TWI863225B - Electrical discharge machining apparatus - Google Patents

Abstract

An electrical discharge machining apparatus at least comprising a carrier, a discharge processing unit, and a repairing device is disclosed. The carrier is used to carry at least one object to be machined. The discharge processing unit that comprises at least one electrode and a power supplying unit is used to perform a discharge processing procedure on at least one processing target area of the object to be machined along a processing direction. When an area needed to be repaired appears on the outside of the electrode, the repairing device performs a repairing procedure on the electrode to achieve discharge stability and prevent short-circuit problems in the discharge process.

Description

Discharge processing equipment

The present invention relates to a processing device, in particular to a discharge processing device.

With the booming development of the semiconductor industry, electrical discharge machining technology has been commonly used to process ingots or wafers. Electrical discharge machining (EDM) is a manufacturing process that generates sparks by discharge to make the object to be processed into the desired shape. The dielectric material separates the two electrodes and applies voltage to generate periodic and rapidly changing current discharge to process the above-mentioned object to be processed. The electrical discharge machining technology uses two electrodes, one of which is called the tool electrode, or the discharge electrode, and the other electrode is called the workpiece electrode, which is connected to the above-mentioned object to be processed. During the electrical discharge machining process, there is no actual contact between the discharge electrode and the workpiece electrode.

When the potential difference between the two electrodes increases, the electric field between the two electrodes will also increase until the electric field strength is higher than the dielectric strength. At this time, dielectric collapse occurs, and the current flows through the two electrodes and removes some materials. When the current stops, new dielectric material will flow into the electric field between the electrodes, remove some of the above materials, and provide the dielectric insulation effect again. After the current flows, the potential difference between the two electrodes will return to the level before the dielectric collapse, so that a new dielectric collapse can be repeated.

However, the disadvantage of the existing EDM technology is that the roughness of the cut surface is not good, and there are many surface cracks on the cut surface, which may even extend in the non-cutting direction, resulting in a cracking effect in an unexpected direction. Moreover, when the existing EDM technology is used to perform, for example, ingot cutting, the periphery of the ingot is clamped by a fixture, that is, the side of the ingot is clamped radially to prevent rolling or displacement. However, since the cut surface of the ingot is also located in the radial direction, the traditional technology can only cut the ingot exposed outside the fixture, and cannot cut the area where the fixture and the ingot overlap, so the traditional technology needs to be stopped and readjusted before cutting again. In addition, the existing EDM technology can only cut or thin one wafer at a time, and the speed is quite slow. Furthermore, existing EDM technologies use only a single cutting wire, and existing EDM devices do not have a quick-release design. If the cutting wire breaks accidentally, the machine needs to be shut down and it takes a long time to replace it.

In view of this, the purpose of the present invention is to provide an electric discharge processing device to solve many problems of the above-mentioned known technology.

To achieve the above-mentioned purpose, the present invention proposes a discharge processing device, which at least comprises: a carrier for carrying at least one object to be processed; a discharge processing unit, comprising at least one electrode and a power supply unit, for performing a discharge processing procedure on a processing target area of the object to be processed on the carrier with the electrode along a processing direction, wherein the electrode is suspended in a discharge section, and the power supply unit provides a first power source to the electrode and the object to be processed in the discharge processing procedure, so as to apply a discharge energy to the processing target area of the object to be processed through the electrode located in the discharge section; and a correction device, for performing a correction procedure on a to-be-corrected area of an appearance of the electrode to correct the appearance of the electrode.

Wherein, the correction device performs the correction process on the electrode while the electrode performs the discharge processing process on the processing target area.

Wherein, the correction device performs the correction process on the electrode before or after the electrode performs the discharge processing process on the processing target area.

The correction device corrects the appearance of the electrode by a certain amount of adjustment according to a wear rate of the electrode and a feed speed of the discharge machining process.

Wherein, the correction device corrects the appearance of the electrode in a dynamic adjustment manner according to a real-time state of the electrode.

The correction device includes a trimming element, and the trimming element and the electrode generate a relative displacement during the correction process to correct the appearance of the electrode.

The correction device includes a lifting mechanism and/or a translation mechanism for setting the trimming element so that the trimming element moves and generates the relative displacement with the electrode.

The trimming element is a laser source, a cutting tool or a grinding piece.

The correction device further includes a chip removal element for removing the cutting chips generated when correcting the appearance of the electrode while the correction device is performing the correction procedure.

The correction device includes a rolling mechanism for rolling the electrode during the correction process so that the area of the electrode to be corrected avoids the processing target area of the object to be processed, thereby correcting the appearance of the electrode.

The correction device further includes a striping element for dividing the electrode into a plurality of electrode strips parallel to each other in the discharge section.

The discharge processing unit further includes a clamping element for clamping at least one side of the discharge section of the electrode when the electrode performs the discharge processing procedure, and releasing the at least one side of the discharge section of the electrode when the correction device performs the correction procedure.

The discharge processing device further includes a slag removal unit. When the discharge processing unit performs the discharge processing procedure on the object to be processed, the slag removal unit provides at least one external force to remove the slag generated when the electrode applies the discharge energy to the object to be processed.

The slag removal unit adjusts the direction or position of the external force according to the shape of the object to be processed to remove the slag.

The discharge processing unit further includes a fixture, which is composed of at least two bearing components and at least two holding components respectively assembled in correspondence, and the two holding components are arranged on two bases, and the two bases are moving mechanisms or rotating mechanisms, so that when the discharge processing unit performs the discharge processing procedure along the processing direction, the discharge section of the electrode and the processing target area of the object to be processed move relative to each other in a reciprocating or cyclic manner.

The electrode is in circumferential contact with the two supporting members or the two sides of the electrode are respectively in contact with the two supporting members, so that the electrode is in the suspended state in the discharge section.

The correction device further includes a directional correction element for adjusting the relative position of the electrode and the object to be processed to correct the processing direction according to a deviation phenomenon of the processing direction of the electrode.

The correction device moves the electrode position of the area to be corrected on the surface so that the area to be corrected avoids the processing target area of the object to be processed. The area to be corrected is a fracture phenomenon or a fracture sign.

There are multiple electrodes, and the multiple electrodes are arranged parallel to each other along a first direction and/or a third direction in the discharge section, wherein the third direction is perpendicular to the first direction.

The correction device further includes a whole blade element, which separates the plurality of electrodes so as to keep the plurality of electrodes parallel to each other in the discharge section.

The discharge processing unit further includes a partition column, and the plurality of electrodes abut against the partition column so as to make the plurality of electrodes parallel to each other in the discharge section.

It further includes a stabilizing component having a plurality of guide grooves for movably accommodating the plurality of electrodes, so as to stabilize and correct the plurality of electrodes so that the plurality of electrodes can perform the discharge processing along the processing direction.

The correction device moves the position of at least one electrode of the plurality of electrodes that has the area to be corrected on the surface, so that the area to be corrected avoids the processing target area of the object to be processed, and the area to be corrected is a fracture phenomenon or a fracture sign.

As mentioned above, the discharge processing device according to the present invention has the following advantages:

(1) The correction device can correct the appearance of the electrode by the relative displacement between the trimming element and the electrode to prevent short circuit problems caused by the discharge machining process.

(2) The correction device can roll or move the electrode to avoid the processing target area of the object to be processed to prevent short circuit problems caused by the discharge processing process.

(3) The chip removal element can remove the chip and other materials remaining on the knife dressing element and/or the electrode by the relative displacement between the knife dressing element and the electrode. The slag removal unit can provide external force to one or more processing target areas to help remove the slag generated by the discharge processing process or the correction process.

(4) The stripping element can cut the discharge section of the electrode into several electrode strips by the relative displacement between the trimming element and the electrode, thereby avoiding the problem of uneven wear of the plate electrode.

(5) The position correction element can correct the processing direction of the electrode and the object to be processed, thereby avoiding deviation in the processing direction.

(6) The clamping element can clamp the electrode to prevent the electrode from changing the processing direction due to being pulled.

(7) The knife element can keep multiple electrodes parallel to each other, which can prevent the surface of the workpiece from being skewed or uneven after discharge processing.

(8) Stabilizing components can reduce the vibration of the electrode, provide guidance as a separator, and can be used as an electrical contact.

10: Discharge processing equipment

20: Carrier

21: Carrier plate

22: Stable components

28: Contact surface

30: Discharge processing unit

31: Electrical contacts

32: Electrode

32’: Electrode strip

34: Power supply unit

36: Jig

40: Load-bearing components

41: Axle hole

42: Limiting slot

43: Groove

44a: First sheet

44b: Second sheet

47: Leading angle

50: Holding component

51: Bump

52: Seat

53: Bump

55: coupling

58: Motor

60: Tension measurement unit

62: Vibration measurement unit

64: Slag discharge unit

65: Spray head

66: Tension control module

68: Controller

80: Correction device

82: Knife repair element

83: Chip removal element

84: Rolling mechanism

85: Striping components

86: Clamping element

87: Whole knife element

88: Position correction element

89: Detection element

90: Lifting mechanism

91:Track

92: Translation mechanism

93: Slide table

95:Track

96:Carrier

97: Slide table

100: Objects to be processed

110: Processing target area

281:Guide groove

A: Both sides

B: Discharge section

C: Region

D: Spacing

X: First direction

Y: Second direction

Z: Third direction

F: Processing direction

P1: First Power Source

FIG. 1 is a front view schematic diagram of the discharge machining device of the present invention, wherein FIG. 1 (A) and (B) are schematic diagrams of different implementation examples, respectively.

FIG2 is a schematic top view of the partial structure of the EDM device of the present invention. FIG2(A) has multiple electrodes in a ring-shaped design, FIG2(B) has a single electrode in a ring-shaped design, and FIG2(C) has a single electrode in a cross-connected design.

FIG3 is a schematic diagram of the configuration of the fixture of the present invention using multiple supporting members to arrange electrodes in parallel, wherein FIG3(A) and FIG3(B) are different implementation examples, FIG3(A) shows that multiple electrodes are parallel to each other in the processing direction F to sequentially perform a discharge processing procedure on a single processing target area, and FIG3(B) shows that multiple electrodes are parallel to each other in the first direction X to simultaneously perform a discharge processing procedure on multiple processing target areas.

Figure 4 is a schematic diagram showing the phenomenon of inconsistent electrode wear during EDM, where Figures 4 (A) and (B) are schematic diagrams obtained from different viewing angles.

FIG5 is a schematic diagram of the correction device of the EDM device of the present invention having a knife-repairing element, wherein FIG5 (A) and (B) are schematic diagrams obtained from different viewing angles.

FIG6 is a schematic diagram of the correction device of the discharge machining device of the present invention having a lifting mechanism, wherein FIG6 (A), (B) and (C) are schematic diagrams of different implementation examples respectively.

FIG. 7 is a schematic diagram of the correction device of the EDM device of the present invention having a chip removal element, wherein FIG. 7 (A) and (B) are schematic diagrams obtained from different viewing angles.

FIG8 is a schematic diagram of the correction device of the EDM device of the present invention having a scrolling mechanism, wherein FIG8 (A) and (B) are schematic diagrams obtained from different viewing angles.

FIG9 is a schematic diagram of the process of the correction device of the discharge machining device of the present invention correcting the electrode by shifting, wherein FIG9 (A), (B) and (C) are schematic diagrams of the process steps respectively.

FIG10 is a schematic diagram of the correction device of the EDM device of the present invention using a stripping element to perform a stripping process, wherein FIG10 (A) and (B) are schematic diagrams obtained from different viewing angles.

FIG11 is a schematic diagram of the correction device of the EDM device of the present invention performing the EDM process with a strip component, wherein FIG11 (A) and (B) are schematic diagrams obtained from different viewing angles.

FIG12 is a schematic diagram of the correction device of the EDM device of the present invention having a straight blade element, wherein FIG12 (A) and (B) are schematic diagrams obtained from different viewing angles.

FIG. 13 is a schematic diagram of the correction device of the EDM device of the present invention having a position correction element, wherein FIG. 13 (A) and (B) are schematic diagrams obtained from different viewing angles.

Figure 14 is a schematic diagram of the jig rolling electrode of the EDM device of the present invention.

Figure 15 is a schematic diagram of the EDM device of the present invention having a tension control module.

FIG. 16 is a schematic diagram of the discharge machining device of the present invention having a slag removal unit, wherein FIG. 16 (A) and (B) are schematic diagrams of different implementation examples, respectively.

In order to facilitate understanding of the technical features, content and advantages of the present invention and the effects that can be achieved, the present invention is described in detail as follows with the help of diagrams and in the form of embodiments. The diagrams used are only for illustration and auxiliary instructions, and may not be the true proportions and precise configurations after the implementation of the present invention. Therefore, the proportions and configurations of the attached diagrams should not be interpreted or limited to the scope of rights of the present invention in actual implementation. In addition, for ease of understanding, the same components in the following embodiments are indicated by the same symbols.

In addition, the terms used throughout the specification and the scope of the patent application generally have the ordinary meaning of each term used in this field, in the content disclosed herein, and in the specific content, unless otherwise specified. Certain terms used to describe the present invention will be discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the present invention.

The use of "first", "second", "third", etc. in this article does not specifically refer to the order or sequence, nor is it used to limit the present invention. It is only used to distinguish components or operations described by the same technical terms.

Secondly, the words "include", "including", "have", "contain", etc. used in this article are open terms, which means including but not limited to.

FIG1 is a front view schematic diagram of the discharge machining device of the present invention, wherein (A) and (B) are schematic diagrams of different implementation examples. FIG2 is a top view schematic diagram of the partial structure of the discharge machining device of the present invention, wherein FIG2(A) has multiple electrodes and is designed in a ring-shaped manner, FIG2(B) has a single electrode and is designed in a ring-shaped manner, and FIG2(C) has a single electrode and is designed in a cross-connected manner. FIG3 is a schematic diagram of the configuration of the fixture of the present invention with multiple supporting members to arrange electrodes in parallel, wherein FIG3(A) shows that multiple electrodes perform the discharge machining process on a single processing target area in sequence, and FIG3(B) shows that multiple electrodes perform the discharge machining process on multiple processing target areas simultaneously.

Please refer to Figures 1 to 3. The EDM device 10 of the present invention at least includes a carrier 20 and an EDM unit 30. The carrier 20 is used to carry at least one object 100 to be processed. The two ends of the electrode 32 of the EDM unit 30 are respectively bridged (as shown in Figure 2(C)) or wrapped (as shown in Figures 1(A), 1(B), 2(A) and 2(B)) on two fixtures 36, so that the electrode 32 is suspended in the discharge section B. The electrode 32 of the EDM unit 30 extends along the second direction Y, so that the electrode 32 is parallel to the second direction Y in the discharge section B, wherein the second direction Y is perpendicular to the first direction X and the processing direction F. The electrode 32 located in the discharge section B (i.e., the discharge section B of the electrode 32) and the processing target area 110 of the object 100 to be processed move relative to each other in a reciprocating or cyclic manner (for example, generating relative displacement along the direction of the hollow double arrow or single arrow (second direction Y) shown in FIG. 1), so as to perform a discharge processing procedure on the processing target area 110 of the object 100 to be processed on the carrier 20 with the electrode 32 along the processing direction F, for example, performing a discharge processing procedure such as cutting (Cutting) and/or grinding (Electric Discharge Grinding, EDG) on the processing target area 110 of the object 100 to be processed sequentially or simultaneously. The power supply unit 34 of the discharge processing unit 30 provides a first power source P1 to the electrode 32 and the object to be processed 100 during the discharge processing procedure, so as to apply discharge energy to the processing target area 110 of the object to be processed 100 via the electrode 32 located in the discharge section B. In the embodiments shown in FIGS. 1 to 3 , the axis of the fixture 36 is perpendicular to the processing direction F. However, the present invention is not limited thereto, and in other feasible embodiments, the axis of the fixture 36 may also be, for example, parallel to the processing direction F. The object to be processed 100 may be any conductor or semiconductor structure, such as an ingot or a wafer. The carrier 20 of the present invention can be a fixed-position carrier, or a movable or rotatable carrier. The present invention is illustrated by taking the carrier 20 as a working platform having a supporting plate 21, but the present invention is not limited to this. The carrier 20 of the present invention can also selectively omit the supporting plate 21 or replace the supporting plate 21 with an adhesive layer (such as conductive glue). In order to prevent the electrode 32 from shaking during the EDM process, the EDM device 10 of the present invention selectively has a stabilizing member 22, wherein the stabilizing member 22 is, for example, disposed on the carrier 20 and supported between the two sides A of the electrode 32. The type of the stabilizing member 22 is not particularly limited, and any type that can reduce the shaking of the electrode 32 can be used in the present invention. For example, the contact surface 28 between the stabilizing member 22 and the electrode 32 may be a plane (as shown in FIG. 1(A)), and the shaking phenomenon can be reduced by, for example, supporting the electrode 32 in a suspended state, or the contact surface 28 between the stabilizing member 22 and the electrode 32 may optionally have a guide groove 281 (as shown in FIG. 1(B)), and the guide groove 281 can not only support the electrode 32 in a suspended state, but also stabilize the electrode 32 and provide a guiding effect when the electrode 32 moves back and forth relative to the object 100 to be processed. In addition, the stabilizing member 22 can also be selectively designed as a highly retractable structure, thereby changing the height of the contact surface 28 between the stabilizing member 22 and the electrode 32.

As shown in FIGS. 1 to 3 , the EDM unit 30 includes at least one electrode 32, a power supply unit 34, and a fixture 36. The number of electrodes 32 may be, for example, one (as shown in FIGS. 2(B) and 2(C) ) or a plurality of electrodes 32 for performing an EDM process on a processing target area 110 or a plurality of processing target areas 110 (as shown in FIGS. 2(A) and 3(B) ) defined on the object 100 to be processed. FIG3 is a schematic diagram of two implementations of the present invention in which electrodes are arranged in parallel by using multiple supporting members, wherein FIG3(A) shows that multiple electrodes 32 are arranged in parallel with each other along the processing direction F, whereby multiple electrodes 32 can sequentially perform the discharge processing procedure on a single processing target area 110, and FIG3(B) shows that multiple electrodes 32 are arranged in parallel with each other along the first direction X, whereby multiple electrodes 32 can simultaneously perform the discharge processing procedure on multiple processing target areas 110. Taking a plurality of electrodes 32 having a discharge section B extending along the second direction Y as an example, these plurality of electrodes 32 are, for example, linear or plate-shaped conductive structures parallel to each other in the first direction X (as shown in FIG. 3(B)) and/or the processing direction F (as shown in FIG. 3(A)), such as conductive wires or foils, wherein the processing direction F is parallel to the third direction Z and perpendicular to the first direction X. The number of electrodes 32 is selectively determined according to actual needs. The spacing between these electrodes 32 corresponds to the cutting or thinning thickness of the object 100 to be processed. The transverse cross-sections of these electrodes 32 can be any shape that is the same or different from each other, such as linear or plate-shaped (or sheet-shaped), or any symmetrical (such as circular, square, rectangular) or asymmetrical shape. The power supply unit 34 is electrically connected to the electrode 32 and the object to be processed 100 through the electrical contact 31. The power supply unit 34 can be a set of power output or a plurality of sets of power outputs for supplying the first power P1. The power supply unit 34 can also be electrically connected to the electrode 32 in series or in parallel. As long as the discharge energy can be applied to the processing target area 110 of the object to be processed 100 through the electrode 32, it can be applied to the present invention.

The material of the electrode 32 can be selected from the group consisting of copper, brass, molybdenum, tungsten, graphite, steel, aluminum and zinc. The thickness of the discharge electrode 32 is less than about 300 μm, and the thickness range is preferably about 30 μm to about 300 μm. However, it should be noted that although the present invention uses the number of electrodes 32 as an example, it is not limited to this. A single electrode, as shown in FIG. 2(C), also falls within the scope of protection claimed by the present invention. Since a person with ordinary knowledge in the technical field to which the present invention belongs should understand how to apply the technical means of the present invention to a single electrode or a plurality of electrodes according to the disclosure of the present invention and the prior art, it will not be further described here. When the plurality of electrodes 32 are arranged parallel to each other in the processing direction F, the plurality of electrodes 32 will sequentially cut or polish the processing target area 110 of the object 100 to be processed along the processing direction F, and the electrode 32 located at the rear will repeatedly pass through the position that the electrode 32 located at the front has passed. In other words, taking the processing direction F from top to bottom as an example, even if the electrode 32 located in the front (e.g., the electrode below) is broken, the electrode 32 located in the rear (e.g., the electrode above) can still replace the electrode 32 in the front to apply discharge energy to the processing target area 110 of the object 100 to be processed. Therefore, the present invention can avoid adverse effects such as process interruption caused by the electrode 32 breaking through the electrode 32 by using the electrode replacement function.

Please refer to Figures 1 and 2. The fixture 36 is selectively composed of at least two supporting members 40 and at least two holding members 50 respectively correspondingly assembled. The two sides A of the electrode 32 are respectively movably or fixedly pressed against the two supporting members 40, so that the discharge section B of the electrode 32 is suspended, wherein the two supporting members 40 are separated from each other by a distance. The size of the two supporting members 40 and the height of the electrode 32 they carry are not particularly limited to be the same or different, as long as the discharge section B of the electrode 32 can be suspended, it can be applied to the present invention. The holding member 50 is selectively detachably or fixedly assembled with the supporting member 40, and the holding member 50 is arranged on a base 52, wherein the base 52 can be a structure that fixes the position of the holding member 50, or the base 52 is a motion mechanism that can move or rotate the holding member 50, thereby correspondingly driving the supporting member 40 to move or rotate, so that the discharge section B of the electrode 32 can move back and forth left and right. The present invention is not limited to the stage 20 driving the workpiece 100 to move toward the electrode 32 of the EDM unit 30 or the base 52 driving the electrode 32 to move toward the workpiece 100. As long as the EDM unit 30 and the workpiece 100 on the stage 20 can move relative to each other along the above-mentioned processing direction F, the present invention can be applied. Taking the base 52 as an example of a motion mechanism, the motion mechanism can be, for example, any moving mechanism capable of reciprocating left and right movement, such as a sliding mechanism, or any rotating mechanism capable of reciprocating rotation or cyclic rotation, such as a motor, to drive the holding member 50 to move or rotate accordingly. Thus, the supporting member 40 and the holding member 50 can selectively reciprocate or cyclically move with the electrode 32, so that the electrode 32 applies discharge energy to the object 100 to be processed in the discharge section B. In order to allow the electrode 32 to have better adhesion to the supporting member 40, the edge of the supporting member 40 selectively has a chamfer 47, as shown in FIG2.

In other feasible embodiments, the discharge processing unit 30 of the present invention can, for example, rotate two or more supporting members 40 in a reciprocating or cyclic manner to drive the discharge sections B of the plurality of electrodes 32 to move in a reciprocating or cyclic manner. Two implementation examples of the connection configuration of the support member 40 and the electrode 32 can be shown in Figures 3(A) and (B). Each electrode 32 surrounds four support members 40 respectively. Figures 3(A) and 3(B) are different implementation examples. Figure 3(A) shows that the electrodes 32 are arranged in parallel along the processing direction F, so that multiple electrodes 32 can perform the discharge processing procedure on a single processing target area 110 in sequence. Figure 3(B) shows that the electrodes 32 are arranged in parallel along the first direction X, so that multiple electrodes 32 can perform the discharge processing procedure on multiple processing target areas 110 at the same time. These electrodes 32 share two of the four supporting members 40, so the two sides A of these electrodes 32 are in contact with each other to present a stacked state and are movably pressed against the two shared supporting members 40. The remaining supporting members 40 are arranged in pairs at different vertical heights or horizontal positions, so that the electrodes 32 are arranged parallel to each other at intervals in the processing direction F (as shown in FIG. 3 (A)) or in the first direction X (as shown in FIG. 3 (B)). Thus, when the supporting member 40 is reciprocatingly or cyclically rotated, the discharge section B of these electrodes 32 will also be displaced in the second direction Y relative to the object 100 to be processed. Among them, the shared supporting member 40 is, for example, synchronously reciprocatingly or cyclically rotated.

In short, the present invention uses multiple methods to make the discharge section B of the electrode 32 and the processing target area 110 of the object 100 move relative to each other along the processing direction F. The first method is that the object 100 moves along the processing direction F and the electrode 32 is fixed in the processing direction F. The second method is that the electrode 32 moves along the processing direction F and the object 100 is fixed in the processing direction F. The third method is that the electrode 32 and the object 100 move in the opposite direction along the processing direction F.

Similarly, the present invention can also adopt multiple methods to make the discharge section B of the electrode 32 and the processing target area 110 of the object 100 to be processed move relative to each other along the second direction Y. The first method is that the object 100 to be processed moves along the second direction Y and the electrode 32 is fixed in the second direction Y. The second method is that the electrode 32 moves along the second direction Y and the object 100 to be processed is fixed in the second direction Y. The third method is that the electrode 32 and the object 100 to be processed move in opposite directions along the second direction Y. Among them, in the second method of making the discharge section B and the processing target area 110 move relative to each other along the second direction Y, the present invention can also, for example, reciprocate or cyclically roll the electrode 32 by the jig 36, so that the electrode 32 moves left and right (reciprocatingly) or continuously (cyclically), or the electrode 32 is fixed on the jig 36, but the jig 36 is moved left and right (reciprocatingly) along the second direction Y shown in the figures by the seat 52 to indirectly move the electrode 32.

However, it should be noted that although the present invention lists the above-mentioned various moving methods for performing the discharge processing procedure, it is not intended to limit the present invention. For example, the scope of protection claimed by the present invention may also cover the case where the object 100 to be processed moves along the processing direction F and the electrode 32 is fixed in both the processing direction F and the second direction Y, or the electrode 32 moves along the processing direction F and the object 100 to be processed is fixed in both the processing direction F and the second direction Y. In other words, any moving method that can perform the discharge processing procedure falls within the scope of protection claimed by the present invention.

As shown in FIG. 4 (A) and (B), in the EDM process, the appearance (e.g., the bottom surface) of the electrode 32 is prone to inconsistent wear (i.e., the area to be corrected defined by the present invention), which leads to a short circuit problem in the EDM process. Although there are many reasons (such as external reasons and internal reasons) that may cause the electrode 32 to have inconsistent wear, in order to more thoroughly solve the short circuit problem caused by the inconsistent wear, as shown in FIG. 5 (A) and (B), one of the features of the EDM device 10 of the present invention is that it has a correction device 80 for correcting the electrode 32 that has an area to be corrected in appearance. The correction device 80 performs a correction process on the electrode 32, for example, the appearance of the electrode 32 is corrected while the electrode 32 performs the discharge processing process on the processing target area 110. However, the present invention is not limited thereto, and the correction device 80 may also perform the correction process on the electrode 32, for example, before or after the electrode 32 performs the discharge processing process on the processing target area 110. That is, no matter when the correction device 80 performs the correction process on the electrode 32, as long as the appearance of the electrode 32 is corrected so that its discharge can be stable, it falls within the scope of protection claimed by the present invention. Although (A) and (B) of Figure 4 are schematic diagrams obtained from different viewing angles, in order to simplify the drawings, Figure 4 (A) only shows a partial structure of each component, and Figure 4 (B) only shows the components to be specifically described, and Figure 5 and other similar figures are presented in roughly the same way, so they are not described here. In addition, in the embodiments shown in Figures 4 to 16, the axis of the fixture 36 is parallel to the processing direction F.

For example, as shown in Fig. 5 (A) and (B), the correction device 80 of the present invention may include a trimming element 82, which is used to correct the appearance of the electrode 32 by the relative displacement between the trimming element 82 and the electrode 32 during the correction process. The trimming element 82 of the present invention is, for example, a laser source, a tool or a grinding piece, which may be fixed or movably arranged on the carrier 20 or the base 52, or independently arranged in the EDM device 10 (as shown in Fig. 6 (A) to (C)), but the present invention is not limited thereto, and any technical means that can change the appearance of the electrode 32 are within the scope of protection claimed by the present invention. Moreover, as long as the trimming element 82 of the correction device 80 can correct the appearance of the discharge section B of the electrode 32, for example, to make its wear level uniform or to obtain the desired appearance of the electrode 32, then regardless of whether the correction device 80 of the present invention performs a correction procedure on the appearance of the electrode 32 in real time, regularly, non-regularly, periodically or non-periodically, it all falls within the scope of protection claimed by the present invention.

The correction device 80 of the present invention can selectively correct the appearance of the electrode 32 in a quantitative adjustment manner according to the wear rate of the electrode 32 (e.g., theoretical or measured wear rate) and the feed rate of the discharge machining process, wherein the correction device 80 can, for example, correct the appearance of the electrode 32 in a quantitative adjustment manner along the machining direction F (e.g., moving the trimming element 82 relative to the object 100 at a predetermined speed along the machining direction F) or in a quantitative adjustment manner along the second direction Y (e.g., moving the electrode 32 relative to the object 100 at a predetermined speed along the second direction Y by a predetermined length). Alternatively, the correction device 80 can selectively correct the appearance of the electrode 32 in a dynamic adjustment manner according to the real-time state of the electrode 32. For example, the present invention can also selectively obtain the real-time status of the electrode 32, such as the real-time wear degree, by means of the detection element 89. The detection element 89 is, for example, a discharge change detection element or a photoelectric detection element or an image detection element having a light emitter and a light receiver, which is used to obtain the wear degree of the discharge section B of the electrode 32 by means of light interruption or light intensity change.

In addition, the trimming element 82 can be selectively designed as a lifting type, so that the height can be changed according to the wear rate of the electrode 32 and the feed speed of the discharge processing procedure, so that the wear degree of the discharge section B of the electrode 32 is consistent. For example, assuming that the moving speed of the carrier 20 (the feed speed of the discharge processing procedure) is d length per minute, and the theoretical wear rate of the electrode 32 is 0.1d length per minute, if the trimming element 82 is set on the carrier 20, then when the discharge processing procedure is performed, the trimming element 82 of the present invention can be attached to the bottom surface of the electrode 32, and through the lifting design, it can extend 0.1d length per minute toward the electrode 32, so that the discharge section B of the electrode 32 can reach a predetermined wear degree during the entire discharge processing procedure. Similarly, the trimming element 82 of the present invention can also be raised and lowered to a desired height in a dynamic adjustment manner according to the instantaneous state of the electrode 32, such as the instantaneous wear degree, so as to instantly correct the appearance of the electrode 32. For example, the trimming element 82 of the present invention can be a telescopic design to raise and lower the height, or the trimming element 82 of the present invention can also be set on a lifting mechanism 90, as shown in Figures 6 (A) to (C), so that the height can be raised and lowered as required by the correction process, and the feeding speed of the trimming element 82 can be controlled. The lifting mechanism 90 can be, for example, a slide-type lifting platform as shown in Figures 6 (B) and 6 (C), that is, it has a slide 93 that can be raised and lowered along a track 91, and the trimming element 82 is, for example, set on the slide 93 via a carrier that supports the wafer or via a carrier 96. Alternatively, the lifting mechanism 90 may be, for example, a spring-type (or telescopic) lifting platform as shown in FIG. 6 (A). Moreover, the lifting mechanism 90 of the present invention is not limited to manual or automatic designs, as long as the trimming element 82 can be lifted and lowered, it belongs to the scope of protection claimed by the present invention. In addition, the trimming element 82 may also be arranged on the lifting mechanism 90, for example, via a translation mechanism 92, as shown in FIG. 6 (C), that is, a slide 97 that can be translated along a track 95, so that when performing a correction procedure, the trimming element 82 can be selectively moved to the bottom of the electrode 32 along the track 95 by using the translation mechanism 92, and then moved out after the correction procedure is completed. Although the present invention uses the structure shown in FIG. 6 as an example for explanation, the present invention is not limited thereto. Any design that can move the trimming element 82 to produce relative displacement with the electrode 32 or that can move the electrode 32 to produce relative displacement with the trimming element 82 is within the scope of protection claimed by the present invention.

Taking the trimming element 82 as a laser source or a tool as an example, it can be located at the bottom or side of the electrode 32. When the trimming element 82 and the electrode 32 are relatively displaced, the laser light of the laser source or the blade of the tool can be used to remove part of the thickness of the bottom of the electrode 32, so that the appearance of the electrode 32 with inconsistent wear degree on the discharge section B of the electrode 32 becomes flat. Taking the trimming element 82 as an abrasive piece as an example, it can be located at the bottom of the electrode 32. When the trimming element 82 and the electrode 32 are relatively displaced, the abrasive component of the abrasive piece can be used to remove part of the thickness of the bottom of the electrode 32, so that the appearance of the electrode 32 with inconsistent wear degree can be flattened, as shown in Figure 5 (B) and Figure 6 (A) to (C).

In addition, since the correction device 80 may leave materials such as cuttings on the trimming element 82 or the electrode 32 during the correction process, as shown in Fig. 7 (A) and (B), the correction device 80 of the present invention further selectively includes a cutting removal element 83, which may be a cleaning tool such as a sponge or a scraper or an ultrasonic element, and is disposed on the carrier 20, the base 52 or other elements to abut against the bottom of the electrode 32 and/or the top of the trimming element 82, so that when the correction device 80 corrects the appearance of the electrode 32 with the trimming element 82 by the relative displacement between the trimming element 82 and the electrode 32, the cutting removal element 83 can also remove materials such as cuttings remaining on the trimming element 82 and/or the electrode 32 at the same time. The arrangement of the chip removal element 83 is not limited to a fixed or movable design. As long as it can achieve cleaning and removal of residual knife chips and other materials, it belongs to the scope of protection claimed by the present invention. In addition, the chip removal element 83 of the present invention can also be selectively an ultrasonic element, and for example, it can be arranged on the knife trimming element 82, the lifting mechanism 90 or the translation mechanism 92 shown in Figure 6, thereby increasing the knife trimming rate and providing a chip removal effect to reduce the jamming of sanding paper or the adhesion of grinding chips to the electrode 32.

In addition, the correction device 80 of the present invention can also remove the region C of the electrode 32 with inconsistent wear levels by displacement, so as to prevent it from being used as the discharge section B. As shown in FIG8(A) and FIG8(B), the correction device 80 of the present invention can optionally include a rolling mechanism 84, for example. When the electrode 32 has an area to be corrected in the discharge section B, such as a wear phenomenon of inconsistent degree or even a fracture phenomenon or sign, the rolling mechanism 84 of the correction device 80 can roll at least the electrode 32 with the area to be corrected in the appearance, or move the electrode 32 with the area to be corrected (area C) in the appearance to avoid (or stagger) the processing target area 110 of the object 100, for example, rolling the fractured electrode 32 to the outside of the stabilizing member 22, so that other normal areas of the electrode 32 can be used as the discharge section B, and the interference caused by the fractured electrode 32 can be blocked. The present invention can, for example, use a holding member 50 with a rolling design and a jig 36 of a carrying member 40 as a rolling mechanism 84. The rolling mechanism 84 of the present invention is not limited to manual or automatic design, and the structural design is not limited to the above examples. As long as the area with inconsistent wear degree of the electrode 32 can be removed to avoid it from being used as the discharge section B, it belongs to the scope of protection requested by the present invention.

For example, as shown in FIG. 9(A) to FIG. 9(C), during the process of performing the discharge machining procedure (i.e., before the discharge machining procedure is completed), if the appearance of the bottommost electrode 32 in the discharge section B is broken as shown in FIG. 9(A), the present invention can selectively move the position of the object 100 to be processed by means of displacement (for example, moving to the left, as shown in FIG. 9(B), so that the electrode 32 with a break on the right side is separated from (avoided) the object 100 to be processed). Then, for example, moving to the right again, so that the electrode 32 with a break on the left side is separated from (avoided) the object 100 to be processed. At this time, the broken electrode 32 can be selectively sucked or adhered, or even cut off, or even just make the broken electrode 32 separate from the object 100. Then, as shown in FIG9 (C), the object 100 can be moved to the previous discharge processing position, and other unbroken electrodes 32 can continue to perform the previously unfinished discharge processing procedure on the object 100 until the entire discharge processing procedure is completed. Therefore, the present invention can avoid the need for the traditional process to completely interrupt the entire discharge processing device and discharge processing procedure, and manually arrange the electrode 32 before continuing the above-mentioned unfinished discharge processing procedure. Similarly, the present invention can also roll the broken electrode 32 to the left and/or right to the outside of the stabilizing member 22, for example, by means of the jig 36 (or the rolling mechanism 84 of the correction device 80), as shown in FIG9(C), and then continue to perform the previously unfinished discharge processing procedure on the object 100 to be processed with other unbroken electrodes 32 until the entire discharge processing procedure is completed. In the implementation examples shown in FIG. 9(A) to FIG. 9(C), the present invention takes the stabilizing member 22 as an example, which is located on the carrier 20 and, for example, on both sides of the object 100 to be processed. Thus, after the electrode 32 is discharged to the outside of the stabilizing member 22, it naturally cannot enter the inside of the stabilizing member 22, so the electrode 32 with a broken phenomenon can be easily removed. Similarly, the present invention is not limited to this. The stabilizing member 22 of the present invention can also be selectively located on the base 52, or the stabilizing member 22 can be located on the carrier 20 and the base 52 at the same time, and the effect of removing the broken electrode 32 by displacement can also be achieved.

In short, the correction device 80 of the present invention can make the wear degree of the discharge section B of the electrode 32 consistent, for example, by removal, so as to provide a stable discharge effect. Alternatively, the correction device 80 of the present invention can, for example, remove the area C of the electrode 32 with inconsistent wear degree by displacement, so as to avoid it from being the discharge section B. However, the present invention is not limited to this, and the correction device 80 of the present invention can also, for example, combine the above two methods or adopt any feasible method to achieve the effect of correcting the appearance of the electrode 32. In other words, no matter what technical means the correction device 80 adopts to perform the correction procedure on the electrode 32, as long as it can solve the short circuit problem caused by the inconsistent wear degree phenomenon, it belongs to the scope of protection claimed by the present invention.

The correction device 80 of the present invention may further optionally include at least one clamping element 86 (as shown in FIGS. 4 to 9 ), which is fixedly disposed on the base 52 or other components of the discharge processing device 10 to selectively clamp at least one side, such as both sides, of the discharge section B of the electrode 32. The implementation form of the clamping element 86 is, for example, a structure having a vise, but is not limited thereto. For example, when the present invention utilizes the base 52 to be moved left and right (along the second direction Y) to synchronously drive the electrode 32 to move left and right relative to the object to be processed 100 via the fixture 36, the clamping element 86 can selectively clamp the electrode 32 (as shown in FIG. 8 (B)) so that the electrode 32 can perform the discharge processing procedure. The clamping element 86 can not only be used to selectively fix the position of the electrode 32, but also prevent the electrode 32 from loosening due to being pulled during the EDM process, which causes the tension of the electrode 32 to decrease, thereby causing the EDM process to be adversely affected. Similarly, when the fixture 36 needs to roll the electrode 32 (for example, to perform a correction process or to move the electrode 32 to perform the EDM process), the clamping element 86 can loosen the electrode 32.

As shown in FIGS. 5 to 9, in the discharge processing procedure, the discharge section B of the electrode 32 moves along the processing direction F to apply discharge energy to the processing target area 110 of the object 100 to be processed, and the discharge section B of the electrode 32 and the processing target area 110 of the object 100 to be processed move relatively along the second direction Y at the same time. Therefore, in order to avoid the electrode 32 from generating The jitter phenomenon, the discharge processing device 10 of the present invention selectively has a stabilizing member 22 disposed on the base 52 or other components of the discharge processing device 10, such as the carrier 20, and the stabilizing member 22 is disposed, for example, on at least one side or outside of the discharge section B of the electrode 32. The type of the stabilizing member 22 is not particularly limited, as long as it can reduce the jitter of the electrode 32, it can be applied to the present invention. For example, the stabilizing member 22 has a guide groove 281, and the size of the guide groove 281, such as the depth or width, is sufficient to flexibly accommodate the electrode 32. The number of the guide grooves 281 corresponds to the number of the electrodes 32, thereby maintaining the distance between the electrodes 32, reducing the swing along the first direction X, effectively stabilizing the electrode 32 and providing a guiding effect. In addition, the stabilizing member 22 can also be selectively designed as a highly retractable structure, thereby changing the height of the guide groove 281 where the stabilizing member 22 contacts the electrode 32 according to the depth of the processing groove of the processing target area 110 of the object 100 to be processed. The strip structure between two adjacent guide grooves 281 of the stabilizing member 22 can be used as a partition column to separate multiple electrodes 32 and make them parallel to each other. The electrode 32 is against the partition column, for example, the electrode 32 is movably against the partition column, the position of the partition column is fixed, but it can be a fixed or rolling design, and has a limit groove to serve as a guide column. The partition column can also be selectively made of conductive material, so that the electrode 32 can be electrically connected to the power supply unit 34 through the partition column, that is, the partition column can also be selectively used as the electrical contact 31 of Figure 1. In addition, the partition column can also be made of insulating material to avoid electrical connection between the electrodes 32. The two supporting members 40 are, for example, synchronously reciprocating or cyclically rotating at the same speed, so the reciprocating or cyclic movement speeds of the electrodes 32 along the second direction Y are also the same.

As shown in Fig. 10(A), Fig. 10(B), Fig. 11(A) and Fig. 11(B), the correction device 80 of the present invention may optionally further include at least one striping element 85, for example, disposed on the base 52 or at any position of the EDM device, and the electrode 32 (for example, a plate) may be cut into a plurality of electrode strips 32' (for example, strips) parallel to each other by relative movement between the striping element 85 and the plate-shaped electrode 32. The striping element 85 is, for example, a vise with multiple blades, but is not limited thereto. For example, if the blade of the vise clamp clamps the plate-shaped electrode 32, when the striping element 85 and the plate-shaped electrode 32 move relative to each other along the second direction Y (for example, the position of the striping element 85 is fixed, and the electrode 32 is rolled by the fixture 36 to move horizontally relative to the striping element 85 in the second direction Y), the wider plate-shaped electrode 32 will be cut into a plurality of narrower electrode strips 32'. Since the distance between adjacent blades is equal to the width of the electrode strip 32', the present invention can also change the distance or number of the multiple blades of the vise clamp to adjust the width or number of the electrode strips 32'. In addition, if the present invention adopts the method of rolling the electrode 32 so that the stripping element 85 can perform the stripping process on the electrode 32, since the fixture 36 has the need to roll the electrode 32, the clamping element 86 of the present invention can selectively release the electrode 32 temporarily when the stripping element 85 performs the stripping process. Similarly, if the present invention adopts the method of moving the stripping element 85 to perform the stripping process on the electrode 32 with a fixed position, the clamping element 86 of the present invention can selectively clamp the electrode 32 when the stripping element 85 performs the stripping process to prevent the electrode 32 from rolling.

As shown in Figures 12(A) and 12(B), the correction device 80 of the present invention may optionally include at least one straightening knife element 87, for example, it is arranged on the base 52 or at any position of the discharge processing device 10, and the straightening knife element 87 contacts the electrode 32. Through the relative movement between the straightening knife element 87 and the electrode 32, the discharge section B of the strip or plate-shaped electrode 32 can be arranged into a straight line or vertical shape. If the number of electrodes 32 is plural, the straightening knife element 87 can arrange the electrodes 32 into a state parallel to each other. The trimming element 87, for example, has a plurality of teeth, and two adjacent teeth respectively abut the two sides of each electrode 32, and the trimming element 87, for example, is a movable design, for example, moving from one side of the discharge section B to the other side (along the second direction Y), but not limited thereto. In addition, if the present invention performs a trimming process on a fixed electrode 32 by moving the trimming element 87, the clamping element 86 of the present invention can selectively clamp the electrode 32 when the trimming element 87 performs the trimming process to prevent the electrode 32 from loosening. Similarly, if the present invention adopts the method of rolling the electrode 32 so that the knife straightening element 87 can perform the knife straightening process on the electrode 32, because the fixture 36 has the need to roll the electrode 32, the clamping element 86 of the present invention can selectively release the electrode 32 temporarily when the knife straightening element 87 performs the knife straightening process. Among them, the comb teeth of the knife straightening element 87 can be used as a partition column to separate multiple electrodes 32 and make them parallel to each other.

As shown in FIGS. 13(A) and 13(B), the correction device 80 of the present invention may optionally further include a position correction element 88, which is used to adjust the relative position of the electrode 32 and the object 100 to be processed according to the deviation phenomenon when the processing direction F of the electrode 32 is deflected or otherwise offset to correct the processing direction F of the electrode 32 and the object 100. For example, the position correction element 88 may be a telescopic push rod (e.g., a manual or electric telescopic push rod), and by, for example, pushing the stage 20, the electrode 32, or other components in the EDM apparatus that can change the relative position of the electrode 32 or the object 100 to be processed, the relative position of the electrode 32 and the object 100 to be processed can be adjusted accordingly along the first direction X. For example, the present invention can detect whether the processing direction F of the electrode 32 is offset by using the detection element 89. The detection element 89 is, for example, a discharge change detection element or a photoelectric detection element or an image detection element having a light emitter and a light receiver, which is used to detect whether the processing direction F of the electrode 32 is offset by light interruption or light intensity change.

In addition, in the present invention, the technical means for the fixture 36 to reciprocate or cyclically roll the electrode 32 can adopt the state shown in Figures 14 and 15, wherein the electrode 32, for example, surrounds (crosses both sides) two fixtures 36 or only crosses one side of the two fixtures 36. The two fixtures 36 are rotatably arranged on the base 52, and the two fixtures 36 are, for example, connected to two motors 58 via two couplings 55, whereby the two fixtures 36 can rotate correspondingly through the operation of the two motors 58, and the electrode 32 is moved reciprocally or cyclically along the second direction Y. Since the discharge section B of the electrode 32 is in a suspended state, the present invention selectively has a tension control module 66 (as shown in FIG. 15 ), which includes, for example, a tension measurement unit 60 and a controller 68, wherein the tension measurement unit 60 is used to measure the tension value of the electrode 32, and the controller 68 is electrically connected to the two motors 58, so as to control the two motors 58 according to the tension value of the electrode 32, so that the two motors 58 respectively perform the same speed of retraction and extension rotation, thereby adjusting the tension value of the electrode 32, so that the electrode 32 still maintains the tension value of the specified value when moving along the second direction Y. In addition, the present invention can also calculate the time for the two motors 58 to exchange the running direction according to the length and movement speed of the electrode 32, thereby achieving the effect of making the electrode 32 reciprocate.

It should be noted that although the present invention lists multiple components to perform one or more functions, the present invention is not limited to this. The present invention can selectively allow a single component to perform multiple functions, such as integrating the stabilizing component 22 and the whole blade component 87 into the same component, or, for example, integrating the stabilizing component 22, the whole blade component 87, the clamping component 86, the chip removal component 83 and one or more of the other components of the EDM device 10 into the same component. Similarly, the present invention is not limited to selecting all of the above components. The EDM device of the present invention can also select only some of the components from the above components to perform the EDM process.

In each of the above-mentioned embodiments, the discharge processing unit 30 of the present invention can selectively include a slag removal unit. For example, as shown in the embodiments of FIG. 16 (A) and (B), the discharge processing unit 30 of the present invention can selectively include a slag removal unit 64. When the discharge processing unit 30 performs the discharge processing procedure on the object 100 to be processed, the slag removal unit 64 provides one or more external forces to remove the slag generated by the electrode 32 applying the discharge energy to the object 100 to be processed. The external force applied direction or applied position generated by the slag removal unit 64 corresponds to the discharge section B of the electrode 32. The slag removal unit 64 can be, for example, an air flow generator, a water flow generator, an ultrasonic generator, a piezoelectric oscillator, or a magnetic force generating element. The external force may be, for example, air flow, water flow, ultrasonic vibration, piezoelectric vibration, suction or magnetic force. The slag removal unit 64 is not limited to being disposed on the carrier 20, and may even be disposed around the discharge section B of the electrode 32. For example, if the slag removal unit 64 is an ultrasonic generator or a piezoelectric vibration device, the slag removal unit 64 may be disposed on the fixture 36 or the carrier 20, and the external force generated by the slag removal unit 64 may also cause the fixture 36, the object 100 to be processed or the electrode 32 to vibrate, and may also cause vibrations at the same time, thereby providing an auxiliary effect of removing slag. In addition, as shown in FIG. 16(B), the deslagging unit 64 of the present invention can also selectively adjust the direction and/or position of applying the external force according to the shape of the object 100 to be processed to remove the slag generated by the electrode 32 applying the discharge energy to the object 100 to be processed. For example, the deslagging unit 64 is a water flow generator that can spray water to remove the slag. The deslagging unit 64 is, for example, a nozzle 65 with multiple movable positions, and the direction of the water spray can be adjusted according to the shape of the object 100 to be processed. For example, if the object 100 to be processed is an ingot, the multiple nozzles 65 of the deslagging unit 64 are distributed on the curved surface of the ingot, and are selectively distributed on both sides of the curved surface of the ingot. Even more, the multiple nozzles 65 of the slag removal unit 64 can selectively adjust the arc shape or the position of the nozzle according to the instantaneous depth position of the discharge machining, so as to achieve the effect of dynamically adjusting the water spraying according to the external shape of the object 100 to be processed. Similarly, this slag removal unit 64 can also be used as the above-mentioned chip removal element. Although the above-mentioned slag removal unit 64 is only used as a water flow generator as an example, those with ordinary knowledge in the technical field to which the present invention belongs should understand how to modify any feasible slag removal unit 64 to achieve the effect of the dynamic adjustment of the water spraying design of the present invention or the effect of dynamically spraying according to the external shape of the object 100 to be processed, so it is not further described here. Among them, in the embodiment shown in Figures 16 (A) and (B), the supporting member 40 includes a first sheet 44a and a second sheet 44b, and the electrode 32 is clamped between the first sheet 44a and the second sheet 44b, so that the plurality of electrodes 32 can be parallel to each other in the processing direction F, so as to perform the discharge processing procedure on the object 100 to be processed. For example, the supporting member 40 is selectively provided with a through groove 43, and the supporting member 40 can be sleeved on the protrusion 53 of the holding member 50 by using the through groove 43. Since the electrode 32 is clamped on the fixture 36, the present invention can achieve the effect of quickly replacing the electrode 32 by means of the quick-release design of the fixture 36.

In the present invention, the surface of the supporting member 40 selectively has a plurality of limiting grooves 42 (as shown in FIG. 2 ) for limiting the electrodes 32 in the limiting grooves 42. The electrodes 32 in different limiting grooves 42 may be electrically independent or may be connected in sequence and electrically connected to each other. The number of electrodes 32 in different limiting grooves 42 is not limited to being the same, that is, the number of electrodes 32 in different limiting grooves 42 may also be different. The limiting grooves 42 are also arranged in parallel along the first direction X at the above-mentioned spacing D, so that the electrodes 32 can be arranged in parallel along the first direction X. The width of the limiting groove 42 corresponds to the width of the electrode 32. For example, the width of the limiting groove 42 is slightly larger than the width of the electrode 32, so that the electrode 32 can be limited in the limiting groove 42. The holding member 50 is selectively detachably or fixedly assembled with the supporting member 40, and the assembly mode of the supporting member 40 and the holding member 50 is not particularly limited. As long as the supporting member 40 can be assembled with the holding member 50, or the supporting member 40 can be selectively moved or rotated by the movement or rotation of the holding member 50, it can be applied to the present invention. The supporting member 40 is, for example, a cylindrical sleeve (as shown in FIG. 2 ) or other shaped sleeve with an axial hole 41. The supporting member 40 can be sleeved on the protrusion 51 of the holding member 50 by using the axial hole 41. In addition, in order to reduce the time required to replace the electrode 32 when the electrode 32 is accidentally broken, the present invention can also, for example, sleeve the axial hole 41 of the supporting member 40 on a dummy supporting member having a protrusion. Thus, the user can quickly take out the supporting member 40 with the electrode 32 wrapped around it from the imitation supporting member, and sleeve the axial hole 41 of the supporting member 40 on the protrusion 51 of the holding member 50, or insert the protrusion 51 of the holding member 50 into the axial hole 41 of the supporting member 40, so that the assembly of the jig 36 can be completed quickly. However, the jig 36 of the present invention is not limited to this. Any structural design of the jig 36, as long as it can carry the electrode 32 so that the electrode 32 can be subjected to the discharge processing procedure, belongs to the scope of protection claimed by the present invention.

In summary, the EDM device of the present invention has the following advantages:

(1) The correction device can correct the appearance of the electrode by the relative displacement between the trimming element and the electrode to prevent short circuit problems caused by the discharge machining process.

(2) The correction device can roll or move the electrode to avoid the processing target area of the object to be processed to prevent short circuit problems caused by the discharge processing process.

(3) The chip removal element can remove the chip and other materials remaining on the knife dressing element and/or the electrode by the relative displacement between the knife dressing element and the electrode. The slag removal unit can provide external force to one or more processing target areas to help remove the slag generated by the discharge processing process or the correction process.

(4) The stripping element can cut the discharge section of the electrode into several electrode strips by the relative displacement between the trimming element and the electrode, thereby avoiding the problem of uneven wear of the plate electrode.

(5) The position correction element can correct the processing direction of the electrode and the object to be processed, thereby avoiding deviation in the processing direction.

(6) The clamping element can clamp the electrode to prevent the electrode from changing the processing direction due to being pulled.

(7) The knife element can keep multiple electrodes parallel to each other, which can prevent the surface of the workpiece from being skewed or uneven after discharge processing.

(8) Stabilizing components can reduce the vibration of the electrode, provide guidance as a separator, and can be used as an electrical contact.

The above description is for illustrative purposes only and is not intended to be limiting. Any equivalent modification or change made to the invention without departing from the spirit and scope of the invention shall be included in the scope of the patent application attached hereto.

10: Discharge processing equipment

100: Objects to be processed

20: Carrier

22: Stable components

32: Electrode

36: Jig

52: Seat

80: Correction device

82: Knife repair element

86: Clamping element

89: Detection element

281:Guide groove

B: Discharge section

X: First direction

Y: Second direction

F: Processing direction

Claims (22)

A discharge processing device comprises at least: a carrier for carrying at least one object to be processed; a discharge processing unit comprising at least one electrode and a power supply unit for performing a discharge processing procedure on at least one processing target area of the object to be processed on the carrier along a processing direction with the electrode, wherein the electrode is suspended in a discharge section, and the power supply unit provides a first power source to the electrode during the discharge processing. The electrode and the object to be processed are used to apply a discharge energy to the processing target area of the object to be processed through the electrode located in the discharge section; and a correction device is used to perform a correction process on a to-be-corrected area of an appearance of the electrode to correct the appearance of the electrode, wherein the correction device includes a trimming element, and the trimming element and the electrode generate a relative displacement in the correction process to correct the appearance of the electrode. The discharge machining device as described in claim 1, wherein the correction device performs the correction process on the electrode while the electrode performs the discharge machining process on the machining target area. The discharge machining device as described in claim 1, wherein the correction device performs the correction process on the electrode before or after the electrode performs the discharge machining process on the machining target area. The discharge machining device as described in claim 1, 2 or 3, wherein the correction device corrects the appearance of the electrode in a certain amount of adjustment according to a wear rate of the electrode and a feed speed of the discharge machining process. The discharge machining device as described in claim 1, 2 or 3, wherein the correction device corrects the appearance of the electrode in a dynamic adjustment manner according to a real-time state of the electrode. The discharge machining device as described in claim 1, wherein the correction device includes a lifting mechanism and/or a translation mechanism for setting the trimming element so that the trimming element moves to produce the relative displacement with the electrode. The EDM device as described in claim 1, wherein the tool-dressing element is a laser source, a tool or a grinding piece. The discharge machining device as described in claim 1, wherein the correction device further comprises a chip removal element for removing a chip generated when correcting the appearance of the electrode while the correction device is performing the correction process. The discharge machining device as described in claim 1, wherein the correction device includes a rolling mechanism for rolling the electrode during the correction process so that the area to be corrected of the electrode avoids the processing target area of the object to be processed, thereby correcting the appearance of the electrode. The discharge processing device as described in claim 1, wherein the correction device further comprises a striping element for dividing the electrode into a plurality of electrode strips parallel to each other in the discharge section. The discharge processing device as described in claim 1, wherein the discharge processing unit further comprises a clamping element for clamping at least one side of the discharge section of the electrode when the electrode performs the discharge processing procedure, and releasing the at least one side of the discharge section of the electrode when the correction device performs the correction procedure. The discharge machining device as described in claim 1, wherein the discharge machining device further comprises a slag removal unit, and when the discharge machining unit performs the discharge machining process on the object to be processed, the slag removal unit provides at least one external force to remove the slag generated when the electrode applies the discharge energy to the object to be processed. The discharge machining device as described in claim 12, wherein the slag removal unit adjusts the direction or position of application of the external force according to the shape of the object to be processed to remove the slag. The discharge processing device as described in claim 1, wherein the discharge processing unit further comprises: a fixture, the fixture is composed of at least two bearing components and at least two holding components respectively assembled in correspondence, the two holding components are arranged on two bases, and the two bases are moving mechanisms or rotating mechanisms, so that when the discharge processing unit performs the discharge processing procedure along the processing direction, the discharge section of the electrode and the processing target area of the object to be processed move relative to each other in a reciprocating or cyclic manner. The discharge processing device as described in claim 14, wherein the electrode is in circumferential contact with the two supporting members or the two sides of the electrode are respectively in contact with the two supporting members, so that the electrode is in the suspended state in the discharge section. The discharge machining device as described in claim 1, wherein the correction device further includes a directional correction element for adjusting the relative position of the electrode and the object to be machined to correct the machining direction according to a deviation phenomenon of the machining direction of the electrode. The discharge machining device as described in claim 1, wherein the correction device moves the electrode position of the area to be corrected on the surface so that the area to be corrected avoids the processing target area of the object to be processed, and the area to be corrected is a fracture phenomenon or a fracture sign. The discharge machining device as described in any one of claims 1-3 and 6-17, wherein the number of the electrodes is plural, and the plural electrodes are arranged parallel to each other along a first direction and/or a third direction in the discharge section, wherein the third direction is perpendicular to the first direction. The discharge machining device as described in claim 18, wherein the correction device further comprises a full blade element, the full blade element separates the plurality of electrodes so as to maintain the plurality of electrodes arranged parallel to each other in the discharge section. The discharge machining device as described in claim 18, wherein the discharge machining unit further comprises a partition column, and the plurality of electrodes abut against the partition column so as to make the plurality of electrodes parallel to each other in the discharge section. The discharge machining device as described in claim 18 further includes a stabilizing member having a plurality of guide grooves for movably accommodating the plurality of electrodes, for stabilizing and correcting the plurality of electrodes so that the plurality of electrodes can perform the discharge machining process along the machining direction. The discharge machining device as described in claim 18, wherein the correction device moves the position of at least one electrode among the plurality of electrodes that has the area to be corrected on the surface, so that the area to be corrected avoids the processing target area of the object to be processed, and the area to be corrected is a fracture phenomenon or a fracture sign.