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TWI867785B - Surface treatment of copper foil, copper clad laminates and printed wiring boards - Google Patents

Surface treatment of copper foil, copper clad laminates and printed wiring boards Download PDF

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Publication number
TWI867785B
TWI867785B TW112138287A TW112138287A TWI867785B TW I867785 B TWI867785 B TW I867785B TW 112138287 A TW112138287 A TW 112138287A TW 112138287 A TW112138287 A TW 112138287A TW I867785 B TWI867785 B TW I867785B
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copper foil
heteroaromatic compound
treated copper
compound layer
layer
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TW112138287A
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TW202421846A (en
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岩沢翔平
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日商Jx金屬股份有限公司
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00Coating not provided for in groups C23C2/00 - C23C24/00
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

本發明係一種表面處理銅箔,其具有銅箔,及形成於上述銅箔之至少一面之雜芳香族化合物層。雜芳香族化合物層含有雜芳香族化合物且Ssk為-2.00~-0.10,上述雜芳香族化合物具有含有氮原子作為雜原子之雜環。The present invention is a surface treated copper foil, which comprises a copper foil and a heteroaromatic compound layer formed on at least one side of the copper foil. The heteroaromatic compound layer contains a heteroaromatic compound and has an Ssk of -2.00 to -0.10, wherein the heteroaromatic compound has a heterocyclic ring containing a nitrogen atom as a heteroatom.

Description

表面處理銅箔、覆銅積層板及印刷配線板Surface treatment of copper foil, copper clad laminates and printed wiring boards

本發明係關於一種表面處理銅箔、覆銅積層板及印刷配線板。The present invention relates to a surface treated copper foil, a copper clad laminate and a printed wiring board.

覆銅積層板於撓性印刷配線板等各種用途中被廣泛使用。該撓性印刷配線板係藉由如下方式製造:對覆銅積層板之銅箔進行蝕刻而形成導體圖案(亦稱為「配線圖案」),藉由焊料將電子零件連接於導體圖案上而進行構裝。Copper clad laminates are widely used in various applications such as flexible printed wiring boards. The flexible printed wiring boards are manufactured by etching the copper foil of the copper clad laminate to form a conductor pattern (also called a "wiring pattern"), and then mounting electronic components on the conductor pattern by soldering.

近年來,於個人電腦、行動終端等電子機器中,隨著通訊之高速化及大容量化,電訊號越來越高頻化,而要求能夠因應其之撓性印刷配線板。尤其是電訊號之頻率越高,則訊號功率之損耗(衰減)越大,越容易無法讀取資料,因此要求降低訊號功率之損耗。In recent years, in electronic devices such as personal computers and mobile terminals, as communication speeds and capacities increase, electrical signals have become increasingly high-frequency, and flexible printed wiring boards are required to cope with this. In particular, the higher the frequency of the electrical signal, the greater the loss (attenuation) of the signal power, making it more likely that data will not be read, so there is a demand to reduce the loss of signal power.

產生電子電路中之訊號功率損耗(傳輸損耗)之原因大體可分為兩種。其一係導體損耗,即由銅箔引起之損耗,其二係介電損耗,即由樹脂基材引起之損耗。 導體損耗具有如下特性,即於高頻帶具有集膚效應,電流於導體表面流動,因此若銅箔表面粗糙,則電流會沿複雜之路徑流動。因此,為了減少高頻訊號之導體損耗,較理想為減小銅箔之表面粗糙度。以下,於本說明書中,於僅記載為「傳輸損耗」及「導體損耗」之情形時,主要意指「高頻訊號之傳輸損耗」及「高頻訊號之導體損耗」。 The causes of signal power loss (transmission loss) in electronic circuits can be roughly divided into two categories. One is conductor loss, which is caused by copper foil, and the other is dielectric loss, which is caused by the resin substrate. Conductor loss has the following characteristics, that is, it has a skinning effect in the high-frequency band, and the current flows on the surface of the conductor. Therefore, if the surface of the copper foil is rough, the current will flow along a complex path. Therefore, in order to reduce the conductor loss of high-frequency signals, it is more ideal to reduce the surface roughness of the copper foil. Hereinafter, in this manual, when only "transmission loss" and "conductor loss" are described, they mainly refer to "transmission loss of high-frequency signals" and "conductor loss of high-frequency signals".

介電損耗則取決於樹脂基材之種類,因此於高頻訊號流動之電路基板中,較理想為使用由低介電材料(例如液晶聚合物、低介電聚醯亞胺)形成之樹脂基材。 為了確保銅箔與樹脂基材之間的接著性,提出有於銅箔之至少一面形成含有粗化粒子之表面處理層。其旨在利用粗化粒子沒入樹脂基材之定錨效應而提高接著性。例如,於專利文獻1提出有如下方法:於銅箔上設置由粗化粒子形成之粗化處理層,並於其上形成防銹處理層。防銹處理層係由鎳-鈷合金鍍覆層、鍍鋅層、鉻酸鹽處理層及矽烷偶合處理層構成。 [先前技術文獻] [專利文獻] Dielectric loss depends on the type of resin substrate. Therefore, in circuit substrates where high-frequency signals flow, it is more ideal to use a resin substrate formed of a low-dielectric material (such as liquid crystal polymer, low-dielectric polyimide). In order to ensure the adhesion between the copper foil and the resin substrate, it is proposed to form a surface treatment layer containing roughened particles on at least one side of the copper foil. It aims to improve the adhesion by utilizing the anchoring effect of the roughened particles immersed in the resin substrate. For example, the following method is proposed in patent document 1: a roughened treatment layer formed by roughened particles is provided on the copper foil, and an anti-rust treatment layer is formed thereon. The anti-rust treatment layer is composed of a nickel-cobalt alloy coating layer, a zinc plating layer, a chromate treatment layer and a silane coupling treatment layer. [Prior art literature] [Patent literature]

[專利文獻1]日本特開2012-112009號公報[Patent Document 1] Japanese Patent Application Publication No. 2012-112009

[發明所欲解決之課題][The problem that the invention wants to solve]

專利文獻1所記載之表面處理銅箔由於必須在銅箔上形成許多層,因此存在其製造所需之時間及成本增加的問題。又,於樹脂基材尤其是低介電材料之中,有時利用粗化粒子之定錨效應無法確保足夠之接著性。The surface treated copper foil described in Patent Document 1 has the problem of increasing the time and cost required for its manufacture because many layers must be formed on the copper foil. In addition, in resin substrates, especially low-dielectric materials, sometimes the anchoring effect of the roughened particles cannot ensure sufficient adhesion.

本發明之實施形態係為了解決如上述之問題而完成者,於一態樣中,目的在於提供一種能夠抑制製造所需之時間及成本,且提高與樹脂基材,尤其是適於高頻用途之樹脂基材之接著性的表面處理銅箔。 又,本發明之實施形態於另一態樣中,目的在於提供一種抑制製造所需之時間及成本,且樹脂基材尤其是適於高頻用途之樹脂基材與表面處理銅箔之間的接著性優異之覆銅積層板。 進而,本發明之實施形態於另一態樣中,目的在於提供一種抑制製造所需之時間及成本,且樹脂基材尤其是適於高頻用途之樹脂基材與電路圖案之間的接著性優異之印刷配線板。 [解決課題之技術手段] The embodiment of the present invention is completed to solve the above-mentioned problems. In one embodiment, the purpose is to provide a surface-treated copper foil that can suppress the time and cost required for manufacturing and improve the adhesion with a resin substrate, especially a resin substrate suitable for high-frequency use. In addition, the embodiment of the present invention in another embodiment aims to provide a copper-clad laminate that suppresses the time and cost required for manufacturing and has excellent adhesion between a resin substrate, especially a resin substrate suitable for high-frequency use, and a surface-treated copper foil. Furthermore, the embodiment of the present invention in another embodiment aims to provide a printed wiring board that suppresses the time and cost required for manufacturing and has excellent adhesion between a resin substrate, especially a resin substrate suitable for high-frequency use, and a circuit pattern. [Technical means to solve the problem]

本發明人等為了解決上述問題而進行潛心研究後,結果驚訝地獲得以下見解:特定之雜芳香族化合物具有提高與樹脂基材之接著性之功能。基於該見解,發現藉由將含有特定之雜芳香族化合物之雜芳香族化合物層形成於銅箔之至少一面,並將其表面之Ssk控制在規定範圍,能夠解決上述問題,而完成本發明之實施形態。After intensive research to solve the above problems, the inventors surprisingly obtained the following insight: specific heteroaromatic compounds have the function of improving adhesion to the resin substrate. Based on this insight, it was found that by forming a heteroaromatic compound layer containing a specific heteroaromatic compound on at least one side of the copper foil and controlling the Ssk of the surface within a specified range, the above problems can be solved, and the implementation form of the present invention is completed.

即,本發明之實施形態於一態樣中,係關於一種表面處理銅箔,其具有銅箔,及形成於上述銅箔之至少一面之雜芳香族化合物層,上述雜芳香族化合物層含有雜芳香族化合物且Ssk為-2.00~-0.10,上述雜芳香族化合物具有含有氮原子作為雜原子之雜環。 又,本發明之實施形態於另一態樣中,係關於一種覆銅積層板,其具備上述表面處理銅箔,及接著於上述表面處理銅箔之上述雜芳香族化合物層之樹脂基材。 進而,本發明之實施形態於另一態樣中,係關於一種印刷配線板,其具備對上述覆銅積層板之上述表面處理銅箔進行蝕刻而形成之電路圖案。 [發明之效果] That is, in one embodiment of the present invention, there is a surface-treated copper foil having a copper foil and a heteroaromatic compound layer formed on at least one side of the copper foil, wherein the heteroaromatic compound layer contains a heteroaromatic compound and has an Ssk of -2.00 to -0.10, and the heteroaromatic compound has a heterocyclic ring containing a nitrogen atom as a heteroatom. In another embodiment of the present invention, there is a copper-clad laminate having the surface-treated copper foil and a resin substrate connected to the heteroaromatic compound layer of the surface-treated copper foil. Furthermore, another embodiment of the present invention relates to a printed wiring board having a circuit pattern formed by etching the surface-treated copper foil of the copper-clad laminate. [Effect of the invention]

若根據本發明之實施形態,則於一態樣中,可提供一種能夠抑制製造所需之時間及成本,且提高與樹脂基材,尤其是適於高頻用途之樹脂基材之接著性的表面處理銅箔。 又,若根據本發明之實施形態,則於另一態樣中,可提供一種抑制製造所需之時間及成本,且樹脂基材尤其是適於高頻用途之樹脂基材與表面處理銅箔之間的接著性優異之覆銅積層板。 進而,若根據本發明之實施形態,則於另一態樣中,可提供一種抑制製造所需之時間及成本,且樹脂基材尤其是適於高頻用途之樹脂基材與電路圖案之間的接著性優異之印刷配線板。 According to an embodiment of the present invention, in one embodiment, a surface-treated copper foil can be provided that can suppress the time and cost required for manufacturing and improve the adhesion with a resin substrate, especially a resin substrate suitable for high-frequency use. Furthermore, according to an embodiment of the present invention, in another embodiment, a copper-clad laminate can be provided that can suppress the time and cost required for manufacturing and has excellent adhesion between a resin substrate, especially a resin substrate suitable for high-frequency use and a surface-treated copper foil. Furthermore, according to an embodiment of the present invention, in another embodiment, a printed wiring board can be provided that can suppress the time and cost required for manufacturing and has excellent adhesion between a resin substrate, especially a resin substrate suitable for high-frequency use and a circuit pattern.

以下,對本發明之較佳實施形態進行具體說明,但本發明不應限定於此等來進行解釋,只要不脫離本發明之主旨,則可基於該行業者之知識進行各種變更、改良等。以下之實施形態所揭示之複數個構成要素可藉由適當之組合而形成各種發明。例如,可自以下之實施形態所揭示之所有構成要素刪除若干構成要素,亦可適當組合不同之實施形態之構成要素。The following specifically describes the preferred embodiments of the present invention, but the present invention should not be limited to these embodiments. As long as they do not deviate from the main purpose of the present invention, various changes and improvements can be made based on the knowledge of the industry. The multiple components disclosed in the following embodiments can form various inventions by appropriate combination. For example, some components can be deleted from all the components disclosed in the following embodiments, and the components of different embodiments can also be appropriately combined.

本發明之實施形態之表面處理銅箔具有銅箔,及形成於銅箔之至少一面之雜芳香族化合物層。 雜芳香族化合物層可僅形成於銅箔之一面,亦可形成於銅箔之兩面。當在銅箔之兩面形成雜芳香族化合物層之情形時,雜芳香族化合物層之種類可相同亦可不同。 The surface-treated copper foil of the embodiment of the present invention has a copper foil and a heteroaromatic compound layer formed on at least one side of the copper foil. The heteroaromatic compound layer may be formed on only one side of the copper foil or on both sides of the copper foil. When the heteroaromatic compound layer is formed on both sides of the copper foil, the types of the heteroaromatic compound layers may be the same or different.

作為銅箔,並無特別限定,可為電解銅箔或壓延銅箔之任一者。 作為銅箔之材料,可使用通常作為印刷配線板之電路圖案來使用之精銅(JIS H3100 合金編號C1100)、無氧銅(JIS H3100 合金編號C1020或JIS H3510 合金編號C1011)等高純度銅。又,例如亦可使用摻Sn之銅、摻Ag之銅、添加有Cr、Zr或Mg等之銅合金、添加有Ni及Si等之卡遜系銅合金之類的銅合金。再者,於本說明書中,所謂「銅箔」,係亦包含銅合金箔之概念。 Copper foil is not particularly limited and may be either electrolytic copper foil or rolled copper foil. As the material of copper foil, high-purity copper such as refined copper (JIS H3100 alloy number C1100) or oxygen-free copper (JIS H3100 alloy number C1020 or JIS H3510 alloy number C1011) commonly used as circuit patterns of printed wiring boards can be used. In addition, copper alloys such as Sn-doped copper, Ag-doped copper, copper alloys with Cr, Zr or Mg added, and Carsonite copper alloys with Ni and Si added can also be used. Furthermore, in this specification, the term "copper foil" also includes the concept of copper alloy foil.

銅箔之厚度並無特別限定,例如可設為1~1000 μm或者1~500 μm或者1~300 μm或者3~100 μm或者5~70 μm或者6~35 μm或者9~18 μm。The thickness of the copper foil is not particularly limited, and may be, for example, 1 to 1000 μm, 1 to 500 μm, 1 to 300 μm, 3 to 100 μm, 5 to 70 μm, 6 to 35 μm, or 9 to 18 μm.

雜芳香族化合物層含有雜芳香族化合物,上述雜芳香族化合物具有含有氮原子作為雜原子之雜環。 雜環之環員數並無特別限定,例如為3~9,較佳為4~6,更佳為5。 雜環所含之雜原子可僅由氮原子構成,亦可由氮原子及其以外之原子(例如氧原子、硫原子等)構成。 雜環所含之雜原子之數量係根據環員數而定,例如為1~5,較佳為1~4,更佳為1~3。 雜環可為飽和環、不飽和環之任一者。此處,所謂不飽和環,係包含部分不飽和環之概念。 The heteroaromatic compound layer contains heteroaromatic compounds, and the heteroaromatic compounds have a heterocyclic ring containing a nitrogen atom as a heteroatom. The number of ring members of the heterocyclic ring is not particularly limited, and is, for example, 3 to 9, preferably 4 to 6, and more preferably 5. The heteroatoms contained in the heterocyclic ring may be composed of nitrogen atoms only, or may be composed of nitrogen atoms and atoms other than nitrogen atoms (such as oxygen atoms, sulfur atoms, etc.). The number of heteroatoms contained in the heterocyclic ring depends on the number of ring members, and is, for example, 1 to 5, preferably 1 to 4, and more preferably 1 to 3. The heterocyclic ring may be any of a saturated ring and an unsaturated ring. Here, the so-called unsaturated ring includes the concept of a partially unsaturated ring.

作為雜環之具體例,可舉:吖啶(含有1個氮原子之不飽和3員環)、二氮吮(含有2個氮原子之不飽和3員環)、吖唉(含有1個氮原子之不飽和4員環)、二吖唉(含有2個氮原子之不飽和4員環)、吡咯(含有1個氮原子之不飽和5員環)、吡咯啶(含有1個氮原子之飽和5員環)、咪唑及吡唑(含有2個氮原子之不飽和5員環)、咪唑啶及吡唑啶(含有2個氮原子之飽和5員環)、唑及異唑(含有1個氮原子及1個氧原子之不飽和5員環)、唑啶及異唑啶(含有1個氮原子及1個氧原子之飽和5員環)、噻唑及異噻唑(含有1個氮原子及1個硫原子之不飽和5員環)、四氫噻唑及異四氫噻唑(含有1個氮原子及1個氧原子之飽和5員環)、1,2,3-三唑或1,2,4-三唑之類的三唑(含有3個氮原子之不飽和5員環)、四唑(含有4個氮原子之不飽和5員環)、五唑(含有5個氮原子之不飽和5員環)、呋呫及二唑(含有2個氮原子及1個氧原子之不飽和5員環)、噻二唑(含有2個氮原子及1個硫原子之不飽和5員環)、二唑(含有1個氮原子及2個氧原子之不飽和5員環)、二噻唑(含有1個氮原子及2個硫原子之不飽和5員環)、四唑(含有4個氮原子及1個氧原子之不飽和5員環)、噻四唑(含有4個氮原子及1個硫原子之不飽和5員環)、吡啶(含有1個氮原子之不飽和6員環)、哌啶(含有1個氮原子之飽和6員環)、二(含有2個氮原子之不飽和6員環)、哌(含有2個氮原子之飽和6員環)、 (含有1個氮原子及1個氧原子之不飽和6員環)、啉(含有1個氮原子及1個氧原子之飽和6員環)、噻(含有1個氮原子及1個硫原子之不飽和6員環)、硫代啉(含有1個氮原子及1個硫原子之飽和6員環)、三(含有3個氮原子之不飽和6員環)、四(含有4個氮原子之不飽和6員環)、五(含有5個氮原子之不飽和6員環)、氮呯(含有1個氮原子之不飽和7員環)、氮雜環庚烷(azepane)(含有1個氮原子之飽和7員環)、二氮呯(含有2個氮原子之不飽和7員環)、二氮雜環庚烷(含有2個氮原子之飽和7員環)、氮環辛四烯(含有1個氮原子之不飽和8員環)、氮雜環辛烷(azocane)(含有1個氮原子之飽和8員環)、偶氮寧(azonine)(含有1個氮原子之不飽和9員環)、氮雜環壬烷(azonane)(含有1個氮原子之飽和9員環)等。此等之中,就穩定地提高與樹脂基材之接著性之觀點,雜環較佳為含有1~3個氮原子之5員環,更佳為含有1~3個氮原子之不飽和5員環(吡咯、咪唑、吡唑、唑、異唑、噻唑、異噻唑、三唑)。Specific examples of heterocyclic rings include acridine (an unsaturated three-membered ring containing one nitrogen atom), diazine (an unsaturated three-membered ring containing two nitrogen atoms), acridine (an unsaturated four-membered ring containing one nitrogen atom), diazine (an unsaturated four-membered ring containing two nitrogen atoms), pyrrole (an unsaturated five-membered ring containing one nitrogen atom), pyrrolidine (a saturated five-membered ring containing one nitrogen atom), imidazole and pyrazole (unsaturated five-membered ring containing two nitrogen atoms), imidazolidinyl and pyrazolidine (saturated five-membered ring containing two nitrogen atoms), Azoles and isothiocyanates Azoles (unsaturated 5-membered rings containing 1 nitrogen atom and 1 oxygen atom), Azolidine and isoxadiazine Azolidine (a saturated 5-membered ring containing 1 nitrogen atom and 1 oxygen atom), thiazole and isothiazole (an unsaturated 5-membered ring containing 1 nitrogen atom and 1 sulfur atom), tetrahydrothiazole and isotetrahydrothiazole (a saturated 5-membered ring containing 1 nitrogen atom and 1 oxygen atom), triazoles such as 1,2,3-triazole or 1,2,4-triazole (an unsaturated 5-membered ring containing 3 nitrogen atoms), tetrazoles (an unsaturated 5-membered ring containing 4 nitrogen atoms), pentazoles (an unsaturated 5-membered ring containing 5 nitrogen atoms), furazolidone and oxadiazole (an unsaturated 5-membered ring containing 2 nitrogen atoms and 1 oxygen atom), thiadiazole (an unsaturated 5-membered ring containing 2 nitrogen atoms and 1 sulfur atom), Azoles (unsaturated 5-membered rings containing 1 nitrogen atom and 2 oxygen atoms), dithiazoles (unsaturated 5-membered rings containing 1 nitrogen atom and 2 sulfur atoms), Tetrazolyl (unsaturated 5-membered ring containing 4 nitrogen atoms and 1 oxygen atom), thiatetrazolyl (unsaturated 5-membered ring containing 4 nitrogen atoms and 1 sulfur atom), pyridine (unsaturated 6-membered ring containing 1 nitrogen atom), piperidine (saturated 6-membered ring containing 1 nitrogen atom), di (unsaturated 6-membered ring containing 2 nitrogen atoms), piperidine (saturated 6-membered ring containing 2 nitrogen atoms), (unsaturated 6-membered ring containing 1 nitrogen atom and 1 oxygen atom), Phytophenone (a saturated six-membered ring containing one nitrogen atom and one oxygen atom), thiophene (unsaturated 6-membered ring containing 1 nitrogen atom and 1 sulfur atom), thio Phytophenone (a saturated six-membered ring containing one nitrogen atom and one sulfur atom), tri (unsaturated 6-membered ring containing 3 nitrogen atoms), tetra (unsaturated 6-membered ring containing 4 nitrogen atoms), five (unsaturated 6-membered ring containing 5 nitrogen atoms), azobenzene (unsaturated 7-membered ring containing 1 nitrogen atom), azepane (saturated 7-membered ring containing 1 nitrogen atom), diazepane (unsaturated 7-membered ring containing 2 nitrogen atoms), diazepane (saturated 7-membered ring containing 2 nitrogen atoms), azocyclooctatetraene (unsaturated 8-membered ring containing 1 nitrogen atom), azocyclooctane (saturated 8-membered ring containing 1 nitrogen atom), azonine (unsaturated 9-membered ring containing 1 nitrogen atom), azonane (saturated 9-membered ring containing 1 nitrogen atom), etc. Among these, from the viewpoint of stably improving the adhesion to the resin substrate, the heterocyclic ring is preferably a 5-membered ring containing 1 to 3 nitrogen atoms, and more preferably an unsaturated 5-membered ring containing 1 to 3 nitrogen atoms (pyrrole, imidazole, pyrazole, Azoles, Isopropylamine azole, thiazole, isothiazole, triazole).

具有雜環之雜芳香族化合物可為苯環與雜環之縮合環化合物、2個以上之雜環之縮合環化合物或雜環之單環化合物。 作為苯環與雜環之縮合環化合物,並無特別限定,例如可舉:吲哚、吲唑、異吲哚、苯并咪唑、苯并三唑、喹啉、異喹啉、喹唑啉、喹啉、啉、吖啶、咔唑等。 作為2個以上之雜環之縮合環化合物並無特別限定,例如可舉:三唑并吡啶、嘌呤、喋啶等。 作為雜環之單環化合物,並無特別限定,可舉作為雜環而於上述所例示之化合物。 再者,上述縮合環化合物及單環化合物亦可具有取代基。作為取代基,並無特別限定。作為取代基,例如可舉:甲基或乙基等烷基、乙烯基、硝基等。 The heteroaromatic compound having a heterocyclic ring may be a condensed ring compound of a benzene ring and a heterocyclic ring, a condensed ring compound of two or more heterocyclic rings, or a heterocyclic monocyclic compound. The condensed ring compound of a benzene ring and a heterocyclic ring is not particularly limited, and examples thereof include indole, indazole, isoindole, benzimidazole, benzotriazole, quinoline, isoquinoline, quinazoline, quinoline, and the like. Phosphine, The condensed ring compound of two or more heterocyclic rings is not particularly limited, and examples thereof include triazolopyridine, purine, pteridine, etc. The monocyclic compound of the heterocyclic ring is not particularly limited, and examples thereof include the compounds exemplified above as heterocyclic rings. Furthermore, the condensed ring compound and the monocyclic compound may also have a substituent. There is no particular limitation on the substituent. Examples of the substituent include alkyl groups such as methyl and ethyl, vinyl groups, and nitro groups.

雜芳香族化合物層係含有上述雜芳香族化合物之層。 雜芳香族化合物層所含之雜芳香族化合物可為單一種類,亦可為2種以上之不同種類。 又,雜芳香族化合物層亦可於不損害本發明之實施形態所達成之效果的範圍內,含有除雜芳香族化合物以外之成分。作為該成分,可舉於形成雜芳香族化合物層時混入之溶劑或添加劑等。 The heteroaromatic compound layer is a layer containing the above-mentioned heteroaromatic compound. The heteroaromatic compound contained in the heteroaromatic compound layer may be a single type or may be two or more different types. In addition, the heteroaromatic compound layer may contain components other than the heteroaromatic compound within the range that does not impair the effect achieved by the embodiment of the present invention. Such components include solvents or additives mixed in when forming the heteroaromatic compound layer.

與包含粗化處理層之以往的表面處理層相比,雜芳香族化合物層之峰部少。即,雜芳香族化合物層之平滑性高。其原因在於,包含粗化處理層之以往的表面處理層係藉由定錨效應來提高表面處理層與樹脂基材之間的接著性,而雜芳香族化合物層並非旨在獲得由定錨效應所帶來之接著性提升效果。即,雜芳香族化合物層係藉由雜芳香族化合物之接著特性來提高表面處理銅箔與樹脂基材之間的接著性,故而即便表面之峰部及谷部少,亦能夠獲得所要之接著性提升效果。又,雜芳香族化合物層相較於包含粗化處理層之以往的表面處理層,由於表面之平滑性高,因此能夠減少由集膚效應引起之傳輸損耗。Compared with the conventional surface treatment layer including the roughening treatment layer, the hybrid aromatic compound layer has fewer peaks. That is, the hybrid aromatic compound layer has high smoothness. The reason is that the conventional surface treatment layer including the roughening treatment layer improves the adhesion between the surface treatment layer and the resin substrate by the anchoring effect, while the hybrid aromatic compound layer is not intended to obtain the adhesion improvement effect brought about by the anchoring effect. That is, the hybrid aromatic compound layer improves the adhesion between the surface treated copper foil and the resin substrate by the adhesion characteristics of the hybrid aromatic compound, so even if there are fewer peaks and valleys on the surface, the desired adhesion improvement effect can be obtained. Furthermore, the heteroaromatic compound layer has a higher surface smoothness than conventional surface treatment layers including a roughening treatment layer, and thus can reduce transmission loss caused by the skin collection effect.

作為表示表面之平滑性的指標之一,可使用為表示表面之峰部及谷部之分佈之指標的Ssk(歪度)。Ssk係由ISO 25178-2:2012規定之高度方向的參數,表示相對於表面之平均表面之峰部及谷部的對稱性。於Ssk為0之情形時,表示峰部及谷部對稱分佈。又,若Ssk大於0,則意指表面之峰部多於谷部,若Ssk小於0,則意指表面之谷部多於峰部。 雜芳香族化合物層之Ssk為-2.00~-0.10。即,雜芳香族化合物層表面之谷部多於峰部。由於包含粗化處理層之表面處理層的峰部多,因此可謂雜芳香族化合物層表面之平滑性高。由於Ssk控制在此種範圍之雜芳香族化合物層平滑,故而可獲得由雜芳香族化合物之接著特性所帶來之表面處理銅箔與樹脂基材之間的接著性提升效果。又,亦可獲得降低傳輸損耗之效果。 就穩定地獲得上述效果之觀點,雜芳香族化合物層之Ssk較佳為-2.00~-0.50,更佳為-2.00~-0.80,進而較佳為-1.50~-0.80。 再者,雜芳香族化合物層之Ssk可依據ISO 25178-2:2012來測定。 As one of the indicators indicating the smoothness of the surface, Ssk (skewness) can be used as an indicator indicating the distribution of peaks and valleys on the surface. Ssk is a parameter in the height direction specified by ISO 25178-2:2012, which indicates the symmetry of the peaks and valleys relative to the average surface of the surface. When Ssk is 0, it means that the peaks and valleys are symmetrically distributed. In addition, if Ssk is greater than 0, it means that the peaks on the surface are more than the valleys, and if Ssk is less than 0, it means that the valleys on the surface are more than the peaks. The Ssk of the heteroaromatic compound layer is -2.00 to -0.10. That is, the surface of the heteroaromatic compound layer has more valleys than peaks. Since the surface treatment layer including the roughening treatment layer has many peaks, it can be said that the surface smoothness of the heteroaromatic compound layer is high. Since the heteroaromatic compound layer with Ssk controlled within this range is smooth, the adhesion between the surface-treated copper foil and the resin substrate can be improved due to the adhesion characteristics of the heteroaromatic compound. In addition, the effect of reducing transmission loss can also be achieved. From the perspective of stably obtaining the above effects, the Ssk of the heteroaromatic compound layer is preferably -2.00 to -0.50, more preferably -2.00 to -0.80, and further preferably -1.50 to -0.80. Furthermore, the Ssk of the heteroaromatic compound layer can be measured in accordance with ISO 25178-2:2012.

相較於包含粗化處理層之以往的表面處理層,雜芳香族化合物層由於不存在粗化粒子,因此表面之峰部少。作為表示此種雜芳香族化合物層表面之峰部比例的指標,可使用Vmp(峰部之實體部體積)。Vmp係由ISO 25178-2:2012規定之功能(體積)參數,表示雜芳香族化合物層之峰部的實體部體積。 Vmp可藉由如下方式特定:依據ISO 25178-2:2012,測定表面性狀粗糙度,對根據測定資料算出之負載曲線進行解析。 於說明負載曲線時,首先對負載面積率進行說明。 所謂負載面積率,係指將相當於立體之測定對象物經於某高度面切斷之情形時之測定對象物之剖面的區域除以測定視野之面積而求得之比例。再者,於本發明中,假定銅箔或表面處理銅箔之雜芳香族化合物層等作為測定對象物。負載曲線係表示各高度處之負載面積率的曲線。負載面積率0%附近表示測定對象物之最高部分的高度,而負載面積率100%附近之高度則表示測定對象物之最低部分的高度。 Compared to the conventional surface treatment layer including the roughening treatment layer, the heteroaromatic compound layer has fewer peaks on the surface because there are no roughening particles. As an indicator of the peak ratio on the surface of such a heteroaromatic compound layer, Vmp (solid volume of the peak) can be used. Vmp is a functional (volume) parameter specified by ISO 25178-2:2012, which represents the solid volume of the peak of the heteroaromatic compound layer. Vmp can be specified as follows: According to ISO 25178-2:2012, the surface roughness is measured and the load curve calculated from the measured data is analyzed. When explaining the load curve, the load area ratio is explained first. The so-called loading area ratio refers to the ratio obtained by dividing the area of the cross section of the three-dimensional object to be measured when it is cut at a certain height by the area of the measurement field of view. Furthermore, in the present invention, it is assumed that the copper foil or the mixed aromatic compound layer of the surface-treated copper foil is used as the measurement object. The loading curve is a curve representing the loading area ratio at each height. The height near the loading area ratio of 0% represents the height of the highest part of the measurement object, and the height near the loading area ratio of 100% represents the height of the lowest part of the measurement object.

繼而,圖1中揭示負載曲線之一例。可靈活利用負載曲線來表現雜芳香族化合物層之實體部體積及空間部體積。所謂實體部體積,相當於測定視野中測定對象物之實體所占之部分的體積,而所謂空間部體積,則相當於測定視野中實體部分之間的空間所占的體積。於負載曲線中,以負載面積率為10%及80%之位置為邊界而分為谷部、核心部及峰部。若參照圖1並對應於本發明之實施形態之雜芳香族化合物層來進行說明,則Vvv意指雜芳香族化合物層之谷部的空間部體積,Vvc意指雜芳香族化合物層之核心部的空間部體積,Vmp意指雜芳香族化合物層之峰部的實體部體積,Vmc意指雜芳香族化合物層之核心部的實體部體積。 再者,所謂峰部,係測定對象物中高度高之部分。而所謂谷部,則是測定對象物中高度低之部分。所謂核心部,係測定對象物中峰部與谷部以外之部分,即接近於平均之高度的部分。 Next, an example of a loading curve is shown in Figure 1. The loading curve can be flexibly used to represent the solid volume and space volume of the heteroaromatic compound layer. The so-called solid volume is equivalent to the volume of the solid part of the measured object in the measurement field, and the so-called space volume is equivalent to the volume of the space between the solid parts in the measurement field. In the loading curve, the positions where the loading area ratio is 10% and 80% are used as boundaries to divide it into the valley, the core and the peak. If referring to FIG. 1 and corresponding to the heteroaromatic compound layer of the embodiment of the present invention, Vvv means the spatial volume of the valley of the heteroaromatic compound layer, Vvc means the spatial volume of the core of the heteroaromatic compound layer, Vmp means the solid volume of the peak of the heteroaromatic compound layer, and Vmc means the solid volume of the core of the heteroaromatic compound layer. Furthermore, the peak is the part with a high height in the object to be measured. The valley is the part with a low height in the object to be measured. The core is the part other than the peak and valley in the object to be measured, that is, the part close to the average height.

峰部之實體部體積Vmp係峰部即測定對象物之高度高之部分的實體部體積,意指雜芳香族化合物層中高度特別高之部分的實體部之體積。 雜芳香族化合物層之Vmp較佳為0.001~0.010 μm 3/μm 2,更佳為0.001~0.006 μm 3/μm 2。為高度特別高之部分之實體部體積的Vmp其範圍為此種範圍,意指雜芳香族化合物層平滑。而且,藉由將Vmp控制在此種範圍,可獲得由雜芳香族化合物之接著特性所帶來之表面處理銅箔與樹脂基材之間的接著性提升效果。又,亦可獲得降低傳輸損耗之效果。 再者,雜芳香族化合物層之Vmp可依據ISO 25178-2:2012來測定。 The peak solid volume Vmp is the solid volume of the peak, i.e., the part of the object to be measured with a high height, which means the solid volume of the part of the heteroaromatic compound layer with a particularly high height. The Vmp of the heteroaromatic compound layer is preferably 0.001 to 0.010 μm 3 /μm 2 , and more preferably 0.001 to 0.006 μm 3 /μm 2. The range of the Vmp of the solid volume of the part with a particularly high height is such a range, which means that the heteroaromatic compound layer is smooth. Moreover, by controlling Vmp within such a range, the adhesion between the surface-treated copper foil and the resin substrate can be improved due to the adhesion characteristics of the heteroaromatic compound. In addition, the effect of reducing transmission loss can also be obtained. Furthermore, the Vmp of the heteroaromatic layer can be determined according to ISO 25178-2:2012.

雜芳香族化合物層相較於包含粗化處理層之以往的表面處理層,由於不存在粗化粒子,故為平滑。此種雜芳香族化合物層其表面之谷部亦變淺。作為表示谷部之深度的指標,可使用Sv(谷部之最大谷深度)。Sv係由ISO 25178-2:2012規定之高度參數,表示距雜芳香族化合物層表面之平均表面之高度的最小值。 雜芳香族化合物層之Sv較佳為1.50 μm以下,更佳為0.10~1.25 μm,進而較佳為0.50~1.20 μm。藉由將Sv控制在此種範圍,可獲得由雜芳香族化合物之接著特性所帶來之表面處理銅箔與樹脂基材之間的接著性提升效果。又,亦可獲得降低傳輸損耗之效果。 再者,雜芳香族化合物層之Sv可依據ISO 25178-2:2012來測定。 Compared to the conventional surface treatment layer including the roughening treatment layer, the heteroaromatic compound layer is smoother because there are no roughening particles. The surface valleys of this heteroaromatic compound layer are also shallower. As an indicator of the depth of the valley, Sv (maximum valley depth of the valley) can be used. Sv is a height parameter specified by ISO 25178-2:2012, which indicates the minimum value of the height from the average surface of the heteroaromatic compound layer surface. The Sv of the heteroaromatic compound layer is preferably less than 1.50 μm, more preferably 0.10 to 1.25 μm, and further preferably 0.50 to 1.20 μm. By controlling Sv within this range, the adhesion between the surface-treated copper foil and the resin substrate can be improved due to the adhesion characteristics of the heteroaromatic compound. In addition, the effect of reducing transmission loss can also be achieved. Furthermore, the Sv of the heteroaromatic compound layer can be measured according to ISO 25178-2:2012.

本發明之實施形態的表面處理銅箔較佳為銅箔與雜芳香族化合物層直接接觸,但亦可於不損害本發明之實施形態之效果的範圍內,於銅箔與雜芳香族化合物層之間設置有功能層。作為功能層,例如可舉:耐熱處理層、防銹處理層、鉻酸鹽處理層等。The surface treated copper foil of the embodiment of the present invention is preferably in direct contact with the heteroaromatic compound layer, but a functional layer may be provided between the copper foil and the heteroaromatic compound layer within the scope of not damaging the effect of the embodiment of the present invention. Examples of the functional layer include: a heat resistant treatment layer, a rustproof treatment layer, a chromate treatment layer, etc.

作為本發明之實施形態的表面處理銅箔製造方法,並無特別限定,例如可藉由以下方法來製造。 首先,藉由該技術領域中公知方法來製造銅箔。例如,於使用電解銅箔作為銅箔之情形時,一般而言,可藉由自硫酸銅鍍浴使銅電解沉積至鈦或不鏽鋼之滾筒上而製造。又,於使用壓延銅箔作為銅箔之情形時,一般而言,可藉由依序對銅錠進行均質化退火、熱軋、冷軋、退火等而製造。或者,由於市售有銅箔,因此亦可使用市售品。但是,於使用市售品之銅箔的情形時,有時防銹劑或油等會附著於銅箔表面,因此對銅箔進行脫脂及酸洗。其原因在於,若於銅箔表面形成有各種表面處理層,則難以於銅箔表面形成雜芳香族化合物層。 The method for manufacturing the surface-treated copper foil as an embodiment of the present invention is not particularly limited, and can be manufactured, for example, by the following method. First, the copper foil is manufactured by a known method in the technical field. For example, when electrolytic copper foil is used as the copper foil, it can generally be manufactured by electrolytically depositing copper from a copper sulfate bath on a titanium or stainless steel drum. In addition, when rolled copper foil is used as the copper foil, it can generally be manufactured by sequentially subjecting the copper ingot to homogenization annealing, hot rolling, cold rolling, annealing, etc. Alternatively, since copper foil is commercially available, commercially available products can also be used. However, when using commercially available copper foil, rust-proofing agents or oils may adhere to the surface of the copper foil, so the copper foil is degreased and pickled. The reason is that if various surface treatment layers are formed on the surface of the copper foil, it is difficult to form a mixed aromatic compound layer on the surface of the copper foil.

繼而,準備雜芳香族化合物之塗佈液。塗佈液可含有水等溶劑或添加劑等。又,關於塗佈液中之雜芳香族化合物的濃度,根據使用之雜芳香族化合物的種類等進行調整即可,並無特別限定,例如為0.1~10質量%。 繼而,藉由將雜芳香族化合物之塗佈液塗佈於銅箔表面並使之乾燥,而形成雜芳香族化合物層。作為塗佈方法,並無特別限定,例如可使用浸漬、噴塗、淋幕式平面塗佈機塗裝、輥式塗佈機塗裝、毛刷塗裝、羅拉毛刷塗裝等各種方法。又,作為乾燥方法,並無特別限定,根據使用之溶劑的種類選擇常溫乾燥或加熱乾燥即可。雜芳香族化合物之塗佈液的塗佈及乾燥進行1次即可,但亦可進行複數次以形成所要厚度之雜芳香族化合物層。 再者,雜芳香族化合物層之Ssk、Vmp及Sv主要可藉由對形成雜芳香族化合物層之銅箔的表面粗糙度進行調整,來加以控制。銅箔之粗糙度可藉由調整銅箔之製造條件、雜芳香族化合物層形成前之脫脂條件或酸洗條件等來控制。 Next, prepare a coating liquid of a mixed aromatic compound. The coating liquid may contain a solvent such as water or an additive. In addition, the concentration of the mixed aromatic compound in the coating liquid can be adjusted according to the type of mixed aromatic compound used, and is not particularly limited, for example, 0.1 to 10% by mass. Next, a mixed aromatic compound layer is formed by applying the coating liquid of the mixed aromatic compound to the surface of the copper foil and drying it. There is no particular limitation on the coating method, for example, various methods such as dipping, spraying, curtain-type flat coating machine coating, roll-type coating machine coating, brush coating, roller brush coating, etc. can be used. In addition, there is no particular limitation on the drying method, and room temperature drying or heating drying can be selected according to the type of solvent used. The coating and drying of the doped aromatic compound coating liquid can be performed once, but can also be performed multiple times to form a doped aromatic compound layer of the desired thickness. Furthermore, the Ssk, Vmp and Sv of the doped aromatic compound layer can be controlled mainly by adjusting the surface roughness of the copper foil forming the doped aromatic compound layer. The roughness of the copper foil can be controlled by adjusting the manufacturing conditions of the copper foil, the degreasing conditions or the pickling conditions before the doped aromatic compound layer is formed, etc.

本發明之實施形態的表面處理銅箔具有含有特定之雜芳香族化合物的雜芳香族化合物層,且將雜芳香族化合物層之Ssk控制在-2.00~-0.10,因此能夠抑制製造所需之時間及成本,並且提高與樹脂基材,尤其是適於高頻用途之樹脂基材的接著性。The surface treated copper foil of the embodiment of the present invention has a heteroaromatic compound layer containing a specific heteroaromatic compound, and the Ssk of the heteroaromatic compound layer is controlled within -2.00 to -0.10, thereby being able to suppress the time and cost required for manufacturing and improving the adhesion with a resin substrate, especially a resin substrate suitable for high-frequency applications.

本發明之實施形態的覆銅積層板,具備上述表面處理銅箔,及接著於該表面處理銅箔之雜芳香族化合物層的樹脂基材。 該覆銅積層板可藉由將樹脂基材接著於上述表面處理銅箔之雜芳香族化合物層而製造。 作為樹脂基材,並無特別限定,可使用該技術領域中公知者。作為樹脂基材之例,可舉:紙基材酚樹脂、紙基材環氧樹脂、合成纖維布基材環氧樹脂、玻璃布-紙複合基材環氧樹脂、玻璃布-玻璃不織布複合基材環氧樹脂、玻璃布基材環氧樹脂、聚酯膜、聚醯亞胺樹脂、液晶聚合物、氟樹脂等。此等之中,樹脂基材較佳為聚醯亞胺樹脂。又,樹脂基材亦可由低介電材料形成。作為低介電材料之例,可舉液晶聚合物、低介電聚醯亞胺等。 The copper-clad laminate of the embodiment of the present invention has the surface-treated copper foil and a resin substrate connected to the surface-treated copper foil and the mixed aromatic compound layer. The copper-clad laminate can be manufactured by connecting the resin substrate to the mixed aromatic compound layer of the surface-treated copper foil. The resin substrate is not particularly limited, and those known in the technical field can be used. Examples of resin substrates include: paper-based phenolic resins, paper-based epoxy resins, synthetic fiber cloth-based epoxy resins, glass cloth-paper composite-based epoxy resins, glass cloth-glass non-woven composite-based epoxy resins, glass cloth-based epoxy resins, polyester films, polyimide resins, liquid crystal polymers, fluororesins, etc. Among these, the resin substrate is preferably polyimide resin. In addition, the resin substrate can also be formed from a low dielectric material. Examples of low dielectric materials include liquid crystal polymers, low dielectric polyimides, etc.

作為表面處理銅箔與樹脂基材之接著方法,並無特別限定,可依據該技術領域中公知方法進行。例如,將表面處理銅箔與樹脂基材積層並進行熱壓接合即可。 以如上方式製造之覆銅積層板,可用於印刷配線板之製造。 There is no particular limitation on the method for bonding the surface-treated copper foil and the resin substrate, and the bonding can be carried out according to a known method in the technical field. For example, the surface-treated copper foil and the resin substrate can be laminated and bonded by heat pressing. The copper-clad laminate manufactured in the above manner can be used for the manufacture of printed wiring boards.

本發明之實施形態的覆銅積層板由於使用上述表面處理銅箔,因此可抑制製造所需之時間及成本,並且提高樹脂基材,尤其是適於高頻用途之樹脂基材與表面處理銅箔之間的接著性。The copper-clad laminate of the embodiment of the present invention uses the surface-treated copper foil, thereby reducing the time and cost required for manufacturing and improving the adhesion between the resin substrate, especially the resin substrate suitable for high-frequency applications, and the surface-treated copper foil.

本發明之實施形態的印刷配線板,具備對上述覆銅積層板之表面處理銅箔進行蝕刻而形成之電路圖案。 該印刷配線板可藉由對上述覆銅積層板之表面處理銅箔進行蝕刻而形成電路圖案來製造。作為電路圖案之形成方法,並無特別限定,可使用減成法、半加成法等公知方法。其中,電路圖案之形成方法較佳為減成法。 The printed wiring board of the embodiment of the present invention has a circuit pattern formed by etching the surface-treated copper foil of the copper-clad laminate. The printed wiring board can be manufactured by etching the surface-treated copper foil of the copper-clad laminate to form a circuit pattern. There is no particular limitation on the method for forming the circuit pattern, and known methods such as a subtractive method and a semi-additive method can be used. Among them, the method for forming the circuit pattern is preferably a subtractive method.

於藉由減成法製造印刷配線板之情形時,較佳以如下方式進行。首先,於覆銅積層板之表面處理銅箔的表面塗佈阻劑,進行曝光及顯影,藉此形成規定之阻劑圖案。繼而,藉由蝕刻去除未形成阻劑圖案之部分(不需要之部分)的表面處理銅箔,形成電路圖案。最後,去除表面處理銅箔上之阻劑圖案。 再者,該減成法中之各種條件並無特別限定,可依據該技術領域中公知之條件進行。 When a printed wiring board is manufactured by a subtractive method, it is preferably carried out as follows. First, a resist is applied to the surface of the surface-treated copper foil of the copper-clad laminate, and exposure and development are performed to form a prescribed resist pattern. Then, the surface-treated copper foil where the resist pattern is not formed (unnecessary portion) is removed by etching to form a circuit pattern. Finally, the resist pattern on the surface-treated copper foil is removed. Furthermore, the various conditions in the subtractive method are not particularly limited and can be performed according to the conditions known in the technical field.

本發明之實施形態的印刷配線板由於使用上述覆銅積層板,因此可抑制製造所需之時間及成本,並且提高樹脂基材,尤其是適於高頻用途之樹脂基材與電路圖案之間的接著性。 [實施例] Since the printed wiring board of the embodiment of the present invention uses the above-mentioned copper-clad multilayer board, the time and cost required for manufacturing can be reduced, and the adhesion between the resin substrate, especially the resin substrate suitable for high-frequency use, and the circuit pattern can be improved. [Example]

以下,藉由實施例進一步具體地對本發明之實施形態進行說明,但本發明不受該等實施例任何限定。Hereinafter, the embodiments of the present invention will be described in more detail, but the present invention is not limited to these embodiments.

(實施例1) 準備市售之壓延銅箔(JX金屬股份有限公司製造之HA-V2;厚度12 μm)作為銅箔,對銅箔之兩面進行脫脂及酸洗。脫脂係藉由如下方式實施:於20 g/L之GN清潔液87(JX金屬商事股份有限公司)水溶液中,在電流密度11.3 A/dm 2、時間8.6秒之條件下對壓延銅箔之表面進行電解。又,酸洗係藉由在20 g/L之硫酸水溶液中浸漬30秒而實施。 繼而,使用下述式(1)所表示之苯并三唑作為雜芳香族化合物,準備苯并三唑之水溶液(塗佈液)。水溶液中之苯并三唑之濃度設為1質量%。 (Example 1) A commercially available rolled copper foil (HA-V2 manufactured by JX Metal Co., Ltd.; thickness 12 μm) is prepared as a copper foil, and both sides of the copper foil are degreased and pickled. Degreasing is carried out in the following manner: the surface of the rolled copper foil is electrolyzed in a 20 g/L aqueous solution of GN cleaning liquid 87 (JX Metal Trading Co., Ltd.) at a current density of 11.3 A/dm 2 and a time of 8.6 seconds. In addition, pickling is carried out by immersing in a 20 g/L aqueous solution of sulfuric acid for 30 seconds. Next, using benzotriazole represented by the following formula (1) as a heteroaromatic compound, an aqueous solution of benzotriazole (coating solution) is prepared. The concentration of benzotriazole in the aqueous solution is set to 1 mass %.

繼而,將銅箔浸漬於苯并三唑之水溶液30秒後,進行水洗,利用乾燥機使之乾燥。以此方式,獲得於銅箔表面形成有苯并三唑層(雜芳香族化合物層)之表面處理銅箔。Next, the copper foil was immersed in an aqueous solution of benzotriazole for 30 seconds, then washed with water and dried in a dryer. In this way, a surface-treated copper foil having a benzotriazole layer (heteroaromatic compound layer) formed on the surface of the copper foil was obtained.

(實施例2) 除了使用下述式(2)所表示之吲唑作為雜芳香族化合物以外,藉由與實施例1相同之條件,獲得於銅箔表面形成有吲唑層(雜芳香族化合物層)之表面處理銅箔。 (Example 2) Except for using indazole represented by the following formula (2) as the heteroaromatic compound, a surface-treated copper foil having an indazole layer (heteroaromatic compound layer) formed on the surface of the copper foil is obtained by the same conditions as in Example 1.

(實施例3) 除了使用下述式(3)所表示之苯并咪唑作為雜芳香族化合物以外,藉由與實施例1相同之條件,獲得於銅箔表面形成有苯并咪唑層(雜芳香族化合物層)之表面處理銅箔。 (Example 3) Except for using the benzimidazole represented by the following formula (3) as the heteroaromatic compound, a surface-treated copper foil having a benzimidazole layer (heteroaromatic compound layer) formed on the surface of the copper foil is obtained by the same conditions as in Example 1.

(實施例4) 除了使用下述式(4)所表示之吲哚作為雜芳香族化合物以外,藉由與實施例1相同之條件,獲得於銅箔表面形成有吲哚層(雜芳香族化合物層)之表面處理銅箔。 (Example 4) Except for using indole represented by the following formula (4) as the heteroaromatic compound, a surface-treated copper foil having an indole layer (heteroaromatic compound layer) formed on the surface of the copper foil is obtained by the same conditions as in Example 1.

(實施例5) 除了使用下述式(5)所表示之三唑并吡啶作為雜芳香族化合物以外,藉由與實施例1相同之條件,獲得於銅箔表面形成有三唑并吡啶層(雜芳香族化合物層)之表面處理銅箔。 (Example 5) Except for using the triazolopyridine represented by the following formula (5) as the heteroaromatic compound, a surface-treated copper foil having a triazolopyridine layer (heteroaromatic compound layer) formed on the surface of the copper foil is obtained by the same conditions as in Example 1.

(實施例6) 除了使用下述式(6)所表示之1-甲基苯并三唑作為雜芳香族化合物以外,藉由與實施例1相同之條件,獲得於銅箔表面形成有1-甲基苯并三唑層(雜芳香族化合物層)之表面處理銅箔。 (Example 6) Except for using 1-methylbenzotriazole represented by the following formula (6) as the heteroaromatic compound, a surface-treated copper foil having a 1-methylbenzotriazole layer (heteroaromatic compound layer) formed on the surface of the copper foil is obtained by the same conditions as in Example 1.

(實施例7) 除了使用下述式(7)所表示之5-甲基苯并三唑作為雜芳香族化合物以外,藉由與實施例1相同之條件,獲得於銅箔表面形成有5-甲基苯并三唑層(雜芳香族化合物層)之表面處理銅箔。 (Example 7) Except for using 5-methylbenzotriazole represented by the following formula (7) as the heteroaromatic compound, a surface-treated copper foil having a 5-methylbenzotriazole layer (heteroaromatic compound layer) formed on the surface of the copper foil is obtained by the same conditions as in Example 1.

(實施例8) 除了使用下述式(8)所表示之1,2,3-三唑作為雜芳香族化合物以外,藉由與實施例1相同之條件,獲得於銅箔表面形成有1,2,3-三唑層(雜芳香族化合物層)之表面處理銅箔。 (Example 8) Except for using 1,2,3-triazole represented by the following formula (8) as the heteroaromatic compound, a surface-treated copper foil having a 1,2,3-triazole layer (heteroaromatic compound layer) formed on the surface of the copper foil is obtained by the same conditions as in Example 1.

(比較例1) 將市售之壓延銅箔(JX金屬股份有限公司製造之HA-V2;厚度12 μm)之兩面經脫脂及酸洗者(未形成有雜芳香族化合物層之銅箔)作為比較樣品。再者,脫脂及酸洗係於與實施例1相同之條件下進行。 (Comparative Example 1) A commercially available rolled copper foil (HA-V2 manufactured by JX Metal Co., Ltd.; thickness 12 μm) that was degreased and pickled on both sides (copper foil without a doped aromatic compound layer) was used as a comparative sample. Furthermore, the degreasing and pickling were performed under the same conditions as in Example 1.

(比較例2) 於與實施例1相同之條件下,對市售之壓延銅箔(JX金屬股份有限公司製造之HA-V2;厚度12 μm)之兩面進行脫脂及酸洗。 繼而,藉由在銅箔表面依序形成粗化處理層、防銹層及矽烷偶合處理層,而獲得表面處理銅箔。用以形成各層之條件如下述。 (Comparative Example 2) Under the same conditions as in Example 1, both sides of a commercially available rolled copper foil (HA-V2 manufactured by JX Metal Co., Ltd.; thickness 12 μm) were degreased and pickled. Then, a surface-treated copper foil was obtained by sequentially forming a roughening treatment layer, an anti-rust layer, and a silane coupling treatment layer on the surface of the copper foil. The conditions for forming each layer are as follows.

<粗化處理層> 藉由電鍍形成粗化處理層。電鍍分3個階段進行。再者,鍍覆液組成及電流密度基本上為將小數點後第一位進行四捨五入所得之值。 (第1階段之條件) 鍍覆液組成:11 g/L之Cu、50 g/L之硫酸 鍍覆液溫度:27℃ 電鍍條件:電流密度40 A/dm 2、時間1.4秒 (第2階段之條件) 鍍覆液組成:20 g/L之Cu、100 g/L之硫酸 鍍覆液溫度:50℃ 電鍍條件:電流密度5 A/dm 2、時間2.0秒 (第3階段之條件) 鍍覆液組成:16 g/L之Cu、8 g/L之Co、10 g/L之Ni 鍍覆液pH:2.4 鍍覆液溫度:36℃ 電鍍條件:電流密度32 A/dm 2、時間0.2秒 <Roughening layer> The roughening layer is formed by electroplating. Electroplating is performed in three stages. The composition of the plating solution and the current density are basically the values obtained by rounding off the first decimal point. (Conditions for the first stage) Plating solution composition: 11 g/L Cu, 50 g/L sulfuric acid Plating solution temperature: 27°C Electroplating conditions: current density 40 A/dm 2 , time 1.4 seconds (Conditions for the second stage) Plating solution composition: 20 g/L Cu, 100 g/L sulfuric acid Plating solution temperature: 50°C Electroplating conditions: current density 5 A/dm 2 , time 2.0 seconds (Conditions for the third stage) Plating solution composition: 16 g/L Cu, 8 g/L Co, 10 g/L Ni Plating solution pH: 2.4 Plating solution temperature: 36°C Electroplating conditions: current density 32 A/dm 2 , time 0.2 seconds

<防銹層> 藉由電鍍形成防銹層。電鍍分3個階段進行。 (第1階段之條件) 鍍覆液組成:3 g/L之Co、13 g/L之Ni 鍍覆液pH:2.0 鍍覆液溫度:50℃ 電鍍條件:電流密度2 A/dm 2、時間0.8秒 (第2階段之條件) 鍍覆液組成:5 g/L之Zn、24 g/L之Ni 鍍覆液pH:3.6 鍍覆液溫度:40℃ 電鍍條件:電流密度4 A/dm 2、時間0.4秒 (第3階段之條件) 鍍覆液組成:3 g/L之K 2Cr 2O 7、0.3 g/L之Zn 鍍覆液pH:3.7 鍍覆液溫度:55℃ 電鍍條件:電流密度3 A/dm 2、時間0.8秒 <Anti-rust layer> Anti-rust layer is formed by electroplating. Electroplating is carried out in 3 stages. (Conditions for the first stage) Plating solution composition: 3 g/L Co, 13 g/L Ni Plating solution pH: 2.0 Plating solution temperature: 50°C Electroplating conditions: current density 2 A/dm 2 , time 0.8 seconds (Conditions for the second stage) Plating solution composition: 5 g/L Zn, 24 g/L Ni Plating solution pH: 3.6 Plating solution temperature: 40°C Electroplating conditions: current density 4 A/dm 2 , time 0.4 seconds (Conditions for the third stage) Plating solution composition: 3 g/L K 2 Cr 2 O 7 , 0.3 g/L Zn Plating solution pH: 3.7 Plating solution temperature: 55°C Electroplating conditions: current density 3 A/dm 2 , time 0.8 seconds

<矽烷偶合處理層> 塗佈N-2-(胺基乙基)-3-胺基丙基三甲氧基矽烷(信越化學工業股份有限公司製造之KBM603)之4.0體積%水溶液(pH:10.4),使之乾燥,藉此形成矽烷偶合處理層。 <Silane coupling treatment layer> A 4.0 volume % aqueous solution (pH: 10.4) of N-2-(aminoethyl)-3-aminopropyltrimethoxysilane (KBM603 manufactured by Shin-Etsu Chemical Co., Ltd.) was applied and dried to form a silane coupling treatment layer.

(比較例3) 於與實施例1相同之條件下,對市售之壓延銅箔(JX金屬股份有限公司製造之HA-V2;厚度12 μm)之兩面進行脫脂及酸洗。 繼而,藉由在銅箔之表面依序形成粗化處理層、耐熱層、鉻酸鹽處理層及矽烷偶合處理層,而獲得表面處理銅箔。用以形成各層之條件如下述。 (Comparative Example 3) Under the same conditions as in Example 1, both sides of a commercially available rolled copper foil (HA-V2 manufactured by JX Metal Co., Ltd.; thickness 12 μm) were degreased and pickled. Then, a surface-treated copper foil was obtained by sequentially forming a roughening treatment layer, a heat-resistant layer, a chromate treatment layer, and a silane coupling treatment layer on the surface of the copper foil. The conditions for forming each layer are as follows.

<粗化處理層> 藉由電鍍形成粗化處理層。電鍍分2個階段進行。 (第1階段之條件) 鍍覆液組成:11 g/L之Cu、50 g/L之硫酸 鍍覆液溫度:25℃ 電鍍條件:電流密度42.7 A/dm 2、時間1.4秒 (第2階段之條件) 鍍覆液組成:20 g/L之Cu、100 g/L之硫酸 鍍覆液溫度:50℃ 電鍍條件:電流密度3.8 A/dm 2、時間2.8秒 <Roughening layer> The roughening layer is formed by electroplating. Electroplating is performed in two stages. (Conditions for the first stage) Plating solution composition: 11 g/L Cu, 50 g/L sulfuric acid Plating solution temperature: 25°C Plating conditions: current density 42.7 A/dm 2 , time 1.4 seconds (Conditions for the second stage) Plating solution composition: 20 g/L Cu, 100 g/L sulfuric acid Plating solution temperature: 50°C Plating conditions: current density 3.8 A/dm 2 , time 2.8 seconds

<耐熱層> 藉由電鍍形成耐熱層。 鍍覆液組成:23.5 g/L之Ni、4.5 g/L之Zn 鍍覆液pH:3.6 鍍覆液溫度:40℃ 電鍍條件:電流密度1.1 A/dm 2、時間0.7秒 <Heat-resistant layer> The heat-resistant layer is formed by electroplating. Plating solution composition: 23.5 g/L Ni, 4.5 g/L Zn Plating solution pH: 3.6 Plating solution temperature: 40°C Electroplating conditions: current density 1.1 A/dm 2 , time 0.7 seconds

<鉻酸鹽處理層> 藉由電鍍形成鉻酸鹽處理層。 鍍覆液組成:3.0 g/L之K 2Cr 2O 7、0.33 g/L之Zn 鍍覆液pH:3.6 鍍覆液溫度:50℃ 電鍍條件:電流密度2.1 A/dm 2、時間1.4秒 <Chromate treatment layer> The chromate treatment layer is formed by electroplating. Plating solution composition: 3.0 g/L K 2 Cr 2 O 7 , 0.33 g/L Zn Plating solution pH: 3.6 Plating solution temperature: 50°C Electroplating conditions: current density 2.1 A/dm 2 , time 1.4 seconds

<矽烷偶合處理層> 塗佈N-2-(胺基乙基)-3-胺基丙基三甲氧基矽烷(信越化學工業股份有限公司製造之KBM603)之1.2體積%水溶液(pH:10),使之乾燥,藉此形成矽烷偶合處理層。 <Silane coupling treatment layer> A 1.2 volume % aqueous solution (pH: 10) of N-2-(aminoethyl)-3-aminopropyltrimethoxysilane (KBM603 manufactured by Shin-Etsu Chemical Co., Ltd.) was applied and dried to form a silane coupling treatment layer.

對上述實施例及比較例中所獲得之表面處理銅箔或銅箔,進行下述特性評價。 <Ssk、Vmp及Sv> 使用奧林巴斯股份有限公司製造之雷射顯微鏡(LEXT OLS4000)進行圖像拍攝。所拍攝之圖像的解析係使用奧林巴斯股份有限公司製造之雷射顯微鏡(LEXT OLS4100)之解析軟體來進行。Ssk、Vmp及Sv之測定係分別依據ISO 25178-2:2012來進行。又,關於此等之測定結果,將於任意3處所測得之值的平均值作為測定結果。再者,測定時之溫度設為23~25℃。又,雷射顯微鏡及解析軟體中之主要設定條件如下述。 物鏡:MPLAPON50XLEXT(倍率:50倍,數值孔徑:0.95,液浸類型:空氣,機械鏡筒長:∞,蓋玻璃厚度:0,視野數:FN18) 光學變焦倍率:1倍 掃描模式:XYZ高精度(高度解析度:60 nm,輸入資料之像素數:1024×1024) 輸入圖像尺寸[像素數]:橫257 μm×縱258 μm[1024×1024] (由於在橫向上測定,故評價長度相當於257 μm) DIC:關閉 多層:關閉 雷射強度:100 偏移:0 共焦水準:0 光束直徑光闌:關閉 圖像平均:1次 雜訊降低:開啟 亮度不均修正:開啟 光學雜訊濾波器:開啟 截止:λc=200 μm,無λs及λf 濾波器:高斯濾波器 雜訊去除:測定前處理 表面(傾斜)修正:實施 明度:調整成30~50之範圍 明度係應根據測定對象之色調而作適當設定之值。上述設定係於測定L*為-69~-10、a*為2~32、b*為2~21之表面處理銅箔的表面時適當之值。 The surface treated copper foil or copper foil obtained in the above-mentioned embodiment and comparative example was evaluated for the following characteristics. <Ssk, Vmp and Sv> The image was photographed using a laser microscope (LEXT OLS4000) manufactured by Olympus Corporation. The image was analyzed using the analysis software of the laser microscope (LEXT OLS4100) manufactured by Olympus Corporation. The measurement of Ssk, Vmp and Sv was performed in accordance with ISO 25178-2:2012. In addition, for these measurement results, the average value of the values measured at any three locations was taken as the measurement result. In addition, the temperature during the measurement was set to 23 to 25°C. In addition, the main setting conditions in the laser microscope and the analysis software are as follows. Objective lens: MPLAPON50XLEXT (magnification: 50x, numerical aperture: 0.95, immersion type: air, mechanical barrel length: ∞, cover glass thickness: 0, field of view: FN18) Optical zoom ratio: 1x Scanning mode: XYZ high precision (height resolution: 60 nm, number of pixels of input data: 1024×1024) Input image size [number of pixels]: horizontal 257 μm × vertical 258 μm [1024×1024] (Since it is measured in the horizontal direction, the evaluation length is equivalent to 257 μm) DIC: Off Multi-layer: Off Laser intensity: 100 Offset: 0 Confocal level: 0 Beam diameter aperture: Off Image averaging: 1 time Noise reduction: On Brightness unevenness correction: On Optical noise filter: On Cutoff: λc=200 μm, no λs and λf Filter: Gaussian filter Noise removal: Pre-measurement processing Surface (tilt) correction: Implemented Brightness: Adjusted to a range of 30 to 50 Brightness is a value that should be appropriately set according to the color tone of the object being measured. The above settings are appropriate values when measuring the surface of surface-treated copper foil with L* of -69 to -10, a* of 2 to 32, and b* of 2 to 21.

<測定對象之色調的測定> 使用HunterLab公司製造之MiniScan(註冊商標)EZ Model 4000L作為測定器,依據JIS Z8730:2009進行CIE L*a*b*表色系統之L*、a*及b*的測定。具體而言,係將上述實施例及比較例中所獲得之表面處理銅箔或銅箔的測定對象面壓抵於測定器之感光部,在使光不自外部進入之情況下進行測定。又,L*、a*及b*之測定係基於JIS Z8722:2009之幾何條件C來進行。再者,測定器之主要條件如下述。 光學系統:d/8°,積分球尺寸:63.5 mm,觀察光源:D65 測定方式:反射 照明直徑:25.4 mm 測定直徑:20.0 mm 測定波長、間隔:400~700 nm、10 nm 光源:脈衝氙氣燈、1發光/測定 追溯性標準:基於CIE 44及ASTM E259之依據美國標準技術研究所(NIST)之校正 標準觀察者:10° 又,成為測定基準之白色瓷磚使用下述物體顏色者。 於經以D65/10°進行測定之情形時,CIE XYZ表色系統中之值為X:81.90,Y:87.02,Z:93.76 <Measurement of the color tone of the measurement object> MiniScan (registered trademark) EZ Model 4000L manufactured by HunterLab was used as a measuring instrument to measure L*, a* and b* of the CIE L*a*b* colorimetric system in accordance with JIS Z8730:2009. Specifically, the surface-treated copper foil or copper foil obtained in the above-mentioned embodiment and comparative example was pressed against the photosensitive part of the measuring instrument, and the measurement was performed without light entering from the outside. In addition, the measurement of L*, a* and b* was performed based on the geometric condition C of JIS Z8722:2009. In addition, the main conditions of the measuring instrument are as follows. Optical system: d/8°, integrating sphere size: 63.5 mm, observation light source: D65 Measurement method: reflection Illumination diameter: 25.4 mm Measurement diameter: 20.0 mm Measurement wavelength, interval: 400-700 nm, 10 nm Light source: pulsed xenon lamp, 1 light/measurement Traceability standard: Calibrated according to the National Institute of Standards and Technology (NIST) based on CIE 44 and ASTM E259 Standard observer: 10° In addition, the white tile used as the measurement standard is the one with the following object color. When measured at D65/10°, the values in the CIE XYZ colorimetric system are X: 81.90, Y: 87.02, Z: 93.76

<剝離強度> 於將表面處理銅箔與由低介電材料形成之樹脂基材貼合後,沿MD方向(壓延銅箔之長度方向)形成寬3 mm之電路。電路之形成係按照通常方法來實施。繼而,依據JIS C6471:1995來測定將電路(表面處理銅箔)相對於樹脂基材之表面以50 mm/分鐘之速度向90°方向,即相對於LCP基材之表面向鉛直上方剝離時的強度(MD90°剝離強度)。測定進行3次,將其平均值作為剝離強度之結果。若剝離強度為0.50 kgf/cm以上,則可謂電路(表面處理銅箔)與LCP基材之接著性良好。 <Peeling strength> After bonding the surface treated copper foil to a resin substrate formed of a low dielectric material, a circuit with a width of 3 mm was formed along the MD direction (the length direction of the rolled copper foil). The circuit formation was carried out according to the usual method. Then, the strength (MD90° peeling strength) when the circuit (surface treated copper foil) was peeled off at a speed of 50 mm/min in the 90° direction relative to the surface of the resin substrate, that is, directly above the lead relative to the surface of the LCP substrate, was measured in accordance with JIS C6471:1995. The measurement was performed 3 times, and the average value was taken as the peeling strength result. If the peel strength is above 0.50 kgf/cm, it can be said that the adhesion between the circuit (surface-treated copper foil) and the LCP substrate is good.

將上述特性評價之結果示於表1。The results of the above-mentioned characteristic evaluation are shown in Table 1.

[表1] Ssk Vmp [μm 3/μm 2] Sv [μm] 剝離強度 [kgf/cm] 實施例1 -1.20 0.004 0.92 0.56 實施例2 -1.34 0.004 1.16 0.60 實施例3 -0.94 0.007 1.11 0.58 實施例4 -1.00 0.005 1.04 0.63 實施例5 -1.09 0.005 0.96 0.59 實施例6 -1.10 0.005 1.06 0.64 實施例7 -1.26 0.004 1.03 0.52 實施例8 -1.13 0.005 1.10 0.56 比較例1 -1.18 0.004 0.95 0.18 比較例2 0.57 0.036 1.74 0.60 比較例3 -0.32 0.013 1.20 0.20 [Table 1] Ssk Vmp [μm 3 /μm 2 ] Sv [μm] Peel strength [kgf/cm] Embodiment 1 -1.20 0.004 0.92 0.56 Embodiment 2 -1.34 0.004 1.16 0.60 Embodiment 3 -0.94 0.007 1.11 0.58 Embodiment 4 -1.00 0.005 1.04 0.63 Embodiment 5 -1.09 0.005 0.96 0.59 Embodiment 6 -1.10 0.005 1.06 0.64 Embodiment 7 -1.26 0.004 1.03 0.52 Embodiment 8 -1.13 0.005 1.10 0.56 Comparison Example 1 -1.18 0.004 0.95 0.18 Comparison Example 2 0.57 0.036 1.74 0.60 Comparison Example 3 -0.32 0.013 1.20 0.20

如表1所示,形成雜芳香族化合物層,且其Ssk處於-2.00~-0.10之範圍的實施例1~8之表面處理銅箔具有與形成有粗化處理層等表面處理層之比較例2的表面處理銅箔相同程度之剝離強度,且LCP基材與表面處理銅箔之接著性良好。 相對於此,未形成雜芳香族化合物層之比較例1的銅箔其剝離強度低。又,認為由於與比較例2相比,比較例3之粗化較小,因此剝離強度變低。 上述結果令人驚訝。如前所述,銅箔與LCP基材等樹脂基材之接著性提升,一般係藉由形成含有粗化粒子之表面處理層來進行。於本發明之實施形態中,藉由表面平滑之雜芳香族化合物層的存在,與LCP基材等樹脂基材之接著性得到充分確保。 As shown in Table 1, the surface-treated copper foils of Examples 1 to 8, which formed a heteroaromatic compound layer and had an Ssk in the range of -2.00 to -0.10, had the same peel strength as the surface-treated copper foil of Comparative Example 2, which formed a surface-treated layer such as a roughening treatment layer, and the adhesion between the LCP substrate and the surface-treated copper foil was good. In contrast, the copper foil of Comparative Example 1, which did not form a heteroaromatic compound layer, had a low peel strength. In addition, it is believed that the peel strength of Comparative Example 3 was lower because the roughening was smaller than that of Comparative Example 2. The above results are surprising. As mentioned above, the adhesion between copper foil and resin substrates such as LCP substrates is generally improved by forming a surface treatment layer containing roughened particles. In the embodiment of the present invention, the adhesion with resin substrates such as LCP substrates is fully ensured by the presence of a mixed aromatic compound layer with a smooth surface.

由以上結果可知,若根據本發明之實施形態,可提供一種能夠抑制製造所需之時間及成本,並且提高與樹脂基材,尤其是適於高頻用途之樹脂基材之接著性的表面處理銅箔。又,若根據本發明之實施形態,可提供一種抑制製造所需之時間及成本,並且樹脂基材尤其是適於高頻用途之樹脂基材與表面處理銅箔之間的接著性優異之覆銅積層板。進而,若根據本發明之實施形態,可提供一種抑制製造所需之時間及成本,並且樹脂基材尤其是適於高頻用途之樹脂基材與電路圖案之間的接著性優異之印刷配線板。From the above results, it can be seen that according to the implementation form of the present invention, a surface-treated copper foil can be provided that can suppress the time and cost required for manufacturing and improve the adhesion with a resin substrate, especially a resin substrate suitable for high-frequency use. In addition, according to the implementation form of the present invention, a copper-clad laminate can be provided that suppresses the time and cost required for manufacturing and has excellent adhesion between a resin substrate, especially a resin substrate suitable for high-frequency use and a surface-treated copper foil. Furthermore, according to the implementation form of the present invention, a printed wiring board can be provided that suppresses the time and cost required for manufacturing and has excellent adhesion between a resin substrate, especially a resin substrate suitable for high-frequency use and a circuit pattern.

本發明之實施形態亦可採用以下態樣。 <1> 一種表面處理銅箔,其具有銅箔,及形成於該銅箔之至少一面之雜芳香族化合物層, 該雜芳香族化合物層含有雜芳香族化合物且Ssk為-2.00~-0.10,該雜芳香族化合物具有含有氮原子作為雜原子之雜環。 <2> 如該<1>所記載之表面處理銅箔,其中,該雜環為含有1~3個氮原子之5員環。 <3> 如該<1>或<2>所記載之表面處理銅箔,其中,該雜芳香族化合物為苯環與該雜環之縮合環化合物、2個以上之該雜環之縮合環化合物或該雜環之單環化合物。 <4> 如該<1>至<3>中任一項所記載之表面處理銅箔,其中,該雜芳香族化合物為選自由苯并三唑、吲唑、苯并咪唑、吲哚、三唑并吡啶、1-甲基苯并三唑、5-甲基苯并三唑及1,2,3-三唑所組成之群中的1種以上。 <5> 如該<1>至<4>中任一項所記載之表面處理銅箔,其中,該Ssk為-2.00~-0.50。 <6> 如該<5>所記載之表面處理銅箔,其中,該Ssk為-2.00~-0.80。 <7> 如該<5>所記載之表面處理銅箔,其中,該Ssk為-1.50~-0.80。 <8> 如該<1>至<7>中任一項所記載之表面處理銅箔,其中,該雜芳香族化合物層之Vmp為0.001~0.010 μm 3/μm 2。 <9> 如該<8>所記載之表面處理銅箔,其中,該Vmp為0.001~0.006 μm 3/μm 2。 <10> 一種覆銅積層板,其具備如該<1>至<9>中任一項所記載之表面處理銅箔,及接著於該表面處理銅箔之該雜芳香族化合物層之樹脂基材。 <11> 一種印刷配線板,其具備對如該<10>所記載之覆銅積層板之該表面處理銅箔進行蝕刻而形成之電路圖案。 The present invention can also be implemented in the following forms. <1> A surface-treated copper foil having a copper foil and a heteroaromatic compound layer formed on at least one side of the copper foil, wherein the heteroaromatic compound layer contains a heteroaromatic compound and has an Ssk of -2.00 to -0.10, and the heteroaromatic compound has a heterocyclic ring containing a nitrogen atom as a heteroatom. <2> The surface-treated copper foil as described in <1>, wherein the heterocyclic ring is a 5-membered ring containing 1 to 3 nitrogen atoms. <3> The surface-treated copper foil as described in <1> or <2>, wherein the heteroaromatic compound is a condensed ring compound of a benzene ring and the heterocyclic ring, a condensed ring compound of two or more heterocyclic rings, or a monocyclic compound of the heterocyclic ring. <4> The surface-treated copper foil as described in any one of <1> to <3>, wherein the heteroaromatic compound is one or more selected from the group consisting of benzotriazole, indazole, benzimidazole, indole, triazolopyridine, 1-methylbenzotriazole, 5-methylbenzotriazole, and 1,2,3-triazole. <5> The surface-treated copper foil as described in any one of <1> to <4>, wherein the Ssk is -2.00 to -0.50. <6> The surface-treated copper foil as described in <5>, wherein the Ssk is -2.00 to -0.80. <7> The surface-treated copper foil as described in <5>, wherein the Ssk is -1.50 to -0.80. <8> The surface-treated copper foil as described in any one of <1> to <7>, wherein the Vmp of the heteroaromatic compound layer is 0.001 to 0.010 μm 3 /μm 2 . <9> The surface-treated copper foil as described in <8>, wherein the Vmp is 0.001 to 0.006 μm 3 /μm 2 . <10> A copper-clad laminate having a surface-treated copper foil as described in any one of <1> to <9>, and a resin substrate having the mixed aromatic compound layer attached to the surface-treated copper foil. <11> A printed wiring board having a circuit pattern formed by etching the surface-treated copper foil of the copper-clad laminate as described in <10>.

without

[圖1]係雜芳香族化合物層之負載曲線之一例。[Figure 1] is an example of the loading curve of the heteroaromatic compound layer.

Claims (10)

一種表面處理銅箔,其具有銅箔,及形成於該銅箔之至少一面之雜芳香族化合物層,該雜芳香族化合物層含有雜芳香族化合物且Ssk為-2.00~-0.10,該雜芳香族化合物具有含有氮原子作為雜原子之雜環,該雜芳香族化合物為選自由苯并三唑、吲唑、苯并咪唑、吲哚、三唑并吡啶、1-甲基苯并三唑、5-甲基苯并三唑及1,2,3-三唑所組成之群中的1種以上。 A surface-treated copper foil having a copper foil and a heteroaromatic compound layer formed on at least one side of the copper foil, wherein the heteroaromatic compound layer contains a heteroaromatic compound and has an Ssk of -2.00 to -0.10, wherein the heteroaromatic compound has a heterocyclic ring containing a nitrogen atom as a heteroatom, and the heteroaromatic compound is selected from at least one of the group consisting of benzotriazole, indazole, benzimidazole, indole, triazolopyridine, 1-methylbenzotriazole, 5-methylbenzotriazole and 1,2,3-triazole. 如請求項1之表面處理銅箔,其中,該雜環為含有1~3個氮原子之5員環。 The surface treated copper foil of claim 1, wherein the heterocyclic ring is a 5-membered ring containing 1 to 3 nitrogen atoms. 如請求項1之表面處理銅箔,其中,該雜芳香族化合物為苯環與該雜環之縮合環化合物、2個以上之該雜環之縮合環化合物或該雜環之單環化合物。 The surface-treated copper foil of claim 1, wherein the heteroaromatic compound is a condensed ring compound of a benzene ring and the heterocyclic ring, a condensed ring compound of two or more heterocyclic rings, or a monocyclic compound of the heterocyclic ring. 如請求項3之表面處理銅箔,其中,該Ssk為-2.00~-0.50。 For example, the surface treated copper foil of claim 3, wherein the Ssk is -2.00~-0.50. 如請求項3之表面處理銅箔,其中,該Ssk為-2.00~-0.80。 For example, the surface treated copper foil of claim 3, wherein the Ssk is -2.00~-0.80. 如請求項3之表面處理銅箔,其中,該Ssk為-1.50~-0.80。 For example, the surface treated copper foil of claim 3, wherein the Ssk is -1.50~-0.80. 如請求項1至6中任一項之表面處理銅箔,其中,該雜芳香族化合物層之Vmp為0.001~0.010μm3/μm2The surface treated copper foil of any one of claims 1 to 6, wherein the Vmp of the heteroaromatic compound layer is 0.001-0.010 μm 3 /μm 2 . 如請求項7之表面處理銅箔,其中,該Vmp為0.001~0.006μm3/μm2The surface treated copper foil of claim 7, wherein the Vmp is 0.001-0.006 μm 3 /μm 2 . 一種覆銅積層板,其具備如請求項1至8中任一項之表面處理銅箔,及接著於該表面處理銅箔之該雜芳香族化合物層之樹脂基材。 A copper-clad laminate having a surface-treated copper foil as described in any one of claims 1 to 8, and a resin substrate having the heteroaromatic compound layer attached to the surface-treated copper foil. 一種印刷配線板,其具備對如請求項9之覆銅積層板之該表面處理銅箔進行蝕刻而形成之電路圖案。 A printed wiring board having a circuit pattern formed by etching the surface treated copper foil of the copper clad laminate as claimed in claim 9.
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