第一光線 L1: First Light
L2:第二光線 L2: Second ray
P1:第一光路徑 P1: First optical path
P2:第二光路徑 P2: Second optical path
σ1:銳角 σ1: sharp angle
σ2:銳角 σ2: sharp angle
R1:第一高度區塊 R1: First height block
R2:第二高度區塊 R2: Second height block
R3:第三高度區塊 R3: Third height block
M:料片 M: Sheet
M1:第一側面 M1: First side
M2:第二側面 M2: Second side
圖1為本發明實施例的單站式光學檢測設備的立體示意圖。 Figure 1 is a schematic three-dimensional diagram of a single-station optical inspection device according to an embodiment of the present invention.
圖2為圖1另一視角的立體示意圖。 Figure 2 is a three-dimensional diagram of Figure 1 from another perspective.
圖3為本發明實施例的單站式光學檢測設備的局部立體剖視示意圖(一)。 Figure 3 is a partial three-dimensional cross-sectional schematic diagram of a single-station optical inspection device according to an embodiment of the present invention (I).
圖4為本發明實施例的單站式光學檢測設備的局部立體剖視示意圖(二)。 Figure 4 is a partial three-dimensional cross-sectional schematic diagram of a single-station optical inspection device according to an embodiment of the present invention (Part 2).
圖5為圖1的俯視示意圖。 Figure 5 is a schematic top view of Figure 1.
圖6為圖5沿剖線VI-VI的剖視示意圖。 Figure 6 is a schematic cross-sectional view taken along line VI-VI of Figure 5.
圖7為圖6的局部放大示意圖。 Figure 7 is a partially enlarged schematic diagram of Figure 6.
圖8為圖5沿剖線VIII-VIII的剖視示意圖。 Figure 8 is a schematic cross-sectional view taken along line VIII-VIII of Figure 5.
圖9為圖8的局部放大示意圖。 Figure 9 is a partially enlarged schematic diagram of Figure 8.
以下是通過特定的具體實施例來說明本發明所公開有關“單站式光學檢測設備”的實施方式,本領域技術人員可由本說明書所公開的內容瞭解本發明的優點與效果。本發明可通過其他不同的具體實施例加以施行或應用,本說明書中的各項細節也可基於不同觀點與應用,在不悖離本發明的構思下進行各種修改與變更。另外,本發明的附圖僅為簡單示意說明,並非依實際尺寸的描繪,事先聲明。以下的實施方式將進一步詳細說明本發明的相關技術內容,但所公開的內容並非用以限制本發明的保護範圍。 The following describes the implementation of the "single-station optical inspection equipment" disclosed in this invention through specific embodiments. Those skilled in the art will appreciate the advantages and benefits of this invention from the disclosure herein. This invention may be implemented or applied through various other specific embodiments, and the details herein may be modified and altered based on different perspectives and applications without departing from the spirit of this invention. Furthermore, the accompanying figures are for schematic illustration only and are not intended to be drawn to actual size. This is to be noted. The following embodiments further illustrate the relevant technical aspects of this invention, but the disclosure is not intended to limit the scope of protection of this invention.
應當可以理解的是,雖然本文中可能會使用到“第一”、“第二”、“第三”等術語來描述各種元件或者信號,但這些元件或者信號不應受這些術語的限制。這些術語主要是用以區分一元件與另一元件,或者一信號與另一信號。另外,本文中所使用的術語“或”,應視實際情況可能包括 相關聯的列出項目中的任一個或者多個的組合。 It should be understood that while terms such as "first," "second," and "third" may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term "or" as used herein may include any one or more combinations of the associated listed items, as appropriate.
請參閱圖1至圖9所示,其為本發明的一實施例。如圖1至圖4所示,本實施例公開一種單站式光學檢測設備100,其用於檢測一料片M的兩個第一側面M1與兩個第二側面M2。於本實施例中,所述料片M的呈矩形;也就是說,所述料片M的環側面是以僅包含兩個所述第一側面M1與兩個所述第二側面M2來說明,但本發明不以此為限。再者,所述單站式光學檢測設備100是一次性地檢測所述料片M的所述環側面、並排除多站式檢測的機構。 Please refer to Figures 1 to 9, which illustrate an embodiment of the present invention. As shown in Figures 1 to 4, this embodiment discloses a single-station optical inspection apparatus 100 for inspecting two first side surfaces M1 and two second side surfaces M2 of a web M. In this embodiment, the web M is rectangular; that is, the circumferential side surface of the web M is described as comprising only the two first side surfaces M1 and the two second side surfaces M2, but the present invention is not limited to this. Furthermore, the single-station optical inspection apparatus 100 inspects the circumferential side surface of the web M at once, eliminating the need for multi-station inspection.
如圖4至圖6所示,所述單站式光學檢測設備100包含一承載基座3、安裝於所述承載基座3的一第一檢測模組1、及安裝於所述承載基座3的一第二檢測模組2。其中,所述承載基座3包含有一支架31、及相連於所述支架31的一檢測腔體32,並且所述承載基座3於本實施例中主要是以功能性進行區分,並且所述檢測腔體32的底部相連於所述支架31的一側頂部。 As shown in Figures 4 to 6, the single-station optical inspection equipment 100 includes a supporting base 3, a first inspection module 1 mounted on the supporting base 3, and a second inspection module 2 mounted on the supporting base 3. The supporting base 3 includes a bracket 31 and an inspection chamber 32 connected to the bracket 31. In this embodiment, the supporting base 3 is primarily functionally differentiated, and the bottom of the inspection chamber 32 is connected to a side top portion of the bracket 31.
進一步地說,所述檢測腔體32大致呈中空狀的方形框體、並圍繞定義有一配置空間321。其中,所述檢測腔體32具有用以供所述料片M設置的一置物區322、及連通於所述配置空間321的一第一透光區323與一第二透光區324。再者,除了所述置物區322、所述第一透光區323、及所述第二透光區324之外,所述檢測腔體32較佳是能夠遮蔽光線,以避免外部光線進入所述配置空間321而影響檢測結果。 Specifically, the detection chamber 32 is a generally hollow rectangular frame, defining a surrounding space 321. The detection chamber 32 includes a storage area 322 for placing the material M, and a first light-transmitting area 323 and a second light-transmitting area 324 connected to the space 321. Furthermore, with the exception of the storage area 322, the first light-transmitting area 323, and the second light-transmitting area 324, the detection chamber 32 is preferably light-shielded to prevent external light from entering the space 321 and affecting the detection results.
於本實施例中,所述檢測腔體32的頂部呈開口狀,所述置物區322是大致位於所述檢測腔體32的所述頂部,所述第一透光區323是位於所述檢測腔體32底部的一開口,而所述第二透光區324則是位於所述檢測腔體32側邊且鄰近所述支架31的另一開口,但本發明不受限於此。舉例來說,於本發明未繪示的其他實施例中,所述第一透光區323及/或所述第二透光區324也可以是一透光構件。 In this embodiment, the top of the detection chamber 32 is open. The storage area 322 is located approximately at the top of the detection chamber 32. The first light-transmitting area 323 is an opening located at the bottom of the detection chamber 32. The second light-transmitting area 324 is another opening located on the side of the detection chamber 32 and adjacent to the bracket 31. However, the present invention is not limited to this. For example, in other embodiments not shown in the present invention, the first light-transmitting area 323 and/or the second light-transmitting area 324 may also be a light-transmitting component.
換個角度來說,所述置物區322與所述第一透光區323沿一第一方向D1配置,而所述第二透光區324則配置於垂直所述第一方向D1的一第二方向D2之上。再者,當所述料片M設置於所述置物區322時,兩個所述第一側面M1沿所述第二方向D2位於所述料片M的相反兩側,兩個所述第二側面M2沿垂直所述第一方向D1與所述第二方向D2的一第三方向D3位於所述料片M的相反另兩側。 To put it another way, the storage area 322 and the first light-transmitting area 323 are arranged along a first direction D1, while the second light-transmitting area 324 is arranged in a second direction D2 perpendicular to the first direction D1. Furthermore, when the material M is placed in the storage area 322, the two first side surfaces M1 are located on opposite sides of the material M along the second direction D2, and the two second side surfaces M2 are located on opposite sides of the material M along a third direction D3 perpendicular to the first and second directions D1 and D2.
此外,所述檢測腔體32較佳是進一步包含有位於所述配置空間321之內的兩個隔板325,並且每個所述隔板325垂直於所述第三方向D3。其中,兩個所述隔板325彼此間隔地設置,並且所述置物區322於本實施例是位於兩個所述隔板325的頂部,但本發明不受限於此。 Furthermore, the detection chamber 32 preferably further includes two partitions 325 located within the configuration space 321, with each partition 325 being perpendicular to the third direction D3. The two partitions 325 are spaced apart from each other, and the storage area 322 is located on top of the two partitions 325 in this embodiment, but the present invention is not limited thereto.
如圖4、圖6、及圖7所示,所述第一檢測模組1包含安裝於所述支架31的一第一光接收單元11、面向所述置物區322配置的兩個第一光源12、及位於所述配置空間321之內的一第一光傳輸組件13。其中,所述第一光接收單元11沿所述第一方向D1面向所述第一透光區323,並且兩個所述第一光源12能用以分別朝向兩個所述第一側面M1發出兩道第一光線L1,而所述第一光傳輸組件13定義有兩條第一光路徑P1,其各由所述配置空間321穿過所述第一透光區323而抵達所述第一光接收單元11。也就是說,所述第一光傳輸組件13能用以將自兩個所述第一側面M1反射的兩道所述第一光線L1分別沿兩條所述第一光路徑P1傳輸至所述第一光接收單元11。 As shown in Figures 4, 6, and 7, the first detection module 1 includes a first light receiving unit 11 mounted on the bracket 31, two first light sources 12 arranged facing the storage area 322, and a first light transmission assembly 13 located within the arrangement space 321. The first light receiving unit 11 faces the first light-transmitting area 323 along the first direction D1, and the two first light sources 12 are configured to emit two first light beams L1 toward the two first side surfaces M1, respectively. The first light transmission assembly 13 defines two first optical paths P1, each of which travels from the arrangement space 321 through the first light-transmitting area 323 to reach the first light receiving unit 11. In other words, the first light transmission assembly 13 is configured to transmit the two first light beams L1 reflected from the two first side surfaces M1 along the two first optical paths P1 to the first light receiving unit 11.
再者,如圖4、圖8、及圖9所示,所述第二檢測模組2包含安裝於所述支架31的一第二光接收單元21、面向所述置物區322配置的兩個第二光源22、及位於所述配置空間321之內的一第二光傳輸組件23。其中,所述第二光接收單元21沿所述第二方向D2面向所述第二透光區324,並且兩個所述第二光源22能用以分別朝向兩個所述第二側面M2發出兩道第二光線L2,而所述第 二光傳輸組件23定義有兩條第二光路徑P2,其各由所述配置空間321穿過所述第二透光區324而抵達所述第二光接收單元21。也就是說,所述第二光傳輸組件23能用以將自兩個所述第二側面M2反射的兩道所述第二光線L2分別沿兩條所述第二光路徑P2傳輸至所述第二光接收單元21。 Furthermore, as shown in Figures 4, 8, and 9, the second detection module 2 includes a second light receiving unit 21 mounted on the bracket 31, two second light sources 22 arranged facing the storage area 322, and a second light transmission assembly 23 located within the arrangement space 321. The second light receiving unit 21 faces the second light-transmitting area 324 along the second direction D2. The two second light sources 22 are configured to emit two second light beams L2 toward the two second side surfaces M2, respectively. The second light transmission assembly 23 defines two second optical paths P2, each of which travels from the arrangement space 321 through the second light-transmitting area 324 to the second light receiving unit 21. In other words, the second optical transmission component 23 can be used to transmit the two second light rays L2 reflected from the two second side surfaces M2 along two second optical paths P2 to the second light receiving unit 21.
需注意的是,兩條所述第二光路徑P2是限定在位於兩個所述第一光路徑P1的外側且彼此未相交,並且兩條所述第一光路徑P1於本實施例中主要是沿著所述第一方向D1與所述第二方向D2進行規劃,而兩條所述第二光路徑P2則是大致沿著所述檢測腔體32的內壁面規劃,據以使得兩條所述第一光路徑P1與兩個所述第二光路徑P2能夠在有限的所述配置空間321之內彼此不相互干擾。 It should be noted that the two second optical paths P2 are defined outside the two first optical paths P1 and do not intersect with each other. In this embodiment, the two first optical paths P1 are primarily arranged along the first direction D1 and the second direction D2, while the two second optical paths P2 are generally arranged along the inner wall of the detection cavity 32. This ensures that the two first optical paths P1 and the two second optical paths P2 do not interfere with each other within the limited configuration space 321.
此外,於本實施例中,所述檢測腔體32還能進一步通過兩個所述隔板325的配置,以有效地使兩個所述第一光路徑P1隔開於兩條所述第二光路徑P2,但不以此為限。舉例來說,於本發明未繪示的其他實施例中,兩個所述隔板325也可依據實際需求而加以省略或是以其他構件取代。 Furthermore, in this embodiment, the detection chamber 32 can further utilize two partitions 325 to effectively separate the two first optical paths P1 from the two second optical paths P2, but the present invention is not limited thereto. For example, in other embodiments not shown, the two partitions 325 can be omitted or replaced with other components based on actual needs.
依上所述,所述單站式光學檢測設備100於本實施例之中通過所述第一檢測模組1與所述第二檢測模組2妥善地搭配於所述承載基座3,以實現兩條所述第二光路徑P2位於兩個所述第一光路徑P1外側且彼此未相交的光路配置,進而能夠一次性地對所述料片M的兩個所述第一側面M1與兩個所述第二側面M2同步進行光學檢測,據以降低檢測流程的耗時、更有助於縮小檢測設備的整體體積。 As described above, in this embodiment, the single-station optical inspection equipment 100 utilizes the first inspection module 1 and the second inspection module 2 to be properly aligned with the supporting base 3, thereby achieving an optical path configuration in which the two second optical paths P2 are located outside the two first optical paths P1 and do not intersect with each other. This allows simultaneous optical inspection of the two first side surfaces M1 and the two second side surfaces M2 of the web M at once, thereby reducing the time required for the inspection process and further helping to reduce the overall size of the inspection equipment.
需額外說明的是,所述單站式光學檢測設備100在符合上述條件的情況之下,所述單站式光學檢測設備100的具體構件配置可依據實際需求而加以調整變化。舉例來說,所述承載基座3只要符合形成有一配置空間321,並且所述承載基座3具有用以供所述料片M設置的所述置物區322、及連通於所 述配置空間321的所述第一透光區323與所述第二透光區324,則所述承載基座3的構造可以不同於本實施例的圖式所載。此外,為便於理解本實施例,下述以所述第一檢測模組1與所述第二檢測模組2兩者的其中一種較佳構件配置方式來說明,本發明不以此為限。 It should be noted that, provided the single-station optical inspection device 100 meets the aforementioned requirements, its specific component configuration can be adjusted based on actual needs. For example, as long as the support base 3 forms a configuration space 321, and includes the storage area 322 for the web M, and the first and second light-transmitting areas 323 and 324 connected to the configuration space 321, the structure of the support base 3 can differ from that shown in the figures of this embodiment. Furthermore, to facilitate understanding of this embodiment, the following description will use one preferred component configuration for both the first inspection module 1 and the second inspection module 2; the present invention is not limited to this configuration.
如圖1、圖3、圖7、及圖9所示,所述第一光接收單元11包含面向所述第一透光區323的一第一透鏡組111、安裝固定於所述第一透鏡組111的一第一相機112、及一第一線性滑軌113。其中,所述第一相機112是位於遠離所述第一透光區323的所述第一透鏡組111一側,並且所述第一透鏡組111與所述第一相機112通過所述第一線性滑軌113而可移動地固定於所述支架31。也就是說,所述第一透鏡組111與所述第一相機112通過所述第一線性滑軌113而能夠相對於所述第一透光區323沿所述第一方向D1移動。 As shown in Figures 1, 3, 7, and 9, the first light receiving unit 11 includes a first lens assembly 111 facing the first light-transmitting area 323, a first camera 112 mounted and fixed to the first lens assembly 111, and a first linear slide 113. The first camera 112 is located on a side of the first lens assembly 111 away from the first light-transmitting area 323, and the first lens assembly 111 and the first camera 112 are movably fixed to the bracket 31 via the first linear slide 113. In other words, the first lens assembly 111 and the first camera 112 can move relative to the first light-transmitting area 323 along the first direction D1 via the first linear slide 113.
兩個所述第一光源12安裝於所述檢測腔體32,並且兩個所述第一光源12沿所述第二方向D2分別位於所述置物區322的相反兩側且彼此相向。也就是說,兩個所述第一光源12是與所述料片M的兩個所述第一側面M1沿所述第二方向D2排列。 Two first light sources 12 are mounted in the detection chamber 32 and are located on opposite sides of the storage area 322 along the second direction D2, facing each other. In other words, the two first light sources 12 are aligned with the two first sides M1 of the web M along the second direction D2.
所述第一光傳輸組件13於本實施例中包含有兩個第一分光鏡131、兩個第一前段反射鏡132、及兩個第一後段反射鏡133。其中,兩個所述第一分光鏡131、兩個所述第一前段反射鏡132、及兩個所述第一後段反射鏡133皆呈長形(如:長方形)且共同定義出彼此獨立且未相交的兩條所述第一光路徑P1。也就是說,在可以定義出能將自兩個所述第一側面M1反射的兩道所述第一光線L1傳輸至所述第一光接收單元11的兩條所述第一光路徑P1的前提之下,所述第一光傳輸組件13的具體構件配置可依實際需求加以調整變化。 In this embodiment, the first optical transmission assembly 13 includes two first beam splitters 131, two first front-end reflectors 132, and two first rear-end reflectors 133. The two first beam splitters 131, the two first front-end reflectors 132, and the two first rear-end reflectors 133 are all elongated (e.g., rectangular) and together define two independent, non-intersecting first optical paths P1. In other words, as long as two first optical paths P1 are defined that transmit the two first light rays L1 reflected from the two first side surfaces M1 to the first light receiving unit 11, the specific component configuration of the first optical transmission assembly 13 can be adjusted based on actual needs.
進一步地說,每條所述第一光路徑P1是由一個所述第一分光鏡131、一個所述第一前段反射鏡132、及一個所述第一後段反射鏡133所定義, 並且兩條所述第一光路徑P1(或其相對應的構件)於本實施例中較佳是呈鏡像對稱配置,但本發明不以此為限。再者,有兩個所述第一分光鏡131、兩個所述第一前段反射鏡132、及兩個所述第一後段反射鏡133各自的長軸方向於本實施例中是以平行於所述第三方向D3來說明,但不受限於此。 Specifically, each first optical path P1 is defined by one first beam splitter 131, one first front-end reflector 132, and one first rear-end reflector 133. In this embodiment, the two first optical paths P1 (or their corresponding components) are preferably arranged in mirror symmetry, but the present invention is not limited thereto. Furthermore, in this embodiment, the long axes of the two first beam splitters 131, the two first front-end reflectors 132, and the two first rear-end reflectors 133 are illustrated as being parallel to the third direction D3, but the present invention is not limited thereto.
兩個所述第一分光鏡131分別鄰近於兩個所述第一光源12、並位於兩個所述第一光源12之間。也就是說,兩個所述第一光源12與兩個所述第一分光鏡131沿所述第二方向D2排成一列。其中,每個所述第一光源12所發出的所述第一光線L1會有部分(如:40%~60%的所述第一光線L1)沿所述第二方向D2穿過相鄰的所述第一分光鏡131、進而照射於相對應所述第一側面M1。 The two first beam splitters 131 are respectively adjacent to and located between the two first light sources 12. In other words, the two first light sources 12 and the two first beam splitters 131 are arranged in a row along the second direction D2. A portion of the first light L1 emitted by each first light source 12 (e.g., 40%-60%) passes through the adjacent first beam splitter 131 along the second direction D2 and then illuminates the corresponding first side surface M1.
兩個所述第一前段反射鏡132分別鄰近於兩個所述第一分光鏡131、並分別位於兩個所述第一分光鏡131的下方。於本實施例中,每個所述第一分光鏡131的法線方向較佳與相鄰所述第一前段反射鏡132的法線方向彼此垂直相交於所述檢測腔體32之內,並且每個所述第一分光鏡131沿所述第一方向D1所形成的一投影空間,其完全覆蓋相鄰所述第一前段反射鏡132,但本發明不以此為限。 The two first front-stage reflective mirrors 132 are respectively adjacent to and below the two first beam splitters 131. In this embodiment, the normal direction of each first beam splitter 131 preferably intersects perpendicularly with the normal direction of the adjacent first front-stage reflective mirror 132 within the detection chamber 32. Furthermore, the projection space formed by each first beam splitter 131 along the first direction D1 completely covers the adjacent first front-stage reflective mirror 132, but the present invention is not limited to this.
兩個所述第一後段反射鏡133則是位於所述置物區322的下方。於本實施例中,兩個所述第一後段反射鏡133鄰近於所述置物區322,並且兩個所述第一後段反射鏡133彼此相鄰設置,兩個所述第一後段反射鏡133於所述第二方向D2之上的寬度較佳是小於所述料片M於所述第二方向D2之上的寬度,據以集中兩條所述第一光路徑P1,進而利於採用尺寸較小且解析度較高的所述第一相機112。 The two first rear-stage reflective mirrors 133 are located below the storage area 322. In this embodiment, the two first rear-stage reflective mirrors 133 are adjacent to the storage area 322 and are disposed adjacent to each other. The width of the two first rear-stage reflective mirrors 133 in the second direction D2 is preferably smaller than the width of the web M in the second direction D2. This concentrates the two first optical paths P1, thereby facilitating the use of a smaller and higher-resolution first camera 112.
再者,兩個所述第一前段反射鏡132與兩個所述第一後段反射鏡133沿所述第二方向D2排成一列,並且兩個所述第一前段反射鏡132與兩個所 述第一後段反射鏡133較佳是配置於兩個所述隔板325之間。於本實施例中,每個所述第一前段反射鏡132的所述法線方向較佳與相鄰所述第一後段反射鏡133的法線方向彼此平行,並且每個所述第一前段反射鏡132沿所述第二方向D2所形成的一投影空間,其完全覆蓋相鄰所述第一後段反射鏡133,但本發明不以此為限。 Furthermore, the two first front reflectors 132 and the two first rear reflectors 133 are arranged in a row along the second direction D2, and are preferably disposed between the two partitions 325. In this embodiment, the normal direction of each first front reflector 132 is preferably parallel to the normal direction of the adjacent first rear reflector 133, and the projection space formed by each first front reflector 132 along the second direction D2 completely covers the adjacent first rear reflector 133, but the present invention is not limited to this.
所述第二光接收單元21包含面向所述第二透光區324的一第二透鏡組211、安裝固定於所述第二透鏡組211的一第二相機212、及一第二線性滑軌213。其中,所述第二相機212是位於遠離所述第二透光區324的所述第二透鏡組211一側,並且所述第二透鏡組211與所述第二相機212通過所述第二線性滑軌213而可移動地固定於所述支架31。也就是說,所述第二透鏡組211與所述第二相機212通過所述第二線性滑軌213而能夠相對於所述第一透光區323沿所述第二方向D2移動。 The second light receiving unit 21 includes a second lens assembly 211 facing the second light-transmitting area 324, a second camera 212 mounted and fixed to the second lens assembly 211, and a second linear slide 213. The second camera 212 is located on a side of the second lens assembly 211 away from the second light-transmitting area 324. The second lens assembly 211 and the second camera 212 are movably fixed to the bracket 31 via the second linear slide 213. In other words, the second lens assembly 211 and the second camera 212 can move relative to the first light-transmitting area 323 along the second direction D2 via the second linear slide 213.
兩個所述第二光源22安裝於所述檢測腔體32,並且兩個所述第二光源22沿所述第三方向D3分別位於所述置物區322的相反兩側且彼此相向。也就是說,兩個所述第二光源22是與所述料片M的兩個所述第二側面M2沿所述第三方向D3排列。 Two second light sources 22 are mounted in the detection chamber 32 and are located on opposite sides of the storage area 322 along the third direction D3, facing each other. In other words, the two second light sources 22 are aligned with the two second sides M2 of the web M along the third direction D3.
所述第二光傳輸組件23於本實施例中包含有兩個第二分光鏡231、兩個第二前段反射鏡232、兩個第二中段反射鏡233、及兩個第二後段反射鏡234。其中,兩個所述第二分光鏡231、兩個所述第二前段反射鏡232、兩個所述第二中段反射鏡233、及兩個所述第二後段反射鏡234皆呈長形(如:長方形)且共同定義出彼此獨立且未相交的兩條所述第二光路徑P2。也就是說,在可以定義出能將自兩個所述第二側面M2反射的兩道所述第二光線L2傳輸至所述第二光接收單元21的兩條所述第二光路徑P2的前提之下,所述第二光傳輸組件23的具體構件配置可依實際需求加以調整變化。 In this embodiment, the second optical transmission assembly 23 includes two second beam splitters 231, two second front-end reflectors 232, two second middle-end reflectors 233, and two second rear-end reflectors 234. The two second beam splitters 231, the two second front-end reflectors 232, the two second middle-end reflectors 233, and the two second rear-end reflectors 234 are all elongated (e.g., rectangular) and collectively define two independent, non-intersecting second optical paths P2. In other words, as long as two second optical paths P2 are defined that transmit the two second light rays L2 reflected from the two second side surfaces M2 to the second light receiving unit 21, the specific component configuration of the second optical transmission assembly 23 can be adjusted based on actual needs.
進一步地說,每條所述第二光路徑P2是由一個所述第二分光鏡231、一個所述第二前段反射鏡232、一個所述第二中段反射鏡233、及一個所述第一後段反射鏡133所定義,並且兩條所述第二光路徑P2(或其相對應的構件)於本實施例中較佳是呈鏡像對稱配置,但本發明不以此為限。此外,兩個所述第二分光鏡231各自的長軸方向於本實施例中是以平行於所述第二方向D2來說明,而兩個所述第二前段反射鏡232、兩個所述第二中段反射鏡233、及兩個所述第二後段反射鏡234各自的長軸方向於本實施例中則是以平行於所述第一方向D1來說明,但不受限於此。 Specifically, each second optical path P2 is defined by a second beam splitter 231, a second front reflector 232, a second middle reflector 233, and a first rear reflector 133. In this embodiment, the two second optical paths P2 (or their corresponding components) are preferably arranged in mirror symmetry, but the present invention is not limited thereto. Furthermore, in this embodiment, the long axes of the two second beam splitters 231 are described as being parallel to the second direction D2, while the long axes of the two second front reflectors 232, the two second middle reflectors 233, and the two second rear reflectors 234 are described as being parallel to the first direction D1, but the present invention is not limited thereto.
兩個所述第二分光鏡231分別鄰近於兩個所述第二光源22、並位於兩個所述第二光源22之間。也就是說,兩個所述第二光源22與兩個所述第二分光鏡231沿所述第三方向D3排成一列。其中,每個所述第二光源22所發出的所述第二光線L2會有部分(如:40%~60%的所述第二光線L2)沿所述第三方向D3穿過相鄰的所述第二分光鏡231、進而照射於相對應所述第二側面M2。 The two second beam splitters 231 are respectively adjacent to and located between the two second light sources 22. In other words, the two second light sources 22 and the two second beam splitters 231 are arranged in a row along the third direction D3. A portion (e.g., 40% to 60%) of the second light L2 emitted by each second light source 22 passes through the adjacent second beam splitter 231 along the third direction D3 and then illuminates the corresponding second side surface M2.
兩個所述第二前段反射鏡232分別鄰近於兩個所述第二分光鏡231、並分別位於兩個所述第二分光鏡231的下方。於本實施例中,每個所述第二分光鏡231沿所述第一方向D1所形成的一投影空間,其完全覆蓋相鄰所述第二前段反射鏡232,但本發明不以此為限。 The two second front-stage reflective mirrors 232 are respectively adjacent to and below the two second beam splitters 231. In this embodiment, the projection space formed by each second beam splitter 231 along the first direction D1 completely covers the adjacent second front-stage reflective mirror 232, but the present invention is not limited to this.
此外,任一個所述第二分光鏡231及相對應所述第二前段反射鏡232的虛擬延長區域,其彼此相交於所述檢測腔體32之內且構成介於30度~60度的一銳角σ1。 In addition, any of the second beam splitter mirrors 231 and the virtual extension area corresponding to the second front-stage reflective mirror 232 intersect with each other in the detection cavity 32 and form a sharp angle σ1 ranging from 30 degrees to 60 degrees.
兩個所述第二中段反射鏡233分別鄰近於兩個所述第二前段反射鏡232、並分別位於所述第二透光區324的相反兩側,並且兩個所述第二前段反射鏡232與兩個所述第二後段反射鏡234較佳是配置於兩個所述隔板325 的外側。於本實施例中,每個所述第二前段反射鏡232沿所述第二方向D2所形成的一投影空間,其完全覆蓋相鄰所述第二中段反射鏡233,但本發明不以此為限。 The two second middle reflectors 233 are adjacent to the two second front reflectors 232 and located on opposite sides of the second light-transmitting area 324. The two second front reflectors 232 and the two second rear reflectors 234 are preferably disposed outside the two partitions 325. In this embodiment, the projection space formed by each second front reflector 232 along the second direction D2 completely covers the adjacent second middle reflector 233, but the present invention is not limited to this.
此外,任一個所述第二前段反射鏡232及相對應所述第二中段反射鏡233的虛擬延長區域,其彼此相交於所述檢測腔體32之內且構成介於30度~60度的一銳角σ2。也就是說,任一個所述第二分光鏡231、相對應所述第二前段反射鏡232、相對應所述第二中段反射鏡233呈三角狀排列,並且任一個所述第二分光鏡231與相對應所述第二中段反射鏡233的法線方向為彼此垂直相交於所述檢測腔體32之內。 Furthermore, the virtual extension areas of any second front-segment reflector 232 and the corresponding second middle-segment reflector 233 intersect within the detection chamber 32, forming a sharp angle σ2 between 30 and 60 degrees. In other words, any second beam splitter 231, the corresponding second front-segment reflector 232, and the corresponding second middle-segment reflector 233 are arranged in a triangle, and the normals of any second beam splitter 231 and the corresponding second middle-segment reflector 233 intersect perpendicularly within the detection chamber 32.
兩個所述第二後段反射鏡234位於兩個所述第二中段反射鏡233之間、並位於所述第二透光區324。其中,兩個所述第二後段反射鏡234彼此相鄰設置,據以集中兩條所述第二光路徑P2,進而利於採用尺寸較小且解析度較高的所述第二相機212。 The two second rear-stage reflectors 234 are located between the two second middle-stage reflectors 233 and within the second light-transmitting area 324. The two second rear-stage reflectors 234 are positioned adjacent to each other to focus the two second optical paths P2, thereby facilitating the use of a smaller and higher-resolution second camera 212.
再者,兩個所述第二中段反射鏡233與兩個所述第二後段反射鏡234沿所述第三方向D3排成一列。於本實施例中,每個所述第二中段反射鏡233的所述法線方向較佳與相鄰所述第二後段反射鏡234的法線方向彼此平行,並且每個所述第二中段反射鏡233沿所述第三方向D3所形成的一投影空間,其完全覆蓋相鄰所述第二後段反射鏡234,但本發明不以此為限。 Furthermore, the two second middle-segment reflectors 233 and the two second rear-segment reflectors 234 are arranged in a row along the third direction D3. In this embodiment, the normal direction of each second middle-segment reflector 233 is preferably parallel to the normal direction of the adjacent second rear-segment reflector 234, and the projection space formed by each second middle-segment reflector 233 along the third direction D3 completely covers the adjacent second rear-segment reflector 234, but the present invention is not limited to this.
換個角度來說,兩個所述第二前段反射鏡232分別配置於所述檢測腔體32的彼此相向兩個內壁,兩個所述第二中段反射鏡233則是分別配置於所述檢測腔體32的兩個角落。 To put it another way, the two second front-section reflective mirrors 232 are respectively disposed on two inner walls of the detection chamber 32 that face each other, while the two second middle-section reflective mirrors 233 are respectively disposed at two corners of the detection chamber 32.
進一步地說,兩個所述第一光源12、兩個所述第一分光鏡131、兩個所述第二光源22、及兩個所述第二分光鏡231於所述檢測腔體32之內(於所述第一方向D1之上)皆配置在一第一高度區塊R1。再者,兩個所述第一前 段反射鏡132與兩個所述第一後段反射鏡133於所述檢測腔體32之內(於所述第一方向D1之上)皆配置於一第二高度區塊R2,其低於所述第一高度區塊R1。兩個所述第二前段反射鏡232、兩個所述第二中段反射鏡233、及兩個所述第二後段反射鏡234於所述檢測腔體32之內(於所述第一方向D1之上)配置於一第三高度區塊R3,其可以低於或至少局部重疊於所述第二高度區塊R2。 Specifically, the two first light sources 12, the two first spectroscopes 131, the two second light sources 22, and the two second spectroscopes 231 are all arranged within the detection chamber 32 (in the first direction D1) in a first height range R1. Furthermore, the two first front-end reflectors 132 and the two first rear-end reflectors 133 are all arranged within the detection chamber 32 (in the first direction D1) in a second height range R2, which is lower than the first height range R1. The two second front-end reflectors 232, the two second middle reflectors 233, and the two second rear-end reflectors 234 are also arranged within the detection chamber 32 (in the first direction D1) in a third height range R3, which may be lower than or at least partially overlap with the second height range R2.
依上所述,所述單站式光學檢測設備100於本實施例之中通過採用上述配置,以使得在所述第一檢測模組1所適用的所述檢測腔體32尺寸之下,能夠進一步配置有所述第二檢測模組2,進而利於有效地縮小所述單站式光學檢測設備100的整體體積。 As described above, the single-station optical inspection device 100 in this embodiment employs the aforementioned configuration, enabling the second inspection module 2 to be further configured within the inspection chamber 32 dimensions suitable for the first inspection module 1, thereby effectively reducing the overall size of the single-station optical inspection device 100.
此外,所述第一檢測模組1與所述第二檢測模組2於本實施例中雖是以上述配置來說明,但可依據實際需求而加以調整變化。舉例來說,於本發明未繪示的其他實施例中,兩個所述第一分光鏡131與兩個所述第二分光鏡231可以被省略,並且兩個所述第一光源12與兩個所述第二光源22的位置高於所述料片M、並分別朝向所述料片M的兩個所述第一側面M1與兩個所述第二側面M2發出兩條所述第一光線L1與兩條所述第二光線L2,以使得兩條所述第一光線L1與兩條所述第二光線L2分別被兩個所述第一側面M1與兩個所述第二側面M2反射構成呈銳角狀的入射角與反射角,進而通過所述第一光傳輸組件13與所述第二光傳輸組件23的相應調整以傳輸至所述第一光接收單元11與所述第二光接收單元21。 In addition, although the first detection module 1 and the second detection module 2 are described in the above configuration in this embodiment, they can be adjusted and varied according to actual needs. For example, in other embodiments not shown in the present invention, the two first spectroscopes 131 and the two second spectroscopes 231 may be omitted, and the two first light sources 12 and the two second light sources 22 are positioned higher than the sheet M and emit two first light rays L1 and two second light rays L2 toward the two first side surfaces M1 and the two second side surfaces M2 of the sheet M, respectively. The two first light rays L1 and the two second light rays L2 are reflected by the two first side surfaces M1 and the two second side surfaces M2, respectively, to form sharp angles of incidence and reflection. The first light transmission assembly 13 and the second light transmission assembly 23 are then adjusted accordingly to transmit the light to the first light receiving unit 11 and the second light receiving unit 21.
[本發明實施例的技術效果] [Technical effects of the embodiments of the present invention]
綜上所述,本發明實施例所公開的單站式光學檢測設備,其通過所述第一檢測模組與所述第二檢測模組妥善地搭配於所述承載基座,以實現兩條所述第二光路徑位於兩個所述第一光路徑外側且彼此未相交的光路配置,進而能夠一次性地對所述料片的兩個所述第一側面與兩個所述第二側面 同步進行光學檢測,據以降低檢測流程的耗時、更有助於縮小檢測設備的整體體積。 In summary, the single-station optical inspection equipment disclosed in the embodiments of the present invention utilizes the first and second inspection modules properly aligned with the support base to achieve an optical path configuration in which the two second optical paths are located outside the two first optical paths and do not intersect with each other. This allows simultaneous optical inspection of both first and second sides of the web at once, thereby reducing the time required for the inspection process and further minimizing the overall size of the inspection equipment.
以上所公開的內容僅為本發明的優選可行實施例,並非因此侷限本發明的專利範圍,所以凡是運用本發明說明書及圖式內容所做的等效技術變化,均包含於本發明的專利範圍內。 The contents disclosed above are merely preferred feasible embodiments of the present invention and do not limit the patent scope of the present invention. Therefore, any equivalent technical variations made using the contents of the description and drawings of the present invention are included in the patent scope of the present invention.
12:第一光源 12: First Light Source
13:第一光傳輸組件 13: First optical transmission component
131:第一分光鏡 131: First Spectroscope
132:第一前段反射鏡 132: First front reflector
133:第一後段反射鏡 133: First rear reflector
22:第二光源 22: Second light source
23:第二光傳輸組件 23: Second optical transmission component
231:第二分光鏡 231: Second Spectroscope
232:第二前段反射鏡 232: Second front reflector
233:第二中段反射鏡 233: Second mid-section reflector
234:第二後段反射鏡 234: Second rear reflector
32:檢測腔體 32: Detection chamber
321:配置空間 321: Configuration Space
322:置物區 322: Storage Area
323:第一透光區 323: First light-transmitting area
324:第二透光區 324: Second light-transmitting area
325:隔板 325: Partition
D1:第一方向 D1: First Direction
D2:第二方向 D2: Second Direction
D3:第三方向 D3: Third direction
L1:第一光線 L1: First Light
L2:第二光線 L2: Second ray
P1:第一光路徑 P1: First optical path
P2:第二光路徑 P2: Second optical path
M:料片 M: Sheet
M1:第一側面 M1: First side
M2:第二側面 M2: Second side
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| US20050185181A1 (en) * | 2003-03-07 | 2005-08-25 | Ismeca Semiconductor Holding Sa | Optical device and inspection module |
| TW201018898A (en) * | 2008-11-11 | 2010-05-16 | Chroma Ate Inc | Automatic optical inspection equipment and inspection method thereof |
| US9816938B2 (en) * | 2013-11-20 | 2017-11-14 | Semiconductor Technologies & Instruments Pte Ltd | Apparatus and method for selectively inspecting component sidewalls |
| TWM586797U (en) * | 2017-11-27 | 2019-11-21 | 馬來西亞商正齊科技有限公司 | A semiconductor die multiple surfaces inspection system |
| CN117470856A (en) * | 2023-11-16 | 2024-01-30 | 聚时科技(上海)有限公司 | Optical detection device and optical detection method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20050185181A1 (en) * | 2003-03-07 | 2005-08-25 | Ismeca Semiconductor Holding Sa | Optical device and inspection module |
| TW201018898A (en) * | 2008-11-11 | 2010-05-16 | Chroma Ate Inc | Automatic optical inspection equipment and inspection method thereof |
| US9816938B2 (en) * | 2013-11-20 | 2017-11-14 | Semiconductor Technologies & Instruments Pte Ltd | Apparatus and method for selectively inspecting component sidewalls |
| TWM586797U (en) * | 2017-11-27 | 2019-11-21 | 馬來西亞商正齊科技有限公司 | A semiconductor die multiple surfaces inspection system |
| CN117470856A (en) * | 2023-11-16 | 2024-01-30 | 聚时科技(上海)有限公司 | Optical detection device and optical detection method |
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