TWI637928B - Glass plate manufacturing method and glass plate manufacturing device - Google Patents
Glass plate manufacturing method and glass plate manufacturing device Download PDFInfo
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- TWI637928B TWI637928B TW104118184A TW104118184A TWI637928B TW I637928 B TWI637928 B TW I637928B TW 104118184 A TW104118184 A TW 104118184A TW 104118184 A TW104118184 A TW 104118184A TW I637928 B TWI637928 B TW I637928B
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Abstract
本發明之目的在於提供一種可降低玻璃板之檢查步驟中之玻璃板之振動的玻璃板製造方法及玻璃板製造裝置。 An object of the present invention is to provide a glass sheet manufacturing method and a glass sheet manufacturing apparatus which can reduce the vibration of the glass sheet in the inspection step of the glass sheet.
玻璃板製造方法包括搬送步驟、及抑制步驟。搬送步驟係向第1方向搬送玻璃板10。抑制步驟係抑制與第1方向交叉之第2方向上之玻璃板之移動。抑制步驟包括第1氣體供給步驟、及第2氣體供給步驟。第1氣體供給步驟係藉由使第1氣體於玻璃板之第1主表面10a與第1引導構件118a、118c之間之第1間隙中沿著第1主表面流動,而將朝向第1引導構件之力賦予至玻璃板。第2氣體供給步驟係藉由使第2氣體於第1主表面之背側之第2主表面10b與第2引導構件118b、118d之間的第2間隙中沿著第2主表面流動,而將朝向第2引導構件之力賦予至玻璃板。 The glass plate manufacturing method includes a conveying step and a suppressing step. The transport step conveys the glass sheet 10 in the first direction. The suppressing step suppresses the movement of the glass sheet in the second direction intersecting the first direction. The suppression step includes a first gas supply step and a second gas supply step. The first gas supply step is directed toward the first guide by causing the first gas to flow along the first main surface in the first gap between the first main surface 10a of the glass sheet and the first guiding members 118a and 118c. The force of the member is imparted to the glass sheet. In the second gas supply step, the second gas flows along the second main surface in the second gap between the second main surface 10b on the back side of the first main surface and the second guiding members 118b and 118d. The force toward the second guiding member is imparted to the glass sheet.
Description
本發明涉及一種玻璃板製造方法及玻璃板製造裝置。 The present invention relates to a glass sheet manufacturing method and a glass sheet manufacturing apparatus.
於玻璃板之製造步驟中,進行用以檢查被切斷為特定尺寸之玻璃板之檢查步驟。於檢查步驟中,例如利用光學方法偵測形成於玻璃板之表面之損傷及條紋等缺陷。 In the manufacturing step of the glass sheet, an inspection step for inspecting the glass sheet cut to a specific size is performed. In the inspection step, for example, optical defects are used to detect defects such as damage and streaks formed on the surface of the glass sheet.
於專利文獻1(日本專利特開2009-236771號公報)中,揭示有玻璃板之檢查裝置之一例。該檢查裝置包含夾持玻璃板之上邊之上部夾持單元、及夾持玻璃板之下邊之下部夾持單元。該檢查裝置於使上部夾持單元與下部夾持單元背離而對玻璃板賦予上下方向之張力之狀態下,使玻璃板相對於偵測玻璃板之缺陷之裝置相對性地移動。 An example of an inspection apparatus for a glass sheet is disclosed in Patent Document 1 (Japanese Laid-Open Patent Publication No. 2009-236771). The inspection device comprises a clamping unit above the upper side of the clamping glass plate and a clamping unit below the lower side of the clamping glass plate. The inspection device relatively moves the glass plate relative to the device for detecting the defect of the glass plate while the upper holding unit and the lower holding unit are separated from each other to impart tension in the vertical direction to the glass sheet.
[專利文獻1]日本專利特開2009-236771號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-236771
然而,專利文獻1(日本專利特開2009-236771號公報)中所揭示之檢查裝置藉由上部夾持單元及下部夾持單元對玻璃板賦予上下方向之張力,因此有於夾持如用於液晶顯示裝置般之大型且較薄之玻璃板的情形時玻璃板破碎之擔憂。 However, the inspection apparatus disclosed in the patent document 1 (Japanese Patent Laid-Open Publication No. 2009-236771) is provided with a tension in the vertical direction by the upper holding unit and the lower holding unit, and thus is used for clamping. In the case of a large and thin glass plate like a liquid crystal display device, the glass plate is broken.
又,由於一面使玻璃板移動一面以較高之精度偵測玻璃板之缺 陷,因此必須使玻璃板之姿勢穩定化而抑制玻璃板之振動。尤其,使玻璃板之表面之法線之方向穩定化、及降低玻璃板之表面之法線方向的振動對玻璃板之檢查精度之提高較為重要。 Moreover, due to the movement of the glass plate, the glass plate is detected with high precision. Since it is trapped, it is necessary to stabilize the posture of the glass plate and suppress the vibration of the glass plate. In particular, it is important to stabilize the direction of the normal to the surface of the glass sheet and to reduce the vibration in the normal direction of the surface of the glass sheet to improve the inspection accuracy of the glass sheet.
本發明之目的在於提供一種可降低玻璃板之檢查步驟中之玻璃板之振動的玻璃板製造方法及玻璃板製造裝置。 An object of the present invention is to provide a glass sheet manufacturing method and a glass sheet manufacturing apparatus which can reduce the vibration of the glass sheet in the inspection step of the glass sheet.
本發明之玻璃板製造方法包括搬送步驟、及抑制步驟。搬送步驟係向第1方向搬送玻璃板。抑制步驟係於向第1方向搬送玻璃板時,抑制與第1方向交叉之第2方向上之玻璃板之移動。抑制步驟包括第1氣體供給步驟。第1氣體供給步驟係藉由使第1氣體於玻璃板之第1主表面與配置為與第1主表面對向之第1引導構件之間之第1間隙中沿著第1主表面流動,而將朝向第1引導構件之力賦予至玻璃板。 The method for producing a glass sheet of the present invention includes a carrying step and a suppressing step. The transfer step conveys the glass sheet in the first direction. The suppressing step suppresses the movement of the glass sheet in the second direction intersecting the first direction when the glass sheet is conveyed in the first direction. The suppressing step includes a first gas supply step. The first gas supply step flows along the first main surface in the first gap between the first main surface of the glass sheet and the first guiding member disposed to face the first main surface. The force directed to the first guiding member is imparted to the glass sheet.
一般而言,大型之較薄之玻璃板於在搬送中未被賦予任何力之情形時,容易因玻璃板周圍之壓力之微小變化,而向與玻璃板之主表面正交之方向振動。然而,於本發明之玻璃板製造方法中,所搬送之玻璃板之一主表面受到朝向與該主表面對向之引導構件之力。由於氣體於玻璃板之主表面與引導構件之間流動,因此玻璃板不與引導構件碰撞,從而可穩定地保持玻璃板與引導構件之間之距離。因此,所搬送之玻璃板不易於與其主表面正交之方向上受到力之變化。因此,本發明之玻璃板製造方法可降低玻璃板之振動。 In general, when a large-sized thin glass plate is not given any force during transportation, it is likely to vibrate in a direction orthogonal to the main surface of the glass plate due to a slight change in pressure around the glass plate. However, in the glass sheet manufacturing method of the present invention, one of the main surfaces of the conveyed glass sheet is subjected to a force toward the guiding member opposed to the main surface. Since the gas flows between the main surface of the glass sheet and the guiding member, the glass sheet does not collide with the guiding member, so that the distance between the glass sheet and the guiding member can be stably maintained. Therefore, the conveyed glass sheet is not easily subjected to a change in force in a direction orthogonal to the main surface. Therefore, the glass sheet manufacturing method of the present invention can reduce the vibration of the glass sheet.
又,較佳為,抑制步驟還包括第2氣體供給步驟。第2氣體供給步驟係藉由使第2氣體於第1主表面之背側之第2主表面與第2引導構件之間的第2間隙中沿著第2主表面流動,而將朝向第2引導構件之力賦予至玻璃板,上述第2引導構件以與第2主表面對向之方式配置。 Further, preferably, the suppressing step further includes a second gas supply step. The second gas supply step is to move toward the second main surface by causing the second gas to flow along the second main surface in the second gap between the second main surface on the back side of the first main surface and the second guiding member. The force of the guiding member is applied to the glass sheet, and the second guiding member is disposed to face the second main surface.
於該玻璃板製造方法中,所搬送之玻璃板之一對主表面受到互為相反方向之力。於一對主表面各自所受之力之大小相同之情形時, 於與主表面正交之方向上作用於玻璃板之力均衡。因此,所搬送之玻璃板不易於與其主表面正交之方向上受到力之變化。因此,本發明之玻璃板製造方法可降低玻璃板之振動。 In the glass sheet manufacturing method, one of the glass sheets conveyed faces the main surface in a direction opposite to each other. When the magnitude of the force applied to each of the main surfaces is the same, The force acting on the glass sheet in the direction orthogonal to the main surface is balanced. Therefore, the conveyed glass sheet is not easily subjected to a change in force in a direction orthogonal to the main surface. Therefore, the glass sheet manufacturing method of the present invention can reduce the vibration of the glass sheet.
又,端面測定步驟較佳為於第1氣體供給步驟中,第1氣體藉由朝向第1引導構件噴出而沿著第1引導構件之表面流動並被引導至第1間隙,於第2氣體供給步驟中,第2氣體藉由朝向第2引導構件噴出而沿著第2引導構件之表面流動並被引導至第2間隙。 Further, in the end surface measurement step, the first gas is supplied to the first guiding member and flows along the surface of the first guiding member to be guided to the first gap, and the second gas is supplied to the first gas supply step. In the step, the second gas flows along the surface of the second guiding member by being ejected toward the second guiding member, and is guided to the second gap.
又,較佳為,於搬送步驟中,玻璃板於藉由夾持玻璃板之一端部而被懸掛之狀態下向與端部平行之第1方向搬送。於該情形時,於第1氣體供給步驟中,第1氣體於沿著第1方向緩緩變窄之第1間隙中流動,於第2氣體供給步驟中,第2氣體於沿著第1方向緩緩變窄之第2間隙中流動。 Moreover, in the conveyance step, it is preferable that the glass plate is conveyed in the first direction parallel to the end portion in a state where the glass plate is suspended by sandwiching one end portion of the glass plate. In this case, in the first gas supply step, the first gas flows in the first gap that gradually narrows along the first direction, and in the second gas supply step, the second gas follows the first direction. Flows in the second gap that gradually narrows.
又,較佳為,上述玻璃板製造方法還包括檢查玻璃板之檢查步驟。於該情形時,抑制步驟至少於檢查步驟之前進行。 Further, preferably, the glass sheet manufacturing method further includes an inspection step of inspecting the glass sheet. In this case, the inhibition step is performed at least before the inspection step.
於該玻璃板製造方法中,由於在搬送步驟中降低所搬送之玻璃板之振動,因此於檢查步驟中,可抑制玻璃板之缺陷之檢測精度降低。 In the method for producing a glass sheet, since the vibration of the glass sheet to be conveyed is lowered in the conveying step, it is possible to suppress a decrease in the detection accuracy of defects of the glass sheet in the inspection step.
本發明之玻璃板製造裝置包含用以固定玻璃板之平台、用以對玻璃板之端面進行倒角加工之倒角磨石、搬送機構、及抑制機構。搬送機構係用以向第1方向搬送玻璃板之機構。抑制機構係用以於向第1方向搬送玻璃板時抑制與第1方向交叉之第2方向上之玻璃板之移動之機構。抑制機構包含第1引導構件、第2引導構件、第1氣體噴出機構、及第2氣體噴出機構。第1引導構件具有與玻璃板之第1主表面對向之第1引導表面。第2引導構件具有與第1主表面之背側之第2主表面對向之第2引導表面。第1氣體噴出機構朝向第1引導表面噴出第1氣體。第2氣體噴出機構朝向第2引導表面噴出第2氣體。第1氣體噴出機 構使第1氣體於第1主表面與第1引導表面之間之第1間隙中沿著第1主表面流動,而將朝向第1引導構件之力賦予至玻璃板。第2氣體噴出機構使第2氣體於第2主表面與第2引導表面之間之第2間隙中沿著第2主表面流動,而將朝向第2引導構件之力賦予至玻璃板。 The glass sheet manufacturing apparatus of the present invention comprises a platform for fixing a glass sheet, a chamfering grindstone for chamfering the end surface of the glass sheet, a conveying mechanism, and a suppressing mechanism. The conveying mechanism is a mechanism for conveying the glass sheet in the first direction. The suppression mechanism is a mechanism for suppressing movement of the glass sheet in the second direction intersecting the first direction when the glass sheet is conveyed in the first direction. The suppression mechanism includes a first guiding member, a second guiding member, a first gas ejecting mechanism, and a second gas ejecting mechanism. The first guiding member has a first guiding surface that faces the first main surface of the glass sheet. The second guiding member has a second guiding surface that faces the second main surface on the back side of the first main surface. The first gas ejecting mechanism ejects the first gas toward the first guiding surface. The second gas ejecting mechanism ejects the second gas toward the second guiding surface. First gas injector The first gas flows along the first main surface in the first gap between the first main surface and the first guiding surface, and the force directed to the first guiding member is applied to the glass sheet. The second gas ejecting means causes the second gas to flow along the second main surface in the second gap between the second main surface and the second guiding surface, and applies a force toward the second guiding member to the glass sheet.
又,較佳為,第1引導構件使第1氣體沿著第1引導表面流動,而將第1氣體引導至第1間隙,第2引導構件使第2氣體沿著第2引導表面流動,而將第2氣體引導至第2間隙。 Moreover, it is preferable that the first guiding member causes the first gas to flow along the first guiding surface to guide the first gas to the first gap, and the second guiding member causes the second gas to flow along the second guiding surface. The second gas is guided to the second gap.
又,較佳為,搬送機構於藉由夾持玻璃板之一個端部而將玻璃板懸掛之狀態下,向與端部平行之第1方向搬送玻璃板。於該情形時,第1引導構件具有沿著第1方向緩緩靠近第1主表面之第1引導表面,第2引導構件具有沿著第1方向緩緩靠近第2主表面之第2引導表面。 Moreover, it is preferable that the conveying mechanism conveys the glass sheet in the first direction parallel to the end portion in a state in which the glass sheet is suspended by sandwiching one end portion of the glass sheet. In this case, the first guiding member has the first guiding surface that gradually approaches the first main surface along the first direction, and the second guiding member has the second guiding surface that gradually approaches the second main surface along the first direction. .
又,較佳為,上述玻璃板製造裝置還具有檢查玻璃板之檢查機構。於該情形時,抑制機構至少於第1方向上設置於檢查機構之上游側。 Moreover, it is preferable that the glass sheet manufacturing apparatus further has an inspection mechanism for inspecting the glass sheet. In this case, the suppression mechanism is provided on the upstream side of the inspection mechanism at least in the first direction.
又,較佳為,抑制機構進而於第1方向上設置於檢查機構之下游側。 Moreover, it is preferable that the suppression means is further provided on the downstream side of the inspection means in the first direction.
於該玻璃板製造裝置中,不僅於檢查機構之上游側降低玻璃板之振動,亦於檢查機構之下游側降低玻璃板之振動,由此可進一步降低檢查機構之上游側之玻璃板之振動。因此,該玻璃板製造裝置可更有效地抑制檢查機構對玻璃板之缺陷之檢測精度降低。 In the glass sheet manufacturing apparatus, not only the vibration of the glass sheet is lowered on the upstream side of the inspection mechanism, but also the vibration of the glass sheet is lowered on the downstream side of the inspection mechanism, whereby the vibration of the glass sheet on the upstream side of the inspection mechanism can be further reduced. Therefore, the glass sheet manufacturing apparatus can more effectively suppress a decrease in the detection accuracy of the inspection of the glass sheet by the inspection mechanism.
又,較佳為,上述玻璃板製造裝置包含於第1方向上設置於檢查機構之上游側之複數個抑制機構。於該情形時,於複數個抑制機構之各者中,第1主表面與第1引導表面之間之最小距離、及第2主表面與第2引導表面之間之最小距離沿著第1方向緩緩變小。 Moreover, it is preferable that the glass sheet manufacturing apparatus includes a plurality of suppression mechanisms provided on the upstream side of the inspection mechanism in the first direction. In this case, among the plurality of suppression mechanisms, the minimum distance between the first main surface and the first guiding surface and the minimum distance between the second main surface and the second guiding surface are along the first direction. Slowly become smaller.
本發明之玻璃板製造方法及玻璃板製造裝置可降低玻璃板之檢查步驟中之玻璃板之振動。 The glass sheet manufacturing method and the glass sheet manufacturing apparatus of the present invention can reduce the vibration of the glass sheet in the inspection step of the glass sheet.
10‧‧‧玻璃板 10‧‧‧ glass plate
10a‧‧‧左主表面(第1主表面) 10a‧‧‧Left main surface (1st main surface)
10b‧‧‧右主表面(第2主表面) 10b‧‧‧Right main surface (2nd main surface)
100‧‧‧玻璃板製造裝置 100‧‧‧ glass plate manufacturing equipment
102‧‧‧搬送裝置(搬送機構) 102‧‧‧Transporting device (transporting mechanism)
104‧‧‧檢查裝置(檢查機構) 104‧‧‧Inspection device (inspection agency)
110‧‧‧上部引導機構 110‧‧‧Upper guiding mechanism
112‧‧‧夾具機構 112‧‧‧Clamping mechanism
112a‧‧‧基部 112a‧‧‧ base
112b‧‧‧夾持部 112b‧‧‧ gripping department
114‧‧‧下部引導機構 114‧‧‧Lower guiding mechanism
114a‧‧‧狹縫 114a‧‧‧slit
116a‧‧‧第1左氣刀(第1氣體噴出機構) 116a‧‧‧1st air knife (first gas injection mechanism)
116b‧‧‧第1右氣刀(第2氣體噴出機構) 116b‧‧‧1st right air knife (2nd gas ejection mechanism)
116c‧‧‧第2左氣刀(第1氣體噴出機構) 116c‧‧‧2nd left air knife (first gas injection mechanism)
116d‧‧‧第2右氣刀(第2氣體噴出機構) 116d‧‧‧2nd right air knife (2nd gas injection mechanism)
116e‧‧‧氣刀 116e‧‧‧ air knife
116f‧‧‧氣刀 116f‧‧‧ air knife
118a‧‧‧第1左導板(第1引導構件) 118a‧‧‧1st left guide (first guide member)
118b‧‧‧第1右導板(第2引導構件) 118b‧‧‧1st right guide (second guide member)
118c‧‧‧第2左導板(第1引導構件) 118c‧‧‧2nd left guide (1st guide member)
118d‧‧‧第2右導板(第2引導構件) 118d‧‧‧2nd right guide (2nd guiding member)
118e‧‧‧導板 118e‧‧‧ Guide
118f‧‧‧導板 118f‧‧‧ Guide
119a‧‧‧第1左引導表面(第1引導表面) 119a‧‧‧1st left guiding surface (1st guiding surface)
119a1‧‧‧引導彎曲面 119a1‧‧‧Guided curved surface
119a2‧‧‧引導平面 119a2‧‧‧ Guide plane
119b‧‧‧第1右引導表面(第2引導表面) 119b‧‧‧1st right guiding surface (2nd guiding surface)
119c‧‧‧第2左引導表面(第1引導表面) 119c‧‧‧2nd left guiding surface (1st guiding surface)
119d‧‧‧第2右引導表面(第2引導表面) 119d‧‧‧2nd right guiding surface (2nd guiding surface)
120‧‧‧光源 120‧‧‧Light source
122‧‧‧線傳感器 122‧‧‧ line sensor
122a‧‧‧相機 122a‧‧‧ camera
S1‧‧‧成形步驟 S1‧‧‧ forming step
S2‧‧‧板狀裁切步驟 S2‧‧‧ plate cutting steps
S3‧‧‧第1檢查步驟 S3‧‧‧1st inspection step
S4‧‧‧切斷步驟 S4‧‧‧cutting steps
S5‧‧‧粗面化步驟 S5‧‧‧ roughening step
S6‧‧‧端面加工步驟 S6‧‧‧ Face processing steps
S7‧‧‧清洗步驟 S7‧‧‧ cleaning steps
S8‧‧‧第2檢查步驟 S8‧‧‧Second inspection steps
S9‧‧‧捆包步驟 S9‧‧‧Bundle steps
F1‧‧‧箭頭 F1‧‧‧ arrow
F2‧‧‧箭頭 F2‧‧‧ arrow
F3‧‧‧箭頭 F3‧‧‧ arrow
F4‧‧‧箭頭 F4‧‧‧ arrow
L1‧‧‧尺寸 L1‧‧‧ size
L2‧‧‧尺寸 L2‧‧‧ size
L3‧‧‧尺寸 L3‧‧‧ size
L4‧‧‧尺寸 L4‧‧‧ size
L5‧‧‧距離 L5‧‧‧ distance
L6‧‧‧距離 L6‧‧‧ distance
L7‧‧‧尺寸 L7‧‧‧ size
L8‧‧‧直徑 L8‧‧‧ diameter
L9‧‧‧尺寸 L9‧‧‧ size
L10‧‧‧距離 L10‧‧‧ distance
L11‧‧‧距離之最小值 The minimum distance of L11‧‧‧
L20‧‧‧距離之最小值 The minimum distance of L20‧‧‧
X‧‧‧軸 X‧‧‧ axis
Y‧‧‧軸 Y‧‧‧ axis
Z‧‧‧軸 Z‧‧‧ axis
θ‧‧‧角度 Θ‧‧‧ angle
圖1係表示玻璃板之製造步驟之流程圖之一例。 Fig. 1 is a view showing an example of a flow chart of a manufacturing step of a glass sheet.
圖2係實施形態之玻璃板製造裝置之立體圖。 Fig. 2 is a perspective view of a glass sheet manufacturing apparatus of the embodiment.
圖3係自圖2之箭頭III之方向觀察之玻璃板製造裝置之側視圖。 Figure 3 is a side elevational view of the glass sheet manufacturing apparatus as seen from the direction of arrow III of Figure 2.
圖4係自圖2之箭頭IV之方向觀察之玻璃板製造裝置之俯視圖。 Figure 4 is a plan view of the glass sheet manufacturing apparatus as seen from the direction of the arrow IV of Figure 2 .
圖5係用以說明自氣刀噴出且藉由導板引導之空氣之流動之圖。 Figure 5 is a diagram for explaining the flow of air ejected from an air knife and guided by a guide.
圖6係用以說明氣刀及導板之尺寸及位置之一例之圖。 Fig. 6 is a view for explaining an example of the size and position of the air knife and the guide.
圖7係用以說明氣刀及導板之尺寸及位置之一例之圖。且係自圖6之箭頭VII之方向觀察之圖。 Fig. 7 is a view for explaining an example of the size and position of the air knife and the guide. And it is a view seen from the direction of the arrow VII of FIG.
圖8係變化例B之玻璃板製造裝置之俯視圖。 Fig. 8 is a plan view showing a glass sheet manufacturing apparatus of Modification B.
圖9係變化例C之玻璃板製造裝置之俯視圖。 Fig. 9 is a plan view showing a glass sheet manufacturing apparatus of Modification C.
一面參照附圖,一面對本發明之一實施形態進行說明。本實施形態之玻璃板製造裝置100主要包含:搬送裝置102,其用以搬送玻璃板10;及檢查裝置104,其用以檢查藉由搬送裝置102搬送之玻璃板10。 An embodiment of the present invention will be described with reference to the accompanying drawings. The glass sheet manufacturing apparatus 100 of the present embodiment mainly includes a conveying device 102 for conveying the glass sheet 10, and an inspection device 104 for inspecting the glass sheet 10 conveyed by the conveying device 102.
(1)玻璃板之製造步驟之概要 (1) Outline of the manufacturing steps of the glass plate
首先,對玻璃板10之製造步驟進行說明。玻璃板10用於製造液晶顯示器、電漿顯示器及有機EL(Electroluminescence,電致發光)顯示器等平板顯示器(FPD)。玻璃板10例如具有0.2mm~0.8mm之厚度,並且具有縱680mm~2200mm及橫880mm~2500mm之尺寸。 First, the manufacturing steps of the glass sheet 10 will be described. The glass plate 10 is used to manufacture a flat panel display (FPD) such as a liquid crystal display, a plasma display, and an organic EL (Electroluminescence) display. The glass plate 10 has, for example, a thickness of 0.2 mm to 0.8 mm, and has a size of 680 mm to 2200 mm in length and 880 mm to 2500 mm in width.
作為玻璃板10之一例,列舉具有以下(a)~(j)組成之玻璃。 As an example of the glass plate 10, a glass having the following composition (a) to (j) is exemplified.
(a)SiO2:50質量%~70質量%;(b)Al2O3:10質量%~25質量%; (c)B2O3:1質量%~18質量%;(d)MgO:0質量%~10質量%;(e)CaO:0質量%~20質量%;(f)SrO:0質量%~20質量%;(g)BaO:0質量%~10質量%;(h)RO:5質量%~20質量%(R係選自Mg、Ca、Sr及Ba中之至少1種);(i)R'2O:0質量%~2.0質量%(R'係選自Li、Na及K中之至少1種);(j)選自SnO2、Fe2O3及CeO2中之至少1種金屬氧化物。 (a) SiO 2 : 50% by mass to 70% by mass; (b) Al 2 O 3 : 10% by mass to 25% by mass; (c) B 2 O 3 : 1% by mass to 18% by mass; (d) MgO : 0% by mass to 10% by mass; (e) CaO: 0% by mass to 20% by mass; (f) SrO: 0% by mass to 20% by mass; (g) BaO: 0% by mass to 10% by mass; (h) RO: 5 mass% to 20 mass% (R is at least one selected from the group consisting of Mg, Ca, Sr, and Ba); (i) R' 2 O: 0% by mass to 2.0% by mass (R' is selected from At least one of Li, Na, and K); (j) at least one metal oxide selected from the group consisting of SnO 2 , Fe 2 O 3 , and CeO 2 .
再者,具有上述組成之玻璃於未達0.1質量%之範圍內容許其他微量成分之存在。 Further, the glass having the above composition allows the presence of other trace components in the range of less than 0.1% by mass.
圖1係表示玻璃板10之製造步驟之流程圖之一例。玻璃板10之製造步驟主要包括成形步驟(步驟S1)、板狀裁切步驟(步驟S2)、第1檢查步驟(步驟S3)、切斷步驟(步驟S4)、粗面化步驟(步驟S5)、端面加工步驟(步驟S6)、清洗步驟(步驟S7)、第2檢查步驟(步驟S8)、及梱包步驟(步驟S9)。 Fig. 1 is a view showing an example of a flow chart of a manufacturing step of the glass sheet 10. The manufacturing steps of the glass sheet 10 mainly include a forming step (step S1), a plate-shaped cutting step (step S2), a first inspection step (step S3), a cutting step (step S4), and a roughening step (step S5). The end surface processing step (step S6), the cleaning step (step S7), the second inspection step (step S8), and the sacrificial step (step S9).
於成形步驟S1中,藉由下拉法或浮式法自將玻璃原料加熱而獲得之熔融玻璃連續地成形玻璃片材。對所成形之玻璃片材一面以不產生變形及翹曲之方式進行溫度控制,一面冷卻至玻璃緩冷點以下。 In the forming step S1, the molten glass obtained by heating the glass raw material by a down-draw method or a floating method continuously forms a glass sheet. The formed glass sheet is cooled to a temperature below the glass slow cooling point while being temperature-controlled so as not to be deformed or warped.
於板狀裁切步驟S2中,將於成形步驟S1中成形之玻璃片材切斷,而獲得具有特定尺寸之素板玻璃。 In the plate-like cutting step S2, the glass sheet formed in the forming step S1 is cut to obtain a plain glass having a specific size.
於第1檢查步驟S3中,利用玻璃板製造裝置100對在板狀裁切步驟S2中獲得之素板玻璃進行檢查。於第1檢查步驟S3中,主要偵測存在於素板玻璃之內部之透光性及非透光性之異物。異物例如係玻璃原料成分、金屬及微小之氣泡。又,於第1檢查步驟S3中,亦可偵測存在於素板玻璃之主表面之條紋及損傷。 In the first inspection step S3, the plain glass obtained in the plate-shaped cutting step S2 is inspected by the glass sheet manufacturing apparatus 100. In the first inspection step S3, the translucent and non-transparent foreign matter existing inside the plain glass is mainly detected. The foreign matter is, for example, a glass raw material component, a metal, and minute bubbles. Further, in the first inspection step S3, it is also possible to detect streaks and damage existing on the main surface of the plain glass.
於切斷步驟S4中,將於第1檢查步驟S3中獲得之板玻璃切斷,而獲得製品尺寸之玻璃板10。使用激光以較高之精度切斷素板玻璃。 In the cutting step S4, the sheet glass obtained in the first inspection step S3 is cut to obtain the glass sheet 10 of the product size. The laser is used to cut the plain glass with a high precision.
於粗面化步驟S5中,進行使於切斷步驟S4中獲得之玻璃板10之主表面之表面粗糙度增加之粗面化處理。玻璃板10之粗面化處理例如係使用含有氟化氫之蝕刻劑之濕式蝕刻。 In the roughening step S5, the roughening treatment for increasing the surface roughness of the main surface of the glass sheet 10 obtained in the cutting step S4 is performed. The roughening treatment of the glass plate 10 is, for example, wet etching using an etchant containing hydrogen fluoride.
於端面加工步驟S6中,進行已於粗面化步驟S5中進行粗面化處理之玻璃板10之端面的倒角加工。已倒角加工之端面之一部分具有R形狀。 In the end surface processing step S6, the chamfering of the end surface of the glass sheet 10 which has been subjected to the roughening treatment in the roughening step S5 is performed. One of the end faces of the chamfered process has an R shape.
於清洗步驟S7中,對已於端面加工步驟S6中進行端面之倒角加工之玻璃板10進行清洗。於玻璃板10附著有因素板玻璃之切斷、及玻璃板10之端面加工產生之微小之玻璃片、或於環境中存在之有機物等異物。藉由清洗玻璃板10而去除該等異物。 In the cleaning step S7, the glass sheet 10 which has been chamfered by the end surface in the end surface processing step S6 is cleaned. The glass plate 10 is attached with a cutting of the factor plate glass, a minute glass piece produced by processing the end surface of the glass plate 10, or a foreign matter such as an organic substance existing in the environment. The foreign matter is removed by cleaning the glass sheet 10.
於第2檢查步驟S8中,檢查已於清洗步驟S7中清洗之玻璃板10。具體而言,光學測定玻璃板10之主表面而偵測玻璃板10之缺陷。玻璃板10之缺陷例如係形成於玻璃板10之主表面之條紋、存在於玻璃板10之主表面之損傷及裂痕、附著於玻璃板10之主表面之異物、及存在於玻璃板10之內部之微小之氣泡等。 In the second inspection step S8, the glass sheet 10 that has been cleaned in the cleaning step S7 is inspected. Specifically, the main surface of the glass sheet 10 is optically measured to detect defects of the glass sheet 10. The defects of the glass plate 10 are, for example, stripes formed on the main surface of the glass plate 10, damage and cracks existing on the main surface of the glass plate 10, foreign matter adhering to the main surface of the glass plate 10, and existing inside the glass plate 10. Tiny bubbles, etc.
於梱包步驟S9中,將第2檢查步驟S8中之檢查合格之玻璃板10與用以保護玻璃板10之間隔紙交替地積層於托板上並梱包。已梱包之玻璃板10出貨至FPD之製造業者等。 In the bag step S9, the glass sheet 10 which has passed the inspection in the second inspection step S8 and the spacer paper for protecting the glass sheet 10 are alternately laminated on the pallet and are wrapped. The glass sheet 10 that has been wrapped is shipped to the manufacturer of the FPD.
(2)玻璃板製造裝置之構成 (2) Composition of glass plate manufacturing equipment
玻璃板製造裝置100於第1檢查步驟S3中,一面藉由搬送裝置102搬送素板玻璃,一面藉由檢查裝置104光學性地檢查素板玻璃之缺陷。缺陷主要為存在於素板玻璃之內部之微小之氣泡等異物。圖2係玻璃板製造裝置100之立體圖。圖3係自圖2所示之箭頭III之方向觀察之玻璃板製造裝置100之側視圖。圖4係自圖2所示之箭頭IV之方向觀 察之玻璃板製造裝置100的俯視圖。玻璃板製造裝置100設置於以壓力成為固定之方式被控制之空間。以下,為方便起見,將藉由搬送裝置102搬送且藉由檢查裝置104檢查之素板玻璃記載為玻璃板10。 In the first inspection step S3, the glass sheet manufacturing apparatus 100 optically inspects the defects of the plain glass by the inspection apparatus 104 while conveying the plain glass by the conveyance apparatus 102. The defects are mainly foreign matter such as tiny bubbles existing inside the plain glass. 2 is a perspective view of a glass sheet manufacturing apparatus 100. Fig. 3 is a side view of the glass sheet manufacturing apparatus 100 as seen from the direction of the arrow III shown in Fig. 2. Figure 4 is a view from the direction of the arrow IV shown in Figure 2. A plan view of the glass sheet manufacturing apparatus 100 is examined. The glass sheet manufacturing apparatus 100 is provided in a space that is controlled such that the pressure is fixed. Hereinafter, for convenience, the plain glass that is transported by the transport device 102 and inspected by the inspection device 104 is described as the glass sheet 10.
(2-1)搬送裝置之構成 (2-1) Composition of the transport device
搬送裝置102沿水平方向搬送直立狀態之玻璃板10。藉由搬送裝置102搬送之玻璃板10之主表面之法線平行於水平方向。於圖2~圖4中,表示有構成三維空間之正交座標系之X軸、Y軸及Z軸。X軸平行於玻璃板10之搬送方向。Y軸平行於玻璃板10之主表面之法線。Z軸平行於鉛垂方向,且與玻璃板10之主表面之法線正交。 The conveying device 102 conveys the glass plate 10 in an upright state in the horizontal direction. The normal line of the main surface of the glass sheet 10 conveyed by the conveying device 102 is parallel to the horizontal direction. In FIGS. 2 to 4, the X-axis, the Y-axis, and the Z-axis of the orthogonal coordinate system constituting the three-dimensional space are shown. The X axis is parallel to the conveying direction of the glass sheet 10. The Y axis is parallel to the normal to the major surface of the glass sheet 10. The Z axis is parallel to the vertical direction and is orthogonal to the normal to the major surface of the glass sheet 10.
X軸之方向係搬送玻璃板10之方向。以下,將X軸之負方向稱為上游側,將X軸之正方向稱為下游側。將玻璃板10自上游側朝向下游側搬送。如圖4所示,於自上游側朝向下游側觀察之情形時,將玻璃板10之右側設為Y軸負方向,將玻璃板10之左側設為Y軸正方向。Z軸之方向係朝鉛垂方向上方。 The direction of the X-axis is the direction in which the glass sheet 10 is conveyed. Hereinafter, the negative direction of the X-axis is referred to as the upstream side, and the positive direction of the X-axis is referred to as the downstream side. The glass plate 10 is conveyed from the upstream side toward the downstream side. As shown in FIG. 4, when viewed from the upstream side toward the downstream side, the right side of the glass plate 10 is set to the Y-axis negative direction, and the left side of the glass plate 10 is set to the Y-axis positive direction. The direction of the Z axis is upward in the vertical direction.
搬送裝置102主要包含上部引導機構110、夾具機構112、下部引導機構114、複數個氣刀116a、…、及複數個導板118a、…。以下,將玻璃板10之左側之主表面稱為左主表面10a,將玻璃板10之右側之主表面稱為右主表面10b。 The conveying device 102 mainly includes an upper guiding mechanism 110, a jig mechanism 112, a lower guiding mechanism 114, a plurality of air knives 116a, ..., and a plurality of guide plates 118a, .... Hereinafter, the main surface on the left side of the glass sheet 10 is referred to as the left main surface 10a, and the main surface on the right side of the glass sheet 10 is referred to as the right main surface 10b.
(2-1-1)上部引導機構 (2-1-1) Upper guiding mechanism
上部引導機構110係於所搬送之玻璃板10之上方沿著X軸方向延伸之導軌。上部引導機構110安裝有夾具機構112。上部引導機構110具有用以使夾具機構112向X軸方向移動之驅動機構(未圖示)。 The upper guide mechanism 110 is a guide rail that extends in the X-axis direction above the conveyed glass sheet 10. The upper guide mechanism 110 is mounted with a clamp mechanism 112. The upper guide mechanism 110 has a drive mechanism (not shown) for moving the clamp mechanism 112 in the X-axis direction.
(2-1-2)夾具機構 (2-1-2) Fixture mechanism
夾具機構112夾持玻璃板10之Z軸正方向之端部即上端部。夾具機構112主要包含基部112a、及複數個夾持部112b。基部112a係沿著X軸方向延伸之構件。基部112a以可與上部引導機構110一同滑動之方 式安裝於上部引導機構110。基部112a可藉由與上部引導機構110一同滑動,而向X軸方向移動。於基部112a之下側,沿著X軸方向等間隔地安裝有複數個夾持部112b。夾持部112b夾持玻璃板10之上端部,而將玻璃板10固定於夾具機構112。再者,夾持部112b之數量、及夾持部112b相對於基部112a之安裝位置亦可根據玻璃板10之尺寸、及玻璃板10之搬送速度等適當設定。 The clamp mechanism 112 sandwiches the end portion of the glass plate 10 in the positive Z-axis direction, that is, the upper end portion. The clamp mechanism 112 mainly includes a base portion 112a and a plurality of clamping portions 112b. The base portion 112a is a member that extends in the X-axis direction. The base 112a is slidable together with the upper guiding mechanism 110 It is mounted to the upper guiding mechanism 110. The base portion 112a is movable in the X-axis direction by sliding together with the upper guiding mechanism 110. On the lower side of the base portion 112a, a plurality of nip portions 112b are attached at equal intervals along the X-axis direction. The nip portion 112b sandwiches the upper end portion of the glass sheet 10, and fixes the glass sheet 10 to the jig mechanism 112. Further, the number of the sandwiching portions 112b and the mounting position of the sandwiching portion 112b with respect to the base portion 112a may be appropriately set depending on the size of the glass plate 10, the conveying speed of the glass sheet 10, and the like.
夾具機構112藉由上部引導機構110向X軸方向搬送。由此,搬送裝置102可向X軸方向搬送被夾持於夾具機構112之玻璃板10。 The clamp mechanism 112 is conveyed in the X-axis direction by the upper guide mechanism 110. Thereby, the conveyance device 102 can convey the glass plate 10 clamped by the clamp mechanism 112 in the X-axis direction.
(2-1-3)下部引導機構 (2-1-3) lower guiding mechanism
下部引導機構114係沿著X軸方向延伸之構件。於下部引導機構114之Z軸正方向之端面,沿著X軸方向形成有狹縫114a。狹縫114a係收容所搬送之玻璃板10之Z軸負方向之端部即下端部之空間。玻璃板10之下端不與狹縫114a之底部接觸。下部引導機構114抑制藉由上部引導機構110搬送之玻璃板10之下端部向Y軸方向移動。 The lower guiding mechanism 114 is a member that extends in the X-axis direction. A slit 114a is formed along the X-axis direction on the end surface of the lower guiding mechanism 114 in the positive Z-axis direction. The slit 114a accommodates a space of the lower end portion which is the end portion of the glass plate 10 to be conveyed in the negative Z-axis direction. The lower end of the glass plate 10 is not in contact with the bottom of the slit 114a. The lower guiding mechanism 114 suppresses the movement of the lower end portion of the glass sheet 10 conveyed by the upper guiding mechanism 110 in the Y-axis direction.
(2-1-4)氣刀 (2-1-4) air knife
氣刀116a、…係用以向玻璃板10之主表面10a、10b吹送空氣之噴流之裝置。氣刀116a、…配置於玻璃板10之左右兩側。 The air knives 116a, ... are means for blowing a jet of air to the main surfaces 10a, 10b of the glass sheet 10. The air knives 116a, ... are disposed on the left and right sides of the glass sheet 10.
氣刀116a、…具有噴出空氣之噴流之噴出孔(未圖示)。噴出孔係形成於氣刀116a、…之前端部且沿Z軸方向延伸之細長之孔。氣刀116a、…具有用以控制自噴出孔噴出之空氣之量之調節器(未圖示)。調節器係例如壓力調整閥。氣刀116a、…具有用以控制自噴出孔噴出之空氣之於XY平面上的方向之風向調整機構(未圖示)。風向調整機構係例如控制氣刀116a、…之姿勢之機構。如下所述,氣刀116a、…具有抑制所搬送之玻璃板10之Y軸方向之移動而使玻璃板10之姿勢穩定化之效果。 The air knives 116a, ... have ejection holes (not shown) for ejecting a jet of air. The discharge holes are formed in the front end portions of the air knives 116a, ... and elongated holes extending in the Z-axis direction. The air knives 116a, ... have a regulator (not shown) for controlling the amount of air ejected from the ejection holes. The regulator is for example a pressure regulating valve. The air knives 116a, ... have a wind direction adjusting mechanism (not shown) for controlling the direction of the air ejected from the ejecting holes on the XY plane. The wind direction adjustment mechanism is, for example, a mechanism that controls the posture of the air knives 116a, .... As described below, the air knives 116a, ... have an effect of suppressing the movement of the glass sheet 10 to be conveyed in the Y-axis direction and stabilizing the posture of the glass sheet 10.
如圖4所示,玻璃板製造裝置100具有4個氣刀116a、116b、 116c、116d。以下,視需要,將4個氣刀116a、116b、116c、116d分別稱為第1左氣刀116a、第1右氣刀116b、第2左氣刀116c及第2右氣刀116d。 As shown in FIG. 4, the glass sheet manufacturing apparatus 100 has four air knives 116a, 116b, 116c, 116d. Hereinafter, the four air knives 116a, 116b, 116c, and 116d are referred to as a first left air knife 116a, a first right air knife 116b, a second left air knife 116c, and a second right air knife 116d, respectively, as needed.
第1左氣刀116a及第2左氣刀116c配置於玻璃板10之左側。第1右氣刀116b及第2右氣刀116d配置於玻璃板10之右側。第1左氣刀116a及第1右氣刀116b配置於第2左氣刀116c及第2右氣刀116d之上游側。於X軸方向及Z軸方向上,第1左氣刀116a與第1右氣刀116b配置於相同位置,第2左氣刀116c與第2右氣刀116d配置於相同位置。第1左氣刀116a與左主表面10a之間之距離和第1右氣刀116b與右主表面10b之間之距離相同。第2左氣刀116c與左主表面10a之間之距離和第2右氣刀116d與右主表面10b之間之距離相同。 The first left air knife 116a and the second left air knife 116c are disposed on the left side of the glass plate 10. The first right air knife 116b and the second right air knife 116d are disposed on the right side of the glass sheet 10. The first left air knife 116a and the first right air knife 116b are disposed on the upstream side of the second left air knife 116c and the second right air knife 116d. In the X-axis direction and the Z-axis direction, the first left air knife 116a and the first right air knife 116b are disposed at the same position, and the second left air knife 116c and the second right air knife 116d are disposed at the same position. The distance between the first left air knife 116a and the left main surface 10a is the same as the distance between the first right air knife 116b and the right main surface 10b. The distance between the second left air knife 116c and the left main surface 10a is the same as the distance between the second right air knife 116d and the right main surface 10b.
第1左氣刀116a及第2左氣刀116c朝向左主表面10a之Z軸方向之中央部吹送空氣。第1右氣刀116b及第2右氣刀116d朝向右主表面10b之Z軸方向之中央部吹送空氣。 The first left air knife 116a and the second left air knife 116c blow air toward the central portion of the left main surface 10a in the Z-axis direction. The first right air knife 116b and the second right air knife 116d blow air toward the central portion of the right main surface 10b in the Z-axis direction.
(2-1-5)導板 (2-1-5) guide
導板118a、…係與玻璃板10之主表面10a、10b對向而配置之構件。導板118a、…配置於玻璃板10之左右兩側。導板118a、…之數量和氣刀116a、…之數量相同。 The guide plates 118a, ... are members that are disposed opposite to the main surfaces 10a, 10b of the glass sheet 10. The guide plates 118a, ... are disposed on the left and right sides of the glass sheet 10. The number of the guide plates 118a, ... is the same as the number of the air knives 116a, ....
導板118a、…具有用以調整Y軸方向之位置之位置調整機構(未圖示)、及用以控制XY平面上之方向之角度調整機構(未圖示)。如下所述,導板118a、…係用以將自氣刀116a、…噴出之空氣引導至導板118a、…與玻璃板10之間之空間之構件。 The guide plates 118a, ... have a position adjustment mechanism (not shown) for adjusting the position in the Y-axis direction, and an angle adjustment mechanism (not shown) for controlling the direction on the XY plane. As described below, the guide plates 118a, ... are used to guide the air ejected from the air knives 116a, ... to the space between the guide plates 118a, ... and the glass plate 10.
如圖4所示,玻璃板製造裝置100具有4個導板118a、118b、118c、118d。以下,視需要,將4個導板118a、118b、118c、118d分別稱為第1左導板118a、第1右導板118b、第2左導板118c及第2右導板118d。 As shown in FIG. 4, the glass sheet manufacturing apparatus 100 has four guide plates 118a, 118b, 118c, and 118d. Hereinafter, the four guide plates 118a, 118b, 118c, and 118d are referred to as a first left guide 118a, a first right guide 118b, a second left guide 118c, and a second right guide 118d, respectively, as needed.
第1左導板118a及第2左導板118c配置於玻璃板10之左側。第1右導板118b及第2右導板118d配置於玻璃板10之右側。第1左導板118a及第1右導板118b配置於第2左導板118c及第2右導板118d之上游側。於X軸方向及Z軸方向上,第1左導板118a與第1右導板118b配置於相同位置,第2左導板118c與第2右導板118d配置於相同位置。 The first left guide 118a and the second left guide 118c are disposed on the left side of the glass sheet 10. The first right guide plate 118b and the second right guide plate 118d are disposed on the right side of the glass plate 10. The first left guide 118a and the first right guide 118b are disposed on the upstream side of the second left guide 118c and the second right guide 118d. In the X-axis direction and the Z-axis direction, the first left guide 118a and the first right guide 118b are disposed at the same position, and the second left guide 118c and the second right guide 118d are disposed at the same position.
第1左導板118a具有與左主表面10a對向之第1左引導表面119a。第1右導板118b具有與右主表面10b對向之第1右引導表面119b。第2左導板118c具有與左主表面10a對向之第2左引導表面119c。第2右導板118d具有與右主表面10b對向之第2右引導表面119d。於X軸方向上,第1左引導表面119a與左主表面10a之間之距離和第1右引導表面119b與右主表面10b之間之距離相同。於X軸方向上,第2左引導表面119c與左主表面10a之間之距離和第2右引導表面119d與右主表面10b之間之距離相同。 The first left guide 118a has a first left guiding surface 119a opposed to the left main surface 10a. The first right guide 118b has a first right guiding surface 119b opposed to the right main surface 10b. The second left guide 118c has a second left guiding surface 119c opposed to the left main surface 10a. The second right guide 118d has a second right guiding surface 119d opposed to the right main surface 10b. The distance between the first left guiding surface 119a and the left main surface 10a and the distance between the first right guiding surface 119b and the right main surface 10b are the same in the X-axis direction. The distance between the second left guiding surface 119c and the left main surface 10a and the distance between the second right guiding surface 119d and the right main surface 10b are the same in the X-axis direction.
其次,一面參照附圖,一面對第1左導板118a之作用效果進行說明。以下之說明亦可應用於其他導板118b、118c、118d。 Next, the effect of the first left guide 118a will be described with reference to the drawings. The following description can also be applied to the other guide plates 118b, 118c, 118d.
第1左導板118a藉由使自第1左氣刀116a噴出之空氣沿著第1左引導表面119a流動,而將空氣引導至第1左引導表面119a與左主表面10a之間之空間。圖5係說明自第1左氣刀116a噴出且藉由第1左導板118a引導之空氣之流動之圖。圖5係與圖4相同之俯視圖。於圖5中,以空心之箭頭F1~F4表示空氣之流動。如圖5所示,第1左導板118a之第1左引導表面119a包含引導彎曲面119a1、及引導平面119a2。引導彎曲面119a1係自上游側朝向下游側緩緩靠近左主表面10a之面。引導平面119a2係位於引導彎曲面119a1之下游側且與左主表面10a平行之面。引導彎曲面119a1與引導平面119a2平滑地連接。即,第1左引導表面119a自上游側朝向下游側緩緩靠近左主表面10a。引導平面119a2與左主表面10a之間之距離係第1左引導表面119a與左主表面10a之間之距 離之最小值。 The first left guide 118a guides the air flowing from the first left air knife 116a along the first left guiding surface 119a to guide the air to the space between the first left guiding surface 119a and the left main surface 10a. Fig. 5 is a view for explaining the flow of air ejected from the first left air knife 116a and guided by the first left guide 118a. Fig. 5 is a plan view similar to Fig. 4. In Fig. 5, the flow of air is indicated by hollow arrows F1 to F4. As shown in FIG. 5, the first left guiding surface 119a of the first left guide 118a includes a guiding curved surface 119a1 and a guiding plane 119a2. The guide curved surface 119a1 gradually approaches the surface of the left main surface 10a from the upstream side toward the downstream side. The guiding plane 119a2 is located on the downstream side of the guiding curved surface 119a1 and is parallel to the left main surface 10a. The guiding curved surface 119a1 is smoothly connected to the guiding plane 119a2. That is, the first left guiding surface 119a gradually approaches the left main surface 10a from the upstream side toward the downstream side. The distance between the guiding plane 119a2 and the left main surface 10a is the distance between the first left guiding surface 119a and the left main surface 10a. The minimum value.
一面參照圖5,一面對自第1左氣刀116a噴出之空氣之流動進行說明。首先,空氣之噴流自第1左氣刀116a之噴出孔朝向第1左導板118a之引導彎曲面119a1噴出(箭頭F1)。此時,被噴出之空氣之噴流因康達效應而被吸引至第1左導板118a。其結果,空氣沿著引導彎曲面119a1流動(箭頭F2)。此時,沿著引導彎曲面119a1流動之空氣利用噴流吸入周圍之流體之性質,而吸入周圍之空氣(箭頭F3)。而且,已將周圍之空氣吸入之空氣於引導平面119a2與左主表面10a之間的空間中沿著X軸方向流動(箭頭F4)。 Referring to Fig. 5, the flow of air ejected from the first left air knife 116a will be described. First, the jet of air is ejected from the discharge hole of the first left air knife 116a toward the guide curved surface 119a1 of the first left guide 118a (arrow F1). At this time, the jet of the ejected air is attracted to the first left guide 118a due to the Coanda effect. As a result, air flows along the guide curved surface 119a1 (arrow F2). At this time, the air flowing along the guide curved surface 119a1 draws in the surrounding air by the jet flow, and sucks in the surrounding air (arrow F3). Moreover, the air that has taken in the surrounding air flows in the space between the guiding plane 119a2 and the left main surface 10a in the X-axis direction (arrow F4).
又,於第1左導板118a之下游側,設置有抽吸氣體之抽吸機構(未圖示)。藉由抽吸機構抽吸通過引導平面119a2與左主表面10a之間之空間之空氣。 Further, on the downstream side of the first left guide 118a, a suction mechanism (not shown) for sucking gas is provided. The air passing through the space between the guiding plane 119a2 and the left main surface 10a is sucked by the suction mechanism.
(2-2)檢查裝置之構成 (2-2) Composition of inspection device
檢查裝置104藉由光學方法偵測存在於玻璃板10之內部之異物。檢查裝置104設置於氣刀116a、…及導板118a、…之下游側。 The inspection device 104 detects foreign matter existing inside the glass sheet 10 by an optical method. The inspection device 104 is disposed on the downstream side of the air knives 116a, ... and the guide plates 118a, ....
檢查裝置104主要包含光源120、及線傳感器122。光源120設置於玻璃板10之左側。線傳感器122以與光源120對向之方式設置於玻璃板10之右側。光源120朝向Y軸負方向照射沿Z軸方向延伸之線光。線傳感器122包含沿Z軸方向配置之複數個相機122a。線傳感器122利用相機122a接收自光源120照射且穿過玻璃板10之線光。線傳感器122基於所接收到之線光之強度之變化而檢測玻璃板10之變形,從而偵測存在於玻璃板10之內部之異物。線傳感器122之相機122a之聚焦區域於±5mm以下。 The inspection device 104 mainly includes a light source 120 and a line sensor 122. The light source 120 is disposed on the left side of the glass sheet 10. The line sensor 122 is disposed on the right side of the glass sheet 10 so as to face the light source 120. The light source 120 illuminates the line light extending in the Z-axis direction in the negative direction of the Y-axis. The line sensor 122 includes a plurality of cameras 122a arranged along the Z-axis direction. Line sensor 122 receives line light that is illuminated from light source 120 and that passes through glass sheet 10 using camera 122a. The line sensor 122 detects the deformation of the glass sheet 10 based on the change in the intensity of the received line light, thereby detecting the foreign matter existing inside the glass sheet 10. The focus area of the camera 122a of the line sensor 122 is ±5 mm or less.
(3)玻璃板製造裝置之具體例 (3) Specific examples of the glass plate manufacturing apparatus
對玻璃板製造裝置100之構成之一例進行說明。圖6及圖7係用以說明第1左氣刀116a及第1左導板118a之尺寸及位置之圖。圖6係與圖3 相同之側視圖。圖7係與圖4相同之俯視圖之一部分,並且係自圖6所示之箭頭VII之方向觀察之圖。於圖6及圖7中僅表示玻璃板10、第1左氣刀116a、第2左氣刀116c、第1左導板118a及第2左導板118c。玻璃板10之X軸方向之尺寸L1為2400mm。玻璃板10之Z軸方向之尺寸L2為1550mm。藉由搬送裝置102向X軸方向搬送之玻璃板之搬送速度為1200mm/s。以下之說明亦可應用於其他氣刀116b、116c、116d、及其他導板118b、118c、118d。 An example of the configuration of the glass sheet manufacturing apparatus 100 will be described. 6 and 7 are views for explaining the dimensions and positions of the first left air knife 116a and the first left guide 118a. Figure 6 is related to Figure 3 The same side view. Fig. 7 is a portion of the plan view which is the same as Fig. 4 and is a view as seen from the direction of arrow VII shown in Fig. 6. Only the glass plate 10, the first left air knife 116a, the second left air knife 116c, the first left guide 118a, and the second left guide 118c are shown in FIGS. 6 and 7. The dimension L1 of the glass plate 10 in the X-axis direction is 2400 mm. The dimension L2 of the glass plate 10 in the Z-axis direction is 1550 mm. The conveying speed of the glass sheet conveyed in the X-axis direction by the conveying device 102 is 1200 mm/s. The following description can also be applied to other air knives 116b, 116c, 116d, and other guides 118b, 118c, 118d.
於圖6中,第1左氣刀116a之Z軸方向之尺寸L3為627mm。第1左導板118a之Z軸方向之尺寸L4為693mm。第1左氣刀116a之Z軸方向之中心位置與第1左導板118a之Z軸方向之中心位置相同。玻璃板10之上端與第1左氣刀116a之上端之間之距離L5為376mm。玻璃板10之下端與第1左氣刀116a之下端之間之距離L6為547mm。 In Fig. 6, the dimension L3 of the first left air knife 116a in the Z-axis direction is 627 mm. The dimension L4 of the first left guide 118a in the Z-axis direction is 693 mm. The center position of the first left air knife 116a in the Z-axis direction is the same as the center position of the first left guide 118a in the Z-axis direction. The distance L5 between the upper end of the glass plate 10 and the upper end of the first left air knife 116a is 376 mm. The distance L6 between the lower end of the glass plate 10 and the lower end of the first left air knife 116a is 547 mm.
於圖7中,第1左導板118a之X軸方向之尺寸L7為845mm。第1左導板118a之引導彎曲面119a1於XY平面上具有R形狀,其直徑L8為300mm。第1左導板118a之引導平面119a2之X軸方向之尺寸L9為195mm。引導平面119a2與左主表面10a之間之距離L10為10mm。第1左氣刀116a以自上游側朝向下游側靠近左主表面10a之方式配置。第1左氣刀116a與左主表面10a之間之距離之最小值L11為32mm。第1左氣刀116a與左主表面10a之間之角度θ為30度。於第1左導板118a之引導平面119a2與左主表面10a之間之空間流動之空氣之速度之最大值為1.0m/s~2.0m/s。於引導平面119a2與左主表面10a之間之空間流動之空氣的速度根據玻璃板10之搬送速度而調整,較佳為大於玻璃板10之搬送速度。 In Fig. 7, the dimension L7 of the first left guide 118a in the X-axis direction is 845 mm. The guiding curved surface 119a1 of the first left guiding plate 118a has an R shape on the XY plane, and has a diameter L8 of 300 mm. The dimension L9 of the guiding plane 119a2 of the first left guide 118a in the X-axis direction is 195 mm. The distance L10 between the guiding plane 119a2 and the left main surface 10a is 10 mm. The first left air knife 116a is disposed so as to approach the left main surface 10a from the upstream side toward the downstream side. The minimum value L11 of the distance between the first left air knife 116a and the left main surface 10a is 32 mm. The angle θ between the first left air knife 116a and the left main surface 10a is 30 degrees. The maximum velocity of the air flowing in the space between the guiding plane 119a2 and the left main surface 10a of the first left guide 118a is 1.0 m/s to 2.0 m/s. The speed of the air flowing in the space between the guiding plane 119a2 and the left main surface 10a is adjusted according to the conveying speed of the glass sheet 10, and is preferably larger than the conveying speed of the glass sheet 10.
第1左氣刀116a及第1左導板118a之Z軸方向之尺寸越大越好。第1左氣刀116a及第1左導板118a之Z軸方向之中心位置越靠近玻璃板10之Z軸方向之中心位置越好。 The larger the size of the first left air knife 116a and the first left guide 118a in the Z-axis direction, the better. The center position of the first left air knife 116a and the first left guide 118a in the Z-axis direction is preferably closer to the center position of the glass plate 10 in the Z-axis direction.
與第1左氣刀116a及第1左導板118a之尺寸及位置相關之上述數值L3~L11及θ係一例,可根據玻璃板10之尺寸L1、L2、及玻璃板10之搬送速度而適當設定。 The numerical values L3 to L11 and θ related to the size and position of the first left air knife 116a and the first left guide 118a can be appropriately selected according to the sizes L1 and L2 of the glass sheet 10 and the conveying speed of the glass sheet 10. set up.
(4)特徵 (4) Features
玻璃板製造裝置100於第1檢查步驟S3中,一面藉由搬送裝置102向X軸方向搬送玻璃板10,一面利用檢查裝置104藉由光學方法偵測存在於玻璃板10之內部之異物。 In the first inspection step S3, the glass sheet manufacturing apparatus 100 detects the foreign matter existing inside the glass sheet 10 by the inspection apparatus 104 by the inspection apparatus 104 while conveying the glass sheet 10 in the X-axis direction by the conveyance apparatus 102.
對藉由搬送裝置102搬送之玻璃板10之主表面10a、10b吹送自氣刀116a、…噴出之空氣。空氣藉由導板118a、…引導,而沿著X軸方向於導板118a、…與玻璃板10之間之空間流動。 The air ejected from the air knives 116a, ... is blown to the main surfaces 10a, 10b of the glass sheet 10 conveyed by the conveying device 102. The air is guided by the guide plates 118a, ..., and flows in the space between the guide plates 118a, ... and the glass plate 10 along the X-axis direction.
一面參照圖5,一面對自第1左氣刀116a噴出且藉由第1左導板118a引導之空氣之作用進行說明。如圖5所示,自第1左氣刀116a噴出之空氣一面將周圍之空氣吸入一面沿著引導彎曲面119a1流動,並於引導平面119a2與左主表面10a之間之空間流動。第1左導板118a與玻璃板10之間之空間係自第1左氣刀116a噴出之空氣之流路,且自上游側朝向下游側緩緩變窄。因此,於第1左導板118a與玻璃板10之間之空間中,空氣之流速自上游側朝向下游側緩緩變大。尤其,於引導平面119a2與左主表面10a之間之空間中,空氣之流速變得最大。根據伯努利之定律,空氣之流速越增加則空氣之壓力越降低,因此引導平面119a2與左主表面10a之間之空間相對於周圍之空間成為負壓。其結果,玻璃板10受到朝向第1左導板118a之Y軸方向之力。同樣地,玻璃板10因自第1右氣刀116b噴出且藉由第1右導板118b引導之空氣,而受到朝向第1右導板118b之Y軸方向之力。又,玻璃板10受到朝向第2左導板118c之Y軸方向之力、及朝向第2右導板118d之Y軸方向之力。如此,玻璃板10一面受到Y軸正方向之力、及Y軸負方向之力,一面向X軸方向搬送。 Referring to Fig. 5, the action of the air ejected from the first left air knife 116a and guided by the first left guide 118a will be described. As shown in Fig. 5, the air ejected from the first left air knife 116a flows along the guide curved surface 119a1 while sucking the surrounding air, and flows in the space between the guide plane 119a2 and the left main surface 10a. The space between the first left guide plate 118a and the glass plate 10 is a flow path of air ejected from the first left air knife 116a, and gradually narrows from the upstream side toward the downstream side. Therefore, in the space between the first left guide 118a and the glass plate 10, the flow velocity of the air gradually increases from the upstream side toward the downstream side. In particular, in the space between the guiding plane 119a2 and the left main surface 10a, the flow velocity of the air becomes maximum. According to Bernoulli's law, as the flow velocity of the air increases, the pressure of the air decreases, so that the space between the guide plane 119a2 and the left main surface 10a becomes a negative pressure with respect to the surrounding space. As a result, the glass plate 10 receives a force in the Y-axis direction of the first left guide 118a. Similarly, the glass sheet 10 receives a force directed from the first right air knife 116b and guided by the first right guide 118b, and receives a force in the Y-axis direction of the first right guide 118b. Further, the glass plate 10 receives a force in the Y-axis direction of the second left guide 118c and a force in the Y-axis direction of the second right guide 118d. In this manner, the glass sheet 10 is subjected to a force in the positive direction of the Y-axis and a force in the negative direction of the Y-axis, and is conveyed in the X-axis direction.
玻璃板10因導板118a、…之作用而受到之Y軸方向之力成為最大之區域係與導板118a、…對向之區域,即係Z軸方向上之中央區域。玻璃板10之Z軸方向上之中央區域包括於Z軸方向上最遠離夾持玻璃板10之夾具機構112、及抑制玻璃板10之Y軸方向上之移動之下部引導機構114之處。因此,所搬送之玻璃板10之Z軸方向上之中央區域於Y軸方向未被賦予任何力之情形時,容易因玻璃板10之周圍之壓力之微小變化而向Y軸方向振動。 The glass plate 10 receives the region where the force in the Y-axis direction is the largest due to the action of the guide plates 118a, ..., and the region in which the guide plates 118a, ... face each other, that is, the central region in the Z-axis direction. The central portion of the glass plate 10 in the Z-axis direction includes a clamp mechanism 112 that is farthest from the clamp glass plate 10 in the Z-axis direction, and a lower movement guide mechanism 114 that suppresses the movement of the glass plate 10 in the Y-axis direction. Therefore, when the central region of the glass plate 10 to be conveyed in the Z-axis direction is not given any force in the Y-axis direction, it is likely to vibrate in the Y-axis direction due to a slight change in the pressure around the glass plate 10.
然而,於本實施形態中,藉由搬送裝置102搬送之玻璃板10於Z軸方向上之中央區域,被賦予Y軸正方向及負方向之力。於Y軸正方向之力之大小與Y軸負方向之力之大小相同的情形時,作用於玻璃板10之Y軸方向之力均衡。因此,所搬送之玻璃板10不易於Z軸方向上之中央區域受到Y軸方向之力之變化。因此,降低玻璃板10之Y軸方向之振動。 However, in the present embodiment, the glass plate 10 conveyed by the conveying device 102 is biased in the positive and negative directions of the Y-axis in the central region in the Z-axis direction. When the magnitude of the force in the positive direction of the Y-axis is the same as the magnitude of the force in the negative direction of the Y-axis, the force acting on the Y-axis direction of the glass sheet 10 is equalized. Therefore, the glass sheet 10 to be conveyed is less likely to be subjected to a change in the force in the Y-axis direction in the central region in the Z-axis direction. Therefore, the vibration of the glass plate 10 in the Y-axis direction is lowered.
又,對所搬送之玻璃板10賦予之Y軸方向之力可藉由調整自氣刀116a、…噴出之空氣之流量及朝向、或者導板118a、…之位置及角度,而以較高之精度控制。因此,玻璃板製造裝置100可容易地降低所搬送之玻璃板10之Y軸方向之振動。 Further, the force in the Y-axis direction given to the glass sheet 10 to be conveyed can be adjusted by adjusting the flow rate and direction of the air ejected from the air knives 116a, ... or the positions and angles of the guide plates 118a, ... Precision control. Therefore, the glass sheet manufacturing apparatus 100 can easily reduce the vibration of the glass sheet 10 to be conveyed in the Y-axis direction.
又,利用抽吸機構,抽吸通過第1左導板118a之引導平面119a2與玻璃板10之左主表面10a之間之空間的空氣。由此,引導平面119a2與左主表面10a之間之空間中之沿著左主表面10a之氣流變得穩定化,因此可降低玻璃板10之Y軸方向之振動。 Further, the air passing through the space between the guide plane 119a2 of the first left guide 118a and the left main surface 10a of the glass sheet 10 is sucked by the suction mechanism. Thereby, the airflow along the left main surface 10a in the space between the guide plane 119a2 and the left main surface 10a is stabilized, so that the vibration of the glass plate 10 in the Y-axis direction can be reduced.
又,如果藉由搬送裝置102搬送之玻璃板10向Y軸方向振動,則檢查裝置104之線傳感器122之相機122a之焦點位置偏移,因此存在於玻璃板10之內部之異物之檢測精度降低。又,於線傳感器122之相機122a之聚焦區域較短為±3mm以下之情形時,相機122a之焦點位置要求較高之精度,因此存在於玻璃板10之內部之異物之檢測精度降低。 因此,由於玻璃板製造裝置100可降低所搬送之玻璃板10之振動,而將玻璃板10之Y軸方向之振動之振幅控制於1mm以下,因此可抑制存在於玻璃板10之內部之異物之檢測精度降低。 When the glass plate 10 conveyed by the transport device 102 vibrates in the Y-axis direction, the focus position of the camera 122a of the line sensor 122 of the inspection device 104 is shifted, so that the detection accuracy of the foreign matter existing inside the glass plate 10 is lowered. . Further, when the focus area of the camera 122a of the line sensor 122 is shorter than ±3 mm, the focus position of the camera 122a requires a high precision, and therefore the detection accuracy of the foreign matter existing inside the glass sheet 10 is lowered. Therefore, since the glass plate manufacturing apparatus 100 can reduce the vibration of the glass plate 10 to be conveyed, and control the amplitude of the vibration of the glass plate 10 in the Y-axis direction to 1 mm or less, it is possible to suppress foreign matter existing inside the glass plate 10. Detection accuracy is reduced.
(5)變化例 (5) Variations
以上,對本發明之玻璃板製造裝置之實施形態進行了說明,但本發明並不限定於上述實施形態,亦可於不脫離本發明之主旨之範圍內實施各種改良及變更。 In the above, the embodiment of the glass sheet manufacturing apparatus of the present invention has been described. However, the present invention is not limited to the above-described embodiments, and various modifications and changes can be made without departing from the spirit and scope of the invention.
(5-1)變化例A (5-1) Change A
實施形態之玻璃板製造裝置100具有4個氣刀116a、116b、116c、116d、及4個導板118a、118b、118c、118d。然而,玻璃板製造裝置100所具有之氣刀116a、…之數量、及導板118a、…之數量亦可根據玻璃板10之尺寸L1、L2、及玻璃板10之搬送速度而適當設定。 The glass sheet manufacturing apparatus 100 of the embodiment has four air knives 116a, 116b, 116c, and 116d, and four guide plates 118a, 118b, 118c, and 118d. However, the number of the air knives 116a, ... and the number of the guide plates 118a, ... which the glass plate manufacturing apparatus 100 has may be set suitably according to the dimension L1, L2 of the glass plate 10, and the conveyance speed of the glass plate 10.
玻璃板製造裝置100中所具備之氣刀116a、…及導板118a、…之數量越大,沿著玻璃板10之主表面10、10b之空氣之流動變得更穩定,因此可更有效地抑制所搬送之玻璃板10之Y軸方向之振動。因此,即便於設置玻璃板製造裝置100之空間中產生Y軸方向之氣流,亦可充分抑制玻璃板10之Y軸方向之振動,從而抑制存在於玻璃板10之內部之異物之檢測精度降低。 The larger the number of the air knives 116a, ... and the guide plates 118a, ... provided in the glass sheet manufacturing apparatus 100, the more stable the flow of air along the main surfaces 10, 10b of the glass sheets 10 becomes more effective. The vibration of the glass plate 10 to be conveyed in the Y-axis direction is suppressed. Therefore, even if the airflow in the Y-axis direction is generated in the space in which the glass sheet manufacturing apparatus 100 is provided, the vibration of the glass plate 10 in the Y-axis direction can be sufficiently suppressed, and the detection accuracy of the foreign matter existing inside the glass sheet 10 can be suppressed from being lowered.
(5-2)變化例B (5-2) Change B
於實施形態之玻璃板製造裝置100中,氣刀116a、…及導板118a、…設置於檢查裝置104之上游側。然而,氣刀116a、…及導板118a、…亦可亦設置於檢查裝置之下游側。圖8係本變化例中之玻璃板製造裝置100之俯視圖。圖8所示之玻璃板製造裝置100於檢查裝置之下游側還具有兩個氣刀116e、116f、及兩個導板118e、118f。氣刀116e及導板118e配置於玻璃板10之左側。氣刀116f及導板118f配置於玻璃板10之右側。 In the glass sheet manufacturing apparatus 100 of the embodiment, the air knives 116a, ... and the guide plates 118a, ... are provided on the upstream side of the inspection apparatus 104. However, the air knives 116a, ... and the guide plates 118a, ... may also be disposed on the downstream side of the inspection device. Fig. 8 is a plan view showing a glass sheet manufacturing apparatus 100 in the present modification. The glass sheet manufacturing apparatus 100 shown in Fig. 8 further has two air knives 116e and 116f and two guide plates 118e and 118f on the downstream side of the inspection apparatus. The air knife 116e and the guide plate 118e are disposed on the left side of the glass plate 10. The air knife 116f and the guide plate 118f are disposed on the right side of the glass plate 10.
為了抑制檢查裝置104對存在於玻璃板10之內部之異物之檢測精度降低,於檢查裝置104之上游側降低玻璃板10之振動較為重要。然而,藉由如本變化例般,不僅於檢查裝置104之上游側降低玻璃板10之振動,亦於檢查裝置104之下游側降低玻璃板10之振動,從而可進一步降低檢查裝置104之上游側之玻璃板10之振動。因此,本變化例可更有效地抑制檢查裝置104對存在於玻璃板10之內部之異物之檢測精度降低。 In order to suppress the detection accuracy of the inspection device 104 from the foreign matter existing inside the glass sheet 10, it is important to lower the vibration of the glass sheet 10 on the upstream side of the inspection apparatus 104. However, by the present modification, not only the vibration of the glass plate 10 is lowered on the upstream side of the inspection device 104, but also the vibration of the glass plate 10 is lowered on the downstream side of the inspection device 104, so that the upstream side of the inspection device 104 can be further reduced. The vibration of the glass plate 10. Therefore, the present modification can more effectively suppress the detection accuracy of the inspection device 104 from detecting foreign matter existing inside the glass sheet 10.
(5-3)變化例C (5-3) Change C
實施形態之玻璃板製造裝置100具有4個氣刀116a、116b、116c、116d、及4個導板118a、118b、118c、118d。玻璃板10之左主表面10a自上游側朝向下游側,與第1左導板118a及第2左導板118c對向。於如此沿著玻璃板10之搬送方向設置有複數個導板118a、…之情形時,亦可使導板118a、…與玻璃板10之間之距離自上游側朝向下游側緩緩變小。即,亦可使導板118a、…沿著玻璃板10之搬送方向而朝向玻璃板10緩緩靠近。 The glass sheet manufacturing apparatus 100 of the embodiment has four air knives 116a, 116b, 116c, and 116d, and four guide plates 118a, 118b, 118c, and 118d. The left main surface 10a of the glass plate 10 faces the downstream side from the upstream side, and faces the first left guide 118a and the second left guide 118c. When a plurality of guide plates 118a, ... are provided along the conveying direction of the glass sheet 10 as described above, the distance between the guide plates 118a, ... and the glass sheet 10 may be gradually reduced from the upstream side toward the downstream side. In other words, the guide plates 118a, ... can be brought closer to the glass sheet 10 along the conveying direction of the glass sheet 10.
圖9係本變化例中之玻璃板製造裝置100之俯視圖。於圖9中僅表示有玻璃板10、第1左氣刀116a、第2左氣刀116c、第1左導板118a及第2左導板118c。如圖9所示,第2左導板118c之第2左引導表面119c與左主表面10a之間之距離之最小值L20,小於第1左導板118a之第1左引導表面119a與左主表面10a之間之距離之最小值L10。雖未於圖9中表示,但同樣地,第2右導板118d之第2右引導表面119d與右主表面10b之間之距離之最小值,亦小於第1右導板118b之第1右引導表面119b與右主表面10b之間之距離之最小值。 Fig. 9 is a plan view of the glass sheet manufacturing apparatus 100 in the present modification. In Fig. 9, only the glass plate 10, the first left air knife 116a, the second left air knife 116c, the first left guide 118a, and the second left guide 118c are shown. As shown in FIG. 9, the minimum value L20 of the distance between the second left guiding surface 119c of the second left guiding plate 118c and the left main surface 10a is smaller than the first left guiding surface 119a and the left main of the first left guiding plate 118a. The minimum distance L10 between the surfaces 10a. Although not shown in FIG. 9, the minimum value of the distance between the second right guiding surface 119d and the right main surface 10b of the second right guide 118d is also smaller than the first right of the first right guide 118b. The minimum distance between the guiding surface 119b and the right main surface 10b.
於自所有氣刀116a、…噴出之空氣之風量及風向相同之情形時,導板118a、…越靠近玻璃板10,於導板118a、…與玻璃板10之間之空間流動之空氣的速度越增加,從而空氣之壓力越降低。因此,導板 118a、…越靠近玻璃板10,朝向導板118a、…而作用於玻璃板10之Y軸方向之力變得越大,因此可更有效地降低玻璃板10之Y軸方向之振動。然而,於在上游側導板118a、…與玻璃板10之間之距離過小之情形時,有因玻璃板10之Y軸方向之振動而導致玻璃板10與導板118a、…接觸從而破損之擔憂。因此,較佳為如本變化例般,導板118a、…與玻璃板10之間之距離自上游側朝向下游側緩緩變小。 The velocity of the air flowing in the space between the guide plates 118a, ... and the glass plate 10 as the guide plates 118a, ... are closer to the glass plate 10 when the air volume and the direction of the air ejected from all the air knives 116a, ... are the same. The more the increase, the lower the pressure of the air. Therefore, the guide The closer the glass plate 10 is to the glass plate 10, the greater the force acting on the Y-axis direction of the glass plate 10 toward the guide plates 118a, ..., so that the vibration of the glass plate 10 in the Y-axis direction can be more effectively reduced. However, when the distance between the upstream side guide plates 118a, ... and the glass plate 10 is too small, the glass plate 10 is in contact with the guide plates 118a, ... due to vibration in the Y-axis direction of the glass plate 10, and is broken. Worried. Therefore, it is preferable that the distance between the guide plates 118a, ... and the glass sheet 10 gradually decreases from the upstream side toward the downstream side as in the present modification.
(5-4)變化例D (5-4) Variation D
於實施形態之玻璃板製造裝置100中,於玻璃板10之左右兩側配置有氣刀116a、…及導板118a、…。然而,亦可僅於玻璃板10之左側,或者僅於玻璃板10之右側配置有氣刀116a、…及導板118a、…。 In the glass sheet manufacturing apparatus 100 of the embodiment, air knives 116a, ... and guide plates 118a, ... are disposed on the left and right sides of the glass sheet 10. However, the air knife 116a, ... and the guide plates 118a, ... may be disposed only on the left side of the glass sheet 10 or only on the right side of the glass sheet 10.
例如,於僅配置有與玻璃板10之左主表面10a對向之氣刀116a、…及導板118a、…之情形時,玻璃板10受到朝向左側之導板118a、…之力。由於空氣於玻璃板10之左主表面10a與導板118a、…之間流動,因此玻璃板10不與導板118a、…碰撞,從而可穩定地保持玻璃板10與導板118a、…之間之距離。因此,所搬送之玻璃板10不易於Y軸方向受到力之變化。因此,於本變化例中,亦可降低玻璃板10之振動。 For example, when only the air knife 116a, ... and the guide plates 118a, ... opposed to the left main surface 10a of the glass sheet 10 are disposed, the glass sheet 10 receives the force of the guide plates 118a, ... toward the left side. Since the air flows between the left main surface 10a of the glass sheet 10 and the guide sheets 118a, ..., the glass sheet 10 does not collide with the guide sheets 118a, ..., thereby stably maintaining the gap between the glass sheet 10 and the guide sheets 118a, ... The distance. Therefore, the glass plate 10 to be conveyed is not easily subjected to a change in force in the Y-axis direction. Therefore, in the present modification, the vibration of the glass plate 10 can also be reduced.
(5-5)變化例E (5-5) Change E
實施形態之玻璃板製造裝置100於第1檢查步驟S3中,偵測於板狀裁切步驟S2中獲得之素板玻璃即玻璃板10之缺陷。然而,玻璃板製造裝置100亦可於第2檢查步驟S8中,偵測已於清洗步驟S7中清洗之玻璃板10之缺陷。於該情形時,玻璃板製造裝置100亦可取代偵測存在於玻璃板10之內部之異物,而偵測形成於玻璃板10之主表面之條紋、存在於玻璃板10之主表面之損傷及裂痕、及附著於玻璃板10之主表面之異物等。又,玻璃板製造裝置100亦可偵測存在於玻璃板10之內部之異物,並且還偵測形成於玻璃板10之主表面之條紋、存在於玻璃板 10之主表面之損傷及裂痕、及附著於玻璃板10之主表面之異物等。 In the first inspection step S3, the glass sheet manufacturing apparatus 100 of the embodiment detects the defect of the glass sheet 10 which is the plain glass obtained in the plate-shaped cutting step S2. However, the glass sheet manufacturing apparatus 100 can also detect defects of the glass sheet 10 that has been cleaned in the cleaning step S7 in the second inspection step S8. In this case, the glass sheet manufacturing apparatus 100 can also detect the foreign matter existing inside the glass sheet 10, and detect the streaks formed on the main surface of the glass sheet 10, the damage existing on the main surface of the glass sheet 10, and Cracks, foreign matter attached to the main surface of the glass sheet 10, and the like. Moreover, the glass sheet manufacturing apparatus 100 can also detect foreign matter existing inside the glass sheet 10, and also detect streaks formed on the main surface of the glass sheet 10, which are present on the glass sheet. Damage and cracks on the surface of the main surface of 10, and foreign matter attached to the main surface of the glass sheet 10.
(5-6)變化例F (5-6) Variation F
實施形態之玻璃板製造裝置100於第1檢查步驟S3中,藉由空氣之流動而可充分抑制玻璃板10之Y軸方向之振動,從而抑制存在於玻璃板10之內部之異物之檢測精度降低,該空氣之流動藉由自氣刀116a、…噴出且由導板118a、…引導之空氣形成,且沿著玻璃板10之主表面10a、10b。 In the first inspection step S3, the glass sheet manufacturing apparatus 100 of the embodiment can sufficiently suppress the vibration of the glass sheet 10 in the Y-axis direction by the flow of air, thereby suppressing the detection accuracy of the foreign matter existing inside the glass sheet 10 from being lowered. The flow of the air is formed by the air ejected from the air knives 116a, ... and guided by the guide plates 118a, ..., and along the major surfaces 10a, 10b of the glass sheet 10.
然而,玻璃板製造裝置100亦可於第1檢查步驟S3之前,還進行去除附著於玻璃板10之主表面10a、10b之異物之清洗步驟。清洗步驟係例如朝向主表面10a、10b吹送空氣,將附著於主表面10a、10b之異物吹散而自主表面10a、10b去除。具體而言,於清洗步驟中,使用空氣噴嘴等朝向主表面10a、10b噴出高壓之壓縮空氣,將附著於主表面10a、10b之異物吹散而去除。其後,於清洗步驟中,使用設置於空氣噴嘴之附近之真空噴嘴等,將自空氣噴嘴噴出之壓縮空氣與已自主表面10a、10b去除之異物一同抽吸。異物係於板狀裁切步驟S2中自玻璃片材之切斷面產生之玻璃微小片即碎玻璃、及因用以於成形步驟S1中將玻璃片材一面緩冷一面向下方搬送之搬送輥而產生之物質等。 However, the glass sheet manufacturing apparatus 100 may perform a cleaning step of removing foreign matter adhering to the main surfaces 10a and 10b of the glass sheet 10 before the first inspection step S3. The washing step is, for example, blowing air toward the main surfaces 10a, 10b, and blowing foreign matter adhering to the main surfaces 10a, 10b to remove the autonomous surfaces 10a, 10b. Specifically, in the cleaning step, high-pressure compressed air is ejected toward the main surfaces 10a and 10b using an air nozzle or the like, and foreign matter adhering to the main surfaces 10a and 10b is blown and removed. Thereafter, in the washing step, the compressed air ejected from the air nozzle is sucked together with the foreign matter removed by the autonomous surfaces 10a, 10b using a vacuum nozzle or the like provided in the vicinity of the air nozzle. The foreign matter is a cullet which is a glass microchip which is produced from the cut surface of the glass sheet in the sheet-like cutting step S2, and a conveying roller which is used to convey the glass sheet to the lower side in the forming step S1. And the substances produced.
於本變化例中,藉由於第1檢查步驟S3之前,進行去除附著於玻璃板10之主表面10a、10b之異物之清洗步驟,可更有效地抑制檢查裝置104對存在於玻璃板10之內部之異物之檢測精度降低。 In the present modification, the cleaning step of removing the foreign matter adhering to the main surfaces 10a and 10b of the glass sheet 10 is performed before the first inspection step S3, so that the inspection apparatus 104 can be more effectively suppressed from being present inside the glass sheet 10. The detection accuracy of the foreign matter is reduced.
(5-7)變化例G (5-7) Change G
實施形態之玻璃板製造裝置100藉由空氣之流動而可充分抑制玻璃板10之Y軸方向之振動,該空氣之流動藉由自氣刀116a、…噴出且由導板118a、…引導之空氣形成,且沿著玻璃板10之主表面10a、10b。 In the glass sheet manufacturing apparatus 100 of the embodiment, the vibration of the glass sheet 10 in the Y-axis direction can be sufficiently suppressed by the flow of air, and the flow of the air is ejected by the air blades 116a, ... and guided by the guide plates 118a, ... Formed along and along the major surfaces 10a, 10b of the glass sheet 10.
然而,玻璃板製造裝置100亦可於第1檢查步驟S3中,利用檢查 裝置104確認係否已充分抑制玻璃板10之Y軸方向之振動。於第1檢查步驟S3中,檢查裝置104之線傳感器122之相機122a於Y軸方向之聚焦位置拍攝玻璃板10。聚焦位置係相機122a之圖像之焦點最對準之位置,處於相機122a之聚焦區域。聚焦位置可設定為Y軸方向之任意位置。然而,為了有效地檢測分散形成於玻璃板10之厚度方向(Y軸方向)上之缺陷,聚焦位置較佳為位於不向Y軸方向振動時之玻璃板10之厚度方向之中心。 However, the glass sheet manufacturing apparatus 100 can also utilize the inspection in the first inspection step S3. The device 104 confirms whether or not the vibration of the glass plate 10 in the Y-axis direction is sufficiently suppressed. In the first inspection step S3, the camera 122a of the line sensor 122 of the inspection device 104 photographs the glass sheet 10 at the focus position in the Y-axis direction. The focus position is the position at which the focus of the image of the camera 122a is most aligned, in the focus area of the camera 122a. The focus position can be set to any position in the Y-axis direction. However, in order to effectively detect the defects dispersed in the thickness direction (Y-axis direction) of the glass sheet 10, the focus position is preferably located at the center of the thickness direction of the glass sheet 10 when it is not vibrated in the Y-axis direction.
於未充分抑制藉由搬送裝置102搬送之玻璃板10之Y軸方向之振動之情形時,存在玻璃板10自相機122a之聚焦區域偏離之情形。尤其,於相機122a之聚焦區域較短為±3mm以下之情形時,玻璃板10容易因向Y軸方向振動而自聚焦區域偏離。如果玻璃板10自相機122a之聚焦區域偏離,則有存在於玻璃板10之內部之異物之檢測精度降低之擔憂。 When the vibration of the glass plate 10 conveyed by the conveyance device 102 in the Y-axis direction is not sufficiently suppressed, there is a case where the glass plate 10 is deviated from the focus area of the camera 122a. In particular, when the focus area of the camera 122a is shorter than ±3 mm, the glass sheet 10 is liable to be deviated from the focus area by vibration in the Y-axis direction. If the glass plate 10 is deviated from the focus area of the camera 122a, there is a concern that the detection accuracy of the foreign matter existing inside the glass plate 10 is lowered.
因此,本變化例之玻璃板製造裝置100亦可於在第1檢查步驟S3中偵測到玻璃板10自相機122a之聚焦區域偏離之情形時,將該玻璃板10判定為不合格品,不輸送至切斷步驟S4而自生產線取下。再者,為了判定玻璃板10係否自聚焦區域偏離,亦可使用測定自相機122a至玻璃板10之主表面10a、10b為止之Y軸方向之距離之距離傳感器。於該情形時,為了使相機122a之拍攝時序、與距離傳感器之測定時序儘量靠近,較佳為距離傳感器設置於相機122a之附近。 Therefore, when the glass sheet manufacturing apparatus 100 of the present modification detects that the glass sheet 10 is deviated from the focus area of the camera 122a in the first inspection step S3, the glass sheet 10 can be judged as a defective product, and It is conveyed to the cutting step S4 and taken off from the production line. Further, in order to determine whether or not the glass plate 10 is deviated from the focus area, a distance sensor that measures the distance from the camera 122a to the main surfaces 10a and 10b of the glass plate 10 in the Y-axis direction may be used. In this case, in order to make the imaging timing of the camera 122a as close as possible to the measurement timing of the distance sensor, it is preferable that the distance sensor is provided in the vicinity of the camera 122a.
Claims (11)
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| JP2015068073A JP6484482B2 (en) | 2014-06-30 | 2015-03-30 | Glass plate manufacturing method and glass plate manufacturing apparatus |
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| JP6631838B2 (en) * | 2016-05-18 | 2020-01-15 | 日本電気硝子株式会社 | Method and apparatus for manufacturing glass sheet, and apparatus for transporting glass sheet |
| DE102017008044A1 (en) * | 2017-08-25 | 2019-02-28 | Heuft Systemtechnik Gmbh | Discharge device with Coanda stabilizer |
| JP6889866B2 (en) * | 2017-11-15 | 2021-06-18 | 日本電気硝子株式会社 | Glass plate manufacturing method and its manufacturing equipment |
| TW201936470A (en) * | 2018-02-28 | 2019-09-16 | 美商康寧公司 | Non-contact glass substrate guiding apparatus and method |
| KR102842248B1 (en) * | 2019-07-02 | 2025-08-05 | 코닝 인코포레이티드 | Apparatus and method for processing glass |
| JP2023156115A (en) * | 2022-04-12 | 2023-10-24 | 日本電気硝子株式会社 | Device and method for manufacturing glass product |
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| JPH0840599A (en) * | 1994-07-29 | 1996-02-13 | Matsushita Electric Works Ltd | Sheet material conveyor |
| JPH08141630A (en) * | 1994-11-18 | 1996-06-04 | Hitachi Cable Ltd | Cleaning liquid removing device for rolled plate and method for removing the same |
| JP2000191137A (en) * | 1998-12-28 | 2000-07-11 | Nippon Electric Glass Co Ltd | Non contact carrier device of plate article |
| JP4829710B2 (en) * | 2006-07-26 | 2011-12-07 | 芝浦メカトロニクス株式会社 | Substrate processing equipment |
| JP5403389B2 (en) | 2008-03-27 | 2014-01-29 | 日本電気硝子株式会社 | Glass substrate inspection apparatus and glass substrate inspection method |
| JP5013275B2 (en) * | 2008-09-17 | 2012-08-29 | 日本電気硝子株式会社 | Plate-shaped body conveying apparatus and conveying method |
| JP2010126319A (en) * | 2008-11-28 | 2010-06-10 | Ckd Corp | Conveying device for flat plate-like member |
| US8773656B2 (en) * | 2011-08-24 | 2014-07-08 | Corning Incorporated | Apparatus and method for characterizing glass sheets |
| JP2013187389A (en) | 2012-03-08 | 2013-09-19 | Nippon Electric Glass Co Ltd | Conveyance device and conveyance method of glass substrate |
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| JP2016026968A (en) | 2016-02-18 |
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| KR101740790B1 (en) | 2017-05-26 |
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