TWI780533B - Photosensitive laminate, preparation method of photosensitive laminate, and preparation method of circuit board - Google Patents
Photosensitive laminate, preparation method of photosensitive laminate, and preparation method of circuit board Download PDFInfo
- Publication number
- TWI780533B TWI780533B TW109142528A TW109142528A TWI780533B TW I780533 B TWI780533 B TW I780533B TW 109142528 A TW109142528 A TW 109142528A TW 109142528 A TW109142528 A TW 109142528A TW I780533 B TWI780533 B TW I780533B
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- Taiwan
- Prior art keywords
- boiling point
- photosensitive
- resin layer
- meth
- photosensitive resin
- Prior art date
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- 238000002360 preparation method Methods 0.000 title claims abstract description 17
- 229920005989 resin Polymers 0.000 claims abstract description 104
- 239000011347 resin Substances 0.000 claims abstract description 104
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 238000009835 boiling Methods 0.000 claims description 71
- 239000000126 substance Substances 0.000 claims description 71
- 238000000034 method Methods 0.000 claims description 50
- 239000002904 solvent Substances 0.000 claims description 37
- -1 acrylate compound Chemical class 0.000 claims description 35
- 239000011342 resin composition Substances 0.000 claims description 34
- 239000000178 monomer Substances 0.000 claims description 30
- 239000011230 binding agent Substances 0.000 claims description 29
- 230000007547 defect Effects 0.000 claims description 28
- 238000011161 development Methods 0.000 claims description 25
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 claims description 24
- 230000001588 bifunctional effect Effects 0.000 claims description 23
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 22
- 150000001875 compounds Chemical class 0.000 claims description 21
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 20
- 239000012046 mixed solvent Substances 0.000 claims description 18
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims description 12
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 12
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 claims description 12
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- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 6
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- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 5
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- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 claims description 4
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- 125000000524 functional group Chemical group 0.000 claims description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 4
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- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 5
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- DBQGARDMYOMOOS-UHFFFAOYSA-N methyl 4-(dimethylamino)benzoate Chemical compound COC(=O)C1=CC=C(N(C)C)C=C1 DBQGARDMYOMOOS-UHFFFAOYSA-N 0.000 description 1
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- 125000005498 phthalate group Chemical class 0.000 description 1
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical compound N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 1
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- 238000012805 post-processing Methods 0.000 description 1
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- 230000005855 radiation Effects 0.000 description 1
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- 229910000679 solder Inorganic materials 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- LMYRWZFENFIFIT-UHFFFAOYSA-N toluene-4-sulfonamide Chemical compound CC1=CC=C(S(N)(=O)=O)C=C1 LMYRWZFENFIFIT-UHFFFAOYSA-N 0.000 description 1
- XZZNDPSIHUTMOC-UHFFFAOYSA-N triphenyl phosphate Chemical compound C=1C=CC=CC=1OP(OC=1C=CC=CC=1)(=O)OC1=CC=CC=C1 XZZNDPSIHUTMOC-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N urethane group Chemical group NC(=O)OCC JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- JEVGKYBUANQAKG-UHFFFAOYSA-N victoria blue R Chemical compound [Cl-].C12=CC=CC=C2C(=[NH+]CC)C=CC1=C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 JEVGKYBUANQAKG-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
- C08F220/30—Esters containing oxygen in addition to the carboxy oxygen containing aromatic rings in the alcohol moiety
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F265/00—Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00
- C08F265/04—Macromolecular compounds obtained by polymerising monomers on to polymers of unsaturated monocarboxylic acids or derivatives thereof as defined in group C08F20/00 on to polymers of esters
- C08F265/06—Polymerisation of acrylate or methacrylate esters on to polymers thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Polymers & Plastics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Materials For Photolithography (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Laminated Bodies (AREA)
Abstract
Description
本揭露內容是關於一種感光疊層物、一種感光疊層物製備方法以及一種電路板製備方法。 The present disclosure relates to a photosensitive laminate, a method for preparing the photosensitive laminate and a method for preparing a circuit board.
[相關申請案的交叉參考][CROSS-REFERENCE TO RELATED APPLICATIONS]
本申請案主張向韓國智慧財產局(Korean Intellectual Property Office)在2019年12月31日申請的韓國專利申請案第10-2019-0179860號、2020年8月07日申請的韓國專利申請案第10-2020-0099130號以及2020年9月25日申請的韓國專利申請案第10-2020-0125243號的權益,其揭露內容以全文引用的方式併入本文中。 This application claims Korean Patent Application No. 10-2019-0179860 filed on December 31, 2019 and Korean Patent Application No. 10 filed on August 7, 2020 with the Korean Intellectual Property Office. - Benefits of Korean Patent Application No. 2020-0099130 and Korean Patent Application No. 10-2020-0125243 filed on September 25, 2020, the disclosure of which is incorporated herein by reference in its entirety.
以乾膜光阻(dry film photoresist;DFR)、液體光阻墨等形式使用感光樹脂組成物,其用於印刷電路板(printed circuit boards;PCB)或引線框架中。 The photosensitive resin composition is used in the form of dry film photoresist (DFR), liquid photoresist ink, etc., which are used in printed circuit boards (PCB) or lead frames.
近年來,根據半導體裝置輕、薄、短以及小或多級封裝的製備趨勢,針對電路板要求高密度,且應用諸如超高壓水銀燈 或雷射直接曝光的製程或廣泛使用電路板製備製程,所述電路板製備製程使用包含支撐膜及感光樹脂層的感光疊層物。 In recent years, according to the manufacturing trend of light, thin, short and small or multi-level packaging of semiconductor devices, high density is required for circuit boards, and applications such as ultra-high pressure mercury lamps Or the process of direct laser exposure or the widely used circuit board preparation process using a photosensitive laminate including a support film and a photosensitive resin layer.
因此,持續需要研發在確保更高可靠性的同時實現高密度及靈敏度,且能夠形成更精細的佈線的方法及製程。 Therefore, there is a continuous need to develop methods and processes for realizing high density and sensitivity while ensuring higher reliability, and for forming finer wiring.
在本揭露內容中,提供一種能夠藉由在顯影期間確保高可靠性同時減少精細佈線形成中的缺陷來形成高密度電路的感光疊層物。 In the present disclosure, there is provided a photosensitive laminate capable of forming high-density circuits by ensuring high reliability during development while reducing defects in fine wiring formation.
在本揭露內容中,亦提供一種上述感光疊層物製備方法。 In the present disclosure, a method for preparing the above-mentioned photosensitive laminate is also provided.
在本揭露內容中,亦提供一種電路板製備方法,其使用上述感光疊層物。 In the present disclosure, a method for preparing a circuit board is also provided, which uses the above-mentioned photosensitive laminate.
在本揭露內容中,提供一種感光疊層物,其包含支撐基板;及形成於支撐基板上的感光樹脂層,其中在感光樹脂層中存在直徑小於1微米的5個氣泡/平方毫米或少於5個氣泡/平方毫米。 In the present disclosure, there is provided a photosensitive laminate comprising a support substrate; and a photosensitive resin layer formed on the support substrate, wherein 5 bubbles/mm2 or less with a diameter of less than 1 micron exist in the photosensitive resin layer 5 bubbles/mm².
在本揭露內容中,亦提供一種電路板製備方法,其使用上述感光疊層物。 In the present disclosure, a method for preparing a circuit board is also provided, which uses the above-mentioned photosensitive laminate.
在本揭露內容中,亦提供一種上述感光疊層物製備方法。 In the present disclosure, a method for preparing the above-mentioned photosensitive laminate is also provided.
圖1為藉由使用偏光顯微鏡的場發射掃描電子顯微鏡 (FE-SEM,3000倍)確認的實例1的感光樹脂層的表面及橫截面的像片。 Figure 1 is a field emission scanning electron microscope by using a polarizing microscope (FE-SEM, 3000 times) Confirmed photos of the surface and cross-section of the photosensitive resin layer of Example 1.
圖2為藉由使用偏光顯微鏡的場發射掃描電子顯微鏡(FE-SEM,3000倍)確認的比較實例2的感光樹脂層的表面及橫截面的像片。 2 is a photo of the surface and cross section of the photosensitive resin layer of Comparative Example 2 confirmed by a field emission scanning electron microscope (FE-SEM, 3000 times) using a polarizing microscope.
圖3為用於藉由場發射掃描電子顯微鏡(FE-SEM,3000倍)來確認在曝露於紫外線且用鹼顯影之後在比較實例1的感光樹脂層上所形成的缺陷的像片。 3 is a photograph for confirming defects formed on the photosensitive resin layer of Comparative Example 1 after exposure to ultraviolet rays and development with alkali by field emission scanning electron microscope (FE-SEM, 3000 times).
圖4為用於藉由場發射掃描電子顯微鏡(FE-SEM,3000倍)來確認在曝露於紫外線且用鹼顯影之後在比較實例1的感光樹脂層上所形成的缺陷的像片。 4 is a photograph for confirming defects formed on the photosensitive resin layer of Comparative Example 1 after exposure to ultraviolet rays and development with alkali by field emission scanning electron microscope (FE-SEM, 3000 times).
圖5為用於藉由場發射掃描電子顯微鏡(FE-SEM,3000倍)來確認在曝露於紫外線且用鹼顯影之後在比較實例3的感光樹脂層上所形成的缺陷的像片。 5 is a photograph for confirming defects formed on the photosensitive resin layer of Comparative Example 3 after being exposed to ultraviolet rays and developed with alkali by field emission scanning electron microscope (FE-SEM, 3000 times).
在下文中,將更詳細地描述根據本發明的特定實施例的感光疊層物、感光疊層物製備方法以及電路板製備方法。 Hereinafter, a photosensitive laminate, a method of manufacturing a photosensitive laminate, and a method of manufacturing a circuit board according to specific embodiments of the present invention will be described in more detail.
在本揭露內容中,重均分子量意謂用藉由GPC量測的聚苯乙烯轉化的重均分子量。在量測用藉由GPC量測的聚苯乙烯轉化的重均分子量的過程中,可使用通常已知的分析裝置、偵測器(諸如折射率偵測器)以及用於分析的管柱,且可應用通常應用的溫度條件、溶劑以及流速。 In the present disclosure, the weight average molecular weight means the weight average molecular weight converted from polystyrene measured by GPC. In the process of measuring the weight average molecular weight converted with polystyrene measured by GPC, generally known analytical devices, detectors such as refractive index detectors, and columns for analysis can be used, And generally applied temperature conditions, solvents, and flow rates can be applied.
作為量測條件的特定實例,將鹼性可顯影黏合劑樹脂以 THF中1.0(重量/重量)%(按固體含量計約0.5(重量/重量)%)之濃度溶解於四氫呋喃中,且接著使用0.45微米孔徑針筒過濾器過濾,隨後將20微升注射至GPC中。GPC的行動相為四氫呋喃(THF)且以1.0毫升/分鐘的流速流動。使用其中一個Agilent PLgel 5微米Guard(7.5×50毫米)及兩個Agilent PLgel 5微米Mixed D(7.5×300毫米)串聯連接的管柱,且Agilent 1260 Infinity II系統,RI偵測器用於在40℃下進行量測。 As a specific example of measurement conditions, an alkaline developable binder resin was A concentration of 1.0 (w/w)% (approximately 0.5 (w/w)% based on solids content) in THF was dissolved in tetrahydrofuran and then filtered using a 0.45 micron pore size syringe filter before injecting 20 microliters into the GPC middle. The mobile phase of GPC was tetrahydrofuran (THF) and flowed at a flow rate of 1.0 mL/min. Use one of the Agilent PLgel 5 micron Guard (7.5 × 50 mm) and two Agilent PLgel 5 micron Mixed D (7.5 × 300 mm) connected in series, and Agilent 1260 Infinity II system, RI detector for 40 ℃ down to measure.
藉由將具有各種分子量的聚苯乙烯溶解於濃度為0.1(重量/重量)%的四氫呋喃中而獲得的聚苯乙烯標準樣品(STD A、STD B、STD C、STD D)經由0.45微米孔徑針筒過濾器過濾,且接著注射至GPC中以使用由其形成的校準曲線獲得鹼性可顯影黏合劑樹脂的重均分子量(Mw)。 Polystyrene standard samples (STD A, STD B, STD C, STD D) obtained by dissolving polystyrene with various molecular weights in tetrahydrofuran at a concentration of 0.1 (w/w)% were passed through a 0.45 μm-bore needle Cartridge filter filtration and then injection into the GPC to obtain the weight average molecular weight (Mw) of the basic developable binder resin using a calibration curve formed therefrom.
STD A(Mp):791,000/27,810/945 STD A(Mp): 791,000/27,810/945
STD B(Mp):282,000/10,700/580 STD B(Mp): 282,000/10,700/580
STD C(Mp):126,000/4,430/370 STD C(Mp): 126,000/4,430/370
STD D(Mp):51,200/1,920/162 STD D(Mp): 51,200/1,920/162
術語「(光)固化產物」或「(光)固化」不僅包含化學結構中具有可固化或可交聯不飽和基團的組分經完全固化、交聯或聚合的情況,而且包含此種組分經部分固化、交聯或聚合的情況。 The term "(photo)cured product" or "(photo)cured" includes not only the case where a component having a curable or crosslinkable unsaturated group in the chemical structure is completely cured, crosslinked or polymerized, but also includes such a component Partially cured, cross-linked or polymerized.
根據本揭露內容的實施例,提供一種感光疊層物,其包含支撐基板;及形成於支撐基板上的感光樹脂層,其中在感光樹脂層中存在直徑小於1微米的5個氣泡/平方毫米或少於5個氣泡/平方毫米。 According to an embodiment of the present disclosure, there is provided a photosensitive laminate comprising a support substrate; and a photosensitive resin layer formed on the support substrate, wherein 5 bubbles/mm2 having a diameter of less than 1 micron exist in the photosensitive resin layer or Less than 5 bubbles/mm2.
本發明人已新研發包含感光樹脂層的感光疊層物,其中存在直徑小於1微米,或0.001微米以上且小於1微米的5個氣泡/平方毫米或少於5個氣泡/平方毫米。其已經由實驗證實,使用此種感光疊層物能夠在製備電路板的過程中對曝光具有高靈敏度,且在顯影期間提高可靠性,藉此確保高可靠性,實現高密度及靈敏度,且能夠形成更精細的佈線。 The present inventors have newly developed a photosensitive laminate comprising a photosensitive resin layer in which 5 bubbles/mm2 or less than 5 bubbles/mm2 having a diameter of less than 1 micrometer, or 0.001 micrometer or more and less than 1 micrometer exists. It has been experimentally confirmed that the use of such a photosensitive laminate enables high sensitivity to light exposure in the process of preparing circuit boards, and improves reliability during development, thereby ensuring high reliability, achieving high density and sensitivity, and enabling Form finer wiring.
本發明人已持續進行研究及開發以移除在製備過程中由於各種原因可出現的微氣泡或細小副產物的痕跡,且一起使用含有混合溶劑(包含沸點為115℃或高於115℃的高沸點溶劑及沸點為100℃或低於100℃的低沸點溶劑)的樹脂組成物、含有羧基的鹼性可顯影黏合劑樹脂以及光起始劑,使得在感光樹脂層中存在直徑小於1微米的5個氣泡/平方毫米或少於5個氣泡/平方毫米,或3個氣泡/方毫米或少於3個氣泡/方毫米。 The present inventors have continuously conducted research and development to remove traces of microbubbles or fine by-products that may occur due to various reasons during the preparation process, and to use together a solvent containing a mixed solvent (including a high temperature solvent having a boiling point of 115° C. or higher than 115° C. boiling point solvents and low boiling point solvents with a boiling point of 100°C or lower), a basic developable binder resin containing a carboxyl group, and a photoinitiator such that particles with a diameter of less than 1 micron exist in the photosensitive resin layer 5 bubbles/mm2 or less than 5 bubbles/mm2, or 3 bubbles/mm2 or less than 3 bubbles/mm2.
另外,在感光疊層物製備方法中,除了使用包含沸點為115℃或高於115℃的高沸點溶劑及沸點為100℃或低於100℃的低沸點溶劑的混合溶劑以外,藉由調節乾燥速率及/或乾燥溫度可大大減少或可實質上不存在於感光樹脂層中形成的微氣泡的量。 In addition, in the photosensitive laminate production method, in addition to using a mixed solvent containing a high boiling point solvent having a boiling point of 115°C or higher and a low boiling point solvent having a boiling point of 100°C or lower, by adjusting the drying The rate and/or drying temperature can greatly reduce or can be substantially absent from the amount of microbubbles formed in the photosensitive resin layer.
同時,在感光樹脂層中,可存在5個氣泡/平方毫米或少於5個氣泡/平方毫米,或3個氣泡/平方毫米或少於3個氣泡/平方毫米,其中氣泡的直徑小於1微米。特定言之,直徑小於1微米的氣泡可以痕量存在或可實質上不存在於支撐基板與感光樹脂層之間的界面的相對表面上或感光樹脂層的外表面上。更特定言之,在距支撐基板與感光樹脂層之間的界面的相對表面的感光樹脂層的總厚度的50%內可存在直徑小於1微米的3個氣泡/平方毫 米或少於3個氣泡/平方毫米。 At the same time, in the photosensitive resin layer, there may be 5 bubbles/mm2 or less than 5 bubbles/mm2, or 3 bubbles/mm2 or less than 3 bubbles/mm2, wherein the diameter of the bubbles is less than 1 micron . Specifically, bubbles having a diameter of less than 1 micron may exist in a trace amount or may not exist substantially on the opposite surface of the interface between the support substrate and the photosensitive resin layer or on the outer surface of the photosensitive resin layer. More specifically, 3 bubbles/mm2 having a diameter of less than 1 micrometer may exist within 50% of the total thickness of the photosensitive resin layer on the opposite surface from the interface between the support substrate and the photosensitive resin layer. m or less than 3 bubbles/mm2.
由於直徑小於1微米的氣泡以痕量存在或實質上不存在於支撐基板與感光樹脂層之間的界面的相對表面上或感光樹脂層的外表面上,因此在顯影期間提高可靠性,從而可形成高密度電路且可減少精細佈線形成中的缺陷。因此,當使用感光疊層物時,可實現對曝光的高靈敏度,且可提高高密度印刷電路板的製備產率。 Since air bubbles having a diameter of less than 1 micrometer exist in a trace amount or substantially do not exist on the opposite surface of the interface between the support substrate and the photosensitive resin layer or on the outer surface of the photosensitive resin layer, reliability is improved during development, thereby making it possible to High-density circuits are formed and defects in fine wiring formation can be reduced. Therefore, when the photosensitive laminate is used, high sensitivity to light exposure can be realized, and the production yield of high-density printed circuit boards can be improved.
此外,在感光疊層物中,不僅直徑小於1微米的氣泡可以痕量存在或可實質上不存在,而且可不存在直徑為1微米以上且5微米以下的氣泡。 Furthermore, in the photosensitive laminate, not only bubbles having a diameter of less than 1 micrometer may exist in a trace amount or may not exist substantially, but also bubbles having a diameter of 1 micrometer or more and 5 micrometers or less may not exist.
以此方式,當在製備電路板中使用其中感光樹脂層中存在少量直徑小於1微米的氣泡的感光疊層物時,可在確保高可靠性的同時實現高密度及靈敏度,且可能形成更精細的佈線。 In this way, when a photosensitive laminate in which a small number of air bubbles less than 1 micron in diameter exist in the photosensitive resin layer is used in the production of a circuit board, high density and sensitivity can be achieved while ensuring high reliability, and it is possible to form finer the wiring.
更特定言之,即使當感光樹脂層曝露於紫外線且用鹼性溶液顯影時,在整個區域內缺陷可能不出現或可能以極小的量出現。特定言之,在感光樹脂層的上表面上實質上不存在缺陷,且在顯影之後在感光樹脂層的下表面或內部上可能存在微觀缺陷。 More specifically, even when the photosensitive resin layer is exposed to ultraviolet rays and developed with an alkaline solution, defects may not appear or may appear in an extremely small amount in the entire area. Specifically, there are substantially no defects on the upper surface of the photosensitive resin layer, and microscopic defects may exist on the lower surface or inside of the photosensitive resin layer after development.
特定言之,在將感光樹脂層曝露於紫外線,隨後用鹼性溶液顯影之後,可觀察到3個缺陷/平方毫米或少於3個缺陷/平方毫米,或1個缺陷/平方毫米或少於1個缺陷/平方毫米,或可實質上不存在缺陷,其中缺陷的橫截面直徑為0.3微米至4微米,或0.5微米以上且3微米以下。缺陷的橫截面直徑可定義為在感光樹脂層上沿一個方向的橫截面中所界定的缺陷的直徑中的最大直徑。 Specifically, after exposing the photosensitive resin layer to ultraviolet rays, followed by development with an alkaline solution, 3 defects/mm2 or less, or 1 defect/mm2 or less are observed 1 defect/mm2, or there may be substantially no defects, wherein the defect has a cross-sectional diameter of 0.3 micrometers to 4 micrometers, or 0.5 micrometers or more and 3 micrometers or less. The cross-sectional diameter of a defect may be defined as a maximum diameter among diameters of defects defined in a cross-section along one direction on the photosensitive resin layer.
曝光及顯影的條件不受特別限制。舉例而言,可用一定量的能量進行曝光,使得剩餘步數為15步,持續1分鐘至60分鐘,其中使用由斯托弗圖形技術設備(Stouffer Graphic ArtsEquipment)製造的41步平板在340奈米至420奈米的範圍內量測照射至感光疊層物的光。另外,可藉由用濃度為0.1重量%至3.0重量%的鹼性水溶液(諸如Na2CO3)的方法(諸如噴塗法)來進行顯影。 The conditions of exposure and development are not particularly limited. For example, the exposure can be performed with an amount of energy such that the remaining number of steps is 15 for 1 minute to 60 minutes using a 41-step plate made by Stouffer Graphic Arts Equipment at 340 nm The light striking the photosensitive laminate is measured in the range of 420nm. In addition, development may be performed by a method such as a spray coating method with an alkaline aqueous solution such as Na 2 CO 3 at a concentration of 0.1% by weight to 3.0% by weight.
另外,當使用感光疊層物時,有可能在使用較少能量的同時實現更高的密度及靈敏度。更特定言之,使得剩餘步數為15步的能量的量可為300毫焦/平方公分或小於300毫焦/平方公分,或100毫焦/平方公分或小於100毫焦/平方公分,其中使用由斯托弗圖形技術設備製造的41步平板在340奈米至420奈米的範圍內量測照射至感光疊層物的光。另外,顯影之後的解析度可為15微米或小於15微米,或10微米或小於10微米。 In addition, when photosensitive laminates are used, it is possible to achieve higher density and sensitivity while using less energy. More specifically, the amount of energy such that the remaining number of steps is 15 steps may be 300 mJ/cm2 or less, or 100 mJ/cm2 or less, wherein Light impinging on the photosensitive laminate was measured in the range of 340nm to 420nm using a 41-step flat panel manufactured by Stover Graphics Equipment. In addition, the resolution after development may be 15 microns or less, or 10 microns or less.
感光疊層物中的支撐基板的厚度及感光樹脂層的厚度不受特別限制,但支撐基板的厚度可為1微米至100微米,或5微米至50微米,且感光樹脂層的厚度可為1微米至100微米,或5微米至50微米。 The thickness of the support substrate and the thickness of the photosensitive resin layer in the photosensitive laminate are not particularly limited, but the thickness of the support substrate may be 1 μm to 100 μm, or 5 μm to 50 μm, and the thickness of the photosensitive resin layer may be 1 μm to 100 μm. Microns to 100 microns, or 5 microns to 50 microns.
同時,感光疊層物的特性或其中感光樹脂層含有直徑小於1微米的5個氣泡/平方毫米或少於5個氣泡/平方毫米的結構特性可歸因於上述製備方法,或可歸因於感光樹脂層的特性。 Meanwhile, the characteristics of the photosensitive laminate or the structural characteristics in which the photosensitive resin layer contains 5 bubbles/mm2 or less than 5 bubbles/mm2 having a diameter of less than 1 micrometer are attributable to the above-mentioned manufacturing method, or are attributable to Properties of the photosensitive resin layer.
特定言之,感光樹脂層可包含含有羧基的鹼性可顯影黏合劑樹脂。鹼性可顯影黏合劑在分子中可含有至少一個羧基且可在顯影期間與鹼反應。 Specifically, the photosensitive resin layer may include an alkaline developable binder resin containing carboxyl groups. Alkaline developable binders can contain at least one carboxyl group in the molecule and can react with a base during development.
鹼性可顯影黏合劑的特定實例不受限制,但鹼性可顯影黏合劑可為包含至少一個由以下所組成的族群中選出的重複單元的聚合物或共聚物:由以下化學式3表示的重複單元、由以下化學式4表示的重複單元、由以下化學式5表示的重複單元以及由以下化學式6表示的重複單元。 Specific examples of the alkali-developable binder are not limited, but the alkali-developable binder may be a polymer or a copolymer comprising at least one repeating unit selected from the group consisting of repeating units represented by the following Chemical Formula 3 unit, a repeating unit represented by the following Chemical Formula 4, a repeating unit represented by the following Chemical Formula 5, and a repeating unit represented by the following Chemical Formula 6.
在化學式4中,R3為氫或C1至C10烷基,
在化學式5中,R4為氫或C1至C10烷基,且R5為C1至C10烷基,
在化學式6中,Ar為C6至C20芳基。 In Chemical Formula 6, Ar is a C6 to C20 aryl group.
在化學式4至化學式6中,R3及R4彼此相同或不同,且 各自獨立地為氫或C1至C10烷基,R5為C1至C10烷基,且Ar為C6至C20芳基。 In Chemical Formula 4 to Chemical Formula 6, R 3 and R 4 are the same or different from each other, and are each independently hydrogen or C1 to C10 alkyl, R 5 is C1 to C10 alkyl, and Ar is C6 to C20 aryl.
在化學式2至化學式4中,R3及R4彼此相同或不同,且各自獨立地為氫或C1至C10烷基,且C1至C10烷基的特定實例可為甲基。 In Chemical Formula 2 to Chemical Formula 4, R 3 and R 4 are the same or different from each other, and are each independently hydrogen or a C1 to C10 alkyl group, and a specific example of the C1 to C10 alkyl group may be a methyl group.
R5為C1至C10烷基,且C1至C10烷基的特定實例可為甲基。 R 5 is C1 to C10 alkyl, and a specific example of C1 to C10 alkyl may be methyl.
Ar為C6至C20芳基,且C6至C20芳基的特定實例可為苯基。 Ar is a C6 to C20 aryl group, and a specific example of the C6 to C20 aryl group may be a phenyl group.
由化學式4表示的重複單元可為衍生自由以下化學式4-1表示的單體的重複單元。 The repeating unit represented by Chemical Formula 4 may be a repeating unit derived from a monomer represented by the following Chemical Formula 4-1.
在化學式4-1中,R3為氫或C1至C10烷基。在化學式4-1中,對R3的描述與上文在化學式4中所描述的相同。由化學式4-1表示的單體的特定實例可包含丙烯酸(acrylic acid;AA)及甲基丙烯酸(methacrylic acid;MAA)。 In Chemical Formula 4-1, R 3 is hydrogen or C1 to C10 alkyl. In Chemical Formula 4-1, the description of R 3 is the same as that described in Chemical Formula 4 above. Specific examples of the monomer represented by Chemical Formula 4-1 may include acrylic acid (AA) and methacrylic acid (MAA).
由化學式5表示的重複單元可為衍生自由以下化學式5-1表示的單體的重複單元。 The repeating unit represented by Chemical Formula 5 may be a repeating unit derived from a monomer represented by the following Chemical Formula 5-1.
[化學式5-1]
在化學式5-1中,R4為氫或C1至C10烷基,且R5為C1至C10烷基。在化學式3-1中,對R4及R5的描述與上文在化學式3中所描述的相同。由化學式3-1表示的單體的特定實例可包含甲基丙烯酸甲酯(methylmethacrylate;MMA)及丙烯酸丁酯(butyl acrylate;BA)。 In Chemical Formula 5-1, R 4 is hydrogen or C1 to C10 alkyl, and R 5 is C1 to C10 alkyl. In Chemical Formula 3-1, descriptions of R 4 and R 5 are the same as described in Chemical Formula 3 above. Specific examples of the monomer represented by Chemical Formula 3-1 may include methylmethacrylate (MMA) and butyl acrylate (BA).
由化學式6表示的重複單元可為衍生自由以下化學式6-1表示的單體的重複單元。 The repeating unit represented by Chemical Formula 6 may be a repeating unit derived from a monomer represented by the following Chemical Formula 6-1.
在化學式6-1中,Ar為C6至C20芳基。在化學式6-1中,對Ar的描述與上文在化學式4中所描述的相同。由化學式6-1表示的單體的特定實例可包含苯乙烯(styrene;SM)。 In Chemical Formula 6-1, Ar is a C6 to C20 aryl group. In Chemical Formula 6-1, the description of Ar is the same as that described in Chemical Formula 4 above. A specific example of the monomer represented by Chemical Formula 6-1 may include styrene (SM).
同時,含有羧基的鹼性可顯影黏合劑樹脂可充當感光樹脂層的基板,且因此應具有最小分子量,例如20,000公克/莫耳至300,000公克/莫耳,或30,000公克/莫耳至150,000公克/莫耳的重均分子量。 Meanwhile, the alkaline developable binder resin containing a carboxyl group can serve as a substrate for the photosensitive resin layer, and thus should have a minimum molecular weight, for example, 20,000 g/mol to 300,000 g/mol, or 30,000 g/mol to 150,000 g/mol Molar weight average molecular weight.
另外,含有羧基的鹼性可顯影黏合劑樹脂應具有一定水準或更高的耐熱性且因此可具有20℃以上且150℃以下的玻璃轉移溫度。 In addition, the alkaline developable binder resin containing a carboxyl group should have a certain level or higher of heat resistance and thus may have a glass transition temperature of 20°C or more and 150°C or less.
另外,考慮到感光樹脂層的可顯影性,含有羧基的鹼性可顯影黏合劑樹脂可具有在100毫克KOH/公克至300毫克KOH/公克的範圍內的酸值。 In addition, the alkali developable binder resin containing a carboxyl group may have an acid value in a range of 100 mgKOH/g to 300 mgKOH/g in consideration of developability of the photosensitive resin layer.
同時,感光樹脂層可包含在含有羧基的鹼性可顯影黏合劑樹脂與含有(甲基)丙烯酸酯單體或寡聚物的光可聚合化合物之間的交聯共聚物。 Meanwhile, the photosensitive resin layer may include a cross-linked copolymer between a carboxyl group-containing alkaline developable binder resin and a photopolymerizable compound containing a (meth)acrylate monomer or oligomer.
含有(甲基)丙烯酸酯單體或寡聚物的光可聚合化合物可充當交聯劑以增加感光樹脂層的機械強度,或可用以增加對顯影劑的抵抗力且使固化膜具有可撓性。 Photopolymerizable compounds containing (meth)acrylate monomers or oligomers can act as crosslinkers to increase the mechanical strength of photosensitive resin layers, or can be used to increase resistance to developers and make cured films flexible .
根據感光樹脂層的特定用途或特性,可調節含有(甲基)丙烯酸酯單體或寡聚物的光可聚合化合物的含量。舉例而言,按100重量份的含有羧基的鹼性可顯影黏合劑樹脂計,可包含1重量份至80重量份的含有(甲基)丙烯酸酯單體或寡聚物的光可聚合化合物。 The content of the photopolymerizable compound containing (meth)acrylate monomer or oligomer can be adjusted according to the specific use or characteristics of the photosensitive resin layer. For example, 1 to 80 parts by weight of a photopolymerizable compound containing a (meth)acrylate monomer or oligomer may be included based on 100 parts by weight of the alkaline developable binder resin containing a carboxyl group.
光可聚合化合物可為單官能或多官能(甲基)丙烯酸酯單體或寡聚物。 The photopolymerizable compound may be a monofunctional or multifunctional (meth)acrylate monomer or oligomer.
作為光可聚合化合物,可使用通常已知的單官能或多官能(甲基)丙烯酸酯單體或寡聚物。為了滿足上述特性,分子中含有芳族官能基的2個至10個官能(甲基)丙烯酸酯單體或寡聚物可用作單官能或多官能(甲基)丙烯酸酯單體或寡聚物。 As the photopolymerizable compound, generally known monofunctional or polyfunctional (meth)acrylate monomers or oligomers can be used. In order to meet the above characteristics, 2 to 10 functional (meth)acrylate monomers or oligomers containing aromatic functional groups in the molecule can be used as monofunctional or polyfunctional (meth)acrylate monomers or oligomers things.
特定言之,光可聚合化合物可為由以下化學式1表示的雙官能(甲基)丙烯酸酯化合物。 Specifically, the photopolymerizable compound may be a bifunctional (meth)acrylate compound represented by Chemical Formula 1 below.
[化學式1]
在化學式1中,R1及R2彼此相同或不同且為H或CH3,且j及k中的每一者為1至20的整數。 In Chemical Formula 1, R 1 and R 2 are the same or different from each other and are H or CH 3 , and each of j and k is an integer of 1 to 20.
更特定言之,化學式1的雙官能(甲基)丙烯酸酯化合物可包含以下化學式11的雙官能(甲基)丙烯酸酯化合物及以下化學式12的雙官能(甲基)丙烯酸酯化合物。 More specifically, the bifunctional (meth)acrylate compound of Chemical Formula 1 may include a bifunctional (meth)acrylate compound of Chemical Formula 11 below and a bifunctional (meth)acrylate compound of Chemical Formula 12 below.
在化學式11中,R11及R12彼此相同或不同且為H或CH3,且J1及K1中的每一者為1至8的整數。 In Chemical Formula 11, R 11 and R 12 are the same or different from each other and are H or CH 3 , and each of J1 and K1 is an integer of 1 to 8.
在化學式12中,R21及R22彼此相同或不同且為H或CH3,且J2及K2中的每一者為10至20的整數。 In Chemical Formula 12, R 21 and R 22 are the same or different from each other and are H or CH 3 , and each of J2 and K2 is an integer of 10 to 20.
更特定言之,化學式1的雙官能(甲基)丙烯酸酯化合物可包含重量比為1:1至1:30的化學式11的雙官能(甲基)丙烯酸酯化合物及化學式12的雙官能(甲基)丙烯酸酯化合物。 More specifically, the bifunctional (meth)acrylate compound of Chemical Formula 1 may include the bifunctional (meth)acrylate compound of Chemical Formula 11 and the bifunctional (meth)acrylate compound of Chemical Formula 12 in a weight ratio of 1:1 to 1:30. base) acrylate compounds.
由於與化學式11的雙官能(甲基)丙烯酸酯化合物相比,以相同重量或更高重量使用化學式12的雙官能(甲基)丙烯酸酯化合物,因此增加對基板的黏著力及對顯影劑的抵抗力,藉此確保極佳的細線黏著力及解析度。 Since the bifunctional (meth)acrylate compound of Chemical Formula 12 is used by the same weight or more than the bifunctional (meth)acrylate compound of Chemical Formula 11, the adhesion to the substrate and the resistance to the developer are increased. resistance, thereby ensuring excellent fine line adhesion and resolution.
同時,除了化學式1的雙官能(甲基)丙烯酸酯化合物以 外,光可聚合化合物可更包含單官能或多官能(甲基)丙烯酸酯化合物。在此情況下,可使用的單官能或多官能(甲基)丙烯酸酯化合物排除化學式1的雙官能(甲基)丙烯酸酯化合物中所包含的化合物。 Meanwhile, in addition to the bifunctional (meth)acrylate compound of chemical formula 1 and In addition, the photopolymerizable compound may further include a monofunctional or multifunctional (meth)acrylate compound. In this case, usable monofunctional or polyfunctional (meth)acrylate compounds exclude compounds contained in the bifunctional (meth)acrylate compounds of Chemical Formula 1.
可額外使用的光可聚合化合物的實例不受限制,但可包含乙二醇二甲基丙烯酸酯、二乙二醇二甲基丙烯酸酯、四乙二醇二甲基丙烯酸酯、丙二醇二甲基丙烯酸酯、聚乙二醇二甲基丙烯酸酯、聚丙二醇二甲基丙烯酸酯、丁二醇二甲基丙烯酸酯、新戊二醇二甲基丙烯酸酯、1,6-己二醇二甲基丙烯酸酯、三羥甲基丙烷三甲基丙烯酸酯、三羥甲基丙烷三丙烯酸酯、甘油二甲基丙烯酸酯、新戊四醇二甲基丙烯酸酯、新戊四醇三甲基丙烯酸酯、二新戊四醇五甲基丙烯酸酯、2,2-雙(4-甲基丙烯氧基二乙氧基苯基)丙烷、2,2-雙(4-甲基丙烯氧基聚乙氧基苯基)丙烷、甲基丙烯酸2-羥基-3-甲基丙烯醯氧基丙酯、乙二醇二縮水甘油醚二甲基丙烯酸酯、二乙二醇二縮水甘油醚二甲基丙烯酸酯、鄰苯二甲酸二縮水甘油酯二甲基丙烯酸酯、甘油聚縮水甘油醚聚甲基丙烯酸酯以及含有胺基甲酸酯基團的多官能(甲基)丙烯酸酯。 Examples of photopolymerizable compounds that can be additionally used are not limited, but may include ethylene glycol dimethacrylate, diethylene glycol dimethacrylate, tetraethylene glycol dimethacrylate, propylene glycol dimethyl Acrylates, Polyethylene Glycol Dimethacrylate, Polypropylene Glycol Dimethacrylate, Butylene Glycol Dimethacrylate, Neopentyl Glycol Dimethacrylate, 1,6-Hexanediol Dimethacrylate Acrylates, Trimethylolpropane Trimethacrylate, Trimethylolpropane Trimethacrylate, Glycerin Dimethacrylate, Neopentylthritol Dimethacrylate, Neopentylthritol Trimethacrylate, Dineopentaerythritol pentamethacrylate, 2,2-bis(4-methacryloxydiethoxyphenyl)propane, 2,2-bis(4-methacryloxypolyethoxy Phenyl) propane, 2-hydroxy-3-methacryloxypropyl methacrylate, ethylene glycol diglycidyl ether dimethacrylate, diethylene glycol diglycidyl ether dimethacrylate, Diglycidyl phthalate dimethacrylate, glycerol polyglycidyl ether polymethacrylate, and polyfunctional (meth)acrylates containing urethane groups.
同時,支撐基板可充當感光疊層物的支撐物,且可有助於在曝光期間處理具有黏結強度的感光樹脂層。 Meanwhile, the support substrate may serve as a support for the photosensitive laminate, and may facilitate handling of the photosensitive resin layer with adhesive strength during exposure.
各種塑膠膜可用於基板膜,且例如,可使用至少一種由以下所組成的族群中選出的塑膠膜:丙烯酸膜、聚對苯二甲酸伸乙酯(polyethylene terephthalate;PET)膜、三乙醯纖維素(triacetyl cellulose;TAC)膜、聚降冰片烯(polynorbornene;PNB)膜、環烯聚合物(cycloolefin polymer;COP)膜以及聚碳酸酯(polycarbonate;PC)膜。 Various plastic films can be used for the substrate film, and for example, at least one plastic film selected from the group consisting of acrylic film, polyethylene terephthalate (PET) film, triacetyl fiber can be used Triacetyl cellulose (TAC) film, polynorbornene (polynorbornene; PNB) film, cycloolefin polymer (cycloolefin polymer; COP) film and polycarbonate (polycarbonate; PC) film.
同時,感光疊層物可更包含形成為以感光樹脂層為中心面向支撐基板的保護膜。保護膜防止在處理期間對抗蝕劑的損壞且用作保護感光樹脂層免受諸如灰塵的外來物質影響的保護蓋,且可疊層於其上未形成基板膜的感光樹脂層的另一表面上。 Meanwhile, the photosensitive laminate may further include a protective film formed to face the support substrate with the photosensitive resin layer at the center. The protective film prevents damage to the resist during handling and serves as a protective cover that protects the photosensitive resin layer from foreign substances such as dust, and may be laminated on the other surface of the photosensitive resin layer on which the substrate film is not formed .
保護膜用於保護感光樹脂層免受外部影響,且需要適當的分離性及黏附性使得在將乾膜光阻應用於後處理時其易於釋放,且在儲存且分配時不會釋放。 The protective film is used to protect the photosensitive resin layer from external influences, and requires proper detachability and adhesion so that it is easy to release when the dry film photoresist is applied to post-processing, and does not release when stored and distributed.
各種塑膠膜可用於保護膜,且例如,可使用至少一種由以下所組成的族群中選出的塑膠膜:丙烯酸膜、聚乙烯(polyethylene;PE)膜、聚對苯二甲酸伸乙酯(PET)膜、三乙醯纖維素(TAC)膜、聚降冰片烯(PNB)膜、環烯聚合物(COP)膜以及聚碳酸酯(PC)膜。儘管保護膜的厚度不受特別限制,但例如,其可在0.01微米至1公尺內自由調節。 Various plastic films can be used for the protective film, and for example, at least one plastic film selected from the group consisting of acrylic film, polyethylene (polyethylene; PE) film, polyethylene terephthalate (PET) film, etc. can be used. film, triacetyl cellulose (TAC) film, polynorbornene (PNB) film, cycloolefin polymer (COP) film, and polycarbonate (PC) film. Although the thickness of the protective film is not particularly limited, for example, it can be freely adjusted within 0.01 micrometer to 1 meter.
根據本揭露內容的另一實施例,提供一種感光疊層物製備方法,其包含以下步驟:將含有混合溶劑(包含沸點為115℃或高於115℃的高沸點溶劑及沸點為100℃或低於100℃的低沸點溶劑)的樹脂組成物;含有羧基的鹼性可顯影黏合劑樹脂;以及光起始劑塗覆於支撐基板上,隨後乾燥。 According to another embodiment of the present disclosure, there is provided a method for preparing a photosensitive laminate, which includes the following steps: mixing a mixed solvent (including a high boiling point solvent with a boiling point of 115°C or higher and a boiling point of 100°C or lower) A resin composition containing a low boiling point solvent at 100°C); an alkaline developable adhesive resin containing carboxyl groups; and a photoinitiator are coated on the support substrate and then dried.
可根據製備方法提供上文在一實施例中所描述的感光疊層物。 The photosensitive laminate described above in one embodiment can be provided according to the production method.
如上文所描述,感光疊層物包含支撐基板;及形成於支撐基板上的感光樹脂層,其中在感光樹脂層中存在直徑小於1微米的5個氣泡/平方毫米或少於5個氣泡/平方毫米。 As described above, the photosensitive laminate includes a support substrate; and a photosensitive resin layer formed on the support substrate, wherein 5 bubbles/mm2 or less than 5 bubbles/square having a diameter of less than 1 micron exist in the photosensitive resin layer mm.
在形成感光樹脂層的過程中,由於諸如在感光樹脂組成 物溶液的製備過程或組成物溶液的乾燥過程期間產生的氣泡的原因,在感光樹脂層中可形成直徑小於1微米的氣泡。然而,感光疊層物製備方法使用包含沸點為115℃或高於115℃的高沸點溶劑及沸點為100℃或低於100℃的低沸點溶劑的混合溶劑以延遲感光樹脂組成物溶液的蒸發時間,藉此防止氣泡滯留於樹脂層中,且因此在感光樹脂層中可存在直徑小於1微米的5個氣泡/平方毫米或少於5個氣泡/平方毫米。 In the process of forming the photosensitive resin layer, due to such factors as the composition of the photosensitive resin Due to the bubbles generated during the preparation process of the composition solution or the drying process of the composition solution, bubbles with a diameter of less than 1 micron may be formed in the photosensitive resin layer. However, the photosensitive laminate production method uses a mixed solvent including a high-boiling solvent having a boiling point of 115°C or higher and a low-boiling solvent having a boiling point of 100°C or lower to delay the evaporation time of the photosensitive resin composition solution , whereby bubbles are prevented from being trapped in the resin layer, and thus 5 bubbles/mm2 or less than 5 bubbles/mm2 having a diameter of less than 1 micrometer may exist in the photosensitive resin layer.
更特定言之,在感光樹脂層中可存在5個氣泡/平方毫米或少於5個氣泡/平方毫米,或3個氣泡/平方毫米或少於3個氣泡/平方毫米,其中氣泡的直徑小於1微米。 More specifically, there may be 5 bubbles/mm2 or less, or 3 bubbles/mm2 or less than 3 bubbles/mm2 in the photosensitive resin layer, wherein the diameter of the bubbles is less than 1 micron.
另外,在距支撐基板與感光樹脂層之間的界面的相對表面的感光樹脂層的總厚度的50%內可存在直徑小於1微米的3個氣泡/平方毫米或少於3個氣泡/平方毫米。 In addition, 3 bubbles/mm2 or less than 3 bubbles/mm2 having a diameter of less than 1 micrometer may exist within 50% of the total thickness of the photosensitive resin layer on the opposite surface from the interface between the supporting substrate and the photosensitive resin layer .
由於直徑小於1微米的氣泡以痕量存在或實質上不存在於支撐基板與感光樹脂層之間的界面的相對表面上或感光樹脂層的外表面上,因此在顯影期間提高可靠性,從而可形成高密度電路且可減少精細佈線形成中的缺陷。因此,當使用感光疊層物時,可實現對曝光的高靈敏度,且可提高高密度印刷電路板的製備產率。 Since air bubbles having a diameter of less than 1 micrometer exist in a trace amount or substantially do not exist on the opposite surface of the interface between the support substrate and the photosensitive resin layer or on the outer surface of the photosensitive resin layer, reliability is improved during development, thereby making it possible to High-density circuits are formed and defects in fine wiring formation can be reduced. Therefore, when the photosensitive laminate is used, high sensitivity to light exposure can be realized, and the production yield of high-density printed circuit boards can be improved.
如上文所描述,沸點為115℃或高於115℃的高沸點溶劑可起延遲感光樹脂組成物的液體組分的蒸發時間的作用,從而使得氣泡不滯留於樹脂層中。因此,在感光樹脂層中可存在直徑小於1微米的5個氣泡/平方毫米或少於5個氣泡/平方毫米。 As described above, the high boiling point solvent having a boiling point of 115° C. or higher may function to delay the evaporation time of the liquid components of the photosensitive resin composition so that air bubbles do not remain in the resin layer. Therefore, 5 bubbles/mm2 or less than 5 bubbles/mm2 having a diameter of less than 1 micrometer may exist in the photosensitive resin layer.
混合溶劑可包含以預定量或更大的量計的沸點為115℃ 或高於115℃的高沸點溶劑,且例如按100重量份的混合溶劑計,可包含3重量份或大於3重量份、5重量份或大於5重量份、3重量份至50重量份或5重量份至40重量份的沸點為115℃或高於115℃的高沸點溶劑。 The mixed solvent may contain a boiling point of 115° C. in a predetermined amount or more Or a high boiling point solvent higher than 115°C, and for example, based on 100 parts by weight of the mixed solvent, may contain 3 parts by weight or more than 3 parts by weight, 5 parts by weight or more than 5 parts by weight, 3 parts by weight to 50 parts by weight or 5 parts by weight Parts by weight to 40 parts by weight of a high boiling point solvent having a boiling point of 115°C or higher.
由於沸點為100℃或低於100℃的低沸點溶劑與沸點為115℃或高於115℃的高沸點溶劑一起使用,因此可增加感光樹脂組成物的溶解性。 Since a low boiling point solvent having a boiling point of 100°C or lower is used together with a high boiling point solvent having a boiling point of 115°C or higher, the solubility of the photosensitive resin composition can be increased.
混合溶劑可包含沸點為100℃或低於100℃的低沸點溶劑,其含量高於沸點為115℃或高於115℃的高沸點溶劑。 The mixed solvent may contain a low boiling point solvent having a boiling point of 100°C or lower than a high boiling point solvent having a boiling point of 115°C or higher.
更特定言之,混合溶劑包含重量比為1:2至1:20或1:3至1:15的沸點為115℃或高於115℃的高沸點溶劑及沸點為100℃或低於100℃的低沸點溶劑。由於以上述重量比計包含沸點為115℃或高於115℃的高沸點溶劑及沸點為100℃或低於100℃的低沸點溶劑,因此可增加感光樹脂組成物的溶解性。 More specifically, the mixed solvent contains a high boiling point solvent having a boiling point of 115°C or higher and a boiling point of 100°C or lower in a weight ratio of 1:2 to 1:20 or 1:3 to 1:15. low boiling point solvents. Since the high boiling point solvent with a boiling point of 115° C. or higher and the low boiling point solvent with a boiling point of 100° C. or lower are included in the above weight ratio, the solubility of the photosensitive resin composition can be increased.
沸點為115℃或高於115℃的高沸點溶劑的實例可包含丁醇、二甲基甲醯胺、N-甲基-2-吡咯啶酮、γ丁內酯、丁基卡必醇(butyl capitol)、丁基溶纖劑(butyl cellosolve)、甲基溶纖劑(methyl cellosolve)、乙酸丁酯、二乙二醇甲乙醚、二乙二醇二甲醚、二乙二醇二乙醚、二丙二醇二甲醚、3-甲氧基丙酸甲酯、3-乙氧基丙酸乙酯、丙二醇甲醚丙酸酯、環己酮、丙二醇單甲醚乙酸酯(propylene glycol monomethyl ether acetate;PGMEA)以及其混合溶劑。 Examples of high-boiling solvents having a boiling point of 115° C. or higher may include butanol, dimethylformamide, N-methyl-2-pyrrolidone, γ-butyrolactone, butyl carbitol (butyl capitol), butyl cellosolve, methyl cellosolve, butyl acetate, diethylene glycol methyl ethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, dipropylene glycol di Methyl ether, methyl 3-methoxypropionate, ethyl 3-ethoxypropionate, propylene glycol methyl ether propionate, cyclohexanone, propylene glycol monomethyl ether acetate (PGMEA) and its mixed solvents.
沸點為100℃或低於100℃的低沸點溶劑的實例可包含甲基乙基酮、甲醇、乙醇、丙酮、四氫呋喃、異丙醇以及其混合溶劑。 Examples of the low-boiling solvent having a boiling point of 100° C. or lower may include methyl ethyl ketone, methanol, ethanol, acetone, tetrahydrofuran, isopropanol, and mixed solvents thereof.
在含有混合溶劑(包含沸點為115℃或高於115℃的高沸點溶劑及沸點為100℃或低於100℃的低沸點溶劑)的樹脂組成物;含有羧基的鹼性可顯影黏合劑樹脂;以及光起始劑中,可考慮到特定用途或應用領域來控制固體含量,且例如,樹脂組成物可包含10重量%至99重量%的混合溶劑。 In a resin composition containing a mixed solvent (including a high boiling point solvent with a boiling point of 115°C or higher and a low boiling point solvent with a boiling point of 100°C or lower); an alkaline developable binder resin containing a carboxyl group; And in the photoinitiator, the solid content may be controlled in consideration of a specific use or application field, and for example, the resin composition may include 10 wt % to 99 wt % of a mixed solvent.
同時,可用於將樹脂組成物塗覆於支撐基板上,隨後乾燥的步驟中的方法或裝置不受特別限制。舉例而言,可使用習知的塗佈法將樹脂組成物塗佈於習知的基板膜(諸如聚對苯二甲酸伸乙酯)上,且接著乾燥以製備乾膜。 Meanwhile, methods or devices that can be used in the step of coating the resin composition on the support substrate followed by drying are not particularly limited. For example, the resin composition can be coated on a conventional substrate film such as polyethylene terephthalate using a conventional coating method, and then dried to prepare a dry film.
塗佈樹脂組成物的方法不受特別限制,且例如可使用諸如塗佈棒法的方法。 The method of coating the resin composition is not particularly limited, and for example, a method such as a coating bar method can be used.
在感光疊層物製備方法中,除了使用包含沸點為115℃或高於115℃的高沸點溶劑及沸點為100℃或低於100℃的低沸點溶劑的混合溶劑以外,藉由調節乾燥速率及/或乾燥溫度,可大大減少或可實質上不存在於感光樹脂層中形成的微氣泡的量。 In the photosensitive laminate production method, in addition to using a mixed solvent including a high-boiling solvent having a boiling point of 115°C or higher and a low-boiling solvent having a boiling point of 100°C or lower, by adjusting the drying rate and And/or drying temperature, the amount of microbubbles formed in the photosensitive resin layer can be greatly reduced or can be substantially absent.
更特定言之,乾燥塗佈的樹脂組成物的步驟可藉由加熱構件(諸如熱風烘箱、加熱板、熱風循環爐或紅外爐)在50℃至100℃、60℃至90℃或70℃至85℃的溫度下進行。 More specifically, the step of drying the coated resin composition may be carried out at 50°C to 100°C, 60°C to 90°C, or 70°C to at a temperature of 85°C.
乾燥時間可視乾燥溫度而變化,且可為例如30秒至20分鐘,更特定言之1分鐘至10分鐘,或3分鐘至7分鐘。 The drying time may vary depending on the drying temperature, and may be, for example, 30 seconds to 20 minutes, more specifically 1 minute to 10 minutes, or 3 minutes to 7 minutes.
對樹脂組成物中所包含的含有羧基的鹼性可顯影黏合劑樹脂的描述包含實施例的感光疊層物中所描述的描述。 The description of the carboxyl group-containing alkali-developable binder resin contained in the resin composition includes the description described in the photosensitive laminate of Examples.
含有羧基的鹼性可顯影黏合劑樹脂可具有20,000公克/莫耳至300,000公克/莫耳或30,000公克/莫耳至150,000公克/莫耳 的重均分子量,及20℃以上且150℃以下的玻璃轉移溫度。 Alkaline developable binder resins containing carboxyl groups can have from 20,000 grams/mole to 300,000 grams/mole or from 30,000 grams/mole to 150,000 grams/mole The weight average molecular weight, and the glass transition temperature of not less than 20°C and not more than 150°C.
含有羧基的鹼性可顯影黏合劑樹脂可具有在100毫克KOH/公克至300毫克KOH/公克的範圍內的酸值。 The alkaline developable binder resin containing carboxyl groups may have an acid value in the range of 100 mgKOH/g to 300 mgKOH/g.
樹脂組成物可更包含含有(甲基)丙烯酸酯單體或寡聚物的光可聚合化合物以及含有羧基的鹼性可顯影黏合劑樹脂。 The resin composition may further include a photopolymerizable compound containing a (meth)acrylate monomer or oligomer and an alkaline developable binder resin containing a carboxyl group.
按100重量份的含有羧基的鹼性可顯影黏合劑樹脂計,樹脂組成物可包含1重量份至80重量份的含有(甲基)丙烯酸酯單體或寡聚物的光可聚合化合物。 Based on 100 parts by weight of the alkaline developable binder resin containing carboxyl groups, the resin composition may include 1 to 80 parts by weight of a photopolymerizable compound containing a (meth)acrylate monomer or oligomer.
作為光可聚合化合物,可使用通常已知的單官能或多官能(甲基)丙烯酸酯單體或寡聚物。為了滿足上述特性,分子中含有芳族官能基的2個至10個官能(甲基)丙烯酸酯單體或寡聚物可用作單官能或多官能(甲基)丙烯酸酯單體或寡聚物。 As the photopolymerizable compound, generally known monofunctional or polyfunctional (meth)acrylate monomers or oligomers can be used. In order to meet the above characteristics, 2 to 10 functional (meth)acrylate monomers or oligomers containing aromatic functional groups in the molecule can be used as monofunctional or polyfunctional (meth)acrylate monomers or oligomers things.
特定言之,光可聚合化合物可為由以下化學式1表示的雙官能(甲基)丙烯酸酯化合物。 Specifically, the photopolymerizable compound may be a bifunctional (meth)acrylate compound represented by Chemical Formula 1 below.
在化學式1中,R1及R2彼此相同或不同且為H或CH3,且j及k中的每一者為1至20的整數。 In Chemical Formula 1, R 1 and R 2 are the same or different from each other and are H or CH 3 , and each of j and k is an integer of 1 to 20.
更特定言之,化學式1的雙官能(甲基)丙烯酸酯化合物可包含以下化學式11的雙官能(甲基)丙烯酸酯化合物及以下化學式12的雙官能(甲基)丙烯酸酯化合物。 More specifically, the bifunctional (meth)acrylate compound of Chemical Formula 1 may include a bifunctional (meth)acrylate compound of Chemical Formula 11 below and a bifunctional (meth)acrylate compound of Chemical Formula 12 below.
[化學式11]
在化學式11中,R11及R12彼此相同或不同且為H或CH3,且J1及K1中的每一者為1至8的整數。 In Chemical Formula 11, R 11 and R 12 are the same or different from each other and are H or CH 3 , and each of J1 and K1 is an integer of 1 to 8.
在化學式12中,R21及R22彼此相同或不同且為H或CH3,且J2及K2中的每一者為10至20的整數。 In Chemical Formula 12, R 21 and R 22 are the same or different from each other and are H or CH 3 , and each of J2 and K2 is an integer of 10 to 20.
更特定言之,化學式1的雙官能(甲基)丙烯酸酯化合物可包含重量比為1:1至1:30的化學式11的雙官能(甲基)丙烯酸酯化合物及化學式12的雙官能(甲基)丙烯酸酯化合物。 More specifically, the bifunctional (meth)acrylate compound of Chemical Formula 1 may include the bifunctional (meth)acrylate compound of Chemical Formula 11 and the bifunctional (meth)acrylate compound of Chemical Formula 12 in a weight ratio of 1:1 to 1:30. base) acrylate compounds.
由於與化學式11的雙官能(甲基)丙烯酸酯化合物相比,以相同重量或更高重量使用化學式12的雙官能(甲基)丙烯酸酯化合物,因此增加對基板的黏著力及對顯影劑的抵抗力,藉此確保極佳的細線黏著力及解析度。 Since the bifunctional (meth)acrylate compound of Chemical Formula 12 is used by the same weight or more than the bifunctional (meth)acrylate compound of Chemical Formula 11, the adhesion to the substrate and the resistance to the developer are increased. resistance, thereby ensuring excellent fine line adhesion and resolution.
光起始劑為藉由UV及其他輻射引發光可聚合單體的鏈反應的材料,且在固化感光疊層物的樹脂組成物及感光樹脂層中起重要作用。 A photoinitiator is a material that initiates a chain reaction of photopolymerizable monomers by UV and other radiation, and plays an important role in curing the resin composition and photosensitive resin layer of a photosensitive laminate.
可用作光起始劑的化合物可包含蒽醌衍生物,諸如2-甲基蒽醌及2-乙基蒽醌;及安息香衍生物,諸如安息香甲基醚、二苯甲酮、菲醌以及4,4'-雙(二甲胺基)二苯甲酮。 Compounds that can be used as photoinitiators may include anthraquinone derivatives, such as 2-methylanthraquinone and 2-ethylanthraquinone; and benzoin derivatives, such as benzoin methyl ether, benzophenone, phenanthrenequinone, and 4,4'-Bis(dimethylamino)benzophenone.
由2,2'-雙(2-氯苯基)-4,4'-5,5'-四苯基雙咪唑、1-羥基環己基苯基酮、2,2-二甲氧基-1,2-二苯基乙-1-酮、2-甲基-1-[4-(甲硫基) 苯基]-2-嗎啉基丙-1-酮、2-苯甲基-2-二甲胺基-1-[4-嗎啉基苯基]丁-1-酮、2-羥基-2-甲基-1-苯基丙-1-酮、2,4,6-三甲基苯甲醯基二苯基氧化膦、1-[4-(2-羥基甲氧基)苯基]-2-羥基-2-甲基丙-1-酮、2,4-二乙基噻噸酮、2-氯噻噸酮、2,4-二甲基噻噸酮、3,3-二甲基-4-甲氧基二苯甲酮、二苯甲酮、1-氯-4-丙氧基噻噸酮、1-(4-異丙基苯基)2-羥基-2-甲基丙-1-酮、1-(4-十二烷基苯基)-2-羥基-2-甲基丙-1-酮、4-苯甲醯基-4'-甲基二甲基硫醚、4-二甲胺基苯甲酸、4-二甲基胺苯甲酸甲酯、4-二甲胺基苯甲酸乙酯、4-二甲胺基苯甲酸丁酯、4-二甲胺基苯甲酸2-乙基己酯、4-二甲胺基苯甲酸2-異戊酯、2,2-二乙氧基苯乙酮、苯甲基酮二甲基縮醛、苯甲基酮β-甲氧基二乙縮醛、1-苯基-1,2-丙基二肟-o,o'-(2-羰基)乙氧基醚、鄰苯甲醯基苯甲酸甲酯、雙[4-二甲胺基苯基)酮、4,4'-雙(二乙胺基)二苯甲酮、4,4'-二氯二苯甲酮、苯甲基、安息香、甲氧基安息香、乙氧基安息香、異丙氧基安息香、正丁氧基安息香、異丁氧基安息香、三級丁氧基安息香、對二甲胺基苯乙酮、對三級丁基三氯苯乙酮、對三級丁基二氯苯乙酮、噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮、二苯并環庚酮、α,α-二氯-4-苯氧基苯乙酮以及4-二甲胺基苯甲酸戊酯選出的化合物可用作光起始劑,但不限於此。 From 2,2'-bis(2-chlorophenyl)-4,4'-5,5'-tetraphenylbisimidazole, 1-hydroxycyclohexyl phenyl ketone, 2,2-dimethoxy-1 ,2-Diphenylethan-1-one, 2-methyl-1-[4-(methylthio) Phenyl]-2-morpholinopropan-1-one, 2-benzyl-2-dimethylamino-1-[4-morpholinophenyl]butan-1-one, 2-hydroxy-2 -Methyl-1-phenylpropan-1-one, 2,4,6-trimethylbenzoyldiphenylphosphine oxide, 1-[4-(2-hydroxymethoxy)phenyl]- 2-Hydroxy-2-methylpropan-1-one, 2,4-diethylthioxanthone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone, 3,3-dimethyl -4-methoxybenzophenone, benzophenone, 1-chloro-4-propoxythioxanthone, 1-(4-isopropylphenyl) 2-hydroxy-2-methylpropane- 1-ketone, 1-(4-dodecylphenyl)-2-hydroxy-2-methylpropan-1-one, 4-benzoyl-4'-methyl dimethyl sulfide, 4 -Dimethylaminobenzoic acid, 4-dimethylaminobenzoic acid methyl ester, 4-dimethylaminobenzoic acid ethyl ester, 4-dimethylaminobenzoic acid butyl ester, 4-dimethylaminobenzoic acid 2 -Ethylhexyl ester, 2-isoamyl 4-dimethylaminobenzoate, 2,2-diethoxyacetophenone, benzophenone dimethyl acetal, benzophenone β-methoxy diethyl acetal, 1-phenyl-1,2-propyldioxime-o,o'-(2-carbonyl)ethoxyether, methyl phthaloylbenzoate, bis[4-di Methylaminophenyl) ketone, 4,4'-bis(diethylamino)benzophenone, 4,4'-dichlorobenzophenone, benzyl, benzoin, methoxybenzoin, ethoxy Base benzoin, isopropoxy benzoin, n-butoxy benzoin, isobutoxy benzoin, tertiary butoxy benzoin, p-dimethylaminoacetophenone, p-tertiary butyltrichloroacetophenone, p-three Grade butyldichloroacetophenone, thioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, dibenzocycloheptanone, α,α-dichloro-4-phenoxybenzene Compounds selected from ethyl ketone and amyl 4-dimethylaminobenzoate can be used as photoinitiators, but are not limited thereto.
按固體含量計,相對於樹脂組成物的總重量,可以0.1重量%至20重量%、或1重量%以上且10重量%以下的量包含光起始劑。當光起始劑包含於上述範圍內時,可獲得足夠的靈敏度。 The photoinitiator may be included in an amount of 0.1 wt % to 20 wt %, or 1 wt % or more and 10 wt % or less with respect to the total weight of the resin composition in terms of solid content. When the photoinitiator is contained within the above range, sufficient sensitivity can be obtained.
若光起始劑的含量太低,則由於低光效率而應增加曝光量,從而可極大地降低生產效率。若光起始劑的含量過高,則膜可為脆性的且顯影劑可易於被污染,從而導致諸如短路的缺陷。 If the content of the photoinitiator is too low, the exposure amount should be increased due to the low light efficiency, which can greatly reduce the production efficiency. If the content of the photoinitiator is too high, the film may be brittle and the developer may be easily contaminated, causing defects such as short circuits.
另外,視需要,樹脂組成物可更包含其他添加劑。舉例而言,呈鄰苯二甲酸酯形式的鄰苯二甲酸二丁酯、鄰苯二甲酸二庚酯、鄰苯二甲酸二辛酯、鄰苯二甲酸二烯丙酯;呈二醇酯形式的三乙二醇二乙酸酯、四乙二醇二乙酸酯;呈醯胺形式的對甲苯磺醯胺、苯磺醯胺、正丁基苯磺醯胺;磷酸三苯酯以及類似者可用作塑化劑。 In addition, the resin composition may further contain other additives as necessary. For example, dibutyl phthalate, diheptyl phthalate, dioctyl phthalate, diallyl phthalate in the form of phthalates; triethylene glycol diacetate, tetraethylene glycol diacetate; p-toluenesulfonamide, benzenesulfonamide, n-butylbenzenesulfonamide in the form of amides; triphenyl phosphate and similar Those can be used as plasticizers.
為了有助於樹脂組成物的處理,可添加無色染料或著色劑。無色染料的實例可包含三(4-二甲胺基-2-甲基苯基)甲烷、三(4-二甲胺基-2甲基苯基)甲烷以及芴染料。較佳使用無色結晶紫,因為對比度良好。在包含無色染料的情況下,感光樹脂組成物中的含量可為0.1重量%以上且10重量%以下。相比之下,較佳為0.1重量%或大於0.1重量%,且為了維持儲存穩定性,較佳為10重量%或小於10重量%。 In order to facilitate the handling of the resin composition, a leuco dye or colorant may be added. Examples of the leuco dye may include tris(4-dimethylamino-2-methylphenyl)methane, tris(4-dimethylamino-2-methylphenyl)methane, and fluorene dyes. Leuco crystal violet is preferred because of the good contrast. In the case of including a leuco dye, the content in the photosensitive resin composition may be 0.1% by weight or more and 10% by weight or less. In contrast, it is preferably 0.1% by weight or more, and in order to maintain storage stability, it is preferably 10% by weight or less.
著色劑可包含單水合甲苯磺酸、品紅、酞菁綠、金胺鹼、副品紅(paramagenta)、結晶紫、甲基橙、尼羅藍2B(nile blue 2B)、維多利亞藍(victoria blue)、孔雀綠、鑽石綠、鹼性藍20以及類似者。當包含著色劑時,感光樹脂組成物中所添加的量可為0.001重量%以上且1重量%以下。若含量為0.001重量%或大於0.001重量%,則存在改善處理的效果,且若含量小於1重量%,則存在維持儲存穩定性的效果。 Colorants may include toluenesulfonic acid monohydrate, magenta, phthalocyanine green, auramine base, paramagenta, crystal violet, methyl orange, nile blue 2B, victoria blue ), Malachite Green, Diamond Green, Basic Blue 20, and the like. When a colorant is included, the amount added to the photosensitive resin composition may be 0.001% by weight or more and 1% by weight or less. If the content is 0.001% by weight or more, there is an effect of improving handling, and if the content is less than 1% by weight, there is an effect of maintaining storage stability.
其他添加劑可更包含熱聚合抑制劑、染料、褪色劑、增黏劑以及類似者。 Other additives may further include thermal polymerization inhibitors, dyes, decolorizers, tackifiers, and the like.
根據本揭露內容的另一實施例,可提供一種電路板製備方法,其使用實施例的感光疊層物。 According to another embodiment of the present disclosure, a method for preparing a circuit board using the photosensitive laminate of the embodiment can be provided.
實施例的感光疊層物可用於疊層於銅包覆疊層物上。 The photosensitive laminate of the embodiment can be used to be laminated on a copper clad laminate.
作為電路板或印刷電路板(PCB)製備方法的實例,首先進行預處理製程以便疊層銅包覆疊層物,所述銅包覆疊層物為PCB的原始材料。預處理製程在外層製程中按鑽孔、去毛刺以及洗滌的次序,且在內層製程中按洗滌或酸洗的次序進行。在洗滌製程中,主要使用硬毛刷製程及噴氣浮石(jet pumice)製程且可對酸洗進行軟性蝕刻及硫酸酸洗。 As an example of a circuit board or printed circuit board (PCB) manufacturing method, a pretreatment process is first performed to laminate a copper clad laminate, which is a raw material of the PCB. The pretreatment process is carried out in the order of drilling, deburring and washing in the outer layer process, and in the order of washing or pickling in the inner layer process. In the cleaning process, the bristle brush process and the jet pumice process are mainly used, and soft etching and sulfuric acid pickling can be performed on the pickling.
為了在已進行預處理製程的銅包覆疊層物上形成電路,通常可將感光疊層物或乾膜光阻(下文中稱為DFR)疊層於銅包覆疊層物的銅層上。在此製程中,將DFR的光阻層疊層於銅表面上,同時使用層壓機剝離DFR的保護膜。一般而言,其可以0.5公尺/分鐘至3.5公尺/分鐘的疊層速率,100℃至130℃的溫度以及10磅/平方吋至90磅/平方吋的加熱輥壓力進行。 In order to form a circuit on a copper clad laminate that has undergone a pretreatment process, a photosensitive laminate or dry film photoresist (hereinafter referred to as DFR) is usually laminated on the copper layer of the copper clad laminate . In this process, the photoresist layer of DFR is laminated on the copper surface, and at the same time, the protective film of DFR is peeled off using a laminator. Generally, it can be performed at a lamination rate of 0.5 m/min to 3.5 m/min, a temperature of 100° C. to 130° C., and a heated roll pressure of 10 psi to 90 psi.
可使已進行疊層製程的印刷電路板靜置15分鐘或更長時間以穩定基板,且接著可使用具有在其上形成的所需電路圖案的光罩來曝光DFR的光阻。在此製程中,當光罩經紫外線照射時,經紫外線照射的光阻可藉由所含有的光起始劑在照射的部分中引發聚合。最初,光阻中的氧氣經消耗,且接著將活化的單體聚合以引起交聯反應。此後,隨著消耗大量單體,可進行聚合反應,且未曝光部分可以其中未進行交聯反應的狀態存在。 The printed circuit board that has undergone the lamination process may be allowed to stand for 15 minutes or more to stabilize the substrate, and then the photoresist of the DFR may be exposed using a photomask having a desired circuit pattern formed thereon. In this process, when the photomask is irradiated with ultraviolet rays, the photoresist irradiated by ultraviolet rays can initiate polymerization in the irradiated part by the contained photoinitiator. Initially, the oxygen in the photoresist is consumed, and then the activated monomers are polymerized to cause a crosslinking reaction. Thereafter, as a large amount of monomer is consumed, a polymerization reaction may proceed, and an unexposed portion may exist in a state where a crosslinking reaction has not proceeded.
隨後,進行移除光阻的未曝光部分的顯影製程。在鹼性可顯影DFR的情況下,0.8重量%至1.2重量%的碳酸鉀及碳酸鈉水溶液可用作顯影劑。在此製程中,藉由黏合劑聚合物的羧酸與顯影劑之間的皂化反應來清洗掉未曝光部分中的光阻,且固化的 光阻可保留於銅表面上。 Subsequently, a development process is performed to remove the unexposed portion of the photoresist. In the case of alkaline developable DFR, 0.8% to 1.2% by weight aqueous solutions of potassium carbonate and sodium carbonate can be used as developers. In this process, the photoresist in the unexposed part is washed away by the saponification reaction between the carboxylic acid of the binder polymer and the developer, and the cured Photoresist can remain on the copper surface.
其後,視內層製程及外層製程而定,可經由不同製程形成電路。在內層製程中,可藉由腐蝕及剝離製程而在基板上形成電路。在外層製程中,可藉由電鍍製程及隆起(tenting)製程,隨後進行蝕刻及焊料剝離來形成電路。 Thereafter, depending on the inner layer process and the outer layer process, the circuit can be formed through different processes. In the inner layer process, circuits can be formed on the substrate by etching and lift-off processes. In the outer layer process, the circuit can be formed by electroplating process and tenting process, followed by etching and solder stripping.
對於曝光,可使用習知已知的光源,更特定言之,超高壓水銀燈或雷射直接曝光機。 For exposure, a conventionally known light source, more specifically, an ultra-high pressure mercury lamp or a laser direct exposure machine can be used.
[有利作用] [beneficial effect]
根據本揭露內容,可提供一種感光疊層物,其能夠藉由在顯影期間確保高可靠性同時減少精細佈線形成中的缺陷來形成高密度電路;一種上述感光疊層物製備方法;以及一種電路板製備方法,其使用上述感光疊層物。 According to the present disclosure, there can be provided a photosensitive laminate capable of forming a high-density circuit by ensuring high reliability during development while reducing defects in fine wiring formation; a method of producing the above photosensitive laminate; and a circuit A plate production method using the above-mentioned photosensitive laminate.
將在以下實例中更詳細地描述本發明。然而,僅出於說明性目的提供以下實例,且本發明的內容不受以下實例限制。 The invention will be described in more detail in the following examples. However, the following examples are provided for illustrative purposes only, and the content of the present invention is not limited by the following examples.
<製備實例:製備鹼性可顯影黏合劑樹脂><Preparation Example: Preparation of Alkaline Developable Binder Resin>
製備實例1 Preparation Example 1
將機械攪拌器及回流裝置安裝於四頸圓底燒瓶中,且接著用氮氣吹掃燒瓶的內部。將170公克甲基乙基酮(methyl ethyl ketone;MEK)及12.5公克甲醇(MeOH)添加至用氮氣吹掃的燒瓶中,且接著向其中添加2.25公克偶氮二異丁腈(azobisisobutyronitrile;AIBN)以使其完全溶解。接著,向其中添加作為單體的60公克甲基丙烯酸(MAA)、100公克甲基丙烯酸苯甲酯(BzMA)、15公克甲基丙烯酸甲酯(MMA)以及75公 克苯乙烯(SM)的單體混合物,加熱至80℃的溫度,且接著聚合6小時以製備鹼性可顯影黏合劑樹脂2(重均分子量40,000公克/莫耳,玻璃轉移溫度102℃,固體含量50重量%,酸值156毫克KOH/公克)。 A mechanical stirrer and a reflux device were installed in a four-neck round bottom flask, and then the inside of the flask was purged with nitrogen. 170 g of methyl ethyl ketone (MEK) and 12.5 g of methanol (MeOH) were added to a flask purged with nitrogen, and then 2.25 g of azobisisobutyronitrile (AIBN) were added thereto to dissolve it completely. Next, 60 grams of methacrylic acid (MAA), 100 grams of benzyl methacrylate (BzMA), 15 grams of methyl methacrylate (MMA) and 75 grams of gram of styrene (SM) monomer mixture, heated to a temperature of 80°C, and then polymerized for 6 hours to prepare alkaline developable binder resin 2 (weight average molecular weight 40,000 grams/mole, glass transition temperature 102°C, solid Content 50% by weight, acid value 156 mg KOH/gram).
將製備實例中所製備的鹼性可顯影黏合劑樹脂以THF中1.0(重量/重量)%(按固體含量計約0.5(重量/重量)%)的濃度溶解於四氫呋喃中,且接著使用0.45微米孔徑針筒過濾器過濾,隨後將20微升注射至GPC中。GPC的行動相為四氫呋喃(THF)且以1.0毫升/分鐘的流速流動,且在40℃下進行分析。使用其中一個Agilent PLgel 5微米Guard(7.5×50毫米)及兩個Agilent PLgel 5微米Mixed D(7.5×300毫米)串聯連接的管柱。且Agilent 1260 Infinity II系統,RI偵測器用於在40℃下進行量測。 The alkaline developable binder resin prepared in Preparation Example was dissolved in tetrahydrofuran at a concentration of 1.0 (w/w) % (about 0.5 (w/w) % in terms of solid content) in THF, and then 0.45 μm Filter through a pore size syringe filter, then inject 20 microliters into the GPC. The mobile phase of GPC was tetrahydrofuran (THF) at a flow rate of 1.0 ml/min, and the analysis was performed at 40°C. A column in which one Agilent PLgel 5 micron Guard (7.5×50 mm) and two Agilent PLgel 5 micron Mixed D (7.5×300 mm) were connected in series was used. And Agilent 1260 Infinity II system, RI detector was used for measurement at 40°C.
藉由將具有各種分子量的聚苯乙烯溶解於濃度為0.1(重量/重量)%的四氫呋喃中而獲得的聚苯乙烯標準樣品(STD A、STD B、STD C、STD D)經由0.45微米孔徑針筒過濾器過濾,且接著注射至GPC中以使用由其形成的校準曲線獲得鹼性可顯影黏合劑樹脂的重均分子量(Mw)。 Polystyrene standard samples (STD A, STD B, STD C, STD D) obtained by dissolving polystyrene with various molecular weights in tetrahydrofuran at a concentration of 0.1 (w/w)% were passed through a 0.45 μm-bore needle Cartridge filter filtration and then injection into the GPC to obtain the weight average molecular weight (Mw) of the basic developable binder resin using a calibration curve formed therefrom.
STD A(Mp):791,000/27,810/945 STD A(Mp): 791,000/27,810/945
STD B(Mp):282,000/10,700/580 STD B(Mp): 282,000/10,700/580
STD C(Mp):126,000/4,430/370 STD C(Mp): 126,000/4,430/370
STD D(Mp):51,200/1,920/162 STD D(Mp): 51,200/1,920/162
<實例及比較實例:製備感光樹脂組成物及乾膜光阻><Example and Comparative Example: Preparation of Photosensitive Resin Composition and Dry Film Photoresist>
根據下表1中所示的組成物,將光起始劑溶解於有機溶劑中,且接著向其中添加光可聚合化合物及鹼性可顯影黏合劑樹 脂且使用機械攪拌器混合約1小時以製備感光樹脂組成物。 According to the composition shown in Table 1 below, the photoinitiator was dissolved in an organic solvent, and then a photopolymerizable compound and an alkaline developable binder resin were added thereto grease and mixed using a mechanical stirrer for about 1 hour to prepare a photosensitive resin composition.
使用塗佈棒,將獲得的感光樹脂組成物塗佈於25微米PET膜上。使用熱風烘箱乾燥塗佈的感光樹脂組成物層,其中乾燥溫度為80℃,乾燥時間為5分鐘,且乾燥之後的感光樹脂層的厚度為25微米。 Using a coating bar, the obtained photosensitive resin composition was coated on a 25 micron PET film. The coated photosensitive resin composition layer was dried in a hot air oven, wherein the drying temperature was 80° C., the drying time was 5 minutes, and the thickness of the photosensitive resin layer after drying was 25 μm.
藉由將保護膜(聚乙烯)疊層於乾燥的感光樹脂組成物層上來製備感光疊層物(乾膜光阻)。 A photosensitive laminate (dry film resist) was prepared by laminating a protective film (polyethylene) on the dried photosensitive resin composition layer.
(1)M2101:雙酚A(EO)10二甲基丙烯酸酯(美原特種化學(Miwon Specialty Chemical)) (1) M2101: bisphenol A (EO) 10 dimethacrylate (Miwon Specialty Chemical)
(2)M281:聚乙二醇二甲基丙烯酸酯(美原特種化學) (2) M281: polyethylene glycol dimethacrylate (American original special chemical)
(3)M241:雙酚A(乙氧基化物)4二甲基丙烯酸酯(美原特 種化學) (3) M241: bisphenol A (ethoxylate) 4 dimethacrylate (American original special chemical)
(4)BCIM:2,2'-雙(2-氯苯基-4,5,4',5'-四苯基雙咪唑(奧德裏奇化學(Aldrich Chemical)) (4) BCIM: 2,2'-bis(2-chlorophenyl-4,5,4',5'-tetraphenylbiimidazole (Aldrich Chemical)
[比較實例3:製備感光樹脂組成物及乾膜光阻][Comparative Example 3: Preparation of Photosensitive Resin Composition and Dry Film Photoresist]
基於專利文獻1的[0088]及[0093],進行實驗以複製專利文獻1(日本特許公開專利公開案(Japanese Laid-Open Patent Publication)第2006-106287號)的實例4。 Based on [0088] and [0093] of Patent Document 1, an experiment was conducted to reproduce Example 4 of Patent Document 1 (Japanese Laid-Open Patent Publication No. 2006-106287).
1.製備感光樹脂組成物1. Preparation of photosensitive resin composition
基於專利文獻1的實例4中的描述,使用機械攪拌器將製備實例1中所獲得的按300重量份的「鹼性可顯影黏合劑樹脂」計的以下組分混合約1小時以製備感光樹脂組成物。 Based on the description in Example 4 of Patent Document 1, the following components in terms of 300 parts by weight of "alkaline developable binder resin" obtained in Preparation Example 1 were mixed for about 1 hour using a mechanical stirrer to prepare a photosensitive resin Composition.
<感光樹脂組成物的組分> <Components of Photosensitive Resin Composition>
(1)100重量份的2,2-雙(4-(甲基丙烯醯氧基五乙氧基)苯基) 丙烷 (1) 100 parts by weight of 2,2-bis(4-(methacryloxypentaethoxy)phenyl) propane
(2)50重量份的EO,PO改性的胺基甲酸酯二甲基丙烯酸酯 (2) 50 parts by weight of EO, PO modified urethane dimethacrylate
(3)50質量份的聚丙二醇二丙烯酸酯(丙二醇鏈的數目:7) (3) 50 parts by mass of polypropylene glycol diacrylate (the number of propylene glycol chains: 7)
(4)光起始劑:25質量份的二苯甲酮、1.0質量份的2-(鄰氯苯基)-4,5-二苯基咪唑二聚體以及1.0質量份的二乙基胺基二苯甲酮 (4) Photoinitiator: 25 parts by mass of benzophenone, 1.0 parts by mass of 2-(o-chlorophenyl)-4,5-diphenylimidazole dimer and 1.0 parts by mass of diethylamine benzophenone
(5)5.0質量份的光致變色劑 (5) The photochromic agent of 5.0 mass parts
(6)0.15質量份的染料 (6) 0.15 parts by mass of dye
(7)混合溶劑:477質量份的丙酮(沸點:56℃)、26.5質量份的甲苯(沸點:110℃)以及26.5質量份的丙二醇單甲醚(沸點:146.4℃)[沸點為100℃或低於100℃的低沸點溶劑:沸點為115℃或高於115℃的高沸點溶劑的重量比=19:1] (7) Mixed solvent: 477 parts by mass of acetone (boiling point: 56°C), 26.5 parts by mass of toluene (boiling point: 110°C) and 26.5 parts by mass of propylene glycol monomethyl ether (boiling point: 146.4°C) [boiling point is 100°C or Low boiling point solvent below 100°C: weight ratio of high boiling point solvent with boiling point at or above 115°C = 19:1]
2.製備乾膜光阻2. Preparation of dry film photoresist
使用塗佈棒,將獲得的感光樹脂組成物塗佈於25微米PET膜上。使用熱風烘箱乾燥塗佈的感光樹脂組成物層,其中乾燥溫度為80℃,乾燥時間為5分鐘,且乾燥之後的感光樹脂層的厚度為25微米。 Using a coating bar, the obtained photosensitive resin composition was coated on a 25 micron PET film. The coated photosensitive resin composition layer was dried in a hot air oven, wherein the drying temperature was 80° C., the drying time was 5 minutes, and the thickness of the photosensitive resin layer after drying was 25 μm.
<實驗實例><Experimental example>
藉由以下方法來量測實例及比較實例中所製備的乾膜光阻的物理特性,且結果展示於表3中。 The physical properties of the dry film photoresists prepared in Examples and Comparative Examples were measured by the following methods, and the results are shown in Table 3.
1.量測曝光量(單位:毫焦/平方公分)1. Measure exposure (unit: mJ/cm2)
將實例及比較實例中的一者中所製備的乾膜光阻疊層於厚度為1.6毫米的經毛刷拋光的銅包覆疊層物上。在本文中,使用HAKUTO MACH 610i進行疊層,其中基板預加熱輥溫度為 120℃,層壓機輥溫度為115℃,輥壓為4.0公斤力/平方公分以及輥速為2.0分鐘/公尺。 The dry film photoresist prepared in one of the Examples and Comparative Examples was laminated on a brush-polished copper clad laminate having a thickness of 1.6 mm. In this paper, HAKUTO MACH 610i is used for lamination, where the substrate preheating roller temperature is 120°C, laminator roll temperature of 115°C, roll pressure of 4.0 kgf/cm2 and roll speed of 2.0 min/m.
使用由斯托弗圖形技術設備製造的41步平板及由ORC製造的FDi-3,用波長為405奈米的紫外線以曝光量照射疊層於銅包覆疊層物上的乾膜光阻,使得剩餘步數為15步,且接著使其靜置15分鐘。此後,在噴塗法的顯影條件下用1.0重量% Na2CO3水溶液進行顯影。此時,量測確定的剩餘步數變為15步時的能量的量。 Using a 41-step flat panel manufactured by Stover Graphics and FDi-3 manufactured by ORC, the dry film photoresist laminated on the copper-clad laminate was irradiated with ultraviolet rays with a wavelength of 405 nm at an exposure dose, Make the number of remaining steps 15 steps, and then let it stand for 15 minutes. Thereafter, development was performed with a 1.0% by weight Na 2 CO 3 aqueous solution under the development conditions of the spray coating method. At this time, the amount of energy when the determined remaining number of steps becomes 15 steps is measured.
2.量測1:1解析度(單位:微米)2. Measurement 1:1 resolution (unit: micron)
將實例及比較實例中的一者中所製備的乾膜光阻疊層於厚度為1.6毫米的經毛刷拋光的銅包覆疊層物上。在本文中,使用HAKUTO MACH 610i進行疊層,其中基板預加熱輥溫度為120℃,層壓機輥溫度為115℃,輥壓為4.0公斤力/平方公分以及輥速為2.0分鐘/公尺。 The dry film photoresist prepared in one of the Examples and Comparative Examples was laminated on a brush-polished copper clad laminate having a thickness of 1.6 mm. In this paper, lamination was performed using HAKUTO MACH 610i with a substrate preheating roll temperature of 120°C, a laminator roll temperature of 115°C, a roll pressure of 4.0 kgf/cm2 and a roll speed of 2.0 min/m.
以0.5微米間隔自4微米至20微米形成資料,使得在疊層物中顯影之後電路線的寬度與電路線之間的間距的距離變為1:1,使用由斯托弗圖形技術設備製造的41步平板及由ORC製造的FDi-3以曝光量照射波長為405奈米的紫外線使得剩餘步數為15步,且接著使其靜置15分鐘。此後,在噴塗法的顯影條件下用1.0重量% Na2CO3水溶液進行顯影。 Forming data from 4 microns to 20 microns at 0.5 micron intervals such that the distance between the width of the circuit lines and the spacing between the circuit lines after development in the laminate becomes 1:1 using a Stover Graphics facility The 41-step plate and FDi-3 manufactured by ORC were irradiated with ultraviolet rays having a wavelength of 405 nm at an exposure amount such that the remaining steps were 15 steps, and then allowed to stand for 15 minutes. Thereafter, development was performed with a 1.0% by weight Na 2 CO 3 aqueous solution under the development conditions of the spray coating method.
其後,藉由使用ZEISS AXIOPHOT顯微鏡使電路線之間的間距及非電路線之間的間距為1:1而量測的值來確定解析度。 Thereafter, the resolution was determined by a value measured by using a ZEISS AXIOPHOT microscope to make the pitch between circuit lines and the pitch between non-circuit lines 1:1.
3.確認氣泡(單位:氣泡/平方毫米)3. Confirm the air bubbles (unit: air bubbles/square millimeter)
關於在實例及比較實例中的一者中所製備的乾膜光阻, 在移除PET膜及PE膜之後,使用偏光顯微鏡確認感光樹脂層(單位面積:1毫米×1毫米)中存在的直徑小於1微米的氣泡數目(氣泡/平方毫米)。 Regarding the dry film photoresist prepared in one of the examples and comparative examples, After removing the PET film and the PE film, the number of bubbles (bubbles/mm2) present in the photosensitive resin layer (unit area: 1 mm×1 mm) with a diameter of less than 1 μm was confirmed using a polarizing microscope.
4.確認曝光/顯影之後的缺陷(單位:缺陷/平方毫米)4. Confirm the defects after exposure/development (unit: defect/mm2)
將實例及比較實例中的一者中所製備的乾膜光阻疊層於厚度為1.6毫米的經毛刷拋光的銅包覆疊層物上。在本文中,使用HAKUTO MACH 610i進行疊層,其中基板預加熱輥溫度為120℃,層壓機輥溫度為115℃,輥壓為4.0公斤力/平方公分以及輥速為2.0分鐘/公尺。 The dry film photoresist prepared in one of the Examples and Comparative Examples was laminated on a brush-polished copper clad laminate having a thickness of 1.6 mm. In this paper, lamination was performed using HAKUTO MACH 610i with a substrate preheating roll temperature of 120°C, a laminator roll temperature of 115°C, a roll pressure of 4.0 kgf/cm2 and a roll speed of 2.0 min/m.
使用由斯托弗圖形技術設備製造的41步平板及由ORC製造的FDi-3以曝光量用波長為405奈米的紫外線照射疊層物,使得剩餘步數為15步,以便使電路線的寬度及電路線之間的間距的距離在顯影之後為1:1,且接著使其靜置15分鐘。此後,在噴塗法的顯影條件下用1.0重量% Na2CO3水溶液進行顯影。 Using a 41-step flat panel manufactured by Stover Graphics Technology Equipment and FDi-3 manufactured by ORC, the laminate was irradiated with ultraviolet rays with a wavelength of 405 nm at an exposure amount so that the remaining steps were 15 steps in order to make the circuit lines The distance of width and spacing between circuit lines was 1:1 after development and then allowed to stand for 15 minutes. Thereafter, development was performed with a 1.0% by weight Na 2 CO 3 aqueous solution under the development conditions of the spray coating method.
對於實例及比較實例中所製備的顯影的乾膜光阻中的每一者,藉由使用電子顯微鏡在單位面積(1毫米×1毫米)內觀察抗蝕劑的上表面及下表面來檢查0.5微米以上且3微米以下的缺陷數目(缺陷/平方毫米)。使用場發射掃描電子顯微鏡(FE-SEM,由日立(Hitachi)製造,放大率為3000倍)觀察實例及比較實例中的每一者中所獲得的感光樹脂層的表面及橫截面。 For each of the developed dry film resists prepared in Examples and Comparative Examples, 0.5 The number of defects (defects/mm²) of micrometers or more and 3 micrometers or less. The surface and cross section of the photosensitive resin layer obtained in each of Examples and Comparative Examples were observed using a field emission scanning electron microscope (FE-SEM, manufactured by Hitachi, magnification 3000 times).
參考表1及圖1,確認在實例的感光疊層物的感光樹脂層中存在直徑小於1微米的1個氣泡/平方毫米或少於1個氣泡/平方毫米,且不存在直徑為1微米以上且5微米以下的大氣泡。另外,即使在將實例的感光樹脂層曝露於紫外線且用鹼性溶液顯影之後,確認實質上未出現直徑為0.5微米以上且3微米以下的缺陷,或以1個缺陷/平方毫米或少於1個缺陷/平方毫米的形式出現。 With reference to Table 1 and FIG. 1, it was confirmed that 1 bubble/mm2 or less than 1 bubble/mm2 with a diameter of less than 1 micrometer existed in the photosensitive resin layer of the photosensitive laminate of the example, and that there were no bubbles with a diameter of 1 micrometer or more. And large bubbles below 5 microns. In addition, even after exposing the photosensitive resin layer of Example to ultraviolet rays and developing with an alkaline solution, it was confirmed that substantially no defects with a diameter of 0.5 μm or more and 3 μm or less occurred, or 1 defect/mm2 or less Appears in the form of defects/mm².
換言之,亦觀察到,由於少量直徑小於1微米的氣泡存在於實例的感光樹脂層中,因此在使用感光疊層物製備電路板時,在確保高可靠性的同時實現高密度及靈敏度,藉此能夠形成更精細的佈線。 In other words, it was also observed that since a small amount of air bubbles having a diameter of less than 1 micrometer existed in the photosensitive resin layer of the example, when a circuit board was prepared using a photosensitive laminate, high density and sensitivity were achieved while ensuring high reliability, whereby Finer wiring can be formed.
另一方面,即使在比較實例的感光樹脂疊層物中使用與實例相等的能量,且感光樹脂層中存在直徑小於1微米的10個氣泡/平方毫米或多於10個氣泡/平方毫米時,亦難以實現與實例類似的解析度。 On the other hand, even when the energy equivalent to that of the example was used in the photosensitive resin laminate of the comparative example, and 10 bubbles/mm2 or more than 10 bubbles/mm2 having a diameter of less than 1 μm were present in the photosensitive resin layer, It is also difficult to achieve a resolution similar to the example.
參考表3及圖5,確認在將比較實例1及比較實例2中的一者中所獲得的感光樹脂層曝光,隨後用鹼性溶液顯影之後,出現許多直徑為0.5微米以上且3微米以下的缺陷。 Referring to Table 3 and FIG. 5, it was confirmed that after exposing the photosensitive resin layer obtained in one of Comparative Example 1 and Comparative Example 2, followed by development with an alkaline solution, many particles having a diameter of 0.5 μm or more and 3 μm or less appeared. defect.
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| KR1020190179860A KR102237567B1 (en) | 2019-12-31 | 2019-12-31 | Photosensitive laminate, preparation method of photosensitive laminate, and preparation method of circuit board |
| KR10-2019-0179860 | 2019-12-31 | ||
| KR10-2020-0099130 | 2019-12-31 | ||
| KR1020200099130A KR102250828B1 (en) | 2020-08-07 | 2020-08-07 | Photosensitive laminate, preparation method of photosensitive laminate, and preparation method of circuit board |
| KR1020200125243A KR102341768B1 (en) | 2020-09-25 | 2020-09-25 | Photosensitive laminate, preparation method of photosensitive laminate, and preparation method of circuit board |
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| JP2006106287A (en) * | 2004-10-04 | 2006-04-20 | Hitachi Chem Co Ltd | Photosensitive resin composition, photosensitive element and method for manufacturing photosensitive element |
| KR20170079445A (en) * | 2015-12-30 | 2017-07-10 | 코오롱인더스트리 주식회사 | Photosensitive Resin Composition and Dry Film Photoresist Comprising the same |
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| JP2007327979A (en) * | 2004-09-01 | 2007-12-20 | Fujifilm Holdings Corp | Pattern forming material, pattern formation apparatus, and pattern forming method |
| EP1856577B1 (en) * | 2005-02-02 | 2015-05-27 | Kolon Industries, Inc. | Positive dry film photoresist and composition for preparing the same |
| JP4535953B2 (en) * | 2005-07-11 | 2010-09-01 | 旭化成イーマテリアルズ株式会社 | Photosensitive resin laminate |
| WO2007040204A1 (en) * | 2005-10-04 | 2007-04-12 | Hitachi Chemical Company, Ltd. | Photosensitive resin composition, photosensitive element, and method for manufacturing printed wiring board |
| CN101278235A (en) * | 2005-10-04 | 2008-10-01 | 日立化成工业株式会社 | Photosensitive resin composition, photosensitive element and method for producing printed circuit board |
| JP4561625B2 (en) * | 2005-10-06 | 2010-10-13 | 日立化成工業株式会社 | Photosensitive resin composition, photosensitive element, resist pattern forming method and printed wiring board manufacturing method |
| JP2008266382A (en) * | 2007-04-17 | 2008-11-06 | Fujifilm Corp | Method for producing phthalocyanine pigment nanoparticle dispersion, method for producing inkjet ink for color filter containing the dispersion, colored photosensitive resin composition containing the dispersion, photosensitive transfer material, and color filter, and LCD device and CCD device using |
| JP2010078820A (en) | 2008-09-25 | 2010-04-08 | Fujifilm Corp | Method for producing photosensitive film, photosensitive film, photosensitive laminate, permanent pattern forming method and printed circuit board |
| JP2012255925A (en) * | 2011-06-09 | 2012-12-27 | Hitachi Chem Co Ltd | Photosensitive resin composition, and photosensitive element and permanent resist using the same |
| JP2013037272A (en) * | 2011-08-10 | 2013-02-21 | Mitsubishi Paper Mills Ltd | Photosensitive resin composition and photosensitive film |
| JP6284891B2 (en) * | 2015-02-26 | 2018-02-28 | 富士フイルム株式会社 | Composition for forming touch panel electrode protective film, transfer film, transparent laminate, protective film for touch panel electrode and method for forming the same, capacitive input device, and image display device |
| KR20180077722A (en) * | 2016-12-29 | 2018-07-09 | 코오롱인더스트리 주식회사 | Photosensitive resin composition for dry film photoresist |
| KR20180077724A (en) * | 2016-12-29 | 2018-07-09 | 코오롱인더스트리 주식회사 | Photosensitive resin composition for dry film photoresist |
| JP7029797B2 (en) * | 2018-02-22 | 2022-03-04 | 互応化学工業株式会社 | Photosensitive resin composition, dry film, and printed wiring board |
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