TWI848439B - Unmanned steam plating system for optical components - Google Patents
Unmanned steam plating system for optical components Download PDFInfo
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- 230000003287 optical effect Effects 0.000 title claims abstract description 64
- 238000007747 plating Methods 0.000 title abstract 12
- 238000001514 detection method Methods 0.000 claims abstract description 42
- 238000001704 evaporation Methods 0.000 claims description 78
- 230000008020 evaporation Effects 0.000 claims description 73
- 238000010025 steaming Methods 0.000 claims description 41
- 239000011248 coating agent Substances 0.000 claims description 24
- 238000000576 coating method Methods 0.000 claims description 24
- 238000009834 vaporization Methods 0.000 claims description 19
- 230000008016 vaporization Effects 0.000 claims description 19
- 238000012546 transfer Methods 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 12
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 5
- 238000013459 approach Methods 0.000 claims description 2
- 230000032258 transport Effects 0.000 description 45
- 238000010586 diagram Methods 0.000 description 7
- 239000013077 target material Substances 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000006200 vaporizer Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000008054 signal transmission Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Abstract
Description
本發明係與光學元件有關,特別是指一種光學元件的無人化蒸鍍系統。The present invention relates to optical components, and more particularly to an unmanned evaporation system for optical components.
光學元件的面形設計是品質的重要參數,也是決定光束品質的主要因素。為了提高光學元件性能,通常需要在光學元件的表面沉積薄膜。而最被廣泛採用的沉積法即是蒸鍍,其藉由物理加熱靶材,將靶材中的粒子激發出來,被激發出來的粒子附著在光學元件的表面便形成了所需要的膜層。The surface design of optical components is an important parameter of quality and the main factor that determines the quality of the beam. In order to improve the performance of optical components, it is usually necessary to deposit a thin film on the surface of the optical component. The most widely used deposition method is evaporation, which physically heats the target material to excite the particles in the target material. The excited particles adhere to the surface of the optical component to form the required film layer.
光學元件在蒸鍍的流程中,必須先將待鍍膜光學元件固設在傘架平台的鍍膜傘架上,隨後將固設有光學元件的鍍膜傘架移至蒸鍍機內進行蒸鍍作業,待蒸鍍作業完成後再將鍍膜傘架移至傘架平台進行鍍後處理、檢測等步驟。然而,就蒸鍍效率而言,其除了須依靠人力將光學元件設置於鍍膜傘架或將光學元件於鍍膜傘架上取下之外,更必須仰賴人員將固設有光學元件的鍍膜傘架移至蒸鍍機、以及將蒸鍍作業完成後的鍍膜傘架移至傘架平台,如此過多人力的參與,除了耗費人力增加人力成本之外,更凸顯出光學元件蒸鍍效率不佳的缺陷。During the evaporation process of optical components, the optical components to be coated must first be fixed on the coating umbrella on the umbrella platform, and then the coated umbrella with the optical components fixed is moved to the evaporator for evaporation. After the evaporation operation is completed, the coated umbrella is moved to the umbrella platform for post-coating treatment, testing and other steps. However, in terms of evaporation efficiency, in addition to relying on manpower to place optical components on or remove optical components from the coating umbrella rack, it is also necessary to rely on personnel to move the coating umbrella rack with optical components fixed to the evaporator, and to move the coated umbrella rack to the umbrella rack platform after the evaporation operation is completed. Such excessive manpower participation not only consumes manpower and increases labor costs, but also highlights the defect of poor evaporation efficiency of optical components.
本發明的目的係在於提供一種能解決上述其中之一問題的光學元件的無人化蒸鍍系統,藉以降低人力成本或提升光學元件蒸鍍效率。The purpose of the present invention is to provide an unmanned evaporation system for optical components that can solve one of the above problems, thereby reducing labor costs or improving the efficiency of optical component evaporation.
為達前述目的,本發明係一種光學元件的無人化蒸鍍系統,適用於自動帶動一蒸鍍傘架位移,該蒸鍍傘架具有複數設置部,各該設置部供一光學元件設置或設置後卸除,該光學元件的無人化蒸鍍系統包含:一傘架平台,供該蒸鍍傘架設置;一蒸鍍機,具有一蒸鍍空間,用以對該蒸鍍傘架上的各光學元件蒸鍍;一自動移動裝置,包括一充電座及一與該充電座電性連結或脫離的自動導引運輸車,該自動導引運輸車用以運送該蒸鍍傘架至蒸鍍機或傘架平台;以及一偵測控制裝置,用以偵測該傘架平台、蒸鍍機與自動移動裝置,並用以控制該自動導引運輸車移動;To achieve the above-mentioned purpose, the present invention is an unmanned evaporation system for optical components, which is suitable for automatically driving a evaporation umbrella rack to move. The evaporation umbrella rack has a plurality of setting parts, each of which is used to set an optical component or remove it after setting. The unmanned evaporation system for optical components includes: an umbrella rack platform for setting the evaporation umbrella rack; a evaporation machine having a evaporation space for evaporating the evaporation umbrella rack; The invention relates to an automatic moving device, comprising a charging base and an automatic guided transport vehicle electrically connected to or disconnected from the charging base, the automatic guided transport vehicle being used to transport the vaporized umbrella to the vaporizer or umbrella platform; and a detection control device being used to detect the umbrella platform, the vaporizer and the automatic moving device, and to control the movement of the automatic guided transport vehicle;
藉此,當該偵測控制裝置偵測該傘架平台上具有該蒸鍍傘架,且該蒸鍍傘架上設有該光學元件時,該偵測控制裝置控制該自動導引運輸車脫離該充電座並移動至該傘架平台,隨後將該傘架平台上的蒸鍍傘架移至該蒸鍍機的蒸鍍空間內,隨後控制該自動導引運輸車電性連結該充電座及控制該蒸鍍機對該蒸鍍傘架的各光學元件蒸鍍;當該偵測控制裝置偵測各該光學元件蒸鍍完成後,該偵測控制裝置控制該自動導引運輸車脫離該充電座並移動至該蒸鍍機,隨後將該蒸鍍空間內的蒸鍍傘架移至該傘架平台,並將該蒸鍍傘架置於該傘架平台,隨後控制該自動導引運輸車電性連結該充電座。Thus, when the detection control device detects that the steam-coated umbrella rack is on the umbrella rack platform and the optical element is disposed on the steam-coated umbrella rack, the detection control device controls the automatic guided transport vehicle to detach from the charging base and move to the umbrella rack platform, then moves the steam-coated umbrella rack on the umbrella rack platform into the steaming space of the steam-coating machine, and then controls the automatic guided transport vehicle to electrically connect to the charging base and control the steam-coated umbrella rack to move to the charging base. The coating machine coats each optical component of the coating umbrella; when the detection control device detects that the coating of each optical component is completed, the detection control device controls the automatic guided transport vehicle to detach from the charging base and move to the coating machine, then moves the coating umbrella in the coating space to the umbrella platform, and places the coating umbrella on the umbrella platform, and then controls the automatic guided transport vehicle to electrically connect to the charging base.
本發明功效在於:藉由該偵測控制裝置用以偵測該傘架平台、蒸鍍機與自動移動裝置,並用以控制該自動導引運輸車移動的限定,使得該偵測控制裝置得以控制該自動導引運輸車將該傘架平台上的蒸鍍傘架自動運送至該蒸鍍機進行光學元件的蒸鍍作業,以及將蒸鍍完成後的蒸鍍傘架自動運送至該傘架平台進行光學元件的卸除作業,據此,本發明得以降低人力成本或提升光學元件蒸鍍效率。The utility model discloses a method for detecting the umbrella platform, the evaporator and the automatic moving device by using the detection control device to detect the umbrella platform, the evaporator and the automatic moving device, and to control the movement limit of the automatic guided transport vehicle, so that the detection control device can control the automatic guided transport vehicle to automatically transport the evaporation umbrella on the umbrella platform to the evaporator for evaporation of optical components, and to automatically transport the evaporation umbrella after evaporation to the umbrella platform for unloading of optical components. Therefore, the labor cost can be reduced or the efficiency of evaporation of optical components can be improved.
較佳地,其中該蒸鍍傘架還具有一結合部,該蒸鍍機的蒸鍍空間具有一固定部,該固定部用以結合或脫離該蒸鍍傘架的結合部。Preferably, the steam-coated umbrella stand further has a coupling portion, and the steam-coating space of the steam-coating machine has a fixing portion, and the fixing portion is used to couple with or detach from the coupling portion of the steam-coated umbrella stand.
較佳地,其中該自動導引運輸車具有一車體及一能夠升降地設在該車體且用以運送該蒸鍍傘架的移料架。Preferably, the automatic guided transport vehicle has a vehicle body and a material transfer rack which is movably mounted on the vehicle body and is used to transport the steaming umbrella rack.
較佳地,其中該傘架平台、蒸鍍機、及自動移動裝置為複數個;當該偵測控制裝置偵測該傘架平台上具有該蒸鍍傘架,且該蒸鍍傘架上設有該光學元件時,該偵測控制裝置是控制該充電座電性連結有該自動導引運輸車進行移動至該傘架平台,隨後將該傘架平台上的蒸鍍傘架移至未設有蒸鍍傘架的該蒸鍍機的蒸鍍空間內,當該偵測控制裝置偵測各該光學元件蒸鍍完成後,該偵測控制裝置是控制該充電座電性連結有該自動導引運輸車進行移動至該蒸鍍機,並將該蒸鍍空間內的蒸鍍傘架移至未設有該蒸鍍傘架的該傘架平台。Preferably, the umbrella platform, the steam coating machine, and the automatic moving device are plural; when the detection control device detects that the steam coating umbrella is on the umbrella platform and the optical element is provided on the steam coating umbrella, the detection control device controls the charging stand to be electrically connected to the automatic guided transport vehicle to move to the umbrella platform, and then the umbrella platform is placed on the umbrella platform. The steaming umbrella rack is moved to the steaming space of the steaming machine without the steaming umbrella rack. When the detection control device detects that the steaming of each optical component is completed, the detection control device controls the charging base to be electrically connected to the automatic guided transport vehicle to move to the steaming machine, and moves the steaming umbrella rack in the steaming space to the umbrella rack platform without the steaming umbrella rack.
請參閱圖1所示,本發明第一實施例所提供一種光學元件的無人化蒸鍍系統,適用於自動帶動一蒸鍍傘架10位移,該蒸鍍傘架10具有複數設置部11及一結合部12,各該設置部11供一光學元件91設置或設置後卸除,該光學元件的無人化蒸鍍系統主要是由一傘架平台20、一蒸鍍機30、一自動移動裝置40、以及一偵測控制裝置50所組成,其中:Referring to FIG. 1 , the first embodiment of the present invention provides an unmanned evaporation system for optical components, which is suitable for automatically driving a
該傘架平台20,供該蒸鍍傘架10設置;本實施例中,該傘架平台20的台面具有一透空部21。The
該蒸鍍機30,具有一蒸鍍空間31,用以對該蒸鍍傘架10上的各光學元件91蒸鍍;本實施例中,該蒸鍍空間31具有一固定部311,該固定部311用以結合或脫離該蒸鍍傘架10的結合部12;另外,該蒸鍍機30是採用雷射蒸鍍法對該蒸鍍傘架10上的各光學元件91進行蒸鍍,而具有電子束放射器32及設有靶材33的靶材架34,但不以此為限,該蒸鍍機30亦可採用熱電阻加熱法、電子槍蒸鍍法或弧光放電進行蒸鍍作業。The
該自動移動裝置40,包括一充電座41及一與該充電座41電性連結或脫離的自動導引運輸車(Automated Guided Vehicle,AGV)42;該充電座41與該自動導引運輸車42電性連結時得以對該自動導引運輸車42進行充電;該自動導引運輸車42用以運送該蒸鍍傘架10至蒸鍍機30或傘架平台20;本實施例中,該自動導引運輸車42具有一車體421及一能夠升降地設在該車體421且用以運送該蒸鍍傘架10的移料架422,同時該移料架422上亦設有一對呈水平位移且能夠相互靠近或遠離的夾持塊423。The automatic moving
該偵測控制裝置50,用以偵測該傘架平台20、蒸鍍機30與自動移動裝置40,並用以控制該自動導引運輸車42移動;其中該偵測控制裝置50得以透過影像感測、重量感測、紅外線感測等方式偵測該傘架平台20上是否設有蒸鍍傘架10、及/或蒸鍍傘架是否固設有光學元件91,進而產生一相對應的控制指令;該偵測控制裝置50得以訊號傳遞的方式感測該蒸鍍機30內是否有蒸鍍傘架10、蒸鍍作業是否完成等,進而產生一相對應的控制指令;該偵測控制裝置50得以透過影像感測、訊號傳遞等方式偵測該自動移動裝置40,以判斷該充電座41是否與該自動導引運輸車42電性連結或脫離,進而產生一相對應的控制指令。The
藉此,參閱圖1所示,先將該蒸鍍傘架10設置在傘架平台20上後再進行光學元件91的設置,或該光學元件91事先設置設於蒸鍍傘架10上後再置於傘架平台20,當該偵測控制裝置50偵測該傘架平台20上具有該蒸鍍傘架10,且該蒸鍍傘架10上設有該光學元件91時,參閱圖2所示,該偵測控制裝置50產生一相對應的控制指令,進而控制該自動導引運輸車42脫離該充電座41並移動至該傘架平台20,同時控制該自動導引運輸車42的移料架422置入該傘架平台20的透空部21,並控制兩該夾持塊423相互靠近,進而將該蒸鍍傘架10夾固在該移料架422上。Thus, referring to FIG. 1 , the steam-coated
參閱圖3,隨後控制該自動導引運輸車42作動,將該蒸鍍傘架10移至該蒸鍍機30的蒸鍍空間31內,利用移料架422的升降設計,參閱圖4所示,將該蒸鍍傘架10的結合部12結合該蒸鍍空間31的固定部311,隨後控制兩該夾持塊423相互遠離,使該蒸鍍傘架10脫離固定於該移料架422,再控制該蒸鍍機30對該蒸鍍傘架10的各光學元件91進行蒸鍍作業,及控制該自動導引運輸車42電性連結該充電座41進行充電。Referring to FIG. 3 , the automatic guided
當該偵測控制裝置50偵測各該光學元件91蒸鍍完成後,該偵測控制裝置50產生一相對應的控制指令,進而控制該自動導引運輸車42脫離該充電座41並移動至該蒸鍍機30,且利用該移料架422結合固定該蒸鍍傘架10,並使該蒸鍍傘架10的結合部12脫離該蒸鍍空間31的固定部311,隨後控制該自動導引運輸車42移動至該傘架平台20,並將該蒸鍍傘架10置於該傘架平台20,以便進行蒸鍍後光學元件91的卸除,隨後控制該自動導引運輸車42電性連結該充電座,以進行充電及等待下次的位移動作。When the
由上述說明可以得知,藉由該偵測控制裝置50用以偵測該傘架平台20、蒸鍍機30與自動移動裝置40,並用以控制該自動導引運輸車42移動的限定,使得該偵測控制裝置50可以控制該自動導引運輸車42將該傘架平台20上的蒸鍍傘架10自動運送至該蒸鍍機30進行光學元件91的蒸鍍作業,以及將蒸鍍完成後的蒸鍍傘架10自動運送至該傘架平台20進行光學元件91的卸除作業,據此,本發明可有效降低人力的參與,以達到降低人力成本及提升光學元件蒸鍍效率的目的。It can be known from the above description that the
請參閱圖5所示,本發明第二實施例所提供一種光學元件的無人化蒸鍍系統,其與第一實施例不同處在於:Please refer to FIG. 5 , the second embodiment of the present invention provides an unmanned evaporation system for optical components, which is different from the first embodiment in that:
該傘架平台20、蒸鍍機30、及自動移動裝置40為複數個,本實施例係舉各兩個為例。The
參閱圖5及圖6所示,當該偵測控制裝置50偵測該傘架平台20上具有該蒸鍍傘架10,且該蒸鍍傘架10上設有該光學元件91時,該偵測控制裝置50才會控制自動導引運輸車42移動至該傘架平台20,同時該偵測控制裝置50是控制該充電座41電性連結有該自動導引運輸車42進行移動至該傘架平台20,而不會控制正在移動的自動導引運輸車42至該傘架平台20。5 and 6 , when the
參閱圖7所示,隨後將該傘架平台20上的蒸鍍傘架10移至未進行蒸鍍作業的該蒸鍍機30的蒸鍍空間31內,而不會控制該自動導引運輸車42將該蒸鍍傘架10移至正在進行蒸鍍作業的蒸鍍機30內。7 , the steaming
當該偵測控制裝置50偵測各該光學元件91蒸鍍完成後,該偵測控制裝置50是控制該充電座41電性連結有該自動導引運輸車42移動至該蒸鍍機30,而不會控制正在移動的自動導引運輸車42至該傘架平台20,並將該蒸鍍空間31內的蒸鍍傘架10移至未設有該蒸鍍傘架10的傘架平台20,而不會將蒸鍍傘架10移至設有蒸鍍傘架10的傘架平台20上。When the
據此,當該傘架平台20、蒸鍍機30、及自動移動裝置40為複數個時,可透過該偵測控制裝置50進行各該傘架平台20、蒸鍍機30、及自動移動裝置40的偵測,判斷各該傘架平台20有無設有蒸鍍傘架10的狀態、判斷各該蒸鍍機30有無進行蒸鍍作業的狀態、及判斷各該自動移動裝置40的自動導引運輸車42有無進行位移的狀態,進而對該蒸鍍機30及自動導引運輸車42進行最有效率的控制,讓蒸鍍作業效率更為提升。Accordingly, when there are
10…蒸鍍傘架
11…設置部
12…結合部
20…傘架平台
21…透空部
30…蒸鍍機
31…蒸鍍空間
311…固定部
32…電子束放射器
33…靶材
34…靶材架
40…自動移動裝置
41…充電座
42…自動導引運輸車
421…車體
422…移料架
423…夾持塊
50…偵測控制裝置
91…光學元件
10…
圖1是本發明第一實施例的示意圖,顯示傘架平台上設有蒸鍍傘架且自動導引運輸車電性連結充電座的狀態; 圖2是本發明第一實施例的示意圖,顯示自動導引運輸車移動至傘架平台的狀態; 圖3是本發明第一實施例的示意圖,顯示自動導引運輸車將蒸鍍傘架運送至蒸鍍機的狀態; 圖4是本發明第一實施例的示意圖,顯示蒸鍍機對光學元件進行蒸鍍且自動導引運輸車電性連結充電座的狀態; 圖5是本發明第二實施例的示意圖,顯示多個傘架平台上各設有蒸鍍傘架且多台自動導引運輸車各自電性連結一充電座的狀態; 圖6是本發明第二實施例的示意圖,顯示其中一自動導引運輸車移動至其中一傘架平台的狀態;以及 圖7是本發明第二實施例的示意圖,顯示其中一自動導引運輸車將其中一蒸鍍傘架運送至其中一蒸鍍機的狀態。 Figure 1 is a schematic diagram of the first embodiment of the present invention, showing that a steaming umbrella is provided on the umbrella platform and the automatic guided transport vehicle is electrically connected to the charging seat; Figure 2 is a schematic diagram of the first embodiment of the present invention, showing the state of the automatic guided transport vehicle moving to the umbrella platform; Figure 3 is a schematic diagram of the first embodiment of the present invention, showing the state of the automatic guided transport vehicle transporting the steaming umbrella to the steaming machine; Figure 4 is a schematic diagram of the first embodiment of the present invention, showing the state of the steaming machine steaming optical elements and the automatic guided transport vehicle electrically connected to the charging seat; Figure 5 is a schematic diagram of the second embodiment of the present invention, showing that a plurality of umbrella platforms are each provided with a steaming umbrella and a plurality of automatic guided transport vehicles are each electrically connected to a charging seat; FIG6 is a schematic diagram of the second embodiment of the present invention, showing a state where one of the automatic guided transport vehicles moves to one of the umbrella platforms; and FIG7 is a schematic diagram of the second embodiment of the present invention, showing a state where one of the automatic guided transport vehicles transports one of the steaming umbrellas to one of the steaming machines.
10…蒸鍍傘架
11…設置部
12…結合部
20…傘架平台
21…透空部
30…蒸鍍機
31…蒸鍍空間
311…固定部
32…電子束放射器
33…靶材
34…靶材架
40…自動移動裝置
41…充電座
42…自動導引運輸車
421…車體
422…移料架
423…夾持塊
50…偵測控制裝置
91…光學元件
10…
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW111143903A TWI848439B (en) | 2022-11-17 | 2022-11-17 | Unmanned steam plating system for optical components |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW111143903A TWI848439B (en) | 2022-11-17 | 2022-11-17 | Unmanned steam plating system for optical components |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202421551A TW202421551A (en) | 2024-06-01 |
| TWI848439B true TWI848439B (en) | 2024-07-11 |
Family
ID=92540176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW111143903A TWI848439B (en) | 2022-11-17 | 2022-11-17 | Unmanned steam plating system for optical components |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TWI848439B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004099946A (en) * | 2002-09-06 | 2004-04-02 | Shincron:Kk | Thin-film-forming apparatus |
| JP2020036521A (en) * | 2018-08-31 | 2020-03-05 | 株式会社フジキカイ | Charging system of unmanned carrier |
| CN114275706A (en) * | 2021-12-30 | 2022-04-05 | 万津实业(赤壁)有限公司 | Umbrella plate carrying device |
-
2022
- 2022-11-17 TW TW111143903A patent/TWI848439B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004099946A (en) * | 2002-09-06 | 2004-04-02 | Shincron:Kk | Thin-film-forming apparatus |
| JP2020036521A (en) * | 2018-08-31 | 2020-03-05 | 株式会社フジキカイ | Charging system of unmanned carrier |
| CN114275706A (en) * | 2021-12-30 | 2022-04-05 | 万津实业(赤壁)有限公司 | Umbrella plate carrying device |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202421551A (en) | 2024-06-01 |
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