TWI864781B - Dressing apparatus, dressing tool, and dressing method - Google Patents

Abstract

An apparatus includes a first platen configured to hold a first workpiece; a first dressing board; and blade holder including arms extending from a central axis, wherein the blade holder is configured to hold a blade at an end of each respective arm, wherein the blade holder is operable to rotate around the central axis, wherein the blade holder is configured to trim the first workpiece using at least one blade, wherein the blade holder is configured to dress at least one blade on the first dressing board.

Description

Dressing equipment, dressing tools and dressing methods

The present disclosure relates to a method for forming a semiconductor device.

Semiconductor device manufacturing is the process used to produce the integrated circuits found in everyday electronic devices. The manufacturing process is a multi-step sequence of lithography and chemical processing steps during which electronic circuits are gradually created on a wafer composed of semiconductor materials. During manufacturing, the edges of the wafer may become damaged or otherwise unsuitable for use with electronic circuits. Therefore, the edges of the wafer may be trimmed during manufacturing.

According to some embodiments of the present disclosure, a trimming device includes a first platform, a first trimming plate, and a blade holder. The first platform is configured to support a first workpiece. The blade holder includes a plurality of arms extending from a central axis. The blade holder is configured to fix a blade at an end of each corresponding arm. The blade holder is operable to rotate around the central axis. The blade holder is configured to trim the first workpiece using at least one blade. The blade holder is configured to trim at least one blade on the first trimming plate.

According to some embodiments of the present disclosure, a trimming tool includes a blade holder, a plurality of platforms, and a plurality of trimming plates. The blade holder includes a plurality of arms, wherein the blade holder supports a plurality of blades, and each arm supports a corresponding blade. Each platform is configured to support a corresponding wafer. The plurality of platforms are aligned with a first set of arms in the plurality of arms. The plurality of trimming plates are aligned with a second set of arms in the plurality of arms.

According to some embodiments of the present disclosure, a trimming method includes the following steps. Rotate the blade holder to align the first blade of the blade holder with the first platform, and align the second blade of the blade holder with the first trimming plate. Trim the first workpiece on the first platform using the first blade. Trim the second blade using the first trimming plate. Rotate the blade holder to align the second blade of the blade holder with the first platform. Trim the second workpiece on the first platform using the second blade.

10: Wafer

20: Wafer

45: Region

50: Workpiece

50A: Workpiece

50B: Workpiece

50C: Workpiece

50D: Workpiece

50E: Workpiece

60:Robotic arm

100: Dressing tools

102: Repair station

104A: Platform

104B: Platform

106:Sensing arm

110: Blade holder

111: wheel hub

112: Arm

112A: Arm

112B: Arm

112C: Arm

112D: Arm

113:Center axis

120: Blade

120A: Blade

120B: Blade

120C: Blade

120D: Blade

120E: Blade

120F: Blade

122: Actuator

124: Axis

130: Trimming plate

130A: Trimming plate

130B: Trimming plate

131A: Area

131B: Area

132: Repair station

132A: Repair station

132B: Repair station

133A: Granularity area

133B: Granularity area

133C: Granularity area

140:Sensor

200: Process

202: Steps

204: Steps

206: Steps

208: Steps

210: Steps

212: Steps

214: Steps

216: Steps

300: Dressing tools

400: Dressing tools

410: lid

A1: Angle

H1: Height

T1: Threshold value

R1: Changes

The present disclosure is best understood from the following detailed description when read in conjunction with the accompanying drawings. It should be noted that, in accordance with standard practice in the industry, the various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.

Figures 1A, 1B, and 1C are cross-sectional views of intermediate stages in workpiece processing including a trimming step according to some embodiments.

Figures 2A, 2B, and 2C are cross-sectional views of intermediate stages in workpiece processing including a trimming step according to some embodiments.

FIG. 3 is a schematic plan view of a trimming tool according to some embodiments.

FIG. 4 is a schematic perspective view of a trimming tool according to some embodiments.

FIG. 5 is a schematic perspective view of a blade attached to the end of an arm of a blade holder according to some embodiments.

Figures 6A, 6B, 6C, 6D and 6E are intermediate steps of the trimming process using a trimming tool according to some embodiments.

Figure 7 is a flow chart of the pruning process according to some embodiments.

Figures 8A and 8B illustrate the process of trimming a blade using a trimming plate according to some embodiments.

Figures 9A and 9B show schematic diagrams of trimming plates according to some embodiments.

Figures 10A, 10B, and 10C illustrate sensors for blades and exemplary blade measurements according to some embodiments.

FIG. 11 shows a schematic plan view of a trimming tool according to some embodiments.

FIG. 12 shows a schematic cross-sectional view of a portion of a trimming tool according to some embodiments.

The following disclosure provides many different embodiments or examples for implementing different features of the provided subject matter. Specific examples of components, values, operations, materials, arrangements, or the like are described below to simplify the disclosure. Of course, these examples are merely illustrative and are not intended to be limiting. Other components, values, operations, materials, arrangements, and the like are contemplated. For example, in the following description, forming a first feature above or on a second feature may include embodiments in which the first feature and the second feature are formed in direct contact, and may also include embodiments in which additional features may be formed between the first feature and the second feature so that the first feature and the second feature may not be in direct contact. In addition, the disclosure may repeat component symbols and/or letters in various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate the relationship between the various embodiments and/or configurations discussed.

Additionally, spatially relative terms such as "below," "under," "beneath," "above," "upper," and the like may be used herein for ease of description to describe the relationship of one part or feature to another part or features as illustrated in the figures. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The system may be otherwise oriented (rotated 90 degrees or at other orientations), and the spatially relative descriptors used herein may be interpreted accordingly.

According to various embodiments, a trimming tool for trimming wafers is described herein. The trimming tool described herein includes a blade holder configured to support and operate multiple trimming blades so that multiple workpieces (e.g., wafers) can be trimmed by different blades on the blade holder. In addition, the blade holder is configured to rotate so that some blades can be "trimmed" (e.g., cleaned using one or more trimming plates) while other blades are used to trim the workpiece. In this way, the rate at which the workpiece is trimmed can be increased while still allowing the blades to be trimmed as needed. This can reduce processing time and increase efficiency. The blade holder can also include sensors that monitor blade position or blade condition, which can allow for more efficient and cost-effective blade trimming.

FIGS. 1A to 1C and FIGS. 2A to 2C illustrate schematic cross-sectional views of intermediate stages in workpiece processing including a trimming step according to some embodiments. The processes shown in FIGS. 1A to 1C and FIGS. 2A to 2C are illustrative examples, and any other suitable processes including a trimming step may be used with embodiments of the present disclosure. In FIGS. 1A to 1C and FIGS. 2A to 2C, a first wafer 10 is bonded to a second wafer 20 to form a workpiece 50. In some cases, the workpiece 50 may also be referred to as a "wafer," a "reconstructed wafer," a "bonded structure," a "stacked wafer structure," etc. An edge portion of the workpiece 50 is then removed in a trimming process, which may be performed using the embodiments described herein. In some cases, trimming the workpiece 50 can reduce warping, cracking, or peeling.

In FIG. 1A , a first wafer 10 is bonded or otherwise attached to a second wafer 20 to form a workpiece 50. In some embodiments, the first wafer 10 and/or the second wafer 20 may be a semiconductor wafer, such as a silicon bulk wafer or a gallium arsenide wafer. In some embodiments, the first wafer 10 and/or the second wafer include, for example, silicon, strained silicon, silicon alloy, silicon carbide, silicon-germanium, silicon-germanium carbide, germanium, germanium alloy, germanium-arsenic, indium-arsenic, III-V semiconductors, combinations thereof, or the like. In some embodiments, the first wafer 10 and/or the second wafer 20 is a buried oxide (BOX) wafer, a device wafer, an interposer, an organic core substrate, a combination thereof, or the like. The first wafer 10 and the second wafer 20 may have similar or different materials or sizes. The first wafer 10 may be bonded to the second wafer 20 using direct bonding (e.g., dielectric-to-dielectric bonding and/or metal-to-metal bonding), using an adhesive, or using another suitable technique. In some cases, the second wafer 20 may be considered a "carrier", "carrier substrate", or "carrier wafer".

In FIG. 1B , according to some embodiments, the workpiece 50 is trimmed. During the trimming process, a region 45 around the edge of the workpiece 50 is removed. For example, the trimming region 45 may be removed vertically downward from the first wafer 10 toward the second wafer 20. The trimming region 45 may extend partially or completely through the first wafer 10 and may extend partially or completely through the second wafer 20. For example, the trimming region 45 shown in FIG. 1B extends completely through the first wafer 10 and partially through the second wafer 20. In FIG. 1C , the first wafer 10 is thinned using a suitable process, such as a chemical mechanical polish (CMP) process, a grinding process, an etching process, a combination thereof, or a similar process. The thinning process reduces the thickness of the first wafer 10.

The process shown in FIGS. 2A to 2C is similar to the process shown in FIGS. 1A to 1C, except that the workpiece 50 is thinned before trimming the workpiece 50. FIG. 2A shows a workpiece similar to FIG. 1A. In FIG. 2B, the workpiece 50 is thinned to reduce the thickness of the first wafer 10. In FIG. 2C, a trimming process is performed to remove a region 45 around the edge of the workpiece 50, similar to the trimming process described for FIG. 1C.

FIGS. 3 and 4 illustrate a dressing tool 100 according to some embodiments. FIG. 3 illustrates a schematic plan view of the dressing tool 100, and FIG. 4 illustrates a schematic perspective view of the dressing tool 100. For clarity, certain features or details may not be shown. The dressing tool 100 may be used to dress one or more workpieces 50, which may be similar to the workpieces 50 described above with respect to FIGS. 1A to 2C, but other workpieces 50 are possible. In some embodiments, the dressing tool 100 includes a blade holder 110 configured to support and operate a plurality of dressing blades 120. In this manner, the blade holder 110 may be considered a "multi-blade holder." The blade holder 110 includes a plurality of arms 112 extending from a hub 111 at a central axis 113, with a blade 120 attached to the end of each arm 112. For example, the blade holder 110 shown in FIGS. 3-4 has four arms 112A-112D and four corresponding blades 120A-120D. In other embodiments, the blade holder 110 has a different number of arms 112, such as two, three, or more than four arms 112. In some embodiments, the blade holder 110 is operable to rotate about a central axis 113 to reposition the arms 112 and the corresponding blades 120. According to some embodiments, FIG. 3 also shows a robotic arm 60 that can be used to transfer a workpiece 50 into or out of the dressing tool 100.

FIG. 5 depicts a schematic perspective view of a blade 120 attached to the end of an arm 112 according to some embodiments. In some embodiments, the blade 120 is attached to an actuator 122 within the arm 112 via a shaft 124. The actuator 122 may include a motor, a hydraulic actuator, a pneumatic actuator, a robotic arm, another type of actuator or mechanism, a combination thereof, or the like. In some embodiments, the actuator 122 may be configured to rotate the blade 120 (e.g., clockwise and/or counterclockwise, such as during trimming or trimming) or to translate the blade 120 laterally (e.g., to extend or retract). As an illustrative example, FIG. 5 shows the blade 120 in two different lateral positions after being translated by the actuator 122. In some embodiments, the actuator 122 can translate the blade 120 laterally within a range from about 1 mm to about 50 mm, but other translation ranges are possible. For example, the actuator 122 can translate the blade 120 to properly align the blade 120 with the workpiece 50 during a trimming process or to properly align the blade 120 with the trimming plate 130 during a trimming process. In some embodiments, the arm 112, the actuator 122, and/or the shaft 124 can include a spring or damper (not shown) to reduce vibration of the blade 120 during operation.

In some embodiments, the diameter of the blade 120 attached to the arm 112 can be in the range of about 10 mm to about 300 mm, although other diameters are possible. The blade 120 can be formed of any suitable material or have any suitable properties. For example, the blade 120 can include a bonding material of ceramic, resin, rubber, chlorine oxide (e.g., oxychloride), nickel, etc. or a combination thereof. The blade 120 can have a grit size in the range of #100 to #7000, although other grit sizes are possible. In some embodiments, the blade 120 may have a grit including diamond, cubic boron nitride (CBN), silicon carbide, aluminum oxide, zirconia alumina, zirconium dioxide, ceramic, garnet, etc. or a combination thereof. In some embodiments, the blade 120 may have a material including nickel, nickel chrome, nickel aluminum, aluminum bronze, aluminum oxide, chrome oxide, zirconium oxide, chrome carbide nickel chrome, nickel graphite, aluminum, copper, molybdenum, tungsten carbide cobalt, titanium oxide, the like, or combinations thereof. Other materials are also possible.

The various blades 120 attached to the arms 112 of the blade holder 110 may have similar or different properties. For example, returning to FIGS. 3 and 4 , blades 120A and 120C attached to arms 112A and 112C, respectively, have a relatively coarse grit, while blades 120B and 120D attached to arms 112B and 112D, respectively, have a relatively fine grit. Other combinations of blades and blade properties are possible. In some embodiments, the trimming process of the workpiece 50 may include trimming the workpiece 50 with a coarse blade 120 (e.g., blade 120A or 120C) and then trimming the workpiece 50 with a fine blade 120 (e.g., blade 120B or 120D). Therefore, blades 120A and 120C may be referred to herein as "coarse blades," while blades 120B and 120D may be referred to herein as "fine blades." The multi-arm blade holder 110 described herein allows a single workpiece 50 to be trimmed with multiple blades 120 during the trimming process.

Still referring to FIGS. 3 and 4, according to some embodiments, the dressing tool 100 includes a dressing station 102 that supports and rotates the workpiece 50 during the dressing process. The dressing station 102 includes a first platform 104A and a second platform 104B, each of which is configured to support the workpiece 50. For example, FIGS. 3 to 4 illustrate the first platform 104A supporting the first workpiece 50A and the second platform 104B supporting the second workpiece 50B. In other embodiments, the dressing station 102 may include a different number of platforms 104. The platform 104 may use, for example, metal to fix the workpiece 50. In some embodiments, vacuum suction or another suitable technique, and the workpiece 50 may be rotated during the dressing process (e.g., clockwise or counterclockwise).

According to some embodiments, the dressing tool 100 also includes one or more dressing plates 130. The dressing plates 130 are used to clean, reshape, and refresh the blades 120 after performing the dressing process. The dressing plates 130 are supported by the dressing stations 132, and in some embodiments, each dressing plate 130 may have its own dressing station 132. For example, FIGS. 3-4 show a first dressing plate 130A on a first dressing station 132A and a second dressing plate 130B on a second dressing station 132B. In other embodiments, the first dressing plate 130A and the second dressing plate 130B may be supported by the same dressing station 132. In some embodiments, the dressing plates 130 may be rotated, translated, or positioned by the dressing stations 132.

In some embodiments where the dressing tool 100 has two or more dressing boards 130, the various dressing boards 130 may have similar or different properties. For example, referring to FIGS. 3-4, the first dressing board 130A may be suitable for a blade 120 having a relatively coarse grain size (e.g., blade 120A or 120C), while the second dressing board 130B may be suitable for a blade 120 having a relatively fine grain size (e.g., blade 120B or 120D). In this manner, the dressing board 130 may be referred to herein as a "course dressing board" or a "fine dressing board." Other combinations of dressing boards and dressing board properties are also possible.

In some embodiments, the trimming tool 100 includes a sensing arm 106 that measures characteristics of the workpiece 50 during or after performing a trimming process. The sensing arm 106 can monitor, detect, or measure characteristics of a trimmed area of the workpiece 50 (e.g., the trimmed area 45 of FIGS. 1B to 1C or 2B to 2C), such as depth, width, roughness, position, etc. The sensing arm 106 can include one or more sensors, which can be laser-based sensors, optical sensors (e.g., OCD sensors, CCD sensors, etc.), or other types of sensors. In some embodiments, the sensing arm 106 can be operated to measure a first workpiece 50 (e.g., the first workpiece 50A in FIG. 3 ) at a first position and a second position to measure a second workpiece 50 (e.g., the second workpiece 50B in FIG. 3 ). In other embodiments, each platform 104 has an associated sensing arm 106.

A dressing tool including multiple blade holders may have a different configuration than the dressing tool 100 shown in FIGS. 3-4. As another non-limiting example, FIG. 11 illustrates a dressing tool 300 according to some embodiments. The dressing tool 300 has a blade holder 110 configured to hold six blades 120A-120F, which may be similar blades or blades of different types. The dressing tool 300 also includes five platforms (not shown separately) to support five workpieces 50A-50E and includes a dressing plate 130 on a dressing station 132. The dressing tool 300 is configured so that five workpieces 50A-50E can be dressed simultaneously and are dressed by five blades 120 (e.g., blades 120A-120E), while the remaining blades 120 (e.g., blade 120F) are dressed at the dressing plate 130. The blade holder 110 can be rotated to allow different blades 120A to 120F to be attached to different platforms or to the trimming plate 130. In other embodiments, other numbers or arrangements of blades 120, workpieces 50, trimming plates 130, or other features are possible.

According to some embodiments, coming to FIGS. 6A-6E, intermediate steps of an example trimming process utilizing the trimming tool 100 are depicted. The trimming processes illustrated in FIGS. 6A-6E are illustrative examples, and other trimming processes having different steps or different synchronous sequences may be used in other embodiments. Some actions described below for a step may be performed sequentially, and some actions described below for a step may be performed simultaneously. Some actions described below for a step may be performed in a different order than described. Using appropriate trimming processes such as described with respect to FIGS. 6A-6E, the trimming tool 100 as described herein allows for efficient trimming of the workpiece 50, including trimming the blade 120 at an improved "wafer-per-hour" rate. In addition, the trimming process described in FIGS. 6A to 6E allows each workpiece 50 to be trimmed with a coarse blade and then with a fine blade, which can improve the smoothness and reproducibility of the trimmed area and reduce the risk of cracking or warping of the workpiece 50.

In FIG. 6A, the blade holder 110 is in such a position that the workpiece 50 on the first platform 104A can be trimmed using the fine blade 120B and the workpiece 50 on the second platform 104B can be trimmed using the coarse blade 120A. In some cases, the position of the blade holder 110 in FIG. 6A can be considered an "initial position" or "first position". The workpiece 50A on the first platform 104A is trimmed using the fine blade 120B and then removed from the first platform 104A (e.g., by the robot 60). For example, the workpiece 50A can be removed from the first platform 104A and transferred to a cleaning station, etc. The workpiece 50B is loaded onto the second platform 104B (e.g., by the robot 60) and then trimmed using the coarse blade 120A.

Still referring to FIG. 6A , the blade holder 110 is also in a position such that the coarse blade 120C can be trimmed using the coarse trimming plate 130A and the fine blade 120D can be trimmed using the fine trimming plate 130B. In some embodiments, the blades 120C to 120D can be trimmed while the workpieces 50A to 50B are being trimmed by the blades 120A to 120B. When the blade holder 110 is in the first position, the trimming of the blades 120C and/or 120D is optional, and one, both, or none of the blades 120C to 120D can be trimmed. In some embodiments, the condition of the blade 120 can be monitored or measured, and whether the blade 120 is trimmed can be determined based on the condition of the blade 120. In some cases, the blade 120 may be trimmed after a predetermined number of workpieces 50 have been trimmed since the blade 120 was last trimmed.

In FIG. 6B , the blade holder 110 is rotated to a position where the workpiece 50 on the first platform 104A can be trimmed using a rough blade 120C and the workpiece 50 on the second platform 104B can be trimmed using a fine blade 120B. For example, the blade holder 110 can be rotated 90° around the central axis 113 as shown in FIG. 6B , or can be rotated by another suitable angle. In some cases, the position of the blade holder 110 in FIG. 6B can be considered a "second position." The workpiece 50C is loaded onto the first platform 104A (e.g., by the robot arm 60) and then trimmed using the rough blade 120C. The workpiece 50B on the second platform 104B is trimmed using the fine blade 120B and then removed from the second platform 104B (e.g., by the robot arm 60). Still referring to FIG. 6B , the blade holder 110 is also in a position such that the coarse blade 120A is aligned with the fine trimming plate 130B and the fine blade 120D is aligned with the coarse trimming plate 130A. Therefore, in some embodiments, no blade 120 is trimmed when the blade holder 110 is in the second position.

In FIG. 6C , the blade holder 110 is rotated to such a position that the workpiece 50 on the first platform 104A can be trimmed using the fine blade 120D and the workpiece 50 on the second platform 104B can be trimmed using the coarse blade 120C. For example, the blade holder 110 can be further rotated 90° about the central axis 113 as shown in FIG. 6C , or can be rotated by another suitable angle. In some cases, the position of the blade holder 110 in FIG. 6C can be considered a "third position". The workpiece 50C on the first platform 104A is trimmed using the fine blade 120D and then removed from the first platform 104A (e.g., by the robot arm 60). The workpiece 50D is loaded onto the second platform 104B (e.g., by the robot arm 60) and then trimmed using the coarse blade 120C. Still referring to FIG. 6C , the blade holder 110 is also in a position such that the coarse blade 120A is aligned with the coarse trimming plate 130A and the fine blade 120B is aligned with the fine trimming plate 130B. In this way, when the blade holder 110 is in the third position, the blade 120A and/or the blade 120B can be selectively trimmed.

In FIG. 6D , the blade holder 110 is rotated to such a position that the workpiece 50 on the first platform 104A can be trimmed using the coarse blade 120A and the workpiece 50 on the second platform 104B can be trimmed using the fine blade 120D. For example, as shown in FIG. 6D , the blade holder 110 can be further rotated 90° around the central axis 113, or can be rotated by another suitable angle. In some cases, the position of the blade holder 110 in FIG. 6D can be considered a "fourth position." The workpiece 50E is loaded onto the first platform 104A (e.g., by the robot arm 60) and then trimmed using the coarse blade 120A. The workpiece 50D on the second platform 104B is trimmed using the fine blade 120D and then removed from the second platform 104B (e.g., by the robot arm 60). Still referring to FIG. 6D , the blade holder 110 is also in a position such that the coarse blade 120C is aligned with the fine trimming plate 130B and the fine blade 120B is aligned with the coarse trimming plate 130A. Therefore, in some embodiments, no blade 120 is trimmed when the blade holder 110 is in the fourth position.

In FIG. 6E, the blade holder 110 is rotated back to the first position. For example, the blade holder 110 can be rotated 270° around the central axis 113 in the opposite direction as shown in FIG. 6D, or rotated at other suitable angles. The workpiece 50E on the first platform 104A is trimmed using the fine blade 120B and then removed from the first platform 104A (e.g., by the robot arm 60). The workpiece 50F is loaded onto the second platform 104B (e.g., by the robot arm 60) and then trimmed using the rough blade 120A. Similar to FIG. 6A, when the blade holder 110 is in the first position, the blade 120C and/or the blade 120D can be selectively trimmed. In this way, the steps described in FIG. 6A to FIG. 6E can be repeated to effectively trim the workpiece 50 and the trimming blade 120.

FIG. 7 illustrates a process 200 of a trimming process according to some embodiments. The trimming process described in the process flow 200 of FIG. 7 is similar to the trimming process described previously in FIGS. 6A to 6E. In step 202, the workpiece on the first platform is trimmed using a fine blade and then removed from the first platform. In step 202, the workpiece is also loaded onto the second platform and then trimmed using a coarse blade. In addition, one or more blades may optionally be trimmed in step 202. Step 202 is similar to the intermediate step shown in FIG. 6A or the intermediate step shown in FIG. 6E.

In step 204, the blade holder is rotated to the second position. In step 206, the workpiece is loaded on the first platform and then trimmed using the coarse blade. In step 206, the workpiece on the second platform is also trimmed using the fine blade and then removed from the second platform. Steps 204 and 206 are similar to the intermediate step shown in Figure 6B.

In step 208, the knife support is rotated to the third position. In step 210, the workpiece on the first platform is trimmed using the fine blade and then removed from the first platform. In step 210, the workpiece is also loaded onto the second platform and then trimmed using the coarse blade. In addition, one or more blades may optionally be trimmed in step 210. Steps 208 and 210 are similar to the intermediate step shown in FIG. 6C.

In step 212, the blade holder is rotated to the fourth position. In step 214, the workpiece is loaded on the first platform and then trimmed using the coarse blade. In step 214, the workpiece on the second platform is also trimmed using the fine blade and then removed from the second platform. Steps 212 and 214 are similar to the intermediate step shown in FIG. 6D.

At step 216, the blade holder is rotated back to the first position, which is similar to the intermediate step shown in Figure 6E. The dressing process can then continue from step 202 to dress additional workpieces.

FIGS. 8A and 8B illustrate repositioning of the trimming plate 130 according to some embodiments. In some embodiments, the trimming plate 130 can be repositioned to provide an unused surface for trimming the blade 120. The trimming plate 130 can be repositioned, for example, by rotating or translating the trimming plate 130 via an actuator within the trimming station 132. An illustrative example is shown in the schematic plan views of FIGS. 8A and 8B, where the trimming plate 130 is rotated after trimming the blade 120. FIG. 8A illustrates the trimming plate 130 after trimming the blade 120, and FIG. 8B illustrates the trimming plate 130 prior to subsequent trimming of the blade 120. In FIG. 8A, the trimming of the blade 120 creates a used area 131A of the trimming plate 130 as a result of the trimming process. In FIG. 8B , the trimming plate 130 is rotated at an appropriate angle A1 to move the used area 131A away from the position under the blade 120 during trimming and to move the unused area 131B to the position under the blade 120 during trimming. In this way, the trimming plate 130 can be rotated as needed to provide an unused area for the trimming of the blade 120, which can improve the trimming quality of the blade 120, thereby improving the quality of trimming using the blade 120.

In some embodiments, the trimming plate 130 may have different regions suitable for blades 120 having different grit sizes. In this way, a single trimming plate 130 can be used to trim different types of blades 120. FIGS. 9A and 9B depict two illustrative examples of a trimming plate 130 having different grit size regions 133 suitable for blades 120 having different grit sizes. For example, FIG. 9A shows a trimming plate 130 having grit size regions 133A to 133C corresponding to different grit sizes, and FIG. 9B shows a trimming plate having grit size regions 133A to 133B corresponding to different grit sizes. In FIG. 9A, the different grit size regions 133A to 133C are arranged in concentric rings or annuli. In FIG. 9B , the different grain size regions 133A-133B are arranged as adjacent portions (e.g., two halves) of the trimming plate 130. These are illustrative examples, and other trimming plates 130 having other numbers, arrangements, shapes, or combinations of grain size regions 133 are possible.

In some embodiments, the trimming plate 130 can be rotated to align unused areas of the trimming plate 130 and/or to align different grit areas 133 with the blade 120 before trimming the blade 120. By providing the trimming plate 130 with different grit areas 133, different types of blades 120 can be trimmed without using a separate trimming plate 130 for each type of blade 120. In some embodiments, the blade 120 can be positioned on a specific area of the trimming plate 130, such as in an unused area or an area corresponding to a different grit size. For example, the position of the blade 120 can be controlled by adjusting the rotation angle of the blade holder 110 or by adjusting the protrusion of the blade 120 from the arm 112 using the actuator 122 (see Figure 5). The adjustment of the position of the blade 120 can be combined with any of the trimming plates 130 described herein. In this way, the size of the trimming tool 100 can be reduced, the time required for trimming when using multiple blades 120 can be reduced, and the trimming quality can be improved.

In some embodiments, the blade holder 110 may include one or more sensors for monitoring or measuring characteristics of the blade 120. According to some embodiments, an illustrative example is shown in the schematic cross-sectional view of FIG. 10A, which shows a portion of the blade holder 110 including a portion of the hub 111 and the arm 112. As shown in FIG. 10A, one or more sensors 140 can be located in the hub 111, although in other embodiments the sensors 140 can have different locations. In some embodiments, each blade 120 attached to the blade holder 110 can have a corresponding sensor 140 or sensor group 140 located in the blade holder 110. For example, a blade holder 110 holding four blades 120 can have four groups of sensors 140. The sensor 140 may be configured to measure a characteristic of a corresponding blade 120, such as position, roughness, diameter, uniformity, flatness, or other characteristic. In some cases, a sensor 140 may measure more than one characteristic of a blade 120. In some embodiments, the sensor 140 may measure a characteristic of a blade 120 while the blade 120 is rotating, which may be during trimming, during dressing, or when the blade 120 is not in use. For example, in some embodiments, the sensor 140 may measure a characteristic of a blade 120 when the blade 120 is located on an unsuitable trimming plate 130, such as blades 120A or 120D in FIG. 6B. In some embodiments, the sensor 140 may be a laser-based sensor, an optical sensor, or other type of sensor. The example sensor 140 shown in FIG. 10A is a laser-based sensor. In some embodiments, the measurements provided by sensor 140 may indicate that blade 120 should be trimmed or replaced.

In some embodiments, the sensor 140 can measure the position of the corresponding blade 120 relative to the sensor 140. For example, the sensor 140 can use a laser to measure the distance that the blade 120 protrudes from one end of the arm 112. In this way, the position of the blade 120 can be more accurately determined. In some cases, the sensor 140 can be used with the actuator 122 to more precisely or accurately adjust the position of the blade 120.

In some embodiments, the sensor 140 can measure the roughness of the corresponding blade 120. As an illustrative example, FIG. 10B depicts an enlarged view of the edge of the blade 120. The sensor 140 can be configured to measure the surface variation of the edge of the blade 120, such as the maximum variation of the blade 120, represented as R1 in FIG. 10B. In some embodiments, the roughness measurement of the blade 120 can indicate that the blade 120 needs to be trimmed or replaced. For example, if the roughness, maximum height variation, average height variation, etc. exceed a certain threshold value, the blade 120 can be trimmed.

In some embodiments, the sensor 140 may measure the absolute height or diameter of the corresponding blade 120. As an illustrative example, FIG. 10C shows an enlarged view of the edge of the blade 120. The sensor 140 may be configured to measure the height of the blade 120, such as the minimum height of the blade 120, which is indicated as H1 in FIG. 10C. In some embodiments, the height measurement of the blade 120 may indicate that the blade 120 needs to be trimmed or replaced. For example, if the minimum height H1 of the blade is less than a certain threshold (e.g., the threshold T1 indicated in FIG. 10C), the blade 120 may be trimmed or replaced.

FIG. 12 depicts a schematic cross-sectional view of a portion of a dressing tool 400 according to some embodiments. The dressing tool 400 may be similar to other dressing tools described herein, except that a single blade 120 is configured for use with two workpieces 50A-50B. For example, the dressing tool 400 includes an upper platform 104A that supports the workpiece 50A above the blade 120 and a lower platform 104B that supports the workpiece 50B below the blade 120. In this manner, the blade 120 may dress the workpieces 50A-50B simultaneously. In some cases, the blade 120 may dress the workpieces 50A-50B sequentially. The dressing tool 400 also includes a cover 410 located between the workpieces 50A-50B that prevents particles or debris from accumulating on the lower workpiece 50B. The use of the dressing tool 400 allows for an increased rate of dressing the workpieces.

The embodiments described herein have advantages. The dressing tools described herein allow for simultaneous multi-blade dressing and multi-workpiece dressing. This can reduce the time spent dressing blades and increase the speed of workpiece dressing. Inspection tools such as sensors are also used to monitor the condition of blades, workpieces, and dressing plates to achieve higher throughput, more efficient dressing, and easier maintenance. The dressing tools described herein allow for automatic dressing of blades as needed.

According to some embodiments of the present disclosure, an apparatus includes a first platform configured to support a first workpiece; a first trimming plate; and a blade holder, which includes a plurality of arms extending from a central axis, wherein the blade holder is configured to fix a blade at the end of each corresponding arm, wherein the blade holder is operable to rotate about the central axis, wherein the blade holder is configured to trim the first workpiece using at least one blade, wherein the blade holder is configured to trim the at least one blade on the first trimming plate. In one embodiment, the apparatus includes a second platform configured to support a second workpiece, wherein the blade holder is configured to trim the first workpiece using one blade and simultaneously trim the second workpiece using another blade. In one embodiment, the apparatus includes a second trimming plate, wherein the blade holder is configured to trim one blade on the first trimming plate and simultaneously trim another blade on the second trimming plate. In one embodiment, the blade holder has four arms. In one embodiment, the apparatus includes a sensing arm configured to measure a condition of a trimmed area of a first workpiece. In one embodiment, a blade holder includes a sensor configured to measure a condition of a blade supported by the blade holder. In one embodiment, each arm of the blade holder includes an actuator, wherein each actuator is configured to extend or retract a blade at an end of the corresponding arm. In one embodiment, a first trimming plate includes a first region corresponding to a first blade size and a second region corresponding to a second blade size.

According to some embodiments of the present disclosure, a trimming tool includes a blade holder having a plurality of arms, wherein the blade holder supports a plurality of blades, wherein each arm supports a corresponding blade; a plurality of platforms, wherein each platform is configured to support a corresponding wafer, wherein the plurality of platforms are aligned with a first set of arms in the plurality of arms; and a plurality of trimming plates, wherein the plurality of trimming plates are aligned with a second set of arms in the plurality of arms. In one embodiment, the plurality of blades are arranged in a cross shape. In one embodiment, the plurality of blades include at least two different types of blades. In one embodiment, the plurality of trimming plates include at least two different types of trimming plates. In one embodiment, the blade holder is operable to rotate to align the plurality of platforms with the second set of arms and to align the plurality of trimming plates with the first set of arms. In one embodiment, the plurality of platforms includes a first platform of the plurality of platforms located above a second platform of the plurality of platforms. In one embodiment, each trimming plate of the plurality of trimming plates is configured to rotate independently.

According to some embodiments of the present disclosure, a method includes rotating a blade holder to align a first blade of the blade holder with a first platform and aligning a second blade of the blade holder with a first trimming plate; trimming a first workpiece on the first platform using the first blade; trimming the second blade using the first trimming plate; rotating the blade holder to align the second blade of the blade holder with the first platform; and trimming the second workpiece on the first platform using the second blade. In one embodiment, the method includes rotating the first trimming plate after trimming the second blade. In one embodiment, rotating the blade holder to align the first blade with the first workpiece also aligns the third blade with the third workpiece. In one embodiment, the method includes trimming the first workpiece using the first blade while trimming the third workpiece using the third blade. In one embodiment, the first blade has a coarse grain size and the second blade has a fine grain size.

The features of several embodiments are summarized above so that those skilled in the art can better understand the state of the present disclosure. Those skilled in the art should understand that they can easily use the present disclosure as a basis for designing or modifying other processes and structures to achieve the same purpose and/or achieve the same advantages as the embodiments described herein. Those skilled in the art should also recognize that such equivalent structures do not depart from the spirit and scope of the present disclosure, and that various changes, substitutions and modifications may be made to them herein without departing from the spirit and scope of the present disclosure.

50A: Workpiece

50B: Workpiece

60:Robotic arm

100: Dressing tools

102: Repair station

104A: Platform

104B: Platform

106:Sensing arm

110: Blade holder

111: wheel hub

112A: Arm

112B: Arm

112C: Arm

112D: Arm

113:Center axis

120A: Blade

120B: Blade

120C: Blade

120D: Blade

130A: Trimming plate

130B: Trimming plate

132A: Repair station

132B: Repair station

Claims (10)

A trimming device comprises: a first platform configured to support a first workpiece; a first trimming plate; a blade holder comprising a plurality of arms extending from a central axis, wherein the blade holder is configured to fix a blade at an end of each corresponding arm, wherein the blade holder is operable to rotate around the central axis, wherein the blade holder is configured to trim the first workpiece using at least one blade, wherein the blade holder is configured to trim at least one blade on the first trimming plate; and a second platform configured to support a second workpiece, wherein the blade holder is configured to trim the first workpiece using one blade and simultaneously trim the second workpiece using another blade. A trimming device as described in claim 1, wherein the blade holder has four arms. The trimming device as described in claim 1 further comprises a second trimming plate, wherein the blade holder is configured to trim a blade on the first trimming plate and trim another blade on the second trimming plate at the same time. The trimming device as described in claim 1 further comprises a sensor arm configured to measure a condition of a trimming area of the first workpiece. The trimming device as described in claim 1, wherein the blade holder further comprises a sensor, the sensor being configured to measure a condition of a blade supported by the blade holder. A trimming device as described in claim 1, wherein each arm of the blade holder includes an actuator, wherein each actuator is configured to extend or retract the blade at the end of the corresponding arm. The trimming device as described in claim 1, wherein the first trimming plate includes a first area corresponding to a first blade particle size and a second area corresponding to a second blade particle size. A trimming tool comprises: a blade holder; a plurality of arms, wherein the blade holder supports a plurality of blades, wherein each arm supports a corresponding blade; a plurality of platforms, wherein each platform is configured to support a corresponding wafer, wherein the plurality of platforms are aligned with a first set of arms among the plurality of arms; and a plurality of trimming plates, wherein the plurality of trimming plates are aligned with a second set of arms among the plurality of arms. A trimming tool as described in claim 8, wherein the plurality of platforms includes a first platform of the plurality of platforms located above a second platform of the plurality of platforms. A trimming method includes: rotating a blade holder to align a first blade of the blade holder with a first platform, aligning a second blade of the blade holder with a first trimming plate, and aligning a third blade with a third workpiece; trimming a first workpiece on the first platform using the first blade, and trimming the third workpiece using the third blade at the same time; trimming the second blade using the first trimming plate; rotating the blade holder to align the second blade of the blade holder with the first platform; and trimming a second workpiece on the first platform using the second blade.

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