TWI879002B - Probe head with vertical probe and flexible tip - Google Patents

Abstract

A probe head includes a probe base and a vertical probe. The vertical probe has a needle head, a needle body and a needle tail in order from bottom to top. The needle tail and the needle head are respectively inserted into the upper and lower guide holes of the probe base. The needle tail includes a stopper, a penetration section located between the stopper and the needle body and inserted into the upper guide hole, and an opening penetrating the needle tail along a transverse axis. The penetration section includes an abutment portion divided along the longitudinal axis, and a non-abutment portion that is farther away from the stopper and does not abut against the inner surface of the upper guide hole. The abutment portion has two abutment sides facing the positive and negative directions of the other transverse axis, wherein at least one of the abutment sides abuts against the inner surface of the upper guide hole. The opening of the needle tail is at least partially located in the upper guide hole. The invention can prevent the vertical probe from getting stuck or falling out upward during testing and maintenance.

Description

Probe head with vertical probe tip and flexible tip

The present invention relates to a vertical probe for a probe card, and more particularly to a probe head of the vertical probe with an elastic needle tail.

Please refer to FIG. 1 and FIG. 2 . The conventional vertical probes 10A and 10B include a staggered probe 10A and a non-staggered probe 10B. The vertical probe 10A or 10B and a probe holder 15 together form a probe head. The probe holder 15 mainly includes an upper guide plate 16 and a lower guide plate 17. The upper and lower guide plates 16 and 17 are respectively provided with upper and lower guide holes 162 and 172 for the vertical probe 10A or 10B to pass through. Both the staggered probe 10A and the non-staggered probe 10B include a needle tail 11 inserted in the upper guide hole 162, a needle head 12 inserted in the lower guide hole 172, and a needle body 13 located between the upper and lower guide plates 16 and 17. The main difference between the staggered probe 10A and the non-staggered probe 10B is that after the non-staggered probe 10B is installed on the probe holder 15, the needle tail 11 and the needle head 12 are located on the same imaginary vertical line, while after the staggered probe 10A is installed on the probe holder 15, the needle tail 11 and the needle head 12 are horizontally staggered and located on different imaginary vertical lines.

The staggered probe 10A may be directly manufactured into a shape in which the needle tail 11 and the needle head 12 are laterally staggered, or the staggered probe 10A may be manufactured into a straight line, and the upper and lower guide plates 16 and 17 are laterally moved relative to each other to make the staggered probe 10A present a shape in which the needle tail 11 and the needle head 12 are laterally staggered, so that the needle body 13 of the staggered probe 10A is bent and has good elasticity, and at the same time, the staggered probe 10A is positioned on the probe seat 15 without falling down.

In contrast, the needle tail 11 of the non-staggered probe 10B is provided with a stopper 14, so that the stopper 14 abuts against the top of the upper guide plate 16 to prevent the non-staggered probe 10B from falling downward. The needle body 13 of the non-staggered probe 10B may be straight as shown in FIG. 2, or the needle body 13 of the non-staggered probe 10B may be curved to enhance its flexibility. In addition, when the aforementioned misaligned probe 10A is manufactured in a straight line, the misaligned probe 10A may also be provided with a stopper 14 like the non-misaligned probe 10B. During the probe installation process, when the upper and lower guide plates 16 and 17 have not yet moved laterally relative to each other, the stopper 14 can prevent the misaligned probe 10A, which is still in a straight line, from falling downward.

However, whether it is the misaligned probe 10A or the non-misaligned probe 10B, the needle tail 11 and the needle head 12 may abut against the inner surface of the upper and lower guide holes 162, 172, thereby generating friction when moving up and down. During the test, that is, when the bottom end of the needle head 12 touches a test object (not shown in the figure) and the probe moves upward, if the needle tail 11 and the needle head 12 cannot move longitudinally to the appropriate position in the upper and lower guide holes 162, 172, that is, the probe cannot operate normally due to the excessive friction mentioned above (hereinafter referred to as stuck needle).

On the other hand, a space converter or a circuit board (not shown) is disposed on the top of the probe head, and the top end of the probe tail 11 is against a contact point on the bottom surface of the space converter or the circuit board. After the probe is powered on for a period of time, the temperature rises due to Joule heating (also known as resistive heating), and the contacts on the bottom of the space converter or circuit board may produce metal diffusion with the top of the needle tail 11. As a result, when the probe card is repaired and the space converter or circuit board is separated from the probe head (hereinafter referred to as repair), the probe may easily come off from above the upper guide plate 16 (hereinafter referred to as upward detachment) due to the needle tail 11 sticking to the contacts on the bottom of the space converter or circuit board, making the repair work more difficult.

In view of the above-mentioned deficiencies, the main purpose of the present invention is to provide a probe head with a vertical probe having an elastic needle tail, which can prevent the vertical probe from getting stuck and falling out upward during testing and maintenance.

To achieve the above-mentioned purpose, the probe head provided by the present invention includes a probe holder and a vertical probe. The probe holder includes an upper guide plate, a lower guide plate, an upper guide hole passing through the upper guide plate, and a lower guide hole passing through the lower guide plate. The vertical probe can define a longitudinal axis, a first transverse axis and a second transverse axis that are perpendicular to each other. The vertical probe defines the length along the longitudinal axis and the width along the first transverse axis. The vertical probe includes a needle head, a needle body and a needle tail connected in sequence from bottom to top. The needle tail is inserted through the upper guide hole of the upper guide plate of the probe holder, the needle head is inserted through the lower guide hole of the lower guide plate of the probe holder, the needle body is located between the upper guide plate and the lower guide plate, and the needle tail includes a stopper for leaning against the upper guide plate, a stopper between the stopper and the lower guide plate, and a stopper between the stopper and the lower guide plate. A penetration section between the needle body and penetrating in the upper guide hole, and an opening penetrating the needle tail along the second transverse axis, the penetration section includes a contact portion and a non-contact portion divided along the longitudinal axis, the contact portion is closer to the stop portion than the non-contact portion, the contact portion has two contact sides, the two contact sides are respectively oriented to a positive direction and a negative direction of the first transverse axis, at least one of the two contact sides is in contact with an inner surface of the upper guide hole, the non-contact portion is not in contact with the inner surface of the upper guide hole, and the opening is at least partially located in the upper guide hole.

Thus, when the probe head of the present invention is testing, the bottom end of the vertical probe needle is subjected to an upward force, which causes the needle tail to move slightly upward, and only the portion of the needle tail that is inserted into the upper guide hole and is closer to the stopper abuts against the inner surface of the upper guide hole, while the portion farther from the stopper does not abut against the inner surface of the upper guide hole, that is, the insertion section is divided into an abutting portion and a non-abutting portion along the longitudinal axis, which is less likely to cause the needle to get stuck than when the insertion section is not divided into an abutting portion and a non-abutting portion along the longitudinal axis. During maintenance, even if the top end of the needle tail is subjected to an upward force, there is still friction between the insertion section and the inner surface of the upper guide hole to prevent the vertical probe from coming out upward. However, the feature that only the penetration section is distinguished into the abutment portion and the non-abutment portion along the longitudinal axis is not sufficient to improve the above-mentioned problems of needle jamming and upward disengagement. In order to further solve this problem, the needle tail of the vertical probe of the present invention is provided with the above-mentioned opening and has elasticity in the penetration section. This elasticity can adjust the normal force of the needle tail acting on the inner surface of the upper guide hole, and further adjust the friction between the needle tail and the inner surface of the upper guide hole. In this way, the problems of needle jamming and upward disengagement can be further avoided, and the top end of the needle tail can be kept in contact with the contact of the space converter or circuit board above it during testing, thereby improving the stability of the test. Furthermore, the present invention can make the friction force between the needle tail and the inner surface of the upper guide hole fall within an appropriate range by designing the size of the penetration section and the opening of the vertical probe. For example, the friction force is less than the contact force of the probe touching the object to be tested (to avoid the probe being unable to move up and down normally due to excessive friction during testing), and the friction force is greater than half of the contact force (to resist the upward force exerted on the needle tail due to the top end sticking to the contact of the space converter or circuit board above it during maintenance), thereby avoiding the problem of the vertical probe getting stuck and falling out upward.

Preferably, the opening of the needle tail extends to above the stopper, and the needle tail includes a first bifurcated section and a second bifurcated section separated by the opening, and a bifurcated section support portion between the first bifurcated section and the second bifurcated section. In other words, the opening is not open upward, but the top of the opening is closed by the bifurcated section support portion, so that the first and second bifurcated sections will not swing. Thereby, when the needle tail and the inner surface of the upper guide hole rub against each other, the first and second bifurcated sections will not have other lateral movements except for slight elastic deformation to adjust the friction force. In this way, the normal force of the needle tail acting on the inner surface of the upper guide hole can be maintained stable, and the bifurcated section support portion will not have lateral movement, so that its supporting force between the first and second bifurcated sections can be maintained stable. The opening is not only located in the penetration section, but also extends upward to other parts of the needle tail, so that the probe can be subjected to less stress when rubbing against the inner surface of the upper guide hole, thereby avoiding damage to the probe.

Preferably, one of the first bifurcated section and the second bifurcated section has a contact end extending upward from the position of the bifurcated section support portion. In this way, the contact end can be used to contact the contact of the space converter or circuit board above the needle tail, and the contact end is relatively small in size because it only extends upward from one of the first and second bifurcated sections, and can correspond to the small size and small pitch contact of the space converter or circuit board to meet the contact requirements of fine pitch. In addition, the contact end will be biased toward the needle tail side, which can be used to identify the directionality of the probe.

Preferably, the penetration section of the needle tail of the vertical probe includes a width-contracting section, the width-contracting section has a widest part and a narrowest part, the width-contracting section extends downward from the widest part to the narrowest part in a gradually decreasing manner, the opening extends downward from the widest part of the width-contracting section, and the opening extends upward from the widest part of the width-contracting section to the bifurcation section support part in a gradually increasing manner. This feature is conducive to the friction between the needle tail and the inner surface of the upper guide hole to resist the upward force on the needle tail during maintenance, so as to enhance the effectiveness of preventing the vertical probe from coming out upward. Thereby, the width-contracting section can abut against the inner surface of the upper guide hole at its widest part, while the part below the widest part will not abut against the inner surface of the upper guide hole. In this way, the aforementioned feature of distinguishing the abutting part and the non-abutting part along the longitudinal axis can be achieved, and the width-contracting section is less likely to get stuck when it moves upward in the upper guide hole than one with uniform width.

Preferably, the bifurcation section support portion is inseparably connected to the first bifurcation section and the second bifurcation section. Such a vertical probe is easier to manufacture. In this aspect, more preferably, the bifurcation section support portion defines a longitudinal thickness along the longitudinal axis, and the longitudinal thickness of the bifurcation section support portion is less than the width of the bifurcation section support portion. Thereby, when performing needle implantation, that is, when installing the vertical probe into the probe seat, the small longitudinal thickness of the bifurcation section support portion can avoid excessive stress during needle implantation and thus causing the bifurcation section support portion to break. In addition, the small longitudinal thickness of the bifurcation section support portion can avoid affecting the elasticity of the needle tail due to excessive support force on the first and second bifurcation sections.

Preferably, the bifurcated section support is inseparably connected to the first bifurcated section and can contact the second bifurcated section. In other words, the bifurcated section support and the second bifurcated section are not connected as a whole but can maintain mutual contact or almost mutual contact, thereby, the bifurcated section support can slightly slide relative to the second bifurcated section when subjected to force, so as to avoid excessive stress on the implantation needle and damage to the probe, and also improve the effect of the needle tail in adjusting the friction force, thereby improving the effectiveness of the vertical probe in preventing the needle from getting stuck and coming out upward. More preferably, the bifurcated segment support portion defines a longitudinal thickness along the longitudinal axis, and the bifurcated segment support portion gradually extends from the longitudinal thickness of the first bifurcated segment toward the second bifurcated segment, so that the contact area between the bifurcated segment support portion and the second bifurcated segment is small.

More preferably, the bifurcated section support has an arc surface, which can contact the second bifurcated section, so that the bifurcated section support and the second bifurcated section are in linear contact. By virtue of the aforementioned small contact area or even linear contact feature, the bifurcated section support can enhance the sliding effect relative to the second bifurcated section, thereby further preventing the probe from being damaged by excessive needle implantation stress, and enhancing the effectiveness of the vertical probe in preventing the probe from being stuck and coming out upward.

Preferably, the second bifurcated section has a groove, and the bifurcated section support portion is located in the groove. This can prevent the bifurcated section support portion from sliding too much relative to the second bifurcated section and affecting the elasticity of the needle tail.

Preferably, the widest part of the width-contracting section is directly connected to the stopper. This feature is conducive to the friction between the width-contracting section and the inner surface of the upper guide hole to resist the upward force on the needle tail during maintenance, thereby improving the effectiveness of the vertical probe in preventing it from coming out upward.

Preferably, the needle tail penetration section further includes a uniform width section connected between the width gradient section and the stop section and having a uniform width, and the width of the uniform width section is equal to the width of the widest part of the width gradient section. Thus, the uniform width section and the width gradient section are both located in the upper guide hole, which can increase the contact area between the needle tail and the inner surface of the upper guide hole, thereby further improving the effect of preventing the vertical probe from coming out upward.

Preferably, in the embodiment where the penetration section of the needle tail includes a width gradient section, the upper guide hole of the probe seat can define a first width and a second width along the first transverse axis and the second transverse axis respectively, the width of the widest part of the width gradient section of the needle tail is greater than the first width of the upper guide hole, and the needle tail can define a transverse thickness along the second transverse axis, and the transverse thickness of the needle tail is less than the second width of the upper guide hole. Thereby, the elasticity generated by the opening of the needle tail allows the needle tail to be elastically compressed along the first transverse axis, so that the widest part of the width gradient section can enter the upper guide hole, and the elastic restoring force generated by the elastic compression of the needle tail will make the widest part of the width gradient section stick to the inner surface of the upper guide hole and apply a certain positive force to the inner surface of the upper guide hole, thereby ensuring a certain friction between the width gradient section and the inner surface of the upper guide hole.

Preferably, the needle tail has a rough surface in the penetration section, and the rough surface is against an inner surface of the upper guide hole. More preferably, the rough surface contains a plurality of protrusions. Thus, the present invention can also adjust the friction between the needle tail and the inner surface of the upper guide hole within an appropriate range through the design of the rough surface.

Preferably, the vertical probe can define a total probe length along the longitudinal axis, and the opening can define an opening length along the longitudinal axis, and the opening length is less than 25% of the total probe length. In this way, the opening can be located only at the part of the needle tail in or adjacent to the upper guide hole to exert the best elasticity and avoid affecting the movement of other parts of the probe (such as the needle body).

Preferably, the needle body includes an elastic deformation section, and the opening is located above the elastic deformation section. In other words, the opening is not located in the elastic deformation section of the needle body to prevent the elastic deformation of the needle body from being affected by the opening.

Preferably, the opening of the needle tail is partially located below the upper guide plate. This can improve the elasticity of the needle tail to achieve a good effect of adjusting friction, thereby improving the effect of preventing the vertical probe from getting stuck and coming out upward.

Preferably, the upper guide hole and the lower guide hole are coaxially corresponding. That is, the vertical probe is a non-misaligned probe as described in the prior art, and the non-misaligned probe is more suitable for adopting the technical features of the present invention to avoid the problem of needle jamming and upward disengagement than the misaligned probe.

Preferably, the upper guide hole is defined in width along the first transverse axis, and has a widest portion and a narrowest portion, and the upper guide hole extends downward from the narrowest portion to the widest portion with gradually increasing width. Thus, even if the penetration section of the needle tail of the vertical probe has a uniform width, the penetration section will abut against the narrowest portion of the upper guide hole, and will not abut against the portion below the narrowest portion, thus achieving the aforementioned feature of distinguishing the abutting portion and the non-abutting portion along the longitudinal axis of the penetration section, thereby avoiding the occurrence of a needle jam.

The detailed structure, features, assembly or use of the probe head of the vertical probe with a flexible needle tail provided by the present invention will be described in the detailed description of the implementation method in the following. However, those with ordinary knowledge in the field of the present invention should understand that the detailed description and the specific embodiments listed for implementing the present invention are only used to illustrate the present invention and are not used to limit the scope of the patent application of the present invention.

The applicant first explains that in the embodiments and drawings to be introduced below, the same reference numbers represent the same or similar elements or their structural features. It should be noted that the elements and structures in the drawings are drawn for the convenience of illustration and are not based on the actual proportions and quantities, and if it is possible in practice, the features of different embodiments can be applied interchangeably. Secondly, when it is mentioned that an element is disposed on another element, it means that the aforementioned element is directly disposed on the other element, or the aforementioned element is indirectly disposed on the other element, that is, one or more other elements are disposed between the two elements. When it is mentioned that an element is "directly" disposed on another element, it means that no other elements are disposed between the two elements.

Please refer to FIG. 3 . The vertical probe 21 provided in a first preferred embodiment of the present invention can define a longitudinal axis (Z axis), a first transverse axis (Y axis) and a second transverse axis (X axis) which are perpendicular to each other. The vertical probe 21 defines a length along the longitudinal axis (Z axis) and a width along the first transverse axis (Y axis). The vertical probe 21 includes a needle head 30, a needle body 40 and a needle tail 50 which are sequentially connected from bottom to top.

Please refer to FIG. 4 , the vertical probe 21 is used to form a probe head 71 together with a probe holder 60. The probe holder 60 includes an upper guide plate 61, a lower guide plate 62, a middle guide plate 63 connected between the upper and lower guide plates 61, 62, and a receiving space 64 between the upper and lower guide plates 61, 62. Alternatively, the probe holder 60 may also be without the middle guide plate 63, and the upper and lower guide plates 61, 62 are directly connected to each other. The upper guide plate 61 has an upper surface 611, a lower surface 612, and an upper guide hole 613 passing through the upper and lower surfaces 611, 612. The lower guide plate 62 has an upper surface 621, a lower surface 622, and a lower guide hole 623 passing through the upper and lower surfaces 621, 622. The needle head 30 of the vertical probe 21 is partially inserted into the lower guide hole 623 and partially located below the lower guide hole 623, the needle tail 50 is partially inserted into the upper guide hole 613 and partially located above the upper guide hole 613, and the needle body 40 is located in the accommodation space 64. The probe head of the present invention actually includes many vertical probes. In order to simplify the drawings and facilitate explanation, each drawing of the present invention only shows a vertical probe and its corresponding upper and lower guide holes.

The probe head 71 is used to form a probe card together with a space converter (not shown) disposed on the top side thereof and a main circuit board (not shown) disposed on the top side of the space converter. The top end of the needle tail 50 is used to abut against the conductive contact on the bottom surface of the space converter, and then electrically connected to a tester (not shown) through the space converter and the main circuit board. Alternatively, there may be no space converter between the probe head 71 and the main circuit board, and the top end of the needle tail 50 abuts against the conductive contact on the bottom surface of the main circuit board. The bottom end of the needle head 30 is used to touch a conductive contact (not shown) of a test object, so that the tester is electrically connected to the test object through the probe card.

The vertical probe 21 of this embodiment is manufactured by MEMS (microelectromechanical systems), so in FIG3 the vertical probe 21 is a stacked structure along the X axis, but the vertical probe of the present invention is not limited to a MEMS probe. In addition, the vertical probe 21 of this embodiment is a non-misaligned probe, that is, when the vertical probe 21 is not installed on the probe holder 60, the needle head 30 and the needle tail 50 are coaxially corresponding to each other on the Z axis, and after the vertical probe 21 is installed, the upper and lower guide holes 613 and 623 penetrated by it are also coaxially corresponding, so the needle head 30 and the needle tail 50 are still coaxially corresponding to each other on the Z axis. However, the vertical probe 21 of the present embodiment is not completely straight, but the needle body 40 is made into a partially curved shape. This partially curved part is an elastic deformation section 41 of the needle body 40. When the needle head 30 is subjected to an upward force due to its bottom end contacting the conductive contact of the object to be tested, the elastic deformation section 41 of the needle body 40 will be elastically deformed, so as to avoid excessive point contact force and damage to the probe or the object to be tested. However, the vertical probe of the present invention is not limited to a non-misaligned probe, nor is it limited to a curved shape of the needle body. Even if the needle body is straight, it still has an elastic deformation section, which will be slightly elastically deformed when subjected to force. However, the curved elastic deformation section 41 shown in the present embodiment has better elasticity.

Please refer to FIG. 5 . The main technical feature of the present invention is the needle tail 50. The needle tail 50 includes a penetration section 59 for penetrating into the upper guide hole 613 and an exposed section 52 above the upper guide hole 613. The penetration section 59 in this embodiment includes a width-gradient section 51. The width-gradient section 51 has a widest portion 511 and a narrowest portion 512. The width-gradient section 51 extends downward from the widest portion 511 to the narrowest portion 512 in a gradually decreasing manner. In other words, the width W1 of the widest portion 511 is the maximum width of the width-gradient section 51, and the width W2 of the narrowest portion 512 is the minimum width of the width-gradient section 51. The exposed section 52 includes a stopper 521 connected to the width-contracting section 51. The stopper 521 in this embodiment includes a plane at the bottom of the exposed section 52 and a rounded corner connected to the width-contracting section 51. In practice, the rounded corner is not necessary. As shown in FIG. 5 and FIG. 6 , the upper guide hole 613 can define a first width W6 and a second width W7 along the first transverse axis (Y axis) and the second transverse axis (X axis), respectively. In FIG. 5 and FIG. 6 , the first width W6 is equal to the width W1 of the widest portion 511 of the width-contracting section 51. This part will be described in detail below. The width W3 of the stopper 521 is greater than the width W1 of the widest portion 511 of the width tapering section 51 and greater than the first width W6 of the upper guide hole 613. Thus, even if the vertical probe 21 is subjected to a downward force during installation, the stopper 521 can abut against the upper surface 611 of the upper guide plate 61 to prevent the vertical probe 21 from moving downward.

It should be noted that FIG6 is a schematic cross-sectional view of the upper guide plate 61 and the vertical probe 21 shown in FIG5 at the widest portion 511 of the width-contracting section 51. As shown in FIG5 and FIG6, the upper guide hole 613 is a rectangular hole, and the cross-sectional shape of the vertical probe 21 is rectangular. The widest portion 511 of the width-contracting section 51 is in contact with the inner surface 614 of the upper guide hole 613 with its two sides, so that the vertical probe 21 can be prevented from rotating. The longitudinal cross-sectional views of other parallel Y-Z planes in the present invention are also in the same position as shown in FIG5. As shown in FIG. 5 , the needle tail 50 is inserted into the upper guide hole 613 in a penetration section 59, and the widest portion 511 of the width-contracting section 51 abuts against the inner surface 614 of the upper guide hole 613. The portion below the widest portion 511 does not abut against the inner surface 614 of the upper guide hole 613. In this way, the penetration section 59 can be divided into an abutting portion 591 and a non-abutting portion 592 along the longitudinal axis (Z axis). The abutting portion 591 is smaller than the non-abutting portion 592. 2 is closer to the stopper 521. In other words, the abutting portion 591 and the non-abutting portion 592 are divided in such a way that the penetration section 59 is divided into two upper and lower parts. The abutting portion 591 refers to the part abutting against the inner surface 614 of the upper guide hole 613. In this embodiment, the abutting portion 591 is the widest part 511 of the width-reducing section 51. The non-abutting portion 592 refers to the part below the abutting portion 591 that does not abut against the inner surface 614 of the upper guide hole 613. As shown in FIG. 6, the abutting portion 591 has two abutting sides 591a facing the positive direction of the first transverse axis (Y axis) and the negative direction of the first transverse axis (Y axis), and the abutting side 591a abuts against the inner surface 614 of the upper guide hole 613.

As shown in FIG5 , the needle tail 50 further includes an opening 53 that penetrates the width tapering section 51 and the exposed section 52 along the second transverse axis (X axis). Specifically, the opening 53 in the present invention is mainly disposed in the penetration section 59 , so that the opening 53 is at least partially located in the upper guide hole 613 . In the embodiment in which the penetration section 59 includes the width gradient section 51, the opening 53 is mainly arranged at the widest part 511 of the width gradient section 51 and extends downward from the widest part 511. It may not extend to the narrowest part 512, but may extend to the narrowest part 512 or even to below the narrowest part 512, as long as the opening 53 is located above the elastic deformation section 41 of the needle body 40, that is, the opening 53 will not be located in the elastic deformation section 41 of the needle body 40, so as to avoid the elastic deformation of the needle body 40 being affected by the opening 53. The opening 53 is mainly used to make the penetration section 59 elastic. In this embodiment, it is mainly used to make the width gradient section 51 elastic. That is, the width gradient section 51 can be elastically compressed along the Y axis under the action of external force to slightly reduce the width.

In order to enhance the elasticity of the width tapering section 51 or even the entire needle tail 50, the opening 53 in this embodiment is not only located in the width tapering section 51, but the opening 53 can also extend upward from the widest portion 511 of the width tapering section 51 to above the stop portion 521. In detail, the needle tail 50 includes a first bifurcated section 54 and a second bifurcated section 55 separated by the opening 53, and a bifurcated section support portion 56 connected between the first and second bifurcated sections 54, 55, so that the opening 53 is not open upward, but the bifurcated section support portion 56 closes the top of the opening 53, so that the first and second bifurcated sections 54, 55 will not swing.

It should be noted that when the needle tail 50 is inserted into the upper guide hole 613 and is not elastically compressed along the Y axis, the widest portion 511 of the width gradient section 51 may be located above the upper guide hole 613 as shown in FIG. 7 . At this time, the width W1 of the widest portion 511 is greater than the width W1 shown in FIG. 5 and FIG. 6 , that is, greater than the first width W6 of the upper guide hole 613 . However, the elasticity generated by the aforementioned opening 53 allows the needle tail 50 to be elastically compressed along the Y axis. The widest portion 511 of the width-scaling section 51 can enter the upper guide hole 613, as shown in FIG5 , and the elastic restoring force generated by the elastic compression of the needle tail 50 will cause the widest portion 511 of the width-scaling section 51 to abut against the inner surface 614 of the upper guide hole 613 and exert a certain positive force on the inner surface 614 of the upper guide hole 613, thereby ensuring a certain friction force between the width-scaling section 51 and the inner surface 614 of the upper guide hole 613. In addition, the needle tail 50 can define a transverse thickness T1 (as shown in FIG6 ) along the second transverse axis (X axis), and the transverse thickness T1 is less than the second width W7 of the upper guide hole 613, thereby making it easier for the needle tail 50 to be inserted into the upper guide hole 613. In other words, FIG. 5 and FIG. 6 show the state that the needle tail 50 has been elastically compressed along the Y axis so that the widest portion 511 of the width gradient section 51 is stuck against the inner surface 614 of the upper guide hole 613, so the width W1 of the widest portion 511 of the width gradient section 51 is equal to the first width W6 of the upper guide hole 613 in FIG. 5 and FIG. 6, and the drawings of other embodiments of the present invention are also drawn in a state similar to FIG. 5. However, the present invention is not limited to installing the vertical probe in the above state, as long as the width gradient section 51 is in contact with the inner surface 614 of the upper guide hole 613, friction will be generated.

When the probe card is being tested, the vertical probe 21 is subjected to an upward force due to the bottom end of the needle 30 touching the object to be tested, which causes the needle tail 50 to move slightly upward. The width tapered section 51 moves upward in the upper guide hole 613, which is less likely to cause the probe to get stuck than a probe with uniform width. When the probe card is being repaired, even if the top end of the needle tail 50 is subjected to an upward force, there will be friction between the width tapered section 51 and the inner surface 614 of the upper guide hole 613 to prevent the vertical probe 21 from falling out upward. Moreover, the elasticity of the needle tail 50 due to the opening 53 can adjust the positive force of the needle tail 50 acting on the inner surface 614 of the upper guide hole 613, thereby adjusting the friction between them. This can further avoid the problem of needle jamming and upward disengagement, and during testing, the top of the needle tail 50 can maintain contact with the contact of the space converter or the main circuit board above it, thereby improving the stability of the test.

In addition, as shown in FIG. 4 , the vertical probe 21 can define a total probe length L1 along the longitudinal axis (Z axis), and the opening 53 can define an opening length L2 along the longitudinal axis (Z axis), and the opening length L2 is less than 25% of the total probe length L1. This feature can ensure that the opening 53 is only located in the portion of the needle tail 50 in or adjacent to the upper guide hole 613 to exert the best elasticity and avoid affecting the movement of other parts of the probe (such as the needle body 40). Preferably, the opening length L2 can be less than 20% of the total probe length L1, so as to further avoid affecting the movement of other parts of the probe (such as the needle body 40), and still allow the needle tail 50 to have good elasticity to avoid problems such as needle jamming and upward disengagement.

Furthermore, the friction between the needle tail 50 and the inner surface 614 of the upper guide hole 613 can be within an appropriate range by designing the width tapering section 51 and the size of the opening 53. For example, the friction is less than the contact force of the needle head 30 touching the object to be tested (to avoid the probe being unable to move up and down normally due to excessive friction during testing), and the friction is greater than half of the contact force (to resist the upward force exerted on the needle tail 50 due to the top end sticking to the conductive contact of the space converter or main circuit board above it during maintenance), so as to avoid the problem of needle stuck and upward disengagement. For example, if the contact force of the vertical probe of the present invention during normal testing is 2GW, then the friction between 1GW and 2GW is a better design.

As shown in FIG. 5 , the opening 53 may (but is not limited to) extend upward from the tapered width section 51 to the exposed section 52 . This not only improves the elasticity of the needle tail 50 , but also allows the vertical probe 21 to withstand less stress when rubbing against the inner surface 614 of the upper guide hole 613 , thereby avoiding damage to the probe. In addition, the design of the first and second branching sections 54, 55 of the needle tail 50 being connected by the branching section support portion 56 will ensure that when the needle tail 50 rubs against the inner surface 614 of the upper guide hole 613, the first and second branching sections 54, 55 will not have other lateral movements except for slight elastic deformation to adjust the friction force. In this way, the positive force of the needle tail 50 acting on the inner surface 614 of the upper guide hole 613 can be maintained stable, and the branching section support portion 56 will not have lateral movement, so that the supporting force between the first and second branching sections 54, 55 can be maintained stable. In addition, the second bifurcated section 55 (or the first bifurcated section 54) may (but is not limited to) have a contact end 57 extending upward from the location of the bifurcated section support portion 56. The contact end 57 is used to contact the conductive contact of the space converter or the main circuit board above the needle tail 50. Since the contact end 57 only extends upward from one of the first and second bifurcated sections 54 and 55, it has a relatively small size and can correspond to the small size and small pitch contacts of the space converter or the main circuit board to meet the fine pitch contact requirements. In addition, the contact end 57 will be biased toward one side of the needle tail 50 (for example, the left side in FIG. 5) to identify the directionality of the probe. Furthermore, the opening 53 may (but is not limited to) extend upwardly from the widest portion 511 of the width-contracting section 51 to the bifurcated section support portion 56 in a gradually increasing width. This feature is conducive to the friction between the needle tail 50 and the inner surface 614 of the upper guide hole 613 to resist the upward force exerted on the needle tail 50 during maintenance, so as to enhance the effectiveness of preventing the vertical probe from being dislodged upward. In this embodiment, the needle tail 50 includes the width-contracting section 51 and the exposed section 52. One end of the needle tail 50 is a contact end 57. The contact end 57 is one end of the exposed section 52 or a free end, which is the end of the exposed section 52. The other end of the exposed section 52 is connected to the width-contracting section 51. The other end of the exposed section 52 is a stopper 521. Please refer to Figure 3 and Figure 4, the length of the needle tail 50 is less than the length of the needle body 40.

In this embodiment, the bifurcated section support portion 56 is inseparably connected to the first bifurcated section 54 and the second bifurcated section 55, but the present invention is not limited to this aspect, for example, it can be the aspect of the second and third preferred embodiments (described in detail below). In the present embodiment, the longitudinal thickness T2 of the bifurcated segment support portion 56 defined along the longitudinal axis (Z axis) may be (but is not limited to) smaller than the width W4 of the bifurcated segment support portion 56. Thus, when the vertical probe 21 is installed into the probe holder 60 (also referred to as implanting the probe), the small longitudinal thickness T2 of the bifurcated segment support portion 56 can avoid the bifurcated segment support portion 56 from being broken due to excessive implanting stress, and can also avoid the bifurcated segment support portion 56 from affecting the elasticity of the needle tail 50 due to excessive supporting force on the first and second bifurcated segments 54 and 55.

Please refer to FIG8 and FIG9 , a probe head 72 provided in a second preferred embodiment of the present invention includes a probe holder 60 which is the same as the first preferred embodiment, and a vertical probe 22. The vertical probe 22 is similar to the vertical probe 21 of the first preferred embodiment, but the main difference is that the bifurcated section support portion 56 of the vertical probe 22 of this embodiment is inseparably connected to the first bifurcated section 54 but can detachably contact the second bifurcated section 55. In detail, when the vertical probe 22 is not yet installed on the probe holder 60, the bifurcated section support portion 56 may have contacted the second bifurcated section 55, or there may be a small distance between the two. When the vertical probe 22 is mounted on the probe holder 60 and the needle tail 50 is elastically compressed and inserted into the upper guide hole 613, the bifurcated section support portion 56, which was originally slightly spaced from the second bifurcated section 55, has moved slightly toward the second bifurcated section 55 and can contact the second bifurcated section 55, as shown in FIG9. In other words, the bifurcated section support portion 56 and the second bifurcated section 55 in this embodiment are not connected as a whole but are in contact with each other or almost in contact with each other. In this way, the bifurcated section support portion 56 can slightly slide relative to the second bifurcated section 55 when subjected to force, which can avoid excessive stress during needle implantation and damage to the probe, and can also enhance the effect of the needle tail 50 in adjusting friction, thereby enhancing the effectiveness of the vertical probe in preventing the probe from getting stuck and coming out upward.

Furthermore, the bifurcated section support portion 56 is defined along the longitudinal axis (Z axis). In the present embodiment, the bifurcated section support portion 56 gradually extends from the first bifurcated section 54 toward the second bifurcated section 55. In other words, the maximum longitudinal thickness of the bifurcated section support portion 56 is located at the connection between the bifurcated section 54 and the first bifurcated section 54. The minimum longitudinal thickness of the forked section 56 is located at the place where it is detachably in contact with the second forked section 55, and even this minimum longitudinal thickness can be zero, that is, as shown in the present embodiment, the forked section support portion 56 has a circular arc surface 561, and the circular arc surface 561 is detachably in contact with the second forked section 55, so that the forked section support portion 56 and the second forked section 55 are in linear contact. Thereby, the contact area between the forked section support portion 56 and the second forked section 55 is small or even in linear contact, which can enhance the effect of the forked section support portion 56 sliding relative to the second forked section 55, thereby further avoiding the damage of the probe due to excessive stress of the implant, and enhancing the effect of preventing the vertical probe from being stuck and coming out upward.

In addition, another difference between the vertical probe 22 of the present embodiment and the vertical probe 21 of the first preferred embodiment is that the opening 53 of the vertical probe 22 of the present embodiment extends downward from the narrowest portion 512 of the width tapering section 51, and the opening 53 is located in the upper guide hole 613 and partially located below the upper guide plate 61. It can be seen from this that the opening 53 of the needle tail 50 of the vertical probe of the present invention can be completely located in the upper guide hole 613 and not exposed below the upper guide hole 613 (as shown in FIG. 5); or, the opening 53 can also be opened further downward and partially exposed below the upper guide hole 613 (as shown in FIG. 9), so as to improve the elasticity of the needle tail 50, so as to achieve a good effect of adjusting friction, thereby improving the effect of preventing the vertical probe from getting stuck and coming out upward.

Please refer to FIG. 10 , a probe head 73 provided in a third preferred embodiment of the present invention includes a probe holder 60 which is the same as the first and second preferred embodiments, and a vertical probe 23. The vertical probe 23 is similar to the vertical probe 22 of the second preferred embodiment, but the main difference is that the second bifurcation section 55 of the vertical probe 23 of this embodiment has a groove 551, and the bifurcation section support portion 56 is located in the groove 551, so as to avoid the bifurcation section support portion 56 from sliding too much relative to the second bifurcation section 55 and affecting the elasticity of the needle tail 50.

Please refer to FIG. 11 , a probe head 74 provided in a fourth preferred embodiment of the present invention includes a probe holder 60 which is the same as the first to third preferred embodiments, and a vertical probe 24. The vertical probe 24 is similar to the vertical probe 21 of the first preferred embodiment, and the main differences are described in detail as follows.

As shown in FIG. 5 , the widest portion 511 of the tapered width section 51 of the vertical probe 21 is directly connected to the stopper 521. This feature facilitates the friction between the tapered width section 51 and the inner surface 614 of the upper guide hole 613 to resist the upward force exerted on the needle tail 50 during maintenance, thereby improving the effectiveness of the vertical probe in preventing it from falling out upward. As shown in FIG. 11 , the needle tail 50 of the vertical probe 24 further includes a uniform width section 58 connected between the width tapering section 51 and the stop portion 521 and having a uniform width, and a width W5 of the uniform width section 58 is equal to a width W1 of the widest portion 511 of the width tapering section 51. Such a design ensures that the upper guide hole 613 has not only the width tapering section 51 but also the uniform width section 58. In other words, the uniform width section 58 is a part of the penetration section 59, and the uniform width section 58 and the widest portion 511 of the width tapering section 51 abut against the inner surface 614 of the upper guide hole 613, that is, the uniform width section 58 is a part of the abutment portion 591 of the penetration section 59. Compared with the needle tail 50 shown in FIG. 5 , the needle tail 50 shown in FIG. 11 has a larger contact area with the inner surface 614 of the upper guide hole 613, which can further enhance the effect of preventing the vertical probe from coming out upward. It can be seen from this that in the present invention, the widest part 511 of the width tapering section 51 of the needle tail 50 does not necessarily have to be directly connected to the stopper 521, and the narrowest part 512 of the width tapering section 51 does not necessarily have to be directly connected to the needle body 40, as long as the width tapering section 51 is located between the stopper 521 and the needle body 40. In this embodiment, the needle tail 50 includes a uniform width section 58, a width tapering section 51 and an exposed section 52. One end of the needle tail 50 is a contact end 57. The contact end 57 is one end of the exposed section 52 or a free end, which is the end of the exposed section 52. The other end of the exposed section 52 is connected to the uniform width section 58. The uniform width section 58 is connected to the width tapering section 51. The other end of the exposed section 52 is a stopper 521. Please refer to FIG. 3 and FIG. 4. The length of the needle tail 50 is less than the length of the needle body 40.

Please refer to FIG. 12 . The probe head 75 provided in the fifth preferred embodiment of the present invention includes a probe holder 60 which is the same as the first to fourth preferred embodiments, and a vertical probe 25. The vertical probe 25 is similar to the vertical probe 21 of the first preferred embodiment, but the main difference is that the width tapering section 51 of the vertical probe 25 of the present embodiment has a rough surface 513, and the rough surface 513 is used to abut against the inner surface 614 of the upper guide hole 613. Furthermore, the rough surface 513 in the present embodiment includes a plurality of protrusions 514. Thus, the present invention can also adjust the friction between the needle tail 50 and the inner surface 614 of the upper guide hole 613 within an appropriate range by designing the rough surface 513.

Please refer to FIG. 13 , the probe tip 76 provided in the sixth preferred embodiment of the present invention is similar to the probe tip 71 provided in the first preferred embodiment, but the main difference is that the needle tail 50 of the vertical probe 26 of this embodiment does not have the aforementioned width-contracting section 51, but the upper guide hole 613 of the probe holder 60 is in a state of gradually increasing width from top to bottom. In detail, in the present embodiment, the penetration section 59 of the needle tail 50 has a uniform width and is equal to the width of the needle body 40. The upper guide hole 613 is defined in width along the first transverse axis (Y axis). The upper guide hole 613 has a widest portion 613a adjacent to the lower surface 612 of the upper guide plate 61, and a narrowest portion 613b adjacent to the upper surface 611 of the upper guide plate 61. The upper guide hole 613 gradually extends downward from the narrowest portion 613b to the widest portion 613a with increasing width. The penetration section 59 of the needle tail 50 abuts against the narrowest portion 613b of the upper guide hole 613, but does not abut against the portion below the narrowest portion 613b. In this way, the penetration section 59 can be divided into an abutment portion 591 and a non-abutment portion 592 along the longitudinal axis (Z axis). The abutment portion 591 in this embodiment is the portion of the penetration section 59 abutting against the narrowest portion 613b of the upper guide hole 613, and the portion below it that does not abut against the inner surface 614 of the upper guide hole 613 is the non-abutment portion 592. Such a design can achieve the same effect as the width tapering section 51 in the aforementioned embodiment, and can avoid the problem of the vertical probe being stuck and falling out upward during testing and maintenance.

As mentioned above, the vertical probe of the present invention can be (but is not limited to) a non-misaligned probe, that is, during the assembly process of the probe head, the probe body 40 is not bent by the upper and lower guide plates 61, 62 translating relative to each other. This can avoid the mechanical problems that may be caused by the aforementioned translation and bending process, and can make the path length of the probe signal transmission relatively short to meet the high-frequency and high-speed testing requirements. Moreover, most of the staggered probes have one side against the lower guide hole and the other side against the upper guide hole. In comparison, the non-staggered probe is more suitable for installation in a manner that the width-reducing section 51 of the needle tail 50 mentioned above is clamped against the inner surface 614 of the upper guide hole 613 or the penetration section 59 of the needle tail 50 is clamped against the inner surface 614 of the upper guide hole 613 whose width gradually increases from top to bottom, so as to generate friction to prevent the probe from getting stuck and coming out upward.

As mentioned above, the probe head provided by the present invention is applied to a probe card to test an object to be tested. Therefore, the present invention further provides a testing method including the following steps a) and b).

a) As shown in FIG. 14 , a probe card 81 is provided. The probe card 81 includes a main circuit board 811 and a probe head 812. The probe head 812 is the probe head provided by the present invention as described above. The probe head 812 is disposed on the main circuit board 811. The vertical probe 813 of the probe head 812 is electrically connected to the main circuit board 811.

In other words, the probe head 812 can be the probe heads 71-76 of the aforementioned embodiments, and the vertical probe 813 corresponds to the vertical probes 21-26 of the aforementioned embodiments. In order to simplify the diagram and facilitate explanation, each component in FIG. 14 is only schematically drawn in a simplified manner. In FIG. 14, the probe head 812 is directly disposed on the bottom surface of the main circuit board 811, and the needle tail of the vertical probe 813 is directly electrically connected to the conductive contact (not shown in the figure) on the bottom surface of the main circuit board 811. However, a space converter (not shown in the figure) can be further disposed between the probe head 812 and the main circuit board 811, so that the needle tail of the vertical probe 813 is indirectly electrically connected to the conductive contact on the bottom surface of the main circuit board 811 through the space converter.

b) providing an object to be tested 82, and moving the probe card 81 and the object to be tested 82 relative to each other, so that the vertical probe 813 of the probe card 81 and the object to be tested 82 are in contact with each other and electrically connected to each other, thereby completing the test of the object to be tested 82.

For example, the object to be tested 82 may be a wafer, and the object to be tested 82 and/or the probe card 81 are moved by a moving device (not shown in the figure), that is, the object to be tested 82 is stationary while the probe card 81 moves, or the probe card 81 is stationary while the object to be tested 82 moves, or both move, firstly, the position of the vertical probe 813 is made to correspond to the conductive contact of the object to be tested 82 along the longitudinal axis (not shown in the figure), and then the probe card 81 and the object to be tested 82 are brought close to each other along the longitudinal axis, so that the bottom end of the needle of the vertical probe 813 contacts the conductive contact of the object to be tested 82. In this way, the conductive contacts of the object under test 82 are electrically connected to the vertical probe 813, and then electrically connected to a tester (not shown) through the main circuit board 811, so that the object under test 82 can be tested.

Finally, it must be reiterated that the constituent elements disclosed in the above-mentioned embodiments of the present invention are merely illustrative and are not intended to limit the scope of the present invention. Replacements or modifications of other equivalent elements should also be covered by the scope of the patent application of the present invention.

10A: Vertical probe (displaced probe) 10B: Vertical probe (non-displaced probe) 11: Needle tail 12: Needle head 13: Needle body 14: Stopper 15: Probe seat 16: Upper guide plate 162: Upper guide hole 17: Lower guide plate 172: Lower guide hole 21,22,23,24,25,26: Vertical probe 30: Needle head 40: Needle body 41: Elastic deformation section 50: Needle tail 51: Width gradient section 511: Widest section 512: Narrowest section 513: Rough surface 514: Bump 52: Exposed section 521: Stopper 53: opening 54: first bifurcation section 55: second bifurcation section 551: groove 56: bifurcation section support 561: arc surface 57: contact end 58: uniform width section 59: penetration section 591: abutment section 591a: abutment side 592: non-abutment section 60: probe seat 61: upper guide plate 611: upper surface 612: lower surface 613: upper guide hole 613a: widest part 613b: narrowest part 614: inner surface 62: lower guide plate 621: upper surface 622: lower surface 623: lower guide hole 63: middle guide plate 64: accommodation space 71,72,73,74,75,76: Probe head 81: Probe card 811: Main circuit board 812: Probe head 813: Vertical probe 82: Object to be tested L1: Total length of probe L2: Opening length T1: Horizontal thickness T2: Longitudinal thickness W1,W2,W3,W4,W5: Width W6: First width W7: Second width

Figures 1 and 2 are cross-sectional schematic diagrams of two commonly used vertical probes and probe holders. Figure 3 is a three-dimensional diagram of a vertical probe provided by a first preferred embodiment of the present invention. Figure 4 is a cross-sectional schematic diagram of a probe head provided by the first preferred embodiment of the present invention. Figure 5 is a partial enlarged view of Figure 4. Figure 6 is a cross-sectional schematic diagram of a probe head provided by the first preferred embodiment of the present invention at a widest portion of a width gradient segment of a vertical probe. Figure 7 is similar to Figure 5, but shows that the widest portion of the width gradient segment does not enter an upper guide hole. Figure 8 is a cross-sectional schematic diagram of a probe head provided by a second preferred embodiment of the present invention. Figure 9 is a partial enlarged view of Figure 8. FIG. 10 is a partial cross-sectional schematic diagram of a probe head provided in a third preferred embodiment of the present invention. FIG. 11 is a partial cross-sectional schematic diagram of a probe head provided in a fourth preferred embodiment of the present invention. FIG. 12 is a partial cross-sectional schematic diagram of a probe head provided in a fifth preferred embodiment of the present invention. FIG. 13 is a partial cross-sectional schematic diagram of a probe head provided in a sixth preferred embodiment of the present invention. FIG. 14 is a schematic diagram of a probe card and an object to be tested provided by the present invention.

21: Vertical probe

30: Needle

40: Needle body

41: Elastic deformation segment

50: Needle tail

51: Width Gradual Reduction Segment

52: Exposed section

53: Opening

60: Probe holder

61: Upper guide plate

611: Upper surface

612: Lower surface

613: Upper guide hole

62: Lower guide plate

621: Upper surface

622: Lower surface

623: Lower guide hole

63: Middle guide plate

64: Storage space

71: Probe head

L1: Total length of probe

L2: opening length

Claims (17)

A probe head of a vertical probe with an elastic needle tail comprises: a probe base, comprising an upper guide plate, a lower guide plate, an upper guide hole penetrating the upper guide plate, and a lower guide hole penetrating the lower guide plate; and a vertical probe, which can define a longitudinal axis, a first transverse axis and a second transverse axis perpendicular to each other, wherein the vertical probe is defined along the longitudinal axis and is defined along the first transverse axis. The vertical probe comprises a needle head, a needle body and a needle tail connected in sequence from bottom to top, the needle tail is inserted into the upper guide hole of the upper guide plate of the probe seat, the needle head is inserted into the lower guide hole of the lower guide plate of the probe seat, the needle body is located between the upper guide plate and the lower guide plate, and the needle tail comprises a stopper for abutting against the upper guide plate, a stopper between the stopper and the needle body and inserted into The upper guide hole has a penetration section, and an opening penetrating the needle tail along the second transverse axis, the penetration section includes an abutment portion and a non-abutment portion divided along the longitudinal axis, the abutment portion is closer to the stop portion than the non-abutment portion, the abutment portion has two abutment sides, the two abutment sides are respectively oriented to a positive direction and a negative direction of the first transverse axis, the two abutment sides are directly connected to the stop portion, the At least one of the two abutting sides abuts against an inner surface of the upper guide hole, the non-abutting portion does not abut against the inner surface of the upper guide hole, and the opening is at least partially located in the upper guide hole; wherein the opening of the needle tail extends above the stopper, and the needle tail includes a first bifurcation section and a second bifurcation section separated by the opening, and a bifurcation section support portion located between the first bifurcation section and the second bifurcation section. A probe head of a vertical probe with a flexible needle tail as described in claim 1, wherein one of the first bifurcated section and the second bifurcated section has a contact end extending upward from the location of the support portion of the bifurcated section. A probe head of a vertical probe with an elastic needle tail as described in claim 1, wherein the penetration section of the needle tail of the vertical probe includes a width-gradient section, the width-gradient section has a widest part and a narrowest part, the width-gradient section extends downward from the widest part to the narrowest part in a gradually decreasing manner, the opening extends downward from the widest part of the width-gradient section, and the opening extends upward from the widest part of the width-gradient section in a gradually increasing manner in width to the bifurcated section support part. The probe head of a vertical probe with an elastic needle tail as described in claim 1, wherein the bifurcated section support portion is inseparably connected to the first bifurcated section and the second bifurcated section, wherein the bifurcated section support portion defines a longitudinal thickness along the longitudinal axis, and the longitudinal thickness of the bifurcated section support portion is less than the width of the bifurcated section support portion. A probe head of a vertical probe with an elastic needle tail as described in claim 1, wherein the bifurcated section support portion is inseparably connected to the first bifurcated section and can contact the second bifurcated section, wherein the bifurcated section support portion defines a longitudinal thickness along the longitudinal axis, and the bifurcated section support portion extends gradually from the longitudinal thickness of the first bifurcated section toward the second bifurcated section. The probe head of a vertical probe with an elastic needle tail as described in claim 5, wherein the bifurcated section support portion has an arc surface, and the arc surface is capable of contacting the second bifurcated section. A probe head of a vertical probe with an elastic needle tail as described in claim 5, wherein the second bifurcated section has a groove, and the bifurcated section support portion is located in the groove. A probe head of a vertical probe with an elastic needle tail as described in claim 3, wherein the widest part of the gradually tapering width section is directly connected to the stopper. The probe head of a vertical probe with an elastic needle tail as described in claim 3, wherein the penetration section of the needle tail further includes a uniform width section connected between the width tapering section and the stop section and having a uniform width, and the width of the uniform width section is equal to the width of the widest part of the width tapering section. A probe head with a vertical probe having an elastic needle tail as described in claim 3, wherein the upper guide hole of the probe base can define a first width and a second width along the first transverse axis and the second transverse axis respectively, the width of the widest part of the width gradient of the needle tail is greater than the first width of the upper guide hole, the needle tail can define a transverse thickness along the second transverse axis, and the transverse thickness of the needle tail is less than the second width of the upper guide hole. A probe head having a vertical probe with an elastic needle tail as described in claim 1, wherein the penetration section of the needle tail has a rough surface, and the rough surface is against the inner surface of the upper guide hole. A probe head with a vertical probe having a flexible needle tail as described in claim 11, wherein the rough surface contains a plurality of protrusions. A probe head having a vertical probe with an elastic needle tail as described in claim 1, wherein the vertical probe can define a total probe length along the longitudinal axis, and the opening can define an opening length along the longitudinal axis, and the opening length is less than 25% of the total probe length. A probe head of a vertical probe with an elastic needle tail as described in claim 1, wherein the needle body includes an elastic deformation section, and the opening is located above the elastic deformation section. A probe head having a vertical probe with a flexible needle tail as described in claim 1, wherein the opening of the needle tail is partially located below the upper guide plate. A probe head with a vertical probe having an elastic needle tail as described in claim 1, wherein the upper guide hole and the lower guide hole are coaxially corresponding. A probe head with a vertical probe having an elastic needle tail as described in claim 1, wherein the upper guide hole is defined in width along the first horizontal axis, the upper guide hole has a widest part and a narrowest part, and the upper guide hole extends downward from the narrowest part to the widest part with gradually increasing width.

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