TWI668785B - Film frame holding device and film frame holding method - Google Patents

Abstract

Even when the film frame is distorted, the film frame can be held without the operator.

The heights of the film holding member and the grooves formed on the side of the film 100 are continuously obtained by the measurement sections provided on the film holding members. The film holding member is directed to two rods 213 that are held substantially horizontally at a predetermined interval. And 214 are provided respectively. Move the container body 11 upward. When the height of the film holding member is substantially the same as the height of the groove, insert the film holding member into the groove. When the film holding member is inserted into the groove, move the container body 11 downward. .

Description

Film frame holding device and film frame holding method

The invention relates to a film frame holding device and a film frame holding method.

Patent Document 1 discloses a method of removing a thin film frame by holding the outer periphery of a substrate to which the thin film frame is adhered, and aligning the positions of the thin rods with the outer sides of the two sides constituting the opposite sides of the thin film frame. Each of the holes provided in the plurality of positions is inserted to support the film frame, and a force perpendicular to the substrate is applied to the thin rod in a direction in which the film frame is evenly separated from the substrate.

[Prior technical literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2013-125120

As the film frame, the surface to which the film for film is adhered has a wide sheet shape. Therefore, distortion is likely to occur in a direction (height direction) orthogonal to the surface to which the film for film is adhered. However, in the invention described in Patent Document 1, distortion of the thin film frame is not considered.

Therefore, in the invention described in Patent Document 1, when the position of the hole provided in the film frame is deviated in the height direction due to distortion of the film frame or the like, a thin rod may not be inserted into the hole provided in the film frame. Bad condition.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a thin film frame holding device and a thin film frame holding method that can hold the thin film frame without an operator even when distortion occurs in the thin film frame or the like.

In order to solve the above-mentioned problems, the film frame holding device of the present invention includes a film frame, which is, for example, a substantially hollow cylindrical film frame, and has a first end surface provided with a film for covering a hollow portion. A second end surface with an adhesive member and substantially parallel to the first end surface, and a side surface with a groove formed; a protective sheet adhered to the adhesive member; a container body with the first end surface facing substantially horizontally upward, Those who place the film frame with the second end surface facing substantially horizontally and fix a part of the protection sheet; and a first drive unit that makes the container body in a direction substantially orthogonal to the first surface, that is, a vertical direction Moving; a jig frame, which is provided above the container body and has two rods held substantially horizontally at a predetermined interval; a plurality of film holding members are provided for each of the two rods; and The film holding member is in a substantially horizontal direction between a first position where the film holding member is inserted into the groove and a second position where the film holding member is not inserted into the groove. A second driving unit that is movable, the second driving unit being provided for each of the plurality of film holding members; a measuring unit having a plurality of ranging sensors for the plurality of above-mentioned plurality One film holding member is provided respectively. When the film holding member is located at the first position, the position of the film holding member in a substantially vertical direction, that is, the height is continuously measured. When the film holding member is located at the second position, When the height of the first end surface is continuously measured; and the control unit obtains the height of the film holding member and the groove based on the measurement results continuously measured by the measurement unit, and controls the first driving unit and the The second driving unit is configured to move the container body upward When moving, when the height of the film holding member is substantially the same as the height of the groove, move the film holding member from the second position to the first position, and when all the film holding members have been moved to the first When the 1-position is moved, the container body is moved downward.

According to the film frame holding device of the present invention, the heights of the film holding member and the groove formed on the side of the film frame are continuously obtained. The container body is moved upward, and the film holding member is inserted into the groove according to the height of the film holding member and the groove. When the film holding member is inserted into the groove, the container body is moved downward. Thereby, even when distortion occurs in the film frame or the like, the film frame can be held without an operator. Moreover, by providing a distance measurement sensor for each film holding member, it is possible to surely hold the film frame.

Here, when the film holding member has moved to the first position, the control unit may also control the first driving unit to move the container body downward for a first distance and stop the container body from moving, After that, when the height of the first end surface has been shifted upward by the first distance from the measurement unit, it is determined that the protective sheet and the adhesive member have been peeled off. This makes it possible to detect that the film frame has been peeled from the container body without passing through the operator.

Here, the container body has a substantially rectangular upper surface on which the film frame is placed, and the first driving portion includes a first actuator that moves a center of a first side of the upper surface and a first actuator The second actuator and the third actuator that move the first side that is substantially parallel to the second side that is closer to the end than the center on the upper side, respectively, and the control unit may separately control the first actuator. The second actuator and the third actuator are controlled. Thereby, the film frame can be moved in various forms.

Here, the control unit may also control the container body when the container body moves upward. The first actuator, the second actuator, and the third actuator are controlled such that the first actuator, the second actuator, and the third actuator are controlled based on the first distance sensor among the plurality of distance sensors included in the measurement unit. The relative position of the film holding member and the groove obtained from the measurement result, and the film holding obtained from the measurement result of the second ranging sensor different from the first ranging sensor. The relative positions of the members and the grooves are substantially the same. Thereby, even when the film frame is distorted or the like, the height of the grooves can be made substantially the same, and the time required to insert the film holding member into the groove can be shortened.

Here, the protection sheet may be located near the center of the first side and fixed to the upper surface, and when the container body is moved downward, the control unit first drives the first actuator. Thereby, the protective sheet can be peeled from the adhesive layer with a weak force.

Here, the jig frame may have a rotation axis provided near the ends of the two rods, and the two rods may be provided to be rotatable approximately 90 degrees around the rotation axis. Thereby, the film frame can be held by one film frame holding device, and the film frame can be adhered to a photomask or the like. In addition, by providing a distance measuring sensor for each film holding member, it is possible to detect adhesion of the film frame to a photomask or the like without passing through an operator.

Here, a positioning member may be provided. When the two rods are disposed substantially horizontally, the positioning member is perpendicular to the first end surface of the two rods on the end portion of the side where the rotation axis is not provided. Orientation. Thereby, the jig frame can be stably held at the peeling position.

Here, the jig frame may include the two rods, that is, the first rod and the second rod, and a third rod and a fourth rod which are substantially orthogonal to the first rod and the second rod. The 1st rod, the 2nd rod, and the 3rd rod are provided so as to be movable approximately orthogonal to the length direction. direction. Thereby, it is possible to hold film frames of various sizes.

Here, the jig frame may include a moving mechanism that moves the film holding member in a direction orthogonal to the first end surface. Accordingly, when a strong force is applied to the film holding member in a direction orthogonal to the first end surface, deformation, breakage, and the like of the film holding member can be prevented.

In order to solve the above-mentioned problem, the film frame holding method of the present invention is characterized in that a plurality of film holding members are disposed at a first position where the film holding member is inserted into a groove, and the plurality of film holding members are directed to a jig A plurality of two rods, each of which is held substantially horizontally at a predetermined interval, are provided respectively. The jig frame is provided above the container body. The container body is fixed with a part of a protective sheet adhered to the adhesive member, and a film frame. The first end surface is placed substantially horizontally upward and the second end surface is placed substantially horizontally downward on the container body, and the film frame is, for example, substantially hollow cylindrical and has the first end surface provided with a film for covering a hollow portion, The second end surface provided with the adhesive member and being substantially parallel to the first end surface, and a side surface on which the groove is formed; As a result of the measurement, the height of the film holding member is obtained; the film holding member is moved from the first position to the second position where the film holding member is not inserted into the groove; While moving the container body upward, the height of the groove is obtained based on the measurement result of the distance measuring sensor. If the height of the groove obtained is substantially consistent with the height of the film holding member, The film holding member is moved from the second position to the first position; when the film holding member is moved to the first position, the first driving unit is controlled to move the container body downward. Thereby, even when distortion occurs in the film frame or the like, the film frame can be held without an operator.

According to the present invention, even when the film frame or the like is distorted, the film frame can be held without an operator.

1, 2‧‧‧ film frame holding device

10‧‧‧ film storage container

11‧‧‧ container body

11a‧‧‧upper surface

12‧‧‧Driver

12a, 12b, 12c‧‧‧ actuator

20‧‧‧Jig

21, 21A‧‧‧ jig frame body

22‧‧‧Rotating shaft

23‧‧‧ abutment member

24‧‧‧ film holding mechanism

25‧‧‧Measurement Department

44‧‧‧Driver

44a‧‧‧ shaft

44b‧‧‧Actuator

100, 100A, 100B, 100C, 100D, 100E‧‧‧ film

101‧‧‧ film frame

101a‧‧‧upper surface

101b‧‧‧ lower surface

101c‧‧‧side

101d‧‧‧Trench

101e‧‧‧Hollow

102‧‧‧ film for film

103‧‧‧ Adhesive layer

104‧‧‧ film liner

104a‧‧‧ lead plate

104b‧‧‧root

105‧‧‧Tape

151‧‧‧CPU

151a‧‧‧Control Department

152‧‧‧RAM

153‧‧‧ROM

154‧‧‧I / O interface

155‧‧‧Communication interface

156‧‧‧Media Interface

163‧‧‧Memory Media

211, 211A‧‧‧ rod

211a, 211b‧‧‧‧board

211c‧‧‧axis

211d‧‧‧ rib

212‧‧‧ rod

212a‧‧‧ rod

212b‧‧‧hole

212c‧‧‧Guiding member

213, 213A‧‧‧ rod

214, 214A‧‧‧ rod

214a‧‧‧board

214b‧‧‧ Reinforcing board

214c‧‧‧End plate

214d‧‧‧hole

214e‧‧‧axis

215‧‧‧box

216‧‧‧Wiring piping guide

216a, 216b ‧‧‧ rod

217‧‧‧mobile agency

217a‧‧‧ rack

217b‧‧‧Actuator

217c‧‧‧Gear

218‧‧‧Actuator

241‧‧‧ film holding member

242‧‧‧ Holding Department

243‧‧‧base

243a‧‧‧base

251‧‧‧ Ultrasonic Sensor

252‧‧‧Reflector

FIG. 1 is a schematic perspective view showing a film frame holding device 1 according to a first embodiment.

FIG. 2 is a detailed perspective view showing the film storage container 10.

Fig. 3 is a sectional view taken along the line A-A in Fig. 2.

FIG. 4 is a detailed view showing the jig frame body 21 and the rotation shaft 22.

FIG. 5 is a diagram explaining a mechanism for moving the rod 214 in the x direction.

FIG. 6 is a diagram explaining a mechanism for moving the rod 212 in the y direction.

FIG. 7 is a detailed view showing the film holding mechanism 24a.

FIG. 8 is a view showing a state in which the film holding mechanism 24 a is not holding the film frame 101.

FIG. 9 is a block diagram showing the electrical configuration of the film frame holding device 1.

FIG. 10 is a flowchart showing a flow of a film holding process performed by the film frame holding device 1.

FIG. 11 is a diagram showing how the height of the upper surface 101a changes with time.

FIG. 12 is a flowchart showing a flow of a film adhesion process performed by the film frame holding device 1.

FIG. 13 is a schematic perspective view showing a jig frame body 21A of the film frame holding device 2.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In each drawing, the same elements are denoted by the same reference numerals, and descriptions of duplicated portions are omitted.

<First Embodiment>

FIG. 1 is a schematic perspective view showing a film frame holding device 1 according to a first embodiment. The film frame holding device 1 mainly includes a film storage container 10 and a jig frame 20 provided above (+ z direction) the film storage container 10.

The film storage container 10 mainly includes a container body 11 and a film 100. The film 100 placed on the container body 11 is supported by the jig frame 20 and is detached from the container body 11.

FIG. 2 is a detailed perspective view showing the film storage container 10. Fig. 3 is a sectional view taken along the line A-A in Fig. 2.

The film 100 mainly includes a film frame 101, a film film 102 laid on the film frame 101, and an adhesive layer 103 (see FIG. 3) formed on a lower surface of the film frame 101.

The film frame 101 has a frame shape (hollow cylindrical shape) having a substantially rectangular outer periphery, and is formed of a metal such as iron or aluminum. The size of the hollow portion 101e of the film frame 101 is about the same as that of the photomask (for example, about 520 mm × 800 mm to 1620 mm × 1780 mm). The frame-shaped portion of the film frame 101 has a width of about several tens mm and a thickness of about 2 mm to 10 mm.

The film frame 101 has a substantially parallel upper surface 101a and a lower surface 101b. Further, a groove 101d is formed along the outer peripheral surface of a side surface 101c of the film frame 101 orthogonal to the upper surface 101a and the lower surface 101b. The height and depth of the groove 101d are about 2 mm. In the groove 101d, a film holding member 241 (to be described in detail below) provided in the jig frame 20 is inserted.

The thin-film film 102 is a thin film having a thickness of sub-micron order. The film 102 for a film is laid on the upper surface 101 a of the film frame 101 so as to cover the hollow portion 101 e of the film frame 101. When the film frame 101 is adhered to the mask substrate, the pattern forming surface of the film 102 and the mask are provided at predetermined intervals.

The adhesive layer 103 is provided on the lower surface 101 b of the film frame 101, that is, the surface on the side opposite to the container body 11. The adhesive layer 103 is formed in a frame shape on the entire periphery of the thin film frame 101. The adhesive layer 103 is provided so as not to exceed the film frame 101. On the lower surface of the adhesive layer 103, a film pad 104 for protecting the adhesive layer 103 is provided.

The film pad 104 has a thickness of approximately 0.1 mm and has a frame shape substantially the same as the shape of the film frame 101. The film liner 104 is formed on the surface of a substrate made of, for example, PET by applying a release agent. The film liner 104 functions as a so-called release paper, and is peeled when the film 100 is taken out from the container body 11.

When the film 100 is placed on the upper surface 101 a of the container body 11, the film gasket 104 comes into contact with the container body 11. Therefore, the adhesive layer 103 is not in contact with the container body 11.

Leading plates 104a are formed near the center of the frame-shaped sides of the film pad 104, respectively. The lead plate 104 a is formed so as to protrude from the outer periphery of the film frame 101. The lead plate 104a is for easy peeling of the film pad 104.

The lead plate 104 a is fixed to the upper surface 101 a of the container body 11 by, for example, an adhesive tape 105. Thereby, the lead plate 104a, that is, the film 100 is fixed to the container body 11. Furthermore, the lead plate 104 a is not limited to being fixed to the upper surface 101 a, and may be fixed to any place of the container body 11.

As shown in FIG. 2, the thus formed film 100 is placed on the upper side (+ z side) of the upper surface 11 a of the container body 11. A driving member 12 is provided on the lower side (-z side) of the upper surface 11a.

The driving member 12 moves the upper surface 11 a of the container body 11 in the vertical direction (z direction). The driving member 12 mainly includes three actuators 12a, 12b, and 12c. The actuators 12a, 12b, and 12c have rods (not shown) whose front ends are movable in the z direction, and the front ends of the rods are provided on the lower side (-z side) of the upper surface 11a. Actuator 12a is provided at The upper surface 11a is near the long side 11b and is approximately the center of the long side 11b. The actuator 12b and the actuator 12c are provided near the long side 11c of the upper surface 11a and are closer to the end of the center of the longer side 11c. position. The actuators 12a, 12b, and 12c are provided so that they can be driven individually. Thereby, the film frame can be moved in various forms (to be described in detail later).

Return to the description of FIG. 1. The jig frame 20 mainly includes a jig frame body 21, a rotation shaft 22, an abutment member 23, and a film holding mechanism 24 (refer to FIG. 4, the film holding mechanism 24 includes film holding mechanisms 24a to 24n). Note that in FIG. 1, the film holding mechanism 24 is omitted.

FIG. 4 is a detailed view showing the jig frame body 21 and the rotation shaft 22. FIG. 4 shows a state where the jig frame body 21 and the rotation shaft 22 are viewed from the -z direction. The jig frame body 21 includes four rods 211, 212, 213, and 214, and a frame 215 provided around the rods 212, 213, and 214. The rods 211, 212, 213, 214, and frame 215 are formed of a metal such as iron or aluminum. The lengths of the two rods 211 and 212 are set along the x direction, and the lengths of the two rods 213 and 214 are set along the y direction. Thereby, the four rods 211, 212, 213, and 214 are combined into a frame shape.

Film holding mechanisms 24 are provided on the rods 211, 212, 213, and 214, respectively. In the example shown in FIG. 4, three thin film holding mechanisms 24 (24a to 24c, 24h to 24j) are provided on the rods 211 and 212, and four thin film holding mechanisms 24 (24d to 24d) are provided on the rods 213 and 214. 24g, 24k ~ 24n).

The frame 215 is roughly fixed to the rod 211 at both ends. A frame-shaped member having a U-shape (roughly U-shape) is provided on the outside of the rods 212, 213, and 214 combined into a frame. The rods 212, 213, and 214 are provided so as to be movable relative to the frame 215.

The rods 213 and 214 are provided so as to be movable along the length direction of the rods 211 and 212, that is, the x direction. The rod 212 is provided so as to be movable along the length direction of the rods 213 and 214, that is, the y direction.

FIG. 5 is a diagram explaining a mechanism for moving the rods 213 and 214 in the x direction. In FIG. 5, the rod 214 is taken as an example for description, and the rod 213 also uses the same mechanism as the rod 214, and thus the description is omitted.

The rod 214 is composed of a plate 214a whose largest surface is substantially parallel to the xy plane and a reinforcing plate 214b whose largest surface is substantially parallel to the yz plane into a substantially L-shaped rod-shaped member, and end plates 214c are provided at both ends. . A hole 214d is formed in the end plate 214c.

The rod 211 mainly has a plate 211a whose largest surface is substantially parallel to the xy plane, a plate 211b whose largest surface is substantially parallel to the xz plane, a substantially cylindrical shaft 211c whose length direction is substantially parallel to the plate 211a, and a shaft for mounting the shaft 211c. Ribs 211d. Furthermore, the board 211b is not necessary.

The shaft 211c is inserted into the hole 214d, and the shaft 211c is rotated by an actuator 218 provided on the shaft 211c, thereby moving the rod 214 along the shaft 211c, that is, in the x direction. Although illustration and detailed description are omitted, various known mechanisms can be used as a mechanism for moving the rod 214 along the axis 211c.

The wiring piping guide 216 includes a rod 216a and a rod 216b. One end of the rod 216a and the rod 216b are connected so as to be rotatable by a joint (joint). As the rod 214 moves in the x direction, the angle θ formed by the rod 216a and the rod 216b changes. It should be noted that the wiring piping guide 216 is not an essential configuration and can be omitted.

FIG. 6 is a diagram explaining a mechanism for moving the rod 212 in the y direction. The rod 214 has a shaft 214e. The shaft 214e is provided on the end plate 214c so that the longitudinal direction is substantially parallel to the y direction (not shown in FIG. 6). It should be noted that the shaft 214e is only shown in FIG. 6, and the shaft 214e is omitted in FIG. 5.

The rod 212 includes a rod 212a and a guide member 212c formed with a hole 212b into which the shaft 214e is inserted.

The moving mechanism 217 that moves the rod 212 includes a rack 217a provided on the plate 214a, an actuator 217b provided on the guide member 212c, and a gear 217c provided on the output shaft of the actuator 217b. By rotating the output shaft of the actuator 217b, that is, the gear 217c, which is a driving member, the guide member 212c, that is, the rod 212 is moved in the y direction along the rack 217a.

Furthermore, the present invention is not limited to a configuration in which the rods 213 and 214 can be moved in the x direction and a configuration in which the rods 212 can be moved in the y direction, and various configurations can be adopted.

Return to the description of FIG. 4. By moving the rods 212, 213, and 214 orthogonally to the length direction in this way, the size of the frame formed by the four rods 211, 212, 213, and 214 is changed. By changing the size of the frame formed by the rods 211, 212, 213, and 214, the size of the frame formed by the rods 211, 212, 213, and 214 can be made to correspond to various sizes of film 100 (100A, 100B, 100C). , 100D and 100E).

The film 100A is, for example, about 420mm × 720mm, the film 100B is, for example, about 700mm × 800mm, the film 100C is, for example, about 520mm × 680mm, the film 100D is, for example, about 750mm × 1300mm, and the film 100E is, for example, 1520mm × The size is about 1680mm.

The films 100A, 100B, and 100C are held by the film holding mechanisms 24b, 24d, 24e, 24m, and 24n. For the film 100D, the film holding mechanisms 24b, 24d, 24e, 24f, 24l, 24m, and 24n are used for holding. For the film 100E, all film holding mechanisms 24a to 24n are used for holding. As such, for each of the bars 211, 212, 213, 214 is provided with a plurality of film holding mechanisms 24, which can hold films 100 (100A, 100B, 100C, 100D, and 100E) of various sizes.

FIG. 7 is a detailed view showing the film holding mechanism 24. In FIG. 7, the film holding mechanism 24 a is described as an example. However, the configuration of the film holding mechanisms 24 b to 24 n is the same as that of the film holding mechanism 24 a, and therefore description thereof is omitted. FIG. 7 illustrates a state where the film holding mechanism 24 holds and holds the film frame 101. The container body 11 is omitted in FIG. 7.

The film holding mechanism 24a includes a film holding member 241a inserted into the groove 101d, a holding portion 242a holding the film holding member 241a, and a base 243a that attaches the holding portion 242a to the rod 211.

The film holding member 241a is formed of a metal plate material. The film holding member 241a in this embodiment is formed by bending the plate twice, but the plate may not be bent. The film holding member 241a is not limited to a plate-shaped member, and may be formed using, for example, a rod-shaped member.

A driving member 44 is provided on the holding portion 242a. The drive member 44 includes an actuator 44b including a rod body 44a whose front end moves in a direction (y direction) substantially orthogonal to the length direction (x direction) of the rod 211 (see the arrow in FIG. 7). The film holding member 241a is connected to the rod body 44a. Thereby, the film holding member 241a moves in a horizontal direction (along the xy plane) and in a direction orthogonal to the rod 211.

The film holding member 241a is inserted into the groove 101d by the driving member 44 at the insertion position of the film holding member 241a, and the film holding member 241a is not inserted into the groove 101d, and the film holding member 241a does not interfere with the film frame 101. It moves horizontally between the retreat position (refer to the dotted line in FIG. 7).

The front end of the film holding member 241a is made of resin (for example, ultra-high molecular weight). Polyethylene). Thereby, when the film holding member 241a has been inserted into the groove 101d, it is possible to prevent the film holding member 241 or the film frame 101 from being cut to generate dust.

The height of the rods 211, 212, 213, and 214 (positions in the z direction, the same applies hereinafter) has a difference of several millimeters to several tens of millimeters. Therefore, it is preferable that the heights of the front ends of the film holding members 241 (241a to 241n) are substantially the same by changing the heights of the bases 243 (243a to 243n), respectively. Furthermore, the method of making the heights of the front ends of the film holding members 241 (241a to 241n) approximately the same is not limited to this, and the film holding members may be changed by, for example, changing the height of the holding portions 242 (242a to 242n). The height of the front end of 241 (241a ~ 241n) is approximately the same.

Corresponding measurement sections 25 are provided on the film holding mechanisms 24. One measurement unit 25 (25a to 25n) is provided for each of the film holding mechanisms 24 (24a to 24n). Specifically, the film holding mechanism 24a is provided with a measurement section 25a, and similarly, the film holding mechanism 24b is provided with a measurement section 25b. A measurement unit 25n is provided in the film holding mechanism 24n. The configuration of the measurement sections 25b to 25n is the same as that of the measurement section 25a, and therefore description thereof is omitted.

The measurement unit 25a mainly includes an ultrasonic sensor 251a and a reflection plate 252a.

The ultrasonic sensor 251a is a ranging sensor that sends an ultrasonic wave to an object to receive its reflected wave, and measures the distance from the target object based on the time interval between the transmitted signal and the received reflected wave. In this embodiment, the ultrasonic sensor 251a uses a resolution of about 0.2 μm. Since the ultrasonic sensor 251a is well known, detailed description is omitted.

The reflection plate 252a reflects an ultrasonic wave transmitted from the ultrasonic sensor 251a. The ultrasonic sensor 251a transmits an ultrasonic wave in a direction (+ y direction) orthogonal to the length direction of the rod 211. Therefore, by setting the reflecting plate 252a to be inclined at 45 degrees on the yz plane, the ultrasonic wave transmitted from the ultrasonic sensor 251a can be reflected downward (-z direction) (refer to FIG. 7). Two-point chain line).

Furthermore, in this embodiment, the ultrasonic sensor 251a and the reflection plate 252a are provided on the holding portion 242a, but the installation positions of the ultrasonic sensor 251a and the reflection plate 252a are not limited to this. For example, the ultrasonic sensor 251a and the reflection plate 252a may be provided on the base 243a, or may be provided on the stick 211.

FIG. 8 illustrates a state where the film holding mechanism 24 is not holding the film frame 101. In FIG. 8, the case where the film holding member 241 is located at the retracted position is shown by a solid line, and the case where the film holding member 241 is located at the insertion position is shown by a broken line. Note that in FIG. 8, the container body 11 is omitted in the same manner as in FIG. 7.

The thin film 102 (not shown in FIG. 8) is formed of a material capable of reflecting ultrasonic waves. Therefore, when the film holding member 241 is in the retracted position (refer to the solid line in FIG. 8), the film holding member 241 does not interfere with the film frame 101 (the positions on the xy plane do not overlap), so the ultrasonic sensor The ultrasonic wave transmitted by 251a is reflected in the + z direction by the thin film film 102, and changed in the -y direction by the reflection plate 252a, and is received by the ultrasonic sensor 251a.

The film 102 for a thin film has a thickness of sub-micron order. Therefore, the height of the film 102 for a thin film is substantially the same as the height of the upper surface 101 a of the film frame 101. Therefore, the ultrasonic sensor 251a can measure the distance between the ultrasonic sensor 251a and the upper surface 101a, that is, the height of the upper surface 101a.

In this regard, as shown by the dotted line in FIG. 8, when the film holding member 241 is located at the insertion position, the ultrasonic waves transmitted from the ultrasonic sensor 251 a are blocked by the film holding member 241 before reaching the film film 102. As a result, the ultrasonic wave transmitted from the ultrasonic sensor 251a is reflected in the + z direction by the thin film holding member 241, changes its direction in the -y direction by the reflection plate 252a, and is received by the ultrasonic sensor 251a. Thereby, the ultrasonic sensor 251a can measure the ultrasonic sensor 251a The distance from the film holding member 241, that is, the height of the film holding member 241.

In addition, in this embodiment, in order to determine the height of the upper surface 101a of the film frame 101 or the height of the film holding member 241, the measurement unit 25 includes an ultrasonic sensor 251, but is used to determine the distance The sensor is not limited to the ultrasonic sensor 251. As the distance-measuring sensor, the measurement unit 25 may use an optical sensor or an eddy-current sensor to determine a distance using light. As the optical sensor, for example, a laser displacement sensor using a laser or a triangulation distance optical sensor can be used. However, since the film 102 for a thin film has a property of reflecting ultrasonic waves well, it is preferable to use an ultrasonic sensor as the distance measuring sensor.

In this embodiment, the reflection plate 252 is provided, but the reflection plate 252 may not be used. In this case, the ultrasonic sensor 251 may be provided at the position of the reflection plate 252 and the ultrasonic wave may be transmitted downward (-z direction).

In addition to this embodiment, a mechanism (reflecting plate moving mechanism) that moves the reflecting plate 252 substantially along the xy plane (see the chain line arrow in FIG. 8) may be added. As the reflecting plate moving mechanism, for example, the same mechanism as the mechanism for moving the film holding member 241 can be adopted.

The reflecting plate moving mechanism is provided in such a manner that the reflecting plate 252 can be moved to a position where the position on the xy plane and the position on the xy plane of the film frame 101 do not overlap (see the long dashed line in FIG. 8). Thereby, the thin film 100 taken out from the container body 11 can be inspected by a laser beam or the like.

Furthermore, when the ultrasonic sensor 251 is provided at the position of the reflecting plate 252, it is preferable to add the same mechanism as the reflecting plate moving mechanism, that is, to move the ultrasonic sensor 251 to the xy plane of the film frame 101 The position on the mechanism does not overlap the position.

Return to the description of FIG. 4. For rod 211, along the length of rod 211 (x square (Direction) is provided with a rotating shaft 22. The jig frame body 21 can be centered on the rotation axis 22, and the surface formed by the rod 211 and the frame 215 becomes a substantially horizontal (substantially parallel to the xy plane) peeling position, and the surface formed by the rod 211 and the frame 215 becomes substantially lead. The vertical (approximately parallel to the xz plane) rotation position is approximately 90 degrees. In addition, FIG. 4 illustrates a state where the jig frame body 21 is located at the peeling position.

When the jig frame body 21 is located at the peeling position, the rods 211, 212, 213, and 214 are set to be substantially horizontal, that is, the horizontal direction is substantially horizontal. When the jig frame body 21 is located at the peeling position, the lower surface of the frame 215 (the surface at the -z side in FIG. 1) 215 a (see FIG. 4) abuts against the abutment member 23 (see FIG. 1). As described above, by supporting the jig frame body 21 at a plurality of positions (the rotating shaft 22 and the contact member 23) (both ends are fixed), the jig frame body 21 can be stably held at the peeling position.

FIG. 9 is a block diagram showing the electrical configuration of the film frame holding device 1. The film frame holding device 1 includes a CPU (Central Processing Unit) 151, a RAM (Random Access Memory) 152, a ROM (Read Only Memory) 153, an input / output interface (I / F) 154, a communication interface (I / F) 155, And the media interface (I / F) 156, which are connected to the driving member 12, the driving member 44, the measurement section 25, and the like.

The CPU 151 operates in accordance with programs stored in the RAM 152 and the ROM 153, thereby controlling each part. Signals are input to the CPU 151 by the measurement section 25, the driving member 12, and the driving member 44. The signals output from the CPU 151 are input to the driving means 12 and the driving means 44.

RAM152 is volatile memory. ROM153 is a non-volatile memory that stores various control programs. The CPU 151 operates in accordance with programs stored in the RAM 152 and the ROM 153, thereby controlling each part. In addition, the ROM 153 stores a startup program that is executed by the CPU 151 when the film frame holding device 1 is started, or depends on the hardware of the film frame holding device 1. Programs, etc. The RAM 152 stores programs executed by the CPU 151 and data used by the CPU 151.

The CPU 151 controls an input / output device 161 such as a keyboard or a mouse via the input / output interface 154. The communication interface 155 receives data from other devices via the network 162 and sends them to the CPU 151, and sends data generated by the CPU 151 to other devices via the network 162.

The media interface 156 reads programs or data stored in the memory medium 163 and stores them in the RAM 152. The storage medium 163 is, for example, an IC card, an SD card, or a DVD.

In addition, a program that realizes each function is, for example, read from the memory medium 163 and is mounted on the film frame holding device 1 via the RAM 152 and executed by the CPU 151.

The CPU 151 has a function of controlling the control section 151 a of each section of the film frame holding device 1 according to an input signal. The control unit 151a is constructed by executing a predetermined program read by the CPU 151. The control unit 151 a controls the driving member 12 and the driving member 44 based on a signal obtained from the measurement unit 25. The processing performed by the control unit 151a will be described in detail below.

Regarding the configuration of the film frame holding device 1 shown in FIG. 9, the main configuration has been described when describing the features of this embodiment, and does not exclude, for example, the configuration provided by a general information processing device. In order to facilitate understanding of the structure of the film frame holding device 1, the functional structure shown in FIG. 9 is classified, and the classification method or name of the constituent elements is not limited to the form described in FIG. 9. The structure of the film frame holding device 1 may be divided into more constituent elements according to the processing content, or one constituent element may perform processing of a plurality of constituent elements.

The operation of the film frame holding device 1 configured as described above will be described. FIG. 10 is a flowchart showing a flow of a film holding process performed by the film frame holding device 1. The following processes are mainly performed by the control unit 151a.

First, the control unit 151a confirms that the film storage container 10 is at the initial position (the position shown in FIG. 1), that is, the state (initial state) of the jig frame body 21 above the film 100 based on the signal obtained from the measurement unit 25 (step) S101).

In this initial state, the film holding member 241 is located at the retracted position. Therefore, the ultrasonic wave transmitted from the ultrasonic sensor 251a is reflected in the + z direction by the thin film film 102, changed in direction to the -y direction by the reflection plate 252a, and received by the ultrasonic sensor 251a. In addition, the height of the jig frame body 21, that is, the height of the film holding member 241 is basically unchanged, and its information is stored in the ROM 153 in advance. Therefore, the control section 151a can determine that the height of the film 100 is lower than the height of the jig frame body 21, that is, the film storage container, based on the signal obtained from the measurement section 25 and the height information of the film holding member 241 stored in the ROM 153. 10 is in the initial state.

In this embodiment, the measurement section 25 includes 14 measurement sections 25a to 25n. The control unit 151a sequentially transmits ultrasonic waves from the ultrasonic sensors 251a to 251n, and sequentially obtains measurement results from the ultrasonic sensors 251a to 251n. After the control unit 151a obtains the measurement results from all the ultrasonic sensors 251, after a predetermined period of time elapses, the control unit 151a again transmits ultrasonic waves sequentially from the ultrasonic sensors 251a to 251n. The predetermined time is approximately the same as the time required for the ultrasonic wave transmitted from the ultrasonic sensor 251 to be reflected by the thin film frame 101 at the initial position until it is received by the ultrasonic sensor 251 (including a slightly longer time) Case). Therefore, the time required to sequentially send ultrasonic waves from the ultrasonic sensors 251a to 251n until the measurement results are sequentially obtained by the ultrasonic sensors 251a to 251n is about 20 milliseconds. Therefore, the control section 151a can obtain the measurement value from the measurement section 25 almost immediately.

Then, in the initial state, the control section 151a controls the driving member 44 to move the film holding member 241 to the insertion position, thereby confirming the actual position of the film holding member 241 (step Step S102).

The processing of step S102 will be described in detail. The control unit 151a drives the actuator 44b to move the rod body 44a in a direction orthogonal to the rods 211, 212, 213, and 214, thereby moving the film holding member 241 connected to the rod body 44a from the retracted position to the inserted position. mobile. At the current stage, the jig frame body 21 is located above the container body 11, so if the film holding member 241 is moved to the insertion position, the ultrasonic wave sent from the ultrasonic sensor 251a is directed toward the + by the film holding member 241. The reflection in the z direction is changed to the -y direction by the reflection plate 252a, and is received by the ultrasonic sensor 251a. Thereby, the measurement section 25 measures the height of the film holding member 241, and the height is obtained by the control section 151a.

The distance between the ultrasonic sensor 251a and the reflecting plate 252a is known. This value is set in advance and stored in the ROM 153. Therefore, the control unit 151a obtains the height of the thin film holding member 241 based on the result of the height of the thin film holding member 241 measured by the measurement section 25 and the distance between the ultrasonic sensor 251a and the reflecting plate 252a stored in the ROM 153.

After the control unit 151a obtains the height of the film holding member 241, it controls the driving member 44 to move the film holding member 241 from the insertion position to the retracted position. Thereby, the process of step S102 is completed.

After that, the control unit 151a continuously controls the height of the groove 101d of the film 100 while controlling the driving member 12 to move the container body 11 (film storage container 10) upward (+ z direction) (step S103).

The measurement section 25 continuously performs detection. Therefore, in this state, the measurement section 25 continuously measures the height of the upper surface 101a of the thin film 100, and the control section 151a continuously obtains the height.

The upper surface 101a and the groove 101d of the film 100 are stored in the ROM 153. Information of the height difference (here, for example, a value of 3 mm). The control unit 151a can, based on the signal obtained from the measurement unit 25, information on the height difference between the height of the upper surface 101a and the groove 101d stored in the ROM153, and the distance between the ultrasonic sensor 251a and the reflection plate 252a stored in the ROM153 The height of the groove 101d is obtained continuously (in real time).

In addition, when the control unit 151a moves the container body 11 upward (+ z direction) in step S103, the actuator 12a, the actuator 12b, and the actuator 12c are respectively driven to cause the measurement units 25a to 25n to measure. The heights from the upper surface 101a are substantially the same. For example, when the container body 11 or the film frame 101 is distorted, the height of the upper surface 101a is not fixed when the container body 11 is placed on the container body 11, but the actuators 12a, 12b, and The actuator 12c can substantially fix the height of the upper surface 101a, that is, the groove 101d, even when the film frame 101 is distorted. Thereby, the time required for the step of inserting the film holding member 241 into the groove 101d (step S105), which will be described later, can be shortened, and the force and distortion of the film holding member 241 applied to the film frame can be suppressed. In addition, step S103 may be performed simultaneously with step S101.

The control unit 151a determines whether the height of the groove 101d obtained in step S103 is consistent with the height of the film holding member 241 obtained in step S102 (step S104). The control unit 151a performs the process of step S104 for each film holding member 241.

When the height of the groove 101d does not match the height of the film holding member 241 (NO in step S104), the control unit 151a returns to the processing of step S103.

When the height of the groove 101d is consistent with the height of the film holding member 241 (YES in step S104), the control unit 151a controls the driving member 44 to move the film holding member 241 from the retracted position to the insertion position, thereby holding the film holding The holding member 241 is inserted into the groove 101d (step S105). The control unit 151a performs the process of step S105 for each film holding mechanism 24. borrow Therefore, the film holding member 241 can be reliably inserted into the groove 101d.

The control unit 151a determines whether all the film holding members 241 have been inserted into the groove 101d (step S106). When not all the film holding members 241 have been inserted into the groove 101d (No in step S106), the control unit 151a returns to the processing of step S103.

When all the film holding members 241 have been inserted into the groove 101d (YES in step S106), the control unit 151a controls the driving member 12 to move the container body 11 (film storage container 10) downward (-z direction), The height of the upper surface 101a of the film 100 is continuously obtained (step S107).

When the container body 11 is moved downward in step S107, the actuator 12b and the actuator 12c may be stopped and only the actuator 12a may be driven at first, and the upper surface 101a may be driven by the actuator 12a. The height of the moving area and its vicinity is lower than the height of other parts of the upper surface 101a by a predetermined height.

As shown in FIGS. 2 and 3, the position on the xy plane of the actuator 12a is one of the four lead plates 104a, or the xy plane of the adhesive tape 105 of the container body 11 is fixed to the lead plate 104a. Overlapping positions. That is, the position on the xy plane of the upper surface 11a driven by the actuator 12a is the position where the film holding member 241b of the film holding mechanism 24b is inserted into the groove 101d, that is, above the film 100 measured by the measurement section 25b. The positions of the heights of the surfaces 101a are substantially the same.

Therefore, the control unit 151a only drives the actuator 12a at the beginning of step S107 so that the height of the upper surface 101a measured by the measurement unit 25b is higher than the height measured by other measurement units 25 such as the measurement units 25e to 25m The average value is lower than the predetermined height.

As a result, the force can be concentrated on the upper surface 11a which is driven with the actuator 12a. The root 104b (see FIGS. 2 and 3) of the lead plate 104a at a position where the position on the xy plane overlaps, thereby forming a chance for the film liner 104 to be peeled from the adhesive layer 103. Therefore, the film liner 104 can be peeled from the adhesive layer 103 with a weak force.

Then, the control unit 151a determines whether the film pad 104 adhered to the container body 11 has been peeled from the container body 11 (step S108).

FIG. 11 is a diagram showing how the control unit 151a moves the container body 11 (film storage container 10), that is, how the height of the upper surface 101a changes with time. In FIG. 11, the vertical axis represents the distance D (see FIG. 8) between the reflecting plate 252 and the upper surface 101 a, and the horizontal axis represents time t. The measurement section 25 performs detection continuously. Therefore, the control section 151a continuously obtains the distance D between the reflection plate 252 and the upper surface 101a based on the signal obtained from the measurement section 25.

When t = 0, when step S103 is started, the film storage container 10, that is, the film 100 is located at the initial position, and the distance D between the reflection plate 252 and the upper surface 101a is i. The distance i is about 50 mm.

When t = t1, when all the film holding members 241 have been inserted into the groove 101d (YES in step S106), the distance D between the reflection plate 252 and the upper surface 101a at this time is a. In step S103, the container body 11 moves upward, so the distance a is smaller than the distance i. At this time, all weights of the film storage container 10 are supported by the film holding member 241.

When t1 <t <t5, the control unit 151a performs a process of moving the container body 11 downward (step S107). Hereinafter, the relationship between the distance D and the time t of the reflection plate 252 and the upper surface 101a in step S107 will be described in detail.

As shown in FIG. 3, there is a gap α between the position of the side surface 101 c of the film 100 and the position of the adhesive tape 105. Therefore, even if the control unit 151a moves the container body 11 downward until the film pad 104 in the gap α is lifted up (t1 t t2), the distance D between the reflecting plate 252 and the upper surface 101a is kept constant and remains a. In addition, when t = t2, it is the time when the film pad 104 in the gap α has finished pushing up.

If the control unit 151a moves the container body 11 downward in this way (t2 <t <t3), as the control unit 151a moves the container body 11 downward, the distance D between the reflection plate 252 and the upper surface 101a gradually increases. .

When the distance D between the reflecting plate 252 and the upper surface 101a is a + △ a (t = t3), the control unit 151a stops the container body 11 from moving downward and keeps the distance D between the reflecting plate 252 and the upper surface 101a at a + △ a. Δa is set to an arbitrary value in advance.

Information on Δa (here, the value) is stored in the ROM 153. Based on the signal obtained from the measurement unit 25 and the information about Δa stored in the ROM 153, the control unit 151a stops the container body 11 downward when the distance D between the reflecting plate 252 and the upper surface 101a becomes a + △ a Its movement.

At t3 During t <t4, the film pad 104 is gradually peeled from the adhesive layer 103. When the peeling of the film gasket 104 from the container body 11 is completed (t = t4), the distance D between the reflection plate 252 and the upper surface 101a returns from a + Δa to a (t = t5). In addition, in FIG. 11, t4 and t5 are slightly separated for the convenience of explanation, but actually are extremely short time, and t4 and t5 may have substantially the same timing.

The control unit 151a continuously obtains signals from the measurement unit 25, and continuously obtains the distance D between the reflection plate 252 and the upper surface 101a. Therefore, as the control unit 151a, when the distance D between the reflecting plate 252 and the upper surface 101a has not changed from a + △ a to a (t <t5), it is determined that the film gasket 104 adhered to the container body 11 is not peeled from the container body 11 (No in step S108), when the reflection plate 252 When the distance D from the upper surface 101a is changed from a + Δa to a (t = t5), it is determined that the film gasket 104 adhered to the container body 11 has been peeled from the container body 11 (YES in step S108). By processing in accordance with the distance D between the reflecting plate 252 and the upper surface 101a in this way, it is possible to determine whether the film pad 104 has been peeled from the adhesive layer 103 without an operator.

Return to the description of FIG. 10. When the film pad 104 adhered to the container body 11 is not peeled from the adhesive layer 103 (No in step S108), the control unit 151a returns to the processing in step S107. When the film pad 104 adhered to the container body 11 has been peeled from the adhesive layer 103 (YES in step S108), the control unit 151a ends the film holding process.

FIG. 12 is a flowchart showing a flow of a film adhesion process performed by the film frame holding device 1. The film adhesion treatment is performed after the film holding treatment. The following processing is performed mainly by the control unit 151a.

The control unit 151a drives a driving unit (not shown) to rotate the jig frame body 21 about 90 degrees around the rotation axis 22, thereby moving the jig frame body 21 from the peeling position to the adhesion position (step S201). The jig frame body 21 holds the film 100, so the film 100 also rotates about 90 degrees with the jig frame body 21.

Step S201 is t6 in FIG. 11 t at t7. When the jig frame body 21 is rotated from the peeling position, the direction of gravity and the angle formed by the direction orthogonal to the upper surface 101a of the film 100 start to change. Therefore, the distance D between the reflection plate 252 and the upper surface 101a is a is slightly reduced. Then, if the jig frame body 21 is located at the adhesion position (t = t7), the direction of gravity is approximately parallel to the upper surface 101a of the film 100. Therefore, the distance D between the reflection plate 252 and the upper surface 101a becomes b (b <a) .

Return to the description of FIG. 12. Then, the control unit 151a uses an inspection (not shown) The part inspects the film 100 held by the jig frame body 21 (step S202). The inspection unit includes a transmission unit that transmits a laser beam and the like, and inspects the film 100 by various known methods. When the film frame holding device 1 has a reflection plate moving mechanism, the control unit 151 a moves the reflection plate 252 to a position that does not overlap the film frame 101 in step S202.

When it is possible to confirm that there is no abnormality in the film 100 through the inspection process (step S202), (removed by a blower when foreign matter is attached), the control unit 151a uses a moving part (not shown) to place the jig frame body 21 at the adhesion position toward the mounting The masked device moves in parallel (step S203). Then, the mask and the film 100 are aligned (aligned) (step S204).

After the alignment (step S204), the control unit 151a adheres the film 100 to the photomask (step S205). Since the film gasket 104 is peeled from the film 100, the adhesive layer 103 provided on the lower surface 101b of the film frame 101 is exposed. Therefore, the film 100 is tightly pressed to the photomask, and the film 100 is adhered to the photomask by the adhesive layer 103.

In Figure 11, t8 t During t10, the control unit 151a performs the process of step S205. First, the control unit 151 a uses a moving unit (not shown) to move the jig frame body 21 in parallel in a device on which a photomask is placed, and brings the film 100 close to the photomask. Then, the film 100 comes into contact with the photomask (t = t9).

The control unit 151a thus moves the film 100 toward the mask. However, since the film 100 is in contact with the photomask, the distance D between the reflecting plate 252 and the upper surface 101a gradually decreases slightly from b (t9 <t <t10) while the film 100 is pressed against the photomask.

The measurement section 25 is provided on the jig frame body 21, so the control section 151a continuously obtains the distance D between the reflection plate 252 and the upper surface 101a based on the signal obtained from the measurement section 25.

Therefore, when the distance D between the reflecting plate 252 and the upper surface 101a obtained from the signal obtained from the measurement section 25 is smaller than b by Δb (t = t10), the control section 151a stops thinning The process of attaching the film 100 to the photomask (step S205).

Δb is set to an arbitrary value in advance. The information (here, the value) about Δb is stored in the ROM 153. The control unit 151a stops the parallel movement of the film 100 when it reaches the position where the distance D between the reflecting plate 252 and the upper surface 101a is b- △ b based on the signal obtained from the measurement unit 25 and the information about Δb stored in the ROM 153. . The control unit 151 a performs this process for each measurement unit 25. Thereby, the film 100 can be adhered to a photomask without passing through an operator.

According to this embodiment, the film 100 can be peeled from the container body 11 without passing through the operator, and the film frame 101 can be held. In particular, by providing the measurement unit 25 for each film holding mechanism 24, even when the film 100 is deformed, the film frame 101 can be held by the film holding mechanism 24 without passing through the operator.

In addition, according to this embodiment, since the height of the film frame 101 is continuously measured by the measurement unit 25, it can be determined that the film 100 can be peeled from the container body 11 without passing through the operator.

Furthermore, in this embodiment, the film holding member 241 can move between the retracted position and the inserted position, and can also move in the vertical direction (z direction). For example, an elastic member that can be elastically deformed in the z direction may be provided at a connection portion between the film holding member 241 and the rod 44a. When a force in the -z direction is applied to the film holding member 241, the elastic member may be deformed. The film holding member 241 is moved in the -z direction. When the force in the -z direction is released, the elastic member is restored to its original shape, thereby the film holding member 241 is moved in the + z direction. Accordingly, when a strong force in the vertical direction is applied to the film holding member 241, deformation, breakage, and the like of the film holding member 241 can be prevented.

<Second Embodiment>

In the first embodiment, by moving the rods 212, 213, and 214 in parallel, it is possible to support plural types. The size of the film does not necessarily correspond to a plurality of sizes of film.

The second embodiment simplifies the configuration. Hereinafter, the film frame holding device 2 according to the second embodiment will be described. Furthermore, the difference between the film frame holding device 1 and the film frame holding device 2 of the first embodiment is only in the jig frame body. Therefore, the film frame holding device 2 is described only with respect to the jig frame body. In the description of the jig frame body of the film frame holding device 2, the same parts as those of the film frame holding device 1 are denoted by the same reference numerals, and descriptions thereof are omitted.

FIG. 13 is a schematic perspective view showing a jig frame body 21A of the film frame holding device 2. The jig frame body 21A mainly includes a rod 211A, a rod 213A, and a rod 214A. The rod 213A and the rod 214A are fixed to the rod 211A so as to protrude from the rod 211A. The length direction of the rod 213A and the rod 214A is substantially orthogonal to the length direction of the rod 211A. The rod 213A is provided with film holding mechanisms 24d and 24e and measurement sections 25d and 25e (not shown in FIG. 13), and the rod 214A is provided with the film holding mechanism 24m and 24n and measurement sections 25m and 25n (in FIG. 13). (Not shown).

According to this embodiment, it is possible to provide a film frame holding device that can hold the film frame 101 without peeling the film 100 from the container body 11 through an operator with a simpler configuration.

The embodiment of the present invention has been described in detail with reference to the drawings, but the specific configuration is not limited to the embodiment, and includes design changes and the like without departing from the scope of the present invention. If you are a trader, you can change, add, and replace each element of the embodiment as appropriate.

In addition, in the present invention, the concept of "approximately" includes not only cases that are strictly the same, but also errors or distortions to the extent that they do not affect identity. For example, the concept of substantially parallel is not limited to strictly parallel, but also includes an error of, for example, a few degrees. In addition, for example, when simply expressed as parallel or orthogonal, it is considered to include not only parallel and orthogonal in a strict sense, but also large Causes parallel, approximately orthogonal, etc. In addition, in the present invention, "near" means an area within a certain range (arbitrarily settable) including the vicinity of the reference position. For example, A near refers to an area within a certain range near A, and the concept may include A or not A.

Claims (15)

A thin film frame holding device, comprising: a thin film frame, which is a substantially hollow tube, and has a first end surface provided with a film for covering a hollow portion, an adhesive member, and the first end surface. A substantially parallel second end surface and a side surface where a groove is formed; a protective sheet adhered to the adhesive member; a container body with the first end surface approximately horizontally upward and the second end surface approximately horizontally downward A person who mounts the film frame and fixes a part of the protection sheet; a first drive unit that moves the container body in a direction substantially orthogonal to the first surface, that is, a vertical direction; a jig frame provided on the above Above the container body, there are two rods held substantially horizontally at a predetermined interval, a plurality of film holding members are provided for each of the two rods, and the film holding member is held on the film. A second driving unit that moves in a substantially horizontal direction between a first position where the member is inserted into the groove and a second position where the film holding member is not inserted into the groove, and the second driving unit is The above-mentioned plurality of film holding members are provided; the measuring section has a plurality of ranging sensors, and each of the distance measuring sensors is provided for each of the plurality of film holding members. When the member is located at the first position, the height of the film holding member in a substantially vertical direction is continuously measured, and when the film holding member is located at the second position, the height of the first end surface is continuously measured; and the control unit It obtains the heights of the film holding member and the groove according to the measurement results continuously measured by the measuring section, and controls the first driving section and the second driving section so as to make the container body upward When moving, when the height of the film holding member is substantially the same as the height of the groove, move the film holding member from the second position to the first position, and when all the film holding members have been moved to the first When the 1-position is moved, the container body is moved downward. For example, the film frame holding device according to item 1 of the patent application range, wherein the control unit moves the container body downward by a first distance when the film holding member has moved to the first position, and then causes the container to move. The first driving unit is controlled in such a manner that the main body stops moving. Then, when it is known from the measuring unit that the height of the first end surface has moved upward by the first distance, it is determined that the protective sheet and the adhesive member have been peeled off. For example, the film frame holding device of the first patent application range, wherein the container body has a substantially rectangular upper surface on which the film frame is placed, and the first driving portion has a center of a first side of the upper surface. A first actuator that moves nearby, and a second actuator and a third actuator that move a second side that is substantially parallel to the first side of the upper surface to a position closer to the end than the center, The control unit controls the first actuator, the second actuator, and the third actuator, respectively. For example, the thin-film frame holding device according to item 3 of the patent application, wherein when the control unit moves the container body upward, it controls the first actuator, the second actuator, and the third actuator. The actuator controls such that the relative position of the film holding member and the groove obtained from the measurement results of the first distance sensor among the plurality of distance sensors included in the measurement unit, The relative position between the film holding member and the groove is substantially the same as the relative position of the film holding member and the groove obtained from the measurement result of the second distance sensor different from the first distance sensor. For example, the film frame holding device of the third scope of the patent application, wherein the protective sheet is located near the center of the first side and is fixed to the upper surface, and the control section is configured to move the container body downward when the container body is moved downward. The first actuator is driven first. For example, the film frame holding device of the fourth scope of the patent application, wherein the protective sheet is located near the center of the first side and is fixed to the upper surface, and the control section is configured to move the container body downward when the container body is moved downward. The first actuator is driven first. For example, the film frame holding device according to any one of claims 1 to 6, wherein the jig frame has a rotation shaft provided near the ends of the two rods, and the two rods are provided so that The axis of rotation is about 90 degrees. For example, the film frame holding device of the scope of patent application No. 7 has a positioning member. When the two rods are arranged substantially horizontally, the ends of the two rods on the side where the rotation axis is not provided are the same as the above. Position the first end surface in a direction orthogonal to it. For example, the film frame holding device according to any one of claims 1 to 6, wherein the jig frame includes the two rods, that is, the first rod and the second rod, and the first rod and the second rod. The third rod and the fourth rod which are substantially orthogonal to each other, and the first rod, the second rod, and the third rod are respectively provided so as to be movable in a direction substantially orthogonal to the longitudinal direction. For example, the film frame holding device of the seventh scope of the patent application, wherein the jig frame includes the two rods, that is, the first rod and the second rod, and the second rod which is substantially orthogonal to the first rod and the second rod. Three rods and a fourth rod, the first rod, the second rod, and the third rod are respectively provided so as to be movable in a direction substantially orthogonal to the longitudinal direction. For example, the film frame holding device of the eighth aspect of the patent application, wherein the jig frame includes the two rods, that is, the first rod and the second rod, and the second rod which is substantially orthogonal to the first rod and the second rod. Three rods and a fourth rod, the first rod, the second rod, and the third rod are respectively provided so as to be movable in a direction substantially orthogonal to the longitudinal direction. For example, the film frame holding device according to any one of claims 1 to 6, wherein the jig frame includes a moving mechanism that moves the film holding member in a direction orthogonal to the first end surface. For example, the film frame holding device according to item 7 of the application, wherein the jig frame includes a moving mechanism that moves the film holding member in a direction orthogonal to the first end surface. For example, the film frame holding device according to item 8 of the application, wherein the jig frame includes a moving mechanism that moves the film holding member in a direction orthogonal to the first end surface. A film frame holding method is characterized in that a plurality of film holding members are arranged at a first position where the film holding member is inserted into a groove, and the plurality of film holding members are arranged at predetermined intervals with respect to the jig frame. The two rods held approximately horizontally are respectively provided with a plurality of each. The jig frame is arranged above the container body. The container body is fixed with a part of a protective sheet adhered to the adhesive member. The film frame is approximately horizontal with the first end The second end surface is placed on the container body with the second end surface facing substantially horizontally, and the film frame has a substantially hollow cylindrical shape, the first end surface provided with a film for covering the hollow portion, and the adhesive member. The second end surface that is substantially parallel to the first end surface and the side surface on which the groove is formed are obtained based on measurement results of a distance measuring sensor provided for each of the plurality of film holding members. The height of the film holding member moves the film holding member from the first position to the second position where the film holding member is not inserted into the groove, while the container body is upward Move the other side, and determine the height of the groove according to the measurement result of the distance measuring sensor. If the obtained height of the groove is substantially consistent with the height of the film holding member, make the film holding member When moving from the second position to the first position, when the film holding member moves to the first position, the first driving unit is controlled to move the container body downward.