TWI799875B - 折射率量測系統、方法與其所使用的全反射子系統 - Google Patents
折射率量測系統、方法與其所使用的全反射子系統 Download PDFInfo
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- TWI799875B TWI799875B TW110119571A TW110119571A TWI799875B TW I799875 B TWI799875 B TW I799875B TW 110119571 A TW110119571 A TW 110119571A TW 110119571 A TW110119571 A TW 110119571A TW I799875 B TWI799875 B TW I799875B
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- refractive index
- measurement system
- total reflection
- index measurement
- subsystem used
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| Application Number | Priority Date | Filing Date | Title |
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| TW110119571A TWI799875B (zh) | 2021-05-28 | 2021-05-28 | 折射率量測系統、方法與其所使用的全反射子系統 |
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| TW110119571A TWI799875B (zh) | 2021-05-28 | 2021-05-28 | 折射率量測系統、方法與其所使用的全反射子系統 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW202246727A TW202246727A (zh) | 2022-12-01 |
| TWI799875B true TWI799875B (zh) | 2023-04-21 |
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| TW110119571A TWI799875B (zh) | 2021-05-28 | 2021-05-28 | 折射率量測系統、方法與其所使用的全反射子系統 |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3602925B2 (ja) * | 1995-12-08 | 2004-12-15 | 独立行政法人科学技術振興機構 | 光干渉法による測定対象物の屈折率と厚さの同時測定装置 |
| US20070046953A1 (en) * | 2003-03-06 | 2007-03-01 | De Groot Peter | Interferometer and method for measuring characteristics of optically unresolved surface features |
| US7233396B1 (en) * | 2006-04-17 | 2007-06-19 | Alphasniffer Llc | Polarization based interferometric detector |
| US8009292B2 (en) * | 2007-11-13 | 2011-08-30 | Korea Research Institute Of Standards And Science | Single polarizer focused-beam ellipsometer |
| US9134182B2 (en) * | 2012-06-14 | 2015-09-15 | Canon Kabushiki Kaisha | Measurement apparatus and method, tomography apparatus and method |
| CN105352915A (zh) * | 2015-10-23 | 2016-02-24 | 西北工业大学 | 一种折射率二维分布的动态测量方法 |
| US10429244B2 (en) * | 2015-03-25 | 2019-10-01 | Nec Corporation | Light measurement device |
| CN114660023A (zh) * | 2022-03-14 | 2022-06-24 | 江苏理工学院 | 基于全反射共光程偏振干涉技术的折射率测量系统及测量 |
-
2021
- 2021-05-28 TW TW110119571A patent/TWI799875B/zh active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3602925B2 (ja) * | 1995-12-08 | 2004-12-15 | 独立行政法人科学技術振興機構 | 光干渉法による測定対象物の屈折率と厚さの同時測定装置 |
| US20070046953A1 (en) * | 2003-03-06 | 2007-03-01 | De Groot Peter | Interferometer and method for measuring characteristics of optically unresolved surface features |
| US7233396B1 (en) * | 2006-04-17 | 2007-06-19 | Alphasniffer Llc | Polarization based interferometric detector |
| US8009292B2 (en) * | 2007-11-13 | 2011-08-30 | Korea Research Institute Of Standards And Science | Single polarizer focused-beam ellipsometer |
| US9134182B2 (en) * | 2012-06-14 | 2015-09-15 | Canon Kabushiki Kaisha | Measurement apparatus and method, tomography apparatus and method |
| US10429244B2 (en) * | 2015-03-25 | 2019-10-01 | Nec Corporation | Light measurement device |
| CN105352915A (zh) * | 2015-10-23 | 2016-02-24 | 西北工业大学 | 一种折射率二维分布的动态测量方法 |
| CN114660023A (zh) * | 2022-03-14 | 2022-06-24 | 江苏理工学院 | 基于全反射共光程偏振干涉技术的折射率测量系统及测量 |
Non-Patent Citations (2)
| Title |
|---|
| 網路文獻 Huang et al. Detecting phase shifts in surface plasmon resonance: a review Hindawi Publishing Corporation 2012 https://downloads.hindawi.com/archive/2012/471957.pdf;網路文獻 Wang et al. Dynamic full-field refractive index distribution measurements using total internal reflection terahertz digital holography Chinese Laser Press 7 January 2022 https://opg.optica.org/DirectPDFAccess/0375A057-69F7-463B-8E32AC2C2A5DB97A_468393/prj-10-2-289.pdf?da=1&id=468393&seq=0&mobile=no * |
| 網路文獻 Wang et al. Dynamic full-field refractive index distribution measurements using total internal reflection terahertz digital holography Chinese Laser Press 7 January 2022 https://opg.optica.org/DirectPDFAccess/0375A057-69F7-463B-8E32AC2C2A5DB97A_468393/prj-10-2-289.pdf?da=1&id=468393&seq=0&mobile=no |
Also Published As
| Publication number | Publication date |
|---|---|
| TW202246727A (zh) | 2022-12-01 |
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