TWI876071B - Display method and substrate processing device - Google Patents

Abstract

[Topic] Provide a way to reduce the load of graphics processing. [Solution] A display method is provided for displaying a plurality of parameters representing information about substrate processing, comprising: a process of obtaining measured values of a plurality of the aforementioned parameters sampled at a preset period and information about the sampling time of the aforementioned measured values; a process of extracting measured values that produce time changes in the measured values of the plurality of the aforementioned parameters in a sampling order based on the information about the sampling time of the aforementioned measured values, or extracting measured values that produce the aforementioned time changes and measured values sampled before the measured values; a process of binding the extracted measured values of the plurality of the aforementioned parameters with the information about the sampling time of the aforementioned measured values and storing them in a memory unit; a drawing unit that depicts the measured values of the plurality of the aforementioned parameters as a graph based on the information about the sampling time of the aforementioned measured values stored in the memory unit; and a process of displaying the depicted graph.

Description

Display method and substrate processing device

This disclosure relates to a display method and a substrate processing device.

For example, Patent Document 1 proposes temporarily storing the data collected by the data collection unit in a data buffer, calling out the data from the data buffer at a predetermined cycle to draw a graph, and setting the cycle at this time according to the CPU usage rate.

For example, Patent Document 2 proposes that when a logic analyzer is used for external connection, in order to eliminate the insufficient memory capacity when recording the state value inside the LSI, when outputting continuous identical state values, the identical state values are compressed so that the count value of the number of times the identical data is repeated and the count value of the number of data with different values are overlapped and recorded.

[Prior Art Literature] [Patent Literature]

[Patent Document 1] Patent Publication No. 2010-224974

[Patent Document 2] Patent Publication No. 2006-90727

This disclosure provides a technique that can reduce the load of graphics processing.

According to one aspect of the present disclosure, a display method is provided for displaying a plurality of parameters representing information about substrate processing, comprising: obtaining measured values of the plurality of parameters sampled at a preset period and information about the sampling time of the measured values; extracting measured values that have time variations in the measured values of the plurality of parameters in the sampling order based on the information about the sampling time of the measured values; Or a process of extracting the measured values that produce the aforementioned time variation and the measured values sampled before the measured values; a process of binding the extracted measured values of the aforementioned multiple parameters with the information about the sampling time of the aforementioned measured values and storing them in a memory unit; a drawing unit that draws the measured values of the aforementioned multiple parameters into a graph based on the information about the sampling time of the aforementioned measured values stored in the memory unit; a process of displaying the drawn graph.

On the one hand, it is a technology that can reduce the load of graphics processing.

1: Chamber

2: Plasma

3: Upper electrode

4: Lower electrode

5: Electrostatic chuck

6:RF power supply

7:RF power supply

8: Gas supply department

9: Exhaust device

10: Substrate processing device

20: Control Department

21: Acquisition Department

22: Memory Department

23: Process Execution Department

24: Data Processing Department

25: Drawing Department

26:Description requirements section

27: Display unit

ST: loading platform

G: Substrate

[Figure 1] is a schematic cross-sectional view showing an example of a substrate processing device in an embodiment.

[Figure 2] is a diagram showing an example of the functional structure of a control unit of an implementation form.

[Figure 3] is a diagram showing an example of a data file storage unit in an implementation form.

[Figure 4] is a diagram showing an example of the hardware structure of a control unit of an implementation form.

[Figure 5] is a diagram showing an example of the flow of collecting and processing measured values in one implementation form.

[Figure 6] A diagram showing an example of the flow of conventional graphical processing of measured values.

[Figure 7] A diagram used to explain the graphical processing and graphical display of previous measurement values.

[Figure 8] is a diagram showing an example of the flow of graphical processing of measured values in one implementation form.

[Figure 9] A diagram for illustrating graphical processing and graphical display of measured values in one embodiment.

Below, the form used to implement the present disclosure is described with reference to the drawings. In each drawing, the same symbols are attached to the same components, and repeated descriptions are omitted.

[Substrate processing equipment]

First, a substrate processing device 10 of an embodiment will be described using FIG. 1 . FIG. 1 is a schematic cross-sectional view showing an example of a substrate processing device 10 of an embodiment. FIG. 1 shows a processing device for processing a substrate by capacitively coupled plasma.

The substrate processing device 10 has a chamber 1, and a processing space for etching processing and film forming processing is provided in the chamber 1. In the substrate processing device 10, plasma is formed in the processing space between the upper electrode 3 and the stage ST in the chamber 1, and the substrate G is processed by the action of the plasma. The stage ST has a lower electrode 4 and an electrostatic chuck 5. The stage ST has a heater and the substrate G can be held on the lower electrode 4. The RF power supply 6 and the RF power supply 7 are coupled to the lower electrode 4, and different RF frequencies can be used. The upper electrode 3 is connected to the ground potential. In other examples, the RF power supply 6 and the RF power supply 7 can also be coupled to different electrodes. In the chamber 1, the gas supply part 8 is connected via the gas supply line 11 to supply the processing gas to the processing space. The gas supply line 11 is connected to the flow controller MFC. The process gas is flow-controlled by the flow controller MFC and supplied to the chamber 1 at a preset flow rate. The bottom of the chamber 1 is connected to the exhaust device 9 to exhaust the inside of the chamber 1.

The substrate processing device 10 has a control unit 20 including a processor and various memory areas, and controls various elements of the substrate processing device 10 to perform plasma processing such as etching on the substrate G.

A pressure gauge CM is installed in the chamber 1. The pressure gauge CM measures the pressure in the chamber 1 while the substrate G is being processed. The pressure value measured by the pressure gauge CM is sent to the control unit 20.

The flow controller MFC controls and measures the flow rates of the gases contained in the processing gas while processing the substrate G. The gas flow rate measurement values measured by the flow controller MFC are sent to the control unit 20.

A thermometer T is installed on the stage ST. The thermometer T measures the temperature of the stage ST during the processing of the substrate G. The temperature measurement value measured by the thermometer T is sent to the control unit 20.

The pressure gauge CM, the thermometer T, and the flow controller MFC are examples of machines for measuring information about substrate processing, such as the state of the substrate G, the state of the process, or the state of the chamber 1 during the processing of the substrate G. In addition, the pressure measurement value, the temperature measurement value, and the gas flow measurement value are examples of multiple parameters representing the state of the substrate G, the state of the process, or the state of the chamber 1, and the measurement values of multiple parameters representing information about substrate processing are not limited to these.

The control unit 20 graphically represents multiple parameters of the substrate processing performed by the substrate processing device 10, and executes a display method for displaying them on a display 36 (see FIG. 3 ) possessed by the control unit 20 or other computers capable of communicating with the control unit 20.

[Functional structure of the control unit]

Next, an example of the functional structure of the control unit 20 is described with reference to FIG2. FIG2 is a diagram showing an example of the functional structure of the control unit 20 of an implementation form. The control unit 20 has an acquisition unit 21, a storage unit 22, a process execution unit 23, a data processing unit 24, a drawing unit 25, a drawing request unit 26, and a display unit 27.

The acquisition unit 21 acquires the measured values of multiple parameters sampled at a preset period, and information about the sampling time of the measured values. The information about the sampling time of the measured values can be the sampling number of the measured values or the sampling time itself. In this embodiment, the case of acquiring the sampling number is used as an example for explanation.

The sampling number is numbered in ascending order in each cycle. Thus, by binding the measured value measured in each cycle with the sampling number and storing it in the memory unit 22, the sampling time of the measured value can be calculated. For example, when the cycle is set to T and the sampling number is set to n (n is an integer greater than 1), the sampling time t of each measured value starting from the time when sampling starts is calculated by formula (1).

t=T×(n-1)． ． ． (1)

For example, if the cycle T is 100msec, and all data of all parameters are sampled in each cycle, the sampling time of each measured value becomes t=100(msec)×(n-1), and the sampling time t can be calculated based on the sampling number n. For example, in the case of n=11, the data is sampled 1 second (100msec×10) after the sampling starts.

Furthermore, when n is set to an integer greater than 0 and the sampling start time is set to n=0, the sampling time t can be calculated by formula (1').

t=T×n． ． ． (1’)

The data processing unit 24 calculates the sampling time of each measured value based on the product of the integer based on the sampling number n and the cycle T based on formula (1) or formula (1').

In addition, if we only focus on the relative time between samples, even if n is set to an integer greater than 1 and the sampling start time is set to n=1, the above formula (1') can be applied. However, in this case, the numerical value of the sampling time corresponding to each n no longer has a separate meaning.

The measured values of the obtained multiple parameters are bound to the information related to the sampling time of each parameter and stored in the data storage unit 28 of the memory unit 22. In the data storage unit 28, multiple monitoring data files 128a and 128b are stored.

FIG3 is a diagram showing an example of measured values stored in the data storage unit 28 in an implementation form. For example, in the monitoring data file 128a stored in the data storage unit 28, all parameters (pressure measurement value, air flow measurement value, temperature measurement value, etc.) of the sampling number 1 (n=1) are stored. In the monitoring data file 128b, all parameters of the sampling number 2 (n=2) are stored. In the monitoring data file 128c, all parameters of the sampling number 3 (n=3) are stored.

In this way, monitoring data files 128a, 128b... are set for each sampling number, and for multiple parameters, the measured values of each parameter are bound to the sampling number and stored. In FIG3, only three parameters are shown, but the number of parameters is not limited to three, and two or more parameters are also possible. In addition, monitoring data files 128a, 128b... are collectively referred to as monitoring data files 128.

The process execution unit 23 executes the desired processing on the substrate G. The data processing unit 24 performs data processing (a part of the graphical processing) for graphically displaying the measured values of the plurality of parameters based on the sampling number bound to each measured value. Specifically, the data processing unit 24 searches the measured values of each parameter of the plurality of parameters in the order of the sampling number and extracts the measured values that have produced time variations. However, the data processing unit 24 may search the measured values of each parameter of the plurality of parameters in the order of the sampling number and extract the measured values that have produced time variations and the measured values immediately before the measured values. The measured values extracted by the predetermined rules as described above are stored in the temporary storage area of the storage unit 22, i.e., the memory unit 29. In the memory unit 29, information about the sampling time of the extracted measured value is stored and bound to the measured value.

The drawing unit 25 draws the corresponding measured value for each parameter in a graph based on the sampling time calculated from the sampling number stored in the memory unit 29. The display unit 27 displays a graph that draws the time variation of the measured values of multiple parameters.

In this embodiment, the control unit 20 first stores all the sampled measured values in the monitoring data file 128. Then, the measured values of the multiple parameters stored in the monitoring data file 128 when the graphics are drawn are extracted based on the above-mentioned predetermined rules and the information about the sampling time of the extracted measured values is bound and stored in the memory unit 29.

However, the method of storing the measured values is not limited to this. For example, the measured values extracted by the data processing unit 24 from the sampled measured values can be directly stored in the memory unit 29. In this case, the process of first storing all the sampled measured values in the monitoring data file 128 can be omitted. In this way, the processing load can be reduced, and the amount of memory used to store the sampled measured values can be reduced.

The data processing unit 24 may extract the measured values of multiple parameters from the sampled measured values based on the above-mentioned predetermined rules in response to the drawing request of the graphics, and the drawing unit 25 may draw the time changes of the measured values of the multiple parameters extracted in response to the drawing request. The drawing request unit 26 may output an instruction signal for instructing the start of the process of extracting the measured values in response to the display of the screen (drawing request screen) where the drawing request of the graphics is possible. The drawing request unit 26 may output an instruction signal for instructing the start of the drawing process (a part of the graphics process) in response to the operation of the drawing request of the graphics on the drawing request screen.

[Hardware structure of the control unit]

Next, an example of the hardware structure of the control unit 20 is described with reference to FIG4. FIG4 is a diagram showing an example of the hardware structure of the control unit 20 in an embodiment. The control unit 20 has an interface 31, an auxiliary memory device 32, a main memory 33, a CPU 34, a keyboard 35, and a display 36.

The interface 31 is an interface with a measuring unit such as a pressure gauge CM. Thus, the control unit 20 obtains the measured values of multiple parameters sampled at a preset period through the interface 31.

The auxiliary memory device 32 is a non-volatile memory device that binds and stores the measured values of the sampled multiple parameters with the sampling numbers of the measured values. The main memory 33 is a volatile semiconductor memory that binds and temporarily stores the measured values extracted from the sampled multiple parameters based on the above-mentioned predetermined rules with the sampling numbers of the measured values.

CPU 34 performs graphic processing (data processing and drawing processing, etc.) based on the measured values stored in the auxiliary memory device 32 and the main memory 33 and the sampling numbers of the measured values.

The keyboard 35 is an example of an input device, and inputs a predetermined operation. The display 36 is an example of a display device, and displays the time changes of the measured values of multiple parameters in a graphical form. Instead of the keyboard 35, a touch panel may be used as an input device.

FIG2 depicts a block diagram focusing on the functions of the control unit 20. For example, the functions of the process execution unit 23, the data processing unit 24, and the drawing unit 25 can be realized by enabling the CPU 34 to perform substrate processing, data processing, and drawing processing.

The function of the memory unit 22 can be realized by the auxiliary memory device 32 and the main memory 33. The function of the display unit 27 can be realized by the display 36. The function of the acquisition unit 21 can be realized by the interface 31. The function of the drawing request unit 26 can be realized by the keyboard 35.

[Collection and processing of measured values]

Next, the collection and processing of the measured values executed by the control unit 20 will be described with reference to FIG5. FIG5 is a diagram showing an example of the flow of the collection and processing of the measured values in one embodiment.

This collection process is to obtain all measured values of multiple parameters during the process execution unit 23 executing substrate processing, for example, every 100msec cycle, and store them in the monitoring data file 128.

After the substrate processing starts, the acquisition unit 21 samples the measured values of multiple parameters at a preset period to obtain the sampling numbers and measured values of the multiple parameters (step S1). Then, the acquisition unit 21 stores the sample number and measured value of each parameter obtained in the monitoring data file 128 of the data storage unit 28 (step S2).

Next, the acquisition unit 21 determines whether the process (substrate processing) is completed (step S3). Until the process is completed, steps S1 to S3 are repeatedly executed, and the sampling number and measured value of each parameter sampled are accumulated in the monitoring data file 128. After the process is completed, it is determined whether the next process is started (step S4), and waits until the next process starts. When the next process starts, during the execution of the next process, the acquisition unit 21 acquires the sampling numbers and measured values of the sampled multiple parameters and accumulates them in the monitoring data file 128.

[Former Graphics]

Next, the graphical processing of the previous measured values is explained with reference to FIG6 and FIG7. FIG6 is a diagram showing an example of the flow of the graphical processing of the previous measured values. FIG7 is a diagram for explaining the graphical processing and graphical display of the previous measured values. In addition, in the previous graphical processing, when the monitoring data file 128 accumulates the measured values in the order of sampling and the sampling time of the measured values is not obtained using the sampling number, it is also possible not to bind the sampling number to the measured value and store it.

In the previous graphical processing of FIG. 6, first, it is determined whether to migrate to the drawing request screen (step S11). When the drawing request screen is displayed in this way, it is determined to migrate to the drawing request screen, and the measured values of the multiple parameters stored in the monitoring data file 128 are stored in the memory unit 29 in this form (step S12).

For example, as shown in FIG7, after the display 36 displays the drawing request screen 136, the parameters (A: pressure measurement value, B: air flow measurement value, C: temperature measurement value) stored in the monitoring data file 128 shown in FIG7 (a) are stored in the memory unit 29 in this form. That is, the data stored in the memory unit 29 is the same as the measurement value of each parameter stored in the monitoring data file 128.

Next, determine whether there is a drawing request (step S13). For example, if the operator does not press the "Yes" button 136a of the drawing request screen 136 shown in Figure 7 (step S13 "No"), this process ends after a preset time (step S14). If the "Yes" button 136a of the drawing request screen 136 is pressed before the preset time, it is determined that there is a drawing request. In addition, step S14 is not provided, and the waiting state is continued until the button 136a is pressed. When step S13 is "No", it is also possible to return to the state before step S13.

At this time, in response to the drawing request, the measured values of each parameter of the multiple parameters stored in the memory unit 29 are marked and graphed in the order of storage (step S15), and the graph of the multiple parameters is displayed (step S16), and the processing is terminated. In this way, as shown in Figure 7 (b), the time change of the measured values of the multiple parameters stored in the memory unit 29 is displayed as a graph, and the substrate processing status can be confirmed.

In the previous graphics processing, the measured values stored in the memory unit 29 are the same as the measured values of each parameter stored in the monitoring data file 128, and all the sampled measured values are marked as graphics. Therefore, the graphics processing load is high and the graphics takes time because the order of sampling is marked. In particular, the number of parameters has increased in recent years, and the graphics processing load has become even higher.

In addition, in the previous graphic processing, the measured values of multiple parameters stored in the monitoring data file 128 were stored in the memory unit 29 as they were, so the memory usage was large. In particular, the number of parameters has increased in recent years, and the memory usage has become even higher. Memory is not only used for drawing graphics but also for other processing. If the memory usage due to graphic processing increases, it will also affect other processing.

As mentioned above, the CPU 34 and main memory 33 used for graphics processing consume more memory. Also, because the CPU 34 load is high during graphics processing, the time it takes to display the graphics on the screen also increases, resulting in reduced service.

Here, in the graphics processing of this embodiment, the consumption of CPU 34 and main memory 33 used to display graphics of multiple parameters is reduced, and the time until the graphics are displayed on the screen is shortened. In addition, the graphics processing of the display method of this embodiment includes the collection processing shown in Figure 5 and the graphics processing (data processing, drawing processing, etc.) shown in Figure 8.

[Graphicization of this implementation form]

Next, the graphical processing of the measured values of this embodiment will be described with reference to FIG8 and FIG9. FIG8 is a diagram showing an example of the flow of the graphical processing of the measured values of an embodiment. FIG9 is a diagram for explaining the graphical processing and graphical display of the measured values of an embodiment.

In this process, first, it is determined whether the drawing request unit 26 has been moved to the drawing request screen (step S21). The drawing request unit 26 determines that it has been moved to the drawing request screen, and the data processing unit 24 extracts the change point of the measured value for each parameter based on the above-mentioned predetermined rule from the multiple parameters stored in the monitoring data file 128. The data processing unit 24 binds the measured value of the extracted change point with the sampling number and stores it in the memory unit 29 (step S22). However, the data processing unit 24 may bind the measured value of the extracted change point and the measured value sampled before the aforementioned measured value with the sampling number and store them in the memory unit 29.

For example, as shown in FIG9 , after the display 36 displays the drawing request screen 136 , the drawing request unit 26 outputs an instruction signal for instructing the start of the process of extracting the measured value. After receiving the instruction signal for instructing the start of the process of extracting the measured value, the data processing unit 24 extracts the change point of the measured value from each parameter (A: pressure measured value, B: air flow measured value, C: temperature measured value, etc.) stored in the monitoring data file 128 shown in FIG9 (a). Then, the data processing unit 24 binds the measured value of the extracted change point to the sampling number and stores it in the memory unit 29. In addition, the first measured value and the last measured value of the sampling period composed of multiple cycles are unconditionally stored in the memory unit 29. Thus, for example, from the pressure measurement value of A, the change points with sampling numbers 1, 3, and 6 are extracted. Then, the measurement values "7", "10", and "11" of the extracted change points are bound to the sampling numbers "1", "3", and "6" and stored in the memory unit 29. In addition, in this embodiment, the measurement values "7" and "10" of the sampling numbers "2" and "5" before the extracted change points are also bound to the sampling numbers "2" and "5" and stored in the memory unit 29. The measurement values of the airflow measurement value of B and the temperature measurement value of C are also extracted in the same manner.

As a result, as shown in FIG9(b), the pressure measurement value and temperature measurement value of the sampling number "4" are substantially discarded and not stored in the memory unit 29. Therefore, the data stored in the memory unit 29 is less than the measurement values of each parameter stored in the monitoring data file 128, which can reduce the usage of the memory unit 29.

Next, the drawing request unit 26 determines whether there is a drawing request (step S23). For example, if the operator does not press the "Yes" button 136a of the drawing request screen 136 shown in Figure 9 (step S23 "No"), this process ends after a preset time (step S24). If the "Yes" button 136a of the drawing request screen 136 is pressed before the preset time, the drawing request unit 26 determines that there is a drawing request and outputs an instruction signal indicating the start of the drawing process of the extracted measured value. In addition, step S24 is not provided, and the waiting state is continued until the button 136a is pressed. When step S23 is "No", it is also possible to return to the state before step S23.

After receiving the instruction signal for instructing the start of the drawing process, the drawing unit 25 marks the measured value extracted by the data processing unit 24 according to the sampling time calculated from the sampling number based on the formula (1) or the formula (1'), and graphically displays it (step S25). The display unit 27 displays the graph of the measured values of the plurality of parameters (step S26), and the processing ends. The measured value is marked for each parameter according to the sampling time calculated from the sampling number of the measured value in the memory unit 29, for example, bound to FIG9(b), and the time change of the measured value of each parameter is graphically displayed. In this way, as shown in FIG9(c), the measured values of the plurality of parameters stored in the memory unit 29 are displayed as a graph, and the substrate processing status can be confirmed. The graph shown in FIG9(c) becomes the same representation as the graph of the previous example shown in FIG7(c).

As described above, in the graphical processing of the measured values of this embodiment, the change point of the measured values of each parameter accumulated in the monitoring data file 128 is extracted, and the measured value of the change point is stored in the memory unit 29. Alternatively, the change point of the measured value of each parameter accumulated in the monitoring data file 128 is extracted, and the measured value of the change point and the measured value sampled before it are stored in the memory unit 29.

Thus, during the period when the measured value does not change, the measured value of that period can be treated as data not needed for graphics and not stored in the memory unit 29 and discarded. That is, during the period when the sampled measured value continues to be the same value, because it is displayed as a horizontal straight line on the graph, the measured value other than the measured value of the change point or the measured value of the change point and the measured value before it become data not needed for graphics. Here, in this embodiment, because the measured value determined as unnecessary data is not stored in the memory unit 29, the measured value used for graphics is reduced. Thus, the memory usage for graphics can be reduced.

Furthermore, since the number of measured values stored in the memory unit 29 is reduced compared to the past, the number of points of the measured values drawn into a graph is reduced, and the load of the CPU 34 for processing for graphics can be reduced, and the time for drawing and displaying the graph can be shortened. In addition, in order to calculate the time of sampling the measured value, the sampling number is bound to the measured value and stored in the memory unit 29. By this, for example, the sampling time of the measuring unit stored in the memory unit 29 can be calculated, and the measured value can be marked according to the sampling time, and the time change of the measured value can be graphed.

In addition, the measured value before the measured value of the change point may be stored or not stored. When the measured value before the change point is stored in the memory unit 29 together with the measured value of the change point, it may be graphically represented by a graphical rule that connects the marked adjacent measured values with straight lines.

In the case where only the measured value of the change point is stored in the memory unit 29, the measured values of the adjacent marks are not connected with straight lines, but a horizontal straight line is drawn from the measured value of the previous change point to the measured value of the next change point, and a graphical rule of increasing and decreasing the measured value at the next change point is used. However, the graphical rule is not limited to this, and other rules can be used.

According to the display method of the present embodiment described above, the measured values stored in the memory unit 29 can be compressed. In this way, the number of points to be marked in the graphical representation of the measured values can be reduced, the processing load for the graphical representation can be reduced, and the time until the graphical representation can be shortened.

Furthermore, since the measured values of multiple parameters stored in the monitoring data file 128 are compressed and stored in the memory unit 29, the memory usage can be reduced.

In the present embodiment, the sampled total measured values of all parameters are stored in the monitoring data file 128, and the measured values of each parameter after the change point is extracted are stored in the memory unit 29. However, the measured values of each parameter after the change point is extracted are stored in the monitoring data file 128, and after receiving an instruction signal for instructing the start of the process of extracting the measured values, the measured values of each parameter after the change point is extracted stored in the monitoring data file 128 may be graphically displayed. Alternatively, the data in the monitoring data file 128 may be updated using the measured values stored in the memory unit 29. In this way, the sampled measured values can be compressed and stored in memory, thereby reducing the usage of the data storage unit 28 for storing the monitoring data file 128.

It should be considered that the display method and substrate processing device of the present embodiment disclosed this time are illustrative and non-limiting in all aspects. The embodiment can be deformed and improved in various forms without departing from the scope of the patent application and its main purpose. The matters recorded in the above multiple embodiments can also obtain other structures within the scope of non-contradiction, and can also be combined within the scope of non-contradiction.

The substrate processing device disclosed herein can be applied to any type of device, including Atomic Layer Deposition (ALD) device, Capacitively Coupled Plasma (CCP), Inductively Coupled Plasma (ICP), Radial Line Slot Antenna (RLSA), Electron Cyclotron Resonance Plasma (ECR), and Helicon Wave Plasma (HWP).

Furthermore, a plasma processing device is used as an example of a substrate processing device for explanation, but a substrate processing device is any device that performs a predetermined process (e.g., film forming process, etching process, etc.) on a substrate and is not limited to a plasma processing device.

Claims (6)

A display method for displaying a plurality of parameters representing information on substrate processing comprises: obtaining, by an acquisition unit, measured values of the plurality of parameters sampled at a preset period and information on the sampling time of the measured values; extracting, by a data processing unit, measured values that have a temporal change in the measured values of the plurality of parameters in the sampling order, or extracting the temporal change in the measured values of the plurality of parameters based on the information on the sampling time of the measured values; The process of extracting the measured values of the plurality of parameters and the measured values sampled before the measured values; the process of binding the extracted measured values of the plurality of parameters and the information about the sampling time of the measured values in the memory unit and storing them in the memory unit; the process of describing the measured values of the plurality of parameters into a graph based on the information about the sampling time of the measured values stored in the memory unit by the description unit; the process of displaying the described graph by the display unit. The display method as recited in claim 1, wherein the information obtained about the sampling time of the aforementioned measured value is the sampling number of the aforementioned measured value obtained; the process of drawing the aforementioned graph calculates the sampling time of the aforementioned measured value by the integral of the aforementioned sampling number and the aforementioned period, and draws the measured values of the plurality of aforementioned parameters into a graph corresponding to the sampling time of the aforementioned measured value. The display method described in claim 1, wherein the process of binding the obtained measured values of the plurality of parameters and the information related to the sampling time of the measured values to the data file by the data storage unit and storing them in the data file; the process of storing in the memory unit, binding the measured values of the plurality of parameters extracted from the measured values of the plurality of parameters stored in the data file and the information related to the sampling time of the measured values to the memory unit and storing them in the memory unit. The display method described in claim 3, wherein the process of obtaining the aforementioned measured values samples the measured values of the plurality of aforementioned parameters at the aforementioned cycle during the aforementioned substrate processing, and binds the sampling numbers representing the sequence of the aforementioned sampling to the aforementioned data file and stores them. The display method described in any one of claim items 1 to 4 comprises: a process of displaying a screen showing that the drawing request of the aforementioned graphic is acceptable by the aforementioned display unit; a process of outputting an instruction signal for instructing the process of extracting the aforementioned measured value in response to the display of the screen showing that the drawing request of the aforementioned graphic is acceptable by the drawing request unit. A substrate processing device for performing substrate processing comprises: an acquisition unit for acquiring measured values of a plurality of parameters sampled at a preset period and information about the sampling time of the measured values; a data processing unit for extracting measured values that produce time changes in the measured values of the plurality of parameters in the sampling order based on the information about the sampling time of the measured values, or extracting the measured values that produce the time changes and the measured values sampled before; a storage unit for binding the extracted measured values of the plurality of parameters with the information about the sampling time of the measured values and storing them in a storage unit; a drawing unit for drawing the measured values of the plurality of parameters into a graph based on the information about the sampling time of the measured values stored in the storage unit; and a display unit for displaying the drawn graph.

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