TWI778179B - Scribing device and stand unit - Google Patents

Abstract

[Problem] The formation position of the scribe line is stabilized while the scribing wheel is smoothly rotated. [Solution] A stand unit 30 including a holding groove 63 , latch holes 64 a, 64 b , a scribing wheel 40 , and a latch shaft 50 . When the scribing wheel 40 is pushed to the surface of the substrate, the two side surfaces of the scribing wheel 40 are respectively pushed to the inner side surfaces of the holding grooves 63 facing each other, so as to set the gap between the through hole 41 and the pin shaft 50 , the gap between the inner side surface of the holding groove 63 and the side surface of the scribing wheel 40 , and the inclination angle of the latch shaft 50 relative to the inner side surface of the holding groove 63 . The inner peripheral surface 41C of the through hole forming the scribing wheel 41 includes a curved surface forming the central portion of the through hole in the thickness direction of the scribing wheel. It is smaller than the diameter of the end of the through hole.

Description

Scribing device and stand unit

The present invention relates to a scribing device and a holder unit for forming scribing lines on a substrate.

In the past, dicing of brittle material substrates such as glass substrates was performed by a scribing process in which a scribe line was formed on the substrate surface and a breaking process in which a predetermined force was applied to the substrate surface along the formed scribe line. In the scribing process, the blade of the scribing wheel moves along a predetermined line while being pushed against the surface of the substrate. To form a scribe line, a scribe device including a scribe head is used.

The following Patent Document 1 discloses a scribing apparatus in which a scribing wheel moves forward while rotating the surface of the substrate, thereby forming a scribing line on the surface of the substrate. In this scribing device, in a state in which the scribing wheel is inserted into the holding groove formed in the bracket, the latch shaft is inserted into the two holes of the hole formed in the bracket and the hole formed in the scribing wheel, thereby, The scribing wheel is held by the holder in a rotatable state. [Prior technical literature] [Patent Literature]

[Patent Document 1] WO2007/063979

[Problems to be Solved by Invention]

The scribing wheel mounted on the bracket needs to rotate within the retaining groove used to form the scribing. Therefore, the width of the holding groove becomes slightly wider than the thickness of the scribing wheel, so that the gap between the scribing wheel and the holding portion is secured. With this gap, the scribing wheel is in a state where it can move along the latch shaft in the bracket groove. However, when the scribe line is formed, if the scribe wheel moves in the direction of the latch shaft, the formation position of the scribe line becomes unstable. Therefore, in the conventional scribing device, there is a problem that the scribing line is deviated from the predetermined position.

In view of this problem, an object of the present invention is to provide a scribing device and a stand unit capable of stabilizing the formation position of the scribing wheel without hindering the rotation of the scribing wheel. [Means to solve the problem]

A first aspect of the present invention relates to a scribing apparatus for forming scribing lines on the surface of a substrate. The scribing device of this type includes a holder unit for holding a scribing wheel and a scribing head for holding the holder unit on the surface of the substrate in a state of being rotatable around a vertical axis. The holder unit includes a holding groove into which the scribing wheel is inserted, a latch hole formed across the holding groove, and a latch shaft inserted into the through hole of the scribing wheel inserted into the holding groove and the latch hole. When the scribing wheel is pushed to the surface of the substrate, both side surfaces of the scribing wheel are respectively pushed to the inner side surfaces of the holding grooves facing each other, so that the distance between the through hole and the latch shaft is set. Gap, the gap between the inner side of the holding groove and the side of the scribing wheel, the inclination angle of the latch shaft relative to the inner side of the holding groove; the inner peripheral surface of the through hole forming the scribing wheel at least includes A curved surface forming the central portion of the through hole in the thickness direction of the scribing wheel; on the curved surface, the diameter of the central portion of the through hole in the thickness direction is formed to be larger than the diameter of the end of the through hole in the thickness direction. The diameter of the part is small.

According to the scribing device of this aspect, when the scribing wheel is pressed against the surface of the substrate, the two side surfaces of the scribing wheel are respectively pushed to the inner side surfaces facing each other. Therefore, when a scribe line is formed, the movement of the scribe wheel toward the latch axis direction can be suppressed. On the other hand, the inner peripheral surface of the through hole of the scribing wheel has a curved surface on which the diameter of the center portion of the through hole in the thickness direction is formed to be smaller than the diameter of the end portion of the through hole in the thickness direction. Here, the inner peripheral surface constituting the through hole and the outer peripheral surface of the latch shaft are in line contact. Thereby, the inner peripheral surface 41C of the through-hole is easily slid with respect to the latch shaft, so that the scribing wheel 40 can be smoothly rotated. In addition, the contact area between the inner peripheral surface 41C of the through hole 41 and the outer peripheral surface of the latch shaft 50 is small, so even if the scribing line is formed on the substrate 15 , broken glass, foreign matter, etc. enter the inner circumference of the through hole 41 . It is also difficult to influence the rotatability of the scribing wheel 40 between the surface 41C and the outer peripheral surface of the latch shaft 50 . Thereby, the rotation of the scribing wheel 40 with respect to the latch shaft 50 can be suppressed from being hindered. Therefore, the formation position of the scribe line can be stabilized without hindering the rotation of the scribe line.

In the scribing device of this type, the latch hole is structurally inclined relative to a direction perpendicular to the inner surface of the holding groove, at least in a direction parallel to the surface of the substrate; The latch shaft is inclined at least in a direction parallel to the surface of the substrate with respect to a direction perpendicular to the inner surface of the holding groove. With this configuration, as will be described in the following embodiments, the formation position of the scribe line can be stabilized.

In the scribing device of this type, the latch hole is structurally inclined in a direction perpendicular to the inner surface of the holding groove and in a direction perpendicular to the surface of the substrate; the latch hole and the latch inserted into the through hole The axis is also inclined in the direction perpendicular to the surface of the substrate with respect to the direction perpendicular to the inner surface of the holding groove. With this configuration, the formation position of the scribe line can be further stabilized.

A second aspect of the present invention is directed to a carriage unit that can hold a scribing wheel used to form a scribing line. The bracket unit of this type includes a holding groove into which the scribing wheel is inserted, a latch hole formed across the holding groove, and a latch shaft inserted into the through hole of the scribing wheel inserted into the holding groove and the latch hole. When the scribing wheel is pushed to the surface of the substrate, both side surfaces of the scribing wheel are respectively pushed to the inner side surfaces of the holding grooves facing each other, so that the distance between the through hole and the latch shaft is set. Gap, the gap between the inner side of the holding groove and the side of the scribing wheel, the inclination angle of the latch shaft relative to the inner side of the holding groove; the inner peripheral surface of the through hole forming the scribing wheel at least includes A curved surface forming the central portion of the through hole in the thickness direction of the scribing wheel; on the curved surface, the diameter of the central portion of the through hole in the thickness direction is formed to be larger than the diameter of the end of the through hole in the thickness direction. The diameter of the part is small.

The holder unit of this form is held by the scribing head on the surface of the substrate in a state of being rotatable around the vertical axis, whereby the same effect as the above-mentioned first form can be obtained. [Inventive effect]

As described above, according to the present invention, it is possible to provide a scribing device and a stand unit, which can stabilize the formation position of the scribing line without hindering the rotation of the scribing wheel.

The effect and meaning of this invention will become clearer by the description of the embodiment shown below. However, the embodiment shown below is absolutely one example when implementing the present invention, and the present invention is not limited by any content described in the following embodiment.

Embodiments of the present invention will be described below with reference to the drawings. In addition, in each drawing, the X axis, the Y axis, and the Z axis which are perpendicular to each other are marked for convenience. The X-Y plane is parallel to the horizontal plane, and the Z-axis direction is the vertical direction.

FIG. 1 is a diagram schematically showing the structure of a scribing apparatus 1 .

The scribing apparatus 1 includes a mobile station 10 . The moving table 10 is screwed with the ball bolts 11 . The mobile stage 10 is supported by a pair of guide rails 12 in a state movable in the Y-axis direction. The drive of the motor rotates the ball bolt 11 , whereby the moving table 10 moves in the Y-axis direction along the pair of guide rails 12 .

On the upper surface of the moving table 10, a motor 13 is provided. The motor 13 rotates the table 14 located at the upper part in the XY plane, and is positioned at a predetermined angle. The table 14 that can be rotated horizontally by the motor 13 includes a vacuum suction device not shown. The substrate 15 placed on the table 14 is held on the table 14 by the vacuum suction device.

The substrate 15 is a glass substrate, a ceramic substrate made of low-temperature fired ceramics, high-temperature fired ceramics, or the like, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, or the like. Also, the substrate 15 may adhere to or include a thin film or semiconductor material on the surface or inside of the substrate. In addition, a substance such as a thin film that does not correspond to a brittle material may be attached to the surface of the substrate 15 .

The scribing device 1 includes two cameras 16 above the substrate 15 placed on the table 14 , and can capture alignment marks formed on the surface of the substrate 15 . In addition, the bridge 17 spans the mobile station 10 and the table 14 above it, and is erected on the pillars 18a, 18b.

On the bridge 17, an introducer 19 is mounted. The scribing head 20 is guided by the guide 19, and is set to move in the X-axis direction. The scribe head 20 includes a bracket joint 21 at the lower end. The holder unit 30 in which the scribing wheel 40 is held by the holder 60 is attached to the scribing head 20 through the holder joint 21 .

When forming a scribing line on the substrate 15 using the scribing apparatus 1 , first, the holder 60 to which the scribing wheel 40 is attached is attached to the scribing head 20 . Next, the scribing device 1 positions the substrate 15 by the pair of guide rails 16 . Then, the scribing device 1 moves the scribing head 20 to a predetermined position, and applies a predetermined load to the scribing wheel 40 to make it come into contact with the substrate 15 . After that, the scribing apparatus 1 forms a predetermined scribe line on the surface of the substrate 15 by moving the scribing head 20 in the X-axis direction. In addition, the scribing apparatus 1 rotates the table 14 or moves in the Y-axis direction as needed, and forms a scribing line similarly to the above-mentioned case.

In the above-mentioned embodiment, the scribing device in which the scribing head moves in the X-axis direction and the table 14 moves and rotates in the Y-axis direction is illustrated, but the scribing device may be a scribing device in which the scribing head and the table move relative to each other. Way. For example, it can be a scribing device in which a scribing head is fixed, and a table table moves and rotates in the X-axis and Y-axis directions. Again, in this case, the camera 16 may be secured by the scribing head 20 .

Next, the configuration of the stand unit 30 will be described with reference to FIGS. 2( a ), ( b ). FIG. 2( a ) is a front view of the stand unit 30 viewed from the positive side of the X-axis, and FIG. 2( b ) is a side view of the stand unit 30 viewed from the positive side of the Y-axis. In addition, in FIGS. 2( a ) and ( b ), the joints 21 to which the bracket unit 30 is directly mounted are shown together.

On the bracket unit 30, the scribing wheel 40, the latch shaft 50, and the bracket 60 are integrated. As shown in FIG. 2( b ), the bracket unit 30 is attached to the bracket joint 21 by means of attachment bolts 31 . The bracket joint 21 is composed of a mounting portion 22, a rotating shaft 23, and two bearings 24a, 24b. The cross-sectional shape of the attachment portion 22 is an inverse L-shape. The mounting portion 22 is constituted by a side wall 22a extending in the vertical direction and a side wall 22b extending in the horizontal direction. The rotation shaft 23 extends in the vertical direction from the top side of the side wall 22b of the attachment portion 22 . The bearings 24a, 24b have the rotating shaft 23 inserted therethrough.

When the bracket unit 30 is mounted on the bracket joint 21, the side surface of the bracket unit 30 is in contact with the side wall 22a of the mounting portion 22, and the upper surface of the bracket unit 30 is in contact with the side wall 22b. Moreover, as shown in FIG.2(a), the bolt hole 25 for inserting the attachment bolt 31 is formed in the side wall 22a.

The holder joint 21 is fixed to the inside of the scribing head 20 in a state where the holder unit 30 attached to the attachment portion 22 is exposed from the lower end of the scribing head 20 . At this time, the holder unit 30 is free to rotate around the rotation shaft 23 of the holder joint 21 . In addition, the dashed-dotted line represents the shaft center S of the rotating shaft 23 , and the broken line represents the surface H of the substrate 15 . The surface H is parallel to the horizontal plane and perpendicular to the rotation axis 23 .

When forming a scribe line on the surface H of the board|substrate 15 using the scribing apparatus 1, the scribing wheel 40 rotates so that it may advance in the arrow R direction (X-axis direction) shown in FIG.2(b). In addition, the scribing device 1 does not use the holder joint 21, and the holder unit 30 itself is a structure including the rotating shaft 23, the bearings 24a, 24b, and the like.

FIG. 3 is a partial vertical cross-sectional view of the bracket 60 of FIG. 2 . For convenience, in FIG. 3 , illustration of a part of the structure of the bracket 60 is omitted. The scribing wheel 40 may be a disc-shaped member formed of sintered diamond, cemented carbide, or the like. The scribing wheel 40 is formed with a through hole 41 into which the latch shaft 50 is inserted. The through hole 41 is formed through the center of both side surfaces of the scribing wheel 40 . Details of the shape of the through hole 41 will be described later.

Moreover, in the scribing wheel 40, the V-shaped blade edge part 44 for forming a ridgeline is formed in the outer peripheral part. The thickness of the scribing wheel 40 may be 0.4-1.1 mm, and the outer diameter may be 1.0-5.0 mm. In addition, the minimum inner diameter of the through hole 41 may be 0.4 to 1.5 mm, and the blade angle of the blade may be 90 to 150°.

The pin shaft 50 may be a disc-shaped member formed of sintered diamond or cemented carbide, and a pointed portion 51 (refer to FIG. 2( a )) is formed at one or both ends of the pin shaft. The diameter of the pin shaft 50 is slightly smaller than the minimum inner diameter of the through hole 41 of the scribing wheel 40 . For example, when the minimum inner diameter of the through hole 41 is 0.82 mm, the diameter of the pin shaft 50 may be 0.77 mm. In a state where the latch shaft 50 is inserted into the through hole 41 , a gap is generated between the latch shaft 50 and the through hole 41 .

As shown in FIG. 3 , the tip of the blade edge portion 44 and the smallest diameter portion 41X where the diameter of the inner peripheral surface 41C forming the through hole 41 is the smallest are formed at the center of the scribing wheel 40 in the thickness direction DT. In other words, in the thickness direction DT, the center position of the scribing wheel 40 in the thickness direction DT, the tip position of the blade edge portion 44 , and the position of the minimum diameter portion 41X of the through hole 41 are equal to each other.

The through hole 41 has a drum shape. Specifically, the through hole 41 has a curved shape whose inner diameter gradually decreases in the thickness direction DT from the first side surface 42 a and the second side surface 42 b toward the center of the main body portion 41 . As shown in FIG. 3 , in the cross section of the scribing wheel 40 cut on a plane perpendicular to the thickness direction DT, the inner peripheral surface 41C of the through hole 41 where the scribing wheel 40 is located includes at least the through hole where the thickness direction DT is formed The curved surface of the central part of 41. On this curved surface, the diameter of the center portion of the through hole 41 where the thickness direction DT is located is formed to be smaller than the diameter of the end portion of the through hole 41 where the thickness direction DT is located.

More specifically, the inner peripheral surface 41C of the through hole 41 has an axisymmetric shape with the center axis of the through hole 41 as the center, but for the sake of illustration, the upper inner peripheral surface in the cross section along the thickness direction DT is referred to as the upper side In the inner peripheral surface 41CU, the lower inner peripheral surface is referred to as the lower inner peripheral surface 41CL. The upper inner peripheral surface 41CU extends in a curved shape from the end of the through hole 41 on the side of the first side surface 42a in the thickness direction DT toward the center and then toward the lower inner peripheral surface 41CL, and penetrates from the center of the through hole 41 in the thickness direction DT toward the center. The end portion of the hole 41 on the side of the second side surface 42b in the thickness direction DT is then extended in a curved shape in a state of being separated from the lower inner peripheral surface 41CL accordingly. The shape from the end of the upper inner peripheral surface 41CU on the side of the first side surface 42a in the thickness direction DT to the center, and from the center of the through hole 41 in the thickness direction DT to the end of the through-hole 41 on the side of the second side surface 42b in the thickness direction DT The shapes of are all line-symmetrical shapes centered on the line segment CL. The lower inner peripheral surface 41CL extends in a curved shape from the end of the through hole 41 on the side of the first side surface 42a in the thickness direction DT toward the center and then toward the upper inner peripheral surface 41CU, and penetrates from the center of the through hole 41 in the thickness direction DT toward the center. The end portion of the hole 41 on the side of the second side surface 42b in the thickness direction DT is then extended in a curved shape in a state of being separated from the upper inner peripheral surface 41CU. The shape from the end of the lower inner peripheral surface 41CL on the side of the first side surface 42a in the thickness direction DT to the center, from the center of the through hole 41 in the thickness direction DT to the end on the side of the second side surface 42b in the thickness direction DT The shapes of the parts are all line-symmetrical shapes centered on the line segment CL. All the inner peripheral surfaces 41C including the upper inner peripheral surface 41CU and the lower inner peripheral surface 41CL of the through hole 41 of the present embodiment are formed with a single or a plurality of radii of curvature, respectively.

The radius of curvature of the inner peripheral surface 41C of the through hole 41 is preferably larger than the distance DX between the position of the minimum diameter portion 41X of the through hole 41 and the tip edge of the blade edge portion 44 . Tapered portions 41a, 41b are formed on both end portions of the through hole 41 in the thickness direction DT. The tapered portion 41a expands the radius toward the first side surface 42a, and the tapered portion 41b expands the radius toward the second side surface 42b. The minimum inner diameter (diameter of the minimum diameter portion 41X) where the inner peripheral surface 41C of the through hole 41 is located is larger than the outer diameter of the latch shaft 50 .

The minimum inner diameter (diameter of the minimum diameter portion 41X) of the through hole 41 of the present embodiment is φ0.82 mm. The length LH of the through-hole 41 in the thickness direction DT of the drum-shaped portion sandwiched by the tapered portions 41a and 41b in the thickness direction DT is preferably in the range of 0.44 mm or more and 0.6 mm or less. The length LH becomes longer, and consequently, the inclination of the scribing wheel 40 with respect to the latch shaft 50 becomes smaller. Distance DW between both ends of the drum-shaped portion of the through hole 41 in the thickness direction DT and the leading edge of the blade portion 44 , and distance DX between the position of the minimum diameter portion 41X of the through hole 41 and the leading edge of the blade portion 44 The difference between the two is the height difference DY, and the height difference DY (DY=DX-DW) is preferably 0.1µm or more and 0.5µm or less. The height difference DY becomes smaller, and consequently, the inclination of the scribing wheel 40 with respect to the latch shaft 50 becomes smaller.

The bracket 60 is made of stainless steel, carbon steel, or the like. As shown in FIG. 2( b ), the lower portion of the bracket 60 is formed into a trapezoidal shape with a narrowed width toward the lower end when viewed from the side. Also, in the trapezoidal portion of the bracket 60, holding portions 62a, 62b are formed, respectively, and a holding groove 63 is formed between the holding portions 62a, 62b. The inner side surfaces 65a, 65b of the holding grooves 63 facing each other are perpendicular to the horizontal plane (XY plane).

In addition, in the structure of FIG.2(a), (b), the holder 60 consists of one type of base material, but the holder 60 may be formed by fixing two types of base materials having holding parts 62a and 62b, respectively.

In the holding portions 62a, 62b, latch holes 64a, 64b for inserting the latch shaft 50 are formed across the holding groove 63. As shown in FIG. The diameter of the latch holes 64a, 64b is slightly larger than the diameter of the latch shaft 50 . The latch holes 64a, 64b are formed to be inclined at least in the direction parallel to the surface H of the substrate 15 (the direction parallel to the XY plane) with respect to the direction perpendicular to the inner side surfaces 65a, 65b of the holding groove 63. The latch holes 64a, 64b may be formed by being inclined in a direction perpendicular to the surface H of the substrate 15 (direction parallel to the YZ plane) with respect to the direction perpendicular to the inner side surface of the holding groove 63.

In a state where the scribing wheel 40 is inserted into the holding groove 63, the through-hole 41 of the scribing wheel 40 and the latch holes 64a, 64b have the latch shaft 50 inserted. As described above, the latch holes 64a, 64b are formed inclined with respect to the direction perpendicular to the inner side surfaces 65a, 65b of the holding grooves 63, so the latch shafts 50 inserted into the latch holes 64a, 64b and the through holes 41 are opposite to the holding grooves 63. The vertical direction of the inner side surfaces 65a, 65b is inclined toward at least the direction parallel to the surface H of the substrate 15 (the direction parallel to the XY plane).

In the upper part of the bracket 60, a bolt hole 66 into which the mounting bolt 31 is inserted is formed. Moreover, the fastener 67a is attached to the side surface on the Y-axis positive side of the holding part 62a with the bolt 68a, and the fastener 67b is attached to the side surface on the Y-axis opposite side of the holding part 62b with the bolt 68b. Fasteners 67a, 67b are used to plug the latch holes 64a, 64b.

In the scribing device 1 having the above structure, when the scribing wheel 40 is pressed against the surface H of the substrate 15 during the scribing operation, both side surfaces of the scribing wheel 40 are respectively pressed To the inner side surfaces 65a, 65b of the holding grooves 63 facing each other. Therefore, the movement of the scribing wheel 40 along the latch shaft 50 can be suppressed during the formation operation of the scribing line, whereby the formation position of the scribing line can be stabilized.

4( a ) to ( d ), the operation of pressing both side surfaces of the scribing wheel 40 to the inner side surfaces 65 a and 65 b of the holding grooves 63 facing each other will be described below.

FIGS. 4( a ) to ( d ) are cross-sectional views schematically showing the operation of the holder 60 , respectively. FIGS. 4( a ) to ( d ) are cross-sectional views, each of which is a cross-section cut along a plane parallel to the XY plane at the center position of the bracket 60 in the Z-axis direction of the latch shaft 50 when viewed from the positive side of the Z-axis. For convenience, in FIGS. 4( a ) to ( d ), illustration of a part of the structure of the bracket 60 is omitted. The dashed-dotted line represents the ridgeline of the blade of the scribing wheel 40 .

FIG. 4( a ) shows a state before the scribing wheel 40 is pressed against the surface H of the substrate 15 . In this state, the ridgeline of the scribing wheel 40 is approximately parallel to the XZ plane, and there is a gap between the first and second side surfaces 42a, 42b of the scribing wheel 40 and the inner side surfaces 65a, 65b of the holding groove 63. The latch shaft 50 is inclined in the direction parallel to the XY plane with respect to the direction perpendicular to the inner side surfaces 65a, 65b of the holding groove 63 .

In this state, when the scribing wheel 40 is pressed against the surface H of the substrate 15 , the central axis of the through hole 41 of the scribing wheel 40 is parallel to the latch shaft 50 , and a moment is generated on the scribing wheel 40 . As described above, the diameter of the through hole 41 is larger than the diameter of the pin shaft 50 , so the scribing wheel 40 can rotate in a direction parallel to the XY plane within the range allowed by the clearance between the through hole 41 and the pin shaft 50 . Therefore, as described above, when a moment is generated on the scribing wheel 40, as shown in FIG. 4(b), the scribing wheel 40 rotates clockwise by the torque, and the side surfaces 42a, 42b of the scribing wheel 40 They are pressed to the inner side surfaces 65a, 65b of the holding groove 63, respectively.

Then, when the holder 60 moves in the X-axis direction (arrow R direction) along with the movement of the scribing head 20 , a moment is generated to make the ridgeline of the scribing wheel 40 parallel to the scribing direction (arrow R direction). As shown in FIGS. 2( a ) and ( b ), the bracket 60 can rotate around the rotation shaft 23 , so, with this torque, as shown in FIG. 4( c ), in order to make the ridgeline of the scribing wheel 40 match the scribing The line direction (arrow R direction) is parallel, and the holder 60 rotates counterclockwise.

Thereafter, as shown in FIG. 4( d ), in a state where the holder 60 is slightly rotated around the rotating shaft 23 (see FIGS. 2( a ) and ( b )), the scribing operation is performed. In this case, the scribing wheel 40 also causes the first and second side surfaces 42a, 42b to be pressed against the inner side surfaces 65a, 65b of the holding groove 63 by the load applied to the surface H of the substrate 15. In this state, the scribing wheel 40 rotates around the latch shaft 50 .

Here, the first and second side surfaces 42a, 42b of the scribing wheel 40 are pressed against the inner side surfaces 65a, 65b of the holding groove 63, and even if the scribing wheel 40 is inclined with respect to the latch shaft 50, the inner circumference of the through hole 41 The position where the surface 41C is in contact with the latch shaft 50 tends to be located at the center position of the scribing wheel 40 in the thickness direction DT, so the moment when the scribing wheel 40 presses the holding groove 63 becomes small. Therefore, even if the scribing wheel 40 is rotated in a state in which the scribing wheel 40 is inclined and in contact with the inner side surfaces 65a, 65b of the holding grooves 63, the frictional force between the scribing wheel 40 and the holding grooves 63 can be small.

In this way, in the present embodiment, in the process of forming the scribing line, the two side surfaces of the scribing wheel 40 are respectively pressed to the inner side surfaces 65a and 65b of the holding groove 63 facing each other. During the forming operation, the movement of the scribing wheel 40 along the latch shaft 50 can be suppressed. In addition, the inner peripheral surface of the scribing wheel has a curved shape whose inner diameter gradually decreases from the side surface toward the center of the main body portion 41 in the thickness direction DT. Therefore, even if the scribing wheel 40 is rotated in a state where the scribing wheel 40 is inclined and in contact with the holding groove 63 , the position where the inner peripheral surface 41C of the through hole 41 contacts the latch shaft 50 tends to be located in the thickness direction DT of the scribing wheel 40 Therefore, the frictional force between the scribing wheel 40 and the holding groove 63 can be reduced. Thereby, the formation position of a scribe line can be stabilized, while making the scribing wheel rotate smoothly.

<Variation> Next, a modification of the above-described embodiment will be described. In this modification, in addition to changing the inclination angle of the latch shaft 50 whose direction perpendicular to the inner surface of the holding groove 63 is the horizontal direction, the vertical direction of the latch also makes the direction perpendicular to the inner surface of the retaining groove 63 the vertical direction. The inclination angle of the shaft 50 changes.

When the latch shaft 50 is inclined in the vertical direction with respect to the direction perpendicular to the inner surface of the holding groove 63 , the through hole 41 of the scribing wheel 40 follows the latch shaft 50 by the load applied during the scribing operation. In this state, the scribing wheel 40 is rotated in the vertical direction. In other words, in the state of FIG. 5( a ), when the scribing wheel 40 is pressed against the surface H of the substrate 15 by the load, as shown in FIG. 5( b ), the scribing wheel 40 is inclined. By this inclination, the side surfaces 42a, 42b of the scribing wheel 40 are pressed against the inner side surfaces 65a, 65b of the holding groove 63, and the movement of the scribing wheel 40 is regulated.

When the latch shaft 50 is inclined not only in the horizontal direction but also in the vertical direction with respect to the direction perpendicular to the inner side surface of the holding groove 63, the effect of regulating the movement of the scribing wheel 40 by inclining the latch shaft 50 in the horizontal direction makes the latch The effect that the movement of the scribing wheel 40 is regulated by the inclination of the shaft 50 in the vertical direction is compounded. Thereby, the movement of the scribing wheel 40 in the axial direction during the scribing operation is significantly suppressed, so that the formation accuracy of the scribing can be further improved.

Here, when the latch shaft 50 is inclined in the vertical direction, as shown in FIG. 5( b ), the scribing wheel 40 is pressed in a state inclined with respect to the surface H of the substrate 15 . The inclination angle of the scribing wheel 40 relative to the surface H at this time increases as the inclination angle of the latch shaft 50 relative to the vertical direction perpendicular to the inner side surfaces 65a, 65b of the holding groove 63 is larger. In this case, since the movement of the scribing wheel in the holder groove is suppressed, the rotational resistance of the scribing wheel at the time of scribing may increase. However, since the inner peripheral surface of the through hole 41 of the scribing wheel 40 is in a drum shape, the position where the lower inner peripheral surface 41CL contacts the latch shaft 50 tends to be located at the center of the scribing wheel 40 in the thickness direction DT, and the scribing wheel The moment when the 40 pushes the holding groove 63 becomes smaller. Therefore, even if the scribing wheel 40 is rotated in a state in which the scribing wheel 40 is inclined and in contact with the holding groove 63 , the frictional force between the scribing wheel 40 and the holding groove 63 can be reduced.

<Effect of the implementation form> According to this embodiment, the following effects can be obtained.

As shown in FIGS. 4( a ) to ( d ), the latch shaft 50 is inclined in the horizontal direction with respect to the direction perpendicular to the inner side surfaces 65 a and 65 b of the holding groove 63 . Therefore, when the scribing wheel 40 is pressed against the substrate 15 When the surface H is formed, the side surfaces 42a, 42b of the scribing wheel 40 are respectively pressed to the inner side surfaces 65a, 65ba of the holding groove 63 facing each other. Therefore, when the scribe line is formed, the movement of the scribe wheel 40 in the direction parallel to the latch shaft 50 can be suppressed. Thus, the formation position of the scribe line can be stabilized.

Furthermore, the through hole 41 of the scribing wheel has a curved shape whose inner diameter gradually decreases from the first side surface 42a and the second side surface 42b toward the center of the main body 41 in the thickness direction DT. The latch shaft 50 is inclined, and the position where the inner peripheral surface 41C of the through hole 41 contacts the latch shaft 50 tends to be located at the center position of the scribing wheel 40 in the thickness direction DT. Thereby, the moment when the scribing wheel 40 presses the holding groove 63 is reduced, and even if the scribing wheel 40 is rotated in a state where the scribing wheel 40 is inclined and is in contact with the holding groove 63, the scribing wheel 40 and the holding groove 63 can be kept in contact with each other. The friction between 63 becomes smaller.

Also, the latch shaft 50 is preferably inclined in the direction perpendicular to the surface H of the substrate 15 (vertical direction) with respect to the direction perpendicular to the inner side surfaces 65a, 65b of the holding groove 63. In this way, the formation position of the scribe line can be further stabilized.

The embodiments of the present invention have been described above, but the present invention is not limited to the above-described embodiments, and the embodiments of the present invention may be modified in various ways other than those described above.

For example, in the above-described Embodiment 1, the scribing wheel 40 that does not form grooves on the ridgeline of the blade edge is used, but a scribing wheel that forms grooves at regular intervals on the ridgeline may also be used.

Moreover, in the above-mentioned Embodiment 1, the latch hole is inclined in the horizontal direction or the vertical direction with respect to the direction perpendicular to the inner side surfaces 65a, 65b of the holding groove 63, thereby inclining the latch shaft, but the latch can also be made The shaft is inclined relative to the retaining groove. Specifically, the latch holes 64a, 64b may be formed in a direction parallel to the surface H of the substrate 15 (a direction parallel to the XY plane) and a direction perpendicular to the scribe direction R (a direction parallel to the YZ plane), and, The inner side surfaces 65a, 65b of the holding groove 63 may be formed to be inclined at least in the direction parallel to the surface H of the substrate 15 (the direction parallel to the XY plane) with respect to the direction perpendicular to the latch holes 64a, 64b. The inner side surfaces 65a, 65b of the holding grooves 63 may be formed by being inclined with respect to the direction perpendicular to the latch holes 64a, 64b, and further in the direction perpendicular to the surface H of the substrate 15 (direction parallel to the YZ plane).

Moreover, the structure of the scribing head 20 and the structure of the scribing apparatus 1 can also be changed suitably. In FIG. 1 , a scribing apparatus that forms scribe lines only on one side of the substrate 15 is shown, but the present invention is also applicable to a scribing apparatus that forms scribe lines on both sides of the substrate 15 .

Various modifications can be appropriately made to the embodiment of the present invention within the scope of the technical idea shown in the scope of the patent application.

1‧‧‧Scribing device 15‧‧‧Substrate 20‧‧‧Scribing head 30‧‧‧Stand Unit 40‧‧‧Scribing wheel 41‧‧‧Through hole 42a, 42b‧‧‧Side 50‧‧‧pin shaft 60‧‧‧Bracket 63‧‧‧Keep Ditch 64a, 64b‧‧‧pin hole 65a, 65b‧‧‧Inner side H‧‧‧surface

[ Fig. 1] Fig. 1 is a diagram schematically showing the structure of a scribing device of an embodiment. [Fig. 2] Figs. 2(a) and (b) are a front view and a side view of the stent unit of the embodiment, respectively. [FIG. 3] FIG. 3 is a partial vertical cross-sectional view of the stent unit of the embodiment. [ Fig. 4] Figs. 4(a) to (d) are cross-sectional views schematically showing the operation of the stent of the embodiment. [ Fig. 5] Fig. 5(a) and (b) are views for explaining the action when the latch shaft of the embodiment is inclined with respect to the vertical direction, respectively.

40‧‧‧Scribing wheel

41‧‧‧Through hole

42a, 42b‧‧‧Side

50‧‧‧pin shaft

60‧‧‧Bracket

62a, 62b‧‧‧Maintaining Department

63‧‧‧Keep Ditch

64a, 64b‧‧‧pin hole

65a, 65b‧‧‧Inner side

Claims (4)

A scribing device, which is a scribing device for forming a scribing line on the surface of a substrate, is characterized by comprising: a stand unit that holds the scribing wheel; and a scribing head, holding the support unit on the surface of the substrate in a state of being rotatable around a vertical axis; The above-mentioned bracket unit includes: holding grooves, inserted by the above-mentioned scoring wheel; a latch hole formed across said retaining groove; and a latch shaft inserted into the through hole of the scribing wheel inserted into the holding groove and the latch hole; Wherein, when the scribing wheel is pushed to the surface of the substrate, the two side surfaces of the scribing wheel are respectively pushed to the inner side surfaces of the holding grooves facing each other, so as to set the relationship between the through hole and the pin shaft. The gap between the above-mentioned retaining groove and the gap between the lateral surface of the scribing wheel, the inclination angle of the above-mentioned latch shaft relative to the inner surface of the above-mentioned retaining groove; The inner peripheral surface of the through hole forming the scribing wheel at least includes a curved surface of the central portion of the through hole where the thickness direction of the scribing wheel is formed; On the above-mentioned curved surface, the diameter of the center portion of the above-mentioned through hole in the thickness direction is formed to be smaller than the diameter of the end portion of the above-mentioned through hole in the above-mentioned thickness direction. The scribing device according to claim 1, wherein the latch hole is inclined at least in a direction parallel to the surface of the substrate with respect to a direction perpendicular to the inner surface of the holding groove; The latch shaft is inclined at least in a direction parallel to the surface of the substrate with respect to a direction perpendicular to the inner surface of the holding groove. The scribing device according to claim 1 or 2, wherein the latch hole is inclined in a direction perpendicular to the surface of the substrate with respect to the direction perpendicular to the inner surface of the holding groove; the latch hole and the insertion hole are inserted into the through hole. The said latch shaft is also inclined to the direction perpendicular to the surface of the said substrate with respect to the direction perpendicular to the inner side surface of the said holding groove. A bracket unit, which is a bracket unit for holding a scribing wheel used to form a scribing line, characterized by comprising: retaining grooves, inserted by the above-mentioned scoring wheel; a latch hole formed across said retaining groove; and a pin shaft inserted into the through hole of the scribing wheel inserted into the holding groove and the pin hole; Wherein, when the scribing wheel is pushed to the surface of the substrate, the two side surfaces of the scribing wheel are respectively pushed to the inner side surfaces of the holding grooves facing each other, so as to set the relationship between the through hole and the pin shaft. the gap between the above-mentioned retaining grooves and the lateral surface of the above-mentioned scribing wheel, the inclination angle of the above-mentioned latch shaft relative to the inner surface of the above-mentioned retaining groove; The inner peripheral surface of the through hole forming the scribing wheel at least includes a curved surface of the central portion of the through hole where the thickness direction of the scribing wheel is formed; On the above-mentioned curved surface, the diameter of the central portion of the above-mentioned through hole in the thickness direction is formed to be smaller than the diameter of the end portion of the above-mentioned through hole in the above-mentioned thickness direction.

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