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TWI868666B - Optical device, optical detection method and optical device design method - Google Patents

Optical device, optical detection method and optical device design method Download PDF

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TWI868666B
TWI868666B TW112114599A TW112114599A TWI868666B TW I868666 B TWI868666 B TW I868666B TW 112114599 A TW112114599 A TW 112114599A TW 112114599 A TW112114599 A TW 112114599A TW I868666 B TWI868666 B TW I868666B
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projection
unit
measured
imaging
range
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TW202443244A (en
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余良彬
王湧鋒
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鑑微科技股份有限公司
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Abstract

An optical detection method is adapted to apply on an optical device. The optical device comprise a projection unit which defines a projection range, an image capturing unit which defines a image capturing range, and a processing unit which electrically connects to the project unit and the image capturing unit. The image capturing range and the projection range respectively defines a long axis and a short axis which length is shorter than the long axis. The projection unit projects a beam of light toward an object to be measured along an incident path, and after being reflected by the object to be measured, enters the image capturing unit along a reflection path, and the projection of the incident path or the reflection path on a plane to be measured is parallel to an extension direction of the short axis of the projection range or the image capturing range. It can prevent partially over-exposed light spot from appearing in the effective image capturing range, thereby reducing the invalid observation area and improving measurement performance

Description

光學裝置、光學檢測方法及光學裝置設計方法Optical device, optical detection method and optical device design method

本發明是有關於一種光學裝置及檢測方法,特別是指一種光學裝置、光學檢測方法及光學裝置設計方法。 The present invention relates to an optical device and a detection method, in particular to an optical device, an optical detection method and an optical device design method.

近年來,非接觸式光學檢測應用範圍越來越廣泛,尤其是以三角測量的方法進行的三維檢測裝置。惟,當待測物表面為鏡面時,在鏡頭收光角度範圍內,部分訊號光線依照反射定律經該待測物表面反射,使能量集中進入光學系統,造成相機局部過曝,因此影像上可見明顯灰階值飽和之亮點,進而影響檢測功能。另外,目前業界亦有三維檢測裝置透過玻璃隔板量測待測物的量測需求,由於玻璃隔板的表面平整,因此會有部分光束依照反射定律進入三維檢測裝置,而有前述局部過曝現象(參閱圖1)的產生。 In recent years, the application scope of non-contact optical detection has become increasingly wide, especially in three-dimensional detection devices using triangulation. However, when the surface of the object to be tested is a mirror, within the range of the lens's light collection angle, part of the signal light is reflected by the surface of the object to be tested according to the law of reflection, causing the energy to enter the optical system, resulting in partial overexposure of the camera. Therefore, obvious bright spots with saturated grayscale values can be seen on the image, which in turn affects the detection function. In addition, the industry currently also has a demand for three-dimensional detection devices to measure the object to be tested through a glass partition. Since the surface of the glass partition is flat, part of the light beam will enter the three-dimensional detection device according to the law of reflection, resulting in the aforementioned partial overexposure phenomenon (see Figure 1).

參閱圖2與圖4,一種現有的三維檢測儀器1,主要包含一投射出結構光的投射裝置11,及一接收來自一待測件13反射之結構光且收光半角為γ1的取像裝置12,該取像裝置12的光軸與該 投射裝置11的光軸之間的夾角為α1,且自該待測件13所反射之光束的反射路徑於一待測平面的投影垂直於一取像範圍15之短軸的延伸方向,該取像範圍15之短軸定義為四邊形兩對邊中心連線長度中,長度較短的連線。其中,圖2中繪製出的光路為依照反射定律(入射角θi等於反射角θr)的光路,因此經該光路進入該取像裝置12會產生局部過曝的光點。根據圖2該投射裝置11的投射範圍14是四邊形、該取像裝置12的取像範圍15為四邊形,繪製出圖4的示意圖,其中,定義一有效取像範圍16為自該投射裝置11於平面的投影中心向外延伸D1的範圍,β1為該投射裝置11到該有效取像範圍16邊界的角度,D1為局部過曝光點至投射裝置11於平面的投影中心之間的距離。圖4中,由於局部過曝光點的位置位於該待測件13的邊界內,因此會影響檢測結果。 Referring to FIG. 2 and FIG. 4, a conventional three-dimensional detection instrument 1 mainly comprises a projection device 11 for projecting structured light, and an imaging device 12 for receiving structured light reflected from a test piece 13 and having a light receiving half angle of γ1. The angle between the optical axis of the imaging device 12 and the optical axis of the projection device 11 is α1, and the projection of the reflection path of the light beam reflected from the test piece 13 on a test plane is perpendicular to the extension direction of the short axis of an imaging range 15. The short axis of the imaging range 15 is defined as the shorter connecting line of the connecting lines between the centers of two opposite sides of the quadrilateral. The optical path drawn in FIG. 2 is an optical path according to the law of reflection (the incident angle θi is equal to the reflection angle θr), so a light spot that is partially overexposed will be generated when entering the imaging device 12 through the optical path. According to FIG2 , the projection range 14 of the projection device 11 is a quadrilateral, and the imaging range 15 of the imaging device 12 is a quadrilateral, and a schematic diagram of FIG4 is drawn, wherein an effective imaging range 16 is defined as a range extending outward from the projection center of the projection device 11 on the plane to D1, β1 is the angle from the projection device 11 to the boundary of the effective imaging range 16, and D1 is the distance from the local overexposure point to the projection center of the projection device 11 on the plane. In FIG4 , since the position of the local overexposure point is within the boundary of the test piece 13, it will affect the detection result.

參閱圖3與圖5,一般來說,為了提升Z軸分辨率並擴大該有效取像範圍16至少包含該待測件13的尺寸(其邊長之半為D2),使用者一般會增加該投射裝置11與該取像裝置12之間的夾角α2,以增加β2,使有效取像範圍16擴大而解決局部過曝之問題。惟,此方式除了會導致該三維檢測儀器1的體積增加外,此方式也會因為需要較小光圈(即縮小γ1)才能提供足夠的景深,而容易導致檢測時亮度不足的問題。 Referring to FIG. 3 and FIG. 5 , generally speaking, in order to improve the Z-axis resolution and expand the effective imaging range 16 to at least include the size of the object to be tested 13 (half of its side length is D2), the user generally increases the angle α2 between the projection device 11 and the imaging device 12 to increase β2, thereby expanding the effective imaging range 16 and solving the problem of partial overexposure. However, this method not only increases the volume of the three-dimensional detection instrument 1, but also requires a smaller aperture (i.e., reduces γ1 ) to provide sufficient depth of field, which easily leads to insufficient brightness during detection.

因此,本發明之其中一目的,即在提供一種提升檢測效率的光學裝置。 Therefore, one of the purposes of the present invention is to provide an optical device that improves detection efficiency.

於是,本發明光學裝置在一些實施態樣中,適用於量測一待測物,並包含一投射單元、一取像單元,及一處理單元。 Therefore, in some embodiments, the optical device of the present invention is suitable for measuring an object to be measured and includes a projection unit, an imaging unit, and a processing unit.

該投射單元用以投射一光束至該待測物並界定一投射範圍。 The projection unit is used to project a light beam to the object to be measured and define a projection range.

該取像單元用以接收自該待測物反射之光束並界定一取像範圍,該取像範圍與該投射範圍各定義出一長軸及一長度小於該長軸的短軸,該投射單元朝該待測物沿一入射路徑投射光束,並經該待測物反射後沿一反射路徑進入該取像單元,且該入射路徑於該待測平面的投影平行於該投射範圍之短軸的延伸方向,或該反射路徑於一待測平面的投影平行於該取像範圍之短軸的延伸方向。 The imaging unit is used to receive the light beam reflected from the object to be tested and define an imaging range. The imaging range and the projection range each define a long axis and a short axis whose length is less than the long axis. The projection unit projects the light beam along an incident path toward the object to be tested, and after being reflected by the object to be tested, the light beam enters the imaging unit along a reflection path. The projection of the incident path on the plane to be tested is parallel to the extension direction of the short axis of the projection range, or the projection of the reflection path on a plane to be tested is parallel to the extension direction of the short axis of the imaging range.

該處理單元電性連接該投射單元及該取像單元,該處理單元收到一觸發訊號後驅動該投射單元投射該光束,並驅動該取像單元接收到自該待測物反射之光束。 The processing unit is electrically connected to the projection unit and the imaging unit. After receiving a trigger signal, the processing unit drives the projection unit to project the light beam and drives the imaging unit to receive the light beam reflected from the object to be measured.

在一些實施態樣中,該處理單元驅動該投射單元投射光束一持續投射期間,並驅動該取像單元接收反射之光束一持續取像期間。 In some embodiments, the processing unit drives the projection unit to project a light beam for a continuous projection period, and drives the imaging unit to receive a reflected light beam for a continuous imaging period.

在一些實施態樣中,該處理單元驅動該投射單元投射光束一持續投射期間,並在一開始取像時間驅動該取像單元接收反 射之光束。 In some embodiments, the processing unit drives the projection unit to project the light beam for a continuous projection period, and drives the imaging unit to receive the reflected light beam at the beginning of imaging.

在一些實施態樣中,該取像範圍與該投射範圍是四邊形,其中兩對邊的中心連線定義出該長軸,另兩對邊的中心連線定義出該短軸。 In some embodiments, the imaging range and the projection range are quadrilaterals, wherein the center lines of two pairs of sides define the major axis, and the center lines of the other two pairs of sides define the minor axis.

在一些實施態樣中,該投射單元與該取像單元界定出一有效取像範圍,該有效取像範圍大於該取像範圍。 In some embodiments, the projection unit and the imaging unit define an effective imaging range, and the effective imaging range is larger than the imaging range.

在一些實施態樣中,一由該投射單元與該取像單元界定之有效取像範圍與該投射單元與該待測物的距離、該取像單元與該待測物的距離,及該投射單元與該取像單元的夾角有關。 In some embodiments, an effective imaging range defined by the projection unit and the imaging unit is related to the distance between the projection unit and the object to be measured, the distance between the imaging unit and the object to be measured, and the angle between the projection unit and the imaging unit.

在一些實施態樣中,一由該投射單元與該取像單元界定之有效取像範圍之邊長的一半

Figure 112114599-A0305-12-0004-1
,其中,R1為該投射單元與該待測物的距離,R2為該取像單元與該待測物的距離,θ為該投射單元與該取像單元的夾角。 In some embodiments, the length of the effective imaging range defined by the projection unit and the imaging unit is half.
Figure 112114599-A0305-12-0004-1
, wherein R1 is the distance between the projection unit and the object to be measured, R2 is the distance between the imaging unit and the object to be measured, and θ is the angle between the projection unit and the imaging unit.

在一些實施態樣中,該投射範圍大於且包含該取像範圍,且一由該投射單元與該取像單元界定之有效取像範圍大於且包含該取像範圍。 In some embodiments, the projection range is larger than and includes the imaging range, and an effective imaging range defined by the projection unit and the imaging unit is larger than and includes the imaging range.

因此,本發明之其中一目的,即在提供一種提升檢測效率的光學檢測方法。 Therefore, one of the purposes of the present invention is to provide an optical detection method that improves detection efficiency.

於是,本發明光學檢測方法在一些實施態樣中,適用於運用在一個光學裝置對一設置於一待測平面上的一待測物進行測 量,該光學裝置包含一用以投射一光束至該待測物並界定一投射範圍的投射單元,及一用以接收自該待測物反射之光束並界定一取像範圍的取像單元,該投射單元與該取像範圍各定義出一長軸及一長度小於該長軸的短軸,該光學檢測方法包含以下步驟: 一測量步驟:該投射單元朝該待測物沿一入射路徑投射光束,並經該待測物反射後沿一反射路徑進入該取像單元,且該入射路徑於該待測平面的投影平行於該投射範圍之短軸的延伸方向,或該反射路徑於該待測平面的投影平行於該取像範圍之短軸的延伸方向。 Therefore, in some embodiments, the optical detection method of the present invention is suitable for measuring an object to be measured set on a plane to be measured by using an optical device. The optical device includes a projection unit for projecting a light beam to the object to be measured and defining a projection range, and an imaging unit for receiving a light beam reflected from the object to be measured and defining an imaging range. The projection unit and the imaging range each define a long axis and a long axis. The optical detection method comprises the following steps: A measurement step: the projection unit projects a light beam toward the object to be measured along an incident path, and after being reflected by the object to be measured, the light beam enters the imaging unit along a reflection path, and the projection of the incident path on the plane to be measured is parallel to the extension direction of the short axis of the projection range, or the projection of the reflection path on the plane to be measured is parallel to the extension direction of the short axis of the imaging range.

在一些實施態樣中,該投射範圍與該取像範圍是四邊形,其中兩對邊的中心連線定義出該長軸,另兩對邊的中心連線定義出該短軸。 In some embodiments, the projection range and the imaging range are quadrilaterals, wherein the center lines of two pairs of sides define the major axis, and the center lines of the other two pairs of sides define the minor axis.

在一些實施態樣中,該投射單元與該取像單元界定出一有效取像範圍,該有效取像範圍大於該取像範圍。 In some embodiments, the projection unit and the imaging unit define an effective imaging range, and the effective imaging range is larger than the imaging range.

在一些實施態樣中,一由該投射單元與該取像單元界定之有效取像範圍與該投射單元與該待測物的距離、該取像單元與該待測物的距離,及該投射單元與該取像單元的夾角有關。 In some embodiments, an effective imaging range defined by the projection unit and the imaging unit is related to the distance between the projection unit and the object to be measured, the distance between the imaging unit and the object to be measured, and the angle between the projection unit and the imaging unit.

在一些實施態樣中,一由該投射單元與該取像單元界定之有效取像範圍之邊長的一半

Figure 112114599-A0305-12-0005-3
,其中,R1為該投射單元與該待測物的距離,R2為該取像單元與該待測物的距離,θ為 該投射單元與該取像單元的夾角。 In some embodiments, the length of the effective imaging range defined by the projection unit and the imaging unit is half.
Figure 112114599-A0305-12-0005-3
, wherein R1 is the distance between the projection unit and the object to be measured, R2 is the distance between the imaging unit and the object to be measured, and θ is the angle between the projection unit and the imaging unit.

在一些實施態樣中,該投射範圍大於且包含該取像範圍,且一由該投射單元與該取像單元界定之有效取像範圍大於且包含該取像範圍。 In some embodiments, the projection range is larger than and includes the imaging range, and an effective imaging range defined by the projection unit and the imaging unit is larger than and includes the imaging range.

因此,本發明之另一目的,即在提供一種提升光學裝置之檢測效率的光學裝置設計方法。 Therefore, another purpose of the present invention is to provide a method for designing an optical device to improve the detection efficiency of the optical device.

於是,本發明光學裝置設計方法在一些實施態樣中,該光學裝置包含一用以投射一光束至一待測物並界定一投射範圍的投射單元,及一用以接收自該待測物反射之光束並界定一取像範圍的取像單元,該取像範圍定義出一長軸及一長度小於該長軸的短軸,該光學裝置設計方法包含一計算步驟、一判斷步驟,及一測量步驟。 Therefore, in some embodiments of the optical device design method of the present invention, the optical device includes a projection unit for projecting a light beam to an object to be tested and defining a projection range, and an imaging unit for receiving a light beam reflected from the object to be tested and defining an imaging range, the imaging range defines a long axis and a short axis whose length is less than the long axis, and the optical device design method includes a calculation step, a judgment step, and a measurement step.

該計算步驟根據該投射單元與該待測物的距離、該取像單元與該待測物的距離,及該投射單元與該取像單元的夾角計算出一有效取像範圍。 The calculation step calculates an effective imaging range according to the distance between the projection unit and the object to be measured, the distance between the imaging unit and the object to be measured, and the angle between the projection unit and the imaging unit.

該判斷步驟根據該計算步驟所計算出的有效取像範圍,判斷該取像範圍是否不大於該有效取像範圍的邊長,如判斷結果為是,進行下一步驟。 The judging step judges whether the imaging range is not greater than the side length of the effective imaging range according to the effective imaging range calculated in the calculating step. If the judging result is yes, proceed to the next step.

該測量步驟中,該投射單元朝該待測物沿一入射路徑投射光束,並經該待測物反射後沿一反射路徑進入該取像單元,該 入射路徑或該反射路徑於一待測平面的投影平行於該短軸的延伸方向。 In the measurement step, the projection unit projects a light beam toward the object to be measured along an incident path, and after being reflected by the object to be measured, the light beam enters the imaging unit along a reflection path. The projection of the incident path or the reflection path on a plane to be measured is parallel to the extension direction of the short axis.

在一些實施態樣中,還包含一設置步驟:調整該投射單元與該待測物的距離、該取像單元與該待測物的距離,及該投射單元與該取像單元的夾角其中至少一者,如該判斷步驟結果為否,則進行該設置步驟及該計算步驟。 In some implementations, a setting step is further included: adjusting at least one of the distance between the projection unit and the object to be measured, the distance between the imaging unit and the object to be measured, and the angle between the projection unit and the imaging unit. If the result of the determination step is no, the setting step and the calculation step are performed.

本發明具有以下功效:當該待測物為長方體或類似之長形物時,由於不發生局部過曝的有效取像範圍僅與平行該入射路徑或該反射路徑之方向有關,與垂直於該入射路徑或該反射路徑之方向無關,因此,透過設計光路使該入射路徑或該反射路徑於該待測平面的投影平行於該短軸的延伸方向,使用者只須考量將該待測物的短邊位於該有效取像範圍內,就不會有局部過曝現象,因此,就能提升成像的有效觀察區域,藉以提升測量效率。 The present invention has the following effects: when the object to be measured is a rectangular parallelepiped or a similar elongated object, the effective imaging range without local overexposure is only related to the direction parallel to the incident path or the reflection path, and perpendicular to the direction of the incident path. The direction of the incident path or the reflected path has nothing to do with it. Therefore, through the designed light path Make the projection of the incident path or the reflection path on the plane to be measured parallel to the extension direction of the short axis. The user only needs to consider that the short side of the object to be measured is within the effective imaging range, and there will be no partial Overexposure phenomenon, therefore, can increase the effective observation area of imaging, thereby improving measurement efficiency.

1:三維檢測儀器 1: Three-dimensional detection equipment

11:投射裝置 11: Projection device

12:取像裝置 12: Imaging device

13:待測件 13: Parts to be tested

14:投射範圍 14: Projection range

15:取像範圍 15: Imaging range

16:有效取像範圍 16: Effective imaging range

2:光學裝置 2: Optical device

20:有效取像範圍 20: Effective imaging range

21:投射單元 21: Projection unit

22:取像單元 22: Imaging unit

23:待測物 23: Object to be tested

231:待測短邊 231: Short side to be tested

232:待測長邊 232: Long side to be tested

24:投射範圍 24: Projection range

25:取像範圍 25: Imaging range

26:處理單元 26: Processing unit

101:設置步驟 101: Setup steps

102:計算步驟 102: Calculation steps

103:判斷步驟 103: Judgment steps

104:測量步驟 104: Measurement steps

本發明之其他的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中:圖1是習知三維檢測儀器量測時發生過曝情形之照片;圖2與圖3分別是該習知三維檢測儀器於不同設置狀況的側視示意圖; 圖4是對應於圖2之設置情形下的有效區域及待測件的頂視示意圖;圖5是對應於圖3之設置情形下的有效區域及待測件的頂視示意圖;圖6是本發明光學裝置的一方塊圖;圖7是本發明光學裝置設計方法的一實施例的流程圖;圖8是該光學裝置的側視示意圖;圖9是對應於圖8的頂視示意圖;圖10是另一實施態樣的頂視示意圖;圖11是該光學裝置的光路示意圖;圖12~圖14是根據該實施例中的一計算步驟所使用的運算式所繪製的關係圖;圖15A及圖15B是頂視示意圖,分別說明運用習知檢測方式以及本發明光學檢測方法檢測一I/O元件的情形。 Other features and effects of the present invention will be clearly presented in the implementation method with reference to the drawings, wherein: FIG1 is a photograph of an overexposure condition during measurement by a known three-dimensional detection instrument; FIG2 and FIG3 are side views of the known three-dimensional detection instrument in different settings; FIG4 is a top view of the effective area and the test piece corresponding to the setting of FIG2; FIG5 is a top view of the effective area and the test piece corresponding to the setting of FIG3; FIG6 is a block diagram of the optical device of the present invention; FIG7 is a schematic diagram of the present invention. A flowchart of an embodiment of the optical device design method of the invention; FIG. 8 is a side view schematic diagram of the optical device; FIG. 9 is a top view schematic diagram corresponding to FIG. 8; FIG. 10 is a top view schematic diagram of another embodiment; FIG. 11 is a light path schematic diagram of the optical device; FIG. 12 to FIG. 14 are relationship diagrams drawn according to an operation formula used in a calculation step in the embodiment; FIG. 15A and FIG. 15B are top view schematic diagrams, respectively illustrating the use of a known detection method and the optical detection method of the invention to detect an I/O component.

參閱圖6、8與圖9,本發明光學裝置設計方法之一實施例。該光學裝置2包含一用以投射一光束至一待測物23並界定一投射範圍24的投射單元21、一用以接收自該待測物23反射之光束並界定一取像範圍25的取像單元22,及一電性連接該投射單元21及該取像單元22的處理單元26。 Referring to Figures 6, 8 and 9, an embodiment of the optical device design method of the present invention. The optical device 2 includes a projection unit 21 for projecting a light beam to an object to be measured 23 and defining a projection range 24, an imaging unit 22 for receiving a light beam reflected from the object to be measured 23 and defining an imaging range 25, and a processing unit 26 electrically connected to the projection unit 21 and the imaging unit 22.

參閱8、圖9與圖10,在本實施例的其中一實施態樣中,該投射單元21於該待測平面上的一投射範圍24為四邊形,具體來說是矩形,該取像單元22於該待測平面上的一取像範圍25為四邊形,具體來說為其中兩邊平行的梯形。補充說明的是,前述梯形中的一對平行邊的長短是根據投射方向而有變化,並不以此限定本發明之範圍。在本實施例的其他態樣中,如果該投射單元21的入射面不垂直投射面時,該投射範圍24即為四邊形(任二邊皆不會平行)。參閱圖10,在本實施例的另一變化態樣中,該投射單元21與該取像單元22的位置互換。另補充說明的是,在本實施例中,該投射範圍24會包含且涵蓋該取像範圍25,但不應以此為限。進一步說明的是,該投射範圍24與該取像範圍25各定義出一長軸及一長度小於該長軸的短軸,其中兩對邊的中心連線定義出該長軸,另兩對邊的中心連線定義出該短軸。 Referring to FIG8, FIG9 and FIG10, in one of the embodiments of the present embodiment, a projection range 24 of the projection unit 21 on the plane to be measured is a quadrilateral, specifically a rectangle, and an imaging range 25 of the imaging unit 22 on the plane to be measured is a quadrilateral, specifically a trapezoid with two sides parallel. It should be noted that the length of a pair of parallel sides in the aforementioned trapezoid varies according to the projection direction, and the scope of the present invention is not limited thereto. In other embodiments of the present embodiment, if the incident surface of the projection unit 21 is not perpendicular to the projection surface, the projection range 24 is a quadrilateral (no two sides are parallel). Referring to FIG10, in another variation of the present embodiment, the positions of the projection unit 21 and the imaging unit 22 are interchanged. It is also noted that in this embodiment, the projection range 24 includes and covers the imaging range 25, but it should not be limited thereto. It is further noted that the projection range 24 and the imaging range 25 each define a long axis and a short axis whose length is less than the long axis, wherein the center line of two pairs of sides defines the long axis, and the center line of the other two pairs of sides defines the short axis.

定義一有效取像範圍20為自該投射單元21於該待測平面的投影中心O向外延伸△的範圍,其中,符合反射定律且進入該取像單元22的局部過曝光點會形成於距離O點△處。 An effective imaging range 20 is defined as the range extending outward by Δ from the projection center O of the projection unit 21 on the plane to be measured, in which a local overexposure point that complies with the law of reflection and enters the imaging unit 22 will be formed at a distance O point △.

補充說明的是,該光束可以但不限於是結構光。該投射單元21可包含一個或多個投影器(圖未示),該取像單元22可包含一個或多個攝影鏡頭(圖未示)。 It should be noted that the light beam may be, but is not limited to, structured light. The projection unit 21 may include one or more projectors (not shown), and the imaging unit 22 may include one or more camera lenses (not shown).

具體來說,在本實施例中,該待測物23為表面平整的 高反光材質,例如為具有一鏡面的待測物23,在本實施例的其中一實施態樣中,該待測物23整體由高反光材質組成,在本實施例的其他實施態樣中,該待測物23的表面為高反光材質。但該待測物23的材質不以前述為限。 Specifically, in this embodiment, the object to be tested 23 is a high-reflective material with a flat surface, for example, an object to be tested 23 with a mirror surface. In one embodiment of this embodiment, the object to be tested 23 is entirely composed of a high-reflective material. In other embodiments of this embodiment, the surface of the object to be tested 23 is a high-reflective material. However, the material of the object to be tested 23 is not limited to the above.

參閱圖6與圖8,該處理單元26在收到一觸發訊號後驅動該投射單元21投射該光束,並驅動該取像單元22接收到自該待測物23反射之光束。 Referring to Figures 6 and 8, the processing unit 26 drives the projection unit 21 to project the light beam after receiving a trigger signal, and drives the imaging unit 22 to receive the light beam reflected from the object to be measured 23.

在本實施例中,該處理單元26是外接的電腦,在本實施例的其他變化態樣中,該處理單元26也可以是具有中央處理器的主機板,例如但不限於是由英國樹莓派基金會開發的樹莓派(Raspberry Pi)。該處理單元26可透過訊號連接一輸入裝置(圖未示,例如:鍵盤、按鈕等)以接收該觸發訊號。而該觸發訊號可以是來自電腦的鍵盤的按鍵訊號,也可以是來自另一電性連接該處理單元26的自動化控制設備,不限於此。 In this embodiment, the processing unit 26 is an external computer. In other variations of this embodiment, the processing unit 26 may also be a motherboard with a central processing unit, such as but not limited to the Raspberry Pi developed by the British Raspberry Pi Foundation. The processing unit 26 may be connected to an input device (not shown, such as a keyboard, button, etc.) via a signal to receive the trigger signal. The trigger signal may be a key signal from a computer keyboard, or may be from another automated control device electrically connected to the processing unit 26, but is not limited thereto.

在本實施例的其中一實施態樣中,該取像單元22的鏡頭是自動關閉的,該處理單元26驅動該投射單元21投射光束一持續投射期間,並在一開始取像時間驅動該取像單元22接收反射之光束。具體來說,考量到該投射單元21光束穩定性,該處理單元26先驅動該投射單元21開啟,於該光束穩定後的該開始取像時間再驅動該取像單元22開啟並接收反射之光束,當該取像單元22的鏡頭於 曝光時間結束而自動關閉後,該處理單元26再控制關閉該投射單元21。 In one embodiment of the present embodiment, the lens of the imaging unit 22 is automatically closed, and the processing unit 26 drives the projection unit 21 to project the light beam during the continuous projection period, and drives the imaging unit 22 to receive the reflected light beam at the beginning of the imaging time. Specifically, considering the stability of the light beam of the projection unit 21, the processing unit 26 first drives the projection unit 21 to turn on, and then drives the imaging unit 22 to turn on and receive the reflected light beam at the beginning of the imaging time after the light beam is stable. When the lens of the imaging unit 22 is automatically closed at the end of the exposure time, the processing unit 26 controls the projection unit 21 to be closed.

在本實施例的另一實施態樣中,該取像單元22的啟閉皆受該處理單元26控制,即該處理單元26驅動該投射單元21投射光束該持續投射期間,並驅動該取像單元22接收反射之光束一持續取像期間。較佳的是,考量到該投射單元21光束穩定性,該處理單元26先驅動該投射單元21開啟,於該光束穩定後再驅動該取像單元22開啟並接收反射之光束該持續取像期間後,再控制依序關閉該取像單元22及該投射單元21。 In another embodiment of the present embodiment, the opening and closing of the imaging unit 22 is controlled by the processing unit 26, that is, the processing unit 26 drives the projection unit 21 to project the light beam during the continuous projection period, and drives the imaging unit 22 to receive the reflected light beam during the continuous imaging period. Preferably, considering the stability of the light beam of the projection unit 21, the processing unit 26 first drives the projection unit 21 to turn on, and then drives the imaging unit 22 to turn on and receive the reflected light beam during the continuous imaging period after the light beam is stable, and then controls the imaging unit 22 and the projection unit 21 to be closed in sequence.

參閱圖7、圖8與圖9,該光學裝置設計方法包含一設置步驟101、一計算步驟102、一判斷步驟103,及一測量步驟104。 Referring to Figures 7, 8 and 9, the optical device design method includes a setting step 101, a calculation step 102, a judgment step 103, and a measurement step 104.

<設置步驟> <Setup steps>

調整該投射單元21與該待測物23的距離、該取像單元22與該待測物23的距離、該投射單元21與該取像單元22的夾角其中至少一者。 Adjust at least one of the distance between the projection unit 21 and the object to be measured 23, the distance between the imaging unit 22 and the object to be measured 23, and the angle between the projection unit 21 and the imaging unit 22.

在本實施例的其中一實施態樣中,該設置步驟101指的是重新架設該光學裝置2。 In one implementation of this embodiment, the setting step 101 refers to re-setting the optical device 2.

<計算步驟> <Calculation steps>

該計算步驟102:運用該投射單元21與該待測物23的距離、該取像單元22與該待測物23的距離,及該投射單元21與該取 像單元22的夾角,計算出該有效取像範圍20。 The calculation step 102: using the distance between the projection unit 21 and the object 23 to be measured, the distance between the imaging unit 22 and the object 23 to be measured, and the angle between the projection unit 21 and the imaging unit 22, the effective imaging range 20 is calculated.

詳細來說,該計算步驟102運用的運算式1為

Figure 112114599-A0305-12-0012-4
,其中,△為有效取像範圍20之邊長的一半,R 1為該投射單元21與該待測物23的距離,R 2為該取像單元22與該待測物23的距離,θ為該投射單元21與該取像單元22的夾角。 Specifically, the calculation step 102 uses the equation 1:
Figure 112114599-A0305-12-0012-4
, wherein is half of the side length of the effective imaging range 20, R1 is the distance between the projection unit 21 and the object 23 to be measured, R2 is the distance between the imaging unit 22 and the object 23 to be measured, and θ is the angle between the projection unit 21 and the imaging unit 22.

進一步來說,該有效取像範圍20的邊長的一半,指的是該有效取像範圍20的邊界與該投射單元21於該待測平面上的投影中心之距離。 Furthermore, half of the side length of the effective imaging range 20 refers to the distance between the boundary of the effective imaging range 20 and the projection center of the projection unit 21 on the plane to be measured.

補充說明的是,該運算式1的推導過程請參圖11,首先要說明的是,O點為該待測物23的中心,A點為該投射單元21的鏡頭中心,B點為該取像單元22的鏡頭中心,C點為光束符合反射定律的反射位置,即

Figure 112114599-A0305-12-0012-11
對稱線段
Figure 112114599-A0305-12-0012-12
,以通過C點的垂直線(法線)作為對稱軸。D點為B點以水平線為對稱軸所對稱之位置,E點為
Figure 112114599-A0305-12-0012-13
延長線與經過D點之水平線的交界處。此外,
Figure 112114599-A0305-12-0012-14
線段長度即為△(有效取像範圍20的邊長的一半),
Figure 112114599-A0305-12-0012-15
線段長度即為R 1
Figure 112114599-A0305-12-0012-16
線段長度即為R 2。 It is to be noted that the derivation process of the operation formula 1 is shown in FIG. 11. First of all, it should be noted that point O is the center of the object 23 to be measured, point A is the center of the lens of the projection unit 21, point B is the center of the lens of the imaging unit 22, and point C is the reflection position of the light beam in accordance with the law of reflection, that is,
Figure 112114599-A0305-12-0012-11
Symmetrical line segment
Figure 112114599-A0305-12-0012-12
, with the vertical line (normal) passing through point C as the symmetry axis. Point D is the position of point B symmetrically with the horizontal line as the symmetry axis, and point E is
Figure 112114599-A0305-12-0012-13
The intersection of the extended line and the horizontal line passing through point D. In addition,
Figure 112114599-A0305-12-0012-14
The length of the line segment is △ (half the length of the side of the effective imaging range 20).
Figure 112114599-A0305-12-0012-15
The length of the line segment is R 1 ,
Figure 112114599-A0305-12-0012-16
The length of the line segment is R 2 .

由於△CAO與△DAE是相似三角形,因此,

Figure 112114599-A0305-12-0012-5
,經三角函數切換△×(R 1+R 2×cos θ)=R 1×R 2 sin θ,故求得運算式1。 Since △CAO and △DAE are similar triangles,
Figure 112114599-A0305-12-0012-5
, after trigonometric conversion, △×( R 1 + R 2 ×cos θ)= R 1 × R 2 sin θ, so equation 1 is obtained.

我們根據該計算步驟102所運用的計算式,得出下表的數據,其中,在本實施例的實施態樣中,R1=300mm,R2=270mm、300mm、319.5mm及360mm,即R1:R2分別為1:0.9、1:1、 1:1.065、1:1.2。其中Φ為該投射單元21至該有效取像範圍20之邊界與通過該投射單元中心之一垂直線的夾角(即圖11中的∠OAC) According to the calculation formula used in the calculation step 102, we obtain the data in the following table, where, in the implementation of this embodiment, R1=300mm, R2=270mm, 300mm, 319.5mm and 360mm, that is, R1:R2 are 1:0.9, 1:1, 1:1.065, 1:1.2 respectively. Where Φ is the angle between the boundary of the projection unit 21 to the effective imaging range 20 and a vertical line passing through the center of the projection unit (i.e. ∠OAC in Figure 11)

Figure 112114599-A0305-12-0013-6
Figure 112114599-A0305-12-0013-6

Figure 112114599-A0305-12-0014-7
Figure 112114599-A0305-12-0014-7

由上表及圖12~圖14,我們可以瞭解到Φ與θ、△與Φ,以及△與θ的關係在θ=20°~30°之間皆呈線性,且圖11~圖13中各趨勢線的標準差R2皆等於1,表示Φ、θ與△三者間的關係是容易準確預測的。因此,在本實施例的其中一實施態樣中,亦可以預先於前述之處理單元(圖未示)預存三者間的線性關係計算式,當使用者調整改變該投射單元21與該取像單元22之間的夾角θ時,可以直接運用前述的線性關係計算式進行計算,相較於前述的運算式1,更可以節省計算資源,併提升計算效率。 From the above table and Figures 12 to 14, we can understand that the relationship between Φ and θ, △ and Φ, and △ and θ are all linear between θ=20°~30°, and the standard deviation R2 of each trend line in Figures 11 to 13 is all equal to 1, indicating that the relationship between Φ, θ and △ is easy to accurately predict. Therefore, in one implementation of this embodiment, the linear relationship calculation formula between the three can also be pre-stored in the aforementioned processing unit (not shown). When the user adjusts the angle θ between the projection unit 21 and the imaging unit 22, the aforementioned linear relationship calculation formula can be directly used for calculation. Compared with the aforementioned calculation formula 1, it can save computing resources and improve computing efficiency.

<判斷步驟103> <Judgment step 103>

根據該計算步驟102所計算出的有效取像範圍20,判斷該取像範圍25是否不大於該有效取像範圍20,如判斷結果為是,進行後述之測量步驟104。 According to the effective imaging range 20 calculated in the calculation step 102, it is determined whether the imaging range 25 is not greater than the effective imaging range 20. If the determination result is yes, the measurement step 104 described later is performed.

如該判斷步驟103結果為否,則返回進行該設置步驟101及該計算步驟102。 If the result of the determination step 103 is no, then return to the setting step 101 and the calculation step 102.

補充說明的是,由於該有效取像範圍20是可以透過該計算步驟102計算得出,因此,也可以設計該有效取像範圍20大於該投射範圍24,端看使用者的需求而定。 It is to be noted that, since the effective imaging range 20 can be calculated through the calculation step 102, the effective imaging range 20 can also be designed to be larger than the projection range 24, depending on the needs of the user.

進一步說明的是,該計算步驟102與該判斷步驟103可由人工計算,或是利用該光學裝置2的一處理單元(圖未示)進行,例如:該處理單元接收來自一輸入件(圖未示)的參數(R1、R2、θ),並根據預存的運算式1進行計算。 It is further explained that the calculation step 102 and the determination step 103 can be calculated manually or performed using a processing unit (not shown) of the optical device 2. For example, the processing unit receives parameters (R1, R2, θ) from an input component (not shown) and performs calculations according to a pre-stored calculation formula 1.

<測量步驟104> <Measurement step 104>

該投射單元21朝該待測物23沿一入射路徑投射光束,並經該待測物23反射後沿一反射路徑進入該取像單元22,該反射路徑於該待測平面的投影平行於該取像範圍25之短軸的延伸方向。 The projection unit 21 projects a light beam toward the object to be measured 23 along an incident path, and after being reflected by the object to be measured 23, the light beam enters the imaging unit 22 along a reflection path. The projection of the reflection path on the plane to be measured is parallel to the extension direction of the short axis of the imaging range 25.

參閱圖10,在本實施的另一實施態樣中,該投射單元21(參圖8)與該取像單元22(參圖8)的位置互換,因此,該入射路徑於該待測平面的投影平行於該投射範圍24之短軸的延伸方向。 Referring to FIG. 10 , in another embodiment of the present embodiment, the positions of the projection unit 21 (see FIG. 8 ) and the imaging unit 22 (see FIG. 8 ) are interchanged, so that the projection of the incident path on the plane to be measured is parallel to the extension direction of the short axis of the projection range 24 .

由於運算式1中的△僅與R1、R2及θ有關,也就是該有效取像範圍20僅與平行該入射路徑或該反射路徑之方向有關,與垂直於該入射路徑或該反射路徑之方向無關,因此,當該待測物23的表面為長方形或其他長寬比不等於一之長條狀時,使用者只須考量將該待測物23的待測短邊231(參圖15B)位於該有效取像範圍內,使該待測物23的待測短邊231皆位於該有效取像範圍20內,而能提升成像的有效觀察區域,藉以提升測量效率。較佳的是,如設計有效取像範圍20包含且涵蓋該投射範圍24或該取像範圍25,使用者在進行檢測時只要確認該待測物23尺寸在該投射範圍24或該取像 範圍25內即可以進行檢測。 Since △ in equation 1 is only related to R1, R2 and θ, that is, the effective imaging range 20 is only related to the direction parallel to the incident path or the reflection path, and has nothing to do with the direction perpendicular to the incident path or the reflection path. Therefore, when the surface of the object to be measured 23 is a rectangle or other long strip with an aspect ratio not equal to 1, the user only needs to consider placing the short side 231 to be measured of the object to be measured 23 (see FIG. 15B ) within the effective imaging range, so that the short side 231 to be measured of the object to be measured 23 is all located within the effective imaging range 20, which can increase the effective observation area of imaging, thereby improving the measurement efficiency. Preferably, if the effective imaging range 20 is designed to include and cover the projection range 24 or the imaging range 25, the user can perform the inspection as long as he confirms that the size of the object to be inspected 23 is within the projection range 24 or the imaging range 25.

進一步說明的是,在相同的待測物尺寸(即圖4的待測件13尺寸等於本實施例之待測物23尺寸)以及相同的有效取像範圍下(圖4的有效範圍16相同於本實施例之有效取像範圍20,即圖4的D1等於圖9的△),使用本實施例的測量步驟,即可以讓整個取像範圍25位於該有效取像範圍20內,因此不會局部過曝,藉此解決局部過曝所導致的量測問題。 To further explain, under the same size of the object to be tested (i.e., the size of the object to be tested 13 in FIG. 4 is equal to the size of the object to be tested 23 in this embodiment) and the same effective imaging range (the effective range 16 in FIG. 4 is equal to the effective imaging range 20 in this embodiment, i.e., D1 in FIG. 4 is equal to △ in FIG. 9), the measurement steps of this embodiment can make the entire imaging range 25 within the effective imaging range 20, so there will be no local overexposure, thereby solving the measurement problem caused by local overexposure.

詳細來說,使用上會有以下狀況: In detail, the following situations may occur during use:

1.當該計算步驟102所計算出該取像範圍25的邊長不大於該有效取像範圍20的邊長(即該判斷步驟103判斷結果為是),即可以進行該測量步驟104。接下來進行如該待測物23的待測短邊231小於該有效取像範圍20的邊長,則可以進行該測量步驟104。 1. When the side length of the imaging range 25 calculated in the calculation step 102 is not greater than the side length of the effective imaging range 20 (i.e. the judgment result of the judgment step 103 is yes), the measurement step 104 can be performed. Next, if the short side 231 of the object 23 to be measured is smaller than the side length of the effective imaging range 20, the measurement step 104 can be performed.

2.當該計算步驟102所計算出該取像範圍25的邊長大於該有效取像範圍20的邊長(即該判斷步驟103判斷結果為否),則進行設置步驟101,使用者可以調整該投射單元21與該待測物23的距離、該取像單元22與該待測物23的距離,及該投射單元21與該取像單元22的夾角其中至少一者,以擴大該有效取像範圍20,使該待測物23的待測短邊231位於該有效取像範圍20內。接著即可以進行該測量步驟104。接下來進行如該待測物23的待測短邊231小於該有效取像範圍20的邊長,則可以進行該測量步驟104。 2. When the side length of the imaging range 25 calculated in the calculation step 102 is greater than the side length of the effective imaging range 20 (i.e., the judgment result of the determination step 103 is no), the setting step 101 is performed, and the user can adjust at least one of the distance between the projection unit 21 and the object 23 to be measured, the distance between the imaging unit 22 and the object 23 to be measured, and the angle between the projection unit 21 and the imaging unit 22 to expand the effective imaging range 20 so that the short side 231 of the object 23 to be measured is located within the effective imaging range 20. Then, the measurement step 104 can be performed. Next, if the short side 231 of the object 23 to be measured is smaller than the side length of the effective imaging range 20, the measurement step 104 can be performed.

值得說明的是,當透過前述光學裝置設計方法設計出該光學裝置2後,即可以供檢測業者進行一光學檢測方法,該光學檢測方法適用於運用在該光學裝置2對設置於該待測平面上的該待測物23進行測量,並僅包含前述的測量步驟104。 It is worth noting that after the optical device 2 is designed by the aforementioned optical device design method, it can be used by the testing industry to perform an optical testing method, which is applicable to the optical device 2 to measure the object to be tested 23 set on the plane to be tested, and only includes the aforementioned measurement step 104.

綜上所述,本發明光學裝置、光學檢測方法及光學裝置設計方法,由於不發生局部過曝的有效取像範圍20僅與平行該入射路徑或該反射路徑之方向有關,與垂直於該入射路徑或該反射路徑之方向無關,因此,透過設計光路使該入射路徑或該反射路徑於該待測平面的投影平行於該取像範圍25或該投射範圍24短軸的延伸方向,使用者只須考量將該待測物23的短邊位於該有效取像範圍20內,因此不會發生局部過曝情形,提升成像的有效觀察區域,藉以提升測量效率,故確實能達成本發明之目的。 To sum up, the optical device, optical detection method and optical device design method of the present invention, because the effective imaging range 20 that does not cause local overexposure is only related to the direction parallel to the incident path or the reflection path, and is related to the direction perpendicular to the incident path. The direction of the path or the reflection path has nothing to do with it. Therefore, by designing the light path, the incident path or the reflection path is The projection of the plane to be measured is parallel to the extension direction of the short axis of the imaging range 25 or the projection range 24. The user only needs to consider that the short side of the object to be measured 23 is within the effective imaging range 20, so there is no When local overexposure occurs, the effective observation area of imaging is increased, thereby improving measurement efficiency. Therefore, the purpose of the present invention can indeed be achieved.

補充說明的是,由於電子零件檢測的需求漸增,由於電性接點的材質多為銅或其他高導電的金屬,其表面的光學性質類似鏡面的特徵而有前述局部過曝的現象產生,此外,我們亦了解到成像的雜訊發生位置會發生在平行於投射(或取像)方向上的電性接點邊界。參閱圖15A及圖15B,該待測物23為電子元件且具有多個呈長條狀的電性接點230。為了使該待測物23具有更多的電性接點230以提升其運算效能,每一電性接點230的長度延伸方向平行於該待測物23的待測短邊231。參閱圖15A,如採用習知技術的檢測 方法,該反射路徑於該待測平面的投影垂直於該取像範圍25之短軸的延伸方向,其訊號雜訊比(SNR)會正相關於

Figure 112114599-A0305-12-0018-8
,參閱圖15B,惟如採本發明的光學檢測方法,由於該反射路徑於該待測平面的投影平行於該取像範圍25之短軸的延伸方向,因此訊號雜訊比(SNR)會正相關於
Figure 112114599-A0305-12-0018-9
,明顯高於傳統習知的檢測方式。綜上述,透過本發明的光學檢測方法檢測該待測物23時,能有效提高訊號雜訊比(SNR),降低雜訊的比例。 It is to be noted that, due to the increasing demand for electronic component testing, the optical properties of the electrical contacts are similar to those of mirrors, and the aforementioned local overexposure occurs because the material of the electrical contacts is mostly copper or other highly conductive metals. In addition, we also understand that the imaging noise occurs at the electrical contact boundary parallel to the projection (or imaging) direction. Referring to FIG. 15A and FIG. 15B, the object to be tested 23 is an electronic component and has a plurality of electrical contacts 230 in the form of long strips. In order to make the object to be tested 23 have more electrical contacts 230 to improve its computing performance, the length extension direction of each electrical contact 230 is parallel to the short side 231 of the object to be tested 23. Referring to FIG. 15A , if the conventional detection method is used, the projection of the reflection path on the plane to be detected is perpendicular to the extension direction of the short axis of the imaging range 25, and its signal-to-noise ratio (SNR) is positively correlated to
Figure 112114599-A0305-12-0018-8
, see FIG. 15B , however, if the optical detection method of the present invention is adopted, since the projection of the reflection path on the plane to be detected is parallel to the extension direction of the short axis of the imaging range 25, the signal-to-noise ratio (SNR) will be positively correlated to
Figure 112114599-A0305-12-0018-9
, which is significantly higher than the conventional detection method. In summary, when the optical detection method of the present invention is used to detect the object 23, the signal-to-noise ratio (SNR) can be effectively improved and the proportion of noise can be reduced.

惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 However, the above is only an example of the implementation of the present invention, and it cannot be used to limit the scope of the implementation of the present invention. All simple equivalent changes and modifications made according to the scope of the patent application of the present invention and the content of the patent specification are still within the scope of the patent of the present invention.

2:光學裝置 21:投射單元 22:取像單元 23:待測物 2: Optical device 21: Projection unit 22: Image acquisition unit 23: Object to be measured

Claims (16)

一種光學裝置,適用於量測一待測物,並包含: 一投射單元,用以投射一光束至該待測物並界定一投射範圍; 一取像單元,用以接收自該待測物反射之光束並界定一取像範圍,該取像範圍與該投射範圍各定義出一長軸及一長度小於該長軸的短軸,該投射單元朝該待測物沿一入射路徑投射光束,並經該待測物反射後沿一反射路徑進入該取像單元,且該入射路徑於該待測平面的投影平行於該投射範圍之短軸的延伸方向,或該反射路徑於該待測平面的投影平行於該取像範圍之短軸的延伸方向;及 一處理單元,電性連接該投射單元及該取像單元,該處理單元收到一觸發訊號後驅動該投射單元投射該光束,並驅動該取像單元接收到自該待測物反射之光束。 An optical device, suitable for measuring an object to be measured, and comprising: A projection unit, used to project a light beam to the object to be measured and define a projection range; An imaging unit, used to receive the light beam reflected from the object to be measured and define an imaging range, the imaging range and the projection range each define a major axis and a minor axis whose length is less than the major axis, the projection unit projects the light beam toward the object to be measured along an incident path, and after being reflected by the object to be measured, the light beam enters the imaging unit along a reflection path, and the projection of the incident path on the plane to be measured is parallel to the extension direction of the minor axis of the projection range, or the projection of the reflection path on the plane to be measured is parallel to the extension direction of the minor axis of the imaging range; and A processing unit is electrically connected to the projection unit and the imaging unit. After receiving a trigger signal, the processing unit drives the projection unit to project the light beam and drives the imaging unit to receive the light beam reflected from the object to be measured. 如請求項1所述的光學裝置,其中,該處理單元驅動該投射單元投射光束一持續投射期間,並驅動該取像單元接收反射之光束一持續取像期間。An optical device as described in claim 1, wherein the processing unit drives the projection unit to project a light beam for a continuous projection period, and drives the imaging unit to receive a reflected light beam for a continuous imaging period. 如請求項1所述的光學裝置,其中,該處理單元驅動該投射單元投射光束一持續投射期間,並在一開始取像時間驅動該取像單元接收反射之光束。An optical device as described in claim 1, wherein the processing unit drives the projection unit to project the light beam for a continuous projection period, and drives the imaging unit to receive the reflected light beam at the beginning of imaging. 如請求項1所述的光學裝置,其中,該取像範圍與該投射範圍是四邊形,其中兩對邊的中心連線定義出該長軸,另兩對邊的中心連線定義出該短軸。An optical device as described in claim 1, wherein the imaging range and the projection range are quadrilaterals, wherein the center lines connecting two pairs of sides define the major axis, and the center lines connecting the other two pairs of sides define the minor axis. 如請求項1所述的光學裝置,其中,該投射單元與該取像單元界定出一有效取像範圍,該有效取像範圍大於該取像範圍。An optical device as described in claim 1, wherein the projection unit and the imaging unit define an effective imaging range, and the effective imaging range is larger than the imaging range. 如請求項1所述的光學裝置,其中,一由該投射單元與該取像單元界定之有效取像範圍與該投射單元與該待測物的距離、該取像單元與該待測物的距離,及該投射單元與該取像單元的夾角有關。An optical device as described in claim 1, wherein an effective imaging range defined by the projection unit and the imaging unit is related to the distance between the projection unit and the object to be measured, the distance between the imaging unit and the object to be measured, and the angle between the projection unit and the imaging unit. 如請求項1所述的光學裝置,其中,一由該投射單元與該取像單元界定之有效取像範圍之邊長的一半 ,其中,R1為該投射單元與該待測物的距離,R2為該投射單元與該待測物的距離, 為該投射單元與該取像單元的夾角。 An optical device as claimed in claim 1, wherein a half of the side length of an effective imaging range defined by the projection unit and the imaging unit , wherein R1 is the distance between the projection unit and the object to be measured, and R2 is the distance between the projection unit and the object to be measured, is the angle between the projection unit and the imaging unit. 如請求項1所述的光學裝置,該投射範圍大於且包含該取像範圍,且一由該投射單元與該取像單元界定之有效取像範圍大於且包含該取像範圍。In the optical device as described in claim 1, the projection range is larger than and includes the imaging range, and an effective imaging range defined by the projection unit and the imaging unit is larger than and includes the imaging range. 一種光學檢測方法,適用於運用在一個光學裝置對一設置於一待測平面上的一待測物進行測量,該光學裝置包含一用以投射一光束至該待測物並界定一投射範圍的投射單元,及一用以接收自該待測物反射之光束並界定一取像範圍的取像單元,該取像範圍與該投射範圍各定義出一長軸及一長度小於該長軸的短軸,該光學檢測方法包含以下步驟: 一測量步驟:該投射單元朝該待測物沿一入射路徑投射光束,並經該待測物反射後沿一反射路徑進入該取像單元,且該入射路徑於該待測平面的投影平行於該投射範圍之短軸的延伸方向,或該反射路徑於該待測平面的投影平行於該取像範圍之短軸的延伸方向。 An optical detection method is applicable to measuring an object to be measured set on a plane to be measured by using an optical device. The optical device includes a projection unit for projecting a light beam to the object to be measured and defining a projection range, and an imaging unit for receiving a light beam reflected from the object to be measured and defining an imaging range. The imaging range and the projection range each define a long axis and a short axis whose length is less than the long axis. The optical detection method includes the following steps: A measurement step: the projection unit projects a light beam toward the object to be measured along an incident path, and after being reflected by the object to be measured, the light beam enters the imaging unit along a reflection path, and the projection of the incident path on the plane to be measured is parallel to the extension direction of the short axis of the projection range, or the projection of the reflection path on the plane to be measured is parallel to the extension direction of the short axis of the imaging range. 如請求項9所述的光學檢測方法,其中,該取像範圍與該投射範圍是四邊形,其中兩對邊的中心連線定義出該長軸,另兩對邊的中心連線定義出該短軸。An optical detection method as described in claim 9, wherein the imaging range and the projection range are quadrilaterals, wherein the center lines connecting two pairs of sides define the major axis, and the center lines connecting the other two pairs of sides define the minor axis. 如請求項9所述的光學檢測方法,其中,該投射單元與該取像單元界定出一有效取像範圍,該有效取像範圍大於該取像範圍。An optical detection method as described in claim 9, wherein the projection unit and the imaging unit define an effective imaging range, and the effective imaging range is larger than the imaging range. 如請求項9所述的光學檢測方法,其中,一由該投射單元與該取像單元界定之有效取像範圍與該投射單元與該待測物的距離、該取像單元與該待測物的距離,及該投射單元與該取像單元的夾角有關。An optical detection method as described in claim 9, wherein an effective imaging range defined by the projection unit and the imaging unit is related to the distance between the projection unit and the object to be measured, the distance between the imaging unit and the object to be measured, and the angle between the projection unit and the imaging unit. 如請求項9所述的光學檢測方法,其中,一由該投射單元與該取像單元界定之有效取像範圍之邊長的一半 ,其中, R1為該投射單元與該待測物的距離,R2為該取像單元與該待測物的距離, 為該投射單元與該取像單元的夾角。 The optical detection method as described in claim 9, wherein the length of a side of an effective imaging range defined by the projection unit and the imaging unit is half , wherein R1 is the distance between the projection unit and the object to be measured, and R2 is the distance between the imaging unit and the object to be measured. is the angle between the projection unit and the imaging unit. 如請求項9所述的光學檢測方法,其中,該投射範圍大於且包含該取像範圍,且一由該投射單元與該取像單元界定之有效取像範圍大於且包含該取像範圍。An optical detection method as described in claim 9, wherein the projection range is larger than and includes the imaging range, and an effective imaging range defined by the projection unit and the imaging unit is larger than and includes the imaging range. 一種光學裝置設計方法,該光學裝置包含一用以投射一光束至一待測物並界定一投射範圍的投射單元,及一用以接收自該待測物反射之光束並界定一取像範圍的取像單元,該取像範圍定義出一長軸及一長度小於該長軸的短軸,該光學裝置設計方法包含以下步驟: 一計算步驟:根據該投射單元與該待測物的距離、該取像單元與該待測物的距離,及該投射單元與該取像單元的夾角計算出一有效取像範圍; 一判斷步驟:根據該計算步驟所計算出的有效取像範圍,判斷該取像範圍是否不大於該有效取像範圍,如判斷結果為是,進行下一步驟; 一測量步驟:該投射單元朝該待測物沿一入射路徑投射光束,並經該待測物反射後沿一反射路徑進入該取像單元,該入射路徑或該反射路徑於一待測平面的投影平行於該短軸的延伸方向。 A method for designing an optical device, the optical device comprising a projection unit for projecting a light beam to an object to be measured and defining a projection range, and an imaging unit for receiving a light beam reflected from the object to be measured and defining an imaging range, the imaging range defining a major axis and a minor axis whose length is less than the major axis, the method for designing an optical device comprising the following steps: A calculation step: calculating an effective imaging range according to the distance between the projection unit and the object to be measured, the distance between the imaging unit and the object to be measured, and the angle between the projection unit and the imaging unit; A judgment step: judging whether the imaging range is not larger than the effective imaging range according to the effective imaging range calculated in the calculation step, and if the judgment result is yes, proceeding to the next step; A measurement step: the projection unit projects a light beam toward the object to be measured along an incident path, and after being reflected by the object to be measured, the light beam enters the imaging unit along a reflection path, and the projection of the incident path or the reflection path on a plane to be measured is parallel to the extension direction of the short axis. 如請求項15所述的光學裝置設計方法,還包含一設置步驟:調整該投射單元與該待測物的距離、該取像單元與該待測物的距離,及該投射單元與該取像單元的夾角其中至少一者,如該判斷步驟結果為否,則進行該設置步驟及該計算步驟。The optical device design method as described in claim 15 further includes a setting step: adjusting at least one of the distance between the projection unit and the object to be measured, the distance between the imaging unit and the object to be measured, and the angle between the projection unit and the imaging unit. If the result of the judgment step is no, the setting step and the calculation step are performed.
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