TWI695175B - Wafer detection pushing device - Google Patents

Abstract

A wafer detection jacking device is mounted on a detection platform, and includes a cylinder seat with a cylinder hole, connected with a forward air pressure source and a backward air pressure source; a pneumatic rod has a piston part which receives the forward air pressure source and retreats The air pressure source moves in the cylinder hole of the cylinder seat, a shaft is connected to the piston part; a front seat group is connected to the front end of the shaft of the air pressure rod; a left and right shifting seat can be installed on the front seat group to adjust left and right; A positioning rod set is installed on the left and right moving seats, and is used for abutting and positioning the wafer.

Description

Wafer detection pushing device

The invention relates to wafer inspection, in particular to a wafer inspection pushing device.

Known wafer detection abutment devices are designed for wafers with a predetermined size range. Therefore, when abutment positioning a wafer of a different size, the position of the abutment positioning is not all in the middle position, so it is easy to cause the wafer to move Position or damage due to force; therefore, the lack of conventional wafer detection abutment devices still needs to be improved.

In view of the above-mentioned shortcomings of the prior art, the main object of the present invention is to provide a wafer inspection abutment device, which can conveniently adjust the positions in multiple directions so as to achieve more proper positioning of the abutment wafer.

In order to achieve the above object, the present invention provides a wafer inspection abutment device, which is mounted on an inspection table and includes a cylinder block with a cylinder bore, which is connected to a forward air pressure source and a backward air pressure source; The piston part is moved by the forward air pressure source and the backward air pressure source in the cylinder hole of the cylinder seat, a shaft is connected to the piston part; a front seat group is connected to the front end of the shaft of the air pressure rod; It is adjusted and installed on the front seat group; a positioning rod group is installed on the left and right shifting seats, and is used for abutting and positioning the wafer.

The displacement can be adjusted by the cylinder seat forward and backward, and the displacement can be adjusted left and right by the left and right displacement seats, so that the positioning rod group can achieve a more appropriate positioning against the wafer, thus achieving the purpose of the invention.

Preferably, the front seat group has a first seat and a second seat, and the left-right shift seat is fixed on the second seat.

Preferably, the front end of the pneumatic rod has a threaded portion, the second seat is provided with a through hole for the pneumatic rod to penetrate, and a threaded portion of the pneumatic rod is screwed with a nut, so that the first seat and the The two seats are fixed, and the second seat adjusts the relative height with the first seat through its through hole.

Preferably, the front seat group has a screw hole, and the left and right shift seats have an elongated hole for a bolt to pass through and be locked in the screw hole.

Preferably, it further includes an auxiliary balance bar connected to the front seat group and slidingly arranged in a guide hole of the cylinder seat.

Preferably, the front seat group has a rod hole for inserting the pneumatic rod, a slot is opened to the rod hole, and the pneumatic rod is clamped by the front seat group with a clamping bolt.

The present invention will be further described below with reference to the drawings and embodiments:

As shown in FIG. 1 to FIG. 5, a wafer inspection abutment device provided in a preferred embodiment of the present invention is mounted on an inspection table (1) and includes:

A cylinder block (10) has a cylinder bore (11) connected to a forward air pressure source (13) and a backward air pressure source (14), and a guide hole (17) is arranged parallel to the cylinder bore (11).

Wherein, the cylinder block (10) is fixedly fixed to the detection platform (1) by a fixing unit (19).

A pneumatic rod (20) has a piston part (21) which is moved by the forward air pressure source (13) and the backward air pressure source (14) in the cylinder bore (11) of the cylinder block (10), and a shaft (22) Connected to the piston part (21), and a threaded part (23) is located at the front end of the shaft (22).

A front seat group (3) connected to the front end of the shaft (22) of the pneumatic rod (20); wherein the front seat group (3) has a first seat (30) and a second seat (40), the left and right The shift seat (50) is fixed on the second seat (40).

The first seat (30) of the front seat group (3) has a rod hole (31) for inserting the pneumatic rod (20), a slot (32) opens into the rod hole (31), and a countersunk hole ( 33) and a screw hole (34) and respectively located on both sides of the slot (32), and a countersunk head hole (33) is screwed into the screw hole (34) with a clamping bolt (39) so that The front seat group (3) clamps the pneumatic rod (20).

The second seat (40) of the front seat group (3) is provided with a through hole (41) for the pneumatic rod (20) to pass through, and a screw hole (42) is formed from top to bottom; wherein, the first seat (30) ) And the second seat (40), a threaded portion (23) of the pneumatic rod (20) is screwed with a nut (49) to force it. In this example, the through hole (41) is an open slot.

A left and right shifting seat (50) can be installed in the front seat group (3) to adjust left and right; that is, the left and right shifting seat (50) has an elongated hole (51) locked to the first seat with a bolt (59) Screw holes (42) for two seats (40).

In a preferred embodiment of the present invention, the left-right shifting seat (50) simultaneously spans the first seat (30) and the second seat (40).

A positioning rod set (60) is installed on the left and right moving seat (50) for abutting and positioning the wafer.

An auxiliary balance bar (70) is connected to the front seat group (3) and slidably arranged in the guide hole (17) of the cylinder seat (10). In this example, the auxiliary balance bar (70) is connected to the first seat (30).

With the above-mentioned implementation structure, the cylinder block (10) can be adjusted forward and backward for displacement and fixed, and the left and right shift seat (50) can be adjusted for left and right displacement and fixed, so that the positioning rod group (60) can be positioned more properly against the chip, thus achieving The purpose of the invention.

As shown in FIG. 7, by loosening the nut (49) and the second seat (40), the through hole (41) can be used to adjust the displacement to the shaft (22) of the pneumatic rod (20), Adjust the second seat (40) to the rising state, and then lock the nut (49) to fix it at another height, that is, the second seat (40) is adjusted to the first through its through hole (41) The relative height of the seat (30) enables the positioning rod group (60) to achieve more proper positioning against the wafer, thus achieving the purpose of the invention.

In addition, the auxiliary balance bar (70) can make the first seat (30) more balanced when displaced, and finally makes the positioning rod group (60) more stable in positioning.

In addition to the above implementations, the present invention can also be implemented as follows:

For example, the first seat (30) and the second seat (40) are not limited to be divided into two as described above, and the two may also be integrated.

Alternatively, the through hole (41) of the second seat (40) is not limited to be an open slot as described above, but it may also be a round hole that does not open to the bottom or side to provide another type of use requirement.

In summary, the wafer testing and abutment device of the present invention is indeed convenient for adjusting the positions in multiple directions to achieve more proper positioning and abutment on the wafer, thus achieving the object of the invention.

(1): Testing platform

(10): Cylinder block

(11): Cylinder hole

(13): Forward air pressure source

(14): Back pressure source

(17): Guide hole

(19): fixed unit

(20): Air pressure rod

(21): Piston part

(22): shaft

(23): Threaded part

(3): Front seat group

(30): The first

(31): Rod hole

(32): Slotted

(33): countersunk head hole

(34): screw hole

(39): Clamping bolt

(40): Block 2

(42): screw hole

(50): Move left and right

(51): Long hole

(59): Bolt

(60): Positioning rod set

(70): auxiliary balance bar

Figure 1 is a three-dimensional assembled view of a preferred embodiment of the present invention. Figure 2 is a combined top view of a preferred embodiment of the present invention. Figure 3 is a partial cross-sectional view of a preferred embodiment of the present invention. Figure 4 is a combined top view of a preferred embodiment of the present invention, showing an actuated state. Figure 5 is a side view of Figure 4 combined. FIG. 6 is an adjustment state diagram of the left and right moving seats according to a preferred embodiment of the present invention. Figure 7 is the same as Figure 4 and shows the adjusted rise of the second seat.

(1): Testing platform

(10): Cylinder block

(13): Forward air pressure source

(14): Back pressure source

(19): fixed unit

(20): Air pressure rod

(23): Threaded part

(3): Front seat group

(30): The first

(40): Block 2

(41): Through hole

(49): Nut

(50): Move left and right

(60): Positioning rod set

Claims (9)

A wafer testing and abutting device is mounted on a testing platform (1), including: a cylinder block (10), having a cylinder hole (11), connected to a forward air pressure source (13) and a backward air pressure source (14) ); a pneumatic rod (20) with a piston part (21) moved by the forward air pressure source (13) and the backward air pressure source (14) in the cylinder bore (11) of the cylinder block (10), a shaft ( 22) It is connected to the piston part (21); a front seat group (3) is connected to the front end of the shaft (22) of the pneumatic rod (20); a left and right moving seat (50) can be installed on the left and right adjustment Front seat group (3); a positioning rod group (60), installed on the left and right shift seat (50), for positioning against the wafer; wherein the front seat group (3) has a screw hole (42), the left and right shift The seat (50) has an elongated hole (51) for a bolt (59) to pass through and be locked in the screw hole (42). A wafer testing and abutting device is mounted on a testing platform (1), including: a cylinder block (10), having a cylinder hole (11), connected to a forward air pressure source (13) and a backward air pressure source (14) ); a pneumatic rod (20) with a piston part (21) moved by the forward air pressure source (13) and the backward air pressure source (14) in the cylinder bore (11) of the cylinder block (10), a shaft ( 22) It is connected to the piston part (21); a front seat group (3) is connected to the front end of the shaft (22) of the pneumatic rod (20); a left and right moving seat (50) can be installed on the left and right adjustment Front seat group (3); a positioning rod group (60), which is installed on the left and right shift seat (50) for abutting and positioning the wafer; wherein the front seat group (3) has a first seat (30) and a first Two seats (40), the left and right shift seats (50) are fixed on the second seat (40); wherein the front end of the pneumatic rod (20) has a threaded portion (23), the second seat (40) is provided with a passage The hole (41) is used for piercing the pneumatic rod (20), and the screw part (23) of the pneumatic rod (20) is screwed with a nut (49) to make the first seat (30) is fixed between the second seat (40), and the second seat (40) adjusts the relative height with the first seat (30) through the through hole (41). The wafer detection abutment device according to claim 2, wherein the front seat group (3) has a screw hole (42), and the left and right shift seat (50) has an elongated hole (51) for a bolt (59) to pass through The screw hole (42) is locked. The wafer detection abutment device according to claim 2 or 3, further comprising an auxiliary balance bar (70) connected to the front seat group (3) and slidingly arranged in a guide hole (17) of the cylinder seat (10) ). The wafer inspection abutment device according to claim 1, further comprising an auxiliary balance bar (70) connected to the front seat group (3) and slidably arranged in a guide hole (17) of the cylinder seat (10). The wafer inspection abutment device according to claim 1 or 5, wherein the front seat group (3) has a rod hole (31) for inserting the pneumatic rod (20), and a slot (32) is opened to the rod hole (31), and clamp the slot (32) with a clamping bolt (39) to fix the front seat group (3) and the pneumatic rod (20). The wafer detection abutment device according to claim 4, wherein the front seat group (3) has a rod hole (31) for inserting the pneumatic rod (20), and a slot (32) is opened to the rod hole (31) ), and clamp the slot (32) with a clamping bolt (39) to fix the front seat group (3) and the pneumatic rod (20). The wafer detection abutment device according to claim 2 or 3, wherein the front seat group (3) has a rod hole (31) for inserting the pneumatic rod (20), and a slot (32) is opened to the rod hole (31), and clamp the slot (32) with a clamping bolt (39) to fix the front seat group (3) and the pneumatic rod (20). A wafer testing and abutting device is mounted on a testing platform (1), including: a cylinder block (10), having a cylinder hole (11), connected to a forward air pressure source (13) and a backward air pressure source (14) ); a pneumatic rod (20) with a piston part (21) moved by the forward air pressure source (13) and the backward air pressure source (14) in the cylinder bore (11) of the cylinder block (10), a shaft ( 22) It is connected to the piston part (21); a front seat group (3) is connected to the front end of the shaft (22) of the pneumatic rod (20); a left and right moving seat (50) can be installed on the left and right adjustment Front seat group (3); A positioning rod group (60) is installed on the left and right shifting seat (50) for abutting and positioning the wafer; wherein the front seat group (3) has a rod hole (31) for inserting the pneumatic rod (20), A slot (32) is opened to the rod hole (31), and the slot (32) is clamped by a clamping bolt (39) to fix the front seat group (3) and the pneumatic rod (20).

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