TWI750873B - Transfer module, cutting device, and method of manufacturing cut product - Google Patents

Abstract

The present invention provides a conveying module capable of reliably conveying a plurality of cut products, a cutting device, and a manufacturing method of the cut products. The conveying module comprises: a moving body (44), which is arranged on the cutting table (12b) and can move while being in contact with a plurality of cut products (Sa) formed by cutting the package substrate (S); a driving mechanism (46) , which drives the moving body (44); and a transfer mechanism (47), which transfers a plurality of cutting products (Sa); Sa) is separated from the cutting table (12b) and transferred.

Description

Conveying module, cutting device and manufacturing method of cutting product

The present invention relates to a conveying module, a cutting device including the conveying module, and a manufacturing method of a cut product.

A lead frame on which a chip is mounted, a substrate, and the like are generally used as electronic components by resin encapsulation. Conventionally, a dicing apparatus has been known in which a package board is produced by resin-sealing the boards wired so as to mount a plurality of chips together, and then dicing (separating) the package board to produce a plurality of diced products (electronic components). ) (for example, refer to Patent Documents 1 to 2).

The dicing device described in Patent Document 1 includes: a holding table for adsorbing and holding the package substrate by a holding tape; a cutting blade for dicing the package substrate on the holding table into a plurality of diced products; and a suction recovery unit for holding the holding table A plurality of cutting products above are suctioned and transported. In this suction and recovery unit, a plurality of cut products are sucked by the compressed air supplied to the tubular member and peeled off from the holding belt, and the cut products are spirally formed along the inner wall surface of the cyclone container arranged on the outlet side of the tubular member. When it falls, it is collected into the storage box.

The dicing device described in Patent Document 2 includes: a suction source for sucking the package substrate from below the holding table; a cutting blade for cutting the package substrate on the holding table into a plurality of diced products; and The suction unit sucks and transports a plurality of cut products on the holding table by means of a suction head disposed above. After cutting off the negative pressure of the suction source, make the negative pressure act on the suction head of the suction unit to suck a plurality of cutting products, and convey the cutting products with the flow of gas or liquid.

prior art literature Patent Literature

Patent Document 1: Japanese Patent Laid-Open No. 2014-220459;

Patent Document 2: Japanese Patent Laid-Open No. 2017-152442.

In the conventional cutting apparatus, when the size of the cut product is as small as, for example, less than 2 mm square, it becomes difficult to convey it. As in the dicing device described in Patent Document 1, when a plurality of cut products are peeled off from the holding belt by suction force, when the suction force is too weak, cut products that cannot be conveyed remain, and when the suction force is too strong , the cut product may be damaged. In addition, in the cutting device described in Patent Document 2, when suction is performed with a suction head, when the suction force is too weak, a cut product that cannot be transported remains, and when the suction force is too strong, the cutting The product may also be damaged.

Therefore, a conveying module, a cutting device, and a manufacturing method of a cutting product capable of reliably conveying a plurality of cut products are desired.

The characteristic structure of the conveying module according to the present invention is that it comprises: a moving body arranged in the cutting On the header, it can move while being in contact with a plurality of cut products formed by cutting the package substrate; a drive mechanism drives the moving body; and a transfer mechanism transfers a plurality of the cut products; The cut articles in contact with the moving body are separated from the cutting table and transferred.

The characteristic structure of the cutting device according to the present invention is that it includes: the conveying module; a cutting mechanism for cutting the cut products; and a cleaning mechanism for cleaning the cut products transferred by the transfer mechanism.

The method for producing a cut product according to the present invention is characterized in that the cut product is manufactured using the cutting device.

According to the present invention, a conveying module capable of reliably conveying a plurality of cut products, a cutting device, and a manufacturing method of the cut products are provided.

1: Cutting module

2: Cleaning module

2A: Cleaning mechanism

2B: Fluid supply and discharge mechanism

2C: Recycle Bin

3: Control Department

4: Conveying module

11: Receiving Department

11a: Pre-bench

12: Cutting mechanism

12a: Transfer mechanism for cutting

12b: Cutting table

12c: Cutting section

12c1: Spindle part

12c2: Rotary Blade

20a: Branches

20b: Maximum water level

21: Container

21b: Inner cylinder

21b1: Inclined surface

21c: Micropores

21d: annular flange

21d1: Oblique protrusion

22: Rotary mechanism

22a: Electric motors

22b: Rotary axis

23: Liquid supply mechanism

23a: Liquid supply pipe

24: Drainage mechanism

24a: Drain pipe

25: Air supply mechanism

25a: Air supply pipe

26: Exhaust mechanism

26a: Exhaust pipe

27: Rotate the reversing mechanism

27a: Clamping mechanism

27a1: Clamping parts

27b: Turning mechanism

27b1: Rotary axis

27c: Inner cylinder reversing mechanism

27c1: Reverse axis

27d: Inner cylinder up and down mechanism

28: Discharge mechanism

28a: outer cylinder

28a1: Intubation tube

28a2: Oblique protrusion

28b: discharge pipe

29: Vacuum mechanism

29a: Vacuum Tube

30: Cover

31: Cover moving mechanism

43: Liquid supply mechanism

44: Moving body

44a: rotating body

44a1: Rotary axis

44b: Protrusion

44c: Guide slot

45: Storage Department

45b: Storage Department

46: Drive mechanism

46a: Rotary drive mechanism

46b: Sliding drive mechanism

46c: Switching mechanism

47: Transfer mechanism

47a: Flexible tube (suction path)

47b: one end

47c: The other end

48a: Liquid flow path

48b: Supply Road

49: Liquid supply mechanism

B: movable box

Ba: movable box

Bb: movable box

D: cutting device

E: Resin molding device

R: direction of rotation

S: package substrate

Sa: cut product

T: Intermediate tube

Va~Vf: On-off valve

Fig. 1 is a schematic diagram showing a cutting device; Fig. 2 is a schematic diagram showing a conveying module; Fig. 3 is a schematic perspective view showing a cleaning module; Fig. 4 is a sectional view taken along line IV-IV of Fig. 3; Schematic diagram of the state in which the block is moved to the conveying start position; FIG. 6 is a schematic diagram showing the state in which the cut product is transferred; FIG. 7 is a schematic diagram showing the state in which the movable block is moved to the conveying end position; 8 is a cross-sectional view showing a state in which the container of the cleaning module is moved; FIG. 9 is a plan view showing a state in which the container of the cleaning module is moved; FIG. 10 is a schematic perspective view showing a reversing mechanism of the cleaning module; Fig. 12 is a schematic diagram showing the conveying state of the cut product according to the other embodiment 1; Fig. 13 is a schematic diagram showing the conveying module according to the other embodiment 2; Fig. 14 is an explanatory diagram of the principle of the liquid flow according to the other embodiment 2;

Hereinafter, embodiments of the conveying module, the cutting device, and the manufacturing method of the cut product according to the present invention will be described based on the drawings. However, it is not limited to the following embodiments, and various modifications can be made without departing from the gist.

[device structure]

Molded objects such as lead frames and substrates on which chips are mounted are used as electronic components by resin encapsulation. As a technique for resin-encapsulating the object to be molded, a compression method or a transfer method can be mentioned. The compression method is, for example, after supplying a resin in liquid or granular form on a release film, placing the release film in the cavity of a molding die, and immersing the object to be molded in the resin on the release film for resin removal. the way it takes shape. The transfer method is, for example, a method in which an object to be molded is accommodated in a cavity of a molding die, a resin tablet is supplied to a tank of the molding die, heated and melted, and then molten resin is supplied to the cavity to perform resin molding.

Regarding the resin molding apparatus of the compression method or the transfer method, from the viewpoint of manufacturing efficiency, a mold array packaging (MAP) or the like is sometimes used to manufacture a resin-encapsulated wiring-based substrate in a manner of mounting a plurality of chips. A device that encapsulates a substrate. After the package substrate is produced in this apparatus, it is cut (singulated) with a dicing apparatus, and the formed cut product is used as an electronic component after passing the quality inspection. In a dicing device, a plurality of diced products formed by dicing a package substrate are conveyed, cleaned, and dried. However, when the size of the diced products is smaller than, for example, 2 mm square, transportation becomes difficult. Therefore, in the present embodiment, a conveying module capable of reliably conveying a plurality of cut products, a cutting device, and a method of manufacturing the cut products are provided. Hereinafter, a package substrate on which a plurality of semiconductor chips are mounted will be described as an example of a dicing object, and the direction of gravity may be referred to as the downward direction and the direction opposite to the direction of gravity may be described as the upper direction.

A schematic diagram of a cutting device D is shown in FIG. 1 . The dicing device D in this embodiment is constituted separately from the resin molding device E, receives the package substrate S resin-encapsulated by the resin molding device E, cuts, cleans, and dries the package substrate S to manufacture a plurality of diced products Sa. These manufactured cut products Sa are used as electronic components after passing through a predetermined quality inspection.

The cutting device D includes a cutting module 1 , a cleaning module 2 and a control unit 3 . The cutting module 1 and the cleaning module 2 can be installed or removed independently. In addition, the cutting device D includes a conveying module 4 within the scope of the cutting module 1 and the cleaning module 2 . The control unit 3 is a software for controlling the action of the cutting device D, including programs stored in a hard disk drive (Hard Disk Drive, HDD), memory and other hardware, and executed by a central processing unit (CPU) of the computer . That is, the control unit 3 controls the operations of the cutting module 1 , the cleaning module 2 and the conveying module 4 .

The cutting module 1 includes a receiving portion 11 and a cutting mechanism 12 . In addition, the number of the receiving portion 11 and the cutting mechanism 12 may be set to one or two or more, and is not particularly limited.

The receiving unit 11 receives the package substrate S having a rectangular shape in plan view from the resin molding apparatus E as a dicing object. The received package substrate S is placed on the pre-stage 11a. The dicing mechanism 12 includes two dicing transfer mechanisms 12a that transfer the package substrate S, two dicing tables 12b arranged on the dicing transfer mechanism 12a, and two dicing portions 12c. The transfer mechanism 12a for dicing is configured to be movable in the Y direction and rotatable in the θ direction in a state where the package substrate S is fixed to the dicing table 12b. The drive source of the transfer mechanism 12a for cutting and the cutting part 12c is not particularly limited, and, for example, an electric motor such as a servo motor can be used.

In the dicing table 12b, the package substrate S received from the receiving portion 11 is fixed by air suction or the like with the side encapsulated by the resin as the lower surface. The cutting part 12c includes a spindle part 12c1 and a rotating blade 12c2, and the package substrate S fixed to the cutting table 12b is cut by the rotating blade 12c2. In addition, a groove is formed on the upper surface of the dicing table 12b, that is, on the fixing surface to which the package substrate S is fixed, so that the rotary blade 12c2 can enter. The rotary blade 12c2 is fixed to the rotation shaft of the main shaft portion 12c1, and is configured to be movable in the X direction and the Z direction, and to be able to rotate at high speed. The transfer mechanism 12a for dicing moves and rotates in the Y direction and the θ direction, and the rotary blade 12c2 moves in the X direction and the Z direction, whereby the relative position of the rotary blade 12c2 and the package substrate S is adjusted. While repeatedly performing the relative position adjustment, the package substrate S is diced by the rotary blade 12c2 so as to penetrate from the upper surface to the lower surface, thereby forming a plurality of diced products Sa having a rectangular shape in plan view. At this time, dicing may be performed while supplying cutting water to the contact portion of the rotary blade 12c2 and the package substrate S. In addition, it may be performed by moving any one of the transfer mechanism 12a for dicing or the rotary blade 12c2 Adjustment of relative position. In addition, the two cutting parts 12c can be located at the positions where the main shaft part 12c1 is linear and the rotating blades 12c2 are opposed to each other, the distance between the two rotating blades 12c2 is variable, and the two cutting tables can also be moved in the X direction. Above any of 12b.

The cleaning module 2 includes a cleaning mechanism 2A, a fluid supply and discharge mechanism 2B, and a collection box 2C that is rectangular in plan view. The cleaning mechanism 2A accommodates the plurality of cut products Sa in the container 21 together with a cleaning liquid such as water, and cleans the plurality of cut products Sa by rotating the container 21 to generate a liquid flow. The fluid supply and discharge mechanism 2B includes a gas supply and discharge pump (not shown) that supplies compressed air into the container 21 of the cleaning mechanism 2A, or sucks and discharges air in a flexible tube 47a described later. In addition, the fluid supply and discharge mechanism 2B can supply the cleaning liquid into the container 21 from a water supply source (for example, a water supply, a pure water supply pipe in a factory). Details of the cleaning module 2 will be described later.

As shown in FIG. 2 , the conveying module 4 includes: a moving body 44, which is arranged on the cutting table 12b of the cutting mechanism 12 and can move while contacting a plurality of cut products Sa formed by cutting the package substrate S; a movable box B , which supports the moving body 44 ; the driving mechanism 46 , which drives the moving body 44 ; and the transfer mechanism 47 , which transfers the plurality of cut products Sa.

The movable body 44 includes a rotating shaft 44a1, a rotating body 44a fixed to the rotating shaft 44a1, and a plurality of protrusions 44b protruding radially outward from the periphery of the rotating body 44a. The plurality of protrusions 44b are not easily deformed when they come into contact with the dicing product Sa and are separated from the dicing table 12b, and are made of resin materials such as nylon and polybutylene terephthalate (PBT) which do not damage the dicing product Sa. As the movable body 44, for example, a brush-like structure in which a plurality of resin-made protrusions 44b having a diameter of 0.10 mm to 0.13 mm is arranged can be employed.

The movable case B is a frame body which supports the rotating shaft 44a1 via a bearing (not shown) etc., and the flexible tube 47a of the transfer mechanism 47 mentioned later is fixed to the upper part. The movable box B is configured to be slidable in the X direction and the Z direction by a slide drive mechanism 46b described later.

The drive mechanism 46 includes a rotation drive mechanism 46a that rotates the movable body 44 around the rotating shaft 44a1, and a slide drive mechanism 46b that slides the movable box B in the X and Z directions. The rotational drive mechanism 46a rotates the moving body 44 forward in a rotational direction R (counterclockwise in FIG. 2 ) that crosses upward with respect to the traveling direction (+X direction). That is, the rotation tangent direction at the position closest to the cutting table 12b in the rotating state of the moving body 44 is the same as the moving direction. The drive source of the drive mechanism 46 is constituted by an electric motor such as a servo motor, an air cylinder, or the like.

The transfer mechanism 47 includes: a flexible tube 47a (an example of a suction path) in which gas and liquid circulate together with the cut product Sa; The plurality of cut products Sa on the cutting table 12b are sucked; and the liquid supply mechanism 43 is supplied to the flexible tube 47a with liquid such as water. One end 47b of the flexible tube 47a is connected to a liquid supply mechanism 43 for supplying a liquid such as water, and the other end 47c of the flexible tube 47a is communicated with the inside of the container 21 . The vacuum mechanism 29 includes a gas supply and exhaust pump and a vacuum pipe 29a. The gas supply and exhaust pump is provided in the fluid supply and exhaust mechanism 2B. One end of the vacuum pipe 29a is connected to the gas supply and exhaust pump so as to be able to exhaust gas, and the other end is connected to the outer cylinder 28a and the outer cylinder 28a described later. The bottom wall of the intermediate cylinder T is connected. An on-off valve Vf composed of a solenoid valve or the like is provided in the vacuum tube 29a of the vacuum mechanism 29 . The plurality of cut products Sa separated from the cutting table 12b in contact with the protruding portion 44b of the moving body 44 are subjected to negative pressure applied to the flexible tube 47a by the vacuum mechanism 29 and flow into the flexible tube 47a, and are supplied by the liquid supply mechanism. The liquid flow of 43 is transferred to the container 21.

Hereinafter, the cleaning mechanism 2A of the cleaning module 2 will be described in detail with reference to FIGS. 3 to 4 .

The cleaning mechanism 2A of the cleaning module 2 includes: a container 21 for accommodating a plurality of cut products Sa formed by cutting the package substrate S; a rotation mechanism 22 for rotating the container 21; a liquid supply mechanism 23 for supplying cleaning liquid into the container 21; The liquid discharge mechanism 24 discharges the cleaning liquid in the container 21; the air supply mechanism 25 supplies compressed air into the container 21; the exhaust mechanism 26 discharges the air in the container 21; Invert. In addition, the cleaning mechanism 2A may further include a discharge mechanism 28 for discharging the cleaning liquid including fine waste such as chips, which has passed over the intermediate cylinder T, which will be described later, when the water level in the container 21 exceeds a predetermined level.

The container 21 is arranged to be inclined at a predetermined angle with respect to the direction of gravity. The predetermined angle is 5° to 50°, preferably 10° to 40°, and more preferably set within the range of 20° to 30°. The container 21 includes a bottomed cylindrical inner tube 21b with a conical bottom wall, and an outer tube 28a disposed on the outer peripheral side of the inner tube 21b, and the inner tube 21b and the outer tube 28a are configured to be integrally rotatable. The inner surface of the bottom wall of the inner cylinder 21b is formed with an inclined surface 21b1 which is inclined toward the direction of gravity as it approaches the center (the rotation axis 22b of the rotation mechanism 22).

The intermediate cylinder T is fixed between the inner cylinder 21b and the outer cylinder 28a so as not to rotate. In the inner tube 21b, from a position slightly higher than the upper end surface of the intermediate tube T on the side wall (predetermined water level) to the bottom wall, there are formed a plurality of fine holes 21c sized to allow passage of fine waste such as chips but not to allow the passage of cut products Sa . That is, the inner tube 21b includes a mesh structure from the side wall near the upper end surface of the intermediate tube T to the bottom wall. In addition, an annular flange 21d extending annularly outward in the radial direction is formed on the inner cylinder 21b. On the lower surface of the annular flange 21d, a plurality of inclined protrusions 21d1 (refer to the enlarged view of FIG. 3) including inclined surfaces are formed when viewed in the rotational direction. The bottom wall of the intermediate cylinder T is formed in the shape of a truncated cone in which the liquid discharge pipe 24a of the liquid discharge mechanism 24 is fixed. The outer cylinder 28a is constituted as a discharge mechanism 28 for removing the fine waste including chips and the like passing through the fine hole 21c of the inner cylinder 21b and over the upper end surface (top) of the intermediate cylinder T when the water level in the container 21 exceeds a predetermined level. The cleaning fluid is drained. The bottom wall of the outer cylinder 28a is formed in the shape of a truncated cone in which the inner tube 28a1 protrudes, and the inner tube 28a1 is relatively rotatably inserted into the discharge pipe that discharges the cleaning liquid to the discharge destination (such as the sewers, the discharge pipe in the factory). 28b (see Figure 4). In addition, on the outer surface of the upper end of the outer cylinder 28a, a plurality of inclined protrusions 28a2 are formed to protrude, and the plurality of inclined protrusions 28a2 include inclined surfaces that abut against in the rotational direction with respect to the inclined surfaces of the inclined protrusions 21d1 of the inner cylinder 21b (see Enlarged view of Figure 3).

In addition, the cleaning module 2 is provided with a cover 30 which closes the upper opening of the inner cylinder 21b, and is provided with a cover moving mechanism 31 composed of an air cylinder or the like for moving the cover 30 up and down. The flexible tube 47a of the conveying module 4, the liquid supply pipe 23a of the liquid supply mechanism 23, and the air supply pipe 25a of the air supply mechanism 25 are fixed on the cover 30. With the lid 30 in close contact with the inner cylinder 21b, the plurality of cut products Sa are supplied by the liquid flow into the inner cylinder 21b from the flexible tube 47a, and the cleaning liquid is supplied into the inner cylinder 21b from the liquid supply pipe 23a. At this time, since a plurality of fine holes 21c are formed in the inner tube 21b, the cleaning liquid in the inner tube 21b flows out into the intermediate tube T, but the cut product Sa does not pass through the fine holes 21c. In the present embodiment, since the plurality of cut products Sa are supplied into the inner cylinder 21b by the liquid flow, it is possible to prevent the inconvenience that the cut products Sa adhere to the inside of the flexible tube 47a and remain.

The rotation mechanism 22 includes an electric motor 22a for rotating the inner cylinder 21b and the outer cylinder 28a around the rotation axis 22b, and the inclined protrusions 21d1 of the inner cylinder 21b and the inclined protrusions 28a2 of the outer cylinder 28a. When the outer cylinder 28a is rotated by the driving force of the electric motor 22a, the inclined protrusion 28a2 of the outer cylinder 28a comes into contact with the inclined protrusion 21d1 of the inner cylinder 21b, and the inner cylinder 21b also rotates integrally. The inner cylinder 21b and the outer cylinder 28a are rotated by the rotating mechanism 22 to generate a liquid flow inside the inner cylinder 21b of the mesh structure, and the plurality of cut products Sa immersed in the cleaning liquid in the inner cylinder 21b are cleaned by the swirling cleaning liquid .

The liquid supply mechanism 23 includes a liquid supply pipe 23 a, one end of which is connected to a water supply pipe or a pure water supply pipe in a factory, and the other end is connected to the cover 30 . The drain mechanism 24 includes a drain pipe 24a, one end of the drain pipe 24a is connected to a sewer or a drain pipe in the factory, and the other end is connected to the bottom wall of the intermediate cylinder T. The liquid supply pipe 23a of the liquid supply mechanism 23 and the liquid discharge pipe 24a of the liquid discharge mechanism 24 are respectively provided with an on-off valve Va and an on-off valve Vb composed of a solenoid valve or the like.

The air supply mechanism 25 includes a gas supply and discharge pump installed in the fluid supply and discharge mechanism 2B; The exhaust mechanism 26 includes an exhaust pipe 26a, one end of the exhaust pipe 26a is connected to the outside air and the other end is connected to the bottom wall of the intermediate cylinder T and the outer cylinder 28a via the branch portion 20a. On the air supply pipe 25a of the air supply mechanism 25 and the exhaust pipe 26a of the exhaust mechanism 26, an on-off valve Vc and an on-off valve Vd composed of a solenoid valve or the like are respectively provided. In addition, the air supply mechanism 25 does not need to include a gas supply and discharge pump, and only needs to be a structure capable of introducing compressed air or the like into the air supply pipe 25a. For example, it may be a pipe for supplying compressed air in a factory through a solenoid valve and the air supply pipe 25a. A structure connected at one end.

The rotation reversing mechanism 27 includes: a clamping mechanism 27a, which makes the clamping member 27a1 holding the inner cylinder 21b work; an inner cylinder up-down mechanism 27d, which makes the inner cylinder 21b clamped by the clamping member 27a1 move up and down; the rotating mechanism 27b, The inner cylinder 21b is rotated around the rotating shaft 27b1; and the inner cylinder reversing mechanism 27c, the inner cylinder 21b is rotated around the reversing axis 27c1 to be reversed up and down. The drive source of the rotation reversing mechanism 27 is constituted by an electric motor, an air cylinder, or the like.

The discharge mechanism 28 includes: an outer cylinder 28a; and a discharge pipe 28b, one end of which is connected to a sewer or a drain pipe in a factory, and the other end is connected to the bottom wall of the outer cylinder 28a. The vacuum mechanism 29 includes: a gas supply and exhaust pump, which is provided in the fluid supply and exhaust mechanism 2B; and a vacuum pipe 29a, one end is connected to the gas supply and exhaust pump in a way that can be exhausted, and the other end is connected to the intermediate cylinder T and the outer cylinder 28a through the branch portion 20a bottom wall connection. The discharge pipe 28b of the discharge mechanism 28 and the vacuum pipe 29a of the vacuum mechanism 29 are provided with an on-off valve Ve and an on-off valve Vf composed of a solenoid valve or the like, respectively. The discharge pipe 28b joins with the discharge pipe 24a in the branch part 20a and extends downward, and the discharge pipe 26a and the vacuum pipe 29a join with the discharge pipe 28b in the branch part 20a and extend upward. With this structure, the liquid flows in the liquid discharge pipe 24a and the discharge pipe 28b, and the gas flows in the discharge pipe 26a and the vacuum pipe 29a. In this embodiment, the branch portion 20a is located above the upper end surface of the intermediate cylinder T (the highest water level 20b that crosses the upper end surface of the intermediate cylinder T), and the cut product Sa crosses the upper end surface of the intermediate cylinder T during cleaning and drying. The cleaning liquid does not flow into the exhaust pipe 26a and the vacuum pipe 29a due to the water level difference between the branch portion 20a and the highest water level 20b in the container 21 . In addition, when the on-off valve Vb of the liquid discharge mechanism 24 is in the closed state during the cleaning of the cut product Sa, the cleaning liquid remaining in the liquid discharge pipe 24a will not be caused by the water level difference between the branch portion 20a and the highest water level 20b in the container 21. Then, it flows into the exhaust pipe 26a and the vacuum pipe 29a. In the event that the cleaning liquid remaining in the drain pipe 24a reaches the water level of the branch portion 20a, it is also discharged from the drain pipe 28b connected to the branch portion 20a. In addition, the vacuum mechanism 29 does not need to include a gas supply and exhaust pump unless the outer cylinder 28a becomes a negative pressure, as long as it is a structure capable of exhausting the gas from the vacuum tube 29a through the branch portion 20a, for example, it can also be a gas exhaust pump in a factory. A structure in which the gas pipe is connected to one end of the vacuum pipe 29a.

[Manufacturing method of cut product]

The manufacturing method of the cut product Sa will be described with reference to FIGS. 1 to 11 .

As shown in FIG. 1, the package board|substrate S resin-molded by the resin molding apparatus E is conveyed to the receiving part 11, and this package board|substrate S is mounted on the pre-table 11a. Next, the transfer mechanism 12a for dicing fixes the package substrate S as the dicing object received from the receiving portion 11 on the dicing table 12b with one side of the resin package as the lower surface, and transfers it to the dicing portion 12c. Then, the relative position of the package substrate S and the rotary blade 12c2 is adjusted by the dicing transfer mechanism 12a and the dicing portion 12c, and the rotary blade 12c2 is used to cut the package substrate S so as to penetrate from the upper surface to the lower surface to form a plan view. A plurality of rectangular cut products Sa (cutting process).

Next, the transport module 4 transports the plurality of cut products Sa formed by cutting by the cutting mechanism 12 to the container 21 of the cleaning mechanism 2A (transport process). As shown in FIG. 5 , the movable box B is slidably moved in the X direction and the Z direction by the sliding drive mechanism 46b, and the protruding portion 44b of the movable body 44 is adjusted to be located at one end of the cutting table 12b (the end in the −X direction). The position where the cut product Sa touches. Next, as shown in FIG. 6, the vacuum mechanism 29 for sucking the plurality of cut products Sa and the liquid supply mechanism 43 for supplying liquid such as water to the flexible tube 47a are driven, and the moving body 44 is driven by the rotation driving mechanism 46a. The front side rotates in the rotation direction R (counterclockwise in FIG. 6 ), and the rotation direction R crosses upward with respect to the travel direction (+X direction). As a result, the plurality of cut products Sa are separated from the cutting table 12 b by contacting the protruding portion 44 b of the moving body 44 , are sucked to the flexible tube 47 a by the vacuum mechanism 29 , and are transferred together with the liquid supplied by the liquid supply mechanism 43 . . Next, in a state where the protrusion 44b of the movable body 44 is in contact with the cut product Sa, the movable box B is moved forward (moved in the +X direction) by the slide drive mechanism 46b. move). At this time, the protrusion 44b of the moving body 44 rotated by the rotation drive mechanism 46a comes into contact with the next cut product Sa and is separated from the cutting table 12b. Separation of the cut product Sa on the cutting table 12b and suction by the vacuum mechanism 29 are repeated. Then, as shown in FIG. 7 , the protruding portion 44b of the movable body 44 advances to the other end (end in the +X direction) of the cutting table 12b, and all the cut products Sa are finally accommodated in the container 21 . In this conveying step, the on-off valves Va to Ve of the liquid supply mechanism 23 , the liquid discharge mechanism 24 , the air supply mechanism 25 , the exhaust mechanism 26 , and the discharge mechanism 28 are closed, and the rotation mechanism 22 is not In the driving state, the on-off valve Vf of the vacuum mechanism 29 is opened (see FIG. 3 ). In addition, after the protrusion 44b of the moving body 44 has advanced to the other end of the cutting table 12b, the sliding movement of the movable box B in the X direction by the sliding drive mechanism 46b may be stopped, and the movable box B may be raised in the Z direction and then moved to -X. The direction moves and returns to the position shown in FIG. 5, and the conveyance operation|movement of the cut product Sa by the rotation of the above-mentioned moving body 44 and the movement in the +X direction is repeated many times.

Thus, in the present embodiment, when the transfer mechanism 47 transfers the cut product Sa, the moving body 44 that moves while being in contact with the cut product Sa separates the cut product Sa from the dicing table 12b. As a result, even when the size of the cut product Sa is reduced, as long as the cut product Sa separated by the moving body 44 is transferred by the transfer mechanism 47, it can be reliably conveyed without the complicated configuration of the conveying module 4. Multiple cut items Sa. That is, in this embodiment, it is difficult to generate|occur|produce the peeling defect of the cut product Sa from the cutting table 12b by negative pressure, and the breakage of the cut product Sa as conventionally.

Next, as shown in FIG. 4, the cleaning mechanism 2A supplies the cleaning liquid into the container 21 (inner cylinder 21b) by the liquid supply mechanism 23, so that the plurality of cut products Sa are accommodated in the container 21 (inner cylinder 21b) together with the cleaning liquid , the cleaning liquid exists inside the intermediate cylinder T through the fine holes 21c. Then, the container 21 (the inner cylinder 21b and the outer cylinder 28a) is rotated by the rotation mechanism 22 to clean the plurality of cut products Sa (cleaner). sequence). At this time, when the on-off valves Vb and Vc of the liquid discharge mechanism 24 and the air supply mechanism 25 are closed, the on-off valve Vf of the vacuum mechanism 29 is closed, the rotation mechanism 22 is driven, and the liquid supply mechanism 23 and the discharge mechanism are opened. On-off valves Va, Vd, Ve of the air mechanism 26 and the discharge mechanism 28 (refer to FIG. 3 ). In addition, the cleaning liquid including chips and other fine wastes passing over the upper end surface of the intermediate cylinder T through the fine holes 21c of the inner cylinder 21b is discharged by the discharge mechanism 28 , and the air in the inner cylinder 21b is discharged by the exhaust mechanism 26 .

Next, after cleaning the plurality of cut products Sa in the cleaning process, the cleaning liquid including the fine waste such as chips is discharged by the liquid discharge mechanism 24 and the discharge mechanism 28 , and the air supply mechanism 25 is used to discharge the cleaning liquid into the inner cylinder 21 b of the container 21 . While supplying gas, the plurality of cut products Sa are dried while rotating the container 21 (the inner cylinder 21b and the outer cylinder 28a) by the rotating mechanism 22 (drying step). At this time, the closed state of the on-off valve Vf of the vacuum mechanism 29 and the open state of the on-off valves Vd and Ve of the exhaust mechanism 26 and the discharge mechanism 28 are maintained, and the opening and closing of the liquid supply mechanism 23 is closed while the driving of the rotating mechanism 22 is continued. The valve Va opens the on-off valves Vb and Vc of the liquid discharge mechanism 24 and the air supply mechanism 25 (see FIG. 3 ).

Next, after closing the on-off valves Vb to Ve of the liquid discharge mechanism 24 , the air supply mechanism 25 , the exhaust mechanism 26 and the discharge mechanism 28 , and stopping the driving of the rotating mechanism 22 , the inner cylinder 21 b is rotated by the rotating reversing mechanism 27 . And it reversed up and down, and took out the some cut product Sa (extraction process). The extraction process will be described with reference to FIGS. 8 to 10 .

As shown in FIG. 8, the lid 30 is raised by the lid moving mechanism 31, and the inner cylinder 21b is raised by the inner cylinder up-down mechanism 27d in a state where the inner cylinder 21b is clamped by the clamping member 27a1 of the clamping mechanism 27a. , the inner tube 21b is detached from the intermediate tube T. Next, as shown in FIG. 9, by rotating the mechanism 27b moves the inner cylinder 21b to the upper side of the collection box 2C by rotating the inner cylinder 21b around the rotation axis 27b1. Next, as shown in FIG. 10, the inner cylinder 21b is reversed up and down around the reversing axis 27c1 by the inner cylinder reversing mechanism 27c, and the plurality of cut products Sa accommodated in the inner cylinder 21b are dropped to the collection box 2C and taken out. Then, the cleaned and dried cut product Sa stored in the recovery box 2C is recovered. In this way, since the inner tube 21b of the container 21 is turned upside down and the cut product Sa is taken out, the cut product Sa can be collected reliably.

[Other Embodiments]

Hereinafter, the same terms and symbols will be used for the same components as those in the above-described embodiments for easy understanding.

<1> As shown in FIGS. 11 to 12 , the transfer mechanism 47 may further include a storage portion 45b that accommodates a plurality of cut products Sa, and moves the storage portion 45b that accommodates a plurality of cut products Sa to the container 21, from the storage portion 45b The plurality of cut products Sa are transferred to the container 21 . More specifically, the transfer mechanism 47 in the present embodiment includes: a moving body 44 that is arranged on the dicing table 12b of the dicing mechanism 12 and can move while contacting a plurality of dicing products Sa formed by dicing the package substrate S; The movable box Bb supports the movable body 44 ; the accommodating part 45b can accommodate a plurality of cut products Sa; and the drive mechanism 46 drives the movable body 44 . These moving body 44, the accommodating part 45b, and the drive mechanism 46 are comprised in the movable box Bb as an integrated unit.

The moving body 44 includes: a rotating body 44a that rotates around a rotating shaft 44a1; a plurality of protrusions 44b that protrude radially outward from the periphery of the rotating body 44a; and a guide groove 44c that supports the rotating shaft 44a1 and guides the sliding of the rotating body 44a move. The plurality of protruding portions 44b are not easily deformed when they come into contact with the cut product Sa and are separated from the cutting table 12b, and are made of nylon, abutment that does not damage the cut product Sa. It is composed of resin materials such as butylene phthalate (PBT). The movable body 44 is configured to be able to move forward or backward on the cutting table 12b along the guide groove 44c by the slide drive mechanism 46b described later.

The movable case Bb is a frame which supports the rotating shaft 44a1 via a bearing (not shown) or the like, and the housing portion 45b is fixed. The movable box Bb is configured to be slidable in the X direction and the Z direction by a slide drive mechanism 46b described later.

The drive mechanism 46 includes: a rotary drive mechanism 46a for rotationally driving the moving body 44; and a sliding drive mechanism 46b for sliding the movable box Bb in the X direction and the Z direction and sliding the moving body 44 along the surface of the cutting table 12b move. The rotational drive mechanism 46a rotates the moving body 44 forward in the rotational direction R (counterclockwise in FIG. 11 ), and the rotational direction R crosses upward with respect to the traveling direction (+X direction). The slide drive mechanism 46b slides the movable body 44 (rotation shaft 44a1) along the guide groove 44c. The drive source of the drive mechanism 46 is constituted by an electric motor such as a servo motor or the like.

As a method of conveying the cut product Sa, as shown in FIG. 11, the movable box Bb is slid in the X direction and the Z direction by the sliding drive mechanism 46b, and the protrusion 44b of the movable body 44 is adjusted to be positioned at one end of the cutting table 12b. (the end in the -X direction) where the cut product Sa contacts. Then, the plurality of diced products Sa formed by dicing the package substrate S are brought into contact with the protruding portion 44b of the moving body 44 rotated by the rotary drive mechanism 46a and separated from the dicing table 12b. Next, in a state in which the protruding portion 44b of the moving body 44 is in contact with the cut product Sa, the slide drive mechanism 46b advances, and the cut product Sa is pushed out toward the accommodating portion 45b. At this time, the protrusion 44b of the moving body 44 rotated by the rotation drive mechanism 46a comes into contact with the next cut product Sa and is separated from the cutting table 12b. Repeat cutting table The cut product Sa on the 12b is separated and pushed out, and all the cut products Sa are finally accommodated in the accommodating portion 45b. In addition, in this embodiment, the conveyance operation|movement of the cut product Sa by the rotation of the above-mentioned moving body 44 and the movement in the +X direction may be repeated several times.

Next, as shown in FIG. 12 , the transport module 4 moves the movable box Bb (the storage part 45b in which the plurality of cut products Sa are stored) to the vicinity of the container 21 of the cleaning mechanism 2A so that the opening of the container 21 becomes the storage part 45b below. Next, the transport module 4 tilts the movable box Bb and vibrates the movable box Bb to drop the plurality of cut products Sa into the container 21 . In this way, if the cut product Sa is accommodated in the storage portion 45b before being transferred to the container 21, only the storage portion 45b in which the plurality of cut products Sa are accommodated may be moved, and the conveyance efficiency can be improved. Furthermore, if the movable box Bb is tilted and vibrated, a plurality of cut products Sa can be accommodated in the container 21 at a time, and therefore, compared with the case where the cut products Sa are conveyed by liquid flow and suction, the occurrence of the cut products Sa is less likely to occur. Poor recovery and damage. In addition, in the structure shown in FIG. 11-FIG. 12, it differs from the description of the conveyance of the cut product Sa after cutting and the storage in the container 21 in the above-mentioned embodiment. That is, instead of accommodating the plurality of cut products Sa from the other end 47c of the flexible tube 47a in the container 21 , the plurality of cut products Sa are directly accommodated in the container 21 from the movable box Bb of the transfer mechanism 47 .

<2> As shown in FIGS. 13 to 15 , the transfer mechanism 47 may further include a liquid flow path 48a through which a liquid such as water flows, and transfer the cut product Sa to the inner cylinder 21b in the liquid flow path 48a. More specifically, the transfer mechanism 47 in the present embodiment includes: a moving body 44 that is arranged on the dicing table 12b of the dicing mechanism 12 and can move while contacting a plurality of dicing products Sa formed by dicing the package substrate S; The movable box Ba supports the movable body 44; the accommodating part 45a can accommodate a plurality of cutting products Sa; the driving mechanism 46 drives the movable body 44; The inside is circulated to transfer the cut product Sa; the supply path 48b supplies the liquid into the movable box Ba; and the liquid supply mechanism 49 supplies the liquid to the liquid flow path 48a and the supply path 48b. The movable body 44 , the accommodating portion 45 a , the liquid flow path 48 a , the supply path 48 b , and the drive mechanism 46 constitute an integrated unit within the movable case Ba.

The moving body 44 includes: a rotating body 44a that rotates around a rotating shaft 44a1; a plurality of protrusions 44b that protrude radially outward from the periphery of the rotating body 44a; and a guide groove 44c that supports the rotating shaft 44a1 and guides the sliding of the rotating body 44a move. The plurality of protrusions 44b are not easily deformed when they come into contact with the dicing product Sa and are separated from the dicing table 12b, and are made of resin materials such as nylon and polybutylene terephthalate (PBT) which do not damage the dicing product Sa. The movable body 44 is configured to be able to move forward or backward on the cutting table 12b along the guide groove 44c by the slide drive mechanism 46b described later.

The movable case Ba is a frame which supports the rotating shaft 44a1 via a bearing (not shown) or the like, and the housing portion 45a is fixed. Moreover, in the movable tank Ba, the liquid flow path 48a is supported in the accommodating part 45a so that a closed state and an open state can be switched. The movable box Ba is configured to be slidable in the X direction and the Z direction by a slide drive mechanism 46b described later.

The drive mechanism 46 includes: a rotary drive mechanism 46a for rotationally driving the moving body 44; and a sliding drive mechanism 46b for slidingly moving the movable box Ba in the X direction and the Z direction and sliding the moving body 44 along the surface of the cutting table 12b . The rotational drive mechanism 46a rotates the moving body 44 forward in the rotational direction R (counterclockwise in FIG. 13 ), and the rotational direction R crosses upward with respect to the traveling direction (+X direction). The slide drive mechanism 46b guides the movable body 44 (rotation shaft 44a1 ) along the The groove 44c slides. In addition, the drive mechanism 46 includes a switching mechanism 46c that switches the liquid flow path 48a between the closed state and the open state. The drive source of the drive mechanism 46 is constituted by an electric motor such as a servo motor or the like.

As a method of conveying the cut product Sa, as shown in FIG. 13 , the movable box Ba is slidably moved in the X direction and the Z direction by the sliding drive mechanism 46b, and the protruding portion 44b of the movable body 44 is adjusted to be positioned at one end of the cutting table 12b. The position where the cut product Sa (the end in the -X direction) contacts. Then, as shown in FIG. 14, the liquid is supplied into the movable tank Ba by the liquid supply mechanism 49, and the liquid flow path 48a is switched to the closed state by the switching mechanism 46c, and the liquid is stored in the liquid flow path 48a by the siphon effect . Next, as shown in FIGS. 13 to 14 , the liquid flow path 48a is switched to the open state by the switching mechanism 46c, and the plurality of dicing products Sa formed by dicing the package substrate S and the moving body rotated by the rotary driving mechanism 46a are made The protrusion 44b of 44 contacts and separates from the cutting table 12b. Next, as shown in FIG. 15 , in a state in which the protruding portion 44b of the moving body 44 is in contact with the cut product Sa, the slide drive mechanism 46b advances, and the cut product Sa is directed toward the storage portion 45 together with the liquid flow of the liquid supply mechanism 49 . roll out. At this time, the protrusion 44b of the moving body 44 rotated by the rotation drive mechanism 46a comes into contact with the next cut product Sa and is separated from the cutting table 12b. The cut product Sa pushed out to the accommodating part 45 is transferred to the container 21 by the liquid flow in the liquid flow path 48a. Then, the protruding part 44b of the moving body 44 advances to the other end (end part in the +X direction) of the cutting table 12b, and finally all the cut products Sa are accommodated in the container 21. In addition, in this embodiment, the conveyance operation of the cut product Sa by the rotation of the above-mentioned moving body 44 and the movement in the +X direction may be performed repeatedly.

<3> In the above-described embodiment, the intermediate cylinder T is provided in the container 21, but the intermediate cylinder T may be omitted. In this case, the drain pipe 24a of the drain mechanism 24 is connected to the inner cylinder 21b. in addition, The intermediate cylinder T and the outer cylinder 28a may be omitted, the container 21 may be constituted only by the inner cylinder 21b, and the supply amount of the cleaning liquid may be controlled by the liquid supply mechanism 23 and the liquid discharge mechanism 24.

<4> In the above-mentioned embodiment, the inner cylinder 21b of the container 21 is rotated and reversed by the rotation reversing mechanism 27 to drop the plurality of cut products Sa, but the rotation reversing mechanism 27 may be omitted, and the Take out the cut product Sa in the container 21 by suction or the like.

<5> In the conveying module 4 of the above-mentioned embodiment, one end 47b of the flexible tube 47a is connected to the liquid supply mechanism 43, and a plurality of cut products Sa are conveyed by the liquid flow, but the liquid supply mechanism 43 may be omitted, and only the The plurality of cut products Sa are conveyed by suction by the vacuum mechanism 29 .

<6> In the above embodiment, the inner cylinder 21b and the outer cylinder 28a of the container 21 are rotated by the rotating mechanism 22, but only the inner cylinder 21b of the container 21 may be rotated, or the inner cylinder 21b of the container 21 and the outer cylinder 28a may be rotated. The intermediate cylinder T rotates, and the object of rotation is not particularly limited.

<7> In the above-mentioned embodiment, one end of the liquid supply pipe 23a is connected to the water supply pipe or the pure water supply pipe in the factory, and one ends of the liquid discharge pipe 24a and the discharge pipe 28b are connected to the sewer or the discharge pipe in the factory, However, a cleaning liquid tank can also be provided in the fluid supply and discharge mechanism 2B, and one end of the liquid supply pipe 23a, the liquid discharge pipe 24a and the discharge pipe 28b can be connected to the cleaning liquid tank to circulate the cleaning liquid. In this case, it is preferable to provide a filter mechanism for filtering the cleaning liquid in the liquid supply pipe 23a, the liquid discharge pipe 24a, and the discharge pipe 28b.

<8> The container 21 may not be inclined with respect to the direction of gravity, but may be straight along the direction of gravity standing posture. In addition, the bottom wall of the inner cylinder 21b may be formed flat without providing the inclined surface 21b1.

<9> The movable body 44 is provided with a plurality of protrusions 44b protruding around the rotating body 44a, but the protrusions 44b may be omitted and an elastic material such as rubber wound around the rotating body 44a may be provided. The rotating body 44 a constitutes the moving body 44 .

[Outline of the above-mentioned embodiment]

Hereinafter, the outline of the manufacturing method of the conveying module 4, the cutting device D, and the cutting product Sa described in the above-mentioned embodiment will be described.

(1) The characteristic structure of the conveying module 4 is that it includes: a moving body 44, which is arranged on the cutting table 12b and can move while being in contact with a plurality of cut products Sa formed by cutting the package substrate S; a driving mechanism 46, It drives the moving body 44; and a transfer mechanism 47 that transfers a plurality of cut products Sa;

According to this configuration, when the transfer mechanism 47 transfers the cut product Sa, the cut product Sa is separated from the cutting table 12b by the rotation of the moving body 44 that moves while being in contact with the cut product Sa. As a result, even when the size of the cut product Sa is reduced, as long as the cut product Sa separated by the moving body 44 is transferred by the transfer mechanism 47, it can be reliably conveyed without the complicated configuration of the conveying module 4. Multiple cut items Sa. Furthermore, when the movable body 44 is rotated, the separation control of the cut product Sa from the cutting table 12b is facilitated.

That is, in this structure, as in the past, the peeling failure of the cut product Sa from the cutting table 12b due to the negative pressure and the breakage of the cut product Sa are less likely to occur. In this way, it is possible to provide the conveying module 4 capable of reliably conveying a plurality of cut products Sa.

(2) The movable body 44 may further include: a rotating body 44a fixed to the rotating shaft 44a1; and a plurality of protrusions 44b projecting radially outward from the periphery of the rotating body 44a.

If the movable body 44 is provided with the plurality of protruding portions 44b as in this configuration, the plurality of protruding portions 44b can be reliably separated from the dicing table 12b by being brought into contact with the dicing product Sa.

(3) The rotation tangent direction and the moving direction of the moving body 44 at the position closest to the cutting table 12b in the rotating state may be the same.

The rotation tangent direction of the moving body 44 in the rotating state at the position closest to the cutting table 12b is the same as the moving direction. That is, the moving body 44 is rotated forward in the rotation direction R, and the rotation direction R crosses upward with respect to the traveling direction, so that the moving body 44 is moved forward while separating the cut products Sa toward the forward direction of the traveling direction. As a result, separation and push-out of the cut product Sa by the movable body 44 can be realized at the same time. Moreover, as mentioned above, the groove|channel is formed so that the rotary blade 12c2 may enter in the fixing surface of the dicing table 12b which fixes the package board|substrate S. In the present invention, since the movable body 44 is rotated in the rotation direction R, even if the movable body 44 moves forward, the cut product Sa is not easily caught in the groove, and the cut product Sa can be easily separated.

(4) The transfer mechanism 47 may further include a flexible tube 47a (suction path) that acts as a negative pressure. The cut product Sa which is in contact with the moving body 44 and separated from the cutting table 12b is transferred into the pipe 47a.

As in this configuration, when the cut product Sa is transferred in the flexible tube 47a, scattering of the cut product Sa can be prevented.

(5) The transfer mechanism 47 may further include an accommodating portion 45b for accommodating the cut product Sa that is in contact with the moving body 44 and separated from the cutting table 12b, and may include a accommodating portion 45b in which the cut product Sa is transferred and accommodated.

If the storage part 45b itself in which the cut product Sa is accommodated is transferred as in this configuration, scattering of the cut product Sa can be prevented.

(6) The transfer mechanism 47 may further include a liquid flow path 48a through which the liquid flows, and transfer the cut product Sa separated from the cutting table 12b in contact with the moving body 44 in the liquid flow path 48a.

As in this configuration, when the cut products Sa are transferred in the liquid flow path 48a, scattering of the cut products Sa can be prevented, and the liquid flow can prevent breakage of the cut products Sa as a buffer function between the cut products Sa.

(7) The characteristic structure of the cutting device D is that it includes: the conveying module 4 according to any one of the above (1) to (6); the cutting mechanism 12 for cutting the cut product Sa; and the cleaning mechanism 2A for the transfer mechanism 47 The delivered cut product Sa is cleaned.

In this configuration, the plurality of cut products Sa are transferred to the washing machine by the transfer mechanism 47 described above. Since the structure 2A is adopted, a plurality of cut products Sa can be reliably conveyed.

(8) The method for producing the cut product Sa is characterized in that the cut product Sa is produced using the cutting device D of the above (7).

In this method, since a plurality of cut products Sa are manufactured by the above-mentioned cutting device D, the manufacturing efficiency can be improved.

In addition, the structures disclosed in the above-mentioned embodiments (including other embodiments, the same below) can be applied in combination with the structures disclosed in the other embodiments, as long as there is no conflict. In addition, the embodiment disclosed in this specification is an illustration, and the embodiment of this invention is not limited to this, It can change suitably in the range which does not deviate from the objective of this invention.

[Industrial Applicability]

The present invention can be used for a conveying module, a cutting device including the conveying module, and a manufacturing method of a cut product, and is especially effective when the size of the cut product is as small as less than 2 mm square.

4: Conveying module

12: Cutting mechanism

12b: Cutting table

21: Container

29: Vacuum mechanism

29a: Vacuum Tube

43: Liquid supply mechanism

44: Moving body

44a: rotating body

44a1: Rotary axis

44b: Protrusion

46: Drive mechanism

46a: Rotary drive mechanism

46b: Sliding drive mechanism

47: Transfer mechanism

47a: Flexible tube (suction path)

47b: one end

47c: The other end

B: movable box

R: direction of rotation

S: package substrate

Sa: cut product

Vf: On-off valve

Claims (7)

A conveying module comprising: a moving body disposed on a cutting table and capable of moving while being in contact with a plurality of cut products formed by cutting a package substrate; a driving mechanism for driving the moving body; and a transfer mechanism for Transfer a plurality of the above-mentioned cut products; the above-mentioned transfer mechanism separates and transfers the above-mentioned cut products in contact with the above-mentioned moving body from the above-mentioned cutting table by the rotation of the above-mentioned moving body; The above-mentioned cut product which is in contact with the above-mentioned moving body and separated from the above-mentioned cutting table is transported in the liquid flow path. The conveying module of claim 1, wherein the movable body comprises: a rotating body fixed to the rotating shaft; and a plurality of protrusions protruding radially outward from the periphery of the rotating body. The conveying module according to claim 1 or 2, wherein the rotation tangent direction at the position closest to the cutting table in the rotating state of the moving body is the same as the moving direction. The conveying module according to claim 1 or 2, wherein the conveying mechanism includes a suction passage that acts as a negative pressure, and the conveying and upward movement are carried out in the suction passage. The said moving body contacts and separates the said cutting product from the said cutting table. The conveying module according to claim 1 or 2, wherein the transfer mechanism includes a accommodating portion for accommodating the cut product, and transfers the accommodating portion for accommodating the cut product, and the cut product comes into contact with the moving body and is removed from the cutting table separation. A cutting device comprising: the conveying module according to any one of claims 1 to 5; a cutting mechanism for cutting the cut product; and a cleaning mechanism for cleaning the cut product transferred by the transfer mechanism. A method of manufacturing a cut product, wherein the cut product is manufactured using the cutting device as claimed in claim 6.

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