TWI874474B - Cutting device chuck table - Google Patents

Abstract

[Topic] A chuck table for a cutting device is provided, which can reduce processing costs and shorten delivery time. [Solution] The chuck table for a cutting device includes: a main body, which has a breathable hard plate and a rubber plate fixed to the front side of the hard plate; and a frame part, which is embedded in the outer periphery of the main body in a manner that the retaining surface of the rubber plate of the main body and the back side of the hard plate are exposed, and the main body is fixed to the base so that it can be easily loaded and unloaded. The rubber plate of the main body includes: a retaining surface, which retains the workpiece; a cutting blade back groove, which corresponds to the predetermined dividing line of the workpiece supported by the retaining surface; and a suction hole, which is formed in the area divided by the cutting blade back groove.

Description

Cutting device chuck table

The present invention relates to a chuck table of a cutting device.

There is known a cutting device that uses a cutting blade to cut and separate a resin package substrate such as CSP (Chip Scale Package) or QFN (Quad Flat no-leads package). In the cutting process of separating the resin package substrate into individual chips, a jig cutting machine is sometimes used, which fixes the resin package substrate as the workpiece on a chuck table having a backing groove formed by aligning the predetermined splitting line and a suction port for sucking and holding each chip for cutting (for example, see patent document 1). When such a chuck table is used, compared with the previous method of processing the workpiece fixed to a ring frame by an adhesive film, there is an advantage of suppressing the manufacturing cost because the consumable adhesive film is not required. [Known technical literature] [Patent literature]

[Patent Document 1] Japanese Patent Application Publication No. 2015-093335

[Problems to be solved by the invention] However, when using the above-mentioned chuck table, when a design change occurs such as a change in the chip size, a chuck table that matches the changed design needs to be manufactured, which increases the cost of manufacturing the chuck table and the overall manufacturing period. In addition, the above-mentioned chuck table is composed of a metal plate such as SUS (Steel Use Stainless Steel) formed with a backing groove and a suction hole, and a rubber sheet for protecting the workpiece attached to the metal plate in the area where the workpiece is placed. However, since metal processing such as SUS is difficult, it is necessary to entrust it to a specialist. As a result, there is a problem that it is difficult to reduce costs and shorten delivery time.

Therefore, the purpose of the present invention is to provide a chuck table for a cutting device, which can reduce processing costs and shorten delivery time.

[Technical means for solving the problem] According to the present invention, a chuck table for a cutting device is provided, the cutting device comprising: a chuck table that attracts and holds a plate-shaped workpiece formed with a plurality of mutually intersecting predetermined dividing lines; a cutting unit that cuts the workpiece held on the chuck table with a cutting blade to divide it into a plurality of chips; and a base that fixes the chuck table. The chuck table of the cutting device comprises: a main body having a hard plate with air permeability and a rubber plate fixed to the front side of the hard plate; and a frame having the The holding surface of the rubber plate of the main body and the back surface of the hard plate are embedded in the outer periphery of the main body in a manner that the main body is exposed, and the main body is fixed to the base in a freely loadable and detachable manner; the rubber plate of the main body includes: the holding surface, which holds the workpiece; the cutter blade backing groove, which corresponds to the predetermined dividing line of the workpiece supported by the holding surface; and the suction hole, which is formed in the area divided by the cutter blade backing groove; the negative pressure from the base is transmitted to the suction hole of the rubber plate through the hard plate.

Preferably, the hard plate is made of air-permeable hard resin or porous ceramics.

[Effect of the invention] According to the present invention, the processing cost of the pallet table can be reduced and its delivery time can be shortened.

The following is a detailed description of the embodiments of the present invention with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the constituent elements described below include substantially the same technical contents that can be easily thought of by a person with ordinary knowledge in the technical field to which the present invention belongs. Furthermore, the constituent elements described below can be appropriately combined. In addition, various omissions, substitutions or changes of the constituent elements can be made within the scope of the gist of the present invention.

The chuck table 10 of the cutting device 1 of the embodiment of the present invention is described based on the drawings. First, the overall structure of the cutting device 1 of the embodiment and the structure of the workpiece 100 to be processed are described. FIG. 1 is a three-dimensional diagram showing a structural example of the cutting device 1 of the embodiment. FIG. 2 is a three-dimensional diagram showing the appearance of the workpiece 100 to be processed by the cutting device 1 shown in FIG. 1. FIG. 3 is a three-dimensional diagram showing the appearance of the workpiece 100 shown in FIG. 2 as viewed from another direction. In the following description, the X-axis direction is a direction in the horizontal plane. The Y-axis direction is a direction perpendicular to the X-axis direction in the horizontal plane. The Z-axis direction is a direction perpendicular to the X-axis direction and the Y-axis direction. The processing feed direction of the cutting device 1 of the embodiment is the X-axis direction, the indexing feed direction is the Y-axis direction, and the cutting feed direction is the Z-axis direction.

The cutting device 1 is a device for cutting a workpiece 100 held on a chuck table 10. As shown in FIG. 2 , the workpiece 100 is a package substrate having a wiring substrate 101. The wiring substrate 101 has an insulating insulating plate and a ground wire composed of a conductive metal buried inside the insulating plate, and electrodes or various wirings are formed on the front surface 102 and the back surface 103. The workpiece 100 has: a plurality of predetermined dividing lines 104 formed on the front surface 102 of the wiring substrate 101; and components 105 formed in each area divided by the plurality of predetermined dividing lines 104 crossing in a lattice.

As shown in FIG. 3 , the workpiece 100 has a sealant 106 formed on the back side 103 of the wiring substrate 101, which seals each component 105 and the wiring (not shown) formed by wire bonding to each component 105. The sealant 106 is made of epoxy resin, silicone resin, polyurethane resin, unsaturated polyester resin, acrylic polyurethane resin or polyimide resin, which is a so-called sealing resin. The workpiece 100 has unevenness due to the sealant 106 formed on the back side 103 of the wiring substrate 101. The workpiece 100 is divided along each predetermined dividing line 104 and divided into a plurality of chips 107 each including the component 105.

The number of the predetermined dividing lines 104 of the workpiece 100, the intervals between the predetermined dividing lines 104, and the number of the components 105 are not limited by the embodiment. That is, the number of the predetermined dividing lines 104, the intervals between the predetermined dividing lines 104, and the number of the components 105 of the workpiece 100 with different product numbers are different from each other.

As shown in FIG1 , the cutting device 1 includes a chuck table 10, a base 50, a cutting unit 70, a water supply unit 75, a camera unit 80, an X-axis moving unit 91, a Y-axis moving unit 92, a Z-axis moving unit 93, and a rotation moving unit 94. The cutting device 1 includes two cutting units 70, that is, a dual-spindle cutting machine, which is a so-called opposing dual-spindle type cutting device. The cutting device 1 may further include a cleaning unit for cleaning the workpiece 100 after cutting, a cassette for accommodating the workpiece 100 before and after cutting, and a transport unit for transporting the workpiece 100 between the cassette, the chuck table 10, and the cleaning unit. Each component of the cutting device 1 is controlled by a control unit of a computer not shown.

The chuck table 10 holds the workpiece 100 by suction on the holding surface 31. The chuck table 10 does not hold the workpiece 100 by suction through an adhesive film or the like, but directly holds the workpiece 100 by suction on the holding surface 31, and also holds the individual chips 107 divided from the workpiece 100 by suction. In the embodiment, the chuck table 10 has a rectangular holding surface 31 that is larger than the outer shape of the workpiece 100. The chuck table 10 can be easily loaded and unloaded from the base 50. The chuck table 10 is connected to the suction source 60 (see FIG. 5 ) through the suction source connecting hole 53 of the base 50. The chuck table 10 is sucked by the suction source 60, thereby holding the workpiece 100 placed on the holding surface 31 by suction. The detailed structure of the chuck table 10 will be described later.

The chuck table 10 is fixed to the base 50. The base 50 is a rectangular disk body in which the chuck table 10 is embedded. In the embodiment, the base 50 is set on the X-axis moving base 4, and the X-axis moving base 4 is a processing area below the cutting unit 70 and an area separated from the bottom of the cutting unit 70 where the workpiece 100 is moved in and out, and is freely movable in the X-axis direction by the X-axis moving unit 91. In the embodiment, the base 50 is supported by the rotation moving unit 94 so as to be rotatable around an axis parallel to the Z-axis direction, and the rotation moving unit 94 is set to be freely movable in the X-axis direction by the X-axis moving unit 91. Furthermore, the upper surface of the X-axis moving base 4 is formed flat along the horizontal direction. The detailed structure of the base 50 will be described later.

The cutting unit 70 is a cutting means for cutting the workpiece 100 held on the chuck table 10 and is detachably mounted with a cutting blade 71 for dividing a plurality of wafers 107. One of the cutting units 70 is provided on one of the columns of the door-shaped support frame 3 erected from the device body 2 through the Y-axis moving unit 92 and the Z-axis moving unit 93. The other cutting unit 70 is provided on the other column of the support frame 3 through the Y-axis moving unit 92 and the Z-axis moving unit 93. The support frame 3 is formed by connecting the upper ends of a pair of columns to each other through a horizontal beam. Each cutting unit 70 is movable in the Y-axis direction by the Y-axis moving unit 92 and in the Z-axis direction by the Z-axis moving unit 93 relative to the workpiece 100 held on the chuck table 10. The cutting unit 70 can position the cutting blade 71 at any position on the holding surface 31 of the chuck table 10 by the Y-axis moving unit 92 and the Z-axis moving unit 93. The cutting unit 70 includes a cutting blade 71, a spindle housing 72, and a spindle 73.

The cutting blade 71 is an extremely thin cutting grindstone having a roughly annular shape. In the embodiment, the cutting blade 71 is a so-called hub-type blade, which has a circular base in the shape of an annulus mounted on the main shaft 73, and a cutting blade in the shape of an annulus of a predetermined thickness arranged on the outer periphery of the circular base. The circular base is made of conductive metal. The cutting blade is composed of abrasive grains such as diamond or CBN (Cubic Boron Nitride), and a bonding material (bonding material) such as metal or resin.

The spindle housing 72 is provided on a Z-axis moving base 6 that is movable in the Z-axis direction by a Z-axis moving unit 93 described later. The spindle housing 72 of one of the cutting units 70 is supported on one column side of a door-shaped support frame 3 erected from the device body 2 through the Y-axis moving unit 92 and the Z-axis moving unit 93. The spindle housing 72 of the other cutting unit 70 is supported on the other column side of the support frame 3 through the Y-axis moving unit 92 and the Z-axis moving unit 93. Each spindle housing 72 is movable in the Y-axis direction by a Y-axis moving unit 92 and in the Z-axis direction by a Z-axis moving unit 93 relative to the workpiece 100 held on the chuck table 10 .

The main shaft 73 is rotatably disposed in the main shaft housing 72. The main shaft 73 is driven and rotated by a main shaft motor (not shown). The cutting blade 71 is mounted on the front end of the main shaft 73. In the embodiment, the axis of the main shaft 73 and the cutting blade 71 of the cutting unit 70 is set to be parallel to the Y-axis direction.

The water supply unit 75 supplies processing water to the workpiece 100 and the cutting blade 71 during the cutting process performed by the cutting unit 70. The water supply unit 75 includes a water supply source and a water supply nozzle 76 (not shown). The water supply source includes, for example, a water tank for storing processing water and a pump for supplying the processing water in the water tank to the water supply nozzle 76. The water supply nozzle 76 is fixed to the cutting unit 70 in a manner that it is integrally moved with the cutting unit 70. The water supply nozzle 76 supplies the processing water supplied from the water supply source to the workpiece 100 and the cutting blade 71.

The imaging unit 80 is fixed to one of the cutting units 70 in such a manner that it moves as a whole with the one of the cutting units 70. The imaging unit 80 includes an imaging element for photographing a predetermined area of the front side 102 of the workpiece 100 held on the chuck table 10. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (complementary MOS) imaging element. The imaging unit 80, for example, photographs an image for performing alignment, etc., and outputs the acquired image to a control unit, etc., wherein the alignment is to align the workpiece 100 held on the chuck table 10 with the cutting blade 71.

The X-axis moving unit 91 is a unit that moves the chuck table 10 and the cutting unit 70 relative to each other in the X-axis direction of the processing feed direction. In the embodiment, the X-axis moving unit 91 moves the base 50 to which the chuck table 10 is fixed and the rotation moving unit 94 in the X-axis direction through the X-axis moving base 4. The X-axis moving unit 91 is, for example, provided with: a known ball screw that is rotatable around an axis parallel to the X-axis direction; a known motor that rotates the ball screw around the axis; and a known guide rail that supports the X-axis moving base 4 on which the base 50 is provided so as to be movable in the X-axis direction. In the implementation method, the guide rail of the X-axis moving unit 91 is arranged on the device body 2 of the cutting device 1.

The Y-axis moving unit 92 is a unit that moves the chuck table 10 and the cutting unit 70 relative to each other in the Y-axis direction of the indexing feed direction. In the embodiment, the Y-axis moving unit 92 moves the cutting unit 70 and the Z-axis moving unit 93 in the Y-axis direction. The Y-axis moving unit 92 is, for example, provided with: a known ball screw that is rotatable around an axis parallel to the Y-axis direction; a known motor that rotates the ball screw around the axis; and a known guide rail that supports the Y-axis moving base 5 so that it can move freely in the Y-axis direction. In the embodiment, the guide rail of the Y-axis moving unit 92 is arranged on the horizontal beams at the front ends of a pair of columns connecting the supporting frame 3 of the cutting device 1.

The Z-axis moving unit 93 is a unit that moves the chuck table 10 and the cutting unit 70 relative to each other in the Z-axis direction of the cutting feed direction. In the embodiment, two Z-axis moving units 93 are provided corresponding to each cutting unit 70. In the embodiment, each Z-axis moving unit 93 moves each Z-axis moving base 6 supporting each cutting unit 70 in the Z-axis direction. The Z-axis moving unit 93 is, for example, provided with: a known ball screw that is configured to rotate freely around an axis; a known motor that rotates the ball screw around an axis; and a known guide rail that supports the cutting unit 70 so that it can move freely in the Z-axis direction. In the implementation method, the guide rail of the Z-axis moving unit 93 is arranged on the Y-axis moving base 5.

The rotational moving unit 94 is a unit that rotates the chuck table 10 and the cutting unit 70 around an axis parallel to the Z axis direction. In the embodiment, the rotational moving unit 94 rotates the chuck table 10 around an axis parallel to the Z axis direction through the base 50. The rotational moving unit 94 and the X axis moving base 4 on which the base 50 is installed perform processing feed in the X axis direction.

Next, the detailed structure of the chuck table 10 and the base 50 of the embodiment will be described. FIG4 is an exploded perspective view showing an example of the structure of the chuck table 10 and the base 50 of the cutting device 1 shown in FIG1. FIG5 is a schematic diagram showing a state of cutting processing performed by the cutting device 1 shown in FIG1. FIG6 is a diagram showing a state of replacing the main body 11 of the chuck table 10 of the cutting device 1 shown in FIG1.

As shown in FIG4 , the chuck table 10 can be disassembled into a main body 11 and a frame 40. The chuck table 10 is detachable from the base 50. The main body 11 has a holding surface 31 for holding the chuck table 10 for the workpiece 100. The main body 11 has a hard plate 20 and a rubber plate 30.

The hard plate 20 is a rectangular plate that is larger than the outer shape of the workpiece 100. The hard plate 20 is breathable. The hard plate 20 is, for example, a breathable hard resin or porous ceramic. The breathable hard resin is, for example, a resin having continuous bubbles and low dust emission properties such as urethane foam, foamed polyethylene (PE: Polyethylene), and foamed polypropylene (PP: Polypropylene). The hard plate 20 may also be a hard resin to which fillers are added to suppress thermal shrinkage.

The rubber plate 30 is a rectangular plate having almost the same shape as the hard plate 20. The rubber plate 30 is fixed to the front side of the hard plate 20 by layers of adhesive materials. The rubber plate 30 is, for example, a non-breathable resin such as urethane rubber. The rubber plate 30 has a holding surface 31, a cutting blade backing groove 32, and a suction hole 33. The holding surface 31 is the surface on the front side of the rubber plate 30 that holds the workpiece 100. The cutting blade backing groove 32 is a plurality of grooves formed by intersecting the holding surface 31 of the rubber plate 30 in a lattice shape. The cutting blade backing groove 32 corresponds to the predetermined dividing line 104 of the workpiece 100 supported by the holding surface 31. The suction hole 33 is a through hole formed in the area partitioned by the cutter blade relief groove 32.

The frame portion 40 is a rectangular frame-shaped cover that is fitted into the outer periphery of the main body portion 11. The frame portion 40 fixes the main body portion 11 to the base 50 so that it can be easily loaded and unloaded. As shown in FIG5 , the main body 11 is clamped and fixed between the frame portion 40 and the base 50, and the retaining surface 31 of the rubber plate 30 and the back surface 21 of the hard plate 20 are exposed from the opening 41 of the frame portion 40. As shown in FIG4 , in the embodiment, the frame portion 40 has through holes 42 for screws at four corners and screws 43 screwed into the through holes 42 for screws. The through holes 42 for screws correspond to the screw holes 54 of the base 50.

The chuck table 10 is fixed to the base 50. The base 50 is a rectangular disk body having a recess 51 formed in a concave shape from the upper surface downward. The back surface 21 side of the hard plate 20 is not directly fixed to the base 50, but is supported on the bottom surface of the recess 51 of the base 50. The main body 11 of the chuck table 10 is placed on the bottom surface of the recess 51 and accommodated in the recess 51. The base 50 has a negative pressure transmission chamber 52 formed in a concave shape from the bottom surface of the recess 51 downward, and a suction source connecting hole 53 formed on the bottom surface of the negative pressure transmission chamber 52. The negative pressure transmission chamber 52 is preferably a rectangular chamber formed by including an area corresponding to the area where the suction hole 33 of the rubber plate 30 is formed. The negative pressure transmission chamber 52 is connected to the recess 51. In the embodiment, although the suction source connecting hole 53 is formed in a circular shape at the center of the bottom surface of the negative pressure transmission chamber 52, the present invention is not limited to this. As shown in FIG5, the suction source connecting hole 53 is connected to the suction source 60. A switching valve 61 may also be provided in the passage connecting the suction source 60 and the suction source connecting hole 53. The switching valve 61 connects the suction source 60 and the suction source connecting hole 53 only when the power is on. As shown in FIG4, in the embodiment, the base 50 has screw holes 54 at four corners. The screw holes 54 correspond to the screw through holes 42 of the frame portion 40.

As shown in FIG5 , the base 50 accommodates the main body 11, and the frame 40 is fixed by the screw 43, thereby sealing the negative pressure transmission chamber 52. The chuck table 10 transfers the negative pressure of the negative pressure transmission chamber 52 of the base 50 generated by suction by the suction source 60 to the suction hole 33 of the rubber plate 30 through the air-permeable hard plate 20, thereby sucking and holding the workpiece 100. In the embodiment, the chuck table 10 sucks and holds the back side 103 of the sealant 106 containing the workpiece 100. At this time, by aligning the planned dividing line 104 of the workpiece 100 and the cutter blade relief groove 32 of the rubber plate 30 , when the cutter unit 70 cuts the workpiece 100 , the cutter blade 71 can be prevented from cutting the rubber plate 30 .

The main body 11 is manufactured, for example, by forming the cutter blade relief groove 32 and the suction hole 33 on the rubber plate 30 after the rubber plate 30 is attached to the hard plate 20 with a bonding material. The main body 11 may also be manufactured by forming the cutter blade relief groove 32 and the suction hole 33 on the rubber plate 30 and attaching the rubber plate 30 with the cutter blade relief groove 32 and the suction hole 33 to the hard plate 20 with a bonding material.

The number of the undercuts 32 for cutting blades of the rubber plate 30, the intervals between the undercuts 32 for cutting blades, the number of suction holes 33, etc., must be formed in accordance with the number of the predetermined dividing lines 104 of the corresponding workpiece 100, the intervals between the predetermined dividing lines 104, the number of components 105, etc. The chuck table 10 of the embodiment is selected to install one of the plurality of main bodies 11 having different numbers of undercuts 32 for cutting blades, the intervals between the predetermined dividing lines 104, the number of suction holes 33, etc., in accordance with the number of the predetermined dividing lines 104 of the corresponding workpiece 100, the intervals between the predetermined dividing lines 104, the number of components 105, etc.

The chuck table 10 is detachable from the base 50 and can be disassembled into the main body 11 and the frame 40. As shown in FIG6 , the main body 11-1 accommodated between the frame 40 and the base 50 can be replaced with another main body 11-2 in a state where the frame 40 is removed from the base 50. When replacing the main body 11, the screw 43 fixing the frame 40 to the base 50 is first removed. Then, by lifting and removing the frame 40 from the base 50, the outer periphery of the used main body 11-1 is exposed. Next, since the hard board 30 is not directly fixed to the base 50 but is placed in the recess 51 of the base 50, the main body 11-1 accommodated in the base 50 can be lifted from the base 50 and removed, and the other main body 11-2 can be placed on the bottom surface of the recess 51 of the base 50. Then, the frame 40 is installed on the base 50 and fixed by the screw 43 to complete the replacement.

As described above, the chuck table 10 of the cutting device 1 of the embodiment includes a main body 11 and a frame 40 for fixing the main body 11 to the base 50. Since the cutter blade backing groove 32 and the suction hole 33 are formed in the resin rubber plate 30, the main body 11 is easy to process. This can reduce the processing cost and shorten the delivery time. In addition, since the frame 40 fixes the main body 11 to the base 50 in a detachable manner, only the main body 11 can be easily replaced. This can suppress the cost of manufacturing the chuck table 10 and the increase in the overall manufacturing period even when a design change such as a change in the chip size occurs. For example, even if the suction force is reduced due to the suction of cutting chips and clogging occurs in the hard plate 20, the chuck table 10 can still be formed at a low cost and the main body 11 can be easily replaced.

Furthermore, in the conventional chuck table, the back side of a metal plate such as SUS having a holding surface faces the negative pressure transmission chamber, and a negative pressure is directly applied to the suction hole of the metal plate from the negative pressure transmission chamber, and since the lower part of the holding surface is hollow, there is a concern that the holding surface may vibrate during processing. In contrast, in the chuck table 10 of the embodiment, the rubber plate 30 is fixed to the air-permeable hard plate 20, and the hard plate 20 is accommodated in the recess 51 of the base 50 and is placed on the bottom surface of the recess 51, so the holding surface 31 is stably fixed. This has the effect of suppressing the displacement or collapse of the shape of the chip 107 caused by the displacement of the workpiece 100 during the cutting process. In addition, because the hard plate 20 supported on the bottom surface of the recess 51 supports the rubber plate 30 forming the retaining surface 31, even if the main body 11 is fixed by the locking screw 43, the retaining surface 31 can still be prevented from being deformed.

Furthermore, the present invention is not limited to the above-mentioned embodiments. In other words, various modifications can be implemented without departing from the scope of the present invention.

1: Cutting device 10: Chuck table 11,11-1,11-2: Main body 20: Hard plate 21: Back side 30: Rubber plate 31: Holding surface 32: Cutting blade backing groove 33: Suction hole 40: Frame 50: Base 52: Negative pressure transfer chamber 70: Cutting unit 71: Cutting blade 100: Workpiece 104: Predetermined splitting line 107: Wafer

FIG. 1 is a perspective view showing a configuration example of a cutting device according to an embodiment. FIG. 2 is a perspective view showing the appearance of a workpiece to be processed by the cutting device shown in FIG. 1. FIG. 3 is a perspective view showing the appearance of the workpiece shown in FIG. 2 as viewed from the back. FIG. 4 is an exploded perspective view showing a configuration example of a chuck table and a base of the cutting device shown in FIG. 1. FIG. 5 is a schematic diagram showing a state of cutting processing performed by the cutting device shown in FIG. 1. FIG. 6 is a diagram showing a state of replacing the main body of the chuck table of the cutting device shown in FIG. 1.

10: Chuck table

11: Main body

20:Hard board

21: Back

30: Rubber sheet

31: Keep the face

32: Back groove for cutting blade

33: Suction hole

40: Frame part

41: Opening

42: Through hole for screw

43: Screw

50: Pedestal

51: Concave part

52: Negative pressure transfer room

53: Attraction source connecting hole

54: Screw hole

Claims (3)

A chuck table of a cutting device, the cutting device comprises: a chuck table that attracts and holds a plate-shaped workpiece formed with a plurality of predetermined dividing lines that intersect each other; a cutting unit that cuts the workpiece held on the chuck table with a cutting blade to divide it into a plurality of chips; and a base that fixes the chuck table, the chuck table of the cutting device comprises: a main body having a hard plate with air permeability and a rubber plate laminated and fixed on the front side of the hard plate; and a frame part that is fitted to the outer periphery of the main body in a manner that the holding surface of the rubber plate of the main body and the back side of the hard plate are exposed, and is fixed to the base so that the main body is clamped and fixed between the base in a freely loadable and unloadable manner; the rubber plate of the main body includes: the holding surface that holds the workpiece; A cutting blade back groove corresponds to the predetermined dividing line of the workpiece supported by the holding surface; and a suction hole is formed in the area divided by the cutting blade back groove; the base has a recess for accommodating the main body, the hard plate of the main body is not directly fixed to the base, but is placed in the recess of the base, and the negative pressure from the base is transmitted to the suction hole of the rubber plate through the hard plate. A chuck table of a cutting device as described in claim 1, wherein, the table base has: a recessed portion, which supports the hard plate of the main body with its bottom surface; and a negative pressure transmission chamber, which is formed into a concave shape from the bottom surface of the recessed portion downward, and the main body is placed on the bottom surface of the recessed portion, and the main body is accommodated in the recessed portion, and the negative pressure transmission chamber is sealed by fixing the frame portion. A chuck table for a cutting device as described in claim 1 or 2, wherein the hard plate is a hard resin or porous ceramic with air permeability.