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TWI787295B - Resin composition for encapsulation, semiconductor package and method of producing semiconductor package - Google Patents

Resin composition for encapsulation, semiconductor package and method of producing semiconductor package Download PDF

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TWI787295B
TWI787295B TW107122574A TW107122574A TWI787295B TW I787295 B TWI787295 B TW I787295B TW 107122574 A TW107122574 A TW 107122574A TW 107122574 A TW107122574 A TW 107122574A TW I787295 B TWI787295 B TW I787295B
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epoxy resin
sealing
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TW201905025A (en
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平井友貴
井上英俊
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日商昭和電工材料股份有限公司
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/22Di-epoxy compounds
    • C08G59/24Di-epoxy compounds carbocyclic
    • C08G59/245Di-epoxy compounds carbocyclic aromatic
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/22Di-epoxy compounds
    • C08G59/226Mixtures of di-epoxy compounds
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    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/22Di-epoxy compounds
    • C08G59/24Di-epoxy compounds carbocyclic
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/22Di-epoxy compounds
    • C08G59/28Di-epoxy compounds containing acyclic nitrogen atoms
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08GMACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G59/00Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
    • C08G59/18Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
    • C08G59/20Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
    • C08G59/22Di-epoxy compounds
    • C08G59/30Di-epoxy compounds containing atoms other than carbon, hydrogen, oxygen and nitrogen
    • C08G59/308Di-epoxy compounds containing atoms other than carbon, hydrogen, oxygen and nitrogen containing halogen atoms
    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08LCOMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L63/00Compositions of epoxy resins; Compositions of derivatives of epoxy resins
    • H10W74/01
    • H10W74/10
    • H10W74/40
    • H10W74/473

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  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Epoxy Resins (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

A resin composition for encapsulation, comprising an epoxy resin, a curing agent and a filler, the epoxy resin comprising a bisphenol epoxy resin and 1,6-bis(glycidyloxy)naphthalane, wherein a content of the 1,6-bis(glycidyloxy)naphthalane in the total epoxy resin is from 10% by mass to 30% by mass.

Description

密封用樹脂組成物、半導體封裝及半導體封裝 的製造方法 Resin composition for sealing, semiconductor package, and semiconductor package manufacturing method

本發明是有關於一種密封用樹脂組成物、半導體封裝及半導體封裝的製造方法。 The invention relates to a resin composition for sealing, a semiconductor package and a manufacturing method of the semiconductor package.

先前,倒裝晶片型的半導體安裝技術中所使用的液狀密封材(填底膠材)的主要的性能改善的方向性是如何滿足以高水準維持半導體封裝的可靠性且應對對於配線圖案的窄間距(fine pitch)化(注入性的提高)等諸多要求。例如,專利文獻1中記載了一種液狀密封材,其藉由於雙酚型環氧樹脂中調配特定量的胺基苯酚環氧樹脂而達成良好的注入性與密封後的焊縫裂紋(fillet crack)的抑制。 Previously, the main performance improvement direction of the liquid sealing material (underfill material) used in the flip-chip semiconductor mounting technology is how to maintain the reliability of the semiconductor package at a high level and cope with the wiring pattern. Narrow pitch (fine pitch) (improve injectability) and many other requirements. For example, Patent Document 1 describes a liquid sealing material, which achieves good injectability and fillet crack after sealing by blending a specific amount of aminophenol epoxy resin into bisphenol epoxy resin. ) suppression.

[現有技術文獻] [Prior art literature]

[專利文獻] [Patent Document]

[專利文獻1]國際公開第2016/093148號 [Patent Document 1] International Publication No. 2016/093148

近年來,隨著半導體封裝的大型化,存在密封面積亦增大的傾向。伴隨於此,在封裝內部在密封部與基板之間產生的應力的增大對封裝的可靠性造成影響的可能性提高。因此,認為就抑制封裝內部產生的應力的觀點而言的密封材的設計今後重要性增加。 In recent years, along with the increase in size of semiconductor packages, there is a tendency that the sealing area also increases. Along with this, there is an increased possibility that the increase in stress generated between the sealing portion and the substrate inside the package will affect the reliability of the package. Therefore, it is considered that the importance of the design of the sealing material from the viewpoint of suppressing the stress generated inside the package will increase in the future.

本發明鑒於所述情況,課題在於提供一種注入性優異且封裝內部所產生的應力的抑制效果優異的密封用樹脂組成物、以及使用該密封用樹脂組成物而獲得的半導體封裝及其製造方法。 In view of the above circumstances, an object of the present invention is to provide an encapsulating resin composition having excellent injectability and an excellent effect of suppressing stress generated inside a package, a semiconductor package using the encapsulating resin composition, and a method of manufacturing the same.

用以解決所述課題的手段中包含以下的實施態樣。 Means for solving the above-mentioned problems include the following implementation aspects.

<1>一種密封用樹脂組成物,其包含環氧樹脂、硬化劑及填充材,所述環氧樹脂包含雙酚型環氧樹脂與1,6-雙(縮水甘油氧基)萘,所述1,6-雙(縮水甘油氧基)萘在所述環氧樹脂整體中所佔的比例為10質量%~30質量%。 <1> A resin composition for sealing, which includes an epoxy resin, a hardener, and a filler, and the epoxy resin includes a bisphenol-type epoxy resin and 1,6-bis(glycidyloxy)naphthalene, and the The proportion of 1,6-bis(glycidyloxy)naphthalene in the entire epoxy resin is 10% by mass to 30% by mass.

<2>如<1>所述的密封用樹脂組成物,其中所述雙酚型環氧樹脂包含雙酚F型環氧樹脂。 <2> The resin composition for sealing according to <1>, wherein the bisphenol-type epoxy resin includes a bisphenol F-type epoxy resin.

<3>如<1>或<2>所述的密封用樹脂組成物,其中所述雙酚型環氧樹脂在所述環氧樹脂整體中所佔的比例為20質量%~90質量%。 <3> The resin composition for sealing according to <1> or <2>, wherein the ratio of the bisphenol-type epoxy resin to the entire epoxy resin is 20% by mass to 90% by mass.

<4>如<1>~<3>中任一項所述的密封用樹脂組成物,其中所述環氧樹脂進一步包含縮水甘油胺型環氧樹脂。 <4> The sealing resin composition according to any one of <1> to <3>, wherein the epoxy resin further includes a glycidylamine-type epoxy resin.

<5>如<4>所述的密封用樹脂組成物,其中所述縮水甘油胺型環氧樹脂包含三官能以上的縮水甘油胺型環氧樹脂。 <5> The sealing resin composition according to <4>, wherein the glycidylamine epoxy resin includes a trifunctional or higher glycidylamine epoxy resin.

<6>如<4>或<5>所述的密封用樹脂組成物,其中所述縮水甘油胺型環氧樹脂在所述環氧樹脂整體中所佔的比例為10質量%~60質量%。 <6> The resin composition for sealing according to <4> or <5>, wherein the ratio of the glycidylamine-type epoxy resin to the entire epoxy resin is 10% by mass to 60% by mass .

<7>一種半導體封裝,其具有:支持體、配置於所述支持體上的半導體元件、以及將所述半導體元件密封的如<1>~<6>中任一項所述的密封用樹脂組成物的硬化物。 <7> A semiconductor package comprising: a support, a semiconductor element arranged on the support, and the sealing resin according to any one of <1> to <6> for sealing the semiconductor element hardening of the composition.

<8>一種半導體封裝的製造方法,其包括:利用如<1>~<6>中任一項所述的密封用樹脂組成物填充支持體與配置於所述支持體上的半導體元件之間的空隙的步驟;以及將所述密封用樹脂組成物硬化的步驟。 <8> A method of manufacturing a semiconductor package, comprising: filling a space between a support and a semiconductor element arranged on the support with the sealing resin composition according to any one of <1> to <6> and a step of hardening the sealing resin composition.

根據本發明,可提供一種注入性優異且封裝內部所產生的應力的抑制效果優異的密封用樹脂組成物、以及使用該密封用樹脂組成物而獲得的半導體封裝及其製造方法。 According to the present invention, there can be provided a resin composition for sealing which is excellent in injectability and has an excellent effect of suppressing stress generated inside the package, a semiconductor package obtained using the resin composition for sealing, and a method of manufacturing the same.

以下,對用以實施本發明的形態進行詳細說明。其中,本發明並不限定於以下的實施形態。於以下的實施形態中,其構成要素(亦包括要素步驟等)除特別明示的情況以外,並非必需。 關於數值及其範圍亦同樣,並不限制本發明。 Hereinafter, the form for carrying out this invention is demonstrated in detail. However, the present invention is not limited to the following embodiments. In the following embodiments, the constituent elements (including element steps, etc.) are not essential unless otherwise specified. The same applies to numerical values and their ranges, and do not limit the present invention.

於本揭示中,「步驟」的用語中,除了與其他步驟獨立的步驟以外,即便於無法與其他步驟明確區別的情況下,只要達成該步驟的目的,則亦包含該步驟。 In this disclosure, the term "step" includes a step that is independent from other steps, and even when it cannot be clearly distinguished from other steps, as long as the purpose of the step is achieved.

於本揭示中,使用「~」來表示的數值範圍中包含「~」的前後所記載的數值分別作為最小值及最大值。 In the present disclosure, the numerical range represented by "~" includes the numerical values described before and after "~" as the minimum value and the maximum value, respectively.

於本揭示中階段性記載的數值範圍中,一個數值範圍內記載的上限值或下限值亦可置換為其他階段性記載的數值範圍的上限值或下限值。另外,於本揭示中記載的數值範圍中,該數值範圍的上限值或下限值亦可置換為實施例中所示的值。 In the numerical ranges described step by step in this disclosure, the upper limit or lower limit described in one numerical range may also be replaced by the upper limit or lower limit of other numerical ranges described step by step. In addition, in the numerical range described in this indication, the upper limit or the lower limit of the numerical range may be replaced with the value shown in an Example.

於本揭示中,亦可包含多種相當於各成分的物質。於在組成物中存在多種相當於各成分的物質的情況下,只要無特別說明,則各成分的含有率或含量是指組成物中所存在的該多種物質的合計含有率或含量。 In this disclosure, a plurality of substances corresponding to each component may also be included. When a plurality of substances corresponding to each component exist in the composition, unless otherwise specified, the content or content of each component refers to the total content or content of the plurality of substances present in the composition.

於本揭示中,亦可包含多種相當於各成分的粒子。於在組成物中存在多種相當於各成分的粒子的情況下,只要無特別說明,則各成分的粒徑是指關於組成物中所存在的該多種粒子的混合物的值。 In this disclosure, a plurality of particles corresponding to each component may be contained. When there are multiple types of particles corresponding to each component in the composition, unless otherwise specified, the particle size of each component refers to a value for a mixture of the plurality of types of particles present in the composition.

<密封用樹脂組成物> <Resin composition for sealing>

本實施形態的密封用樹脂組成物包含環氧樹脂、硬化劑及填充材,所述環氧樹脂包含雙酚型環氧樹脂與1,6-雙(縮水甘油氧基)萘(下述式(1)所表示的環氧樹脂;以下,亦稱為特定萘型環氧 樹脂),特定萘型環氧樹脂在環氧樹脂整體中所佔的比例為10質量%~30質量%。 The sealing resin composition of the present embodiment includes an epoxy resin, a curing agent, and a filler, and the epoxy resin includes a bisphenol-type epoxy resin and 1,6-bis(glycidyloxy)naphthalene (the following formula ( 1) Epoxy resin represented; hereinafter, also referred to as specific naphthalene-type epoxy resin), and the proportion of the specific naphthalene-type epoxy resin in the entire epoxy resin is 10% by mass to 30% by mass.

Figure 107122574-A0305-02-0007-1
Figure 107122574-A0305-02-0007-1

本發明者等人進行了研究,結果可知如下密封用樹脂組成物的注入性優異且硬化狀態下的熱膨脹率低,且彈性係數低,所述密封用樹脂組成物包含雙酚型環氧樹脂與特定萘型環氧樹脂作為環氧樹脂,特定萘型環氧樹脂在環氧樹脂整體中所佔的比例為10質量%~30質量%。 The inventors of the present invention have conducted studies, and as a result, it has been found that the resin composition for sealing comprising bisphenol-type epoxy resin and The specific naphthalene-type epoxy resin is the epoxy resin, and the ratio of the specific naphthalene-type epoxy resin to the entire epoxy resin is 10% by mass to 30% by mass.

認為若密封用樹脂組成物的硬化狀態下的熱膨脹率低,則硬化物與支持體之間的熱膨脹率的差變小而可獲得減少所產生的應力的效果。另外,認為若密封用樹脂組成物的硬化狀態下的彈性係數低,則可獲得緩和所產生的應力的效果。 It is considered that if the thermal expansion coefficient in the cured state of the sealing resin composition is low, the difference in thermal expansion coefficient between the cured product and the support becomes small, and the effect of reducing the generated stress can be obtained. In addition, it is considered that if the elastic modulus in the cured state of the sealing resin composition is low, the effect of relieving the generated stress can be obtained.

進而,本實施形態的密封用樹脂組成物中,與填充材的 增量、撓性劑的添加等方法相比,可抑制硬化前的黏度上升且降低硬化後的熱膨脹率與彈性係數,因此認為可使良好的注入性與應力的減少或緩和效果併存。 Furthermore, in the sealing resin composition of this embodiment, the Compared with methods such as increasing the volume and adding a flexible agent, it can suppress the viscosity increase before hardening and reduce the thermal expansion rate and elastic coefficient after hardening. Therefore, it is believed that good injectability and stress reduction or relaxation effects can coexist.

具有所述構成的密封用樹脂組成物在硬化狀態下的熱膨脹率低且彈性係數低的原因雖不明確,但推測原因在於:藉由包含特定萘型環氧樹脂作為環氧樹脂而熱膨脹率減少,進而藉由將特定萘型環氧樹脂的量抑制為一定的比例以下且併用雙酚型環氧樹脂而將彈性係數維持地低。 The reason why the sealing resin composition having the above constitution has a low coefficient of thermal expansion and a low modulus of elasticity in a hardened state is not clear, but it is presumed that the reason is that the coefficient of thermal expansion is reduced by including a specific naphthalene-type epoxy resin as the epoxy resin. Furthermore, the modulus of elasticity is kept low by suppressing the amount of the specific naphthalene-type epoxy resin to a certain ratio or less and using bisphenol-type epoxy resin together.

密封用樹脂組成物較佳為於使用時為液狀。更具體而言,較佳為25℃下的黏度(10轉/分鐘下的黏度)為25Pa.s以下。另外,較佳為110℃下的黏度為0.12Pa.s以下。密封用樹脂組成物的黏度是利用後述實施例中記載的方法測定而得的值。 The sealing resin composition is preferably liquid when used. More specifically, the preferred viscosity at 25°C (viscosity at 10 rpm) is 25Pa. below s. In addition, the preferred viscosity at 110°C is 0.12Pa. below s. The viscosity of the resin composition for sealing is a value measured by the method described in Examples described later.

[環氧樹脂] [epoxy resin]

特定萘型環氧樹脂於常溫(25℃)下為液狀的環氧樹脂,亦可作為市售品而獲取。作為市售品,例如可列舉DIC股份有限公司的商品名「艾比克隆(EPICLON)HP-4032D」。 The specific naphthalene-type epoxy resin is liquid epoxy resin at normal temperature (25 degreeC), and can also be acquired as a commercial item. As a commercial item, the brand name "Epiclon (Epiclon) HP-4032D" of DIC Co., Ltd. is mentioned, for example.

就熱膨脹率減少的觀點而言,特定萘型環氧樹脂在環氧樹脂整體中所佔的比例為10質量%以上,較佳為15質量%以上。就良好地維持注入性的觀點而言,特定萘型環氧樹脂在環氧樹脂整體中所佔的比例為30質量%以下,較佳為25質量%以下。 From the viewpoint of reducing the coefficient of thermal expansion, the ratio of the specific naphthalene-type epoxy resin to the entire epoxy resin is 10% by mass or more, preferably 15% by mass or more. From the viewpoint of maintaining good injectability, the ratio of the specific naphthalene-type epoxy resin to the entire epoxy resin is 30% by mass or less, preferably 25% by mass or less.

雙酚型環氧樹脂的種類並無特別限制,可列舉:雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AD型環氧樹脂等。密封 用樹脂組成物中所含的雙酚型環氧樹脂可僅為一種,亦可為兩種以上。就以液狀使用密封用樹脂組成物的觀點而言,雙酚型環氧樹脂較佳為於常溫(25℃)下為液狀。就黏度減少的觀點而言,雙酚型環氧樹脂較佳為雙酚F型環氧樹脂。 The type of bisphenol epoxy resin is not particularly limited, and examples thereof include bisphenol A epoxy resin, bisphenol F epoxy resin, and bisphenol AD epoxy resin. seal The bisphenol-type epoxy resin contained in the resin composition for use may be only one kind, or may be two or more kinds. From the viewpoint of using the resin composition for sealing in a liquid state, the bisphenol-type epoxy resin is preferably liquid at normal temperature (25° C.). The bisphenol type epoxy resin is preferably a bisphenol F type epoxy resin from the viewpoint of viscosity reduction.

雙酚型環氧樹脂在環氧樹脂整體中所佔的比例並無特別限制,可根據密封用樹脂組成物的所需的特性選擇。例如,可自20質量%以上且未滿90質量%的範圍內選擇,亦可自30質量%~80質量%的範圍內選擇。 The proportion of the bisphenol-type epoxy resin in the whole epoxy resin is not particularly limited, and can be selected according to the required properties of the sealing resin composition. For example, you may select from the range of 20 mass % or more and less than 90 mass %, and may select from the range of 30 mass % - 80 mass %.

密封用樹脂組成物亦可包含特定萘型環氧樹脂及雙酚型環氧樹脂以外的環氧樹脂。 The sealing resin composition may contain epoxy resins other than specific naphthalene-type epoxy resins and bisphenol-type epoxy resins.

特定萘型環氧樹脂及雙酚型環氧樹脂以外的環氧樹脂的種類並無特別限制,可根據密封用樹脂組成物的所需的特性等選擇。 具體而言,可列舉:使選自由苯酚、甲酚、二甲酚、間苯二酚、鄰苯二酚等酚化合物及α-萘酚、β-萘酚、二羥基萘等萘酚化合物所組成的群粗中的至少一種酚性化合物與甲醛、乙醛、丙醛等脂肪族醛化合物在酸性觸媒下縮合或共縮合而獲得酚醛清漆樹脂並將該酚醛清漆樹脂進行環氧化而獲得的酚醛清漆型環氧樹脂(苯酚酚醛清漆型環氧樹脂、鄰甲酚酚醛清漆型環氧樹脂等);使所述酚性化合物與苯甲醛、水楊醛等芳香族醛化合物在酸性觸媒下縮合或共縮合而獲得三苯基甲烷型酚樹脂並將該三苯基甲烷型酚樹脂進行環氧化而獲得的三苯基甲烷型環氧樹脂;使所述酚化合物及萘酚化合物與醛化合物在酸性觸媒下共縮合而獲得酚醛清漆樹 脂並將該酚醛清漆樹脂進行環氧化而獲得的共聚型環氧樹脂;作為烷基取代或未經取代的聯苯酚的二縮水甘油醚的聯苯型環氧樹脂;作為芪系酚化合物的二縮水甘油醚的芪型環氧樹脂;作為雙酚S等的二縮水甘油醚的含硫原子的環氧樹脂;作為丁二醇、聚乙二醇、聚丙二醇等醇類的縮水甘油醚的環氧樹脂;作為鄰苯二甲酸、間苯二甲酸、四氫鄰苯二甲酸等多元羧酸化合物的縮水甘油酯的縮水甘油酯型環氧樹脂;將苯胺、二胺基二苯基甲烷、異三聚氰酸等的鍵結於氮原子的活性氫以縮水甘油基取代而獲得的縮水甘油胺型環氧樹脂;將二環戊二烯與酚化合物的共縮合樹脂進行環氧化而獲得的二環戊二烯型環氧樹脂;將分子內的烯烴鍵進行環氧化而獲得的二環氧化乙烯基環己烯、3,4-環氧環己基甲基-3,4-環氧環己烷羧酸酯、2-(3,4-環氧基)環己基-5,5-螺環(3,4-環氧基)環己烷-間二噁烷等脂環型環氧樹脂;作為對二甲苯改質酚樹脂的縮水甘油醚的對二甲苯改質環氧樹脂;作為間二甲苯改質酚樹脂的縮水甘油醚的間二甲苯改質環氧樹脂;作為萜烯改質酚樹脂的縮水甘油醚的萜烯改質環氧樹脂;作為二環戊二烯改質酚樹脂的縮水甘油醚的二環戊二烯改質環氧樹脂;作為環戊二烯改質酚樹脂的縮水甘油醚的環戊二烯改質環氧樹脂;作為多環芳香環改質酚樹脂的縮水甘油醚的多環芳香環改質環氧樹脂;作為含萘環的酚樹脂的縮水甘油醚的萘型環氧樹脂;鹵化酚酚醛清漆型環氧樹脂;對苯二酚型環氧樹脂;三羥甲基丙烷型環氧樹脂;利用過乙酸等過酸將烯烴鍵氧化而獲得的線狀脂肪族環氧樹脂;將苯酚 芳烷基樹脂、萘酚芳烷基樹脂等芳烷基型酚樹脂進行環氧化而獲得的芳烷基型環氧樹脂等。該些環氧樹脂可單獨使用一種,亦可組合使用兩種以上。 The types of epoxy resins other than the specific naphthalene-type epoxy resin and the bisphenol-type epoxy resin are not particularly limited, and can be selected according to the required properties of the sealing resin composition. Specifically, examples include: phenol compounds such as phenol, cresol, xylenol, resorcinol, and catechol, and naphthol compounds such as α-naphthol, β-naphthol, and dihydroxynaphthalene. Condensation or co-condensation of at least one phenolic compound in the composition group with aliphatic aldehyde compounds such as formaldehyde, acetaldehyde, and propionaldehyde under an acidic catalyst to obtain a novolak resin and epoxidize the novolak resin Novolak type epoxy resin (phenol novolak type epoxy resin, o-cresol novolak type epoxy resin, etc.); Condensation or co-condensation to obtain a triphenylmethane type phenol resin and triphenylmethane type epoxy resin obtained by epoxidizing the triphenylmethane type phenol resin; making the phenol compound and naphthol compound and aldehyde compound Cocondensation under an acidic catalyst to obtain novolac Copolymer epoxy resin obtained by epoxidizing the novolak resin with resin; biphenyl type epoxy resin as diglycidyl ether of alkyl-substituted or unsubstituted biphenol; biphenyl type epoxy resin as stilbene phenol compound Stilbene-type epoxy resins of glycidyl ethers; epoxy resins containing sulfur atoms as diglycidyl ethers such as bisphenol S; rings of glycidyl ethers of alcohols such as butanediol, polyethylene glycol, and polypropylene glycol epoxy resins; glycidyl ester type epoxy resins that are glycidyl esters of polycarboxylic acid compounds such as phthalic acid, isophthalic acid, and tetrahydrophthalic acid; aniline, diaminodiphenylmethane, iso Glycidylamine type epoxy resin obtained by substituting active hydrogen bonded to nitrogen atom such as cyanuric acid with glycidyl group; dicyclopentadiene and phenolic compound co-condensation resin obtained by epoxidizing dicyclopentadiene Cyclopentadiene-type epoxy resins; diepoxidized vinylcyclohexene, 3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexane obtained by epoxidizing olefin bonds in the molecule Alicyclic epoxy resins such as carboxylate, 2-(3,4-epoxy)cyclohexyl-5,5-spiro(3,4-epoxy)cyclohexane-m-dioxane; as p-xylene-modified epoxy resins as glycidyl ethers of p-xylene-modified phenolic resins; meta-xylene-modified epoxy resins as glycidyl ethers of meta-xylene-modified phenolic resins; as terpene-modified phenolic resins Terpene-modified epoxy resins of glycidyl ethers; dicyclopentadiene-modified epoxy resins of glycidyl ethers of dicyclopentadiene-modified phenol resins; Cyclopentadiene-modified epoxy resins of glyceryl ethers; polycyclic aromatic ring-modified epoxy resins as glycidyl ethers of polycyclic aromatic ring-modified phenol resins; naphthalene as glycidyl ethers of phenol resins containing naphthalene rings Halogenated phenol novolak type epoxy resins; Hydroquinone type epoxy resins; Trimethylolpropane type epoxy resins; Linear aliphatic resins obtained by oxidation of olefin bonds with peracids such as peracetic acid epoxy resin; phenol Aralkyl-type epoxy resins obtained by epoxidizing aralkyl-type phenol resins such as aralkyl resins and naphthol aralkyl resins, and the like. These epoxy resins may be used alone or in combination of two or more.

於密封用樹脂組成物包含雙酚型環氧樹脂與其以外的環氧樹脂作為特定萘型環氧樹脂以外的環氧樹脂的情況下,雙酚型環氧樹脂與其以外的環氧樹脂的質量比(雙酚型環氧樹脂/其以外的環氧樹脂)並無特別限制。例如,可自1/5~5/1的範圍內選擇。 In the case where the sealing resin composition contains a bisphenol-type epoxy resin and other epoxy resins as epoxy resins other than specific naphthalene-type epoxy resins, the mass ratio of the bisphenol-type epoxy resin to other epoxy resins (Bisphenol-type epoxy resin/epoxy resin other than it) is not specifically limited. For example, it can be selected from the range of 1/5~5/1.

於密封用樹脂組成物包含雙酚型環氧樹脂與其以外的環氧樹脂作為特定萘型環氧樹脂以外的環氧樹脂的情況下,就以液狀使用密封用樹脂組成物的觀點而言,較佳為包含在常溫(25℃)下為液狀的環氧樹脂,更佳為包含縮水甘油胺型環氧樹脂。 就密封用樹脂組成物的黏度減少的觀點而言,縮水甘油胺型環氧樹脂的分子量較佳為300以下。 In the case where the resin composition for sealing contains a bisphenol-type epoxy resin and other epoxy resins as epoxy resins other than specific naphthalene-type epoxy resins, from the viewpoint of using the resin composition for sealing in a liquid form, It is preferable to contain an epoxy resin which is liquid at normal temperature (25 degreeC), and it is more preferable to contain a glycidylamine type epoxy resin. From the viewpoint of reducing the viscosity of the sealing resin composition, the molecular weight of the glycidylamine epoxy resin is preferably 300 or less.

縮水甘油胺型環氧樹脂可為二官能亦可為三官能以上。就硬化後的耐熱性提高的觀點而言,較佳為三官能以上(一分子中具有三個以上的環氧基)的縮水甘油胺型環氧樹脂。作為二官能以上的縮水甘油胺型環氧樹脂,可列舉N,N-二縮水甘油基苯胺、N,N-二縮水甘油基-鄰甲苯胺等。作為三官能以上的縮水甘油胺型環氧樹脂,可列舉三縮水甘油基-對胺基苯酚、4,4'-亞甲基雙[N,N-雙(環氧乙烷基甲基)苯胺]等。該些中,就常溫(25℃)黏度的觀點而言,較佳為三縮水甘油基-對胺基苯酚。 Glycidylamine-type epoxy resins may be difunctional or trifunctional or higher. From the viewpoint of improving the heat resistance after curing, glycidylamine-type epoxy resins having more than three functions (having three or more epoxy groups in one molecule) are preferable. N,N-diglycidylaniline, N,N-diglycidyl-o-toluidine, etc. are mentioned as a glycidylamine type epoxy resin more than bifunctional. Triglycidyl-p-aminophenol and 4,4'-methylenebis[N,N-bis(oxiranylmethyl)aniline are examples of glycidylamine-type epoxy resins with more than three functions. ]Wait. Among these, triglycidyl-p-aminophenol is preferred from the viewpoint of normal temperature (25° C.) viscosity.

於密封用樹脂組成物包含縮水甘油胺型環氧樹脂作為環氧樹脂的情況下,縮水甘油胺型環氧樹脂的比例並無特別限制。例如,較佳為在環氧樹脂整體中所佔的比例為10質量%~60質量%。 In the case where the resin composition for sealing contains a glycidylamine-type epoxy resin as the epoxy resin, the ratio of the glycidylamine-type epoxy resin is not particularly limited. For example, it is preferable that the ratio occupied in the whole epoxy resin is 10 mass % - 60 mass %.

[硬化劑] [hardener]

硬化劑的種類並無特別限制,可根據密封用樹脂組成物的所需的特性等選擇。例如,可列舉:胺硬化劑、酚硬化劑、酸酐硬化劑、聚硫醇硬化劑、聚胺基醯胺硬化劑、異氰酸酯硬化劑、嵌段異氰酸酯硬化劑等。硬化劑可單獨使用一種,亦可組合使用兩種以上。 The type of curing agent is not particularly limited, and can be selected according to the required properties of the sealing resin composition and the like. For example, amine hardeners, phenol hardeners, acid anhydride hardeners, polythiol hardeners, polyaminoamide hardeners, isocyanate hardeners, blocked isocyanate hardeners, etc. are mentioned. A curing agent may be used alone or in combination of two or more.

就以液狀使用密封用樹脂組成物的觀點而言,硬化劑較佳為胺硬化劑。作為胺硬化劑,可列舉:二乙三胺、三乙四胺、正丙基胺、2-羥基乙基胺基丙基胺、環己基胺、4,4'-二胺基-二環己基甲烷等脂肪族胺化合物、4,4'-二胺基二苯基甲烷、2-甲基苯胺等芳香族胺化合物、咪唑、2-甲基咪唑、2-乙基咪唑、2-異丙基咪唑等咪唑化合物、咪唑啉、2-甲基咪唑啉、2-乙基咪唑啉等咪唑啉化合物等。 From the viewpoint of using the sealing resin composition in a liquid form, the curing agent is preferably an amine curing agent. Examples of amine hardeners include: diethylenetriamine, triethylenetetramine, n-propylamine, 2-hydroxyethylaminopropylamine, cyclohexylamine, 4,4'-diamino-dicyclohexyl Aliphatic amine compounds such as methane, 4,4'-diaminodiphenylmethane, aromatic amine compounds such as 2-methylaniline, imidazole, 2-methylimidazole, 2-ethylimidazole, 2-isopropyl imidazole compounds such as imidazole, imidazoline compounds such as imidazoline, 2-methylimidazoline, and 2-ethylimidazoline, and the like.

環氧樹脂與硬化劑的當量比、即硬化劑中的官能基(胺硬化劑的情況下為活性氫)的數量相對於環氧樹脂中的官能基數的比(硬化劑中的官能基數/環氧樹脂中的官能基數)並無特別限制。就將各自的未反應成分抑制地少的觀點而言,較佳為設定為0.5~2.0的範圍內,更佳為設定為0.6~1.3的範圍內。就成形性 與耐回焊性的觀點而言,進而佳為設定為0.8~1.2的範圍內。 The equivalent ratio of the epoxy resin to the hardener, that is, the ratio of the number of functional groups in the hardener (active hydrogen in the case of an amine hardener) to the number of functional groups in the epoxy resin (number of functional groups in the hardener/ring The number of functional groups in the oxygen resin) is not particularly limited. From the viewpoint of suppressing each unreacted component to a small extent, it is preferable to set it within the range of 0.5 to 2.0, more preferably to set it within the range of 0.6 to 1.3. formability From the viewpoint of reflow resistance, it is more preferable to set it within the range of 0.8 to 1.2.

[填充材] [Filler]

填充材的種類並無特別限制。具體而言,可列舉:二氧化矽、玻璃、氧化鋁、碳酸鈣、矽酸鋯、矽酸鈣、氮化矽、氮化鋁、氮化硼、氧化鈹、氧化鋯、鋯石、鎂橄欖石(fosterite)、凍石、尖晶石、富鋁紅柱石、二氧化鈦、滑石、黏土、雲母等無機材料。 亦可使用具有阻燃效果的填充材。作為具有阻燃效果的填充材,可列舉:氫氧化鋁、氫氧化鎂、鎂與鋅的複合氫氧化物等複合金屬氫氧化物、硼酸鋅等。 The type of filler is not particularly limited. Specifically, silica, glass, alumina, calcium carbonate, zirconium silicate, calcium silicate, silicon nitride, aluminum nitride, boron nitride, beryllium oxide, zirconia, zircon, forsterite Fosterite, steatite, spinel, mullite, titanium dioxide, talc, clay, mica and other inorganic materials. Fillers with flame retardant effects can also be used. Examples of the filler having a flame-retardant effect include composite metal hydroxides such as aluminum hydroxide, magnesium hydroxide, and composite hydroxides of magnesium and zinc, and zinc borate.

所述填充材中,就熱膨脹率減少的觀點而言,較佳為二氧化矽,就熱傳導性提高的觀點而言,較佳為氧化鋁。填充材可單獨使用一種,亦可組合使用兩種以上。 Among the above-mentioned fillers, silicon dioxide is preferable from the viewpoint of reducing thermal expansion coefficient, and alumina is preferable from the viewpoint of improvement of thermal conductivity. One type of filler may be used alone, or two or more types may be used in combination.

密封用樹脂組成物中所含的填充材的含有率並無特別限制。就使良好的流動性與含有填充材的硬化性併存的觀點而言,填充材的含有率較佳為密封用樹脂組成物整體的30質量%~90質量%,更佳為50質量%~75質量%。 The content of the filler contained in the sealing resin composition is not particularly limited. From the standpoint of coexistence of good fluidity and curability of the filler, the content of the filler is preferably 30% by mass to 90% by mass of the entire resin composition for sealing, more preferably 50% by mass to 75% by mass. quality%.

於填充材為粒子狀的情況下,其平均粒徑並無特別限制。例如,體積平均粒徑較佳為0.2μm~20μm,更佳為0.5μm~15μm。若體積平均粒徑為0.2μm以上,則存在密封用樹脂組成物的黏度的上升得到進一步抑制的傾向。若體積平均粒徑為20μm以下,則存在對狹小的縫隙的填充性進一步提高的傾向。填充材的體積平均粒徑可作為藉由雷射散射繞射法粒度分佈測定裝置 而獲得的體積基準的粒度分佈中自小粒徑側起的體積的累計成為50%時的粒徑(D50)而進行測定。 When the filler is in the form of particles, the average particle diameter is not particularly limited. For example, the volume average particle diameter is preferably from 0.2 μm to 20 μm, more preferably from 0.5 μm to 15 μm. When the volume average particle diameter is 0.2 μm or more, the increase in the viscosity of the sealing resin composition tends to be further suppressed. When the volume average particle diameter is 20 μm or less, the filling property to narrow gaps tends to be further improved. The volume average particle size of the filler can be used as a particle size distribution measurement device by the laser scattering diffraction method In the obtained volume-based particle size distribution, the particle diameter (D50) at which the cumulative volume from the small particle diameter side becomes 50% was measured.

[各種添加劑] [Various additives]

密封用樹脂組成物除了所述成分以外,亦可包含硬化促進劑、應力緩和劑、偶合劑、脫模劑、著色劑等各種添加劑。密封用樹脂組成物除了以下例示的添加劑以外,亦可視需要包含在本技術領域中周知的各種添加劑。 The resin composition for sealing may contain various additives such as curing accelerators, stress relieving agents, coupling agents, mold release agents, and colorants in addition to the above-mentioned components. The resin composition for sealing may optionally contain various additives known in the art in addition to the additives exemplified below.

(硬化促進劑) (hardening accelerator)

密封用樹脂組成物亦可包含硬化促進劑。硬化促進劑的種類並無特別限制,可根據環氧樹脂及硬化劑的種類、密封用樹脂組成物的所需的特性等選擇。 The resin composition for sealing may also contain a hardening accelerator. The type of curing accelerator is not particularly limited, and can be selected according to the type of epoxy resin and curing agent, required properties of the sealing resin composition, and the like.

於密封用樹脂組成物包含硬化促進劑的情況下,硬化促進劑的量較佳為相對於硬化性樹脂成分(環氧樹脂與硬化劑的合計)100質量份而為0.1質量份~30質量份,更佳為1質量份~15質量份。 When the sealing resin composition contains a hardening accelerator, the amount of the hardening accelerator is preferably 0.1 to 30 parts by mass relative to 100 parts by mass of the curable resin component (total of epoxy resin and hardener). , more preferably 1 mass part to 15 mass parts.

(應力緩和劑) (stress reliever)

密封用樹脂組成物亦可包含應力緩和劑。作為應力緩和劑,可列舉熱塑性彈性體、天然橡膠(Natural Rubber,NR)、丙烯腈-丁二烯橡膠(acrylonitrile butadiene rubber,NBR)、丙烯酸橡膠、胺基甲酸酯橡膠、矽酮橡膠等粒子等。應力緩和劑可單獨使用一種,亦可組合使用兩種以上。 The resin composition for sealing may also contain a stress relieving agent. Examples of the stress relieving agent include particles of thermoplastic elastomer, natural rubber (Natural Rubber, NR), acrylonitrile butadiene rubber (acrylonitrile butadiene rubber, NBR), acrylic rubber, urethane rubber, silicone rubber, etc. Wait. The stress relieving agents may be used alone or in combination of two or more.

於密封用樹脂組成物包含應力緩和劑的情況下,應力緩 和劑的量較佳為相對於硬化性樹脂成分(環氧樹脂與硬化劑的合計)100質量份而為0.1質量份~30質量份,更佳為1質量份~15質量份。 In the case where the resin composition for sealing contains a stress relieving agent, the stress relieving The amount of the compounding agent is preferably 0.1 to 30 parts by mass, more preferably 1 to 15 parts by mass, based on 100 parts by mass of the curable resin component (total of the epoxy resin and the curing agent).

(偶合劑) (coupling agent)

密封用樹脂組成物亦可包含偶合劑。作為偶合劑,可列舉:環氧基矽烷、巰基矽烷、胺基矽烷、烷基矽烷、脲基矽烷、乙烯基矽烷等矽烷化合物、鈦化合物、鋁螯合物、鋁/鋯化合物等。其中,就流動性的觀點而言,較佳為矽烷化合物。偶合劑可單獨使用一種,亦可組合使用兩種以上。 The sealing resin composition may also contain a coupling agent. Examples of the coupling agent include silane compounds such as epoxysilane, mercaptosilane, aminosilane, alkylsilane, ureidosilane, and vinylsilane, titanium compounds, aluminum chelate compounds, aluminum/zirconium compounds, and the like. Among these, silane compounds are preferable from the viewpoint of fluidity. One type of coupling agent may be used alone, or two or more types may be used in combination.

於密封用樹脂組成物包含偶合劑的情況下,偶合劑的量較佳為相對於填充材100質量份而為0.05質量份~5質量份,更佳為0.1質量份~2.5質量份。 When the sealing resin composition contains a coupling agent, the amount of the coupling agent is preferably 0.05 to 5 parts by mass, more preferably 0.1 to 2.5 parts by mass, relative to 100 parts by mass of the filler.

(著色劑) (Colorant)

密封用樹脂組成物亦可包含著色劑。作為著色劑,可列舉:碳黑、有機染料、有機顏料、氧化鈦、鉛丹、氧化鐵等。著色劑可單獨使用一種,亦可組合使用兩種以上。 The sealing resin composition may also contain a colorant. Examples of the colorant include carbon black, organic dyes, organic pigments, titanium oxide, red lead, and iron oxide. A coloring agent may be used individually by 1 type, and may use it in combination of 2 or more types.

於密封用樹脂組成物包含著色劑的情況下,著色劑的量較佳為相對於硬化性樹脂成分(環氧樹脂與硬化劑的合計)100質量份而為0.01質量份~10質量份,更佳為0.1質量份~5質量份。 When the sealing resin composition contains a colorant, the amount of the colorant is preferably 0.01 parts by mass to 10 parts by mass relative to 100 parts by mass of the curable resin component (total of epoxy resin and hardener), and more preferably Preferably, it is 0.1 mass part - 5 mass parts.

(密封用樹脂組成物的用途) (Use of resin composition for sealing)

密封用樹脂組成物可用於各種安裝技術中。尤其,可較佳地 用作倒裝晶片型安裝技術中使用的填底膠材。例如,可較佳地用於填充利用凸塊等而受到接合的半導體元件與支持體之間的縫隙的用途。 The resin composition for sealing can be used in various installation techniques. In particular, preferably It is used as an underfill material used in flip chip type mounting technology. For example, it can be suitably used for filling the gap between the semiconductor element bonded by bumps etc., and a support body.

半導體元件與支持體的種類並無特別限制,可自於半導體封裝的領域中通常所使用者中選擇。使用密封用樹脂組成物來填充半導體元件與支持體之間的縫隙的方法並無特別限制。例如可使用分配器等並藉由公知的方法來進行。 The types of semiconductor elements and supports are not particularly limited, and can be selected from those commonly used in the field of semiconductor packaging. The method of filling the gap between the semiconductor element and the support with the sealing resin composition is not particularly limited. For example, a dispenser etc. can be used and it can carry out by a well-known method.

<半導體封裝> <Semiconductor package>

本實施形態的半導體封裝具有:支持體、配置於所述支持體上的半導體元件、以及將所述半導體元件密封的所述密封用樹脂組成物的硬化物。 The semiconductor package according to this embodiment includes a support, a semiconductor element disposed on the support, and a cured product of the sealing resin composition that seals the semiconductor element.

所述半導體封裝中,半導體元件與支持體的種類並無特別限制,可自於半導體封裝的領域中通常所使用者中選擇。關於所述半導體封裝,密封用樹脂組成物的硬化物的熱膨脹率低且彈性係數低。因此,於在密封用樹脂組成物的硬化物與支持體之間產生應力的情況下,抑制該應力的效果優異。 In the semiconductor package, the types of the semiconductor element and the support are not particularly limited, and can be selected from common users in the field of semiconductor packaging. In the above-mentioned semiconductor package, the cured product of the sealing resin composition has a low coefficient of thermal expansion and a low modulus of elasticity. Therefore, when stress occurs between the cured product of the sealing resin composition and the support, the effect of suppressing the stress is excellent.

<半導體封裝的製造方法> <Manufacturing method of semiconductor package>

本實施形態的半導體封裝的製造方法包括:利用所述密封用樹脂組成物填充支持體與配置於所述支持體上的半導體元件之間的空隙的步驟;以及將所述密封用樹脂組成物硬化的步驟。 The method for manufacturing a semiconductor package according to this embodiment includes: filling a gap between a support and a semiconductor element disposed on the support with the sealing resin composition; and curing the sealing resin composition. A step of.

所述方法中,半導體元件與支持體的種類並無特別限制,可自於半導體封裝的領域中通常所使用者中選擇。使用密封 用樹脂組成物來填充半導體元件與支持體之間的縫隙的方法、以及於填充後將密封用樹脂組成物硬化的方法並無特別限制,可利用公知的方法進行。 In the method, the types of the semiconductor element and the support are not particularly limited, and can be selected from common users in the field of semiconductor packaging. use seal The method of filling the gap between the semiconductor element and the support with the resin composition and the method of curing the sealing resin composition after filling are not particularly limited, and known methods can be used.

[實施例] [Example]

以下,藉由實施例對所述實施形態進行具體說明,但所述實施形態的範圍並不限定於該些實施例。 Hereinafter, although the said embodiment is demonstrated concretely using an Example, the range of the said embodiment is not limited to these Examples.

(密封用樹脂組成物的製備) (Preparation of resin composition for sealing)

以表1所示的量混合表1所示的成分,而製備密封用樹脂組成物。各成分的詳細情況如下所述。表1中的「eq」表示硬化劑的當量基準的比例(硬化劑1與硬化劑2的合計為1)。填充材的「質量%」表示相對於密封用樹脂組成物整體的比例。 The components shown in Table 1 were mixed in the amounts shown in Table 1 to prepare a sealing resin composition. The details of each component are as follows. "eq" in Table 1 represents the ratio based on the equivalent of the curing agent (the total of the curing agent 1 and the curing agent 2 is 1). The "mass %" of the filler represents the ratio to the entire resin composition for sealing.

環氧樹脂1…液狀雙酚F型環氧樹脂、商品名「YDF-8170C」、新日鐵住金化學股份有限公司 Epoxy resin 1...Liquid bisphenol F epoxy resin, trade name "YDF-8170C", Nippon Steel & Sumikin Chemical Co., Ltd.

環氧樹脂2…三縮水甘油基-對胺基苯酚、商品名「jER 630」、三菱化學股份有限公司 Epoxy resin 2...Triglycidyl-p-aminophenol, trade name "jER 630", Mitsubishi Chemical Corporation

環氧樹脂3…1,6-雙(縮水甘油氧基)萘、商品名「艾比克隆(EPICLON)HP-4032D」、DIC股份有限公司 Epoxy resin 3...1,6-bis(glycidyloxy)naphthalene, trade name "EPICLON (EPICLON) HP-4032D", DIC Co., Ltd.

硬化劑1‥包含二乙基甲苯二胺的液狀硬化劑、商品名「jER Cure W」、三菱化學股份有限公司 Curing agent 1 - Liquid curing agent containing diethyltoluenediamine, brand name "jER Cure W", Mitsubishi Chemical Corporation

硬化劑2…包含3,3'-二乙基-4,4'-二胺基二苯基甲烷的液狀硬化劑、商品名「卡亞哈德(KAVAHARD)AA」、日本化藥股份有限公司 Curing agent 2...Liquid curing agent containing 3,3'-diethyl-4,4'-diaminodiphenylmethane, trade name "KAVAHARD AA", Nippon Kayaku Co., Ltd. company

填充材…高純度合成球狀二氧化矽、商品名「SE2200-SEJ」、平均粒徑:0.5μm、亞都瑪科技(Admatechs)股份有限公司 Filler...High-purity synthetic spherical silica, trade name "SE2200-SEJ", average particle size: 0.5μm, Admatechs Co., Ltd.

偶合劑…3-縮水甘油氧基丙基三甲氧基矽烷、商品名「KBM-403」、信越化學工業股份有限公司 Coupling agent...3-Glycidoxypropyltrimethoxysilane, trade name "KBM-403", Shin-Etsu Chemical Co., Ltd.

Figure 107122574-A0305-02-0019-2
Figure 107122574-A0305-02-0019-2

(流動特性的評價) (Evaluation of flow characteristics)

使用E型黏度計(東京計器股份有限公司製造、威斯克(VISCONIC)EHD型(商品名))(圓錐角度3°、轉速:10轉/分鐘),測定密封用樹脂組成物於25℃下的黏度(Pa.s)。將結果示於表1中。 Using an E-type viscometer (manufactured by Tokyo Keiki Co., Ltd., Visconic (VISCONIC) EHD type (trade name)) (cone angle 3°, rotation speed: 10 revolutions/minute), measure the viscosity of the resin composition for sealing at 25°C. Viscosity (Pa.s). The results are shown in Table 1.

使用AR2000(TA儀器(TA Instrument)公司),在40mm平行板、剪切速度32.5(l/s)的條件下測定密封用樹脂組成物於110℃下的黏度(Pa.s)。將結果示於表1中。 The viscosity (Pa·s) of the sealing resin composition at 110° C. was measured on a 40 mm parallel plate and a shear rate of 32.5 (l/s) using AR2000 (TA Instruments). The results are shown in Table 1.

(注入性的評價) (injective evaluation)

於玻璃基板上設置25μm的間隙,並製備固定有玻璃板(20mm×20mm)來代替半導體元件的試驗片。其次,將所述試驗片放置於設定為110℃的加熱板上,於玻璃板的一端側塗佈密封用樹脂組成物,測定直至間隙被密封用樹脂組成物填滿為止的時間(秒/sec)。將結果示於表1中。 A gap of 25 μm was provided on the glass substrate, and a test piece in which a glass plate (20 mm×20 mm) was fixed instead of a semiconductor element was prepared. Next, the test piece was placed on a heating plate set at 110° C., the sealing resin composition was applied to one end side of the glass plate, and the time until the gap was filled with the sealing resin composition was measured (seconds/sec. ). The results are shown in Table 1.

(硬化物特性的評價) (Evaluation of hardened product properties)

分別利用下述方法測定將密封用樹脂組成物硬化而獲得的硬化物的熱膨脹率(ppm/℃)、彈性係數(GPa)、玻璃轉移溫度(℃)。將結果示於表1中。 The coefficient of thermal expansion (ppm/°C), modulus of elasticity (GPa), and glass transition temperature (°C) of the cured product obtained by curing the resin composition for sealing were measured by the following methods. The results are shown in Table 1.

(熱膨脹率的測定方法) (Measurement method of thermal expansion coefficient)

使用熱機械分析裝置(TMA2940、TA儀器(TA Instrument)公司),將進行了硬化的密封用樹脂組成物切成直徑8mm、長度20mm的大小,利用壓縮法以5℃/min自0℃起升溫至300℃為止 進行測定,將10℃~30℃下的切線的傾斜率設為熱膨脹率(ppm/℃)。將結果示於表1中。 Using a thermomechanical analyzer (TMA2940, TA Instruments), cut the hardened sealing resin composition into a size with a diameter of 8 mm and a length of 20 mm, and heated it from 0°C at 5°C/min by a compression method. up to 300°C The measurement was performed, and the gradient of the tangent line at 10°C to 30°C was defined as the coefficient of thermal expansion (ppm/°C). The results are shown in Table 1.

(彈性係數的測定方法) (Measuring method of modulus of elasticity)

使用黏彈性測定裝置(RSA III、TA儀器(TA Instrument)公司),將進行了硬化的密封用樹脂組成物切成50mm×10mm×3mm的大小,於跨距間距離40mm、頻率1Hz的條件下利用三點彎曲法以5℃/min自20℃起升溫至300℃為止,測定25℃下的貯存彈性係數(GPa)的值。將結果示於表1中。 Using a viscoelasticity measurement device (RSA III, TA Instruments), cut the hardened sealing resin composition into a size of 50mm×10mm×3mm, under the conditions of a span distance of 40mm and a frequency of 1Hz The value of the storage modulus (GPa) at 25°C was measured by the three-point bending method until the temperature was raised from 20°C to 300°C at 5°C/min. The results are shown in Table 1.

(玻璃轉移溫度的測定方法) (Measuring method of glass transition temperature)

利用與所述熱膨脹率相同的裝置、條件進行測定,將對應於50℃與150℃的切線的交點的溫度設為玻璃轉移溫度(℃)。將結果示於表1中。 It measured with the same apparatus and conditions as said thermal expansion coefficient, and let the temperature corresponding to the intersection of the tangent line of 50 degreeC and 150 degreeC be glass transition temperature (degreeC). The results are shown in Table 1.

如表1所示,關於包含雙酚型環氧樹脂與特定萘型環氧樹脂作為環氧樹脂且特定萘型環氧樹脂在環氧樹脂整體中所佔的比例為10質量%~30質量%的實施例的密封用樹脂組成物,與不滿足所述條件的比較例的密封用樹脂組成物相比,注入性優異且熱膨脹率與彈性係數均低。據此,揭示了即便於密封用樹脂組成物的硬化物與支持體之間產生應力,減少或緩和該應力的效果亦優異。 As shown in Table 1, regarding bisphenol-type epoxy resin and specific naphthalene-type epoxy resin as the epoxy resin and the proportion of the specific naphthalene-type epoxy resin in the entire epoxy resin is 10% by mass to 30% by mass The resin composition for sealing of the example is superior in injectability and has a lower coefficient of thermal expansion and modulus of elasticity than the resin composition for sealing of the comparative example which does not satisfy the above conditions. From this, it was revealed that even if stress occurs between the cured product of the sealing resin composition and the support, it is excellent in the effect of reducing or alleviating the stress.

日本專利申請第2017-127581號的揭示藉由參照而將其整體併入本說明書中。 The disclosure of Japanese Patent Application No. 2017-127581 is hereby incorporated by reference in its entirety.

關於本說明書中所記載的所有文獻、專利申請及技術規格, 與具體且各個地記載有藉由參照而併入各個文獻、專利申請及技術規格的情況同等程度地,引用且併入至本說明書中。 Regarding all documents, patent applications and technical specifications described in this specification, Each document, patent application, and technical specification is cited and incorporated in this specification to the same extent as if it were specifically and individually described to be incorporated by reference.

Claims (8)

一種密封用樹脂組成物,其於使用時為液狀,且包含環氧樹脂、硬化劑及填充材,所述環氧樹脂包含雙酚型環氧樹脂、1,6-雙(縮水甘油氧基)萘與三官能的縮水甘油胺型環氧樹脂,所述1,6-雙(縮水甘油氧基)萘在所述環氧樹脂整體中所佔的比例為10質量%~30質量%。 A resin composition for sealing, which is liquid when used, and includes epoxy resin, hardener and filler, and the epoxy resin includes bisphenol-type epoxy resin, 1,6-bis(glycidyloxy ) naphthalene and a trifunctional glycidylamine epoxy resin, the proportion of the 1,6-bis(glycidyloxy)naphthalene in the epoxy resin as a whole is 10% by mass to 30% by mass. 如申請專利範圍第1項所述的密封用樹脂組成物,其中所述雙酚型環氧樹脂包含雙酚F型環氧樹脂。 The resin composition for sealing as described in claim 1 of the patent application, wherein the bisphenol type epoxy resin includes bisphenol F type epoxy resin. 如申請專利範圍第1項或第2項所述的密封用樹脂組成物,其中所述雙酚型環氧樹脂在所述環氧樹脂整體中所佔的比例為20質量%以上且未滿90質量%。 The resin composition for sealing according to claim 1 or 2, wherein the ratio of the bisphenol-type epoxy resin to the entire epoxy resin is 20% by mass or more and less than 90% by mass. quality%. 如申請專利範圍第1項所述的密封用樹脂組成物,其中所述三官能的縮水甘油胺型環氧樹脂為三縮水甘油基-對胺基苯酚。 The resin composition for sealing as described in item 1 of the scope of the patent application, wherein the trifunctional glycidylamine epoxy resin is triglycidyl-p-aminophenol. 如申請專利範圍第4項所述的密封用樹脂組成物,其中所述三官能的縮水甘油胺型環氧樹脂在所述環氧樹脂整體中所佔的比例為10質量%~60質量%。 The sealing resin composition described in claim 4 of the patent application, wherein the proportion of the trifunctional glycidylamine-type epoxy resin in the entire epoxy resin is 10% by mass to 60% by mass. 如申請專利範圍第1項所述的密封用樹脂組成物,其中所述硬化劑包含胺硬化劑。 The resin composition for sealing according to claim 1, wherein the hardener includes an amine hardener. 一種半導體封裝,其具有:支持體、配置於所述支持體上的半導體元件、以及將所述半導體元件密封的如申請專利範圍第1項至第6項中任一項所述的密封用樹脂組成物的硬化物。 A semiconductor package comprising: a support, a semiconductor element disposed on the support, and the sealing resin according to any one of claims 1 to 6 of the patent application for sealing the semiconductor element hardening of the composition. 一種半導體封裝的製造方法,其包括:利用如申請專利範圍第1項至第6項中任一項所述的密封用樹脂組成物填充支持體與配置於所述支持體上的半導體元件之間的空隙的步驟;以及將所述密封用樹脂組成物硬化的步驟。 A method for manufacturing a semiconductor package, comprising: using the encapsulating resin composition described in any one of claims 1 to 6 of the patent application to fill between a support and a semiconductor element disposed on the support and a step of hardening the sealing resin composition.
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