TW201803689A - Single-probe grinding machine capable of achieving fast burr trimming operation to enhance production efficiency and reduce manufacturing cost - Google Patents

Abstract

A single-probe grinding machine comprises a machine unit, a grinding rotary table unit, and a transmission unit. The machine unit comprises a base and a first sliding base, wherein a first sliding rail set is disposed between the base and the first sliding base so the first sliding base may move back and forth on the base along a linear direction. The grinding rotary table unit comprises a grinding body disposed on the first sliding base, a rotary table located above the grinding body, and a pressing disc for shielding and pressing above the rotary table. The rotary table has a plurality of slots disposed on the outer periphery and each slot is provided for placing a probe. The transmission unit comprises a first motor, a second motor for driving the rotary table for rotation, and a third motor for driving the pressing disc for elevation. The first motor has an eccentric cam that the eccentric cam may drive the first sliding base for synchronously driving the grinding body for moving back and forth relative to the probe, so as to grind the probe.

Description

Single needle grinder

This creation is about a material deburring device, in particular, a single-needle grinder for trimming materials to ensure the quality of materials.

Wafer Probe and Packaging are the latter part of the semiconductor manufacturing process, and wafer testing is a pin test of each die on the chip, and the test head is mounted with gold. The wire is made into a probe as fine as a hair, which is in contact with the pad on the die to test its electrical characteristics. Unqualified grains will be eliminated, and only those grains that pass the test can be tested. The next process is to maintain assembly quality and product yield. Therefore, the wafer test process is an important process in integrated circuit manufacturing that has a significant impact on manufacturing costs.

However, with the development of integrated circuits, the technology of packaging and testing has also been continuously improved. In recent years, the probe specifications for wafer testing have also evolved from 150 μm to 24.5 μm. This specification is even thinner than hair. The limit of manual assembly is difficult.

Although most of the packaging testing of semiconductor manufacturing has been replaced by mechanized assembly, because the probe size is getting smaller and smaller, and during the assembly process, the material of the probe has been passed by the supplier for preliminary Screening, but when transported to the packaging factory, I found that the quality of the material is still not good enough, and there will always be a slight burr. Although the size of these fine burrs is not large, it is still not available and must be discarded. During the assembly process, it was found that the number of defective products that were screened out still accounted for a large proportion. Therefore, not only will it affect subsequent assembly operations, lead to slow production speed, and then reduce manufacturing efficiency, but also improve manufacturing Incurred costs, in order to monitor the cost of consideration, we must further develop and solve the policy.

The single-needle grinder of this creation places the needle material in the area to be ground, and gradually rotates the needle to the grinding area through the rotary disk. After the burr is removed by the grinding body, the material is transferred to the preparation area for use. Not only can the burr of the needle material be trimmed to ensure the quality of the needle material, but also the continuous operation with automation, the trimming operation is very fast, which can improve production efficiency and reduce manufacturing costs.

Therefore, a single-needle grinding machine proposed in this work includes a machine unit, a grinding turntable unit, and a transmission unit. The machine unit has a base and a first slide base, and a first slide rail group is arranged between the base and the first slide base, so that the first slide base can run along the base. Move back and forth in a straight direction. The grinding turntable unit has a grinding body placed on the first slide base, a turntable located above the grinding body, and a pressure plate for covering above the turntable. The turntable has a plurality of arranged on the outer peripheral side. Slot, one slot for each needle slot. The transmission unit has a first motor, a second motor for driving the turntable to rotate, and a third motor for driving the pressure plate for lifting. The first motor has an eccentric cam, and the eccentric cam drives the first motor. A slide seat is used to synchronously drive the grinding body to reciprocate with respect to the needle material, thereby achieving the function of grinding needle material.

According to the above-mentioned single-needle grinder, the machine unit further has a second slide base and a second slide rail set disposed between the base and the first slide base. A group is disposed between the first slide and the second slide, so that the first slide can be reciprocated along a first axis above the base, and the second slide group is disposed at the first Between the two sliding bases and the base, the second sliding base can be reciprocated along a second axial direction above the base, and the second axial direction is perpendicular to the first axial direction.

According to the above-mentioned single-needle grinder, the area of the platen is smaller than The area of the turntable, when the platen cover is provided on the turntable, the turntable is divided into a grinding area that can be covered by the platen, and a to-be-milled area and an exposed area located on both sides of the grinding area. Preparation area.

According to the above-mentioned single-needle grinder, the bottom of the platen of the grinding turntable unit is provided with a plurality of pressure rods, and each of the pressure rods is in contact with the top of each needle material.

According to the above-mentioned single-needle grinder, the first motor further has a connecting rod, and the connecting rod is connected between the eccentric cam and the first sliding seat.

According to the above-mentioned single-needle grinder, the first slide seat is provided with a fixing part, one end of the connecting rod is fixed on the eccentric cam of the first motor, and the other end is embedded in the first slide seat. On the fixed part, the first sliding seat is driven to be displaced by the link.

According to the above-mentioned single-needle grinder, the second motor has a driving shaft and a positioning base fixed on the driving shaft, and the turntable is mounted on the positioning base to be used by the second motor. The drive shaft rotates.

According to the above-mentioned single-needle grinder, the grinding turntable unit further has a supporting platform fixed on the top of the second slide base, and the grinding body is fixed on the top of the supporting platform.

According to the above-mentioned single-needle grinder, the third motor has a driving shaft and a linkage group, the driving shaft is an eccentric cam, the pressure plate is connected to the linkage group, and the linkage is driven by the third motor. The group drives the platen up and down.

According to the above, in order to ensure the quality of the material, this creation uses this single-needle grinder to trim the fine burr of the needle material. Before the needle material is subsequently assembled, it can be trimmed in advance to ensure the quality of the needle material. During the grinding process, the needle material is first placed in the area to be ground, and the needle is gradually moved to the grinding area through the gradual rotation of the turntable. After the burr is removed by the grinding body, the material area is transferred to the needle area for use, not only to quickly trim the needle. The burrs of the material are also continuously and continuously operated by automation, and the trimming operation is very fast. In addition to the smoothness of subsequent automated assembly operations, It can also reduce the waste of subsequent assembly operations to improve production efficiency and reduce manufacturing costs.

10‧‧‧machine unit

11‧‧‧ base

12‧‧‧The first slide

121‧‧‧Fixed section

13‧‧‧The first slide group

14‧‧‧Second Slide

15‧‧‧Second slide group

20‧‧‧ Grinding turntable unit

201‧‧‧grinding area

202‧‧‧ Area to be ground

203‧‧‧Prepare area

21‧‧‧Support platform

22‧‧‧ grinding body

23‧‧‧ Turntable

231‧‧‧slot

24‧‧‧Press plate

241‧‧‧Press rod

30‧‧‧Drive unit

31‧‧‧First Motor

311‧‧‧eccentric cam

312‧‧‧ connecting rod

3121‧‧‧One end

3122‧‧‧ the other end

32‧‧‧second motor

321‧‧‧Drive shaft

322‧‧‧Positioning Block

33‧‧‧ third motor

331‧‧‧Drive shaft

332‧‧‧Linked Group

333‧‧‧ Pivot Group

40‧‧‧Needle

41‧‧‧Top

42‧‧‧ bottom

43‧‧‧ burr

D‧‧‧distance

L1‧‧‧first axis

L2‧‧‧Second axis

FIG. 1 is a combined perspective view of a preferred embodiment of a single-needle grinder for creation.

Figure 2 is a top view of the single-needle grinder.

Figure 3 is a partial enlarged view of the needle material inserted into the slot.

Fig. 4 is a side view of the single-needle grinder.

Fig. 5 is a partial enlarged view of the needle material and the abrasive body, and shows the needle material whose burrs have not been removed.

Fig. 6 is a partial enlarged view of the needle material and the abrasive body, and shows the needle material with burrs removed.

FIG. 7 is a top view of the machine unit and the turntable, illustrating the initial position of the eccentric cam of the first motor at an angle of 0 °.

FIG. 8 is a view similar to FIG. 7 and illustrates a state where the eccentric cam of the first motor is rotated to an angle of 90 °.

FIG. 9 is a view similar to FIG. 7 and illustrates a state where the eccentric cam of the first motor is rotated to an angle of 180 °.

FIG. 10 is a view similar to FIG. 7 and illustrates a state where the eccentric cam of the first motor is rotated to an angle of 270 °.

Referring to FIG. 1, a preferred embodiment of the single-needle grinding machine of the present invention includes a machine unit 10, a grinding turntable unit 20, and a transmission unit 30.

The machine unit 10 has a base 11, a first slide base 12, a second slide base 13, a first slide rail group 14 and a second slide rail group 15. The first slide rail group 13 is provided.在 第 The first A sliding base 12 and the second sliding base 13 are arranged so that the first sliding base 12 can be reciprocated along a first axis L1 above the base 11. The second sliding rail group 15 is disposed on the base 11. Between the second slide base 13 and the base 11, so that the second slide base 13 can reciprocate along a second axis L2 above the base 11, and the second axis L2 is perpendicular to the First axis L1.

The grinding turntable unit 20 has a support platform 21 disposed on the top of the first slide base 12, a grinding body 22 disposed on the top of the support platform 21, a turntable 23 located above the grinding body 22, and a cover provided A pressure plate 24 is formed above the turntable 23. The turntable 23 has a plurality of slots 231 provided on the outer peripheral side, and each of the slots 231 is used for placing a needle material 40 (as shown in FIGS. 2 and 3). A plurality of pressure rods 241 are provided at the bottom of the pressure plate 24, and each of the pressure rods 241 is in contact with the top end 41 of each needle material 40 (as shown in FIG. 4). In this embodiment, the area of the platen 24 is smaller than the area of the turntable 23. As shown in FIG. 2, when the platen 24 is covered on the turntable 23, the platen 23 is divided into one that can be used by the platen 24. A covered grinding zone 201 and a to-be-milled zone 202 and a material preparation zone 203 exposed to the outside and located on both sides of the grinding zone 201 are provided.

Incidentally, the grinding body 22 has a grinding medium sintered by nano-scale grinding particles distributed on the top surface to provide the grinding body 22 with good grinding characteristics.

The transmission unit 30 includes a first motor 31, a second motor 32 for driving the turntable 23 to rotate, and a third motor 33 for driving the pressure plate 23 for lifting.

The first motor 31 has an eccentric cam 311 and a connecting rod 312, and the first slide 12 is provided with a fixing portion 121. One end 3121 of the connecting rod 312 is fixed to the eccentric cam 311 of the first motor 31. One end 3122 is embedded in the fixed portion 121 of the first slide base 12 to drive the first slide base 12 to move through the connecting rod 312 and synchronously drive the grinding body 22 to reciprocate relative to the needle 40 , And then achieve the role of grinding needles.

As shown in FIG. 4, the second motor 32 has a driving shaft 321 and a positioning base 322 fixed on the driving shaft 321, and the turntable 23 is received on the positioning base 322 so as to be received by the second motor. The driving shaft 321 of the motor 32 is driven to rotate.

The third motor 33 has a driving shaft 331 and a linkage group 332. The driving shaft 331 is an eccentric cam. The pressure plate 24 is connected to one side of the linkage group 332. The third motor 33 drives the linkage group 332 drives the pressure plate 24 to move up and down, and urges the pressure bar 241 at the bottom of the pressure plate 24 to intermittently contact the top end 41 of the material 40. In FIG. 4, the pressure plate 24 shown by the imaginary line indicates that the pressure plate 24 is in the rising state. At this time, the pressure bar 241 at the bottom of the pressure plate 24 no longer presses the needle material 40, so that the pressure plate 24 It is separated from the needle material 40 to facilitate the rotary movement of the turntable 23. As a side note, a pivot group 333 is provided between the connecting rod group 332 and the pressure plate 24. This pivot group 333 allows the pressure plate 24 to be lifted off or closed over the turntable 23, and this structure provides convenient maintenance And set.

Therefore, the single-needle grinder of this creation first puts the needle material 40 one by one into the slot 231 of the turntable 23 located in the area to be ground 202 via an external tool. As the turntable 23 continues to run, when the After the needle material 40 enters the grinding area 201, the needle material 40 is pressed and positioned through the pressure plate 24. At this time, if the needle material 40 has a burr 43 (as shown in FIG. 5), it can be ground by the grinding body 22 in the grinding area 202 The deburring effect is achieved, and when the needle material 40 leaves the grinding area 201 and enters the material preparation area 203, these needle materials 40 are provided by trimming operations (as shown in FIG. 6) to provide material preparation. The subsequent material removal operations are not The focus of this case is no further explanation.

As for the grinding operation mode in this case, as shown in Figs. 7 to 10, first, the eccentric cam 311 is in an initial state (as shown in Fig. 7). The grinding body 22 is located on the right side of the turntable 23, and when the first motor When the eccentric cam 311 of 31 is rotated from an angle of 0 ° to 90 ° (as shown in FIG. 8), the link 312 is driven by the eccentric cam 311, and the first slide 12 is driven by the link 312 along the first axis L1. Displacement, because the first motor 31 is driven eccentrically, the movement of the first slide base 12 will also drive the second slide rail group 15 to cause the first slide base 12 to move along the first axis L1. (As shown by arrow A1 in FIG. 8), at this time, the relative movement of the first slide base 12 and the second slide base 13 causes the grinding body 22 located on the first slide base 12 to generate relative to the turntable. 23 produces a leftward displacement along the second axis L2 (as shown by arrow B1 in FIG. 8). When the first motor 31 When the eccentric cam 311 is rotated from an angle of 90 ° to 180 ° (as shown in FIG. 9), the first slide 12 is further displaced downward along the first axis L1 (as shown by arrow A2 in FIG. 9), and the first The grinding body 22 on a slide base 12 is further displaced to the left along the second axis L2 with respect to the turntable 23 (as shown by arrow B2 in FIG. 9). When the eccentric cam 311 of the first motor 31 is rotated from an angle of 180 ° to 270 ° (as shown in FIG. 10), the first slide 12 is further displaced upward along the first axis L1 (as shown by arrow A3 in FIG. 10) , And the grinding body 22 on the first slide 12 is displaced to the right along the second axis L2 with respect to the turntable 23 (as shown by arrow B3 in FIG. 10). As shown in FIG. 5, the turntable 23 performs an oscillating movement, so as to promote the grinding body 22 to reciprocate the needle material 40 to grind off the fine burrs 43 to achieve the purpose and effect of trimming the needle material 40. In addition, in order to clearly express the movement mode of the first slide 12, the first slide 12 shown by a dotted line is particularly marked in FIGS. 8 to 10.

According to the above, in order to ensure the quality of the material, this creation uses this single-needle grinder to trim the fine burr 43 of the needle material 40. Before the needle material 40 is subsequently assembled, it can be trimmed in advance to ensure the needle material. The quality of 40, the needle material 40 is first placed in the to-be-milled area 202, and the needle material 40 is moved to the grinding area 201 through the gradual rotation of the turntable 23, and the burr 43 is removed by the grinding body 22. The re-transfer preparation area 203 is provided for use, not only to quickly trim the burr 43 of the needle material 40, but also to automate the continuous operation. The trimming operation is very fast. In addition to the smoothness of subsequent automated assembly operations, it can also reduce subsequent assembly operations. Production of waste materials to improve production efficiency and reduce manufacturing costs.

It is worth mentioning that when each needle material 40 is in the grinding area 201, each needle material 40 is positioned accurately through the pressing and positioning of the pressure plate 24, and positioning is also provided between the needle material 40 and the turntable 23 Mechanism (not shown), so that each needle material 40 is actually seated in the slot 231, the burr 43 on the needle material will be ground by the grinding body 22 in the grinding area 201, and then enter the material preparation area 203, at this time the turntable A slight distance D (as shown in FIG. 6) is set between the bottom end 42 of the needle material 40 on the 23 and the grinding body 22 so that the bottom end 42 of the needle material 40 does not contact the grinding body 22.

Incidentally, although the materials in this case take needle material 40 as an example, of course, it can also be applied to various precision assembly materials, such as silicon wafers, precision lenses, and so on.

The above description is only a preferred embodiment of this creation. When the scope of implementation of this creation cannot be limited by this, that is, the simple equivalent changes and modifications made according to the scope of the patent application and the description of the invention, It should still fall within the scope of this creation patent.

10‧‧‧machine unit

11‧‧‧ base

12‧‧‧The first slide

121‧‧‧Fixed section

13‧‧‧The first slide group

14‧‧‧Second Slide

15‧‧‧Second slide group

20‧‧‧ Grinding turntable unit

21‧‧‧Support platform

22‧‧‧ grinding body

23‧‧‧ Turntable

231‧‧‧slot

24‧‧‧Press plate

30‧‧‧Drive unit

31‧‧‧First Motor

311‧‧‧eccentric cam

312‧‧‧ connecting rod

3121‧‧‧One end

3122‧‧‧ the other end

32‧‧‧second motor

33‧‧‧ third motor

332‧‧‧Linked Group

333‧‧‧ Pivot Group

40‧‧‧Needle

L1‧‧‧first axis

L2‧‧‧Second axis

Claims (9)

A single-needle grinding machine includes: a machine unit having a base and a first slide base, and a first slide rail group is arranged between the base and the first slide base, so that the first A slide base can be reciprocated along a straight line above the base; a grinding turntable unit having a grinding body placed on the first slide base, a turntable located above the grinding body, and a cover for shielding A pressure plate above the turntable, the turntable has a plurality of slots provided on the outer peripheral side, each of which is used for placing a needle; a transmission unit having a first motor and a second drive for driving the turntable to rotate A motor and a third motor for driving the pressure plate for lifting, the first motor has an eccentric cam, and the first slide is driven by the eccentric cam to synchronously drive the grinding body to reciprocate relative to the needle material, And then achieve the role of grinding needles. The single-needle grinder according to item 1 of the claim, wherein the machine unit further has a second slide base and a second slide rail set disposed between the base and the first slide base, the A first slide rail group is disposed between the first slide base and the second slide base, so that the first slide base can be reciprocated along a first axial direction above the base, and the second slide rail group Disposed between the second slide and the base, so that the second slide can be reciprocated along a second axis above the base, and the second axis is perpendicular to the first axis to. The single-needle grinder according to item 1 of the claim, wherein the area of the platen is smaller than the area of the turntable, and when the platen cover is provided on the turntable, the turntable is divided into one that can be covered by the platen. A grinding zone, and a to-be-milled zone and a material preparation zone exposed on the outside and located on both sides of the grinding zone. The single-needle grinder according to item 1 of the claim, wherein a plurality of pressure bars are provided at the bottom of the platen of the grinding turntable unit, and each of the pressure bars is in contact with the top of each needle. The single-needle grinder according to claim 1, wherein the first motor further has a connecting rod, and the connecting rod is connected between the eccentric cam and the first sliding seat. The single-needle grinder according to claim 5, wherein the first slide is provided with a fixing portion, one end of the link is fixed to the eccentric cam of the first motor, and the other end is embedded in the first A fixed portion of a slide seat is used to drive the first slide seat to be displaced by the connecting rod. The single-needle grinder according to claim 1, wherein the second motor has a driving shaft and a positioning base fixed on the driving shaft, and the turntable is mounted on the positioning base to be The driving shaft of the second motor rotates. The single-needle grinder according to claim 1, wherein the grinding turntable unit further has a support platform fixed on the top of the second slide base, and the grinding body is fixed on the top of the support platform. The single-needle grinder according to claim 1, wherein the third motor has a drive shaft and a linkage group, the drive shaft is an eccentric cam, the pressure plate is connected to the linkage group, and the third The motor drives the linkage group to drive the pressure plate to move up and down.