TWI788203B - Probing pins, inspection jigs and inspection jig units - Google Patents

Abstract

The present invention provides a probe capable of suppressing interference between adjacent linear portions when elastic portions expand and contract. The probe includes: an elastic part, a first contact part arranged at one end of the elastic part, and a second contact part arranged at the other end of the elastic part. The elastic part has a first elastic piece, a second elastic piece, and a through hole disposed between the first elastic piece and the second elastic piece. Each of the first elastic piece and the second elastic piece has a plurality of linear portions and a curved portion connected to either of both ends of the adjacent linear portions. The first straight line portion disposed closest to the first contact portion is connected to the first contact portion from one end side in the second direction, and the second straight portion disposed closest to the second contact portion is connected to the second contact portion from one end side. The same side of the first contact portion is connected. Among the curved portions of the first elastic piece and the curved portion of the second elastic piece, the middle portion of the outer curved portion disposed away from the center line of the elastic portion has a width greater than that of the straight portion connected to the outer curved portion.

Description

Probing pins, inspection jigs and inspection jig units

The disclosure relates to a probe, an inspection jig and an inspection jig unit.

In electronic component modules such as cameras and liquid crystal panels, conduction inspections and operational characteristic inspections are generally performed during the manufacturing process. These inspections are performed by connecting a terminal for connecting to a main body substrate provided in the electronic component module and a terminal of an inspection device using probe pins.

As such a probe, there is one described in Patent Document 1. The probe needle of Patent Document 1 includes an elastic portion provided with a through hole, a first contact portion disposed at one end of the elastic portion in the longitudinal direction, and a second contact portion disposed at the other end of the elastic portion in the longitudinal direction. The elastic portion of the probe needle has a meandering shape in which straight portions and curved portions are alternately continuous. [Prior art literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open No. 2017-223628

[Problem to be Solved by the Invention]

The probe pin has room for improvement in terms of suppressing interference between adjacent linear portions when the elastic portion expands and contracts.

An object of the present disclosure is to provide a probe capable of suppressing interference between adjacent linear portions when elastic portions expand and contract. [Means to solve the problem]

A probe of the present disclosure includes: the elastic part expands and contracts along the first direction; a first contact portion disposed at one end of the elastic portion in the first direction; and The second contact portion is arranged at the other end of the elastic portion in the first direction, The elastic part has: a first elastic piece and a second elastic piece; and the through hole is arranged between the first elastic piece and the second elastic piece, The first elastic sheet and the second elastic sheet respectively have: a plurality of straight portions extending along a second direction intersecting the first direction; and a curved portion connected to either of both ends in the second direction of the adjacent straight portions, The linear portions and the curved portions are alternately arranged along the first direction, The first straight portion, which is the first straight portion disposed closest to the first contact portion in the first direction, is connected to the first contact portion from one end side in the second direction, The second straight portion, which is the second straight portion disposed closest to the second contact portion in the first direction, is self-contacting with the first contact portion in the second direction relative to the second contact portion. part of the same side connection, In the bent portion of the first elastic piece and the bent portion of the second elastic piece, in the second direction, away from the centerline passing through the center of the elastic portion in the second direction The central portion of the outer curved portion arranged in a flat manner has a width greater than that of the straight portion connected to the outer curved portion.

A form of inspection fixture disclosed in this disclosure includes: probes of the described configuration; and The housing has an accommodating portion for accommodating the probe needle in a state in which a part of the first contact portion and a part of the second contact portion are exposed to the outside, The probe has a connecting portion, The connection part connects the first contact part with the first straight line part, The probe pin is accommodated in the housing portion in a state where the first straight line portion and the connection portion are in contact with an inner surface of the case constituting the housing portion in the first direction.

An inspection jig unit of one form disclosed herein includes a plurality of inspection jigs of the above-mentioned form. [Effect of the invention]

According to the probe pin, it is possible to realize a probe pin capable of suppressing interference between adjacent linear portions when the elastic portion expands and contracts.

According to the inspection jig, it is possible to realize an inspection jig capable of suppressing interference between adjacent linear portions of the elastic portion when the probe needle expands and contracts.

According to the inspection jig unit, it is possible to realize an inspection jig unit capable of suppressing interference between adjacent linear portions of the elastic portion when the probe needle is extended or contracted by the inspection jig.

Hereinafter, an example of the present disclosure will be described with reference to the accompanying drawings. Furthermore, in the following description, terms indicating a specific direction or position (for example, terms including "up", "down", "right", and "left") are used as necessary, but the use of these terms is The technical scope of the present disclosure is not limited by the meanings of these terms for easy understanding of the present disclosure with reference to the drawings. In addition, the following description is merely an illustration in nature, and is not intended to limit this disclosure, its application, or its use. Furthermore, the drawings are schematic, and ratios of dimensions and the like do not necessarily correspond to actual ones.

As shown in FIG. 1 , an inspection jig 10 according to an embodiment of the present disclosure has a housing 20 and a probe 30 housed in the housing 20 . In this embodiment, the inspection jig 10 has a plurality of probe needles 30 . Each probe needle 30 is, for example, an elongated thin plate formed by electroforming using a conductive material, and expands and contracts along the first direction (for example, the Y direction). The probe pins 30 are spaced apart in the plate thickness direction (for example, Z direction), and are housed in the case 20 in a state of being electrically independent from each other.

As an example, the case 20 has an insulating substantially rectangular parallelepiped shape, and has a case main body 21 and a cover portion 22 as shown in FIG. 1 .

As shown in FIG. 2 , the housing main body 21 has: a concave housing portion 23 disposed inside and housing the probe needle 30 ; a first opening portion 24 disposed at one end in the first direction Y; The second opening 25 at the other end of the Y. In this embodiment, the housing body 21 has a plurality of receiving portions 23 . Each housing portion 23 has a substantially rectangular shape extending in its longitudinal direction when viewed along the plate thickness direction Z of the probe needle 30 accommodated therein, and is connected to the first opening 24 and the second opening 25 .

The first opening 24 is configured so that only the first contact portion 32 of the probe needle 30 described later can be inserted from the first direction Y. As shown in FIG. The first opening portion 24 is connected to the through hole 212 penetrating the wall portion 211 of the case main body 21 constituting the bottom surface 231 of the housing portion 23 along the first direction Y. One end of the through hole 212 in a second direction (eg, X direction) intersecting with the first direction Y is connected to one side surface 232 of the receiving portion 23 . The other end of the through hole 212 in the second direction X is connected to the bottom surface 231 of the receiving portion 23 . The corner portion 233 connecting the through hole 212 and the bottom surface 231 of the receiving portion 23 is C-chamfered. This prevents the probe needle 30 from being damaged due to contact with the case main body 21 when it expands or contracts.

The second opening 25 is configured so that the whole probe needle 30 can be inserted from the first direction Y. As shown in FIG. One end of the second opening 25 in the second direction X is connected to one side surface 232 of the receiving portion 23 in the second direction X, and the other end of the second opening 25 in the second direction X is connected to the second side of the receiving portion 23. Another side 234 in direction X.

The cover part 22 is attached to the end surface of the case main body 21 on the second opening part 25 side, and covers the second opening part 25 . The cover portion 22 has a through hole 26 capable of accommodating only the second contact portion 33 . The through hole 26 is arranged on an imaginary straight line L1 extending along the first direction Y passing through the first opening 24 in a state where the cover 22 is attached to the case main body 21 . In other words, the through hole 212 of the case main body 21 and the through hole 26 of the cover part 22 are arranged coaxially with the virtual straight line L1 as the axis. In this embodiment, the imaginary straight line L1 passes through the center of the main body portion 321 of the first contact portion 32 in the second direction X and the third contact portion 332 of the second contact portion 33 . One end of the through hole 26 in the second direction X is connected to one side surface 232 of the receiving portion 23 in the second direction X.

In the probe needle 30 housed in the housing portion 23 , the first linear portion 41 constituting the elastic portion 31 of the probe needle 30 described later is in contact with the inner surface of the case main body 21 constituting the bottom surface 231 of the housing portion 23 . A part of the first contact portion 32 is exposed to the outside of the housing 20 through the first opening portion 24 . In addition, in the probe needle 30 housed in the accommodating portion 23, the second linear portion 45 and the connecting portion 70 constituting the elastic portion 31 of the probe needle 30 to be described later and the portion facing the case main body 21 of the cover portion 22 constituting the accommodating portion 23 The faces 221 are in contact. The second contact portion 33 of the probe needle 30 described later is exposed to the outside of the case 20 through the second opening portion 25 .

For example, as shown in FIG. 2 , the probe 30 includes: an elastic portion 31 that expands and contracts along the first direction Y, a first contact portion 32 disposed at one end of the elastic portion 31 in the first direction Y, and a first contact portion 32 disposed on the elastic portion 31 . The second contact portion 33 at the other end of the first direction Y.

As an example, as shown in FIG. 2 , the elastic portion 31 has a meandering shape as a whole. As shown in FIGS. 3 and 4 , the elastic portion 31 has a first elastic piece 40 and a second elastic piece 50 , and a through hole 60 provided between the first elastic piece 40 and the second elastic piece 50 .

The first elastic piece 40 and the second elastic piece 50 respectively have a plurality of straight portions and at least one curved portion, and the straight portions and curved portions are alternately arranged along the first direction Y. Each linear portion extends along the second direction X. The curved portion is connected to any one of both ends in the second direction X of the adjacent linear portions.

The plurality of straight portions include: a first straight portion 41 , a second straight portion 45 , a third straight portion 42 , and a third straight portion 51 . The first straight portion 41 is disposed closest to the first contact portion 32 in the first direction Y. The second straight portion 45 is disposed closest to the second contact portion 33 in the first direction Y. The third straight portion 42 and the third straight portion 51 are disposed between the first straight portion 41 and the second straight portion 45 in the first direction Y. In this embodiment, both the first straight portion 41 and the second straight portion 45 constitute a part of the first elastic piece 40 . The first straight portion 41 , the second straight portion 45 , the third straight portion 42 , and the third straight portion 51 have substantially the same width W1 (in other words, the length in the first direction Y).

As shown in FIG. 3 , the first linear portion 41 is connected to the first contact portion 32 from one end side in the second direction X (for example, the left side in FIG. 3 ).

As shown in FIG. 4 , the second straight portion 45 is connected to the second contact portion 33 from the same side as the first contact portion 32 (for example, the left side in FIG. 4 ) in the second direction X. In this embodiment, the second straight portion 45 is connected to the second contact portion 33 via the connection portion 70 . The connection portion 70 has approximately the same width as the length from the outer end of the straight portion of the first elastic piece 40 to the outer end of the second elastic piece 50 in the first direction Y (in other words, the length in the first direction Y). A through hole 60 is provided.

The curved portion includes an outer curved portion 43 , an outer curved portion 52 , and an inner curved portion 44 , and an inner curved portion 53 . The outer curved portion 43 and the outer curved portion 52 constitute the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50, away from the center line passing through the center of the elastic portion 31 in the second direction X in the second direction A bent portion configured in a CL manner. The inner curved portion 44 and the inner curved portion 53 constitute the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50 and are arranged near the center line CL in the second direction X. In the present embodiment, the middle portion of the inner curved portion 44 and the inner curved portion 53 except the two end portions connected with the straight portion has a width W3 smaller than the width W2 of the middle portion of the outer curved portion 43 and the outer curved portion 52. .

As shown in Figure 3, the middle part 432 and the middle part 522 of the outer curved part 43 and the outer curved part 52 have a width W2 larger than the width W1 of the straight part connecting the outer curved part 43 and the outer curved part 52 (in other words, the outer The radial lengths of the curved portion 43 and the outer curved portion 52 relative to the center of curvature). That is, the widths of the intermediate portions 432 and 522 of the outer curved portion 43 and the outer curved portion 52 are larger than the widths of the end portions 431 and 521 to which the linear portions are connected. In this embodiment, regarding the width W2 of the outer curved portion 43 and the outer curved portion 52, the width W21 of the part farthest from the centerline CL in the second direction X among the middle part 432 and the middle part 522 is the largest. This portion tapers toward the centerline CL.

As shown in FIG. 4 , the middle portion 442 and the middle portion 532 of the inner curved portion 44 and the inner curved portion 53 have a larger width W3 than the width W1 of the straight portion connecting the inner curved portion 44 and the inner curved portion 53 (in other words, the inner The radial lengths of the curved portion 44 and the inner curved portion 53 relative to the center of curvature). That is, the width of the middle part 442 and the middle part 532 of the inner curved part 44 and the inner curved part 53 is larger than the width of the end part 441 and the end part 531 to which the linear part is connected. In the present embodiment, the width W3 of the inner curved portion 44 and the inner curved portion 53 is the same as that of the outer curved portion 43 and the outer curved portion 52. Among the intermediate portion 442 and the intermediate portion 532, the width W3 is farthest in the second direction X. The width W31 of the portion of the center line CL is also the largest, and gradually becomes smaller as the portion approaches the center line CL.

As shown in FIG. 2 , the through hole 60 extends continuously from one end to the other end in the direction in which the elastic portion 31 extends along the shape of the elastic portion 31 . That is, the through hole 60 between the straight portion of the first elastic piece 40 and the straight portion of the second elastic piece 50 and the through hole 60 between the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50 are mutually connected. connect. In the present embodiment, the through-hole 60 at the bent portion has a width W5 equal to or less than the width W4 of the through-hole 60 at the straight portion. The width W4 and the width W5 of the through hole 60 are, for example, the length of the linear distance between the first elastic piece 40 and the second elastic piece 50 .

As shown in Figure 2, the first contact portion 32 has: a main body portion 321, the first straight portion 41 connected with the elastic portion 31; The direction Y extends away from the first straight portion 41 . The first leg portion 322 and the second leg portion 323 are respectively disposed with a gap 324 in the second direction X. As shown in FIG.

The first leg portion 322 has a pair of first contact portions 325, and the pair of first contact portions 325 are disposed at ends away from the main body portion 321 in the first direction Y, and spaced apart from each other in the second direction X. ground configuration. On the end of the first leg portion 322 away from the main body portion 321 in the first direction Y, a protruding portion 326 protruding toward the second leg portion 323 in the second direction X is provided. Each first contact portion 325 is respectively disposed at both ends of the protruding portion 326 in the second direction X. A portion of the protruding portion 326 between the pair of first contact portions 325 is recessed along the first direction Y toward the main body portion 321 .

The second leg portion 323 has a pair of second contact portions 327, and the pair of second contact portions 327 are disposed on ends away from the main body portion 321 in the first direction Y, and spaced apart in the second direction X. ground configuration. A protruding portion 328 protruding toward the first leg portion 322 in the second direction X is disposed at an end of the second leg portion 323 away from the main body portion 321 in the first direction Y. Each second contact portion 327 is respectively disposed at both ends of the protruding portion 328 in the second direction X. A portion of the protruding portion 328 between the pair of second contact portions 327 is recessed along the first direction Y toward the main body portion 321 .

In this embodiment, the pair of first contact portions 325 and the pair of second contact portions 327 are arranged on the same imaginary straight line L2 extending along the second direction X. As shown in FIG. In the gap 324 between the first leg portion 322 and the second leg portion 323 , the portion where the protruding portion 326 and the protruding portion 328 are disposed is the smallest in the second direction X. As shown in FIG.

As shown in FIG. 2 , the second contact portion 33 has a main body portion 331 connected to the connection portion 70 and a third contact portion 332 disposed on the main body portion 331 . The main body portion 331 has, for example, a substantially rectangular shape extending along the first direction Y. The third contact portion 332 is disposed at an end of the main body portion 331 away from the elastic portion 31 in the first direction Y, and has a curved shape protruding away from the elastic portion 31 along the first direction Y. A cutout 333 is disposed at an end of the main body portion 331 in the first direction Y close to the elastic portion 31 . The notch 333 is provided at the end of the body part 331 opposite to the end connected with the connection part 70 in the second direction X. As shown in FIG.

The probe needle 30 exerts the following effects.

The probe 30 includes: an elastic portion 31 stretchable along the first direction, a first contact portion 32 disposed at one end of the elastic portion 31 in the first direction, and a second contact portion 32 disposed at the other end of the elastic portion 31 in the first direction. contact portion 33 . The elastic portion 31 has a first elastic piece 40 and a second elastic piece 50 , and a through hole 60 provided between the first elastic piece 40 and the second elastic piece 50 . The first elastic piece 40 and the second elastic piece 50 each have a plurality of linear portions extending in the second direction, and a curved portion connected to either of both ends of the adjacent linear portions in the second direction. The straight portions and curved portions are alternately arranged along the first direction. The first linear portion 41 disposed closest to the first contact portion 32 in the first direction is connected to the first contact portion 32 from one end side in the second direction. The second linear portion 45 disposed closest to the second contact portion 33 in the first direction is connected to the second contact portion 33 from the same side as the first contact portion 32 in the second direction. Among the curved portions of the first elastic piece 40 and the curved portion of the second elastic piece 50, the outer curved portion 43, the intermediate portion 432, and the intermediate portion 522 of the outer curved portion 52, which are arranged away from the center line CL in the second direction, have a relatively large thickness. The width W2 is greater than the width W1 of the straight portion connecting the outer curved portion 43 and the outer curved portion 52 . With this structure, when the probe needle 30 expands and contracts along the first direction, the contact between the adjacent linear portions of the elastic portion 31 can be avoided. As a result, it is possible to realize the probe needle 30 capable of suppressing interference between adjacent linear portions when the elastic portion 31 expands and contracts. In addition, the overall stress applied to the elastic portion 31 when the probe needle 30 is compressed is dispersed from the curved portion to the straight portion, thereby improving the durability of the probe needle 30 .

The through-hole 60 at the curved portion has a width W5 that is equal to or less than the width W4 of the through-hole 60 at the straight portion. With this structure, when the probe needle 30 expands and contracts along the first direction, the contact between the adjacent linear portions of the elastic portion 31 can be more reliably avoided. In addition, the stress applied to the elastic portion 31 when the probe needle 30 is compressed can be more reliably dispersed.

Among the curved portions of the first elastic piece 40 and the curved portion of the second elastic piece 50, the inner curved portion 44, the middle portion 442, and the middle portion 532 of the inner curved portion 53 arranged near the center line CL in the second direction have The width W3 is smaller than the width W2 of the intermediate portion 432 and the intermediate portion 522 of the outer curved portion 43 and the outer curved portion 52 . With such a structure, the stress applied to the elastic portion 31 when the probe needle 30 is compressed can be more reliably dispersed.

Among the curved portions of the first elastic piece 40 and the curved portion of the second elastic piece 50, the inner curved portion 44, the middle portion 442, and the middle portion 532 of the inner curved portion 53 arranged near the center line CL in the second direction have The width W3 is larger than the width W1 of the straight portion connecting the inner curved portion 44 and the inner curved portion 53 . With such a structure, the stress applied to the elastic portion 31 when the probe needle 30 is compressed can be more reliably dispersed.

The first contact portion 32 has: a main body portion 321 connected to the first straight portion 41; and a first leg portion 322 and a second leg portion 323 respectively extending from the main body portion 321 along a first direction to a direction away from the first straight portion 41 , and are respectively arranged with gaps 324 in the second direction. The first leg part 322 has a pair of first contact parts 325, and the pair of first contact parts 325 are disposed at the ends away from the main body part 321 in the first direction, and are spaced apart in the second direction. . The second leg part 323 has a pair of second contact parts 327, and the pair of second contact parts 327 are disposed at the ends away from the main body part 321 in the first direction, and are spaced apart in the second direction. . With such a structure, the pair of first contact parts 325 and the pair of second contact parts 327 contact (wipe) while sliding in the second direction relative to the inspection object or the inspection device, so that the attached Removal of foreign matter from inspection objects or inspection devices. In addition, the foreign matter removed by wiping can be discharged from the gap 324 between the first leg portion 322 and the second leg portion 323 . As a result, contact reliability of the probe pin 30 can be improved.

The inspection jig 10 exhibits the following effects.

The inspection jig 10 includes: a probe needle 30; and a case 20 having a housing portion 23 for housing the probe needle 30 in a state where a part of the first contact portion 32 and a part of the second contact portion 33 are exposed to the outside. The probe needle 30 has a connecting portion 70 connecting the second contact portion 33 and the second straight portion 45 , and the second straight portion 45 and the connecting portion 70 are connected to the inner surface of the housing 20 constituting the receiving portion 23 in the first direction. It is housed in the housing portion 23 in a contact state. It is possible to realize the inspection jig 10 capable of suppressing interference between adjacent linear portions of the elastic portion 31 when the probe needle 30 expands and contracts. In addition, while ensuring the elasticity of the elastic portion 31 , the strength of the inspection jig 10 when the probe needle 30 is pressed from the first contact portion 32 toward the second contact portion 33 can be ensured.

The outer curved portion of the probe needle 30 accommodated has a width extending from the outer surface of the curved portion farther from the centerline CL in the second direction in a direction closer to the centerline CL. With such a structure, the probe needle 30 can operate normally even when the space of the accommodating portion 23 is limited.

The inspection jig 10 and the probe needle 30 can also be configured as follows.

As shown in FIG. 5 , the inspection jig unit 1 can be constituted by a plurality of inspection jigs 10 . The inspection jig unit 1 may also include a casing for accommodating and positioning a plurality of inspection jigs 10 .

In the above-described embodiment, the probe needle 30 includes the following elastic portion 31: an outer curved portion (for example, a curved portion 52 ) arranged close to the imaginary straight line L1 and an outer curved portion (for example, a curved portion 52 ) arranged away from the imaginary straight line L1 . 43) have approximately the same shape, and the width W21 of the part farthest from the center line CL in the second direction X is approximately the same, but not limited thereto. As shown in FIG. 6 , the probe 30 may also include the following elastic portion 31: an outer curved portion (for example, a curved portion 52 ) disposed close to the imaginary straight line L1 and an outer curved portion (for example, a curved portion 52 ) disposed away from the imaginary straight line L1 . bend 43) different shapes. In the probe needle 30 of FIG. 6 , the width W22 of the portion of the bent portion 52 farthest from the centerline CL in the second direction X is larger than the width W23 of the portion of the bent portion 43 farthest from the centerline CL in the second direction X. big. The width W2 of the intermediate portion 432 of the curved portion 43 has a width W2 slightly larger than the width W1 of the straight portion connected to the curved portion 43 . With such a configuration, the expansion and contraction of the elastic portion 31 are linearized, thereby preventing the first contact portion 32 and the second contact portion 33 from slipping (ie, moving in the second direction X).

The linear portion of the elastic portion 31 only needs to be provided in plurality. At least one bent portion of the elastic portion 31 may be provided.

The first contact portion 32 and the second contact portion 33 can have any structure according to the design of the probe needle 30 and the like. For example, according to the inspection object or inspection device, contact points of arbitrary shapes and structures can be provided on the first contact portion 32 and the second contact portion 33 . That is, it is not limited to the case that the first contact portion 32 has the first leg portion 322 and the second leg portion 323 , the second contact portion 33 may also have the first leg portion 322 and the second leg portion 323 . Both the first contact portion 32 and the second contact portion 33 may have a first leg portion 322 and a second leg portion 323 .

The casing 20 can adopt any structure capable of accommodating at least one probe 30 .

The connecting portion 70 can also be disposed on the side of the first straight portion 41 instead of the side of the second straight portion 45 . That is, the probe needle 30 may also be housed in the housing portion 23 in a state where the first straight portion 41 and the connecting portion 70 are in contact with the bottom surface 231 of the casing 20 constituting the housing portion 23 in the first direction Y.

As above, various embodiments in the present disclosure have been described in detail with reference to the drawings, and finally, various aspects of the present disclosure will be described. In addition, in the following description, it describes also as an example by attaching a reference sign.

The probe needle 30 of the first form disclosed includes: The elastic part 31 expands and contracts along the first direction; The first contact portion 32 is disposed at one end of the elastic portion 31 in the first direction; and The second contact portion 33 is disposed at the other end of the elastic portion 31 in the first direction, The elastic part 31 has: the first elastic sheet 40 and the second elastic sheet 50; and The through hole 60 is disposed between the first elastic piece 40 and the second elastic piece 50, The first elastic sheet 40 and the second elastic sheet 50 respectively have: a plurality of straight portions extending along a second direction intersecting the first direction; and a curved portion connected to either of both ends in the second direction of the adjacent straight portions, The linear portions and the curved portions are alternately arranged along the first direction, The linear portion disposed closest to the first contact portion 32 in the first direction, that is, the first linear portion 41 is connected to the first contact portion 32 from one end side in the second direction, The straight portion disposed closest to the second contact portion in the first direction, that is, the second straight portion 45 is independent from the first contact portion 33 in the second direction. The same side of a contact portion 32 is connected, In the bent portion of the first elastic piece 40 and the bent portion of the second elastic piece 50 , in the second direction, away from the center of the second direction passing through the elastic portion 31 The middle portion of the outer curved portion arranged along the center line CL of the outer curved portion has a width W2 greater than the width W1 of the straight portion connected to the outer curved portion.

In the probe needle 30 of the second aspect of the present disclosure, The through-hole 60 at the bent portion has a width W5 that is equal to or less than the width W4 of the through-hole 60 at the straight portion.

In the probe needle 30 of the third aspect disclosed herein, Among the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50 , an intermediate portion of the inner curved portion disposed near the center line CL in the second direction It has a width W3 smaller than the width W2 of the outer curved portion.

In the probe needle 30 of the fourth aspect disclosed herein, The elastic portion 31 has a plurality of outer curved portions, Among the plurality of outer curved portions, an intermediate portion of the outer curved portion is disposed close to an imaginary straight line L1 passing through the first contact portion and the second contact portion and extending along the first direction. It has a width W22 larger than the width W23 of the outer curved portion disposed away from the imaginary straight line.

In the probe needle 30 of the fifth form disclosed herein, Among the curved portion of the first elastic piece 40 and the curved portion of the second elastic piece 50 , an intermediate portion of the inner curved portion disposed near the center line CL in the second direction It has a width W3 larger than the width W1 of the straight portion connected to the inner curved portion.

In the probe needle 30 of the sixth form disclosed herein, At least one of the first contact portion 32 and the second contact portion 33 has: The main body part 321 is connected with the straight part; and The first leg portion 322 and the second leg portion 323 respectively extend from the main body portion 321 along the first direction to a direction away from the straight portion, and are respectively arranged with a gap 324 in the second direction. , The first leg portion 322 has a pair of first contact portions 325, the pair of first contact portions 325 are disposed on the end away from the main body portion 321 in the first direction, arranged at intervals in the second direction, The second leg part 323 has a pair of second contact parts 327, and the pair of second contact parts 327 are arranged on the end far away from the main body part 321 in the first direction, and on the They are arranged at intervals in the second direction.

The inspection jig 10 of the seventh aspect disclosed in this disclosure includes: a probe 30 of the described configuration; and The casing 20 has an accommodating portion 23 for accommodating the probe needle 30 in a state where a part of the first contact portion 32 and a part of the second contact portion 33 are exposed to the outside, The probe needle 30 has a connecting portion 70, The connecting portion 70 connects the first contact portion 32 with the first straight portion 41 or the second contact portion 33 with the second straight portion 45 , The probe needle 30 is connected to the shell constituting the receiving portion 23 in the first direction by the first straight portion 41 and the connecting portion 70 or the second straight portion 45 and the connecting portion 70 . The inner surface of the body 20 is accommodated in the accommodating portion 23 in a state of being in contact with each other.

In the inspection jig 10 of the eighth aspect disclosed herein, The outer curved portion has a width extending from an outer surface of the curved portion farther from the centerline CL in the second direction in a direction closer to the centerline CL.

The inspection jig unit 1 of the ninth aspect of the present disclosure includes a plurality of inspection jigs 10 of the above-mentioned aspect.

In addition, by appropriately combining any of the above-described various embodiments or modified examples, respective effects can be exhibited. In addition, a combination of embodiments, a combination of examples, or a combination of embodiments and examples is possible, and a combination of features in different embodiments or examples is also possible.

Although the present disclosure has been fully described in connection with preferred embodiments with reference to the accompanying drawings, various modifications and corrections will be apparent to those skilled in the art. It should be understood that such variations and corrections are included therein as long as they do not depart from the scope of the present disclosure based on the appended patent claims. [industrial availability]

The probes disclosed in the present disclosure can be applied to, for example, camera modules and other modules including business-to-business (Business-to-Business, BtoB) connectors as connection media, and small-outline packages (Small Outline Package, SOP), square flat Inspection jigs used in the inspection of semiconductor packages such as Quad Flat Package (QFP) and Ball Grid Array (BGA).

1: Check the fixture unit 10: Check the jig 20: Shell 21: Shell body 22: Cover 23: Containment 24: The first opening 25: Second opening 26, 60, 212: through hole 30: probe needle 31: elastic part 32: first contact part 33: Second contact part 40: The first elastic piece 41: The first straight line 42, 51: The third straight line 43, 52: Outer bend/bend 44, 53: inner bending part 45: Second straight line 50: the second elastic piece 70: connection part 211: wall 221: face 231: bottom surface 232, 234: side 233: corner 321, 331: Main body 322: First foot 323: Second leg 324: Gap 325: The first contact part 326, 328: protrusion 327: Second contact part 332: The third contact part 333: incision 431, 441, 521, 531: end 432, 442, 522, 532: middle part CL: Centerline L1, L2: imaginary straight line W1, W2, W3, W4, W5, W21, W22, W23, W31: Width X: the second direction Y: the first direction Z: plate thickness direction

FIG. 1 is a perspective view showing an inspection jig according to an embodiment of the present disclosure. Fig. 2 is a sectional view taken along line II-II of Fig. 1 . FIG. 3 is a plan view of a first portion of a probe accommodated in the inspection jig of FIG. 1 . FIG. 4 is a plan view of a second portion of the probe accommodated in the inspection jig of FIG. 1 . FIG. 5 is a plan view of an inspection jig unit including the inspection jig of FIG. 1 . FIG. 6 is a partial plan view showing a modified example of the probe pin accommodated in the inspection jig of FIG. 1 .

31: elastic part 32: first contact part 40: The first elastic piece 41: The first straight line 42, 51: The third straight line 43, 52: Outer bend/bend 44, 53: inner bending part 50: the second elastic piece 60: Through hole 321: Main body 431, 521: end 432, 522: middle part CL: Centerline L1: Imaginary straight line W1, W2, W4, W5, W21: Width X: the second direction Y: the first direction

Claims (9)

A probe comprising: the elastic part expands and contracts along the first direction; a first contact portion disposed at one end of the elastic portion in the first direction; and The second contact portion is arranged at the other end of the elastic portion in the first direction, The elastic part has: a first elastic piece and a second elastic piece; and the through hole is arranged between the first elastic piece and the second elastic piece, The first elastic sheet and the second elastic sheet respectively have: a plurality of straight portions extending along a second direction intersecting the first direction; and a curved portion connected to either of both ends in the second direction of the adjacent straight portions, The linear portions and the curved portions are alternately arranged along the first direction, The first straight portion, which is the first straight portion disposed closest to the first contact portion in the first direction, is connected to the first contact portion from one end side in the second direction, The second straight portion, which is the second straight portion, which is disposed closest to the second contact portion in the first direction, is self-aligned with the first contact portion in the second direction relative to the second contact portion. The same side of the contact part is connected, In the bent portion of the first elastic piece and the bent portion of the second elastic piece, in the second direction, away from the centerline passing through the center of the elastic portion in the second direction The central portion of the outer curved portion arranged in a flat manner has a width greater than that of the straight portion connected to the outer curved portion. The probe needle according to claim 1, wherein the through-hole at the bent portion has a width smaller than that of the through-hole at the straight portion. The probe according to claim 1 or claim 2, wherein the curved portion of the first elastic piece and the curved portion of the second elastic piece are arranged in the second direction close to The middle portion of the inner curvature at the center line has a width smaller than the width of the middle portion of the outer curvature. The probe according to claim 1 or claim 2, wherein the elastic part has a plurality of outer curved parts, Among the plurality of outer curved portions, an intermediate portion of the outer curved portion disposed close to an imaginary straight line passing through the first contact portion and the second contact portion and extending along the first direction has a The width is larger than the width of the outer curved portion arranged away from the imaginary straight line. The probe according to claim 1 or claim 2, wherein the curved portion of the first elastic piece and the curved portion of the second elastic piece are arranged in the second direction close to An intermediate portion of the inner curved portion at the center line has a width greater than that of the straight portion to which the inner curved portion is connected. The probe according to claim 1 or claim 2, wherein at least any one of the first contact part and the second contact part has: a main body portion to which the straight line portion is connected; and The first leg portion and the second leg portion respectively extend from the main body portion along the first direction to a direction away from the straight portion, and are respectively arranged with a gap in the second direction, The first leg portion has a pair of first contact portions, and the pair of first contact portions are arranged on the end away from the main body portion in the first direction, and are spaced apart in the second direction. configured at intervals, The second leg part has a pair of second contact parts, and the pair of second contact parts are arranged on the end far away from the main body part in the first direction, and are spaced apart in the second direction. Configured at intervals. An inspection fixture, comprising: the probe as described in any one of claim 1 to claim 6; and The housing has an accommodating portion for accommodating the probe needle in a state in which a part of the first contact portion and a part of the second contact portion are exposed to the outside, The probe pin has a connecting portion that connects the first contact portion with the first straight portion or the second contact portion with the second straight portion, The probe pin is in contact with the inner surface of the case constituting the housing portion in the first direction through the first straight portion and the connecting portion or the second straight portion and the connecting portion. It is accommodated in the storage part in the state. The inspection jig according to claim 7, wherein the outer curved portion has a width extending from an outer surface of the curved portion away from the central line in the second direction in a direction close to the central line . An inspection jig unit, comprising a plurality of inspection jigs as described in Claim 7 or Claim 8.

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