JP2016056074A - Scribing apparatus, scribing method, holder unit and holder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scribing apparatus, a scribing method, a holder unit and a holder, capable of forming a highly accurate scribe line, such as a scribe line formed by a scribing point while increasing a usable life.SOLUTION: A scribing apparatus comprises: a holder unit 30 including a scribing wheel 31, a pin 31 for rotatably pivotally supporting the scribing wheel and a holder 40 for holding the pin; a scribing head including a holder joint part for attaching the holder unit and a lifting part for lifting the holder unit; and a table for placing a brittle material substrate. The insertion holes 43a and 43b of the holder are formed to be long in the vertical direction. The scribing wheel is moved upward when contacted with the substrate by lifting the holder unit to be contacted with a rotation suppression part 60 formed in the holder, and the rotation of the scribing wheel is suppressed.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a scribing apparatus, a scribing method, a holder unit, and a holder for forming a scribe line on the surface of a brittle material substrate in the division of a brittle material substrate such as a glass substrate.

  The division of the glass substrate is usually performed by forming a scribe line on the surface of the glass substrate using a scribing tool. A scribing wheel is well known as this scribing tool. As this scribing wheel, there is a wheel cutter described in Patent Document 1, for example.

  The wheel cutter described in Patent Document 1 is held by a cutter holder and rotates on a brittle material substrate around a rotation axis into which a cutter pin is inserted, thereby forming a scribe line on the surface of the brittle material substrate. To form.

  As a scribing tool other than the scribing wheel, for example, a diamond tip or the like is attached to the tip of a columnar or prismatic support portion described in Patent Literature 2 or Patent Literature 3, and the tip surface is polished to form a scribing point. Things are known.

  The scribing tool described in Patent Document 2 or Patent Document 3 presses the scribing point against the brittle material substrate, and slides in a crisp state in this state. Therefore, the scribing point is dragged on the substrate, and at that time, a scribe line is formed on the surface of the brittle material substrate. At this time, since the blurring to the left and right does not occur as compared with the scribing wheel as in Patent Document 1, this scribing tool has an advantage that a highly accurate scribe line can be formed.

JP 2013-245135 A JP 2003-183040 A JP 2005-079526 A

  However, the scribing tool has a problem that the usable life is short because the scribing point cannot be used when the scribing point is worn.

  In order to solve the problem of short life, as in Patent Document 2 and Patent Document 3, when the scribing point is worn, it rotates around the central axis of the support portion (in a direction parallel to the surface of the brittle material substrate). However, it is difficult to fix the scribing point in an appropriate direction, and it is also difficult to process the scribing point.

  An object of the present invention is to provide a scribing apparatus, a scribing method, a holder unit, and a holder capable of forming a highly accurate scribing line like a scribing line by a scribing point while extending the usable life.

  To achieve the above object, a scribing device of the present invention includes a scribing wheel, a pin that rotatably supports the scribing wheel, and a holder that holds the pin by inserting the pin into an insertion hole. A holder unit, a holder joint part for attaching the holder unit, a scribe head having a lifting part for raising and lowering the holder unit, and a table on which a brittle material substrate is placed, and applying a load to the scribing wheel A scribing device for forming a scribe line on the surface of the brittle material substrate placed on the table by the insertion hole of the holder being formed long in the vertical direction, and the scribing by raising and lowering the holder unit When the wheel contacts the brittle material substrate, The scribing wheel with serial pin moves upward, by contacting with rotation inhibiting portion formed in the holder, characterized in that rotation of the scribing wheel is suppressed.

  According to the scribing device of the present invention, when the scribing wheel that is rotatably held contacts the brittle material substrate, the rotation suppressing unit stops the rotation of the scribing wheel, so that the rotation of the scribing wheel is stopped. By forming the scribe line, it is possible to form a scribe line with high accuracy like a scribe line by a scribe point using a scribe wheel. In addition, when no load is applied to the scribing wheel, the scribing wheel is in a rotatable state. For example, the cutting edge of the scribing wheel can be easily rotated using riding on a brittle material substrate. Therefore, it is possible to prevent a scribe line from being always formed at the same cutting edge position, and it is possible to extend the life in which the scribing wheel can be used.

  Moreover, the scribing device of the present invention is characterized in that the rotation suppressing portion is formed by a groove into which a cutting edge of the scribing wheel is fitted.

  According to the scribing device of the present invention, not only can the rotation be suppressed with respect to the direction in which the scribing wheel rotates, but also the movement of the scribing wheel with respect to the pin direction can be strongly restricted.

  The scribing device of the present invention is characterized in that the insertion hole of the holder has a rhombus shape.

  According to the scribing device of the present invention, by making the insertion hole into a rhombus shape, an insertion hole that is long in the vertical direction can be easily obtained, and the pin can be moved not only in the vertical direction but also in the front-rear direction.

  The scribing method of the present invention is characterized in that the scribing device is used and the scribing wheel is brought into contact from the outside of the end portion of the brittle material substrate placed on the table.

  According to the scribing method of the present invention, it is possible to easily rotate the cutting edge of the scribing wheel by using the climbing on the brittle material substrate, and to prevent the scribing line from being always formed at the same cutting edge position. The service life in which the wheel can be used can be extended.

  The holder unit of the present invention is a holder unit that is attached to a scribing device and used to form a scribe line on the surface of a brittle material substrate, the holder unit rotating a scribing wheel and the scribing wheel A pin that freely supports the shaft, and a holder that holds the pin by inserting the pin into an insertion hole that is elongated in the up-down direction, and the scribing wheel moves upward to The rotation of the scribing wheel is suppressed by coming into contact with a rotation suppression unit provided in the holder.

  According to the holder unit of the present invention, the above effect can be obtained using an existing scribe device by exchanging the holder unit.

  The holder of the present invention is a holder that is attached to a scribing device and holds a scribing wheel that forms a scribing line on the surface of the brittle material substrate, and the holder rotatably supports the scribing wheel. It has an insertion hole that is long in the vertical direction in which a pin is inserted, and a rotation suppressing portion that suppresses rotation of the scribing wheel.

  According to the holder of the present invention, by attaching a scribing wheel suitable for a brittle material substrate to be cut, the above effect can be obtained using an existing scribing device.

It is the schematic of the scribing apparatus of this embodiment. 2A is a side view of the holder constituting the holder unit of the present embodiment, FIG. 2B is a front view of the holder, and FIG. 2C is a bottom view of the holder. (D) is front sectional drawing of a holder. 3A is an enlarged view of the main part of the holder unit when no load is applied to the scribing wheel, and FIG. 3B is an enlarged view of the main part of the holder unit when the load is applied to the scribing wheel. It is. It is a conceptual process figure showing the scribing method using the scribing device of this embodiment.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the embodiment shown below shows an example for embodying the technical idea of the present invention, and is not intended to specify the present invention to this embodiment. The present invention is also applicable to other embodiments within the scope of the claims.

  FIG. 1 is a schematic view of a scribing apparatus 1 according to an embodiment of the present invention. The scribing apparatus 1 includes a moving table 10. The moving table 10 is screwed with a ball screw 11 and is movable in the y-axis direction along the pair of guide rails 12 by rotating the ball screw 11 by driving a motor.

  A motor 13 is installed on the upper surface of the movable table 10. The motor 13 rotates the table 14 positioned at the upper part on the xy plane and positions it at a predetermined angle. The table 14 that can be rotated horizontally by the motor 13 includes vacuum suction means (not shown), and holds the brittle material substrate 15 placed on the table 14 by the vacuum suction means.

  The brittle material substrate 15 is a glass substrate, a ceramic substrate made of low-temperature fired ceramics or high-temperature fired ceramics, a silicon substrate, a compound semiconductor substrate, a sapphire substrate, a quartz substrate, or the like. Further, the brittle material substrate 15 may be one in which a thin film or a semiconductor material is attached to or included in the surface or inside of the substrate. The brittle material substrate 15 may have a thin film or the like not corresponding to the brittle material attached to the surface thereof.

  The scribing apparatus 1 includes two CCD cameras 16 that image alignment marks formed on the surface of the brittle material substrate 15 above the brittle material substrate 15 placed on the table 14. A bridge 17 is installed on the columns 18a and 18b so as to straddle the movable table 10 and the table 14 on the upper side thereof.

  A guide 19 is attached to the bridge 17, and the scribe head 20 is installed so as to move in the x-axis direction while being guided by the guide 19. A holder unit 30 described later is attached to the scribe head 20 via a holder joint portion 21.

  The scribe head 20 has a holder joint portion 21 at the lower end. The holder joint portion 21 is rotatably supported by the scribe head 20. Further, the scribe head 20 includes a lifting unit (not shown), and the holder unit 30 is lifted and lowered by the lifting unit. As the holder unit 30 is moved up and down, a later-described scribing wheel 31 comes into contact with the substrate and a load is applied. The scribing wheel 31 is pressed against the surface of the brittle material substrate 15 placed on the table 14 and scribe lines. Form.

  Next, details of the holder unit 30 will be described. 2A is a side view of the holder 40 constituting the holder unit 30, FIG. 2B is a front view of the holder 40, and FIG. 2C is a bottom view of the holder 40. FIG. 4D is a front sectional view of the holder 40. The holder unit 30 includes a scribing wheel 31, a pin 32, and a holder 40.

  The scribing wheel 31 may be a wheel cutter described in Patent Document 1, but more specifically, a disc-shaped scribing wheel base circle as described in JP2013-14129A. What formed the diamond film in the surface of the inclined surface and ridgeline provided in the surrounding part is suitable. Since the diamond film is formed on the surface, the surface roughness of the scribing wheel 31 is suppressed, and the scribing wheel 31 becomes slippery on the brittle material substrate 15 when a scribe line is formed by a scribing method described later. Therefore, the rotation of the scribing wheel 31 on the brittle material substrate 15 can be suppressed, the occurrence of chipping due to unexpected rotation can be suppressed, and the end face strength when the brittle material substrate 15 is divided is increased. The scribing wheel 31 is formed with a through-hole for penetrating the pin 32 at the center of the side surface of the disk. The scribing wheel 31 of this embodiment has a thickness of about 0.65 mm, an outer diameter of about 2.0 mm, a diameter of the through hole 41 of about 0.8 mm, and a blade edge angle of the blade 43 of about 120 °. The scribing wheel 31 may be made of single-crystal diamond or polycrystalline diamond in addition to those formed of sintered diamond or cemented carbide.

  The pin 32 is a cylindrical member made of, for example, sintered diamond or cemented carbide, and has one end with a pointed tip. By inserting the pin 32 into the through hole of the scribing wheel 31, the scribing wheel 31 is rotatably supported.

  The holder 40 is made of a metal member. As shown in FIG. 2 (A), the holder 40 has a rectangular shape on the upper side and a trapezoidal shape whose width decreases toward the lower side. A part of the lower trapezoidal portion of the holder 40 is cut, and a pair of holding portions 41a and 41b and a holding groove 42 positioned between the holding portions 41a and 41b are formed.

  Cylindrical bodies 46a and 46b made of sintered diamond or cemented carbide are fixed to the holding portions 41a and 41b at the respective coaxial positions by brazing. And the holding wall 47a which consists of the cylindrical body 46a by the side of the holding | maintenance part 41a and the holding wall 47b which consists of the cylindrical body 46b by the side of the holding | maintenance part 41b oppose the disc side surface of the scribing wheel 31. In FIGS. 2A, 2B, and 2C, the cylindrical bodies 46a and 46b are indicated by oblique lines.

  Further, insertion holes 43a and 43b through which the pins 32 are inserted are respectively formed in the cylindrical bodies 46a and 46b at coaxial positions. The insertion holes 43a and 43b are long holes in the vertical direction that are sufficiently larger than the diameter of the pins 32 so that the inserted pins 32 can move in the vertical direction and the front-rear direction. More specifically, as shown in FIG. 2 (A), the insertion holes 43a and 43b have a rhombus shape.

  Further, convex portions 61 a and 61 b are formed on the upper portions of the cylindrical bodies 46 a and 46 b in the holding groove 42, respectively. The convex portions 61 a and 61 b are formed so that the scribing wheel 31 moved upward as the pin 32 moves upward is brought into contact. Then, the scribing wheel 31 rotatably held by the pin 32 comes into contact with the convex portions 61a and 61b, so that the rotation of the rotatable scribing wheel 31 is suppressed. Therefore, the convex portions 61 a and 61 b constitute a rotation suppression unit 60 that suppresses the rotation of the scribing wheel 31, and the holder 40 includes the rotation suppression unit 60.

  Here, a manufacturing method of the cylindrical bodies 46a and 46b and the insertion holes 43a and 43b will be described. First, a cylindrical member is fixed by brazing to the base material of the holder 40 in which the mounting holes for attaching the cylindrical bodies 46a and 46b and the holding grooves 42 are formed. Next, the lower part of the base material of the holder 40 is cut into a trapezoidal shape as shown in FIG. 2A. At this time, a slit S is formed, and the insertion holes 43a and 43b are also cut and formed at the same time. Next, the intermediate position of the cylindrical member is cut with a diamond cutter or the like according to the width of the cutting edge of the scribing wheel 31 to form a narrow gap. Then, a cylindrical member having a narrow gap is cut by a diamond cutter or an electric discharge machining according to the width of the scribing wheel 31 to form a wide gap, and the holding walls 47a and 47b and the convex portion 61a and 61b are formed. In addition, about the manufacturing method of cylindrical body 46a, 46b and insertion hole 43a, 43b, the process described in Unexamined-Japanese-Patent No. 2011-240541 can be employ | adopted more specifically.

  Further, the holder 40 is formed with a joint mounting hole 54 for screwing to the holder joint portion 21. The holder 40 is attached to the holder joint portion 21 with screws (not shown) through the joint attachment holes 54 and screw holes formed in the holder joint portion 21. The holder 40 is formed with a stopper mounting hole 56. Then, the clasps 58a and 58b are fixed to the clasp attachment holes 56 via screws 57a and 57b. The stoppers 58a and 58b are for closing the insertion holes 43a and 43b.

  The holder unit 30 arranges the scribing wheel 31 in the holding groove 42 of the holder 40 and passes the pin 32 through the through hole and the insertion holes 43a and 43b of the scribing wheel 31 to hold the pin 32 rotatably. The scribing wheel 31 is held between the holding walls 47a and 47b. Further, since the holder unit 30 has the insertion holes 43a and 43b of the holder 40 formed in a vertically long rhombus shape, the holder unit 30 holds the scribing wheel 31 together with the pins 32 so that the scribing wheel 31 can freely move in the vertical direction and the front-rear direction.

  The movement of the scribing wheel 31 in the holder unit 30 as described above will be described with reference to the drawings. 3A is an enlarged view of a main part of the holder unit 30 when no load is applied to the scribing wheel 31, and FIG. 3B is a diagram of the holder unit 30 when a load is applied to the scribing wheel 31. It is a principal part enlarged view.

  In the holder unit 30 including the holder 40 that holds the pin 32 that rotatably supports the scribing wheel 31 in the insertion holes 43a and 43b that are long in the vertical direction, as shown in FIG. The pin 32 is positioned below the holes 43a and 43b. Therefore, the scribing wheel 31 and the rotation suppressing unit 60 do not contact each other, and the holder unit 30 holds the scribing wheel 31 so as to be rotatable.

On the other hand, when the scribing wheel 31 is positioned on the surface of the brittle material substrate 15, a load is applied to the scribing wheel 31 when the holder unit 30 is lowered by the elevating part of the scribe head 20. The scribing wheel 31 moves upward by the upward movement of the pin 32 held so as to be movable in the direction. For this reason, the rotation suppressing unit 60 including the convex portions 61a and 61b and the scribing wheel 31 come into contact with each other, and the rotation of the scribing wheel 31 is suppressed. When the load applied to the scribing wheel 31 increases, the holder unit 30 holds the scribing wheel 31 from a rotatable state to a fixed state.

  That is, the holder unit 30 is configured to stop the rotation of the scribing wheel 31 by the rotation suppressing unit 60 when a load is applied to the scribing wheel 31 that is rotatably held.

  The effect of forming a scribe line on the brittle material substrate 15 using the holder unit 30 having such a configuration and the scribe device 1 including the holder unit 30 will be described with reference to the drawings. FIG. 4 is a conceptual process diagram showing a scribing method using the scribing apparatus 1. In FIG. 4, only a part of the holder unit 30 constituting the scribe device 1 and the brittle material substrate 15 are shown for easy understanding. Moreover, in order to make the state of the scribing wheel 31 easy to understand, the holder unit 30 is shown in a sectional view.

  Here, the scribe line is formed on the brittle material substrate 15 in the present embodiment by a so-called scribing method called outer cutting. The outer cutting is a scribing method for scribing from the outer side to the outer side of the brittle material substrate 15, and the lowermost end of the scribing wheel 31 is made to be lower than the upper surface of the brittle material substrate 15 at a point slightly outside the end of the brittle material substrate 15. Lower it slightly down. Then, scribing is started from the edge of the brittle material substrate 15 by horizontally moving in the traveling direction with a predetermined load applied to the scribing wheel 31, and the scribing wheel 31 is scribed to the other edge of the brittle material substrate 15.

  First, the scribing apparatus 1 is lowered to a position where the lowermost end of the scribing wheel 31 is slightly below the upper surface of the brittle material substrate 15 at a point outside the end of the brittle material substrate 15 (step 1). . At this time, since the scribing wheel 31 is not in contact with the rotation suppressing unit 60, the scribing wheel 31 is in a rotatable state.

  Next, the scribing apparatus 1 moves the holder unit 30 horizontally in the traveling direction D by moving the scribing head 20. At this time, since the scribing wheel 31 is in a rotatable state, the scribing wheel 31 contacts the outer edge of the brittle material substrate 15 to form a crack and ride on the surface of the substrate. Rotate (step 2). At this time, the pin 32 held so as to be movable in the vertical direction and the front-rear direction moves upward as the brittle material substrate 15 rides on the substrate surface.

  Then, the scribing apparatus 1 performs scribing by horizontally moving the holder unit 30 in the advancing direction D with the cutting edge of the scribing wheel 31 biting into the surface of the brittle material substrate 15 (step 3). At this time, since a predetermined load is applied to the scribing wheel 31, the scribing wheel 31 comes into strong contact with the rotation suppressing portion 60 by the upward movement of the pin 32, and the step 1 is changed from the rotatable state to the fixed state. Become.

  Further, the scribing device 1 is configured with the convex portions 61 a and 61 b so that the rotation suppressing portion 60 has a groove shape in which the cutting edge of the scribing wheel 31 is fitted. Therefore, the cutting edge of the scribing wheel 31 enters the groove between the convex portions 61a and 61b as shown in FIG. Therefore, the scribing wheel 31 is not only rotated in the direction of the arrow R but also strongly moved in the direction of the pin 32. In addition, the periphery of the ridge line of the scribing wheel 31 that contacts the substrate during scribing does not contact the protrusions 61a and 61b, and the inclined surface that does not contact the substrate during scribing protrudes so as to contact the protrusions 61a and 61b. A groove between the portion 61a and the convex portion 61b is formed. For this reason, a blade edge | tip part contact | abuts to the rotation suppression part 60, and a load is not received, and the lifetime of a blade edge can be lengthened more. The groove width is, for example, 0.2 mm.

  Moreover, in this embodiment, the convex part 61a and the convex part 61b are formed so that the lower end of the convex part 61a and the convex part 61b and the scribing wheel 31 may each make point contact. When the cutting edge angle of the scribing wheel is smaller than the angle formed by the lower end of the convex portion 61a and the lower end of the convex portion 61b, the rotation suppressing portion and the scribing wheel are in point contact. As a result, even when the scribing wheel 31 having a different blade edge angle is attached, the pin 32 moves in the upward direction, so that the rotation suppressing portion and the scribing wheel 31 are similarly point-contacted. The same holder can be used for the wheel.

  Therefore, at the time of scribing in step 3, the scribing apparatus 1 always uses the scribing wheel 31 to scribe the brittle material substrate 15 at the same cutting edge position. That is, the scribing device 1 is in pressure contact with the brittle material substrate 15 with the cutting edge of the fixed scribing wheel 31 as a scribing point, like the scribing tool described in Patent Document 2 or Patent Document 3, and in this state The scribing line is formed by sliding like scribbling.

  In addition, when the scribing apparatus 1 performs scribing to the other edge of the brittle material substrate 15, a scribing line is formed by external cutting, so that the scribing wheel 31 can be slightly rotated at the time of step 2. Then, the position of the cutting edge that forms the scribe line can be changed.

  As described above, when the scribe device 1 according to the present embodiment forms a scribe line by cutting off, it can form a highly accurate scribe line like a scribe line by a scribing point as in Patent Document 2 and Patent Document 3. it can. Moreover, since the scribing wheel 31 itself is conventionally used frequently when forming a scribe line like the wheel cutter of patent document 1, manufacture etc. are easy.

  Further, since the scribing device 1 can rotate the cutting edge of the scribing wheel 31 when riding on the surface of the brittle material substrate 15, it is possible to always prevent the scribing line 31 from being formed at the same cutting edge position. The usable life can be extended. Further, since the amount of rotation of the scribing wheel 31 at this time can also be controlled relatively easily, the position management of the scribing point on the scribing wheel 31 can be easily performed.

  Further, the scribing device 1 can constitute the holder unit 30 with a small number of parts such as the scribing wheel 31, the pin 32, and the holder 40.

  In the present embodiment, the insertion holes 43a and 43b that are long in the vertical direction are formed in a rhombus shape in terms of ease of making, but the insertion holes 43a and 43b may have other shapes such as an elliptical shape. . In addition, although the brazed cylindrical bodies 46a and 46b are formed on the holder 40, the holder unit 30 may have a configuration in which the cylindrical bodies 46a and 46b are not formed on the holder 40. In this case, for example, the rotation suppression unit 60 can be realized by the top of the holding groove 42.

  Further, in the present embodiment, the scribing device 1 rotates the scribing wheel 31 by external cutting, but it may be rotated by other methods such as manual operation.

DESCRIPTION OF SYMBOLS 1 ... Scribing apparatus 10 ... Moving stand 11 ... Ball screw 12 ... Guide rail 13 ... Motor 14 ... Table 15 ... Brittle material board 16 ... CCD camera 17 ... Bridge 18a, 18b ... Post 19 ... Guide 20 ... Scribe head 21 ... Holder joint part DESCRIPTION OF SYMBOLS 30 ... Holder unit 31 ... Scribing wheel 32 ... Pin 40 ... Holder 41a, 41b ... Holding part 42 ... Holding groove 43a, 43b ... Insertion hole 46a, 46b ... Cylindrical body 47a, 47b ... Holding wall 54 ... Joint attachment hole 56 ... Stop Gold mounting holes 57a, 57b ... Screws 58 ... Clasps 60 ... Rotation suppression parts 61a, 61b ... Convex parts

Claims (6)

A holder unit having a scribing wheel, a pin that rotatably supports the scribing wheel, and a holder that holds the pin by inserting the pin into an insertion hole;
A scribe head having a holder joint part for attaching the holder unit and an elevating part for raising and lowering the holder unit;
A table on which a brittle material substrate is placed,
A scribing device that forms a scribe line on the surface of a brittle material substrate placed on the table by applying a load to the scribing wheel,
The insertion hole of the holder is formed long in the vertical direction,
When the scribing wheel comes into contact with the brittle material substrate by raising and lowering the holder unit, the scribing wheel moves upward together with the pin, and comes into contact with a rotation suppressing portion formed on the holder, thereby the scribing wheel. The scribing device characterized in that the rotation of the scriber is suppressed.   The scribing apparatus according to claim 2, wherein the rotation suppression unit includes a groove into which a cutting edge of the scribing wheel is fitted.   The scribing device according to claim 1, wherein the insertion hole of the holder has a rhombus shape. Using the scribing device according to any one of claims 1 to 3,
A scribing method, wherein the scribing wheel is brought into contact with the outside of an end portion of a brittle material substrate placed on the table. A holder unit attached to a scribe device and used to form a scribe line on the surface of a brittle material substrate,
The holder unit is
A scribing wheel,
A pin that rotatably supports the scribing wheel;
A holder that holds the pin by inserting the pin into an insertion hole that is elongated in the vertical direction;
The holder unit, wherein the scribing wheel is restrained from rotating when the scribing wheel moves upward and abuts against a rotation restraining portion provided in the holder. A holder for holding a scribing wheel attached to a scribe device and forming a scribe line on the surface of a brittle material substrate,
The holder is
An insertion hole elongated in the vertical direction, into which a pin that rotatably supports the scribing wheel is inserted;
A rotation suppression unit that suppresses rotation of the scribing wheel;
The holder characterized by having.

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