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TWI749511B - Graphene electrode manufacturing method and manufacturing device - Google Patents

Graphene electrode manufacturing method and manufacturing device Download PDF

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TWI749511B
TWI749511B TW109111770A TW109111770A TWI749511B TW I749511 B TWI749511 B TW I749511B TW 109111770 A TW109111770 A TW 109111770A TW 109111770 A TW109111770 A TW 109111770A TW I749511 B TWI749511 B TW I749511B
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porous
substrate
graphene
electrode
carbon dioxide
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TW202139504A (en
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姚培智
許沛清
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大陸商烯美科技(深圳)有限公司
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Abstract

本發明提供一種石墨烯電極之製程方法及其製作裝置,其方法包括(1):取液態之聚醯亞胺以超音波噴霧方式將其滲入一具有多個孔隙的多孔隙基材,如此形成一多孔隙塗層基材;(2):該多孔隙塗層基材於一隧道窯內移動,複數個二氧化碳雷射照射器以二氧化碳雷射持續照射經過該隧道窯之多孔隙塗層基材,使該多孔隙塗層基材形成一多孔石墨烯基材;(3):將該多孔石墨烯基材進行鋰化程序,使該多孔石墨烯基材形成一鋰化石墨烯電極;藉此,能提供一種新的石墨烯電極之製程方法,且其鋰化石墨烯電極可作一鋰離子電池之負電極,或是一超級電容鋰電池之負電極,其多孔石墨烯基材可作一超級電容器的一電極板。 The present invention provides a process method for a graphene electrode and a manufacturing device thereof. The method includes (1): taking a liquid polyimide and infiltrating it into a porous substrate with multiple pores in an ultrasonic spray manner, and thus forming A porous coating substrate; (2): the porous coating substrate moves in a tunnel kiln, and a plurality of carbon dioxide laser irradiators continuously irradiate the porous coating substrate passing through the tunnel kiln with carbon dioxide lasers , Forming the porous graphene substrate into a porous graphene substrate; (3): subjecting the porous graphene substrate to a lithiation procedure to form the porous graphene substrate into a lithiated graphene electrode; Therefore, a new process method for graphene electrode can be provided, and the lithiated graphene electrode can be used as a negative electrode of a lithium ion battery or a negative electrode of a supercapacitor lithium battery, and its porous graphene substrate can be used as a negative electrode of a lithium ion battery. An electrode plate of a supercapacitor.

Description

石墨烯電極之製程方法及其製作裝置 Graphene electrode manufacturing method and manufacturing device

本發明係有關於一種石墨烯電極之製程方法及其製作裝置,尤指一種利用超音波噴霧、結合多孔隙基材、二氧化碳雷射器照射而能生產石墨烯電極之製程方法及其製作裝置。 The invention relates to a process method and a manufacturing device for graphene electrodes, in particular to a process method and a manufacturing device that can produce graphene electrodes by using ultrasonic spray, combined with porous substrates, and carbon dioxide laser irradiation.

石墨是由多層石墨烯構成的結晶構造,而石墨烯(graphene)是一種單層的石墨結構,每個碳原子之間以sp2結晶結構與相鄰的三個碳原子形成鍵結,並延伸成蜂窩狀六角形的二維結構,目前石墨烯已被廣為應用於半導體、觸控面板或太陽能電池等領域中,且更預期廣泛應用於光電、綠能發電、環境生醫感測、複合性功能材料等諸多產業領域之發展。 Graphite is a crystalline structure composed of multiple layers of graphene, while graphene is a single-layered graphite structure. Each carbon atom forms a bond with three adjacent carbon atoms in an sp 2 crystalline structure and extends. A honeycomb hexagonal two-dimensional structure, graphene has been widely used in semiconductors, touch panels or solar cells and other fields, and is expected to be widely used in photovoltaics, green energy power generation, environmental biomedical sensing, composite The development of many industrial fields such as sexual functional materials.

另一方面,目前之電動汽車、智慧型手機都需要具更高容量、更快速充電之電池,需要業界尋求解決方案。緣此,本發明人有鑒於此,即著手研發構思其解決方案,希望能開發出一種石墨烯電極之製程及其製作裝置,以促進此業之發展,遂經多時之構思而有本發明之產生。 On the other hand, current electric vehicles and smart phones require batteries with higher capacity and faster charging, and the industry needs to find solutions. Therefore, in view of this, the inventor set out to develop and conceive its solution, hoping to develop a graphene electrode manufacturing process and its manufacturing device to promote the development of this industry, and after many years of thinking, the present invention was developed. The production.

本發明之目的係在提供一種石墨烯電極之製程方法及其製作裝置,可達到石墨烯電極製造生產之極佳經濟效益性者,且其鋰化石墨烯電極可作一鋰離子電池之負電極;其多孔石墨烯基材可作一超級電容器的一電極板;其鋰化石墨烯電極可作一超級電容鋰電池之負電極。 The purpose of the present invention is to provide a graphene electrode manufacturing method and manufacturing device, which can achieve the extremely economic benefits of graphene electrode manufacturing, and the lithiated graphene electrode can be used as the negative electrode of a lithium ion battery ; Its porous graphene substrate can be used as an electrode plate of a supercapacitor; its lithiated graphene electrode can be used as a negative electrode of a supercapacitor lithium battery.

本發明為了達成上述目的,其所採用之技術方法包括有:步驟1:取液態之聚醯亞胺,以超音波噴霧方式將該液態之聚醯亞胺形成霧狀粒子後滲入一具有多個孔隙的多孔隙基材,使該多孔隙基材在該等孔隙的 週邊附上一聚醯亞胺層,如此形成一多孔隙塗層基材; In order to achieve the above-mentioned object, the technical method adopted by the present invention includes: Step 1: Take liquid polyimide, form the liquid polyimide into mist particles by ultrasonic spraying method, and then infiltrate it into a Porous porous substrate, so that the porous substrate in the pores A polyimide layer is attached to the periphery to form a porous coating substrate;

步驟2:該多孔隙塗層基材藉由一輸送帶於一隧道窯內移動,該隧道窯之內部設有複數個二氧化碳雷射照射器,該等複數個二氧化碳雷射照射器並以二氧化碳雷射持續照射經過該隧道窯之多孔隙塗層基材,使該多孔隙塗層基材之聚醯亞胺層形成一高純度多孔石墨烯層,如此形成一多孔石墨烯基材。 Step 2: The porous coating substrate is moved in a tunnel kiln by a conveyor belt. The tunnel kiln is provided with a plurality of carbon dioxide laser irradiators, and the carbon dioxide laser irradiators are used with carbon dioxide lasers. Continuous irradiation of the porous coating substrate through the tunnel kiln causes the polyimide layer of the porous coating substrate to form a high-purity porous graphene layer, thus forming a porous graphene substrate.

前述方法,更可在該步驟2後進行一步驟3:將該多孔石墨烯基材進行鋰化程序,使該多孔石墨烯基材形成一鋰化石墨烯電極。 In the foregoing method, step 3 can be further performed after step 2: the porous graphene substrate is subjected to a lithiation process, so that the porous graphene substrate forms a lithiated graphene electrode.

前述方法其中之取液態之聚醯亞胺以超音波噴霧方式形成霧狀粒子後滲入一具有多個孔隙的多孔隙基材,係以至少一個或複數個超音波噴霧器將液態聚醯亞胺之霧狀粒子滲入一多孔隙基材,該至少一個或複數個超音波噴霧器係設於該隧道窯之內部側面、內部上方或內部下方。 In the aforementioned method, the liquid polyimide is formed by ultrasonic spraying to form mist particles and then penetrated into a porous substrate with multiple pores. At least one or more ultrasonic sprayers are used to disperse the liquid polyimide. The mist particles penetrate into a porous substrate, and the at least one or a plurality of ultrasonic sprayers are arranged on the inner side, upper inner or lower inner of the tunnel kiln.

前述方法其中該多孔隙基材為捲式基材並有一第1表面與一第2表面,該多孔隙基材設置於一第1轉軸上,該多孔隙基材以第1表面向上露出,由該輸送帶輸送進該隧道窯內移動,使該多孔隙基材之第1表面接受該複數個超音波噴霧器將液態聚醯亞胺之霧狀粒子噴霧滲入該多孔隙基材,然後於該隧道窯內接受該複數個二氧化碳雷射照射器以其二氧化碳雷射持續照射,使該多孔隙塗層基材之聚醯亞胺層形成高純度多孔石墨烯層,然後成捲置於一第2轉軸上; In the aforementioned method, the porous substrate is a rolled substrate and has a first surface and a second surface, the porous substrate is disposed on a first rotating shaft, and the porous substrate is exposed upward from the first surface. The conveyor belt is transported into the tunnel kiln to move, so that the first surface of the porous substrate receives the plurality of ultrasonic sprayers to spray the mist particles of liquid polyimide into the porous substrate, and then move it in the tunnel The kiln receives the carbon dioxide laser irradiator continuously with the carbon dioxide laser, so that the polyimide layer of the porous coating substrate forms a high-purity porous graphene layer, which is then rolled and placed on a second rotating shaft superior;

接續,移動該第2轉軸,令捲置於該第2轉軸之該多孔隙基材,通過一轉向惰輪,使該多孔隙基材以第2表面向上露出,並由該輸送帶輸送進該隧道窯內移動,使該多孔隙基材之第2表面接受該複數個超音波噴霧器將液態聚醯亞胺之霧狀粒子噴霧滲入該多孔隙基材,然後於該隧道窯內接受該複數個二氧化碳雷射照射器以其二氧化碳雷射持續照射,使該多孔隙塗層基材之聚醯亞胺層形成高純度多孔石墨烯層,然後成捲置於一第3轉軸上,如此形成一多孔石墨烯基材。 Next, move the second rotating shaft to roll the porous substrate on the second rotating shaft through a turning idler, so that the porous substrate is exposed upward with the second surface, and is transported by the conveyor belt into the porous substrate. Move in the tunnel kiln to make the second surface of the porous substrate receive the plurality of ultrasonic sprayers to spray the mist particles of liquid polyimide into the porous substrate, and then receive the plurality of ultrasonic sprays in the tunnel kiln The carbon dioxide laser irradiator continuously irradiates the carbon dioxide laser, so that the polyimide layer of the porous coating substrate forms a high-purity porous graphene layer, which is then rolled on a third rotating shaft to form a polyimide layer. Porous graphene substrate.

前述方法,其中該液態之聚醯亞胺係為液化之Katpon®In the aforementioned method, the liquid polyimide is a liquefied Katpon ® .

前述方法,其中該多孔隙基材係選自以下其中之一:多孔隙碳材基材、多孔隙石墨、多孔隙金屬基材。 In the aforementioned method, wherein the porous substrate is selected from one of the following: porous carbon material substrate, porous graphite, and porous metal substrate.

前述方法,更可在該步驟2之形成鋰化石墨烯電極後,將多個鋰化石墨烯電極推疊為一多層鋰化石墨烯電極。 In the foregoing method, after the formation of the lithiated graphene electrode in step 2, multiple lithiated graphene electrodes can be stacked to form a multilayer lithiated graphene electrode.

前述方法,其中該多孔石墨烯基材係作為一超級電容器的電極板。 In the foregoing method, the porous graphene substrate is used as an electrode plate of a super capacitor.

前述方法,其中該鋰化石墨烯電極係作為一鋰離子電池之負電極。 In the foregoing method, the lithiated graphene electrode is used as a negative electrode of a lithium ion battery.

前述方法,其中該鋰化石墨烯電極係作為一超級電容鋰電池之負電極。 In the foregoing method, the lithiated graphene electrode is used as a negative electrode of a supercapacitor lithium battery.

本發明之技術手段包括有:一隧道窯,其內係設有一輸送帶;複數個超音波噴霧器,係設於該隧道窯內;複數個二氧化碳雷射照射器,係設於該隧道窯內;前述構成,該超音波噴霧器用以設置液態聚醯亞胺,並將該液態聚醯亞胺形成霧狀粒子後噴出,而該二氧化碳雷射照射器係用以提供二氧化碳雷射之持續照射。 The technical means of the present invention include: a tunnel kiln with a conveyor belt; a plurality of ultrasonic sprayers are arranged in the tunnel kiln; a plurality of carbon dioxide laser irradiators are arranged in the tunnel kiln; In the foregoing configuration, the ultrasonic sprayer is used to set the liquid polyimide and spray the liquid polyimide into mist particles, and the carbon dioxide laser irradiator is used to provide continuous irradiation of the carbon dioxide laser.

茲為使 貴審查委員對本發明之技術、方法特徵及所達成之功效更有進一步之了解與認識,謹佐以較佳之實施例圖及配合詳細之說明,說明如後: In order to enable your reviewer to have a better understanding and understanding of the technology, method features and achieved effects of the present invention, a preferred embodiment diagram and detailed description are provided. The description is as follows:

11:聚醯亞胺 11: Polyimide

12:超音波噴霧器 12: Ultrasonic sprayer

20:多孔隙基材 20: Porous substrate

201:步驟1 201: Step 1

202:步驟2 202: Step 2

203:步驟3 203: Step 3

205:孔隙 205: Porosity

207:第1表面 207: Surface 1

208:第2表面 208: Surface 2

21:聚醯亞胺層 21: Polyimide layer

22:多孔隙塗層基材 22: Porous coating substrate

28:輸送帶 28: Conveyor belt

29:轉向惰輪 29: Steering idler

30:隧道窯 30: Tunnel Kiln

302:第1轉軸 302: 1st shaft

304:第2轉軸 304: 2nd shaft

306:第3轉軸 306: 3rd shaft

32:二氧化碳雷射照射器 32: CO2 laser irradiator

34:多孔石墨烯層 34: Porous graphene layer

36:多孔石墨烯基材 36: Porous graphene substrate

38:鋰化石墨烯電極 38: Lithated graphene electrode

39:多層鋰化石墨烯電極 39: Multilayer lithiated graphene electrode

40:超級電容器 40: Super capacitor

42:電極板 42: Electrode plate

46:第2電極板 46: 2nd electrode plate

50:鋰離子電池 50: Lithium-ion battery

52:負電極 52: negative electrode

54:隔膜 54: Diaphragm

56:正電極 56: positive electrode

第1圖為本發明之製程方法流程示意圖。 Figure 1 is a schematic flow diagram of the manufacturing method of the present invention.

第2圖為本發明以超音波噴霧方式將液態之聚醯亞胺滲入一多孔隙基材上之示意圖。 Figure 2 is a schematic diagram of the present invention infiltrating liquid polyimide into a porous substrate by means of ultrasonic spray.

第2-1圖為本發明之多孔隙基材之局部放大圖。 Figure 2-1 is a partial enlarged view of the porous substrate of the present invention.

第3圖為本發明之多孔隙塗層基材之示意圖。 Figure 3 is a schematic diagram of the porous coating substrate of the present invention.

第3-1圖為本發明之多孔隙塗層基材之局部放大圖。 Figure 3-1 is a partial enlarged view of the porous coating substrate of the present invention.

第4圖為本發明之以二氧化碳雷射照射多孔隙塗層基材之一 實施例示意圖。 Figure 4 is one of the porous coating substrates irradiated with carbon dioxide laser in the present invention Schematic diagram of the embodiment.

第5圖為本發明之多孔石墨烯基材之示意圖。 Figure 5 is a schematic diagram of the porous graphene substrate of the present invention.

第5-1圖為本發明之多孔石墨烯基材之局部放大圖。 Figure 5-1 is a partial enlarged view of the porous graphene substrate of the present invention.

第6圖為本發明在隧道窯內以超音波噴霧方式將液態之聚醯亞胺滲入一多孔隙基材與二氧化碳雷射照射之示意圖。 Figure 6 is a schematic diagram of the infiltration of liquid polyimide into a porous substrate and carbon dioxide laser irradiation in a tunnel kiln using ultrasonic spray.

第7-1圖為本發明在隧道窯內對一捲式多孔隙基材之第1表面進行超音波噴霧與二氧化碳雷射照射示意圖。 Figure 7-1 is a schematic diagram of ultrasonic spray and carbon dioxide laser irradiation on the first surface of a roll of porous substrate in a tunnel kiln according to the present invention.

第7-2圖為本發明在隧道窯內對一捲式多孔隙基材之第2表面進行超音波噴霧與二氧化碳雷射照射示意圖。 Figure 7-2 is a schematic diagram of ultrasonic spray and carbon dioxide laser irradiation on the second surface of a roll of porous substrate in a tunnel kiln according to the present invention.

第8圖為本發明之多層鋰化石墨烯電極之剖面圖。 Figure 8 is a cross-sectional view of the multilayer lithiated graphene electrode of the present invention.

第9圖為本發明之超級電容器之示意圖。 Figure 9 is a schematic diagram of the supercapacitor of the present invention.

第10圖為本發明之鋰離子電池之示意圖。 Figure 10 is a schematic diagram of the lithium ion battery of the present invention.

請參閱第1-10)圖,為本發明石墨烯電極之製程方法及其製作裝置之較佳實施例,該些圖式均為用以便利說明之示意圖,其僅以示意方式說明本發明之基本結構,且所顯示之構成繪製並未限定相同於實際實施時之形狀及尺寸比例,其實際實施時之形狀及尺寸比例乃為一種選擇性之設計。 Please refer to Figures 1-10), which are preferred embodiments of the manufacturing method and manufacturing device of the graphene electrode of the present invention. The basic structure, and the displayed composition drawing is not limited to the same shape and size ratio in actual implementation. The shape and size ratio in actual implementation is an optional design.

如第1圖所示,本發明係提供一種石墨烯電極之製程方法,其製程方法(包括製作裝置)包括: As shown in Figure 1, the present invention provides a process method of graphene electrode, the process method (including the manufacturing device) includes:

步驟1(201):如第2圖所示,取液態之聚醯亞胺11(Polyimide,簡稱PI),以超音波噴霧方式將該液態之聚醯亞胺11形成霧狀粒子後滲入一具有多個孔隙205的多孔隙基材20上,使該多孔隙基材20在被該等孔隙205的週邊附上一聚醯亞胺層21,如此形成一多孔隙塗層基材22,該多孔隙塗層基材22之示意圖如第3圖所示; Step 1 (201): As shown in Figure 2, take the liquid polyimide 11 (Polyimide, PI for short), use ultrasonic spray to form the liquid polyimide 11 into mist particles and then infiltrate it into a On the porous substrate 20 with a plurality of pores 205, the porous substrate 20 is attached with a polyimide layer 21 on the periphery of the pores 205, thus forming a porous coating substrate 22. A schematic diagram of the porous coating substrate 22 is shown in Figure 3;

前述該液態之聚醯亞胺11之以超音波噴霧方式運作實施,係 可將液態之聚醯亞胺11輸入一超音波噴霧器12,該超音波噴霧器12利用壓電水晶體震盪器(壓電振盪器/振盪子),產生高頻率震波(超音波)作用於液態之聚醯亞胺11,用以將液態之聚醯亞胺11震成極小的霧狀粒子,並可利用超音波噴霧器12之噴嘴造形、風流或壓力差等方式使其能持續穩定噴出聚醯亞胺11之霧狀粒子,進而使該多孔隙基材20之該等孔隙205的週邊附上形成該聚醯亞胺層21。 The aforementioned liquid polyimide 11 is operated by ultrasonic spray, which is The liquid polyimide 11 can be input into an ultrasonic sprayer 12, which uses a piezoelectric crystal oscillator (piezoelectric oscillator/oscillator) to generate high-frequency shock waves (ultrasonic waves) to act on the liquid polyimide The polyimide 11 is used to shake the liquid polyimide 11 into very small mist particles, and the nozzle shape, wind flow or pressure difference of the ultrasonic sprayer 12 can be used to make it continuously and stably spray the polyimide 11 to form the polyimide layer 21 by attaching the peripheries of the pores 205 of the porous substrate 20 to the mist-like particles.

如第2-1圖,其為該多孔隙基材20之局部放大圖,顯示該多孔隙基材20內有無數個孔隙205; As shown in Figure 2-1, it is a partial enlarged view of the porous substrate 20, showing that there are countless pores 205 in the porous substrate 20;

步驟2(202):如第4圖所示,該多孔隙塗層基材22藉由一輸送帶28於一隧道窯30內移動,該隧道窯30之內部(包括內部側面、內部上方或內部下方)設有複數個二氧化碳雷射照射器32,該等複數個二氧化碳雷射照射器32並以二氧化碳雷射持續照射經過該隧道窯30之多孔隙塗層基材22,使該多孔隙塗層基材22之聚醯亞胺層21形成一高純度多孔石墨烯層34,如此使該多孔隙塗層基材22形成一多孔石墨烯基材36,該多孔石墨烯基材36如第5圖所示。如第5-1圖,其為該多孔石墨烯基材之局部放大圖,顯示該多孔石墨烯基材內有無數個孔隙205,且在該等孔隙205的週邊附有一高純度多孔石墨烯層34。 Step 2 (202): As shown in Figure 4, the porous coating substrate 22 is moved in a tunnel kiln 30 by a conveyor belt 28. Below) a plurality of carbon dioxide laser irradiators 32 are provided. The carbon dioxide laser irradiators 32 continuously irradiate the porous coating substrate 22 passing through the tunnel kiln 30 with the carbon dioxide laser to make the porous coating The polyimide layer 21 of the substrate 22 forms a high-purity porous graphene layer 34, so that the porous coating substrate 22 forms a porous graphene substrate 36. The porous graphene substrate 36 is as shown in the fifth As shown in the figure. As shown in Figure 5-1, it is a partial enlarged view of the porous graphene substrate, showing that there are countless pores 205 in the porous graphene substrate, and a high-purity porous graphene layer is attached around the pores 205 34.

選擇性的,本製程方法還包括一步驟3(203):將該多孔石墨烯基材36進行鋰化程序,使該多孔石墨烯基材36形成一鋰化石墨烯電極38(lithiated graphene electrode)。 Optionally, the process method further includes a step 3 (203): subject the porous graphene substrate 36 to a lithiation process, so that the porous graphene substrate 36 forms a lithiated graphene electrode 38 (lithiated graphene electrode) .

藉此,能提供一種新的石墨烯電極之製程方法,並能達到極佳之生產經濟效益性。 In this way, a new process method for graphene electrodes can be provided, and excellent production economic efficiency can be achieved.

其中,該步驟1(201)之液態之聚醯亞胺11係為液化之Katpon®,Katpon®是美國杜邦公司生產的聚醯亞胺(PI)薄膜材料的商品名稱,市面上即可購得,可藉應用此產品快速與低成本的取得聚醯亞胺。 Wherein the step 1 (201) of the liquid line 11 to the polyimide liquefaction of Katpon ®, Katpon ® is the trade name of the U.S. company DuPont polyimide (PI) film material, can be purchased commercially , Polyimide can be obtained quickly and at low cost by using this product.

其中,該步驟1(201)之多孔隙基材20可選自以下其中之一:多孔隙碳材基材、多孔隙石墨、多孔隙金屬基材,但不以此為限;該多孔 隙基材20之孔隙205,可增加整個基材表面積。 Wherein, the porous substrate 20 of step 1 (201) can be selected from one of the following: porous carbon material substrate, porous graphite, porous metal substrate, but not limited to this; the porous The gap 205 of the substrate 20 can increase the surface area of the entire substrate.

其中,該步驟1(201)之取液態之聚醯亞胺11以超音波噴霧方式噴出聚醯亞胺11之霧狀粒子後滲入一多孔隙基材20上,如第2圖所示,係以一個或複數個超音波噴霧器12將液態之聚醯亞胺11之霧狀粒子滲入一多孔隙基材20上;選擇性的,如第6圖所示,至少一個或複數個超音波噴霧器12係設於該隧道窯30之內部(包括內部側面、內部上方或內部下方),當該等多孔隙基材20於該輸送帶28上移動時,該等多個超音波噴霧器12係從各角度對該等多孔隙基材20充份噴塗液態之聚醯亞胺11霧化後之霧狀粒子,使該等多孔隙基材20在該等孔隙205的週邊附有一聚醯亞胺層21,形成一多孔隙塗層基材22。如第3-1圖,其為該多孔隙塗層基材22之局部放大圖,顯示該多孔隙塗層基材22內有無數個孔隙205,且在該等孔隙205的週邊附有一聚醯亞胺層21。 Wherein, in step 1 (201), the liquid polyimide 11 is sprayed by ultrasonic spray to spray the mist particles of the polyimide 11 into a porous substrate 20, as shown in Figure 2, the system One or more ultrasonic sprayers 12 are used to infiltrate the mist particles of liquid polyimide 11 into a porous substrate 20; optionally, as shown in Figure 6, at least one or more ultrasonic sprayers 12 Is installed inside the tunnel kiln 30 (including the inner side, upper inner or lower inner). When the porous substrate 20 moves on the conveyor belt 28, the ultrasonic sprayers 12 are arranged from various angles The porous substrates 20 are fully sprayed with the mist particles of the liquid polyimide 11 after atomization, so that the porous substrates 20 are attached with a polyimide layer 21 around the pores 205. A porous coating substrate 22 is formed. As shown in Figure 3-1, which is a partial enlarged view of the porous coating substrate 22, it shows that there are countless pores 205 in the porous coating substrate 22, and a polyamide is attached to the periphery of the pores 205 Imine layer 21.

在另一實施例中,如第7-1圖所示,該多孔隙基材20為捲式基材並有一第1表面207與一第2表面208,該多孔隙基材20設置於一第1轉軸302上,該多孔隙基材20以第1表面207向上露出,由該輸送帶輸28送進該隧道窯30內移動,使該多孔隙基材20之第1表面207接受該複數個超音波噴霧器12將液態之聚醯亞胺11之霧狀粒子噴霧滲入該多孔隙基材20,然後於該隧道窯30內接受複數個二氧化碳雷射照射器32以其二氧化碳雷射持續照射,使該多孔隙塗層基材22之聚醯亞胺層21形成一高純度多孔石墨烯層34,然後成捲置於一第2轉軸304上; In another embodiment, as shown in FIG. 7-1, the porous substrate 20 is a roll substrate and has a first surface 207 and a second surface 208. The porous substrate 20 is disposed on a second surface. On a rotating shaft 302, the porous substrate 20 is exposed upward with the first surface 207, and is transported by the conveyor belt 28 into the tunnel kiln 30 to move, so that the first surface 207 of the porous substrate 20 receives the plurality of The ultrasonic sprayer 12 sprays the mist particles of the liquid polyimide 11 into the porous substrate 20, and then receives a plurality of carbon dioxide laser irradiators 32 in the tunnel kiln 30 to continuously irradiate the carbon dioxide laser to make The polyimide layer 21 of the porous coating substrate 22 forms a high-purity porous graphene layer 34, which is then rolled on a second rotating shaft 304;

如第7-2圖所示,接續,移動該第2轉軸304,令捲置於該第2轉軸304之該多孔隙基材20,通過一轉向惰輪29,使該多孔隙基材20以第2表面208向上露出,由該輸送帶28送進該隧道窯30內移動,使該多孔隙基材20之第2表面208接受該複數個超音波噴霧器12將液態之聚醯亞胺11之霧狀粒子噴霧滲入該多孔隙基材20,然後於該隧道窯30內接受複數個二氧化碳雷射照射器32以其二氧化碳雷射持續照射,使該多孔隙塗層基材22之聚醯亞胺層21形成一高純度多孔石墨烯層34,然後成捲置於一第3轉軸306上,如此形 成一多孔石墨烯基材36。 As shown in Fig. 7-2, continue, move the second shaft 304 to roll the porous substrate 20 on the second shaft 304, and pass a turning idler 29 to make the porous substrate 20 The second surface 208 is exposed upward, and is transported by the conveyor belt 28 into the tunnel kiln 30 to move, so that the second surface 208 of the porous substrate 20 receives the plurality of ultrasonic sprayers 12 to remove the liquid polyimide 11 The mist particle spray penetrates into the porous substrate 20, and then receives a plurality of carbon dioxide laser irradiators 32 in the tunnel kiln 30 to continuously irradiate the carbon dioxide laser to make the polyimide of the porous coating substrate 22 The layer 21 forms a high-purity porous graphene layer 34, which is then placed in a roll on a third rotating shaft 306, and is thus shaped A porous graphene substrate 36 is formed.

上述步驟2(202)之該等複數個二氧化碳雷射照射器32並以二氧化碳雷射持續照射經過該隧道窯30之多孔隙塗層基材22,使該多孔隙塗層基材22之聚醯亞胺層21形成高純度多孔石墨烯層34,係因為:該聚醯亞胺層21被二氧化碳雷射照射而吸收能量,使該聚醯亞胺11之原子晶格產生振動,打破其分子中之C=O與N-C鍵,使其原子重新排列芳香族化合物(Aromatic compounds)以形成多孔石墨烯層34;因為聚醯亞胺11包含芳香族與醯亞胺(aromatic and imide),因此聚醯亞胺11最終可以形成多孔石墨烯層34。 The plurality of carbon dioxide laser irradiators 32 of step 2 (202) above are continuously irradiated with carbon dioxide lasers to the porous coating substrate 22 passing through the tunnel kiln 30, so that the polypore of the porous coating substrate 22 The imine layer 21 forms the high-purity porous graphene layer 34 because the polyimide layer 21 is irradiated by carbon dioxide laser and absorbs energy, causing the atomic lattice of the polyimide 11 to vibrate, breaking its molecular The C=O and NC bond to make the atoms rearrange the aromatic compounds (Aromatic compounds) to form the porous graphene layer 34; because polyimide 11 contains aromatic and imide (aromatic and imide), so polyimide The imine 11 can finally form the porous graphene layer 34.

其中,該步驟3(203)之將該等多孔石墨烯基材36進行鋰化程序,使該等多孔石墨烯基材36形成多個鋰化石墨烯電極38,其鋰化是指將鋰離子嵌入該多孔石墨烯基材36之石墨烯層與層的間隙內,方便當其為負極時,放電時鋰離子脫插,充電時鋰離子插入之反應,其鋰化的方式並不限定,現有的鋰化方式都可適用。 Wherein, in step 3 (203), the porous graphene substrates 36 are subjected to a lithiation process, so that the porous graphene substrates 36 form a plurality of lithiated graphene electrodes 38, and the lithiation refers to the lithiation of lithium ions. It is embedded in the gap between the graphene layer and the layer of the porous graphene substrate 36 to facilitate the reaction of lithium ion deintercalation during discharge and lithium ion insertion during charging when it is a negative electrode. The method of lithiation is not limited. All lithiation methods are applicable.

此外,如第8圖所示,更可在該步驟3(203)之形成鋰化石墨烯電極38後,將多個鋰化石墨烯電極38推疊為一多層鋰化石墨烯電極39。 In addition, as shown in FIG. 8, after forming the lithiated graphene electrode 38 in step 3 (203), a plurality of lithiated graphene electrodes 38 can be stacked to form a multilayer lithiated graphene electrode 39.

鋰化石墨烯電極38,具有多個優點,例如:其超薄的厚度能加快鋰離子在正負極之間的往返速度;再者其具有足夠的間隙、孔隙除了能提升充放電速率外,亦能提供電極在充放電時體積伸縮變化的緩衝空間,避免電極損壞。 The lithiated graphene electrode 38 has many advantages. For example, its ultra-thin thickness can accelerate the speed of lithium ions between the positive and negative electrodes; in addition, it has sufficient gaps and pores to increase the charging and discharging rate. It can provide a buffer space for the volume expansion and contraction changes of the electrode during charging and discharging, and avoid damage to the electrode.

如第9圖所示,在一實施例中,在該步驟2(202)之形成多孔石墨烯基材36後,該多孔石墨烯基材36可作一超級電容器40的一電極板42;根據平行板電容量公式: As shown in Figure 9, in one embodiment, after the porous graphene substrate 36 is formed in step 2 (202), the porous graphene substrate 36 can be used as an electrode plate 42 of a supercapacitor 40; Parallel plate capacitance formula:

C=ε A/D, C=ε A/D,

其中C為電容量,A為平行板的面積,D為平行板間的距離,ε為平行板間介質的電容率, Where C is the capacitance, A is the area of the parallel plates, D is the distance between the parallel plates, ε is the permittivity of the medium between the parallel plates,

因為該多孔石墨烯基材36其間隙與孔隙較一般電極更多,因此表面積更大,由以上公式可知,表面積越大電容量越大,因此使其作為 超級電容器40的電極板42其電容量更大。 Because the porous graphene substrate 36 has more gaps and pores than ordinary electrodes, it has a larger surface area. From the above formula, it can be seen that the larger the surface area, the larger the capacitance, so it can be used as The electrode plate 42 of the supercapacitor 40 has a larger capacitance.

再者,該超級電容器40的另一第2電極板46,亦可由一多孔石墨烯基材36作為該第2電極板46,其表面積亦大,亦可使該超級電容器40的電容量更大。 Furthermore, the second electrode plate 46 of the supercapacitor 40 can also be made of a porous graphene substrate 36 as the second electrode plate 46. The surface area of the second electrode plate 46 is also large, which can also increase the capacitance of the supercapacitor 40. big.

如第10圖所示,在一實施例中,在該步驟3(203)之形成鋰化石墨烯電極38後,該鋰化石墨烯電極38可作一鋰離子電池50之負電極52;因為該鋰化石墨烯電極38具有多個石墨烯層與層的間隙,能讓更多鋰離子嵌入其間隙,使其作為鋰離子電池50的負電極52其蓄電量更大。第10圖之鋰離子電池50是以聚合物鋰離子電池為例說明,聚合物鋰離子電池亦屬於一般鋰離子電池50,只是聚合物鋰離子電池之電解質為固體電解質。一般鋰離子電池50主要由正電極56、負電極52、隔膜54(separator)等組成。而聚合物鋰離子電池亦由正電極56、負電極52、隔膜54(separator)等組成,而其隔膜54是由固體電解質兼顧的。 As shown in Figure 10, in one embodiment, after the lithiated graphene electrode 38 is formed in step 3 (203), the lithiated graphene electrode 38 can be used as the negative electrode 52 of a lithium ion battery 50; The lithiated graphene electrode 38 has a plurality of graphene layers and gaps between the layers, allowing more lithium ions to be inserted into the gaps, so that the negative electrode 52 of the lithium ion battery 50 has a greater power storage capacity. The lithium ion battery 50 in Figure 10 is illustrated by taking a polymer lithium ion battery as an example. The polymer lithium ion battery is also a general lithium ion battery 50, but the electrolyte of the polymer lithium ion battery is a solid electrolyte. Generally, the lithium ion battery 50 is mainly composed of a positive electrode 56, a negative electrode 52, a separator 54 and the like. The polymer lithium ion battery is also composed of a positive electrode 56, a negative electrode 52, a separator 54 (separator), etc., and the separator 54 is made of solid electrolyte.

進一步說明,前述之將多個鋰化石墨烯電極38推疊為一多層鋰化石墨烯電極39後,該多層鋰化石墨烯電極39較單層鋰化石墨烯電極38,其石墨烯層與層的間隙更多,能讓更多鋰電子嵌入其間隙,使其作為鋰離子電池50的電極板42其蓄電量更大。 To further illustrate, after the foregoing multiple lithiated graphene electrodes 38 are stacked into a multi-layer lithiated graphene electrode 39, the multi-layer lithiated graphene electrode 39 is better than a single-layer lithiated graphene electrode 38, and its graphene layer There are more gaps with the layers, allowing more lithium electrons to be inserted into the gaps, so that the electrode plate 42 of the lithium ion battery 50 has a greater power storage capacity.

在一實施例中,在該步驟3(203)之形成鋰化石墨烯電極38後,該鋰化石墨烯電極38可作一超級電容鋰電池(Ultracapacitor Lithium Battery)之負電極,因為該鋰化石墨烯電極38具有多個石墨烯層與層的間隙,能讓更多鋰離子嵌入其間隙,使其作為超級電容鋰電池之負電極其蓄電量更大。 In one embodiment, after the formation of the lithiated graphene electrode 38 in step 3 (203), the lithiated graphene electrode 38 can be used as a negative electrode of an Ultracapacitor Lithium Battery, because the lithiated graphene electrode 38 The graphene electrode 38 has a plurality of graphene layers and gaps between the layers, allowing more lithium ions to be inserted into the gaps, so that it can be used as a negative electrode of a supercapacitor lithium battery and has a greater storage capacity.

本發明石墨烯電極板之製程方法藉由前述構成設計,其能使多孔石墨烯基材36與鋰化石墨烯電極38具有量產化之可實施性;其鋰化石墨烯電極38可作一鋰離子電池50之負電極52,使其作為鋰離子電池50的電極板42其蓄電量更大;其多孔石墨烯基材36可作一超級電容器40的一電極板42,使其作為超級電容器40的電極板42其電容量更大;其鋰化石墨烯電極38可作 一超級電容鋰電池之負電極,使本發明石墨烯電極之製程方法之生產與應用達到極佳經濟效益性。 The manufacturing process method of the graphene electrode plate of the present invention is designed by the aforementioned structure, which can make the porous graphene substrate 36 and the lithiated graphene electrode 38 have the feasibility of mass production; the lithiated graphene electrode 38 can be used as a The negative electrode 52 of the lithium-ion battery 50 can be used as the electrode plate 42 of the lithium-ion battery 50 to have a greater storage capacity; the porous graphene substrate 36 can be used as an electrode plate 42 of a supercapacitor 40, so that it can be used as a supercapacitor The electrode plate 42 of 40 has a larger capacity; its lithiated graphene electrode 38 can be used as The negative electrode of a supercapacitor lithium battery enables the production and application of the process method of the graphene electrode of the present invention to achieve excellent economic benefits.

綜上所述,本發明確實為一相當優異之創思,爰依法提出發明專利申請;惟上述說明之內容,僅為本發明之較佳實施例而已,舉凡依本發明之技術手段所延伸之變化,理應落入本發明之專利申請範圍。 In summary, the present invention is indeed an excellent creative idea, and an invention patent application was filed in accordance with the law; however, the content of the above description is only a preferred embodiment of the present invention, and everything extended by the technical means of the present invention Changes should fall within the scope of the patent application of the present invention.

201:步驟1 201: Step 1

202:步驟2 202: Step 2

203:步驟3 203: Step 3

Claims (10)

一種石墨烯電極之製程方法,其包括: A manufacturing process method of graphene electrode, which includes: 步驟1:取液態之聚醯亞胺,以超音波噴霧方式將該液態之聚醯亞胺形成霧狀粒子後滲入一具有多個孔隙的多孔隙基材,使該多孔隙基材在該等孔隙的週邊附上一聚醯亞胺層,如此形成一多孔隙塗層基材; Step 1: Take liquid polyimide, form mist particles from the liquid polyimide by ultrasonic spray, and then infiltrate a porous substrate with multiple pores, so that the porous substrate is placed on the porous substrate. A polyimide layer is attached to the periphery of the pores, thus forming a porous coating substrate; 步驟2:該多孔隙塗層基材藉由一輸送帶於一隧道窯內移動,該隧道窯之內部設有複數個二氧化碳雷射照射器,該等複數個二氧化碳雷射照射器並以二氧化碳雷射持續照射經過該隧道窯之多孔隙塗層基材,使該多孔隙塗層基材之聚醯亞胺層形成一高純度多孔石墨烯層,如此形成一多孔石墨烯基材。 Step 2: The porous coating substrate is moved in a tunnel kiln by a conveyor belt. The tunnel kiln is provided with a plurality of carbon dioxide laser irradiators, and the carbon dioxide laser irradiators are used with carbon dioxide lasers. Continuous irradiation of the porous coating substrate through the tunnel kiln causes the polyimide layer of the porous coating substrate to form a high-purity porous graphene layer, thus forming a porous graphene substrate. 如申請專利範圍第1項所述之一種石墨烯電極之製程方法,更可在該步驟2後進行一步驟3:將該多孔石墨烯基材進行鋰化程序,使該多孔石墨烯基材形成一鋰化石墨烯電極。 For the process method of the graphene electrode described in the first item of the patent application, step 2 can be followed by a step 3: the porous graphene substrate is subjected to a lithiation process to form the porous graphene substrate A lithiated graphene electrode. 如申請專利範圍第1項所述之石墨烯電極之製程方法,其中之取液態之聚醯亞胺以超音波噴霧方式形成霧狀粒子後滲入一具有多個孔隙的多孔隙基材,係以至少一個或複數個超音波噴霧器將液態聚醯亞胺之霧狀粒子滲入一多孔隙基材,該至少一個或複數個超音波噴霧器係設於該隧道窯之內部側面、內部上方或內部下方。 As described in the first item of the scope of patent application, the process method of graphene electrode, wherein the liquid polyimide is formed into mist particles by ultrasonic spraying method and then penetrated into a porous substrate with multiple pores. At least one or a plurality of ultrasonic sprayers infiltrate the mist particles of liquid polyimide into a porous substrate, and the at least one or a plurality of ultrasonic sprayers are arranged on the inner side, upper inner or lower inner of the tunnel kiln. 如申請專利範圍第3項所述之一種石墨烯電極之製程方法,其中該多孔隙基材為捲式基材並有一第1表面與一第2表面,該多孔隙基材設置於一第1轉軸上,該多孔隙基材以第1表面向上露出,由該輸送帶輸送進該隧道窯內移動,使該多孔隙基材之第1表面接受該複數個超音波噴霧器將液態聚醯亞胺之霧狀粒子噴霧滲入該多孔隙基材,然後於該隧道窯內接受該複數個二氧化碳雷射照射器以其二氧化碳雷射持續照射,使該多孔隙塗層基材之聚醯亞胺層形成高純度多孔石墨烯層,然後成捲置於一第2轉軸上; As described in item 3 of the scope of patent application, the method for manufacturing a graphene electrode, wherein the porous substrate is a roll substrate and has a first surface and a second surface, and the porous substrate is disposed on a first surface. On the rotating shaft, the porous substrate is exposed upward with the first surface, and is transported by the conveyor belt into the tunnel kiln to move, so that the first surface of the porous substrate receives the plurality of ultrasonic sprayers to disperse the liquid polyimide The mist particles sprayed into the porous substrate, and then received the carbon dioxide laser irradiator in the tunnel kiln to continuously irradiate the carbon dioxide laser to form the polyimide layer of the porous coating substrate The high-purity porous graphene layer is then placed in a roll on a second rotating shaft; 接續,移動該第2轉軸,令捲置於該第2轉軸之該多孔隙基材,通過一轉向惰輪,使該多孔隙基材以第2表面向上露出,並由該輸送帶輸送進該隧道窯內移動,使該多孔隙基材之第2表面接受該複數個超音波噴霧器將液態聚醯亞胺之霧狀粒子噴霧滲入該多孔隙基材,然後於該隧道窯內接受該複數個二氧化碳雷射照射器以其二氧化碳雷射持續照射,使該多孔隙塗層基材之聚醯亞胺層形成高純度多孔石墨烯層,然後成捲置於一第3轉軸上,如此形成一多孔石墨烯基材。 Next, move the second rotating shaft to roll the porous substrate on the second rotating shaft through a turning idler, so that the porous substrate is exposed upward with the second surface, and is transported by the conveyor belt into the porous substrate. Move in the tunnel kiln to make the second surface of the porous substrate receive the plurality of ultrasonic sprayers to spray the mist particles of liquid polyimide into the porous substrate, and then receive the plurality of ultrasonic sprays in the tunnel kiln The carbon dioxide laser irradiator continuously irradiates the carbon dioxide laser to make the polyimide layer of the porous coating substrate form a high-purity porous graphene layer, which is then rolled on a third rotating shaft to form a polyimide layer. Porous graphene substrate. 如申請專利範圍第1項所述之一種石墨烯電極之製程方法,其中該液態之聚醯亞胺係為液化之Katpon®,該多孔隙基材係選自以下其中之一:多孔隙碳材基材、多孔隙石墨、多孔隙金屬基材。 The process method of graphene electrode as described in the first item of the patent application, wherein the liquid polyimide is a liquefied Katpon®, and the porous substrate is selected from one of the following: porous carbon material Substrate, porous graphite, porous metal substrate. 如申請專利範圍第1項所述之一種石墨烯電極之製程方法,更可在該步驟2之形成鋰化石墨烯電極後,將多個鋰化石墨烯電極推疊為一多層鋰化石墨烯電極。 As described in the first item of the scope of patent application, a method for manufacturing a graphene electrode can also be used to stack a plurality of lithiated graphene electrodes into a multilayer lithiated graphite after forming the lithiated graphene electrode in step 2 Olefin electrode. 如申請專利範圍第1項所述之一種石墨烯電極之製程方法,其中該多孔石墨烯基材係作為一超級電容器的電極板。 The method for manufacturing a graphene electrode as described in the first item of the scope of patent application, wherein the porous graphene substrate is used as an electrode plate of a supercapacitor. 如申請專利範圍第2項所述之一種石墨烯電極之製程方法,其中該鋰化石墨烯電極係作為一鋰離子電池之負電極。 As described in item 2 of the scope of patent application, the method for manufacturing a graphene electrode, wherein the lithiated graphene electrode is used as a negative electrode of a lithium ion battery. 如申請專利範圍第2項所述之一種石墨烯電極之製程方法,其中該鋰化石墨烯電極係作為一超級電容鋰電池之負電極。 As described in item 2 of the scope of patent application, the method for manufacturing a graphene electrode, wherein the lithiated graphene electrode is used as the negative electrode of a supercapacitor lithium battery. 一種石墨烯電極之製作裝置,其包括: A manufacturing device for graphene electrodes, which includes: 一隧道窯,其內係設有一輸送帶; A tunnel kiln with a conveyor belt inside; 複數個超音波噴霧器,係設於該隧道窯內; Multiple ultrasonic sprayers are installed in the tunnel kiln; 複數個二氧化碳雷射照射器,係設於該隧道窯內; Multiple carbon dioxide laser irradiators are installed in the tunnel kiln; 前述構成,該超音波噴霧器用以設置液態聚醯亞胺,並將該液態聚醯亞胺形成霧狀粒子後噴出,而該二氧化碳雷射照射器係用以提供二氧化碳雷射之持續照射。 In the foregoing configuration, the ultrasonic sprayer is used to set the liquid polyimide and spray the liquid polyimide into mist particles, and the carbon dioxide laser irradiator is used to provide continuous irradiation of the carbon dioxide laser.
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TW201833999A (en) * 2017-02-28 2018-09-16 財團法人國家實驗研究院 Flexible substrate structure, flexible transistor and manufacturing method thereof
TW201923909A (en) * 2017-11-16 2019-06-16 南韓商三星電子股份有限公司 Semiconductor device and method of providing the same
TW201931649A (en) * 2017-12-18 2019-08-01 香港理工大學 Electrodes for batteries

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TW201833999A (en) * 2017-02-28 2018-09-16 財團法人國家實驗研究院 Flexible substrate structure, flexible transistor and manufacturing method thereof
TW201923909A (en) * 2017-11-16 2019-06-16 南韓商三星電子股份有限公司 Semiconductor device and method of providing the same
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