TW201440976A - Moving method of holding means, electronic component holding device, and electronic component transportation device - Google Patents

Abstract

This invention is a suction nozzle displacement measuring method applicable in transfer of an electronic component, an electronic component holding device which utilizes the displacement measuring method, and an electronic component transportation device. An actuating motor (50) for moving forward and backward rotates to transmit the push force via a push rod (42) towards a suction nozzle (30). The displacement variation of a voice coil motor (47) caused by the contact of the suction nozzle (30) and the electronic component (D) during transfer is detected via a pushing force that is sustained by the push rod (42) at the suction nozzle (30) against the equivalent resisting force asserted by a facing rod (37). The measurement of the displacement amount of the suction nozzle (30) is measured until the change of motion at the voice coil motor (47) is detected.

Description

Method for moving holding means, electronic component holding device and electronic component handling device

The present invention relates to a method of moving a holding means for transferring an electronic component, an electronic component holding device using the same, and an electronic component conveying device including the same.

Electronic parts are parts used in electrical products, including semiconductor components. The semiconductor element can be exemplified by a transistor and an LED and an integrated circuit, and the electronic component can be exemplified by a resistor, a capacitor, or the like. This electronic component is generally carried on the transport path while being held by the holding means. In the transport path, various flow processing devices that apply flow processing are listed in parallel, and the holding means is lowered to the mounted stage, and the electronic components are detached from the stage. When the flow processing is completed, the electronic parts are picked up from the stage. , handle the handling in the next process. The process processing can be, for example, the processing of the front process of the block cutting, assembling, bonding (adhesion), and sealing, the electrical characteristic measurement of the device, classification, imprinting, visual inspection, and subsequent processing of the bale. Moreover, the positioning processing for processing each of these processes is also included in the process processing.

Each process processing device has an electronic component mounted thereon Loading platform. In order to apply the flow processing to the electronic component, it is necessary to accurately determine the stage of the holding means and the lowering position of the electronic component placed on the stage.

For example, in Patent Document 1, the descending position of the electronic component for the holding means is measured as follows. In other words, the adsorption nozzle is lowered toward the measurement stage and the substrate while the negative pressure is applied to the adsorption nozzle through the vacuum suction circuit, and the adsorption nozzle and the stage are placed on the load according to the flow rate of the air flowing through the vacuum suction circuit. The electronic parts of the station are abutted to obtain height position information.

[Practical Technical Literature] [Patent Literature]

Patent Document 1: Japanese Patent No. 3846262

When the lowered position is obtained, the actual nozzle is lowered and it is confirmed that the tip end of the nozzle and the electronic component are actually abutted, and the pressure is applied from the tip end portion of the nozzle to the electronic component by the abutment of the tip end of the nozzle and the electronic component. On the other hand, for the tip end portion of the nozzle, a reaction force from the electronic component is applied. In the case of an electronic component that is easily affected by an external force, there is a problem that deformation and cracking occur, etc., by applying a large external force from the tip end portion of the nozzle.

The present invention has been made to solve the problems of the above-described conventional techniques, and an object of the present invention is to provide a method for measuring arrival location information of a holding means for transferring electronic components, an electronic component holding device using the same, and It has its electronic parts handling device.

In order to solve the above problems, the present invention provides a method of moving a holding means of an electronic component holding device for holding an electronic component, comprising: measuring an arrival point of the holding means in advance, and obtaining an arrival point according to the arrival point a measuring step of the location information memory; and a step of operating the electronic component holding device to perform a movement control step of moving the holding means according to the arrival location information of the arrival point measured by the measuring step; in the electronic component holding device a rod connected to the voice coil motor and a forward/backward driving motor that transmits the force to the electronic component through the lever to the holding means, and in the measuring step, the holding means does not reach the electronic component In the state in which the forward/backward driving motor applies a propulsive force to the holding means to sink the rod into the voice coil motor, the counter thrust is generated by the voice coil motor, and the detection is performed by the aforementioned The aforementioned voice coil motor that occurs when the electronic component of the holding means arrives The relative floating of the rod is used to take the location of the relative floating detection as the arrival location, and the location information about the arrival location is used as the arrival location information memory. In the foregoing movement control step, according to the arrival location information The aforementioned holding means is moved.

The aforementioned electronic component holding device is in keeping with the aforementioned hand The part where the electronic parts of the segment abut is also provided with a rubber collet.

By measuring the current position of the holding means, the current position information about the current position and the arrival location information are successively compared, and the holding means is started to move, and the current position information and the arrival location information are identical. If the above holding means is stopped, it is also possible.

The speed information memory means for preliminarily storing the speed information of the initial movement speed of the forward/backward driving motor and the secondary speed information about the next speed information, and generating the relevant point of variation based on the arrival location information The means for generating the variation point information of the moving distance until the motor control unit starts the movement means based on the speed of the initial speed information, and if the current position information and the variation point information match The comparison means may be changed to a speed according to the secondary speed information, and if the current position information and the arrival point information match, the comparison means may be stopped.

a mounting table in which one or a plurality of the holding means are disposed, and a transport motor that intermittently rotates the mounting table at a predetermined angle. The holding means stops at a stop position where the forward/backward driving motor is provided, and the arrival point The information may be memorized in association with the information identified by each means of holding.

In the above-described moving position, since there is another device for transferring the electronic component, the holding means is a position that faces each of the holding means, and the arrival point information is: The information recognized by the combination of the opposing holding means and the other holding means, and the information showing the moving position may be stored in association with each other.

The initial speed information and the sub-speed information are rotational speed information indicating the number of rotations of the forward/reverse drive motor, and the arrival point information, the current position information, and the mutated point information are rotations for displaying the rotation amount of the forward/reverse drive motor. Quantity information is also available.

The rotation speed information is a pulse frequency given to the forward and backward drive motor, and the rotation amount information may be a pulse number applied to the forward/backward drive motor.

Further, an electronic component holding device using the above-described method of moving the holding means, and an electronic component conveying device including the same are also aspects of the present invention.

According to the present invention, when the electronic component nozzle that is easily affected by the external force is in contact with the contact, the arrival point information of the holding means can be measured, and the electronic component can be transported by moving the holding means according to the measured amount. Properly.

1‧‧‧Electronic parts handling device

11‧‧‧Transportation path

12‧‧‧Rotating table

13‧‧‧Transport motor

14‧‧‧Process Processing Unit

14a‧‧‧Location Correction Unit

15‧‧‧ stage

2‧‧‧Electronic parts holding device

30‧‧‧Adsorption nozzle

31‧‧‧ Arm

32‧‧‧ Bearing

33‧‧‧Compression spring

34‧‧‧Flange

35‧‧‧Connectors

36‧‧‧Rubber collet

37‧‧‧ Frame Department

38‧‧‧Contacts

39‧‧‧ Flat Department

4‧‧‧Advance and retreat drive department

40‧‧‧ Pressing body

41‧‧‧Linear guide

42‧‧‧ pole

43‧‧‧Frame

43a‧‧‧The lower wrist

43b‧‧‧上腕

44‧‧‧Cam followers

45‧‧‧ Bearing

46‧‧‧Compression spring

47‧‧‧ voice coil motor

47a‧‧‧ Magnet

47b‧‧‧annular coil

48‧‧‧Detection Department

48a‧‧ Air port

48b‧‧‧Cap

48c‧‧‧Pipe

48d‧‧‧ pressure gauge

48e‧‧‧Air pressure circuit

48f‧‧‧ flowmeter

49f‧‧‧ restricted orifice

49‧‧‧Light sensor

50‧‧‧Advance and retraction drive motor

51‧‧‧Cylinder cam

52‧‧‧Encoder (torque sensor)

6‧‧‧Control Department

60‧‧‧Mode Switching Department

60a‧‧ Input Department

61‧‧‧Motor Control Department

62‧‧‧Speed information memory means

63‧‧‧VCM Control Department

64‧‧‧Contact Discrimination Department

65‧‧‧Location location location means

66‧‧‧ means of generation

67‧‧‧Variation point information memory means

68‧‧‧Measurement means

69‧‧‧Comparative means

70‧‧‧Nozzle Identification Department

80, 81‧‧‧ Rotary Workbench

9‧‧‧Terminal device

91‧‧‧ wafer

92‧‧‧Tray

100‧‧‧Photographic Optics

[First FIG. 1] A plan view showing an overall configuration of an electronic component conveying device of the present embodiment.

[Fig. 2] shows the entirety of the electronic component handling device of the present embodiment Side view of the composition.

[Fig. 3] A side view showing the overall configuration of the electronic component holding device of the present embodiment.

[Fig. 4] A cross-sectional view showing the configuration of the tip end portion of the holding device.

[Fig. 5] A side view showing the internal structure of the voice coil motor.

[Fig. 6] An enlarged side view showing an external configuration of a detecting portion provided in the electronic component holding device.

[Fig. 7] A view showing the overall configuration of the detecting unit.

[Fig. 8] A view showing the overall configuration of the detecting unit.

[Fig. 9] A block diagram showing a control unit of the electronic component holding device.

[Fig. 10] A flowchart showing a control operation of a control unit of the electronic component holding device.

[Fig. 11] A side view showing a force applied to each part of the electronic component holding device in a normal state.

[Fig. 12] A side view showing a state of a detecting portion in a normal state.

[Fig. 13] A side view showing a force applied to each portion of the electronic component holding device when the holding means comes into contact with the electronic component.

[14] A side view showing a state of the detecting portion when the holding means comes into contact with the electronic component.

[Fig. 15] A flowchart showing a control operation of the control unit of the electronic component holding device.

[16th] FIG. 16 shows an electronic component handling device in the second embodiment Side view of the overall composition.

[Fig. 17] A block diagram showing a control unit of the electronic component conveying device.

[Embodiment 18] A side view showing an overall configuration of an electronic component conveying device in a third embodiment.

[First Embodiment]

Hereinafter, an embodiment of the electronic component conveying device of the present invention will be described in detail with reference to the drawings.

(Electronic parts handling device 1)

As shown in FIGS. 1 and 2, the electronic component conveying device 1 is a conveyance path 11 for forming the electronic component D, and sequentially transports the electronic component D to the respective flow processing units 14 arranged along the conveyance path 11. This conveyance path 11 is formed by the turntable 12 and the electronic component holding device 2. The center of the turntable 12 is supported by the rotation shaft of the conveyance motor 13, and is intermittently rotated at a predetermined angle in accordance with the drive of the conveyance motor 13. The transport motor 13 is, for example, a direct drive motor.

The electronic component holding device 2 is a device that transfers the electronic component D to the flow processing unit 14, and includes an adsorption nozzle 30 that holds the electronic component D. The adsorption nozzles 30 are provided in plural numbers such that the outer circumference of the turntable 12 is equidistant from the circumference. Specifically, it is supported The arm 31 is fixed to the outer circumference of the rotary table 12. The adsorption nozzle 30 is moved in parallel along the outer circumference of the rotary table 12 by intermittently rotating the rotary table 12. The arrangement interval of the adsorption nozzles 30 is equivalent to the rotation angle of one pitch of the rotary table 12. In other words, the transport motor 13 intermittently rotates the turntable 12 at the same pitch as the arrangement interval of the adsorption nozzles 30.

The adsorption nozzle 30 is a parallel movement along the outer circumference of the turntable 12, and the rotary table 12 is raised and lowered perpendicularly to the magnification plane. In other words, the electronic component holding device 2 further includes an advance/retract drive unit 4 that provides a propulsive force in the ascending and descending direction to the adsorption nozzle 30. The installation position is directly above the stop position of the adsorption nozzle 30, and the advance/retract drive unit 4 is a block that is placed in the stationary state. The advancing and retracting drive unit 4 includes a pressing body 40 that presses the adsorption nozzle 30 from directly above, and a linear guide 41 that slidably supports the pressing body 40. The linear guide 41 is fixed directly above the stop position of the adsorption nozzle 30. The pressing body 40 is positioned above the rotating table 12 by being supported by the linear guide 41.

In the electronic component conveying apparatus 1, the adsorption nozzles 30 that hold the electronic component D are sequentially moved toward the stop position set at the circumferential equidistant position in accordance with the intermittent rotation of the rotary table 12. When the adsorption nozzle 30 is at the stop position, the advance/retract drive unit 4 that is present above the adsorption nozzle 30 presses the adsorption nozzle 30 by the pressing block 40 to lower the adsorption nozzle 30 to the arrival point. In the descending purpose of the adsorption nozzle 30, there is a flow processing unit 14. The flow processing unit 14 is, for example, a position correcting unit 14a.

(Electronic parts holding device 2)

FIG. 3 is a side view showing the overall configuration of the electronic component holding device 2 provided in the electronic component conveying device 1. The electronic component holding device 2 shown in FIG. 3 is a device that transfers the electronic component D to the flow processing unit 14. In the present embodiment, the flow processing unit 14, exemplified as the position correcting unit 14a.

In the electronic component holding device 2, the lowering operation of the adsorption nozzle 30 is terminated by a predetermined time. The time point at which the lowering operation is completed is a time point at which an appropriate load can be applied to the electronic component D held by the adsorption nozzle 30 and the stage 15 of the position correcting unit 14a. The appropriate load is, for example, a rough zero Newton. In order not to give excessive pressure to the electronic component D, it is not a cause of damage, and in order to prevent the positional deviation of the electronic component D. Therefore, the electronic component holding device 2 preliminarily measures the arrival point information indicating that the adsorption nozzle 30 has arrived at the arrival point, and drives the suction nozzle 30 to reach the arrival point based on the arrival point information to drive the lowering operation.

(Adsorption nozzle 30)

The adsorption nozzle 30 is slidably formed by an external force from the advancement/retraction start position to the arrival point. The advance/retract start position is the position of the adsorption nozzle 30 in the case where the external force is not applied. The arrival point is a position of the adsorption nozzle 30 in a case where a certain external force is applied to the sliding direction of the adsorption nozzle 30.

The adsorption nozzle 30 is an arm 31 that is supported by a height at which the mounting position of the electronic component D on the stage 15 is fixed, and is located on the stage 15 The advance and retreat start position above. The arm 31 extends substantially parallel to the stage 15, and a bearing 32 perpendicular to the stage 15 is disposed at the tip end. In the adsorption nozzle 30, the tip end having the opening is inserted into the bearing 32 toward the stage 15, and the arm 31 is slidably supported from the advancement/retraction start position to the arrival point.

At the upper edge of the bearing 32 of the arm 31, a compression spring 33 is provided. The compression spring 33 is a protruding portion that is inserted into the adsorption nozzle 30. The protruding portion of the adsorption nozzle 30 is a portion that protrudes from the upper edge of the bearing 32. In the rear end side of the adsorption nozzle 30, a flange 34 is provided, through which the compression spring 33 urges the adsorption nozzle 30 in a direction away from the stage 15. When the external force directed to the stage 15 of the adsorption nozzle 30 is released, the adsorption nozzle 30 is moved away from the stage 15 and moved to the advance/retract start position.

The adsorption nozzle 30 is a hollow pipe inside and has an opening at the tip end. The inside of the pipe is connected to the air pressure circuit through the joint 35 connected to the rear end of the adsorption nozzle 30, and the electronic component D is adsorbed by the tip end by the occurrence of vacuum, and the electronic component D is detached by vacuum destruction. The electronic component D may be detached by the liberation of the atmosphere, and the vacuum destruction and the liberation of the atmosphere may be sequentially switched to separate the electronic component D.

In the tip end portion of the adsorption nozzle 30, the rubber collet 36 of the fourth drawing can be provided at the tip end portion. This rubber collet 36 has an elastic force in such a manner that it is bent by the pressure in the extending direction of the adsorption nozzle 30. The rubber collet 36 is a force that absorbs the contact generated by the contact with the electronic component D by the elastic force.

As shown in Fig. 4, the rubber collet 36 is: cylindrical The frame portion 37 and the substantially conical contact portion 38 are integrally formed. The contact portion 38 is provided on the side of the frame portion 37 that faces the electronic component D. The apex portion of the contact portion 38 is provided with a flat portion 39. When the adsorption nozzle 30 holds the electronic component D, it is in contact with the electronic component D by a wide area.

The inside of the rubber collet 36 is in communication with the air pressure circuit of the adsorption nozzle 30, and the electronic component D is adsorbed by the tip end by the occurrence of vacuum, and the electronic component D is detached by vacuum destruction. The rubber collet 36 is provided so as not to leak air from the contact portion, and is in close contact with the adsorption nozzle 30. For example, a recess is provided inside the rubber collet 36. This concave portion is formed by combining the convex portion provided at the tip end portion of the adsorption nozzle 30 to close the rubber collet 36 and the adsorption nozzle 30. In order to make the adhesion, the diameter of the convex portion of the adsorption nozzle 30 may be larger than the diameter of the concave portion of the rubber collet 36.

(Advance and retract drive unit 4)

The advancing and retracting drive unit 4 is composed of a pressing body 40 and a forward/backward driving motor 50. The pressing body 40 mainly transmits the propulsive force generated by the advancing and retracting drive motor 50 to the adsorption nozzle 30.

The pressing body 40 is slidably supported by the linear guide 41 in a direction in which the suction nozzle 30 is pressed. The track portion of the linear guide 41 extends in a direction perpendicular to the stage 15, and the height is fixed. At the lower end of the pressing body 40, a rod 42 is extended. The rod 42 is disposed to face the rear end of the adsorption nozzle 30, and the adsorption nozzle 30 and the axis are common.

This pressing body 40 has a rough The shape of the frame 43. The pressing body 40 is supported by the linear guide 41 by the back portion of the frame 43, and the rod 42 is provided on the lower arm 43a of the frame 43. The lower arm 43a of the frame 43 is horizontally extended with respect to the mounting surface of the stage 15, and the rod 42 is attached to the intersection of the tip end and the axis of the adsorption nozzle 30. The rod 42 is attached perpendicularly to the extending direction of the lower arm 43a, and the front end and the rear end are protruded from the upper and lower sides of the lower arm 43a.

In the upper wrist 43b of the frame 43, a cam follower 44 is provided thereon. The cam follower 44 is provided to convey the pressing force of the advancing and retracting drive motor 50 and to press the pressing body 40 down. The forward/reverse drive motor 50 is, for example, a servo motor. A cylindrical cam 51 is fixed to the rotation shaft of the forward/backward drive motor 50. The cylindrical cam 51 and the cam follower 44 abut, and the cam follower 44 is driven along the cam surface of the cylindrical cam 51.

The pressing body 40 further includes a detecting mechanism for sensing contact with the electronic component D caused by the movement of the adsorption nozzle 30. This detecting means detects the sliding mechanism of the lever 42, the voice coil motor 47 that applies the force to the lever 42 and the detecting portion 48 for the relative movement of the voice coil motor 47 of the lever 42. Further, for the relative floating of the voice coil motor 47, in other words, the rod 42 is buried toward the voice coil motor 47.

Specifically, a bearing 45 that is perpendicular to the mounting surface of the stage 15 is disposed in the lower arm 43a of the frame 43. The rod 42 is inserted into the bearing 45 so as to be slidable in the axial direction of the rod 42. And, in the lower surface of the lower wrist 43a of the frame 43, there is provided to have the rod 42 from the voice coil motor 47 The pressing force of the compression spring 46 assists the propulsive force of the voice coil motor 47.

The voice coil motor 47 is fixed to the lower surface of the upper arm 43b of the frame 43. The voice coil motor 47 supports the rear end side of the rod 42 to move the rod 42 in and out. The voice coil motor 47 is a linear motor in which a current and a propulsive force are proportional. As shown in Fig. 5, the voice coil motor 47 has a magnet 47a and a loop coil 47b.

The detecting unit 48 detects the floating of the rod 42 by directly detecting the change in the air pressure in the pipe 48c. As shown in Fig. 6, the lid portion 48b is a part of the pipe, and the rod 42 is covered to hold the sealed state in the pipe 48c before being lifted. For example, as shown in Fig. 7, in this pipe 48c, a pressure gauge 48d for detecting the inside is provided, and the internal pressure is monitored. When the rod 42 is lifted, the lid portion 48b provided on the rod 42 also floats, and the sealed state in the pipe 48c is released, and the internal pressure changes. In the pressure gauge 48d, the change in this pressure is detected.

Further, the detecting portion 48 detects the floating of the rod 42 only by directly detecting the pressure in the pipe 48c, and detects the floating of the rod 42 by detecting the inflow or outflow of air. can. For example, as shown in Fig. 8, a flow meter 48f is provided inside the pipe 48c. The flow meter 48f has, for example, a differential pressure detecting portion that protrudes the restriction hole 48g in the pipe 48c and detects the differential pressure in two fields in which the restriction hole 48g is divided.

The forward/reverse drive motor 50 controls the advancement and retreat of the adsorption nozzle 30 and the advance and retreat speed based on an instruction from the control unit 6, a rotation speed, a rotation amount, and a torque, which will be described later, to cause the propulsion force to the adsorption nozzle 30.

(Control unit 6)

Fig. 9 is a block diagram showing the configuration of the control unit 6 of the electronic component holding device 2 having such a configuration. The control unit 6 includes a mode switching unit 60, a motor control unit 61, a speed information memory means 62, a VCM control unit 63, a contact determination unit 64, an arrival location information storage means 65, and a generation means 66. And the mutation point information memory means 67, the measuring means 68, the comparing means 69, and the speed memory means 70.

The mode switching unit 60 switches between the arrival point measurement mode in which the arrival point of the adsorption nozzle 30 is measured and the information on the position of the measured arrival point, that is, the arrival point information, based on the input from the input unit 60a. The controlled movement control mode of the movement of the nozzle 30. The input unit 60a is an interface for accepting input from a user, and various input devices such as a keyboard, a mouse, a touch panel, and a liquid crystal terminal (terminal) can be used.

The motor control unit 61 controls the rotational speed, the amount of rotation, and the torque of the forward/backward drive motor 50. The rotation speed is the speed of the rotation angle, and the rotation amount is the rotation angle. At this time, the feedback torque, the rotational speed, and the amount of rotation, and the rotational speed, the amount of rotation, and the torque detected by the encoder 52 or the torque sensor 52 of the forward/backward drive motor 50 are compared. can.

The speed information memory means 62 is a memory that is related to the initial speed information of the initial moving speed and the next speed information when the motor control unit 61 drives the forward/backward driving motor 50. Speed information. The initial moving speed is the driving speed of the forward and backward driving motor 50 when the adsorption nozzle 30 moves from the advance/retract start position. The next speed information is the drive speed of the forward/backward drive motor 50 after the adsorption nozzle 30 has moved by a predetermined amount from the advance/retract start position. This speed information is represented by the rotational speed of the motor or the pulse frequency.

The VCM control unit 63 controls the thrust of the voice coil motor 47. The contact determination unit 64 inputs a signal from the detection unit 48 and determines the contact between the electronic component D and the adsorption nozzle 30.

The arrival location information memory means 65 is an information about the arrival location information of the location information about the arrival location. The arrival location information memory means 65 is a memory means using a non-volatile memory or the like. The arrival location information is represented by the number of rotations of the forward and backward drive motor 50. This amount of rotation is a value indicating that the suction nozzle 30 is moved from the advance/retract start position until the float of the lever occurs, and the forward/backward drive motor 50 is rotated several times.

The generating means 66 generates the mutated point information based on the arrival location information. The mutated point information is position information of a variation point that changes the moving speed of the adsorption nozzle 30. The variability point is set between the start and retreat start position and the arrival point. The variability point is that the shock at the time of abutment is relaxed in a range where the influence on the movement time of the adsorption nozzle 30 is small until the adsorption nozzle 30 comes into contact with the electronic component D. Therefore, the variation point is preferably located near the arrival point. The position information of the mutated point is represented by the amount of rotation obtained by the difference of the predetermined amount of rotation from the amount of rotation as the information of the arrival point information. Variation point The memory means 67 is a memory of the mutated point information generated by the generating means 66.

The measuring means 68 measures the current position information of the adsorption nozzle 30. The current location information is the location information showing the adsorption nozzle 30, which is now present at that location. The current position information is indicated by a value indicating that the drive motor 50 is rotated several times in order to move the suction nozzle 30 from the advance/retract start position to the current position.

The comparison means 69 is a successive comparison: current location information, arrival location information or variability information. The comparison of location information, arrival location information or variability information is achieved by obtaining the difference between the current location information and the arrival location information, the current location information, and the variation point information.

Further, the control unit 6 may be provided as a part of the control unit of the electronic component conveying device 1, and may be provided as a part of the configuration of the electronic component holding device 2.

(effect)

The operation of the electronic component holding device 2 having such a configuration will be described with reference to Figs. 10 to 16 . In the electronic component holding device 2, (1) measurement of the arrival point where the adsorption nozzle 30 and the electronic component D come into contact with each other, and (2) control for moving the adsorption nozzle 30 from the advance/retract start position to the arrival point.

(1) The measuring point of the arrival point where the adsorption nozzle 30 and the electronic component D abut law

FIG. 10 is a flowchart showing a method of measuring the arrival point at which the adsorption nozzle 30 and the electronic component D come into contact with each other. Hereinafter, the state of the electronic component holding device 2 will be described together with the control operation of the control unit 6.

Initially, the mode switching unit 60 sets the arrival point measurement mode based on the input from the input unit 60a (step S01). When the arrival point measurement mode is set, the rotary table 12 is rotated, and the adsorption nozzle 30 is disposed at the stop position. In the stage 15 of the position correcting unit 14a, the electronic component D to be transported is placed. In the arrival point measurement mode, the adsorption nozzle 30 stopped at the stop position is measured, and the electronic component D placed on the stage 15 is moved, and the arrival point where the adsorption nozzle 30 and the electronic component D come into contact is measured.

Next, in the moving phase of the adsorption nozzle 30, in step S02, the motor control unit 61 starts driving of the advance/retract drive motor 50. The motor control unit 61 generates a force for lowering the suction nozzle 30 and the rod 42 through the rod 42 in the forward/backward drive motor 50.

By the driving of the forward-retracting drive motor 50, the cylindrical cam 51 rotates, and the cam follower 44 that abuts against the cam surface of the cylindrical cam 51 receives the thrust force toward the stage 15. The propulsive force toward the stage 15 is a propulsive force that is the pressing body 40 that faces the adsorption nozzle 30, and the pressing body 40 descends along the linear guide 41. When the pressing body 40 is lowered, the rod 42 abuts against the rear end of the adsorption nozzle 30. The motor control unit 61 drives the advancing and retracting drive motor 50 to further press the suction nozzle 30 against the suction nozzle 30. The adsorption nozzle 30 is pushed against the compression spring 33 The force began to decline.

At this time, as shown in Fig. 11, the adsorption nozzle 30 receives the downward force Fr from the rod 42, and the rod 42 receives the reaction force Fcr. This reaction force Fcr is equivalent to the elastic force of the compression spring 33 that is urged in the extending direction when the compression spring 33 that pushes the adsorption nozzle 30 is provided. Further, in the case where the compression spring 46 that presses the rod 42 is provided, the reaction force Fcr received by the rod 42 is equivalent to the force for subtracting the elastic force of the compression spring 46 from the elastic force of the compression spring 33 of the adsorption nozzle 30. Resistance.

In the descending stage of the adsorption nozzle 30, in step S03, the VCM control unit 62 starts the driving of the voice coil motor 47, and causes the lever 42 to generate the counter thrust Fotop equivalent to the reaction force Fcr. The drive of the voice coil motor 47 is started simultaneously with the thrust of the forward/backward drive motor 50 or before the rod 42 abuts against the adsorption nozzle 30. The counter thrust Fotop equivalent to the reaction force Fcr is the same as the reaction force Fcr and the force, but the thrust is opposite. Strictly, the compression spring 33 is compressed, and the reaction force Fcr is increased. However, the VCM control unit 62 may control the anti-pressure Fopp to increase in proportion to the reaction force Fcr.

At this time, as shown in Fig. 12, since the rod 42 receives the reaction force Fcr, the voice coil motor 47 receives the counter thrust Fopp, so the force acting on the rod 42 is balanced, and the rod 42 is maintained in equilibrium, The voice coil motor 47 will advance and retreat. Further, as shown in Fig. 12, when the balance state of the rod 42 is maintained, the cover portion 48b is covered in the air port. 48a, there is no inflow or outflow of air from the air port 48a.

Next, in the contact determination stage, in step S04, the contact determination unit 64 determines whether or not the detection unit 48 has detected the floating of the rod 42.

In the case where the adsorption nozzle 30 does not reach the electronic component D, the rod 42 is maintained in an equilibrium state. That is, since there is no relative floating of the voice coil motor 47 generated by the lever 42, the cover portion 48b is in a state of covering the air port 48a. Therefore, the value of the pressure gauge 48d does not change, and the detection unit 48 outputs the constant value to the contact determination unit 64. The contact determination unit 64 compares the threshold value stored in advance with the output value of the detection unit 48, and confirms that the output value is a constant value, and the confirmation is that the floating of the lever 42 is not detected.

On the other hand, as shown in Fig. 13, the adsorption nozzle 30 is lowered, and when it comes into contact with the electronic component D placed on the stage 15, the resistance Fd is applied to the rod 42 through the adsorption nozzle 30. The resistance Fd is a force such as the weight of the adsorption nozzle 30 itself and the friction generated when the rod 42 is operated when the rod 42 is in contact with the electronic component D. That is, this force is a very weak force when the adsorption nozzle 30 is compared with the lowering force Fr from the rod 42. Therefore, an excessive load can be prevented from being applied to the electronic component D by contact with the electronic component D.

The voice coil motor 47 is |Fopp|<|Fcr+Fd|, because it gives the counter-force Fopp for |Fcr|=|Fopp| for the rod 42, and the floating force Ff is generated for the rod 42 to make the balance state collapse. Therefore, the rod 42 floats relative to the voice coil motor 47, and faces the opposite side of the stage 15. Move to.

As shown in Fig. 14, when the rod 42 floats, the lid portion 48b covering the air port 48a is away from the air port 48a. In the air port 48a that is opened from the lid portion 48b, air flows in or out, and the value of the pressure gauge 48d changes. The contact determination unit 64 confirms the output value as a change value by comparing the threshold value and the output value of the detection unit 48, and the detection is detected as the floating of the rod 42.

When the lifting of the lever 42 is not detected (steps S04 and No), the motor control unit 61 continues the lowering of the suction nozzle 30 until the lever is floated. When the floating of the rod 42 is detected during the lowering of the adsorption nozzle 30 (step S04, Yes), it is shown that the adsorption nozzle 30 is in contact with the electronic component D. When the floating of the lever 42 is detected, the driving of the advance/retract drive motor 50 is stopped (step S05). Thereby, excessive application of a load to the electronic component D is prevented.

When the floating of the lever 42 is detected, the motor control unit 61 transmits the amount of rotation of the driving motor to the arrival point information memory means 65. In the arrival location information memory means 65, the received rotation amount is stored as the arrival location information. (Step S06).

(2) Control of movement of the adsorption nozzle 30 from the start position to the arrival point

Fig. 15 is a flowchart showing a movement control mode in which the adsorption nozzle 30 is moved to the arrival position with reference to the arrival point information of the arrival point stored in the arrival point information memory means 65.

In the movement control mode, initially, the mode switching unit 60 sets the arrival point measurement mode in accordance with the input from the input unit 60a (step S11). The suction force of the advance/retract drive motor 50 is applied to the adsorption nozzle 30 disposed at the stop position, and the electronic component D held by the adsorption nozzle 30 is lowered to the stage 15 . At this time, the motor control unit drives the advance/retract drive motor 50 based on the initial speed information (step S12). The initial speed information is memorized in the speed information memory means 62, and is called by the motor control unit in the form of the speed information memory means 62.

In step S13, it is determined by comparison means 69 whether or not the current position information of the adsorption nozzle 30 coincides with the arrival location information. The current position information of the adsorption nozzle 30 is measured by the measuring means 84. The comparison means 69 compares the current position information of the adsorption nozzle 30 with the arrival location information to determine whether or not they match. In the case of inconsistency, the driving of the advance/retraction drive motor 50 is continued from the initial speed (NO in step S13).

When the current position information and the arrival point information of the adsorption nozzle 30 are the same, the drive speed of the advance/retract drive motor 50 is changed to the next speed (step S14). The secondary speed is stored in the speed information memory means 62, and is called by the motor control unit in the form of the speed information memory means 62.

In step S15, it is determined by comparison means 69 whether or not the current position information of the adsorption nozzle 30 coincides with the mutated point position information. The current position information of the adsorption nozzle 30 is measured by the measuring means 84 and output to the comparison means 69. Comparison means 69 is a comparison: adsorption nozzle 30 The current location information and the location information of the mutation point are judged whether they are consistent. In the case of inconsistency, the driving of the advance/retract drive motor 50 is continued from the initial speed (NO in step S15).

When the current position information and the arrival point information of the adsorption nozzle 30 are identical, the advance/retract drive motor 50 is stopped (step S16).

(effect)

As described above, in the present embodiment, in the arrival point measurement mode, the arrival point where the adsorption nozzle 30 and the electronic component D abut are measured, and the arrival location information is memorized. In the movement control mode, based on the arrival point information, the suction nozzle 30 moves from the advancement/retraction start position to the arrival point. Thereby, the following effects can be achieved.

(1) In the arrival point measurement mode, the voice coil motor 47 functions as a configuration for detecting the contact between the adsorption nozzle 30 and the electronic component D. By applying the counter thrust Fotop equivalent to the reaction force Fcr received by the rod 42 to the rod 42, the load applied to the total of the rod 42 becomes 0 Newton. Thereby, the resistance Fd generated when the adsorption nozzle 30 and the electronic component D are in contact with each other is perceived.

The resistance Fd is a very weak force when the adsorption nozzle 30 is compared with the lowering force Fr from the rod 42. This resistance Fd can be perceived by making the load applied to the total of the rod 42 0 Newtons. Therefore, the load at the time of contact between the rod 42 and the electronic component D can be made low load, and it is not correct. Excessive pressure is applied to the electronic component D and does not become a cause of damage. Also, the positional deviation of the electronic component D can be prevented.

The arrival point information of the adsorption nozzle 30 when this resistance Fd is sensed is memorized. Since the arrival point information of the adsorption nozzle 30 can be displayed by a numerical value such as the amount of rotation of the forward/backward drive motor 50, the measurement of the amount of movement of the nozzle can be simplified without depending on human feeling or the like.

In the case where the rotary table 12 is provided with the plurality of adsorption nozzles 30, the electronic component conveying device 1 stores the arrival point information of the respective adsorption nozzles 30 in the arrival point information memory means 62. Therefore, when there is an error in the length of each nozzle or the like, when the movement amount is different by each of the adsorption nozzles 30, the arrival point information of the adsorption nozzle 30 is also memorized in advance. According to the arrival location information, the adsorption nozzle 30 moves from the advancement/retraction start position to the arrival point. Therefore, when the electronic component conveying device 1 has the plurality of adsorption nozzles 30, the amount of movement of each adsorption nozzle 30 can be individually memorized and managed.

When the type of the adsorption nozzle 30 and the disk are changed for each product, the information of the arrival point of each of the adsorption nozzles 30 and the disk after the exchange is measured as a new arrival location information memory. It is also possible to change the type of the adsorption nozzle 30 and the disk.

(2) In the movement control mode, the movement point is reached at the time point when the adsorption nozzle 30 arrives from the advancement/retraction start position to the arrival point in accordance with the arrival point information. At this time, if there is play between the adsorption nozzle 30 and the electronic component D at the arrival point, the electronic component D is adsorbed. The impact at the time is applied to the adsorption nozzle 30. This impact is a cause of abrasion of the tip end of the adsorption nozzle 30. Further, even if the clearance between the adsorption nozzle 30 and the electronic component D at the arrival point is 0, a large force is applied between the adsorption nozzle 30 and the electronic component D, and the suction nozzle 30 is also moved by the force. Tip wear. At the time point when the adsorption nozzle 30 arrives at the point of arrival, the play of the adsorption nozzle 30 and the electronic component D is 0, and in the adsorption nozzle 30, only the weak force is applied to the electronic component D, that is, the magnitude of the resistance Fd. force. Therefore, the abrasion of the tip end of the adsorption nozzle 30 does not occur.

(3) In order to reduce the influence of the contact between the adsorption nozzle 30 and the electronic component D, when the rubber collet 36 is provided at the tip end of the adsorption nozzle 30, the rubber collet 36 is applied with the electronic component D at the time of abutment. The force causes the rubber collet 36 to deform. Therefore, in the measurement of the arrival point of the adsorption nozzle, it is difficult to accurately measure the arrival point of the adsorption nozzle by the deformation of the rubber collet 36.

In the present embodiment, when the rubber collet 36 is provided at the tip end of the adsorption nozzle, the resistance Fd can be set to a size at which the rubber collet 36 is not bent. Therefore, the rubber collet 36 is not bent, the arrival point can be measured, and the lowering action of the adsorption nozzle 30 is terminated by a predetermined time point based on the information of the arrival place. Therefore, it is not necessary to adjust the amount of movement of the nozzle in consideration of the bending of the rubber collet 36. In the conventional case, the deformation state of the rubber collet 36 is visually confirmed, and the amount of movement of the nozzle is measured. However, in the present embodiment, it is not necessary for the skilled worker to adjust the adjustment by the visually confirmed manpower that takes time, and it becomes correct. The arrival point of the adsorption nozzle 30 is measured.

Further, in the small-scale production of a plurality of varieties, the exchange of the types of the electronic parts D is frequently performed. In particular, if the switching of the small batch is frequent, the adjustment of the adsorption nozzle takes time, and the operation time of the electronic component holding device is lowered. In the present embodiment, even in the case where the rubber collet 36 is used, it is possible to accurately measure the arrival point. Therefore, even if the switching of the type of the electronic component D occurs frequently, the adjustment can be performed for a short time each time, and the decrease in the operation time of the electronic component holding device can be suppressed.

(4) When the electronic component holding device is used for a long period of time, the tip end of the adsorption nozzle 30 is worn. Thereby, the adsorption nozzle 30 and the electronic component D cannot be contacted at the time of moving up to the arrival point. In this case, at the time of maintenance, the measurement of the arrival location is re-executed, and the location information of the new arrival location is updated as the arrival location information. In the movement control mode, the control of the advancing and retracting drive motor 50 is performed in accordance with the new arrival point, and the adsorption nozzle 30 is moved to a new arrival point.

When the type of the electronic component D to be transported is changed, it is necessary to perform measurement of the arrival point in cooperation with the new electronic component D. In this case, the measurement of the arrival location is also re-executed. In the movement control mode, the advance/retraction drive motor 50 is controlled based on the new arrival point information, and the adsorption nozzle 30 is moved in cooperation with the new electronic component D. Therefore, when the type of the electronic component D to be transported is changed, the adsorption nozzle 30 may be measured by measuring the arrival point. Move it correctly.

In the present embodiment, since the arrival point of the adsorption nozzle 30 can be detected very easily and accurately, even when the maintenance and the type of the electronic component D are changed, the amount of movement of the adsorption nozzle can be determined in a short time. .

(5) Further, the moving speed may be changed by the time point when the adsorption nozzle 30 moves from the advancement/retraction start position to the variability point. In other words, the initial speed of the advancing and retracting start position from the adsorption nozzle 30 is shifted, and the sub-speed is changed at the variability point.

The position information of the mutated point is stored in the mutated point information memory means 67 for each measurement of the place of arrival. This variability point is a distance from the arrival point to a predetermined distance, and is provided on the side of the adsorption nozzle 30 that is close to the advance and retreat start position. Therefore, each time the arrival location is measured so that the arrival location information is updated, the location information of the mutation point is also updated.

In advance, the secondary speed is set to be lower than the initial speed. By moving the adsorption nozzle 30 at a high speed from the advancement and retreat start position, the time during which the adsorption nozzle 30 approaches the electronic component D can be shortened. On the other hand, in the variation point, by changing the moving speed of the adsorption nozzle 30 to a low speed, the influence of contact with the electronic component D can be reduced.

(6) The flow processing in the other flow processing unit 14 can be switched to or used in combination with the used voice coil motor 47 to the electronic component D, and a special mechanical configuration is not required.

[Second Embodiment]

Hereinafter, the electronic component conveying device according to the second embodiment of the present invention will be described in detail with reference to FIG. In the present embodiment, the electronic component conveying device 1 of the first embodiment is provided with a transfer means for the electronic component, that is, the rotary table 80. The rotary table 80 is taken out from the wafer 91 by the pickup point B. Thereafter, the electronic component is transferred from the grounding point A to the adsorption nozzle 30 of the turntable 12 of the electronic component conveying device 1. Thereby, the electronic component D is a conveyance path which flows in the electronic component conveyance apparatus 1. In other words, the rotary table 80 is a transfer means for replacing the electronic component D from the wafer 91 toward the electronic component transfer device 1.

In the adsorption nozzles 30 of the rotary table 12, the number of serials is separately added. When eight adsorption nozzles are provided in the rotary table 12, the number of serials of T001 to T008 is given to the adsorption nozzle. Similarly, when eight adsorption nozzles are provided in the rotary table 80, the number of serials of R801 to R808 is given to the adsorption nozzle.

That is, the rotary table 80 is provided with a plurality of adsorption nozzles R801 to R808 that hold and detach the electronic component D from the tip end. The adsorption nozzles R801 to R808 are disposed on the same circumference by equidistant positions on the circumference, and extend from the center of the circumference in the radial direction. The adsorption nozzles R801 to R808 are arranged with the tip end facing outward. The rotary table 80 rotates the adsorption nozzles R801 to R808 in which the electronic components are held, and the axis perpendicular to the radial direction is rotated at a predetermined angle as a center of rotation.

This rotary table 80 is rotated in the vertical direction. That is, the rotation axis of the rotary table 80 extends in the horizontal direction. Rotate The table 80 moves the electronic component D held by the adsorption nozzles R801 to R808 in the vertical direction.

The adsorption nozzles R801 to R808 are adjusted so as to stop at least at the apex of the mounting table by the intermittent rotation of the rotary table 80. In this apex, the adsorption nozzles R801 to R808 are located directly below one of the stop positions of the adsorption nozzles T001 to T008 of the rotary table 12 of the electronic component conveying device 1. In this stop position, the adsorption nozzles T001 to T008 and the adsorption nozzles R801 to R808 stop the tip ends facing each other. Thereby, the position is stopped, and the electronic component D held by the adsorption nozzles R801 to R808 is transmitted to the adsorption nozzles T001 to T008. That is, this stop position is the grounding point A.

In the grounding point A, the adsorption nozzles R801 to R808 are held by one end of the electronic component D. That is, the opposite surface of the electronic component D is directed to the adsorption nozzles T001 to T008 facing each other at the intersection point A. The adsorption nozzles T001~T008 on the charging side are held by the opposite end from the opposite end. Thereafter, the turntable 12 holds and transports the electronic component D until the other stop position of the turntable 12 is rotated.

The wafer 91 is disposed at one place of the falling point of the rotary table 80. The stage device 9 moves the electronic component D in parallel with the XY direction while the electronic component D is placed on the wafer 91 from which the electronic component is taken out, and positions the electronic components D one by one at the pickup point B.

The pickup point B is the stop position of the adsorption nozzles R801 to R808 closest to the wafer 91. In the present embodiment, the rotary table 12 and the rotary table 80 are arranged up and down, and the upper portion of the rotary table 80 is turned over. Connected to position A, directly below is the picking point B.

(Advance and retract drive unit 4)

The advancing and retracting drive unit 4 including the pressing body 40 and the forward/backward driving motor 50 is a pick-up point B provided at the grounding point A of the stop position of the turntable 12 and the stop position of the rotary table 80.

In the grounding point A, the advancing and retracting drive unit 4 is provided only on the side of the turntable 12. In other words, in the grounding point A, the adsorption nozzles T001 to T008 are configured to meet the transfer of the electronic components toward the adsorption nozzles R801 to R808.

In the pickup position B, the advance/retract drive unit 4 is provided on the rotary table 80. In other words, in the pickup point B, the adsorption nozzles R801 to R808 are configured to greet the electronic components on the wafer 91.

(Control unit 6)

In the control unit of the present embodiment, as shown in Fig. 17, a nozzle recognition unit 70 is provided in addition to the configuration of the control unit 6 of the first embodiment.

The nozzle recognition unit 70 recognizes the adsorption nozzle that has stopped at the grounding point A. A notch portion is provided at each of the adsorption nozzles T001 to T008 of the rotary table 12 and the adsorption nozzles R801 to R808 of the rotary table 80, respectively. The nozzle recognition unit 70 is provided with a photo sensor 49, and detects the presence or absence of a notch portion of the adsorption nozzles T001 to T008 and the adsorption nozzles R801 to R808, and corresponds to a previously stored notch portion.

The photo sensor 49 emits light from the light-emitting portion and receives light. The department takes its light into the sensor. The light-emitting portion uses an LED and a light-receiving portion, and is a photo transistor and a photodiode. The light-emitting portion and the light-receiving portion of the photosensor 49 are arranged to hold the stop positions of the adsorption nozzles T001 to T008.

At this time, a notch portion of the adsorption nozzles T001 to T008 is disposed between the light-emitting portion and the light-receiving portion. The nozzle recognition unit 70 detects the presence or absence of the notch portion by the photo sensor 49, and associates with the previously stored notch portion. Thereby, the adsorption nozzle recognition unit 70 recognizes the adsorption nozzles T001 to T008 stopped at the grounding point A. The adsorption nozzles R801 to R808 are recognized by providing the same nozzle recognition unit 70 on the rotary table 80.

When the adsorption nozzle T001 is a measurement of the arrival point of the adsorption nozzle R801, the arrival point information is stored in the arrival point information memory means 65 as the arrival point in the combination of T001-R801.

The mutated point information memory means 67 memorizes the mutated point information generated by the generating means 66. The generating means 66 generates information on the mutated points of the mutated points based on the arrival location information. The generation of the mutated point information is performed on the arrival location information of each of the information storage means 65 at the arrival place. When the adsorption nozzle T001 is a measurement of the arrival point of the adsorption nozzle R801, the variation point information of the combination T001-R801 of the adsorption nozzle is generated and memorized.

(1) Measurement of the arrival point of the adsorption nozzle and the electronic component D

The measurement method of the arrival point in the electronic component conveying device 1 of the first embodiment in the method of measuring the arrival point of the adsorption nozzles T001 to T008 in the grounding point A and the electronic component D held by the adsorption nozzles R801 to R808 The same goes on.

When the setting mode is set, the adsorption nozzles 30 which are provided in the rotary table 12 and the rotary table 80 are arranged at the grounding point A (T001-R801). At this time, the adsorption nozzle R801 holds the electronic component D to be delivered. Then, the forward/backward drive motor 50 is driven to start the movement of the adsorption nozzle T001. The adsorption nozzle T001 is brought into contact with the electronic component D held by the adsorption nozzle R801 to detect the floating of the rod. Thereby, the measurement of the arrival point of the electronic component D held by the adsorption nozzle R801 of the adsorption nozzle T001 is performed.

Next, the turntable 12 is rotated to arrange the adsorption nozzle T002 at the grounding point A. Similarly, the adsorption nozzle T002 is moved to the electronic component D held by the adsorption nozzle R801, and the measurement of the arrival point of the adsorption nozzle T002 is performed. Thus, when the measurement of each arrival point is completed, the rotary table 12 is rotated, and the adsorption nozzles T001 to T008 are placed at the grounding point A. After the measurement of the electronic component D held by the adsorption nozzles R801 of the adsorption nozzles T001 to T008 is completed, the rotary table 80 is rotated to arrange the R802 at the grounding point A. In this manner, the measurement of the electronic component D held by the adsorption nozzles R801 to R808 of the adsorption nozzles T001 to T008 is performed. Thereafter, the measurement result is memorized in the arrival location information memory means 65, so that the arrival location measurement mode is terminated.

(2) Control of movement of the adsorption nozzle from the start position to the arrival point

In the control of the movement of the adsorption nozzles T001 to T008 from the advance/retract start position to the arrival point, the arrival point information stored in the arrival point information memory means 65 is referred to in the same manner as in the first embodiment.

In the case where the adsorption nozzle T001 and the adsorption nozzle R801 are disposed in the grounding point A, the arrival point information of the adsorption nozzle T001 in the combination of T001-R801 is called from the arrival point information memory means 65. The driving of the advancing and retracting drive motor 50 is started based on the arrival point information. The comparison means 69 performs a comparison of the arrival point information of the adsorption nozzle T001 in T001-R801 and the current position information of the adsorption nozzle T001. In the case of the same, the motor for advancing and retracting is stopped.

(effect)

As described above, in the present embodiment, in particular, in the case where the electronic component transporting apparatus 1 is provided with the electronic component transfer means, that is, the rotary table 80, the moving distance of the adsorption nozzles T001 to T008 is at the grounding point A. It is stored in association with the combination of the adsorption nozzles R801 to R808. Therefore, in the measurement mode, when the respective combinations of the adsorption nozzles T001 to T008 and the adsorption nozzles R801 to R808 are different from each other, the measurement can be performed at an appropriate point in each group. Thereby, in addition to the effects of the first embodiment, the following effects can be achieved.

(1) In the movement control mode, the movement of the adsorption nozzles T001 to T008 is performed in accordance with the appropriate arrival point of each combination of the adsorption nozzles T001 to T008 and the adsorption nozzles R801 to R808. Therefore, even if any combination of the adsorption nozzles at the grounding point A is disposed, the adsorption nozzles T001 to T008 can be moved to an appropriate position. Thereby, a large load is not applied to the electronic component D held by the adsorption nozzles R801 to R808, and the electronic component D can be prevented from falling off. Further, in the present embodiment, in the grounding point A, the advancing and retracting drive unit 4 is provided on the turntable 12 side, but the advancing and retracting drive unit 4 may be provided on the rotary table 80 side. In this case, the configuration in which the R801 to R808 of the electronic component D are moved may be maintained.

Further, in the present embodiment, the rubber collet 36 may be provided at the tip end of the adsorption nozzle 30. In particular, when the rubber collet 36 is provided at the tip end of the adsorption nozzles R801 to R808, the adsorption nozzles R801 to R808 hold the electronic component D during the measurement of the arrival point of the adsorption nozzles T001 to T008. Therefore, as is conventionally known, in the adjustment by the human body, which is visually confirmed, the deformation state of the rubber collet is caused by the contact of the adsorption nozzles T001 to T008, or the self-weight of the electronic component D. It is not easy to judge. However, in the present embodiment, the contact between the electronic component D held by the adsorption nozzles R801 to R808 and the adsorption nozzles T001 to T008 can be detected by the resistance Fd of the magnitude of the bending force of the rubber collet 36. . It is possible to accurately measure the arrival point of the adsorption nozzles T001 to T008.

In the above, although the position measurement mode and the movement control mode in the pickup position A are described, the adsorption spray in the pickup point B is described. The measurement of the arrival point of the mouth R801~R808 is also applicable.

(2) In the present embodiment, as in the first embodiment, the control of the movement of the adsorption nozzle 30 may be performed.

(3) The control of the movement of the adsorption nozzle 30 in the delivery position A or the pickup point B is determined with reference to the arrival point information stored in the storage unit 6. In the control of the movement of the adsorption nozzle 30, when the moving speed of the adsorption nozzle 30 is moved from the advance/retract start position, the electronic component D may be changed before the contact of the electronic component D.

Thereby, by moving the adsorption nozzle 30 at a high speed from the advancement/retraction start position, the time during which the adsorption nozzle 30 approaches the electronic component D can be shortened. On the other hand, by moving the adsorption nozzle 30 at a low speed from the front of the arrival point, the influence of contact with the electronic component D can be reduced.

[Third embodiment]

Hereinafter, the electronic component conveying device 1 according to the third embodiment of the present invention will be described in detail with reference to the drawings. In the present embodiment, the rotary table 12 forming the conveyance path of the electronic component conveying device 1 of the first embodiment is changed to two rotary tables 80 and 81.

The rotary table 80 is taken out from the tray 92 by the pick-up location B. Thereafter, the electronic component D is transported from the grounding point A toward the adsorption nozzle 30 of the rotary table 81. The rotary table 81, which is charged by the electronic component D, is placed on the other tray 92 by the detachment point C. Thereby, the electronic component D is conveyed from the tray 92 to the other tray 92. Moreover, the two rotary tables 80 and 81 are The transport path from one tray 92 to the other tray 92 also serves as a front and back reversing mechanism of the electronic component D.

In the adsorption nozzles 30 of the rotary tables 80 and 81, the number of serials of R801 to R808 and R811 to R818 is added. The adsorption nozzles R801 to R808 and the adsorption nozzles R811 to R818 stop the tip ends facing each other, and the electronic components D held by the adsorption nozzles R801 to R808 are transported toward the adsorption nozzles R811 to R818. That is, this stop position is the grounding point A.

In the grounding point A, the advancing and retracting drive unit 4 is provided only on the side of the rotary table 81. In other words, in the grounding point A, the adsorption nozzles R811 to R818 are configured to contact the adsorption nozzles R801 to R808 in order to meet the transfer of the electronic component D.

In the present embodiment, the conveyance path is provided with two rotary tables 80 and 81. In the intersection point A, the moving distance of the adsorption nozzles R811 to R818 is stored in association with the combination of the adsorption nozzles R801 to R808. . Therefore, in the measurement mode, even if the arrival point is different in each combination of the adsorption nozzles R811 to R818 and the adsorption nozzles R801 to R808, it is possible to measure the arrival point in each group. In the control of the movement of the adsorption nozzles R811 to R818 from the advance/retract start position to the arrival point, the arrival point information stored in the arrival point information memory means 65 is referred to in the same manner as in the first and second embodiments. Thereby, in addition to the effects of the first and second embodiments, the following effects can be achieved.

(1) In the mobile control mode, according to the adsorption nozzle The movement of the adsorption nozzles R811 to R818 is performed at an appropriate arrival point of each combination of R811 to R818 and adsorption nozzles R801 to R808. Therefore, even if any of the adsorption nozzles are disposed at the grounding point A, the adsorption nozzles R811 to R818 can be moved to an appropriate position. Thereby, a large load is not applied to the electronic component D held by the adsorption nozzles R801 to R808, and the electronic component D can be prevented from falling off. Further, in the present embodiment, in the grounding point A, the advancing and retracting drive unit 4 is provided only on the side of the rotary table 81, but the advancing and retracting drive unit may be provided on the side of the rotary table 80. In this case, the configuration in which the R801 to R808 of the electronic component D are moved may be maintained.

(2) In the present embodiment, a plurality of types may be transported by one transport path at the same time. For example, by using the even-numbered adsorption nozzles 30 for the cultivar A and the odd-numbered adsorption nozzles 30 for the cultivar B, it is possible to carry the two types of cultivars at the same time. In this case, the adsorption nozzles of the types A and B are held, and the other adsorption nozzle is moved, and the arrival point of each nozzle is stored in association with the combination of the nozzles. Thereby, two types of electronic parts D can be simultaneously conveyed by one conveyance path.

When only the type A is handled, the rotary table is moved by 2 intervals each time using an even number of adsorption nozzles. On the other hand, using an odd number of adsorption nozzles, the rotary table is moved by 2 pitches at a time. Thus, by selecting the adsorption nozzle that adsorbs the electronic component D, it is possible to function as an electronic component conveying device that can switch the type of the electronic component to be conveyed without adjusting the moving distance of the nozzle.

[Other embodiments]

The embodiments of the present invention have been described above, and various omissions, substitutions and changes may be made without departing from the spirit and scope of the invention. The present invention and its modifications are intended to be included within the scope and spirit of the inventions

(1) In each of the embodiments, the electronic component D is placed on the stage 15 of the position correcting unit 14a, and in the arrival point measurement mode, the adsorption nozzle 30 is moved to the electronic component D placed on the stage 15, and the measurement is performed. The arrival point where the adsorption nozzle 30 and the electronic component D abut. In this case, the electronic component D is held by the adsorption nozzle 30, and the adsorption nozzle 30 holding the electronic component D is moved to the stage 15, and the arrival point of the electronic component D and the stage 15 held by the adsorption nozzle 30 is measured. Also.

Thereby, the arrival point of the adsorption nozzle 30 can be measured not only when the electronic component D held by the adsorption nozzle of the electronic component D placed on the stage 15 is placed on the stage 15 .

(2) In the respective embodiments, the case where the servo motor 50 is used as the advance/retract drive motor 50 is described as an example. However, the motor may be applied to any known method such as a stepping motor.

(3) The arrival point information is a rotation amount indicating that the advance/retraction drive motor 50 has rotated several times until the movement of the suction nozzle 30 from the advance/retraction start position to the movement of the rod, but the arrival point information is also using other information. can. For example, the forward/backward drive motor 50 when the adsorption nozzle 30 is moved from the advance/retract start position until the float of the lever occurs The rotational speed is determined by the driving time scorer as the arrival location information.

(4) Although an example in which the adsorption nozzle 30 is an adsorption nozzle has been described, an electrostatic adsorption method, a Bernoulli disk method, or a disk mechanism that mechanically holds the electronic component D may be disposed in addition to the adsorption nozzle.

(5) Although an example in which the rubber collet 36 is provided at the tip end of the adsorption nozzle has been described, the rubber collet 36 may be a rubber collet other than rubber, and various collets may be used as long as an elastic member is used.

(6) Both of the compression springs 33 and 36 may be provided, and either one of them may be provided, and the opposing thrust Thp may be generated in accordance with the reaction force Fcr which the rod 42 receives. That is, the propulsive force Fr includes only the force that moves the adsorption nozzles 30 of the uncompressed springs 33, 36, only the force that resists the movement of the adsorption nozzles 30 by the compression springs 33, or only the elastic force against the compression springs 33, 36. The force that the differential adsorption movement nozzle 30 moves, the reaction force Fcr, corresponds to the propulsive force Fr.

(7) Although the nozzle recognition unit 70 is an example in which the photo sensor 49 is provided, the method of recognizing the number of serials of the adsorption nozzles 30 stopped at the stop position may be replaced with another method. For example, each of the adsorption nozzles is provided with an RF tag in which ID information is embedded, and the information of the RF tag from the adsorption nozzle 30 stopped at the stop position is read by wireless communication, and the number of serials of the adsorption nozzles 30 may be identified. Further, a bar code for displaying the number of serials is added to each of the adsorption nozzles 30, and the stop at the stop position is stopped. Bar code reading of the adsorption nozzle 30 is also possible.

Further, the nozzle recognition unit 70 may not only mechanically recognize the nozzle from the outside, but may use the program to be recognized by the software. For example, the nozzle recognition unit 70 updates the stop position information on the database to the next position in each rotation of the rotary table 12 in association with the nozzle position including the nozzle position of the CPU and the stop position of the nozzle. Information person.

(8) The rotation speed information is, for example, the number of rotations of the motor 40 for advancing and retracting, and the rotation amount information is, for example, the amount of rotation of the motor 40 for advancing and retracting, but other information can be used to display the rotation speed information and the rotation amount information of the motor for advancing and retracting. For information, you can use a variety of parameters. For example, the rotation amount information is the number of pulses given to the forward and backward drive motor, and the rotation speed information is the pulse frequency given to the forward/backward drive motor.

(9) The detecting portion 48 of the electronic component holding device 2 detects the rod 42 for the voice coil motor by detecting a change in the air pressure in the pipe and the inflow or outflow of the air passing through the air port 48a. 47 floats relatively, but it is also possible to detect the floating of the rod 42 by other methods.

(10) The flow processing unit 14 exemplifies the example of the position correcting unit 14a, but the other flow processing unit 14 may select: a part feeder, a position correcting unit, a test contact device, a stamping unit, an appearance inspection device, and a classification. One or more types of sorting mechanisms, defective product discharge devices, and the like.

(11) Although an example in which various flow processing units 14 are disposed in one turntable 12 is exemplified, the transport mechanism is a linear transport The transport mode is also possible, and the plurality of rotary stages 12 may constitute a transport path 11. The various flow processing units 14 are not limited to the above-described types, and can be replaced with various flow processing units 14, and the arrangement order can be appropriately changed.

2‧‧‧Electronic parts holding device

4‧‧‧Advance and retreat drive department

6‧‧‧Control Department

14a‧‧‧Location Correction Unit

15‧‧‧ stage

30‧‧‧Adsorption nozzle

31‧‧‧ Arm

32‧‧‧ Bearing

33‧‧‧Compression spring

34‧‧‧Flange

35‧‧‧Connectors

41‧‧‧Linear guide

42‧‧‧ pole

43‧‧‧Frame

43a‧‧‧The lower wrist

43b‧‧‧上腕

44‧‧‧Cam followers

45‧‧‧ Bearing

46‧‧‧Compression spring

47‧‧‧ voice coil motor

48‧‧‧Detection Department

50‧‧‧Advance and retraction drive motor

51‧‧‧Cylinder cam

52‧‧‧Encoder (torque sensor)

Claims (20)

A method of moving a holding means is a method of moving a holding means of an electronic component holding device for holding an electronic component, characterized in that the method includes: pre-measuring an arrival point of the holding means, and memorizing the arrival location information according to the arrival point And a step of moving the electronic component holding device to perform a movement control step of moving the holding means according to the arrival point information of the arrival point measured by the measuring step; and the electronic component holding device is provided a rod connected to the voice coil motor and a forward/backward driving motor that reaches the electronic component by the pushing force of the holding means, and in the measuring step, in a state where the holding means does not reach the electronic component And the force for applying the propulsive force to the holding means to sink the rod into the voice coil motor by the forward/backward driving motor is prevented by the counter thrust generated by the voice coil motor, and the holding means is detected by the holding means The aforementioned voice coil motor and the aforementioned rod occurring in response to the arrival of the aforementioned electronic component Relatively floating, the location of the relative floating detection is used as the arrival location, and the location information about the arrival location is used as the arrival location information memory. In the foregoing movement control step, the foregoing retention is performed according to the arrival location information. Means moving. In the method of moving a holding means according to the first aspect of the invention, in the electronic component holding device, a rubber collet is further provided at a portion in contact with the electronic component of the holding means. The method for moving a holding means according to claim 1 or 2, wherein the current position of the holding means is measured by a measuring means, and the current position information about the current position and the arrival point information are successively compared. When the holding means starts moving, if the current position information and the arrival point information match, the holding means is stopped. The method of moving the holding means according to the third aspect of the patent application, wherein the initial speed information about the initial moving speed of the forward/backward driving motor and the secondary speed information of the next speed information are stored in advance. The arrival point information generates information on the variation point of the movement distance up to the mutation point, and compares the current position information measured by the measurement means to the variation point information and the arrival point information, respectively, to maintain the foregoing The means starts to move according to the speed of the original speed information. On the other hand, if the current position information and the variability point information match, the speed is changed according to the speed of the secondary speed information, and if the current position information and the arrival location information are the same, Just stop the aforementioned hand segment. The method of moving a holding means according to the first or second aspect of the invention, further comprising: a mounting table on which the holding means is disposed, or a carrying motor that intermittently rotates the mounting table at a predetermined angle, and the holding means The stop position at which the advance/reverse drive motor is provided is stopped, and the arrival point information is stored in association with the information recognized by each holding means. The method of moving a holding means according to claim 1 or 2, wherein in the moving position, since the other means for transferring the electronic component is provided, the holding means is formed so as to face the holding means. The position of the platform and the arrival location information are related to the information of the combination of the holding means and the other holding means which are the opposite means, and the information for displaying the moving position, and are stored in association with each other. The method of moving the holding means according to the fourth aspect of the invention, wherein the initial speed information and the secondary speed information are rotational speed information indicating a number of rotations of the forward/backward driving motor, the arrival point information, the current position information, and The variability information is information on the amount of rotation indicating the amount of rotation of the motor for advancing and retracting. For example, the method of moving the holding means of claim 7 The rotation speed information is a pulse frequency given to the forward and backward drive motor, and the rotation amount information is a pulse number given to the forward/backward drive motor. An electronic component holding device including an electronic component holding device for holding an electronic component, comprising: a lever connected to the voice coil motor; and the propelling force is transmitted to the holding means through the lever to reach The motor for advancing and retracting the electronic component; and the voice coil motor is a force for applying the propulsive force to the holding means to sink the rod by the forward/backward driving motor in a state where the holding means does not reach the electronic component. And the mode switching unit switches between: an arrival point measurement mode in which the arrival point of the holding means is measured, and a movement control mode in which the movement of the holding means is performed in accordance with the measured arrival point, based on an input from the input unit; And detecting means for detecting a relative floating of the voice coil motor and the rod that occurs by the arrival of the electronic component by the holding means; and detecting a position at which the relative floating arrival point is detected Information memory means of arrival and arrival information; and the aforementioned advance and retreat drive motor based on the aforementioned arrival location information Rotation motor control unit. The electronic component holding device according to claim 9, wherein the electronic component holding device further includes a rubber collet at a portion that is in contact with the electronic component of the holding means. The electronic component holding device according to claim 9 or 10, further comprising: a measuring means for measuring a current position of the holding means, and comparing the current position information about the current position and the arrival point information successively In the motor control unit, when the current position information and the arrival point information match, the forward/backward drive motor is stopped. The electronic component holding device according to claim 11, further comprising: an initial speed information indicating an initial moving speed of the forward/backward driving motor, and a secondary speed information relating to the next speed information. a speed information memory means; and generating means for generating mutated point information about a moving distance up to the mutated point based on the arrival point information; wherein the motor control unit starts moving the holding means at a speed according to the initial speed information On the other hand, if the current position information and the mutated point information match, the comparison means is changed to the speed based on the secondary speed information, and if the current position information and the arrival location information are identical, the comparison means is used. stop. The electronic component holding device according to claim 12, wherein the initial speed information and the secondary speed information are rotational speed information indicating a number of rotations of the forward/backward driving motor, the arrival point information, the current position information, and the foregoing The mutated point information is information indicating the amount of rotation of the amount of rotation of the motor for advancing and retracting. The electronic component holding device according to claim 9 or 10, further comprising: a mounting table on which one or a plurality of the holding means is disposed; and a transport motor that intermittently rotates the mounting table at a predetermined angle every time, and the holding means It is stopped at the stop position where the forward/backward drive motor is provided, and the arrival point information is stored in association with the information recognized by each holding means. The electronic component holding device according to claim 9 or 10, wherein in the moving position, since the other means for transferring the electronic component is provided, the holding means is formed so as to face the holding means The position and the arrival point information are stored in association with information for identifying the combination of the holding means and the other holding means of the opposite side and the information for displaying the moving position. An electronic component transporting apparatus is an electronic component transporting apparatus that transports electronic components along a transport path, and is characterized in that: The transport motor rotates the holding means along the transport path, and stops the holding means above the transfer processing unit; and the holding means holds the electronic component and can be raised and lowered by an external force; And a rod connected to the voice coil motor; and a motor for advancing and retracting that reaches the electronic component by the pushing force by the lever; and the voice coil motor is in a state in which the holding means does not reach the electronic component Then, the force for applying the propulsion force to the holding means to sink the rod by the forward/backward driving motor is prevented by the counter thrust; and the mode switching unit switches based on the input from the input unit: the arrival of the measurement holding means a location control mode based on the arrival location information of the arrival location, and a movement control mode for moving the retention means based on the arrival location information; and a detection means for detecting the foregoing by means of the holding means The aforementioned floating coil motor and the relative floating of the aforementioned rod occur when the electronic component arrives; and will be detected Said opposite float reaches the location of the memory means reaches the location information memory location; and reaches the location information based on the motor control unit driving the advancing and retracting operation of the motor. An electronic component transporting device that transports electronic components along a transport path And a holding means for holding and detaching one surface of the electronic component from the tip end; and the first rotating table, wherein the holding means is disposed plurally around the rotation axis, and the tip end is often oriented outward The method is intermittently rotated at a predetermined angle around the rotation axis; and the second rotation table is disposed such that the holding means is disposed around the rotation axis, and the front end is always outwardly oriented with the rotation axis as the center. The predetermined angle is intermittently rotated; the first and second rotating tables are arranged so as not to overlap each other, and the rotating shafts are arranged adjacent to each other in parallel on the same plane, and have the tip end of the holding means provided by both of them. a common stop position facing each other, and the electronic component is delivered to the stop position as a grounding point, and the first rotary table holds and transports one surface of the electronic component taken out from one of the storage bodies to the aforementioned The second rotating table until the grounding point is the opposite side of the electronic component from the grounding point That the holding member from the housing toward the other, in which either the first or the second rotary table, comprising: forward and backward so that the holding force of the driving motor propulsion means occurs; and The lever is provided so as to be movable up and down toward the holding means stopped above the delivery position, and is in contact with the holding means, and transmits the propulsive force generated by the forward/backward driving motor to the holding means; and the voice coil motor; In a state in which the holding means does not reach the electronic component, the force for applying the propulsion force to the holding means by the forward/backward driving motor to sink the rod is prevented by the counter thrust; and the mode switching unit is based on Input of the input unit, switching: measuring the arrival location of the holding means and calculating the arrival location measurement mode according to the arrival location information of the arrival location, and the movement control mode for performing the movement of the holding means based on the arrival location information; and the detection means And detecting the relative floating of the voice coil motor and the rod that occurs by the arrival of the electronic component by the holding means; and the arrival of the position information memory that detects the arrival point of the relative floating position Location information memory means; and motor control for operating the advance and retreat drive motor based on the aforementioned arrival location information Section. An electronic component conveying device that is an electronic component conveying device that conveys an electronic component along a conveyance path, and includes: a holding device that holds and removes one surface of the electronic component from a tip end; and a rotating table that holds the aforementioned The means are arranged in plural along the transport path so that the extending direction of the holding means is parallel to the rotation axis The rotating shaft is intermittently rotated at a predetermined angle every time; and the rotating table is arranged such that the holding means is disposed around the rotating shaft, and the front end is always outwardly oriented, and the predetermined rotating angle is intermittently rotated at a predetermined angle around the rotating shaft. a common stop position in which the tip end of the holding means provided by the rotating table and the rotating table face each other, and the stop position is used as a grounding point, and the electronic component is transferred to the rotary table and the rotary table And a motor for advancing and retracting that causes the propulsive force of the holding means to occur; and the lever is provided to be movable up and down toward the holding means that is stopped above the delivery position, and is in contact with the holding means, The propulsive force generated by the forward/backward driving motor is transmitted to the holding means; and the voice coil motor is supplied to the holding means by the forward/backward driving motor in a state where the holding means does not reach the electronic component The force that causes the aforementioned rod to sink into the force is prevented by the counter thrust; and the mode switching unit According to the input from the input unit, switching: measuring the arrival location of the holding means and calculating the arrival location measurement mode according to the arrival location information of the arrival location, and the movement control mode for performing the movement of the holding means based on the arrival location information; The detecting means detects the relative floating of the voice coil motor and the rod which are generated by the arrival of the electronic component by the holding means; and the position information of the arrival point of the relative floating is detected. Memory The arrival location information memory means; and a motor control unit that operates the forward and backward drive motor based on the arrival location information. The electronic component conveying device of claim 16, wherein the rubber collet is further provided at a portion that is in contact with the electronic component of the holding means. The electronic component conveying apparatus of claim 16, wherein the measuring means of measuring the current positional information of the current moving distance of the holding means and the current measurement measured by the measuring means are provided. In the comparison means, the position information is compared with the arrival point information, and the motor control unit stops the advance/reverse drive motor if the current position information and the arrival point information match.