TWI632751B - Package structure of semiconductor laser - Google Patents
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- TWI632751B TWI632751B TW106119815A TW106119815A TWI632751B TW I632751 B TWI632751 B TW I632751B TW 106119815 A TW106119815 A TW 106119815A TW 106119815 A TW106119815 A TW 106119815A TW I632751 B TWI632751 B TW I632751B
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 32
- 230000003287 optical effect Effects 0.000 claims abstract description 50
- 239000000758 substrate Substances 0.000 claims description 17
- 239000000853 adhesive Substances 0.000 claims description 7
- 230000017525 heat dissipation Effects 0.000 claims description 5
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000005520 cutting process Methods 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 238000001746 injection moulding Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000007517 polishing process Methods 0.000 claims description 2
- 238000000465 moulding Methods 0.000 claims 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012858 packaging process Methods 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- Semiconductor Lasers (AREA)
Abstract
一種半導體雷射的封裝結構,包括:一散熱基座;一雷射元件,固應於該散熱基座的一表面;以及一光學元件。雷射元件可發射一雷射光束。另外,光學元件具有一反射曲面,以改變該雷射光束的一行進方向並改變該雷射光束的一第一發散角。A semiconductor laser package structure comprising: a heat sink base; a laser element secured to a surface of the heat sink base; and an optical component. The laser element emits a laser beam. Additionally, the optical element has a reflective curved surface to change a direction of travel of the laser beam and to change a first divergence angle of the laser beam.
Description
本發明是有關於一種封裝結構,且特別是有關於一種半導體雷射的封裝結構。This invention relates to a package structure, and more particularly to a package structure for a semiconductor laser.
請參照第1圖,其所繪示為習知半導體雷射的封裝結構。其揭露於台灣專利公告號TWI568117B。Please refer to FIG. 1 , which is a package structure of a conventional semiconductor laser. It is disclosed in Taiwan Patent Publication No. TWI568117B.
此半導體雷射封裝結構包括一電路板410、一雷射二極體402、一次黏著基板404、與一光學元件332。其中,雷射二極體402固定於次黏著基板404。次黏著基板404與光學元件332固定於電路板410的一表面。另外,雷射二極體402為一種半導體雷射,且電路板410係為一種散熱基座(heat sink)。The semiconductor laser package structure includes a circuit board 410, a laser diode 402, a primary adhesion substrate 404, and an optical component 332. The laser diode 402 is fixed to the sub-adhesive substrate 404. The secondary adhesive substrate 404 and the optical component 332 are fixed to a surface of the circuit board 410. In addition, the laser diode 402 is a semiconductor laser, and the circuit board 410 is a heat sink.
於此封裝結構中,雷射二極體402由前表面發射雷射光束420並直接照射至光學元件332的反射面331。而雷射光束420經由光學元件332的反射面331而改變雷射光束420的路徑。換句話說,雷射二極體402輸出的雷射光束420可被反射面331所反射。亦即,習知的半導體雷射封裝結構中的光學元件332可將邊射型雷射二極體402的雷射光束進行反射與轉向,進而形成面射型雷射。In this package structure, the laser diode 402 emits a laser beam 420 from the front surface and directly illuminates the reflective surface 331 of the optical element 332. The laser beam 420 changes the path of the laser beam 420 via the reflective surface 331 of the optical element 332. In other words, the laser beam 420 output by the laser diode 402 can be reflected by the reflecting surface 331. That is, the optical element 332 in the conventional semiconductor laser package structure can reflect and steer the laser beam of the edge-emitting laser diode 402 to form a surface-emitting laser.
再者,於最後的封裝製程中,更可將矽膠(未繪示)填充於電路板410上覆蓋住所有元件,以保護電路板410上的所有元件。Moreover, in the final packaging process, a silicone (not shown) may be filled on the circuit board 410 to cover all components to protect all components on the circuit board 410.
眾所周知,雷射二極體402輸出的雷射光束420為橢圓形的雷射光束,且雷射光束420的發散角非常的大。一般來說,雷射光束的垂直發散角大於水平發散角,且垂直發散角大約為30度上下。As is well known, the laser beam 420 output by the laser diode 402 is an elliptical laser beam, and the divergence angle of the laser beam 420 is very large. In general, the vertical divergence angle of the laser beam is greater than the horizontal divergence angle, and the vertical divergence angle is approximately 30 degrees up and down.
為了要有效的控制雷射光束420的發散角。在習知半導體雷射的封裝結構之外,須要再安裝透鏡系統,並利用透鏡系統來改變雷射光束420的形狀。舉例來說,將橢圓形的雷射光束420改變為圓形的雷射光束。In order to effectively control the divergence angle of the laser beam 420. In addition to the conventional semiconductor laser package structure, it is necessary to mount the lens system and use the lens system to change the shape of the laser beam 420. For example, the elliptical laser beam 420 is changed to a circular laser beam.
明顯地,在習知半導體雷射的封裝結構之外安裝透鏡系統之後,整個雷射裝置(laser device)的體積將會變得更大,且透鏡系統也勢必增加雷射裝置的製造成本。Obviously, after mounting the lens system outside the conventional semiconductor laser package structure, the volume of the entire laser device will become larger, and the lens system will inevitably increase the manufacturing cost of the laser device.
本發明之主要目的在於提出一種半導體雷射的封裝結構及其相關元件。本發明設計一種新的光學元件。此光學元件除了可以將邊射型雷射二極體輸出的雷射光束進行反射與轉向外,也可以改變雷射光束的形狀。亦即,本發明的雷射裝置可簡化到完全省略改變雷射光束的透鏡系統。如此,將可大幅降低整個雷射裝置的體積,並降低雷射裝置的製造成本。The main object of the present invention is to provide a semiconductor laser package structure and related components. The present invention contemplates a new optical component. In addition to reflecting and steering the laser beam output from the edge-emitting laser diode, the optical element can also change the shape of the laser beam. That is, the laser device of the present invention can be simplified to completely omit the lens system that changes the laser beam. In this way, the volume of the entire laser device can be greatly reduced, and the manufacturing cost of the laser device can be reduced.
本發明係有關於一種半導體雷射的封裝結構,包括:一散熱基座;一雷射元件,固應於該散熱基座的一表面,可發射一雷射光束;以及一光學元件,具有一反射曲面,以改變該雷射光束一行進方向並改變該雷射光束的一第一發散角。The invention relates to a semiconductor laser package structure, comprising: a heat dissipation base; a laser element fixed to a surface of the heat dissipation base to emit a laser beam; and an optical component having a Reflecting the curved surface to change a direction of travel of the laser beam and changing a first divergence angle of the laser beam.
為了對本發明之上述及其他方面有更佳的瞭解,下文特舉實施例,並配合所附圖式詳細說明如下:。In order to provide a better understanding of the above and other aspects of the present invention, the following detailed description of the embodiments and the accompanying drawings
請參照第2圖,其所繪示為本發明光學元件的第一實施例。本發明的光學元件532可於矽基板上進行蝕刻而形成一曲面。而處理此曲面後即可形成光學元件532的反射曲面531,且此光學元件532除了可以改變雷射光束行進的方向之外,更可以改變雷射光束的形狀,有效地改變雷射光束的發散角。Please refer to FIG. 2, which illustrates a first embodiment of the optical component of the present invention. The optical element 532 of the present invention can be etched on the ruthenium substrate to form a curved surface. After the surface is processed, the reflective curved surface 531 of the optical element 532 can be formed, and the optical element 532 can change the shape of the laser beam in addition to changing the direction in which the laser beam travels, and effectively change the divergence of the laser beam. angle.
本發明光學元件532的材料除了利用矽基板來製作之外,也可以是砷化鎵、陶瓷、塑膠或者玻璃。亦即,利用砷化鎵基板的蝕刻製程、陶瓷基板、塑膠射出成型或者玻璃鑄模來製作光學元件532。另外,除了以蝕刻製程來形成曲面之外,也可以利用研磨製程或者切削製程(例如數值控制(Computer Numerical Control,簡稱CNC)切削製程)來形成曲面。當然,本發明以可以選擇性地在曲面上形成反射層,例如介電反射層或者金屬反射層,以形成反射曲面531。如此,可以提高反射曲面531的反射率。The material of the optical element 532 of the present invention may be made of gallium arsenide, ceramic, plastic or glass in addition to the germanium substrate. That is, the optical element 532 is fabricated by an etching process of a gallium arsenide substrate, a ceramic substrate, a plastic injection molding, or a glass mold. In addition, in addition to forming a curved surface by an etching process, a polishing process or a cutting process (for example, a numerical control (CNC) cutting process) may be used to form a curved surface. Of course, the present invention can form a reflective layer, such as a dielectric reflective layer or a metal reflective layer, on the curved surface to form a reflective curved surface 531. In this way, the reflectance of the reflective curved surface 531 can be improved.
如第2圖所示,反射曲面531為柱狀反射曲面。此反射曲面531主要可以改變雷射光束的一個發散角,例如縮小雷射光束的垂直發散角。另外,光學元件532的長d1約在200μm~1000μm之間,高d3約在100μm~1000μm之間,寬d2可依照實際的需求而訂定。As shown in Fig. 2, the reflection curved surface 531 is a columnar reflection curved surface. This reflective curved surface 531 can primarily change a divergence angle of the laser beam, such as reducing the vertical divergence angle of the laser beam. In addition, the length d1 of the optical element 532 is between about 200 μm and 1000 μm, and the height d3 is between about 100 μm and 1000 μm. The width d2 can be determined according to actual needs.
請參照第3圖,其所繪示為本發明的光學元件的第二實施例。第一實施例與第二實施例的尺寸相當。再者,相較於第一實施例的光學元件532,第二實施例的光學元件542的反射曲面541為非球面的反射曲面541。例如,橢圓反射曲面或者拋物反射曲面。因此,反射曲面541可以同時改變雷射光束的垂直發散角與水平發散角。例如,反射曲面541可同時縮小雷射光束的垂直發散角以及縮小雷射光束的水平發散角。Please refer to FIG. 3, which illustrates a second embodiment of the optical component of the present invention. The first embodiment is comparable in size to the second embodiment. Furthermore, the reflective curved surface 541 of the optical element 542 of the second embodiment is an aspherical reflective curved surface 541 compared to the optical element 532 of the first embodiment. For example, an elliptical reflective surface or a parabolic reflective surface. Therefore, the reflective curved surface 541 can simultaneously change the vertical divergence angle and the horizontal divergence angle of the laser beam. For example, the reflective curved surface 541 can simultaneously reduce the vertical divergence angle of the laser beam and reduce the horizontal divergence angle of the laser beam.
當然,光學元件的反射曲面也可以進一步修改。如第4圖所示,為本發明的光學元件的第三實施例。第三實施例與第一實施例的尺寸相當。第三實施例的光學元件552,其反射曲面551也可以同時改變雷射光束的垂直發散角與水平發散角。亦即,反射曲面551可縮小雷射光束的垂直發散角以及增加雷射光束的水平發散角。Of course, the reflective surface of the optical element can be further modified. As shown in Fig. 4, a third embodiment of the optical element of the present invention. The third embodiment is comparable in size to the first embodiment. The optical element 552 of the third embodiment, whose reflective curved surface 551 can also simultaneously change the vertical divergence angle and the horizontal divergence angle of the laser beam. That is, the reflective curved surface 551 can reduce the vertical divergence angle of the laser beam and increase the horizontal divergence angle of the laser beam.
當然,上述的光學元件532、542、552也可以進一步地製作成具備反射功能以及光偵測功能的光學元件。以第一實施例的光學元件532為例,光學元件532中具有一PN接面,而反射曲面531可以設計為具特定反射率的反射層,例如介電反射層。舉例來說,95%的反射率,5%的穿透率的介電反射層。因此,穿透過介電反射層的部分雷射光束進入PN接面,即因光電效應產生感應光電流,用以指示出雷射光束的能量。而另一部分的雷射光束即被介電反射層所反射。Of course, the optical elements 532, 542, and 552 described above may be further fabricated into an optical element having a reflection function and a light detecting function. Taking the optical element 532 of the first embodiment as an example, the optical element 532 has a PN junction, and the reflective curved surface 531 can be designed as a reflective layer having a specific reflectivity, such as a dielectric reflective layer. For example, 95% reflectivity, 5% transmittance of the dielectric reflective layer. Therefore, part of the laser beam that has penetrated the dielectric reflective layer enters the PN junction, that is, an induced photocurrent is generated by the photoelectric effect to indicate the energy of the laser beam. The other part of the laser beam is reflected by the dielectric reflective layer.
請參照第5圖,其所繪示為本發明的封裝結構。此封裝結構包括一電路板600、一雷射二極體602、一次黏著基板604、與一光學元件632。其中,雷射二極體602固定於次黏著基板604。另外,次黏著基板604與光學元件632固定於電路板600表面。再者,雷射二極體602與次黏著基板604形成一雷射元件,雷射二極體602與光學元件632之間的距離d4約為10μm~500μm,且電路板600係為一種散熱基座。Please refer to FIG. 5, which illustrates the package structure of the present invention. The package structure includes a circuit board 600, a laser diode 602, a primary adhesion substrate 604, and an optical component 632. The laser diode 602 is fixed to the sub-adhesive substrate 604. In addition, the secondary adhesive substrate 604 and the optical element 632 are fixed to the surface of the circuit board 600. Furthermore, the laser diode 602 and the sub-adhesive substrate 604 form a laser element, and the distance d4 between the laser diode 602 and the optical element 632 is about 10 μm to 500 μm, and the circuit board 600 is a heat dissipation base. seat.
於此封裝結構中,雷射二極體602由前表面發射雷射光束640並直接照射至光學元件632的反射曲面631。而雷射光束640經由光學元件632的反射曲面631而改變雷射光束640的行進方向。再者,雷射光束640更經由光學元件632的反射曲面631而改變雷射光束640的發散角。舉例來說,反射曲面631可將垂直發散角由約為30度改變為8度。In this package structure, the laser diode 602 emits a laser beam 640 from the front surface and directly illuminates the reflective curved surface 631 of the optical element 632. The laser beam 640 changes the direction of travel of the laser beam 640 via the reflective curved surface 631 of the optical element 632. Furthermore, the laser beam 640 changes the divergence angle of the laser beam 640 via the reflective curved surface 631 of the optical element 632. For example, the reflective curved surface 631 can change the vertical divergence angle from about 30 degrees to 8 degrees.
由以上的說明可知,雷射二極體602輸出的雷射光束640可被反射曲面631所反射。亦即,習知的半導體雷射封裝結構中的光學元件632可將邊射型雷射二極體602的雷射光束進行反射與轉向,進而形成面射型雷射。同時,雷射光束640的形狀也可以經由反射曲面631而改變,例如由橢圓形雷射光束改變為圓形的雷射光束。As can be seen from the above description, the laser beam 640 output from the laser diode 602 can be reflected by the reflective curved surface 631. That is, the optical element 632 in the conventional semiconductor laser package structure can reflect and steer the laser beam of the edge-emitting laser diode 602 to form a surface-emitting laser. At the same time, the shape of the laser beam 640 can also be changed via the reflective curved surface 631, such as a laser beam that is changed from a elliptical laser beam to a circular laser beam.
再者,於最後的封裝製程中,更可將矽膠(未繪示)填充於電路板600上覆蓋住所有元件,以保護電路板600上的所有元件。Moreover, in the final packaging process, a silicone (not shown) may be filled on the circuit board 600 to cover all components to protect all components on the circuit board 600.
另外,於第4圖的封裝結構中,雷射元件包括:雷射二極體602與次黏著基板604。而在此領域的技術人員,也可以僅將雷射二極體602作為雷射元件,並直接將雷射二極體602固定於電路板600,一樣可以達成本發明的目的。In addition, in the package structure of FIG. 4, the laser element includes a laser diode 602 and a sub-adhesive substrate 604. A person skilled in the art can also use the laser diode 602 as a laser element and directly fix the laser diode 602 to the circuit board 600, and the object of the present invention can be achieved.
由以上的說明可知,本發明之優點在於提出一種半導體雷射的封裝結構及其相關元件。本發明設計一種新的光學元件。設計光學元件中反射曲面上各點的曲率半徑,即可有效地改變雷射光束的發散角。換言之,本發明的光學元件除了可以將邊射型雷射二極體輸出的雷射光束進行反射與轉向外,也可以改變雷射光束的形狀。亦即,本發明的雷射裝置可簡化,甚至完全省略改變雷射光束的透鏡系統。如此,將可大幅降低整個雷射裝置的體積,其具備小尺寸之優勢,可運用於小型電子裝置(例如手機)。As apparent from the above description, the present invention has an advantage in that a semiconductor laser package structure and related components are proposed. The present invention contemplates a new optical component. By designing the radius of curvature of each point on the reflective surface in the optical component, the divergence angle of the laser beam can be effectively changed. In other words, the optical element of the present invention can change the shape of the laser beam in addition to reflecting and steering the laser beam output from the edge-emitting type laser diode. That is, the laser device of the present invention can simplify or even completely omit the lens system that changes the laser beam. In this way, the volume of the entire laser device can be greatly reduced, and it has the advantage of being small in size, and can be applied to small electronic devices such as mobile phones.
綜上所述,雖然本發明已以實施例揭露如上,然其並非用以限定本發明。本發明所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作各種之更動與潤飾。因此,本發明之保護範圍當視後附之申請專利範圍所界定者為準。In conclusion, the present invention has been disclosed in the above embodiments, but it is not intended to limit the present invention. A person skilled in the art can make various changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.
332、532、542、552、632‧‧‧光學元件332, 532, 542, 552, 632‧‧‧ optical components
331‧‧‧反射面331‧‧‧reflecting surface
402、602‧‧‧雷射二極體402, 602‧‧ ‧ laser diode
404、604‧‧‧次黏著基板404, 604‧‧ ‧ adhesion substrates
410、600‧‧‧電路板410, 600‧‧‧ circuit board
420、640‧‧‧雷射光束420, 640‧‧ ‧ laser beam
531、541、551、631‧‧‧反射曲面531, 541, 551, 631‧‧‧ reflective surface
第1圖為習知半導體雷射的封裝結構。 第2圖為本發明光學元件的第一實施例。 第3圖為本發明的光學元件的第二實施例。 第4圖為本發明的光學元件的第二實施例。 第5圖為本發明的封裝結構。Figure 1 is a package structure of a conventional semiconductor laser. Figure 2 is a first embodiment of the optical component of the present invention. Figure 3 is a second embodiment of the optical component of the present invention. Figure 4 is a second embodiment of the optical element of the present invention. Figure 5 is a package structure of the present invention.
Claims (18)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW106119815A TWI632751B (en) | 2017-06-14 | 2017-06-14 | Package structure of semiconductor laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW106119815A TWI632751B (en) | 2017-06-14 | 2017-06-14 | Package structure of semiconductor laser |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TWI632751B true TWI632751B (en) | 2018-08-11 |
| TW201906261A TW201906261A (en) | 2019-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW106119815A TWI632751B (en) | 2017-06-14 | 2017-06-14 | Package structure of semiconductor laser |
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| Country | Link |
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| TW (1) | TWI632751B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080285914A1 (en) * | 2007-05-17 | 2008-11-20 | Hitachi, Ltd. | Optical Module |
| US20100265983A1 (en) * | 2009-04-20 | 2010-10-21 | Hitachi, Ltd. | Surface emitting laser module and vertical illuminated photodiode module |
| TWI568117B (en) * | 2015-04-20 | 2017-01-21 | 友嘉科技股份有限公司 | Package structure of laser and associated element |
-
2017
- 2017-06-14 TW TW106119815A patent/TWI632751B/en active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080285914A1 (en) * | 2007-05-17 | 2008-11-20 | Hitachi, Ltd. | Optical Module |
| US20100265983A1 (en) * | 2009-04-20 | 2010-10-21 | Hitachi, Ltd. | Surface emitting laser module and vertical illuminated photodiode module |
| TWI568117B (en) * | 2015-04-20 | 2017-01-21 | 友嘉科技股份有限公司 | Package structure of laser and associated element |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201906261A (en) | 2019-02-01 |
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