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TWI637165B - 視覺檢測模組及包含該模組的元件檢測系統 - Google Patents

視覺檢測模組及包含該模組的元件檢測系統 Download PDF

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Publication number
TWI637165B
TWI637165B TW105125771A TW105125771A TWI637165B TW I637165 B TWI637165 B TW I637165B TW 105125771 A TW105125771 A TW 105125771A TW 105125771 A TW105125771 A TW 105125771A TW I637165 B TWI637165 B TW I637165B
Authority
TW
Taiwan
Prior art keywords
visual inspection
semiconductor element
optical path
polygonal
image
Prior art date
Application number
TW105125771A
Other languages
English (en)
Chinese (zh)
Other versions
TW201713939A (zh
Inventor
柳弘俊
李明國
裵秀珉
Original Assignee
宰體有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 宰體有限公司 filed Critical 宰體有限公司
Publication of TW201713939A publication Critical patent/TW201713939A/zh
Application granted granted Critical
Publication of TWI637165B publication Critical patent/TWI637165B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Quality & Reliability (AREA)
  • Signal Processing (AREA)
TW105125771A 2015-08-26 2016-08-12 視覺檢測模組及包含該模組的元件檢測系統 TWI637165B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
??10-2015-0120312 2015-08-26
KR1020150120312A KR101784987B1 (ko) 2015-08-26 2015-08-26 비전검사모듈 및 그를 가지는 소자검사시스템

Publications (2)

Publication Number Publication Date
TW201713939A TW201713939A (zh) 2017-04-16
TWI637165B true TWI637165B (zh) 2018-10-01

Family

ID=58100643

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105125771A TWI637165B (zh) 2015-08-26 2016-08-12 視覺檢測模組及包含該模組的元件檢測系統

Country Status (5)

Country Link
KR (1) KR101784987B1 (ko)
CN (1) CN108449975A (ko)
SG (1) SG11201801479YA (ko)
TW (1) TWI637165B (ko)
WO (1) WO2017034184A1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190106098A (ko) * 2018-03-07 2019-09-18 (주)제이티 비전검사모듈, 그를 가지는 소자검사시스템 및 그를 이용한 소자검사방법
TWI729520B (zh) * 2019-10-04 2021-06-01 致茂電子股份有限公司 電子組件檢測系統
EP4624907A1 (en) * 2024-03-28 2025-10-01 Nexperia B.V. An optical inspection device arranged for optically inspecting a semiconductor device, as well as a corresponding method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6094263A (en) * 1997-05-29 2000-07-25 Sony Corporation Visual examination apparatus and visual examination method of semiconductor device
TWI280361B (en) * 2005-12-28 2007-05-01 Nat Pingtung University Of Sci Examining apparatus for an outer perimeter of a component
TW201102639A (en) * 2009-05-12 2011-01-16 Jt Corp Vision inspection apparatus and vision inspection method therefor
TWM477571U (zh) * 2013-10-09 2014-05-01 Utechzone Co Ltd 一種用以擷取一物件影像的擷取裝置以及影像檢測裝置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5452080A (en) * 1993-06-04 1995-09-19 Sony Corporation Image inspection apparatus and method
WO2004079427A1 (fr) * 2003-03-07 2004-09-16 Ismeca Semiconductor Holding Sa Dispositif optique et module d'inspection
EP1889039B1 (de) 2005-05-31 2015-04-22 W.O.M. World of Medicine AG Verfahren und vorrichtung zur optischen charakterisierung von gewebe
KR101269976B1 (ko) * 2011-07-13 2013-06-05 주식회사 미르기술 엘이디 부품의 3차원비전검사장치 및 비전검사방법
KR101275134B1 (ko) * 2012-04-27 2013-06-17 한미반도체 주식회사 반도체 자재 검사장치 및 반도체 자재 검사방법
KR20130135583A (ko) * 2012-06-01 2013-12-11 (주)제이티 비전검사모듈 및 그를 가지는 소자검사장치

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6094263A (en) * 1997-05-29 2000-07-25 Sony Corporation Visual examination apparatus and visual examination method of semiconductor device
TWI280361B (en) * 2005-12-28 2007-05-01 Nat Pingtung University Of Sci Examining apparatus for an outer perimeter of a component
TW201102639A (en) * 2009-05-12 2011-01-16 Jt Corp Vision inspection apparatus and vision inspection method therefor
TWM477571U (zh) * 2013-10-09 2014-05-01 Utechzone Co Ltd 一種用以擷取一物件影像的擷取裝置以及影像檢測裝置

Also Published As

Publication number Publication date
CN108449975A (zh) 2018-08-24
WO2017034184A1 (ko) 2017-03-02
TW201713939A (zh) 2017-04-16
KR101784987B1 (ko) 2017-10-12
SG11201801479YA (en) 2018-03-28
KR20170024808A (ko) 2017-03-08

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