TWI793179B - 電阻測定裝置、基板檢查裝置以及電阻測定方法 - Google Patents
電阻測定裝置、基板檢查裝置以及電阻測定方法 Download PDFInfo
- Publication number
- TWI793179B TWI793179B TW107133772A TW107133772A TWI793179B TW I793179 B TWI793179 B TW I793179B TW 107133772 A TW107133772 A TW 107133772A TW 107133772 A TW107133772 A TW 107133772A TW I793179 B TWI793179 B TW I793179B
- Authority
- TW
- Taiwan
- Prior art keywords
- probe
- current
- resistance
- ground
- constant current
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 96
- 238000007689 inspection Methods 0.000 title claims abstract description 73
- 238000000034 method Methods 0.000 title claims abstract description 24
- 239000000523 sample Substances 0.000 claims abstract description 229
- 238000001514 detection method Methods 0.000 claims abstract description 104
- 238000005259 measurement Methods 0.000 claims description 91
- 239000004020 conductor Substances 0.000 claims description 48
- 238000000691 measurement method Methods 0.000 claims description 23
- 238000010586 diagram Methods 0.000 description 13
- 230000003071 parasitic effect Effects 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000005401 electroluminescence Methods 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- DMFGNRRURHSENX-UHFFFAOYSA-N beryllium copper Chemical compound [Be].[Cu] DMFGNRRURHSENX-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
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- 230000002093 peripheral effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/281—Specific types of tests or tests for a specific type of fault, e.g. thermal mapping, shorts testing
- G01R31/2812—Checking for open circuits or shorts, e.g. solder bridges; Testing conductivity, resistivity or impedance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/08—Measuring resistance by measuring both voltage and current
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017186641A JP6765125B2 (ja) | 2017-09-27 | 2017-09-27 | 抵抗測定装置、基板検査装置、及び抵抗測定方法 |
| JP2017-186641 | 2017-09-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201915500A TW201915500A (zh) | 2019-04-16 |
| TWI793179B true TWI793179B (zh) | 2023-02-21 |
Family
ID=65864627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107133772A TWI793179B (zh) | 2017-09-27 | 2018-09-26 | 電阻測定裝置、基板檢查裝置以及電阻測定方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6765125B2 (ja) |
| KR (1) | KR102680359B1 (ja) |
| CN (1) | CN109557376B (ja) |
| TW (1) | TWI793179B (ja) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102017211476A1 (de) * | 2017-07-05 | 2019-01-10 | Robert Bosch Gmbh | Vorrichtung und Verfahren zum Überprüfen einer Funktionsfähigkeit eines Systemwiderstands eines Batteriesystems |
| TWI716106B (zh) * | 2019-09-16 | 2021-01-11 | 力成科技股份有限公司 | 封裝基板之電阻量測方法及其封裝基板 |
| US11346883B2 (en) * | 2019-11-05 | 2022-05-31 | Formfactor, Inc. | Probe systems and methods for testing a device under test |
| KR102815808B1 (ko) * | 2020-05-04 | 2025-06-02 | 삼성전자주식회사 | 반도체 패키지용 테스트 모듈 |
| DE102022106418A1 (de) * | 2021-03-22 | 2022-09-22 | Mpi Corporation | Wafer-prüfsystem |
| TWI824686B (zh) * | 2022-08-31 | 2023-12-01 | 牧德科技股份有限公司 | 檢測電路 |
| CN120188268A (zh) * | 2022-11-17 | 2025-06-20 | 三菱电机株式会社 | 半导体试验装置、半导体试验方法以及半导体装置的制造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09196998A (ja) * | 1996-01-22 | 1997-07-31 | Advantest Corp | ドライバｉｃの出力抵抗測定器 |
| WO2006054637A1 (ja) * | 2004-11-18 | 2006-05-26 | Matsushita Electric Industrial Co., Ltd. | 配線基板とその製造方法および半導体装置 |
| JP2017075860A (ja) * | 2015-10-15 | 2017-04-20 | 日置電機株式会社 | 抵抗測定装置および検査装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2341246A (en) * | 1998-09-03 | 2000-03-08 | Ericsson Telefon Ab L M | Differential level shifting circuit |
| JP4208560B2 (ja) | 2002-12-06 | 2009-01-14 | 日置電機株式会社 | インピーダンス測定装置 |
| JP4296058B2 (ja) * | 2003-08-21 | 2009-07-15 | 日置電機株式会社 | 四端子抵抗測定装置 |
| JP4798618B2 (ja) * | 2006-05-31 | 2011-10-19 | ルネサスエレクトロニクス株式会社 | 出力回路および半導体集積回路装置 |
| JP2007333598A (ja) | 2006-06-15 | 2007-12-27 | Nidec-Read Corp | 基板検査装置 |
| CN101047383B (zh) * | 2007-03-20 | 2011-05-04 | 湖南大学 | 电流控制全平衡差分式电流传输器 |
| US8779777B2 (en) * | 2010-06-04 | 2014-07-15 | Linear Technology Corporation | Dynamic compensation of aging drift in current sense resistor |
| SK288245B6 (sk) * | 2010-09-03 | 2015-03-03 | Ivan Baĺ¤Ko | Prúdový zdroj s aktívnym potláčaním súčtového napätia |
| CN103956982B (zh) * | 2014-05-05 | 2017-04-12 | 华侨大学 | 一种用于两级差分放大器的连续时间共模反馈电路 |
| CN107104673A (zh) * | 2017-04-01 | 2017-08-29 | 唯捷创芯(天津)电子技术股份有限公司 | 一种低增益误差电流舵型数模转换器、芯片及通信终端 |
-
2017
- 2017-09-27 JP JP2017186641A patent/JP6765125B2/ja active Active
-
2018
- 2018-09-10 KR KR1020180107833A patent/KR102680359B1/ko active Active
- 2018-09-26 TW TW107133772A patent/TWI793179B/zh active
- 2018-09-26 CN CN201811122773.1A patent/CN109557376B/zh active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09196998A (ja) * | 1996-01-22 | 1997-07-31 | Advantest Corp | ドライバｉｃの出力抵抗測定器 |
| WO2006054637A1 (ja) * | 2004-11-18 | 2006-05-26 | Matsushita Electric Industrial Co., Ltd. | 配線基板とその製造方法および半導体装置 |
| JP2017075860A (ja) * | 2015-10-15 | 2017-04-20 | 日置電機株式会社 | 抵抗測定装置および検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201915500A (zh) | 2019-04-16 |
| CN109557376B (zh) | 2023-05-16 |
| KR20190036472A (ko) | 2019-04-04 |
| JP2019060768A (ja) | 2019-04-18 |
| CN109557376A (zh) | 2019-04-02 |
| JP6765125B2 (ja) | 2020-10-07 |
| KR102680359B1 (ko) | 2024-07-01 |
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