TWI888242B - Electrode device - Google Patents

Abstract

An electrode device includes an electrode plate and several ceramic tube groups. The electrode plate includes a first plate surface and a second plate surface opposite to each other, and several through holes extending from the first plate surface to the second plate surface. Each of the ceramic tube groups includes a ceramic tube plugged in a respective one of the through holes, and a ceramic block connected to the ceramic tube. A maximum block width of each of the ceramic blocks is greater than a maximum tube width of a respective one of the ceramic tubes. Since each of the ceramic blocks has a larger width and has a portion that can be additionally connected to the first plate surface of the electrode plate, the protection of the electrode plate and the bonding strength with the electrode plate can be improved by providing a larger shielding portion and a contact portion.

Description

Electrode device

The present invention relates to a dry etching device, and in particular to an electrode device of the dry etching device.

1 and 2 , an electrode device of a conventional dry etching apparatus is suitable for use as a lower electrode. The electrode device comprises an electrode plate 11 and a plurality of ceramic tubes 12 inserted in the electrode plate 11 .

The electrode plate 11 includes a first plate surface 111 and a second plate surface 112 opposite to each other, and a plurality of hole surrounding surfaces 114 respectively defining a plurality of through holes 113 .

The first plate surface 111 forms a gas flow channel 115 that is recessed toward the second plate surface 112 .

Each through hole 113 extends between the first plate surface 111 and the second plate surface 112 and is connected vertically. One end of each through hole 113 is connected to the gas flow channel 115 .

The ceramic tubes 12 are plugged into the through holes 113 and adhered to the hole circumferences 114. Each ceramic tube 12 is in a straight tube shape, and the inner and outer tube diameters of each part are equal.

The feature of the existing electrode device is that the ceramic tubes 12 are provided to protect the hole surfaces 114 and prevent the hole surfaces 114 from arcing, but the effect is still not good enough.

The purpose of the present invention is to improve at least one disadvantage of the prior art.

The electrode device of the present invention comprises an electrode plate and a plurality of ceramic tube groups. The electrode plate comprises a first plate surface and a second plate surface opposite to each other, and a plurality of through holes extending from the first plate surface to the second plate surface. Each of the ceramic tube groups comprises a ceramic tube plugged in a respective one of the through holes, and a ceramic block connected to the ceramic tube. A maximum block width of each of the ceramic blocks is greater than a maximum tube width of a respective one of the ceramic tubes.

The effect of the present invention is that: since the maximum block width of the ceramic block is greater than the maximum tube width of the ceramic tube, the ceramic block has a portion that can additionally cover and contact the first plate surface, thereby improving the protection and bonding strength by providing a larger shielding portion and a contact portion, and at the same time better preventing the occurrence of arcing.

In the following description, similar or identical components will be denoted by the same reference numerals.

Referring to FIG. 3 , an embodiment of the electrode device of the present invention can be an upper electrode or a lower electrode. In this embodiment, the electrode device is a lower electrode. The electrode device comprises an electrode plate 2 and a plurality of ceramic tube groups 3 inserted in the electrode plate 2.

4 , 5 , and 6 , the electrode plate 2 includes a first plate surface 21 at a lower position and a second plate surface 22 at an upper position opposite to each other, and a plurality of hole-surrounding surfaces 24 that define a plurality of through holes 23 , respectively.

The first plate surface 21 of the electrode plate 2 is formed with a gas flow channel 25 which is concave from bottom to top toward the second surface 52. The gas flow channel 25 includes a plurality of receiving grooves 251 which are spaced apart from each other and respectively connected to the through holes 23, and a plurality of connecting grooves 252 which are connected to the receiving grooves 251 and extend straightly.

Each of the accommodating grooves 251 is in the shape of a circular groove and is defined by a circular groove surface portion 253 and an annular groove surface portion 254 of the first plate surface 21. Each of the circular groove surface portions 253 extends horizontally and is approximately in the shape of a circular ring. Each of the annular groove surface portions 254 extends vertically and is approximately in the shape of a circular ring.

Each through hole 23 extends upward from the circular groove surface 253 of the first plate surface 21 to the second plate surface 22, and passes through the main body of the electrode plate 2 from top to bottom. Each through hole 23 is a cylindrical hole with a uniform hole diameter.

Each of the ceramic tube assemblies 3 includes a ceramic tube member 4 plugged into a respective one of the through holes 23 , and a ceramic block 5 connected to the ceramic tube member 4 and plugged into a respective one of the receiving grooves 251 .

Each of the ceramic tubes 4 is mainly in the shape of a circular tube, and includes a tube body 41 inserted into the ceramic block 5, and a protruding ring 42 connected to one end of the tube body 41.

Each of the tube bodies 41 includes an outer tube surface 411 and an inner tube surface 412. Each of the outer tube surfaces 411 is adhered to a respective one of the hole surrounding surfaces 24 and to a respective one of the ceramic blocks 5. Each of the inner tube surfaces 412 defines a first pipe 413 connected to the gas flow channel 25, and a second pipe 414 opposite to the first pipe 413. A first pipe diameter D1 of the first pipe 413 is greater than a second pipe diameter D2 of the second pipe 414.

Each of the protruding ring portions 42 is in the shape of a ring (see FIG. 4 ), and a ring width W11 of each of the protruding ring portions 42 is greater than a tube width W12 of each of the tube portions 41. Therefore, each of the ceramic tubes 4 can be adhered to the ceramic block 5 by the protruding ring portions 42 extending outward. In the first embodiment, since the protruding ring portions 42 are in the shape of a ring, a maximum tube width W21 of each of the ceramic tubes 4 as a whole is the ring width W11.

Each of the ceramic blocks 5 is in a ring shape and is disposed in a respective one of the accommodating grooves 251 of the gas flow channel 25. Although each of the ceramic blocks 5 is isotropic and convenient for installation due to its ring shape, in other embodiments of the present invention, each of the ceramic blocks 5 may also be in other ring shapes, such as a square ring or a hexagonal ring. Each of the ceramic blocks 5 defines a maximum block width W22, and the maximum block width W22 of each of the ceramic blocks 5 is greater than the maximum tube width W21 of each of the ceramic tubes 4.

Each of the ceramic blocks 5 includes a first surface 51 connected to the first plate surface 21 of the electrode plate 2, a second surface 52 opposite to the first surface 51, and an inner surface 53 and an outer surface 54 connected between the first surface 51 and the second surface 52 at intervals.

Each of the first surfaces 51 is adhered to a respective one of the circular groove surface parts 253 of the first plate surface 21. Each of the second surfaces 52 is formed with one or more flow grooves 511 (see FIG. 4 ) for fluid flow. The flow grooves 511 are used to connect the connecting grooves 252. Each of the inner surfaces 53 defines a plug hole 531 for inserting the tube body 41 of a respective one of the ceramic tubes 4, and each of the inner surfaces 53 is adhered to the outer tube surface 411 of the ceramic tube 4. Each of the outer surfaces 54 is adhered to a respective one of the annular groove surface parts 254 of the first plate surface 21.

In the first embodiment, since the maximum block width W22 of each ceramic block 5 is greater than the maximum tube width W21 of each ceramic tube 4, compared to simply plugging the ceramic tube 4, plugging each ceramic tube group 3 can additionally cover/contact the portion of the circular groove surface 253 of each ceramic block 5, and increase the portion of the outer surface 54 of each ceramic block 5 covering/contacting the annular groove surface 254 of the first plate surface 21. In this way, since the shielded and protected portion of the electrode plate 2 and the portion used for bonding and contact are increased, the electrode plate 2 can be more fully protected, and the bonding strength between the ceramic tube assemblies 3 and the electrode plate 2 is also improved. At the same time, since the shielded area of the electrode plate 2 is increased, the occurrence of arcing can be better prevented.

Referring to Figs. 7, 8, and 9, a second embodiment of the electrode device of the present invention is similar to the first embodiment, except that each of the ceramic tubes 4 of the second embodiment omits the protruding ring portion 42 (see Fig. 4) and is integrally connected to a respective ceramic block 5. Specifically, the tube body portion 41 of each of the ceramic tubes 4 is integrally connected to the first surface 51 of a respective ceramic block 5. In addition, since each of the ceramic tubes 4 omits the protruding ring portion 42, the maximum tube body width W21 of each of the ceramic tubes 4 is equal to the tube width W12 of the tube body portion 41.

Since the maximum block width W22 of each of the ceramic blocks 5 of the second embodiment is also greater than the maximum tube width W21 of each of the ceramic tubes 4, the second embodiment can also provide an additional contact area with the circular groove surface 253 and the annular groove surface 254 of the first plate surface 21 of the electrode plate 2 through the first surface 51 and the outer surface 54 of the ceramic block 5. Therefore, the second embodiment also has a better protective effect on the electrode plate 2 and a better bonding effect between the ceramic tube groups 3 and the electrode plate 2.

In summary, the electrode device of the present invention has the following effect: since the maximum block width W22 of the ceramic block 5 is greater than the maximum tube width W21 of the ceramic tube 4, the ceramic block 5 has a portion that can be additionally connected to the first plate surface 21, thereby providing a larger shielding portion and a contact portion to enhance the protection of the electrode plate 2, and enhance the bonding strength with the electrode plate 2, and better prevent the occurrence of arcing.

The above is only an embodiment of the present invention, and cannot be used to limit the scope of the patent application of the present invention. In addition, simple equivalent changes and modifications according to the scope of the patent application of the present invention and the patent specification should also be covered by the scope of the patent application of the present invention.

2: Electrode plate 21: First plate surface 25: Gas flow channel 251: Accommodation groove 252: Connection groove 253: Circular groove surface 254: Ring groove surface 22: Second plate surface 23: Through hole 24: Hole surface 3: Ceramic tube assembly 4: Ceramic tube fitting 41: Tube body 411: Outer tube surface 412: Inner tube surface 413: First pipe 414: Second pipe 42: Protruding ring 5: Ceramic block 51: First surface 511: Flow groove 52: Second surface 53: Inner surface 531: Socket 54: Outer surface D1: First pipe diameter D2: Second pipe diameter W11: Ring width W12: tube width W21: maximum tube width W22: maximum block width

Other features and effects of the present invention will be clearly presented in the implementation method with reference to the drawings, in which: FIG. 1 is an incomplete three-dimensional diagram illustrating an existing electrode device; FIG. 2 is an incomplete cross-sectional diagram illustrating the state of the electrode device after being used for a period of time; FIG. 3 is an incomplete three-dimensional diagram illustrating a first embodiment of the electrode device of the present invention; FIG. 4 is an incomplete and partially decomposed three-dimensional exploded diagram illustrating the combination relationship between an electrode plate and several ceramic tube groups, and illustrating the combination relationship between a ceramic tube of each ceramic tube group and a ceramic block; FIG. 5 is an incomplete cross-sectional diagram, cut along the extension direction of a gas flow channel, illustrating the state of the ceramic tube groups arranged in the electrode plate; FIG. 6 is an incomplete cross-sectional view cut along the direction perpendicular to the extension of the gas flow channel; FIG. 7 is an incomplete and partially decomposed three-dimensional exploded view illustrating a second embodiment of the electrode device of the present invention; FIG. 8 is an incomplete cross-sectional view cut along the direction perpendicular to the extension of the gas flow channel; and FIG. 9 is an incomplete cross-sectional view cut along the direction perpendicular to the extension of the gas flow channel.

2: Electrode plate

21: First board

251: Storage tank

253: Round groove face

254: Groove face

22: Second board

23: Through hole

24: Hole circumference

3: Ceramic tube assembly

4: Ceramic pipe fittings

41: Tube body

411: Outer tube surface

412: Inner tube surface

413: First pipeline

414: Second pipeline

42:Protruding ring part

5: Ceramic block

51: First surface

511: Flow trough

52: Second surface

53: Inner surface

531: Socket

54: External surface

D1: First diameter

D2: Second diameter

W11: Ring Wide

W12: Pipe width

W21: Maximum tube width

W22: Maximum block width

Claims (8)

An electrode device comprises: an electrode plate, comprising a first plate surface and a second plate surface opposite to each other, and a plurality of through holes extending from the first plate surface to the second plate surface; a plurality of ceramic tube sets, each of which comprises a ceramic tube plugged in a respective one of the through holes, and a ceramic block connected to the ceramic tube, wherein a maximum block width of each of the ceramic blocks is greater than a maximum tube width of a respective one of the ceramic tubes. An electrode device as described in claim 1, wherein each of the ceramic blocks is ring-shaped and includes a first surface connected to the first plate surface of the electrode plate, a second surface opposite to the first surface, and an inner surface and an outer surface connected between the first surface and the second surface with an inner and outer interval, each of the inner surfaces defines a socket, and each of the ceramic tubes is inserted into a respective one of the sockets. An electrode device as described in claim 2, wherein each of the ceramic tube members includes a tube body portion inserted into a respective one of the insertion holes, and a protruding ring portion connected to one end of the tube body portion, a ring width of each of the protruding ring portions is greater than a tube width of a respective one of the tube body portions, and each of the protruding ring portions is connected to the second surface of a respective one of the ceramic blocks. An electrode device as described in claim 1, wherein each of the ceramic blocks includes a first surface connected to the first plate surface of the electrode plate, a second surface opposite to the first surface, and an inner surface and an outer surface connected between the first surface and the second surface with an inner and outer interval, and each of the ceramic tubes is integrally connected to a respective first surface. An electrode device as described in any one of claims 1 to 4, wherein the ceramic tube is in the shape of a circular tube and the ceramic block is in the shape of a circular ring. An electrode device as described in any one of claims 1 to 4, wherein the first plate surface of the electrode plate forms a gas flow channel recessed toward the second plate surface, and the gas flow channel includes a plurality of receiving grooves spaced apart from each other and respectively accommodating the ceramic blocks, and a plurality of connecting grooves connecting the receiving grooves. An electrode device as described in claim 6, wherein the ceramic tube defines a first pipe connected to the gas flow channel, and a second pipe opposite to the first pipe, and a first pipe diameter of the first pipe is larger than a second pipe diameter of the second pipe. An electrode device as described in claim 6, wherein each of the ceramic blocks is formed with at least one flow channel for a fluid to flow, and the flow channels are connected to the connecting groove portions.

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