TW201905025A - Sealing resin composition, semiconductor package, and method of manufacturing semiconductor package - Google Patents
Sealing resin composition, semiconductor package, and method of manufacturing semiconductor packageInfo
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
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- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
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- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
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- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
- C08G59/22—Di-epoxy compounds
- C08G59/28—Di-epoxy compounds containing acyclic nitrogen atoms
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- C08G59/00—Polycondensates containing more than one epoxy group per molecule; Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups
- C08G59/18—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing
- C08G59/20—Macromolecules obtained by polymerising compounds containing more than one epoxy group per molecule using curing agents or catalysts which react with the epoxy groups ; e.g. general methods of curing characterised by the epoxy compounds used
- C08G59/22—Di-epoxy compounds
- C08G59/30—Di-epoxy compounds containing atoms other than carbon, hydrogen, oxygen and nitrogen
- C08G59/308—Di-epoxy compounds containing atoms other than carbon, hydrogen, oxygen and nitrogen containing halogen atoms
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- C08L63/00—Compositions of epoxy resins; Compositions of derivatives of epoxy resins
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Abstract
一種密封用樹脂組成物,其包含環氧樹脂、硬化劑及填充材,所述環氧樹脂包含雙酚型環氧樹脂與所述1,6-雙(縮水甘油氧基)萘,1,6-雙(縮水甘油氧基)萘在所述環氧樹脂整體中所佔的比例為10質量%~30質量%。A sealing resin composition comprising an epoxy resin, a hardener and a filler, the epoxy resin comprising a bisphenol-type epoxy resin and the 1,6-bis (glycidyloxy) naphthalene, 1,6 The proportion of bis (glycidyloxy) naphthalene in the whole epoxy resin is 10% to 30% by mass.
Description
本發明是有關於一種密封用樹脂組成物、半導體封裝及半導體封裝的製造方法。The present invention relates to a sealing resin composition, a semiconductor package, and a method for manufacturing a semiconductor package.
先前,倒裝晶片型的半導體安裝技術中所使用的液狀密封材(填底膠材)的主要的性能改善的方向性是如何滿足以高水準維持半導體封裝的可靠性且應對對於配線圖案的窄間距(fine pitch)化(注入性的提高)等諸多要求。例如,專利文獻1中記載了一種液狀密封材,其藉由於雙酚型環氧樹脂中調配特定量的胺基苯酚環氧樹脂而達成良好的注入性與密封後的焊縫裂紋(fillet crack)的抑制。 [現有技術文獻] [專利文獻]Previously, the major improvement in the performance of liquid sealing materials (bottom-filled materials) used in flip-chip-type semiconductor mounting technology has been how to meet the requirements for maintaining the reliability of semiconductor packages at a high level and responding to wiring patterns. There are many requirements for narrow pitch (improved injection). For example, Patent Document 1 describes a liquid sealing material that achieves good injection properties and fillet cracks after sealing by blending a specific amount of aminophenol epoxy resin into a bisphenol epoxy resin. ). [Prior Art Literature] [Patent Literature]
[專利文獻1]國際公開第2016/093148號[Patent Document 1] International Publication No. 2016/093148
[發明所欲解決之課題] 近年來,隨著半導體封裝的大型化,存在密封面積亦增大的傾向。伴隨於此,在封裝內部在密封部與基板之間產生的應力的增大對封裝的可靠性造成影響的可能性提高。因此,認為就抑制封裝內部產生的應力的觀點而言的密封材的設計今後重要性增加。[Problems to be Solved by the Invention] In recent years, as the size of semiconductor packages has increased, the sealing area has also tended to increase. Along with this, the possibility that an increase in stress generated between the sealing portion and the substrate inside the package affects the reliability of the package increases. Therefore, it is considered that the design of the sealing material is expected to increase in importance from the viewpoint of suppressing the stress generated inside the package.
本發明鑒於所述情況,課題在於提供一種注入性優異且封裝內部所產生的應力的抑制效果優異的密封用樹脂組成物、以及使用該密封用樹脂組成物而獲得的半導體封裝及其製造方法。 [解決課題之手段]The present invention has been made in view of the above-mentioned circumstances, and an object thereof is to provide a sealing resin composition which is excellent in injectability and excellent in suppressing a stress generated in a package, a semiconductor package obtained by using the sealing resin composition, and a manufacturing method thereof. [Means for solving problems]
用以解決所述課題的手段中包含以下的實施態樣。 <1>一種密封用樹脂組成物,其包含環氧樹脂、硬化劑及填充材,所述環氧樹脂包含雙酚型環氧樹脂與1,6-雙(縮水甘油氧基)萘,所述1,6-雙(縮水甘油氧基)萘在所述環氧樹脂整體中所佔的比例為10質量%~30質量%。Means for solving the problems include the following embodiments. <1> A resin composition for sealing, comprising an epoxy resin, a hardener, and a filler, the epoxy resin comprising a bisphenol-type epoxy resin and 1,6-bis (glycidyloxy) naphthalene, wherein The proportion of 1,6-bis (glycidyloxy) naphthalene in the entire epoxy resin is 10% to 30% by mass.
<2>如<1>所述的密封用樹脂組成物,其中所述雙酚型環氧樹脂包含雙酚F型環氧樹脂。<2> The sealing resin composition according to <1>, wherein the bisphenol-type epoxy resin includes a bisphenol F-type epoxy resin.
<3>如<1>或<2>所述的密封用樹脂組成物,其中所述雙酚型環氧樹脂在所述環氧樹脂整體中所佔的比例為20質量%~90質量%。<3> The sealing resin composition according to <1> or <2>, wherein the proportion of the bisphenol-type epoxy resin in the entire epoxy resin is 20% to 90% by mass.
<4>如<1>~<3>中任一項所述的密封用樹脂組成物,其中所述環氧樹脂進一步包含縮水甘油胺型環氧樹脂。<4> The sealing resin composition according to any one of <1> to <3>, wherein the epoxy resin further comprises a glycidylamine-type epoxy resin.
<5>如<4>所述的密封用樹脂組成物,其中所述縮水甘油胺型環氧樹脂包含三官能以上的縮水甘油胺型環氧樹脂。<5> The sealing resin composition according to <4>, wherein the glycidylamine-type epoxy resin includes a trifunctional or higher-functional glycidylamine-type epoxy resin.
<6>如<4>或<5>中任一項所述的密封用樹脂組成物,其中所述縮水甘油胺型環氧樹脂在所述環氧樹脂整體中所佔的比例為10質量%~60質量%。<6> The resin composition for sealing according to any one of <4> or <5>, wherein a proportion of the glycidylamine-type epoxy resin in the entire epoxy resin is 10% by mass -60% by mass.
<7>一種半導體封裝,其具有:支持體、配置於所述支持體上的半導體元件、以及將所述半導體元件密封的如<1>~<6>中任一項所述的密封用樹脂組成物的硬化物。<7> A semiconductor package comprising a support, a semiconductor element disposed on the support, and the sealing resin according to any one of <1> to <6>, which seals the semiconductor element. Hardened composition.
<8>一種半導體封裝的製造方法,其包括:利用如<1>~<6>中任一項所述的密封用樹脂組成物填充支持體與配置於所述支持體上的半導體元件之間的空隙的步驟;以及將所述密封用樹脂組成物硬化的步驟。 [發明的效果]<8> A method for manufacturing a semiconductor package, comprising filling a support with a sealing resin composition according to any one of <1> to <6> and a semiconductor element disposed on the support. A step of voids; and a step of hardening the sealing resin composition. [Effect of the invention]
根據本發明,可提供一種注入性優異且封裝內部所產生的應力的抑制效果優異的密封用樹脂組成物、以及使用該密封用樹脂組成物而獲得的半導體封裝及其製造方法。According to the present invention, it is possible to provide a sealing resin composition which is excellent in injectability and excellent in suppressing a stress generated in a package, a semiconductor package obtained by using the sealing resin composition, and a method for manufacturing the same.
以下,對用以實施本發明的形態進行詳細說明。其中,本發明並不限定於以下的實施形態。於以下的實施形態中,其構成要素(亦包括要素步驟等)除特別明示的情況以外,並非必需。關於數值及其範圍亦同樣,並不限制本發明。Hereinafter, the form for implementing this invention is demonstrated in detail. However, the present invention is not limited to the following embodiments. In the following embodiments, the constituent elements (including the element steps, etc.) are not necessary except for the case where they are specifically stated. The same applies to numerical values and ranges, and does not limit the present invention.
於本揭示中,「步驟」的用語中,除了與其他步驟獨立的步驟以外,即便於無法與其他步驟明確區別的情況下,只要達成該步驟的目的,則亦包含該步驟。 於本揭示中,使用「~」來表示的數值範圍中包含「~」的前後所記載的數值分別作為最小值及最大值。 於本揭示中階段性記載的數值範圍中,一個數值範圍內記載的上限值或下限值亦可置換為其他階段性記載的數值範圍的上限值或下限值。另外,於本揭示中記載的數值範圍中,該數值範圍的上限值或下限值亦可置換為實施例中所示的值。 於本揭示中,各成分亦可包含多種相符的物質。於在組成物中存在多種相當於各成分的物質的情況下,只要無特別說明,則各成分的含有率或含量是指組成物中所存在的該多種物質的合計含有率或含量。 於本揭示中,亦可包含多種相當於各成分的粒子。於在組成物中存在多種相當於各成分的粒子的情況下,只要無特別說明,則各成分的粒徑是指關於組成物中所存在的該多種粒子的混合物的值。In the present disclosure, the term "step" includes the step in addition to the step that is independent of the other steps, even if it cannot be clearly distinguished from the other steps, as long as the purpose of the step is achieved. In the present disclosure, the numerical values indicated by "~" in the numerical range including "~" are used as the minimum value and the maximum value, respectively. In the numerical range described in this disclosure stepwise, an upper limit value or a lower limit value described in one numerical range may be replaced with an upper limit value or a lower limit value in another numerical range described in a stepwise manner. In addition, in the numerical range described in this disclosure, the upper limit value or lower limit value of the numerical range may be replaced with the value shown in the embodiment. In the present disclosure, each component may also include a plurality of compatible substances. When there are a plurality of substances corresponding to each component in the composition, unless otherwise specified, the content rate or content of each component refers to the total content rate or content of the plurality of substances present in the composition. In the present disclosure, a plurality of particles corresponding to each component may be included. In the case where there are a plurality of types of particles corresponding to each component in the composition, the particle size of each component refers to the value of a mixture of the plurality of types of particles present in the composition unless otherwise specified.
<密封用樹脂組成物> 本實施形態的密封用樹脂組成物包含環氧樹脂、硬化劑及填充材,所述環氧樹脂包含雙酚型環氧樹脂與1,6-雙(縮水甘油氧基)萘(下述式(1)所表示的環氧樹脂;以下,亦稱為特定萘型環氧樹脂),特定萘型環氧樹脂在環氧樹脂整體中所佔的比例為10質量%~30質量%。<Resin composition for sealing> The sealing resin composition according to this embodiment includes an epoxy resin, a hardener, and a filler. The epoxy resin includes a bisphenol-type epoxy resin and 1,6-bis (glycidyloxy). ) Naphthalene (epoxy resin represented by the following formula (1); hereinafter also referred to as specific naphthalene-type epoxy resin), the proportion of the specific naphthalene-type epoxy resin in the entire epoxy resin is 10% by mass to 30% by mass.
[化1] [Chemical 1]
本發明者等人進行了研究,結果可知如下密封用樹脂組成物的注入性優異且硬化狀態下的熱膨脹率低,且彈性係數低,所述密封用樹脂組成物包含雙酚型環氧樹脂與特定萘型環氧樹脂作為環氧樹脂,特定萘型環氧樹脂在環氧樹脂整體中所佔的比例為10質量%~30質量%。The inventors have conducted studies, and as a result, it has been found that the sealing resin composition is excellent in injectability, has a low thermal expansion coefficient in a cured state, and has a low coefficient of elasticity. The sealing resin composition includes a bisphenol-type epoxy resin and The specific naphthalene-type epoxy resin is used as the epoxy resin, and the proportion of the specific naphthalene-type epoxy resin in the entire epoxy resin is 10% by mass to 30% by mass.
認為若密封用樹脂組成物的硬化狀態下的熱膨脹率低,則硬化物與支持體之間的熱膨脹率的差變小而可獲得減少所產生的應力的效果。另外,認為若密封用樹脂組成物的硬化狀態下的彈性係數低,則可獲得緩和所產生的應力的效果。It is considered that when the thermal expansion coefficient in the cured state of the sealing resin composition is low, the difference in thermal expansion coefficient between the cured material and the support becomes small, and the effect of reducing the generated stress can be obtained. Moreover, it is thought that when the elasticity coefficient in the hardened state of the sealing resin composition is low, the effect of reducing the generated stress can be obtained.
進而,本實施形態的密封用樹脂組成物中,與填充材的增量、撓性劑的添加等方法相比,可抑制硬化前的黏度上升且降低硬化後的熱膨脹率與彈性係數,因此認為可使良好的注入性與應力的減少或緩和效果併存。Furthermore, in the resin composition for sealing of this embodiment, compared with methods such as increasing the amount of fillers and adding a flexible agent, it is possible to suppress the increase in viscosity before curing and reduce the coefficient of thermal expansion and elasticity after curing. Therefore, it is considered that It is possible to coexist good injection properties and stress reduction or relaxation effects.
具有所述構成的密封用樹脂組成物在硬化狀態下的熱膨脹率低且彈性係數低的原因雖不明確,但推測原因在於:藉由包含特定萘型環氧樹脂作為環氧樹脂而熱膨脹率減少,進而藉由將特定萘型環氧樹脂的量抑制為一定的比例以下且併用雙酚型環氧樹脂而將彈性係數維持地低。Although the reasons for the low thermal expansion coefficient and the low coefficient of elasticity of the sealed resin composition having the above-mentioned hardened state in the cured state are not clear, it is presumed that the thermal expansion coefficient is reduced by including a specific naphthalene-type epoxy resin as the epoxy resin. In addition, the amount of the specific naphthalene-type epoxy resin is suppressed to a certain ratio or less, and the bisphenol-type epoxy resin is used in combination to maintain a low elastic modulus.
密封用樹脂組成物較佳為於使用時為液狀。更具體而言,較佳為25℃下的黏度(10轉/分鐘下的黏度)為25 Pa·s以下。另外,較佳為110℃下的黏度為0.12 Pa·s以下。密封用樹脂組成物的黏度是利用後述實施例中記載的方法測定而得的值。The resin composition for sealing is preferably liquid when used. More specifically, the viscosity at 25 ° C (viscosity at 10 rpm) is preferably 25 Pa · s or less. The viscosity at 110 ° C is preferably 0.12 Pa · s or less. The viscosity of the sealing resin composition is a value measured by a method described in Examples described later.
[環氧樹脂] 特定萘型環氧樹脂於常溫(25℃)下為液狀的環氧樹脂,亦可作為市售品而獲取。作為市售品,例如可列舉DIC股份有限公司的商品名「艾比克隆(EPICLON)HP-4032D」。[Epoxy resin] The specific naphthalene-type epoxy resin is a liquid epoxy resin at normal temperature (25 ° C), and can also be obtained as a commercially available product. As a commercial item, the brand name "EPICLON HP-4032D" of DIC Corporation is mentioned, for example.
就熱膨脹率減少的觀點而言,特定萘型環氧樹脂在環氧樹脂整體中所佔的比例為10質量%以上,較佳為15質量%以上。就良好地維持注入性的觀點而言,特定萘型環氧樹脂在環氧樹脂整體中所佔的比例為30質量%以下,較佳為25質量%以下。From the viewpoint of a decrease in the thermal expansion rate, the proportion of the specific naphthalene-type epoxy resin in the entire epoxy resin is 10% by mass or more, and preferably 15% by mass or more. From the viewpoint of maintaining the injectability well, the proportion of the specific naphthalene-type epoxy resin in the entire epoxy resin is 30% by mass or less, and preferably 25% by mass or less.
雙酚型環氧樹脂的種類並無特別限制,可列舉:雙酚A型環氧樹脂、雙酚F型環氧樹脂、雙酚AD型環氧樹脂等。密封用樹脂組成物中所含的雙酚型環氧樹脂可僅為一種,亦可為兩種以上。就以液狀使用密封用樹脂組成物的觀點而言,雙酚型環氧樹脂較佳為於常溫(25℃)下為液狀。就黏度減少的觀點而言,雙酚型環氧樹脂較佳為雙酚F型環氧樹脂。The type of the bisphenol epoxy resin is not particularly limited, and examples thereof include bisphenol A epoxy resin, bisphenol F epoxy resin, and bisphenol AD epoxy resin. The bisphenol-type epoxy resin contained in the sealing resin composition may be only one type, or two or more types. From the viewpoint of using the sealing resin composition in a liquid state, the bisphenol-type epoxy resin is preferably liquid at normal temperature (25 ° C). From the viewpoint of viscosity reduction, the bisphenol-type epoxy resin is preferably a bisphenol F-type epoxy resin.
雙酚型環氧樹脂在環氧樹脂整體中所佔的比例並無特別限制,可根據密封用樹脂組成物的所需的特性選擇。例如,可自20質量%以上且未滿90質量%的範圍內選擇,亦可自30質量%~80質量%的範圍內選擇。The proportion of the bisphenol-type epoxy resin in the entire epoxy resin is not particularly limited, and can be selected according to the required characteristics of the resin composition for sealing. For example, it can select from the range of 20 mass% or more and less than 90 mass%, and it can also select from the range of 30 mass%-80 mass%.
密封用樹脂組成物亦可包含特定萘型環氧樹脂及雙酚型環氧樹脂以外的環氧樹脂。 特定萘型環氧樹脂及雙酚型環氧樹脂以外的環氧樹脂的種類並無特別限制,可根據密封用樹脂組成物的所需的特性等選擇。具體而言,可列舉:使選自由苯酚、甲酚、二甲酚、間苯二酚、鄰苯二酚等酚化合物及α-萘酚、β-萘酚、二羥基萘等萘酚化合物所組成的群粗中的至少一種酚性化合物與甲醛、乙醛、丙醛等脂肪族醛化合物在酸性觸媒下縮合或共縮合而獲得酚醛清漆樹脂並將該酚醛清漆樹脂進行環氧化而獲得的酚醛清漆型環氧樹脂(苯酚酚醛清漆型環氧樹脂、鄰甲酚酚醛清漆型環氧樹脂等);使所述酚性化合物與苯甲醛、水楊醛等芳香族醛化合物在酸性觸媒下縮合或共縮合而獲得三苯基甲烷型酚樹脂並將該三苯基甲烷型酚樹脂進行環氧化而獲得的三苯基甲烷型環氧樹脂;使所述酚化合物及萘酚化合物與醛化合物在酸性觸媒下共縮合而獲得酚醛清漆樹脂並將該酚醛清漆樹脂進行環氧化而獲得的共聚型環氧樹脂;作為烷基取代或未經取代的聯苯酚的二縮水甘油醚的聯苯型環氧樹脂;作為芪系酚化合物的二縮水甘油醚的芪型環氧樹脂;作為雙酚S等的二縮水甘油醚的含硫原子的環氧樹脂;作為丁二醇、聚乙二醇、聚丙二醇等醇類的縮水甘油醚的環氧樹脂;作為鄰苯二甲酸、間苯二甲酸、四氫鄰苯二甲酸等多元羧酸化合物的縮水甘油酯的縮水甘油酯型環氧樹脂;將苯胺、二胺基二苯基甲烷、異三聚氰酸等的鍵結於氮原子的活性氫以縮水甘油基取代而獲得的縮水甘油胺型環氧樹脂;將二環戊二烯與酚化合物的共縮合樹脂進行環氧化而獲得的二環戊二烯型環氧樹脂;將分子內的烯烴鍵進行環氧化而獲得的二環氧化乙烯基環己烯、3,4-環氧環己基甲基-3,4-環氧環己烷羧酸酯、2-(3,4-環氧基)環己基-5,5-螺環(3,4-環氧基)環己烷-間二噁烷等脂環型環氧樹脂;作為對二甲苯改質酚樹脂的縮水甘油醚的對二甲苯改質環氧樹脂;作為間二甲苯改質酚樹脂的縮水甘油醚的間二甲苯改質環氧樹脂;作為萜烯改質酚樹脂的縮水甘油醚的萜烯改質環氧樹脂;作為二環戊二烯改質酚樹脂的縮水甘油醚的二環戊二烯改質環氧樹脂;作為環戊二烯改質酚樹脂的縮水甘油醚的環戊二烯改質環氧樹脂;作為多環芳香環改質酚樹脂的縮水甘油醚的多環芳香環改質環氧樹脂;作為含萘環的酚樹脂的縮水甘油醚的萘型環氧樹脂;鹵化酚酚醛清漆型環氧樹脂;對苯二酚型環氧樹脂;三羥甲基丙烷型環氧樹脂;利用過乙酸等過酸將烯烴鍵氧化而獲得的線狀脂肪族環氧樹脂;將苯酚芳烷基樹脂、萘酚芳烷基樹脂等芳烷基型酚樹脂進行環氧化而獲得的芳烷基型環氧樹脂等。該些環氧樹脂可單獨使用一種,亦可組合使用兩種以上。The sealing resin composition may include epoxy resins other than the specific naphthalene-type epoxy resin and bisphenol-type epoxy resin. The type of the epoxy resin other than the specific naphthalene-type epoxy resin and the bisphenol-type epoxy resin is not particularly limited, and can be selected according to the required characteristics and the like of the sealing resin composition. Specific examples include a compound selected from phenol compounds such as phenol, cresol, xylenol, resorcinol, and catechol, and naphthol compounds such as α-naphthol, β-naphthol, and dihydroxynaphthalene. A composition obtained by condensing or co-condensing at least one phenolic compound and an aliphatic aldehyde compound such as formaldehyde, acetaldehyde, and propionaldehyde under an acidic catalyst to obtain a novolac resin and epoxidizing the novolac resin Novolac epoxy resin (phenol novolac epoxy resin, o-cresol novolac epoxy resin, etc.); the phenolic compound and aromatic aldehyde compounds such as benzaldehyde, salicylaldehyde, etc. under an acidic catalyst A triphenylmethane epoxy resin obtained by condensing or co-condensing a triphenylmethane type phenol resin and epoxidizing the triphenylmethane type phenol resin; and making the phenol compound, naphthol compound, and aldehyde compound Copolymer epoxy resin obtained by co-condensing under an acid catalyst and epoxidizing the novolak resin; biphenyl as a diglycidyl ether of an alkyl-substituted or unsubstituted biphenol Epoxy resins; stilbene type epoxy resins as diglycidyl ethers of stilbene phenol compounds; sulfur atom-containing epoxy resins as diglycidyl ethers such as bisphenol S; as butanediol, polyethylene glycol, Glycidyl ether epoxy resins such as polypropylene glycol; glycidyl epoxy resins that are glycidyl esters of polycarboxylic acids such as phthalic acid, isophthalic acid, and tetrahydrophthalic acid; Glycidylamine type epoxy resin obtained by substituting glycidyl active hydrogen such as aniline, diaminodiphenylmethane, isotricyanic acid and the like with a glycidyl group; dicyclopentadiene and a phenol compound Dicyclopentadiene type epoxy resin obtained by epoxidation of a co-condensation resin; diepoxidized vinyl cyclohexene, 3,4-epoxy cyclohexyl methyl obtained by epoxidation of an olefin bond in a molecule -3,4-epoxycyclohexanecarboxylate, 2- (3,4-epoxy) cyclohexyl-5,5-spirocyclo (3,4-epoxy) cyclohexane-m-bis Alicyclic epoxy resin such as dioxane; p-xylene modified epoxy resin as glycidyl ether of p-xylene modified phenol resin; as m-xylene M-xylene modified epoxy resin of glycidyl ether of benzene modified phenol resin; terpene modified epoxy resin of glycidyl ether of terpene modified phenol resin; dicyclopentadiene modified phenol resin Glycidyl ether-modified dicyclopentadiene-modified epoxy resin; Glycidyl ether-modified cyclopentadiene-modified epoxy resin as cyclopentadiene-modified phenol resin; Polycyclic aromatic ring-modified phenol resin as shrinkage Polycyclic aromatic ring modified epoxy resin of glyceryl ether; naphthalene type epoxy resin as glycidyl ether of naphthalene ring-containing phenol resin; halogenated phenol novolac type epoxy resin; hydroquinone type epoxy resin; three Methylolpropane epoxy resin; linear aliphatic epoxy resin obtained by oxidizing olefin bonds with peracids such as peracetic acid; aralkylphenol resins such as phenol aralkyl resin and naphthol aralkyl resin An aralkyl-type epoxy resin and the like obtained by epoxidation. These epoxy resins may be used singly or in combination of two or more.
於密封用樹脂組成物包含雙酚型環氧樹脂與其以外的環氧樹脂作為特定萘型環氧樹脂以外的環氧樹脂的情況下,雙酚型環氧樹脂與其以外的環氧樹脂的質量比(雙酚型環氧樹脂/其以外的環氧樹脂)並無特別限制。例如,可自1/5~5/1的範圍內選擇。When the resin composition for sealing includes a bisphenol-type epoxy resin and an epoxy resin other than the bisphenol-type epoxy resin as the epoxy resin other than the specific naphthalene-type epoxy resin, the mass ratio of the bisphenol-type epoxy resin to the epoxy resin other than the epoxy resin (Bisphenol-type epoxy resin / other epoxy resin) is not particularly limited. For example, it can be selected from the range of 1/5 to 5/1.
於密封用樹脂組成物包含雙酚型環氧樹脂與其以外的環氧樹脂作為特定萘型環氧樹脂以外的環氧樹脂的情況下,就以液狀使用密封用樹脂組成物的觀點而言,較佳為包含在常溫(25℃)下為液狀的環氧樹脂,更佳為包含縮水甘油胺型環氧樹脂。就密封用樹脂組成物的黏度減少的觀點而言,縮水甘油胺型環氧樹脂的分子量較佳為300以下。When the sealing resin composition contains a bisphenol-type epoxy resin and an epoxy resin other than the epoxy resin other than the specific naphthalene-type epoxy resin, from the viewpoint of using the sealing resin composition in a liquid state, It is preferable to include an epoxy resin which is liquid at normal temperature (25 ° C), and more preferably to include a glycidylamine type epoxy resin. From the viewpoint of reducing the viscosity of the sealing resin composition, the molecular weight of the glycidylamine-type epoxy resin is preferably 300 or less.
縮水甘油胺型環氧樹脂可為二官能亦可為三官能以上。就硬化後的耐熱性提高的觀點而言,較佳為三官能以上(一分子中具有三個以上的環氧基)的縮水甘油胺型環氧樹脂。作為二官能以上的縮水甘油胺型環氧樹脂,可列舉N,N-二縮水甘油基苯胺、N,N-二縮水甘油基-鄰甲苯胺等。作為三官能以上的縮水甘油胺型環氧樹脂,可列舉三縮水甘油基-對胺基苯酚、4,4'-亞甲基雙[N,N-雙(環氧乙烷基甲基)苯胺]等。該些中,就常溫(25℃)黏度的觀點而言,較佳為三縮水甘油基-對胺基苯酚。The glycidylamine type epoxy resin may be difunctional or trifunctional or more. From the viewpoint of improving the heat resistance after curing, a glycidylamine-type epoxy resin having a trifunctional or higher function (having three or more epoxy groups in one molecule) is preferred. Examples of the difunctional or higher glycidylamine type epoxy resin include N, N-diglycidylaniline, N, N-diglycidyl-o-toluidine, and the like. Examples of the trifunctional or higher glycidylamine type epoxy resin include triglycidyl-p-aminophenol, 4,4'-methylenebis [N, N-bis (oxiranylmethyl) aniline. ]Wait. Among these, from the viewpoint of viscosity at normal temperature (25 ° C), triglycidyl-p-aminophenol is preferred.
於密封用樹脂組成物包含縮水甘油胺型環氧樹脂作為環氧樹脂的情況下,縮水甘油胺型環氧樹脂的比例並無特別限制。例如,較佳為在環氧樹脂整體中所佔的比例為10質量%~60質量%。When the resin composition for sealing contains a glycidylamine type epoxy resin as an epoxy resin, the ratio of a glycidylamine type epoxy resin is not specifically limited. For example, it is preferable that the ratio of the whole epoxy resin is 10 mass%-60 mass%.
[硬化劑] 硬化劑的種類並無特別限制,可根據密封用樹脂組成物的所需的特性等選擇。例如,可列舉:胺硬化劑、酚硬化劑、酸酐硬化劑、聚硫醇硬化劑、聚胺基醯胺硬化劑、異氰酸酯硬化劑、嵌段異氰酸酯硬化劑等。硬化劑可單獨使用一種,亦可組合使用兩種以上。[Hardener] The type of the hardener is not particularly limited, and can be selected according to the required characteristics and the like of the resin composition for sealing. Examples include amine hardeners, phenol hardeners, acid anhydride hardeners, polythiol hardeners, polyamidoamine hardeners, isocyanate hardeners, block isocyanate hardeners, and the like. The hardener may be used singly or in combination of two or more kinds.
就以液狀使用密封用樹脂組成物的觀點而言,硬化劑較佳為胺硬化劑。作為胺硬化劑,可列舉:二乙三胺、三乙四胺、正丙基胺、2-羥基乙基胺基丙基胺、環己基胺、4,4'-二胺基-二環己基甲烷等脂肪族胺化合物、4,4'-二胺基二苯基甲烷、2-甲基苯胺等芳香族胺化合物、咪唑、2-甲基咪唑、2-乙基咪唑、2-異丙基咪唑等咪唑化合物、咪唑啉、2-甲基咪唑啉、2-乙基咪唑啉等咪唑啉化合物等。From the viewpoint of using the sealing resin composition in a liquid state, the curing agent is preferably an amine curing agent. Examples of the amine hardener include diethylenetriamine, triethylenetetramine, n-propylamine, 2-hydroxyethylaminopropylamine, cyclohexylamine, 4,4'-diamino-dicyclohexyl Aliphatic amine compounds such as methane, aromatic amine compounds such as 4,4'-diaminodiphenylmethane, 2-methylaniline, imidazole, 2-methylimidazole, 2-ethylimidazole, 2-isopropyl Imidazole compounds such as imidazole, imidazolines, 2-methylimidazolines, 2-ethylimidazolines, and the like.
環氧樹脂與硬化劑的當量比、即硬化劑中的官能基(胺硬化劑的情況下為活性氫)的數量相對於環氧樹脂中的官能基數的比(硬化劑中的官能基數/環氧樹脂中的官能基數)並無特別限制。就將各自的未反應成分抑制地少的觀點而言,較佳為設定為0.5~2.0的範圍內,更佳為設定為0.6~1.3的範圍內。就成形性與耐回焊性的觀點而言,進而佳為設定為0.8~1.2的範圍內。Equivalent ratio of epoxy resin to hardener, that is, the ratio of the number of functional groups in the hardener (active hydrogen in the case of an amine hardener) to the number of functional groups in the epoxy resin (the number of functional groups in the hardener / ring The number of functional groups in the oxyresin is not particularly limited. From the viewpoint of reducing the amount of each unreacted component, it is preferably set in the range of 0.5 to 2.0, and more preferably set in the range of 0.6 to 1.3. From the viewpoint of formability and reflow resistance, it is more preferable to set the range to 0.8 to 1.2.
[填充材] 填充材的種類並無特別限制。具體而言,可列舉:二氧化矽、玻璃、氧化鋁、碳酸鈣、矽酸鋯、矽酸鈣、氮化矽、氮化鋁、氮化硼、氧化鈹、氧化鋯、鋯石、鎂橄欖石(fosterite)、凍石、尖晶石、富鋁紅柱石、二氧化鈦、滑石、黏土、雲母等無機材料。亦可使用具有阻燃效果的填充材。作為具有阻燃效果的填充材,可列舉:氫氧化鋁、氫氧化鎂、鎂與鋅的複合氫氧化物等複合金屬氫氧化物、硼酸鋅等。[Filling material] The type of the filling material is not particularly limited. Specific examples include silicon dioxide, glass, alumina, calcium carbonate, zirconium silicate, calcium silicate, silicon nitride, aluminum nitride, boron nitride, beryllium oxide, zirconia, zircon, and magnesium olive. Fosterite, frozen stone, spinel, mullite, titanium dioxide, talc, clay, mica and other inorganic materials. A filler having a flame retardant effect may also be used. Examples of the filler having a flame-retardant effect include aluminum hydroxide, magnesium hydroxide, composite metal hydroxides such as a composite hydroxide of magnesium and zinc, and zinc borate.
所述填充材中,就熱膨脹率減少的觀點而言,較佳為二氧化矽,就熱傳導性提高的觀點而言,較佳為氧化鋁。填充材可單獨使用一種,亦可組合使用兩種以上。Among the fillers, silicon dioxide is preferred from the viewpoint of decreasing the thermal expansion coefficient, and alumina is preferred from the viewpoint of improving the thermal conductivity. The fillers may be used alone or in combination of two or more.
密封用樹脂組成物中所含的填充材的含有率並無特別限制。就使良好的流動性與含有填充材的硬化併存的觀點而言,填充材的含有率較佳為密封用樹脂組成物整體的30質量%~90質量%,更佳為50質量%~75質量%。The content rate of the filler contained in the sealing resin composition is not particularly limited. From the viewpoint of coexistence of good fluidity and hardening of the filler, the content of the filler is preferably 30% to 90% by mass, and more preferably 50% to 75% by mass of the entire sealing resin composition. %.
於填充材為粒子狀的情況下,其平均粒徑並無特別限制。例如,體積平均粒徑較佳為0.2 μm~20 μm,更佳為0.5 μm~15 μm。若體積平均粒徑為0.2 μm以上,則存在密封用樹脂組成物的黏度的上升得到進一步抑制的傾向。若體積平均粒徑為20 μm以下,則存在對狹小的縫隙的填充性進一步提高的傾向。填充材的體積平均粒徑可作為藉由雷射散射繞射法粒度分佈測定裝置而獲得的體積基準的粒度分佈中自小粒徑側起的體積的累計成為50%時的粒徑(D50)而進行測定。When the filler is particulate, the average particle diameter is not particularly limited. For example, the volume average particle diameter is preferably 0.2 μm to 20 μm, and more preferably 0.5 μm to 15 μm. When the volume average particle diameter is 0.2 μm or more, an increase in viscosity of the sealing resin composition tends to be further suppressed. When the volume average particle diameter is 20 μm or less, there is a tendency that the filling property to a narrow gap is further improved. The volume average particle diameter of the filler can be used as the particle diameter when the cumulative volume from the small particle diameter side of the volume-based particle size distribution in the volume-based particle size distribution obtained by the laser scattering diffraction particle size distribution measurement device becomes 50% (D50) And the measurement was performed.
[各種添加劑] 密封用樹脂組成物除了所述成分以外,亦可包含硬化促進劑、應力緩和劑、偶合劑、脫模劑、著色劑等各種添加劑。密封用樹脂組成物除了以下例示的添加劑以外,亦可視需要包含在本技術領域中周知的各種添加劑。[Various Additives] The resin composition for sealing may contain various additives such as a hardening accelerator, a stress relaxation agent, a coupling agent, a release agent, and a colorant in addition to the components described above. In addition to the additives exemplified below, the sealing resin composition may optionally include various additives known in the art.
(硬化促進劑) 密封用樹脂組成物亦可包含硬化促進劑。硬化促進劑的種類並無特別限制,可根據環氧樹脂及硬化劑的種類、密封用樹脂組成物的所需的特性等選擇。(Hardening accelerator) The resin composition for sealing may contain a hardening accelerator. The type of the hardening accelerator is not particularly limited, and can be selected according to the type of the epoxy resin and the hardener, the required characteristics of the resin composition for sealing, and the like.
於密封用樹脂組成物包含硬化促進劑的情況下,硬化促進劑的量較佳為相對於硬化性樹脂成分(環氧樹脂與硬化劑的合計)100質量份而為0.1質量份~30質量份,更佳為1質量份~15質量份。When the sealing resin composition contains a hardening accelerator, the amount of the hardening accelerator is preferably 0.1 to 30 parts by mass based on 100 parts by mass of the hardening resin component (total of the epoxy resin and the hardener). , More preferably 1 to 15 parts by mass.
(應力緩和劑) 密封用樹脂組成物亦可包含應力緩和劑。作為應力緩和劑,可列舉熱塑性彈性體、天然橡膠(Natural Rubber,NR)、丙烯腈-丁二烯橡膠(acrylonitrile butadiene rubber,NBR)、丙烯酸橡膠、胺基甲酸酯橡膠、矽酮橡膠等粒子等。應力緩和材劑可單獨使用一種,亦可組合使用兩種以上。(Stress Relief Agent) The resin composition for sealing may contain a stress relief agent. Examples of the stress relaxation agent include particles such as thermoplastic elastomers, natural rubber (NR), acrylonitrile butadiene rubber (NBR), acrylic rubber, urethane rubber, and silicone rubber. Wait. The stress relieving agent may be used alone or in combination of two or more.
於密封用樹脂組成物包含應力緩和劑的情況下,應力緩和劑的量較佳為相對於硬化性樹脂成分(環氧樹脂與硬化劑的合計)100質量份而為0.1質量份~30質量份,更佳為1質量份~15質量份。When the sealing resin composition contains a stress relieving agent, the amount of the stress relieving agent is preferably 0.1 to 30 parts by mass based on 100 parts by mass of the curable resin component (total amount of the epoxy resin and the curing agent). , More preferably 1 to 15 parts by mass.
(偶合劑) 密封用樹脂組成物亦可包含偶合劑。作為偶合劑,可列舉:環氧基矽烷、巰基矽烷、胺基矽烷、烷基矽烷、脲基矽烷、乙烯基矽烷等矽烷化合物、鈦化合物、鋁螯合物、鋁/鋯化合物等。其中,就流動性的觀點而言,較佳為矽烷化合物。偶合劑可單獨使用一種,亦可組合使用兩種以上。(Coupling agent) The resin composition for sealing may contain a coupling agent. Examples of the coupling agent include silane compounds such as epoxy silane, mercapto silane, amine silane, alkyl silane, ureido silane, and vinyl silane, titanium compounds, aluminum chelate compounds, and aluminum / zirconium compounds. Among these, a silane compound is preferable from the viewpoint of fluidity. The coupling agents may be used singly or in combination of two or more kinds.
於密封用樹脂組成物包含偶合劑的情況下,偶合劑的量較佳為相對於填充材100質量份而為0.05質量份~5質量份,更佳為0.1質量份~2.5質量份。When the sealing resin composition contains a coupling agent, the amount of the coupling agent is preferably 0.05 to 5 parts by mass, and more preferably 0.1 to 2.5 parts by mass based on 100 parts by mass of the filler.
(著色劑) 密封用樹脂組成物亦可包含著色劑。作為著色劑,可列舉:碳黑、有機染料、有機顏料、氧化鈦、鉛丹、氧化鐵等。著色劑可單獨使用一種,亦可組合使用兩種以上。(Colorant) The resin composition for sealing may contain a colorant. Examples of the colorant include carbon black, organic dyes, organic pigments, titanium oxide, lead, and iron oxide. The colorants may be used alone or in combination of two or more.
於密封用樹脂組成物包含著色劑的情況下,著色劑的量較佳為相對於硬化性樹脂成分(環氧樹脂與硬化劑的合計)100質量份而為0.01質量份~10質量份,更佳為0.1質量份~5質量份。When the sealing resin composition contains a coloring agent, the amount of the coloring agent is preferably 0.01 to 10 parts by mass relative to 100 parts by mass of the curable resin component (total of the epoxy resin and the curing agent), and more preferably It is preferably from 0.1 to 5 parts by mass.
(密封用樹脂組成物的用途) 密封用樹脂組成物可用於各種安裝技術中。尤其,可較佳地用作倒裝晶片型安裝技術中使用的填底膠材。例如,可較佳地用於填充利用凸塊等而受到接合的半導體元件與支持體之間的縫隙的用途。(Application of the resin composition for sealing) The resin composition for sealing can be used in various mounting technologies. In particular, it can be preferably used as an underfill material used in flip chip type mounting technology. For example, it can be used suitably for the use which fills the gap between the semiconductor element and support which were joined by the bump etc.
半導體元件與支持體的種類並無特別限制,可自於半導體封裝的領域中通常所使用者中選擇。使用密封用樹脂組成物來填充半導體元件與支持體之間的縫隙的方法並無特別限制。例如可使用分配器等並藉由公知的方法來進行。The types of the semiconductor element and the support are not particularly limited, and can be selected from users generally used in the field of semiconductor packaging. The method of using the sealing resin composition to fill the gap between the semiconductor element and the support is not particularly limited. For example, it can be performed by a well-known method using a dispenser.
<半導體封裝> 本實施形態的半導體封裝具有:支持體、配置於所述支持體上的半導體元件、以及將所述半導體元件密封的所述密封用樹脂組成物的硬化物。<Semiconductor Package> The semiconductor package according to this embodiment includes a support, a semiconductor element disposed on the support, and a cured product of the sealing resin composition that seals the semiconductor element.
所述半導體封裝中,半導體元件與支持體的種類並無特別限制,可自於半導體封裝的領域中通常所使用者中選擇。關於所述半導體封裝,密封用樹脂組成物的硬化物的熱膨脹率低且彈性係數低。因此,於在密封用樹脂組成物的硬化物與支持體之間產生應力的情況下,抑制該應力的效果優異。In the semiconductor package, the types of the semiconductor element and the support are not particularly limited, and can be selected from users generally used in the field of semiconductor packaging. Regarding the semiconductor package, the hardened material of the resin composition for sealing has a low thermal expansion coefficient and a low elastic modulus. Therefore, when a stress is generated between the hardened body of the sealing resin composition and the support, the effect of suppressing the stress is excellent.
<半導體封裝的製造方法> 本實施形態的半導體封裝的製造方法包括:利用所述密封用樹脂組成物填充支持體與配置於所述支持體上的半導體元件之間的空隙的步驟;以及將所述密封用樹脂組成物硬化的步驟。<Method for Manufacturing Semiconductor Package> The method for manufacturing a semiconductor package according to this embodiment includes a step of filling a gap between a support and a semiconductor element arranged on the support with the sealing resin composition; and The step of curing the sealing resin composition is described.
所述方法中,半導體元件與支持體的種類並無特別限制,可自於半導體封裝的領域中通常所使用者中選擇。使用密封用樹脂組成物來填充半導體元件與支持體之間的縫隙的方法、以及於填充後將密封用樹脂組成物硬化的方法並無特別限制,可利用公知的方法進行。 [實施例]In the method, the types of the semiconductor element and the support are not particularly limited, and can be selected from users generally used in the field of semiconductor packaging. The method of filling the gap between the semiconductor element and the support with the sealing resin composition and the method of curing the sealing resin composition after filling are not particularly limited, and can be performed by a known method. [Example]
以下,藉由實施例對所述實施形態進行具體說明,但所述實施形態的範圍並不限定於該些實施例。Hereinafter, the embodiments will be described in detail with examples, but the scope of the embodiments is not limited to these examples.
(密封用樹脂組成物的製備) 以表1所示的量混合表1所示的成分,而製備密封用樹脂組成物。各成分的詳細情況如下所述。表1中的「eq」表示硬化劑的當量基準的比例(硬化劑1與硬化劑2的合計為1)。填充材的「質量%」表示相對於密封用樹脂組成物整體的比例。(Preparation of sealing resin composition) The components shown in Table 1 were mixed by the quantity shown in Table 1, and the sealing resin composition was prepared. The details of each component are as follows. "Eq" in Table 1 represents the ratio of the equivalent of the hardener (the total of the hardener 1 and the hardener 2 is 1). The "mass%" of the filler represents the ratio with respect to the entire sealing resin composition.
環氧樹脂1···液狀雙酚F型環氧樹脂、商品名「YDF-8170C」、新日鐵住金化學股份有限公司 環氧樹脂2···三縮水甘油基-對胺基苯酚、商品名「jER 630」、三菱化學股份有限公司 環氧樹脂3···1,6-雙(縮水甘油氧基)萘、商品名「艾比克隆(EPICLON)HP-4032D」、DIC股份有限公司Epoxy resin 1 ... Liquid bisphenol F-type epoxy resin, trade name "YDF-8170C", Nippon Steel & Sumikin Chemical Co., Ltd. Epoxy resin 2 ... Triglycidyl-p-aminophenol, Trade name "jER 630", Mitsubishi Chemical Corporation Epoxy 3 ... 1,6-bis (glycidyloxy) naphthalene, trade name "EPICLON HP-4032D", DIC Corporation
硬化劑1···2-甲基苯胺、商品名「jER Cure W」、三菱化學股份有限公司 硬化劑2···4,4'-二胺基二苯基甲烷、商品名「卡亞哈德(KAYAHARD)AA」、日本化藥股份有限公司Hardener 1 ... 2-methylaniline, trade name "jER Cure W", Mitsubishi Chemical Corporation Hardener 2 ... 4,4'-diaminodiphenylmethane, trade name "Kayaha (KAYAHARD) AA ", Nippon Kayaku Co., Ltd.
填充材···高純度合成球狀二氧化矽、商品名「SE2200-SEJ」、平均粒徑:0.5 μm、亞都瑪科技(Admatechs)股份有限公司 偶合劑···3-縮水甘油氧基丙基三甲氧基矽烷、商品名「KBM-403」、信越化學工業股份有限公司Filling materials ... High-purity synthetic spherical silica, trade name "SE2200-SEJ", average particle size: 0.5 μm, coupling agent of Admatechs Co., Ltd. 3-glycidyloxypropyl Trimethoxysilane, trade name "KBM-403", Shin-Etsu Chemical Industry Co., Ltd.
[表1]
(流動特性的評價) 使用E型黏度計(東京計器股份有限公司製造、威斯克(VISCONIC)EHD型(商品名))(圓錐角度3°、轉速:10轉/分鐘),測定密封用樹脂組成物於25℃下的黏度(Pa·s)。將結果示於表1中。 使用AR2000(TA儀器(TA Instrument)公司),在40 mm平行板、剪切速度32.5(l/s)的條件下測定密封用樹脂組成物於110℃下的黏度(Pa·s)。將結果示於表1中。(Evaluation of flow characteristics) Using an E-type viscometer (manufactured by Tokyo Keiki Co., Ltd., VISCONIC EHD type (trade name)) (cone angle 3 °, rotation speed: 10 revolutions per minute), resin composition for sealing was measured The viscosity (Pa · s) of the substance at 25 ℃. The results are shown in Table 1. Using AR2000 (TA Instrument), the viscosity (Pa · s) of the sealing resin composition at 110 ° C. was measured under conditions of a parallel plate of 40 mm and a shear rate of 32.5 (l / s). The results are shown in Table 1.
(注入性的評價) 於玻璃基板上設置25 μm的間隙,並製備固定有玻璃板(20 mm×20 mm)來代替半導體元件的試驗片。其次,將所述試驗片放置於設定為110℃的加熱板上,於玻璃板的一端側塗佈密封用樹脂組成物,測定直至間隙被密封用樹脂組成物填滿為止的時間(秒/sec)。將結果示於表1中。(Evaluation of injection property) A 25 μm gap was provided on a glass substrate, and a test piece in which a glass plate (20 mm × 20 mm) was fixed instead of a semiconductor element was prepared. Next, the test piece was placed on a hot plate set at 110 ° C., and the sealing resin composition was applied to one end side of the glass plate, and the time until the gap was filled with the sealing resin composition was measured (sec / sec). ). The results are shown in Table 1.
(硬化物特性的評價) 分別利用下述方法測定將密封用樹脂組成物硬化而獲得的硬化物的熱膨脹率(ppm/℃)、彈性係數(GPa)、玻璃轉移溫度(℃)。將結果示於表1中。(Evaluation of hardened material characteristics) The thermal expansion coefficient (ppm / ° C), elastic modulus (GPa), and glass transition temperature (° C) of the hardened material obtained by hardening the sealing resin composition were measured by the following methods, respectively. The results are shown in Table 1.
(熱膨脹率的測定方法) 使用熱機械分析裝置(TMA2940、TA儀器(TA Instrument)公司),將進行了硬化的密封用樹脂組成物切成直徑8 mm、長度20 mm的大小,利用壓縮法以5℃/min自0℃起升溫至300℃為止進行測定,將10℃~30℃下的切線的傾斜率設為熱膨脹率(ppm/℃)。將結果示於表1中。(Measurement method of thermal expansion coefficient) A thermomechanical analysis device (TMA2940, TA Instrument) was used to cut the hardened sealing resin composition into a diameter of 8 mm and a length of 20 mm. The measurement was performed at a temperature of 5 ° C / min from 0 ° C to 300 ° C. The slope of the tangent at 10 ° C to 30 ° C was defined as the thermal expansion rate (ppm / ° C). The results are shown in Table 1.
(彈性係數的測定方法) 使用黏彈性測定裝置(RSA III、TA儀器(TA Instrument)公司),將進行了硬化的密封用樹脂組成物切成50 mm×10 mm×3 mm的大小,於跨距間距離40 mm、頻率1 Hz的條件下利用三點彎曲法以5℃/min自20℃起升溫至300℃為止,測定25℃下的貯存彈性係數(GPa)的值。將結果示於表1中。(Measurement method of coefficient of elasticity) Using a viscoelasticity measuring device (RSA III, TA Instrument), the cured resin composition for sealing was cut into a size of 50 mm × 10 mm × 3 mm, and the thickness Under the conditions of a distance of 40 mm and a frequency of 1 Hz, the three-point bending method was used to raise the value of the storage elastic coefficient (GPa) at 25 ° C from 5 ° C / min to 300 ° C from 20 ° C to 300 ° C. The results are shown in Table 1.
(玻璃轉移溫度的測定方法) 利用與所述熱膨脹率相同的裝置、條件進行測定,將對應於50℃與150℃的切線的交點的溫度設為玻璃轉移溫度(℃)。將結果示於表1中。(Measuring method of glass transition temperature) It measured using the same apparatus and conditions as the said thermal expansion coefficient, and made the temperature corresponding to the intersection of a tangent line of 50 degreeC and 150 degreeC into glass transition temperature (degreeC). The results are shown in Table 1.
如表1所示,關於包含雙酚型環氧樹脂與特定萘型環氧樹脂作為環氧樹脂且特定萘型環氧樹脂在環氧樹脂整體中所佔的比例為10質量%~30質量%的實施例的密封用樹脂組成物,與不滿足所述條件的比較例的密封用樹脂組成物相比,注入性優異且熱膨脹率與彈性係數均低。據此,揭示了即便於密封用樹脂組成物的硬化物與支持體之間產生應力,減少或緩和該應力的效果亦優異。As shown in Table 1, the ratio of the bisphenol-type epoxy resin and the specific naphthalene-type epoxy resin as the epoxy resin and the specific naphthalene-type epoxy resin to the entire epoxy resin is 10% to 30% by mass. Compared with the sealing resin composition of the comparative example which does not satisfy the said conditions, the sealing resin composition of the Example has the outstanding injection property, and both the thermal expansion coefficient and the coefficient of elasticity are low. From this, it was revealed that even if a stress is generated between the hardened body of the sealing resin composition and the support, the effect of reducing or mitigating the stress is excellent.
日本專利申請第2017-127581號的揭示藉由參照而將其整體併入本說明書中。 關於本說明書中所記載的所有文獻、專利申請及技術規格,與具體且各個地記載有藉由參照而併入各個文獻、專利申請及技術規格的情況同等程度地,引用且併入至本說明書中。The disclosure of Japanese Patent Application No. 2017-127581 is incorporated herein by reference in its entirety. All documents, patent applications, and technical specifications described in this specification are cited and incorporated into this specification to the same extent as if they were specifically and individually described and incorporated into each document, patent application, and technical specification by reference. in.
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| JPH1129624A (en) * | 1997-07-09 | 1999-02-02 | Toshiba Corp | Liquid epoxy resin composition for semiconductor encapsulation |
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