TWI616930B - flexible substrate processing equipment - Google Patents

Abstract

A soft substrate processing device comprises a liquid storage tank and a plurality of drainage devices, the drainage device is arranged in the liquid storage tank, and the liquid inlet device and the liquid suction device are connected to the drainage device, and the soft substrate is inserted into the liquid storage tank. The drainer is sequentially wound, and the drainer is provided with a plurality of liquid discharge hole groups and a plurality of liquid suction hole groups on the surface close to the flexible substrate, and the liquid discharge hole group is connected to the liquid supply device, and the liquid suction hole group is connected. The liquid suction device is arranged at a staggered interval between the liquid discharge hole group and the liquid suction hole group, and the drainage tank is used to reduce the volume of the treatment tank, and the circulation of the treatment liquid can be accelerated and the soft substrate can be prevented from contacting the flow guide.

Description

Flexible substrate processing equipment

A soft substrate processing device, in particular, uses a drain to make a flexible substrate in a process such as etching and electroplating, which greatly reduces the volume of processing equipment such as etching and plating, and can accelerate the circulation speed of the processing liquid in the processing device.

According to the method, the flexible circuit board is repeatedly subjected to electrolytic plating and etching on the flexible substrate, and the circuit board is formed on the flexible substrate. The general processing method is to pass the flexible substrate through the processing tank and the processing in the processing tank. Liquid action, but because the soft substrate is not in contact with objects other than the treatment liquid during the process (double panel), the volume of the treatment tank will be quite large to lengthen the time that the flexible substrate passes through the processing equipment to ensure stable process of the flexible substrate. This method will cause the processing equipment to occupy a considerable space and cause waste; in addition, the treatment tank will use an external circulation device to replenish the treatment liquid, which will cause the problem of uneven concentration of the treatment liquid, resulting in a decrease in yield. .

Therefore, how to solve the above-mentioned problems and shortcomings is the subject of research and development that the relevant industry is eager to develop.

The main purpose of the present invention is to use a drainage device disposed in a liquid storage tank by a processing device to allow the flexible substrate to pass through the drainage device after entering the liquid storage tank, thereby reducing the volume of the treatment tank and setting on the drainage device. The liquid collection hole group and the liquid discharge hole group are arranged in a staggered arrangement of the multiple arrays to accelerate the circulation of the treatment liquid and prevent the flexible substrate from contacting the flow guide.

In order to achieve the above object, the flexible substrate processing apparatus of the present invention comprises a liquid storage tank and a plurality of drainage devices, the drainage device is disposed in the liquid storage tank, and the liquid inlet device and the liquid suction device are connected to the drainage device, and the soft substrate is inserted. After the liquid storage tank, the drainage device is sequentially wound, and the drainage device is provided with a plurality of liquid discharge hole groups and a plurality of liquid absorption hole groups on the surface close to the flexible substrate, and the liquid discharge hole group is connected to the liquid supply device. The liquid suction hole group is connected to the liquid suction device, and the liquid discharge hole group and the liquid suction hole group are arranged at a staggered interval.

In the above soft substrate processing apparatus, the drainer has a drainage tube, a liquid inlet tube, a lower cover and an upper cover, and the drainage tube has an accommodation space therein, and the drainage tube is provided with a plurality of liquid absorption slots on the side wall of the accommodation space. The liquid drain hole group is connected to the accommodating space, and the liquid suction hole group is connected to the liquid absorbing groove; the liquid inlet pipe has a body and a positioning portion disposed on both sides of the body, and the body has a liquid inlet space connecting the positioning portion And the surface of the body is provided with a plurality of liquid outlets connected to the liquid inlet space, and the system is accommodated in the receiving space of the drainage tube, and the liquid discharging tank is connected to the liquid discharging hole group; the lower cover and the upper cover are respectively covered The two sides of the drainage tube are combined, and the lower cover is provided with a liquid suction port, and the liquid suction port is connected to the liquid suction groove of the drainage tube.

In the above soft substrate processing apparatus, the surface of the drainage tube is provided with a plurality of liquid collection tanks, and the liquid suction hole group is disposed in the liquid collection tank.

In the above soft substrate processing apparatus, the surface of the liquid inlet tube is convexly provided with a plurality of positioning ribs, and the end of the positioning rib is positioned in the liquid suction groove of the drainage tube.

Referring to the eighth to tenth drawings, it can be clearly seen from the figure that the present invention comprises a liquid storage tank 1 and a plurality of drainage devices 2, and the drainage device 2 is disposed in the liquid storage tank 1, and the drainage device 2 The liquid supply device 3 and the liquid suction device 4 are connected, and after entering the liquid storage tank 1, the flexible substrate 5 is sequentially passed through the flow guide 2.

Referring to the first to seventh figures, it can be clearly seen from the figure that the flow guide 2 of the present invention has a drainage tube 21, a liquid inlet tube 22, a lower cover 23 and an upper cover 24, wherein:

The drainage tube 21 is provided with a plurality of drainage holes 213 and a plurality of liquid suction holes 215, a plurality of liquid discharge holes 213 and a plurality of liquid suction holes 215 are arranged at staggered intervals, and the drainage tube 21 has The accommodating space 211, the drainage tube 21 is disposed on the side wall of the accommodating space 211 with a plurality of liquid absorbing grooves 212. The liquid discharging hole group 213 is connected to the accommodating space 211, and the liquid collecting hole group 215 is connected to the suction space. The liquid tank 212 is further provided with a plurality of liquid collecting tanks 214 on the surface of the drafting tube 21, and each of the liquid collecting hole groups 215 is disposed in the liquid collecting tank 214.

The liquid inlet tube 22 has a body 221 and a positioning portion 222 disposed on both sides of the body 221. The body 221 has a liquid inlet space 225 communicating with the positioning portion 222, and the surface of the body 221 is provided with a plurality of outlets communicating with the liquid inlet space 225. The liquid groove 223 and the surface of the body 221 are provided with positioning ribs 224 between the two adjacent liquid discharge grooves 223, and the body 221 is received in the accommodating space 211 of the drainage tube 21, and the end of the positioning rib 224 is positioned at the drainage. The liquid suction tank 212 of the tube 21 is connected to the liquid discharge hole group 213.

The lower cover 23 and the upper cover 24 respectively cover the two sides of the drainage tube 21, and the lower cover 23 and the upper cover 24 are respectively provided with a lower through hole 231 and an upper through hole 241, so that the positioning portions 222 at both ends of the liquid inlet tube 22 are respectively The through hole 231 and the upper through hole 241 are exposed, and the liquid collecting space 232 is disposed in the lower cover 23, the liquid collecting space 232 is connected to the liquid suction groove 212 of the drainage pipe 21, and the lower cover 23 is provided with the liquid suction port 233, and The liquid suction port 233 is communicated with the liquid suction tank 212 of the draft tube 21 through the liquid collection space 232.

Referring to the first to tenth drawings, it can be clearly seen from the figure that when the present invention is used, the liquid discharge hole group 213 and the liquid suction hole group 215 of the flow guide 2 are brought close to the surface of the flexible substrate 5. And the liquid supply device 3 and the liquid suction device 4 are simultaneously actuated. At this time, the treatment liquid supplied from the liquid supply device 3 enters the liquid inlet space 225 from the positioning portion 222 at both ends of the liquid inlet tube 22, and then the liquid is discharged. The tank 223 and the liquid discharge hole group 213 of the draft tube 21 are discharged, and the liquid suction device 4 sucks the treatment liquid in the liquid collection space 232 through the liquid suction port 233 of the lower cover 23, so that the treatment liquid is sucked by the drainage tube 21. After the liquid hole group 215 enters the liquid suction tank 212, it flows into the liquid collection space 232 for suction by the liquid suction device 4.

In addition, the present invention can solve the deficiencies and defects of the prior art, and can improve the efficiency. The key technologies are:

(1) The present invention utilizes the flow finder 2 to bypass the flexible substrate 5, thereby increasing the residence time of the flexible substrate 5 in the liquid storage tank 1, greatly reducing the volume of the liquid storage tank 1, and discharging it by the liquid discharge hole group 213. The liquid pushes the flexible substrate 5 to form a space between the flexible substrate 5 and the flow finder 2, so that the flexible substrate 5 for both sides can be produced.

(2) In the present invention, the liquid discharge hole group 213 and the liquid suction hole group 215 which are arranged at intervals in the draining device 2 are used, and the treatment liquid discharged from the liquid discharge hole group 213 is pushed by the liquid substrate 5, and then sucked and collected by the liquid suction hole group 215. Therefore, a plurality of processing liquids are formed between the flow guide 2 and the flexible substrate 5, so that the processing liquid supplied from the liquid supply device 3 can be directly reacted to the flexible substrate 5, and then recovered by the liquid suction device 4. And to supplement, but to improve process yield.

1‧‧‧ reservoir

2‧‧‧Drainer

21‧‧‧Drainage tube

211‧‧‧ accommodating space

212‧‧‧Aqueous tank

213‧‧‧Draining hole group

214‧‧ ‧ sump

215‧‧ ‧ aspirating hole group

22‧‧‧Inlet pipe

221‧‧‧ Ontology

222‧‧‧ Positioning Department

223‧‧‧drain tank

224‧‧‧ positioning ribs

225‧‧‧Into the liquid space

23‧‧‧Under the cover

231‧‧‧Under hole

232‧‧ ‧ liquid collection space

233‧‧ ‧ suction port

24‧‧‧Upper cover

241‧‧‧Upper through hole

3‧‧‧Supply dispenser

4‧‧ ‧ aspirator

5‧‧‧Soft substrate

The first figure is a perspective view of the drain of the present invention. The second figure is an exploded perspective view of the flow guide of the present invention. The third figure is a front view of the flow guide of the present invention. The fourth figure is a cross-sectional view taken along the line A-A of the third figure. The fifth figure is a cross-sectional view taken along line B_B of the third figure. The sixth drawing is a side view of the flow guide of the present invention. The seventh figure is a cross-sectional view taken along line C_C of the sixth figure. The eighth figure is a schematic view showing the state of use of the present invention. The ninth diagram is a schematic view showing the state of use of the flow director of the present invention. The tenth figure is a block diagram of the present invention.

Claims (3)

A soft substrate processing device comprises a liquid storage tank and a plurality of drainage devices, the drainage device is arranged in the liquid storage tank, and the liquid inlet device and the liquid suction device are connected to the drainage device, and the soft substrate is inserted into the liquid storage tank. The drainer is sequentially wound, and the drainer is provided with a plurality of liquid discharge hole groups and a plurality of liquid suction hole groups on the surface close to the flexible substrate, and the liquid discharge hole group is connected to the liquid supply device, and the liquid absorption hole The group is connected to the liquid suction device, and the drainage hole group and the liquid suction hole group are arranged at a staggered interval. Further, the drainage device has a drainage tube, a liquid inlet tube, a lower cover and an upper cover, and the drainage tube has an accommodation space therein. The drainage tube is disposed on the side wall of the accommodating space with a plurality of liquid absorbing grooves, wherein the liquid discharging hole group is connected to the accommodating space, and the liquid absorbing hole group is connected to the liquid absorbing groove; the liquid inlet tube has a body and a body The positioning portion disposed on both sides has a liquid inlet space connecting the positioning portion, and the body surface is provided with a plurality of liquid outlets connected to the liquid inlet space, and the system is accommodated in the receiving space of the drainage tube, and Connecting the liquid outlet tank to the drain hole group; And the upper cover are covered on both sides of the drainage tube, and the lower cover is provided with a liquid suction port, and the liquid suction port communicating with the suction pipe of the drainage tank. The flexible substrate processing apparatus of claim 1, wherein the drainage tube surface is provided with a plurality of liquid collection grooves, and the liquid absorption hole group is disposed in the liquid collection tank. The flexible substrate processing apparatus of claim 1, wherein the surface of the inlet tube is convexly provided with a plurality of positioning ribs, and the end of the positioning rib is positioned in the liquid absorption groove of the drainage tube.