TWI745690B - Thin plate stacking device and method of use - Google Patents
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- 238000000034 method Methods 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 48
- 230000007246 mechanism Effects 0.000 claims description 113
- 238000001179 sorption measurement Methods 0.000 claims description 18
- 238000010030 laminating Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 56
- 230000009471 action Effects 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 239000010409 thin film Substances 0.000 description 3
- 230000001174 ascending effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
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- 238000004519 manufacturing process Methods 0.000 description 1
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Abstract
一種薄板堆疊裝置及其使用方法,係先將第一薄膜放置定位在一堆疊區上,再以第一吸附件吸附一第一暫存區上的一基板,將基板橫向搬移放置在第一薄膜之上方,讓基板與第一薄膜完全重疊,同時讓第二機器手臂之第二吸附件吸附第二薄膜,第三機器手臂之第三吸附組件吸附第三薄膜,在橫向移動第二、第三機器手臂之後,將第三薄膜放置並完全重疊於基板上方,之後再以一短距離橫向移動第二機器手臂,在移開第三吸附組件之後,讓第二機器手臂下降,使第二薄膜交叉層疊於第三薄膜之上方,在重覆上述堆疊步驟之後,讓複數個薄板橫向交叉層疊。 A thin plate stacking device and a use method thereof. Firstly, a first film is placed and positioned on a stacking area, and then a substrate on a first temporary storage area is adsorbed by a first suction member, and the substrate is moved and placed on the first film laterally Above, let the substrate and the first film completely overlap, and at the same time allow the second suction member of the second robot arm to adsorb the second film, and the third suction component of the third robot arm to adsorb the third film, moving the second and third films in the lateral direction. After the robot arm, the third film is placed and completely overlapped on the substrate, and then the second robot arm is moved laterally by a short distance. After the third suction assembly is removed, the second robot arm is lowered to make the second film cross Laminating on the third film, after repeating the above-mentioned stacking steps, a plurality of thin plates are stacked laterally and crosswise.
Description
本發明係有關一種薄板堆疊裝置及其使用方法,尤指一種可以有效提高基板與薄膜堆疊成薄板之效率者。 The present invention relates to a thin plate stacking device and a method of use thereof, especially one that can effectively improve the efficiency of stacking a substrate and a thin film into a thin plate.
在印刷電路板的製造過程中,基板在曝光之前,皆會在基板之上、下表面分別形成光阻層及黏附於光阻層表面之薄膜,在曝光之後,再將薄膜剝離以使光阻層外露,以進行後續之顯影及蝕刻程序。而在上述具有光阻層的基板與薄膜成型為一薄板之前,目前主要是以人工之方式進行堆疊,將基板與各薄膜依次上下層疊之後,再分別將薄膜黏附在基板之上、下表面上。 In the manufacturing process of printed circuit boards, before the substrate is exposed, a photoresist layer and a film adhered to the surface of the photoresist layer are formed on the upper and lower surfaces of the substrate, respectively. After the exposure, the film is peeled off to make the photoresist The layer is exposed for subsequent development and etching procedures. Before the above-mentioned substrate and film with photoresist layer are formed into a thin plate, currently they are mainly stacked manually. After the substrate and each film are stacked up and down one by one, the films are respectively adhered to the upper and lower surfaces of the substrate. .
惟,上述以人工堆疊之方式不但精準度不高,且在整體作業效率上亦不理想,有鑑於此,為了提供一種有別於習用技術之結構,並改善上述之缺點,發明人積多年的經驗及不斷的研發改進,遂有本發明之產生。 However, the above-mentioned manual stacking method is not only inaccurate, but also unsatisfactory in overall operating efficiency. In view of this, in order to provide a structure that is different from the conventional technology and improve the above-mentioned shortcomings, the inventor has accumulated many years of experience Experience and continuous R&D and improvement led to the present invention.
本發明之一目的在提供一種薄板堆疊裝置及其使用方法,俾能解決習用基板與各薄膜係以人工方式進行堆疊之問題,而能經由數個機器手臂之搬移程序以簡化基板、薄膜與薄板的堆疊動作,以有效提高整體作業之效率;並在完成單一薄板的堆疊動作之後,產生短距離橫向偏移的 動作,藉以使複數個薄板能相互橫向交叉層疊,以方便作業人員將堆疊的薄板快速的分離。 One purpose of the present invention is to provide a thin plate stacking device and a method of use thereof, so as to solve the problem of manual stacking of conventional substrates and films, and to simplify substrates, films and thin plates through the transfer procedures of several robotic arms. The stacking action can effectively improve the efficiency of the overall operation; and after the stacking action of a single sheet is completed, a short-distance lateral offset is generated Action, so that a plurality of thin plates can be stacked horizontally across each other, so that the operator can quickly separate the stacked thin plates.
為達上述之目的,本發明所設之薄板堆疊裝置係包括一框架、一第一機具以及一第二機具。其中,框架包括一第一支撐座、一第二支撐座及一第三支撐座,第一支撐座具有一第一暫存區,第二支撐座具有一第二暫存區,第三支撐座具有一堆疊區;第一機具具有一第一機器手臂,第一機器手臂之一端具有一第一吸附件,供吸附搬移第一暫存區上之一基板,再將基板釋放於堆疊區上;第二機具具有一第二機器手臂及至少一第三機器手臂,第二機器手臂之一端具有一第二吸附件,供吸附第二暫存區上之一薄膜,再將薄膜釋放於堆疊區上,至少一第三機器手臂係以可上下左右移動之方式連結於第二機器手臂之下方,任一第三機器手臂之一端具有一第三吸附組件,供吸附第二暫存區上之一薄膜,再將薄膜釋放於堆疊區上。 To achieve the above objective, the thin plate stacking device provided by the present invention includes a frame, a first machine and a second machine. The frame includes a first support base, a second support base, and a third support base. The first support base has a first temporary storage area, the second support base has a second temporary storage area, and the third support base Has a stacking area; the first machine has a first robotic arm, and one end of the first robotic arm has a first suction member for sucking and moving a substrate on the first temporary storage area, and then releasing the substrate on the stacking area; The second machine has a second robot arm and at least one third robot arm. One end of the second robot arm has a second suction member for sucking a film on the second temporary storage area and then releasing the film on the stacking area , At least one third robot arm is connected under the second robot arm in a manner that can move up and down, left and right, and one end of any third robot arm has a third suction assembly for sucking a film on the second temporary storage area , Then release the film on the stacking area.
實施時,複數個薄板係以橫向交叉之方式層疊於第三支撐座之堆疊區上。 During implementation, a plurality of thin plates are stacked on the stacking area of the third support base in a crosswise manner.
實施時,第一機器手臂包括一第一橫移機構及一第一升降機構,第一橫移機構連結第一升降機構,第一升降機構連結第一吸附件,供帶動第一吸附件上之一基板橫向或上下移動。 In implementation, the first robot arm includes a first traverse mechanism and a first lifting mechanism. The first traverse mechanism is connected to the first lifting mechanism, and the first lifting mechanism is connected to the first suction member for driving the first suction member. A substrate moves laterally or up and down.
實施時,第二機器手臂包括一第二橫移機構及一第二升降機構,第二橫移機構連結第二升降機構,第二升降機構連結第二吸附件,供帶動第二吸附件上之一薄膜橫向或上下移動。 In implementation, the second robot arm includes a second traverse mechanism and a second lifting mechanism. The second traverse mechanism is connected to the second lifting mechanism, and the second lifting mechanism is connected to the second suction member for driving the second suction member. A film moves laterally or up and down.
實施時,第三吸附組件包括一第三吸附件及一第四吸附件, 第三機器手臂包括一第三橫移機構、一第三升降機構、一第四橫移機構及一第四升降機構,第三橫移機構連結第三升降機構,第三升降機構連結第三吸附件,第四橫移機構連結第四升降機構,第四升降機構連結第四吸附件,第三吸附件及第四吸附件共同吸附一薄膜。 In implementation, the third suction assembly includes a third suction part and a fourth suction part, The third robot arm includes a third traverse mechanism, a third lifting mechanism, a fourth traverse mechanism and a fourth lifting mechanism. The third traverse mechanism is connected to the third lifting mechanism, and the third lifting mechanism is connected to the third suction The fourth traverse mechanism is connected to the fourth lifting mechanism, the fourth lifting mechanism is connected to the fourth adsorption member, and the third adsorption member and the fourth adsorption member jointly adsorb a film.
實施時,第三橫移機構及第四橫移機構位在同一平面上,且以第三橫移機構及第四橫移機構相對接近或反向遠離之方式分別連結第三升降機構及第四升降機構。 In implementation, the third traverse mechanism and the fourth traverse mechanism are located on the same plane, and the third and fourth traverse mechanisms are respectively connected to the third lifting mechanism and the fourth traverse mechanism in such a way that the third and fourth traverse mechanisms are relatively close to or away from each other. Lifting mechanism.
本發明所設之薄板堆疊裝置之使用方法,係包括:a.將至少一基板放置定位在第一支撐座之第一暫存區上,至少一薄膜放置定位在第二支撐座之第二暫存區上,一第一薄膜放置定位在第三支撐座之堆疊區上;b.以第一吸附件吸附一基板之後,將基板橫向搬移並放置在堆疊區之第一薄膜上方,讓基板與第一薄膜完全重疊;同時讓第二機具之第二機器手臂之第二吸附件吸附一第二薄膜,第三機器手臂之第三吸附組件吸附一第三薄膜;c.橫向移動第二機器手臂及第三機器手臂,以第三機器手臂將第三薄膜放置在堆疊區之基板上方,讓第三薄膜與基板完全重疊,之後再移開第三吸附組件之後,讓第二機器手臂下降,使第二薄膜層疊於第三薄膜之上方;以及d.重覆b、c步驟,藉以讓複數個薄板堆疊於第三支撐座之堆疊區上。 The method of using the thin plate stacking device provided by the present invention includes: a. placing and positioning at least one substrate on the first temporary storage area of the first support base, and placing and positioning at least one film on the second temporary storage area of the second support base On the storage area, a first film is placed and positioned on the stacking area of the third support base; b. After adsorbing a substrate with the first suction member, the substrate is moved laterally and placed on the first film in the stacking area, so that the substrate and The first film is completely overlapped; at the same time, the second suction member of the second robot arm of the second machine can adsorb a second film, and the third suction component of the third robot arm can adsorb a third film; c. move the second robot arm laterally And the third robotic arm, use the third robotic arm to place the third film above the substrate in the stacking area, so that the third film and the substrate are completely overlapped, and then after removing the third suction assembly, let the second robotic arm descend to make The second film is laminated on the top of the third film; and d. Steps b and c are repeated, so that a plurality of thin plates are stacked on the stacking area of the third support base.
實施時,步驟c之第二機器手臂係以一短距離同時橫向移動,藉以在移開第三吸附組件之後,讓第二機器手臂下降,使第二薄膜橫向交叉層疊於第三薄膜之上方。 In implementation, the second robotic arm of step c moves laterally at a short distance at the same time, so that after the third suction assembly is removed, the second robotic arm is lowered so that the second film is cross-laminated on top of the third film.
實施時,步驟d之複數個薄板係以橫向交叉之方式層疊於第 三支撐座之堆疊區上。 During implementation, the plurality of thin plates in step d are stacked on the first in a crosswise manner On the stacking area of the three support bases.
為進一步了解本發明,以下舉較佳之實施例,配合圖式、圖號,將本發明之具體構成內容及其所達成的功效詳細說明如下。 In order to further understand the present invention, the following is a detailed description of the specific components of the present invention and the effects achieved by the following preferred embodiments, in conjunction with the drawings and figure numbers.
1‧‧‧薄板堆疊裝置 1‧‧‧Thin plate stacking device
11‧‧‧基板 11‧‧‧Substrate
12‧‧‧第一薄膜 12‧‧‧First film
13‧‧‧第二薄膜 13‧‧‧Second film
14‧‧‧第三薄膜 14‧‧‧Third film
15‧‧‧薄板 15‧‧‧Thin Plate
2‧‧‧框架 2‧‧‧Frame
21‧‧‧框架主體 21‧‧‧Frame body
22‧‧‧第一支撐座 22‧‧‧First support seat
221‧‧‧第一暫存區 221‧‧‧First Temporary Storage Area
23‧‧‧第二支撐座 23‧‧‧Second support base
231‧‧‧第二暫存區 231‧‧‧Second Temporary Storage Area
24‧‧‧第三支撐座 24‧‧‧Third support base
241‧‧‧堆疊區 241‧‧‧Stacking area
3‧‧‧第一機具 3‧‧‧The first machine
31‧‧‧第一機器手臂 31‧‧‧The first robotic arm
311‧‧‧第一橫移機構 311‧‧‧The first traverse mechanism
312‧‧‧第一升降機構 312‧‧‧The first lifting mechanism
32‧‧‧第一吸附件 32‧‧‧The first suction part
321‧‧‧第一板架 321‧‧‧First plate rack
322‧‧‧第一吸盤 322‧‧‧First suction cup
4‧‧‧第二機具 4‧‧‧Second Machine
41‧‧‧第二機器手臂 41‧‧‧Second robotic arm
411‧‧‧第二橫移機構 411‧‧‧Second traverse mechanism
412‧‧‧第二升降機構 412‧‧‧Second Lifting Mechanism
42‧‧‧第三機器手臂 42‧‧‧The third robotic arm
421‧‧‧第三橫移機構 421‧‧‧Third traverse mechanism
422‧‧‧第三升降機構 422‧‧‧The third lifting mechanism
423‧‧‧第四橫移機構 423‧‧‧Fourth Transverse Mechanism
424‧‧‧第四升降機構 424‧‧‧The fourth lifting mechanism
43‧‧‧第二吸附件 43‧‧‧Second Adsorption Piece
44‧‧‧第三吸附組件 44‧‧‧Third suction assembly
441‧‧‧第三吸附件 441‧‧‧The third adsorption part
442‧‧‧第四吸附件 442‧‧‧The fourth adsorption part
443‧‧‧缺口 443‧‧‧ gap
第1圖係為本創作薄板堆疊裝置之俯視圖。 Figure 1 is a top view of the creative sheet stacking device.
第2圖係為本創作薄板堆疊裝置之正視圖。 Figure 2 is a front view of this creative sheet stacking device.
第3圖係為本創作薄板堆疊裝置之第二機具之使用狀態圖。 Figure 3 is the use state diagram of the second machine of the creative thin plate stacking device.
第4、5、6圖係為本創作薄板堆疊裝置在堆疊薄板時之使用狀態示意圖。 Figures 4, 5, and 6 are schematic diagrams of the working state of the creative sheet stacking device when stacking sheets.
本創作係為一種薄板堆疊裝置及其使用方法,其中,該薄板係為印刷電路板之類的平板,包括一基板,基板之上表面及下表面分別具有一薄膜,在不同使用狀態下,上層薄膜或下層薄膜之數量亦可分別為一層以上。 This creation is a thin plate stacking device and its use method. The thin plate is a flat plate such as a printed circuit board, and includes a substrate. The upper surface and the lower surface of the substrate are provided with a thin film. The number of films or underlying films can also be more than one layer, respectively.
請參閱第1、2圖所示,其為本創作薄板堆疊裝置1之較佳實施例,係包括一框架2、一第一機具3以及一第二機具4。其中,框架2具有一框架主體21,框架主體21上具有呈L字形排列之一第一支撐座22、一第二支撐座23及一第三支撐座24,實施時,第一支撐座22、第二支撐座23及第三支撐座24亦可以「一」字形相鄰併列。實施時,第一支撐座22係為輸送帶之一端,第一支撐座22亦可為推車之類的承載裝置;第一支撐座22上具有一第一暫存區221,供承載定位至少一基板,第二支撐座23具有一第二暫存區231,供承載定位至少一薄膜,第三支撐座24具有一堆疊區241,供承載定位複數
個層疊之薄板。
Please refer to Figures 1 and 2, which is a preferred embodiment of the creative thin
第一機具3包括一第一機器手臂31及一第一吸附件32,第一機器手臂31包括一第一橫移機構311及一第一升降機構312,第一橫移機構311連結框架主體21,並橫跨於第一支撐座22及第三支撐座24之頂部,第一橫移機構311係為伺機馬達與皮帶齒輪組之組合,實施時,第一橫移機構311亦可為氣壓缸與活塞推桿組之組合;第一升降機構312係為伺機馬達與螺桿之組合,實施時,第一升降機構312亦可為氣壓缸與齒輪、齒條之組合,第一升降機構312向上連結第一橫移機構311,藉以讓第一升降機構312在第一暫存區221與堆疊區241之間來回移動;而第一吸附件32係包括一第一板架321及複數個分佈結合在第一板架321上之第一吸盤322,複數個第一吸盤322之底端吸嘴朝下,複數個第一吸盤322之頂端分別連接空壓機,藉以產生向上吸附之力量以吸取基板,或停止吸附之力量而讓基板與複數個第一吸盤322分離並落下。實施時,第一吸附件32係連結於第一升降機構312之底部,當第一升降機構312分別橫向移動至第一暫存區221或堆疊區241之上方時,經由第一升降機構312之上升或下降,可以第一吸附件32吸附第一暫存區221上之一基板,再將基板釋放於堆疊區241上。
The
第二機具4包括一第二機器手臂、至少一第三機器手臂、第二吸附件及至少一第三吸附組件,而在本實施例中,第一機具4係包括一第二機器手臂41、一第三機器手臂42、一第二吸附件43及一第三吸附組件44。其中,第二機器手臂41包括一第二橫移機構411及一第二升降機構412,第二橫移機構411連結框架主體21,並橫跨於第二支撐座23及第三支撐座24之頂部,第二橫移機構411係為伺機馬達與皮帶齒輪組之組合,實施時,第二橫
移機構411亦可為氣壓缸與活塞推桿組之組合;第二升降機構412係為伺機馬達與螺桿之組合,實施時,第二升降機構412亦可為氣壓缸與齒輪、齒條之組合,第二升降機構412向上連結第二橫移機構411,藉以讓第二升降機構412在第二暫存區231與堆疊區241之間來回移動;而第二吸附件43係與第一吸附件32具有相同之吸盤結構,藉以產生向上吸附之力量以吸取薄膜,或停止吸附之力量以放下薄膜。實施時,第二吸附件43係連結於第二升降機構412之底部,當第二升降機構412分別橫向移動至第二暫存區231或堆疊區241之上方時,經由第二升降機構412之上升或下降,可以第二吸附件43吸附第二暫存區231上之一薄膜,再將薄膜釋放於堆疊區241上。
The
而第三機器手臂42係以可上下左右移動之方式連結於第二機器手臂41之下方,第三機器手臂42包括一第三橫移機構421、一第三升降機構422、一第四橫移機構423及一第四升降機構424。其中,第三橫移機構421、第三升降機構422、第四橫移機構423及第四升降機構424分別為伺機馬達與螺桿之組合,實施時,第三橫移機構421、第三升降機構422、第四橫移機構423及第四升降機構424亦可分別為氣壓缸與齒輪、齒條之組合,或是氣壓缸與活塞推桿組之組合。第三橫移機構421及第四橫移機構424位在同一平面上,且第三橫移機構421向上連結第三升降機構422,第三橫移機構421向下連結第三吸附件441;第四橫移機構423向上連結第四升降機構424,第四橫移機構423向下連結第四吸附件442,第三吸附件441與第四吸附件442合設為一第三吸附組件44,藉以在第三橫移機構421與第四橫移機構423相對接近時,以第三吸附組件44吸附一薄膜,而在第三橫移機構421與第四橫移機構423反向遠離時,讓第二吸附件43下降並穿過第三吸附件441與第四吸附件
442之間的缺口443,以吸附第二暫存區231上之薄膜,並在吸附之後向上穿過該缺口443以回復原位置。
The
藉此,如第3~6圖所示,本創作薄板堆疊裝置1之使用方法係包括下列步驟:
Therefore, as shown in Figures 3-6, the method of using the creative thin-
a.將至少一基板11放置定位在第一支撐座22之第一暫存區221上,至少一薄膜放置定位在第二支撐座23之第二暫存區231上,一第一薄膜12放置定位在第三支撐座24之堆疊區241上。
a. At least one
b.以第一吸附件32吸附第一暫存區221上的一基板11之後,將基板11橫向搬移並放置在堆疊區241之第一薄膜12上方,讓基板11與第一薄膜12完全重疊;同時讓第二機具4之第二機器手臂41之第二吸附件43吸附第二暫存區231上之一第二薄膜13,第三機器手臂42之第三吸附組件44吸附第二暫存區231上之一第三薄膜14。
b. After adsorbing a
c.橫向移動第二機器手臂41及第三機器手臂42,以第三機器手臂42將第三薄膜14放置在堆疊區241之基板12上方,讓第三薄膜14與基板12完全重疊,之後再以一短距離橫向移動第二機器手臂41,同時在分開第三吸附件441與第四吸附件442之後,讓第二機器手臂41下降以放置第二薄膜13,讓第二薄膜13橫向交叉層疊於第三薄膜14之上方。
c. Move the second
d.重覆b、c步驟,藉以讓複數個薄板15以相互橫向交叉層疊之方式堆疊於第三支撐座24之堆疊區241上。
d. Repeat steps b and c, so that a plurality of
在上述步驟a中,第一薄膜12係由第三機器手臂42之第三吸附組件441所預先吸附放置定位。在步驟b、c中,當第二吸附件43與第三吸附組件44同時位於第二暫存區231之上方時,第三吸附組件4之第三吸附件
441與第四吸附件442分開之後,即可讓第二吸附件43下降並穿過第三吸附件441與第四吸附件442之間的缺口443,以吸附第二暫存區231上之第二薄膜13,並在吸附之後向上穿過該缺口443以回復原位置,而在第三吸附件441與第四吸附件442相對接近時,則可以第三吸附件441與第四吸附件442共同吸附第三薄膜14,讓第二機具4同時移動二個薄膜,並在第三支撐座24的堆疊區241上方依順序分別放置第二薄膜13與第三薄膜14。
In the above step a, the
因此,本創作具有以下之優點: Therefore, this creation has the following advantages:
1、本創作係經由三個機器手臂之搬移程序以簡化基板、薄膜與薄板的堆疊動作,因此,能增加堆疊精準度,並提高整體作業之效率。 1. This creation simplifies the stacking of substrates, films, and thin plates through the moving procedures of three robotic arms. Therefore, the stacking accuracy can be increased and the overall operation efficiency can be improved.
2、本創作係在完成單一薄板的堆疊動作之後,讓第二機器手臂產生短距離之橫向偏移動作,藉以使複數個薄板能橫向交叉層疊於第三支撐座之堆疊區上方,因此,可以方便作業人員在堆疊作業完成之後,將各個薄板快速的分離,以節省作業時間。 2. This creation is to make the second robotic arm produce a short-distance lateral offset movement after completing the stacking action of a single sheet, so that a plurality of sheets can be stacked laterally and crosswise on the stacking area of the third support base. Therefore, you can It is convenient for the operator to quickly separate the thin plates after the stacking operation is completed, so as to save working time.
綜上所述,依上文所揭示之內容,本創作確可達到預期之目的,提供一種能有效的將基板與薄膜堆疊成薄板,並使各個薄板能快速分離以提高作業效率之薄板堆疊裝置及其使用方法,極具產業上利用之價值,爰依法提出發明專利申請。 In summary, according to the content disclosed above, this creation can indeed achieve the expected purpose, providing a thin plate stacking device that can effectively stack substrates and thin films into thin plates, and allows each thin plate to be quickly separated to improve work efficiency. And its use method is of great value for industrial use. Yan filed an invention patent application in accordance with the law.
13‧‧‧第二薄膜 13‧‧‧Second film
4‧‧‧第二機具 4‧‧‧Second Machine
41‧‧‧第二機器手臂 41‧‧‧Second robotic arm
42‧‧‧第三機器手臂 42‧‧‧The third robotic arm
43‧‧‧第二吸附件 43‧‧‧Second Adsorption Piece
44‧‧‧第三吸附組件 44‧‧‧Third suction assembly
441‧‧‧第三吸附件 441‧‧‧The third adsorption part
442‧‧‧第四吸附件 442‧‧‧The fourth adsorption part
443‧‧‧缺口 443‧‧‧ gap
Claims (9)
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| CN106672678A (en) * | 2017-01-19 | 2017-05-17 | 蚌埠市振华包装机械有限责任公司 | Staggered stacking device facilitating bundling of paper board stacking machine |
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| CN107256838A (en) * | 2011-11-04 | 2017-10-17 | 东京毅力科创株式会社 | Base plate processing system and substrate transfer method adopted therein |
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