TWI891435B - Plate Cleaning Detection Device - Google Patents
Plate Cleaning Detection DeviceInfo
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Abstract
一種載盤清潔檢測裝置,適用於一載盤,其包括一下板體及一上板體。該載盤清潔檢測裝置包含一輸送單元、一分板單元、一清潔單元、一檢測單元、一揀選單元及一控制單元。該分板單元包括一掀座及一分板模組,該掀座與該分板模組用於共同使該下板體與該上板體於該輸送單元相間隔。該檢測單元用於檢測取得一下板尺寸資訊及一上板尺寸資訊。該控制單元電連接該檢測單元與該揀選單元,且用於自該檢測單元接收該下板尺寸資訊或該上板尺寸資訊,進行後續判斷。藉由設置上述元件分別清潔與檢測該下板體與該上板體,以提升該下板體與該上板體的清潔度及檢測精準度。A tray cleaning detection device is suitable for a tray, which includes a lower plate and an upper plate. The tray cleaning detection device includes a conveying unit, a plate separation unit, a cleaning unit, a detection unit, a picking unit and a control unit. The plate separation unit includes a lifting seat and a plate separation module. The lifting seat and the plate separation module are used to jointly separate the lower plate and the upper plate in the conveying unit. The detection unit is used to detect and obtain the size information of the lower plate and the size information of the upper plate. The control unit is electrically connected to the detection unit and the picking unit, and is used to receive the size information of the lower plate or the size information of the upper plate from the detection unit for subsequent judgment. By arranging the above components to clean and detect the lower plate and the upper plate respectively, the cleanliness and detection accuracy of the lower plate and the upper plate are improved.
Description
本發明是有關於一種檢測裝置,特別是指一種載盤清潔檢測裝置。The present invention relates to a detection device, and more particularly to a carrier cleanliness detection device.
近年來,半導體晶片的用量顯著提升,又由於半導體晶片的加工作業相當精密,故需要進行加工作業時配合使用對應的兩片式載盤來固定半導體晶片,並在加工作業結束後對載盤進行清潔作業。然而,前述清潔作業多由人工沖洗的方式進行,不僅相當耗費人力與時間,更有可能因為沖洗角度不佳而損毀載盤。In recent years, the use of semiconductor chips has increased significantly. Due to the high precision of semiconductor chip processing, two-piece carriers are required to secure the chips during processing and to clean the carriers after processing. However, this cleaning process is often performed manually, which is not only labor-intensive and time-consuming, but also has the potential to damage the carriers due to poor rinsing angles.
顯見,亟待相關領域的研發人員開發一套自動化的載盤清潔檢測裝置,來降低當前耗費的整體成本,更進一步避免沖洗角度不佳所導致的損毀問題。Clearly, researchers in related fields urgently need to develop an automated platen cleanliness inspection device to reduce current overall costs and further avoid damage caused by poor rinsing angles.
因此,本發明的目的,即在提供一種能夠降低清潔成本的載盤清潔檢測裝置。Therefore, an object of the present invention is to provide a carrier cleanliness detection device that can reduce cleaning costs.
於是,本發明載盤清潔檢測裝置,適用於清潔並檢測一載盤,該載盤包括一界定出複數下板孔的下板體,及一與該下板體對合設置且界定出複數上板孔的上板體,該載盤清潔檢測裝置包含一框架、一輸送單元、一分板單元、一清潔單元、一檢測單元、一揀選單元及一控制單元。該輸送單元設置於該框架且界定出一輸送方向,該輸送單元包括一分板輸送組、一相鄰於該分板輸送組的清潔輸送組、一相鄰於該清潔輸送組的檢測輸送組、一揀選輸送組,及一不良品輸送組。該分板單元位置對應於該分板輸送組,且包括一設置於該框架的下驅動組、一沿一上下方向可移動地設置該下驅動組的掀座、一設置於該框架且位於該掀座上方的上驅動組,及一沿該上下方向可移動地設置該上驅動組且位於該掀座上方的分板模組,該掀座與該分板模組用於共同分離該下板體與該上板體,並由該分板模組用於限位該上板體,而使該下板體與該上板體沿該輸送方向相間隔。該清潔單元位置對應於該清潔輸送組,且用於清潔該下板體與該上板體。該檢測單元位置對應於該檢測輸送組,且用於檢測取得一對應於該下板體的下板尺寸資訊,及一對應於該上板體的上板尺寸資訊。該揀選單元位置對應於該揀選輸送組與該不良品輸送組,且用於將該下板體與該上板體移動至該揀選輸送組或該不良品輸送組。該控制單元電連接該檢測單元與該揀選單元,該控制單元儲存一下板預設尺寸資訊、一上板預設尺寸資訊、一下板變形量閾值及一上板變形量閾值,若該控制單元自該檢測單元接收該下板尺寸資訊,且該下板尺寸資訊相對該下板預設尺寸資訊的變形量大於該下板變形量閾值,該控制單元便控制該揀選單元將該下板體移動至該不良品輸送組,若該控制單元自該檢測單元接收該上板尺寸資訊,且該上板尺寸資訊相對該上板預設尺寸資訊的變形量大於該上板變形量閾值,該控制單元便控制該揀選單元將該上板體移動至該不良品輸送組。Therefore, the present invention provides a pallet cleaning and inspection device suitable for cleaning and inspecting a pallet. The pallet comprises a lower plate defining a plurality of lower plate holes, and an upper plate aligned with the lower plate and defining a plurality of upper plate holes. The pallet cleaning and inspection device includes a frame, a conveying unit, a pallet separation unit, a cleaning unit, an inspection unit, a sorting unit, and a control unit. The conveying unit is mounted on the frame and defines a conveying direction. The conveying unit includes a pallet separation conveyor assembly, a cleaning conveyor assembly adjacent to the pallet separation conveyor assembly, an inspection conveyor assembly adjacent to the cleaning conveyor assembly, a sorting conveyor assembly, and a defective product conveyor assembly. The panel separation unit is positioned corresponding to the panel separation and conveying assembly and includes a lower drive assembly mounted on the frame, a lift base on which the lower drive assembly is movably mounted in a vertical direction, an upper drive assembly mounted on the frame and located above the lift base, and a panel separation module on which the upper drive assembly is movably mounted in the vertical direction and located above the lift base. The lift base and the panel separation module are used to jointly separate the lower panel from the upper panel, and the panel separation module is used to limit the upper panel so that the lower panel and the upper panel are spaced apart along the conveying direction. The cleaning unit is positioned corresponding to the cleaning and conveying assembly and is used to clean the lower panel and the upper panel. The inspection unit is located in correspondence with the inspection and conveying group and is used to inspect and obtain the lower plate size information corresponding to the lower plate and the upper plate size information corresponding to the upper plate. The picking unit is located in correspondence with the picking and conveying group and the defective product conveying group and is used to move the lower plate and the upper plate to the picking and conveying group or the defective product conveying group. The control unit is electrically connected to the detection unit and the selection unit. The control unit stores a lower plate preset size information, an upper plate preset size information, a lower plate deformation threshold and an upper plate deformation threshold. If the control unit receives the lower plate size information from the detection unit, and the deformation of the lower plate size information relative to the lower plate preset size information is greater than the lower plate deformation threshold, the control unit controls the selection unit to move the lower plate body to the defective product conveying group. If the control unit receives the upper plate size information from the detection unit, and the deformation of the upper plate size information relative to the upper plate preset size information is greater than the upper plate deformation threshold, the control unit controls the selection unit to move the upper plate body to the defective product conveying group.
於是,本發明載盤清潔檢測裝置包含一框架、一輸送單元、一載盤、一分板單元、一清潔單元、一檢測單元、一揀選單元及一控制單元。該輸送單元設置於該框架且界定出一輸送方向,該輸送單元包括一分板輸送組、一相鄰於該分板輸送組的清潔輸送組、一相鄰於該清潔輸送組的檢測輸送組、一揀選輸送組,及一不良品輸送組。該載盤包括一界定出複數下板孔的下板體,及一界定出複數上板孔的上板體,該下板體與該上板體呈磁性相吸且對合設置,且用以被該輸送單元帶動。該分板單元位置對應於該分板輸送組,且包括一設置於該框架的下驅動組、一沿一上下方向可移動地設置該下驅動組的掀座、一設置於該框架且位於該掀座上方的上驅動組,及一沿該上下方向可移動地設置該上驅動組且位於該掀座上方的分板模組,該掀座與該分板模組用於共同分離該下板體與該上板體,並由該分板模組用於限位該上板體,而使該下板體與該上板體沿該輸送方向相間隔。該清潔單元位置對應於該清潔輸送組,且用於清潔該下板體與該上板體。該檢測單元位置對應於該檢測輸送組,且用於檢測取得一對應於該下板體的下板尺寸資訊,及一對應於該上板體的上板尺寸資訊。該揀選單元位置對應於該揀選輸送組與該不良品輸送組,且用於將該下板體與該上板體移動至該揀選輸送組或該不良品輸送組。該控制單元電連接該檢測單元與該揀選單元,該控制單元儲存一下板預設尺寸資訊、一上板預設尺寸資訊、一下板變形量閾值及一上板變形量閾值,若該控制單元自該檢測單元接收該下板尺寸資訊,且該下板尺寸資訊相對該下板預設尺寸資訊的變形量大於該下板變形量閾值,該控制單元便控制該揀選單元將該下板體移動至該不良品輸送組,若該控制單元自該檢測單元接收該上板尺寸資訊,且該上板尺寸資訊相對該上板預設尺寸資訊的變形量大於該上板變形量閾值,該控制單元便控制該揀選單元將該上板體移動至該不良品輸送組。Therefore, the pallet cleaning and inspection device of the present invention includes a frame, a conveying unit, a pallet, a panel separation unit, a cleaning unit, a detection unit, a sorting unit, and a control unit. The conveying unit is mounted on the frame and defines a conveying direction. The conveying unit includes a panel separation conveyor assembly, a cleaning conveyor assembly adjacent to the panel separation conveyor assembly, an inspection conveyor assembly adjacent to the cleaning conveyor assembly, a sorting conveyor assembly, and a defective product conveyor assembly. The pallet includes a lower plate defining a plurality of lower plate holes and an upper plate defining a plurality of upper plate holes. The lower plate and the upper plate are magnetically attracted to each other and aligned with each other, and are configured to be moved by the conveying unit. The panel separation unit is positioned corresponding to the panel separation and conveying assembly and includes a lower drive assembly mounted on the frame, a lift base on which the lower drive assembly is movably mounted in a vertical direction, an upper drive assembly mounted on the frame and located above the lift base, and a panel separation module on which the upper drive assembly is movably mounted in the vertical direction and located above the lift base. The lift base and the panel separation module are used to jointly separate the lower panel from the upper panel, and the panel separation module is used to limit the upper panel so that the lower panel and the upper panel are spaced apart along the conveying direction. The cleaning unit is positioned corresponding to the cleaning and conveying assembly and is used to clean the lower panel and the upper panel. The inspection unit is located in correspondence with the inspection and conveying group and is used to inspect and obtain the lower plate size information corresponding to the lower plate and the upper plate size information corresponding to the upper plate. The picking unit is located in correspondence with the picking and conveying group and the defective product conveying group and is used to move the lower plate and the upper plate to the picking and conveying group or the defective product conveying group. The control unit is electrically connected to the detection unit and the selection unit. The control unit stores a lower plate preset size information, an upper plate preset size information, a lower plate deformation threshold and an upper plate deformation threshold. If the control unit receives the lower plate size information from the detection unit, and the deformation of the lower plate size information relative to the lower plate preset size information is greater than the lower plate deformation threshold, the control unit controls the selection unit to move the lower plate body to the defective product conveying group. If the control unit receives the upper plate size information from the detection unit, and the deformation of the upper plate size information relative to the upper plate preset size information is greater than the upper plate deformation threshold, the control unit controls the selection unit to move the upper plate body to the defective product conveying group.
本發明的功效在於:藉由設置該輸送單元、該分板單元、該清潔單元與該檢測單元,而使該下板體與該上板體沿該輸送方向相間隔,從而使該清潔單元得以分別清潔該下板體與該上板體,並使該檢測單元得以分別檢測該下板體與該上板體,從而提升該載盤的清潔度及檢測精準度。The effectiveness of the present invention is that by providing the conveying unit, the plate separation unit, the cleaning unit and the detection unit, the lower plate and the upper plate are spaced apart along the conveying direction, so that the cleaning unit can clean the lower plate and the upper plate separately, and the detection unit can detect the lower plate and the upper plate separately, thereby improving the cleanliness of the carrier and the detection accuracy.
參閱圖1至圖3,本發明載盤清潔檢測裝置的一實施例,適用於清潔並檢測一載盤100,該載盤100包括一界定出十二下板孔111的下板體110,及一界定出十二上板孔121的上板體120,該下板體110與該上板體120呈磁性相吸且對合設置。該下板體110具有一為RFID標籤的下板體標籤112,該上板體120同樣具有一為RFID標籤的上板體標籤122。值得一提的是,該載盤100的數量可按需調整,即可同時清潔多個載盤100。該等下板孔111的數量與該等上板孔121的數量亦可按需調整。Referring to Figures 1 to 3, one embodiment of the carrier cleaning and inspection device of the present invention is suitable for cleaning and inspecting a carrier 100. The carrier 100 includes a lower plate 110 defining twelve lower plate holes 111 and an upper plate 120 defining twelve upper plate holes 121. The lower plate 110 and the upper plate 120 are magnetically attracted to each other and are arranged in a mating relationship. The lower plate 110 has a lower plate label 112 in the form of an RFID tag, and the upper plate 120 also has an upper plate label 122 in the form of an RFID tag. It is worth noting that the number of carriers 100 can be adjusted as needed, that is, multiple carriers 100 can be cleaned simultaneously. The number of lower plate holes 111 and the number of upper plate holes 121 can also be adjusted as needed.
該實施例包含一框架1、一輸送單元2、一分板單元3、一清潔單元4、一換向單元5、一檢測單元6、一合板單元7、一揀選單元8及一控制單元9。該輸送單元2、該分板單元3、該清潔單元4、該換向單元5、該檢測單元6、該合板單元7、該揀選單元8及該控制單元9皆設置於該框架1頂面。The embodiment includes a frame 1, a conveying unit 2, a panel separation unit 3, a cleaning unit 4, a reversing unit 5, a detection unit 6, a panel assembly unit 7, a selection unit 8, and a control unit 9. The conveying unit 2, the panel separation unit 3, the cleaning unit 4, the reversing unit 5, the detection unit 6, the panel assembly unit 7, the selection unit 8, and the control unit 9 are all arranged on the top of the frame 1.
參閱圖4至圖6,該輸送單元2界定出一輸送方向D1,且包括一分板輸送組21、一相鄰於該分板輸送組21的清潔輸送組22、一相鄰於該清潔輸送組22的換向輸送組23、一相鄰於該清潔輸送組22的檢測輸送組24、一相鄰於該檢測輸送組24間的合板輸送組25、一相鄰於該合板輸送組25的揀選輸送組26、一沿一實質垂直於該輸送方向D1的間隔方向D2與該揀選輸送組26相間隔的不良品輸送組27、十止擋件28,及三光遮斷器29。該等止擋件28的其中兩個設置於該分板輸送組21,該等止擋件28的其中兩個設置於該檢測輸送組24,該等止擋件28的其中兩個設置於該合板輸送組25,該等止擋件28的其中兩個設置於該揀選輸送組26,該等止擋件28的其中兩個設置於該不良品輸送組27。該等光遮斷器29分別設置於該分板輸送組21、該合板輸送組25、該揀選輸送組26與該不良品輸送組27。4 to 6 , the conveying unit 2 defines a conveying direction D1 and includes a panel separation conveying group 21, a cleaning conveying group 22 adjacent to the panel separation conveying group 21, a reversing conveying group 23 adjacent to the cleaning conveying group 22, an inspection conveying group 24 adjacent to the cleaning conveying group 22, a plywood conveying group 25 adjacent to the inspection conveying group 24, a sorting conveying group 26 adjacent to the plywood conveying group 25, a defective product conveying group 27 spaced apart from the sorting conveying group 26 along a spacing direction D2 substantially perpendicular to the conveying direction D1, ten stoppers 28, and a three-light blocker 29. Two of the stoppers 28 are located on the panel separation conveyor assembly 21, two of the stoppers 28 are located on the inspection conveyor assembly 24, two of the stoppers 28 are located on the plywood conveyor assembly 25, two of the stoppers 28 are located on the sorting conveyor assembly 26, and two of the stoppers 28 are located on the defective product conveyor assembly 27. The light blockers 29 are located on the panel separation conveyor assembly 21, the plywood conveyor assembly 25, the sorting conveyor assembly 26, and the defective product conveyor assembly 27, respectively.
在本實施例中,該分板輸送組21具有一分板輸送帶211及一分板驅動馬達212。該換向輸送組23具有一換向輸送帶231及一換向驅動馬達232。該檢測輸送組24具有一檢測輸送帶241及一檢測驅動馬達242。該合板輸送組25具有一合板輸送帶251及一合板驅動馬達252。該揀選輸送組26具有一揀選輸送帶261及一揀選驅動馬達262。該不良品輸送組27具有一不良品輸送帶271及一不良品驅動馬達272。該清潔輸送組22具有複數輸送滾輪221及二清潔驅動馬達222。該等輸送滾輪221的數量為三十二個,該等輸送滾輪221以兩兩一組的形式定義出十六個輸送滾輪組223,該等輸送滾輪組223沿該輸送方向D1間隔設置,每一輸送滾輪組223用以帶動該下板體110與該上板體120的至少其中一者行進。In this embodiment, the panel separation conveyor group 21 has a panel separation conveyor belt 211 and a panel separation drive motor 212. The reversing conveyor group 23 has a reversing conveyor belt 231 and a reversing drive motor 232. The inspection conveyor group 24 has a inspection conveyor belt 241 and a inspection drive motor 242. The plywood conveyor group 25 has a plywood conveyor belt 251 and a plywood drive motor 252. The sorting conveyor group 26 has a sorting conveyor belt 261 and a sorting drive motor 262. The defective product conveyor group 27 has a defective product conveyor belt 271 and a defective product drive motor 272. The cleaning conveyor assembly 22 includes a plurality of conveyor rollers 221 and two cleaning drive motors 222. There are thirty-two conveyor rollers 221, arranged in pairs to form sixteen conveyor roller assemblies 223. The conveyor roller assemblies 223 are spaced apart along the conveying direction D1. Each conveyor roller assembly 223 is used to drive at least one of the lower plate 110 and the upper plate 120.
參閱圖4與圖7,該分板單元3位置對應於該分板輸送組21,且包括一設置於該框架1的下驅動組31、一沿一實質垂直於該輸送方向D1與該間隔方向D2的上下方向D3可移動地設置該下驅動組31的掀座32、一設置於該框架1且位於該掀座32上方的上驅動組33,及一沿該上下方向D3可移動地設置該上驅動組33且位於該掀座32上方的分板模組34,該掀座32與該分板模組34共同用於分離該下板體110與該上板體120,該分板模組34用於限位該上板體120,而使該下板體110與該上板體120沿該輸送方向D1相間隔。4 and 7 , the panel splitting unit 3 is positioned corresponding to the panel splitting conveying group 21 and includes a lower drive group 31 provided on the frame 1, a lift base 32 on which the lower drive group 31 is movably provided along an up-down direction D3 substantially perpendicular to the conveying direction D1 and the spacing direction D2, an upper drive group 33 provided on the frame 1 and located above the lift base 32, and a panel splitting module 34 on which the upper drive group 33 is movably provided along the up-down direction D3 and located above the lift base 32. The lift base 32 and the panel splitting module 34 are jointly used to separate the lower plate body 110 and the upper plate body 120. The panel splitting module 34 is used to limit the upper plate body 120 so that the lower plate body 110 and the upper plate body 120 are spaced apart along the conveying direction D1.
該掀座32具有一掀板321,及複數設置於該掀板321且用於向上頂抵該上板體120的頂針部322,每一頂針部322具有一形狀對應於各別的該下板孔111以供各別的該下板孔111通過的大外徑段323,及一形狀對應於各別的該上板孔121以供各別的該上板孔121通過的小外徑段324,該分板模組34具有一用於向下壓抵該下板體110的分板壓抵座341,及複數設置於該分板壓抵座341的分板吸附件342,該等頂針部322與該分板壓抵座341共同用於分離該下板體110與該上板體120時由該等分板吸附件342用於吸附限位該上板體120,而使該下板體110與該上板體120沿該輸送方向D1相間隔。The lifting seat 32 has a lifting plate 321 and a plurality of pins 322 provided on the lifting plate 321 and used to push the upper plate 120 upward. Each pin 322 has a large outer diameter section 323 corresponding to the shape of the respective lower plate hole 111 for the respective lower plate hole 111 to pass through, and a small outer diameter section 324 corresponding to the shape of the respective upper plate hole 121 for the respective upper plate hole 121 to pass through. The split plate module 34 It has a plate-splitting pressing seat 341 for pressing downward against the lower plate body 110, and a plurality of plate-splitting adsorbing parts 342 arranged on the plate-splitting pressing seat 341. The top needle portion 322 and the plate-splitting pressing seat 341 are used together to separate the lower plate body 110 from the upper plate body 120, and the plate-splitting adsorbing parts 342 are used to adsorb and limit the upper plate body 120, so that the lower plate body 110 and the upper plate body 120 are spaced apart along the conveying direction D1.
參閱圖4至圖6,該清潔單元4位置對應於該清潔輸送組22,且用於清潔該下板體110與該上板體120。該清潔單元4包括一界定出一沖洗空間411與一風乾空間412的清潔殼體41、一位於該沖洗空間411的沖洗模組42,及一位於該風乾空間412的風乾模組43,該沖洗模組42具有複數用於面向該下板體110與該上板體120的沖洗噴嘴421,及複數用於接觸該下板體110與該上板體120的毛刷滾輪422,該風乾模組43具有複數用於面向該下板體110與該上板體120的風乾噴嘴431。4 to 6 , the cleaning unit 4 is located corresponding to the cleaning conveying assembly 22 and is used to clean the lower plate 110 and the upper plate 120 . The cleaning unit 4 includes a cleaning housing 41 defining a rinsing space 411 and a drying space 412, a rinsing module 42 located in the rinsing space 411, and a drying module 43 located in the drying space 412. The rinsing module 42 has a plurality of rinsing nozzles 421 for facing the lower plate 110 and the upper plate 120, and a plurality of brush rollers 422 for contacting the lower plate 110 and the upper plate 120. The drying module 43 has a plurality of drying nozzles 431 for facing the lower plate 110 and the upper plate 120.
在本實施例中,該等沖洗噴嘴421的數量為十二個,該等沖洗噴嘴421以兩兩一組的形式定義出六個沖洗噴嘴組423,該等沖洗噴嘴組423沿該輸送方向D1間隔設置,每一沖洗噴嘴組423的該二沖洗噴嘴421沿該上下方向D3間隔設置以供該下板體110與該上板體120的至少其中一者通過。該等風乾噴嘴431的數量為十個,該等風乾噴嘴431以兩兩一組的形式定義出五個風乾噴嘴組432,該等風乾噴嘴組432沿該輸送方向D1間隔設置,每一風乾噴嘴組432的該二風乾噴嘴431沿該上下方向D3間隔設置以供該下板體110與該上板體120的至少其中一者通過。In this embodiment, the number of the flushing nozzles 421 is twelve, and the flushing nozzles 421 are arranged in groups of two to define six flushing nozzle groups 423. The flushing nozzle groups 423 are arranged at intervals along the conveying direction D1, and the two flushing nozzles 421 of each flushing nozzle group 423 are arranged at intervals along the vertical direction D3 to allow at least one of the lower plate 110 and the upper plate 120 to pass through. There are ten air-drying nozzles 431, which are arranged in groups of two to form five air-drying nozzle groups 432. The air-drying nozzle groups 432 are arranged at intervals along the conveying direction D1, and the two air-drying nozzles 431 of each air-drying nozzle group 432 are arranged at intervals along the up-down direction D3 to allow at least one of the lower plate 110 and the upper plate 120 to pass through.
參閱圖4與圖8,該換向單元5位置對應於該換向輸送組23與該檢測輸送組24,且包括一換向滑台51、一沿該間隔方向D2可滑動地設置於該換向滑台51的換向基座52、一沿該上下方向D3可滑動地設置於該換向基座52的換向靠抵座53,及一設置於該換向靠抵座53的換向夾置件54,該換向夾置件54用於自該換向輸送組23將該下板體110與該上板體120的其中一者夾置至該檢測輸送組24。4 and 8 , the reversing unit 5 is positioned corresponding to the reversing conveying group 23 and the detecting conveying group 24 and includes a reversing slide 51, a reversing base 52 slidably disposed on the reversing slide 51 along the spacing direction D2, a reversing abutment 53 slidably disposed on the reversing base 52 along the up-down direction D3, and a reversing clamping member 54 disposed on the reversing abutment 53. The reversing clamping member 54 is used to clamp one of the lower plate 110 and the upper plate 120 from the reversing conveying group 23 to the detecting conveying group 24.
參閱圖4與圖9,該檢測單元6位置對應於該檢測輸送組24,且包括一檢測滑台61、一沿該輸送方向D1可滑動地設置於該檢測滑台61的檢測基座62、一沿該上下方向D3可滑動地設置於該檢測基座62的檢測基板63、一設置於該檢測基板63且用於面向該下板體110與該上板體120的其中一者的RFID讀取器65,及複數設置於該檢測基板63且用於面向該下板體110與該上板體120的其中一者的雷射感測器64。在本實施例中,該雷射感測器64包括四雷射件(圖未示)。在本實施例的其他變化例中,該雷射感測器64的雷射件的數量亦可根據當前量測精度的需求(如量測精度的需求不高的情形)減少為一至三個,而不以本實施例為限。Referring to Figures 4 and 9 , the detection unit 6 is positioned relative to the detection conveyor assembly 24 and includes a detection slide 61, a detection base 62 slidably mounted on the detection slide 61 along the conveying direction D1, a detection substrate 63 slidably mounted on the detection base 62 along the vertical direction D3, an RFID reader 65 mounted on the detection substrate 63 and facing one of the lower plate 110 and the upper plate 120, and a plurality of laser sensors 64 mounted on the detection substrate 63 and facing one of the lower plate 110 and the upper plate 120. In this embodiment, the laser sensors 64 include four laser elements (not shown). In other variations of this embodiment, the number of laser elements of the laser sensor 64 can also be reduced to one to three according to the current measurement accuracy requirements (such as when the measurement accuracy requirements are not high), and is not limited to this embodiment.
該檢測單元6用於根據該RFID讀取器65掃描該下板體標籤112與該上板體標籤122的其中一者,從而獲取當下掃描的物件之相關資訊(如型號、尺寸等資訊),並根據該雷射感測器64檢測取得一對應於該下板體110的下板尺寸資訊,及一對應於該上板體120的上板尺寸資訊。The detection unit 6 is used to scan one of the lower plate tag 112 and the upper plate tag 122 according to the RFID reader 65 to obtain relevant information of the scanned object (such as model, size, etc.), and obtain lower plate size information corresponding to the lower plate 110 and upper plate size information corresponding to the upper plate 120 according to the detection of the laser sensor 64.
參閱圖4與圖10,該合板單元7位置對應於該合板輸送組25,且包括一合板滑台71、一沿該輸送方向D1可滑動地設置於該合板滑台71的合板基座72,一沿該上下方向D3可滑動地設置於該合板基座72的合板靠抵座73,及複數設置於該合板靠抵座73的合板吸附件74,該等合板吸附件74用於吸附限位該上板體120,而使該上板體120蓋設於該下板體110。4 and 10 , the position of the plywood unit 7 corresponds to the plywood conveying assembly 25 and includes a plywood slide 71, a plywood base 72 slidably disposed on the plywood slide 71 along the conveying direction D1, a plywood abutment 73 slidably disposed on the plywood base 72 along the up-down direction D3, and a plurality of plywood adsorption members 74 disposed on the plywood abutment 73. The plywood adsorption members 74 are used to adsorb and limit the upper plate body 120 so that the upper plate body 120 covers the lower plate body 110.
該揀選單元8位置對應於該揀選輸送組26與該不良品輸送組27,且包括一揀選滑台81、一沿該間隔方向D2可滑動地設置於該揀選滑台81的揀選基座82、一沿該上下方向D3可滑動地設置於該揀選基座82的揀選靠抵座83,及一沿該上下方向D3可滑動地設置於該揀選靠抵座83的揀選夾置件84,該揀選夾置件84用於夾置該下板體110與該上板體120,而使該下板體110與該上板體120共同移動至該不良品輸送組27。The picking unit 8 is located corresponding to the picking conveying group 26 and the defective product conveying group 27, and includes a picking slide 81, a picking base 82 slidably provided on the picking slide 81 along the spacing direction D2, a picking support 83 slidably provided on the picking base 82 along the up-down direction D3, and a picking clamping member 84 slidably provided on the picking support 83 along the up-down direction D3. The picking clamping member 84 is used to clamp the lower plate 110 and the upper plate 120, so that the lower plate 110 and the upper plate 120 move together to the defective product conveying group 27.
參閱圖1至圖3,該控制單元9電連接該輸送單元2、該分板單元3、該合板單元7、該檢測單元6與該揀選單元8,該控制單元9儲存一下板預設尺寸資訊、一上板預設尺寸資訊、一下板變形量閾值及一上板變形量閾值。在本實施例中,該控制單元9為工業電腦。在其他變化例中,該控制單元9也可由現場可程式化邏輯閘陣列(field-programmable gate array,簡稱FPGA)、微處理器(micro processor)或系統單晶片(system on chip)等硬體或韌體據以實施。Referring to Figures 1 to 3 , the control unit 9 is electrically connected to the conveying unit 2, the panel separation unit 3, the panel assembly unit 7, the detection unit 6, and the selection unit 8. The control unit 9 stores information about a lower panel's default dimensions, information about an upper panel's default dimensions, a lower panel's deformation threshold, and an upper panel's deformation threshold. In this embodiment, the control unit 9 is an industrial computer. In other variations, the control unit 9 can also be implemented using hardware or firmware such as a field-programmable gate array (FPGA), a microprocessor, or a system on a chip.
[分板階段][Split board stage]
實際操作時,參閱圖1、圖4與圖7,在該輸送單元2的該分板輸送組21置入呈結合狀態的該下板體110與該上板體120,該輸送單元2的該分板輸送組21便會帶動該下板體110與該上板體120至對應於該分板單元3的位置並停止運作。接著,該掀座32的該等頂針部322向上移動,該等頂針部322的小外徑段324分別通過該下板體110的該等下板孔111與該上板體120的該等上板孔121,使該等頂針部322的大外徑段323抵靠該等頂針部322的該等小外徑段324,進而使該載盤100被頂離該分板輸送組21。接著,該分板模組34的該分板壓抵座341向下移動並壓抵該下板體110,從而使該下板體110的該等下板孔111受該等頂針部322的該等大外徑段323限位而移動至該掀板321表面。於此同時,該分板模組34的該等分板吸附件342針對該上板體120進行真空吸附,而使該等分板吸附件342與該上板體120相附接。最後,該分板模組34的該分板壓抵座341向上移動,該掀座32的該等頂針部322向下移動,該下板體110與該上板體120沿該上下方向D3相間隔,且該下板體110回覆抵接該分板輸送組21。於此同時,該分板輸送組21重新開始運作,帶動該下板體110沿該輸送方向D1繼續行進一預設距離後,該分板模組34向下移動並靠近該分板輸送組21,該等分板吸附件342停止對該上板體120進行真空吸附,該上板體120抵接該分板輸送組21,從而使該下板體110與該上板體120沿該輸送方向D1相間隔,實現分離該下板體110與該上板體120的效果。During actual operation, referring to Figures 1, 4 and 7, when the lower plate 110 and the upper plate 120 in a combined state are placed in the panel conveying group 21 of the conveying unit 2, the panel conveying group 21 of the conveying unit 2 will drive the lower plate 110 and the upper plate 120 to the position corresponding to the panel conveying unit 3 and stop operating. Then, the ejector pins 322 of the lift base 32 move upward, and the small outer diameter sections 324 of the ejector pins 322 pass through the lower plate holes 111 of the lower plate body 110 and the upper plate holes 121 of the upper plate body 120, respectively, so that the large outer diameter sections 323 of the ejector pins 322 abut against the small outer diameter sections 324 of the ejector pins 322, thereby pushing the carrier 100 away from the plate delivery assembly 21. Next, the panel separation pressing seat 341 of the panel separation module 34 moves downward and presses against the lower plate 110, thereby restraining the lower plate holes 111 of the lower plate 110 by the large outer diameter sections 323 of the ejector pins 322 and moving them to the surface of the lift plate 321. Simultaneously, the panel separation suction members 342 of the panel separation module 34 perform vacuum suction on the upper plate 120, thereby attaching the panel separation suction members 342 to the upper plate 120. Finally, the panel pressing seat 341 of the panel splitting module 34 moves upward, the top pin portion 322 of the lifting seat 32 moves downward, the lower plate body 110 and the upper plate body 120 are spaced apart along the vertical direction D3, and the lower plate body 110 returns to abut the panel splitting conveying assembly 21. At the same time, the panel separation conveying group 21 starts to operate again, driving the lower plate body 110 to continue to move a preset distance along the conveying direction D1, and the panel separation module 34 moves downward and approaches the panel separation conveying group 21. The panel separation adsorption parts 342 stop vacuum adsorption on the upper plate body 120, and the upper plate body 120 abuts against the panel separation conveying group 21, thereby separating the lower plate body 110 and the upper plate body 120 along the conveying direction D1, thereby achieving the effect of separating the lower plate body 110 and the upper plate body 120.
值得一提的是,若該載盤100並未呈結合狀態,即該下板體110與該上板體120預先相互分離,該輸送單元2中位於該分板輸送組21的該光遮斷器29會發送一未遮斷訊號至該控制單元9,代表該載盤100並未高於位於該分板輸送組21的該光遮斷器29的預設高度,該控制單元9便無需控制該分板單元3分離該下板體110與該上板體120。It is worth mentioning that if the carrier 100 is not in a combined state, that is, the lower plate 110 and the upper plate 120 are separated from each other in advance, the light interrupter 29 located in the panel conveying group 21 in the conveying unit 2 will send an unblocked signal to the control unit 9, indicating that the carrier 100 is not higher than the preset height of the light interrupter 29 located in the panel conveying group 21, and the control unit 9 does not need to control the panel unit 3 to separate the lower plate 110 and the upper plate 120.
[清潔階段][Cleaning phase]
參閱圖4至圖6,該輸送單元2的該清潔輸送組22接續帶動呈分離狀態的該下板體110與該上板體120至對應於該清潔單元4的位置(即該清潔殼體41內)。在該沖洗空間411時,該沖洗模組42的該等沖洗噴嘴421會以純水對該下板體110與該上板體120進行沖洗,該等毛刷滾輪422則會滾動接觸在行進中的該下板體110與該上板體120,從而實現沖洗的效果。在該風乾空間412時,該等風乾噴嘴431會以乾燥空氣對該下板體110與該上板體120進行吹氣,從而實現風乾的效果。為求精簡,圖6僅繪製該下板體110作為示例。Referring to Figures 4 to 6 , the cleaning conveyor assembly 22 of the conveyor unit 2 continuously drives the separated lower plate 110 and upper plate 120 to a position corresponding to the cleaning unit 4 (i.e., within the cleaning housing 41). While in the flushing space 411, the flushing nozzles 421 of the flushing module 42 rinse the lower plate 110 and upper plate 120 with pure water, while the brush rollers 422 roll and contact the moving lower plate 110 and upper plate 120, thereby achieving a flushing effect. In the drying space 412, the drying nozzles 431 blow dry air to the lower plate 110 and the upper plate 120, thereby achieving a drying effect. For simplicity, FIG6 only depicts the lower plate 110 as an example.
[換向階段][Switching phase]
參閱圖4與圖8,該輸送單元2的該換向輸送組23接續帶動呈分離狀態且被清潔的該下板體110與該上板體120至對應於該換向單元5的位置。該換向單元5的該揀選夾置件84自該換向輸送組23將該下板體110與該上板體120依序且分別夾置至該檢測輸送組24。由於該下板體110與該上板體120是從該分板輸送組21進入本實施例,該換向單元5得以將清潔後的該下板體110與該上板體120換向移動,方便從相鄰於該分板輸送組21的該揀選輸送組26回收該下板體110與該上板體120。為求精簡,圖8僅繪製該下板體110作為示例。Referring to Figures 4 and 8 , the reversing conveyor assembly 23 of the conveyor unit 2 sequentially drives the separated and cleaned lower plate 110 and upper plate 120 to positions corresponding to the reversing unit 5 . The selecting clamping member 84 of the reversing unit 5 sequentially and individually clamps the lower plate 110 and upper plate 120 from the reversing conveyor assembly 23 to the inspection conveyor assembly 24 . Since the lower plate 110 and the upper plate 120 enter this embodiment from the plate separation conveyor assembly 21, the reversing unit 5 is able to reverse the movement of the cleaned lower plate 110 and the upper plate 120, making it convenient to recover the lower plate 110 and the upper plate 120 from the selection conveyor assembly 26 adjacent to the plate separation conveyor assembly 21. For the sake of simplicity, FIG8 only depicts the lower plate 110 as an example.
[檢測階段][Detection phase]
參閱圖1、圖4與圖9,該輸送單元2的該檢測輸送組24接續帶動呈分離狀態的該下板體110與該上板體120至對應於該檢測單元6的位置。該檢測單元6根據該RFID讀取器65掃描該下板體標籤112與該上板體標籤122的其中一者,從而獲取當下掃描的物件之相關資訊(如型號、尺寸等資訊),並判斷當下掃描的物件為該下板體110與該上板體120。接著根據該雷射感測器64開始對當下掃描的物件進行三維量測作業並建立模型,對應取得該下板尺寸資訊或該上板尺寸資訊,並對應傳送該下板尺寸資訊或該上板尺寸資訊至該控制單元9。Referring to Figures 1, 4, and 9, the inspection and conveyor assembly 24 of the conveyor unit 2 sequentially drives the separated lower plate 110 and upper plate 120 to a position corresponding to the inspection unit 6. The inspection unit 6 scans one of the lower plate tag 112 and the upper plate tag 122 using the RFID reader 65 to obtain information related to the scanned object (such as model, size, etc.) and determine that the scanned object is the lower plate 110 or the upper plate 120. Then, the laser sensor 64 starts to perform a three-dimensional measurement operation on the currently scanned object and build a model, correspondingly obtaining the lower plate size information or the upper plate size information, and correspondingly transmitting the lower plate size information or the upper plate size information to the control unit 9.
[合板與揀選階段][Plywood and Selection Stage]
參閱圖1、圖4與圖10,由於在實務上,該下板體110與該上板體120為成組設計(皆屬於該載盤100),故會將該下板體110與該上板體120回復呈結合狀態,即由該等合板吸附件74吸附限位該上板體120,而使該上板體120蓋設於該下板體110。若該控制單元9自該檢測單元6接收該下板尺寸資訊,且該下板尺寸資訊相對該下板預設尺寸資訊的變形量大於該下板變形量閾值,或者是若該控制單元9自該檢測單元6接收該上板尺寸資訊,且該上板尺寸資訊相對該上板預設尺寸資訊的變形量大於該上板變形量閾值,該控制單元9便控制該揀選單元8將該下板體110與該上板體120共同移動至該不良品輸送組27。Referring to Figures 1, 4 and 10, since in practice, the lower plate 110 and the upper plate 120 are designed as a group (both belong to the carrier 100), the lower plate 110 and the upper plate 120 will be restored to a combined state, that is, the upper plate 120 will be adsorbed and limited by the composite plate adsorption members 74, so that the upper plate 120 is covered on the lower plate 110. If the control unit 9 receives the lower plate size information from the detection unit 6, and the deformation of the lower plate size information relative to the lower plate preset size information is greater than the lower plate deformation threshold, or if the control unit 9 receives the upper plate size information from the detection unit 6, and the deformation of the upper plate size information relative to the upper plate preset size information is greater than the upper plate deformation threshold, the control unit 9 controls the picking unit 8 to move the lower plate body 110 and the upper plate body 120 together to the defective product conveying group 27.
相反來說,若該下板尺寸資訊相對該下板預設尺寸資訊的變形量小於或等於該下板變形量閾值,且該上板尺寸資訊相對該上板預設尺寸資訊的變形量小於或等於該上板變形量閾值,該下板體110與該上板體120即被順利帶動至該揀選輸送組26,完成清潔與檢測作業。為求精簡,圖10僅繪製該下板體110作為示例。Conversely, if the deformation of the lower plate dimensional information relative to the preset lower plate dimensional information is less than or equal to the lower plate deformation threshold, and the deformation of the upper plate dimensional information relative to the preset upper plate dimensional information is less than or equal to the upper plate deformation threshold, the lower plate 110 and the upper plate 120 are smoothly conveyed to the selection and conveying assembly 26, completing the cleaning and inspection process. For simplicity, Figure 10 only depicts the lower plate 110 as an example.
換句話說,該控制單元9透過比對該下板尺寸資訊相對該下板預設尺寸資訊的變形量是否大於預設的該下板變形量閾值,及該上板尺寸資訊相對該上板預設尺寸資訊的變形量是否大於預設的該上板變形量閾值,來判斷該下板體110及該上板體120是否產生變形或損毀等情形。因此,在本實施例的變化例中,即便該下板體110或該上板體120存在接腳(pins)與墊圈(pads)等結構,亦能透過該控制單元9與該檢測單元6來判斷上述接腳與墊圈是否產生變形或損毀等情形,應用範圍不會被本實施例的該載盤100之外型或結構所限制。In other words, the control unit 9 determines whether the lower plate 110 and the upper plate 120 are deformed or damaged by comparing whether the deformation of the lower plate size information relative to the lower plate preset size information is greater than the preset lower plate deformation threshold, and whether the deformation of the upper plate size information relative to the upper plate preset size information is greater than the preset upper plate deformation threshold. Therefore, in a variation of the present embodiment, even if the lower plate 110 or the upper plate 120 has structures such as pins and pads, the control unit 9 and the detection unit 6 can be used to determine whether the pins and pads are deformed or damaged, and the scope of application will not be limited by the appearance or structure of the carrier 100 of the present embodiment.
綜上所述,本實施例具備以下功效:In summary, this embodiment has the following effects:
(一)藉由設置該輸送單元2、該分板單元3、該清潔單元4與該檢測單元6,以使該下板體110與該上板體120沿該輸送方向D1相間隔,從而使該清潔單元4得以分別清潔該下板體110與該上板體120,並使該檢測單元6得以分別檢測該下板體110與該上板體120,從而提升該載盤100的清潔度及檢測精準度。(1) By disposing the conveying unit 2, the panel separation unit 3, the cleaning unit 4 and the detection unit 6, the lower plate 110 and the upper plate 120 are spaced apart along the conveying direction D1, so that the cleaning unit 4 can clean the lower plate 110 and the upper plate 120 respectively, and the detection unit 6 can detect the lower plate 110 and the upper plate 120 respectively, thereby improving the cleanliness and detection accuracy of the carrier 100.
(二)藉由設置該換向單元5將清潔後的該下板體110與該上板體120換向移動,方便從相鄰於該分板輸送組21的該揀選輸送組26回收該下板體110與該上板體120,從而提升該載盤100的回收效率。(2) By providing the reversing unit 5 to reverse the cleaned lower plate 110 and the upper plate 120 , it is convenient to recover the lower plate 110 and the upper plate 120 from the picking conveying group 26 adjacent to the plate separation conveying group 21 , thereby improving the recovery efficiency of the carrier 100 .
(三)藉由設置該合板單元7將清潔與檢測後的該上板體120蓋設於該下板體110,方便從相鄰於該分板輸送組21的該揀選輸送組26回收該下板體110與該上板體120,從而配合提升該載盤100的回收效率。(3) By installing the plywood unit 7, the cleaned and inspected upper plate 120 is covered on the lower plate 110, so that the lower plate 110 and the upper plate 120 can be easily recovered from the picking and conveying group 26 adjacent to the plate separation conveying group 21, thereby improving the recovery efficiency of the carrier 100.
因此,本發明載盤清潔檢測裝置,確實能達成本發明的目的。Therefore, the plate cleanliness detection device of the present invention can indeed achieve the purpose of the present invention.
惟以上所述者,僅為本發明的實施例而已,當不能以此限定本發明實施的範圍,凡是依本發明申請專利範圍及專利說明書內容所作的簡單的等效變化與修飾,皆仍屬本發明專利涵蓋的範圍內。However, the above description is merely an example of the present invention and should not be used to limit the scope of the present invention. All simple equivalent changes and modifications made according to the scope of the patent application and the content of the patent specification of the present invention are still within the scope of the present patent.
100:載盤 110:下板體 111:下板孔 112:下板體標籤 120:上板體 121:上板孔 122:上板體標籤 1:框架 2:輸送單元 21:分板輸送組 211:分板輸送帶 212:分板驅動馬達 22:清潔輸送組 221:輸送滾輪 222:清潔驅動馬達 223:輸送滾輪組 23:換向輸送組 231:換向輸送帶 232:換向驅動馬達 24:檢測輸送組 241:檢測輸送帶 242:檢測驅動馬達 25:合板輸送組 251:合板輸送帶 252:合板驅動馬達 26:揀選輸送組 261:揀選輸送帶 262:揀選驅動馬達 27:不良品輸送組 271:不良品輸送帶 272:不良品驅動馬達 28:止擋件 29:光遮斷器 3:分板單元 31:下驅動組 32:掀座 321:掀板 322:頂針部 323:大外徑段 324:小外徑段 33:上驅動組 34:分板模組 341:分板壓抵座 342:分板吸附件 4:清潔單元 41:清潔殼體 411:沖洗空間 412:風乾空間 42:沖洗模組 421:沖洗噴嘴 422:毛刷滾輪 423:沖洗噴嘴組 43:風乾模組 431:風乾噴嘴 432:風乾噴嘴組 5:換向單元 51:換向滑台 52:換向基座 53:換向靠抵座 54:換向夾置件 6:檢測單元 61:檢測滑台 62:檢測基座 63:檢測基板 64:雷射感測器 65:RFID讀取器 7:合板單元 71:合板滑台 72:合板基座 73:合板靠抵座 74:合板吸附件 8:揀選單元 81:揀選滑台 82:揀選基座 83:揀選靠抵座 84:揀選夾置件 9:控制單元 D1:輸送方向 D2:間隔方向 D3:上下方向 100: Carrier 110: Lower plate 111: Lower plate hole 112: Lower plate label 120: Upper plate 121: Upper plate hole 122: Upper plate label 1: Frame 2: Conveyor unit 21: Depaneling conveyor assembly 211: Depaneling conveyor belt 212: Depaneling drive motor 22: Cleaning conveyor assembly 221: Conveyor roller 222: Cleaning drive motor 223: Conveyor roller assembly 23: Reversing conveyor assembly 231: Reversing conveyor belt 232: Reversing drive motor 24: Detection conveyor assembly 241: Detection conveyor belt 242: Detection drive motor 25: Plywood conveyor assembly 251: Plywood conveyor belt 252: Plywood drive motor 26: Sorting conveyor assembly 261: Sorting conveyor belt 262: Sorting drive motor 27: Defective product conveyor assembly 271: Defective product conveyor belt 272: Defective product drive motor 28: Stopper 29: Light interrupter 3: Panel separator unit 31: Lower drive assembly 32: Lifting seat 321: Lifting plate 322: Ejector pin 323: Large outer diameter section 324: Small outer diameter section 33: Upper drive assembly 34: Panel separator module 341: Panel separator pressure stop 342: Panel separator suction element 4: Cleaning unit 41: Cleaning housing 411: Rinse chamber 412: Air drying chamber 42: Rinse module 421: Rinse nozzle 422: Brush roller 423: Rinse nozzle assembly 43: Air drying module 431: Air drying nozzle 432: Air drying nozzle assembly 5: Reversing unit 51: Reversing slide 52: Reversing base 53: Reversing support 54: Reversing clamp 6: Detection unit 61: Detection slide 62: Detection base 63: Detection substrate 64: Laser sensor 65: RFID reader 7: Plywood unit 71: Plywood slide 72: Plywood base 73: Plywood support 74: Plywood suction element 8: Sorting unit 81: Sorting slide 82: Sorting base 83: Sorting support 84: Sorting clamp 9: Control unit D1: Conveyor direction D2: Spacing direction D3: Up and down direction
本發明的其他特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中: 圖1是本發明載盤清潔檢測裝置的一實施例的一方塊圖; 圖2是該實施例的一立體組合圖; 圖3是該實施例所適用的一載盤的一立體分解圖; 圖4是該實施例的一輸送單元及一清潔單元的一不完整的立體組合圖; 圖5是該實施例的該輸送單元及該清潔單元的一不完整的俯視圖; 圖6是沿圖5的VI-VI線所取得的一剖視圖; 圖7是該實施例的一分板單元的一不完整的立體組合圖; 圖8是該實施例的該輸送單元及一換向單元的一不完整的立體組合圖; 圖9是該實施例的該輸送單元及一檢測單元的一不完整的立體組合示意圖;及 圖10是該實施例的該輸送單元、一合板單元及一揀選單元的一不完整的立體組合圖。 Other features and functions of the present invention are clearly illustrated in the embodiments with reference to the accompanying drawings, in which: Figure 1 is a block diagram of an embodiment of a carrier cleanliness detection device of the present invention; Figure 2 is a three-dimensional assembly diagram of the embodiment; Figure 3 is a three-dimensional exploded view of a carrier applicable to the embodiment; Figure 4 is an incomplete three-dimensional assembly diagram of a conveying unit and a cleaning unit of the embodiment; Figure 5 is an incomplete top view of the conveying unit and the cleaning unit of the embodiment; Figure 6 is a cross-sectional view taken along line VI-VI of Figure 5; Figure 7 is an incomplete three-dimensional assembly diagram of a panel separation unit of the embodiment; Figure 8 is an incomplete three-dimensional assembly diagram of the conveying unit and a reversing unit of the embodiment; Figure 9 is a schematic diagram of an incomplete three-dimensional assembly of the transport unit and a detection unit of the embodiment; and Figure 10 is a schematic diagram of an incomplete three-dimensional assembly of the transport unit, a plywood unit, and a picking unit of the embodiment.
100:載盤 100: Loading
110:下板體 110: Lower plate
120:上板體 120: Upper plate
1:框架 1: Framework
2:輸送單元 2: Transport unit
3:分板單元 3: Panel unit
4:清潔單元 4: Cleaning unit
5:換向單元 5: Reversing unit
6:檢測單元 6: Detection unit
7:合板單元 7: Plywood unit
8:揀選單元 8: Select unit
D1:輸送方向 D1: Transport direction
D2:間隔方向 D2: Interval direction
D3:上下方向 D3: up and down direction
Claims (10)
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| TW113125511A TWI891435B (en) | 2024-07-08 | 2024-07-08 | Plate Cleaning Detection Device |
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| TW113125511A TWI891435B (en) | 2024-07-08 | 2024-07-08 | Plate Cleaning Detection Device |
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| TW202602570A TW202602570A (en) | 2026-01-16 |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW595520U (en) * | 2003-06-03 | 2004-06-21 | Hon Hai Prec Ind Co Ltd | Cleaning machine |
| TW200819216A (en) * | 2006-10-31 | 2008-05-01 | Mirle Automation Corp | Cassette cleaning apparatus and cassette cleaning method |
| US20130011227A1 (en) * | 2011-07-04 | 2013-01-10 | Siltronic Ag | Device and Method For Buffer-Storing A Multiplicity of Wafer-Type Workpieces |
| CN107199182A (en) * | 2016-03-16 | 2017-09-26 | 京元电子股份有限公司 | Bearing plate inspection device |
| CN207787201U (en) * | 2017-12-15 | 2018-08-31 | 深圳市银浩自动化设备有限公司 | Carrier cleaning device |
| CN218079396U (en) * | 2022-08-02 | 2022-12-20 | 赫比(南通)科技有限公司 | Feeding disc cleaning equipment |
| CN218706052U (en) * | 2022-11-29 | 2023-03-24 | 平方和(北京)科技有限公司 | Cleaning equipment for contact lens jig carrying disc |
| US20230338996A1 (en) * | 2022-04-21 | 2023-10-26 | Skyworks Solutions, Inc. | Method of cleaning trays used for handling semiconductor packages |
| CN110961423B (en) * | 2019-11-20 | 2023-11-28 | 好想你健康食品股份有限公司 | Charging tray belt cleaning device |
-
2024
- 2024-07-08 TW TW113125511A patent/TWI891435B/en active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW595520U (en) * | 2003-06-03 | 2004-06-21 | Hon Hai Prec Ind Co Ltd | Cleaning machine |
| TW200819216A (en) * | 2006-10-31 | 2008-05-01 | Mirle Automation Corp | Cassette cleaning apparatus and cassette cleaning method |
| US20130011227A1 (en) * | 2011-07-04 | 2013-01-10 | Siltronic Ag | Device and Method For Buffer-Storing A Multiplicity of Wafer-Type Workpieces |
| CN107199182A (en) * | 2016-03-16 | 2017-09-26 | 京元电子股份有限公司 | Bearing plate inspection device |
| CN207787201U (en) * | 2017-12-15 | 2018-08-31 | 深圳市银浩自动化设备有限公司 | Carrier cleaning device |
| CN110961423B (en) * | 2019-11-20 | 2023-11-28 | 好想你健康食品股份有限公司 | Charging tray belt cleaning device |
| US20230338996A1 (en) * | 2022-04-21 | 2023-10-26 | Skyworks Solutions, Inc. | Method of cleaning trays used for handling semiconductor packages |
| CN218079396U (en) * | 2022-08-02 | 2022-12-20 | 赫比(南通)科技有限公司 | Feeding disc cleaning equipment |
| CN218706052U (en) * | 2022-11-29 | 2023-03-24 | 平方和(北京)科技有限公司 | Cleaning equipment for contact lens jig carrying disc |
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