TWI889069B - Control method, device, equipment, medium and product for semiconductor material transport - Google Patents

Abstract

The present application embodiment discloses a control method, device, equipment, medium and product for semiconductor material transportation. The method is applied to a transportation equipment controller, and the transportation equipment controller responds to a first transportation command to control the transportation equipment to obtain a target semiconductor material from a warehouse, wherein the first transportation command includes transporting the target semiconductor material from the warehouse to a target loading port of a first process equipment, and then obtaining the loading port status of the target loading port of the first process equipment from the first process equipment. When the loading port status is abnormal, the transportation equipment is controlled to stop executing the first transportation command.

Description

Control method, device, equipment, medium and product for semiconductor material transport

This application claims priority to Chinese Patent Application No. 202310632293.4 filed in China on May 31, 2023, the entire contents of which are incorporated herein by reference.

The present application embodiment relates to the field of control technology, and more particularly to a control method, device, equipment, computer-readable storage medium and computer program product for semiconductor material transport.

In the semiconductor production process, when a process equipment needs materials, the materials are usually transported from a warehouse to the process equipment through a transport device to meet the production needs of the process equipment.

Normally, when the process equipment needs materials, the empty loading port status will be reported to the Manufacturing Execution System (MES) through the Equipment Automation Program (EAP). The Manufacturing Execution System generates a command to transport the materials from the warehouse to the process equipment, and then sends the command to the Material Control System (MCS). The Material Control System sends the command to the corresponding transport equipment controller according to the command. The equipment controller controls the transport equipment according to the command to transport the materials from the warehouse to the process equipment.

However, in actual processes, process equipment may have anomalies, and the transport equipment can only be informed of the anomaly when it reaches the loading port of the process equipment. Therefore, the transport distance and time are wasted, affecting the transport efficiency.

Therefore, the industry is in urgent need of a control method for transporting semiconductor materials with higher transport efficiency.

In view of this, the embodiment of the present application is expected to provide a control method for semiconductor material transport, which can improve the transport efficiency of semiconductor materials. The present application also provides a device, equipment, medium and program product corresponding to the method.

The technical solution of this application embodiment is implemented as follows:

In a first aspect, the present application embodiment provides a control method for semiconductor material transport, the method being applied to a transport equipment controller, comprising:

In response to a first transport command, controlling the transport equipment to obtain a target semiconductor material from a warehouse, wherein the first transport command includes transporting the target semiconductor material from the warehouse to a target loading port of a first process equipment;

Obtaining a loading port status of a target loading port of the first process equipment from the first process equipment;

When the loading port is in an abnormal state, the transport device is controlled to stop executing the first transport command.

In some possible implementations, the method further includes:

Report abnormal status of the loading port;

Obtaining a second transport command, wherein the second transport command includes transporting the target semiconductor material to a target loading port of a second process equipment;

The transporting device is controlled to transport the target semiconductor material to a target loading port of the second process device.

In some possible implementations, obtaining the loading port status of the target loading port of the first process equipment from the first process equipment includes:

The loading port status of the target loading port of the first process equipment is obtained from the first process equipment through industrial Ethernet protocol communication.

In some possible implementations, the transport equipment includes at least one of an automatic guided vehicle and an aerial unmanned transport vehicle.

In some possible implementations, obtaining the loading port status of the target loading port of the first process equipment from the first process equipment includes:

A loading port state of the target loading port of the first process equipment is obtained from the target loading port of the first process equipment.

In some possible implementations, obtaining the loading port status of the target loading port of the first process equipment from the first process equipment includes:

The load port status of the target load port of the first process equipment is obtained from the first process equipment at a fixed period.

In a second aspect, the present application embodiment provides a control device for semiconductor material transport, wherein the device is deployed in a transport equipment controller, and comprises:

A control module, configured to control a transport device to obtain a target semiconductor material from a warehouse in response to a first transport command, wherein the first transport command includes transporting the target semiconductor material from the warehouse to a target loading port of a first process device;

a communication module, configured to obtain a loading port status of a target loading port of the first process equipment from the first process equipment;

The control module is also used to control the transport device to stop executing the first transport command when the loading port is in an abnormal state.

In some possible implementations, the communication module is further used to:

Report abnormal status of the loading port;

Obtaining a second transport command, wherein the second transport command includes transporting the target semiconductor material to a target loading port of a second process equipment;

The control module is also used to control the transporting equipment to transport the target semiconductor material to the target loading port of the second process equipment.

In some possible implementations, the communication module is specifically used for:

The loading port status of the target loading port of the first process equipment is obtained from the first process equipment through industrial Ethernet protocol communication.

In some possible implementations, the transport equipment includes at least one of an automatic guided vehicle and an aerial unmanned transport vehicle.

In some possible implementations, the communication module is specifically used for:

A loading port state of the target loading port of the first process equipment is obtained from the target loading port of the first process equipment.

In some possible implementations, the communication module is specifically used for:

The load port status of the target load port of the first process equipment is obtained from the first process equipment at a fixed period.

In a third aspect, an embodiment of the present application provides a device, the device comprising a processor and a memory. The processor and the memory communicate with each other. The processor is used to execute instructions stored in the memory, so that the device executes the control method for semiconductor material transportation in the first aspect or any implementation of the first aspect.

In a fourth aspect, the present application provides a computer-readable storage medium in which instructions are stored, and the instructions instruct a device to execute the control method for semiconductor material transport described in the first aspect or any one of the implementations of the first aspect.

In a fifth aspect, the present application provides a computer program product comprising instructions, which, when executed on a device, enables the device to execute the control method for semiconductor material transport described in the first aspect or any one of the implementations of the first aspect.

Based on the implementation methods provided in the above aspects, this application can be further combined to provide more implementation methods.

From the above technical solutions, it can be seen that the present application embodiment has the following advantages:

The embodiment of the present application provides a control method for semiconductor material transport, wherein the method controls the transport equipment to obtain target semiconductor materials from a warehouse by a transport equipment controller in response to a first transport command, wherein the first transport command includes transporting the target semiconductor materials from the warehouse to a target loading port of a first process equipment, and then obtaining the loading port status of the target loading port of the first process equipment from the first process equipment, and when the loading port status is abnormal, the transport equipment is controlled to stop executing the first transport command. Thus, during the transport process, the transport equipment can obtain the loading port status of the target loading port in a timely manner, and when it is abnormal, the transport equipment is controlled to stop in a timely manner, thereby avoiding ineffective transport and improving transport efficiency.

The following will combine the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application.

The terms "first" and "second" in the embodiments of the present application are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features.

In the semiconductor production process, when a process equipment needs materials, the materials are usually transported from a warehouse to the process equipment through a transport device to meet the production needs of the process equipment.

Normally, as shown in Figure 1, when the process equipment needs materials, the empty loading port status (load request) will be reported to the Manufacturing Execution System (MES) through the Equipment Automation Program (EAP). The Manufacturing Execution System generates a command to transport the materials from the warehouse to the process equipment, and then sends the command to the Material Control System (MCS). The Material Control System sends the command to the corresponding transport equipment controller according to the command. The transport equipment controller controls the transport equipment according to the command to transport the materials from the warehouse to the process equipment.

However, in actual processes, process equipment may have anomalies, and the transport equipment can only be informed of the anomaly when it reaches the loading port of the process equipment. Therefore, the transport distance and time are wasted, affecting the transport efficiency.

In view of this, the present application provides a control method for semiconductor material transport, which is applied to a transport equipment controller. The transport equipment controller is used to communicate with a material control system, a transport equipment, and a first process equipment. In this solution, the transport equipment controller can be any device with data processing capabilities, such as a server, or a terminal device such as a desktop computer, a laptop, or a smart phone.

Specifically, the transport equipment controller responds to the first transport command and controls the transport equipment to obtain the target semiconductor material from the warehouse, wherein the first transport command includes transporting the target semiconductor material from the warehouse to the target loading port of the first process equipment, and then obtaining the loading port status of the target loading port of the first process equipment from the first process equipment. When the loading port status is abnormal, the transport equipment is controlled to stop executing the first transport command. Thus, during the transport process, the transport equipment can obtain the loading port status of the target loading port in a timely manner, and when it is abnormal, the transport equipment is controlled to stop in time, thereby avoiding ineffective transport and improving transport efficiency.

In order to facilitate understanding of the technical solution of the present application, a control method for semiconductor material transport provided by the present application is introduced below in conjunction with FIG. 1.

Referring to the flow chart of a semiconductor material transport control method shown in FIG2 , the specific steps of the method are as follows:

S202: The transport equipment controller responds to the first transport command and controls the transport equipment to obtain the target semiconductor material from the warehouse.

The first transport command includes transporting the target semiconductor material from the warehouse to a target loading port of the first process equipment. The target semiconductor material is the material that needs to be transported.

The first transport command is generated by the manufacturing execution system. Specifically, when the target loading port of the first process equipment needs to be loaded, a loading request will be sent, and the loading request will be sent to the manufacturing execution system through the equipment automation system. The manufacturing execution system generates a first transport command based on the loading request and warehouse information, and sends the first transport command to the transport equipment controller through the material control system. Specifically, the manufacturing execution system sends the first transport command to the material control system, and the material control system forwards the first transport command to the corresponding transport equipment controller. Among them, the loading request can be sent when the sensor of the loading port obtains that the material at the loading port is empty.

When the transport equipment controller obtains the first transport command sent by the material control system, it responds to the first transport command and controls the transport equipment to obtain the target semiconductor material from the warehouse.

S204: The transport equipment controller obtains the loading port status of the target loading port of the first process equipment from the first process equipment.

The first process equipment will send the loading port status of the target loading port of the equipment to the corresponding transport equipment controller according to a fixed period, so that the transport equipment controller can obtain the loading port status of the target loading port in time.

Among them, the first process equipment and the transport control are both low-level equipment, so their communication and interaction are relatively simple.

In some possible implementations, the target loading port of the first process equipment sends the loading port status of the target loading port to the transport equipment controller, so that the loading port of the first process equipment can communicate directly with the transport equipment controller without transmitting through the first equipment automation system, manufacturing execution system and material control system, thereby reducing delays and avoiding abnormal situations that may be caused by transmission through the first equipment automation system, manufacturing execution system and material control system.

S206: When the loading port is in an abnormal state, the transport device controller controls the transport device to stop executing the first transport command.

The transport equipment controller obtains the loading port status of the target loading port of the first process equipment from the first process equipment, including normal and abnormal. When the loading port status is normal, the transport equipment controller controls the transport equipment to execute the first transport command. When the loading port status is abnormal, it indicates that the target semiconductor material does not need to be transported to the target loading port of the first process equipment at this time, so the transport equipment controller can stop executing the first transport command through the transport equipment to avoid wasting time and distance.

In some possible implementations, when the transport equipment controller obtains that the loading port status is abnormal, it can also report the abnormal status of the loading port; obtain a second transport command, the second transport command includes transporting the target semiconductor material to the target loading port of the second process equipment; control the transport equipment to transport the target semiconductor material to the target loading port of the second process equipment.

Specifically, the transport equipment controller may report the abnormal state of the loading port to the material control system. After obtaining the abnormal state, the material control system generates a second transport command, wherein the second transport command includes transporting the target semiconductor material to the target loading port of the second process equipment. The transport equipment controller obtains the second transport command sent by the material control system, and controls the transport equipment to transport the target semiconductor material to the target loading port of the second process equipment.

Therefore, when the target loading port of the first process equipment is in an abnormal state, the transport equipment is stopped by timely control, and a new target loading port, i.e., the target loading port of the second process equipment, is determined, thereby avoiding ineffective transport caused by abnormal loading of the target loading port of the first process equipment and improving transport efficiency.

Normally, the communication method between the handling equipment and the process equipment is near field communication based on the E84 protocol. Specifically, E84 sensors are installed on both equipment ends to achieve close-range point-to-point communication. However, this method not only requires that each docking loading port be equipped with an E84 sensor, but the cost is relatively high. In addition, for handling equipment (especially aerial unmanned transport vehicles), there are many wiring points, and the on-site debugging tasks are heavy.

Figure 3 shows a schematic diagram of an E84 communication method. Each docking port of each device requires an E84 sensor, which requires a large number of sensors and wiring, resulting in high costs. Therefore, the handling equipment can only communicate with the process equipment when it is close to it, and can only know whether it is abnormal.

Therefore, this solution can improve the communication. Specifically, the process equipment and the handling equipment all use Ethernet industrial protocol (EtherNet/IP, EIP) for communication, and the controllers of both equipment (such as programmable logic controller (PLC)) use EIP communication modules. The EIP communication modules are connected in series through network cables, and the network cable layout is moved from the sky to the floor, so only one network cable is needed for each device.

Figure 4 is a schematic diagram of an EIP communication device. Among them, EIP is long-distance communication, and only an EIP module needs to be installed on each device, which is relatively low in cost. In addition, the handling equipment does not need to be close to the process equipment to monitor the signal in real time and realize advance communication. Furthermore, the command status can be changed during the movement of the handling equipment, such as stopping the execution of the first handling command, thereby avoiding invalid handling. Among them, long-distance communication can realize real-time monitoring of the loading port status, reduce the number of times to find poor communication problems, and reduce the number of invalid handling times.

Specifically, in this solution, a unified EIP is used for communication between process equipment and transport equipment, and the corresponding controllers (such as PLC) all use EIP communication modules, which are connected in series via network cables. During the actual transportation process, the network cables can be moved under the floor, and each device only needs one output network cable.

As shown in Figure 5, it is a schematic diagram of a device communication address. The Overhead Hoist Transport (OHT) controller controls the Overhead Hoist Transport (OHT), including OHT01, OHT02 and OHT03. The OHT EIP module communicates with the EQ EIP through a hub. Each process equipment controller (EQ PLC) corresponds to an EQ EIP module. The OHT EIP module is used for multiple device address definitions (such as EQ01, EQ02, EQ03 and EQ04. The EQ EIP module is used for the definition of multiple loading port communication signals in EQ01 (such as port01 and port02), as well as the definition of EQ01 IP.

For example, the IP corresponding to EQ01 is 01, and the communication address is W01-W02, the IP corresponding to EQ02 is 02, and the communication address is W03-W04, the IP corresponding to EQ03 is 03, and the communication address is W05-W06, the IP corresponding to EQ04 is 04, and the communication address is W07-W08, the communication address corresponding to EQ0x is W09-W0X, and the IP corresponding to OHTC is 00, and the communication address is W01-W0X.

In this way, by installing EIP modules in a unified manner and centrally laying out the network, the EIP communication method can be used to set the communication IP and communication address in advance, reducing the amount of wiring. In addition, direct communication between the transport equipment controller and the underlying equipment of the process equipment can be achieved, which speeds up signal processing and improves transport efficiency.

In some possible implementations, the transport equipment includes at least one of an automated guided vehicle (AGV), a storage system, and an unmanned aerial vehicle. The transport equipment controller includes at least one of an automated guided vehicle controller, a storage system controller, and an unmanned aerial vehicle controller.

As shown in Figure 6, the handling equipment includes an automatic guided vehicle and an aerial unmanned transport vehicle. Among them, the process equipment EIP module and the storage system (stocker, STK) EIP module are connected through a network cable, the process equipment EIP module and the EIP communication module corresponding to the aerial unmanned transport vehicle controller are connected through a hub, and the storage system EIP module is connected through the EIP communication module corresponding to the automatic guided vehicle controller through a hub.

Based on the description of the above content, this solution provides a control method for semiconductor material transportation. As shown in Figure 7, when the target loading port of the first process equipment needs materials, the empty state of the loading port will be reported to the manufacturing execution system through the equipment automation system. The manufacturing execution system generates a first transport command to transport the material from the warehouse to the process equipment, and then sends the first transport command to the material control system. The material control system sends it to the corresponding transport equipment controller according to the command. The equipment controller controls the transport equipment according to the command to transport the material from the warehouse to the process equipment according to the command. In addition, the first process equipment monitors the loading port status of the target loading port of the first process equipment in real time through the EIP signal to the transport equipment controller. When the signal monitoring indicates that the loading port state is abnormal, the transport equipment controller controls the transport equipment to stop executing the first transport command.

Corresponding to the above method embodiment, the present application also provides a control device for semiconductor material transportation, as shown in FIG8 . The device is deployed in a transportation equipment controller, and the device 800 includes: a control module 802 and a communication module 804 .

A control module, configured to control a transport device to obtain a target semiconductor material from a warehouse in response to a first transport command, wherein the first transport command includes transporting the target semiconductor material from the warehouse to a target loading port of a first process device;

a communication module, configured to obtain a loading port status of a target loading port of the first process equipment from the first process equipment;

The control module is also used to control the transport device to stop executing the first transport command when the loading port is in an abnormal state.

In some possible implementations, the communication module is further used to:

Report abnormal status of the loading port;

Obtaining a second transport command, wherein the second transport command includes transporting the target semiconductor material to a target loading port of a second process equipment;

The control module is also used to control the transporting equipment to transport the target semiconductor material to the target loading port of the second process equipment.

In some possible implementations, the communication module is specifically used for:

The loading port status of the target loading port of the first process equipment is obtained from the first process equipment through industrial Ethernet protocol communication.

In some possible implementations, the transport equipment includes at least one of an automatic guided vehicle and an aerial unmanned transport vehicle.

In some possible implementations, the communication module is specifically used for:

A loading port state of the target loading port of the first process equipment is obtained from the target loading port of the first process equipment.

In some possible implementations, the communication module is specifically used for:

The load port status of the target load port of the first process equipment is obtained from the first process equipment at a fixed period.

The present application provides a device for implementing a control method for semiconductor material transport. The device includes a processor and a memory. The processor and the memory communicate with each other. The processor is used to execute instructions stored in the memory so that the device executes the control method for semiconductor material transport.

The present application provides a computer-readable storage medium in which instructions are stored. When the instructions are run on a device, the device executes the control method for transporting semiconductor materials.

This application provides a computer program product containing instructions, which, when run on a device, enables the device to execute the above-mentioned control method for semiconductor material transportation.

It should also be noted that the device embodiments described above are merely illustrative, wherein the units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place, or they may be distributed over multiple network units. Some or all of the modules may be selected according to actual needs to achieve the purpose of the present embodiment. In addition, in the device embodiment drawings provided by the present application, the connection relationship between the modules indicates that there is a communication connection between them, which may be specifically realized as one or more communication buses or signal lines.

Through the above description of the implementation, the technical personnel in the relevant field can clearly understand that the present application can be implemented by means of software plus necessary general hardware, and of course can also be implemented by dedicated hardware including dedicated integrated circuits, dedicated central processing units (CPUs), dedicated memories, dedicated components, etc. In general, all functions completed by computer programs can be easily implemented by corresponding hardware, and the specific hardware structures used to implement the same function can also be diverse, such as analog circuits, digital circuits, or dedicated circuits. However, for the present application, software program implementation is a better implementation in most cases. Based on this understanding, the technical solution of the present application, or the part that contributes to the prior art, can be embodied in the form of a software product, which is stored in a readable storage medium, such as a computer floppy disk, USB flash drive, mobile hard disk, read-only memory (ROM), random access memory (RAM), magnetic disk or optical disk, etc., and includes a number of instructions for enabling a computer device (which can be a personal computer, training equipment, or network equipment, etc.) to execute the methods described in the various embodiments of the present application.

In the above embodiments, all or part of the embodiments may be implemented by software, hardware, firmware or any combination thereof. When implemented by software, all or part of the embodiments may be implemented in the form of a computer program product.

The computer program product includes one or more computer instructions. When the computer program instructions are loaded and executed on a computer, the process or function described in the embodiment of the present application is generated in whole or in part. The computer may be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions may be stored in a computer-readable storage medium, or transmitted from one computer-readable storage medium to another computer-readable storage medium. For example, the computer instructions may be transmitted from a website, a computer, a training device, or a data center to another website, a computer, a training device, or a data center by wired (e.g., coaxial cable, optical fiber, digital subscriber line (DSL)) or wireless (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium may be any available medium that can be stored by a computer or a data storage device such as a training device or a data center that includes one or more available media. The available medium may be a magnetic medium (e.g., a floppy disk, a hard disk, a magnetic tape), an optical medium (e.g., a digital video disc (DVD)), or a semiconductor medium (e.g., a solid state disk (SSD)).

It should be noted that the technical solutions described in the embodiments of this application can be combined arbitrarily without conflict.

The above is only the specific implementation of this application, but the protection scope of this application is not limited thereto. Any technical personnel familiar with this technical field can easily think of changes or substitutions within the technical scope disclosed in this application, which should be covered by the protection scope of this application. Therefore, the protection scope of this application should be based on the protection scope of the claims.

S202: The transport equipment controller responds to the first transport command and controls the transport equipment to obtain the target semiconductor material from the warehouse S204: The transport equipment controller obtains the loading port status of the target loading port of the first process equipment from the first process equipment S206: When the loading port status is abnormal, the transport equipment controller controls the transport equipment to stop executing the first transport command 800: Device 802: Control module 804: Communication module

In order to more clearly illustrate the technical method of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technical personnel in this field, other drawings can be obtained based on these drawings without creative labor.

FIG1 is a schematic diagram of semiconductor material transportation;

FIG2 is a schematic diagram of a process flow of a semiconductor material transport control method provided in an embodiment of the present application;

FIG3 is a schematic diagram of a device for communication of E84;

FIG4 is a schematic diagram of a device for an EIP communication method provided in an embodiment of the present application;

FIG5 is a schematic diagram of a device communication address provided in an embodiment of the present application;

FIG6 is a schematic diagram of a transport device provided in an embodiment of the present application;

FIG7 is a schematic diagram of a semiconductor material transport provided in an embodiment of the present application;

FIG8 is a schematic diagram of the structure of a semiconductor material transport control device provided in an embodiment of the present application.

S202: The transport equipment controller responds to the first transport command and controls the transport equipment to obtain the target semiconductor material from the warehouse

S204: The transport equipment controller obtains the loading port status of the target loading port of the first process equipment from the first process equipment

S206: When the loading port is in an abnormal state, the transport equipment controller controls the transport equipment to stop executing the first transport command

Claims (9)

A control method for semiconductor material transport, the method is applied to a transport equipment controller, the method comprising: In response to a first transport command, controlling the transport equipment to obtain a target semiconductor material from a warehouse, the first transport command comprising transporting the target semiconductor material from the warehouse to a target loading port of a first process equipment; Obtaining the loading port status of the target loading port of the first process equipment from the first process equipment; When the loading port status is abnormal, controlling the transport equipment to stop executing the first transport command; Wherein, the method further comprises: Reporting the abnormal status of the loading port; Obtaining a second transport command, the second transport command comprising transporting the target semiconductor material to the target loading port of a second process equipment; the second transport command is generated by a material control system and sent to the transport equipment controller; Control the transporting equipment to transport the target semiconductor material to the target loading port of the second process equipment. The method of claim 1, wherein obtaining the loading port status of the target loading port of the first process equipment from the first process equipment comprises: Obtaining the loading port status of the target loading port of the first process equipment from the first process equipment via industrial Ethernet protocol communication. A method as described in claim 1, wherein the transport equipment includes at least one of an automatic guided vehicle and an aerial unmanned transport vehicle. The method of claim 1, wherein obtaining the loading port status of the target loading port of the first process equipment from the first process equipment comprises: Obtaining the loading port status of the target loading port of the first process equipment from the target loading port of the first process equipment. As described in claim 1, the step of obtaining the loading port status of the target loading port of the first process equipment from the first process equipment comprises: Obtaining the loading port status of the target loading port of the first process equipment from the first process equipment at a fixed period. A control device for semiconductor material transport, the device is deployed in a transport equipment controller, and the device includes: A control module, used to respond to a first transport command, control the transport equipment to obtain a target semiconductor material from a warehouse, wherein the first transport command includes transporting the target semiconductor material from the warehouse to a target loading port of a first process equipment; A communication module, used to obtain the loading port status of the target loading port of the first process equipment from the first process equipment; The control module is also used to control the transport equipment to stop executing the first transport command when the loading port status is abnormal; Wherein, the communication module is also used to: Report the abnormal status of the loading port; A second transport command is obtained, wherein the second transport command includes transporting the target semiconductor material to the target loading port of the second process equipment; the second transport command is generated by the material control system and sent to the transport equipment controller; the control module is also used to control the transport equipment to transport the target semiconductor material to the target loading port of the second process equipment. A semiconductor material handling control device, the device comprising a processor and a memory; The processor is used to execute instructions stored in the memory, so that the device executes the method described in any one of claim items 1 to 5. A computer-readable storage medium for semiconductor material handling control includes instructions that instruct a device to execute a method as described in any one of claims 1 to 5. A computer program product for semiconductor material handling control, when the computer program product is run on a computer, enables the computer to execute the method described in any one of claims 1 to 5.

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