TWI798327B - Film frame holding device and film frame holding method - Google Patents

Abstract

The invention provides a film frame holding device and a film frame holding method capable of confirming that a film is firmly attached to a mask. The film frame is held by the film holding part provided on the frame, so that the adhesive member of the film is in contact with the mask. The measuring part is arranged at the first position near the front end overlapping with the mask to measure the first distance as the distance from the surface of the mask, and the measuring part is moved to the second position near the front end overlapping the film frame and measured as The second distance is the distance from the film to the film.

Description

Film frame holding device and film frame holding method

The invention relates to a film frame holding device and a film frame holding method.

Patent Document 1 discloses a film frame holding device that holds a film by inserting a film holding member into a groove formed on the periphery of the film frame, and holds the film between the held film and the photomask held approximately vertically. Align the position, and press the film to the photomask, thereby attaching the film to the photomask.

[Prior Art Literature]

[Patent Document]

[Patent Document 1] International Publication No. 2016/133054

In the invention described in Patent Document 1, after attaching the film to the photomask, the film is loosened by removing the film holding member from the groove, but if the film is not firmly attached to the photomask If the film is loosened in this state, there is a risk that the film will fall.

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a film frame holding device and a film frame holding method capable of confirming that a film is reliably attached to a mask.

In order to solve the above-mentioned problems, the film frame holding device of the present invention is to hold the following film and attach the above-mentioned film to a substantially plate-shaped mask maintained in a substantially vertical direction. The above-mentioned film has, for example, a substantially hollow cylindrical film frame, The film of the film provided on the first surface substantially perpendicular to the outer peripheral surface of the above-mentioned film frame so as to cover the hollow portion of the above-mentioned film frame, and the adhesive member provided on the second surface substantially parallel to the above-mentioned first surface, wherein It is characterized by comprising: a frame body which is a frame-shaped member formed by combining a plurality of rods into a substantially rectangular shape; The measurement part of the body, and the control part that controls the above-mentioned frame body, the above-mentioned film holding part and the above-mentioned measurement part, the above-mentioned measurement part can overlap the first position with the above-mentioned mask near the front end and overlap with the above-mentioned film frame near the front end The method of moving between the second positions is set, and when viewed from a direction approximately perpendicular to the extension direction of the above-mentioned rod, the above-mentioned film holding part and the above-mentioned measuring part are arranged at different positions, and the above-mentioned control part is held by the above-mentioned film holding part The above-mentioned film frame and the above-mentioned frame body are extended in a substantially vertical direction and the above-mentioned adhesive member is in contact with the above-mentioned mask, and the above-mentioned measuring part is arranged at the above-mentioned first position to measure the distance from the surface of the above-mentioned mask. The first distance of the distance is to move the above-mentioned measuring part to the above-mentioned second position to measure the second distance which is the distance from the film of the above-mentioned thin film.

According to the film frame gripping device of the present invention, the adhesive member is brought into contact with the mask, the measuring unit is arranged at the first position overlapping the mask near the front end, and the first distance as the distance from the surface of the mask is measured, so that The measurement unit moves to the second position where the vicinity of the front end overlaps with the film frame, and measures the second distance which is the distance from the film of the film. Thereby, it can be confirmed that the film is reliably attached to the mask.

The film gripping portion may have a film gripping member that can move horizontally or vertically between a contact position that contacts the outer peripheral surface and a retracted position that does not contact the outer peripheral surface, and the frame body The control unit is capable of moving in the horizontal direction, and the control unit arranges the film holding member at the contact position to hold the film frame and extend the frame body in a substantially vertical direction. In this state, the frame is moved in the horizontal direction to bring the adhesive member into contact with the mask, the measuring unit is arranged at the first position to measure the first distance, and the measuring unit is moved to the first position. The second distance is measured at two positions, and when the difference between the first distance and the second distance is equal to or less than a threshold value, the film holding member can be moved from the contact position to the retracted position. Thereby, it is possible to prevent the film from being loosened and falling when the film is not firmly attached to the mask (the difference between the first distance and the second distance is not equal to or less than the threshold value).

The measurement unit may have a first measurement unit provided near the upper side and near the left end of the frame, and a first measurement unit provided near the upper side and near the right end of the frame when the adhesive member is brought into contact with the mask. 2nd measurement department. Thereby, the measurement unit can measure the upper end of the mask or the film, and the points near the left and right ends. Also, when attaching the film to the mask, it can be found that one end of the film is attached but the other end of the film is not attached.

The frame body may have a substantially rod-shaped first vertical frame portion and a second vertical frame portion extending substantially vertically in a posture when the adhesive member is brought into contact with the mask, and a substantially horizontally extending frame portion. The upper frame portion near the upper end of the first vertical frame portion and the second vertical frame portion, the first vertical frame portion and the second vertical frame portion can move along the extending direction of the upper frame portion, and the upper frame portion Can move along the extension direction of the first vertical frame part and the second vertical frame part, the film holding part is installed on the first vertical frame part and the second vertical frame part, and the measuring part is installed on the upper box part. Thereby, the size of the frame constituted by the first vertical frame portion, the second vertical frame portion, and the upper frame portion can be changed to cope with films of various sizes. Also, the film height of the film can be measured at a position near the upper end of the film regardless of the size of the film.

The frame body may have a lower frame portion extended substantially horizontally near the lower ends of the first vertical frame portion and the second vertical frame portion, and the measurement unit may have a third measurement portion provided on the lower frame portion. In this way, it is possible to more reliably confirm whether or not the film is attached.

The frame body can be configured such that the distance between the second surface on the upper end side and the mask is closer than the distance between the second surface on the lower end side and the mask when the adhesive member is brought into contact with the mask. tilt. Thereby, it is possible to prevent the problem that the adhesive member and the mask partially abut and the film cannot be attached to the mask. Also, by attaching the upper end of the film to the mask, it is determined whether the film is attached to the mask based on the results obtained by measuring the height of the surface of the mask and the height of the film of the film near the upper end of the mask and the film, It can accurately determine the sticking state of the film.

In order to solve the above problems, the film frame holding method of the present invention is to hold the film and attach it to a substantially plate-shaped mask maintained in a substantially vertical direction. The above-mentioned film has, for example, a substantially hollow cylindrical film frame, and The film of the film provided on the first surface substantially perpendicular to the outer peripheral surface of the above-mentioned film frame in such a manner as to cover the hollow portion of the above-mentioned film frame, and the adhesive member provided on the second surface substantially parallel to the above-mentioned first surface are characterized in that In that, it arranges the film holding member provided on the frame so as to be movable in the horizontal direction at the abutting position against the above-mentioned outer peripheral surface to hold the above-mentioned film frame, and make the above-mentioned frame body in the state of holding the above-mentioned film frame. The above-mentioned adhesive member is moved parallel to the above-mentioned mask, and the measuring part provided on the above-mentioned frame is arranged at the first position overlapping the above-mentioned mask near the front end, and the second distance as the distance from the surface of the above-mentioned mask is measured. 1 distance, the above-mentioned measuring part is moved to the second position where the vicinity of the above-mentioned front end overlaps with the above-mentioned film frame, and the second distance is measured as the distance from the film of the above-mentioned film. The difference between the above-mentioned first distance and the above-mentioned second distance is When it is below the threshold value, the film gripping member can be moved from the contact position to the retreat position where it does not come into contact with the outer peripheral surface.

According to the present invention, it can be confirmed that the film is reliably attached to the photomask.

1: film frame holding device

10: frame

11, 12: Vertical frame part

13, 14: Upper frame part

15: box

15a: lower end

15b: upper end

16: Drive Department

20: film holding part

21: film holding member

22: Drive components

22a: Rod

22b: Actuator

30: Measurement department

31: Ultrasonic sensor

32: reflector

32a: reflection part

33: Actuator

100: film

101: Film frame

101a: upper surface

101b: lower surface

101c: outer peripheral surface

101d: Groove

101e: hollow part

102: Membrane of Membrane

103: Adhesive components

151: CPU

151a: Control Department

152: RAM

153:ROM

154: Input and output interface

155: communication interface

156:Media interface

161: Input and output device

162: Network

163: storage media

M: mask

Fig. 1 is a schematic front view showing a film frame holding device 1 according to a first embodiment.

FIG. 2 is a perspective view schematically showing the film 100 .

Fig. 3 is the A-A sectional view of Fig. 2 .

FIG. 4 is a diagram showing the outline of the film holding unit 20 .

FIG. 5 is a diagram schematically showing a state where the measuring unit 30 is located at the first position.

FIG. 6 is a diagram schematically showing a state where the measurement unit 30 is located at the second position.

FIG. 7 is a block diagram showing the electrical configuration of the film frame holding device 1. As shown in FIG.

FIG. 8 is a flow chart showing the flow of processing performed by the film frame holding device 1 .

FIG. 9 is a flowchart showing the flow of processing in step S107.

FIG. 10 is a schematic diagram showing the situation during the inspection shown in step S107.

FIG. 11 is a schematic diagram showing the situation during the inspection shown in step S107.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each figure, the same code|symbol is attached|subjected to the same element, and description of the part which overlaps is abbreviate|omitted.

<First Embodiment>

Fig. 1 is a schematic front view showing a film frame holding device 1 according to a first embodiment. The film frame holding device 1 is for attaching the film 100 to a substantially plate-shaped mask M held in a substantially vertical direction. The mask M is held in a substantially vertical direction by a mask holding device not shown.

First, the film 100 will be described. FIG. 2 is a perspective view schematically showing the film 100 . Fig. 3 is the A-A sectional view of Fig. 2 . The film 100 mainly has a film frame 101 , a film 102 of the film supported on the film frame 101 , and an adhesive member 103 formed on the lower surface of the film frame 101 (see FIG. 3 ).

The film frame 101 is a frame shape (a substantially hollow cylindrical shape) having a substantially rectangular outer periphery, and is formed of metal such as iron or aluminum. The film frame 101 has a substantially rectangular shape in plan view (viewed from the upper side of the paper in FIG. 2 ), and has a hollow portion 101e in the center. on the film frame 101 to cover the hollow portion 101e The film 102 of the thin film is set in the same way. In the film frame 101, the size of the hollow portion 101e is about the same as the size of the photomask (for example, about 520 mm×800 mm to 1620 mm×1780 mm). The width of the frame-shaped portion of the film frame 101 is about tens of mm, and the thickness is about 2 mm to 10 mm.

The film frame 101 has a substantially parallel upper surface 101a and a lower surface 101b. Also, the outer peripheral surface 101c perpendicular to the upper surface 101a and the lower surface 101b of the film frame 101 includes a groove 101d. The groove 101d is formed along the outer peripheral surface 101c, and the height and depth are about 2 mm. A film holding member 21 provided on the frame body 10 (details described below) is inserted into the groove 101d.

The film of thin film 102 is a thin film of sub-micron thickness. The film 102 of the film is supported on the upper surface 101a of the film frame 101 in such a way as to cover the hollow portion 101e of the film frame 101 . When the film frame 101 is attached to the photomask substrate, the film 102 of the film and the pattern forming surface (surface) of the mask M are provided at a predetermined interval.

The adhesive member 103 is disposed on the lower surface 101b of the film frame 101 . The adhesive member 103 is formed on the entire periphery of the film frame 101 in a frame shape. Also, the adhesive member 103 is provided so as not to protrude from the film frame 101 .

Return to the description of FIG. 1 . The film frame gripping device 1 mainly includes a frame body 10 , a film gripping unit 20 , and a measuring unit 30 . The film holding unit 20 and the measuring unit 30 are provided on the frame body 10 .

The frame body 10 is a frame-shaped member formed by combining a plurality of rods into a substantially rectangular shape. The frame body 10 mainly includes vertical frame portions 11 , 12 , upper frame portions 13 , 14 , and a frame 15 provided outside the vertical frame portions 11 , 12 and the upper frame portions 13 , 14 . The vertical frame parts 11 and 12, the upper frame parts 13 and 14, and the frame 15 are formed of metals such as iron and aluminum, for example.

The vertical frame parts 11 and 12 are substantially rod-shaped members extending substantially vertically in the posture shown in FIG. , the length direction is set along the z direction. The vertical frame parts 11 and 12 are provided so as to be movable along the lower end part 15a and the upper end part 15b of the frame 15, that is, in the x direction. The mechanisms that make the vertical frame parts 11, 12 move along the x direction can use known various technology.

The upper frame parts 13, 14 are substantially rod-shaped members extending substantially horizontally near the upper ends of the vertical frame parts 11, 12 in the posture when the film 100 is attached to the mask M shown in FIG. The direction is set along the x direction. The upper frame parts 13, 14 are provided so as to be movable along the vertical frame parts 11, 12, ie, along the z direction, respectively. As a mechanism for moving the upper frame parts 13 and 14 in the z direction, various known techniques can be used.

In addition, the form of the upper frame part 13,14 is not limited to this. For example, the upper frame portion may be constituted by a single rod extended approximately horizontally, and the vicinity of both ends of the single rod may be provided in the vertical frame portions 11 and 12 .

As described above, by making the vertical frame portions 11, 12 and the upper frame portions 13, 14 movable, the size of the frame formed by the vertical frame portions 11, 12, the upper frame portions 13, 14, and the lower end portion 15a can be changed. , so as to deal with films 100 of various sizes. In addition, the film 100 includes, for example, a size of 420 mm×720 mm, a size of 700 mm×800 mm, a size of 520 mm×680 mm, a size of 750 mm×1300 mm, and a size of 1520 mm×1680 mm.

The housing 10 is provided so as to be movable in the horizontal direction by a movement mechanism not shown. When attaching the film 100 to the mask M, the frame body 10 moves in parallel along the +y direction. The housing 10 has a drive unit 16 (see FIG. 7 ) and a mechanism for moving the housing 10 in the horizontal direction. The mechanism for moving the frame body 10 in the horizontal direction is well known, so the description is omitted.

In addition, the frame body 10 is provided with an unillustrated rotation shaft near the lower end. The frame body 10 can be centered on the rotation axis at a position where the plane formed by the frame 15 is approximately horizontal (approximately parallel to the xy plane) and at a position where the plane formed by the frame 15 is approximately vertical (approximately parallel to the xz plane). rotate between. In FIG. 1, in the state where the frame body 10 holds the film 100, the distance between the upper end side (+z side) and the lower surface 101b (the inner side of the paper in FIG. 1 ) of the frame body 10 and the mask M is smaller than the lower end side (-z side). The lower surface 101b on side z) is inclined relative to the vertical direction in such a way that the distance between the lower surface 101b and the above-mentioned mask is closer.

The film holding part 20 has a plurality of films that hold the outer peripheral surface 101c of the film frame 101 Hold the member 21 . The film gripping member 21 is provided in the vertical frame parts 11 and 12, the upper frame parts 13 and 14, the lower end part 15a, and the upper end part 15b.

In the example shown in FIG. 1, five film holding members 21 are respectively provided on the vertical frame parts 11 and 12, one film holding member 21 is respectively provided on the upper frame parts 13 and 14, and five film holding members 21 are provided on the lower end part 15a. As for the member 21, one film holding member 21 is provided at the upper end portion 15b, but the position and number of the film holding members 21 are not limited to this.

Depending on the size of the film 100, the film holding member 21 used varies. In FIG. 1 , among the film holding members 21 provided in the frame body 10 , only the film holding member 21 that is in contact with the film 100 (here, the outer peripheral surface 101 c ) is used.

The film gripping member 21 is provided so as to be able to move horizontally or vertically between a contact position where it contacts the outer peripheral surface 101c and a retracted position where it does not contact the outer peripheral surface 101c. FIG. 4 is a diagram showing the outline of the film holding unit 20 .

The film holding member 21 is formed of a metal plate. In addition, the film holding member 21 is not limited to a plate-shaped member, For example, it can also be formed using a rod-shaped member.

The drive member 22 is provided on the film holding member 21 . The driving member 22 has a rod 22a and an actuator 22b that moves the rod 22a. The film holding member 21 is connected to the rod 22a. The actuator 22b is provided in the housing 10 (not shown in FIG. 4 ).

The film holding member 21 is at the insertion position (refer to the solid line in FIG. 4 ) where the film holding member 21 is inserted into the groove 101d by the driving member 22 and the film holding member 21 is not inserted into the groove 101d. It moves in the horizontal direction between retracted positions (refer to the dot lock line in FIG. 4 ) that do not interfere with the film frame 101 .

The front end of the film holding member 21 is covered with a sheet or the like formed of resin (for example, ultra-high molecular weight polyethylene). Thereby, when the film holding member 21 is inserted into the groove 101d, it is possible to prevent the film holding member 21 or the film frame 101 from being ground to generate dust.

Return to the description of FIG. 1 . The measuring unit 30 measures the height (position in the y direction) of the mask M or the film frame 101 . The measurement part 30 is provided in the frame body 10 (here, the upper frame parts 13 and 14). The measurement unit 30 is provided at a position where it does not interfere with the film holding member 21 . In other words, when viewed from a direction (here, the y direction) substantially perpendicular to the direction in which the rods (for example, the upper frame parts 13 and 14) constituting the frame body 10 are extended, the measuring part 30 and the film holding member 21 are arranged on different locations.

The measurement part 30 is in the vertical direction between the first position (refer to the solid line in FIG. 1 ) that overlaps the mask M near the front end and the second position (refer to the two-point lock line in FIG. 1 ) that overlaps the film frame 101 near the front end. The method of movement is set.

The measurement part 30 provided on the upper frame part 13 is provided near the vertical frame part 11 , and the measurement part 30 provided on the upper frame part 14 is provided near the vertical frame part 12 . In other words, the two measurement units 30 are respectively provided near the upper side and near the left end of the housing 10 , and are provided near the upper side and near the right end of the housing 10 . Thereby, the measurement part 30 can measure the upper end part of the mask M or the film frame 101, and the point near both left and right ends. However, the position and number of the measuring units 30 are not limited to those shown in FIG. 1 .

FIG. 5 is a diagram schematically showing a state where the measuring unit 30 is located at the first position. FIG. 6 is a diagram schematically showing a state where the measurement unit 30 is located at the second position.

The measurement unit 30 mainly includes an ultrasonic sensor 31 and a reflector 32 . The ultrasonic sensor 31 is a distance measuring sensor that sends ultrasonic waves to the object and receives its reflected waves, and measures the distance to the target object according to the time interval between signal sending and reflected wave reception. The ultrasonic sensor 31 is known, so detailed description is omitted.

The reflection plate 32 reflects the ultrasonic wave sent by the ultrasonic sensor 31 . By setting the reflection part 32a of the reflection plate 32 at an inclination of 45 degrees on the yz plane, the ultrasonic wave sent downward (towards -z) from the ultrasonic sensor 31 is reflected in the +y direction in the reflection part 32a (Refer to the 2-point lock line in Figures 5 and 6).

In addition, in this embodiment, the measurement unit 30 has an ultrasonic sensor 31, but The sensor for calculating the distance is not limited to the ultrasonic sensor 31 . As the distance measuring sensor, an optical sensor that uses light to find the distance, or an eddy current sensor can also be used. As an optical sensor, for example, a laser displacement sensor using a laser or a triangulation distance measuring optical sensor can be used. However, it is preferable to use a non-contact sensor as the measuring unit 30 . In addition, although the reflection plate 32 is provided in this embodiment, the reflection plate 32 may not be used. In this case, it is sufficient to install the ultrasonic sensor 31 so as to transmit ultrasonic waves in the +y direction.

The measuring unit 30 has an actuator 33 . The actuator 33 moves the ultrasonic sensor 31 and the reflection plate 32 along the z direction (vertical direction) between the first position and the second position.

In FIG. 5 , the vicinity of the measurement position of the measurement unit 30 (here, the front end (-z end) of the measurement unit 30 ) overlaps the mask M. Therefore, the ultrasonic wave transmitted from the ultrasonic sensor 31 reaches the surface Ma of the mask M, and the measurement unit 30 measures the distance between the reflection portion 32a and the surface Ma, that is, the height of the surface Ma (position in the y direction).

In FIG. 6 , the vicinity of the measurement position of the measurement unit 30 (here, the front end (-z end) of the measurement unit 30 ) overlaps the film frame 101 . Therefore, the ultrasonic wave transmitted from the ultrasonic sensor 31 reaches the thin-film film 102, and the measurement unit 30 measures the distance between the reflective portion 32a and the thin-film film 102, that is, the height of the thin-film film 102. When attaching the thin film 100 to the mask M, the difference between the height of the mask M and the height of the film 102 of the thin film becomes equal to or less than a threshold value.

FIG. 7 is a block diagram showing the electrical configuration of the film frame holding device 1. As shown in FIG. The film frame holding device 1 has a CPU (Central Processing Unit) 151, a RAM (Random Access Memory) 152, a ROM (Read Only Memory) 153, an input/output interface (I/F) 154, a communication interface (I/F) 155, and The media interface (I/F) 156 is connected to the drive unit 16, the actuator 22b, the measurement unit 30, and the like.

The CPU 151 operates according to the programs stored in the RAM 152 and the ROM 153 to control each part. Signals are input to the CPU 151 from the drive unit 16 , the actuator 22 b , and the measurement unit 30 . since The signal output from the CPU 151 is output to the drive unit 16 , the actuator 22 b , and the measurement unit 30 .

RAM 152 is a volatile memory. ROM 153 is a non-volatile memory for storing various control programs and the like. The CPU 151 operates according to the programs stored in the RAM 152 and the ROM 153 to control each part. In addition, the ROM 153 stores an activation program executed by the CPU 151 when the film frame holding device 1 is started, a program depending on the hardware of the film frame holding device 1 , and the like. Also, the RAM 152 stores programs executed by the CPU 151, data used by the CPU 151, and the like.

The CPU 151 controls an input-output device 161 such as a keyboard or a mouse through the input-output interface 154 . The communication interface 155 receives data from other machines via the network 162 and transmits them to the CPU 151 , and transmits the data generated by the CPU 151 to other machines via the network 162 .

The media interface 156 reads the programs or data stored in the storage medium 163 and stores them in the RAM 152 . In addition, the storage medium 163 is IC card, SD card, DVD etc., for example.

In addition, the program which realizes each function is read from the storage medium 163, for example, is installed in the film frame gripping apparatus 1 via the RAM 152, and is executed by CPU151.

The CPU 151 has a function of controlling a control section 151a of each section of the film frame gripping device 1 according to an input signal. The control unit 151a is constructed by executing a predetermined program read by the CPU 151 . The processing performed by the control unit 151a will be described in detail below.

In describing the features of this embodiment, the configuration of the film frame gripping device 1 shown in FIG. 7 is to describe the main configuration, and does not exclude configurations that are included in, for example, general information processing devices. The functional configuration shown in FIG. 7 is classified in order to make the configuration of the film frame gripping device 1 easy to understand, and the method or name of the classification of the constituent elements is not limited to the form described in FIG. 7 . The structure of the film frame gripping device 1 can be further classified into more constituent elements according to the processing content, and processing of plural constituent elements can also be executed by one constituent element.

The operation of the film frame holding device 1 thus constituted will be described. FIG. 8 is a flow chart showing the flow of processing performed by the film frame holding device 1 . The following processes are mainly controlled by Section 151a is performed.

First, the control unit 151a controls the actuator 22b to move the film holding member 21 from the withdrawn position to the insertion position, and inserts the film holding member 21 into the groove 101d (step S101). The control part 151a performs the process of step S101 for each film holding member 21 one by one. Thereby, the film frame holding device 1 holds the film 100 . The amount to move the film holding member 21 between the retreat position and the insertion position is set in advance and stored in the ROM 153 .

The control unit 151a drives the driving unit 16 to rotate the housing 10 in a substantially vertical direction (step S102). The frame body 10 holds the film 100 , so the film 100 also rotates together with the frame body 10 . Next, the control part 151a inspects the film 100 held by the frame body 10 using the inspection part which is not shown in figure (step S103). The inspection part has a transmitting part which transmits a laser beam etc., and inspects the film 100 using various well-known methods. Step S103 is already known, so the description is omitted.

If it is confirmed that there is no abnormality in the film 100 through the inspection process (step S103), the control unit 151a uses the drive unit 16 to move the frame 10 in parallel into the device on which the mask M is placed (step S104). Then, the mask M and the film 100 are aligned (aligned) (step S105). In steps S104 and S105, the control unit 151a rotates the frame body 10 through the driving unit 16, so that the distance between the lower surface 101b on the upper end side (ie, the adhesive member 103) and the mask M is smaller than the lower surface 101b on the lower end side (ie, the adhesive member 103 ). The frame body 10 is tilted so that the distance between the member 103) and the mask M is closer. The inclination is at a slight angle relative to the vertical.

After alignment (step S105), the control unit 151a attaches the film 100 to the photomask (step S106). Step S106 is the so-called temporary attaching step.

The control unit 151a moves the frame body 10 in parallel (here, in the +y direction) with the frame body 10 tilted at a slight angle relative to the vertical direction by the drive unit 16, thereby bringing the film 100 close to the mask M. Thus, the film 100 comes into contact with the mask M. As shown in FIG. The control part 151a moves the film 100 to the direction (+y direction) which approaches the mask M in this state. However, since the film 100 is in contact with the mask M, the film 100 is pressed by the mask M, and the film 100 is attached to the mask M by the adhesive member 103 .

In the attaching step (step S106 ), the film 100 is only inclined at a slight angle relative to the mask M. On the other hand, when the film 100 is substantially parallel to the mask M without inclination, the adhesive member 103 and the mask M are only in partial contact due to deformation of the film 100, so that the film 100 cannot be attached to the mask M. The possibility of covering M. Therefore, it is desirable to incline the film 100 relative to the mask M by only a slight angle.

Next, the control part 151a checks whether the film 100 is attached to the mask M using the measuring part 30 (step S107). FIG. 9 is a flowchart showing the flow of processing in step S107.

First, the control unit 151a arranges the measurement unit 30 at the first position as shown in FIG. 5 . Then, ultrasonic waves are sent from the ultrasonic sensor 31 to measure the height (position in the y direction) of the surface Ma of the mask M (step S201).

Next, the control part 151a moves the ultrasonic sensor 31 and the reflection plate 32 by the actuator 33, and arrange|positions the measurement part 30 in the 2nd position as shown in FIG. Then, ultrasonic waves are sent from the ultrasonic sensor 31, and the height (position in the y direction) of the film 102 of the thin film is measured (step S202). In addition, the distance for moving the ultrasonic sensor 31 and the reflection plate 32 from the first position to the second position is preset and stored in the ROM 153 .

Thereafter, the control unit 151a compares the difference between the height of the mask M and the height of the film 102 of the thin film with the threshold T (step S203). The threshold T is set to an arbitrary value in advance. For example, when the thickness of the film frame 101 is approximately 7 mm and the thickness of the adhesive member 103 is approximately 1 mm, the threshold T is approximately 8 mm. Information about the threshold T (value here) is stored in the ROM 153 .

The control unit 151a determines the sticking state of the film 100 according to the comparison result in step S203 (step S204). When the difference between the height of the mask M and the height of the film 102 of the film is not below the threshold (NO in step S204), the control unit 151a determines that the film 100 is not attached to the mask M. When the film 100 is not attached to the mask M, the control unit 151a returns to the process of moving the frame 10 in parallel to bring the film 100 close to the mask M (step S106), and performs the attachment inspection of step S107 again. reason. When the difference between the height of the mask M and the height of the film 102 of the thin film is not below the threshold value even after steps S106 and S107 are repeated several times, the control unit 151 a stops the processing.

When the difference between the height of the mask M and the height of the film 102 of the film is below the threshold (YES in step S204), the control unit 151a determines that the film 100 has been attached to the mask M, and releases the film 100. The grasping (step S108, refer to Fig. 8). In step S108, the control unit 151a controls the actuator 22b to move the film holding member 21 from the insertion position to the withdrawn position so that the front end of the film holding member 21 does not come into contact with the groove 101d.

Then, the control unit 151a ends the series of processes shown in FIG. 8 . When the series of processes is completed, the control unit 151a presses the four corners of the film 100 against the mask M using a pressing unit not shown, and attaches the film 100 to the mask M (so-called final attachment).

10 and 11 are schematic diagrams showing the situation during the inspection shown in step S107. The dotted line in FIG. 10 shows the situation of the film frame 101 when the film 102 of the film is not provided, and the solid line in FIG. 10 shows the situation of the film frame 101 when the film 102 of the film is provided. When the thin film 102 is provided on the thin film frame 101, the central part of each side of the thin film frame 101 enters inside when viewed along the central axis of the thin film frame 101 due to the tension of the thin film film 102. In this embodiment, the measurement unit 30 is provided near the upper side and near the left and right ends of the frame body 10 (not shown in FIG. 10 ), and the measurement unit 30 measures the height near the upper end and the left and right ends of the film 100 Therefore, even if the film frame 101 is deformed, the height of the film 102 of the film can be measured in the second position measuring unit 30 .

Also, as shown in FIG. 11 , when the film 100 is attached to the mask M, it is assumed that one end of the attached film 100 (for example, the end on the +x side) is produced, while the other end of the unattached film 100 (for example, The abnormal situation of the end of -x side). In the present embodiment, since the measuring section 30 measures the height near the upper end and near the left and right ends of the film 100, if such an abnormality occurs, a measuring section 30 (here, the measuring section 30 on the +x side) ), the difference between the height of the mask M and the height of the film 102 of the thin film becomes below the threshold value, but in another measurement unit 30 (here, the measurement unit 30 on the -x side), the height of the mask M and the height of the thin film The difference in the height of the film 102 is not below the threshold value. Therefore, such an abnormality can be detected by disposing the measurement unit 30 provided on the upper frame part 13 near the vertical frame part 11 and the measurement part 30 provided on the upper frame part 14 near the vertical frame part 12. .

According to this embodiment, it can be confirmed that the film 100 is attached to the mask M reliably. Therefore, it is possible to prevent the situation that the film 100 is released and the film 100 falls when the film 100 is not firmly attached to the mask M. FIG.

When the attached state of the film 100 is confirmed by the coordinates of the motor that moves the frame 10, for example, the positional relationship between the film 100 and the mask M may be different from the assumption due to damage to the film holding member 21, etc. In the state where the film 100 is attached to the mask M, there is a risk of releasing the film 100 . Especially in the case of a large film 100, dropping one film 100 would cause a high loss of about 10 million yen. Therefore, unnecessary costs can be reduced by confirming that the film 100 is reliably attached to the mask M as in the present embodiment.

Also, according to this embodiment, since the distance between the surface Ma of the mask M and the film 100 is actually measured to confirm the attached state, the film frame gripping device 1 can be easily handled even when handling film frames 101 of various thicknesses. response.

Also, according to the present embodiment, by moving the frame body 10, that is, the film 100 in parallel with a slight angle with respect to the vertical direction, and pressing the adhesive member 103 against the mask M, the upper end of the film 100 is pasted. Attached to the mask M, in the vicinity of the upper end of the mask M and the film 100, determine whether to attach the film 100 to the mask M according to the results obtained by measuring the height of the surface Ma and the height of the film 102 of the film, so that it can be accurately The attached state of the film 100 is judged.

In addition, in this embodiment, the film frame gripping device 1 has two measuring parts 30, and the two measuring parts 30 are provided near the upper side of the frame body 10 and near the left and right ends, but the positions and numbers of the measuring parts 30 are different. It is not limited to this. The two measuring parts 30 may also be provided near the upper ends of the vertical frame parts 11 and 12 instead of being provided on the upper frame parts 13 and 14 . In this case, the actuator 33 makes the ultrasonic sensor 31 and the feedback The shooter 32 may move in the x direction (horizontal direction) between the first position and the second position.

Moreover, for example, the film frame gripping apparatus 1 may have the three measurement parts 30, and the three measurement parts 30 may be provided in the upper frame part 13,14 and the lower end part 15a. By measuring the height of the film 102 of the film near the upper and lower ends of the film 100, it is possible to more reliably confirm whether or not the film 100 is attached. In this case, when the film 100 is brought into contact with the mask M, the distance between the lower surface 101b on the upper end side and the mask M is closer than the distance between the lower surface 101b on the lower end side and the mask M. Therefore, in steps S203, In 204, the threshold value on the lower end side may be made larger than the threshold value on the upper end side. In addition, it is preferable that the measurement part 30 provided in the lower end part 15a is arrange|positioned in the substantially center part of the x direction of the lower end part 15a.

Also, for example, the measurement unit 30 may be provided on the upper end portion 15 b instead of the upper frame portions 13 and 14 . Since the measuring unit 30 is provided at the upper end portion 15b, the height of the film 102 of the thin film can be measured at a position near the upper end of the thin film 100. When there is one measurement unit 30 provided on the upper end portion 15b, the measurement unit 30 is preferably provided near the center of the frame body 10 . However, in order to detect a state where a part of the film 100 (for example, the +x end) is attached to the mask M and the other part (for example, the -x end) is not attached to the mask M, it is ideal to arrange the measuring part 30 on the frame The upper side of the body 10 and near the left and right ends.

Also, in the present embodiment, the vertical frame portions 11, 12 or the upper frame portions 13, 14 are arranged so that they can move relative to the frame 15, so that the frame body 10 can hold films 100 of various sizes, but the vertical frame portions 11, 12 or the upper frame parts 13, 14 are not essential. For example, only the frame 15 is sufficient when the frame body 10 only needs to be able to hold one type of film 100 . In this case, the measuring unit 30 measures points near the upper side and near both left and right ends of the film 100 , so it is ideally installed near two corners on the upper side of the frame 15 .

The embodiment of the present invention has been described in detail above with reference to the drawings, but the specific configuration is not limited to the embodiment, and design changes within the scope of the present invention are also included. Appropriate changes, additions, conversions, and the like can be made to each element of the embodiment as long as those with ordinary knowledge in the technical field can do so.

In addition, in the present invention, the term "approximately" includes not only the situation of being exactly the same, but also the concept of error or deformation to the extent that the identity is not lost. For example, the so-called approximately parallel is not limited to the situation of being strictly parallel, and includes concepts such as an error of about several degrees. Also, for example, when it is only expressed as parallel, orthogonal, etc., not only strictly parallel, orthogonal, etc., but also approximately parallel, approximately orthogonal, etc. are included. In addition, in the present invention, "nearby" means an area including a range (arbitrary determination) in the vicinity of a reference position. For example, in the case of the vicinity of A, the concept refers to the area in the vicinity of A, which may or may not include A.

1‧‧‧Film frame holding device

10‧‧‧frame

11, 12‧‧‧Longitudinal frame

13, 14‧‧‧upper frame

15‧‧‧Frame

15a‧‧‧lower end

15b‧‧‧upper end

20‧‧‧Film control part

21‧‧‧Film holding member

30‧‧‧Measurement Department

100‧‧‧film

101‧‧‧Film frame

101a‧‧‧upper surface

101b‧‧‧lower surface

102‧‧‧Membrane of thin film

M‧‧‧Masking

Claims (10)

A film frame holding device, which is used to hold a film and attach the film to a substantially plate-shaped mask maintained in a substantially vertical direction. The film has a substantially hollow cylindrical film frame to cover the hollow portion of the film frame The film of the film provided on the first surface substantially perpendicular to the outer peripheral surface of the above-mentioned film frame, and the adhesive member provided on the second surface substantially parallel to the above-mentioned first surface, are characterized in that: A frame body that is a frame-shaped member that combines a plurality of rods into a roughly rectangular shape, a film gripping portion provided on the frame body and gripping the outer peripheral surface of the film frame, The measurement part installed in the above frame, and a control unit that controls the frame body, the film gripping unit, and the measurement unit, The measuring unit is provided in a manner to be movable between a first position where the vicinity of the front end overlaps the mask and a second position where the vicinity of the front end overlaps the film frame, Viewed from a direction substantially perpendicular to the extending direction of the rod, the film gripping portion and the measuring portion are located at different positions, The control unit arranges the measurement unit at the first position in a state where the film holding unit holds the film frame, extends the frame body in a substantially vertical direction, and makes the adhesive member contact the mask. The first distance which is the distance from the surface of the mask is measured, and the second distance which is the distance from the film of the thin film is measured by moving the measurement unit to the second position. The film frame holding device according to claim 1, wherein, The film holding part has a film holding member provided so as to be movable horizontally or vertically between a contact position abutting against the outer peripheral surface and a retracted position not abutting the outer peripheral surface, The above-mentioned frame can move along the horizontal direction, In a state where the film holding member is arranged at the contact position, the film frame is held and the frame body is extended in a substantially vertical direction, the control unit moves the frame body in the horizontal direction so that the adhesive member and the The mask is in contact, the measuring unit is arranged at the first position to measure the first distance, and the measuring unit is moved to the second position to measure the second distance. Between the first distance and the second distance When the difference is equal to or less than a threshold value, the film holding member can be moved from the contact position to the retracted position. The film frame holding device according to claim 1, wherein, The measurement unit has a first measurement unit provided near the upper side and near the left end of the frame and a first measurement unit provided near the upper side and near the right end of the frame when the adhesive member is brought into contact with the mask. 2 Measurement Department. The film frame holding device according to claim 2, wherein, The measurement unit has a first measurement unit provided near the upper side and near the left end of the frame and a first measurement unit provided near the upper side and near the right end of the frame when the adhesive member is brought into contact with the mask. 2 Measurement Department. The film frame holding device according to any one of Claims 1 to 4, wherein, The frame body has a substantially rod-shaped first vertical frame portion and a second vertical frame portion extending substantially vertically in a posture when the adhesive member is in contact with the mask, and a substantially horizontally extending portion on the above-mentioned mask. the upper frame portion near the upper end of the first vertical frame portion and the second vertical frame portion, The first vertical frame portion and the second vertical frame portion can move along the extending direction of the upper frame portion, The upper frame portion can move along the extending direction of the first vertical frame portion and the second vertical frame portion, The film gripping portion is provided on the first vertical frame portion and the second vertical frame portion, The measurement unit is provided on the upper frame. The film frame holding device according to claim 5, wherein, The frame body has a lower frame portion extended substantially horizontally near the lower ends of the first vertical frame portion and the second vertical frame portion, The said measurement part has the 3rd measurement part provided in the said lower frame part. The film frame holding device according to any one of Claims 1 to 4, wherein, The frame body is inclined such that the distance between the second surface on the upper end side and the mask is closer than the distance between the second surface on the lower end side and the mask when the adhesive member is brought into contact with the mask. The film frame holding device according to claim 5, wherein, The frame body is inclined such that the distance between the second surface on the upper end side and the mask is closer than the distance between the second surface on the lower end side and the mask when the adhesive member is brought into contact with the mask. The film frame holding device according to claim 6, wherein, The frame body is inclined such that the distance between the second surface on the upper end side and the mask is closer than the distance between the second surface on the lower end side and the mask when the adhesive member is brought into contact with the mask. A method of holding a film frame, which is to hold a film and attach it to a substantially plate-shaped mask maintained in a substantially vertical direction, the above-mentioned film has a substantially hollow cylindrical film frame to cover the hollow portion of the above-mentioned film frame The film of the film provided on the first surface substantially perpendicular to the outer peripheral surface of the above-mentioned film frame, and the adhesive member provided on the second surface substantially parallel to the above-mentioned first surface, are characterized in that: It arranges the film holding member provided in the frame so as to be movable in the horizontal direction at the abutting position against the above-mentioned outer peripheral surface to hold the above-mentioned film frame, In the state of holding the above-mentioned film frame, the above-mentioned frame body is moved in parallel so that the above-mentioned adhesive member is in contact with the above-mentioned mask, The measuring part provided on the above-mentioned frame is arranged at the first position overlapping the above-mentioned mask near the front end, and the first distance which is the distance from the surface of the above-mentioned mask is measured, Move the above-mentioned measuring part to the second position where the vicinity of the above-mentioned front end overlaps with the above-mentioned film frame, and measure the second distance as the distance from the film of the above-mentioned film, When the difference between the first distance and the second distance is equal to or less than a threshold value, the film holding member is movable from the contact position to a retreat position where it does not contact the outer peripheral surface.

Images