TWI874040B - Conveying device and control method of conveying device - Google Patents

Abstract

The transport device (1) includes: a batch transport robot (20) capable of taking out/putting in a plurality of substrates in batches from a cartridge loaded on a loading port (10); a single-chip transport robot (30) capable of taking out/putting in substrates individually from the cartridge, or taking out/putting in only one substrate; and a travel axis (40) extending to a position enabling the batch transport robot (20) to take out/put in a plurality of substrates from the cartridge, and extending to a position enabling the single-chip transport robot (30) to take out/put in substrates from the cartridge, and being shared by the batch transport robot (20) and the single-chip transport robot (30).

Description

Conveying device and control method of conveying device

The present invention relates to a conveying device and a control method of the conveying device.

Conventionally, there is known a batch type transport device which includes a plurality of chuck units and transports a plurality of substrates in batches by chucking the substrates with the respective chuck units.

For example, Patent Document 1 discloses a transport robot including a plurality of chuck parts, which respectively grip a plurality of substrates housed in a cassette, thereby transporting the plurality of substrates in batches.

On the other hand, there are substrate processing apparatuses that process substrates piece by piece. In order to transfer substrates to such substrate processing apparatuses, a single-wafer type transfer apparatus that transfers substrates piece by piece is known.

For example, Patent Document 2 discloses a transport device including a single-wafer transport robot, each of which includes two gripping heads for gripping only one substrate, and is provided with an arm for independently moving each gripping head.

The transport device described in Patent Document 2 further includes a batch transport robot, each of which includes five clamping heads for clamping substrates, thereby transporting five substrates in batches. In addition, the batch transport robot takes out five substrates from a cassette and transports them to a port for substrate transfer, and then places the five substrates on the port. In contrast, the single-wafer transport robot clamps the five substrates placed on the port one by one and transports them to a substrate processing device.

[Prior technical literature] [Patent literature] [Patent literature 1] Japanese Patent Publication No. 2005-347315 [Patent literature 2] Japanese Patent Publication No. 2017-224658

[The problem that the invention wants to solve]

In the transport device, it is desirable to not only take out a plurality of substrates from a cassette in batches at the same loading port, but also to take out substrates one by one from the cassette as appropriate. However, as is apparent from the structure of the transport device described in Patent Document 2, if a batch transport robot and a single-wafer transport robot are provided in the transport device, the transport device will be large-scaled. As a result, the space required for the installation becomes larger.

The present invention is designed to solve the above-mentioned problem, and its purpose is to provide a conveying device and a control method for the conveying device, which can convey substrates using a robot that conveys a plurality of substrates in batches and a robot that conveys substrates individually, and the device is small and space-saving. [Means for solving the problem]

In order to achieve the above-mentioned purpose, the conveying device of the first aspect of the present invention is characterized by comprising: A first robot capable of taking out/putting in a plurality of substrates in batches from a cartridge loaded on a loading port; A second robot capable of taking out/putting in the substrates individually from the cartridge, or taking out/putting in only one substrate; and A moving path extending to a position where the first robot can take out/put in a plurality of substrates from the cartridge, and extending to a position where the second robot can take out/put in the substrate from the cartridge, and being shared by the first robot and the second robot.

The moving path may be a moving axis that enables the first robot and the second robot to move along an axis extending in one direction.

The conveying device may further include: A first sensor for measuring the positions of the first robot and the second robot in the extension direction of the travel path; and A controller for controlling the movement of the first robot and the second robot. The controller calculates the distance between the first robot and the second robot based on the positions of the first robot and the second robot measured by the first sensor when making either the first robot or the second robot move on the travel path, and stops the movement of either the first robot or the second robot when the calculated distance is less than a first threshold.

The first sensor may have: a linear scale extending along the travel path; a first detector disposed on the first robot to detect the position in the extension direction of the linear scale; and a second detector disposed on the second robot to detect the position in the extension direction of the linear scale. The first detector and the second detector may share the same linear scale in position detection.

The conveying device may further include: at least one second sensor, which is disposed on at least one of the first robot and the second robot, and detects when the first robot and the second robot are closer than the second threshold value. The controller may stop the movement of either the first robot or the second robot when the controller causes either the first robot or the second robot to move on the moving path and the at least one second sensor detects that the first robot and the second robot are closer than the second threshold value.

The second threshold may be lower than the first threshold.

The controller can cause the second robot to move within a first interval on the travel path far away from the first point when the first robot is located at a first point on the travel path, and can cause the first robot to move within a second interval on the travel path far away from the second point when the second robot is located at a second point on the travel path that is different from the first point.

The first threshold may be below a value of a distance from the first point to the first interval and may be below a value of a distance from the second point to the second interval.

The conveying device may further include a linear motor, which may have: a stator disposed on the travel path; a first mover that supports the first robot and is movable relative to the stator; and a second mover that supports the second robot and is movable relative to the stator.

The control method of the conveying device of the second aspect of the present invention is the control method of the following conveying device, The conveying device includes: A first robot capable of taking out/putting in a plurality of substrates in batches from a cartridge loaded on a loading port; A second robot capable of taking out/putting in the substrates individually from the cartridge, or taking out/putting in only one substrate; and A moving path extending to a position where the first robot can take out/put in a plurality of substrates from the cartridge, and extending to a position where the second robot can take out/put in the substrate from the cartridge, and being shared by the first robot and the second robot, The control method of the conveying device is characterized in that it includes: After the first robot stops at a first point on the travel path, the second robot moves within a first interval on the travel path away from the first point; and After the second robot stops at a second point on the travel path different from the first point, the first robot moves within a second interval on the travel path away from the second point. [Effect of the invention]

According to the structure of the present invention, the travel path is extended to a position where the first robot can take out/put in a plurality of substrates from the cassette, and to a position where the second robot can take out/put in a substrate from the cassette, and is shared by the first robot and the second robot. As a result, the first robot and the second robot can be used to transport substrates from the loading port. In addition, since the first robot and the second robot do not have separate travel paths, although the transport device includes the first robot and the second robot, it is still small and space-saving.

Hereinafter, the conveying device and the control method of the conveying device of the embodiment of the present invention will be described in detail with reference to the drawings. Furthermore, the same symbols are attached to the same or equivalent parts in the drawings. In addition, in the orthogonal coordinate system XYZ shown in the drawings, the extension direction of the travel axis included in the conveying device is the X axis, the up and down direction is the Z axis, and the direction orthogonal to the X axis and the Z axis is the Y axis. Hereinafter, the coordinate system will be appropriately cited for description.

In order to save space, the transport device of the embodiment is a transport device in which a batch transport robot and a single wafer transport robot share a single axis. The following is an example of a transport device that takes out wafers from a FOUP (front opening unified pod) which is a type of cassette and transports them, and describes the structure of the transport device of the embodiment. First, referring to FIG. 1 and FIG. 2, the overall structure of the transport device is described.

FIG. 1 is a cross-sectional view of the conveying device 1 of the embodiment cut along a horizontal plane. FIG. 2 is a perspective view of the conveying device 1. In FIG. 2, for ease of understanding, the cover on the front surface of the device, the loading port on the front surface of the device, and the cover on the left side are omitted, and the conveying device 1 is shown so that the state of the inside of the device can be visually confirmed.

As shown in FIG. 1 , the transfer device 1 includes a plurality of loading ports 10 , a batch transfer robot 20 , and a single wafer transfer robot 30 . The transfer robot 20 takes out wafers from a FOUP (not shown) loaded on the loading port 10 and transfers them.

The loading port 10 has a horizontal table on the upper surface. A FOUP for storing wafers can be placed on the table. On the other hand, the outer periphery of the transport device 1 is surrounded by a front panel 11, a right side panel 12, a rear panel 13, and a left side panel 14. In its inner space, a clean room is formed by the flow of air from which dust has been removed. Moreover, although not shown in the figure, four carry-in/carry-out ports are formed side by side in the left-right direction on the front panel 11. The loading ports 10 are respectively provided at the carry-in/carry-out ports. The loading port 10 supplies wafers to be carried in to the carry-in/carry-in ports by placing a FOUP. Alternatively, a storage destination for wafers carried out from the carry-in/carry-in port is provided.

The batch transfer robot 20 is arranged in the clean room. Then, as shown in FIG. 2, the batch transfer robot 20 has the same number of gripper parts 21 as the maximum number of wafers accommodated in the FOUP, and the gripper parts 21 grip the wafers respectively. As a result, the batch transfer robot 20 can grip the wafers accommodated in the FOUP in batches. In other words, the batch transfer robot 20 can grip all the wafers accommodated in the FOUP.

In addition, the batch transfer robot 20 has a driving unit (not shown) (e.g., a motor, etc.) that enables the chuck units to advance, retreat, and rise and fall in batches. The batch transfer robot 20 uses the driving unit (not shown) to enable the chuck units to enter and exit the FOUP placed on the loading port 10, or to lift the wafers placed in the FOUP using the chuck units. Furthermore, the batch transfer robot 20 is a specific example of the first robot mentioned in the scope of the patent application.

As shown in FIG. 2, the single wafer handling robot 30 includes two chucks 31 each holding only one wafer. Moreover, each chuck 31 can be moved forward, backward, left, and right by different arms 32. In addition, each arm 32 has a drive unit (not shown) for collectively raising and lowering the arms 32. The single wafer handling robot 30 takes out/puts in wafers stored in the FOUP piece by piece by having such a structure.

In addition, the single-wafer transport robot 30 has a driving unit (not shown) for rotating the two arms 32. On the other hand, in the rear area of the clean room of the transport device 1, an aligner 33 for aligning the position of the groove of the wafer and a reversing unit 34 for reversing the front and back of the wafer are provided. The single-wafer transport robot 30 supplies the wafer to the aligner 33 or the reversing unit 34 by rotating the two arms 32. Alternatively, the wafer is taken out from the aligner 33 or the reversing unit 34. Furthermore, the single-wafer transport robot 30 is a specific example of the second robot mentioned in the scope of the patent application.

The transfer device 1 includes the batch transfer robot 20, so that a plurality of wafers stored in the FOUP on the loading port 10 can be taken out in batches and transferred to another FOUP in batches. Furthermore, the transfer device 1 includes the single wafer transfer robot 30, so that the wafers stored in the FOUP on the loading port 10 can be taken out piece by piece, and the wafers can be processed such as groove alignment and front and back inversion before being stored in another FOUP piece by piece.

However, the above-mentioned plurality of loading ports 10 are arranged in the left-right direction in front of the conveying device 1. In addition, the aligner 33 and the reversing unit 34 are arranged in the left-right direction in the rear area of the clean room of the conveying device 1. Therefore, it is necessary to make the batch conveying robot 20 and the single-chip conveying robot 30 move in the left-right direction. Here, it is considered to set a transfer axis extending in the left-right direction on the batch conveying robot 20 and the single-chip conveying robot 30 respectively. However, in this case, the two transfer axes are arranged side by side in the front-back direction, resulting in a larger space for setting the transfer axes.

Therefore, in the transport device 1, the batch transport robot 20 and the single wafer transport robot 30 share a single travel axis 40. Next, referring to FIG. 3, the structure of the travel axis 40 included in the transport device 1 will be described.

Fig. 3 is a perspective view of the travel shaft 40 included in the conveying device 1. Furthermore, in Fig. 3, in order to show the state where the travel shaft 40 is installed in the conveying device 1, the bases 25 and 35 supporting the batch type conveying robot 20 and the single wafer type conveying robot 30 are also shown.

The travel axis 40 is a component called a "travel axis" for moving the batch type transfer robot 20 and the single chip transfer robot 30 along an axis extending in one direction (specifically, the X axis shown in FIG. 3), and is also called a rail component. In addition, the travel axis 40 is a specific example of the travel path mentioned in the scope of the patent application. If its structure is described in detail, as shown in FIG. 3, the travel axis 40 is formed in the shape of a beam extending in the left-right direction. In addition, the travel axis 40 includes linear guide rails 41, 42 and a linear motor 43.

Each linear guide rail 41, 42 extends in a straight line in the left-right direction. Moreover, the linear guide rails 41 and 42 are separately arranged at the upper and lower ends of the beam body of the travel axis 40 in the upper and lower directions. Sliders 45, 46 are embedded in the linear guide rails 41, 42 in a manner that they can slide along the extending direction of the linear guide rails 41 and 42. Furthermore, the sliders 45, 46 support the base 25 of the batch type transfer robot 20 and the base 35 of the single chip type transfer robot 30, respectively.

In FIG. 3, although the structure of the batch transport robot 20 on the base 25 and the structure of the single-chip transport robot 30 on the base 35 are omitted, the linear guides 41 and 42 support the entire batch transport robot 20 and the entire single-chip transport robot 30 in a sliding manner by including such structures. Between the linear guides 41 and 42, a plurality of stators of a linear motor 43 are provided to enable the batch transport robot 20 and the single-chip transport robot 30 to slide in the left and right directions.

Although not shown in the figure, the linear motor 43 includes a plurality of stators and a first mover and a second mover. The plurality of stators are formed of permanent magnets, respectively. Moreover, the plurality of stators are arranged in the left-right direction on the beam body of the travel shaft 40. As a result, the N pole and the S pole are alternately oriented toward the front surface side. On the other hand, the first mover and the second mover respectively include an iron core and a coil or include a coil. Moreover, the first mover and the second mover are arranged on the above-mentioned sliders 45 and 46.

In the linear motor 43, by supplying power to the coils of the first mover and the second mover, the first mover and the second mover are moved along the arrangement direction of the plurality of stators, or only one of the first mover and the second mover is moved. Thereby, the sliders 45 and 46 are slid along the arrangement direction of the plurality of stators, or only one of the sliders 45 and 46 is slid along the arrangement direction of the plurality of stators. That is, it slides along the extension direction of the travel axis 40. As a result, the linear motor 43 receives power supply, whereby one or both of the batch type transfer robot 20 and the single chip type transfer robot 30 are moved along the travel axis 40.

In this way, the batch transfer robot 20 and the single wafer transfer robot 30 can move along the same transfer axis 40. Moreover, the transfer axis 40 is extended to a position where both the batch transfer robot 20 and the single wafer transfer robot 30 can take out wafers from the FOUP on the loading port 10. In detail, as shown in FIG. 1, the transfer axis 40 passes through a position adjacent to each loading port 10 at the rear side, as a result, both the batch transfer robot 20 and the single wafer transfer robot 30 can take out wafers from the FOUP on the loading port 10. Although the travel axis 40 extends through the position adjacent to each loading port 10 at the rear side, the batch type transfer robot 20 and the single wafer type transfer robot 30 share the same travel axis 40, so that the transfer device 1 can be miniaturized and space can be saved.

However, if the batch transfer robot 20 and the single wafer transfer robot 30 move along the same moving axis 40 , there is a risk that the batch transfer robot 20 and the single wafer transfer robot 30 may come into contact or collide with each other.

Here, the conveying device 1 includes a controller for controlling the linear motor 43 based on the output of sensors such as a linear encoder and a proximity sensor. Next, referring to FIG. 4 , the structure of the conveying device 1 including the sensor and the controller will be described.

FIG. 4 is a hardware structure diagram of the controller 60 included in the transport device 1. In addition, in FIG. 4, for easy understanding, various parts such as sensors included in the transport device 1 are also shown. In addition, the illustration of the driving parts such as motors that drive the batch type transport robot 20 and the single chip type transport robot 30 is omitted.

As shown in FIG. 4 , the transport device 1 includes: position detectors 51 and 52 for detecting the positions of the batch transport robot 20 and the single-chip transport robot 30; a proximity sensor 53 for detecting the proximity of the batch transport robot 20 and the single-chip transport robot 30; and a controller 60, which controls the movement of the batch transport robot 20 and the single-chip transport robot 30 based on the position detectors 51 and 52 and the proximity sensor 53.

The position detectors 51 and 52 (also referred to as the first detector and the second detector) are parts of the linear encoder (also referred to as the first sensor). On the other hand, the linear scale 55 shown in FIG. 4 is also a part of the linear encoder. The position detectors 51 and 52 measure their positions on the travel axis 40 by measuring their own positions relative to the linear scale 55.

In detail, the position detector 51 is provided on the slider 45 shown in FIG. 3 that supports the batch-type transport robot 20. In addition, the position detector 52 is provided on the slider 46 that supports the single-piece transport robot 30. Moreover, the position detectors 51 and 52 are opposite to the linear scale 55 shown in FIG. 4. Regarding the linear scale 55, although its shape is not shown in the figure, it is provided on the beam body of the travel axis 40 and extends in the left-right direction. The position detectors 51 and 52 measure the position in the extension direction of the linear scale 55, that is, measure the position relative to the left-right direction. As a result, the position detectors 51 and 52 measure the positions of the sliders 45 and 46 in the extension direction of the travel axis 40. Thus, the position detectors 51 and 52 measure the positions of the batch type transfer robot 20 and the single wafer type transfer robot 30 on the travel axis 40. The position detectors 51 and 52 measure the positions regularly and send the measured position data to the controller 60 each time the position detectors 51 and 52 measure the positions regularly.

On the other hand, as shown in FIG. 3 , the proximity sensor 53 is disposed on the slider 45 supporting the batch type transfer robot 20. The proximity sensor 53 is located at the left side portion (i.e., the -X side portion) of the slider 45. On the -X side of the slider 45, there is a slider 46 supporting the single type transfer robot 30. When one or both of the sliders 45 and 46 slide, and the slider 46 approaches the slider 45 to a distance closer than the threshold value A (referred to as the second threshold value in the patent application), the proximity sensor 53 outputs a proximity signal. In other words, when one or both of the batch transfer robot 20 and the single wafer transfer robot 30 move along the transfer axis 40 and the batch transfer robot 20 and the single wafer transfer robot 30 are closer than the distance of the threshold A, the proximity sensor 53 outputs a proximity signal. The proximity sensor 53 is electrically connected to the controller 60, thereby outputting the proximity signal to the controller 60.

As shown in FIG. 4 , the controller 60 includes a processor 61 , a memory 62 , and an interface 63 . Then, the processor 61 , the memory 62 , and the interface 63 are connected via a bus 64 .

The interface 63 enables the processor 61 and the memory 62 to communicate with the drive units (not shown) of the batch transfer robot 20 and the single-chip transfer robot 30. In addition, the interface 63 enables the processor 61 and the memory 62 to communicate with the above-mentioned position detectors 51, 52, the proximity sensor 53, and the linear motor 43.

The processor 61 and the memory 62 constitute a computer. Then, the controller 60 reads out and executes various programs stored in the memory 62 by the processor 61, and performs various processes for controlling various parts of the batch transfer robot 20 and the single-chip transfer robot 30.

For example, the controller 60 performs various processes for preventing the batch-type transfer robot 20 and the single-chip transfer robot 30 moving on the same moving axis 40 from contacting or colliding with each other.

The following is a detailed description. For example, when the controller 60 moves the single-chip transport robot 30, as shown in FIG. 1, it determines whether the batch transport robot 20 stops at the specific position P1 on the right end of the transfer axis 40 (the first point mentioned in the scope of the patent application), and when it is determined to be stopped, the single-chip transport robot 30 is moved in a section S1 (also referred to as the first section) that is a certain distance D1 to the left from the specific position P1 on the right end to prevent it from contacting or colliding with the batch transport robot 20. On the other hand, when the controller 60 determines that the batch transport robot 20 has not stopped at the specific position P1 on the right end of the transfer axis 40, the single-chip transport robot 30 is not moved and is placed on standby. The controller 60 prevents the single-chip transfer robot 30 from contacting or colliding with the batch transfer robot 20 on the same travel axis 40 by performing such processing.

Similarly, when the controller 60 moves the batch transport robot 20, it determines whether the single-chip transport robot 30 stops at the specific position P2 at the left end (the second point mentioned in the scope of the patent application), and when it is determined that it stops, the controller 60 moves the batch transport robot 20 in a section S2 (also referred to as the second section) that is a certain distance D2 from the specific position P2 at the left end to the right. On the other hand, when the controller 60 determines that the single-chip transport robot 30 does not stop at the specific position P2 at the left end of the moving shaft 40, the controller 60 does not move the batch transport robot 20 but makes it standby. The controller 60 prevents the batch-type transport robot 20 from contacting or colliding with the single-chip transport robot 30 on the same travel axis 40 by performing such processing.

Furthermore, the controller 60 controls the movement of the batch-type transport robot 20 and the single-chip transport robot 30 based on the position data sent by the position detectors 51 and 52 shown in FIG. 4 included in the linear encoder.

In detail, whenever the position detectors 51 and 52 measure the positions of the batch type transfer robot 20 and the single piece type transfer robot 30, respectively, the controller 60 receives position data from each of the position detectors 51 and 52. Furthermore, the controller 60 calculates the distance from the position detector 51 to the position detector 52, or the distance from the slider 45 where the position detector 51 is located to the slider 46 where the position detector 52 is located, based on the position data of the position detector 51 and the position data of the position detector 52 received at the same time. Various parameters are stored in the memory 62, and the controller 60 reads these parameters in advance. When the calculated distance is less than the threshold value B (referred to as the first threshold value in the scope of the patent application) in the read parameter, the controller 60 stops the movement of the batch transport robot 20 or the single wafer transport robot 30 when the batch transport robot 20 or the single wafer transport robot 30 is moving. In this way, the controller 60 prevents the batch transport robot 20 and the single wafer transport robot 30 from contacting or colliding.

The controller 60 is electrically connected to a display device 70 that can display various information. When the controller 60 stops the movement, the display device 70 displays a warning that the distance between the batch type transfer robot 20 and the single wafer type transfer robot 30 is too close.

In addition, the controller 60 controls the movement of the batch type transfer robot 20 and the single wafer type transfer robot 30 based on the output of the proximity sensor 53 shown in FIG. 4 .

In detail, as described above, when the batch transport robot 20 and the single wafer transport robot 30 approach to a distance less than a certain threshold value A, the proximity sensor 53 outputs a proximity signal. When the controller 60 receives the proximity signal, if the batch transport robot 20 or the single wafer transport robot 30 is moving, the controller 60 stops the movement. In this way, the controller 60 prevents the batch transport robot 20 and the single wafer transport robot 30 from contacting or colliding.

Furthermore, the threshold value A, which is the criterion for the proximity sensor 53 to output a proximity signal, is preferably less than the threshold value B, which is the criterion for the controller 60 to stop the movement of the batch transport robot 20 or the single-chip transport robot 30 based on the measurement results of the position detectors 51 and 52 of the linear encoder. If such threshold values A and threshold values B are used, in addition to controlling the movement of the batch transport robot 20 and the single-chip transport robot 30 based on the measurement results of the linear encoder, the movement of the batch transport robot 20 and the single-chip transport robot 30 is also controlled based on the output of the proximity sensor 53, so that the contact and collision between the batch transport robot 20 and the single-chip transport robot 30 can be more effectively prevented.

In addition, the threshold value B is preferably less than the distance D1 and less than the distance D2, the distance D1 is used to define the section S1 of the movement of the single-wafer transport robot 30, and the distance D2 is used to define the section S2 of the movement of the batch transport robot 20. If the threshold value B is such, when the movement of the single-wafer transport robot 30 in the section S1 and the movement of the batch transport robot 20 in the section S2 are not controlled by the controller 60, it is possible to prevent the batch transport robot 20 and the single-wafer transport robot 30 from contacting or colliding with each other due to the movement.

As described above, in the transfer device 1 of the embodiment, the transfer axis 40 extends to a position where the batch transfer robot 20 can take out/put in a plurality of wafers from the FOUP, and extends to a position where the single wafer transfer robot 30 can take out/put in a plurality of wafers from the FOUP, and the transfer axis 40 allows the batch transfer robot 20 and the single wafer transfer robot 30 to move along the transfer axis 40 itself and to be adjacent to the loading port 10 on which the FOUP is placed. Therefore, the batch transfer robot 20 and the single wafer transfer robot 30 can use the same transfer axis 40 to move to a position adjacent to the loading port 10. The batch type transfer robot 20 and the single wafer type transfer robot 30 do not have separate transfer axes but share a single transfer axis 40, so the transfer device 1 is compact and space is saved.

In addition, in the transport device 1, the controller 60 obtains the distance between the batch transport robot 20 and the single-chip transport robot 30 based on the detection results of the position detectors 51 and 52 of the linear encoder, and stops the movement of the batch transport robot 20 and the single-chip transport robot 30 when the obtained distance is less than the threshold value B. Therefore, although the batch transport robot 20 and the single-chip transport robot 30 share the same travel axis 40, the batch transport robot 20 and the single-chip transport robot 30 are unlikely to come into contact or collide.

Furthermore, the batch transport robot 20 includes a proximity sensor 53 for detecting the proximity of the single wafer transport robot 30. When the proximity sensor 53 detects that the single wafer transport robot 30 has approached, the controller 60 stops the movement of the batch transport robot 20 and the single wafer transport robot 30. Therefore, although the batch transport robot 20 and the single wafer transport robot 30 share the same travel axis 40, the batch transport robot 20 and the single wafer transport robot 30 are unlikely to come into contact or collide.

The above is a description of the conveying device 1 and the control method of the conveying device 1 according to the embodiment of the present invention, but the conveying device 1 and the control method of the conveying device 1 are not limited thereto.

In the embodiment, the travel axis 40 is in the shape of a beam, in other words, in the shape of a thin and long flat plate. However, the present invention is not limited thereto. In the present invention, the travel axis 40 only needs to allow the batch transfer robot 20 and the single-chip transfer robot 30 to move along the travel axis 40 itself and be adjacent to the loading port 10 for loading FOUP (i.e., cassette). Therefore, as long as the condition is met, the shape of the travel axis 40 can be any shape. For example, the travel axis 40 can be prismatic or cylindrical.

In the embodiment, the conveying device 1 includes a linear scale 55. However, the present invention is not limited thereto. In the present invention, the conveying device 1 may include a first sensor for measuring the positions of the batch conveying robot 20 and the single-chip conveying robot 30 in the extension direction of the travel axis 40. Therefore, the presence or absence of the linear scale 55 is arbitrary. For example, when the position detectors 51 and 52 of the linear encoder are magnetic heads and the linear scale 55 is a magnetic scale, the linear scale 55 may be omitted and replaced by a plurality of stators of the linear motor 43.

In the embodiment, the proximity sensor 53 is provided on the batch transport robot 20. However, the present invention is not limited thereto. In the present invention, the transport device 1 may include at least one sensor (referred to as a second sensor in the patent application), which is provided on at least one of the batch transport robot 20 and the single-wafer transport robot 30, and detects when the batch transport robot 20 and the single-wafer transport robot 30 approach to a value less than the threshold A. Therefore, the proximity sensor 53 may also be provided on the single-wafer transport robot 30. Alternatively, the proximity sensor 53 may also be provided on the single-wafer transport robot 30 instead of being provided on the batch transport robot 20.

The present invention can adopt various embodiments and variations without departing from the broad spirit and scope of the present invention. In addition, the above-mentioned embodiments are only used to illustrate the present invention, not to limit the scope of the present invention. That is, the scope of the present invention is shown by the scope of the patent application rather than the embodiments. Moreover, various variations implemented within the scope of the patent application and within the scope of the invention meaning equivalent thereto are deemed to be within the scope of the present invention.

1: Transport device 10: Loading port 11: Front panel 12: Right panel 13: Rear panel 14: Left panel 20: Batch transport robot (first robot) 21: Gripper 25: Base 30: Single-piece transport robot (second robot) 31: Gripper 32: Arm 33: Alignment device 34: Reversing unit 35: Base 40: Travel axis 41,42: Linear guide rail 43: Linear motor 45,46: Slide 51,52: Position detector (first detector, second detector) 53: Proximity sensor (second sensor) 55: Linear scale 60: Controller 61: Processor 62: Memory 63: Interface 64: Bus 70: Display device (warning device) D1, D2: Distance P1, P2: Specific position S1, S2: Interval X, Y, Z: Direction

FIG. 1 is a cross-sectional view of the conveying device of the embodiment of the present invention when it is cut in a horizontal plane. FIG. 2 is a perspective view of the conveying device of the embodiment. FIG. 3 is a perspective view of the travel axis included in the conveying device of the embodiment. FIG. 4 is a hardware configuration diagram of the controller included in the conveying device of the embodiment.

1: Transport device

10: Loading port

11:Front panel

12: Right panel

13: Rear panel

14: Left panel

20: Batch transport robot (first robot)

30: Single-chip transport robot (second robot)

31: Clip head

32: Arm

33: Alignment device

34: Reversal unit

40: Transition axis

D1,D2: distance

P1, P2: specific location

S1,S2: interval

X,Y,Z: Direction

Claims (10)

A transport device comprises: a first robot capable of taking out/putting in a plurality of substrates in batches from a cartridge loaded on a loading port; a second robot capable of taking out/putting in the substrates individually from the cartridge, or taking out/putting in only one substrate; and a moving path extending to a position where the first robot can take out/put in the plurality of substrates from the cartridge, and extending to a position where the second robot can take out/put in the plurality of substrates from the cartridge. The position where the cassette takes out/puts in the substrate is shared by the first robot and the second robot, wherein the travel path is a travel axis extending along a first direction, the travel axis includes a first linear guide rail and a second linear guide rail, the first linear guide rail and the second linear guide rail extend along the first direction, and the first linear guide rail and the second linear guide rail are arranged on the beam body of the travel axis in a second direction perpendicular to the first direction. A transport device, comprising: a first robot capable of taking out/putting in a plurality of substrates in batches from a cartridge loaded on a loading port; a second robot capable of taking out/putting in the substrates individually from the cartridge, or taking out/putting in only one substrate; a travel path extending to a position where the first robot can take out/put in a plurality of substrates from the cartridge, and extending to a position where the second robot can take out/put in the substrate from the cartridge, and being shared by the first robot and the second robot; a first sensor, The positions of the first robot and the second robot in the extension direction of the travel path are measured; and a controller controls the movement of the first robot and the second robot. When the controller causes either the first robot or the second robot to move on the travel path, the controller calculates the distance between the first robot and the second robot based on the positions of the first robot and the second robot measured by the first sensor, and stops the movement of either the first robot or the second robot when the calculated distance is less than a first threshold. The conveying device as described in claim 2, wherein the first sensor comprises: a linear scale extending along the travel path; a first detector disposed on the first robot to detect the position in the extension direction of the linear scale; and a second detector disposed on the second robot to detect the position in the extension direction of the linear scale, wherein the first detector and the second detector share the same linear scale in position detection. The conveying device as described in claim 2 or 3 further comprises: at least one second sensor, which is disposed on at least one of the first robot and the second robot, and detects when the first robot and the second robot are closer than the second threshold value; The controller stops the movement of either the first robot or the second robot when the controller causes either the first robot or the second robot to move on the moving path and the at least one second sensor detects that the first robot and the second robot are closer than the second threshold value. The conveying device as described in claim 4, wherein the second threshold is lower than the first threshold. The conveying device as described in claim 2 or 3, wherein the controller causes the second robot to move within a first interval of the travel path away from the first point when the first robot is located at the first point on the travel path, and causes the first robot to move within a second interval of the travel path away from the second point when the second robot is located at a second point on the travel path different from the first point. The conveying device as described in claim 6, wherein the first threshold is less than the value of the distance from the first point to the first interval and less than the value of the distance from the second point to the second interval. The conveying device as described in claim 1 or 2 further includes a linear motor having: a stator disposed on the travel path; a first mover supporting the first robot and movable relative to the stator; and a second mover supporting the second robot and movable relative to the stator. A control method for a transport device, the transport device comprising: a first robot capable of taking out/putting in a plurality of substrates in batches from a cartridge loaded on a loading port; a second robot capable of taking out/putting in the substrates individually from the cartridge, or taking out/putting in only one substrate; and a moving path extending to a position where the first robot can take out/put in a plurality of substrates from the cartridge, and extending to a position where the second robot can take out/put in a plurality of substrates from the cartridge. The substrate taking-out/putting-in position is shared by the first robot and the second robot, and the control method of the conveying device includes: after the first robot stops at a first point on the moving path, the second robot moves in a first interval of the moving path away from the first point; and after the second robot stops at a second point on the moving path different from the first point, the first robot moves in a second interval of the moving path away from the second point. A transport device includes: a first robot capable of taking out/putting in a batch of a plurality of substrates from a cartridge loaded on a loading port; a second robot capable of taking out/putting in the substrates individually from the cartridge, or taking out/putting in a single piece of the substrate; a moving path extending to a position where the first robot can take out/put in a plurality of the substrates from the cartridge, and extending to a position where the second robot can take out/put in a single piece of the substrate from the cartridge. The substrate is taken out/put in position and is shared by the first robot and the second robot; and the controller is configured to move the second robot within a first interval of the travel path away from the first point when the first robot stops at the first point on the travel path, and to move the first robot within a second interval of the travel path away from the second point when the second robot stops at a second point on the travel path different from the first point.

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