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TWI848439B - Unmanned steam plating system for optical components - Google Patents

Unmanned steam plating system for optical components Download PDF

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Publication number
TWI848439B
TWI848439B TW111143903A TW111143903A TWI848439B TW I848439 B TWI848439 B TW I848439B TW 111143903 A TW111143903 A TW 111143903A TW 111143903 A TW111143903 A TW 111143903A TW I848439 B TWI848439 B TW I848439B
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umbrella
evaporation
platform
rack
umbrella rack
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TW111143903A
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TW202421551A (en
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楊添福
蔡致遠
陳朝鈞
余政達
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澤米科技股份有限公司
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Abstract

An unmanned steam plating system for optical components, which includes an umbrella rack platform for setting a steam plating umbrella rack, a steam plating machine for steam plating optical components on the steam plating umbrella rack, an automatic mobile device having a charging seat and an automatic guide transport vehicle electrically connected or disconnected from the charging seat, and a detection control device for detecting the umbrella rack platform, the steam plating machine and the automatic mobile device and controlling the movement of the automatic guide transport vehicle, since the detection control device can control the automatic guide transport vehicle to automatically transport the steam plating umbrella rack to the steam plating machine for the steam plating operation of the optical components, and to automatically transport the steam plating umbrella rack to the umbrella rack platform for the unloading operation of the optical components, the steam plating efficiency of the optical components can be improved.

Description

光學元件的無人化蒸鍍系統Unmanned Evaporation System for Optical Components

本發明係與光學元件有關,特別是指一種光學元件的無人化蒸鍍系統。The present invention relates to optical components, and more particularly to an unmanned evaporation system for optical components.

光學元件的面形設計是品質的重要參數,也是決定光束品質的主要因素。為了提高光學元件性能,通常需要在光學元件的表面沉積薄膜。而最被廣泛採用的沉積法即是蒸鍍,其藉由物理加熱靶材,將靶材中的粒子激發出來,被激發出來的粒子附著在光學元件的表面便形成了所需要的膜層。The surface design of optical components is an important parameter of quality and the main factor that determines the quality of the beam. In order to improve the performance of optical components, it is usually necessary to deposit a thin film on the surface of the optical component. The most widely used deposition method is evaporation, which physically heats the target material to excite the particles in the target material. The excited particles adhere to the surface of the optical component to form the required film layer.

光學元件在蒸鍍的流程中,必須先將待鍍膜光學元件固設在傘架平台的鍍膜傘架上,隨後將固設有光學元件的鍍膜傘架移至蒸鍍機內進行蒸鍍作業,待蒸鍍作業完成後再將鍍膜傘架移至傘架平台進行鍍後處理、檢測等步驟。然而,就蒸鍍效率而言,其除了須依靠人力將光學元件設置於鍍膜傘架或將光學元件於鍍膜傘架上取下之外,更必須仰賴人員將固設有光學元件的鍍膜傘架移至蒸鍍機、以及將蒸鍍作業完成後的鍍膜傘架移至傘架平台,如此過多人力的參與,除了耗費人力增加人力成本之外,更凸顯出光學元件蒸鍍效率不佳的缺陷。During the evaporation process of optical components, the optical components to be coated must first be fixed on the coating umbrella on the umbrella platform, and then the coated umbrella with the optical components fixed is moved to the evaporator for evaporation. After the evaporation operation is completed, the coated umbrella is moved to the umbrella platform for post-coating treatment, testing and other steps. However, in terms of evaporation efficiency, in addition to relying on manpower to place optical components on or remove optical components from the coating umbrella rack, it is also necessary to rely on personnel to move the coating umbrella rack with optical components fixed to the evaporator, and to move the coated umbrella rack to the umbrella rack platform after the evaporation operation is completed. Such excessive manpower participation not only consumes manpower and increases labor costs, but also highlights the defect of poor evaporation efficiency of optical components.

本發明的目的係在於提供一種能解決上述其中之一問題的光學元件的無人化蒸鍍系統,藉以降低人力成本或提升光學元件蒸鍍效率。The purpose of the present invention is to provide an unmanned evaporation system for optical components that can solve one of the above problems, thereby reducing labor costs or improving the efficiency of optical component evaporation.

為達前述目的,本發明係一種光學元件的無人化蒸鍍系統,適用於自動帶動一蒸鍍傘架位移,該蒸鍍傘架具有複數設置部,各該設置部供一光學元件設置或設置後卸除,該光學元件的無人化蒸鍍系統包含:一傘架平台,供該蒸鍍傘架設置;一蒸鍍機,具有一蒸鍍空間,用以對該蒸鍍傘架上的各光學元件蒸鍍;一自動移動裝置,包括一充電座及一與該充電座電性連結或脫離的自動導引運輸車,該自動導引運輸車用以運送該蒸鍍傘架至蒸鍍機或傘架平台;以及一偵測控制裝置,用以偵測該傘架平台、蒸鍍機與自動移動裝置,並用以控制該自動導引運輸車移動;To achieve the above-mentioned purpose, the present invention is an unmanned evaporation system for optical components, which is suitable for automatically driving a evaporation umbrella rack to move. The evaporation umbrella rack has a plurality of setting parts, each of which is used to set an optical component or remove it after setting. The unmanned evaporation system for optical components includes: an umbrella rack platform for setting the evaporation umbrella rack; a evaporation machine having a evaporation space for evaporating the evaporation umbrella rack; The invention relates to an automatic moving device, comprising a charging base and an automatic guided transport vehicle electrically connected to or disconnected from the charging base, the automatic guided transport vehicle being used to transport the vaporized umbrella to the vaporizer or umbrella platform; and a detection control device being used to detect the umbrella platform, the vaporizer and the automatic moving device, and to control the movement of the automatic guided transport vehicle;

藉此,當該偵測控制裝置偵測該傘架平台上具有該蒸鍍傘架,且該蒸鍍傘架上設有該光學元件時,該偵測控制裝置控制該自動導引運輸車脫離該充電座並移動至該傘架平台,隨後將該傘架平台上的蒸鍍傘架移至該蒸鍍機的蒸鍍空間內,隨後控制該自動導引運輸車電性連結該充電座及控制該蒸鍍機對該蒸鍍傘架的各光學元件蒸鍍;當該偵測控制裝置偵測各該光學元件蒸鍍完成後,該偵測控制裝置控制該自動導引運輸車脫離該充電座並移動至該蒸鍍機,隨後將該蒸鍍空間內的蒸鍍傘架移至該傘架平台,並將該蒸鍍傘架置於該傘架平台,隨後控制該自動導引運輸車電性連結該充電座。Thus, when the detection control device detects that the steam-coated umbrella rack is on the umbrella rack platform and the optical element is disposed on the steam-coated umbrella rack, the detection control device controls the automatic guided transport vehicle to detach from the charging base and move to the umbrella rack platform, then moves the steam-coated umbrella rack on the umbrella rack platform into the steaming space of the steam-coating machine, and then controls the automatic guided transport vehicle to electrically connect to the charging base and control the steam-coated umbrella rack to move to the charging base. The coating machine coats each optical component of the coating umbrella; when the detection control device detects that the coating of each optical component is completed, the detection control device controls the automatic guided transport vehicle to detach from the charging base and move to the coating machine, then moves the coating umbrella in the coating space to the umbrella platform, and places the coating umbrella on the umbrella platform, and then controls the automatic guided transport vehicle to electrically connect to the charging base.

本發明功效在於:藉由該偵測控制裝置用以偵測該傘架平台、蒸鍍機與自動移動裝置,並用以控制該自動導引運輸車移動的限定,使得該偵測控制裝置得以控制該自動導引運輸車將該傘架平台上的蒸鍍傘架自動運送至該蒸鍍機進行光學元件的蒸鍍作業,以及將蒸鍍完成後的蒸鍍傘架自動運送至該傘架平台進行光學元件的卸除作業,據此,本發明得以降低人力成本或提升光學元件蒸鍍效率。The utility model discloses a method for detecting the umbrella platform, the evaporator and the automatic moving device by using the detection control device to detect the umbrella platform, the evaporator and the automatic moving device, and to control the movement limit of the automatic guided transport vehicle, so that the detection control device can control the automatic guided transport vehicle to automatically transport the evaporation umbrella on the umbrella platform to the evaporator for evaporation of optical components, and to automatically transport the evaporation umbrella after evaporation to the umbrella platform for unloading of optical components. Therefore, the labor cost can be reduced or the efficiency of evaporation of optical components can be improved.

較佳地,其中該蒸鍍傘架還具有一結合部,該蒸鍍機的蒸鍍空間具有一固定部,該固定部用以結合或脫離該蒸鍍傘架的結合部。Preferably, the steam-coated umbrella stand further has a coupling portion, and the steam-coating space of the steam-coating machine has a fixing portion, and the fixing portion is used to couple with or detach from the coupling portion of the steam-coated umbrella stand.

較佳地,其中該自動導引運輸車具有一車體及一能夠升降地設在該車體且用以運送該蒸鍍傘架的移料架。Preferably, the automatic guided transport vehicle has a vehicle body and a material transfer rack which is movably mounted on the vehicle body and is used to transport the steaming umbrella rack.

較佳地,其中該傘架平台、蒸鍍機、及自動移動裝置為複數個;當該偵測控制裝置偵測該傘架平台上具有該蒸鍍傘架,且該蒸鍍傘架上設有該光學元件時,該偵測控制裝置是控制該充電座電性連結有該自動導引運輸車進行移動至該傘架平台,隨後將該傘架平台上的蒸鍍傘架移至未設有蒸鍍傘架的該蒸鍍機的蒸鍍空間內,當該偵測控制裝置偵測各該光學元件蒸鍍完成後,該偵測控制裝置是控制該充電座電性連結有該自動導引運輸車進行移動至該蒸鍍機,並將該蒸鍍空間內的蒸鍍傘架移至未設有該蒸鍍傘架的該傘架平台。Preferably, the umbrella platform, the steam coating machine, and the automatic moving device are plural; when the detection control device detects that the steam coating umbrella is on the umbrella platform and the optical element is provided on the steam coating umbrella, the detection control device controls the charging stand to be electrically connected to the automatic guided transport vehicle to move to the umbrella platform, and then the umbrella platform is placed on the umbrella platform. The steaming umbrella rack is moved to the steaming space of the steaming machine without the steaming umbrella rack. When the detection control device detects that the steaming of each optical component is completed, the detection control device controls the charging base to be electrically connected to the automatic guided transport vehicle to move to the steaming machine, and moves the steaming umbrella rack in the steaming space to the umbrella rack platform without the steaming umbrella rack.

請參閱圖1所示,本發明第一實施例所提供一種光學元件的無人化蒸鍍系統,適用於自動帶動一蒸鍍傘架10位移,該蒸鍍傘架10具有複數設置部11及一結合部12,各該設置部11供一光學元件91設置或設置後卸除,該光學元件的無人化蒸鍍系統主要是由一傘架平台20、一蒸鍍機30、一自動移動裝置40、以及一偵測控制裝置50所組成,其中:Referring to FIG. 1 , the first embodiment of the present invention provides an unmanned evaporation system for optical components, which is suitable for automatically driving a evaporation umbrella 10 to move. The evaporation umbrella 10 has a plurality of installation parts 11 and a coupling part 12. Each of the installation parts 11 is used to install an optical component 91 or remove it after installation. The unmanned evaporation system for optical components is mainly composed of an umbrella platform 20, a evaporation machine 30, an automatic moving device 40, and a detection control device 50, wherein:

該傘架平台20,供該蒸鍍傘架10設置;本實施例中,該傘架平台20的台面具有一透空部21。The umbrella stand platform 20 is used to place the steam-bonded umbrella stand 10 . In this embodiment, a hollow portion 21 is formed on the surface of the umbrella stand platform 20 .

該蒸鍍機30,具有一蒸鍍空間31,用以對該蒸鍍傘架10上的各光學元件91蒸鍍;本實施例中,該蒸鍍空間31具有一固定部311,該固定部311用以結合或脫離該蒸鍍傘架10的結合部12;另外,該蒸鍍機30是採用雷射蒸鍍法對該蒸鍍傘架10上的各光學元件91進行蒸鍍,而具有電子束放射器32及設有靶材33的靶材架34,但不以此為限,該蒸鍍機30亦可採用熱電阻加熱法、電子槍蒸鍍法或弧光放電進行蒸鍍作業。The evaporator 30 has a evaporation space 31 for evaporating the optical elements 91 on the evaporation umbrella 10. In this embodiment, the evaporation space 31 has a fixing portion 311, and the fixing portion 311 is used to combine or detach from the combining portion 12 of the evaporation umbrella 10. In addition, the evaporator 30 uses a laser evaporation method to evaporate the optical elements 91 on the evaporation umbrella 10, and has an electron beam radiator 32 and a target material rack 34 provided with a target material 33, but is not limited to this. The evaporator 30 can also use a thermal resistance heating method, an electron gun evaporation method or arc discharge to perform the evaporation operation.

該自動移動裝置40,包括一充電座41及一與該充電座41電性連結或脫離的自動導引運輸車(Automated Guided Vehicle,AGV)42;該充電座41與該自動導引運輸車42電性連結時得以對該自動導引運輸車42進行充電;該自動導引運輸車42用以運送該蒸鍍傘架10至蒸鍍機30或傘架平台20;本實施例中,該自動導引運輸車42具有一車體421及一能夠升降地設在該車體421且用以運送該蒸鍍傘架10的移料架422,同時該移料架422上亦設有一對呈水平位移且能夠相互靠近或遠離的夾持塊423。The automatic moving device 40 includes a charging base 41 and an automated guided vehicle (AGV) 42 electrically connected to or detached from the charging base 41; when the charging base 41 is electrically connected to the AGV 42, the AGV 42 can be charged; the AGV 42 is used to transport the steaming umbrella rack 10 to the steaming machine 30 or the umbrella rack platform 20; in this embodiment, the AGV 42 has a body 421 and a material transfer rack 422 that can be lifted and lowered on the body 421 and is used to transport the steaming umbrella rack 10, and a pair of clamping blocks 423 that are horizontally displaced and can move closer to or farther away from each other are also provided on the material transfer rack 422.

該偵測控制裝置50,用以偵測該傘架平台20、蒸鍍機30與自動移動裝置40,並用以控制該自動導引運輸車42移動;其中該偵測控制裝置50得以透過影像感測、重量感測、紅外線感測等方式偵測該傘架平台20上是否設有蒸鍍傘架10、及/或蒸鍍傘架是否固設有光學元件91,進而產生一相對應的控制指令;該偵測控制裝置50得以訊號傳遞的方式感測該蒸鍍機30內是否有蒸鍍傘架10、蒸鍍作業是否完成等,進而產生一相對應的控制指令;該偵測控制裝置50得以透過影像感測、訊號傳遞等方式偵測該自動移動裝置40,以判斷該充電座41是否與該自動導引運輸車42電性連結或脫離,進而產生一相對應的控制指令。The detection control device 50 is used to detect the umbrella platform 20, the steam-coating machine 30 and the automatic moving device 40, and to control the movement of the automatic guided vehicle 42; wherein the detection control device 50 can detect whether the steam-coating umbrella platform 20 is provided with a steam-coating umbrella 10 and/or whether the steam-coating umbrella is fixed with an optical element 91 by means of image sensing, weight sensing, infrared sensing, etc., and then generate a corresponding control instruction; The detection control device 50 can sense whether there is a steaming umbrella 10 in the steaming machine 30, whether the steaming operation is completed, etc. by signal transmission, and then generate a corresponding control instruction; the detection control device 50 can detect the automatic moving device 40 by image sensing, signal transmission, etc. to determine whether the charging stand 41 is electrically connected or disconnected from the automatic guided transport vehicle 42, and then generate a corresponding control instruction.

藉此,參閱圖1所示,先將該蒸鍍傘架10設置在傘架平台20上後再進行光學元件91的設置,或該光學元件91事先設置設於蒸鍍傘架10上後再置於傘架平台20,當該偵測控制裝置50偵測該傘架平台20上具有該蒸鍍傘架10,且該蒸鍍傘架10上設有該光學元件91時,參閱圖2所示,該偵測控制裝置50產生一相對應的控制指令,進而控制該自動導引運輸車42脫離該充電座41並移動至該傘架平台20,同時控制該自動導引運輸車42的移料架422置入該傘架平台20的透空部21,並控制兩該夾持塊423相互靠近,進而將該蒸鍍傘架10夾固在該移料架422上。Thus, referring to FIG. 1 , the steam-coated umbrella stand 10 is first placed on the umbrella stand platform 20 and then the optical element 91 is placed, or the optical element 91 is pre-placed on the steam-coated umbrella stand 10 and then placed on the umbrella stand platform 20. When the detection control device 50 detects that the umbrella stand platform 20 has the steam-coated umbrella stand 10 and the optical element 91 is placed on the steam-coated umbrella stand 10, referring to FIG. 2 The detection control device 50 generates a corresponding control command, thereby controlling the automatic guided transport vehicle 42 to detach from the charging base 41 and move to the umbrella stand platform 20, and at the same time controls the material transfer rack 422 of the automatic guided transport vehicle 42 to be placed into the hollow portion 21 of the umbrella stand platform 20, and controls the two clamping blocks 423 to approach each other, thereby clamping the steamed umbrella stand 10 on the material transfer rack 422.

參閱圖3,隨後控制該自動導引運輸車42作動,將該蒸鍍傘架10移至該蒸鍍機30的蒸鍍空間31內,利用移料架422的升降設計,參閱圖4所示,將該蒸鍍傘架10的結合部12結合該蒸鍍空間31的固定部311,隨後控制兩該夾持塊423相互遠離,使該蒸鍍傘架10脫離固定於該移料架422,再控制該蒸鍍機30對該蒸鍍傘架10的各光學元件91進行蒸鍍作業,及控制該自動導引運輸車42電性連結該充電座41進行充電。Referring to FIG. 3 , the automatic guided transport vehicle 42 is then controlled to move the vaporization umbrella stand 10 into the vaporization space 31 of the vaporization machine 30 . By utilizing the lifting design of the material transfer rack 422 , as shown in FIG. 4 , the coupling portion 12 of the vaporization umbrella stand 10 is coupled to the fixed portion 311 of the vaporization space 31 . The two clamping blocks 423 are then controlled to move away from each other so that the vaporization umbrella stand 10 is detached from being fixed to the material transfer rack 422 . The vaporization machine 30 is then controlled to perform vaporization operations on the optical elements 91 of the vaporization umbrella stand 10 , and the automatic guided transport vehicle 42 is controlled to electrically connect to the charging stand 41 for charging.

當該偵測控制裝置50偵測各該光學元件91蒸鍍完成後,該偵測控制裝置50產生一相對應的控制指令,進而控制該自動導引運輸車42脫離該充電座41並移動至該蒸鍍機30,且利用該移料架422結合固定該蒸鍍傘架10,並使該蒸鍍傘架10的結合部12脫離該蒸鍍空間31的固定部311,隨後控制該自動導引運輸車42移動至該傘架平台20,並將該蒸鍍傘架10置於該傘架平台20,以便進行蒸鍍後光學元件91的卸除,隨後控制該自動導引運輸車42電性連結該充電座,以進行充電及等待下次的位移動作。When the detection control device 50 detects that the vaporization of each optical element 91 is completed, the detection control device 50 generates a corresponding control command, thereby controlling the automatic guided transport vehicle 42 to separate from the charging base 41 and move to the vaporization machine 30, and use the material transfer rack 422 to combine and fix the vaporization umbrella rack 10, and make the combination portion 12 of the vaporization umbrella rack 10 The fixed portion 311 of the evaporation space 31 is separated, and then the automatic guided transport vehicle 42 is controlled to move to the umbrella platform 20, and the evaporation umbrella 10 is placed on the umbrella platform 20 to remove the optical element 91 after evaporation, and then the automatic guided transport vehicle 42 is controlled to be electrically connected to the charging base to charge and wait for the next displacement action.

由上述說明可以得知,藉由該偵測控制裝置50用以偵測該傘架平台20、蒸鍍機30與自動移動裝置40,並用以控制該自動導引運輸車42移動的限定,使得該偵測控制裝置50可以控制該自動導引運輸車42將該傘架平台20上的蒸鍍傘架10自動運送至該蒸鍍機30進行光學元件91的蒸鍍作業,以及將蒸鍍完成後的蒸鍍傘架10自動運送至該傘架平台20進行光學元件91的卸除作業,據此,本發明可有效降低人力的參與,以達到降低人力成本及提升光學元件蒸鍍效率的目的。It can be known from the above description that the detection control device 50 is used to detect the umbrella platform 20, the evaporator 30 and the automatic moving device 40, and to control the movement limit of the automatic guided transport vehicle 42, so that the detection control device 50 can control the automatic guided transport vehicle 42 to automatically transport the evaporation umbrella 10 on the umbrella platform 20 to the evaporator 30 for the evaporation operation of the optical element 91, and automatically transport the evaporation umbrella 10 after the evaporation is completed to the umbrella platform 20 for the unloading operation of the optical element 91. Accordingly, the present invention can effectively reduce the participation of manpower, so as to achieve the purpose of reducing labor costs and improving the efficiency of optical element evaporation.

請參閱圖5所示,本發明第二實施例所提供一種光學元件的無人化蒸鍍系統,其與第一實施例不同處在於:Please refer to FIG. 5 , the second embodiment of the present invention provides an unmanned evaporation system for optical components, which is different from the first embodiment in that:

該傘架平台20、蒸鍍機30、及自動移動裝置40為複數個,本實施例係舉各兩個為例。The umbrella platform 20, the evaporator 30, and the automatic moving device 40 are plural in number, and this embodiment takes two of each as an example.

參閱圖5及圖6所示,當該偵測控制裝置50偵測該傘架平台20上具有該蒸鍍傘架10,且該蒸鍍傘架10上設有該光學元件91時,該偵測控制裝置50才會控制自動導引運輸車42移動至該傘架平台20,同時該偵測控制裝置50是控制該充電座41電性連結有該自動導引運輸車42進行移動至該傘架平台20,而不會控制正在移動的自動導引運輸車42至該傘架平台20。5 and 6 , when the detection control device 50 detects that the steam-bonded umbrella rack 10 is on the umbrella rack platform 20 and the optical element 91 is disposed on the steam-bonded umbrella rack 10, the detection control device 50 will control the automatic guided transport vehicle 42 to move to the umbrella rack platform 20. At the same time, the detection control device 50 controls the charging stand 41 to be electrically connected to the automatic guided transport vehicle 42 to move to the umbrella rack platform 20, and will not control the moving automatic guided transport vehicle 42 to the umbrella rack platform 20.

參閱圖7所示,隨後將該傘架平台20上的蒸鍍傘架10移至未進行蒸鍍作業的該蒸鍍機30的蒸鍍空間31內,而不會控制該自動導引運輸車42將該蒸鍍傘架10移至正在進行蒸鍍作業的蒸鍍機30內。7 , the steaming umbrella 10 on the umbrella platform 20 is then moved to the steaming space 31 of the steaming machine 30 where the steaming operation is not being performed, and the automatic guided vehicle 42 is not controlled to move the steaming umbrella 10 to the steaming machine 30 where the steaming operation is being performed.

當該偵測控制裝置50偵測各該光學元件91蒸鍍完成後,該偵測控制裝置50是控制該充電座41電性連結有該自動導引運輸車42移動至該蒸鍍機30,而不會控制正在移動的自動導引運輸車42至該傘架平台20,並將該蒸鍍空間31內的蒸鍍傘架10移至未設有該蒸鍍傘架10的傘架平台20,而不會將蒸鍍傘架10移至設有蒸鍍傘架10的傘架平台20上。When the detection control device 50 detects that the vaporization of each optical element 91 is completed, the detection control device 50 controls the charging stand 41 to be electrically connected to the automatic guided transport vehicle 42 to move to the vaporizer 30, but does not control the moving automatic guided transport vehicle 42 to the umbrella rack platform 20, and moves the vaporized umbrella rack 10 in the vaporization space 31 to the umbrella rack platform 20 where the vaporized umbrella rack 10 is not provided, but does not move the vaporized umbrella rack 10 to the umbrella rack platform 20 where the vaporized umbrella rack 10 is provided.

據此,當該傘架平台20、蒸鍍機30、及自動移動裝置40為複數個時,可透過該偵測控制裝置50進行各該傘架平台20、蒸鍍機30、及自動移動裝置40的偵測,判斷各該傘架平台20有無設有蒸鍍傘架10的狀態、判斷各該蒸鍍機30有無進行蒸鍍作業的狀態、及判斷各該自動移動裝置40的自動導引運輸車42有無進行位移的狀態,進而對該蒸鍍機30及自動導引運輸車42進行最有效率的控制,讓蒸鍍作業效率更為提升。Accordingly, when there are plural umbrella platforms 20, evaporators 30, and automatic moving devices 40, the detection control device 50 can be used to detect each of the umbrella platforms 20, evaporators 30, and automatic moving devices 40, to determine whether each umbrella platform 20 is equipped with a evaporation umbrella 10, to determine whether each evaporator 30 is performing a evaporation operation, and to determine whether the automatic guided vehicle 42 of each automatic moving device 40 is in a displacement state, thereby performing the most efficient control on the evaporator 30 and the automatic guided vehicle 42, so as to further improve the efficiency of the evaporation operation.

10…蒸鍍傘架 11…設置部 12…結合部 20…傘架平台 21…透空部 30…蒸鍍機 31…蒸鍍空間 311…固定部 32…電子束放射器 33…靶材 34…靶材架 40…自動移動裝置 41…充電座 42…自動導引運輸車 421…車體 422…移料架 423…夾持塊 50…偵測控制裝置 91…光學元件 10…Evaporation umbrella rack 11…Setting unit 12…Joining unit 20…Umbrella rack platform 21…Opening unit 30…Evaporation machine 31…Evaporation space 311…Fixed unit 32…Electron beam emitter 33…Target 34…Target rack 40…Automatic moving device 41…Charging station 42…Automatic guided transport vehicle 421…Car body 422…Transfer rack 423…Clamping block 50…Detection control device 91…Optical element

圖1是本發明第一實施例的示意圖,顯示傘架平台上設有蒸鍍傘架且自動導引運輸車電性連結充電座的狀態; 圖2是本發明第一實施例的示意圖,顯示自動導引運輸車移動至傘架平台的狀態; 圖3是本發明第一實施例的示意圖,顯示自動導引運輸車將蒸鍍傘架運送至蒸鍍機的狀態; 圖4是本發明第一實施例的示意圖,顯示蒸鍍機對光學元件進行蒸鍍且自動導引運輸車電性連結充電座的狀態; 圖5是本發明第二實施例的示意圖,顯示多個傘架平台上各設有蒸鍍傘架且多台自動導引運輸車各自電性連結一充電座的狀態; 圖6是本發明第二實施例的示意圖,顯示其中一自動導引運輸車移動至其中一傘架平台的狀態;以及 圖7是本發明第二實施例的示意圖,顯示其中一自動導引運輸車將其中一蒸鍍傘架運送至其中一蒸鍍機的狀態。 Figure 1 is a schematic diagram of the first embodiment of the present invention, showing that a steaming umbrella is provided on the umbrella platform and the automatic guided transport vehicle is electrically connected to the charging seat; Figure 2 is a schematic diagram of the first embodiment of the present invention, showing the state of the automatic guided transport vehicle moving to the umbrella platform; Figure 3 is a schematic diagram of the first embodiment of the present invention, showing the state of the automatic guided transport vehicle transporting the steaming umbrella to the steaming machine; Figure 4 is a schematic diagram of the first embodiment of the present invention, showing the state of the steaming machine steaming optical elements and the automatic guided transport vehicle electrically connected to the charging seat; Figure 5 is a schematic diagram of the second embodiment of the present invention, showing that a plurality of umbrella platforms are each provided with a steaming umbrella and a plurality of automatic guided transport vehicles are each electrically connected to a charging seat; FIG6 is a schematic diagram of the second embodiment of the present invention, showing a state where one of the automatic guided transport vehicles moves to one of the umbrella platforms; and FIG7 is a schematic diagram of the second embodiment of the present invention, showing a state where one of the automatic guided transport vehicles transports one of the steaming umbrellas to one of the steaming machines.

10…蒸鍍傘架 11…設置部 12…結合部 20…傘架平台 21…透空部 30…蒸鍍機 31…蒸鍍空間 311…固定部 32…電子束放射器 33…靶材 34…靶材架 40…自動移動裝置 41…充電座 42…自動導引運輸車 421…車體 422…移料架 423…夾持塊 50…偵測控制裝置 91…光學元件 10…Evaporation umbrella rack 11…Setting unit 12…Joining unit 20…Umbrella rack platform 21…Opening unit 30…Evaporation machine 31…Evaporation space 311…Fixed unit 32…Electron beam emitter 33…Target 34…Target rack 40…Automatic moving device 41…Charging station 42…Automatic guided transport vehicle 421…Car body 422…Transfer rack 423…Clamping block 50…Detection control device 91…Optical element

Claims (3)

一種光學元件的無人化蒸鍍系統,適用於自動帶動一蒸鍍傘架位移,該蒸鍍傘架具有複數設置部,各該設置部供一光學元件設置或設置後卸除,該光學元件的無人化蒸鍍系統包含:一傘架平台,供該蒸鍍傘架設置,該傘架平台的台面具有一透空部;一蒸鍍機,具有一蒸鍍空間,用以對該蒸鍍傘架上的各該光學元件蒸鍍;一自動移動裝置,包括一充電座及一與該充電座電性連結或脫離的自動導引運輸車,該自動導引運輸車用以運送該蒸鍍傘架至該蒸鍍機或該傘架平台,該自動導引運輸車具有一車體及一能夠升降地設在該車體且用以運送該蒸鍍傘架的移料架,該移料架上設有一對呈水平位移且能夠相互靠近或遠離的夾持塊;以及一偵測控制裝置,用以偵測該傘架平台、該蒸鍍機與該自動移動裝置,並用以控制該自動導引運輸車移動;藉此,當該偵測控制裝置偵測該傘架平台上具有該蒸鍍傘架,且該蒸鍍傘架上設有該光學元件時,該偵測控制裝置控制該自動導引運輸車脫離該充電座並移動至該傘架平台,同時控制該自動導引運輸車的移料架置入該傘架平台的透空部,並控制兩該夾持塊相互靠近,進而將該蒸鍍傘架夾固在該移料架上,隨後將該傘架平台上的該蒸鍍傘架移至該蒸鍍機的該蒸鍍空間內,隨後控制該自動導引運輸車電性連結該充電座及控制該蒸鍍機對該蒸鍍傘架的各該光學元件蒸鍍;當該偵測控制裝置偵測各該光學元件蒸鍍完成後,該偵測控制裝置控制該自動導引運輸車脫離該充電座並移動至該蒸鍍機,隨後將該蒸鍍空間內的該蒸鍍 傘架移至該傘架平台,並將該蒸鍍傘架置於該傘架平台,隨後控制該自動導引運輸車電性連結該充電座。 An unmanned evaporation system for optical components is suitable for automatically driving a evaporation umbrella rack to move. The evaporation umbrella rack has a plurality of installation parts, each of which is used to install an optical component or remove it after installation. The unmanned evaporation system for optical components includes: an umbrella rack platform for installing the evaporation umbrella rack, and the table surface of the umbrella rack platform has a hollow part; a evaporation machine, having a evaporation space, for evaporating each optical component on the evaporation umbrella rack; an automatic moving device, including a charging seat and a charging station connected to the charging station. The invention relates to an automatic guided transport vehicle which is electrically connected or disconnected from the seat, and is used to transport the steam-coated umbrella rack to the steam-coating machine or the umbrella rack platform. The automatic guided transport vehicle has a vehicle body and a material transfer frame which can be lifted and lowered on the vehicle body and is used to transport the steam-coated umbrella rack, and the material transfer frame is provided with a pair of clamping blocks which are horizontally displaced and can be moved closer to or farther away from each other; and a detection control device, which is used to detect the umbrella rack platform, the steam-coating machine and the automatic moving device, and is used to control the movement of the automatic guided transport vehicle. Thus, when the detection control device detects that there is the steam-coated umbrella rack on the umbrella rack platform and the optical element is disposed on the steam-coated umbrella rack, the detection control device controls the automatic guided transport vehicle to detach from the charging seat and move to the umbrella rack platform, and at the same time controls the material transfer rack of the automatic guided transport vehicle to be placed in the hollow portion of the umbrella rack platform, and controls the two clamping blocks to approach each other, thereby clamping the steam-coated umbrella rack on the material transfer rack, and then moving the steam-coated umbrella rack on the umbrella rack platform to the steam-coating machine. The detection control device controls the automatic guided transport vehicle to electrically connect to the charging seat and controls the evaporation machine to evaporation each optical component of the evaporation umbrella in the evaporation space; when the detection control device detects that the evaporation of each optical component is completed, the detection control device controls the automatic guided transport vehicle to detach from the charging seat and move to the evaporation machine, and then moves the evaporation umbrella in the evaporation space to the umbrella platform, and places the evaporation umbrella on the umbrella platform, and then controls the automatic guided transport vehicle to electrically connect to the charging seat. 如請求項1所述之光學元件的無人化蒸鍍系統,其中該蒸鍍傘架還具有一結合部,該蒸鍍機的該蒸鍍空間具有一固定部,該固定部用以結合或脫離該蒸鍍傘架的該結合部。 The unmanned evaporation system for optical components as described in claim 1, wherein the evaporation umbrella also has a coupling portion, and the evaporation space of the evaporator has a fixing portion, and the fixing portion is used to couple or detach from the coupling portion of the evaporation umbrella. 如請求項1所述之光學元件的無人化蒸鍍系統,其中該傘架平台、該蒸鍍機、及該自動移動裝置為複數個;當該偵測控制裝置偵測該傘架平台上具有該蒸鍍傘架,且該蒸鍍傘架上設有該光學元件時,該偵測控制裝置是控制該充電座電性連結有該自動導引運輸車進行移動至該傘架平台,隨後將該傘架平台上的該蒸鍍傘架移至未設有該蒸鍍傘架的該蒸鍍機的該蒸鍍空間內,當該偵測控制裝置偵測各該光學元件蒸鍍完成後,該偵測控制裝置是控制該充電座電性連結有該自動導引運輸車進行移動至該蒸鍍機,並將該蒸鍍空間內的該蒸鍍傘架移至未設有該蒸鍍傘架的該傘架平台。 The unmanned vaporization system of optical components as described in claim 1, wherein the umbrella platform, the vaporization machine, and the automatic moving device are plural; when the detection control device detects that the vaporization umbrella is on the umbrella platform and the optical component is arranged on the vaporization umbrella, the detection control device controls the charging stand to be electrically connected to the automatic guided transport vehicle to move to the umbrella platform, and then The steaming umbrella rack on the umbrella rack platform is moved to the steaming space of the steaming machine without the steaming umbrella rack. When the detection control device detects that the steaming of each optical element is completed, the detection control device controls the charging stand to be electrically connected to the automatic guided transport vehicle to move to the steaming machine, and moves the steaming umbrella rack in the steaming space to the umbrella rack platform without the steaming umbrella rack.
TW111143903A 2022-11-17 2022-11-17 Unmanned steam plating system for optical components TWI848439B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004099946A (en) * 2002-09-06 2004-04-02 Shincron:Kk Thin-film-forming apparatus
JP2020036521A (en) * 2018-08-31 2020-03-05 株式会社フジキカイ Charging system of unmanned carrier
CN114275706A (en) * 2021-12-30 2022-04-05 万津实业(赤壁)有限公司 Umbrella plate carrying device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004099946A (en) * 2002-09-06 2004-04-02 Shincron:Kk Thin-film-forming apparatus
JP2020036521A (en) * 2018-08-31 2020-03-05 株式会社フジキカイ Charging system of unmanned carrier
CN114275706A (en) * 2021-12-30 2022-04-05 万津实业(赤壁)有限公司 Umbrella plate carrying device

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