TWI762552B - 基體保護膜、防止附著之構件及防止附著之構件之形成方法 - Google Patents

基體保護膜、防止附著之構件及防止附著之構件之形成方法 Download PDF

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Publication number: TWI762552B
Authority: TW; Taiwan
Prior art keywords: layer; protective film; substrate; group; adhesion
Prior art date: 2017-01-24

Application number

TW107100136A

Other languages

English (en)

Chinese (zh)

Other versions

TW201829086A (zh

Inventor

緒方四郎

須田修平

高宮祥太

Original Assignee

日商星和電機股份有限公司

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2017-01-24

Filing date

2018-01-03

Publication date

2022-05-01

2018-01-03 Application filed by 日商星和電機股份有限公司 filed Critical 日商星和電機股份有限公司

2018-08-16 Publication of TW201829086A publication Critical patent/TW201829086A/zh

2022-05-01 Application granted granted Critical

2022-05-01 Publication of TWI762552B publication Critical patent/TWI762552B/zh

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239000000758 substrate Substances 0.000 title claims abstract description 89
230000001681 protective effect Effects 0.000 title claims abstract description 34
238000000034 method Methods 0.000 title claims description 20
239000000126 substance Substances 0.000 claims abstract description 43
125000000524 functional group Chemical group 0.000 claims abstract description 33
239000010410 layer Substances 0.000 claims description 100
239000002585 base Substances 0.000 claims description 63
239000010408 film Substances 0.000 claims description 39
239000005871 repellent Substances 0.000 claims description 24
239000013545 self-assembled monolayer Substances 0.000 claims description 23
-1 amine phenyl Chemical group 0.000 claims description 17
239000011521 glass Substances 0.000 claims description 17
230000015572 biosynthetic process Effects 0.000 claims description 11
125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 9
125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 claims description 7
XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 claims description 5
150000002430 hydrocarbons Chemical class 0.000 claims description 5
229910052751 metal Inorganic materials 0.000 claims description 5
239000002184 metal Substances 0.000 claims description 5
239000011347 resin Substances 0.000 claims description 5
229920005989 resin Polymers 0.000 claims description 5
239000004215 Carbon black (E152) Substances 0.000 claims description 4
PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
229930195733 hydrocarbon Natural products 0.000 claims description 4
BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 4
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
229910052802 copper Inorganic materials 0.000 claims description 3
239000010949 copper Substances 0.000 claims description 3
125000003709 fluoroalkyl group Chemical group 0.000 claims description 3
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239000004332 silver Substances 0.000 claims description 3
239000011135 tin Substances 0.000 claims description 3
229910052718 tin Inorganic materials 0.000 claims description 3
125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 claims description 2
GAWIXWVDTYZWAW-UHFFFAOYSA-N C[CH]O Chemical group C[CH]O GAWIXWVDTYZWAW-UHFFFAOYSA-N 0.000 claims description 2
HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
229910052783 alkali metal Inorganic materials 0.000 claims description 2
150000001340 alkali metals Chemical class 0.000 claims description 2
229910052784 alkaline earth metal Inorganic materials 0.000 claims description 2
150000001342 alkaline earth metals Chemical class 0.000 claims description 2
125000000217 alkyl group Chemical group 0.000 claims description 2
125000002947 alkylene group Chemical group 0.000 claims description 2
125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 claims description 2
125000004218 chloromethyl group Chemical group [H]C([H])(Cl)* 0.000 claims description 2
125000000068 chlorophenyl group Chemical group 0.000 claims description 2
239000011248 coating agent Substances 0.000 claims description 2
238000000576 coating method Methods 0.000 claims description 2
229910017052 cobalt Inorganic materials 0.000 claims description 2
239000010941 cobalt Substances 0.000 claims description 2
GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 2
239000002131 composite material Substances 0.000 claims description 2
125000000596 cyclohexenyl group Chemical group C1(=CCCCC1)* 0.000 claims description 2
125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 claims description 2
125000002433 cyclopentenyl group Chemical group C1(=CCCC1)* 0.000 claims description 2
125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 claims description 2
238000001962 electrophoresis Methods 0.000 claims description 2
238000009713 electroplating Methods 0.000 claims description 2
238000005530 etching Methods 0.000 claims description 2
230000008020 evaporation Effects 0.000 claims description 2
238000001704 evaporation Methods 0.000 claims description 2
125000004175 fluorobenzyl group Chemical group 0.000 claims description 2
125000001207 fluorophenyl group Chemical group 0.000 claims description 2
125000006379 fluoropyridyl group Chemical group 0.000 claims description 2
PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
229910052737 gold Inorganic materials 0.000 claims description 2
239000010931 gold Substances 0.000 claims description 2
125000004464 hydroxyphenyl group Chemical group 0.000 claims description 2
239000011229 interlayer Substances 0.000 claims description 2
WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 2
239000003607 modifier Substances 0.000 claims description 2
239000002105 nanoparticle Substances 0.000 claims description 2
125000001624 naphthyl group Chemical group 0.000 claims description 2
229910052759 nickel Inorganic materials 0.000 claims description 2
125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 2
238000005268 plasma chemical vapour deposition Methods 0.000 claims description 2
229910052697 platinum Inorganic materials 0.000 claims description 2
125000004076 pyridyl group Chemical group 0.000 claims description 2
125000000168 pyrrolyl group Chemical group 0.000 claims description 2
229910052710 silicon Inorganic materials 0.000 claims description 2
238000003980 solgel method Methods 0.000 claims description 2
238000001179 sorption measurement Methods 0.000 claims description 2
125000001544 thienyl group Chemical group 0.000 claims description 2
239000010409 thin film Substances 0.000 claims description 2
125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims description 2
229920002554 vinyl polymer Polymers 0.000 claims description 2
229910052725 zinc Inorganic materials 0.000 claims description 2
239000011701 zinc Substances 0.000 claims description 2
229910052726 zirconium Inorganic materials 0.000 claims description 2
MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 claims 2
CWLKTJOTWITYSI-UHFFFAOYSA-N 1-fluoronaphthalene Chemical compound C1=CC=C2C(F)=CC=CC2=C1 CWLKTJOTWITYSI-UHFFFAOYSA-N 0.000 claims 1
125000003668 acetyloxy group Chemical group [H]C([H])([H])C(=O)O[*] 0.000 claims 1
150000001412 amines Chemical class 0.000 claims 1
125000003784 fluoroethyl group Chemical group [H]C([H])(F)C([H])([H])* 0.000 claims 1
125000001165 hydrophobic group Chemical group 0.000 claims 1
125000001725 pyrenyl group Chemical group 0.000 claims 1
230000000694 effects Effects 0.000 abstract description 10
230000000052 comparative effect Effects 0.000 description 25
239000002094 self assembled monolayer Substances 0.000 description 21
238000011156 evaluation Methods 0.000 description 16
238000002834 transmittance Methods 0.000 description 12
239000002245 particle Substances 0.000 description 10
GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 8
239000002904 solvent Substances 0.000 description 7
OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 6
238000010586 diagram Methods 0.000 description 5
238000005259 measurement Methods 0.000 description 5
230000003373 anti-fouling effect Effects 0.000 description 4
239000005329 float glass Substances 0.000 description 4
229910052736 halogen Inorganic materials 0.000 description 4
150000002367 halogens Chemical class 0.000 description 4
DCAYPVUWAIABOU-UHFFFAOYSA-N hexadecane Chemical compound CCCCCCCCCCCCCCCC DCAYPVUWAIABOU-UHFFFAOYSA-N 0.000 description 4
LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 4
238000010438 heat treatment Methods 0.000 description 3
229910052739 hydrogen Inorganic materials 0.000 description 3
239000001257 hydrogen Substances 0.000 description 3
230000035515 penetration Effects 0.000 description 3
XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
239000000356 contaminant Substances 0.000 description 2
NZZFYRREKKOMAT-UHFFFAOYSA-N diiodomethane Chemical compound ICI NZZFYRREKKOMAT-UHFFFAOYSA-N 0.000 description 2
229940038597 peroxide anti-acne preparations for topical use Drugs 0.000 description 2
150000002978 peroxides Chemical class 0.000 description 2
OMPJBNCRMGITSC-UHFFFAOYSA-N Benzoylperoxide Chemical group C=1C=CC=CC=1C(=O)OOC(=O)C1=CC=CC=C1 OMPJBNCRMGITSC-UHFFFAOYSA-N 0.000 description 1
229910004298 SiO 2 Inorganic materials 0.000 description 1
VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
229910010413 TiO 2 Inorganic materials 0.000 description 1
125000002178 anthracenyl group Chemical group C1(=CC=CC2=CC3=CC=CC=C3C=C12)* 0.000 description 1
229960003328 benzoyl peroxide Drugs 0.000 description 1
239000003638 chemical reducing agent Substances 0.000 description 1
238000004140 cleaning Methods 0.000 description 1
239000004020 conductor Substances 0.000 description 1
239000003989 dielectric material Substances 0.000 description 1
238000007606 doctor blade method Methods 0.000 description 1
230000005611 electricity Effects 0.000 description 1
CZWLNMOIEMTDJY-UHFFFAOYSA-N hexyl(trimethoxy)silane Chemical compound CCCCCC[Si](OC)(OC)OC CZWLNMOIEMTDJY-UHFFFAOYSA-N 0.000 description 1
230000014759 maintenance of location Effects 0.000 description 1
239000000203 mixture Substances 0.000 description 1
SLYCYWCVSGPDFR-UHFFFAOYSA-N octadecyltrimethoxysilane Chemical compound CCCCCCCCCCCCCCCCCC[Si](OC)(OC)OC SLYCYWCVSGPDFR-UHFFFAOYSA-N 0.000 description 1
239000003921 oil Substances 0.000 description 1
125000005581 pyrene group Chemical group 0.000 description 1
230000002940 repellent Effects 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
239000010703 silicon Substances 0.000 description 1
229910052814 silicon oxide Inorganic materials 0.000 description 1
230000003068 static effect Effects 0.000 description 1
TUQLLQQWSNWKCF-UHFFFAOYSA-N trimethoxymethylsilane Chemical compound COC([SiH3])(OC)OC TUQLLQQWSNWKCF-UHFFFAOYSA-N 0.000 description 1

Images

Classifications

- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/16—Antifouling paints; Underwater paints
- C09D5/1606—Antifouling paints; Underwater paints characterised by the anti-fouling agent
- C09D5/1612—Non-macromolecular compounds
- C09D5/1618—Non-macromolecular compounds inorganic
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B17/00—Methods preventing fouling
- B08B17/02—Preventing deposition of fouling or of dust
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/38—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal at least one coating being a coating of an organic material
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/42—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating of an organic material and at least one non-metal coating
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
- C08J7/04—Coating
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/08—Metals
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/18—Oxygen-containing compounds, e.g. metal carbonyls
- C08K3/20—Oxides; Hydroxides
- C08K3/22—Oxides; Hydroxides of metals
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/34—Silicon-containing compounds
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K9/00—Use of pretreated ingredients
- C08K9/02—Ingredients treated with inorganic substances
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D5/00—Coating compositions, e.g. paints, varnishes or lacquers, characterised by their physical nature or the effects produced; Filling pastes
- C09D5/16—Antifouling paints; Underwater paints
- C09D5/1606—Antifouling paints; Underwater paints characterised by the anti-fouling agent
- C09D5/1612—Non-macromolecular compounds
- C09D5/1625—Non-macromolecular compounds organic
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
- C09D7/00—Features of coating compositions, not provided for in group C09D5/00; Processes for incorporating ingredients in coating compositions
- C09D7/40—Additives
- C09D7/60—Additives non-macromolecular
- C09D7/61—Additives non-macromolecular inorganic
- C09D7/62—Additives non-macromolecular inorganic modified by treatment with other compounds
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/18—Oxygen-containing compounds, e.g. metal carbonyls
- C08K3/20—Oxides; Hydroxides
- C08K3/22—Oxides; Hydroxides of metals
- C08K2003/2237—Oxides; Hydroxides of metals of titanium

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Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Life Sciences & Earth Sciences (AREA)
Materials Engineering (AREA)
Medicinal Chemistry (AREA)
Polymers & Plastics (AREA)
Health & Medical Sciences (AREA)
Wood Science & Technology (AREA)
Geochemistry & Mineralogy (AREA)
General Chemical & Material Sciences (AREA)
Inorganic Chemistry (AREA)
Laminated Bodies (AREA)
Surface Treatment Of Glass (AREA)
Prevention Of Fouling (AREA)

TW107100136A 2017-01-24 2018-01-03 基體保護膜、防止附著之構件及防止附著之構件之形成方法 TWI762552B (zh)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2017010123A JP6441973B2 (ja)	2017-01-24	2017-01-24	基体保護膜及び付着防止部材
JP2017-010123		2017-01-24

Publications (2)

Publication Number	Publication Date
TW201829086A TW201829086A (zh)	2018-08-16
TWI762552B true TWI762552B (zh)	2022-05-01

Family

ID=62979663

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
TW107100136A TWI762552B (zh)	2017-01-24	2018-01-03	基體保護膜、防止附著之構件及防止附著之構件之形成方法

Country Status (5)

Country	Link
JP (1)	JP6441973B2 (ja)
KR (1)	KR102315145B1 (ja)
CN (1)	CN110225895B (ja)
TW (1)	TWI762552B (ja)
WO (1)	WO2018139125A1 (ja)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5352485A (en) *	1993-04-08	1994-10-04	Case Western Reserve University	Synthesis of metal oxide thin films
CN101412837A (zh) *	2007-10-18	2009-04-22	Tdk株式会社	活性能量线固化性树脂组合物及其层叠体
JP2009212435A (ja) *	2008-03-06	2009-09-17	Sharp Corp	低反射性基体及びそれを用いた太陽電池モジュール並びに低反射性基体の製造方法。
CN101626989A (zh) *	2006-11-14	2010-01-13	法国圣戈班玻璃厂	多孔层、它的生产方法及其应用
CN103635313A (zh) *	2011-06-06	2014-03-12	太阳化学工业株式会社	在非晶形碳膜层上固定防水防油层的方法及由所述方法形成的层叠体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2722493B1 (fr) *	1994-07-13	1996-09-06	Saint Gobain Vitrage	Vitrage hydrophobe multicouches
JP3401125B2 (ja) *	1995-07-25	2003-04-28	松下電器産業株式会社	シロキサン系薄膜の形成方法
KR20090034907A (ko) *	2006-07-25	2009-04-08	사스티나부르 . 테크노로지 가부시키가이샤	기체의 보호 방법
US8906298B2 (en)	2008-04-11	2014-12-09	Central Motor Wheel Co., Ltd.	Method for protecting substrate
KR101100380B1 (ko) *	2009-06-10	2011-12-30	도레이첨단소재 주식회사	기재의 표면을 고소수성으로 처리하는 표면처리방법
US20130323464A1 (en) *	2012-05-31	2013-12-05	Liang Liang	Coated article comprising a hydrophobic anti-reflection surface, and methods for making the same
JP6419610B2 (ja) *	2015-03-12	2018-11-07	リンテック株式会社	透明導電膜積層用フィルム、その製造方法および透明導電性フィルム

2017
- 2017-01-24 JP JP2017010123A patent/JP6441973B2/ja active Active
- 2017-12-21 KR KR1020197022786A patent/KR102315145B1/ko active Active
- 2017-12-21 CN CN201780083902.8A patent/CN110225895B/zh not_active Expired - Fee Related
- 2017-12-21 WO PCT/JP2017/045923 patent/WO2018139125A1/ja not_active Ceased
2018
- 2018-01-03 TW TW107100136A patent/TWI762552B/zh active

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5352485A (en) *	1993-04-08	1994-10-04	Case Western Reserve University	Synthesis of metal oxide thin films
CN101626989A (zh) *	2006-11-14	2010-01-13	法国圣戈班玻璃厂	多孔层、它的生产方法及其应用
CN101412837A (zh) *	2007-10-18	2009-04-22	Tdk株式会社	活性能量线固化性树脂组合物及其层叠体
JP2009212435A (ja) *	2008-03-06	2009-09-17	Sharp Corp	低反射性基体及びそれを用いた太陽電池モジュール並びに低反射性基体の製造方法。
CN103635313A (zh) *	2011-06-06	2014-03-12	太阳化学工业株式会社	在非晶形碳膜层上固定防水防油层的方法及由所述方法形成的层叠体

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JP2018118864A (ja)	2018-08-02
JP6441973B2 (ja)	2018-12-19
KR102315145B1 (ko)	2021-10-20
KR20190103294A (ko)	2019-09-04
CN110225895A (zh)	2019-09-10
WO2018139125A1 (ja)	2018-08-02
CN110225895B (zh)	2021-11-02
TW201829086A (zh)	2018-08-16

Publication	Publication Date	Title
Treossi et al.	2009	High-contrast visualization of graphene oxide on dye-sensitized glass, quartz, and silicon by fluorescence quenching
Zheng et al.	2014	Natural hydrophobicity and reversible wettability conversion of flat anatase TiO2 thin film
Cassagneau et al.	2000	Optical and electrical characterizations of ultrathin films self-assembled from 11-aminoundecanoic acid capped TiO2 nanoparticles and polyallylamine hydrochloride
KR101512412B1 (ko)	2015-04-15	투명 전극 및 이의 제조 방법
JP6797561B2 (ja)	2020-12-09	摩擦電気発電機
Zhang et al.	2021	Functionalized modified BN@ F-SiC particle-incorporating epoxy: an effective hydrophobic antiwear and anticorrosion coating material
AU2014260477A1 (en)	2015-10-29	Encapsulation barrier stack comprising dendrimer encapsulated nanoparticles
EP1942511A3 (en)	2011-09-21	A photo-electrode for a dye-sensitized solar cell comprising a meso-porous metal oxide thin film and a process for preparation thereof
Toledano et al.	2008	Electrochemical co-deposition of sol− gel/metal thin nanocomposite films
CN105347690A (zh)	2016-02-24	一种透明及超疏水性能可修复的涂层材料及其制备方法
Jumabekov et al.	2018	Fabrication of back-contact electrodes using modified natural lithography
KR20170050320A (ko)	2017-05-11	내구성 향상을 위한 코팅액 제조방법 및 이를 이용한 코팅방법
Dinç Zor et al.	2016	Impedimetric humidity sensor based on nanohybrid composite of conducting poly (diphenylamine sulfonic acid)
Shi et al.	2023	Flexible All‐Inorganic Perovskite Photodetector with a Combined Soft‐Hard Layer Produced by Ligand Cross‐Linking
Messina et al.	2018	Graphene grown on Ni foam: molecular sensing, graphene-enhanced Raman scattering, and galvanic exchange for surface-enhanced Raman scattering applications
JPWO2018056312A1 (ja)	2019-07-04	ペロブスカイト太陽電池
Kertmen et al.	2019	Photoelectrochemically Active N‐Adsorbing Ultrathin TiO2 Layers for Water‐Splitting Applications Prepared by Pyrolysis of Oleic Acid on Iron Oxide Nanoparticle Surfaces under Nitrogen Environment
Chakrabarty et al.	2020	Polymer thin-film dewetting-mediated growth of wettability-controlled titania nanorod arrays for highly responsive, water-stable self-powered UV photodetectors
Ding et al.	2022	Room-temperature nanojoining of silver nanowires by graphene oxide for highly conductive flexible transparent electrodes
Torun et al.	2023	Fully transparent and superhydrophobic electrodes enabled by soft interfaces
TWI762552B (zh)	2022-05-01	基體保護膜、防止附著之構件及防止附著之構件之形成方法
Yin et al.	2024	A Fe3+-Doped TiO2 Superhydrophilic Coating with Transparent and Long-Lasting Antifogging Properties Constructed Based on Nanostructured Antireflective and Capillary Anchoring Effects
KR101600395B1 (ko)	2016-03-07	투명 전극 및 이의 제조 방법
Gao et al.	2024	TiO2-Modified Graphene Oxide Fillers Strengthen Acrylic Coated Samples Corrosion and Weathering Resistance on Q235 Steel
Isobe et al.	2013	Adsorption and adhesion of poly (vinyl alcohol) and poly (ammonium acrylate) as organic additives for wet mold processing of Al2O3