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TWI745690B - Thin plate stacking device and method of use - Google Patents

Thin plate stacking device and method of use Download PDF

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Publication number
TWI745690B
TWI745690B TW108116773A TW108116773A TWI745690B TW I745690 B TWI745690 B TW I745690B TW 108116773 A TW108116773 A TW 108116773A TW 108116773 A TW108116773 A TW 108116773A TW I745690 B TWI745690 B TW I745690B
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film
substrate
robot arm
lifting mechanism
suction
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TW108116773A
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Chinese (zh)
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TW202043118A (en
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張德勇
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鴻鉑科技有限公司
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Abstract

一種薄板堆疊裝置及其使用方法,係先將第一薄膜放置定位在一堆疊區上,再以第一吸附件吸附一第一暫存區上的一基板,將基板橫向搬移放置在第一薄膜之上方,讓基板與第一薄膜完全重疊,同時讓第二機器手臂之第二吸附件吸附第二薄膜,第三機器手臂之第三吸附組件吸附第三薄膜,在橫向移動第二、第三機器手臂之後,將第三薄膜放置並完全重疊於基板上方,之後再以一短距離橫向移動第二機器手臂,在移開第三吸附組件之後,讓第二機器手臂下降,使第二薄膜交叉層疊於第三薄膜之上方,在重覆上述堆疊步驟之後,讓複數個薄板橫向交叉層疊。 A thin plate stacking device and a use method thereof. Firstly, a first film is placed and positioned on a stacking area, and then a substrate on a first temporary storage area is adsorbed by a first suction member, and the substrate is moved and placed on the first film laterally Above, let the substrate and the first film completely overlap, and at the same time allow the second suction member of the second robot arm to adsorb the second film, and the third suction component of the third robot arm to adsorb the third film, moving the second and third films in the lateral direction. After the robot arm, the third film is placed and completely overlapped on the substrate, and then the second robot arm is moved laterally by a short distance. After the third suction assembly is removed, the second robot arm is lowered to make the second film cross Laminating on the third film, after repeating the above-mentioned stacking steps, a plurality of thin plates are stacked laterally and crosswise.

Description

薄板堆疊裝置及其使用方法 Thin plate stacking device and method of use

本發明係有關一種薄板堆疊裝置及其使用方法,尤指一種可以有效提高基板與薄膜堆疊成薄板之效率者。 The present invention relates to a thin plate stacking device and a method of use thereof, especially one that can effectively improve the efficiency of stacking a substrate and a thin film into a thin plate.

在印刷電路板的製造過程中,基板在曝光之前,皆會在基板之上、下表面分別形成光阻層及黏附於光阻層表面之薄膜,在曝光之後,再將薄膜剝離以使光阻層外露,以進行後續之顯影及蝕刻程序。而在上述具有光阻層的基板與薄膜成型為一薄板之前,目前主要是以人工之方式進行堆疊,將基板與各薄膜依次上下層疊之後,再分別將薄膜黏附在基板之上、下表面上。 In the manufacturing process of printed circuit boards, before the substrate is exposed, a photoresist layer and a film adhered to the surface of the photoresist layer are formed on the upper and lower surfaces of the substrate, respectively. After the exposure, the film is peeled off to make the photoresist The layer is exposed for subsequent development and etching procedures. Before the above-mentioned substrate and film with photoresist layer are formed into a thin plate, currently they are mainly stacked manually. After the substrate and each film are stacked up and down one by one, the films are respectively adhered to the upper and lower surfaces of the substrate. .

惟,上述以人工堆疊之方式不但精準度不高,且在整體作業效率上亦不理想,有鑑於此,為了提供一種有別於習用技術之結構,並改善上述之缺點,發明人積多年的經驗及不斷的研發改進,遂有本發明之產生。 However, the above-mentioned manual stacking method is not only inaccurate, but also unsatisfactory in overall operating efficiency. In view of this, in order to provide a structure that is different from the conventional technology and improve the above-mentioned shortcomings, the inventor has accumulated many years of experience Experience and continuous R&D and improvement led to the present invention.

本發明之一目的在提供一種薄板堆疊裝置及其使用方法,俾能解決習用基板與各薄膜係以人工方式進行堆疊之問題,而能經由數個機器手臂之搬移程序以簡化基板、薄膜與薄板的堆疊動作,以有效提高整體作業之效率;並在完成單一薄板的堆疊動作之後,產生短距離橫向偏移的 動作,藉以使複數個薄板能相互橫向交叉層疊,以方便作業人員將堆疊的薄板快速的分離。 One purpose of the present invention is to provide a thin plate stacking device and a method of use thereof, so as to solve the problem of manual stacking of conventional substrates and films, and to simplify substrates, films and thin plates through the transfer procedures of several robotic arms. The stacking action can effectively improve the efficiency of the overall operation; and after the stacking action of a single sheet is completed, a short-distance lateral offset is generated Action, so that a plurality of thin plates can be stacked horizontally across each other, so that the operator can quickly separate the stacked thin plates.

為達上述之目的,本發明所設之薄板堆疊裝置係包括一框架、一第一機具以及一第二機具。其中,框架包括一第一支撐座、一第二支撐座及一第三支撐座,第一支撐座具有一第一暫存區,第二支撐座具有一第二暫存區,第三支撐座具有一堆疊區;第一機具具有一第一機器手臂,第一機器手臂之一端具有一第一吸附件,供吸附搬移第一暫存區上之一基板,再將基板釋放於堆疊區上;第二機具具有一第二機器手臂及至少一第三機器手臂,第二機器手臂之一端具有一第二吸附件,供吸附第二暫存區上之一薄膜,再將薄膜釋放於堆疊區上,至少一第三機器手臂係以可上下左右移動之方式連結於第二機器手臂之下方,任一第三機器手臂之一端具有一第三吸附組件,供吸附第二暫存區上之一薄膜,再將薄膜釋放於堆疊區上。 To achieve the above objective, the thin plate stacking device provided by the present invention includes a frame, a first machine and a second machine. The frame includes a first support base, a second support base, and a third support base. The first support base has a first temporary storage area, the second support base has a second temporary storage area, and the third support base Has a stacking area; the first machine has a first robotic arm, and one end of the first robotic arm has a first suction member for sucking and moving a substrate on the first temporary storage area, and then releasing the substrate on the stacking area; The second machine has a second robot arm and at least one third robot arm. One end of the second robot arm has a second suction member for sucking a film on the second temporary storage area and then releasing the film on the stacking area , At least one third robot arm is connected under the second robot arm in a manner that can move up and down, left and right, and one end of any third robot arm has a third suction assembly for sucking a film on the second temporary storage area , Then release the film on the stacking area.

實施時,複數個薄板係以橫向交叉之方式層疊於第三支撐座之堆疊區上。 During implementation, a plurality of thin plates are stacked on the stacking area of the third support base in a crosswise manner.

實施時,第一機器手臂包括一第一橫移機構及一第一升降機構,第一橫移機構連結第一升降機構,第一升降機構連結第一吸附件,供帶動第一吸附件上之一基板橫向或上下移動。 In implementation, the first robot arm includes a first traverse mechanism and a first lifting mechanism. The first traverse mechanism is connected to the first lifting mechanism, and the first lifting mechanism is connected to the first suction member for driving the first suction member. A substrate moves laterally or up and down.

實施時,第二機器手臂包括一第二橫移機構及一第二升降機構,第二橫移機構連結第二升降機構,第二升降機構連結第二吸附件,供帶動第二吸附件上之一薄膜橫向或上下移動。 In implementation, the second robot arm includes a second traverse mechanism and a second lifting mechanism. The second traverse mechanism is connected to the second lifting mechanism, and the second lifting mechanism is connected to the second suction member for driving the second suction member. A film moves laterally or up and down.

實施時,第三吸附組件包括一第三吸附件及一第四吸附件, 第三機器手臂包括一第三橫移機構、一第三升降機構、一第四橫移機構及一第四升降機構,第三橫移機構連結第三升降機構,第三升降機構連結第三吸附件,第四橫移機構連結第四升降機構,第四升降機構連結第四吸附件,第三吸附件及第四吸附件共同吸附一薄膜。 In implementation, the third suction assembly includes a third suction part and a fourth suction part, The third robot arm includes a third traverse mechanism, a third lifting mechanism, a fourth traverse mechanism and a fourth lifting mechanism. The third traverse mechanism is connected to the third lifting mechanism, and the third lifting mechanism is connected to the third suction The fourth traverse mechanism is connected to the fourth lifting mechanism, the fourth lifting mechanism is connected to the fourth adsorption member, and the third adsorption member and the fourth adsorption member jointly adsorb a film.

實施時,第三橫移機構及第四橫移機構位在同一平面上,且以第三橫移機構及第四橫移機構相對接近或反向遠離之方式分別連結第三升降機構及第四升降機構。 In implementation, the third traverse mechanism and the fourth traverse mechanism are located on the same plane, and the third and fourth traverse mechanisms are respectively connected to the third lifting mechanism and the fourth traverse mechanism in such a way that the third and fourth traverse mechanisms are relatively close to or away from each other. Lifting mechanism.

本發明所設之薄板堆疊裝置之使用方法,係包括:a.將至少一基板放置定位在第一支撐座之第一暫存區上,至少一薄膜放置定位在第二支撐座之第二暫存區上,一第一薄膜放置定位在第三支撐座之堆疊區上;b.以第一吸附件吸附一基板之後,將基板橫向搬移並放置在堆疊區之第一薄膜上方,讓基板與第一薄膜完全重疊;同時讓第二機具之第二機器手臂之第二吸附件吸附一第二薄膜,第三機器手臂之第三吸附組件吸附一第三薄膜;c.橫向移動第二機器手臂及第三機器手臂,以第三機器手臂將第三薄膜放置在堆疊區之基板上方,讓第三薄膜與基板完全重疊,之後再移開第三吸附組件之後,讓第二機器手臂下降,使第二薄膜層疊於第三薄膜之上方;以及d.重覆b、c步驟,藉以讓複數個薄板堆疊於第三支撐座之堆疊區上。 The method of using the thin plate stacking device provided by the present invention includes: a. placing and positioning at least one substrate on the first temporary storage area of the first support base, and placing and positioning at least one film on the second temporary storage area of the second support base On the storage area, a first film is placed and positioned on the stacking area of the third support base; b. After adsorbing a substrate with the first suction member, the substrate is moved laterally and placed on the first film in the stacking area, so that the substrate and The first film is completely overlapped; at the same time, the second suction member of the second robot arm of the second machine can adsorb a second film, and the third suction component of the third robot arm can adsorb a third film; c. move the second robot arm laterally And the third robotic arm, use the third robotic arm to place the third film above the substrate in the stacking area, so that the third film and the substrate are completely overlapped, and then after removing the third suction assembly, let the second robotic arm descend to make The second film is laminated on the top of the third film; and d. Steps b and c are repeated, so that a plurality of thin plates are stacked on the stacking area of the third support base.

實施時,步驟c之第二機器手臂係以一短距離同時橫向移動,藉以在移開第三吸附組件之後,讓第二機器手臂下降,使第二薄膜橫向交叉層疊於第三薄膜之上方。 In implementation, the second robotic arm of step c moves laterally at a short distance at the same time, so that after the third suction assembly is removed, the second robotic arm is lowered so that the second film is cross-laminated on top of the third film.

實施時,步驟d之複數個薄板係以橫向交叉之方式層疊於第 三支撐座之堆疊區上。 During implementation, the plurality of thin plates in step d are stacked on the first in a crosswise manner On the stacking area of the three support bases.

為進一步了解本發明,以下舉較佳之實施例,配合圖式、圖號,將本發明之具體構成內容及其所達成的功效詳細說明如下。 In order to further understand the present invention, the following is a detailed description of the specific components of the present invention and the effects achieved by the following preferred embodiments, in conjunction with the drawings and figure numbers.

1‧‧‧薄板堆疊裝置 1‧‧‧Thin plate stacking device

11‧‧‧基板 11‧‧‧Substrate

12‧‧‧第一薄膜 12‧‧‧First film

13‧‧‧第二薄膜 13‧‧‧Second film

14‧‧‧第三薄膜 14‧‧‧Third film

15‧‧‧薄板 15‧‧‧Thin Plate

2‧‧‧框架 2‧‧‧Frame

21‧‧‧框架主體 21‧‧‧Frame body

22‧‧‧第一支撐座 22‧‧‧First support seat

221‧‧‧第一暫存區 221‧‧‧First Temporary Storage Area

23‧‧‧第二支撐座 23‧‧‧Second support base

231‧‧‧第二暫存區 231‧‧‧Second Temporary Storage Area

24‧‧‧第三支撐座 24‧‧‧Third support base

241‧‧‧堆疊區 241‧‧‧Stacking area

3‧‧‧第一機具 3‧‧‧The first machine

31‧‧‧第一機器手臂 31‧‧‧The first robotic arm

311‧‧‧第一橫移機構 311‧‧‧The first traverse mechanism

312‧‧‧第一升降機構 312‧‧‧The first lifting mechanism

32‧‧‧第一吸附件 32‧‧‧The first suction part

321‧‧‧第一板架 321‧‧‧First plate rack

322‧‧‧第一吸盤 322‧‧‧First suction cup

4‧‧‧第二機具 4‧‧‧Second Machine

41‧‧‧第二機器手臂 41‧‧‧Second robotic arm

411‧‧‧第二橫移機構 411‧‧‧Second traverse mechanism

412‧‧‧第二升降機構 412‧‧‧Second Lifting Mechanism

42‧‧‧第三機器手臂 42‧‧‧The third robotic arm

421‧‧‧第三橫移機構 421‧‧‧Third traverse mechanism

422‧‧‧第三升降機構 422‧‧‧The third lifting mechanism

423‧‧‧第四橫移機構 423‧‧‧Fourth Transverse Mechanism

424‧‧‧第四升降機構 424‧‧‧The fourth lifting mechanism

43‧‧‧第二吸附件 43‧‧‧Second Adsorption Piece

44‧‧‧第三吸附組件 44‧‧‧Third suction assembly

441‧‧‧第三吸附件 441‧‧‧The third adsorption part

442‧‧‧第四吸附件 442‧‧‧The fourth adsorption part

443‧‧‧缺口 443‧‧‧ gap

第1圖係為本創作薄板堆疊裝置之俯視圖。 Figure 1 is a top view of the creative sheet stacking device.

第2圖係為本創作薄板堆疊裝置之正視圖。 Figure 2 is a front view of this creative sheet stacking device.

第3圖係為本創作薄板堆疊裝置之第二機具之使用狀態圖。 Figure 3 is the use state diagram of the second machine of the creative thin plate stacking device.

第4、5、6圖係為本創作薄板堆疊裝置在堆疊薄板時之使用狀態示意圖。 Figures 4, 5, and 6 are schematic diagrams of the working state of the creative sheet stacking device when stacking sheets.

本創作係為一種薄板堆疊裝置及其使用方法,其中,該薄板係為印刷電路板之類的平板,包括一基板,基板之上表面及下表面分別具有一薄膜,在不同使用狀態下,上層薄膜或下層薄膜之數量亦可分別為一層以上。 This creation is a thin plate stacking device and its use method. The thin plate is a flat plate such as a printed circuit board, and includes a substrate. The upper surface and the lower surface of the substrate are provided with a thin film. The number of films or underlying films can also be more than one layer, respectively.

請參閱第1、2圖所示,其為本創作薄板堆疊裝置1之較佳實施例,係包括一框架2、一第一機具3以及一第二機具4。其中,框架2具有一框架主體21,框架主體21上具有呈L字形排列之一第一支撐座22、一第二支撐座23及一第三支撐座24,實施時,第一支撐座22、第二支撐座23及第三支撐座24亦可以「一」字形相鄰併列。實施時,第一支撐座22係為輸送帶之一端,第一支撐座22亦可為推車之類的承載裝置;第一支撐座22上具有一第一暫存區221,供承載定位至少一基板,第二支撐座23具有一第二暫存區231,供承載定位至少一薄膜,第三支撐座24具有一堆疊區241,供承載定位複數 個層疊之薄板。 Please refer to Figures 1 and 2, which is a preferred embodiment of the creative thin plate stacking device 1, which includes a frame 2, a first machine 3, and a second machine 4. The frame 2 has a frame main body 21, and the frame main body 21 has a first support base 22, a second support base 23, and a third support base 24 arranged in an L-shape. In implementation, the first support base 22, The second support base 23 and the third support base 24 can also be arranged adjacent to each other in a "one" shape. In implementation, the first support base 22 is an end of the conveyor belt, and the first support base 22 can also be a carrying device such as a cart; the first support base 22 has a first temporary storage area 221 for carrying and positioning at least A substrate, the second support base 23 has a second temporary storage area 231 for supporting and positioning at least one film, and the third supporting base 24 has a stacking area 241 for supporting and positioning a plurality of A laminated sheet.

第一機具3包括一第一機器手臂31及一第一吸附件32,第一機器手臂31包括一第一橫移機構311及一第一升降機構312,第一橫移機構311連結框架主體21,並橫跨於第一支撐座22及第三支撐座24之頂部,第一橫移機構311係為伺機馬達與皮帶齒輪組之組合,實施時,第一橫移機構311亦可為氣壓缸與活塞推桿組之組合;第一升降機構312係為伺機馬達與螺桿之組合,實施時,第一升降機構312亦可為氣壓缸與齒輪、齒條之組合,第一升降機構312向上連結第一橫移機構311,藉以讓第一升降機構312在第一暫存區221與堆疊區241之間來回移動;而第一吸附件32係包括一第一板架321及複數個分佈結合在第一板架321上之第一吸盤322,複數個第一吸盤322之底端吸嘴朝下,複數個第一吸盤322之頂端分別連接空壓機,藉以產生向上吸附之力量以吸取基板,或停止吸附之力量而讓基板與複數個第一吸盤322分離並落下。實施時,第一吸附件32係連結於第一升降機構312之底部,當第一升降機構312分別橫向移動至第一暫存區221或堆疊區241之上方時,經由第一升降機構312之上升或下降,可以第一吸附件32吸附第一暫存區221上之一基板,再將基板釋放於堆疊區241上。 The first machine tool 3 includes a first robotic arm 31 and a first suction member 32. The first robotic arm 31 includes a first lateral movement mechanism 311 and a first lifting mechanism 312. The first lateral movement mechanism 311 is connected to the frame body 21 , And across the tops of the first support base 22 and the third support base 24, the first traverse mechanism 311 is a combination of an opportunistic motor and a belt gear set. In implementation, the first traverse mechanism 311 can also be a pneumatic cylinder Combination with a piston push rod group; the first lifting mechanism 312 is a combination of a servo motor and a screw. In implementation, the first lifting mechanism 312 can also be a combination of a pneumatic cylinder, a gear and a rack, and the first lifting mechanism 312 is connected upwards The first traverse mechanism 311 allows the first lifting mechanism 312 to move back and forth between the first temporary storage area 221 and the stacking area 241; and the first suction member 32 includes a first plate frame 321 and a plurality of distributed and combined positions The first suction cups 322 on the first plate frame 321 have the bottom suction nozzles of the plurality of first suction cups 322 facing downwards, and the top ends of the plurality of first suction cups 322 are respectively connected to an air compressor to generate upward suction force to suck the substrate. Or stop the suction force and allow the substrate to be separated from the plurality of first suction cups 322 and fall down. In implementation, the first suction member 32 is connected to the bottom of the first lifting mechanism 312. When the first lifting mechanism 312 moves laterally to the upper side of the first temporary storage area 221 or the stacking area 241, it passes through the first lifting mechanism 312. Ascending or descending, the first adsorption member 32 can adsorb a substrate on the first temporary storage area 221, and then release the substrate on the stacking area 241.

第二機具4包括一第二機器手臂、至少一第三機器手臂、第二吸附件及至少一第三吸附組件,而在本實施例中,第一機具4係包括一第二機器手臂41、一第三機器手臂42、一第二吸附件43及一第三吸附組件44。其中,第二機器手臂41包括一第二橫移機構411及一第二升降機構412,第二橫移機構411連結框架主體21,並橫跨於第二支撐座23及第三支撐座24之頂部,第二橫移機構411係為伺機馬達與皮帶齒輪組之組合,實施時,第二橫 移機構411亦可為氣壓缸與活塞推桿組之組合;第二升降機構412係為伺機馬達與螺桿之組合,實施時,第二升降機構412亦可為氣壓缸與齒輪、齒條之組合,第二升降機構412向上連結第二橫移機構411,藉以讓第二升降機構412在第二暫存區231與堆疊區241之間來回移動;而第二吸附件43係與第一吸附件32具有相同之吸盤結構,藉以產生向上吸附之力量以吸取薄膜,或停止吸附之力量以放下薄膜。實施時,第二吸附件43係連結於第二升降機構412之底部,當第二升降機構412分別橫向移動至第二暫存區231或堆疊區241之上方時,經由第二升降機構412之上升或下降,可以第二吸附件43吸附第二暫存區231上之一薄膜,再將薄膜釋放於堆疊區241上。 The second machine tool 4 includes a second robot arm, at least one third robot arm, a second suction member, and at least one third suction assembly. In this embodiment, the first machine tool 4 includes a second robot arm 41, A third robot arm 42, a second suction member 43 and a third suction assembly 44. Among them, the second robotic arm 41 includes a second traverse mechanism 411 and a second lifting mechanism 412. The second traverse mechanism 411 is connected to the frame body 21 and straddles the second support base 23 and the third support base 24. At the top, the second traverse mechanism 411 is a combination of the opportunistic motor and the belt gear set. When implemented, the second traverse The moving mechanism 411 can also be a combination of a pneumatic cylinder and a piston push rod group; the second lifting mechanism 412 is a combination of a servo motor and a screw. In implementation, the second lifting mechanism 412 can also be a combination of a pneumatic cylinder, a gear, and a rack. , The second lifting mechanism 412 is upwardly connected to the second traverse mechanism 411, so that the second lifting mechanism 412 moves back and forth between the second temporary storage area 231 and the stacking area 241; and the second suction member 43 is connected to the first suction member 32 has the same suction cup structure, which generates upward suction force to absorb the film, or stops the suction force to put down the film. In implementation, the second suction member 43 is connected to the bottom of the second lifting mechanism 412. When the second lifting mechanism 412 moves laterally to above the second temporary storage area 231 or the stacking area 241, the second lifting mechanism 412 Ascending or descending, the second suction member 43 can adsorb a film on the second temporary storage area 231, and then release the film on the stacking area 241.

而第三機器手臂42係以可上下左右移動之方式連結於第二機器手臂41之下方,第三機器手臂42包括一第三橫移機構421、一第三升降機構422、一第四橫移機構423及一第四升降機構424。其中,第三橫移機構421、第三升降機構422、第四橫移機構423及第四升降機構424分別為伺機馬達與螺桿之組合,實施時,第三橫移機構421、第三升降機構422、第四橫移機構423及第四升降機構424亦可分別為氣壓缸與齒輪、齒條之組合,或是氣壓缸與活塞推桿組之組合。第三橫移機構421及第四橫移機構424位在同一平面上,且第三橫移機構421向上連結第三升降機構422,第三橫移機構421向下連結第三吸附件441;第四橫移機構423向上連結第四升降機構424,第四橫移機構423向下連結第四吸附件442,第三吸附件441與第四吸附件442合設為一第三吸附組件44,藉以在第三橫移機構421與第四橫移機構423相對接近時,以第三吸附組件44吸附一薄膜,而在第三橫移機構421與第四橫移機構423反向遠離時,讓第二吸附件43下降並穿過第三吸附件441與第四吸附件 442之間的缺口443,以吸附第二暫存區231上之薄膜,並在吸附之後向上穿過該缺口443以回復原位置。 The third robot arm 42 is connected to the bottom of the second robot arm 41 in a manner that can move up and down, left and right. The third robot arm 42 includes a third traverse mechanism 421, a third lifting mechanism 422, and a fourth traverse mechanism. Mechanism 423 and a fourth lifting mechanism 424. Among them, the third traverse mechanism 421, the third lift mechanism 422, the fourth traverse mechanism 423, and the fourth lift mechanism 424 are respectively a combination of a servo motor and a screw. When implemented, the third traverse mechanism 421, the third lift mechanism 422, the fourth traverse mechanism 423, and the fourth lifting mechanism 424 can also be a combination of a pneumatic cylinder, a gear, and a rack, or a combination of a pneumatic cylinder and a piston push rod group, respectively. The third traverse mechanism 421 and the fourth traverse mechanism 424 are located on the same plane, and the third traverse mechanism 421 is upwardly connected to the third lifting mechanism 422, and the third traverse mechanism 421 is downwardly connected to the third suction member 441; The four traverse mechanism 423 is upwardly connected to the fourth lifting mechanism 424, and the fourth traverse mechanism 423 is downwardly connected to the fourth suction member 442. The third suction member 441 and the fourth suction member 442 are combined to form a third suction assembly 44, whereby When the third traverse mechanism 421 and the fourth traverse mechanism 423 are relatively close, the third suction assembly 44 is used to suck a film, and when the third traverse mechanism 421 and the fourth traverse mechanism 423 are moved away from each other in the opposite direction, the first The second suction member 43 descends and passes through the third suction member 441 and the fourth suction member The gap 443 between 442 is used to adsorb the film on the second temporary storage area 231, and passes upward through the gap 443 to return to the original position after being adsorbed.

藉此,如第3~6圖所示,本創作薄板堆疊裝置1之使用方法係包括下列步驟: Therefore, as shown in Figures 3-6, the method of using the creative thin-plate stacking device 1 includes the following steps:

a.將至少一基板11放置定位在第一支撐座22之第一暫存區221上,至少一薄膜放置定位在第二支撐座23之第二暫存區231上,一第一薄膜12放置定位在第三支撐座24之堆疊區241上。 a. At least one substrate 11 is placed and positioned on the first temporary storage area 221 of the first support base 22, at least one film is placed and positioned on the second temporary storage area 231 of the second support base 23, and a first film 12 is placed It is positioned on the stacking area 241 of the third support base 24.

b.以第一吸附件32吸附第一暫存區221上的一基板11之後,將基板11橫向搬移並放置在堆疊區241之第一薄膜12上方,讓基板11與第一薄膜12完全重疊;同時讓第二機具4之第二機器手臂41之第二吸附件43吸附第二暫存區231上之一第二薄膜13,第三機器手臂42之第三吸附組件44吸附第二暫存區231上之一第三薄膜14。 b. After adsorbing a substrate 11 on the first temporary storage area 221 with the first suction member 32, the substrate 11 is moved laterally and placed above the first film 12 in the stacking area 241 so that the substrate 11 and the first film 12 are completely overlapped ; At the same time, let the second suction member 43 of the second robotic arm 41 of the second implement 4 adsorb a second film 13 on the second temporary storage area 231, and the third suction component 44 of the third robotic arm 42 adsorbs the second temporary storage A third film 14 on the area 231.

c.橫向移動第二機器手臂41及第三機器手臂42,以第三機器手臂42將第三薄膜14放置在堆疊區241之基板12上方,讓第三薄膜14與基板12完全重疊,之後再以一短距離橫向移動第二機器手臂41,同時在分開第三吸附件441與第四吸附件442之後,讓第二機器手臂41下降以放置第二薄膜13,讓第二薄膜13橫向交叉層疊於第三薄膜14之上方。 c. Move the second robotic arm 41 and the third robotic arm 42 laterally, and use the third robotic arm 42 to place the third film 14 above the substrate 12 in the stacking area 241 so that the third film 14 and the substrate 12 are completely overlapped, and then Move the second robot arm 41 laterally in a short distance, and after separating the third suction member 441 and the fourth suction member 442, the second robot arm 41 is lowered to place the second film 13 so that the second film 13 is stacked horizontally Above the third film 14.

d.重覆b、c步驟,藉以讓複數個薄板15以相互橫向交叉層疊之方式堆疊於第三支撐座24之堆疊區241上。 d. Repeat steps b and c, so that a plurality of thin plates 15 are stacked on the stacking area 241 of the third support base 24 in a cross-stacking manner.

在上述步驟a中,第一薄膜12係由第三機器手臂42之第三吸附組件441所預先吸附放置定位。在步驟b、c中,當第二吸附件43與第三吸附組件44同時位於第二暫存區231之上方時,第三吸附組件4之第三吸附件 441與第四吸附件442分開之後,即可讓第二吸附件43下降並穿過第三吸附件441與第四吸附件442之間的缺口443,以吸附第二暫存區231上之第二薄膜13,並在吸附之後向上穿過該缺口443以回復原位置,而在第三吸附件441與第四吸附件442相對接近時,則可以第三吸附件441與第四吸附件442共同吸附第三薄膜14,讓第二機具4同時移動二個薄膜,並在第三支撐座24的堆疊區241上方依順序分別放置第二薄膜13與第三薄膜14。 In the above step a, the first film 12 is preliminarily sucked and positioned by the third sucking assembly 441 of the third robot arm 42. In steps b and c, when the second adsorption element 43 and the third adsorption assembly 44 are located above the second temporary storage area 231 at the same time, the third adsorption element of the third adsorption assembly 4 After the 441 is separated from the fourth suction member 442, the second suction member 43 can be lowered and passed through the gap 443 between the third suction member 441 and the fourth suction member 442, so as to adsorb the second suction member on the second temporary storage area 231. The two films 13 pass upward through the gap 443 after being sucked to return to the original position. When the third sucking member 441 and the fourth sucking member 442 are relatively close, the third sucking member 441 and the fourth sucking member 442 can be shared The third film 14 is adsorbed to allow the second tool 4 to move the two films at the same time, and the second film 13 and the third film 14 are respectively placed on the stacking area 241 of the third support base 24 in sequence.

因此,本創作具有以下之優點: Therefore, this creation has the following advantages:

1、本創作係經由三個機器手臂之搬移程序以簡化基板、薄膜與薄板的堆疊動作,因此,能增加堆疊精準度,並提高整體作業之效率。 1. This creation simplifies the stacking of substrates, films, and thin plates through the moving procedures of three robotic arms. Therefore, the stacking accuracy can be increased and the overall operation efficiency can be improved.

2、本創作係在完成單一薄板的堆疊動作之後,讓第二機器手臂產生短距離之橫向偏移動作,藉以使複數個薄板能橫向交叉層疊於第三支撐座之堆疊區上方,因此,可以方便作業人員在堆疊作業完成之後,將各個薄板快速的分離,以節省作業時間。 2. This creation is to make the second robotic arm produce a short-distance lateral offset movement after completing the stacking action of a single sheet, so that a plurality of sheets can be stacked laterally and crosswise on the stacking area of the third support base. Therefore, you can It is convenient for the operator to quickly separate the thin plates after the stacking operation is completed, so as to save working time.

綜上所述,依上文所揭示之內容,本創作確可達到預期之目的,提供一種能有效的將基板與薄膜堆疊成薄板,並使各個薄板能快速分離以提高作業效率之薄板堆疊裝置及其使用方法,極具產業上利用之價值,爰依法提出發明專利申請。 In summary, according to the content disclosed above, this creation can indeed achieve the expected purpose, providing a thin plate stacking device that can effectively stack substrates and thin films into thin plates, and allows each thin plate to be quickly separated to improve work efficiency. And its use method is of great value for industrial use. Yan filed an invention patent application in accordance with the law.

13‧‧‧第二薄膜 13‧‧‧Second film

4‧‧‧第二機具 4‧‧‧Second Machine

41‧‧‧第二機器手臂 41‧‧‧Second robotic arm

42‧‧‧第三機器手臂 42‧‧‧The third robotic arm

43‧‧‧第二吸附件 43‧‧‧Second Adsorption Piece

44‧‧‧第三吸附組件 44‧‧‧Third suction assembly

441‧‧‧第三吸附件 441‧‧‧The third adsorption part

442‧‧‧第四吸附件 442‧‧‧The fourth adsorption part

443‧‧‧缺口 443‧‧‧ gap

Claims (9)

一種薄板堆疊裝置,該薄板包括一基板,該基板之上、下表面分別具有至少一薄膜,該薄板堆疊裝置包括:一框架,係包括一第一支撐座、一第二支撐座及一第三支撐座,該第一支撐座具有一第一暫存區,該第二支撐座具有一第二暫存區,該第三支撐座具有一堆疊區;一第一機具,係具有一第一機器手臂,該第一機器手臂之一端具有一第一吸附件,供吸附搬移該第一暫存區上之一基板,再將該基板釋放於該堆疊區上;以及一第二機具,係具有一第二機器手臂及至少一第三機器手臂,該第二機器手臂之一端具有一第二吸附件,供吸附該第二暫存區上之一薄膜,再將該薄膜釋放於該堆疊區上,該至少一第三機器手臂係以可上下左右移動之方式連結於該第二機器手臂之下方,該任一第三機器手臂之一端具有一第三吸附組件,該第三吸附組件包括一第三吸附件及一第四吸附件,供以該第三吸附件與該第四吸附件共同吸附該第二暫存區上之一薄膜,再將該薄膜釋放於該堆疊區上;或是在該第三吸附件與該第四吸附件分開之後,讓該第二機器手臂通過。 A thin plate stacking device, the thin plate includes a substrate, the upper and lower surfaces of the substrate are respectively provided with at least one film, the thin plate stacking device includes: a frame, including a first support seat, a second support seat and a third Support base, the first support base has a first temporary storage area, the second support base has a second temporary storage area, the third support base has a stacking area; a first machine tool is provided with a first machine Arm, one end of the first robotic arm has a first suction member for sucking and moving a substrate on the first temporary storage area, and then releasing the substrate on the stacking area; and a second machine having a A second robotic arm and at least one third robotic arm, one end of the second robotic arm has a second suction member for adsorbing a film on the second temporary storage area, and then releasing the film on the stacking area, The at least one third robot arm is connected under the second robot arm in a manner that can move up and down, left and right, and one end of any third robot arm has a third suction assembly, and the third suction assembly includes a third Adsorption member and a fourth adsorption member for the third adsorption member and the fourth adsorption member to jointly adsorb a film on the second temporary storage area, and then release the film on the stacking area; or After the third suction member is separated from the fourth suction member, the second robot arm is allowed to pass. 如申請專利範圍第1項所述之薄板堆疊裝置,其中,該第一機器手臂包括一第一橫移機構及一第一升降機構,該第一橫移機構連結該第一升降機構,該第一升降機構連結該第一吸附件,供帶動該第一吸附件上之一基板橫向或上下移動。 For the sheet stacking device described in claim 1, wherein the first robot arm includes a first traverse mechanism and a first lifting mechanism, the first traverse mechanism is connected to the first lifting mechanism, and the first A lifting mechanism is connected to the first suction member for driving a substrate on the first suction member to move laterally or up and down. 如申請專利範圍第1項所述之薄板堆疊裝置,其中,該第二機器手臂包括一第二橫移機構及一第二升降機構,該第二橫移機構連結該第二升降機構,該第二升降機構連結該第二吸附件,供帶動該第二吸附件上之一薄膜橫向或上下移動。 For example, in the sheet stacking device described in item 1 of the scope of patent application, the second robot arm includes a second traverse mechanism and a second lifting mechanism, the second traverse mechanism is connected to the second lifting mechanism, and the first Two lifting mechanisms are connected to the second suction member to drive a film on the second suction member to move laterally or up and down. 如申請專利範圍第1項所述之薄板堆疊裝置,其中,該第三機器手臂包括一第三橫移機構、一第三升降機構、一第四橫移機構及一第四升降機構,該第三橫移機構連結該第三升降機構,該第三升降機構連結該第三吸附件,該第四橫移機構連結該第四升降機構,該第四升降機構連結該第四吸附件。 For example, the thin plate stacking device described in item 1 of the scope of patent application, wherein the third robot arm includes a third traverse mechanism, a third lifting mechanism, a fourth traverse mechanism, and a fourth lifting mechanism. A three traverse mechanism is connected to the third lifting mechanism, the third lifting mechanism is connected to the third suction member, the fourth lateral movement mechanism is connected to the fourth lifting mechanism, and the fourth lifting mechanism is connected to the fourth suction member. 如申請專利範圍第4項所述之薄板堆疊裝置,其中,該第三橫移機構及該第四橫移機構係位在同一平面上,且以該第三橫移機構及該第四橫移機構相對接近或反向遠離之方式分別連結該第三升降機構及該第四升降機構。 For the thin plate stacking device described in item 4 of the scope of patent application, wherein the third traverse mechanism and the fourth traverse mechanism are located on the same plane, and the third traverse mechanism and the fourth traverse mechanism are The third lifting mechanism and the fourth lifting mechanism are respectively connected in a way that the mechanism is relatively close to or away from each other. 一種使用如申請專利範圍第1至5項其中任一項所述薄板堆疊裝置之方法,係包括:a.將至少一基板放置定位在該第一支撐座之該第一暫存區上,至少一薄膜放置定位在該第二支撐座之該第二暫存區上,一第一薄膜放置定位在該第三支撐座之該堆疊區上;b.以該第一吸附件吸附一基板之後,將基板橫向搬移並放置在該堆疊區之第一薄膜上方,讓基板與第一薄膜完全重疊;讓該第二機具之該第二機器手臂之該第二吸附件吸附一第二薄膜,該第三機器手臂之該第三吸附組件吸附一第三薄膜; c.橫向移動該第二機器手臂及該第三機器手臂,以該第三機器手臂將第三薄膜放置在該堆疊區之基板上方,讓第三薄膜與基板完全重疊,之後再分開該第三吸附組件之該第三吸附件及該第四吸附件,讓該第二機器手臂下降,使第二薄膜層疊於第三薄膜之上方;以及d.重覆b、c步驟,藉以讓複數個薄板堆疊於該第三支撐座之該堆疊區上。 A method of using the thin plate stacking device as described in any one of items 1 to 5 of the scope of the patent application includes: a. placing and positioning at least one substrate on the first temporary storage area of the first support base, at least A film is placed and positioned on the second temporary storage area of the second support base, and a first film is placed and positioned on the stacking area of the third support base; b. After adsorbing a substrate with the first suction member, Move the substrate laterally and place it above the first film in the stacking area so that the substrate and the first film are completely overlapped; let the second suction member of the second robot arm of the second machine absorb a second film, The third suction component of the robot arm sucks a third film; c. Move the second robotic arm and the third robotic arm laterally, use the third robotic arm to place the third film above the substrate in the stacking area, so that the third film and the substrate are completely overlapped, and then separate the third The third suction member and the fourth suction member of the suction assembly are lowered to allow the second robotic arm to stack the second film on top of the third film; and d. Repeat steps b and c to allow multiple thin plates Stacked on the stacking area of the third support seat. 如申請專利範圍第6項所述之薄板堆疊裝置之方法,其中,步驟a之第一薄膜係由該第三機器手臂之該第三吸附組件所吸附放置定位。 According to the method of the sheet stacking device described in item 6 of the scope of patent application, wherein the first film in step a is sucked and positioned by the third suction assembly of the third robot arm. 如申請專利範圍第6項所述之薄板堆疊裝置之方法,其中,步驟c之該第二機器手臂係以一短距離同時橫向移動,藉以在移開該第三吸附組件之後,讓該第二機器手臂下降,使第二薄膜橫向交叉層疊於第三薄膜之上方。 According to the method of the sheet stacking device described in item 6 of the scope of patent application, wherein the second robot arm in step c moves laterally at a short distance at the same time, so that after the third suction assembly is removed, the second The robot arm descends, so that the second film is cross-laminated on top of the third film. 如申請專利範圍第8項所述之薄板堆疊裝置之方法,其中,步驟d之該複數個薄板係以橫向交叉之方式層疊於該第三支撐座之該堆疊區上。 According to the method of the sheet stacking device described in item 8 of the scope of patent application, the plurality of sheets of step d are stacked on the stacking area of the third support base in a crosswise manner.
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