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TWI867509B - 金屬掩膜清洗用組合物以及使用其的清洗方法 - Google Patents

金屬掩膜清洗用組合物以及使用其的清洗方法 Download PDF

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Publication number
TWI867509B
TWI867509B TW112115614A TW112115614A TWI867509B TW I867509 B TWI867509 B TW I867509B TW 112115614 A TW112115614 A TW 112115614A TW 112115614 A TW112115614 A TW 112115614A TW I867509 B TWI867509 B TW I867509B
Authority
TW
Taiwan
Prior art keywords
cleaning
metal mask
composition
metal
cleaning composition
Prior art date
Application number
TW112115614A
Other languages
English (en)
Chinese (zh)
Other versions
TW202342713A (zh
Inventor
沈鉉昊
金昶圭
趙埈輝
朴恩志
Original Assignee
南韓商Mti股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020220069543A external-priority patent/KR102719037B1/ko
Application filed by 南韓商Mti股份有限公司 filed Critical 南韓商Mti股份有限公司
Publication of TW202342713A publication Critical patent/TW202342713A/zh
Application granted granted Critical
Publication of TWI867509B publication Critical patent/TWI867509B/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/12Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/08Cleaning involving contact with liquid the liquid having chemical or dissolving effect
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04Cleaning involving contact with liquid
    • B08B3/10Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D11/00Special methods for preparing compositions containing mixtures of detergents
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22Organic compounds
    • C11D7/36Organic compounds containing phosphorus
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/42Stripping or agents therefor
    • H10P95/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Detergent Compositions (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
TW112115614A 2022-04-27 2023-04-26 金屬掩膜清洗用組合物以及使用其的清洗方法 TWI867509B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20220052144 2022-04-27
KR10-2022-0052144 2022-04-27
KR1020220069543A KR102719037B1 (ko) 2022-04-27 2022-06-08 메탈 마스크 세정용 조성물 및 이를 이용한 세정 방법
KR10-2022-0069543 2022-06-08

Publications (2)

Publication Number Publication Date
TW202342713A TW202342713A (zh) 2023-11-01
TWI867509B true TWI867509B (zh) 2024-12-21

Family

ID=88519096

Family Applications (1)

Application Number Title Priority Date Filing Date
TW112115614A TWI867509B (zh) 2022-04-27 2023-04-26 金屬掩膜清洗用組合物以及使用其的清洗方法

Country Status (2)

Country Link
TW (1) TWI867509B (fr)
WO (1) WO2023211110A1 (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114341328A (zh) * 2019-08-23 2022-04-12 富士胶片株式会社 清洗剂组合物

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030007969A (ko) * 2000-06-16 2003-01-23 카오카부시키가이샤 세정제 조성물
JP4628209B2 (ja) * 2004-11-18 2011-02-09 花王株式会社 剥離剤組成物
JP2010535422A (ja) * 2007-08-02 2010-11-18 アドバンスド テクノロジー マテリアルズ,インコーポレイテッド マイクロ電子デバイスから残渣を除去するための非フッ化物含有組成物
KR20120029526A (ko) * 2010-09-17 2012-03-27 동우 화인켐 주식회사 평판표시장치 제조용 금속 세정 조성물
KR102536249B1 (ko) * 2016-07-15 2023-05-25 삼성디스플레이 주식회사 산화물 제거용 세정 조성물 및 이를 이용한 세정 방법

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114341328A (zh) * 2019-08-23 2022-04-12 富士胶片株式会社 清洗剂组合物

Also Published As

Publication number Publication date
TW202342713A (zh) 2023-11-01
WO2023211110A1 (fr) 2023-11-02

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