TWI730779B - Patterned shielding structure and integrated inductor - Google Patents

Abstract

A patterned shielding structure is disposed between an inductor structure and a substrate. The patterned shielding structure includes a shielding layer. The shielding layer includes a first main portion and a plurality of branch portions. The first main portion has a T shape. The branch portions are connected to the first main portion.

Description

Patterned shield structure and integrated inductor

The content of the embodiments described in this disclosure is related to a semiconductor technology, and particularly to a patterned shielding structure and an integrated inductor.

With the development of integrated circuit technology, the size of electronic components in integrated circuits is getting smaller and smaller. However, as the size of electronic components gets smaller and smaller, it may be accompanied by many negative effects. For example, when the inductor is operating, the eddy current generated by the substrate will affect the quality factor (Q value) of the inductor.

It can be seen that the existing methods still have inconveniences and shortcomings, which need to be improved. In order to solve the above-mentioned problems, the related fields have tried their best to find a solution, but the appropriate solution has not been developed for a long time.

Some embodiments of the present disclosure are related to a patterned shielding structure. The patterned shielding structure is disposed between an inductor structure and a substrate. The patterned shielding structure includes a shielding layer. The shielding layer includes a first main part and a plurality of branches. The first main cadre is in a T shape. These branch cadres connect to the first main cadre.

Some embodiments of the present disclosure are related to an integrated inductor. The integrated inductor includes a substrate, an inductor structure, and a patterned shield structure. The patterned shielding structure is disposed between the inductor structure and the substrate. The patterned shielding structure includes a shielding layer. The shielding layer includes a first main part and a plurality of branches. The first main stem is T-shaped and connects with the branches.

In summary, the patterned shielding structure of the present disclosure has a better shielding effect.

The following is a detailed description of the embodiments with the accompanying drawings, but the provided embodiments are not used to limit the scope of the present disclosure, and the description of the structure operation is not used to limit the order of execution, any recombination of components The structure and the devices with equal effects are all within the scope of this disclosure. In addition, the drawings are for illustrative purposes only, and are not drawn in accordance with the original dimensions. To facilitate understanding, the same elements or similar elements in the following description will be described with the same symbols.

In this case, unless the article is specifically limited in the article, "一" and "the" can generally refer to one or more. It will be further understood that the terms "include", "include", "have" and similar words used in this article indicate the recorded features, regions, integers, steps, operations, elements and/or components, but do not exclude The described or additional one or more other features, regions, integers, steps, operations, elements, components, and/or groups thereof.

Refer to Figure 1. FIG. 1 is a schematic diagram of an integrated inductor 100 according to some embodiments of the present disclosure. Taking the example of FIG. 1 as an example, the integrated inductor 100 includes a substrate 120, an inductor structure 140 and a patterned shielding structure 160.

As shown in FIG. 1, the substrate 120, the inductor structure 140, and the patterned shielding structure 160 are arranged on a plane formed by the direction X and the direction Y, where the direction X is perpendicular to the direction Y. In some embodiments, the substrate 120, the inductor structure 140, and the patterned shielding structure 160 may be aligned in a direction Z, where the direction Z is perpendicular to the direction X and the direction Y.

Please refer to Figure 1 and Figure 2 together. FIG. 2 is a schematic diagram of the inductor structure 140A according to some embodiments of the present disclosure. In some embodiments, the inductor structure 140A in FIG. 2 is used to implement the inductor structure 140 in FIG. 1, but the present disclosure is not limited thereto. In some embodiments, the inductor structure 140 is applied to a differential signal.

As shown in Figure 2, the inductor structure 140 has a spiral shape. An opening O is formed in the inductor structure 140. The two sides of the opening O are respectively a metal segment S1 and a metal segment S2. In some related technologies, if a patterned shielding structure is not provided between the substrate 120 and the inductor structure 140, the magnetic field generated during the operation of the inductor structure 140 will cause an eddy current to be generated on the substrate 120. The eddy current will affect the quality factor value (Q value) of the inductor structure 140.

However, in Figure 1, a patterned shield structure 160 is provided between the substrate 120 and the inductor structure 140. The patterned shielding structure 160 can reduce the mutual inductance between the metal segments (for example, the metal segment S1 and the metal segment S2) on both sides of the inductor structure 140 to prevent the substrate 120 from generating the aforementioned eddy current. In this way, the quality factor value of the inductor structure 140 can be effectively maintained and noise can be avoided.

In some embodiments, the patterned shielding structure 160 is formed on the metal layer (M1). In some embodiments, the patterned shielding structure 160 may be connected to the ground, but the present disclosure is not limited to this.

The above-mentioned shape or configuration of the inductor structure 140A is only an example. Various shapes or configurations of the inductor structure 140A are within the scope of the present disclosure.

Please refer to Figure 3. FIG. 3 is a schematic diagram of a patterned shield structure 160A according to some embodiments of the present disclosure. In some embodiments, the patterned shielding structure 160A in FIG. 3 is used to implement the patterned shielding structure 160 in FIG. 1, but the present disclosure is not limited to this. Taking the example of FIG. 3 as an example, the patterned shielding structure 160A includes a trunk portion M1, a trunk portion M2, and a plurality of trunk portions B. In some embodiments, the trunk portion M1 and the trunk portion M2 have a first line width, and the branch portions B have a second line width, and the first line width is greater than the second line width. That is to say, compared to the branch cadres B, the main cadre part M1 and the main cadre part M2 are thicker. In a further embodiment, the first line width is more than twice the second line width.

The main cadre M1 and the main cadre M2 are T-shaped. The main part M1 is connected to the main part M2. The branch cadre B is connected to the main cadre M1 or the main cadre M2. Specifically, the trunk portion M1 includes a conductive member C1 and a conductive member C2. The trunk portion M2 includes a conductive member C3 and a conductive member C4. The conductive member C1 and the conductive member C3 extend in the direction X. The conductive member C2 and the conductive member C4 extend in the direction Y. The length of the conductive member C1 is the same as the length of the conductive member C3. The length of the conductive member C2 is the same as the length of the conductive member C4. The length of the conductive part C1 (or the conductive part C3) is greater than the length of the conductive part C2 (or the conductive part C4). The stem branch B1 is comb-shaped, while the stem branch B2 is elongated. In some embodiments, all the comb-shaped stem parts B1 face the same direction (for example, the negative direction of the direction X). In some embodiments, the branch portion B2 is closer to the conductive component C2 (or the conductive component C4) than the branch portion B1.

Taking the example of FIG. 3 as an example, a single stem portion B1 has an even number (for example, 4) comb tooth portions E, and the length of the comb tooth portions E is the same. In some other embodiments, a single stem portion B1 may have an odd number of comb tooth portions E. In some other embodiments, the number of the comb tooth parts E of the stem parts B1 may be partially different or completely different.

Taking the example shown in Figure 3, the number of branch cadres B2 in each block is an odd number. For example, the number of the branch portions B2 connected to the conductive member C1 and arranged on the right side of the conductive member C2 is three. The number of the branch portions B2 connected to the conductive member C1 and provided on the left side of the conductive member C2 is three. The number of the branch portions B2 connected to the conductive member C3 and arranged on the right side of the conductive member C4 can be an odd number of three. The number of the branch portions B2 connected to the conductive member C3 and arranged on the left side of the conductive member C4 can be an odd number of three. In some other embodiments, the number of branches B2 in each block may be an even number.

In addition, as shown in FIG. 2, the inductor structure 140A includes an input terminal IN. The input terminal IN is used to receive the input signal. The vertical projection of the patterned shielding structure 160A in FIG. 3 on the plane formed by the direction X and the direction Y and the vertical projection of the input terminal IN on the plane at least partially overlap. For example, the connection position of the conductive member C1 and the conductive member C2 is located above the input terminal IN in FIG. 2. In this way, a better shielding effect can be achieved.

Refer to Figure 4. FIG. 4 is a schematic diagram of a patterned shielding structure 160B according to some embodiments of the present disclosure. In some embodiments, the patterned shielding structure 160B in FIG. 4 is used to implement the patterned shielding structure 160 in FIG. 1, but the present disclosure is not limited thereto. The main difference between the patterned shielding structure 160B of FIG. 4 and the patterned shielding structure 160A of FIG. 3 is that, in the patterned shielding structure 160B of FIG. 4, the conductive member C1 and the conductive member C3 are adjacent to each other and conductive The component C2 and the conductive component C4 are connected through the connecting portion P. To explain in another way, the space between the conductive component C1 and the conductive component C3 is not provided with any branch portion, and the space between the conductive component C1 and the conductive component C3 is only provided with the connecting portion P.

Refer to Figure 5. FIG. 5 is a schematic diagram of the patterned shielding structure 160C according to some embodiments of the present disclosure. In some embodiments, the patterned shielding structure 160C in FIG. 5 is used to implement the patterned shielding structure 160 in FIG. 1, but the present disclosure is not limited thereto. The main difference between the patterned shielding structure 160C of FIG. 5 and the patterned shielding structure 160B of FIG. 4 is that in the patterned shielding structure 160C of FIG. 5, all the comb-shaped branch portions B11-B18 are not all facing Set in the same direction. Taking the example in Figure 5, the stem portion B11 and the stem portion B12 are arranged in the same direction (the negative direction of direction Y), and the stem portion B13 and the stem portion B14 are arranged in the same direction (the positive direction of the direction Y). The stem portion B15 and the branch stem portion B16 are arranged facing the same direction (the positive direction of the direction X), and the stem portion B17 and the branch stem portion B18 are arranged in the same direction (the negative direction of the direction X).

In addition, taking the example of FIG. 5 as an example, the lengths of all the comb tooth portions E of a single stem portion (for example, the stem portion B11) are partially different. In some other embodiments, the lengths of the comb tooth portions E of a single stem portion may be all different.

The above-mentioned setting methods of the branches B11-B18 and B2 are only examples, and the various setting methods of the branches B11-B18 and B2 are all within the scope of the present disclosure.

Refer to Figure 6. FIG. 6 is a schematic diagram of a patterned shielding structure 160D according to some embodiments of the present disclosure. In some embodiments, the patterned shielding structure 160D of FIG. 6 is used to implement the patterned shielding structure 160 of FIG. 1, but the present disclosure is not limited thereto. Taking the example of FIG. 6 as an example, in the patterned shield structure 160D, the trunk portion M11, the trunk portion M12, the trunk portion M21, and the trunk portion M22 are T-shaped. The trunk part L1 and the trunk part L2 are elongated. The trunk part M11 and the trunk part M12 are connected through the connection part P1. The trunk part M21 and the trunk part M22 are connected through the connection part P2. The trunk part L1 is connected to the trunk part M12. The trunk part L2 is connected to the trunk part M21. The trunk part L1 and the trunk part L2 are connected through the connection part P3. In this way, the trunk part M11, the trunk part M12, the trunk part M21, the trunk part M22, the trunk part L1, the trunk part L2, the connecting part P1, the connecting part P2 and the connecting part P3 will jointly form a fishbone structure.

In some embodiments, the trunk portion M11, the trunk portion M12, the trunk portion M21, the trunk portion M22, the trunk portion L1, and the trunk portion L2 have a first line width, the other branches have a second line width, and the first line width is greater than The second line width. Moreover, when the ratio of the first line width to the second line width is more than 1.5 times, the quality factor value (Q value) performance is better. That is to say, compared to these branch cadres, the main trunk M11, the trunk M12, the trunk M21, the trunk M22, the trunk L1, and the trunk L2 are thicker. In a further embodiment, the first line width is more than twice the second line width.

Refer to Figure 7. FIG. 7 is a schematic diagram of a patterned shielding structure 160E according to some embodiments of the present disclosure. In some embodiments, the patterned shielding structure 160E in FIG. 7 is used to implement the patterned shielding structure 160 in FIG. 1, but the present disclosure is not limited thereto. Taking the example of FIG. 7 as an example, the patterned shielding structure 160E includes a trunk portion M1, a trunk portion M2, a trunk portion M3, and a trunk portion M4. The main part M1, the main part M2, the main part M3, and the main part M4 are all in a T shape and are arranged in sequence with a difference of 90 degrees. The trunk part M1, the trunk part M2, the trunk part M3, and the trunk part M4 are connected to the connection node N2. The patterned shielding structure 160E further includes a plurality of elongated branch portions B2. The branches B2 are respectively connected to the main main part M1, the main main part M2, the main main part M3, and the main main part M4, and are arranged in the space formed by both of the main main parts M1-M4. For example, part of the branch portion B2 is arranged in the space formed by the main portion M1 and the main portion M3. Part of the branch part B2 is arranged in the space formed by the main part M1 and the main part M4. Part of the branch portion B2 is arranged in the space formed by the main portion M2 and the main portion M3. Part of the branch part B2 is arranged in the space formed by the main part M2 and the main part M4.

In some embodiments, the trunk portion M1, the trunk portion M2, the trunk portion M3, and the trunk portion M4 have a first line width, the branch portions B1 and the branch portions B2 have a second line width, and the first line width is greater than The second line width. That is to say, compared with the branches B1 and B2, the trunk portion M1, the trunk portion M2, the trunk portion M3, and the trunk portion M4 are thicker. In a further embodiment, the first line width is more than twice the second line width.

Refer to Figure 8. FIG. 8 is a schematic diagram of a patterned shielding structure 160F according to some embodiments of the present disclosure. In some embodiments, the patterned shielding structure 160F in FIG. 8 is used to implement the patterned shielding structure 160 in FIG. 1, but the present disclosure is not limited thereto. The patterned shielding structure 160F in FIG. 8 includes a trunk portion M1, a trunk portion M2, a trunk portion M3, a trunk portion M4, and a branch portion B2. The trunk part M1, the trunk part M2, the trunk part M3, and the trunk part M4 are connected to the connection node N2. The branches B2 are elongated and their lengths are not all the same. In addition, compared with the stem portions M1-M4 of the patterned shielding structure 160E in FIG. 7, the stem portions M1-M4 of the patterned shielding structure 160F in FIG. 8 are rotated by an angle (for example: 45 degrees). Disclosure is not limited to this angle.

In some embodiments, each of the aforementioned patterned shielding structures 160A-160F is symmetrical up and down. Accordingly, the shielding effect is better. However, in some other embodiments, each of the aforementioned patterned shielding structures 160A-160F may also be asymmetric from top to bottom.

In summary, the patterned shielding structure of the present disclosure has a better shielding effect.

Although the present disclosure has been disclosed in the above embodiments, it is not intended to limit the present disclosure. Anyone with ordinary knowledge in the field can make various changes and modifications without departing from the spirit and scope of the present disclosure. Therefore, the present disclosure The scope of protection shall be subject to the scope of the attached patent application.

100: Integrated inductor 120: substrate 140: Inductor structure 140A: Inductor structure 160: Patterned shielding structure 160A: Patterned shielding structure 160B: Patterned shielding structure 160C: Patterned shielding structure 160D: Patterned shielding structure 160E: Patterned shielding structure 160F: Patterned shielding structure X: direction Y: direction Z: direction O: opening S1: Metal segment S2: Metal segment M1: Main cadre M2: Main cadre M3: Main cadre M4: Main cadre M5: Main cadre M6: Main cadre M11: Main cadre M12: main cadre M21: Main cadre M22: Main cadre L1: main cadre L2: main cadre C1: conductive parts C2: conductive parts C3: conductive parts C4: conductive parts B: Branch cadres B1: Branch cadres B2: Branch cadres B11: Branch cadres B12: Branch cadres B13: Branch cadres B14: Branch cadres B15: Branch cadres B16: Branch cadres B17: Branch cadres B18: Branch cadres E: comb tooth P: Connection part P1: Connection part P2: Connection part P3: Connection part N2: connecting node IN: Input

In order to make the above and other objectives, features, advantages and embodiments of the present disclosure more comprehensible, the description of the accompanying drawings is as follows: FIG. 1 is a schematic diagram of an integrated inductor according to some embodiments of the present disclosure; FIG. 2 is a schematic diagram of an inductor structure according to some embodiments of the present disclosure; FIG. 3 is a schematic diagram of a patterned shielding structure according to some embodiments of the present disclosure; FIG. 4 is a schematic diagram of a patterned shield structure according to some embodiments of the present disclosure; FIG. 5 is a schematic diagram of a patterned shield structure according to some embodiments of the present disclosure; FIG. 6 is a schematic diagram of a patterned shield structure according to some embodiments of the present disclosure; FIG. 7 is a schematic diagram of a patterned shield structure according to some embodiments of the present disclosure; and FIG. 8 is a schematic diagram of a patterned shield structure according to some embodiments of the present disclosure.

160A: Patterned shielding structure

X: direction

Y: direction

M1: Main cadre

M2: Main cadre

C1: conductive parts

C2: conductive parts

C3: conductive parts

C4: conductive parts

B: Branch cadres

B1: Branch cadres

B2: Branch cadres

E: comb tooth

Claims (9)

A patterned shielding structure is arranged between an inductor structure and a substrate, wherein the patterned shielding structure includes: a shielding layer, including: a first trunk portion having a T-shape; and a plurality of trunk portions connected to the The first main stem portion, wherein the plurality of first stem portions of the stem portions are comb-shaped, and the first stem portions that are comb-shaped are all arranged in the same direction. The patterned shielding structure according to claim 1, wherein the first main portion has a first line width, one of the branch portions has a second line width, and the first line width is greater than the second line width. The patterned shield structure according to claim 2, wherein the first line width is more than twice the second line width. The patterned shielding structure according to claim 1, further comprising: a second main part, which is T-shaped and connected to the first main part. The patterned shielding structure according to claim 4, wherein the first trunk portion includes a first conductive component and a second conductive component, and the second trunk portion includes a third conductive component and a fourth conductive component, Wherein the first conductive component and the third conductive component extend in a first direction Extending, the second conductive component and the fourth conductive component extend in a second direction, and the second direction is perpendicular to the first direction. The patterned shielding structure according to claim 5, wherein the first conductive member and the third conductive member are adjacent, and the second conductive member and the fourth conductive member are connected through a connecting portion. The patterned shielding structure according to claim 4, further comprising: a third main body part having a T-shape; and a fourth main body part having a T-shape, wherein the first main body part and the second main body part , The third trunk part and the fourth trunk part are connected, wherein the first trunk part, the second trunk part, the third trunk part, and the fourth trunk part are arranged in sequence with a difference of 90 degrees. The patterned shielding structure according to claim 7, wherein the second main portion, the third main portion, and the fourth main portion have a first line width, and one of the branch portions has a second line width , And the first line width is greater than the second line width. An integrated inductor, comprising: a substrate; an inductor structure; and a patterned shielding structure, arranged between the inductor structure and the substrate Wherein, the patterned shielding structure includes a shielding layer, the shielding layer includes a first main part, a second main part, a third main part, a plurality of connecting parts and a plurality of branch parts, the first main part and the The second trunk part is T-shaped and connects the branches, the third trunk part is elongated, and the first trunk part, the second trunk part, the third trunk part, and the connecting parts together form a Fishbone structure.

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