TWI629695B - Inductor structure - Google Patents

Abstract

An inductive structure is formed on a substrate and extends in the first to fourth quadrants. The inductive structure includes an input wire, an output wire, and a wire. The wire is connected between the input wire and the output wire. The first portion of the wire extends from a starting point, passes through the second quadrant, the fourth quadrant, and ends at an end point. The second portion of the wire extends from the starting point, extends through the third quadrant, in the first quadrant, and ends at the end point.

Description

Inductive structure

This invention relates to a semiconductor structure, and more particularly to an inductive structure.

An inductor is an element that can store electrical energy into magnetic energy and store it. In order to save the size of electronic devices, most of the current inductors are manufactured in a semiconductor process. However, the inductive components in the integrated circuit usually occupy a large area. In order to reduce the area of the inductance element, a conventional method is to change the layout pattern of the inductance element. However, the layout pattern of the inductor is related to the distribution of magnetic lines of force. When the distribution of magnetic lines of force is not good, the quality factor of the inductor will be reduced.

The present invention provides an inductive structure formed on a substrate and located in a first region, a second region, a third region, and a fourth region. The first area has a first boundary, a second boundary, a third boundary, and a fourth boundary. The second region has a fifth boundary, a sixth boundary, a seventh boundary, and an eighth boundary. The third region has a ninth boundary, a tenth boundary, an eleventh boundary, and a twelfth boundary. The fourth region has a thirteenth boundary, a fourteenth boundary, a fifteenth boundary, and a sixteenth boundary. The inductive structure of the present invention includes an input wire, an output wire, and a wire. The wire is connected between the input wire and the output wire and includes a first portion and a second portion. The first part is sequentially along the first, third, thirteenth, sixteenth, sixth, eighth, The tenth and eleventh borders extend. The second part extends sequentially along the ninth, twelfth, fifth, seventh, fourteenth, fifteenth, second and fourth boundaries. The first boundary is parallel to the second boundary. The third boundary is parallel to the fourth boundary. The first and second boundaries are perpendicular to the third and fourth boundaries. The fifth boundary is parallel to the sixth boundary. The seventh boundary is parallel to the eighth boundary. The fifth and sixth boundaries are perpendicular to the seventh and eighth boundaries. The ninth boundary is parallel to the tenth boundary. The eleventh boundary is parallel to the twelfth border. The ninth and tenth borders are perpendicular to the eleventh and twelfth borders. The thirteenth border is parallel to the fourteenth border. The fifteenth border is parallel to the sixteenth border. The thirteenth and fourteenth borders are perpendicular to the fifteenth and sixteenth borders.

110‧‧‧Base

120, 130‧‧‧ metal layer

200, 500, 610, 700‧‧‧ inductance structure

220, 520, 620, 720‧‧‧ input wires

230, 530, 630, 730‧‧‧ output wires

240, 540, 640, 740‧‧‧ wires

240a, 540a, 640a, 740a‧‧‧ first part

240b, 540b, 640b, 740b‧‧‧ Part II

540c, 640c, 740c‧‧‧ third part

740d‧‧‧Part IV

R1~R4, R5~R8‧‧‧ areas

B1~B16‧‧‧ border

S1~S16, 551~574‧‧‧ segments

CS1~CS16, 581~604‧‧‧ connecting line segments

θ 1~θ 32, θ 301~θ 304, θ 311~θ 321 , θ 401~θ 404‧‧‧ angle

V1~V12, 651~666, 751~770‧‧‧through holes

650, 701‧‧ ‧ starting point

Figure 1 is a schematic view of the inductive structure of the present invention.

Figure 2A is a schematic illustration of the first portion of the lead of the present invention.

Figure 2B is another possible schematic view of the first portion of the lead of the present invention.

Figure 2C is another possible schematic view of the first portion of the lead of the present invention.

Figure 3A is a schematic illustration of the second portion of the lead of the present invention.

Figure 3B is another possible schematic view of the second portion of the lead of the present invention.

Figure 3C is another possible schematic view of the second portion of the lead of the present invention.

Figure 4 is another schematic view of the inductive structure of the present invention.

Figure 5 is another schematic view of the inductive structure of the present invention.

Figure 6 is another schematic view of the inductive structure of the present invention.

Figure 7 is another schematic view of the inductive structure of the present invention.

In order to make the objects, features and advantages of the present invention more apparent, The embodiments are specifically described below, and the detailed description is made in conjunction with the drawings. The present specification provides various embodiments to illustrate the technical features of various embodiments of the present invention. The arrangement of the various elements in the embodiments is for illustrative purposes and is not intended to limit the invention. In addition, the overlapping portions of the drawings in the embodiments are for the purpose of simplifying the description, and do not mean the relationship between the different embodiments.

Figure 1 is a diagram of the inductive structure of the present invention. The inductor structure 200 is formed on a substrate 110 and extends in the regions R1 R R4. The region R1 is adjacent to the regions R3 and R4 and is located on the left side of the region R4 and on the upper side of the region R3. The region R2 is adjacent to the regions R3 and R4 and is located on the lower side of the region R4 and on the right side of the region R3. The region R3 is adjacent to the regions R1 and R2 and is located on the lower side of the region R1 and on the left side of the region R2. The region R4 is adjacent to the regions R1 and R2 and is located on the right side of the region R1 and on the upper side of the region R2.

The region R1 has boundaries B1 to B4. The boundary B1 is parallel to the boundary B2. B3 is parallel to boundary B4. Boundaries B1 and B2 are perpendicular to boundaries B3 and B4. In the present embodiment, the boundary B2 is closer to the region R4 than the boundary B1. In addition, the boundary B4 is closer to the region R3 than the boundary B3. The region R2 has boundaries B5 to B8. Boundary B5 is parallel to boundary B6. Boundary B7 is parallel to boundary B8. Boundaries B5 and B6 are vertical boundaries B7 and B8. In the present embodiment, the boundary B5 is closer to the region R3 than the boundary B6. In addition, the boundary B7 is closer to the region R4 than the boundary B8.

The region R3 has boundaries B9 to B12. Boundary B9 is parallel to boundary B10. The boundary B11 is parallel to the boundary B12. Boundaries B9 and B10 are vertical boundaries B11 and B12. In the present embodiment, the boundary B10 is closer to the region R2 than the boundary B9. In addition, the boundary B11 is closer to the region R1 than the boundary B12. The region R4 has boundaries B13 to B16. Boundary B13 is parallel to boundary B14. Boundary B15 is parallel to boundary B16. Boundary B13 and B14 vertical boundaries B15 and B16. In the present embodiment, the boundary B13 is closer to the region R1 than the boundary B14. In addition, the boundary B16 is closer to the region R2 than the boundary B15.

The inductor structure 200 includes an input lead 220, an output lead 230, and a lead 240. The input wire 220 and the output wire 230 are formed in the metal layer 130. The wire 240 is electrically connected between the input wire 220 and the output wire 230 and extends in the metal layers 120 and 130. As shown, the metal layer 120 is located within the substrate 110 and the metal layer 130. In a possible embodiment, an insulating layer (not shown) is located between the metal layers 120 and 130.

The invention does not limit the materials of the metal layers 120 and 130. In one possible embodiment, the materials of metal layers 120 and 130 are aluminum or copper, but are not intended to limit the invention. In other embodiments, any material having a conductive function can be used as the metal layer 120 or 130. In addition, the material of the metal layer 120 may be the same or different from the material of the metal layer 130.

In the present embodiment, the wire 240 includes a first portion 240a and a second portion 240b. In a possible embodiment, the first portion 240a of the wire 240 is electrically connected to the input wire 220, and sequentially extends along the boundaries B1 and B3 of the region R1, then extends along the boundaries B13 and B16 of the region R4, and then enters the region R2. And extending along the boundaries B6 and B8, and then entering the region R3, and extending along the boundaries B10 and B11 of the region R3, and finally electrically connecting the output wires 230. In addition, the second portion 240b of the wire 240 is electrically connected to the input wire 220, and sequentially extends along the boundaries B9 and B12 of the region R3, then enters the region R2, and extends along the boundaries B5 and B7 of the region R2, and then enters the region. R4 extends along the boundaries B14 and B15 of the region R4, enters the region R1, and extends along the boundaries B2 and B4 of the region R1, and is finally electrically connected to the output conductor 230.

In the present embodiment, the first portion 240a and the second portion 240b of the wire 240 surround the exit regions R5-R8. The region R5 is located approximately at the center of the region R1. The region R6 is located approximately at the center of the region R4. The area R7 is located approximately at the center of the area R3. The area R8 is located approximately at the center of the area R2. When the input wire 220 receives an input current, the input current flows to the first portion 240a and the second portion 240b and is output from the output wire 230.

In Fig. 1, the symbols "X" and "‧" indicate the direction of the magnetic field. In this example, the direction of the magnetic field in regions R5 and R8 is from metal layer 130 to substrate 110, and the magnetic fields of regions R6 and R7 are oriented from substrate 110 to metal layer 130. By controlling the extending direction of the wires 240, the distribution of magnetic lines of force can be changed to avoid magnetic field loss on the substrate 110, thereby improving the quality factor, reducing noise and reducing the layout area.

2A is a schematic illustration of the first portion 240a of the lead 240 of the present invention. As shown, the first portion 240a of the wire 240 includes segments S1 - S8 and connecting segments CS1 - CS8. Line segment S1 is directly connected to input wire 220 and extends along boundary B1. In the present embodiment, the line segment S1 is parallel to the boundary B1. Line segment S2 extends along boundary B3. As shown, line segment S2 is parallel to boundary B2. The connecting line segment CS1 is coupled between the line segments S1 and S2. In a possible embodiment, the connecting line segment CS1 is located in the same metal layer as the line segments S1 and S2, such as the metal layer 130. In other embodiments, the connecting line segment CS1 and the line segments S1 and S2 are located in different metal layers. For example, the connection line segment CS1 may be located in the metal layer 120 while the line segments S1 and S2 are located in the metal layer 130. In the present embodiment, the connecting line segment CS1 has an angle θ 1 with the line segment S1. The connecting line segment CS1 has an angle θ 2 with the line segment S2. In one possible embodiment, the angles θ 1 and θ 2 are both greater than 90 degrees. In another possible embodiment, the angle θ 1 is equal At an angle θ 2 .

Line segment S3 extends along boundary B13. In the present embodiment, the line segment S3 is parallel to the boundary B3. The connecting line segment CS2 is connected between the line segments S2 and S3. In a possible embodiment, the connecting line segment CS2 and the line segments S2 and S3 are located in different metal layers. For example, the connection line segment CS2 may be located in the metal layer 120 while the line segments S2 and S3 are located in the metal layer 130. In this example, the line segments S2 and S3 are electrically connected to the connecting line segment CS2 in the metal layer 120 through the through holes V1 and V2, respectively. In another possible embodiment, the connecting line segment CS2 is located in the same metal layer as the line segments S2 and S3. For example, the connection line segment CS2 and the line segments S2 and S3 may both be located in the metal layer 130. As shown, the connecting line segment CS2 has an angle θ 3 with the line segment S2. The connecting line segment CS2 has an angle θ 4 with the line segment S3. In the present embodiment, the angles θ 3 and θ 4 are both greater than 90 degrees. In a possible embodiment, the angle θ 3 is equal to the angle θ 4 .

Line segment S4 extends along boundary B16. In the present embodiment, the line segment S4 is parallel to the boundary B16. The connecting line segment CS7 is connected between the line segments S3 and S4. In a possible embodiment, the connecting line segment CS7 is located in the same metal layer as the line segments S3 and S4, but is not intended to limit the invention. In other embodiments, the connecting segment CS7 and the segments S3 and S4 are located in different metal layers. For example, the connecting line segment CS7 is located in a first metal layer, and the line segments S3 and S4 are located in a second metal layer above the first metal layer. The connecting line segment CS7 has an angle θ 13 with the line segment S3. The connecting line segment CS7 has an angle θ 14 with the line segment S4. In the present embodiment, the angles θ 13 and θ 14 are both greater than 90 degrees. In a possible embodiment, the angle θ 13 is equal to the angle θ 14 .

Line segment S5 extends along boundary B6. In the present embodiment, the line segment S5 is parallel to the boundary B6. The connecting line segment CS3 is connected between the line segments S4 and S5. In a possible embodiment, the connecting line segment CS3 is located in the same metal layer as the line segments S4 and S5, such as a metal. Layer 130. In another possible embodiment, the connecting line segment CS3 and the line segments S4 and S5 are located in different metal layers. For example, the connection line segment CS3 may be located in the metal layer 120 while the line segments S4 and S5 are located in the metal layer 130. The connecting line segment CS3 has an angle θ 5 with the line segment S4. The connecting line segment CS3 has an angle θ 6 with the line segment S5. In the present embodiment, the angles θ 5 and θ 6 are both greater than 90 degrees. In a possible embodiment, the angle θ 5 is equal to the angle θ 6 .

Line segment S6 extends along boundary B8. In the present embodiment, the line segment S6 is parallel to the boundary B8. The connecting line segment CS4 is connected between the line segments S5 and S6. In a possible embodiment, the connecting line segment CS4 and the line segments S5 and S6 are located in the same or different metal layers. The connecting line segment CS4 has an angle θ 7 with the line segment S5. The connecting line segment CS4 has an angle θ 8 with the line segment S6. In the present embodiment, the angles θ 7 and θ 8 are both greater than 90 degrees. In a possible embodiment, the angle θ 7 is equal to the angle θ 8 .

Line segment S7 extends along boundary B10. In the present embodiment, the line segment S7 is parallel to the boundary B10. The connecting line segment CS5 is connected between the line segments S6 and S7. In a possible embodiment, the connecting line segment CS5 and the line segments S6 and S7 are located in the same or different metal layers. The connecting line segment CS5 has an angle θ 9 with the line segment S6. The connecting line segment CS5 has an angle θ 10 with the line segment S7. In the present embodiment, the angles θ 9 and θ 10 are both greater than 90 degrees. In a possible embodiment, the angle θ 9 is equal to the angle θ 10 .

Line segment S8 extends along boundary B11 and is coupled to output conductor 230. In the present embodiment, the line segment S8 is parallel to the boundary B11. The connecting line segment CS8 is connected between the line segments S7 and S8. In a possible embodiment, the connecting line segment CS8 and the line segments S7 and S8 are located in the same or different metal layers. The connecting line segment CS8 has an angle θ 15 with the line segment S7. The connecting line segment CS7 has an angle θ 16 with the line segment S8. In this In the embodiment, the angles θ 15 and θ 16 are both greater than 90 degrees. In a possible embodiment, the angle θ 15 is equal to the angle θ 16 .

The connecting line segment CS6 is connected between the line segment S8 and the output wire 230. In the present embodiment, the connecting line segment CS6 and the line segment S8 and the output wire 230 are located in different metal layers. For example, the connection line segment CS6 may be located in the metal layer 120 while the line segment S8 and the output line 230 are located in the metal layer 130. In this example, the line segment S8 and the output wire 230 are electrically connected to the connecting line segment CS6 in the metal layer 120 through the through holes V3 and V4, respectively. The connecting line segment CS6 has an angle θ 11 with the line segment S8. There is an angle θ 12 between the connecting line segment CS6 and the output wire 230. In the present embodiment, the angles θ 11 and θ 12 are both greater than 90 degrees. In a possible embodiment, the angle θ 11 is equal to the angle θ 12 .

2B is another possible schematic view of the first portion 240a of the lead 240 of the present invention. Fig. 2B is similar to Fig. 2A except that the line segment S3 of Fig. 2B is directly connected to the line segment S4, and the line segment S7 is directly connected to the line segment S8. In the present embodiment, there is an angle θ 301 between the line segments S3 and S4, and an angle θ 302 between the line segments S7 and S8. In a possible embodiment, the angle θ 301 is equal to the angle θ 302. In another possible embodiment, the angles θ 301 and θ 302 are both 90 degrees.

2C is another possible schematic view of the first portion 240a of the lead 240 of the present invention. In the present embodiment, the line segment S2 is directly connected to the line segment S1. There is an angle θ 311 between the line segments S1 and S2. Line segment S2 is directly connected to line segment S3. There is an angle θ 312 between the line segments S2 and S3. Line segment S3 is directly connected to line segment S4. There is an angle θ 313 between the line segments S3 and S4. Line segment S4 is directly connected to line segment S5. There is an angle θ 314 between the line segments S4 and S5. Line segment S5 is directly connected to line segment S6. There is an angle θ 315 between the line segments S5 and S6. Line segment S6 is directly connected to line segment S7. Line segment There is an angle θ 316 between S6 and S7. The line segment S7 is directly connected to the line segment S8. There is an angle θ 317 between the line segments S7 and S8. The line segment S8 is connected to the output lead 230 via the connecting line segment CS6.

In the present embodiment, the angles θ 311 θ θ 317 are all equal. In one possible embodiment, the angles θ 311 θ θ 317 are all equal to 90 degrees, but are not intended to limit the invention. In other embodiments, at least one of the angles θ 311 θ θ 317 is not equal to the other of the angles θ 311 θ θ 317 .

Figure 3A is a schematic illustration of the second portion 240b of the lead 240 of the present invention. As shown, the second portion 240b of the wire 240 includes segments S9-S16 and connecting segments CS9-CS16. Line segment S9 is directly connected to input conductor 220 and extends along boundary B9. In the present embodiment, the line segment S9 is parallel to the boundary B9. Line segment S10 extends along boundary B12. In the present embodiment, the line segment S10 is parallel to the boundary B12. The connecting line segment CS9 is connected between the line segments S9 and S10. In a possible embodiment, the connecting line segment CS9 is located in the same metal layer as the line segments S9 and S10, such as the metal layer 130. In another possible embodiment, the connecting line segment CS9 and the line segments S9 and S10 are located in different metal layers. For example, the connection line segment CS9 may be located in the metal layer 120, and the line segments S9 and S10 may be located in the metal layer 130. The connecting line segment CS9 has an angle θ 17 with the line segment S9. The connecting line segment CS9 has an angle θ 18 with the line segment S1. In the present embodiment, the angles θ 17 and θ 18 are both greater than 90 degrees. In a possible embodiment, the angle θ 17 is equal to the angle θ 18 .

The line segment S11 extends along the boundary B5. In the present embodiment, the line segment S11 is parallel to the boundary B5. The connecting line segment CS10 is connected between the line segments S10 and S11. In a possible embodiment, the connecting line segment CS10 is located in the same metal layer as the line segments S10 and S11, such as the metal layer 130. In another possible embodiment, the connecting line segment CS10 and the line segment S10 And S11 is located in a different metal layer. For example, the connection line segment CS10 may be located in the metal layer 120 while the line segments S10 and S11 are located in the metal layer 130. In this example, the line segments S10 and S11 are electrically connected to the connecting line segment CS10 of the metal layer 120 through the through holes V5 and V6, respectively. The connecting line segment CS10 has an angle θ 19 with the line segment S10. The connecting line segment CS10 has an angle θ 20 with the line segment S11. In one possible embodiment, the angles θ 19 and θ 20 are both greater than 90 degrees. In another possible embodiment, the angle θ 19 is equal to the angle θ 20 .

Line segment S12 extends along boundary B7. In the present embodiment, the line segment S12 is parallel to the boundary B7. The connecting line segment CS15 is connected between the line segments S11 and S12. In a possible embodiment, the connecting line segment CS15 is located in the same metal layer as the line segments S11 and S12, such as the metal layer 130. In another possible embodiment, the connecting line segment CS15 and the line segments S11 and S12 are located in different metal layers. For example, the connection line segment CS15 may be located in the metal layer 120 while the line segments S11 and S12 are located in the metal layer 130. In addition, the connecting line segment CS15 and the line segment S11 have an angle θ 29 . The connecting line segment CS15 has an angle θ 30 with the line segment S12. In the present embodiment, the angles θ 29 and θ 30 are both greater than 90 degrees. In a possible embodiment, the angle θ 29 is equal to the angle θ 30 .

Line segment S13 extends along boundary B14. In the present embodiment, the line segment S13 is parallel to the boundary B14. The connecting line segment CS11 is connected between the line segments S12 and S13. In a possible embodiment, the connecting line segment CS11 and the line segments S12 and S13 are located in different metal layers. For example, the connecting line segment CS11 is located in the metal layer 120, and the line segments S12 and S13 are located in the metal layer 130. In this example, the line segments S12 and S13 are electrically connected to the connecting line segment CS11 in the metal layer 120 through the through holes V7 and V8, respectively. In another possible embodiment, the connecting line segment CS11 is located in the same metal layer as the line segments S12 and S13, such as the metal layer 130. In addition, the connecting line segment CS11 has an angle θ 21 with the line segment S12. The connecting line segment CS11 has an angle θ 22 with the line segment S13. In the present embodiment, the angles θ 21 and θ 22 are both greater than 90 degrees. In a possible embodiment, the angle θ 21 is equal to the angle θ 22 .

Line segment S14 extends along boundary B15. In the present embodiment, the line segment S14 is parallel to the boundary B15. The connecting line segment CS12 is connected between the line segments S13 and S14. In a possible embodiment, the connecting line segment CS12 is located in the same metal layer as the line segments S13 and S14, such as the metal layer 130. In another possible embodiment, the connecting line segment CS12 and the line segments S13 and S14 are located in different metal layers. The connecting line segment CS12 has an angle θ 23 with the line segment S13. The connecting line segment CS12 has an angle θ 24 with the line segment S14. In the present embodiment, the angles θ 23 and θ 24 are both greater than 90 degrees. In a possible embodiment, the angle θ 23 is equal to the angle θ 24 .

Line segment S15 extends along boundary B2. In the present embodiment, the line segment S15 is parallel to the boundary B2. The connecting line segment CS13 is connected between the line segments S14 and S15. In a possible embodiment, the connecting line segment CS13 is located in the same metal layer as the line segments S14 and S15, but is not intended to limit the present invention. In other embodiments, the connecting segment CS13 and the segments S14 and S15 are located in different metal layers. For example, the connection line segment CS13 may be located in the metal layer 120 while the line segments S14 and S15 are located in the metal layer 130. In addition, the connecting line segment CS13 has an angle θ 25 with the line segment S14. The connecting line segment CS13 has an angle θ 26 with the line segment S15. In the present embodiment, the angles θ 25 and θ 26 are both greater than 90 degrees. In a possible embodiment, the angle θ 25 is equal to the angle θ 26 .

The line segment S16 extends along the boundary B4 and connects the line segment S8. In the present embodiment, the line segment S16 is parallel to the boundary B4. The connecting line segment CS16 is connected between the line segments S15 and S16. In a possible embodiment, the connecting line segment CS16 is located in the same metal layer as the line segments S15 and S16, such as the metal layer 130. In another possible embodiment, the connecting line segment CS16 and line segments S15 and S16 are located in different metal layers. The connecting line segment CS16 has an angle θ 31 with the line segment S15. The connecting line segment CS16 has an angle θ 32 with the line segment S16. In the present embodiment, the angles θ 31 and θ 32 are both greater than 90 degrees. In a possible embodiment, the angle θ 31 is equal to the angle θ 32 .

The connecting line segment CS14 is connected between the line segments S16 and S8. In a possible embodiment, the connecting line segment CS14 is located in the same metal layer as the line segments S16 and S8, such as the metal layer 130. In another possible embodiment, the connecting line segment CS14 and the line segments S16 and S8 are located in different metal layers. The connecting line segment CS14 has an angle θ 27 with the line segment S16. The connecting line segment CS14 has an angle θ 28 with the line segment S8. In the present embodiment, the angle θ 27 is greater than 90 degrees, and the angle θ 28 is less than 90 degrees.

The present invention does not limit the positions of the line segments S1 S S8 of the first portion 240a of the wire 240 and the line segments S9 S S16 of the second portion 240b. In a possible embodiment, the line segments S1 S S8 are located in the same metal layer as the line segments S9 S S16 , such as the metal layer 130 . In this example, at least one of the connecting segments CS1 CSCS8 of the first portion 240a of the wire 240 and the connecting segments CS9-CS16 of the second portion 240b are located in another metal layer, such as the metal layer 120. In this example, the line segment located in the metal layer 130 is electrically connected to the connecting line segment of the metal layer 120 through the through hole.

Figure 3B is another possible schematic view of the second portion 240b of the lead 240 of the present invention. Fig. 3B is similar to Fig. 3A except that the line segment S11 of Fig. 3B is directly connected to the line segment S12, and the line segment S15 is directly connected to the line segment S16. In this example, there is an angle θ 303 between the line segments S11 and S12, and an angle θ 304 between the line segments S15 and S16. In a possible embodiment, the angle θ 303 is equal to the angle θ 304. In another possible embodiment, the angles θ 303 and θ 304 are both equal to 90 degrees.

Figure 3C is another possible schematic view of the second portion 240b of the lead 240 of the present invention. The 3C diagram is similar to the 3A diagram, except that the line segment S9 is directly connected to the line segment S10, the line segment S11 is directly connected to the line segment S12, the line segment S13 is directly connected to the line segment S14, and the line segment S15 is directly connected to the line segment S16. In this embodiment, there is an angle θ 318 between the line segments S9 and S10, an angle θ 319 between the line segments S11 and S12, an angle θ 320 between the line segments S13 and S14, and a line between the line segments S15 and S16. Angle θ 321 . In the present embodiment, the angles θ 318 to θ 321 are all equal. In one possible embodiment, the angles θ 318 θ 321 are all equal to 90 degrees, but are not intended to limit the invention. In other embodiments, at least one of the angles θ 318 θ θ 321 is not equal to the other of the angles θ 318 θ θ 321 .

In the present embodiment, the line segments S9 to S16, the connection line segments CS13 and CS14 are located in the metal layer 130, and the connection line segments CS10 and CS11 are located in the metal layer 120. In other embodiments, the line segments S9-S16 are located in the metal layer 130, and at least one of the connection line segments CS10, CS11, CS13, and CS14 is located in the metal layer 120. Since the characteristics of the connection line segments CS10, CS11, CS13, and CS14 in FIG. 3C are the same as those of the connection line segments CS10, CS11, CS13, and CS14 in FIG. 3A, they will not be described again.

Figure 4 is another schematic view of the inductive structure of the present invention. Fig. 4 is similar to Fig. 1, except that the line segment S3 of Fig. 4 is directly connected to the line segment S4, the line segment S7 is directly connected to the line segment S8, the line segment S11 is directly connected to the line segment S12, and the line segment S15 is directly connected to the line segment S16. There is an angle θ 401 between the line segments S3 and S4. There is an angle θ 402 between the line segments S7 and S8. There is an angle θ 403 between the line segments S11 and S12. There is an angle θ 404 between the line segments S15 and S16. In the present embodiment, the angles θ 401 to θ 404 are all equal. In a possible embodiment, the angle θ 401~ θ 404 is approximately equal to 90 degrees. In other embodiments, one of the angles θ 401 ~ θ 404 may be greater or less than the other of the angles θ 401 θ θ 404.

In other embodiments, the connection segments CS1, CS4, CS9, and CS12 are omitted. Therefore, the line segment S1 is directly connected to the line segment S2, the line segment S5 is directly connected to the line segment S6, the line segment S9 is directly connected to the line segment S10, and the line segment S13 is directly connected to the line segment S14. In this example, the angle between the line segments S1 and S2 is equal to the angle between the line segments S5 and S6, the angle between the line segments S5 and S6 is equal to the angle between the line segments S9 and S10, and the angle between the line segments S9 and S10 is equal to The angle between line segments S13 and S14.

Figures 5-7 are other schematic views of the inductive structure of the present invention. In FIG. 5, the inductor structure 500 includes an input lead 520, an output lead 530, and a lead 540. In the present embodiment, the wire 540 includes a first portion 540a, a second portion 540b, and a third portion 540c. The first portion 540a of the wire 540 is similar to the first portion 240a of the wire 240 of Figure 2A, except that the connecting segment 586 of the first portion 540a of Figure 5 is coupled to the third portion 540c. Since the line segments 551-558 and the connecting line segments 581-585, 587, 588 of the first portion 540a of the wire 540 are similar to the line segments S1 to S8 of the first portion 240a of the wire 240 of FIG. 2A, the connecting line segments CS1~CS5, CS6, CS7, Therefore, it will not be repeated.

Additionally, the second portion 540b of the wire 540 is similar to the second portion 240b of the wire 240 of Figure 2A, except that the connecting line segment 594 of the second portion 540b is connected to the line segment 574 of the third portion 540c. Since the characteristics of the line segments 559 to 566 and the connection line segments 589 to 593, 595 and 596 of the second portion 540b are similar to those of the line segments S9 to S16 and the connection line segments CS9 to CS13, CS15 and CS16 of FIG. 3A, they will not be described again.

In this embodiment, the third portion 540c includes line segments 567-574 to And connecting line segments 597~604. As shown in the figure, line segments 567~574 are parallel line segments 551~558, respectively. The connecting line segment 597 connects the line segments 567 and 568 and is parallel to the connecting line segment 581. The characteristics of the connecting line segment 597 are similar to those of the connecting line segment 581, and therefore will not be described again.

The connecting line segment 598 connects the line segments 568 and 569 through the through holes V9 and V10. In the present embodiment, the connecting line segment 598 and the line segments 568 and 569 are located in different metal layers, but are not intended to limit the present invention. In other embodiments, the connecting segment 598 is in the same metal layer as the segments 568 and 569. In a possible embodiment, the line segment 598 is connected and parallel to the connecting line segment 581.

The connecting line segment 599 connects the line segments 569 and 570 and is parallel to the connecting line segment 587. Since the characteristics of the connecting line segment 599 are similar to those of the connecting line segment 587, they will not be described again. The connecting line segment 600 connects the line segments 570 and 571 and is parallel to the connecting line segment 583. The characteristics of the connecting line segment 600 are similar to those of the connecting line segment 583, and therefore will not be described again. The connecting line segment 601 connects the line segments 571 and 572 and is parallel to the connecting line segment 584. Since the characteristics of the connecting line segment 601 are similar to those of the connecting line segment 584, they will not be described again. The connecting line segment 602 connects the line segments 572 and 573 and is parallel to the connecting line segment 585. Since the characteristics of the connecting line segment 602 are similar to those of the connecting line segment 585, they will not be described again. The connecting line segment 603 connects the line segments 573 and 574 and is parallel to the connecting line segment 588. Since the characteristics of the connecting line segment 603 are similar to those of the connecting line segment 588, they will not be described again. The connecting line segment 604 connects the line segment 574 and the output lead 530 through the through holes V11 and V12. Since the characteristics of the connecting line segment 604 are similar to those of the connecting line segment CS6 of FIG. 2A, they will not be described again. In the present embodiment, the length of the wire 540 is greater than the length of the wire 240 of FIG. 1, so that the inductance structure 500 provides a sense of inductance greater than that provided by the inductor structure 200.

In FIG. 6, the inductor structure 610 includes an input lead 620, an output lead 630, and a lead 640. The wire 640 includes a first portion 640a, A second portion 640b and a third portion 640c. The input lead 620 is electrically connected to a start end 650. The output lead 630 is electrically connected to the through hole 658. The first portion 640a extends from the starting end 650, passes through the through holes 651-653, and ends in the through hole 654. The third portion 640c extends from the through hole 654, passes through the through holes 655 to 657, and ends in the through hole 658. The second portion 640b extends from the starting end 650, passes through the through holes 659-666, and ends in the through hole 657. Since the characteristics of the wire 640 are similar to those of the wire 240 of FIG. 1, they will not be described again. In the present embodiment, the length of the wire 640 is greater than the length of the wire 540 of FIG. 5, so the inductance structure 610 provides a sense of inductance greater than that provided by the inductor structure 500.

In FIG. 7, the inductor structure 700 includes an input lead 720, an output lead 730, and a lead 740. The input wire 720 is electrically connected to a starting point 701. The output wire 730 is electrically connected to the through hole 762. The wire 740 includes a first portion 740a, a second portion 740b, a third portion 740c, and a fourth portion 740d.

The first portion 740a extends from the starting point 701, passes through the through holes 751-753, and ends in the through hole 754. The third portion 740c extends from the through hole 754, passes through the through holes 755 to 757, and ends in the through hole 758. The fourth portion 740d extends from the through hole 758, passes through the through holes 759 to 761, and ends in the through hole 762. The second portion 740b extends from the starting point 701, passes through the through holes 763-770, and ends in the through hole 761. Since the characteristics of the wire 740 are similar to those of the wire 240 of FIG. 1, they will not be described again. In the present embodiment, the length of the wire 740 is greater than the length of the wire 640 of FIG. 6, so that the inductance structure 700 provides a sense of inductance greater than that provided by the inductor structure 610.

Unless otherwise defined, all words (including technical and scientific words) The present invention is a general understanding of those of ordinary skill in the art to which the invention pertains. Moreover, unless expressly stated, the definition of a vocabulary in a general dictionary should be interpreted as consistent with the meaning of an article in its related art, and should not be interpreted as an ideal state or an overly formal voice.

Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the invention, and any one of ordinary skill in the art can make some modifications and refinements without departing from the spirit and scope of the invention. . For example, the system, apparatus or method of the embodiments of the present invention may be implemented in a physical embodiment of a combination of hardware, software or hardware and software. Therefore, the scope of the invention is defined by the scope of the appended claims.

Claims (17)

An inductive structure is formed on a substrate and located in a first region, a second region, a third region, and a fourth region, the first region having a first boundary and a second boundary. a third boundary and a fourth boundary, the second region having a fifth boundary, a sixth boundary, a seventh boundary, and an eighth boundary, the third region having a ninth boundary and a tenth boundary, An eleventh boundary and a twelfth boundary, the fourth region having a thirteenth boundary, a fourteenth boundary, a fifteenth boundary and a sixteenth boundary, the inductive structure comprising: an input wire; An output wire; a wire connected between the input wire and the output wire, and comprising: a first portion, sequentially along the first, third, thirteenth, sixteenth, sixth, eighth a tenth and eleventh boundary extension; and a second portion extending sequentially along the ninth, twelfth, fifth, seventh, fourteenth, fifteenth, second and fourth boundaries; Where the first boundary is parallel to the second boundary, the third boundary is parallel to the fourth boundary The first and second boundaries are perpendicular to the third and fourth boundaries; wherein the fifth boundary is parallel to the sixth boundary, the seventh boundary is parallel to the eighth boundary, and the fifth and sixth boundaries are perpendicular to the seventh and fourth An eight boundary; wherein the ninth boundary is parallel to the tenth boundary, the eleventh boundary is parallel to the twelfth boundary, and the ninth and tenth boundaries are perpendicular to the eleventh and twelfth boundaries; wherein the thirteenth boundary Parallel to the fourteenth boundary, the fifteenth boundary is parallel to the sixteenth boundary, and the thirteenth and fourteenth boundaries are perpendicular to the fifteenth and sixteenth boundaries. The inductive structure of claim 1, wherein the first portion of the wire comprises: a first line segment directly connected to the input wire and extending along the first boundary; a second segment along the first a third boundary extension; a third line segment extending along the thirteenth boundary; a fourth line segment extending along the sixteenth boundary; a fifth line segment extending along the sixth boundary; a sixth line segment along the first An eight-boundary extension; a seventh line segment extending along the tenth boundary; and an eighth line segment extending along the eleventh boundary and coupled to the output conductor. The inductive structure of claim 2, wherein the second line segment is directly connected to the first line segment, the third line segment is directly connected to the fourth line segment, and the fifth line segment is directly connected to the sixth line segment, the first line segment The seventh line segment is directly connected to the eighth line segment, the angle between the first and second line segments is equal to the angle between the third and fourth line segments, and the angle between the third and fourth line segments is equal to the fifth and the fourth The angle between the six line segments, the angle between the fifth and sixth line segments is equal to the angle between the seventh and eighth line segments. The inductive structure of claim 3, wherein the angle between the first and second line segments is equal to 90 degrees. The inductive structure of claim 2, wherein the first portion of the wire further comprises: a first connecting line segment connected between the first and second line segments, wherein the first connecting line segment and the first a first angle between the line segments, the first connecting line segment and the second line segment having a second angle; a second connecting line segment is connected between the second and third line segments, wherein the second connecting line segment and the second line segment have a third angle, and the second connecting line segment and the third line segment have a fourth angle; a third connecting line segment connected between the fourth and fifth line segments, wherein the third connecting line segment and the fourth line segment have a fifth angle, the third connecting line segment and the first a fifth angle between the five line segments; a fourth connecting line segment connected between the fifth and sixth line segments, wherein the fourth connecting line segment and the fifth line segment have a seventh angle, the fourth An eighth angle is formed between the connecting line segment and the sixth line segment; a fifth connecting line segment is connected between the sixth and seventh line segments, wherein the fifth connecting line segment and the sixth line segment have a ninth An angle between the fifth connecting line segment and the seventh line segment; a sixth connecting line segment connected between the eighth line segment and the output wire, wherein the sixth connecting line segment and the eighth line segment Between the eleventh angle, the first Is connected between the output lead line having a twelfth angle, wherein each of the first to twelfth an angle greater than 90 degrees. The inductive structure of claim 5, wherein the third line segment is directly connected to the fourth line segment, the seventh line segment is directly connected to the eighth line segment, and an angle between the third and fourth line segments is equal to the seventh The angle between the eighth line segment. The inductive structure of claim 6, wherein the angle between the third and fourth line segments is 90 degrees. The inductive structure of claim 5, wherein the first portion of the wire further comprises: a seventh connecting line segment is connected between the third and fourth line segments, wherein the seventh connecting line segment and the third line segment have a thirteenth angle, and between the seventh connecting line segment and the fourth line segment Having a fourteenth angle; and an eighth connecting line segment connected between the seventh and eighth line segments, wherein the eighth connecting line segment and the seventh line segment have a fifteenth angle, the eighth connection There is a sixteenth angle between the line segment and the eighth line segment, and each of the thirteenth to sixteenth angles is greater than 90 degrees. The inductive structure of claim 5, wherein the first to eighth line segments are located in a first metal layer, and at least one of the first to eighth connection line segments is located in a second metal layer, the second A metal layer is between the substrate and the first metal layer. The inductive structure of claim 5, wherein the second portion of the wire comprises: a ninth line segment directly connected to the input wire and extending along the ninth boundary; a tenth line segment along the a twelve-boundary extension; an eleventh line extending along the fifth boundary; a twelfth line extending along the seventh boundary; a thirteenth line extending along the fourteenth boundary; a fourteenth a line segment extending along the fifteenth boundary; a fifteenth line segment extending along the second boundary; and a sixteenth line segment extending along the fourth boundary and connecting the eighth line segment. The inductive structure of claim 10, wherein the tenth line segment is directly connected to the ninth line segment, and the eleventh line segment is directly connected to the twelfth line segment, and the thirteenth line segment is directly connected to the fourteenth line segment. Line segment, the fifteenth line segment Directly connecting the sixteenth line segment, the angle between the ninth and tenth line segments is equal to the angle between the eleventh and twelfth line segments, and the angle between the eleventh and twelfth line segments is equal to the first The angle between the thirteenth and fourteenth line segments is equal to the angle between the fifteenth and sixteenth line segments. The inductive structure of claim 11, wherein the angle between the ninth and tenth line segments is equal to 90 degrees. The inductive structure of claim 10, wherein the second portion of the wire further comprises: a ninth connecting line segment connected between the ninth and tenth line segments, wherein the ninth connecting line segment and the first Between the nine line segments, there is a seventeenth angle, the ninth connecting line segment and the tenth line segment have an eighteenth angle; a tenth connecting line segment is connected between the tenth and eleventh line segments, Wherein the tenth connecting line segment and the tenth line segment have a nineteenth angle, the tenth connecting line segment and the eleventh line segment have a twentieth angle; an eleventh connecting line segment is connected to Between the twelfth and thirteenth line segments, wherein the eleventh connecting line segment and the twelfth line segment have a twenty-first angle, and the eleventh connecting line segment and the thirteenth line segment have a twenty-two angle; a twelfth connecting line segment connected between the thirteenth and fourteenth line segments, wherein the twelfth connecting line segment and the thirteenth line segment have a twenty-third angle , the twelfth connecting line segment and the fourteenth line segment have a first Fourteen angle; a thirteenth connecting line segment connected between the fourteenth and fifteenth line segments, wherein the thirteenth connecting line segment and the fourteenth line segment have a twenty-fifth angle, the thirteenth connecting line segment Having a twenty-sixth angle with the fifteenth line segment; a fourteenth connecting line segment connected between the sixteenth line segment and the eighth line segment, wherein the fourteenth connecting line segment and the sixteenth line segment Between the line segments, there is a twenty-seventh angle, and the fourteenth connecting line segment and the eighth line segment have a twenty-eighth angle, wherein each of the seventeenth to twenty-seventh angles is greater than 90 degrees The twenty-eighth angle is less than 90 degrees. The inductive structure of claim 13, wherein the eleventh line segment is directly connected to the twelfth line segment, and the fifteenth line segment is directly connected to the sixteenth line segment, the eleventh and twelfth line segments The angle between them is equal to the angle between the fifteenth and sixteenth line segments. The inductive structure of claim 14, wherein the angle between the eleventh and twelfth line segments is 90 degrees. The inductive structure of claim 13, wherein the second portion of the wire further comprises: a fifteenth connecting line segment connected between the eleventh and twelfth line segments, wherein the fifteenth The connecting line segment and the eleventh line segment have a twenty-nine angle, the fifteenth connecting line segment and the twelfth line segment have a thirtieth angle; and a sixteenth connecting line segment is connected to Between the fifteenth and sixteenth line segments, wherein the sixteenth connecting line segment and the fifteenth line segment have a thirty-first angle, and the sixteenth connecting line segment and the sixteenth line segment have One At thirty-two angles, each of the twenty-ninth to thirty-second angles is greater than 90 degrees. The inductive structure of claim 13, wherein the first to sixteenth line segments are located in a first metal layer, and at least one of the first to sixteenth connection line segments is located in a second metal layer. A second metal layer is between the substrate and the first metal layer.