TWI889165B - Substrate holder and coating device - Google Patents

Abstract

The present invention provides a substrate holder that can correspond to various types of substrates with different feeding positions. The provided substrate holder 210 includes: a base plate; and a panel 230, which is used to clamp the substrate together with the base plate for holding. The panel 230 has a central opening 234a and a frame member 234 surrounding the central opening 234a. The substrate holder 210 includes: a first bus bar 242 that can be movably mounted on the frame member 234, and a feeding contact 243 mounted on the first bus bar 242.

Description

Substrate holder and coating device

This case is about substrate holder and coating device.

Patent document 1 discloses an immersion plating device as an example of an electrolytic plating device. The plating device holds a substrate (e.g., a semiconductor wafer) with the surface to be plated facing the side in a substrate holder and immerses it in a plating liquid, and applies a voltage between the substrate (cathode) and the anode, thereby depositing a conductive film on the surface of the substrate.

The substrate holder is generally configured to hold the substrate by clamping it between a bottom plate and a panel, and to expose the coated surface of the substrate from a central opening formed in the panel. In addition, the substrate holder is configured to have a contact member disposed on the panel, and to feed electricity to the substrate by making the contact member contact the substrate.

[Prior Art Literature] [Patent Literature]

[Patent Document 1] Japanese Patent No. 6335763

The substrate holder of the coating device disclosed in Patent Document 1 does not take into account the situation of various types of substrates with different corresponding feeding positions.

That is, there are various types of substrates that are the target of the plating process, and the specifications of the feeding position also vary depending on the substrate. At this time, a dedicated substrate holder must be made for each substrate with a different feeding position, and the number of substrate holders increases, so the structure of the plating device becomes complicated.

Therefore, one of the purposes of this case is to realize a substrate holder that can correspond to various types of substrates with different feeding positions.

According to one embodiment, a substrate holder is disclosed, which includes: a bottom plate; a faceplate, which is a faceplate used to clamp the substrate together with the bottom plate for holding, and has a central opening and a frame member surrounding the central opening; and a contact member, which has: a first bus bar movably mounted on the frame member, and a feeding contact mounted on the first bus bar.

100: Loading port

110:Transport robot

120: Loading platform

130: Unloading platform

140: Loader

200: Fixed module

210:Substrate holder

220: Base plate

220a: 1st locking opening

222: Retainer plate

224: Retainer hook

224a: Axis

230: Panel

230a: Second locking opening

234: Frame components

234a: Central opening

236: Clamp plate

238: Clip hook

240: Contact components

241: Second regulatory component

241a: Proximal regulatory components

241b: Remote regulatory components

242: Busbar 1

242a:Holding hole

242b: protrusion

243: Feedback contact

244: Busbar No. 2

245: Guiding component

246: Long hole

247: The first regulatory component

247a: near end

247b: Distal end

248: Compression coil spring

249: Disc spring

250: Inner sealing component

260: External sealing component

270: Locking mechanism

280: Position adjustment fixture

281: Fixture body

282: 1st claw component

283: Second claw component

284: Jig remotely presses components

285: The fixture presses the component in a near position

290: Position adjustment mechanism

292: Arm

293: Near-position pressing member

294: Remote pressing component

295:Handling part

296: Second drive component

298: First drive component

300: Storage module

310: Exchange module

320: Holder cleaning module

400: Pre-wetting module

500: Prepreg module

510: Pre-soaking and cleaning module

600: Coating module

700: Coating and cleaning module

710: Blower module

720: Temporary module

800: Washing module

900: Transport device

950: Control module

1000: Coating device

WF: substrate

[Figure 1] is a cross-sectional view showing the overall structure of a coating device in an implementation form.

[Figure 2] is a schematic oblique view of a substrate holder in an implementation form.

[Figure 3] is a schematic cross-sectional view of a locking mechanism of a substrate holder in one embodiment.

[Figure 4] is a schematic oblique view of a contact member of an implementation form.

[Figure 5] is an enlarged oblique view of a contact member of an implementation form.

[Figure 6] is an enlarged oblique view of a contact member of an implementation form.

[Figure 7] is an enlarged oblique view of a contact member of an implementation form.

[Figure 8] is an enlarged oblique view of a contact member of an implementation form.

[Figure 9] is an enlarged oblique view of a contact member of an implementation form.

[Figure 10] is an enlarged oblique view of a contact member of an implementation form.

[Figure 11] is a schematic oblique view of a position adjustment mechanism in an implementation form.

[Figure 12] is a schematic oblique view of a position adjustment mechanism in an implementation form.

[Figure 13] is an enlarged oblique view of a contact member and a position adjustment mechanism of an implementation form.

[Figure 14] is an enlarged oblique view of a contact member and a position adjustment mechanism of an implementation form.

[Figure 15] is an enlarged oblique view of a contact member and a position adjustment mechanism of an implementation form.

[Figure 16] is an enlarged oblique view of a contact member and a position adjustment mechanism of an implementation form.

[Figure 17] is an enlarged oblique view of a contact member and a position adjustment mechanism of an implementation form.

[Figure 18] is an enlarged oblique view of a contact member and a position adjustment mechanism of an implementation form.

[Figure 19] is an enlarged oblique view of a contact member of an implementation form.

[Figure 20] is a schematic oblique view of a contact member and a position adjustment fixture of an implementation form.

[Figure 21] is a schematic oblique view of a contact member and a position adjustment fixture of an implementation form.

[Figure 22] is a schematic oblique view of a contact member and a position adjustment fixture of an implementation form.

[Figure 23] is a schematic oblique view of a contact member and a position adjustment fixture of an implementation form.

[Figure 24] is a flow chart of a substrate installation method in one embodiment.

The following is a description of the implementation of the present invention with reference to the drawings. In the drawings described below, the same or equivalent components are marked with the same symbols and repeated descriptions are omitted.

<Overall structure of the coating device>

FIG1 is a plan view showing the overall structure of the coating device of this embodiment. The coating device 1000 is equipped with: a loading port 100, a transfer robot 110, a loading platform 120, an unloading platform 130, a loader 140, a fixed module 200, a storage module 300, an exchange module 310, a holder cleaning module 320, a pre-wetting module 400, a pre-preg module 500, a pre-preg cleaning module 510, a coating module 600, a coating cleaning module 700, a blast module 710, a temporary module 720, a cleaning module 800, a transfer device 900, and a control module 950.

The loading port 100 is a module for carrying substrates WF stored in a cassette such as a FOUP (not shown) into the coating device 1000, or carrying substrates WF out of the coating device 1000 to the cassette. In this embodiment, four loading ports 100 are arranged horizontally, but the number and arrangement of the loading ports 100 are arbitrary. The transport robot 110 is a robot for horizontally transporting substrates WF, and is configured to receive and deliver substrates WF between the loading port 100 and the loading platform 120.

The loading platform 120 is a platform for receiving and transferring substrates WF before coating between the transport robot 110 and the loader 140. The unloading platform 130 is a platform for receiving and transferring substrates WF after coating between the transport robot 110 and the loader 140. The loader 140 is a robot for horizontally transferring substrates WF, and is configured to receive and transfer substrates WF between the loading platform 120, the unloading platform 130, the fixed module 200, and the cleaning module 800.

The fixed module 200 is a module for mounting a substrate WF on a substrate holder 210 or removing a substrate WF from the substrate holder 210. The storage module 300 is a module for vertically storing a substrate holder 210. The exchange module 310 is a module for temporarily storing a substrate holder 210 that must be exchanged or maintained, and is formed into a structure that can take out and put in the substrate holder 210. The substrate holder 210 taken out by the exchange module 310 is maintained in the coating device 1000 or taken out to the outside of the coating device 1000 for maintenance, and the maintained substrate holder 210 or a new substrate holder 210 can be put into the exchange module 310. The holder cleaning module 320 is a module for cleaning the substrate holder 210.

The pre-wetting module 400 is a module for wetting the coated surface of the substrate WF before the coating process with a treatment liquid such as pure water or degassed water, thereby replacing the air inside the pattern formed on the substrate surface with the treatment liquid. The pre-wetting module 400 is configured to perform a pre-wetting process that facilitates the supply of the coating liquid to the inside of the pattern by replacing the treatment liquid inside the pattern with the coating liquid during coating.

The pre-dip module 500 is configured to perform a pre-dip treatment for cleaning or activating the surface of the plated substrate by etching away the oxide film with high resistance existing on the surface of the seed layer formed on the plated surface of the substrate WF before the plating treatment, for example, with a treatment liquid such as sulfuric acid or hydrochloric acid. The pre-dip cleaning module 510 is a module for cleaning the substrate WF that has been subjected to the pre-dip treatment.

The coating module 600 is a module for performing a coating process on the substrate WF. The coating cleaning module 700 is a module for cleaning the substrate WF in order to remove the coating liquid and the like remaining on the substrate WF after the coating process. In this embodiment, three coating modules 600 and three coating cleaning modules 700 are arranged horizontally, but the number and arrangement of the coating modules 600 and the coating cleaning modules 700 are arbitrary. The blowing module 710 is a module for drying the substrate WF after the cleaning process. The temporary module 720 is a module for temporarily storing the substrate holder 210 mounted with the substrate WF between a plurality of conveying devices 900. In this embodiment, the number of substrate holders 210 that can be stored in the temporary module 720 is 1, but the number is arbitrary.

The cleaning module 800 is a module for cleaning and drying the substrate WF in order to remove the coating liquid etc. remaining on the substrate WF after the coating process removed from the substrate holder 210. In this embodiment, two cleaning modules 800 are arranged horizontally with the loading stage 120 and the unloading stage 130 sandwiched therebetween, but the number and arrangement of the cleaning modules 800 are arbitrary. The conveying device 900 is a device for vertically conveying the substrate holder 210 between the plurality of modules in the coating device 1000. In this embodiment, three conveying devices 900 are arranged in an arranged manner, but the number and arrangement of the conveying devices 900 are arbitrary.

The control module 950 is composed of a plurality of modules for controlling the coating device 1000, and can be composed of a general computer or a dedicated computer having an input/output interface with an operator, for example.

An example of a continuous coating process performed by the coating device 1000 is described. First, the substrate WF stored in the cassette is moved to the loading port 100. Then, the transfer robot 110 takes out the substrate WF from the cassette of the loading port 100 and places the substrate WF on the loading platform 120. The loader 140 takes the substrate WF from the loading platform 120 and transfers it to the fixed module 200.

The fixed module 200 mounts the substrate WF on the substrate holder 210. The conveying device 900 conveys the substrate holder 210 on which the substrate WF is mounted to the pre-wetting module 400. The pre-wetting module 400 performs a pre-wetting treatment on the substrate WF. The conveying device 900 conveys the substrate holder 210 on which the substrate WF that has been pre-wetted is mounted to the pre-preg module 500. The pre-preg module 500 performs a pre-preg treatment on the substrate WF. The conveying device 900 conveys the substrate holder 210 on which the substrate WF that has been pre-preg is mounted to the pre-preg cleaning module 510. The pre-preg cleaning module 510 cleans the substrate WF. The transport device 900 transports the substrate holder 210 on which the substrate WF that has been subjected to a cleaning process is mounted to the coating module 600. The coating module 600 performs a coating process on the substrate WF.

The transport device 900 transports the substrate holder 210 on which the substrate WF that has been subjected to the coating process is mounted to the coating cleaning module 700. The coating cleaning module 700 performs a cleaning process on the substrate WF and the substrate holder 210. The transport device 900 transports the substrate holder 210 on which the substrate WF that has been subjected to the cleaning process is mounted to the blower module 710. The blower module 710 performs a drying process on the substrate WF. The transport device 900 transports the substrate holder 210 on which the substrate WF that has been subjected to the drying process is mounted to the temporary module 720, and another transport device 900 transports the substrate holder 210 from the temporary module 720 to the fixed module 200. The fixed module 200 removes the substrate WF from the substrate holder 210.

The loader 140 transfers the coated substrate WF removed from the substrate holder 210 to the cleaning module 800. The cleaning module 800 performs cleaning and drying on the substrate WF. The loader 140 places the substrate WF that has been cleaned and dried on the unloading platform 130. The transfer robot 110 receives the substrate WF from the unloading platform 130 and transfers it to the cassette of the loading port 100. Finally, the cassette containing the substrate WF is removed from the loading port 100.

The substrate holder 210 from which the substrate WF has been removed in the fixed module 200 is installed with the next substrate WF or is sent back to the storage module 300 by the transfer device 900. The substrate holder 210 that does not hold the substrate WF is cleaned in the holder cleaning module 320 as needed.

FIG2 is a schematic oblique view of a substrate holder of an embodiment. As shown in FIG2, the substrate holder 210 includes: a bottom plate 220, and a panel 230 for holding the substrate together with the bottom plate 220. The panel 230 has: a central opening 234a and a frame member 234 surrounding the central opening 234a. The central opening 234a is formed in a rectangular shape. In this embodiment, an example in which the central opening 234a is formed in a rectangular shape is shown, but it is not limited to this. The central opening 234a can also be, for example, circular.

In addition, in this embodiment, an example is shown in which a central opening is formed on the bottom plate 220, but this is for performing plating treatment on both sides of the substrate. Therefore, if plating treatment is performed on only one side of the substrate, the bottom plate 220 may not have a central opening. In addition, for the convenience of explanation, the following is a diagram in which the panel 230 is arranged at the bottom and the bottom plate 220 is arranged at the top. However, when the substrate holder 210 is processed in the fixed module 200, the bottom plate 220 is arranged at the bottom and the panel 230 is arranged at the top.

The substrate holder 210 includes an inner sealing member 250 provided on the frame member 234 so as to surround the central opening 234a, and an outer sealing member 260 provided on the frame member 234 so as to surround the outer side of the inner sealing member 250 with a gap therebetween. In addition, the substrate holder 210 includes a pair of contact members 240 provided on the frame member 234 with the rectangular central opening 234a interposed therebetween. The contact member 240 is provided between the inner sealing member 250 and the outer sealing member 260. Thus, when the substrate holder 210 is immersed in the coating liquid, the contact member 240 and the end of the substrate are sealed with the coating liquid. In this embodiment, the contact member 240 is mounted on the frame member 234 in a pair with the rectangular central opening 234a, but the present invention is not limited thereto. The contact member 240 can also be mounted on the four sides of the frame member 234 in a manner of surrounding the rectangular central opening 234a.

As shown in FIG. 2 , the substrate holder 210 has a plurality of locking mechanisms 270 for locking or releasing the bottom plate 220 and the panel 230. The plurality of locking mechanisms 270 are provided along the periphery of the bottom plate 220 and the panel 230.

FIG3 is a schematic cross-sectional view of a locking mechanism 270 of a substrate holder in an embodiment. As shown in FIG3 , the bottom plate 220 has a first locking opening 220a formed on the outer side of the outer sealing member 260. On the other hand, the panel 230 has a second locking opening 230a formed on the outer side of the outer sealing member 260 at a position corresponding to the first locking opening 220a. The locking mechanism 270 includes: a holder plate 222 provided at the first locking opening 220a; and a holder hook 224 protruding toward the panel 230 side through the first locking opening 220a. On the other hand, the locking mechanism 270 includes: a clamp plate 236 provided at the second locking opening 230a; and a clamp hook 238 protruding toward the bottom plate 220 through the second locking opening 230a.

The holder hook 224 is configured to be rotatable around the axis 224a. The locking mechanism 270 is configured such that when the holder hook 224 is located at the position indicated by the solid line, the holder hook 224 is engaged with the clip hook 238, thereby locking the bottom plate 220 and the panel 230. On the other hand, when the holder hook 224 is rotated and located at the position indicated by the dotted line, the engagement between the holder hook 224 and the clip hook 238 is released, and the locking of the bottom plate 220 and the panel 230 is released. In particular, FIG. 2 shows an example in which a plurality of locking mechanisms 270 are provided along the periphery of the bottom plate 220 and the panel 230, but the present invention is not limited thereto. In addition, in the description after FIG. 4, the illustration of the locking mechanism 270 is omitted for the convenience of explanation.

Figures 4 to 7 are schematic oblique views of a contact member of an embodiment. Figure 4 shows the entire contact member 240, and Figures 5 to 7 show a portion of the contact member 240 in an enlarged manner. The contact member 240 is provided in a pair on the frame member 234 with the central opening 234a sandwiched between them, but both have the same structure, so only one of them is described.

As shown in FIGS. 4 to 7 , the contact member 240 includes: a first bus bar 242 extending along the frame member 234 and movably mounted on the frame member 234, and a feeding contact 243 mounted on the first bus bar 242. More specifically, the contact member 240 includes a second bus bar 244 extending along the frame member 234 and fixed to the frame member 234. The first bus bar 242 is movably laminated on the second bus bar 244 and mounted on the second bus bar 244.

The base end of the feeding contact 243 is fixed to the first bus bar 242, and the front end of the feeding contact 243 protrudes toward the central opening 234a. The second bus bar 244 is connected to a power source not shown. The power source feeds the feeding contact 243 through the second bus bar 244 and the first bus bar 242. The feeding contact 243 is configured to feed the substrate by contacting the front end of the feeding contact 243 with the substrate.

The first bus bar 242 is mounted on the second bus bar 244 so as to be movable in the first direction approaching and moving away from the central opening 234a. The second bus bar 244 has guide members 245 disposed at both ends of the extension direction of the first bus bar 242. The guide member 245 is a member for regulating the movement direction of the first bus bar 242 in the first direction.

As shown in FIG. 5 , the first bus bar 242 has holding holes 242a formed at both ends of the extending direction of the first bus bar 242. The holding holes 242a are cutouts for holding the first bus bar 242 when the position adjustment mechanism and/or jig described later is used to move the first bus bar 242.

As shown in FIG. 6 and FIG. 7 , the first bus bar 242 has a long hole 246 that is longer in the first direction than the extension direction of the first bus bar 242. A plurality of long holes 246 are provided along the extension direction of the first bus bar 242. On the other hand, the second bus bar 244 has a first regulating member 247 disposed at a position corresponding to the long hole 246. The first regulating member 247 is a member for regulating the movement of the first bus bar 242 in the first direction.

Specifically, the first regulating member 247 has a proximal end 247a that contacts the edge of the long hole 246 when the first bus bar 242 moves in a direction away from the central opening 234a. In addition, the first regulating member 247 has a distal end 247b that contacts the edge of the long hole 246 when the first bus bar 242 moves in a direction close to the central opening 234a. In this embodiment, the first regulating member 247 is a bolt fixed to the surface of the second bus bar 244 facing the first bus bar 242, and the portion closest to the central opening 234a of the shaft of the bolt becomes the proximal end 247a, and the portion farthest from the central opening 234a of the shaft of the bolt becomes the distal end 247b.

The second bus bar 244 has a compression coil spring 248 for pressing the first bus bar 242 toward the second bus bar 244. The compression coil spring 248 is disposed between the first regulating member 247, i.e., the head of the bolt, and the first bus bar 242. The first regulating member 247 fixes the second bus bar 244, so the compression coil spring 248 presses the first bus bar 242 toward the second bus bar 244.

As shown in FIG. 7 , the first bus bar 242 has a protrusion 242b formed to extend in the first direction on the surface facing the second bus bar 244. The first bus bar 242 is pressed toward the second bus bar 244 by the compression coil spring 248, so that the protrusion 242b contacts the second bus bar 244. Thus, the electrical conduction between the first bus bar 242 and the second bus bar 244 is ensured. In addition, the first regulating member 247 and the compression coil spring 248 are conductive members, so the electrical conduction between the first bus bar 242 and the second bus bar 244 is ensured through the first regulating member 247 and the compression coil spring 248. The protrusion 242b extends along the first direction, so the protrusion 242b cannot hinder the first bus bar 242 from moving along the first direction.

In the above description, an example is shown in which the compression coil spring 248 is used to push the first bus bar 242 toward the second bus bar 244 to ensure electrical conduction between the first bus bar 242 and the second bus bar 244, but it is not limited to this. Figures 8 to 10 are enlarged oblique views of a contact member of an embodiment.

As shown in FIGS. 8 to 10 , the second bus bar 244 may also include a disc spring 249 disposed between the first bus bar 242 and the second bus bar 244 in the area where the first regulating member 247 is disposed, to replace the compression coil spring 248. The disc spring 249 compresses the first bus bar 242 in a direction away from the second bus bar 244. Thus, the disc spring 249 pushes the first bus bar 242 to the first regulating member 247, i.e., the head of the bolt.

The disc spring 249 is a conductive component, and the electrical conduction between the first bus bar 242 and the second bus bar 244 is ensured by the disc spring 249. In addition, the first regulating component 247 is also a conductive component, and the electrical conduction between the first bus bar 242 and the second bus bar 244 is ensured by the first regulating component 247. Among them, the contact surface of the disc spring 249 with the first bus bar 242 extends in the first direction, so the disc spring 249 does not hinder the first bus bar 242 from moving along the first direction.

FIG. 11 and FIG. 12 are schematic perspective views of a position adjustment mechanism of an embodiment. The coating device 1000 includes a position adjustment mechanism 290 configured to adjust the position of the first bus bar 242 relative to the panel 230. The position adjustment mechanism 290 is disposed on the fixed module 200. The position adjustment mechanism 290 includes: an arm 292 for holding the first bus bar 242, a first driving member 298 for moving the arm 292 in a first direction, and a second driving member 296 for moving the arm 292 in an extending direction of the first bus bar 242 and in a second direction (vertical direction) orthogonal to the first direction. The first driving member 298 and the second driving member 296 can be implemented by a well-known mechanism such as a motor or a cylinder. FIG. 11 shows a state where the arm 292 does not hold the first bus bar 242, and FIG. 12 shows a state where the arm 292 holds the first bus bar 242.

Figures 13 to 18 are enlarged oblique views of a contact member and a position adjustment mechanism of an implementation form. Figure 19 is an enlarged oblique view of a contact member of an implementation form. As shown in Figure 13, the second bus bar 244 has a second regulating member 241. The second regulating member 241 is a member for regulating the movement of the first bus bar 242 in the first direction.

Specifically, the second regulating member 241 has a proximal regulating member 241a that regulates the movement of the first bus bar 242 in a direction close to the central opening 234a when the proximal end 247a of the first regulating member 247 is in contact with the edge of the long hole 246 (Figure 17). In addition, the second regulating member 241 has a distal regulating member 241b that regulates the movement of the first bus bar 242 in a direction away from the central opening 234a when the distal end 247b of the first regulating member 247 is in contact with the edge of the long hole 246 (Figure 15).

The proximal regulating member 241a and the distal regulating member 241b are formed by a plate spring. The proximal regulating member 241a and the distal regulating member 241b are located in the moving path of the first direction of the first bus bar 242 when no external force is applied, and contact the first bus bar 242 to regulate the movement. On the other hand, the proximal regulating member 241a and the distal regulating member 241b are configured so that if an external force is applied and they are pressed toward the second bus bar 244, they are not located in the moving path of the first direction of the first bus bar 242, and the movement of the first bus bar 242 is released.

The arm 292 includes a proximal pressing member 293 for releasing the movement regulation of the first bus bar 242 by pressing the proximal regulating member 241a. In addition, the arm 292 includes a distal pressing member 294 for releasing the movement regulation of the first bus bar 242 by pressing the distal regulating member 241b. In addition, the arm 292 includes a gripping portion 295 that is fitted into the gripping hole 242a of the first bus bar 242.

FIG. 15 shows a state where the first bus bar 242 moves to the position closest to the central opening 234a. In this state, the edge of the long hole 246 of the first bus bar 242 contacts the distal end 247b of the first regulating member 247, so the first bus bar 242 regulates movement in the direction close to the central opening 234a. On the other hand, in this state, no external force is applied to the distal regulating member 241b of the second regulating member 241, and the distal regulating member 241b exists in the movement path of the first direction of the first bus bar 242, so the first bus bar 242 regulates movement in the direction away from the central opening 234a. As a result, the first bus bar 242 is fixed at the position closest to the central opening 234a.

FIG. 16 shows a state where the arm 292 holds the first bus bar 242. In this state, the remote pressing member 294 of the arm 292 presses the remote regulating member 241b, thereby releasing the regulation of the movement of the first bus bar 242 away from the central opening 234a. In addition, the holding portion 295 of the arm 292 is engaged with the holding hole 242a of the first bus bar 242. Thus, the first driving member 298 of the position adjustment mechanism 290 can move the first bus bar 242 in a direction away from the central opening 234a.

FIG. 17 shows a state where the first bus bar 242 moves to the position farthest from the central opening 234a. In this state, the edge of the long hole 246 of the first bus bar 242 contacts the proximal end 247a of the first regulating member 247, so the first bus bar 242 is regulated to move in a direction away from the central opening 234a. On the other hand, in this state, no external force is applied to the proximal regulating member 241a of the second regulating member 241, and the proximal regulating member 241a exists in the movement path of the first bus bar 242 in the first direction, so the first bus bar 242 is regulated to move in a direction close to the central opening 234a. As a result, the first bus bar 242 is fixed at the position farthest from the center opening 234a.

As shown above, through this embodiment, the first bus bar 242 and the feeding contact 243 can be moved to the second bus bar 244 (frame member 234) and fixed at multiple positions, so that a substrate holder 210 that can correspond to various types of substrates with different feeding positions can be realized.

The above description shows an example of using the position adjustment mechanism 290 to move the first bus bar 242, but it is not limited to this. Figures 20 to 23 are schematic oblique views of a contact member and a position adjustment tool in an implementation form.

The position adjustment jig 280 includes a jig body 281 extending along the first bus bar 242, a jig proximal pressing member 285 provided at an end of the jig body 281 in the extending direction, and a jig distal pressing member 284 provided at an end of the jig body 281 in the extending direction. The jig proximal pressing member 285 has the same function as the proximal pressing member 293. That is, the jig proximal pressing member 285 is a member for pressing the proximal regulating member 241a to release the regulation of the movement of the first bus bar 242. In addition, the jig distal pressing member 284 has the same function as the distal pressing member 294. That is, the jig remote pressing member 284 is a member used to release the movement regulation of the first bus bar 242 by pressing the remote regulating member 241b.

As shown in FIG. 20 and FIG. 21 , the position adjustment tool 280 includes a first claw member 282 disposed on the side opposite to the central opening 234a of the tool body 281. In addition, as shown in FIG. 22 , the position adjustment tool 280 includes a second claw member 283 disposed on the side of the central opening 234a of the tool body 281.

FIG. 20 shows a state before the first claw member 282 is embedded in the gap between the first bus bar 242 and the second bus bar 244. FIG. 21 shows a state after the first claw member 282 is embedded in the gap between the first bus bar 242 and the second bus bar 244. FIG. 22 shows a state after the second claw member 283 is embedded in the gap between the first bus bar 242 and the second bus bar 244.

As shown in FIG23, the first claw member 282 and the second claw member 283 are configured to slightly float the first bus bar 242 from the second bus bar 244 when they are inserted into the gap between the first bus bar 242 and the second bus bar 244. That is, the position adjustment tool 280 of the present embodiment is assumed to be a situation where the first bus bar 242 is pressed toward the second bus bar 244 by the compression coil spring 248. As shown in FIG23, the first bus bar 242 is slightly floated from the second bus bar 244 by the first claw member 282 and the second claw member 283, thereby making the movement of the first bus bar 242 to the second bus bar 244 smoother. The first claw member 282 and the second claw member 283 may not be provided. In particular, if the disc spring 249 is used to replace the compression coil spring 248, the first claw member 282 and the second claw member 283 may not be provided.

Next, the substrate installation method is described. FIG. 24 is a flow chart of a substrate installation method in an implementation form. The substrate installation method first stores the substrate holder 210 in the fixed module 200 (step S101). At this time, the substrate holder 210 is arranged in the fixed module 200 in such a way that the bottom plate 220 is at the bottom and the panel 230 is at the top.

Next, the substrate installation method uses the locking mechanism 270 to unlock the substrate holder 210 (step S102). Next, the substrate installation method lifts the panel 230 upward (step S103). Next, the substrate installation method inserts the arm 292 of the position adjustment mechanism 290 between the bottom plate 220 and the panel 230 (step S104).

Next, the substrate installation method is to use the arm 292 to hold the first bus bar 242 and move the first bus bar 242 (step S105). For example, step S105 is to move the first bus bar 242 to the position closest to the central opening 234a or the position farthest from the central opening 234a according to the specification of the feeding position of the substrate WF. Next, the substrate installation method is to make the arm 292 retreat from between the bottom plate 220 and the panel 230 (step S106).

Next, the substrate installation method is to place the substrate WF on the upper surface of the bottom plate 220 (step S107). Next, the substrate installation method is to lower the panel 230 and clamp the substrate WF with the bottom plate 220 and the panel 230 (step S108).

Next, the substrate installation method uses the locking mechanism 270 to lock the substrate holder 210 (step S109). Thereby, the substrate WF is clamped in the substrate holder 210. Next, the substrate installation method removes the substrate holder 210 from the fixed module 200 (step S110).

By using the substrate installation method of this embodiment, the first bus bar 242 and the feeding contact 243 can be moved to the second bus bar 244 (frame member 234) and fixed at multiple positions, so it can correspond to various types of substrates with different feeding positions.

The above describes some implementation forms of the present invention, but the implementation forms of the present invention are used to facilitate the understanding of the present invention and are not intended to limit the present invention. The present invention can be changed and improved without departing from its gist, and it goes without saying that the present invention includes its equivalents. In addition, any combination or omission of the components described in the scope of the patent application and the specification can be carried out within the scope of solving at least part of the above-mentioned problems or achieving at least part of the effects.

In one embodiment, the present invention discloses a substrate holder, which includes: a bottom plate; a panel, which is used to hold the substrate together with the bottom plate, and has a central opening and a frame member surrounding the central opening; and a contact member, which has: a first bus bar movably mounted on the frame member, and a feeding contact mounted on the first bus bar.

In addition, in one embodiment, the present case discloses a substrate holder, wherein the central opening is formed into a rectangle, and the contact member is mounted on the frame member in a pair with the rectangular central opening sandwiched therebetween, or is mounted on the four sides of the frame member in a manner of surrounding the rectangular central opening.

In addition, in one embodiment, the present invention discloses a substrate holder, wherein the contact member further comprises: a second bus bar fixed to the frame member, and the first bus bar is mounted on the second bus bar so as to be movable relative to the second bus bar.

In addition, in one embodiment, the present invention discloses a substrate holder, wherein the first bus bar is configured to be movable in a first direction approaching and moving away from the central opening, and the second bus bar has a guide member disposed at both ends of the extension direction of the first bus bar and used to control the movement direction of the first bus bar to the first direction.

In addition, in one embodiment, the present invention discloses a substrate holder, wherein the first bus bar has a long hole that is longer in the first direction than the extension direction of the first bus bar, and the second bus bar has: a first regulating member that is arranged at a position corresponding to the long hole and has: a proximal end that contacts the edge of the long hole when the first bus bar moves in a direction away from the central opening, and a distal end that contacts the edge of the long hole when the first bus bar moves in a direction close to the central opening.

In addition, in one embodiment, the present invention discloses a substrate holder, wherein the second bus bar has a second regulating member, the second regulating member having a proximal regulating member for regulating the movement of the first bus bar in a direction close to the central opening when the proximal end of the first regulating member contacts the edge of the long hole; and a distal regulating member for regulating the movement of the first bus bar in a direction away from the central opening when the distal end of the first regulating member contacts the edge of the long hole.

In addition, in one embodiment, the present case discloses a coating device, which includes: a substrate holder as described in any one of the above; and a position adjustment mechanism, which is configured to adjust the position of the first bus bar relative to the panel.

In addition, in one embodiment, the present case discloses a coating device, wherein the position adjustment mechanism comprises: an arm for holding the first bus bar; a first driving member for moving the arm toward a first direction approaching and moving away from the central opening; and a second driving member for moving the arm toward an extension direction of the first bus bar and a second direction orthogonal to the first direction.

In addition, in one embodiment, the present invention discloses a coating device, wherein the arm includes: a proximal pressing member for pressing the proximal regulating member to release the regulation of the movement of the first bus bar, and a distal pressing member for pressing the distal regulating member to release the regulation of the movement of the first bus bar.

210:Substrate holder

230: Panel

234: Frame components

234a: Central opening

240: Contact components

242: Busbar 1

243: Feedback contact

244: Busbar No. 2

245: Guiding component

Claims (7)

A substrate holder, comprising: a bottom plate; a panel, which is used to hold a substrate together with the bottom plate, and has a central opening and a frame member surrounding the central opening; and a contact member, which has: a first bus bar mounted on the frame member movably relative to the frame member, and a feeder contact mounted on the first bus bar; wherein the central opening is formed in a rectangular shape, the contact member is mounted on the frame member in a pair with the rectangular central opening, or is mounted on the four sides of the frame member in a manner of surrounding the rectangular central opening, wherein the contact member further comprises: a second bus bar fixed to the frame member, The first bus bar is mounted on the second bus bar so as to be movable relative to the second bus bar. The substrate holder of claim 1, wherein the first bus bar is configured to be movable in a first direction toward and away from the central opening, and the second bus bar has a guide member disposed at both ends of the extension direction of the first bus bar and used to control the movement direction of the first bus bar to the first direction. The substrate holder of claim 2, wherein the first bus bar has a long hole that is longer in the first direction than the extension direction of the first bus bar, and the second bus bar has: a first regulating member, which is a first regulating member arranged at a position corresponding to the long hole, and has: a proximal end that contacts the edge of the long hole when the first bus bar moves in a direction away from the central opening, and a distal end that contacts the edge of the long hole when the first bus bar moves in a direction close to the central opening. A substrate holder as claimed in claim 3, wherein the second bus bar comprises: a second regulating member, which comprises: a proximal regulating member for regulating the movement of the first bus bar in a direction approaching the central opening when the proximal end of the first regulating member is in contact with the edge of the long hole; and a distal regulating member for regulating the movement of the first bus bar in a direction away from the central opening when the distal end of the first regulating member is in contact with the edge of the long hole. A coating device, comprising: A substrate holder as in any one of claims 1 to 4; and A position adjustment mechanism configured to adjust the position of the first bus bar relative to the panel. A coating device as claimed in claim 5, wherein the position adjustment mechanism comprises: an arm for holding the first bus bar; a first driving member for moving the arm in a first direction approaching and away from the central opening; and a second driving member for moving the arm in an extension direction of the first bus bar and in a second direction orthogonal to the first direction. A coating device, comprising: A substrate holder as claimed in claim 4; and A position adjustment mechanism, which is configured to adjust the position of the first bus bar relative to the panel, The position adjustment mechanism comprises: an arm for holding the first bus bar; a first driving member for moving the arm toward a first direction approaching and away from the central opening; and a second driving member for moving the arm toward an extension direction of the first bus bar and a second direction orthogonal to the first direction, The arm comprises: a proximal pressing member for pressing the proximal regulating member to release the regulation of the movement of the first bus bar, and a distal pressing member for pressing the distal regulating member to release the regulation of the movement of the first bus bar.

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