TWI729148B - Transfer machine - Google Patents

Abstract

A transfer machine 10 includes: a walking portion 20 that walks along a rail 91 provided on the ceiling 90 side; and a lifting portion 30 that supports the cassette 80 in a liftable manner. The lifting portion 30 includes a lifting portion body 31 and a lifting cage 34 , Support the cassette 80; the power supply device 50, which is provided in the lifting part body 31, supplies power to the lifting cage 34; and the power receiving device 60, which is provided in the lifting cage 34, receives power from the power supply device 50 without contact, and the power supply device 50 supplies power The surface 52 and the power receiving surface 62 of the power receiving device 60 are arranged so as to face each other in a direction intersecting with the lifting direction of the lifting cage 34 when the lifting cage 34 is raised relative to the lifting portion main body 31.

Description

Transfer machine

The present invention relates to a transfer machine including: a walking part that walks along a rail provided on the ceiling side; and an elevating part that is provided in the walking part and supports an object to be transported in a liftable manner.

As a conventional transfer machine, the following is known: on a rail provided on the ceiling side, a traveling trolley (traveling section) that runs on the rail is installed, and the traveling trolley passes through an elevating device (elevating section). Keep suspended objects to be transported. The lifting device in this type of transfer machine is provided with a lifting part body and a lifting cage that is freely liftable relative to the lifting part body and used to support the object to be conveyed, by making the motor provided in the lifting cage ( motor) drive to open and close the gripping mechanism that grips the object to be conveyed. Furthermore, in the lifting cage, a control circuit and the like for controlling the motor are provided. In addition, the power supply for the motor and the control circuit of the motor, that is, the power supply between the lifter body and the lift cage, is through the built-in lift belt (suspension material). Conductive wires are used, and the lifting belt is used to raise and lower the lifting cage with respect to the lifting portion main body (for example, Patent Document 1). However, in this way of supplying power between the lifter body and the lifting cage via the conductive wire built into the lifting belt, there are cases where the conductive wire is generated due to the bending, abrasion, and deformation of the lifting belt. Problems such as poor contact. Therefore, in recent years, the transfer machine adopts a method of performing power supply between the elevator body and the elevator cage without contacting through a conductive wire. In this method, a power supply device for supplying power to the lifting cage is provided in the lifting portion main body, and a power receiving device for contactlessly receiving power from the power supply device is provided in the lifting cage. Thereby, the power receiving coil of the power receiving device generates the required electric power on the lifting cage side by the magnetic field generated by the power supply coil (coil) of the power supply device, so that power is supplied in a non-contact state. Prior Art Documents Patent Documents

Patent Document 1: Japanese Patent Laid-Open No. 2000-281278

[Problem to be Solved by the Invention] However, the transfer machine has the following problem: when the lifting cage is raised relative to the lifting portion body, power is supplied between the lifting portion body and the lifting cage At this time, the power supply device provided in the lifting part body and the power receiving device provided in the lifting cage sometimes come into contact (collision), and dust may occur due to the contact. In particular, it causes problems in transfer machines used in clean rooms, etc., which are strict with regard to dust emission.

Therefore, the object of the present invention is to provide a transfer machine, which can prevent the power supply device provided in the lifting part and the lifting cage when power is supplied between the lifting part body of the lifting part and the lifting cage. Contact (collision) of the power receiving device. [Means to Solve the Problem]

The problem to be solved by the present invention is as above. Next, the means for solving the problem will be explained.

That is, the transfer machine of the present invention includes: a walking part that walks along a rail provided on the ceiling side; and a lifting part, which is provided in the walking part and supports the conveyed object in a liftable manner, wherein the lifting part includes: Lifting part body; lifting cage, which is freely liftable relative to the lifting part body and supporting the object to be conveyed; a power supply device, which is provided in the lifting part body, and supplies power to the lifting cage; a power receiving device, which is provided in the lifting part The cage receives power from the power supply device without contact, and the power supply surface of the power supply device and the power receiving surface of the power receiving device are arranged such that when the lifting cage is raised relative to the lifting portion body, the orientation is opposite to The directions in which the lifting directions of the lifting cages intersect are opposite to each other. In the above structure, when the lifting cage is raised to the main body of the lifting part, the power supply surface of the power supply device and the power receiving surface of the power receiving device are opposed to each other at a predetermined interval in a direction intersecting with the lifting direction of the lifting cage. The state is close.

The transfer machine of the present invention is in the transfer machine, the lifting part body includes a distance detecting part, the distance detecting part detects the distance of the lifting cage relative to the lifting part body, and the power receiving device is It is arranged to be in the vicinity of the distance detecting part when the lifting cage is raised relative to the lifting part main body. In the above configuration, the positional relationship between the power supply surface of the power supply device and the power reception surface of the power receiving device can be controlled with a value that does not deviate from the value (distance) detected by the distance detection unit.

The transfer machine of the present invention is in the transfer machine, the lifting part includes an alignment member, the alignment member performs the alignment of the lifting portion body and the lifting cage, and the alignment member is It is configured that when the lifting cage is raised with respect to the lifting portion main body, the lifting portion main body and the lifting cage can be engaged with each other in such a manner that the lifting portion main body is introduced into the lifting cage. In the above-mentioned structure, when the lifting cage rises to the lifting part main body, the lifting part main body engages with the lifting cage by introducing the lifting cage.

The transfer machine of the present invention is that in the transfer machine, the lifting part includes at least a pair of suspension materials, and the at least one pair of suspension materials can lift the lifting part relative to the lifting part body. In the cage, the power supply device and the power receiving device are provided between positions where the pair of suspension members are arranged. In the above structure, between the positions where the pair of suspension members are arranged, the power supply device and the power receiving device are close to each other.

The transfer machine of the present invention is that in the transfer machine, the lifting part includes at least a pair of suspension materials, and the at least one pair of suspension materials can lift the lifting part relative to the lifting part body. In the cage, the positioning member is provided between positions where the pair of suspension members are arranged. In the above-mentioned structure, between the positions where the pair of suspension members are arranged, the lifter body engages with the lift cage. [Effects of the invention]

According to the transfer machine of the present invention, when the lifting cage is raised to the main body of the lifting part, the power supply surface of the power supply device and the power receiving surface of the power receiving device do not come into contact (collision). Therefore, there is no risk of dusting due to the contact (collision).

The transfer machine 10 of the present invention will be described. In addition, below, let the vehicle body travel direction of the transfer machine 10 (the longitudinal direction of the transfer machine 10) be the front-rear direction, and the direction perpendicular to the horizontal direction with respect to the vehicle body travel direction of the transfer machine 10 (The width direction of the transfer machine 10) is the left and right direction, and the direction orthogonal to the vertical direction (the height direction of the transfer machine 10) with respect to the traveling direction of the vehicle body of the transfer machine 10 is set as the up and down direction. Be explained.

As shown in FIGS. 1 to 3, the transfer machine 10 is, for example, installed in a semiconductor substrate manufacturing plant, and an overhead transport vehicle (not shown) that runs along a traveling rail provided in the manufacturing plant, and A cassette 80 (an example of the "transported portion") accommodating the semiconductor substrate is transferred between processing apparatuses (not shown) in which the semiconductor substrate is subjected to predetermined processing.

The transfer machine 10 travels along a rail 91 provided on the ceiling 90. The rail 91 is supported in a suspended state from the ceiling 90 side by a suspending bolt 92 or the like. The transfer machine 10 receives the cassette 80 from the overhead transport vehicle at the receiving position and the transfer machine 10 The cassette 80 is raised and lowered and transferred between the lifting positions of the processing device, and the rail 91 is linearly extended. The rail 91 is provided with a power supply line (not shown) for supplying electric power to the transfer machine 10.

The transfer machine 10 mainly includes a traveling part 20 that runs along a rail 91 and an elevating part 30 that supports the cassette 80 in an elevating manner. The traveling part 20 is provided with traveling wheels 21 on the left and right sides for traveling on the rail 91 so as to rotate integrally, and the traveling wheels 21 on the right and left sides are provided with a pair in the front and back. The traveling part 20 is equipped with the drive motor (not shown) which drives the traveling wheel 21 of one of front and back. The running part 20 is constructed in such a way that the running wheel 21 on one side of the front and rear is used as a driving wheel, and the running wheel 21 on the other side of the front and rear is used as a driven wheel. The driving motor drives one of the front and rear wheels. The traveling wheels 21 rotate to travel along the rail 91.

The lifting part 30 is provided below the walking part 20 and mainly includes the lifting part body 31 and the lifting cage 34. The lifter main body 31 is the main body part of the lifter 30 and is supported in a suspended state with respect to the walking part 20. The elevator main body 31 supports the elevator cage 34 in a suspended state by the elevator belt 32 (an example of the “suspension material”). As shown in FIG. 3, the lifting belt 32 includes the lifting belts 32 on the left and right sides of the transfer machine 10 (both sides in the width direction of the transfer machine 10) in a manner of integrally winding and unwinding, and the left and right sides of the transfer machine 10 A pair of lifting belts 32 are provided at the front and rear of the transfer machine 10 (the longitudinal direction of the transfer machine 10). The elevator main body 31 is provided with an elevator motor 33 for raising and lowering the elevator cage 34, and the elevator belt 32 is wound and unrolled relative to the elevator main body 31 by the driving of the elevator motor 33, so that the elevator cage 34 is raised and lowered.

As shown in FIGS. 1 to 3, the lifting cage 34 is a part that is provided to be lifted and lowered freely with respect to the lifting part main body 31 and supports the cassette 80. The lifting cage 34 includes an engaging portion 35 that engages with the flange portion 81 of the cassette 80. The engaging portion 35 rotates the engaging portion engaged with the flange portion 81 to switch the engaged state with the flange portion 81 to the engaged state with the flange portion 81 and release from the flange portion. 81 is engaged in the unlocked state.

The transfer machine 10 includes a laser distance meter 40 (an example of a “distance detection unit”) for detecting the distance of the lifting cage 34 with respect to the lifting unit main body 31. Specifically, the laser distance meter 40 is provided in the elevator main body 31, and the reflection plate 41 that reflects the laser light irradiated from the laser distance meter 40 is provided in the elevator cage 34. The laser distance meter 40 detects the distance to the reflector 41 provided in the elevator cage 34 to detect the distance of the elevator cage 34 with respect to the elevator main body 31. The laser distance meters 40 are respectively provided on the front and rear sides of the transfer machine 10. The laser distance meter 40 is provided in the vicinity of the position where the lifting belt 32 is wound or discharged.

The transfer machine 10 includes an alignment member 45 that aligns the elevating portion main body 31 and the elevating cage 34. The alignment member 45 is an alignment mechanism as described below: when the elevator cage 34 rises relative to the elevator body 31 and the elevator body 31 approaches the elevator cage 34, it is used to hold the elevator cage 34 with respect to the elevator body 31 In the specified location. The positioning member 45 includes a protruding portion 46 provided on the side of the lifting cage 34 and a receiving portion 47 provided on the side of the lifting portion main body 31. When the lifting cage 34 rises relative to the lifting portion main body 31 and the lifting portion main body 31 and the lifting cage 34 approach, the positioning member 45 engages the protrusion 46 on the lifting cage 34 side with the receiving portion 47 on the lifting portion main body 31 side. Then, the positioning of the lifting cage 34 with respect to the lifting portion main body 31 is performed. The protruding portion 46 is a convex portion protruding upward from the upper portion of the lifting cage 34. The protruding portion 46 includes a material that does not generate dust when it is engaged with and comes into contact with the receiving portion 47. The receiving portion 47 is a concave portion that receives the convex portion of the protrusion 46. The receiving portion 47 includes a material that does not generate dust when it is engaged with and comes into contact with the protruding portion 46. The receiving portion 47 is configured such that the recesses of the concave portion thereof are arranged in the horizontal direction, and are grasped from both sides of the convex portion of the protruding portion 46 when it is engaged with the protruding portion 46. Moreover, the receiving portion 47 is configured to be able to introduce the convex portion of the protruding portion 46 into the protruding portion 46 even if the convex portion of the protruding portion 46 is slightly deviated from the concave portion of the receiving portion 47 when engaging with the protruding portion 46 The concave portion of the receiving portion 47. Specifically, by disposing a plurality of rollers 48 below the concave portion of the receiving portion 47, the roller 48 is brought into contact with the side surface of the convex portion of the protruding portion 46, so that the protruding portion 46 and the receiving portion 47 are engaged with each other. , The rising direction of the convex portion of the protruding portion 46 is restricted to the concave portion side of the receiving portion 47, so that the convex portion of the protruding portion 46 is introduced to the concave portion of the receiving portion 47. By configuring the positioning member 45 in this way, when the lifting cage 34 is raised relative to the lifting portion main body 31, the lifting portion main body 31 will correct the position of the lifting cage 34 relative to the lifting portion main body 31, so that the lifting portion main body 31 is lifted and lowered. The cage 34 is always engaged at a prescribed position. That is, the elevator cage 34 can be raised without deviation from the elevator main body 31.

As shown in FIG. 3, the positioning member 45 is provided in the left and right sides of the center part of the transfer machine 10, respectively. The positioning member 45 is provided between a pair of lifting belts 32 arranged on the front and rear sides of the transfer machine 10. Specifically, the positioning member 45 is the one-side (for example, the left side) lifting belt 32 of the lifting belts 32 arranged on the left and right sides of the transfer machine 10 and the lifting belt 32 and the arrangement arranged on the front side of the transfer machine 10 Among the lifting belts 32 on the left and right sides of the transfer machine 10, the lifting belt 32 on one side (for example, the left side) is arranged at a central position between the lifting belts 32 on the rear side of the transfer machine 10. That is, the positioning member 45 is provided at a position where the distance from the lifting belt 32 on the front side to the positioning member 45 and the distance from the lifting belt 32 on the rear side to the positioning member 45 are approximately the same distance. By disposing the positioning member 45 in this way, the lifting part main body 31 and the lifting cage 34 can be engaged between the positions where the front and rear lifting belts 32 are arranged. In other words, the elevator main body 31 can be engaged with the elevator cage 34 at a position where the inclination of the elevator cage 34 with respect to the elevator main body 31 is small. Therefore, the lifting cage 34 can be raised without deviation from the lifting portion main body 31.

The transfer machine 10 performs the switching operation of the engagement state of the engaging portion 35 of the elevator cage 34 with the flange portion 81 by the electric power supplied from the elevator body 31 to the elevator cage 34. In addition, in the transfer machine 10, the power supply from the elevator main body 31 to the elevator cage 34 is performed in a non-contact manner without passing through a conductive wire. In order for the transfer machine 10 to contactlessly supply power between the elevator body 31 and the elevator cage 34, the elevator body 31 is provided with a power supply device 50, and the elevator cage 34 is provided with a power receiving device 60.

The power supply device 50 is a device that supplies power to the lifting cage 34, receives power via a power supply line provided in the rail 91, and supplies the received power to the power receiving device 60 of the lifting cage 34. The power supply device 50 includes a power supply unit 51 for supplying electric power to the power receiving device 60. The power supply unit 51 includes a power supply coil. The power receiving device 60 is a device that receives power supplied from the power supply device 50 without contact. The power receiving device 60 receives power supplied from the power supply unit 51 of the power supply device 50. The power receiving device 60 includes a power receiving unit 61 for receiving power supplied from the power supply unit 51. The power receiving unit 61 includes a power receiving coil. The power receiving device 60 includes a capacitor (not shown) that stores power received from the power receiving unit 61. In the power receiving device 60, when the lifting cage 34 ascends with respect to the lifting part main body 31 and approaches the lifting part main body 31, the electric power supplied from the power supply unit 51 is charged to the capacitor. In addition, the electric power charged in the capacitor is mainly used for switching the engagement state of the engaging portion 35 performed when the elevator cage 34 descends relative to the elevator main body 31 and leaves the elevator main body 31. That is, when the lifting cage 34 is lowered with respect to the lifting portion main body 31, the switching operation of the engagement state of the engaging portion 35 is performed by the electric power stored in the capacitor.

The power feeding device 50 uses the magnetic field generated by the power feeding coil of the power feeding unit 51 to cause the power receiving coil of the power receiving unit 61 to generate the required power on the side of the lifting cage 34 to perform power feeding in a non-contact state. As shown in FIGS. 1 and 4, the power supply device 50 is arranged such that a power supply surface 52 (a surface for supplying power to the power receiving device 60) of the power supply unit 51 faces a direction that intersects with the lifting direction of the lifting cage 34. Specifically, the power supply unit 51 is arranged such that the power supply surface 52 faces the center portion side of the transfer machine 10 and faces the elevator cage 34. That is, when the power supply unit 51 is provided behind the lifter main body 31, the power supply unit 51 is arranged such that the power supply surface 52 faces the front of the lifter main body 31. The power supply unit 51 is supported in a suspended state from the lifting unit main body 31 on one of the front and rear sides of the lifting unit main body 31 (one side in the traveling direction of the vehicle body of the transfer machine 10 ). The power receiving device 60 is arranged such that the power receiving surface 62 (the surface for receiving the power supplied from the power supply device 50) of the power receiving unit 61 faces a direction that intersects with the lifting direction of the lifting cage 34. Specifically, the power receiving unit 61 is arranged such that the power receiving surface 62 faces the outside in the front-rear direction of the transfer machine 10 and faces the power supply surface 52 of the power supply unit 51. That is, when the power receiving unit 61 is provided behind the lifting cage 34, the power receiving unit 61 is arranged such that the power receiving surface 62 faces the rear of the lifting cage 34. The power receiving unit 61 is supported in a state of protruding from the elevator cage 34 at one of the front and rear ends of the elevator cage 34 (one end in the vehicle body traveling direction of the transfer machine 10 ).

As shown in Figure 4, the power supply unit 51 of the power supply device 50 and the power receiving unit 61 of the power receiving device 60 are arranged such that when the lifting cage 34 rises relative to the lifting portion main body 31 and the lifting portion main body 31 and the lifting cage 34 approach, the power supply unit The power feeding surface 52 of 51 and the power receiving surface 62 of the power receiving unit 61 are spaced apart at a predetermined interval and face each other. Here, the “predetermined interval” refers to an interval at which electric power can be supplied from the power supply unit 51 to the power reception unit 61 without contact. Specifically, it is configured such that the power supply surface 52 of the power supply unit 51 and the power receiving surface 62 of the power receiving unit 61 include vertical surfaces, and when the lifting cage 34 rises relative to the lifting portion main body 31 and the lifting portion main body 31 and the lifting cage 34 approach The power receiving surface 62 of the power receiving unit 61 faces the power supply surface 52 of the power supply unit 51 at a position shifted from the position of the power supply surface 52 of the power supply unit 51 toward the center portion side of the transfer machine 10. By arranging the power supply device 50 and the power receiving device 60 as described above, the power supply surface 52 of the power supply unit 51 and the power receiving surface 62 of the power receiving unit 61 rise in the lifting cage 34 relative to the lifting portion main body 31, and the lifting portion main body 31 and the lifting cage When 34 approaches, it faces in a direction (front-rear direction) intersecting with the lifting direction (up-down direction) of the lifting cage 34, and faces in parallel at a predetermined interval without contacting each other. Therefore, when the elevator body 31 and the elevator cage 34 approach, the power supply unit 51 and the power receiving unit 61 do not come into contact (collision), and dust will not be generated due to the contact (collision).

As shown in FIG. 4, the power supply device 50 and the power receiving device 60 are arranged such that when the lifting cage 34 rises relative to the lifting portion main body 31 and the lifting portion main body 31 and the lifting cage 34 are close to each other, they are located near the laser distance meter 40. Specifically, the power feeding device 50 and the power receiving device 60 are arranged such that the power feeding device 50 is provided near the reflector 41, and near the reflector 41, the power feeding surface 52 of the power feeding unit 51 and the power receiving surface 62 of the power receiving unit 61 face each other. By arranging the power supply device 50 and the power receiving device 60 near the laser distance meter 40 (reflection plate 41) in this way, it is possible to control the power reception based on a value that does not deviate from the value (distance) detected by the laser distance meter 40 The position of the power receiving surface 62 of the power supply unit 61 relative to the power supply surface 52 of the power supply unit 51. Therefore, when the lifting cage 34 rises to the lifting unit body 31, the power supply surface 52 of the power supply unit 51 and the power receiving surface 62 of the power receiving unit 61 can be made accurate The close proximity allows efficient power supply from the power supply device 50 to the power receiving device 60.

Furthermore, as shown in FIG. 3, the power feeding device 50 and the power receiving device 60 are arranged between the pair of lifting belts 32. Specifically, the power supply device 50 and the power receiving device 60 are installed between the lifting belt 32 provided on the left side of the transfer machine 10 and the lifting belt 32 provided on the right side of the transfer machine 10. That is, the power supply device 50 and the power receiving device 60 are provided on the inner side (the center side of the transfer device 10) relative to the position where the lifting belt 32 on the left and right sides of the transfer machine 10 is wound and unrolled. By providing the power supply device 50 and the power reception device 60 in this way, the power supply surface 52 of the power supply unit 51 and the power reception surface 62 of the power reception unit 61 face each other between the positions where the pair of lifting belts 32 are arranged. In other words, the power supply surface 52 of the power supply unit 51 and the power reception surface 62 of the power reception unit 61 can be made to face the power supply surface 52 of the power supply unit 51 at a position where the inclination of the lift cage 34 relative to the lift unit body 31 is small. Therefore, when the lifting cage 34 is raised to the lifting unit body 31, the power supply surface 52 of the power supply unit 51 and the power receiving surface 62 of the power receiving unit 61 can be accurately approached at a predetermined position, thereby enabling efficient operation. Electric power is supplied from the elevator main body 31 to the elevator cage 34.

As described above, in the transfer machine 10, when the lifting cage 34 is raised to the lifting portion main body 31, the power supply surface 52 of the power supply unit 51 of the power supply device 50 and the power receiving surface 62 of the power receiving unit 61 of the power receiving device 60 are in opposite directions. When the elevator cage 34 is raised to the elevator body 31, the power supply surface 52 of the power supply unit 51 and the power receiving unit 61 are close to each other in the direction intersecting the lifting direction of the elevator cage 34 at a predetermined interval. The power receiving surface 62 does not come into contact (collision). Therefore, there is no risk of dusting due to the contact (collision). In the transfer machine 10, the laser distance meter 40 is provided near the position where the lifting belt 32 is wound or unrolled, so that the distance between the lifting cage 34 and the lifting portion main body 31 can be more accurately detected. In addition, by providing the power supply device 50 and the power receiving device 60 in the vicinity of the laser distance meter 40, it is possible to control the power receiving unit 61 based on a value that does not deviate from the value (distance) detected by the laser distance meter 40. The position of the power receiving surface 62 with respect to the power supply surface 52 of the power supply unit 51. Moreover, the position of the lifting cage 34 relative to the lifting portion main body 31 is corrected by the positioning member 45, so that the lifting portion main body 31 and the lifting cage 34 can always be engaged at a predetermined position. Therefore, when the lifting cage 34 rises to the lift Up to the main body 31, the power supply surface 52 of the power supply unit 51 and the power reception surface 62 of the power reception unit 61 can always face each other at a predetermined position. As a result, when the lifting cage 34 is raised to the lifting unit body 31, the power supply surface 52 of the power supply unit 51 and the power receiving surface 62 of the power receiving unit 61 can be brought close to each other accurately, so that the power supply device 50 can receive power from the power supply device 50 efficiently. Power supply for device 60.

In addition, in this embodiment, the power supply surface 52 of the power supply unit 51 and the power receiving surface 62 of the power receiving unit 61 are arranged to face the front-rear direction of the transfer machine 10 (the traveling direction of the vehicle body of the transfer machine 10), but it is not limited. Here, what is necessary is just to be a perpendicular surface facing the direction which cross|intersects with the raising/lowering direction of the elevator cage 34, For example, you may arrange|position toward the left-right direction of the transfer machine 10 (the width direction of the transfer machine 10). In this embodiment, the power supply device 50 and the power receiving device 60 are provided only on one side of the forward and backward direction of the transfer machine 10 (the traveling direction of the vehicle body of the transfer machine 10), but it is not limited to this, for example, it may be provided. On both sides of the front-rear direction of the transfer machine 10, or one or both sides of the left-right direction of the transfer machine 10 (the width direction of the transfer machine 10).

10‧‧‧Transfer 20‧‧‧Walking part 21‧‧‧Wheel 30‧‧‧Elevating part 31‧‧‧Elevating part body 32‧‧‧Elevating belt 33‧‧‧Elevating motor 34‧‧‧Elevating cage 35‧‧‧Clamping part 40‧‧‧Laser distance meter 41‧‧‧Reflecting plate 45‧‧‧Aligning part 46‧‧‧Protruding part 47‧‧‧Receiving part 48‧‧‧Roller 50‧‧‧Power supply Device 51‧‧‧Power supply part 52‧‧‧Power supply surface 60‧‧‧Power receiving device 61‧‧‧Power receiving part 62‧‧‧Power receiving surface 80‧‧‧Box (carried object) 81‧‧‧Flange 90 ‧‧‧Ceiling 91‧‧‧Rail 92‧‧‧Suspending bolt

Fig. 1 is a side view of the transfer machine of the present invention. Fig. 2 is a front view of the transfer machine of the present invention. Fig. 3 is a plan view of the transfer machine of the present invention. Fig. 4 is an enlarged side view of the traveling part and the elevating part of the transfer machine of the present invention.

20‧‧‧Walking Department

30‧‧‧Elevator

31‧‧‧Elevator body

32‧‧‧Lift belt

33‧‧‧Lift motor

34‧‧‧Lifting cage

35‧‧‧Clamping Department

40‧‧‧Laser distance meter

41‧‧‧Reflector

45‧‧‧Alignment parts

46‧‧‧Protrusion

47‧‧‧Receiving Department

48‧‧‧roller

50‧‧‧Power supply device

51‧‧‧Power Supply Department

52‧‧‧Power supply surface

60‧‧‧Power receiving device

61‧‧‧Receiving Department

62‧‧‧Receiving surface

80‧‧‧Cartridge (object to be transported)

81‧‧‧Flange

Claims (4)

A transfer machine includes: a walking part, which runs along a rail provided on the ceiling side; and a lifting part, which is provided in the walking part and supports a conveyed object in a liftable manner. The transfer machine is characterized in that: The lifting part includes: a lifting part body, which is supported relative to the walking part; a lifting cage, which can be lifted and lowered freely relative to the lifting part body and supports the conveyed object; and a power supply device, which is provided in the lifting part body, Power is supplied to the lifting cage; a power receiving device is provided in the lifting cage and receives power from the power supply device without contact, and the power supply surface of the power supply device and the power receiving surface of the power receiving device are arranged such that When the lifting cage rises with respect to the lifting portion body, they face each other in a direction that crosses the lifting direction of the lifting cage, wherein the lifting portion body includes a distance detecting portion, and the distance detecting portion detects the The distance of the lifting cage with respect to the main body of the lifting portion, and the power receiving device is arranged such that when the lifting cage is raised relative to the main body of the lifting portion, it is located near the distance detecting portion. The transfer machine according to the first item of the scope of patent application, wherein the lifting part includes an alignment member that performs the alignment of the lifting portion body and the lifting cage, and the alignment member is The structure is such that the lifting cage is relative to the lifting portion of the When the body rises, the lifting part main body and the lifting cage can be engaged with each other in such a manner that the lifting part body is guided into the lifting cage. The transfer machine according to the second item of the scope of patent application, wherein the lifting part includes at least a pair of suspension materials, and the at least one pair of suspension materials can lift the lifting part relative to the body of the lifting part. In the cage, the positioning member is provided between positions where the pair of suspension members are arranged. The transfer machine according to any one of items 1 to 3 in the scope of the patent application, wherein the lifting part includes at least a pair of suspension materials, and the at least one pair of suspension materials is relative to the lifting part body The lifting cage is suspended in a liftable manner, and the power supply device and the power receiving device are arranged between positions where the pair of suspension materials are arranged.

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