TWI859161B - Metal-clad laminates, circuit substrates and multi-layer circuit substrates - Google Patents
Metal-clad laminates, circuit substrates and multi-layer circuit substrates Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
- H05K1/036—Multilayers with layers of different types
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/04—Interconnection of layers
- B32B7/12—Interconnection of layers using interposed adhesives or interposed materials with bonding properties
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/04—Non-macromolecular additives inorganic
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/08—Macromolecular additives
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J163/00—Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J179/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09J161/00 - C09J177/00
- C09J179/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J179/00—Adhesives based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen, with or without oxygen, or carbon only, not provided for in groups C09J161/00 - C09J177/00
- C09J179/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C09J179/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4611—Manufacturing multilayer circuits by laminating two or more circuit boards
- H05K3/4626—Manufacturing multilayer circuits by laminating two or more circuit boards characterised by the insulating layers or materials
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4652—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern
- H05K3/4655—Adding a circuit layer by laminating a metal foil or a preformed metal foil pattern by using a laminate characterized by the insulating layer
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/08—PCBs, i.e. printed circuit boards
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2205/00—Polymer mixtures characterised by other features
- C08L2205/03—Polymer mixtures characterised by other features containing three or more polymers in a blend
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2479/00—Presence of polyamine or polyimide
- C09J2479/08—Presence of polyamine or polyimide polyimide
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0154—Polyimide
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Laminated Bodies (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
- Adhesive Tapes (AREA)
Abstract
本發明提供一種覆金屬積層板、電路基板、多層電路基板及其製造方法。提供一種導體電路的尺寸穩定性優異、且包括即便在高頻信號的傳輸中也可實現傳輸損耗的減低的黏接層的多層電路基板。電路基板101包括:絕緣樹脂層10;導體電路層50,積層於絕緣樹脂層10的其中一面;以及黏接層30,積層於絕緣樹脂層10的其中另一面。多層電路基板200是通過如下方式製造:將第一個電路基板101的黏接層30以與第二個電路基板101的導體電路層50相向的方式重疊配置,且將第二個電路基板101的黏接層30以與不具有黏接層30的任意的電路基板110的導體電路層50相向的方式重疊配置,並將這些一併壓接。 The present invention provides a metal-clad laminate, a circuit substrate, a multi-layer circuit substrate and a manufacturing method thereof. A multi-layer circuit substrate having excellent dimensional stability of a conductor circuit and including an adhesive layer that can reduce transmission loss even in the transmission of high-frequency signals is provided. The circuit substrate 101 includes: an insulating resin layer 10; a conductive circuit layer 50, which is laminated on one side of the insulating resin layer 10; and an adhesive layer 30, which is laminated on the other side of the insulating resin layer 10. The multi-layer circuit board 200 is manufactured by overlapping the adhesive layer 30 of the first circuit board 101 so as to face the conductive circuit layer 50 of the second circuit board 101, and overlapping the adhesive layer 30 of the second circuit board 101 so as to face the conductive circuit layer 50 of any circuit board 110 that does not have the adhesive layer 30, and pressing them together.
Description
本發明是有關於一種覆金屬積層板及電路基板以及具有積層為多層的導體電路層的多層電路基板及其製造方法。 The present invention relates to a metal-clad laminate and a circuit substrate, as well as a multi-layer circuit substrate having a multi-layered conductive circuit layer and a manufacturing method thereof.
近年來,隨著電子機器的高密度化、高功能化的進展,要求具有進一步的尺寸穩定性或優異的高頻特性的電路基板材料。尤其是,對於高速信號處理所需要的有機層間絕緣材料的特性而言,重要的是低介電常數化、低介電損耗化。為了應對高頻化,提出有將以低介電常數、低介電損耗正切為特徵的液晶聚合物(Liquid Crystal Polymer,LCP)製成電介質層的多層配線板(例如,專利文獻1)。將液晶聚合物製成絕緣層的多層配線板是通過如下方式製造:在加熱至作為熱塑性樹脂的液晶聚合物基材的熔點附近的狀態下,進行加熱壓接,因此,容易因液晶聚合物基材的熱變形而引起電路導體的位置偏移,並存在如下擔憂:阻抗(impedance)不匹配等而對電特性造成不良影響。另外,將液晶聚合物製成基材層的多層配線板在多層黏接界面平滑時,並未顯現出錨固效果,層間黏接力不充分,因此,需要對電路導體與液晶聚合物基材的各自的表面進行粗糙化處理,也存在製造步驟繁雜的問題點。 In recent years, with the progress of high density and high functionality of electronic equipment, circuit substrate materials with further dimensional stability or excellent high-frequency characteristics are required. In particular, low dielectric constant and low dielectric loss are important for the characteristics of organic interlayer insulation materials required for high-speed signal processing. In order to cope with high frequencies, it has been proposed to make a multi-layer wiring board with a dielectric layer made of liquid crystal polymer (LCP) characterized by low dielectric constant and low dielectric loss tangent (for example, Patent Document 1). Multilayer wiring boards with liquid crystal polymer as the insulating layer are manufactured by heating and pressing while heating to near the melting point of the liquid crystal polymer substrate as a thermoplastic resin. Therefore, the position of the circuit conductor is easily shifted due to the thermal deformation of the liquid crystal polymer substrate, and there are concerns that the impedance mismatch will have an adverse effect on the electrical characteristics. In addition, when the multilayer bonding interface of the liquid crystal polymer is smooth, the multilayer wiring board does not show an anchoring effect and the interlayer bonding force is insufficient. Therefore, the surfaces of the circuit conductor and the liquid crystal polymer substrate need to be roughened, and there is also a problem of complicated manufacturing steps.
且說,作為與以聚醯亞胺為主成分的黏接層相關的技術,提出有將交聯聚醯亞胺樹脂應用於覆蓋膜(coverlay film)的黏接劑層中,所述交聯聚醯亞胺樹脂是使以由二聚酸等脂肪族二胺衍生的二胺化合物為原料的聚醯亞胺、與具有至少兩個一級氨基作為官能基的氨基化合物反應而獲得(例如,專利文獻2)。專利文獻2的交聯聚醯亞胺樹脂具有如下優點:不會產生包含環狀矽氧烷化合物的揮發成分、具有優異的焊料耐熱性、且即便在反覆暴露於高溫下的使用環境中也不會使配線層與覆蓋膜的黏接力降低。但是,專利文獻2中,對在高頻信號傳輸中的應用可能性並未進行研究。 As a technique related to an adhesive layer having polyimide as a main component, a crosslinked polyimide resin is proposed to be applied to an adhesive layer of a coverlay film. The crosslinked polyimide resin is obtained by reacting a polyimide having a diamine compound derived from an aliphatic diamine such as dimer acid as a raw material with an amino compound having at least two primary amino groups as functional groups (for example, Patent Document 2). The crosslinked polyimide resin of Patent Document 2 has the following advantages: it does not generate volatile components including cyclic siloxane compounds, has excellent solder heat resistance, and does not reduce the adhesion between the wiring layer and the coverlay film even in a use environment repeatedly exposed to high temperatures. However, Patent Document 2 does not study the possibility of application in high-frequency signal transmission.
[現有技術文獻] [Prior art literature]
[專利文獻] [Patent Literature]
[專利文獻1]日本專利特開2005-317953號公報 [Patent document 1] Japanese Patent Publication No. 2005-317953
[專利文獻2]日本專利特開2013-1730號公報 [Patent Document 2] Japanese Patent Publication No. 2013-1730
今後,在多層電路基板中,作為用以實現應對高頻信號傳輸的一個方向性,考慮有:一邊維持導體電路的尺寸穩定性,一邊增大絕緣樹脂層或黏接層的合計厚度,由此實現介電特性的改善。為此,在成為多層電路基板的材料的覆金屬積層板或電路基板中,不僅對於這些的材質而且也對這些的結構要求與以前的多層電路基板不同的設計思想。 In the future, as a direction to achieve high-frequency signal transmission in multi-layer circuit boards, it is considered to increase the total thickness of the insulating resin layer or adhesive layer while maintaining the dimensional stability of the conductor circuit, thereby achieving improvement in dielectric properties. For this reason, in the metal-clad laminate or circuit board that becomes the material of the multi-layer circuit board, not only the material but also the structure of these materials are required to have a different design concept from the previous multi-layer circuit board.
因此,本發明的目的為提供一種導體電路的尺寸穩定性優異、且具有即便在高頻信號的傳輸中也可實現傳輸損耗的減低的新穎的結構的多層電路基板。 Therefore, the object of the present invention is to provide a multi-layer circuit substrate having excellent dimensional stability of a conductor circuit and a novel structure that can reduce transmission loss even in the transmission of high-frequency signals.
本發明者等人進行努力研究,結果發現,通過使用特定結構的覆金屬積層板作為多層電路基板的材料,而一邊維持優異的黏接性一邊維持導體電路的尺寸穩定性,同時可應對高頻信號的傳輸,從而完成了本發明。 The inventors of the present invention have conducted diligent research and found that by using a metal-clad laminate with a specific structure as the material for a multi-layer circuit substrate, they can maintain excellent adhesion while maintaining the dimensional stability of the conductor circuit and can also handle the transmission of high-frequency signals, thus completing the present invention.
即,本發明的覆金屬積層板包括:絕緣樹脂層;金屬層,積層於所述絕緣樹脂層的其中一面;以及黏接層,積層於所述絕緣樹脂層的其中另一面。 That is, the metal-clad laminate of the present invention includes: an insulating resin layer; a metal layer laminated on one side of the insulating resin layer; and an adhesive layer laminated on the other side of the insulating resin layer.
另外,本發明的電路基板包括:絕緣樹脂層;導體電路層,形成於所述絕緣樹脂層的其中一面;以及黏接層,積層於所述絕緣樹脂層的其中另一面。 In addition, the circuit substrate of the present invention includes: an insulating resin layer; a conductive circuit layer formed on one side of the insulating resin layer; and an adhesive layer laminated on the other side of the insulating resin layer.
而且,本發明的覆金屬積層板或電路基板中,構成所述黏接層的樹脂為熱塑性樹脂或熱硬化性樹脂,且滿足下述條件(i)~(iii):(i)50℃下的儲存彈性模數為1800MPa以下;(ii)自180℃至260℃的溫度區域中的儲存彈性模數的最大值為800MPa以下;(iii)玻璃化轉變溫度(Tg)為180℃以下。 Moreover, in the metal-clad laminate or circuit board of the present invention, the resin constituting the adhesive layer is a thermoplastic resin or a thermosetting resin and satisfies the following conditions (i) to (iii): (i) the storage elastic modulus at 50°C is less than 1800 MPa; (ii) the maximum value of the storage elastic modulus in the temperature range from 180°C to 260°C is less than 800 MPa; (iii) the glass transition temperature (Tg) is less than 180°C.
本發明的覆金屬積層板或電路基板中,所述熱塑性樹脂 可為含有四羧酸殘基及二胺殘基的黏接性聚醯亞胺。所述情況下,所述黏接性聚醯亞胺可相對於所述二胺殘基的總量100莫耳份而含有50莫耳份以上的由二聚酸型二胺衍生的二胺殘基,所述二聚酸型二胺是二聚酸的兩個末端羧酸基經取代為一級氨基甲基或氨基而成。 In the metal-clad laminate or circuit substrate of the present invention, the thermoplastic resin may be an adhesive polyimide containing tetracarboxylic acid residues and diamine residues. In the case, the adhesive polyimide may contain 50 mol or more of diamine residues derived from dimer acid type diamine relative to 100 mol of the total amount of the diamine residues, wherein the dimer acid type diamine is obtained by replacing the two terminal carboxylic acid groups of the dimer acid with primary aminomethyl or amino groups.
本發明的覆金屬積層板可為將所述金屬層加工為配線而成的電路基板的材料。 The metal-clad laminate of the present invention can be a material for a circuit substrate in which the metal layer is processed into wiring.
本發明的覆金屬積層板或電路基板中,所述黏接性聚醯亞胺可相對於所述四羧酸殘基的總量100莫耳份而含有合計為90莫耳份以上的由下述通式(1)和/或通式(2)所表示的四羧酸酐衍生的四羧酸殘基。 In the metal-clad laminate or circuit board of the present invention, the adhesive polyimide may contain a total of 90 mol parts or more of tetracarboxylic acid residues derived from tetracarboxylic anhydride represented by the following general formula (1) and/or general formula (2) relative to 100 mol parts of the total amount of the tetracarboxylic acid residues.
通式(1)中,X表示單鍵、或選自下式中的二價基,通式(2)中,Y所表示的環狀部分表示形成選自4員環、5員環、6員環、7員環或8員環中的環狀飽和烴基。 In the general formula (1), X represents a single bond or a divalent group selected from the following formulas. In the general formula (2), the cyclic part represented by Y represents a cyclic saturated hydrocarbon group selected from a 4-membered ring, a 5-membered ring, a 6-membered ring, a 7-membered ring or an 8-membered ring.
所述式中,Z表示-C6H4-、-(CH2)n-或-CH2-CH(-O-C(=O)-CH3)-CH2-,n表示1~20的整數。 In the formula, Z represents -C 6 H 4 -, -(CH 2 )n- or -CH 2 -CH(-OC(=O)-CH 3 )-CH 2 -, and n represents an integer of 1-20.
本發明的覆金屬積層板或電路基板中,所述黏接性聚醯亞胺可相對於所述二胺殘基的總量100莫耳份而在50莫耳份以上且99莫耳份以下的範圍內含有由所述二聚酸型二胺衍生的二胺殘基,並且,可在1莫耳份以上且50莫耳份以下的範圍內含有由選自下述通式(B1)~通式(B7)所表示的二胺化合物中的至少一種二胺化合物衍生的二胺殘基。 In the metal-clad laminate or circuit board of the present invention, the adhesive polyimide may contain diamine residues derived from the dimer acid type diamine in a range of 50 mol parts to 99 mol parts relative to the total amount of 100 mol parts of the diamine residues, and may contain diamine residues derived from at least one diamine compound selected from the diamine compounds represented by the following general formula (B1) to (B7) in a range of 1 mol parts to 50 mol parts.
[化3]
式(B1)~式(B7)中,R1獨立地表示碳數1~6的一價烴基或烷氧基,連結基A獨立地表示選自-O-、-S-、-CO-、-SO-、-SO2-、-COO-、-CH2-、-C(CH3)2-、-NH-或-CONH-中的二價基,n1獨立地表示0~4的整數;其中,自式(B3)中去除與式(B2)重複的部分,自式(B5)中去除與式(B4)重複的部分。 In formula (B1) to formula (B7), R 1 independently represents a monovalent alkyl group or alkoxy group having 1 to 6 carbon atoms, the linking group A independently represents a divalent group selected from -O-, -S-, -CO-, -SO-, -SO 2 -, -COO-, -CH 2 -, -C(CH 3 ) 2 -, -NH- or -CONH-, and n 1 independently represents an integer of 0 to 4; wherein, from formula (B3), the portion repeating with formula (B2) is removed, and from formula (B5), the portion repeating with formula (B4) is removed.
本發明的多層電路基板是積層多個電路基板而成,且其特徵在於:包含至少一個以上的所述任一電路基板作為所述電路基板。 The multi-layer circuit substrate of the present invention is formed by stacking multiple circuit substrates, and is characterized in that it includes at least one of the above-mentioned circuit substrates as the circuit substrate.
本發明的第一觀點的多層電路基板的製造方法可包括:準備多個電路基板的步驟,所述電路基板包括絕緣樹脂層、 形成於所述絕緣樹脂層的其中一面的導體電路層、以及積層於所述絕緣樹脂層的其中另一面的黏接層;以及將一個所述電路基板的所述導體電路層、與另一個所述電路基板的所述黏接層以相向的方式重疊壓接的步驟。 The manufacturing method of a multi-layer circuit substrate of the first aspect of the present invention may include: a step of preparing a plurality of circuit substrates, wherein the circuit substrates include an insulating resin layer, a conductive circuit layer formed on one side of the insulating resin layer, and an adhesive layer laminated on the other side of the insulating resin layer; and a step of overlapping and pressing the conductive circuit layer of one circuit substrate and the adhesive layer of another circuit substrate in a facing manner.
本發明的第二觀點的多層電路基板的製造方法可包括:準備多個電路基板的步驟,所述電路基板包括絕緣樹脂層、形成於所述絕緣樹脂層的其中一面的導體電路層、以及積層於所述絕緣樹脂層的其中另一面的黏接層;以及將一個所述電路基板的所述黏接層、與另一個所述電路基板的所述黏接層以相向的方式重疊壓接的步驟。 The manufacturing method of the multi-layer circuit substrate of the second aspect of the present invention may include: the step of preparing a plurality of circuit substrates, wherein the circuit substrates include an insulating resin layer, a conductive circuit layer formed on one side of the insulating resin layer, and an adhesive layer laminated on the other side of the insulating resin layer; and the step of overlapping and pressing the adhesive layer of one circuit substrate with the adhesive layer of another circuit substrate in a facing manner.
本發明的覆金屬積層板為在絕緣樹脂層的單面具有金屬層、且在絕緣樹脂層的另一單面具有黏接層的結構,因此,可通過進行積層而容易地製造多層電路基板,作為多層電路基板的材料而有用。另外,在使用覆金屬積層板製造多層電路基板的情況下,可一邊維持導體電路的尺寸穩定性,一邊確保對於導體電路層的被覆性與密合性,進而確保樹脂層整體的厚度。因此,通過使用本發明的覆金屬積層板而可獲得具有良好的層間連接、且可靠性高的多層電路基板。 The metal-clad laminate of the present invention has a metal layer on one side of an insulating resin layer and an adhesive layer on the other side of the insulating resin layer. Therefore, a multi-layer circuit substrate can be easily manufactured by lamination, and is useful as a material for a multi-layer circuit substrate. In addition, when a multi-layer circuit substrate is manufactured using a metal-clad laminate, the dimensional stability of the conductor circuit can be maintained while ensuring the coating and adhesion of the conductor circuit layer, thereby ensuring the thickness of the entire resin layer. Therefore, by using the metal-clad laminate of the present invention, a multi-layer circuit substrate with good inter-layer connection and high reliability can be obtained.
另外,通過本發明的多層電路基板,即便在高頻信號的傳輸中也可減低傳輸損耗,可實現電子零件的高密度積體化、或高密度安裝化。另外,本發明的多層電路基板因耐熱性也優異,因此, 也可搭載發熱量大的半導體晶片。 In addition, the multi-layer circuit substrate of the present invention can reduce transmission loss even in the transmission of high-frequency signals, and can realize high-density integration or high-density mounting of electronic components. In addition, the multi-layer circuit substrate of the present invention has excellent heat resistance, so it can also carry semiconductor chips with high heat generation.
10:絕緣樹脂層 10: Insulating resin layer
20:金屬層 20: Metal layer
30:黏接層 30: Adhesive layer
40:單面覆金屬積層板 40: Single-sided metal laminate
50:導體電路層 50: Conductor circuit layer
100:覆金屬積層板 100: Metal-clad laminate
101:電路基板 101: Circuit board
102:電路基板單元 102: Circuit board unit
110:任意的電路基板 110: Any circuit board
200、201:多層電路基板 200, 201: Multi-layer circuit substrate
T1:合計厚度 T1: Total thickness
T2、T3:厚度 T2, T3: thickness
圖1是表示本發明的一實施形態的覆金屬積層板的結構的剖面圖。 FIG1 is a cross-sectional view showing the structure of a metal-clad laminate according to an embodiment of the present invention.
圖2是表示本發明的一實施形態的電路基板的結構的剖面圖。 FIG2 is a cross-sectional view showing the structure of a circuit substrate in an embodiment of the present invention.
圖3是表示本發明的第一實施形態的多層電路基板的結構的剖面圖。 FIG3 is a cross-sectional view showing the structure of a multi-layer circuit substrate according to the first embodiment of the present invention.
圖4是表示本發明的第一實施形態的多層電路基板的製造步驟的說明圖。 FIG4 is an explanatory diagram showing the manufacturing steps of the multi-layer circuit substrate of the first embodiment of the present invention.
圖5是表示本發明的第二實施形態的多層電路基板的結構的剖面圖。 FIG5 is a cross-sectional view showing the structure of a multi-layer circuit substrate according to the second embodiment of the present invention.
圖6是表示本發明的第二實施形態的多層電路基板的製造步驟的說明圖。 FIG6 is an explanatory diagram showing the manufacturing steps of a multi-layer circuit substrate according to the second embodiment of the present invention.
對本發明的實施形態進行詳細說明。 The implementation form of the present invention is described in detail.
[覆金屬積層板] [Metal-clad laminate]
圖1是表示本發明的一實施形態的覆金屬積層板的結構的剖面圖。本實施形態的覆金屬積層板100包括:絕緣樹脂層10;金屬層20,積層於絕緣樹脂層10的其中一面;以及黏接層30,積層於絕緣樹脂層10的其中另一面。即,覆金屬積層板100為依序 積層有金屬層20/絕緣樹脂層10/黏接層30的結構。若使用其他表述,則覆金屬積層板100具有在將絕緣樹脂層10與金屬層20積層而成的單面覆金屬積層板40的背面側(絕緣樹脂層10側)進而附加有黏接層30的結構。再者,黏接層30可形成於絕緣樹脂層10的單面的整面,也可僅形成於一部分。 FIG1 is a cross-sectional view showing the structure of a metal-clad laminate of an embodiment of the present invention. The metal-clad laminate 100 of the present embodiment includes: an insulating resin layer 10; a metal layer 20 laminated on one side of the insulating resin layer 10; and an adhesive layer 30 laminated on the other side of the insulating resin layer 10. That is, the metal-clad laminate 100 has a structure in which the metal layer 20/insulating resin layer 10/adhesive layer 30 are laminated in this order. If another expression is used, the metal-clad laminate 100 has a structure in which an adhesive layer 30 is further added to the back side (insulating resin layer 10 side) of a single-sided metal-clad laminate 40 formed by laminating an insulating resin layer 10 and a metal layer 20. Furthermore, the adhesive layer 30 may be formed on the entire surface of a single side of the insulating resin layer 10 or may be formed on only a portion.
<單面覆金屬積層板> <Single-sided metal laminate>
單面覆金屬積層板40的構成並無特別限定,可使用作為柔性印刷配線板(Flexible Printed Circuits,FPC)材料而通常的材料,例如,可為市售的覆銅積層板等。例如,作為市售的覆銅積層板,可使用松下(Panasonic)公司製造的R-F705T(商品名)、日鐵化學&材料公司製造的艾斯帕奈庫斯(Espanex)(商品名)等。 The structure of the single-sided metal-clad laminate 40 is not particularly limited, and a common material used as a flexible printed circuit (FPC) material can be used, for example, a commercially available copper-clad laminate. For example, as a commercially available copper-clad laminate, R-F705T (trade name) manufactured by Panasonic, Espanex (trade name) manufactured by Nippon Steel Chemical & Materials Co., Ltd., etc. can be used.
(金屬層) (Metal layer)
金屬層20的材質並無特別限制,例如可列舉:銅、不銹鋼、鐵、鎳、鈹、鋁、鋅、銦、銀、金、錫、鋯、鉭、鈦、鉛、鎂、錳及這些的合金等。這些中,特別優選為銅或銅合金。再者,後述的本實施形態的電路基板中的配線層的材質也與金屬層20相同。 The material of the metal layer 20 is not particularly limited, and examples thereof include: copper, stainless steel, iron, nickel, beryllium, aluminum, zinc, indium, silver, gold, tin, zirconium, tantalum, titanium, lead, magnesium, manganese, and alloys thereof. Among these, copper or copper alloys are particularly preferred. Furthermore, the material of the wiring layer in the circuit substrate of the present embodiment described later is also the same as that of the metal layer 20.
金屬層20的厚度並無特別限定,例如,在使用銅箔等金屬箔的情況下,可優選為35μm以下,更優選為5μm~25μm的範圍內。就生產穩定性及處理性的觀點而言,金屬層的厚度的下限值優選為設為5μm。再者,在使用銅箔的情況下,可為壓延銅箔也可為電解銅箔。另外,作為銅箔,可使用市售的銅箔。 The thickness of the metal layer 20 is not particularly limited. For example, when using a metal foil such as copper foil, it is preferably less than 35 μm, and more preferably in the range of 5 μm to 25 μm. From the perspective of production stability and handling, the lower limit of the thickness of the metal layer is preferably set to 5 μm. Furthermore, when using copper foil, it can be either a rolled copper foil or an electrolytic copper foil. In addition, as the copper foil, a commercially available copper foil can be used.
另外,金屬箔例如也可實施防銹處理、或以提高黏接力為目的的利用例如板壁(siding)、鋁醇化物、鋁螯合物、矽烷偶合劑等的表面處理。 In addition, the metal foil may be subjected to rust-proof treatment or surface treatment such as siding, aluminum alcoholate, aluminum chelate, silane coupling agent, etc. for the purpose of improving adhesion.
(絕緣樹脂層) (Insulating resin layer)
作為絕緣樹脂層10,若包含具有電絕緣性的樹脂,則並無特別限定,例如可列舉:聚醯亞胺、液晶聚合物、環氧樹脂、酚樹脂、聚乙烯、聚丙烯、聚四氟乙烯、矽酮、乙烯四氟乙烯(Ethylene tetrafluoroethylene,ETFE)、雙馬來醯亞胺三嗪(Bismaleimide Triazine,BT)樹脂等,優選為包含聚醯亞胺。再者,本發明中稱為聚醯亞胺的情況除了指聚醯亞胺以外,還指聚醯胺醯亞胺、聚醚醯亞胺、聚酯醯亞胺、聚矽氧烷醯亞胺、聚苯并咪唑醯亞胺等在分子結構中具有醯亞胺基的聚合物。 As the insulating resin layer 10, if it contains a resin with electrical insulation, there is no particular limitation, for example, polyimide, liquid crystal polymer, epoxy resin, phenolic resin, polyethylene, polypropylene, polytetrafluoroethylene, silicone, ethylene tetrafluoroethylene (ETFE), bismaleimide triazine (BT) resin, etc., preferably containing polyimide. Furthermore, the case of polyimide in the present invention refers to polymers having an imide group in the molecular structure, such as polyamide imide, polyether imide, polyester imide, polysiloxane imide, polybenzimidazole imide, etc., in addition to polyimide.
另外,絕緣樹脂層10並不限於單層,可積層有多個樹脂層。另外,絕緣樹脂層10優選為包含由非熱塑性聚醯亞胺形成的非熱塑性聚醯亞胺層。再者,所謂「非熱塑性聚醯亞胺」,通常為即便加熱軟化也不會顯示出黏接性的聚醯亞胺,在本發明中,是指使用動態黏彈性測定裝置(動態機械分析儀(Dynamic Mechanical Analyzer,DMA))測定的、30℃下的儲存彈性模數為1.0×109Pa以上且300℃下的儲存彈性模數為3.0×108Pa以上的聚醯亞胺。 In addition, the insulating resin layer 10 is not limited to a single layer, and a plurality of resin layers may be laminated. In addition, the insulating resin layer 10 preferably includes a non-thermoplastic polyimide layer formed of a non-thermoplastic polyimide. Furthermore, the so-called "non-thermoplastic polyimide" is generally a polyimide that does not show adhesiveness even when softened by heat. In the present invention, it refers to a polyimide having a storage elastic modulus of 1.0×10 9 Pa or more at 30°C and a storage elastic modulus of 3.0×10 8 Pa or more at 300°C measured using a dynamic viscoelasticity measuring device (Dynamic Mechanical Analyzer (DMA)).
絕緣樹脂層10例如可自市售的聚醯亞胺膜、市售的液晶聚合物膜或市售的覆金屬積層板中作為絕緣性基材而使用的樹脂 中選擇並使用。作為聚醯亞胺膜,可使用宇部興產公司製造的尤皮萊庫斯(Upilex)(商品名)、東麗杜邦(Toray Dupont)公司製造的卡普頓(Kapton)(商品名)、卡奈卡(Kaneka)公司製造的亞皮卡路(Apical)(商品名)、卡奈卡(Kaneka)公司製造的匹庫西奧(Pixeo)(商品名),作為液晶聚合物膜,可使用可樂麗(Kuraray)公司製造的貝庫斯塔(Vecstar)(商品名)、普拉瑪泰科(Primatech)公司製造的BIAC膜(BIAC Film)(商品名)等。 The insulating resin layer 10 can be selected and used from, for example, a commercially available polyimide film, a commercially available liquid crystal polymer film, or a resin used as an insulating substrate in a commercially available metal-clad laminate. As the polyimide film, Upilex (trade name) manufactured by Ube Industries, Kapton (trade name) manufactured by Toray Dupont, Apical (trade name) manufactured by Kaneka, and Pixeo (trade name) manufactured by Kaneka can be used. As the liquid crystal polymer film, Vecstar (trade name) manufactured by Kuraray, BIAC Film (trade name) manufactured by Primatech, etc. can be used.
絕緣樹脂層10的熱膨脹係數(Coefficient of Thermal Expansion,CTE)並無特別限定,可為10ppm/K以上、優選為10ppm/K以上且30ppm/K以下的範圍內、更優選為15ppm/K以上且25ppm/K以下的範圍內。若CTE小於10ppm/K、或超過30ppm/K,則產生翹曲、或尺寸穩定性降低。通過適宜變更使用的原料的組合、厚度、乾燥/硬化條件而可控制為所期望的CTE。 The coefficient of thermal expansion (CTE) of the insulating resin layer 10 is not particularly limited, and may be greater than 10ppm/K, preferably within the range of greater than 10ppm/K and less than 30ppm/K, and more preferably within the range of greater than 15ppm/K and less than 25ppm/K. If the CTE is less than 10ppm/K or exceeds 30ppm/K, warping may occur or dimensional stability may decrease. The desired CTE may be controlled by appropriately changing the combination of raw materials used, thickness, and drying/hardening conditions.
再者,包含絕緣樹脂層10及黏接層30的樹脂層的整體的熱膨脹係數(CTE)並無特別限定,優選為10ppm/K以上且30ppm/K以下的範圍內,更優選為15ppm/K以上且25ppm/K以下的範圍內。若這些樹脂層整體的CTE小於10ppm/K、或超過30ppm/K,則產生翹曲、或尺寸穩定性降低。 Furthermore, the overall thermal expansion coefficient (CTE) of the resin layer including the insulating resin layer 10 and the adhesive layer 30 is not particularly limited, but is preferably within the range of 10ppm/K or more and 30ppm/K or less, and more preferably within the range of 15ppm/K or more and 25ppm/K or less. If the overall CTE of these resin layers is less than 10ppm/K or exceeds 30ppm/K, warping occurs or dimensional stability is reduced.
絕緣樹脂層10例如在應用於多層電路基板中的情況下,為了抑制介電損耗的惡化,10GHz下的介電損耗正切(Tanδ)可優選為0.02以下,更優選為0.0005以上且0.01以下的範圍內,進而優選為0.001以上且0.008以下的範圍內。若絕緣樹脂層10的 10GHz下的介電損耗正切超過0.02,則在應用於多層電路基板中時,容易在高頻信號的傳輸路徑上產生電信號的損失等不良情況。另一方面,絕緣樹脂層10的10GHz下的介電損耗正切的下限值並無特別限制,可考慮作為多層電路基板的絕緣樹脂層的物性控制。 When the insulating resin layer 10 is used in a multi-layer circuit board, for example, in order to suppress the deterioration of dielectric loss, the dielectric loss tangent (Tanδ) at 10 GHz is preferably 0.02 or less, more preferably in the range of 0.0005 or more and 0.01 or less, and further preferably in the range of 0.001 or more and 0.008 or less. If the dielectric loss tangent of the insulating resin layer 10 at 10 GHz exceeds 0.02, when it is used in a multi-layer circuit board, it is easy to cause disadvantages such as loss of electrical signals in the transmission path of high-frequency signals. On the other hand, there is no particular restriction on the lower limit of the dielectric loss tangent of the insulating resin layer 10 at 10 GHz, and physical property control of the insulating resin layer of a multi-layer circuit substrate can be considered.
絕緣樹脂層10例如在作為多層電路基板的絕緣樹脂層而應用的情況下,為了確保阻抗匹配性,優選為10GHz下的介電常數(ε)為4.0以下。若絕緣樹脂層10的10GHz下的介電常數超過4.0,則在應用於多層電路基板中時,導致絕緣樹脂層10的介電損耗的惡化而容易在高頻信號的傳輸路徑上產生電信號的損失等不良情況。 When the insulating resin layer 10 is used as an insulating resin layer of a multi-layer circuit substrate, for example, the dielectric constant (ε) at 10 GHz is preferably 4.0 or less in order to ensure impedance matching. If the dielectric constant of the insulating resin layer 10 at 10 GHz exceeds 4.0, when applied to a multi-layer circuit substrate, the dielectric loss of the insulating resin layer 10 deteriorates, and it is easy to cause disadvantages such as loss of electrical signals in the transmission path of high-frequency signals.
<黏接層> <Adhesive layer>
黏接層30包含熱塑性樹脂或熱硬化性樹脂,且滿足以下的條件:(i)50℃下的儲存彈性模數為1800MPa以下;(ii)自180℃至260℃的儲存彈性模數的最大值為800MPa以下;以及(iii)玻璃化轉變溫度(Tg)為180℃以下。 The adhesive layer 30 includes a thermoplastic resin or a thermosetting resin and meets the following conditions: (i) the storage elastic modulus at 50°C is less than 1800 MPa; (ii) the maximum value of the storage elastic modulus from 180°C to 260°C is less than 800 MPa; and (iii) the glass transition temperature (Tg) is less than 180°C.
作為此種樹脂,例如可列舉:聚醯亞胺樹脂、聚醯胺樹脂、環氧樹脂、苯氧基樹脂、丙烯酸樹脂、聚氨基甲酸酯樹脂、苯乙烯樹脂、聚酯樹脂、酚樹脂、聚碸樹脂、聚醚碸樹脂、聚苯硫醚樹脂、聚乙烯樹脂、聚丙烯樹脂、矽酮樹脂、聚醚酮樹脂、聚乙 烯醇樹脂、聚乙烯醇縮丁醛樹脂、苯乙烯-馬來醯亞胺共聚物、馬來醯亞胺-乙烯基化合物共聚物、或(甲基)丙烯酸共聚物、苯并惡嗪樹脂、雙馬來醯亞胺樹脂及氰酸酯樹脂等樹脂,可自這些中選擇滿足條件(i)~(iii)的樹脂、或者以滿足條件(i)~(iii)的方式進行設計而在黏接層30中使用。 Examples of such resins include polyimide resins, polyamide resins, epoxy resins, phenoxy resins, acrylic resins, polyurethane resins, styrene resins, polyester resins, phenol resins, polysulfone resins, polyethersulfone resins, polyphenylene sulfide resins, polyethylene resins, polypropylene resins, silicone resins, polyetherketone resins, polyethylene alcohol resins, and polyvinyl butyral resins. , styrene-maleimide copolymer, maleimide-vinyl compound copolymer, or (meth) acrylic acid copolymer, benzoxazine resin, dimaleimide resin and cyanate resin, etc. Resins satisfying conditions (i) to (iii) can be selected from these, or they can be designed to satisfy conditions (i) to (iii) and used in the adhesive layer 30.
在黏接層30為熱硬化性樹脂的情況下,可含有有機過氧化物、硬化劑、硬化促進劑等,視需要也可併用硬化劑與硬化促進劑、或催化劑與助催化劑。只要在可確保所述條件(i)~(iii)的範圍內判斷硬化劑、硬化促進劑、催化劑、助催化劑、及有機過氧化物的添加量、及添加的有無即可。 When the adhesive layer 30 is a thermosetting resin, it may contain organic peroxides, hardeners, hardening accelerators, etc., and hardeners and hardening accelerators, or catalysts and co-catalysts may be used together as needed. As long as the amount of hardener, hardening accelerator, catalyst, co-catalyst, and organic peroxide added and the presence or absence of addition are determined within the range of the above conditions (i) to (iii).
黏接層30如條件(i)、(ii)所示般,50℃下的儲存彈性模數為1800MPa以下,且自180℃至260℃的溫度區域中的儲存彈性模數的最大值為800MPa以下。認為此種黏接層30的特性為緩和熱壓接時的內部應力並保持電路加工後的尺寸穩定性的主要原因。另外,黏接層30的所述溫度區域的上限溫度(260℃)下的儲存彈性模數優選為800MPa以下,更優選為500MPa以下的範圍內。通過設為此種儲存彈性模數,即便在經過電路加工後的焊料回流步驟後,也難以產生翹曲。 As shown in conditions (i) and (ii), the storage modulus of the adhesive layer 30 at 50°C is less than 1800 MPa, and the maximum value of the storage modulus in the temperature range from 180°C to 260°C is less than 800 MPa. It is believed that this characteristic of the adhesive layer 30 is the main reason for relieving the internal stress during hot pressing and maintaining the dimensional stability after circuit processing. In addition, the storage modulus of the adhesive layer 30 at the upper limit temperature (260°C) of the temperature range is preferably less than 800 MPa, and more preferably less than 500 MPa. By setting it to such a storage modulus, warping is difficult to occur even after the solder reflow step after circuit processing.
黏接層30如條件(iii)所示般,玻璃化轉變溫度(Tg)可為180℃以下、優選為160℃以下的範圍內。通過將黏接層30的玻璃化轉變溫度設為180℃以下,可進行低溫下的熱壓接,因此,可緩和積層時產生的內部應力而抑制尺寸變化。若黏接層30 的Tg超過180℃,則介隔存在於絕緣樹脂層10與任意的電路基板之間而進行黏接時的溫度變高,存在有損尺寸穩定性的擔憂。 As shown in condition (iii), the glass transition temperature (Tg) of the adhesive layer 30 can be below 180°C, preferably below 160°C. By setting the glass transition temperature of the adhesive layer 30 below 180°C, heat pressing can be performed at a low temperature, thereby relieving the internal stress generated during lamination and suppressing dimensional changes. If the Tg of the adhesive layer 30 exceeds 180°C, the temperature during bonding becomes high due to the presence of a spacer between the insulating resin layer 10 and any circuit board, and there is a concern that dimensional stability may be impaired.
(黏接層的CTE) (CTE of adhesive layer)
構成黏接層30的熱塑性樹脂或熱硬化性樹脂雖為高熱膨脹性,但為低彈性,且玻璃化轉變溫度低,因此,即便CTE超過30ppm/K,也可緩和積層時產生的內部應力。因此,黏接層30的CTE優選為35ppm/K以上,更優選為35ppm/K以上且200ppm/K以下的範圍內,進而優選為35ppm/K以上且150ppm/K以下的範圍內。通過適宜變更使用的原料的組合、厚度、乾燥/硬化條件,可製成具有所期望的CTE的黏接層30。 The thermoplastic resin or thermosetting resin constituting the adhesive layer 30 has high thermal expansion but low elasticity and a low glass transition temperature, so even if the CTE exceeds 30ppm/K, it can alleviate the internal stress generated during lamination. Therefore, the CTE of the adhesive layer 30 is preferably 35ppm/K or more, more preferably 35ppm/K or more and 200ppm/K or less, and further preferably 35ppm/K or more and 150ppm/K or less. By appropriately changing the combination of raw materials used, thickness, and drying/hardening conditions, an adhesive layer 30 having a desired CTE can be produced.
(黏接層的介電損耗正切) (Dielectric loss tangent of the adhesive layer)
黏接層30例如在應用於多層電路基板中的情況下,為了抑制介質損耗的惡化,10GHz下的介質損耗正切(Tanδ)可優選為0.004以下、更優選為0.003以下、進而優選為0.002以下。若黏接層30的10GHz下的介電損耗正切超過0.004,則在應用於多層電路基板中時,容易在高頻信號的傳輸路徑上產生電信號的損失等不良情況。另一方面,黏接層30的10GHz下的介電損耗正切的下限值並無特別限制。 For example, when the adhesive layer 30 is applied to a multi-layer circuit substrate, in order to suppress the deterioration of dielectric loss, the dielectric loss tangent (Tanδ) at 10GHz may be preferably less than 0.004, more preferably less than 0.003, and further preferably less than 0.002. If the dielectric loss tangent of the adhesive layer 30 at 10GHz exceeds 0.004, it is easy to cause undesirable conditions such as loss of electrical signals in the transmission path of high-frequency signals when applied to a multi-layer circuit substrate. On the other hand, there is no particular limit on the lower limit of the dielectric loss tangent of the adhesive layer 30 at 10GHz.
(黏接層的介電常數) (Dielectric constant of adhesive layer)
黏接層30例如在應用於多層電路基板中的情況下,為了確保阻抗匹配性,10GHz下的介電常數優選為4.0以下。若黏接層30的10GHz下的介電常數超過4.0,則在應用於多層電路基板中時, 導致黏接層30的介電損耗的惡化而容易在高頻信號的傳輸路徑上產生電信號的損失等不良情況。 For example, when the adhesive layer 30 is applied to a multi-layer circuit board, in order to ensure impedance matching, the dielectric constant at 10 GHz is preferably less than 4.0. If the dielectric constant of the adhesive layer 30 at 10 GHz exceeds 4.0, when applied to a multi-layer circuit board, the dielectric loss of the adhesive layer 30 deteriorates, which easily causes the loss of electrical signals in the transmission path of high-frequency signals and other undesirable conditions.
(填料) (Padding)
視需要,黏接層30也可含有填料。作為填料,例如可列舉:二氧化矽、氧化鋁、氧化鎂、氧化鈹、氮化硼、氮化鋁、氮化矽、氟化鋁、氟化鈣、有機次膦酸的金屬鹽等。這些可使用一種或將兩種以上混合使用。 If necessary, the adhesive layer 30 may also contain fillers. Examples of fillers include silicon dioxide, aluminum oxide, magnesium oxide, curium oxide, boron nitride, aluminum nitride, silicon nitride, aluminum fluoride, calcium fluoride, metal salts of organic phosphinates, etc. These may be used alone or in combination of two or more.
(黏接性聚醯亞胺) (Adhesive polyimide)
其次,列舉構成黏接層30的樹脂為含有四羧酸殘基及二胺殘基的黏接性的熱塑性聚醯亞胺(以下,有時記載為「黏接性聚醯亞胺」)的情況為例,對黏接層30的具體的構成例進行說明。黏接性聚醯亞胺是將使特定的酸酐與二胺化合物進行反應而獲得的前體的聚醯胺酸加以醯亞胺化而製造,因此,通過對酸酐與二胺化合物進行說明,而理解黏接性聚醯亞胺的具體例。再者,在本發明中,所謂四羧酸殘基,是指由四羧酸二酐衍生的四價基,所謂二胺殘基,是指由二胺化合物衍生的二價基。另外,所謂「熱塑性聚醯亞胺」,通常為可明確地確認到玻璃化轉變溫度(Tg)的聚醯亞胺,在本發明中,是指使用DMA測定的、30℃下的儲存彈性模數為1.0×108Pa以上且300℃下的儲存彈性模數小於3.0×107Pa的聚醯亞胺。 Next, a specific configuration example of the adhesive layer 30 is described by taking as an example a case where the resin constituting the adhesive layer 30 is an adhesive thermoplastic polyimide containing tetracarboxylic acid residues and diamine residues (hereinafter, sometimes described as "adhesive polyimide"). The adhesive polyimide is produced by imidizing a polyamic acid precursor obtained by reacting a specific acid anhydride with a diamine compound. Therefore, the specific example of the adhesive polyimide is understood by describing the acid anhydride and the diamine compound. Furthermore, in the present invention, the so-called tetracarboxylic acid residue refers to a tetravalent group derived from tetracarboxylic dianhydride, and the so-called diamine residue refers to a divalent group derived from a diamine compound. The so-called "thermoplastic polyimide" is generally a polyimide having a clearly identifiable glass transition temperature (Tg), and in the present invention, refers to a polyimide having a storage elastic modulus of 1.0×10 8 Pa or more at 30°C and less than 3.0×10 7 Pa at 300°C as measured using DMA.
(四羧酸殘基) (Tetracarboxylic acid residue)
黏接性聚醯亞胺優選為相對於所有四羧酸殘基的100莫耳份 而含有合計為90莫耳份以上的由下述通式(1)和/或通式(2)所表示的四羧酸酐衍生的四羧酸殘基(以下,有時記載為「四羧酸殘基(1)」、「四羧酸殘基(2)」)。在本發明中,通過相對於所有四羧酸殘基的100莫耳份而含有合計為90莫耳份以上的四羧酸殘基(1)和/或四羧酸殘基(2),而對黏接性聚醯亞胺賦予溶劑可溶性,並且容易實現黏接性聚醯亞胺的柔軟性與耐熱性的並存,因此更優選。若四羧酸殘基(1)和/或四羧酸殘基(2)的合計小於90莫耳份,則存在黏接性聚醯亞胺的溶劑溶解性降低的傾向。 The adhesive polyimide preferably contains 90 mol parts or more of tetracarboxylic acid residues derived from tetracarboxylic anhydride represented by the following general formula (1) and/or general formula (2) (hereinafter sometimes described as "tetracarboxylic acid residue (1)", "tetracarboxylic acid residue (2)") in total relative to 100 mol parts of all tetracarboxylic acid residues. In the present invention, by containing 90 mol parts or more of tetracarboxylic acid residues (1) and/or tetracarboxylic acid residues (2) in total relative to 100 mol parts of all tetracarboxylic acid residues, solvent solubility is imparted to the adhesive polyimide, and it is easy to achieve both flexibility and heat resistance of the adhesive polyimide, which is more preferred. If the total amount of tetracarboxylic acid residues (1) and/or tetracarboxylic acid residues (2) is less than 90 mol parts, the solvent solubility of the adhesive polyimide tends to decrease.
通式(1)中,X表示單鍵、或選自下式中的二價基,通式(2)中,Y所表示的環狀部分表示形成選自4員環、5員環、6員環、7員環或8員環中的環狀飽和烴基。 In the general formula (1), X represents a single bond or a divalent group selected from the following formulas. In the general formula (2), the cyclic part represented by Y represents a cyclic saturated hydrocarbon group selected from a 4-membered ring, a 5-membered ring, a 6-membered ring, a 7-membered ring or an 8-membered ring.
[化5]
所述式中,Z表示-C6H4-、-(CH2)n-或-CH2-CH(-O-C(=O)-CH3)-CH2-,n表示1~20的整數。 In the formula, Z represents -C 6 H 4 -, -(CH 2 )n- or -CH 2 -CH(-OC(=O)-CH 3 )-CH 2 -, and n represents an integer of 1-20.
作為用以衍生四羧酸殘基(1)的四羧酸二酐,例如可列舉:3,3',4,4'-聯苯基四羧酸二酐(BPDA)、3,3',4,4'-二苯甲酮四羧酸二酐(BTDA)、3,3',4,4'-二苯基碸四羧酸二酐(DSDA)、4,4'-氧基二鄰苯二甲酸酐(ODPA)、4,4'-(六氟亞異丙基)二鄰苯二甲酸酐(6FDA)、2,2-雙〔4-(3,4-二羧基苯氧基)苯基〕丙烷二酐(BPADA)、對亞苯基雙(偏苯三甲酸單酯酸酐)(TAHQ)、乙二醇雙偏苯三甲酸酐酯(TMEG)等。 Examples of tetracarboxylic dianhydrides used to derive tetracarboxylic acid residues (1) include 3,3',4,4'-biphenyl tetracarboxylic dianhydride (BPDA), 3,3',4,4'-benzophenone tetracarboxylic dianhydride (BTDA), 3,3',4,4'-diphenylsulfonate tetracarboxylic dianhydride (DSDA), 4,4'-oxydiphthalic anhydride (ODPA), 4,4'-(hexafluoroisopropylidene)diphthalic anhydride (6FDA), 2,2-bis[4-(3,4-dicarboxyphenoxy)phenyl]propane dianhydride (BPADA), p-phenylene bis(trimellitic acid monoester anhydride) (TAHQ), ethylene glycol bis(trimellitic acid monoester anhydride) (TMEG), etc.
另外,作為用以衍生四羧酸殘基(2)的四羧酸二酐,例如可列舉:1,2,3,4-環丁烷四羧酸二酐、1,2,3,4-環戊烷四羧酸二酐、1,2,4,5-環己烷四羧酸二酐、1,2,4,5-環庚烷四羧酸二酐、1,2,5,6-環辛烷四羧酸二酐等。 In addition, examples of tetracarboxylic dianhydrides used to derive tetracarboxylic acid residues (2) include 1,2,3,4-cyclobutanetetracarboxylic dianhydride, 1,2,3,4-cyclopentanetetracarboxylic dianhydride, 1,2,4,5-cyclohexanetetracarboxylic dianhydride, 1,2,4,5-cycloheptanetetracarboxylic dianhydride, and 1,2,5,6-cyclooctanetetracarboxylic dianhydride.
黏接性聚醯亞胺可在無損發明效果的範圍內含有由所述通式(1)或通式(2)所表示的四羧酸酐以外的酸酐衍生的四羧酸殘基。 The adhesive polyimide may contain tetracarboxylic acid residues derived from an acid anhydride other than the tetracarboxylic acid anhydride represented by the general formula (1) or (2) within a range that does not impair the effect of the invention.
(二胺殘基) (Diamine residue)
黏接性聚醯亞胺相對於所有二胺殘基的100莫耳份而在50莫耳份以上、例如50莫耳份以上且99莫耳份以下的範圍內、優選為80莫耳份以上、例如80莫耳份以上且99莫耳份以下的範圍內含有由二聚酸型二胺衍生的二聚酸型二胺殘基。通過以所述量含有二聚酸型二胺殘基,可改善黏接層30的介電特性,並且可通過黏接層30的玻璃化轉變溫度的低溫化而改善熱壓接特性及通過低彈性模數化而緩和內部應力。另外,通過將二聚酸型二胺殘基設為50莫耳份以上,可賦予溶劑可溶性與熱塑性,使黏接層30的吸水性降低,例如,減小蝕刻所致的尺寸變化。若相對於所有二胺殘基的100莫耳份而二聚酸型二胺殘基小於50莫耳份,則作為黏接性聚醯亞胺的溶劑可溶性降低。 The adhesive polyimide contains dimer acid diamine residues derived from dimer acid diamine in an amount of 50 mol parts or more, for example, in a range of 50 mol parts or more and 99 mol parts or less, preferably in a range of 80 mol parts or more, for example, in a range of 80 mol parts or more and 99 mol parts or less, relative to 100 mol parts of all diamine residues. By containing the dimer acid diamine residues in such an amount, the dielectric properties of the adhesive layer 30 can be improved, the glass transition temperature of the adhesive layer 30 can be lowered to improve the heat pressing properties, and the internal stress can be relieved by lowering the elastic modulus. In addition, by setting the dimer acid type diamine residue to more than 50 mol parts, solvent solubility and thermoplasticity can be imparted, so that the water absorption of the adhesive layer 30 is reduced, for example, reducing the dimensional change caused by etching. If the dimer acid type diamine residue is less than 50 mol parts relative to 100 mol parts of all diamine residues, the solvent solubility of the adhesive polyimide is reduced.
此處,所謂二聚酸型二胺,是指二聚酸的兩個末端羧酸基(-COOH)經取代為一級氨基甲基(-CH2-NH2)或氨基(-NH2)而成的二胺。二聚酸為通過不飽和脂肪酸的分子間聚合反應而獲得的已知的二元酸,其工業性製造製程在業界已大致標準化,且可利用黏土催化劑等對碳數為11~22的不飽和脂肪酸進行二聚化而獲得。工業性所獲得的二聚酸以通過對油酸或亞油酸等碳數18的不飽和脂肪酸進行二聚化而獲得的碳數36的二元酸為主成分,根據精製的程度而含有任意量的單體酸(碳數18)、三聚酸(碳數54)、碳數20~54的其他聚合脂肪酸。在本發明中,二聚酸優選為使用利用分子蒸餾將二聚酸含量提高至90重量%以上的化合物。另外,在二聚化反應後殘存雙鍵,但在本發明中,二聚酸中 也包含進而進行氫化反應而降低不飽和度的化合物。 Here, the dimer acid type diamine refers to a diamine in which the two terminal carboxylic acid groups (-COOH) of the dimer acid are substituted with primary aminomethyl groups (-CH 2 -NH 2 ) or amino groups (-NH 2 ). Dimer acid is a known dibasic acid obtained by the intermolecular polymerization reaction of unsaturated fatty acids. Its industrial production process has been largely standardized in the industry, and it can be obtained by dimerizing unsaturated fatty acids with carbon numbers of 11 to 22 using clay catalysts and the like. Industrially obtained dimer acid is mainly composed of a dibasic acid with carbon number 36 obtained by dimerizing unsaturated fatty acids with carbon number 18 such as oleic acid or linoleic acid, and contains any amount of monomeric acid (with carbon number 18), trimer acid (with carbon number 54), and other polymerized fatty acids with carbon number 20 to 54, depending on the degree of purification. In the present invention, the dimer acid is preferably a compound whose dimer acid content is increased to 90% by weight or more by molecular distillation. In addition, after the dimerization reaction, double bonds remain, but in the present invention, the dimer acid also includes compounds that further undergo hydrogenation reaction to reduce unsaturation.
作為二聚酸型二胺的特徵,可對聚醯亞胺賦予源自二聚酸的骨架的特性。即,二聚酸型二胺為分子量約560~620的巨大分子的脂肪族,因此,可增大分子的莫耳體積並相對減少聚醯亞胺的極性基。認為此種二聚酸型二胺的特徵有助於抑制聚醯亞胺的耐熱性的降低並且使介電常數與介電損耗正切減小而提高介電特性。另外,包含兩個自由移動的碳數7~9的疏水鏈、與具有接近碳數18的長度的兩個鏈狀脂肪族氨基,因此,不僅對聚醯亞胺賦予柔軟性,而且也可將聚醯亞胺設為非對稱性化學結構或非平面性化學結構,因此,認為可實現聚醯亞胺的低介電常數化及低介電損耗正切化。 As a characteristic of dimer acid type diamine, it can impart characteristics derived from the dimer acid skeleton to polyimide. That is, dimer acid type diamine is a giant aliphatic molecule with a molecular weight of about 560 to 620, so the molecular molar volume can be increased and the polar groups of polyimide can be relatively reduced. It is believed that such characteristics of dimer acid type diamine contribute to suppressing the decrease in heat resistance of polyimide and reducing the dielectric constant and dielectric loss tangent to improve dielectric properties. In addition, it contains two freely movable hydrophobic chains with carbon numbers of 7 to 9 and two chain-like aliphatic amino groups with a length close to carbon numbers of 18, which not only imparts flexibility to polyimide, but also allows the polyimide to have an asymmetric chemical structure or a non-planar chemical structure, so it is believed that the dielectric constant and dielectric loss tangent of polyimide can be reduced.
二聚酸型二胺可獲得市售品,例如可列舉:日本禾達(CRODA Japan)公司製造的普利阿敏(PRIAMINE)1073(商品名)、日本禾達(CRODA Japan)公司製造的普利阿敏(PRIAMINE)1074(商品名)、日本禾達(CRODA Japan)公司製造的普利阿敏(PRIAMINE)1075(商品名)、日本巴斯夫(BASF Japan)公司製造的巴薩敏(Versamine)551(商品名)、日本巴斯夫(BASF Japan)公司製造的巴薩敏(Versamine)552(商品名)等。 Dimer acid type diamines are commercially available, for example: PRIAMINE 1073 (trade name) manufactured by CRODA Japan, PRIAMINE 1074 (trade name) manufactured by CRODA Japan, PRIAMINE 1075 (trade name) manufactured by CRODA Japan, Versamine 551 (trade name) manufactured by BASF Japan, Versamine 552 (trade name) manufactured by BASF Japan, etc.
另外,黏接性聚醯亞胺優選為相對於所有二胺殘基100莫耳份而在合計為1莫耳份以上且50莫耳份以下的範圍內含有由選自下述通式(B1)~通式(B7)所表示的二胺化合物中的至少一種二胺化合物衍生的二胺殘基,更優選為在1莫耳份以上且20 莫耳份以下的範圍內含有。通式(B1)~通式(B7)所表示的二胺化合物包含具有彎曲性的分子結構,因此,通過以所述範圍內的量使用選自這些中的至少一種二胺化合物,可提高聚醯亞胺分子鏈的柔軟性而賦予溶劑可溶性與熱塑性。另外,通過使用通式(B1)~通式(B7)所表示的二胺化合物,例如,即便在通過雷射加工而在黏接層30形成導通孔(via hole)(貫通孔)的情況下,通過聚醯亞胺分子結構中的芳香環的比例變高,而可提高例如紫外線區域的吸收性,除此以外,還可提高黏接層30的玻璃化轉變溫度,由此,可提高對於雷射光入射所致的底部金屬的溫度上升而言的耐熱性,因此可進一步提高雷射加工性。若由選自下述通式(B1)~通式(B7)所表示的二胺化合物中的至少一種二胺化合物衍生的二胺殘基的合計量相對於所有二胺殘基的100莫耳份超過50莫耳份,則黏接性聚醯亞胺的柔軟性不足,另外,玻璃化轉變溫度上升,因此,熱壓接所致的殘留應力增加而存在蝕刻後尺寸變化率惡化的傾向。 In addition, the adhesive polyimide preferably contains diamine residues derived from at least one diamine compound selected from the diamine compounds represented by the following general formula (B1) to (B7) in a total range of 1 mol or more and 50 mol or less relative to 100 mol of all diamine residues, and more preferably contains diamine residues in a range of 1 mol or more and 20 mol or less. The diamine compounds represented by the general formula (B1) to (B7) have a molecular structure having flexibility. Therefore, by using at least one diamine compound selected from these in an amount within the above range, the flexibility of the polyimide molecular chain can be improved to impart solvent solubility and thermoplasticity. In addition, by using the diamine compounds represented by general formula (B1) to general formula (B7), for example, even when a via hole is formed in the adhesive layer 30 by laser processing, the ratio of the aromatic ring in the polyimide molecular structure becomes higher, and the absorption in the ultraviolet region, for example, can be improved. In addition, the glass transition temperature of the adhesive layer 30 can be increased, thereby improving the heat resistance to the temperature increase of the bottom metal caused by the incidence of laser light, thereby further improving the laser processability. If the total amount of diamine residues derived from at least one diamine compound selected from the diamine compounds represented by the following general formula (B1) to general formula (B7) exceeds 50 mol parts relative to 100 mol parts of all diamine residues, the softness of the adhesive polyimide is insufficient, and the glass transition temperature rises, so the residual stress caused by heat pressing increases and there is a tendency for the dimensional change rate after etching to deteriorate.
[化6]
式(B1)~式(B7)中,R1獨立地表示碳數1~6的一價烴基或烷氧基,連結基A獨立地表示選自-O-、-S-、-CO-、-SO-、-SO2-、-COO-、-CH2-、-C(CH3)2-、-NH-或-CONH-中的二價基,n1獨立地表示0~4的整數。其中,自式(B3)中去除與式(B2)重複的部分,自式(B5)中去除與式(B4)重複的部分。 In formula (B1) to formula (B7), R1 independently represents a monovalent alkyl group or alkoxy group having 1 to 6 carbon atoms, the linking group A independently represents a divalent group selected from -O-, -S-, -CO-, -SO-, -SO2- , -COO-, -CH2- , -C( CH3 ) 2- , -NH- or -CONH-, and n1 independently represents an integer of 0 to 4. In formula (B3), the part repeated with formula (B2) is removed, and the part repeated with formula (B4) is removed from formula (B5).
再者,所謂「獨立地」,是指在所述式(B1)~式(B7)中的一個中、或兩個以上中,多個連結基A、多個R1或多個n1可相同,也可不同。另外,式(B1)~式(B7)中,末端的兩個氨基中的氫原子可經取代,例如可為-NR2R3(此處,R2、R3獨立地是 指烷基等任意的取代基)。 Furthermore, the term "independently" means that in one or more of the formulas (B1) to (B7), multiple linking groups A, multiple R1 or multiple n1 may be the same or different. In the formulas (B1) to (B7), the hydrogen atoms in the two terminal amino groups may be substituted , for example, -NR2R3 (herein, R2 and R3 independently refer to any substituent such as an alkyl group).
式(B1)所表示的二胺(以下,有時記載為「二胺(B1)」)為具有兩個苯環的芳香族二胺。認為所述二胺(B1)通過直接鍵結於至少一個苯環上的氨基與二價連結基A位於間位,而聚醯亞胺分子鏈所具有的自由度增加並具有高的彎曲性,從而有助於聚醯亞胺分子鏈的柔軟性的提高。因此,通過使用二胺(B1),聚醯亞胺的熱塑性提高。此處,作為連結基A,優選為-O-、-CH2-、-C(CH3)2-、-CO-、-SO2-、-S-、-COO-。 The diamine represented by formula (B1) (hereinafter, sometimes described as "diamine (B1)") is an aromatic diamine having two benzene rings. The diamine (B1) is directly bonded to the amino group on at least one benzene ring and the divalent linking group A is located at the meta position, so that the degree of freedom of the polyimide molecular chain increases and the flexibility is high, which contributes to the improvement of the flexibility of the polyimide molecular chain. Therefore, by using diamine (B1), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -O-, -CH2- , -C( CH3 ) 2- , -CO-, -SO2- , -S-, -COO- are preferred.
作為二胺(B1),例如可列舉:3,3'-二氨基二苯基甲烷、3,3'-二氨基二苯基丙烷、3,3'-二氨基二苯基硫醚、3,3'-二氨基二苯基碸、3,3-二氨基二苯基醚、3,4'-二氨基二苯基醚、3,4'-二氨基二苯基甲烷、3,4'-二氨基二苯基丙烷、3,4'-二氨基二苯基硫醚、3,3'-二氨基二苯甲酮、(3,3'-雙氨基)二苯基胺等。 Examples of diamine (B1) include 3,3'-diaminodiphenylmethane, 3,3'-diaminodiphenylpropane, 3,3'-diaminodiphenyl sulfide, 3,3'-diaminodiphenylsulfone, 3,3-diaminodiphenyl ether, 3,4'-diaminodiphenyl ether, 3,4'-diaminodiphenylmethane, 3,4'-diaminodiphenylpropane, 3,4'-diaminodiphenyl sulfide, 3,3'-diaminobenzophenone, (3,3'-bisamino)diphenylamine, etc.
式(B2)所表示的二胺(以下,有時記載為「二胺(B2)」)為具有三個苯環的芳香族二胺。認為所述二胺(B2)通過直接鍵結於至少一個苯環上的氨基與二價連結基A位於間位,而聚醯亞胺分子鏈所具有的自由度增加並具有高的彎曲性,從而有助於聚醯亞胺分子鏈的柔軟性的提高。因此,通過使用二胺(B2),聚醯亞胺的熱塑性提高。此處,作為連結基A,優選為-O-。 The diamine represented by formula (B2) (hereinafter, sometimes described as "diamine (B2)") is an aromatic diamine having three benzene rings. The diamine (B2) is directly bonded to the amino group on at least one benzene ring and the divalent linking group A is located at the meta position, and the degree of freedom of the polyimide molecular chain is increased and has high flexibility, thereby contributing to the improvement of the flexibility of the polyimide molecular chain. Therefore, by using diamine (B2), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -O- is preferred.
作為二胺(B2),例如可列舉:1,4-雙(3-氨基苯氧基)苯、3-[4-(4-氨基苯氧基)苯氧基]苯胺、3-[3-(4-氨基苯氧基)苯氧基]苯胺等。 Examples of diamines (B2) include 1,4-bis(3-aminophenoxy)benzene, 3-[4-(4-aminophenoxy)phenoxy]aniline, and 3-[3-(4-aminophenoxy)phenoxy]aniline.
式(B3)所表示的二胺(以下,有時記載為「二胺(B3)」)為具有三個苯環的芳香族二胺。認為所述二胺(B3)通過直接鍵結於一個苯環上的兩個二價連結基A彼此位於間位,而聚醯亞胺分子鏈所具有的自由度增加並具有高的彎曲性,從而有助於聚醯亞胺分子鏈的柔軟性的提高。因此,通過使用二胺(B3),聚醯亞胺的熱塑性提高。此處,作為連結基A,優選為-O-。 The diamine represented by formula (B3) (hereinafter, sometimes described as "diamine (B3)") is an aromatic diamine having three benzene rings. The diamine (B3) is believed to increase the degree of freedom of the polyimide molecular chain and have high flexibility by directly bonding two divalent linking groups A on one benzene ring to each other at the meta position, thereby contributing to the improvement of the flexibility of the polyimide molecular chain. Therefore, by using diamine (B3), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -O- is preferred.
作為二胺(B3),例如可列舉:1,3-雙(4-氨基苯氧基)苯(TPE-R)、1,3-雙(3-氨基苯氧基)苯(APB)、4,4'-[2-甲基-(1,3-亞苯基)雙氧基]雙苯胺、4,4'-[4-甲基-(1,3-亞苯基)雙氧基]雙苯胺、4,4'-[5-甲基-(1,3-亞苯基)雙氧基]雙苯胺等。 Examples of diamine (B3) include 1,3-bis(4-aminophenoxy)benzene (TPE-R), 1,3-bis(3-aminophenoxy)benzene (APB), 4,4'-[2-methyl-(1,3-phenylene)bisoxy]bisaniline, 4,4'-[4-methyl-(1,3-phenylene)bisoxy]bisaniline, and 4,4'-[5-methyl-(1,3-phenylene)bisoxy]bisaniline.
式(B4)所表示的二胺(以下,有時記載為「二胺(B4)」)為具有四個苯環的芳香族二胺。認為所述二胺(B4)通過直接鍵結於至少一個苯環上的氨基與二價連結基A位於間位而具有高的彎曲性,從而有助於聚醯亞胺分子鏈的柔軟性的提高。因此,通過使用二胺(B4),聚醯亞胺的熱塑性提高。此處,作為連結基A,優選為-O-、-CH2-、-C(CH3)2-、-SO2-、-CO-、-CONH-。 The diamine represented by formula (B4) (hereinafter, sometimes described as "diamine (B4)") is an aromatic diamine having four benzene rings. The diamine (B4) is considered to have high flexibility due to the amino group directly bonded to at least one benzene ring and the divalent linking group A being located at the meta position, thereby contributing to the improvement of the flexibility of the polyimide molecular chain. Therefore, by using diamine (B4), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -O-, -CH2- , -C( CH3 ) 2- , -SO2- , -CO-, and -CONH- are preferred.
作為二胺(B4),可列舉:雙[4-(3-氨基苯氧基)苯基]甲烷、雙[4-(3-氨基苯氧基)苯基]丙烷、雙[4-(3-氨基苯氧基)苯基]醚、雙[4-(3-氨基苯氧基)苯基]碸、雙[4-(3-氨基苯氧基)]二苯甲酮、雙[4,4'-(3-氨基苯氧基)]苯甲醯苯胺等。 Examples of diamines (B4) include bis[4-(3-aminophenoxy)phenyl]methane, bis[4-(3-aminophenoxy)phenyl]propane, bis[4-(3-aminophenoxy)phenyl]ether, bis[4-(3-aminophenoxy)phenyl]sulfone, bis[4-(3-aminophenoxy)benzophenone, and bis[4,4'-(3-aminophenoxy)]benzanilide.
式(B5)所表示的二胺(以下,有時記載為「二胺(B5)」)為具有四個苯環的芳香族二胺。認為所述二胺(B5)通過直接鍵 結於至少一個苯環上的兩個二價連結基A彼此位於間位,而聚醯亞胺分子鏈所具有的自由度增加並具有高的彎曲性,從而有助於聚醯亞胺分子鏈的柔軟性的提高。因此,通過使用二胺(B5),聚醯亞胺的熱塑性提高。此處,作為連結基A,優選為-O-。 The diamine represented by formula (B5) (hereinafter, sometimes described as "diamine (B5)") is an aromatic diamine having four benzene rings. It is believed that the two divalent linking groups A of the diamine (B5) are directly bonded to at least one benzene ring and are located at the meta position, and the degree of freedom of the polyimide molecular chain is increased and has high flexibility, which helps to improve the flexibility of the polyimide molecular chain. Therefore, by using diamine (B5), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -O- is preferred.
作為二胺(B5),可列舉4-[3-[4-(4-氨基苯氧基)苯氧基]苯氧基]苯胺、4,4'-[氧基雙(3,1-亞苯基氧基)]雙苯胺等。 Examples of diamine (B5) include 4-[3-[4-(4-aminophenoxy)phenoxy]phenoxy]aniline and 4,4'-[oxybis(3,1-phenyleneoxy)]bisaniline.
式(B6)所表示的二胺(以下,有時記載為「二胺(B6)」)為具有四個苯環的芳香族二胺。認為所述二胺(B6)通過具有至少兩個醚鍵而具有高的彎曲性,從而有助於聚醯亞胺分子鏈的柔軟性的提高。因此,通過使用二胺(B6),聚醯亞胺的熱塑性提高。此處,作為連結基A,優選為-C(CH3)2-、-O-、-SO2-、-CO-。 The diamine represented by formula (B6) (hereinafter, sometimes described as "diamine (B6)") is an aromatic diamine having four benzene rings. It is believed that the diamine (B6) has high flexibility due to having at least two ether bonds, thereby contributing to the improvement of the flexibility of the polyimide molecular chain. Therefore, the thermoplasticity of the polyimide is improved by using the diamine (B6). Here, the linking group A is preferably -C( CH3 ) 2- , -O-, -SO2- , or -CO-.
作為二胺(B6),例如可列舉:2,2-雙[4-(4-氨基苯氧基)苯基]丙烷(BAPP)、雙[4-(4-氨基苯氧基)苯基]醚(BAPE)、雙[4-(4-氨基苯氧基)苯基]碸(BAPS)、雙[4-(4-氨基苯氧基)苯基]酮(BAPK)等。 Examples of diamines (B6) include 2,2-bis[4-(4-aminophenoxy)phenyl]propane (BAPP), bis[4-(4-aminophenoxy)phenyl]ether (BAPE), bis[4-(4-aminophenoxy)phenyl]sulfone (BAPS), and bis[4-(4-aminophenoxy)phenyl]ketone (BAPK).
式(B7)所表示的二胺(以下,有時記載為「二胺(B7)」)為具有四個苯環的芳香族二胺。認為所述二胺(B7)在二苯基骨架的兩側分別具有彎曲性高的二價連結基A,因此有助於聚醯亞胺分子鏈的柔軟性的提高。因此,通過使用二胺(B7),聚醯亞胺的熱塑性提高。此處,作為連結基A,優選為-O-。 The diamine represented by formula (B7) (hereinafter, sometimes described as "diamine (B7)") is an aromatic diamine having four benzene rings. It is believed that the diamine (B7) has a highly flexible divalent linking group A on both sides of the diphenyl skeleton, and thus contributes to the improvement of the flexibility of the polyimide molecular chain. Therefore, by using diamine (B7), the thermoplasticity of the polyimide is improved. Here, as the linking group A, -O- is preferred.
作為二胺(B7),例如可列舉雙[4-(3-氨基苯氧基)]聯苯、雙[4-(4-氨基苯氧基)]聯苯等。 Examples of diamine (B7) include bis[4-(3-aminophenoxy)]biphenyl and bis[4-(4-aminophenoxy)]biphenyl.
黏接性聚醯亞胺可在無損發明效果的範圍內包含由所述二聚酸型二胺及二胺(B1)~二胺(B7)以外的二胺化合物衍生的二胺殘基。 The adhesive polyimide may contain diamine residues derived from the dimer acid type diamine and diamine compounds other than diamines (B1) to (B7) within a range that does not impair the effect of the invention.
另外,關於黏接性聚醯亞胺,通過選定所述四羧酸殘基及二胺殘基的種類、或含有兩種以上的四羧酸殘基或二胺殘基時的各自的莫耳比,可控制熱膨脹係數、拉伸彈性模數、玻璃化轉變溫度等。另外,在具有多個聚醯亞胺的結構單元的情況下,可以嵌段的形式存在,也可無規地存在,優選為無規地存在。 In addition, regarding the adhesive polyimide, by selecting the types of the tetracarboxylic acid residues and diamine residues, or the respective molar ratios when containing two or more tetracarboxylic acid residues or diamine residues, the thermal expansion coefficient, tensile elastic modulus, glass transition temperature, etc. can be controlled. In addition, in the case of a plurality of structural units of polyimide, they can exist in the form of blocks or randomly, preferably randomly.
黏接性聚醯亞胺的醯亞胺基濃度優選為20重量%以下。此處,「醯亞胺基濃度」是指用聚醯亞胺中的醯亞胺基部(-(CO)2-N-)的分子量除以聚醯亞胺的結構整體的分子量而得的值。若醯亞胺基濃度超過20重量%,則樹脂自身的分子量變小,並且因極性基的增加而低吸濕性也惡化,彈性模數上升。 The imide group concentration of the adhesive polyimide is preferably 20 wt% or less. Here, "imide group concentration" refers to the value obtained by dividing the molecular weight of the imide group (-(CO) 2 -N-) in the polyimide by the molecular weight of the entire structure of the polyimide. If the imide group concentration exceeds 20 wt%, the molecular weight of the resin itself becomes small, and the low hygroscopicity also deteriorates due to the increase in polar groups, and the elastic modulus increases.
黏接性聚醯亞胺的重量平均分子量例如優選為10,000~400,000的範圍內,更優選為20,000~350,000的範圍內。若重量平均分子量小於10,000,則黏接層30的強度降低而存在容易脆化的傾向。另一方面,若重量平均分子量超過400,000,則黏度過度增加而在塗敷作業時存在容易產生黏接層30的厚度不均、條紋等不良的傾向。 The weight average molecular weight of the adhesive polyimide is preferably in the range of 10,000 to 400,000, and more preferably in the range of 20,000 to 350,000. If the weight average molecular weight is less than 10,000, the strength of the adhesive layer 30 decreases and tends to be brittle. On the other hand, if the weight average molecular weight exceeds 400,000, the viscosity increases excessively and tends to cause defects such as uneven thickness and streaks in the adhesive layer 30 during the coating operation.
黏接性聚醯亞胺在形成多層電路基板的情況下,被覆任意的電路基板的導體電路層,因此,為了抑制銅的擴散而最優選為經完全醯亞胺化的結構。其中,也可聚醯亞胺的一部分為醯胺 酸。關於其醯亞胺化率,可通過使用傅立葉(Fourier)轉換紅外分光光度計(市售品:日本分光製造的FT/IR620)並利用1次反射ATR(衰減全反射(Attenuated Total Reflectance))法測定聚醯亞胺薄膜的紅外線吸收光譜,並且以1015cm-1附近的苯環吸收體為基準且根據1780cm-1的源自醯亞胺基的C=O伸縮的吸光度進行算出。 When forming a multi-layer circuit board, the adhesive polyimide covers any conductive circuit layer of the circuit board, so in order to suppress the diffusion of copper, it is most preferably a completely imidized structure. Among them, a part of the polyimide can also be amide. The imidization rate can be measured by using a Fourier conversion infrared spectrophotometer (commercial product: FT/IR620 manufactured by JASCO Corporation) and using the single reflection ATR (Attenuated Total Reflectance) method to measure the infrared absorption spectrum of the polyimide film, and calculate it based on the absorbance of the C=O stretching derived from the imide group at 1780cm -1 with the benzene ring absorber near 1015cm -1 as the reference.
(交聯形成) (Cross-linking formation)
在黏接性聚醯亞胺具有酮基的情況下,使所述酮基、與具有至少兩個一級氨基作為官能基的氨基化合物的氨基反應而形成C=N鍵,由此可形成交聯結構。通過形成交聯結構,可提高黏接性聚醯亞胺的耐熱性。為了形成具有酮基的聚醯亞胺而優選的四羧酸酐例如可列舉3,3',4,4'-二苯甲酮四羧酸二酐(BTDA),優選的二胺化合物例如可列舉4,4'-雙(3-氨基苯氧基)二苯甲酮(BABP)、1,3-雙[4-(3-氨基苯氧基)苯甲醯基]苯(BABB)等芳香族二胺。 When the adhesive polyimide has a ketone group, the ketone group is reacted with an amino group of an amino compound having at least two primary amino groups as functional groups to form a C=N bond, thereby forming a cross-linked structure. By forming a cross-linked structure, the heat resistance of the adhesive polyimide can be improved. Preferred tetracarboxylic anhydrides for forming polyimide having a ketone group include, for example, 3,3',4,4'-benzophenonetetracarboxylic dianhydride (BTDA), and preferred diamine compounds include, for example, aromatic diamines such as 4,4'-bis(3-aminophenoxy)benzophenone (BABP) and 1,3-bis[4-(3-aminophenoxy)benzyl]benzene (BABB).
作為黏接性聚醯亞胺的交聯形成中可使用的氨基化合物,可例示二醯肼化合物、芳香族二胺、脂肪族胺等。這些中,優選為二醯肼化合物。二醯肼化合物以外的脂肪族胺即便在室溫下也容易形成交聯結構,清漆的保存穩定性存在擔憂,另一方面,芳香族二胺為了形成交聯結構而需要設為高溫。在使用二醯肼化合物的情況下,可使清漆的保存穩定性與硬化時間的縮短化並存。作為二醯肼化合物,例如優選為乙二酸二醯肼、丙二酸二醯 肼、琥珀酸二醯肼、戊二酸二醯肼、己二酸二醯肼、庚二酸二醯肼、辛二酸二醯肼、壬二酸二醯肼、癸二酸二醯肼、十二烷二酸二醯肼、馬來酸二醯肼、富馬酸二醯肼、二甘醇酸二醯肼、酒石酸二醯肼、蘋果酸二醯肼、鄰苯二甲酸二醯肼、間苯二甲酸二醯肼、對苯二甲酸二醯肼、2,6-萘甲酸二醯肼、4,4-雙苯二醯肼、1,4-萘甲酸二醯肼、2,6-吡啶二酸二醯肼、衣康酸二醯肼等二醯肼化合物。以上的二醯肼化合物可單獨使用,也可將兩種以上混合使用。 As amino compounds that can be used in the crosslinking formation of adhesive polyimide, dihydrazide compounds, aromatic diamines, aliphatic amines, etc. can be exemplified. Among these, dihydrazide compounds are preferred. Aliphatic amines other than dihydrazide compounds easily form a crosslinking structure even at room temperature, and there is a concern about the storage stability of the varnish. On the other hand, aromatic diamines need to be set to a high temperature in order to form a crosslinking structure. When a dihydrazide compound is used, the storage stability of the varnish can be improved and the curing time can be shortened. As the dihydrazide compound, for example, dihydrazide oxalate, dihydrazide malonate, dihydrazide succinate, dihydrazide glutarate, dihydrazide adipic acid, dihydrazide pimelic acid, dihydrazide suberate, dihydrazide azelaic acid, dihydrazide sebacic acid, dihydrazide dodecanedioic acid, dihydrazide maleic acid, dihydrazide fumaric acid, diethylene glycol Acid dihydrazide, tartaric acid dihydrazide, apple acid dihydrazide, phthalic acid dihydrazide, isophthalic acid dihydrazide, terephthalic acid dihydrazide, 2,6-naphthoic acid dihydrazide, 4,4-diphenyl dihydrazide, 1,4-naphthoic acid dihydrazide, 2,6-pyridine dihydrazide, itaconic acid dihydrazide and other dihydrazide compounds. The above dihydrazide compounds can be used alone or in combination of two or more.
黏接性聚醯亞胺可通過如下方式製造:使所述四羧酸二酐與二胺化合物在溶媒中反應並生成聚醯胺酸後進行加熱閉環。例如,使四羧酸二酐與二胺化合物以大致等莫耳溶解於有機溶媒中,在0℃~100℃的範圍內的溫度下攪拌30分鐘~24小時而進行聚合反應,由此,獲得作為黏接性聚醯亞胺的前體的聚醯胺酸。反應時,以生成的前體在有機溶媒中為5重量%~50重量%的範圍內、優選為10重量%~40重量%的範圍內的方式溶解反應成分。作為聚合反應中使用的有機溶媒,例如可列舉:N,N-二甲基甲醯胺(DMF)、N,N-二甲基乙醯胺(DMAc)、N,N-二乙基乙醯胺、N-甲基-2-吡咯烷酮(NMP)、2-丁酮、二甲基亞碸(DMSO)、六甲基磷醯胺、N-甲基己內醯胺、硫酸二甲酯、環己酮、二惡烷、四氫呋喃、二乙二醇二甲醚(diglyme)、三乙二醇二甲醚(triglyme)、甲酚等。也可將這些溶媒併用兩種以上而使用,進而也可併用二甲苯、甲苯之類的芳香族烴。另外,此種有機溶媒的使用量並無特別限制,優選為調整為通過聚合反應而得的聚醯 胺酸溶液的濃度為5重量%~50重量%左右的使用量而使用。 The adhesive polyimide can be produced by reacting the tetracarboxylic dianhydride and the diamine compound in a solvent to generate polyamide, and then heating and ring closing. For example, the tetracarboxylic dianhydride and the diamine compound are dissolved in an organic solvent in approximately equimolar amounts, and the polymerization reaction is carried out by stirring for 30 minutes to 24 hours at a temperature in the range of 0°C to 100°C, thereby obtaining polyamide as a precursor of the adhesive polyimide. During the reaction, the reaction components are dissolved in a manner such that the generated precursor is in the range of 5% by weight to 50% by weight, preferably in the range of 10% by weight to 40% by weight in the organic solvent. Examples of organic solvents used in the polymerization reaction include N,N-dimethylformamide (DMF), N,N-dimethylacetamide (DMAc), N,N-diethylacetamide, N-methyl-2-pyrrolidone (NMP), 2-butanone, dimethyl sulfoxide (DMSO), hexamethylphosphatamide, N-methylcaprolactam, dimethyl sulfate, cyclohexanone, dioxane, tetrahydrofuran, diethylene glycol dimethyl ether (diglyme), triethylene glycol dimethyl ether (triglyme), cresol, etc. These solvents may be used in combination of two or more, and aromatic hydrocarbons such as xylene and toluene may also be used in combination. In addition, the amount of such an organic solvent used is not particularly limited, but it is preferably used in an amount adjusted so that the concentration of the polyamide solution obtained by the polymerization reaction is about 5% by weight to 50% by weight.
所合成的聚醯胺酸通常有利的是作為反應溶媒溶液而使用,可視需要進行濃縮、稀釋或置換為其他有機溶媒。另外,聚醯胺酸通常因溶媒可溶性優異而有利地使用。聚醯胺酸的溶液的黏度優選為500cps~100,000cps的範圍內。若偏離所述範圍,則在利用塗布機等的塗敷作業時容易在膜中產生厚度不均、條紋等不良。 The synthesized polyamine is usually advantageously used as a reaction solvent solution, and can be concentrated, diluted or replaced with other organic solvents as needed. In addition, polyamine is usually advantageously used due to its excellent solvent solubility. The viscosity of the polyamine solution is preferably in the range of 500cps~100,000cps. If it deviates from the above range, it is easy to produce defects such as uneven thickness and streaks in the film during the coating operation using a coating machine.
使聚醯胺酸醯亞胺化而形成聚醯亞胺的方法並無特別限制,例如可適宜採用在所述溶媒中以80℃~400℃的範圍內的溫度條件歷時1小時~24小時進行加熱等熱處理。 There is no particular limitation on the method of imidizing polyamine to form polyimide. For example, a heat treatment such as heating in the solvent at a temperature range of 80°C to 400°C for 1 hour to 24 hours can be appropriately adopted.
在使如以上般獲得的黏接性聚醯亞胺進行交聯形成的情況下,對包含具有酮基的聚醯亞胺的樹脂溶液添加所述氨基化合物,並使黏接性聚醯亞胺中的酮基與氨基化合物的一級氨基進行縮合反應。通過所述縮合反應,樹脂溶液硬化而成為硬化物。所述情況下,關於氨基化合物的添加量,可以一級氨基相對於酮基1莫耳而合計可為0.004莫耳~1.5莫耳、優選為0.005莫耳~1.2莫耳、更優選為0.03莫耳~0.9莫耳、最優選為0.04莫耳~0.5莫耳的方式添加氨基化合物。關於一級氨基相對於酮基1莫耳而合計小於0.004莫耳的之類的氨基化合物的添加量,因利用氨基化合物的聚醯亞胺鏈的交聯不充分,因此存在硬化後的黏接層30中難以顯現出耐熱性的傾向,若氨基化合物的添加量超過1.5莫耳,則未反應的氨基化合物作為熱塑劑發揮作用,存在黏接層30的耐熱性 降低的傾向。 When the adhesive polyimide obtained as above is crosslinked, the amino compound is added to a resin solution containing a polyimide having a ketone group, and the ketone group in the adhesive polyimide is subjected to a condensation reaction with the primary amino group of the amino compound. The resin solution is cured by the condensation reaction to form a cured product. In the above case, the amount of the amino compound added may be 0.004 mol to 1.5 mol, preferably 0.005 mol to 1.2 mol, more preferably 0.03 mol to 0.9 mol, and most preferably 0.04 mol to 0.5 mol of the primary amino group relative to 1 mol of the ketone group. Regarding the addition amount of the amino compound such as less than 0.004 mol of primary amino group relative to 1 mol of keto group, the crosslinking of the polyimide chain using the amino compound is insufficient, so there is a tendency that the heat resistance of the adhesive layer 30 after hardening is difficult to show. If the addition amount of the amino compound exceeds 1.5 mol, the unreacted amino compound acts as a thermoplastic agent, and there is a tendency that the heat resistance of the adhesive layer 30 is reduced.
用以進行交聯形成的縮合反應的條件若為黏接性聚醯亞胺中的酮基與氨基化合物的一級氨基進行反應而形成亞胺鍵(C=N鍵)的條件,則並無特別限制。關於加熱縮合的溫度,出於將通過縮合而生成的水放出至系統外、或於在黏接性聚醯亞胺的合成後繼而進行加熱縮合反應的情況下使所述縮合步驟簡略化等理由,例如優選為120℃~220℃的範圍內,更優選為140℃~200℃的範圍內。反應時間優選為30分鐘~24小時左右,反應的終點例如可通過使用傅立葉轉換紅外分光光度計(市售品:日本分光製造的FT/IR620)對紅外線吸收光譜進行測定,並利用1670cm-1附近的源自聚醯亞胺樹脂中的酮基的吸收峰值減少或消失、及1635cm-1附近的源自亞胺基的吸收峰值出現而確認。 The conditions for the crosslinking condensation reaction are not particularly limited as long as the ketone group in the adhesive polyimide reacts with the primary amino group of the amino compound to form an imine bond (C=N bond). The temperature of the heat condensation is preferably in the range of 120°C to 220°C, more preferably in the range of 140°C to 200°C, for the reasons of releasing water generated by the condensation to the outside of the system or simplifying the condensation step when the heat condensation reaction is performed after the synthesis of the adhesive polyimide. The reaction time is preferably about 30 minutes to 24 hours. The endpoint of the reaction can be confirmed, for example, by measuring the infrared absorption spectrum using a Fourier transform infrared spectrophotometer (commercially available product: FT/IR620 manufactured by JASCO Corporation) and by using the decrease or disappearance of the absorption peak derived from the ketone group in the polyimide resin near 1670 cm -1 and the appearance of the absorption peak derived from the imine group near 1635 cm -1 .
黏接性聚醯亞胺的酮基與氨基化合物的一級氨基的加熱縮合例如可利用如下方法等進行:(a)緊接著黏接性聚醯亞胺的合成(醯亞胺化)而添加氨基化合物並進行加熱的方法;(b)預先投入過剩量的氨基化合物作為二胺成分,緊接著黏接性聚醯亞胺的合成(醯亞胺化),而對不參與醯亞胺化或醯胺化的殘留的氨基化合物以及黏接性聚醯亞胺一起進行加熱的方法;或者(c)將添加有氨基化合物的黏接性聚醯亞胺的組合物加工為規定的形狀後(例如,在任意的基材上進行塗布後或形成為膜狀後)進行加熱的方法。 The heat condensation of the ketone group of the adhesive polyimide and the primary amino group of the amino compound can be performed, for example, by the following methods: (a) a method of adding the amino compound and heating immediately after the synthesis (imidization) of the adhesive polyimide; (b) a method of pre-adding an excess amount of the amino compound as a diamine component, and heating the adhesive polyimide together with the residual amino compound that does not participate in the imidization or amidation; or (c) a method of heating the adhesive polyimide composition after processing the amino compound-added adhesive polyimide into a predetermined shape (for example, after coating on an arbitrary substrate or forming into a film).
為了賦予黏接層30的耐熱性,而在黏接性聚醯亞胺中的 交聯結構的形成中說明了亞胺鍵的形成,但並不限定於此,作為黏接層30的硬化方法,例如也可調配環氧樹脂、環氧樹脂硬化劑等而進行硬化。 In order to impart heat resistance to the adhesive layer 30, the formation of imide bonds is described in the formation of the cross-linked structure in the adhesive polyimide, but the present invention is not limited thereto. As a method for hardening the adhesive layer 30, for example, epoxy resin, epoxy resin hardener, etc. may be prepared for hardening.
<樹脂層的厚度> <Thickness of resin layer>
關於覆金屬積層板100,在將絕緣樹脂層10的厚度T3與黏接層30的厚度T2的合計厚度設為T1時,所述合計厚度T1為50μm~250μm的範圍內,優選為70μm~150μm的範圍內。若合計厚度T1小於50μm,則使用覆金屬積層板100製造多層電路基板時的傳輸損耗降低的效果不充分,若超過250μm,則存在生產性降低的擔憂。 Regarding the metal-clad laminate 100, when the total thickness of the insulating resin layer 10 thickness T3 and the adhesive layer 30 thickness T2 is set to T1, the total thickness T1 is in the range of 50μm to 250μm, preferably in the range of 70μm to 150μm. If the total thickness T1 is less than 50μm, the effect of reducing transmission loss when using the metal-clad laminate 100 to manufacture a multi-layer circuit substrate is insufficient, and if it exceeds 250μm, there is a concern about reduced productivity.
另外,黏接層30的厚度T2例如優選為處於20μm~200μm的範圍內,更優選為20μm~100μm的範圍內。若黏接層30的厚度T2不足所述下限值,則就高頻基板而言,有時傳輸損耗變大。另一方面,若黏接層30的厚度T2超過所述上限值,則有時產生尺寸穩定性降低等不良情況。 In addition, the thickness T2 of the adhesive layer 30 is preferably in the range of 20μm to 200μm, and more preferably in the range of 20μm to 100μm. If the thickness T2 of the adhesive layer 30 is less than the lower limit, the transmission loss may increase for high-frequency substrates. On the other hand, if the thickness T2 of the adhesive layer 30 exceeds the upper limit, it may cause undesirable conditions such as reduced dimensional stability.
另外,黏接層30的厚度T2相對於合計厚度T1的比率(T2/T1)為0.5~0.8的範圍內,優選為0.5~0.7的範圍內。若比率(T2/T1)小於0.5,則難以將合計厚度T1設為50μm以上,若超過0.8,則產生尺寸穩定性降低等不良情況。 In addition, the ratio (T2/T1) of the thickness T2 of the adhesive layer 30 to the total thickness T1 is in the range of 0.5 to 0.8, preferably in the range of 0.5 to 0.7. If the ratio (T2/T1) is less than 0.5, it is difficult to set the total thickness T1 to more than 50μm, and if it exceeds 0.8, it will cause problems such as reduced dimensional stability.
絕緣樹脂層10的厚度T3例如優選為處於12μm~100μm的範圍內,更優選為12μm~50μm的範圍內。若絕緣樹脂層10的厚度T3不足所述下限值,則有時產生覆金屬積層板100的翹曲 等問題。若絕緣樹脂層10的厚度T3超過所述上限值,則產生生產性降低等不良情況。 The thickness T3 of the insulating resin layer 10 is preferably in the range of 12μm to 100μm, and more preferably in the range of 12μm to 50μm. If the thickness T3 of the insulating resin layer 10 is less than the lower limit, problems such as warping of the metal-clad laminate 100 may occur. If the thickness T3 of the insulating resin layer 10 exceeds the upper limit, problems such as reduced productivity may occur.
在本實施形態的覆金屬積層板100中,為了實現樹脂層整體的低介電損耗正切化,並可應對高頻傳輸,而使黏接層30的厚度T2自身增大。然而,通常,彈性模數低的材料顯示出高的熱膨脹係數,因此增大層厚的情況存在導致尺寸穩定性降低的擔憂。此處,認為對覆金屬積層板100進行電路加工並加以多層電路化時產生的尺寸變化主要是因下述的a)~c)機制而產生,b)與c)的合計量成為蝕刻後的尺寸變化而顯現。 In the metal-clad laminate 100 of this embodiment, in order to achieve low dielectric loss tangent of the resin layer as a whole and cope with high-frequency transmission, the thickness T2 of the adhesive layer 30 itself is increased. However, generally, materials with low elastic modulus show high thermal expansion coefficients, so increasing the layer thickness may lead to reduced dimensional stability. Here, it is considered that the dimensional change caused by circuit processing and multi-layer circuitization of the metal-clad laminate 100 is mainly caused by the following a) to c) mechanisms, and the total amount of b) and c) becomes the dimensional change after etching and appears.
a)在製造覆金屬積層板100時,在樹脂層中蓄積內部應力。 a) When manufacturing the metal-clad laminate 100, internal stress is accumulated in the resin layer.
b)在電路加工時,通過蝕刻金屬層20,而釋放a)中所蓄積的內部應力,樹脂層膨脹或收縮。 b) During circuit processing, the internal stress accumulated in a) is released by etching the metal layer 20, and the resin layer expands or contracts.
c)在電路加工時,通過蝕刻金屬層20,而露出的樹脂吸濕並膨脹。 c) During circuit processing, the exposed resin absorbs moisture and expands due to etching of the metal layer 20.
所述a)的內部應力的主要原因為:1)金屬層20與樹脂層的熱膨脹係數的差;2)通過膜化而產生的樹脂內部應變。此處,1)引起的內部應力的大小不僅受熱膨脹係數的差的影響,而且還受多層電路化時的黏接時的溫度(加熱溫度)至冷卻固化的溫度為止的溫度差△T的影響。即,內部應力與溫度差△T成比例地變大,因此,即便金屬層20與樹脂層的熱膨脹係數的差小,越是黏接時需要高溫的樹脂,內部應力也越變大。在本實施形態的覆金屬積層板100中,通過採用滿足所述條件(i)~(iii)者作為黏 接層30,而減小內部應力並確保尺寸穩定性。另外,黏接層30積層於絕緣樹脂層10,因此,在形成多層電路基板的情況下,作為中間層發揮功能,並抑制翹曲與尺寸變化。 The main causes of the internal stress in a) are: 1) the difference in thermal expansion coefficient between the metal layer 20 and the resin layer; 2) the internal strain of the resin generated by film formation. Here, the magnitude of the internal stress caused by 1) is not only affected by the difference in thermal expansion coefficient, but also by the temperature difference ΔT from the temperature during bonding (heating temperature) to the temperature of cooling and solidification during multi-layer circuit formation. That is, the internal stress increases in proportion to the temperature difference ΔT, so even if the difference in thermal expansion coefficient between the metal layer 20 and the resin layer is small, the higher the temperature of the resin required for bonding, the greater the internal stress. In the metal-clad laminate 100 of this embodiment, by using a material satisfying the above conditions (i) to (iii) as the adhesive layer 30, internal stress is reduced and dimensional stability is ensured. In addition, the adhesive layer 30 is laminated on the insulating resin layer 10, so when a multi-layer circuit board is formed, it functions as an intermediate layer and suppresses warping and dimensional changes.
[覆金屬積層板的製造方法] [Method for manufacturing metal-clad laminate]
覆金屬積層板100例如可利用以下的方法1、或方法2來製造。 The metal-clad laminate 100 can be manufactured, for example, using the following method 1 or method 2.
[方法1] [Method 1]
將成為黏接層30的樹脂組合物成形為膜狀並製成黏接膜,將所述黏接膜以與單面覆金屬積層板40的絕緣樹脂層10相向的方式配置並貼合,並且進行熱壓接的方法。 A method of forming a resin composition to be an adhesive layer 30 into a film shape to make an adhesive film, arranging and laminating the adhesive film in a manner facing the insulating resin layer 10 of the single-sided metal-clad laminate 40, and performing heat-pressing.
[方法2] [Method 2]
將成為黏接層30的樹脂組合物的溶液以規定厚度塗布於單面覆金屬積層板40的絕緣樹脂層10上並進行乾燥的方法。所述情況下,視需要也可進行用以進行硬化反應或交聯反應的加熱等處理。 A method of applying a solution of a resin composition that becomes an adhesive layer 30 to a predetermined thickness on an insulating resin layer 10 of a single-sided metal-clad laminate 40 and drying the coating. In the above case, heating or other treatments for hardening reaction or crosslinking reaction may be performed as needed.
方法1中使用的黏接膜例如可通過如下方式製造:在任意的支撐基材塗布成為黏接層30的樹脂組合物的溶液並進行乾燥,之後,自支撐基材進行剝離。作為黏接膜,也可使用將所述黏接性聚醯亞胺形成為膜狀而成的黏接性聚醯亞胺膜。作為黏接性聚醯亞胺膜的製造方法的形態,例如可列舉如下方法:[1]在支撐基材塗布聚醯胺酸的溶液並進行乾燥,進行熱處理而醯亞胺化,之後,自支撐基材進行剝落而製造黏接膜的方法;[2]在支撐 基材塗布聚醯胺酸的溶液並進行乾燥,之後,自支撐基材剝落聚醯胺酸的凝膠膜,進行熱處理而醯亞胺化,從而製造黏接膜的方法;[3]在支撐基材塗布黏接性聚醯亞胺的溶液並進行乾燥後,自支撐基材進行剝落而製造黏接膜的方法。所述[1]~[3]中,優選為利用在支撐基材上塗布在聚醯胺酸溶液中結束醯亞胺化的黏接性聚醯亞胺的溶液並進行乾燥的[3]的方法來形成。因黏接性聚醯亞胺為溶劑可溶性,因此將聚醯胺酸以溶液的狀態醯亞胺化,可作為黏接性聚醯亞胺的塗布液而直接使用,因此有利。再者,關於構成黏接膜的黏接性聚醯亞胺,也可利用所述方法進行交聯形成。 The adhesive film used in method 1 can be produced, for example, by applying a solution of a resin composition to be the adhesive layer 30 to an arbitrary supporting substrate, drying the solution, and then peeling the solution from the supporting substrate. As the adhesive film, an adhesive polyimide film formed by forming the adhesive polyimide into a film can also be used. As forms of the method for producing an adhesive polyimide film, for example, the following methods can be cited: [1] a method of coating a support substrate with a solution of polyimide, drying the solution, heat-treating the solution to imidize the solution, and then peeling the solution off the support substrate to produce an adhesive film; [2] a method of coating a support substrate with a solution of polyimide, drying the solution, peeling the gel film of polyimide off the support substrate, heat-treating the solution to imidize the solution, and then producing an adhesive film; [3] a method of coating a support substrate with a solution of adhesive polyimide, drying the solution, and then peeling the solution off the support substrate to produce an adhesive film. Among the above-mentioned [1] to [3], it is preferred to form the adhesive film by coating a solution of an adhesive polyimide that has been imidized in a polyamic acid solution on a supporting substrate and drying the solution. Since the adhesive polyimide is solvent-soluble, it is advantageous to imidize the polyamic acid in a solution state so that the adhesive polyimide can be directly used as a coating liquid for the adhesive polyimide. Furthermore, the adhesive polyimide constituting the adhesive film can also be cross-linked by the above-mentioned method.
在所述方法1、方法2中,作為將成為黏接層30的樹脂組合物的溶液塗布於支撐基材或絕緣樹脂層10上的方法,並無特別限制,例如可利用缺角輪、模、刮刀、模唇等塗布機進行塗布。在黏接層30的形成步驟中,優選為將所形成的黏接層30的表面形成為平坦狀。另外,優選為也均勻地形成黏接層30的厚度。通過將黏接層30的表面形成為平坦狀並使厚度均勻,而提高多層電路基板的製造步驟中的黏接性。 In the above-mentioned method 1 and method 2, there is no particular limitation on the method of applying the solution of the resin composition that becomes the adhesive layer 30 on the supporting substrate or the insulating resin layer 10. For example, the application can be performed using an applicator such as a notched wheel, a die, a scraper, or a die lip. In the step of forming the adhesive layer 30, it is preferred to form the surface of the formed adhesive layer 30 to be flat. In addition, it is preferred to also form the thickness of the adhesive layer 30 uniformly. By forming the surface of the adhesive layer 30 to be flat and making the thickness uniform, the adhesion in the manufacturing step of the multi-layer circuit board is improved.
如以上般獲得的本實施形態的覆金屬積層板100通過對金屬層20進行配線電路加工而可製造單面FPC或兩面FPC,除此以外,進而利用黏接層30的黏接性、或利用任意的黏結片(bonding sheet)等而積層多個單面FPC或兩面FPC,由此,可製造多層電路基板。 The metal-clad laminate 100 of the present embodiment obtained as described above can manufacture a single-sided FPC or a double-sided FPC by performing wiring circuit processing on the metal layer 20. In addition, multiple single-sided FPCs or double-sided FPCs can be laminated using the adhesiveness of the adhesive layer 30 or using any bonding sheet, thereby manufacturing a multi-layer circuit board.
[電路基板] [Circuit board]
圖2是表示本發明的一實施形態的電路基板的結構的剖面圖。所述電路基板101包括:絕緣樹脂層10;導體電路層50,積層於絕緣樹脂層10的其中一面;以及黏接層30,積層於絕緣樹脂層10的其中另一面。即,電路基板101為依次積層有導體電路層50/絕緣樹脂層10/黏接層30的結構。本實施形態的電路基板101是通過對覆金屬積層板100的金屬層20進行配線電路加工而獲得。 FIG2 is a cross-sectional view showing the structure of a circuit substrate of an embodiment of the present invention. The circuit substrate 101 includes: an insulating resin layer 10; a conductive circuit layer 50, which is laminated on one side of the insulating resin layer 10; and an adhesive layer 30, which is laminated on the other side of the insulating resin layer 10. That is, the circuit substrate 101 is a structure in which the conductive circuit layer 50/insulating resin layer 10/adhesive layer 30 are laminated in sequence. The circuit substrate 101 of this embodiment is obtained by performing wiring circuit processing on the metal layer 20 of the metal-clad laminate 100.
(導體電路層) (Conductive circuit layer)
導體電路層50是在絕緣樹脂層10的單面以規定圖案形成導體電路而成的層。例如,在覆金屬積層板100的金屬層20上塗布感光性抗蝕劑,進行曝光、顯影,而形成規定的光罩圖案,介隔光罩圖案進行金屬層20的蝕刻後,去除光罩圖案,由此,可形成規定圖案的導體電路層50。再者,所謂「導體電路層」,是指在絕緣樹脂層10的面方向上形成的面內連接電極(焊盤電極(land electrode)),與層間連接電極(通孔(via)電極)加以區別。 The conductive circuit layer 50 is a layer formed by forming a conductive circuit in a predetermined pattern on one side of the insulating resin layer 10. For example, a photosensitive resist is applied on the metal layer 20 of the metal-clad laminate 100, and exposure and development are performed to form a predetermined mask pattern. After etching the metal layer 20 through the mask pattern, the mask pattern is removed, thereby forming a conductive circuit layer 50 with a predetermined pattern. Furthermore, the so-called "conductive circuit layer" refers to the in-plane connecting electrode (land electrode) formed in the surface direction of the insulating resin layer 10, and is distinguished from the inter-layer connecting electrode (via electrode).
關於導體電路層50,自減低高頻傳輸中的傳輸損耗的觀點而言,與絕緣樹脂層10相接的面的最大高度粗糙度(Rz)優選為1.0μm以下。傳輸損耗包含導體損耗與介電損耗的和,若導體電路層50的Rz大,則導體損耗變大,並且對傳輸損耗造成不良影響,因此,優選為對Rz進行控制。 Regarding the conductive circuit layer 50, from the perspective of reducing transmission loss in high-frequency transmission, the maximum height roughness (Rz) of the surface in contact with the insulating resin layer 10 is preferably 1.0 μm or less. Transmission loss includes the sum of conductor loss and dielectric loss. If the Rz of the conductive circuit layer 50 is large, the conductor loss increases and has an adverse effect on the transmission loss. Therefore, it is preferred to control Rz.
本實施形態的電路基板101中的絕緣樹脂層10及黏接層30的構成如在覆金屬積層板100中所說明般。 The structures of the insulating resin layer 10 and the adhesive layer 30 in the circuit substrate 101 of this embodiment are as described in the metal-clad laminate 100.
[多層電路基板] [Multi-layer circuit board]
其次,一邊參照圖3~圖6,一邊對本發明的實施形態的多層電路基板進行說明。通常,多層電路基板具有包含多個絕緣樹脂層的積層體、以及埋入至所述積層體的內部的兩層以上的導體電路層,且優選為具有至少兩層以上的絕緣樹脂層及至少兩層以上的導體電路層。此處,關於多層電路基板,列舉兩個優選的實施形態進行說明。本實施形態的多層電路基板200、多層電路基板201包含至少一個以上的所述電路基板101。另外,本實施形態的多層電路基板200、多層電路基板201可包含一個以上的積層於所述電路基板101的、電路基板101以外的任意的電路基板。 Next, a multilayer circuit substrate of an embodiment of the present invention is described with reference to FIGS. 3 to 6. Generally, a multilayer circuit substrate has a laminate including a plurality of insulating resin layers and two or more conductive circuit layers embedded in the laminate, and preferably has at least two or more insulating resin layers and at least two or more conductive circuit layers. Here, two preferred embodiments of the multilayer circuit substrate are listed for description. The multilayer circuit substrate 200 and the multilayer circuit substrate 201 of the present embodiment include at least one of the circuit substrates 101. In addition, the multi-layer circuit substrate 200 and the multi-layer circuit substrate 201 of the present embodiment may include one or more arbitrary circuit substrates other than the circuit substrate 101 that are stacked on the circuit substrate 101.
<第一實施形態> <First implementation form>
圖3是表示本發明的第一實施形態的多層電路基板200的結構的積層方向上的剖面圖。第一實施形態的多層電路基板200是在相同方向上重疊積層有多個電路基板101、以及任意的電路基板110的結構。 FIG3 is a cross-sectional view in the stacking direction showing the structure of the multi-layer circuit substrate 200 of the first embodiment of the present invention. The multi-layer circuit substrate 200 of the first embodiment is a structure in which a plurality of circuit substrates 101 and arbitrary circuit substrates 110 are stacked in the same direction.
即,自圖3中的上方朝向下方,第一個電路基板101的黏接層30以覆蓋第二個電路基板101的導體電路層50的方式相接並積層,進而,第二個電路基板101的黏接層30以覆蓋不具有黏接層30的任意的電路基板110的導體電路層50的方式相接並積層。此處,任意的電路基板110的結構或材質並無限定,例如,可由經圖案化的金屬層20形成導體電路層50,也可具有鑲嵌(damascene)結構的導體電路層50。另外,任意的電路基板110 的導體電路層50可通過噴墨、濺射、鍍覆等而形成於絕緣樹脂層10。進而,任意的電路基板110的導體電路層50或絕緣樹脂層10的厚度、材質、物性等也無特別限定。 That is, from the top to the bottom in FIG. 3 , the adhesive layer 30 of the first circuit substrate 101 is connected and stacked in a manner to cover the conductive circuit layer 50 of the second circuit substrate 101, and further, the adhesive layer 30 of the second circuit substrate 101 is connected and stacked in a manner to cover the conductive circuit layer 50 of any circuit substrate 110 that does not have the adhesive layer 30. Here, the structure or material of the arbitrary circuit substrate 110 is not limited, for example, the conductive circuit layer 50 may be formed by a patterned metal layer 20, or may have a damascene structure. In addition, the conductive circuit layer 50 of any circuit substrate 110 can be formed on the insulating resin layer 10 by inkjet, sputtering, plating, etc. Furthermore, the thickness, material, physical properties, etc. of the conductive circuit layer 50 or the insulating resin layer 10 of any circuit substrate 110 are not particularly limited.
圖3中,圖示有兩個電路基板101與一個任意的電路基板110的積層結構,也可積層三個以上的電路基板101。另外,黏接層30可被覆鄰接的電路基板101或任意的電路基板110的導體電路層50的全部,也可被覆一部分。進而,多層電路基板200中,在最上部的電路基板101的表面露出導體電路層50,也可設置覆蓋最上部的導體電路層50的任意的保護膜。另外,圖3中,作為任意的電路基板110,例示有在絕緣樹脂層10的單面形成有導體電路層50的情況,也可在絕緣樹脂層10的兩面分別形成導體電路層50。 FIG3 shows a stacked structure of two circuit substrates 101 and one arbitrary circuit substrate 110, but three or more circuit substrates 101 may be stacked. In addition, the adhesive layer 30 may cover the entire conductive circuit layer 50 of the adjacent circuit substrate 101 or the arbitrary circuit substrate 110, or may cover a part of the conductive circuit layer 50. Furthermore, in the multi-layer circuit substrate 200, the conductive circuit layer 50 is exposed on the surface of the uppermost circuit substrate 101, and an arbitrary protective film covering the uppermost conductive circuit layer 50 may be provided. In addition, FIG. 3 shows an example of a case where a conductive circuit layer 50 is formed on one side of an insulating resin layer 10 as an arbitrary circuit substrate 110, but a conductive circuit layer 50 may be formed on both sides of the insulating resin layer 10.
圖4為第一實施形態的多層電路基板200的製造步驟圖。首先,準備多個電路基板101、與任意的電路基板110。而且,將第一個電路基板101的黏接層30以與第二個電路基板101的導體電路層50相向的方式重疊配置,且將第二個電路基板101的黏接層30以與不具有黏接層30的任意的電路基板110的導體電路層50相向的方式重疊配置,並且將這些一併壓接,由此可進行製造(壓接步驟)。再者,圖4中,示出有積層兩個電路基板101的例子,也可一次積層三個以上的電路基板101。另外,任意的電路基板110也不限於一個,可積層多個。 FIG4 is a diagram showing the manufacturing steps of the multi-layer circuit substrate 200 according to the first embodiment. First, a plurality of circuit substrates 101 and arbitrary circuit substrates 110 are prepared. Then, the adhesive layer 30 of the first circuit substrate 101 is arranged to overlap with the conductive circuit layer 50 of the second circuit substrate 101, and the adhesive layer 30 of the second circuit substrate 101 is arranged to overlap with the conductive circuit layer 50 of an arbitrary circuit substrate 110 that does not have the adhesive layer 30, and these are pressed together to manufacture (pressing step). In addition, FIG4 shows an example of laminating two circuit substrates 101, but three or more circuit substrates 101 may be laminated at one time. In addition, any circuit substrate 110 is not limited to one, and multiple circuit substrates can be stacked.
電路基板101的黏接層30因其表面經平坦化,而在壓 接步驟中不會在黏接層30中產生空隙等,可在將黏接性樹脂填充至導體電路層50的導體電路間的狀態下進行積層。另外,視需要,利用加壓輥或壓制裝置等自兩側對積層而獲得的多層電路基板200進行加壓,由此也可進行調整所述黏接層30的厚度的厚度調整步驟。通過厚度調整步驟,可提高黏接層30及多層電路基板200整體的厚度精度。進而,在壓接時,例如也可進行在60℃~220℃的溫度下進行加熱的加熱處理。由此,可製造一體地積層有多個電路基板的多層電路基板200。所述加熱處理時,在黏接層30中,例如也可通過黏接性聚醯亞胺的加熱縮合而形成亞胺鍵的交聯結構。 Since the adhesive layer 30 of the circuit substrate 101 is flattened on its surface, voids will not be generated in the adhesive layer 30 during the press-bonding step, and the adhesive resin can be filled between the conductive circuits of the conductive circuit layer 50 for lamination. In addition, if necessary, the multi-layer circuit substrate 200 obtained by lamination can be pressed from both sides using a press roller or a press device, thereby adjusting the thickness of the adhesive layer 30. Through the thickness adjustment step, the thickness accuracy of the adhesive layer 30 and the multi-layer circuit substrate 200 as a whole can be improved. Furthermore, during the press-bonding, a heat treatment can be performed at a temperature of 60°C to 220°C, for example. Thus, a multi-layer circuit substrate 200 in which multiple circuit substrates are integrally stacked can be manufactured. During the heat treatment, a cross-linked structure of imide bonds can be formed in the adhesive layer 30, for example, by heat condensation of the adhesive polyimide.
在本實施形態中,各電路基板101的黏接層30具有使電路基板彼此黏接的作為黏結片的功能、以及保護導體電路的作為保護膜的功能。因此,無需另行準備黏結片或導體電路用保護層並使其介隔存在於電路基板間,可實現用以形成多層電路的製程及設備的簡略化、與材料的簡單化及成本削減。 In this embodiment, the adhesive layer 30 of each circuit substrate 101 has the function of a bonding sheet for bonding the circuit substrates to each other, and the function of a protective film for protecting the conductive circuit. Therefore, there is no need to prepare an adhesive sheet or a protective layer for the conductive circuit and have it exist between the circuit substrates, which can simplify the process and equipment for forming a multi-layer circuit, simplify materials, and reduce costs.
如以上般獲得的多層電路基板200包括如下構成:在導體電路層50及絕緣樹脂層10之間設置有具有充分的厚度的黏接層30,以確保絕緣性、柔軟性及低介電特性。再者,在本實施形態的多層電路基板200中,視需要也可設置覆蓋膜或阻焊劑等的層作為保護層。另外,雖省略圖示,但在本實施形態的多層電路基板200的內部也可內置例如℃晶片或晶片電容器、晶片線圈、晶片電阻等晶片型電子零件。另外,在本實施形態的多層電路基 板200中,也可形成並未圖示的層間連接電極(通孔電極)。層間連接電極可通過如下方式形成:利用雷射加工或鑽孔加工而在絕緣樹脂層10形成導通孔後,利用印刷等填充導電性糊。導電性糊例如可使用在以錫為主成分的導電性粉末中混合有機溶劑或環氧樹脂等而成的導電性糊。另外,層間連接電極可在形成導通孔後,在導通孔的內表面及導體電路層50的表面的一部分形成鍍覆部。 The multi-layer circuit board 200 obtained as described above includes the following structure: an adhesive layer 30 having a sufficient thickness is provided between the conductive circuit layer 50 and the insulating resin layer 10 to ensure insulation, flexibility and low dielectric properties. Furthermore, in the multi-layer circuit board 200 of the present embodiment, a layer such as a cover film or a solder resist may be provided as a protective layer as needed. In addition, although it is omitted in the figure, chip-type electronic parts such as a chip or a chip capacitor, a chip coil, a chip resistor, etc. may also be built into the multi-layer circuit board 200 of the present embodiment. In addition, in the multi-layer circuit board 200 of the present embodiment, inter-layer connection electrodes (through-hole electrodes) not shown in the figure may also be formed. The interlayer connection electrode can be formed by forming a via hole in the insulating resin layer 10 by laser processing or drilling, and then filling the via hole with a conductive paste by printing or the like. The conductive paste can be, for example, a conductive paste obtained by mixing an organic solvent or an epoxy resin with a conductive powder having tin as the main component. In addition, the interlayer connection electrode can be formed by forming a coating portion on the inner surface of the via hole and a portion of the surface of the conductive circuit layer 50 after the via hole is formed.
<第二實施形態> <Second implementation form>
圖5是表示本發明的第二實施形態的多層電路基板201的結構的積層方向上的剖面圖。第二實施形態的多層電路基板201中,將使一對電路基板101以這些的黏接層30彼此相向的方式貼合而成的結構設為一個電路基板單元102,且包含至少一個以上的所述電路基板單元102。 FIG5 is a cross-sectional view in the stacking direction showing the structure of the multi-layer circuit substrate 201 of the second embodiment of the present invention. In the multi-layer circuit substrate 201 of the second embodiment, a structure in which a pair of circuit substrates 101 are bonded together with their adhesive layers 30 facing each other is set as a circuit substrate unit 102, and includes at least one or more of the circuit substrate units 102.
即,自圖5中的上方朝向下方,依次配置有第一個覆金屬積層板100、電路基板單元102、第二個覆金屬積層板100(其中,與第一個覆金屬積層板100為相反方向),且以在兩個覆金屬積層板100的黏接層30之間夾入所述電路基板單元102的形式進行積層。第一個覆金屬積層板100的黏接層30以與電路基板單元102的單面側(圖中為上側)的導體電路層50相接的方式積層,進而,在電路基板單元102的另一單面側(圖中為下側)的導體電路層50,第二個覆金屬積層板100的黏接層30以與導體電路層50相接的方式積層。再者,圖5中,圖示有僅包含一個電路基板單元102的積層結構,也可通過進而介隔存在黏結片或電路基板101 或者任意的電路基板110而製成包含多個電路基板單元102的積層結構。另外,作為上下兩個覆金屬積層板100的一者或兩者,也可使用所述電路基板101。 That is, from the top to the bottom in FIG. 5 , the first metal clad laminate 100, the circuit substrate unit 102, and the second metal clad laminate 100 are sequentially arranged (in the opposite direction to the first metal clad laminate 100), and the circuit substrate unit 102 is sandwiched between the adhesive layers 30 of the two metal clad laminates 100 for lamination. The adhesive layer 30 of the first metal-clad laminate 100 is laminated in contact with the conductive circuit layer 50 on one side (the upper side in the figure) of the circuit substrate unit 102, and further, the adhesive layer 30 of the second metal-clad laminate 100 is laminated in contact with the conductive circuit layer 50 on the other side (the lower side in the figure) of the circuit substrate unit 102. In addition, FIG. 5 shows a laminate structure including only one circuit substrate unit 102, but a laminate structure including a plurality of circuit substrate units 102 may be produced by further interposing an adhesive sheet or a circuit substrate 101 or an arbitrary circuit substrate 110. In addition, the circuit substrate 101 may also be used as one or both of the upper and lower metal-clad laminates 100.
圖6為第二實施形態的多層電路基板201的製造步驟圖。首先,準備一個電路基板單元102、與兩個覆金屬積層板100。此處,電路基板單元102可通過如下方式製作:準備一對電路基板101,且將其中一個電路基板101的黏接層30、與其中另一個電路基板101的黏接層30貼合。而且,多層電路基板201可通過如下方式製造:第一個覆金屬積層板100的黏接層30以與電路基板單元102的上表面側的導體電路層50相向的方式配置,進而,在電路基板單元102的下表面側的導體電路層50,第二個覆金屬積層板100的黏接層30以與導體電路層50相向的方式配置,並且將這些一併壓接(壓接步驟)。 FIG6 is a manufacturing step diagram of the multi-layer circuit substrate 201 of the second embodiment. First, a circuit substrate unit 102 and two metal-clad laminates 100 are prepared. Here, the circuit substrate unit 102 can be manufactured in the following manner: a pair of circuit substrates 101 are prepared, and the adhesive layer 30 of one circuit substrate 101 is bonded to the adhesive layer 30 of the other circuit substrate 101. Furthermore, the multilayer circuit board 201 can be manufactured as follows: the adhesive layer 30 of the first metal clad laminate 100 is arranged to face the conductive circuit layer 50 on the upper surface side of the circuit board unit 102, and then, the adhesive layer 30 of the second metal clad laminate 100 is arranged to face the conductive circuit layer 50 on the lower surface side of the circuit board unit 102, and these are pressed together (pressing step).
再者,也可不製作電路基板單元102,而是第一個覆金屬積層板100的黏接層30以與上側的電路基板101的導體電路層50相向的方式配置,上側的電路基板101的黏接層30與下側的電路基板101的黏接層30以相向的方式配置,進而,在下側的電路基板101的導體電路層50,第二個覆金屬積層板100的黏接層30以與導體電路層50相向的方式配置,並且將這些一併壓接。 Furthermore, instead of manufacturing the circuit substrate unit 102, the adhesive layer 30 of the first metal clad laminate 100 is arranged to face the conductive circuit layer 50 of the upper circuit substrate 101, the adhesive layer 30 of the upper circuit substrate 101 is arranged to face the adhesive layer 30 of the lower circuit substrate 101, and further, the adhesive layer 30 of the second metal clad laminate 100 is arranged to face the conductive circuit layer 50 of the lower circuit substrate 101, and these are pressed together.
視需要,利用加壓輥或壓制裝置等自兩側對積層而獲得的多層電路基板201進行加壓,由此也可進行調整黏接層30的厚度的厚度調整步驟。通過厚度調整步驟,可提高黏接層30及多層 電路基板201整體的厚度精度。進而,在壓接時,例如也可進行在60℃~220℃的溫度下進行加熱的加熱處理。由此,可製造一體地積層有多個電路基板的多層電路基板201。所述加熱處理時,在黏接層30中,例如也可通過黏接性聚醯亞胺的加熱縮合而形成亞胺鍵的交聯結構。 If necessary, the multilayer circuit substrate 201 obtained by lamination can be pressurized from both sides using a press roller or a pressing device, thereby adjusting the thickness of the adhesive layer 30. Through the thickness adjustment step, the thickness accuracy of the adhesive layer 30 and the multilayer circuit substrate 201 as a whole can be improved. Furthermore, during the pressing, a heat treatment can be performed at a temperature of 60°C to 220°C. In this way, a multilayer circuit substrate 201 in which multiple circuit substrates are laminated integrally can be manufactured. During the heat treatment, in the adhesive layer 30, for example, a cross-linked structure of imide bonds can be formed by heating and condensing the adhesive polyimide.
在本實施形態中,各電路基板101的黏接層30也具有使電路基板彼此黏接的作為黏結片的功能。因此,無需另行準備黏結片並使其介隔存在於電路基板間,可實現用以形成多層電路的製程及設備的簡略化、與材料的簡單化及成本削減。 In this embodiment, the adhesive layer 30 of each circuit substrate 101 also has the function of serving as an adhesive sheet for bonding the circuit substrates to each other. Therefore, there is no need to prepare an adhesive sheet separately and place it between the circuit substrates, which can simplify the process and equipment for forming a multi-layer circuit, simplify materials, and reduce costs.
本實施形態的多層電路基板201的其他構成及效果與第一實施形態的多層電路基板200相同。 The other structures and effects of the multi-layer circuit substrate 201 of this embodiment are the same as those of the multi-layer circuit substrate 200 of the first embodiment.
[實施例] [Implementation example]
以下示出實施例,並對本發明的特徵進行更具體的說明。其中,本發明的範圍並不限定於實施例。再者,以下的實施例中,只要無特別說明,則各種測定、評價是基於下述內容。 The following examples are shown to explain the features of the present invention in more detail. However, the scope of the present invention is not limited to the examples. Furthermore, in the following examples, unless otherwise specified, various measurements and evaluations are based on the following contents.
[尺寸變化率的測定] [Measurement of dimensional change rate]
尺寸變化率的測定是按照以下順序進行。首先,使用150mm見方的試驗片,以100mm的間隔對乾膜抗蝕劑進行曝光、顯影,由此,形成位置測定用目標。在溫度23±2℃、相對濕度50±5%的環境中,測定蝕刻前(常態)的尺寸,之後,通過蝕刻(液溫40℃以下,時間10分鐘以內)去除試驗片的目標以外的銅。在溫度23±2℃、相對濕度50±5%的環境中靜置24±4小時後,測定蝕刻後 的尺寸。算出MD方向(長邊方向)及TD方向(寬度方向)上的各3個部位的相對於常態的尺寸變化率,並將各自的平均值作為蝕刻後的尺寸變化率。蝕刻後尺寸變化率是利用下述數式而算出。 The dimensional change rate is measured in the following order. First, a 150 mm square test piece is exposed and developed with a dry film resist at intervals of 100 mm to form a target for position measurement. The size before etching (normal state) is measured in an environment of temperature 23±2°C and relative humidity 50±5%, and then the copper other than the target of the test piece is removed by etching (liquid temperature below 40°C and time within 10 minutes). After standing for 24±4 hours in an environment of temperature 23±2°C and relative humidity 50±5%, the size after etching is measured. The dimensional change rate relative to normal state is calculated for each of three locations in the MD direction (long side direction) and the TD direction (width direction), and the average value of each is taken as the dimensional change rate after etching. The dimensional change rate after etching is calculated using the following formula.
蝕刻後尺寸變化率(%)=(B-A)/A×100 Dimension change rate after etching (%) = (B-A)/A×100
A:蝕刻前的目標間距離 A: Target distance before etching
B:蝕刻後的目標間距離 B: Target distance after etching
其次,利用250℃的烘箱對本試驗片進行1小時加熱處理,測定其後的位置目標間的距離。算出MD方向(長邊方向)及TD方向(寬度方向)上的各3個部位的相對於蝕刻後的尺寸變化率,並以各自的平均值作為加熱處理後的尺寸變化率。加熱尺寸變化率是利用下述數式而算出。 Next, the test piece was heated in an oven at 250°C for 1 hour, and the distance between the position targets was measured. The dimensional change rate after etching was calculated for each of the three locations in the MD direction (longitudinal direction) and the TD direction (width direction), and the average value of each was taken as the dimensional change rate after heating. The heating dimensional change rate was calculated using the following formula.
加熱後尺寸變化率(%)=(C-B)/B×100 Dimensional change rate after heating (%) = (C-B)/B×100
B:蝕刻後的目標間距離 B: Target distance after etching
C:加熱後的目標間距離 C: Target distance after heating
[黏度的測定] [Viscosity measurement]
使用E型黏度計(博勒飛(Brookfield)公司製造,商品名:DV-II+Pro)測定25℃下的黏度。以扭矩為10%~90%的方式設定 轉數,在開始測定後經過2分鐘後,讀取黏度穩定時的值。 Use an E-type viscometer (Brookfield, trade name: DV-II+Pro) to measure the viscosity at 25°C. Set the speed so that the torque is 10% to 90%, and read the value when the viscosity stabilizes 2 minutes after the start of the measurement.
[熱膨脹係數(CTE)的測定] [Determination of coefficient of thermal expansion (CTE)]
對3mm×20mm大小(size)的聚醯亞胺膜使用熱機械分析儀(布魯克(Bruker)公司製造,商品名:4000SA),一邊施加5.0g的負荷一邊以一定的升溫速度自30℃升溫至300℃,進而在所述溫度下保持10分鐘後,以5℃/分鐘的速度進行冷卻,求出自250℃至100℃的平均熱膨脹係數(熱膨脹係數)。 A thermomechanical analyzer (Bruker, trade name: 4000SA) was used to analyze a 3mm×20mm polyimide membrane. A load of 5.0g was applied while the temperature was raised from 30°C to 300°C at a certain rate. The membrane was then kept at the temperature for 10 minutes and then cooled at a rate of 5°C/min. The average thermal expansion coefficient (thermal expansion coefficient) from 250°C to 100°C was obtained.
[儲存彈性模數及玻璃化轉變溫度(Tg)的測定] [Determination of storage elastic modulus and glass transition temperature (Tg)]
對5mm×20mm大小的樹脂片使用動態黏彈性測定裝置(DMA:UBM公司製造,商品名:E4000F)且在自30℃至400℃為止的升溫速度為4℃/分鐘、頻率11Hz的條件下進行測定。另外,將彈性模數變化(tanδ)最大的溫度設為玻璃化轉變溫度。 A dynamic viscoelasticity measuring device (DMA: manufactured by UBM, trade name: E4000F) was used to measure the resin sheet of 5mm×20mm size at a heating rate of 4℃/min and a frequency of 11Hz from 30℃ to 400℃. In addition, the temperature at which the elastic modulus change (tanδ) is the largest is set as the glass transition temperature.
[介電常數及介電損耗正切的測定] [Determination of dielectric constant and dielectric loss tangent]
使用矢量網路分析儀(Vector Network Analyzer)(安捷倫(Agilent)公司製造,商品名E8363C)及分離介電諧振器(Split Post Dielectric Resonator,SPDR),測定10GHz下的樹脂片的介電常數及介電損耗正切。再者,測定中所使用的材料是在溫度:24℃~26℃、濕度45%~55%RH的條件下放置24小時。 The dielectric constant and dielectric loss tangent of the resin sheet at 10 GHz were measured using a Vector Network Analyzer (manufactured by Agilent, trade name E8363C) and a Split Post Dielectric Resonator (SPDR). The material used in the measurement was placed at a temperature of 24°C to 26°C and a humidity of 45% to 55%RH for 24 hours.
[銅箔的表面粗糙度的測定] [Measurement of surface roughness of copper foil]
使用原子力顯微鏡(Atomic Force Microscope,AFM)(布魯克AXS(Bruker AXS)公司製造,商品名:維度圖標(Dimension Icon)型掃描探針顯微鏡(Scanning Probe Microscope,SPM))、 探針(布魯克AXS(Bruker AXS)公司製造,商品名:TESPA(NCHV),頂端曲率半徑10nm,彈簧常數42N/m),以輕敲模式(tapping mode)對銅箔表面的80μm×80μm的範圍進行測定,並求出十點平均粗糙度(Rzjis)。 Using an atomic force microscope (AFM) (manufactured by Bruker AXS, trade name: Dimension Icon Scanning Probe Microscope (SPM)) and a probe (manufactured by Bruker AXS, trade name: TESPA (NCHV), top curvature radius 10nm, spring constant 42N/m), the copper foil surface was measured in a range of 80μm×80μm in tapping mode, and the ten-point average roughness (Rzjis) was calculated.
合成例中使用的簡稱表示以下的化合物。 The abbreviations used in the synthesis examples represent the following compounds.
○BPDA:3,3',4,4'-聯苯基四羧酸二酐 ○BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride
○BPADA:2,2-雙[4-(3,4-二羧基苯氧基)苯基]丙烷二酐 ○BPADA: 2,2-bis[4-(3,4-dicarboxyphenoxy)phenyl]propane dianhydride
○PMDA:均苯四甲酸二酐 ○PMDA: Pyromellitic dianhydride
○BTDA:3,3',4,4'-二苯甲酮四羧酸二酐 ○BTDA: 3,3',4,4'-benzophenone tetracarboxylic dianhydride
○m-TB:2,2'-二甲基-4,4'-二氨基聯苯 ○m-TB: 2,2'-dimethyl-4,4'-diaminobiphenyl
○TPE-R:1,3-雙(4-氨基苯氧基)苯 ○TPE-R: 1,3-bis(4-aminophenoxy)benzene
○雙苯胺-M:1,3-雙[2-(4-氨基苯基)-2-丙基]苯 ○Bisaniline-M: 1,3-bis[2-(4-aminophenyl)-2-propyl]benzene
○BAPP:2,2-雙[4-(4-氨基苯氧基)苯基]丙烷 ○BAPP: 2,2-bis[4-(4-aminophenoxy)phenyl]propane
○DDA:碳數36的脂肪族二胺(日本禾達(CRODA Japan)股份有限公司製造,商品名:普利阿敏(PRIAMINE)1074,胺值:205mgKOH/g,環狀結構及鏈狀結構的二聚物二胺的混合物,二聚物成分的含量:95重量%以上) ○DDA: Aliphatic diamine with 36 carbon atoms (manufactured by CRODA Japan Co., Ltd., trade name: PRIAMINE 1074, amine value: 205 mgKOH/g, mixture of dimer diamines with ring structure and chain structure, content of dimer component: 95% by weight or more)
○DMAc:N,N-二甲基乙醯胺 ○DMAc: N,N-dimethylacetamide
○NMP:N-甲基-2-吡咯烷酮 ○NMP: N-methyl-2-pyrrolidone
○N-12:十二烷二酸二醯肼 ○N-12: Dodecanedioic acid dihydrazine
○OP935:有機次膦酸鋁鹽(日本科萊恩(Clariant Japan)公司製造,商品名:艾庫斯利特(Exolit)OP935) ○OP935: Aluminum organic phosphinate (manufactured by Clariant Japan, trade name: Exolit OP935)
○R710:(商品名,普林泰科(Printec)(股)製造,雙酚型環氧樹脂,環氧當量170,常溫下為液狀,重量平均分子量:約340) ○R710: (trade name, manufactured by Printec Co., Ltd., bisphenol-type epoxy resin, epoxy equivalent 170, liquid at room temperature, weight average molecular weight: about 340)
○VG3101L:(商品名,普林泰科(Printec)(股)製造,多官能環氧樹脂,環氧當量:210,軟化點39℃~46℃) ○VG3101L: (trade name, manufactured by Printec Co., Ltd., multifunctional epoxy resin, epoxy equivalent: 210, softening point 39℃~46℃)
○SR35K:(商品名,普林泰科(Printec)股份有限公司製造,環氧樹脂,環氧當量:930~940,軟化點:86℃~98℃) ○SR35K: (trade name, manufactured by Printec Co., Ltd., epoxy resin, epoxy equivalent: 930~940, softening point: 86℃~98℃)
○YDCN-700-10:(商品名,日鐵化學&材料股份有限公司製造,甲酚酚醛清漆型環氧樹脂,環氧當量210,軟化點75℃~85℃) ○YDCN-700-10: (trade name, manufactured by Nippon Steel Chemicals & Materials Co., Ltd., cresol novolac type epoxy resin, epoxy equivalent 210, softening point 75℃~85℃)
○米萊庫斯(milex)XLC-LL:(商品名,三井化學(股)製造,酚樹脂,羥基當量:175,軟化點:77℃,吸水率:1質量%,加熱質量減少率:4質量%) ○ Milex XLC-LL: (trade name, manufactured by Mitsui Chemicals Co., Ltd., phenolic resin, hydroxyl equivalent: 175, softening point: 77°C, water absorption: 1% by mass, heating mass loss rate: 4% by mass)
○HE200C-10:(商品名,空氣水(AIR WATER)(股)製造,酚樹脂,羥基當量:200,軟化點:65℃~76℃,吸水率:1質量%,加熱質量減少率:4質量%) ○HE200C-10: (Trade name, manufactured by AIR WATER (co., Ltd.), phenolic resin, hydroxyl equivalent: 200, softening point: 65℃~76℃, water absorption: 1% by mass, heating mass reduction rate: 4% by mass)
○HE910-10:(商品名,空氣水(AIR WATER)(股)製造,酚樹脂,羥基當量:101,軟化點:83℃,吸水率:1質量%,加熱質量減少率:3質量%) ○HE910-10: (Trade name, manufactured by AIR WATER (co., Ltd.), phenolic resin, hydroxyl equivalent: 101, softening point: 83°C, water absorption: 1% by mass, heating mass reduction rate: 3% by mass%)
○SC1030-HJA:(商品名,阿德瑪科技(Admatechs)(股)製造,二氧化矽填料分散液,平均粒徑:0.25μm) ○SC1030-HJA: (trade name, manufactured by Admatechs, silica filler dispersion, average particle size: 0.25μm)
○艾羅西爾(Aerosil)R972:(商品名,日本艾羅西爾(Aerosil Japan)(股)製造,二氧化矽,平均粒徑:0.016μm) ○Aerosil R972: (trade name, manufactured by Aerosil Japan Co., Ltd., silicon dioxide, average particle size: 0.016μm)
○丙烯酸橡膠(acryl gum)HTR-860P-30B-CHN:(樣品名,帝國化學產業(股)製造,重量平均分子量:23萬,縮水甘油基官能基單體比率:8%,Tg:-7℃) ○Acrylic rubber (acryl gum) HTR-860P-30B-CHN: (sample name, manufactured by Teikoku Chemical Industry Co., Ltd., weight average molecular weight: 230,000, glycidyl functional monomer ratio: 8%, Tg: -7℃)
○丙烯酸橡膠(acryl gum)HTR-860P-3CSP:(樣品名,帝國化學產業(股)製造,重量平均分子量:80萬,縮水甘油基官能基單體比率:3%,Tg:-7℃) ○Acrylic rubber (acryl gum) HTR-860P-3CSP: (sample name, manufactured by Teikoku Chemical Industry Co., Ltd., weight average molecular weight: 800,000, glycidyl functional monomer ratio: 3%, Tg: -7℃)
○A-1160:(商品名,GE東芝(股)製造,γ-脲基丙基三乙氧基矽烷) ○A-1160: (trade name, manufactured by GE Toshiba, γ-ureidopropyltriethoxysilane)
○A-189:(商品名,GE東芝(股)製造,γ-巰基丙基三甲氧基矽烷) ○A-189: (trade name, manufactured by GE Toshiba Corporation, γ-butylpropyltrimethoxysilane)
○固左魯(Curezol)2PZ-CN:(商品名,四國化成工業(股)製造,1-氰基乙基-2-苯基咪唑) ○Curezol 2PZ-CN: (trade name, manufactured by Shikoku Chemical Industries, Ltd., 1-cyanoethyl-2-phenylimidazole)
○RE-810NM:(商品名,日本化藥股份有限公司製造,二烯丙基雙酚A二縮水甘油基醚(性狀:液狀)) ○RE-810NM: (trade name, manufactured by Nippon Kayaku Co., Ltd., diallyl bisphenol A diglycidyl ether (properties: liquid))
○佛來特(phoret)SCS:(商品名:綜研化學股份有限公司製造,含有苯乙烯基的丙烯酸聚合物(Tg:70℃,重量平均分子量:15000)) ○ Phoret SCS: (Trade name: manufactured by Soken Chemical Co., Ltd., styrene-containing acrylic polymer (Tg: 70°C, weight average molecular weight: 15,000))
○BMI-1:(商品名,東京化成股份有限公司製造,4,4'-雙馬來醯亞胺二苯基甲烷) ○BMI-1: (trade name, manufactured by Tokyo Chemical Industry Co., Ltd., 4,4'-bismaleimide diphenylmethane)
○TPPK:(商品名:東京化成股份有限公司製造,四苯基鏻四苯基硼酸鹽) ○TPPK: (Trade name: manufactured by Tokyo Chemical Industry Co., Ltd., tetraphenylphosphonium tetraphenylborate)
○HP-P1:(商品名,水島合金鐵股份有限公司製造,氮化硼填料) ○HP-P1: (trade name, manufactured by Mizushima Alloy Steel Co., Ltd., boron nitride filler)
(合成例1) (Synthesis Example 1)
<黏接層用的樹脂溶液A的製備> <Preparation of resin solution A for adhesive layer>
對包含為表1中的品名及組成比(單位:質量份)的作為(a)熱硬化性樹脂的環氧樹脂及酚樹脂、(c)無機填料的組合物添加環己酮,進行攪拌混合。向其中添加表1中所示的作為(b)高分子量成分的丙烯酸橡膠並攪拌,進而,添加表1中所示的(e)偶合劑及(d)硬化促進劑,進行攪拌直至各成分變均勻為止,獲得黏接層用的樹脂溶液A。 Cyclohexanone is added to a composition containing (a) an epoxy resin and a phenol resin as a thermosetting resin and (c) an inorganic filler having the product name and composition ratio (unit: mass parts) shown in Table 1, and the mixture is stirred and mixed. Acrylic rubber as a high molecular weight component (b) shown in Table 1 is added thereto and stirred, and further, (e) a coupling agent and (d) a hardening accelerator shown in Table 1 are added and stirred until the components become uniform, thereby obtaining a resin solution A for an adhesive layer.
(合成例2) (Synthesis Example 2)
<聚醯亞胺樹脂(PI-1)的合成及黏接層用的樹脂溶液B的 製備> <Synthesis of polyimide resin (PI-1) and preparation of resin solution B for adhesive layer>
在裝設有溫度計、攪拌機、冷卻管、及氮氣流入管的300mL燒瓶中投入1,3-雙(3-氨基丙基)四甲基二矽氧烷(信越化學工業股份有限公司製造,商品名:LP-7100)15.53g、聚氧丙烯二胺(巴斯夫(BASF)股份有限公司製造,商品名:D400,分子量:450)28.13g、及NMP 100.0g並進行攪拌,製備反應液。在二胺溶解後,一邊在冰浴中使燒瓶冷卻,一邊向反應液中每次少量地添加預先通過自無水乙酸的再結晶而精製的4,4'-氧基二鄰苯二甲酸二酐32.30g。在常溫(25℃)下反應8小時後,添加二甲苯67.0g,並且一邊吹入氮氣一邊在180℃下進行加熱,由此將二甲苯與水一起共沸去除。將所述反應液注入至大量的水中,通過過濾採取沉澱的樹脂,進行乾燥而獲得聚醯亞胺樹脂(PI-1)。利用凝膠滲透色譜法(gel permeation chromatography,GPC)測定所獲得的聚醯亞胺樹脂(PI-1)的分子量,結果,以聚苯乙烯換算計,數量平均分子量Mn=22400,重量平均分子量Mw=70200。 In a 300 mL flask equipped with a thermometer, a stirrer, a cooling tube, and a nitrogen inlet tube, 15.53 g of 1,3-bis(3-aminopropyl)tetramethyldisiloxane (manufactured by Shin-Etsu Chemical Co., Ltd., trade name: LP-7100), 28.13 g of polyoxypropylenediamine (manufactured by BASF, trade name: D400, molecular weight: 450), and 100.0 g of NMP were added and stirred to prepare a reaction solution. After the diamine was dissolved, 32.30 g of 4,4'-oxydiphthalic dianhydride, which had been purified by recrystallization from anhydrous acetic acid in advance, was added to the reaction solution in small portions while cooling the flask in an ice bath. After reacting at room temperature (25°C) for 8 hours, 67.0 g of xylene was added, and the mixture was heated at 180°C while blowing nitrogen, thereby removing xylene and water together by azeotropy. The reaction solution was injected into a large amount of water, and the precipitated resin was collected by filtration and dried to obtain a polyimide resin (PI-1). The molecular weight of the obtained polyimide resin (PI-1) was measured by gel permeation chromatography (GPC). As a result, the number average molecular weight Mn = 22400 and the weight average molecular weight Mw = 70200 in terms of polystyrene conversion.
使用所述獲得的聚醯亞胺樹脂(PI-1)並以表2中所示的組成比(單位:質量份)調配各成分,獲得黏接層用的樹脂溶液B。 The obtained polyimide resin (PI-1) was used to prepare the components in the composition ratio (unit: mass parts) shown in Table 2 to obtain a resin solution B for the adhesive layer.
(合成例3) (Synthesis Example 3)
<黏接層用的樹脂溶液C的製備> <Preparation of resin solution C for adhesive layer>
在帶有氮氣導入管、攪拌機、熱電偶、迪恩-斯塔克分水器(Dean-Stark trap)、冷卻管的500mL的四口燒瓶中裝入44.92g的BTDA(0.139莫耳)、75.08g的DDA(0.141莫耳)、168g的NMP及112g的二甲苯,在40℃下混合30分鐘,製備聚醯胺酸溶液。將所述聚醯胺酸溶液升溫至190℃,以4小時進行加熱並進行攪拌,將餾出的水及二甲苯去除至系統外。其後,冷卻至100℃,添加112g的二甲苯并進行攪拌,進而冷卻至30℃,結束醯亞胺化,獲得黏接層用的樹脂溶液C(固體成分:29.5重量%,重量平均分子量:75,700)。 In a 500 mL four-necked flask equipped with a nitrogen inlet tube, a stirrer, a thermocouple, a Dean-Stark trap, and a cooling tube, 44.92 g of BTDA (0.139 mol), 75.08 g of DDA (0.141 mol), 168 g of NMP, and 112 g of xylene were placed and mixed at 40° C. for 30 minutes to prepare a polyamine solution. The polyamine solution was heated to 190° C., heated and stirred for 4 hours, and the distilled water and xylene were removed from the system. Afterwards, the mixture was cooled to 100°C, 112 g of xylene was added and stirred, and then cooled to 30°C to complete the imidization, thereby obtaining a resin solution C for the adhesive layer (solid content: 29.5% by weight, weight average molecular weight: 75,700).
(合成例4) (Synthesis Example 4)
<黏接層用的樹脂溶液D的製備> <Preparation of resin solution D for adhesive layer>
將42.51g的BPADA(0.082莫耳)、34.30g的DDA(0.066莫耳)、6.56g的BAPP(0.016莫耳)、208g的NMP及112g的二甲苯設為原料組成,除此以外,與合成例3同樣地進行而製備聚醯胺酸溶液。與合成例3同樣地對所述聚醯胺酸溶液進行處理,獲得黏接層用的樹脂溶液D(固體成分:30.0重量%,重量平均分子量:65,000)。 A polyamide solution was prepared in the same manner as in Synthesis Example 3 except that 42.51 g of BPADA (0.082 mol), 34.30 g of DDA (0.066 mol), 6.56 g of BAPP (0.016 mol), 208 g of NMP and 112 g of xylene were used as the raw material composition. The polyamide solution was treated in the same manner as in Synthesis Example 3 to obtain a resin solution D for the adhesive layer (solid content: 30.0% by weight, weight average molecular weight: 65,000).
(合成例5) (Synthesis Example 5)
<絕緣樹脂層用的聚醯胺酸溶液1的製備> <Preparation of polyamide solution 1 for insulating resin layer>
在氮氣流下,向反應槽中投入64.20g的m-TB(0.302莫耳)及5.48g的雙苯胺-M(0.016莫耳)以及聚合後的固體成分濃度為15重量%的量的DMAc,在室溫下進行攪拌並使其溶解。其次,添加34.20g的PMDA(0.157莫耳)及46.13g的BPDA(0.157莫耳),之後,在室溫下繼續攪拌3小時而進行聚合反應,製備聚醯胺酸溶液1(黏度:26,500cps)。 Under nitrogen flow, 64.20 g of m-TB (0.302 mol) and 5.48 g of dianiline-M (0.016 mol) and DMAc in an amount of 15 wt% solid content after polymerization were added to the reaction tank, and stirred and dissolved at room temperature. Next, 34.20 g of PMDA (0.157 mol) and 46.13 g of BPDA (0.157 mol) were added, and then the polymerization reaction was continued at room temperature for 3 hours to prepare polyamide solution 1 (viscosity: 26,500 cps).
(合成例6) (Synthesis Example 6)
<絕緣樹脂層用的聚醯胺酸溶液2的製備> <Preparation of polyamide solution 2 for insulating resin layer>
將69.56g的m-TB(0.328莫耳)、542.75g的TPE-R(1.857莫耳)、聚合後的固體成分濃度為12重量%的量的DMAc、194.39g的PMDA(0.891莫耳)及393.31g的BPDA(1.337莫耳)設為原料組成,除此以外,與合成例3同樣地進行而製備聚醯胺酸溶液2(黏度:2,650cps)。 69.56 g of m-TB (0.328 mol), 542.75 g of TPE-R (1.857 mol), DMAc in an amount of 12 wt% solid content concentration after polymerization, 194.39 g of PMDA (0.891 mol) and 393.31 g of BPDA (1.337 mol) were used as the raw material composition. Polyamide solution 2 (viscosity: 2,650 cps) was prepared in the same manner as in Synthesis Example 3 except that the above-mentioned ingredients were used.
(製作例1) (Production Example 1)
<黏接層用的樹脂片A的製備> <Preparation of resin sheet A for adhesive layer>
以乾燥後的厚度為50μm的方式將黏接層用的樹脂溶液A塗敷於脫模基材(縱×橫×厚度=320mm×240mm×25μm)的矽酮處理面上,之後,在80℃下加熱乾燥15分鐘,進而在120℃下進行15分鐘乾燥,之後,自脫模基材上剝離,由此製備樹脂片A。另外,關於樹脂片A,為了評價硬化後的物性,而在120℃的烘箱中加熱2小時,並在170℃下加熱3小時。此時,關於硬化後樹脂片 A,Tg為95℃,50℃下的儲存彈性模數為960MPa,180℃至260℃的範圍中的儲存彈性模數的最大值為7MPa。 The resin solution A for the adhesive layer was applied to the silicone treated surface of a release substrate (length × width × thickness = 320 mm × 240 mm × 25 μm) to a thickness of 50 μm after drying, and then dried at 80°C for 15 minutes, and then dried at 120°C for 15 minutes, and then peeled from the release substrate to prepare a resin sheet A. In addition, the resin sheet A was heated in an oven at 120°C for 2 hours and at 170°C for 3 hours in order to evaluate the physical properties after curing. At this time, regarding the cured resin sheet A, Tg is 95°C, the storage elastic modulus at 50°C is 960MPa, and the maximum value of the storage elastic modulus in the range of 180°C to 260°C is 7MPa.
(製作例2) (Production Example 2)
<黏接層用的樹脂片B的製備> <Preparation of resin sheet B for adhesive layer>
以乾燥後的厚度為50μm的方式將黏接層用的樹脂溶液B塗敷於脫模基材(縱×橫×厚度=320mm×240mm×25μm)的矽酮處理面上,之後,在80℃下加熱乾燥15分鐘,進而在120℃下進行15分鐘乾燥,之後,自脫模基材上剝離,由此製備樹脂片B。另外,關於樹脂片B,為了評價硬化後的物性,而在120℃的烘箱中加熱2小時,並在170℃下加熱3小時。此時,關於硬化後樹脂片B,Tg為100℃以下,50℃下的儲存彈性模數為1800MPa以下,180℃至260℃的範圍中的儲存彈性模數的最大值為70MPa。 The resin solution B for the adhesive layer was applied to the silicone treated surface of a release substrate (length × width × thickness = 320 mm × 240 mm × 25 μm) to a thickness of 50 μm after drying, and then dried at 80°C for 15 minutes, and then dried at 120°C for 15 minutes, and then peeled off from the release substrate to prepare a resin sheet B. In addition, the resin sheet B was heated in an oven at 120°C for 2 hours and at 170°C for 3 hours in order to evaluate the physical properties after curing. At this time, for the cured resin sheet B, Tg is below 100°C, the storage elastic modulus at 50°C is below 1800 MPa, and the maximum value of the storage elastic modulus in the range of 180°C to 260°C is 70 MPa.
(製作例3) (Production Example 3)
<黏接層用的樹脂片C的製備> <Preparation of resin sheet C for adhesive layer>
在黏接層用的樹脂溶液C的169.49g(以固體成分計為50g)中調配1.8g的N-12(0.0036莫耳)及12.5g的OP935,並添加6.485g的NMP與19.345g的二甲苯進行稀釋,製備聚醯亞胺清漆1。 1.8 g of N-12 (0.0036 mol) and 12.5 g of OP935 were mixed into 169.49 g of resin solution C for the adhesive layer (50 g in terms of solid content), and 6.485 g of NMP and 19.345 g of xylene were added for dilution to prepare polyimide varnish 1.
以乾燥後的厚度為50μm的方式將聚醯亞胺清漆1塗敷於脫模基材(縱×橫×厚度=320mm×240mm×25μm)的矽酮處理面上,之後,在80℃下加熱乾燥15分鐘,並自脫模基材上剝離,由此製備樹脂片C。樹脂片C的Tg為78℃,50℃下的儲存彈性 模數為800MPa,180℃至260℃的範圍中的儲存彈性模數的最大值為10MPa。另外,介電常數(Dk)及介電損耗正切(Df)分別為2.68、0.0028。 Polyimide varnish 1 was applied to the silicone treated surface of a release substrate (length × width × thickness = 320 mm × 240 mm × 25 μm) in a manner to a thickness of 50 μm after drying, and then heat dried at 80°C for 15 minutes and peeled off from the release substrate to prepare a resin sheet C. The Tg of the resin sheet C was 78°C, the storage elastic modulus at 50°C was 800 MPa, and the maximum storage elastic modulus in the range of 180°C to 260°C was 10 MPa. In addition, the dielectric constant (Dk) and dielectric loss tangent (Df) were 2.68 and 0.0028, respectively.
(製作例4) (Production Example 4)
<黏接層用的樹脂片D的製備> <Preparation of resin sheet D for adhesive layer>
以乾燥後的厚度為50μm的方式將黏接層用的樹脂溶液D塗敷於脫模基材(縱×橫×厚度=320mm×240mm×25μm)的矽酮處理面上,之後,在80℃下加熱乾燥15分鐘,並自脫模基材上剝離,由此製備樹脂片D。樹脂片D的Tg為82℃,50℃下的儲存彈性模數為1800MPa以下,180℃至260℃的範圍中的儲存彈性模數的最大值為2MPa以下。另外,介電常數(Dk)及介電損耗正切(Df)分別為2.80、0.0026。 The resin solution D for the adhesive layer was applied to the silicone treated surface of the release substrate (length × width × thickness = 320mm × 240mm × 25μm) in a manner to a thickness of 50μm after drying, and then dried at 80°C for 15 minutes and peeled off from the release substrate to prepare a resin sheet D. The Tg of the resin sheet D was 82°C, the storage elastic modulus at 50°C was 1800MPa or less, and the maximum value of the storage elastic modulus in the range of 180°C to 260°C was 2MPa or less. In addition, the dielectric constant (Dk) and dielectric loss tangent (Df) were 2.80 and 0.0026, respectively.
(製作例5) (Production Example 5)
<單面覆金屬積層板的製備> <Preparation of single-sided metal-clad laminates>
在銅箔1(電解銅箔,厚度:12μm,樹脂層側的表面粗糙度Rz:0.6μm)上,以硬化後的厚度為約2μm~3μm的方式均勻地塗布聚醯胺酸溶液2,之後,在120℃下進行加熱乾燥而去除溶媒。其次,在其上以硬化後的厚度為約21μm的方式均勻地塗布聚醯胺酸溶液1,在120℃下進行加熱乾燥而去除溶媒。進而,在其上以硬化後的厚度為約2μm~3μm的方式均勻地塗布聚醯胺酸溶液2,之後,在120℃下進行加熱乾燥而去除溶媒。進而,自120℃起至360℃為止進行階段性的熱處理,結束醯亞胺化,製備單面覆 金屬積層板1。單面覆金屬積層板1的尺寸變化率如下所述。 On copper foil 1 (electrolytic copper foil, thickness: 12 μm, surface roughness Rz of the resin layer side: 0.6 μm), polyamide solution 2 is uniformly applied to a thickness of about 2 μm to 3 μm after curing, and then heat-dried at 120°C to remove the solvent. Secondly, polyamide solution 1 is uniformly applied thereon to a thickness of about 21 μm after curing, and heat-dried at 120°C to remove the solvent. Furthermore, polyamide solution 2 is uniformly applied thereon to a thickness of about 2 μm to 3 μm after curing, and then heat-dried at 120°C to remove the solvent. Furthermore, a stepwise heat treatment is performed from 120°C to 360°C to complete the imidization and prepare a single-sided metal-clad laminate 1. The dimensional change rate of the single-sided metal-clad laminate 1 is as follows.
MD方向(長邊方向)上的蝕刻後尺寸變化率:0.01% Dimensional change rate after etching in MD direction (long side direction): 0.01%
TD方向(寬度方向)上的蝕刻後尺寸變化率:-0.04% Dimension change rate after etching in TD direction (width direction): -0.04%
MD方向(長邊方向)上的加熱後尺寸變化率:-0.03% Dimensional change rate after heating in MD direction (long side direction): -0.03%
TD方向(寬度方向)上的加熱後尺寸變化率:-0.01% Dimensional change rate after heating in TD direction (width direction): -0.01%
另外,使用氯化鐵水溶液將單面覆金屬積層板1的銅箔1蝕刻去除而製備的聚醯亞胺膜1(厚度:25μm)的CTE為20.0ppm/K,介電常數(Dk)及介電損耗正切(Df)分別為3.40、0.0029。 In addition, the polyimide film 1 (thickness: 25 μm) prepared by etching away the copper foil 1 of the single-sided metal-clad laminate 1 using an aqueous solution of ferric chloride has a CTE of 20.0 ppm/K, and a dielectric constant (Dk) and a dielectric loss tangent (Df) of 3.40 and 0.0029, respectively.
[實施例1] [Implementation Example 1]
以乾燥後的厚度為50μm的方式將黏接層用的樹脂溶液A塗敷於單面覆金屬積層板1的樹脂面上,之後,在80℃下加熱乾燥15分鐘,進而在120℃下進行15分鐘乾燥,由此製備帶黏接層的單面覆金屬積層板1。另外,關於帶黏接層的單面覆金屬積層板1,為了評價黏接層硬化後的物性,而在120℃的烘箱中加熱2小時,並在170℃下加熱3小時。加熱後的帶黏接層的單面覆金屬積層板1的評價結果如下所述。 The resin solution A for the adhesive layer was applied to the resin surface of the single-sided metal-clad laminate 1 in such a manner that the thickness after drying was 50 μm, and then dried at 80°C for 15 minutes and further dried at 120°C for 15 minutes to prepare the single-sided metal-clad laminate 1 with an adhesive layer. In addition, the single-sided metal-clad laminate 1 with an adhesive layer was heated in an oven at 120°C for 2 hours and at 170°C for 3 hours in order to evaluate the physical properties of the adhesive layer after curing. The evaluation results of the single-sided metal-clad laminate 1 with an adhesive layer after heating are as follows.
MD方向上的蝕刻後尺寸變化率:-0.05% Dimension change rate after etching in MD direction: -0.05%
TD方向上的蝕刻後尺寸變化率:-0.02% Dimension change rate after etching in TD direction: -0.02%
MD方向上的加熱後尺寸變化率:-0.01% Dimensional change rate after heating in MD direction: -0.01%
TD方向上的加熱後尺寸變化率:-0.03% Dimensional change rate after heating in TD direction: -0.03%
加熱後的帶黏接層的單面覆金屬積層板1的尺寸變化並無問題。另外,將加熱後的帶黏接層的單面覆金屬積層板1的銅箔1 蝕刻去除而製備的樹脂積層體1(厚度:75μm)的CTE為36.2ppm/K。 There is no problem with the dimensional change of the single-sided metal-clad laminate 1 with an adhesive layer after heating. In addition, the CTE of the resin laminate 1 (thickness: 75μm) prepared by etching away the copper foil 1 of the single-sided metal-clad laminate 1 with an adhesive layer after heating is 36.2ppm/K.
[實施例2] [Example 2]
以乾燥後的厚度為50μm的方式將黏接層用的樹脂溶液B塗敷於單面覆金屬積層板1的樹脂面上,之後,在80℃下加熱乾燥15分鐘,進而在120℃下進行15分鐘乾燥,由此製備帶黏接層的單面覆金屬積層板2。另外,關於帶黏接層的單面覆金屬積層板2,為了評價黏接層硬化後的物性,而在120℃的烘箱中加熱2小時,並在170℃下加熱3小時。加熱後的帶黏接層的單面覆金屬積層板2的評價結果如下所述。 The resin solution B for the adhesive layer was applied to the resin surface of the single-sided metal-clad laminate 1 in such a manner that the thickness after drying was 50 μm, and then dried at 80°C for 15 minutes and further dried at 120°C for 15 minutes to prepare a single-sided metal-clad laminate 2 with an adhesive layer. In addition, the single-sided metal-clad laminate 2 with an adhesive layer was heated in an oven at 120°C for 2 hours and at 170°C for 3 hours in order to evaluate the physical properties of the adhesive layer after curing. The evaluation results of the single-sided metal-clad laminate 2 with an adhesive layer after heating are as follows.
MD方向上的蝕刻後尺寸變化率:-0.08% Dimension change rate after etching in MD direction: -0.08%
TD方向上的蝕刻後尺寸變化率:-0.06% Dimension change rate after etching in TD direction: -0.06%
MD方向上的加熱後尺寸變化率:-0.03% Dimensional change rate after heating in MD direction: -0.03%
TD方向上的加熱後尺寸變化率:-0.06% Dimensional change rate after heating in TD direction: -0.06%
加熱後的帶黏接層的單面覆金屬積層板2的尺寸變化並無問題。另外,將加熱後的帶黏接層的單面覆金屬積層板2的銅箔1蝕刻去除而製備的樹脂積層體2(厚度:75μm)的CTE為25.0ppm/K。 There is no problem with the dimensional change of the single-sided metal-clad laminate 2 with an adhesive layer after heating. In addition, the CTE of the resin laminate 2 (thickness: 75μm) prepared by etching away the copper foil 1 of the single-sided metal-clad laminate 2 with an adhesive layer after heating is 25.0ppm/K.
[實施例3] [Implementation Example 3]
以乾燥後的厚度為50μm的方式將聚醯亞胺清漆1塗敷於單面覆金屬積層板1的樹脂面上,之後,在80℃下加熱乾燥15分鐘,由此製備帶黏接層的單面覆金屬積層板3。另外,關於帶黏接層的 單面覆金屬積層板3,在180℃的烘箱中加熱1分鐘且在150℃下加熱30分鐘後,進行評價,結果為如下所述。 The polyimide varnish 1 was applied to the resin surface of the single-sided metal-clad laminate 1 in a manner to have a thickness of 50 μm after drying, and then heated and dried at 80°C for 15 minutes, thereby preparing a single-sided metal-clad laminate 3 with an adhesive layer. In addition, the single-sided metal-clad laminate 3 with an adhesive layer was heated in an oven at 180°C for 1 minute and at 150°C for 30 minutes, and then evaluated. The results are as follows.
MD方向上的蝕刻後尺寸變化率:-0.05% Dimension change rate after etching in MD direction: -0.05%
TD方向上的蝕刻後尺寸變化率:-0.04% Dimension change rate after etching in TD direction: -0.04%
MD方向上的加熱後尺寸變化率:0.05% Dimensional change rate after heating in MD direction: 0.05%
TD方向上的加熱後尺寸變化率:0.01% Dimensional change rate after heating in TD direction: 0.01%
加熱後的帶黏接層的單面覆金屬積層板3的尺寸變化並無問題。另外,將加熱後的帶黏接層的單面覆金屬積層板3的銅箔1蝕刻去除而製備的樹脂積層體3(厚度:75μm)的CTE為25.6ppm/K,介電常數(Dk)及介電損耗正切(Df)分別為2.92、0.0028。 There is no problem with the dimensional change of the single-sided metal-clad laminate 3 with an adhesive layer after heating. In addition, the CTE of the resin laminate 3 (thickness: 75μm) prepared by etching away the copper foil 1 of the single-sided metal-clad laminate 3 with an adhesive layer after heating is 25.6ppm/K, and the dielectric constant (Dk) and dielectric loss tangent (Df) are 2.92 and 0.0028 respectively.
[實施例4] [Implementation Example 4]
以乾燥後的厚度為50μm的方式將黏接層用的樹脂溶液D塗敷於單面覆金屬積層板1的樹脂面上,之後,在80℃下加熱乾燥15分鐘,由此製備帶黏接層的單面覆金屬積層板4。另外,關於帶黏接層的單面覆金屬積層板4,在180℃的烘箱中加熱1分鐘且在150℃下加熱30分鐘後,進行評價,結果,尺寸變化並無問題,介電常數(Dk)及介電損耗正切(Df)分別為3.00、0.0027。 The resin solution D for the adhesive layer was applied to the resin surface of the single-sided metal-clad laminate 1 in a manner to a thickness of 50 μm after drying, and then heated and dried at 80°C for 15 minutes to prepare a single-sided metal-clad laminate 4 with an adhesive layer. In addition, the single-sided metal-clad laminate 4 with an adhesive layer was heated in an oven at 180°C for 1 minute and at 150°C for 30 minutes, and then evaluated. As a result, there was no problem with dimensional change, and the dielectric constant (Dk) and dielectric loss tangent (Df) were 3.00 and 0.0027, respectively.
[實施例5] [Implementation Example 5]
將液晶聚合物膜(可樂麗(Kuraray)公司製造,商品名:CT-Z,厚度:25μm,CTE:18ppm/K,熱變形溫度:300℃,Dk:3.40,Df:0.0022)設為絕緣基材,準備在其兩面設置有銅箔1的兩面覆金屬積層板1。將兩面覆金屬積層板1的單面的銅箔1蝕刻去除, 製備單面覆金屬積層板2。 A liquid crystal polymer film (manufactured by Kuraray, trade name: CT-Z, thickness: 25 μm, CTE: 18 ppm/K, thermal deformation temperature: 300°C, Dk: 3.40, Df: 0.0022) is used as an insulating substrate, and a double-sided metal-clad laminate 1 having copper foil 1 on both sides thereof is prepared. The copper foil 1 on one side of the double-sided metal-clad laminate 1 is etched away to prepare a single-sided metal-clad laminate 2.
以乾燥後的厚度為50μm的方式將聚醯亞胺清漆1塗敷於單面覆金屬積層板2的樹脂面上,之後,在80℃下加熱乾燥15分鐘,由此製備帶黏接層的單面覆金屬積層板5。另外,關於帶黏接層的單面覆金屬積層板5,在180℃的烘箱中加熱1分鐘且在150℃下加熱30分鐘後,進行評價,結果,尺寸變化並無問題,介電常數(Dk)及介電損耗正切(Df)分別為2.92、0.0026。 The polyimide varnish 1 was applied to the resin surface of the single-sided metal-clad laminate 2 in a manner to a thickness of 50 μm after drying, and then heated and dried at 80°C for 15 minutes to prepare a single-sided metal-clad laminate 5 with an adhesive layer. In addition, the single-sided metal-clad laminate 5 with an adhesive layer was heated in an oven at 180°C for 1 minute and at 150°C for 30 minutes, and then evaluated. As a result, there was no problem with dimensional change, and the dielectric constant (Dk) and dielectric loss tangent (Df) were 2.92 and 0.0026, respectively.
[實施例6] [Implementation Example 6]
以乾燥後的厚度為50μm的方式將黏接層用的樹脂溶液D塗敷於單面覆金屬積層板2的樹脂面上,之後,在80℃下加熱乾燥15分鐘,由此製備帶黏接層的單面覆金屬積層板6。另外,關於帶黏接層的單面覆金屬積層板6,在180℃的烘箱中加熱1分鐘且在150℃下加熱30分鐘後,進行評價,結果,尺寸變化並無問題,介電常數(Dk)及介電損耗正切(Df)分別為3.00、0.0025。 The resin solution D for the adhesive layer was applied to the resin surface of the single-sided metal-clad laminate 2 in a manner to a thickness of 50 μm after drying, and then heated and dried at 80°C for 15 minutes to prepare a single-sided metal-clad laminate 6 with an adhesive layer. In addition, the single-sided metal-clad laminate 6 with an adhesive layer was heated in an oven at 180°C for 1 minute and at 150°C for 30 minutes, and then evaluated. As a result, there was no problem with dimensional change, and the dielectric constant (Dk) and dielectric loss tangent (Df) were 3.00 and 0.0025, respectively.
[實施例7] [Implementation Example 7]
對單面覆金屬積層板1的銅箔1實施利用減成法(subtractive method)的電路加工,製備形成有導體電路層的單面配線基板1。一併對兩塊帶黏接層的單面覆金屬積層板3的銅箔1實施利用減成法的電路加工,製備形成有導體電路層的兩塊帶黏接層的單面配線基板1。 A single-sided wiring board 1 with a conductive circuit layer formed thereon is prepared by performing circuit processing using a subtractive method on a copper foil 1 of a single-sided metal-clad laminate 1. A single-sided wiring board 1 with a conductive circuit layer formed thereon is prepared by performing circuit processing using a subtractive method on two single-sided metal-clad laminates 3 with adhesive layers, and two single-sided wiring boards 1 with adhesive layers formed thereon are prepared.
將單面配線基板1的導體電路層與一個帶黏接層的單面配線基板1的黏接層、一個帶黏接層的單面配線基板1的導體電 路層與另一個帶黏接層的單面配線基板1的黏接層以分別相向的方式重合後,在160℃、4MPa的條件下進行60分鐘熱壓接,由此製備多層電路基板1。在多層電路基板1的壓接面中,黏接劑充分填充至導體電路層,也未產生熱壓接步驟引起的導體電路的錯亂。 The conductive circuit layer of the single-sided wiring substrate 1 and the adhesive layer of a single-sided wiring substrate 1 with an adhesive layer, and the conductive circuit layer of a single-sided wiring substrate 1 with an adhesive layer and the adhesive layer of another single-sided wiring substrate 1 with an adhesive layer are overlapped in a manner facing each other, and then heat-pressed for 60 minutes at 160°C and 4MPa to prepare a multi-layer circuit substrate 1. In the press-bonded surface of the multi-layer circuit substrate 1, the adhesive is fully filled into the conductive circuit layer, and there is no disorder of the conductive circuit caused by the heat-pressing step.
[實施例8] [Implementation Example 8]
準備兩塊帶黏接層的單面配線基板1,並將一個帶黏接層的單面配線基板1的黏接層與另一個帶黏接層的單面配線基板1的黏接層以相向的方式重合後,在160℃、4MPa的條件下進行60分鐘熱壓接,由此製備兩面電路基板1。在兩面電路基板1的壓接面中,黏接層彼此充分黏接,也未產生熱壓接步驟引起的導體電路的錯亂。 Two single-sided wiring substrates 1 with adhesive layers are prepared, and the adhesive layer of one single-sided wiring substrate 1 with adhesive layers is overlapped with the adhesive layer of the other single-sided wiring substrate 1 with adhesive layers in a facing manner, and then hot-pressed for 60 minutes at 160°C and 4MPa to prepare a double-sided circuit substrate 1. In the press-bonded surfaces of the double-sided circuit substrates 1, the adhesive layers are fully bonded to each other, and no disturbance of the conductor circuit caused by the hot-pressing step occurs.
[實施例9] [Implementation Example 9]
對兩塊帶黏接層的單面覆金屬積層板4的銅箔1實施利用減成法的電路加工,製備形成有導體電路層的兩塊帶黏接層的單面配線基板2。 The copper foil 1 of two single-sided metal-clad laminates 4 with adhesive layers is subjected to circuit processing using a subtractive method to prepare two single-sided wiring substrates 2 with adhesive layers formed with conductive circuit layers.
將單面配線基板1的導體電路層與一個帶黏接層的單面配線基板2的黏接層、一個帶黏接層的單面配線基板2的導體電路層與另一個帶黏接層的單面配線基板2的黏接層以分別相向的方式重合後,在160℃、4MPa的條件下進行60分鐘熱壓接,由此製備多層電路基板2。在多層電路基板2的壓接面中,黏接劑充分填充至導體電路層,也未產生熱壓接步驟引起的導體電路的錯 亂。 The conductive circuit layer of the single-sided wiring board 1 and the adhesive layer of a single-sided wiring board 2 with an adhesive layer, and the conductive circuit layer of a single-sided wiring board 2 with an adhesive layer and the adhesive layer of another single-sided wiring board 2 with an adhesive layer are overlapped in a manner facing each other, and then heat-pressed for 60 minutes at 160°C and 4MPa to prepare a multi-layer circuit board 2. In the press-bonded surface of the multi-layer circuit board 2, the adhesive is fully filled into the conductive circuit layer, and no disturbance of the conductive circuit caused by the heat-pressing step occurs.
[實施例10] [Example 10]
準備兩塊帶黏接層的單面配線基板2,並將一個帶黏接層的單面配線基板2的黏接層與另一個帶黏接層的單面配線基板2的黏接層以相向的方式重合後,在160℃、4MPa的條件下進行60分鐘熱壓接,由此製備兩面電路基板2。在兩面電路基板2的壓接面中,黏接層彼此充分黏接,也未產生熱壓接步驟引起的導體電路的錯亂。 Two single-sided wiring substrates 2 with adhesive layers were prepared, and the adhesive layer of one single-sided wiring substrate 2 with adhesive layer was overlapped with the adhesive layer of the other single-sided wiring substrate 2 with adhesive layer in a facing manner, and then heat-pressed for 60 minutes at 160°C and 4MPa to prepare a double-sided circuit substrate 2. In the press-bonded surfaces of the double-sided circuit substrates 2, the adhesive layers were fully bonded to each other, and no disturbance of the conductor circuit caused by the heat-pressing step occurred.
[實施例11] [Implementation Example 11]
對單面覆金屬積層板2的銅箔1實施利用減成法的電路加工,製備形成有導體電路層的單面配線基板2。一併對兩塊帶黏接層的單面覆金屬積層板5的銅箔1實施利用減成法的電路加工,製備形成有導體電路層的兩塊帶黏接層的單面配線基板3。 The copper foil 1 of the single-sided metal laminate 2 is subjected to circuit processing using a subtractive method to prepare a single-sided wiring board 2 with a conductive circuit layer formed thereon. The copper foil 1 of two single-sided metal laminates 5 with adhesive layers is subjected to circuit processing using a subtractive method to prepare two single-sided wiring boards 3 with adhesive layers with conductive circuit layers formed thereon.
將單面配線基板2的導體電路層與一個帶黏接層的單面配線基板3的黏接層、一個帶黏接層的單面配線基板3的導體電路層與另一個帶黏接層的單面配線基板3的黏接層以分別相向的方式重合後,在160℃、4MPa的條件下進行60分鐘熱壓接,由此製備多層電路基板3。在多層電路基板3的壓接面中,黏接劑充分填充至導體電路層,也未產生熱壓接步驟引起的導體電路的錯亂。 The conductive circuit layer of the single-sided wiring board 2 and the adhesive layer of a single-sided wiring board 3 with an adhesive layer, and the conductive circuit layer of a single-sided wiring board 3 with an adhesive layer and the adhesive layer of another single-sided wiring board 3 with an adhesive layer are overlapped in a manner facing each other, and then heat-pressed for 60 minutes at 160°C and 4MPa to prepare a multi-layer circuit board 3. In the press-bonded surface of the multi-layer circuit board 3, the adhesive is fully filled into the conductive circuit layer, and there is no disorder of the conductive circuit caused by the heat-pressing step.
[實施例12] [Implementation Example 12]
準備兩塊帶黏接層的單面配線基板3,並將一個帶黏接層的 單面配線基板3的黏接層與另一個帶黏接層的單面配線基板3的黏接層以相向的方式重合後,在160℃、4MPa的條件下進行60分鐘熱壓接,由此製備兩面電路基板3。在兩面電路基板3的壓接面中,黏接層彼此充分黏接,也未產生熱壓接步驟引起的導體電路的錯亂。 Two single-sided wiring substrates 3 with adhesive layers are prepared, and the adhesive layer of one single-sided wiring substrate 3 with adhesive layers is overlapped with the adhesive layer of another single-sided wiring substrate 3 with adhesive layers in a facing manner, and then hot-pressed for 60 minutes at 160°C and 4MPa to prepare a double-sided circuit substrate 3. In the press-bonded surfaces of the double-sided circuit substrates 3, the adhesive layers are fully bonded to each other, and no disturbance of the conductor circuit caused by the hot-pressing step occurs.
[實施例13] [Implementation Example 13]
對兩塊帶黏接層的單面覆金屬積層板6的銅箔1實施利用減成法的電路加工,製備形成有導體電路層的兩塊帶黏接層的單面配線基板4。 The copper foil 1 of two single-sided metal-clad laminates 6 with adhesive layers is subjected to circuit processing using a subtractive method to prepare two single-sided wiring substrates 4 with adhesive layers formed with conductive circuit layers.
將單面配線基板2的導體電路層與一個帶黏接層的單面配線基板4的黏接層、一個帶黏接層的單面配線基板4的導體電路層與另一個帶黏接層的單面配線基板4的黏接層以分別相向的方式重合後,在160℃、4MPa的條件下進行60分鐘熱壓接,由此製備多層電路基板4。在多層電路基板4的壓接面中,黏接劑充分填充至導體電路層,也未產生熱壓接步驟引起的導體電路的錯亂。 The conductive circuit layer of the single-sided wiring substrate 2 and the adhesive layer of a single-sided wiring substrate 4 with an adhesive layer, and the conductive circuit layer of a single-sided wiring substrate 4 with an adhesive layer and the adhesive layer of another single-sided wiring substrate 4 with an adhesive layer are overlapped in a manner facing each other, and then heat-pressed for 60 minutes at 160°C and 4MPa to prepare a multi-layer circuit substrate 4. In the press-bonded surface of the multi-layer circuit substrate 4, the adhesive is fully filled into the conductive circuit layer, and there is no disorder of the conductive circuit caused by the heat-pressing step.
[實施例14] [Example 14]
準備兩塊帶黏接層的單面配線基板4,並將一個帶黏接層的單面配線基板4的黏接層與另一個帶黏接層的單面配線基板4的黏接層以相向的方式重合後,在160℃、4MPa的條件下進行60分鐘熱壓接,由此製備兩面電路基板4。在兩面電路基板4的壓接面中,黏接層彼此充分黏接,也未產生熱壓接步驟引起的導體電 路的錯亂。 Two single-sided wiring substrates 4 with adhesive layers were prepared, and the adhesive layer of one single-sided wiring substrate 4 with adhesive layer was overlapped with the adhesive layer of the other single-sided wiring substrate 4 with adhesive layer in a facing manner, and then heat-pressed for 60 minutes at 160°C and 4MPa to prepare a double-sided circuit substrate 4. In the press-bonded surfaces of the double-sided circuit substrates 4, the adhesive layers were fully bonded to each other, and no confusion of the conductor circuit was caused by the heat-pressing step.
以上,以例示的目的對本發明的實施形態進行了詳細說明,但本發明不受所述實施形態的制約,可進行各種變形。 The above is a detailed description of the implementation form of the present invention for the purpose of illustration, but the present invention is not limited to the above implementation form and can be modified in various ways.
10:絕緣樹脂層 10: Insulating resin layer
30:黏接層 30: Adhesive layer
50:導體電路層 50: Conductor circuit layer
101:電路基板 101: Circuit board
110:任意的電路基板 110: Any circuit board
200:多層電路基板 200:Multi-layer circuit board
Claims (10)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018-205805 | 2018-10-31 | ||
| JP2018205805A JP7229725B2 (en) | 2018-10-31 | 2018-10-31 | Metal-clad laminate, circuit board, multi-layer circuit board and manufacturing method thereof |
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| Publication Number | Publication Date |
|---|---|
| TW202027980A TW202027980A (en) | 2020-08-01 |
| TWI859161B true TWI859161B (en) | 2024-10-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW112121671A TW202337693A (en) | 2018-10-31 | 2019-10-29 | Multilayer circuit board and method of manufacturing the same |
| TW112121676A TW202337695A (en) | 2018-10-31 | 2019-10-29 | Metal-clad laminate, circuit board, multilayer circuit board and method of manufacturing the same excellent in dimensional stability of a conductor circuit |
| TW108138980A TWI859161B (en) | 2018-10-31 | 2019-10-29 | Metal-clad laminates, circuit substrates and multi-layer circuit substrates |
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| TW112121671A TW202337693A (en) | 2018-10-31 | 2019-10-29 | Multilayer circuit board and method of manufacturing the same |
| TW112121676A TW202337695A (en) | 2018-10-31 | 2019-10-29 | Metal-clad laminate, circuit board, multilayer circuit board and method of manufacturing the same excellent in dimensional stability of a conductor circuit |
Country Status (4)
| Country | Link |
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| JP (3) | JP7229725B2 (en) |
| KR (1) | KR102863271B1 (en) |
| CN (1) | CN111132456B (en) |
| TW (3) | TW202337693A (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| KR102843977B1 (en) | 2018-11-08 | 2025-08-07 | 주식회사 쿠라레 | Thermoplastic liquid crystal polymer film and circuit board using the same |
| JP7524581B2 (en) * | 2020-03-31 | 2024-07-30 | 三菱マテリアル株式会社 | Copper-based PCB |
| CN113801416B (en) * | 2020-06-12 | 2025-03-14 | 日铁化学材料株式会社 | Printed wiring board |
| JPWO2022004504A1 (en) | 2020-06-30 | 2022-01-06 | ||
| TWI807216B (en) * | 2020-09-01 | 2023-07-01 | 佳勝科技股份有限公司 | Composite substrate and manufacturing method thereof |
| JP6981522B1 (en) | 2020-12-15 | 2021-12-15 | 東洋インキScホールディングス株式会社 | Thermosetting resin composition and its use |
| JP7636123B2 (en) * | 2020-12-18 | 2025-02-26 | 信越化学工業株式会社 | Thermosetting maleimide resin composition |
| JP7642368B2 (en) * | 2020-12-24 | 2025-03-10 | 日鉄ケミカル&マテリアル株式会社 | Polyimide, adhesive film, laminate, coverlay film, resin-coated copper foil, metal-clad laminate, circuit board and multi-layer circuit board |
| JP7598756B2 (en) * | 2020-12-24 | 2024-12-12 | 日鉄ケミカル&マテリアル株式会社 | Resin films, metal-clad laminates and circuit boards |
| CN112689383A (en) * | 2020-12-26 | 2021-04-20 | 珠海元盛电子科技股份有限公司 | High-frequency low-loss multilayer FPC and production process thereof |
| JPWO2022210321A1 (en) * | 2021-03-29 | 2022-10-06 | ||
| JP2022158993A (en) * | 2021-03-31 | 2022-10-17 | 日鉄ケミカル&マテリアル株式会社 | Bond ply, circuit board and strip line using the same |
| JP7780277B2 (en) * | 2021-09-01 | 2025-12-04 | 日鉄ケミカル&マテリアル株式会社 | Thermoplastic polyimide, crosslinked polyimide, adhesive film, laminate, coverlay film, resin-coated copper foil, metal-clad laminate, circuit board and multilayer circuit board |
| JP7731274B2 (en) * | 2021-12-06 | 2025-08-29 | 倉敷紡績株式会社 | Copper-clad laminate |
| WO2024048729A1 (en) * | 2022-08-31 | 2024-03-07 | 富士フイルム株式会社 | Film, method for manufacturing same, and laminate |
| WO2025070326A1 (en) * | 2023-09-29 | 2025-04-03 | パナソニックIpマネジメント株式会社 | Laminate and film |
| WO2025070327A1 (en) * | 2023-09-29 | 2025-04-03 | パナソニックIpマネジメント株式会社 | Laminate, metal-clad laminated plate, and wiring board |
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- 2018-10-31 JP JP2018205805A patent/JP7229725B2/en active Active
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2019
- 2019-10-25 CN CN201911022153.5A patent/CN111132456B/en active Active
- 2019-10-28 KR KR1020190134279A patent/KR102863271B1/en active Active
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Also Published As
| Publication number | Publication date |
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| TW202337693A (en) | 2023-10-01 |
| KR20200049616A (en) | 2020-05-08 |
| JP2023036706A (en) | 2023-03-14 |
| JP2023036707A (en) | 2023-03-14 |
| TW202337695A (en) | 2023-10-01 |
| CN111132456B (en) | 2025-11-07 |
| CN111132456A (en) | 2020-05-08 |
| JP2020072198A (en) | 2020-05-07 |
| JP7229725B2 (en) | 2023-02-28 |
| KR102863271B1 (en) | 2025-09-24 |
| TW202027980A (en) | 2020-08-01 |
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