TWI888034B - Probe card trimming device - Google Patents

Abstract

This disclosure is directed to a probe card trimming device having a shell, a body and a photography assembly. The shell has a positioning plane and an operation window. The positioning plane is located on a top of the shell. The operation window is defined on the positioning plane and communicated with an internal of the shell. The body is accommodated in the shell. The body has a lifting slider, a lifting platform, a lifting actuator, a transmission slider, a rotating plate, a driving motor and a cam. The lifting platform is arranged on the lifting slider. An actuating direction of the actuator is perpendicular to the lifting slider. The transmission slider is arranged obliquely and connected between the lifting platform and the lifting actuator. The rotating plate is disposed on the lifting platform corresponding to a position of the operation window. The driving motor and cam are installed on the lifting platform and the cam is connected between the rotating plate and the driving motor. The photography assembly has a lens and a reflector. An axis of the lens is disposed toward the reflector, and an angle between a normal direction of the reflector and an axial direction of the lens is equal to an angle between the normal direction of the reflector and the positioning plane.

Description

Probe card grinding device

The present disclosure relates to IC testing, and more particularly to a probe card polishing device for trimming a probe card used for IC testing.

After the wafers are mass-produced in the wafer factory, they must be tested for normal function of each chip on the wafer before they are shipped. Generally speaking, there are about tens of thousands of IC test points on the wafer, which must be tested by a probe card. The probe card has a circuit board and a plurality of probes arranged in an array on one side of the circuit board. The probes correspond to the aforementioned test points, and the tips of these probes must be located on the same plane. These probes can simultaneously touch the test points on the surface of the wafer to enable simultaneous testing.

However, after the probe card is used, the wear degree of each probe tip is different, so that the tips of these probe tips are not on the same plane, so that the wafer yield cannot be measured correctly. Therefore, when the probe card is worn to the point of being unusable, the tips of these probe tips must be ground so that the tips of these probe tips are on the same plane.

The general grinding method is to place sandpaper on a grinding plate, then place the probe on the sandpaper and move the grinding plate along a circular path to grind. After grinding, it is usually confirmed by the naked eye, so it is easy to misjudge. How to efficiently and accurately judge the position of the probe tip is a problem that needs to be solved urgently.

In view of this, the inventors have conducted intensive research and applied theories to the above-mentioned existing technologies to try their best to solve the above-mentioned problems, which has become the goal of the inventors' improvement.

The present disclosure provides a probe card polishing device for trimming a probe card for IC testing.

The present disclosure provides a probe card grinding device, which includes a housing, a body and a camera assembly. The housing has a positioning plane and a working window, the positioning plane is located on the top of the housing, and the working window is located on the positioning plane and connected to the interior of the housing. The body is accommodated in the outer shell, and the body has a lifting slide, a lifting platform, a lifting actuator, a steering slide, a rotating disk, a driving motor and a cam. The lifting platform is arranged on the lifting slide, the actuation direction of the lifting actuator is perpendicular to the lifting slide, the steering slide is tilted and connected between the lifting platform and the lifting actuator, the rotating disk is arranged on the lifting platform in a translational manner at a position corresponding to the working window, the driving motor and the cam are arranged on the lifting platform, and the cam is connected between the rotating disk and the driving motor. The photographic assembly includes a lens and a reflector, the axis of the lens is arranged toward the reflector, and the angle between the normal direction of the reflector and the axis of the lens is equal to the angle between the normal direction of the reflector and the positioning plane.

In an embodiment of the present disclosure, the probe card grinding device further includes a first plane slide rail and a second plane slide rail, the first plane slide rail is arranged on the lifting platform, the second plane slide rail is arranged on the first plane slide rail, the rotating plate is arranged on the second plane slide rail, and the first plane slide rail and the second plane slide rail are arranged perpendicular to each other.

In an embodiment of the present disclosure, the photographic assembly further includes a light source, and the light source and the reflective mirror are disposed on two sides of the lifting platform opposite to each other.

In one embodiment of the present disclosure, a fill light is attached to the reflector, the projection direction of the fill light is arranged toward the light source, and the projection direction of the fill light is arranged obliquely relative to the projection direction of the light source. The projection direction of the fill light is inclined by 10 to 20 degrees relative to the projection direction of the light source.

In one embodiment of the present disclosure, a photographic assembly includes a lifting actuator, and a lens is disposed on the lifting actuator and can move relative to a reflective mirror.

In an embodiment of the present disclosure, a photographic assembly includes a moving platform and a translation actuator, the moving platform is disposed on the translation actuator, and the reflector and the lifting actuator are disposed on the moving platform.

In one embodiment of the present disclosure, the lens is arranged vertically in the axial direction and the angle between the normal direction of the reflective mirror and the axial direction of the lens is 45 degrees.

The lens of the probe card grinding device disclosed in the present invention can capture the image of the probe located at the working window from the side of the lifting platform through a reflective mirror, thereby configuring a lens with a larger magnification to facilitate the judgment of the tip position of the probes, and the lens will not protrude too long horizontally on one side of the lifting platform.

In the description of the present disclosure, it is necessary to understand that the terms "front", "rear", "left", "right", "front end", "rear end", "end", "longitudinal", "lateral", "vertical", "top", "bottom", etc., indicating the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present disclosure and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limiting condition for the present disclosure.

As used herein and not otherwise defined, the terms "substantially" and "approximately" are used to describe and describe small variations. When used in conjunction with an event or circumstance, the terms may include the exact time at which the event or circumstance occurred, as well as the event or circumstance occurring to a close approximation. For example, when used in conjunction with a numerical value, the terms may include a variation range of less than or equal to ±10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%.

The detailed description and technical contents of the present disclosure are described below with the help of drawings. However, the attached drawings are only used for illustration and are not used to limit the present disclosure.

Referring to FIGS. 1 to 4 , the present disclosure provides a probe card polishing device, which at least includes a housing 100, a body 200, and a camera assembly 300. In this embodiment, the housing 100 is a hollow cubic housing made of metal, and the housing 100 has a positioning plane 110 and a working window 111. In this embodiment, the positioning plane 110 is located on the top surface of the housing 100, and the working window 111 is located on the positioning plane 110 and connected to the interior of the housing 100. In this embodiment, the positioning plane 110 is used to carry the circuit board 11 of the probe card 10 to position the probe card 10, and the probe 11 of the probe card 10 is accommodated in the working window 111 to facilitate the trimming operation.

For the sake of explanation, the slide rails mentioned in the disclosed embodiments all include the rail and the slider placed on the rail. The slider and the rail can move linearly relative to each other. The two sides of the slide rail refer to one of the rail and the slider and the other. The longitudinal direction of the slide rail refers to the longitudinal direction of the rail. The actuators mentioned in the disclosed embodiments all include a screw driven by a motor and a nut screwed to the screw. When the screw rotates, it can push the nut to make the screw and the nut move linearly relative to each other. The two ends of the actuator refer to one of the screw and the nut and the other. The longitudinal direction of the actuator refers to the longitudinal direction of the screw.

1 to 3 , in this embodiment, the machine body 200 is accommodated in the housing 100, and the machine body 200 has at least a lifting slide 210, a lifting platform 220, a lifting actuator 230, a turning slide 240, a rotating plate 250, a driving motor 261 and a cam 262. Specifically, the machine body 200 also has a base 201 for arranging the aforementioned components.

Referring to FIG4 , the lifting rail 210 is vertically arranged on the base 201, and the lifting platform 220 is arranged on the lifting rail 210, that is, the two sides of the lifting rail 210 are respectively connected to the base 201 and the lifting platform 220, so that the lifting platform 220 can move up and down along the longitudinal direction of the lifting rail 210. Referring to FIG5 , the actuation direction of the lifting actuator 230 is perpendicular to the lifting rail 210. Specifically, the actuation direction of the lifting actuator 230 is along the longitudinal direction thereof, and the lifting actuator 230 is horizontally arranged on the base 201, and the longitudinal direction of the lifting actuator 230 is perpendicular to the longitudinal direction of the lifting rail 210. The turning rail 240 is tilted and two sides of the turning rail 240 are connected between the lifting platform 220 and the lifting actuator 230. Specifically, one side of the turning rail 240 is connected to the lifting platform 220, and two ends of the lifting actuator 230 are respectively connected to the other side of the turning rail 240 and the base 201.

1 and 2 , the rotating disk 250 is horizontally disposed on the lifting platform 220 . The rotating disk 250 can be translated on the lifting platform 220 , and the rotating disk 250 is configured at a position corresponding to the working window 111 . Referring to FIGS. 4 to 6 , the probe card polishing device disclosed herein further includes a first plane slide rail 251 and a second plane slide rail 252. The first plane slide rail 251 is disposed on the lifting platform 220, the second plane slide rail 252 is disposed on the first plane slide rail 251, the rotating plate 250 is disposed on the second plane slide rail 252, and the first plane slide rail 251 and the second plane slide rail 252 are arranged perpendicular to each other. The rotating plate 250 is allowed to translate on the lifting platform 220 by means of the first plane slide rail 251 and the second plane slide rail 252. Specifically, two sides of the first plane slide rail 251 are respectively connected to the lifting platform 220 and one side of the second plane slide rail 252 , and the other side of the second plane slide rail 252 is connected to the rotating disk 250 .

Referring to FIG. 1 , FIG. 2 and FIG. 8 , the drive motor 261 and the cam 262 are both disposed on the lifting platform 220 , and the cam 262 is connected between the rotating disk 250 and the drive motor 261 . The drive motor 261 is connected to the central axis of the cam 262 to drive the cam 262 to rotate, and one side of the cam 262 is also connected to the rotating disk 250 (may be directly connected or connected with a rod), whereby the cam 262 can drive the rotating disk 250 to rotate along a circular path when being driven to rotate by the drive motor 261 . 4 , the lifting platform 220 can be raised to contact the probes 11 located at the working window 111 , and when the rotating disk 250 rotates, the tips of the probes 11 can be ground simultaneously on the same plane defined by the rotating disk 250 until the tips of the probes 11 are located on the same plane.

Referring to FIGS. 2 to 4 , the photographic assembly 300 is disposed on one side of the lifting platform 220. The photographic assembly 300 at least includes a lens 310 and a reflector 320. The axis of the lens 310 is disposed toward the reflector 320. As shown in FIG. 4 , the angle between the normal direction of the reflector 320 and the axis of the lens 310 is equal to the angle between the normal direction of the reflector 320 and the positioning plane 110. In other words, the light L parallel to the positioning plane 110 can be reflected to the lens 310 by the reflector 320 (the lifting platform 220 can be lowered to allow the light L to pass through). In this embodiment, the lens 310 is axially upright, the reflector 320 is disposed on one side of the lifting platform 220, and the normal direction of the reflector 320 forms an angle of 45 degrees with the axis of the lens 310. The lens 310 can capture the image of the probe 11 located at the working window 111 from the side of the lifting platform 220 through the reflector 320, thereby configuring a lens 310 with a larger magnification to facilitate the determination of the tip positions of the probes 11, and the lens 310 will not protrude too long laterally on one side of the lifting platform 220.

2 and 4 , the photographic assembly 300 of the probe card grinding device disclosed herein further includes a light source 400. The light source 400 and the reflective mirror 320 are disposed on two sides of the lifting platform 220 opposite to each other. The light source 400 projects light L to the reflective mirror 320 in a direction parallel to the lifting platform 220 and then reflects the light to the lens 310, thereby increasing the background brightness of the captured image for easier reading.

Referring to FIG. 2, FIG. 3 and FIG. 8, the probe card grinding device disclosed in the present invention has a fill light 330 attached to its reflector 320, and the projection direction of the fill light 330 is arranged toward the light source 400, and as shown in the stack, the projection direction of the fill light 330 is arranged obliquely relative to the projection direction of the light source 400, thereby eliminating the shadow in the captured image for easy reading. Specifically, the aforementioned deflection angle ranges from 10 degrees to 20 degrees, and is 12 degrees in this embodiment.

Referring to FIG. 3, FIG. 6 and FIG. 7, the photographic assembly 300 of the probe card grinding device disclosed herein includes a lifting actuator 341, a translation actuator 342 and a moving platform 343. The moving platform 343 is disposed on the translation actuator 342, and the reflector 320 and the lifting actuator 341 are disposed on the moving platform 343. Referring to FIG. 6, the reflector 320 can be driven to translate by the translation actuator 342 to align with the position to be measured. Referring to FIG. 7, the lens 310 is disposed on the lifting actuator 341 and can move relative to the reflector 320 to facilitate focusing.

Referring to FIG. 1 , the probe card polishing device disclosed herein may further include a display 500 , which is disposed on the top of the housing 100 . The captured image may be displayed on the display 500 for easy reading.

The above is only the preferred embodiment of the present invention and is not intended to limit the patent scope of the present invention. Other equivalent variations that utilize the patent spirit of the present invention should all fall within the patent scope of the present invention.

100: housing 110: positioning plane 111: working window 200: machine body 201: base 210: lifting slide 220: lifting platform 230: lifting actuator 240: steering slide 250: rotating plate 251: first plane slide 252: second plane slide 261: driving motor 262: cam 300: camera assembly 310: lens 320: reflector 330: fill light 341: lifting actuator 342: translation actuator 343: moving platform 400: light source 500: display L: light

FIG. 1 is a three-dimensional schematic diagram of the probe card polishing device disclosed in the present invention.

FIG. 2 is a three-dimensional schematic diagram of the probe card polishing device disclosed in the present invention.

FIG. 3 is a side view of the photographic component of the probe card polishing device disclosed herein.

FIG. 4 is a side view of the probe card polishing device of the present disclosure.

FIG. 5 is a cross-sectional view of the probe card polishing device of the present disclosure.

FIG. 6 is a schematic diagram showing the lifting motion of the photographic assembly of the probe card polishing device disclosed herein.

FIG. 7 is a schematic diagram showing the translational motion of the photographic component of the probe card polishing device disclosed herein.

FIG. 8 is a top view of the probe card polishing device of the present disclosure.

200: Body

201: Base

220: Lifting platform

230: Lifting actuator

250: Rotating plate

261: Driving motor

262: Cam

300:Photographic components

310: Lens

320: Mirror

330:Fill light

343: Mobile platform

400: Light source

Claims (6)

A probe card grinding device comprises: A housing having a positioning plane and a working window, wherein the positioning plane is located at the top of the housing, and the working window is located on the positioning plane and connected to the interior of the housing; A body is contained in the outer shell, and the body has a lifting slide, a lifting platform, a lifting actuator, a steering slide, a rotating disk, a driving motor and a cam. The lifting platform is arranged on the lifting slide, the actuation direction of the lifting actuator is perpendicular to the lifting slide, the steering slide is tilted and connected between the lifting platform and the lifting actuator, the rotating disk is arranged on the lifting platform in a translationally movable manner corresponding to the position of the working window, the driving motor and the cam are arranged on the lifting platform, and the cam is connected between the rotating disk and the driving motor; and A photographic assembly includes a lens and a reflector, wherein the axis of the lens is arranged toward the reflector, and the angle between the normal direction of the reflector and the axis of the lens is equal to the angle between the normal direction of the reflector and the positioning plane, wherein the photographic assembly includes a lifting actuator, and the lens is arranged on the lifting actuator and can move relative to the reflector; wherein the photographic assembly includes a moving platform and a translation actuator, the moving platform is arranged on the translation actuator, and the reflector and the lifting actuator are arranged on the moving platform. The probe card grinding device as described in claim 1 further includes a first plane slide rail and a second plane slide rail, the first plane slide rail is arranged on the lifting platform, the second plane slide rail is arranged on the first plane slide rail, the rotating plate is arranged on the second plane slide rail, and the first plane slide rail and the second plane slide rail are arranged perpendicular to each other. The probe card grinding device as described in claim 1, wherein the photographic component further includes a light source, and the light source and the reflective mirror are arranged on two sides of the lifting platform opposite to each other. In the probe card grinding device as described in claim 3, a fill light is attached to the reflector, the projection direction of the fill light is arranged toward the light source, and the projection direction of the fill light is arranged obliquely relative to the projection direction of the light source. A probe card grinding device as described in claim 4, wherein the projection direction of the fill light is tilted 10 to 20 degrees relative to the projection direction of the light source. A probe card grinding device as described in claim 1, wherein the lens is axially upright and the angle between the normal direction of the reflective mirror and the axial direction of the lens is 45 degrees.

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