[go: up one dir, main page]

TWI692113B - Solar battery unit and solar battery module - Google Patents

Solar battery unit and solar battery module Download PDF

Info

Publication number
TWI692113B
TWI692113B TW107112729A TW107112729A TWI692113B TW I692113 B TWI692113 B TW I692113B TW 107112729 A TW107112729 A TW 107112729A TW 107112729 A TW107112729 A TW 107112729A TW I692113 B TWI692113 B TW I692113B
Authority
TW
Taiwan
Prior art keywords
electrode
light
solar battery
receiving surface
battery cell
Prior art date
Application number
TW107112729A
Other languages
Chinese (zh)
Other versions
TW201906186A (en
Inventor
濱篤郎
筈見公一
Original Assignee
日商三菱電機股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商三菱電機股份有限公司 filed Critical 日商三菱電機股份有限公司
Publication of TW201906186A publication Critical patent/TW201906186A/en
Application granted granted Critical
Publication of TWI692113B publication Critical patent/TWI692113B/en

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/90Structures for connecting between photovoltaic cells, e.g. interconnections or insulating spacers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells

Landscapes

  • Photovoltaic Devices (AREA)

Abstract

包括半導體基板,具有pn接合;受光面匯流排電極(12B),在半導體基板中的受光面側往第1方向延伸設置;以及複數的背面連接電極,在面向半導體基板中的受光面的相反側的背面側,沿著第1方向分散配置設置。受光面匯流排電極(12B),沿著第1方向設置往受光面匯流排電極的厚度方向貫通的複數的貫通孔(60),背面連接電極,配置在半導體基板的厚度方向中相對受光面匯流排電極(12B)中除了複數的貫通孔(60)之外的區域的位置上。 Including a semiconductor substrate, having a pn junction; a light-receiving surface bus electrode (12B) extending in the first direction on the light-receiving surface side of the semiconductor substrate; and a plurality of back-side connection electrodes facing the opposite side of the light-receiving surface in the semiconductor substrate On the back side of the device along the first direction. The light-receiving surface busbar electrode (12B) is provided with a plurality of through holes (60) penetrating in the thickness direction of the light-receiving surface busbar electrode along the first direction, and the back surface is connected to the electrode, and is arranged in the thickness direction of the semiconductor substrate with respect to the light-receiving surface bus The position of the row electrode (12B) except for the plurality of through holes (60).

Description

太陽電池單元以及太陽電池模組 Solar battery unit and solar battery module

本發明係關於以引線連接構成太陽電池模組的太陽電池單元以及使用此太陽電池單元的太陽電池模組。 The invention relates to a solar cell unit forming a solar cell module by a lead wire and a solar cell module using the solar cell unit.

模組化太陽電池單元之際,電氣串聯連接複數的太陽電池單元,在取出電輸出的目標下,平角銅線構成的引線以焊接接合至各太陽電池單元。引線,通常直接在焊接之後從高溫狀態冷卻至常溫之際收縮。於是,引線在焊接之後的太陽電池單元中,由於引線的收縮產生彎曲。此太陽電池單元的彎曲,成為太陽電池單元的破損原因。 When modularizing solar cells, a plurality of solar cells are electrically connected in series, and under the target of taking out the electrical output, a lead wire composed of a rectangular copper wire is welded to each solar cell. The lead usually shrinks when it cools from a high temperature state to normal temperature directly after welding. Therefore, the lead wire is bent in the solar cell unit after welding due to the shrinkage of the lead wire. This bending of the solar battery cell is a cause of damage to the solar battery cell.

在太陽電池單元的受光面與背面,配置用以取出太陽電池單元中發生的電的柵電極以及從全部的柵電極收集電的匯流排電極。柵電極,為了使太陽電池單元的發電面積提高,增進細線化與多數量化。另一方面,匯流排電極,因為太陽電池單元與引線的接合強度的確保以及配置精度的關係,細線化有困難。又,因為柵電極與匯流排電極形成時的熱處理使發電層產生損壞,使太陽電池單元的發電效率下降,電極材料中必須使用高價銀再加上盡量降低其面積。 On the light-receiving surface and the back surface of the solar battery cell, a grid electrode for extracting electricity generated in the solar battery cell and a bus bar electrode for collecting electricity from all the grid electrodes are arranged. In order to improve the power generation area of the solar battery cell, the grid electrode is improved in thinning and mass quantization. On the other hand, because of the relationship between the securing of the bonding strength between the solar cell and the lead and the placement accuracy, it is difficult for the bus bar electrode to be thinned. In addition, because the heat treatment during the formation of the gate electrode and the bus bar electrode damages the power generation layer and lowers the power generation efficiency of the solar battery cell, high-priced silver must be used as the electrode material and the area should be reduced as much as possible.

專利文件1中揭示,半導體基板的主面上形成的匯流排(bus bar)部,沿著上述匯流排部的長邊方向部分具有配 置複數細縫的細縫部,以網版印刷法印刷電極膏。根據專利文件1的技術,維持匯流排電極與引線的良好接合強度的同時,可以使匯流排電極的面積降低,但不能解決關於引線接合後產生的太陽電池單元的彎曲。 Patent Document 1 discloses that a bus bar portion formed on a main surface of a semiconductor substrate has a slit portion in which a plurality of slits are arranged along a longitudinal direction of the bus bar portion, and an electrode paste is printed by a screen printing method . According to the technique of Patent Document 1, while maintaining good bonding strength between the bus bar electrode and the lead, the area of the bus bar electrode can be reduced, but it cannot solve the bending of the solar cell unit after wire bonding.

另一方面,關於太陽電池單元的背面,為了與受光面同樣與背面引線接合,需要匯流排電極,但因為直線狀配置的匯流排電極中需要大量電極材料,故研討配置不是直線狀的形狀而是島狀的接合電極。 On the other hand, on the back surface of the solar cell, a bus bar electrode is required for wire bonding to the back surface in the same way as the light-receiving surface. However, since a large number of electrode materials are required for the linear bus bar electrode, it is considered that the layout is not a linear shape. It is an island-shaped junction electrode.

[先行技術文件] [Advanced technical documents] [專利文件] [Patent Document]

[專利文件1]專利第4284368號公報 [Patent Document 1] Patent No. 4284368

但是,近年來,太陽電池單元中使用的矽基板厚度逐年減少,可想得到今後也會繼續減少。因為太陽電池模組製造步驟中會產生起因於引線與太陽電池單元的熱膨脹係數的差而導致的彎曲,故必須降低模組製造步驟中的彎曲。於是,此彎曲的發生,矽基板的厚度越薄越顯著。 However, in recent years, the thickness of silicon substrates used in solar cells has decreased year by year, and it is expected that they will continue to decrease in the future. Since the solar cell module manufacturing step may cause bending due to the difference between the thermal expansion coefficients of the lead and the solar cell unit, it is necessary to reduce the bending in the module manufacturing step. Therefore, as this bending occurs, the thinner the thickness of the silicon substrate is, the more remarkable it is.

本發明,有鑑於上述而形成,目的在於得到可抑制起因於對太陽電池單元的引線接合的太陽電池單元彎曲的太陽電池單元。 The present invention was made in view of the above, and an object thereof is to obtain a solar battery cell that can suppress bending of the solar battery cell caused by wire bonding to the solar battery cell.

為了解決上述的課題,達到目的,本發明包括半導體基板,具有pn接合;受光面匯流排電極,在半導體基板 中的受光面側往第1方向延伸設置;以及複數的背面連接電極,在面向半導體基板中的受光面的相反側的背面側,沿著第1方向分散配置設置。受光面匯流排電極,沿著第1方向設置往受光面匯流排電極的厚度方向貫通的複數的貫通孔,背面連接電極,配置在半導體基板的厚度方向中相對受光面匯流排電極中除了複數的貫通孔之外的區域的位置上。 In order to solve the above-mentioned problems and achieve the object, the present invention includes a semiconductor substrate having a pn junction; a light-receiving surface bus electrode extending in the first direction on the light-receiving surface side of the semiconductor substrate; and a plurality of back connection electrodes facing the semiconductor The back side of the substrate opposite to the light-receiving surface is dispersedly arranged along the first direction. The light-receiving surface bus electrode is provided with a plurality of through holes penetrating in the thickness direction of the light-receiving surface bus electrode along the first direction, and the back surface is connected to the electrode and is arranged in the thickness direction of the semiconductor substrate relative to the light-receiving surface bus electrode except for a plurality of The location outside the through hole.

根據本發明的太陽電池單元,達到可抑制起因於對太陽電池單元的引線接合的太陽電池單元彎曲之效果。 According to the solar battery cell of the present invention, it is possible to suppress the bending of the solar battery cell caused by wire bonding to the solar battery cell.

1、11‧‧‧半導體基板 1.11‧‧‧Semiconductor substrate

2‧‧‧n型不純物擴散層 2‧‧‧n-type impurity diffusion layer

3‧‧‧反射防止膜 3‧‧‧Anti-reflection film

4‧‧‧BSF層(背面電場層) 4‧‧‧ BSF layer (back electric field layer)

10、110、210‧‧‧太陽電池單元 10, 110, 210 ‧‧‧ solar battery unit

11A‧‧‧受光面 11A‧‧‧Receiving surface

11B‧‧‧背面 11B‧‧‧Back

12、112、212‧‧‧受光面電極 12, 112, 212‧‧‧ Receiver electrode

12a‧‧‧銀電極膏 12a‧‧‧Silver electrode paste

12B、112B、212B‧‧‧受光面匯流排電極 12B, 112B, 212B

12Ba‧‧‧受光面匯流排電極的側面 12Ba‧‧‧The side of the light receiving surface bus electrode

12G‧‧‧受光面柵電極 12G‧‧‧Receiving grid electrode

13、113、213‧‧‧背面電極 13, 113, 213‧‧‧ Back electrode

13A‧‧‧背面集電電極 13A‧‧‧Back collector electrode

13B、113B、213B‧‧‧背面連接電極 13B, 113B, 213B

1131~1138‧‧‧背面連接電極 1131~1138‧‧‧ Connect electrode on the back

13a‧‧‧鋁電極膏 13a‧‧‧Aluminum electrode paste

13b‧‧‧銀電極膏 13b‧‧‧Silver electrode paste

20‧‧‧引線 20‧‧‧Lead

20a‧‧‧彎曲部 20a‧‧‧Bend

20b‧‧‧引線在橫向方向的側面 20b‧‧‧Lead in lateral direction

25‧‧‧橫引線 25‧‧‧Horizontal

26‧‧‧輸出引線 26‧‧‧Output lead

31‧‧‧受光面保護部 31‧‧‧Receiving Department

32‧‧‧背面保護部 32‧‧‧Back Protection

33‧‧‧受光面側密封材 33‧‧‧Light-receiving side sealing material

34‧‧‧背面側密封材 34‧‧‧Back side sealing material

40‧‧‧框架 40‧‧‧Frame

50‧‧‧太陽電池串 50‧‧‧Solar battery string

60‧‧‧貫通孔 60‧‧‧Through hole

61、611~618‧‧‧第1區域 61, 611~618‧‧‧ Region 1

62‧‧‧第2區域 62‧‧‧ Region 2

63‧‧‧連接部 63‧‧‧Connect

63a‧‧‧連接部的外側的側面 63a‧‧‧The outer side of the connecting part

70‧‧‧太陽電池陣列 70‧‧‧Solar battery array

100‧‧‧太陽電池模組 100‧‧‧solar battery module

101‧‧‧一端 101‧‧‧ one end

102‧‧‧另一端 102‧‧‧The other end

A1~A8‧‧‧第1區域長度 A1~A8‧‧‧ Length of the first area

B1~B9‧‧‧距離 B1~B9‧‧‧Distance

C1~C8‧‧‧背面連接電極長度 C1~C8‧‧‧ Length of connecting electrode on the back

D1~D9‧‧‧距離 D1~D9‧‧‧Distance

[第1圖]係從受光面側所見本發明第一實施形態的太陽電池模組之立體圖;[第2圖]係從受光面側所見本發明第一實施形態的太陽電池模組之分解立體圖;[第3圖]係本發明第一實施形態的太陽電池模組之主要部分剖面圖;[第4圖]係從背面側所見本發明第一實施形態的太陽電池陣列之立體圖;[第5圖]係從受光面側所見本發明第一實施形態的太陽電池串之立體圖;[第6圖]係從背面側所見本發明第一實施形態的太陽電池串之立體圖;[第7圖]係從受光面側所見本發明第一實施形態的太陽電 池單元之平面圖;[第8圖]係從面向受光面側的相反側的背面側所見本發明第一實施形態的太陽電池單元之平面圖;[第9圖]係顯示本發明第一實施形態的太陽電池單元的構成之剖面圖,係第7圖中的IX-IX線中的主要部分剖面圖;[第10圖]係顯示本發明第一實施形態的太陽電池單元的構成之剖面圖,係第7圖中的X-X線中的主要部分剖面圖;[第11圖]係顯示本發明第一實施形態的太陽電池單元的受光面匯流排電極形狀之平面圖;[第12圖]係顯示本發明第一實施形態的太陽電池單元的受光面匯流排電極上焊接引線的狀態之平面圖;[第13圖]係顯示本發明第一實施形態的太陽電池單元的構成之剖面圖,係第12圖中的XIII-XIII線中的主要部分剖面圖;[第14圖]係顯示本發明第一實施形態的太陽電池單元的構成之剖面圖,係第12圖中的XIV-XIV線中的主要部分剖面圖;[第15圖]係說明本發明第一實施形態的太陽電池單元的製造步驟的程序;[第16圖]係顯示本發明第一實施形態的太陽電池單元的製造步驟的主要部分剖面圖;[第17圖]係顯示本發明第一實施形態的太陽電池單元的製造步驟的主要部分剖面圖;[第18圖]係顯示本發明第一實施形態的太陽電池單元的製造步驟的主要部分剖面圖;[第19圖]係顯示本發明第一實施形態的太陽電池單元的 製造步驟的主要部分剖面圖;[第20圖]係顯示本發明第一實施形態的太陽電池單元的製造步驟的主要部分剖面圖;[第21圖]係顯示本發明第一實施形態的太陽電池單元的製造步驟的主要部分剖面圖;[第22圖]係顯示本發明第一實施形態的太陽電池單元的製造步驟的主要部分剖面圖;[第23圖]係說明本發明第一實施形態的太陽電池模組的製造方法的程序;[第24圖]係從受光面側所見本發明第二實施形態的太陽電池單元之平面圖;[第25圖]係從面向受光面側的相反側的背面側所見本發明第二實施形態的太陽電池單元之平面圖;[第26圖]係顯示本發明第二實施形態的太陽電池模組的構成之主要部分剖面圖;[第27圖]係顯示本發明第二實施形態的太陽電池單元的受光面電極的構成條件圖;[第28圖]係顯示本發明第二實施形態的太陽電池單元的背面連接電極的構成條件圖;[第29圖]係本發明第三實施形態的太陽電池單元構成的剖面圖;[第30圖]係顯示本發明第三實施形態的太陽電池單元的受光面電極的構成條件圖;以及[第31圖]係顯示本發明第三實施形態的太陽電池單元的 背面連接電極的構成條件圖。 [Figure 1] is a perspective view of the solar cell module of the first embodiment of the present invention seen from the light receiving surface side; [Figure 2] is an exploded perspective view of the solar cell module of the first embodiment of the present invention seen from the light receiving surface side [FIG. 3] is a cross-sectional view of the main part of the solar cell module of the first embodiment of the present invention; [FIG. 4] is a perspective view of the solar cell array of the first embodiment of the present invention seen from the back side; [第5 [Figure 6] is a perspective view of the solar cell string of the first embodiment of the present invention seen from the light-receiving surface side; [Figure 6] is a perspective view of the solar cell string of the first embodiment of the present invention seen from the back side; [Figure 7] The plan view of the solar cell unit of the first embodiment of the present invention seen from the light receiving surface side; [Figure 8] is the plan view of the solar cell unit of the first embodiment of the present invention seen from the back side facing the side opposite to the light receiving surface side; [Figure 9] is a cross-sectional view showing the configuration of a solar cell unit according to the first embodiment of the present invention, and is a cross-sectional view of the main part in the line IX-IX in FIG. 7; [FIG. 10] shows the first of the present invention The cross-sectional view of the structure of the solar battery cell of the embodiment is a cross-sectional view of the main part taken along the line XX in FIG. 7; [FIG. 11] is a bus bar electrode showing the light-receiving surface of the solar battery cell of the first embodiment of the present invention [Fig. 12] is a plan view showing the state of welding leads on the light-receiving surface bus electrode of the solar cell unit according to the first embodiment of the present invention; [FIG. 13] is a solar showing the first embodiment of the present invention. The cross-sectional view of the structure of the battery cell is a cross-sectional view of the main part in the line XIII-XIII in FIG. 12; [FIG. 14] is a cross-sectional view showing the structure of the solar battery cell according to the first embodiment of the present invention. 12 is a cross-sectional view of the main part of the XIV-XIV line in FIG. 12; [Figure 15] is a procedure illustrating the manufacturing steps of the solar cell unit of the first embodiment of the present invention; [Figure 16] is a first embodiment of the present invention. [Fig. 17] is a cross-sectional view of the main part of the manufacturing process of the solar cell unit of the first embodiment of the present invention; [Fig. 18] is a cross-sectional view of the main part of the manufacturing process of the solar cell unit of the first embodiment of the present invention; [Fig. 19] is a cross-sectional view of the main part of the manufacturing process of the solar cell unit of the first embodiment of the present invention; [Fig. 20] is a cross-sectional view of the main part of the manufacturing process of the solar cell unit of the first embodiment of the present invention; [Fig. 21] is a cross-sectional view of the main part of the manufacturing process of the solar cell according to the first embodiment of the present invention; [Fig. 21] A cross-sectional view of main parts showing the manufacturing steps of the solar cell unit according to the first embodiment of the present invention; [Figure 23] is a procedure for explaining the manufacturing method of the solar cell module according to the first embodiment of the present invention; [Figure 24] A plan view of a solar cell unit according to a second embodiment of the present invention seen from the light-receiving surface side; [Figure 25] is a second embodiment of the present invention seen from the back side facing the side opposite to the light-receiving surface side [Figure 26] is a cross-sectional view of main parts showing the configuration of a solar cell module according to a second embodiment of the present invention; [Figure 27] is a solar cell showing a second embodiment of the present invention [Figure 28] is a diagram showing the conditions of the connection of the back electrode of the solar cell unit of the second embodiment of the present invention; [Figure 29] is the solar system of the third embodiment of the present invention. [Figure 30] is a diagram showing the configuration conditions of the light-receiving surface electrode of the solar cell unit of the third embodiment of the present invention; and [Figure 31] is a solar cell showing the third embodiment of the present invention. Conditional diagram of the connection of electrodes on the back of the unit.

以下,根據圖面詳細說明本發明的實施形態的太陽電池單元以及太陽電池模組。又,並非以此實施形態限定此發明。 Hereinafter, the solar battery cell and the solar battery module according to the embodiment of the present invention will be described in detail based on the drawings. In addition, this invention is not limited by this embodiment.

[第一實施形態] [First embodiment]

第1圖係從受光面側所見本發明第一實施形態的太陽電池模組100之立體圖。第2圖係從受光面側所見本發明第一實施形態的太陽電池模組100之分解立體圖。第3圖係本發明第一實施形態的太陽電池模組100之主要部分剖面圖。第一實施形態的太陽電池模組100,如第1到3圖所示,太陽電池陣列70中的受光面側以受光面側密封材33以及受光面保護部31覆蓋,面向太陽電池陣列70中的受光面的相反側的背面側以背面側密封材34及背面保護部32覆蓋的同時,外周緣部的周圍以補強用的框架40圍繞。 Fig. 1 is a perspective view of the solar cell module 100 according to the first embodiment of the present invention as viewed from the light-receiving surface side. Fig. 2 is an exploded perspective view of the solar cell module 100 according to the first embodiment of the present invention as seen from the light-receiving surface side. FIG. 3 is a cross-sectional view of a main part of the solar cell module 100 according to the first embodiment of the present invention. In the solar cell module 100 of the first embodiment, as shown in FIGS. 1 to 3, the light-receiving surface side of the solar cell array 70 is covered with the light-receiving surface side sealing material 33 and the light-receiving surface protection portion 31 and faces the solar cell array 70 The back surface side opposite to the light-receiving surface is covered with the back side sealing material 34 and the back surface protection portion 32, and the periphery of the outer peripheral edge portion is surrounded by a frame 40 for reinforcement.

第4圖係從背面側所見本發明第一實施形態的太陽電池陣列70之立體圖。第5圖係從受光面側所見本發明第一實施形態的太陽電池串50之立體圖。第6圖係從背面側所見本發明第一實施形態的太陽電池串50之立體圖。 Fig. 4 is a perspective view of the solar cell array 70 according to the first embodiment of the present invention as seen from the back side. Fig. 5 is a perspective view of the solar cell string 50 of the first embodiment of the present invention seen from the light-receiving surface side. Fig. 6 is a perspective view of the solar cell string 50 according to the first embodiment of the present invention as seen from the back side.

如第4圖所示,太陽電池陣列70,構成為以橫引線25以及輸出引線26電氣及機械串聯或並聯接合複數的太陽電池串50。 As shown in FIG. 4, the solar cell array 70 is configured such that a plurality of solar cell strings 50 are electrically or mechanically connected in series or in parallel with the horizontal lead 25 and the output lead 26.

又,如第3到6圖所示,太陽電池串50,構成為以引線20電氣及機械串聯互相連接相鄰配置呈現四角形狀的複數的太陽電池單元10。複數的太陽電池單元10,如第3到6 圖所示,以引線20,往第1方向的圖中X方向串聯連接。第1方向,係以引線20連接的複數的太陽電池單元10的連結方向。 In addition, as shown in FIGS. 3 to 6, the solar battery string 50 is configured such that a plurality of solar battery cells 10 having a quadrangular shape are arranged adjacent to each other by electrically and mechanically connecting leads 20 in series. As shown in FIGS. 3 to 6, the plural solar battery cells 10 are connected in series by the lead 20 in the X direction of the drawing in the first direction. The first direction is the connection direction of the plural solar battery cells 10 connected by the lead 20.

太陽電池串50中,相鄰的2個太陽電池單元10中一方的太陽電池單元10的第1主面的受光面側形成的電極與相鄰的2個太陽電池單元10中另一方的太陽電池單元10的第2主面的背面側形成的電極,交互以引線20連接。於是,引線20的一端側焊接至後述的太陽電池單元10的背面側形成的背面連接電極13B,另一端側焊接至鄰接的太陽電池單元10的受光面側形成的受光面匯流排電極12B。即,與太陽電池單元10的受光面側形成的受光面匯流排電極12B連接的引線20,由於連接至鄰接的太陽電池單元10的背面側形成的背面連接電極13B,串聯連接複數的太陽電池單元10。 In the solar battery string 50, the electrode formed on the light-receiving surface side of the first main surface of one of the two adjacent solar battery cells 10 and the other of the two adjacent solar battery cells 10 The electrodes formed on the back side of the second main surface of the cell 10 are alternately connected by leads 20. Then, one end of the lead 20 is welded to the back surface connection electrode 13B formed on the back surface side of the solar cell 10 described later, and the other end side is welded to the light receiving surface bus electrode 12B formed on the light receiving surface side of the adjacent solar cell 10. That is, the lead 20 connected to the light-receiving surface bus electrode 12B formed on the light-receiving surface side of the solar battery cell 10 is connected in series to a plurality of solar battery cells by connecting to the back connection electrode 13B formed on the back surface side of the adjacent solar battery cell 10 10.

第7圖係從受光面側所見本發明第一實施形態的太陽電池單元10之平面圖。第8圖係從面向受光面側的相反側的背面側所見本發明第一實施形態的太陽電池單元10之平面圖。第9圖係顯示本發明第一實施形態的太陽電池單元10的構成之剖面圖,係第7圖中的IX-IX線中的主要部分剖面圖。第10圖係顯示本發明第一實施形態的太陽電池單元10的構成之剖面圖,係第7圖中的X-X線中的主要部分剖面圖。又,第9及10圖中,同時顯示連接至太陽電池單元10的引線20。 Fig. 7 is a plan view of the solar battery cell 10 according to the first embodiment of the present invention seen from the light-receiving surface side. Fig. 8 is a plan view of the solar battery cell 10 according to the first embodiment of the present invention as viewed from the back side facing the side opposite to the light receiving surface side. FIG. 9 is a cross-sectional view showing the configuration of the solar battery cell 10 according to the first embodiment of the present invention, and is a cross-sectional view of the main part in the line IX-IX in FIG. 7. FIG. 10 is a cross-sectional view showing the configuration of the solar battery cell 10 according to the first embodiment of the present invention, and is a cross-sectional view of the main part of the X-X line in FIG. 7. In FIGS. 9 and 10, the lead 20 connected to the solar battery cell 10 is also shown.

太陽電池單元10,包括半導體基板11,呈現形成不純物擴散層而構成pn接合的四角形狀。即,太陽電池單元10中,第1導電型的p型矽構成的半導體基板1的表面的受光面側,形成利用磷擴散擴散n型不純物的不純物擴散層之n型 不純物擴散層2。n型不純物擴散層2在半導體基板11的受光面11A側形成。半導體基板11的外形,在半導體基板11的面方向具有正方形狀,即長方形狀。 The solar cell 10, including the semiconductor substrate 11, has a quadrangular shape in which an impurity diffusion layer is formed to constitute a pn junction. That is, in the solar battery cell 10, the n-type impurity diffusion layer 2 of the impurity diffusion layer that diffuses the n-type impurity by phosphorus diffusion is formed on the light-receiving surface side of the surface of the semiconductor substrate 1 made of p-type silicon of the first conductivity type. The n-type impurity diffusion layer 2 is formed on the light receiving surface 11A side of the semiconductor substrate 11. The outer shape of the semiconductor substrate 11 has a square shape, that is, a rectangular shape in the plane direction of the semiconductor substrate 11.

太陽電池單元10,在半導體基板11的第1主面即半導體基板的受光面11A側,為了提高光的集光率,利用紋理浸蝕(texture etching)形成凹凸形狀。即,半導體基板11的表面上,形成微小凹凸作為紋理構造。微小凹凸,增加受光面11A中吸收來自外部的光的面積,抑制受光面11A中的反射率,成為關入光的構造。又,第9及10圖中,方便起見,省略微小凹凸的圖示。又,太陽電池單元10,在半導體基板11的第1主面即半導體基板的受光面11A側,形成以氮矽化膜構成的反射防止膜3。 In the solar battery cell 10, on the light receiving surface 11A side of the semiconductor substrate, which is the first main surface of the semiconductor substrate 11, in order to improve the light collection rate, texture etching is used to form an uneven shape. That is, fine irregularities are formed on the surface of the semiconductor substrate 11 as a texture structure. The minute irregularities increase the area of the light-receiving surface 11A that absorbs light from the outside, suppresses the reflectance of the light-receiving surface 11A, and becomes a structure that turns off light. In Figs. 9 and 10, for the sake of convenience, the illustration of minute irregularities is omitted. In addition, in the solar battery cell 10, an antireflection film 3 made of a silicon nitride film is formed on the first main surface of the semiconductor substrate 11, that is, on the light receiving surface 11A side of the semiconductor substrate.

半導體基板1中,可以使用p型單結晶矽基板或p型多結晶矽基板。又,不限定半導體基板1於此,使用n型單結晶矽基板、n型多結晶矽基板或其它的矽系基板也可以。又,反射防止膜3中,使用氮氧化膜也可以。 In the semiconductor substrate 1, a p-type single crystal silicon substrate or a p-type polycrystalline silicon substrate can be used. In addition, the semiconductor substrate 1 is not limited thereto, and an n-type single-crystal silicon substrate, an n-type polycrystalline silicon substrate, or another silicon-based substrate may be used. In addition, the anti-reflection film 3 may use a nitrogen oxide film.

又,太陽電池單元10,在半導體基板的受光面11A側形成受光面電極12,在半導體基板11的第2主面即半導體基板的背面11B側形成背面電極13。 In the solar battery cell 10, the light-receiving surface electrode 12 is formed on the light-receiving surface 11A side of the semiconductor substrate, and the back surface electrode 13 is formed on the second main surface of the semiconductor substrate 11, that is, the back surface 11B side of the semiconductor substrate.

半導體基板1的受光面側,設置上述的受光面電極12穿過反射防止膜3電氣連接至n型不純物擴散層2。作為受光面電極12,在半導體基板11的受光面11A的面內方向排列設置複數長的細長受光面柵電極12G。受光面柵電極12G,係用以從半導體基板11的受光面11A側收集以太陽電池單元10發電的光電流之電極。受光面柵電極12G,在底面部電氣連接 至n型不純物擴散層2。受光面柵電極12G,係在所希望的範圍內塗佈具有金屬粒子的導電性膏材再燒成而形成的膏電極。 On the light-receiving surface side of the semiconductor substrate 1, the above-mentioned light-receiving surface electrode 12 is provided to be electrically connected to the n-type impurity diffusion layer 2 through the anti-reflection film 3. As the light-receiving surface electrode 12, a plurality of elongated light-receiving surface gate electrodes 12G are arranged in line in the in-plane direction of the light-receiving surface 11A of the semiconductor substrate 11. The light-receiving surface grid electrode 12G is an electrode for collecting photocurrent generated by the solar cell 10 from the light-receiving surface 11A side of the semiconductor substrate 11. The light-receiving surface grid electrode 12G is electrically connected to the n-type impurity diffusion layer 2 at the bottom surface portion. The light-receiving surface grid electrode 12G is a paste electrode formed by applying a conductive paste material having metal particles in a desired range and firing it.

又,與受光面柵電極12G導通的受光面匯流排電極12B,設置為在半導體基板11的受光面11A的面內方向與受光面柵電極12G直交。受光面匯流排電極12B,如第7圖所示,沿著太陽電池單元10的連結方向的第1方向,遍及太陽電池單元10的大致全長線狀設置成4列。即,受光面匯流排電極12B的長邊方向,係與上述第1方向相同的方向,並以引線20連接的複數的太陽電池單元10的連結方向。又,受光面匯流排電極12B的排列方向,在半導體基板11的面內形成與第1方向直交的第2方向相同的方向。受光面匯流排電極12B,設置為與全部的受光面柵電極12G連接。受光面匯流排電極12B,在底面部電氣連接n型不純物擴散層2。又,方便起見,第1、2、4及5圖中,顯示設置2列受光面匯流排電極12B的情況。 In addition, the light-receiving surface bus electrode 12B that communicates with the light-receiving surface gate electrode 12G is provided to intersect the light-receiving surface gate electrode 12G in the in-plane direction of the light-receiving surface 11A of the semiconductor substrate 11. As shown in FIG. 7, the light-receiving surface bus bar electrodes 12B are arranged in four rows linearly over the entire length of the solar battery cells 10 along the first direction of the connection direction of the solar battery cells 10. That is, the longitudinal direction of the light-receiving surface bus bar electrode 12B is the connection direction of the plurality of solar battery cells 10 connected by the lead 20 in the same direction as the first direction described above. In addition, the arrangement direction of the light-receiving surface bus electrodes 12B is formed on the surface of the semiconductor substrate 11 in the same direction as the second direction perpendicular to the first direction. The light-receiving surface bus electrode 12B is provided to be connected to all the light-receiving surface grid electrodes 12G. The light-receiving surface bus electrode 12B is electrically connected to the n-type impurity diffusion layer 2 on the bottom surface portion. For convenience, Figs. 1, 2, 4 and 5 show a case where two rows of light-receiving surface bus electrodes 12B are provided.

受光面匯流排電極12B,係設置用以聚集受光面柵電極12G收集的光電流,以及用以與引線20電氣接合之電極。受光面匯流排電極12B,係在所希望的範圍內塗佈具有金屬粒子的導電性膏材再燒成而形成的膏電極。對受光面匯流排電極12B,在使用太陽電池單元10製造太陽電池模組100之際,如第9及10圖所示,焊接引線20。又,第9及10圖中,只顯示受光面電極12中受光面匯流排電極12B。 The light-receiving surface bus bar electrode 12B is provided to collect the photocurrent collected by the light-receiving surface grid electrode 12G, and an electrode for electrically bonding with the lead 20. The light-receiving surface bus electrode 12B is a paste electrode formed by applying a conductive paste material having metal particles in a desired range and firing it. For the light-receiving surface bus bar electrode 12B, when the solar cell module 100 is manufactured using the solar cell 10, as shown in FIGS. 9 and 10, the lead 20 is welded. In FIGS. 9 and 10, only the light-receiving surface bus electrode 12B of the light-receiving surface electrode 12 is shown.

第11圖係顯示本發明第一實施形態的太陽電池單元10的受光面匯流排電極12B的形狀之平面圖。受光面匯流排電極12B的內側,如第7及11圖所示,往厚度方向貫通受 光面匯流排電極12B的複數的貫通孔60,在太陽電池單元10的面內方向即半導體基板11的面內方向中沿著第1方向設置成間隔踏腳石狀。第7圖中,例如顯示關於沿著第1方向在受光面匯流排電極12B中設置7個貫通孔60之情況。 FIG. 11 is a plan view showing the shape of the light-receiving surface bus electrode 12B of the solar battery cell 10 according to the first embodiment of the present invention. As shown in FIGS. 7 and 11, the inside of the light-receiving surface bus bar electrode 12B penetrates through the plurality of through holes 60 in the thickness direction of the light-receiving surface bus bar electrode 12B in the in-plane direction of the solar cell 10, that is, the surface of the semiconductor substrate 11 A stepping stone is provided along the first direction in the inner direction. FIG. 7 shows, for example, a case where seven through holes 60 are provided in the light-receiving surface bus electrode 12B along the first direction.

即,受光面匯流排電極12B,在第1方向中,包括不設置貫通孔60的複數的第1區域61以及設置貫通孔60的複數的第2區域62。複數的第1區域61與複數的第2區域62,在受光面匯流排電極12B的伸長方向中,即第1方向中,交互設置。第2區域62中,經由受光面匯流排電極12B的橫向方向中設置在外緣區域的連接部63,在受光面匯流排電極12B的伸長方向中連接相鄰的第1區域61之間。因此,1條受光面匯流排電極12B中的全部第1區域61以及第2區域62電氣連接。 That is, the light-receiving surface bus bar electrode 12B includes a plurality of first regions 61 in which the through holes 60 are not provided and a plurality of second regions 62 in which the through holes 60 are provided in the first direction. The plurality of first regions 61 and the plurality of second regions 62 are alternately provided in the extension direction of the light-receiving surface bus bar electrode 12B, that is, in the first direction. In the second region 62, the connecting portion 63 provided in the outer edge region in the lateral direction of the light-receiving surface bus electrode 12B is connected between adjacent first regions 61 in the extending direction of the light-receiving surface bus electrode 12B. Therefore, all the first regions 61 and the second regions 62 in one light-receiving surface bus electrode 12B are electrically connected.

又,對受光面匯流排電極12B焊接引線20,主要經由第1區域61與引線20的焊接進行。因此,受光面匯流排電極12B與引線20的焊接面積,近似第1區域61與引線20的焊接面積。 In addition, the lead 20 is welded to the light-receiving surface bus bar electrode 12B, mainly through the welding of the first region 61 and the lead 20. Therefore, the welding area of the light-receiving surface bus electrode 12B and the lead 20 approximates the welding area of the first region 61 and the lead 20.

由於受光面匯流排電極12B中設置複數的貫通孔60,可以降低受光面匯流排電極12B中使用的電極材料使用量,可以降低太陽電池單元10的製造成本。 Since a plurality of through holes 60 are provided in the light receiving surface bus electrode 12B, the amount of electrode material used in the light receiving surface bus electrode 12B can be reduced, and the manufacturing cost of the solar cell 10 can be reduced.

又,貫通孔60的尺寸以及位置,只要配合後述的背面連接電極13B的尺寸以及位置即可。背面連接電極13B的尺寸以及位置,考慮太陽電池單元10的特性決定。 In addition, the size and position of the through hole 60 only need to match the size and position of the back connection electrode 13B described later. The size and position of the back connection electrode 13B are determined in consideration of the characteristics of the solar battery cell 10.

又,起因於受光面匯流排電極12B中設置複數的貫通孔60而引起受光面匯流排電極12B的電阻增加,可以藉 由增高受光面匯流排電極12B的高度來抑制。 In addition, the resistance of the light-receiving surface bus electrode 12B increases due to the provision of a plurality of through holes 60 in the light-receiving surface bus electrode 12B, which can be suppressed by increasing the height of the light-receiving surface bus electrode 12B.

又,受光面匯流排電極12B,如第11圖所示,遍及長邊方向形成相同寬度,第1區域61中的寬度與第2區域62中的寬度相等,而且第2方向中的兩端部,形成往第1方向平行的直線狀。第2方向,在第11圖中對應Y方向。於是,對太陽電池單元10的電極連接引線20製造太陽電池模組100之際,與受光面匯流排電極12B相同寬度的引線20,在第2方向中的位置配合受光面匯流排電極12B重疊在受光面匯流排電極12B上的狀態下,焊接至受光面匯流排電極12B。 Also, the light-receiving surface bus electrode 12B has the same width in the longitudinal direction as shown in FIG. 11, the width in the first region 61 is equal to the width in the second region 62, and both ends in the second direction , Forming a straight line parallel to the first direction. The second direction corresponds to the Y direction in Figure 11. Therefore, when manufacturing the solar cell module 100 to the electrode connection lead 20 of the solar battery cell 10, the lead 20 having the same width as the light-receiving surface bus bar electrode 12B overlaps with the light-receiving surface bus bar electrode 12B in the position in the second direction In the state on the light-receiving surface bus bar electrode 12B, it is welded to the light-receiving surface bus bar electrode 12B.

第12圖係顯示本發明第一實施形態的太陽電池單元10的受光面匯流排電極12B上焊接引線20的狀態之平面圖。第13圖係顯示本發明第一實施形態的太陽電池單元10的構成之剖面圖,係第12圖中的XIII-XIII線中的主要部分剖面圖。第14圖係顯示本發明第一實施形態的太陽電池單元10的構成之剖面圖,係第12圖中的XIV-XIV線中的主要部分剖面圖。 FIG. 12 is a plan view showing a state where the lead wire 20 is welded to the light-receiving surface bus electrode 12B of the solar battery cell 10 according to the first embodiment of the present invention. FIG. 13 is a cross-sectional view showing the configuration of the solar battery cell 10 according to the first embodiment of the present invention, and is a cross-sectional view of main parts taken along the line XIII-XIII in FIG. 12. FIG. 14 is a cross-sectional view showing the configuration of the solar battery cell 10 according to the first embodiment of the present invention, and is a cross-sectional view of the main part in the line XIV-XIV in FIG. 12.

如第13及14圖所示,引線20,與受光面匯流排電極12B平行,而且在引線20的橫向方向中與受光面匯流排電極12B重疊的位置,重疊配置在受光面匯流排電極12B上,焊接至受光面匯流排電極12B的上面。即,對受光面匯流排電極12B,在第2方向中,橫向方向中的受光面匯流排電極的側面12Ba上重疊引線在橫向方向的側面20b的狀態下,焊接引線20。焊接至受光面匯流排電極12B的狀態的引線20的長邊方向,與受光面匯流排電極12B的長邊方向相同方向,並與上述的第1方向相同方向,即X方向。焊接至受光面匯流排電極 12B的狀態的引線20的橫向方向,與受光面匯流排電極12B的寬度相同方向,並與上述的第2方向相同方向,即Y方向。 As shown in FIGS. 13 and 14, the lead 20 is parallel to the light-receiving surface bus electrode 12B, and is arranged on the light-receiving surface bus electrode 12B in a position overlapping the light-receiving surface bus electrode 12B in the lateral direction of the lead 20. , Welded to the upper surface of the light-receiving surface bus electrode 12B. That is, to the light-receiving surface bus bar electrode 12B, in the second direction, the lead 20 is welded in a state where the lead is overlapped on the side surface 20 b in the lateral direction on the side surface 12Ba of the light-receiving surface bus electrode in the lateral direction. The longitudinal direction of the lead 20 in the state of being welded to the light-receiving surface bus bar electrode 12B is the same direction as the long-side direction of the light-receiving surface bus bar electrode 12B, and the same direction as the first direction described above, that is, the X direction. The lateral direction of the lead 20 in the state of being welded to the light-receiving surface bus electrode 12B is the same direction as the width of the light-receiving surface bus electrode 12B and the same direction as the second direction described above, that is, the Y direction.

如第12圖所示,引線20,遍及長邊方向相同寬度,以與受光面匯流排電極12B的寬度相同的寬度構成。因此,如第13圖所示,設置貫通孔60的複數的第2區域62中,引線20的寬度,與第2區域62的寬度即第2方向中對向的2個連接部的外側的側面63a間的長度相同尺寸。連接部的外側的側面63a,對應第2區域62中的受光面匯流排電極的側面12Ba。如第14圖所示,沒設置貫通孔60的複數的第1區域61中,引線20的寬度,與第1區域61的寬度即第2方向中的第1區域61的長度相同尺寸。 As shown in FIG. 12, the lead 20 has the same width throughout the longitudinal direction, and has the same width as the width of the light-receiving surface bus electrode 12B. Therefore, as shown in FIG. 13, in the plurality of second regions 62 in which the through holes 60 are provided, the width of the lead 20 and the width of the second region 62, that is, the outer side surfaces of the two connecting portions facing in the second direction The length between 63a is the same size. The outer side surface 63a of the connection portion corresponds to the side surface 12Ba of the light-receiving surface bus electrode in the second region 62. As shown in FIG. 14, in the plurality of first regions 61 where the through holes 60 are not provided, the width of the lead 20 is the same size as the width of the first region 61, that is, the length of the first region 61 in the second direction.

設置貫通孔60的複數的第2區域62中,對受光面匯流排電極12B焊接引線20,係經由受光面匯流排電極12B的橫向方向中設置在外緣區域的連接部63與引線20的焊接,在引線20的橫向方向中的兩端部進行。 In the plurality of second regions 62 where the through holes 60 are provided, the lead 20 is welded to the light-receiving surface bus bar electrode 12B, and the lead portion 20 is welded to the lead portion 20 via the connection portion 63 provided in the outer edge region in the lateral direction of the light-receiving surface bus bar electrode 12B. It is performed at both ends of the lead 20 in the lateral direction.

受光面匯流排電極12B的寬度,在0.6mm(毫米)以上、1.2mm以下。受光面柵電極12G的寬度在30μm(微米)以上、80μm(微米)以下。連接部63的寬度,在60μm(微米)以上、160μm(微米)以下。連接部63的寬度,相對於受光面匯流排電極12B的寬度,是1/15以上、1/5以下左右的寬度。受光面匯流排電極12B的寬度是上述範圍時,考慮受光面匯流排電極12B中使用的電極材料使用量降低以及起因於設置貫通孔60的受光面匯流排電極12B的電阻增加等時,連接部63的寬度,最好是受光面匯流排電極12B的寬度的1/10左右的寬度。 The width of the light-receiving surface bus bar electrode 12B is 0.6 mm (mm) or more and 1.2 mm or less. The width of the light-receiving surface grid electrode 12G is 30 μm (micrometer) or more and 80 μm (micrometer) or less. The width of the connecting portion 63 is 60 μm (micrometer) or more and 160 μm (micrometer) or less. The width of the connection portion 63 is about 1/15 or more and 1/5 or less of the width of the light-receiving surface bus electrode 12B. When the width of the light-receiving surface bus bar electrode 12B is within the above range, when the amount of electrode material used in the light-receiving surface bus bar electrode 12B is reduced and the resistance of the light-receiving surface bus bar electrode 12B provided with the through-hole 60 increases, etc., the connection portion The width of 63 is preferably about 1/10 of the width of the light receiving surface bus electrode 12B.

又,受光面柵電極12G的寬度是上述範圍時,連接部63的寬度,相對於受光面柵電極12G的寬度,是2倍左右的寬度。考慮受光面匯流排電極12B中使用的電極材料使用量降低以及起因於設置貫通孔60的受光面匯流排電極12B的電阻增加等時,連接部63的寬度,雖然也根據受光面匯流排電極12B的高度,但最好是受光面柵電極12G的寬度的2倍左右的寬度。 In addition, when the width of the light-receiving surface grid electrode 12G is within the above range, the width of the connecting portion 63 is about twice the width of the light-receiving surface grid electrode 12G. The width of the connection portion 63 may be considered when the amount of electrode material used in the light-receiving bus bar electrode 12B is reduced and the resistance of the light-receiving bus bar electrode 12B provided with the through-hole 60 is increased. The height is preferably about twice the width of the light-receiving gate electrode 12G.

將受光面柵電極12G的寬度細線化時,細線化受光面柵電極12G的寬度多少就增加多少受光面柵電極12G的條數時,受光量與電極電阻損失在相同的狀態下,載子到達受光面柵電極12G為止,因為流過n型不純物擴散層2的距離變短,n型不純物擴散層2中的電阻損失減少。因此,受光面柵電極12G的寬度的細線化,根據電阻損失的觀點是理想的。但是,受光面柵電極12G的寬度,根據製造上的限制,選擇下限寬度。特別是以廉價的網版印刷形成受光面柵電極12G時,細線化中可形成的受光面柵電極12G的下限寬度以30μm(微米)以上、100μm(微米)以下為界限。 When the width of the light-receiving surface grid electrode 12G is thinned, the number of light-receiving surface grid electrodes 12G increases as much as the width of the light-receiving surface grid electrode 12G is increased, and the light receiving amount and the electrode resistance loss are in the same state, and the carrier arrives As far as the light-receiving surface gate electrode 12G, the distance flowing through the n-type impurity diffusion layer 2 becomes shorter, and the resistance loss in the n-type impurity diffusion layer 2 decreases. Therefore, the thinning of the width of the light-receiving gate electrode 12G is desirable from the viewpoint of resistance loss. However, the width of the light-receiving surface grid electrode 12G is selected to be the lower limit width in accordance with manufacturing limitations. In particular, when the light-receiving surface grid electrode 12G is formed by inexpensive screen printing, the lower limit width of the light-receiving surface grid electrode 12G that can be formed during thinning is limited to 30 μm (micrometer) or more and 100 μm (micrometer) or less.

關於連接部63的寬度,也根據電極材料使用量降低的觀點,最好細線化。但是,根據製造上的限制以及太陽電池單元10的特性限制,選擇下限寬度。受光面柵電極12G與連接部63,和受光面匯流排電極12B共同使用1片印刷光罩同時以網版印刷印刷。因此,以網版印刷印刷的受光面柵電極12G的高度、連接部63的高度以及受光面匯流排電極12B的高度,成為同程度的高度。受光面柵電極12G的高度與連接部63的高度是相同高度時,對連接部63,因為流入數條即2、3 條到5、6條的受光面柵電極12G的分量的電流流入,連接部63的寬度最好是受光面柵電極12G的2倍左右。 Regarding the width of the connecting portion 63, from the viewpoint of reducing the amount of electrode material used, it is preferable to make the line thin. However, the lower limit width is selected in accordance with manufacturing limitations and characteristics limitations of the solar cell 10. The light-receiving surface grid electrode 12G and the connecting portion 63, together with the light-receiving surface bus electrode 12B, use a single printing mask to simultaneously perform screen printing. Therefore, the height of the light-receiving surface grid electrode 12G printed by screen printing, the height of the connection portion 63, and the height of the light-receiving surface bus bar electrode 12B have the same height. When the height of the light-receiving surface grid electrode 12G is the same as the height of the connecting portion 63, the current flowing into the connecting portion 63 is a component of several pieces of the light-receiving surface grid electrode 12G, that is, 2, 3 to 5, 6, and is connected. The width of the portion 63 is preferably about twice that of the light-receiving surface grid electrode 12G.

如上述,受光面匯流排電極12B,在第2方向中的兩端部,往第1方向形成平行直線狀。即,受光面匯流排電極12B,在第2方向中對向的2個連接部的外側的側面63a,形成往第1方向平行的直線狀。於是,對太陽電池單元10的電極連接引線20製造太陽電池模組100之際,對受光面匯流排電極12B,在第2方向中,在橫向方向中的受光面匯流排電極的側面12Ba上,重疊引線的橫向方向的側面20b的狀態下,焊接引線20。即,受光面匯流排電極的側面12Ba的位置與引線的橫向方向的側面20b的位置,在半導體基板11的受光面11A的面內方向中位於相同位置。 As described above, the light-receiving surface bus electrode 12B is formed in a parallel linear shape at the both ends in the second direction toward the first direction. That is, the light-receiving surface bus electrode 12B is formed in a linear shape parallel to the first direction on the outer side surface 63a of the two connecting portions facing in the second direction. Therefore, when manufacturing the solar cell module 100 to the electrode connecting lead 20 of the solar cell 10, the side surface 12Ba of the light-receiving surface bus bar electrode 12B in the second direction and the light-receiving surface bus bar electrode in the lateral direction in the second direction, The lead 20 is welded in a state where the lateral sides 20b of the lead in the lateral direction are overlapped. That is, the position of the side surface 12Ba of the light-receiving surface bus electrode and the position of the side surface 20b in the lateral direction of the lead are at the same position in the in-plane direction of the light-receiving surface 11A of the semiconductor substrate 11.

因此,在引線20焊接至受光面匯流排電極12B的狀態中,連接部63不比第1區域61更往外側突出。即,焊接引線20至受光面匯流排電極12B的狀態中,連接部63在半導體基板11的受光面11A的面內方向中,包含在引線20內。 Therefore, in a state where the lead 20 is welded to the light-receiving surface bus electrode 12B, the connecting portion 63 does not protrude outward from the first region 61. That is, in a state where the lead wire 20 is soldered to the light-receiving surface bus electrode 12B, the connection portion 63 is included in the lead wire 20 in the in-plane direction of the light-receiving surface 11A of the semiconductor substrate 11.

因此,太陽電池單元10,在半導體基板11的受光面11A的面內方向中,可以防止存在起因於不與引線20的下面焊接而從引線20露出的狀態的連接部63之太陽電池單元10的受光量下降。即,防止從引線20露出的狀態的受光面匯流排電極12B在半導體基板11的受光面11A上形成不要的陰影引起的受光面積減少,可以防止光電轉換效率下降。 Therefore, in the in-plane direction of the light-receiving surface 11A of the semiconductor substrate 11, the solar battery cell 10 can prevent the solar battery cell 10 having the connection portion 63 from being exposed from the lead wire 20 without being soldered to the lower surface of the lead wire 20. The amount of light received decreases. That is, the light-receiving surface bus electrode 12B exposed from the lead 20 is prevented from reducing the light-receiving area due to the formation of unnecessary shadows on the light-receiving surface 11A of the semiconductor substrate 11, thereby preventing the photoelectric conversion efficiency from decreasing.

例如,設置連接部63在第2方向中比第1區域61更往外側突出時,連接部63從連接至受光面匯流排電極12B 的引線20露出的面積有多少,太陽電池單元10的受光量就會下降多少,成為光電轉換效率下降的原因。 For example, when the connection portion 63 is provided to protrude outward from the first region 61 in the second direction, how much area of the connection portion 63 is exposed from the lead 20 connected to the light-receiving bus bar electrode 12B, and the amount of light received by the solar cell 10 How much it will fall, it becomes the cause of the decline in photoelectric conversion efficiency.

又,受光面匯流排電極12B,在第2方向中的兩端部,因為形成往第1方向平行的直線狀,連接部63在半導體基板11的面內方向以最短的距離連接在第1方向中相鄰的第1區域61。因此,受光面匯流排電極12B中聚集的光電流,可以抑制起因於流過比第1區域61寬度窄的連接部63之第2區域62中的電阻損失。 In addition, the light-receiving surface bus bar electrodes 12B are formed in a linear shape parallel to the first direction at both ends in the second direction, and the connecting portion 63 is connected to the first direction with the shortest distance in the in-plane direction of the semiconductor substrate 11 In the adjacent first area 61. Therefore, the photocurrent accumulated in the light-receiving surface bus electrode 12B can suppress the resistance loss caused by flowing in the second region 62 of the connecting portion 63 narrower than the first region 61 in width.

又,焊接受光面柵電極12G與引線20時,焊接至受光面柵電極12G時的應力集中,受光面柵電極12G有可能斷線。太陽電池單元10中,在第2區域62焊接連接部63與引線20,不焊接受光面柵電極12G與引線20。因此,太陽電池單元10可以抑制受光面柵電極12G與引線20的焊接引起的受光面柵電極12G斷線。 In addition, when the light-receiving surface grid electrode 12G and the lead 20 are welded, stress when welding to the light-receiving surface grid electrode 12G is concentrated, and the light-receiving surface grid electrode 12G may be disconnected. In the solar battery cell 10, the connection portion 63 and the lead 20 are welded to the second region 62, and the light-receiving surface grid electrode 12G and the lead 20 are not welded. Therefore, the solar battery cell 10 can suppress disconnection of the light-receiving surface grid electrode 12G caused by welding of the light-receiving surface grid electrode 12G and the lead 20.

又,太陽電池單元10,連接引線20至太陽電池單元10的電極製造太陽電池模組100之際,可使用遍及長邊方向形成相同寬度的一般引線20,不用具有太陽電池單元10的專用形狀的引線20。 In addition, when manufacturing the solar battery module 100 by connecting the lead 20 to the electrode of the solar battery unit 10, the solar battery unit 10 can use a general lead 20 having the same width throughout the longitudinal direction, without using a special shape of the solar battery unit 10 Lead 20.

太陽電池模組100,使用遍及長邊方向形成相同寬度的一般引線20。藉此,對太陽電池單元10焊接引線20之際,受光面匯流排電極12B與引線20的長邊方向中太陽電池單元10與引線20的位置決定即受光面匯流排電極12B與引線20的位置決定變得不需要。因此,太陽電池模組100,在受光面匯流排電極12B與引線20的長邊方向中的任意位置,因為可 以焊接受光面匯流排電極12B與引線20,製造是容易的。 For the solar cell module 100, a general lead 20 having the same width is formed throughout the longitudinal direction. As a result, when the lead 20 is welded to the solar cell 10, the positions of the solar cell 10 and the lead 20 in the longitudinal direction of the light-receiving bus electrode 12B and the lead 20 determine the position of the light-receiving bus electrode 12B and the lead 20 The decision becomes unnecessary. Therefore, in the solar cell module 100, the light-receiving surface bus electrode 12B and the lead 20 can be welded at any position in the longitudinal direction of the light-receiving surface bus electrode 12B and the lead 20, and the manufacturing is easy.

另一方面,在半導體基板的背面11B側,如第6及8圖所示,形成含鋁(Al)的背面集電電極13A以及含銀(Ag)的點狀的複數的背面連接電極13B,構成背面電極13。又,與半導體基板1的背面的表層中的背面集電電極13A相接的區域周邊,從用以提高開放電壓以及短路電流的背面電場層即背面電場層13A,形成鋁往半導體基板1的背面側的表層高濃度擴散的p+區域的背面電場(BSF:Back Surface Filed)層4。 On the other hand, on the back surface 11B side of the semiconductor substrate, as shown in FIGS. 6 and 8, a back surface collector electrode 13A containing aluminum (Al) and a plurality of dot-shaped back surface connection electrodes 13B containing silver (Ag) are formed, Constitution back electrode 13. In addition, from the back surface electric field layer 13A, which is a back surface electric field layer for increasing the open voltage and short circuit current, to the back surface of the semiconductor substrate 1, aluminum is formed on the back surface of the semiconductor substrate 1 The back surface electric field (BSF: Back Surface Filed) layer 4 of the p+ region of the side surface layer with high concentration diffusion.

背面集電電極13A,係為了形成BSF層4以及為了從半導體基板11的背面11B側收集以太陽電池單元10發電的光電流而設置的電極,覆蓋太陽電池單元10的背面大致全區。背面集電電極13A,係在所希望的範圍內塗佈具有電極材料Al的金屬粒子之導電性膏材再燒成而形成的膏電極。 The rear collector electrode 13A is an electrode provided for forming the BSF layer 4 and for collecting photocurrent generated by the solar battery cell 10 from the rear surface 11B side of the semiconductor substrate 11, covering substantially the entire rear surface of the solar battery cell 10. The rear collector electrode 13A is a paste electrode formed by applying a conductive paste of metal particles containing electrode material Al to a desired range and firing it.

又,背面連接電極13B,取出背面集電電極13A收集的光電流至外部,係設置用以取得與外部電極接觸的電極。即,背面連接電極13B,係設置用以與引線20接合的電極。背面連接電極13B,與受光面匯流排電極12B相同,係沿著太陽電池單元10的連結方向即第1方向設置。背面連接電極13B,係在所希望的範圍內塗佈具有電極材料Ag的金屬粒子之導電性膏材再燒成而形成的膏電極。 In addition, the back surface is connected to the electrode 13B, and the photocurrent collected by the back surface collector electrode 13A is taken out to the outside, and an electrode for contact with the external electrode is provided. That is, the back connection electrode 13B is provided with an electrode for bonding with the lead 20. The back connection electrode 13B is the same as the light-receiving surface bus electrode 12B, and is provided along the first direction which is the connection direction of the solar battery cells 10. The back connection electrode 13B is a paste electrode formed by applying a conductive paste of metal particles containing the electrode material Ag to a desired range and firing it.

背面連接電極13B,夾住半導體基板11,配置在對向受光面匯流排電極12B的位置。又,背面連接電極13B,如第8圖所示,沿著太陽電池單元10的連結方向即第1方向,遍及太陽電池單元10的大致全長分散配置成間隔踏腳石狀, 設置成4列。藉由將背面連接電極13B形成間隔踏腳石狀,抑制銀的使用量,可以抑制製造成本。 The back surface connection electrode 13B sandwiches the semiconductor substrate 11 and is arranged at a position opposite to the light receiving surface bus electrode 12B. In addition, as shown in FIG. 8, the back connection electrodes 13B are distributed along the first direction, which is the connection direction of the solar battery cells 10, in a stepping stone shape and arranged in four rows over the substantially entire length of the solar battery cells 10. By forming the back connection electrode 13B into a stepping stone shape, the amount of silver used can be suppressed, and the manufacturing cost can be suppressed.

於是,背面連接電極13B的位置,如第9及10圖所示,太陽電池單元10的面內方向即半導體基板11的面內方向中,位於與受光面匯流排電極12B中的貫通孔60的位置不一致的位置。換言之,受光面匯流排電極12B的第1區域61與背面連接電極13B,以半導體基板11介於其間,配置在半導體基板11的厚度方向中相對的位置。因此,受光面匯流排電極12B的第1區域61與背面連接電極13B,配置在半導體基板11的面內對應的位置。 Therefore, as shown in FIGS. 9 and 10, the position of the back connection electrode 13B is located in the through hole 60 in the in-plane direction of the solar battery cell 10, that is, in the in-plane direction of the semiconductor substrate 11 with the light-receiving surface bus electrode 12B Locations with inconsistent locations. In other words, the first region 61 of the light-receiving surface bus bar electrode 12B and the back connection electrode 13B are arranged at opposite positions in the thickness direction of the semiconductor substrate 11 with the semiconductor substrate 11 interposed therebetween. Therefore, the first region 61 of the light-receiving surface bus bar electrode 12B and the back surface connecting electrode 13B are arranged at corresponding positions in the surface of the semiconductor substrate 11.

因此,1個太陽電池單元10中,受光面側中焊接至受光面匯流排電極12B的引線20與背面側中連接至背面連接電極13B的引線20,在太陽電池單元10的面內方向即半導體基板11的面內方向中,在相同的位置焊接至太陽電池單元10。即,1個太陽電池單元10中,焊接至太陽電池單元10的受光面側的引線20與焊接至太陽電池單元10的背面側的引線20,在半導體基板11的厚度方向中相對的位置焊接。 Therefore, in one solar battery cell 10, the lead 20 soldered to the light-receiving surface bus electrode 12B on the light-receiving surface side and the lead wire 20 connected to the back-surface connection electrode 13B on the back surface side are in the in-plane direction of the solar battery cell 10, that is, the semiconductor The substrate 11 is soldered to the solar cell 10 at the same position in the in-plane direction. That is, in one solar battery cell 10, the lead 20 soldered to the light-receiving surface side of the solar battery cell 10 and the lead wire 20 soldered to the back surface side of the solar battery cell 10 are soldered at positions facing each other in the thickness direction of the semiconductor substrate 11.

於是,太陽電池單元10的面內方向中,由於使受光面匯流排電極12B的第1區域61的面積與背面連接電極13B的面積大致相同,受光面匯流排電極12B與引線20的焊接面積和背面連接電極13B與引線20的焊接面積幾乎相等。 Therefore, in the in-plane direction of the solar battery cell 10, since the area of the first region 61 of the light-receiving surface bus electrode 12B and the area of the back connecting electrode 13B are substantially the same, the welding area of the light-receiving surface bus electrode 12B and the lead 20 and The welding area of the back connection electrode 13B and the lead 20 is almost equal.

因此,本第一實施形態的太陽電池單元10中,為了形成複數的太陽電池單元10,焊接引線20至太陽電池單元10之際的引線20與受光面匯流排電極12B的連接部以及引線 20與背面連接電極13B的連接部中產生的內部應力幾乎相抵。 Therefore, in the solar battery cell 10 of the first embodiment, in order to form a plurality of solar battery cells 10, the connection portion between the lead wire 20 and the light receiving surface bus electrode 12B when the lead wire 20 is welded to the solar battery cell 10, and the lead wire 20 and The internal stress generated in the connection portion of the back connection electrode 13B almost cancels out.

連接引線20至太陽電池單元10的電極製造太陽電池模組100之際,如第9及10圖所示,焊接引線20至受光面匯流排電極12B以及背面連接電極13B。受光面匯流排電極12B不具有貫通孔60,背面連接電極13B分散配置成間隔踏腳石狀時,半導體基板11的面內的受光面匯流排電極12B的面積與半導體基板11的面內的背面連接電極13B的面積之間的差變大。因此,起因於製作太陽電池模組100時的引線20焊接產生之引線20與受光面匯流排電極12B的連接部中產生的內部應力以及引線20與背面連接電極13B的連接部中產生的內部應力之間的差變大。在此情況下,在太陽電池單元10的受光面側引線20與受光面匯流排電極12B的連接部中產生的內部應力以及在太陽電池單元10的背面側引線20與背面連接電極13B的連接部中產生的內部應力之間不能取得平衡,內部應力的差成為太陽電池單元10彎曲的主因。 When manufacturing the solar cell module 100 by connecting the lead 20 to the electrode of the solar cell 10, as shown in FIGS. 9 and 10, the lead 20 is soldered to the light-receiving bus bar electrode 12B and the back connection electrode 13B. When the light-receiving surface bus bar electrode 12B does not have the through-hole 60 and the back surface connection electrode 13B is dispersed in a stepping stone shape, the area of the light-receiving surface bus bar electrode 12B in the surface of the semiconductor substrate 11 and the back surface in the surface of the semiconductor substrate 11 The difference between the areas of the connection electrodes 13B becomes larger. Therefore, the internal stress generated in the connection between the lead 20 and the light-receiving surface bus electrode 12B due to the welding of the lead 20 when manufacturing the solar cell module 100 and the internal stress generated in the connection between the lead 20 and the back connection electrode 13B The difference between them becomes larger. In this case, the internal stress generated in the connection portion between the light-receiving surface-side lead 20 of the solar battery cell 10 and the light-receiving surface bus electrode 12B and the connection portion of the back-side lead 20 of the solar battery cell 10 and the back connection electrode 13B The internal stress generated in the process cannot be balanced, and the difference in internal stress becomes the main cause of the bending of the solar cell 10.

結果,產生起因於金屬構成的引線20與半導體基板11的矽的熱膨脹係數差的彎曲。一般構成引線20的金屬的熱膨脹係數,比矽的熱膨脹係數大。因此,受光面匯流排電極12B不具有貫通孔60而背面連接電極13B分散配置成間隔踏腳石狀時,即半導體基板11的面內的受光面匯流排電極12B的面積比半導體基板11的面內的背面連接電極13B的面積大時,焊接後在太陽電池單元10產生往背面側凸的彎曲。 As a result, a bend due to a difference in the coefficient of thermal expansion of the lead 20 made of metal and the silicon of the semiconductor substrate 11 occurs. In general, the thermal expansion coefficient of the metal constituting the lead 20 is larger than that of silicon. Therefore, when the light-receiving surface bus bar electrode 12B does not have the through hole 60 and the back connecting electrode 13B is dispersedly arranged in a stepping stone shape, that is, the area of the light-receiving surface bus bar electrode 12B in the surface of the semiconductor substrate 11 is larger than the surface of the semiconductor substrate 11 When the area of the inner back connection electrode 13B is large, the solar battery cell 10 bends convexly toward the back side after welding.

另一方面,太陽電池單元10中,受光面匯流排電極12B的第1區域61與背面連接電極13B,在半導體基板11的面 內配置在對應的位置,而且太陽電池單元10的面內方向中,由於使受光面匯流排電極12B的第1區域61的面積與背面連接電極13B的面積大致相同,受光面匯流排電極12B與引線20的焊接面積和背面連接電極13B與引線20的焊接面積變得大致相等。藉此,焊接的受光面匯流排電極12B與引線20的固定位置以及焊接的背面連接電極13B與引線20的固定位置,在半導體基板11的面內成為相同的位置,太陽電池單元10中,可以取得太陽電池單元10的受光面側與背面側中的上述內部應力的平衡。因此,太陽電池單元10,可以抑制起因於製作太陽電池模組100時焊接引線20至太陽電池單元10的太陽電池單元10彎曲。因此,太陽電池單元10,能夠使製作太陽電池模組100時太陽電池單元10彎曲引起的太陽電池單元10破損率降低。 On the other hand, in the solar battery cell 10, the first region 61 of the light-receiving surface bus bar electrode 12B and the back connecting electrode 13B are arranged at corresponding positions in the surface of the semiconductor substrate 11, and in the in-plane direction of the solar battery cell 10 Since the area of the first region 61 of the light-receiving surface bus bar electrode 12B and the area of the back connecting electrode 13B are substantially the same, the welding area of the light-receiving bus bar electrode 12B and the lead 20 and the welding area of the back connecting electrode 13B and the lead 20 become To be roughly equal. As a result, the fixed position of the soldered light-receiving bus bar electrode 12B and the lead 20 and the fixed position of the soldered back connection electrode 13B and the lead 20 become the same position on the surface of the semiconductor substrate 11, and the solar battery cell 10 can be The above-mentioned internal stress is balanced between the light-receiving surface side and the back surface side of the solar battery cell 10. Therefore, the solar battery cell 10 can suppress bending of the solar battery cell 10 caused by welding the lead wire 20 to the solar battery cell 10 when the solar battery module 100 is manufactured. Therefore, the solar battery cell 10 can reduce the breakage rate of the solar battery cell 10 due to the bending of the solar battery cell 10 when the solar battery module 100 is manufactured.

於是,由於太陽電池單元10的面內方向中受光面匯流排電極12B的第1區域61的面積與背面連接電極13B的面積正確形成相同面積,可以高精度取得太陽電池單元10的受光面側與背面側中的上述內部應力的平衡。 Therefore, since the area of the first region 61 of the light-receiving surface bus electrode 12B and the area of the back connection electrode 13B in the in-plane direction of the solar battery cell 10 are accurately formed to the same area, the light-receiving surface side of the solar battery cell 10 can be accurately obtained The balance of the internal stress on the back side.

又,太陽電池單元10中,如上述,因為可以抑制製作太陽電池模組100時太陽電池單元10的彎曲,能夠對應半導體基板11的薄板化,使用更薄的半導體基板11降低半導體基板11的成本,可對應廉價的太陽電池單元10的實現。 In addition, in the solar battery cell 10, as described above, since the bending of the solar battery cell 10 when manufacturing the solar battery module 100 can be suppressed, it is possible to cope with the thinning of the semiconductor substrate 11 and use a thinner semiconductor substrate 11 to reduce the cost of the semiconductor substrate 11 , Can correspond to the realization of cheap solar cells 10.

又,上述的第一實施形態的太陽電池單元10的構成係一例,關於大型太陽電池單元的構造不限定於上述記載。 In addition, the configuration of the solar cell 10 of the first embodiment described above is an example, and the structure of the large-scale solar cell is not limited to the above description.

又,第7及8圖中,作為代表例,顯示關於受光面匯流排電極12B以及背面連接電極13B是4條的情況,但受光面匯 流排電極12B以及背面連接電極13B的條數不限定於上述記載。 In addition, in FIGS. 7 and 8, as a representative example, the case where there are four light-receiving surface bus electrodes 12B and the back connection electrodes 13B is shown, but the number of the light-receiving surface bus electrodes 12B and the back connection electrodes 13B is not limited to The above description.

其次,關於第一實施形態的太陽電池單元10的製造方法,參照第15到22圖說明。第15圖係說明本發明第一實施形態的太陽電池單元10的製造步驟的程序之流程圖。第16到22圖,係顯示本發明第一實施形態的太陽電池單元10的製造步驟的主要部分剖面圖。又,第20到22圖,係顯示對應第9圖的圖。 Next, the method of manufacturing the solar battery cell 10 of the first embodiment will be described with reference to FIGS. 15 to 22. Fig. 15 is a flowchart illustrating a procedure of the manufacturing steps of the solar battery cell 10 according to the first embodiment of the present invention. 16 to 22 are cross-sectional views of main parts showing the manufacturing steps of the solar battery cell 10 according to the first embodiment of the present invention. Also, Figures 20 to 22 show the figures corresponding to Figure 9.

首先,作為半導體基板1,如第16圖所示,例如準備針對民生用太陽電池使用最多的正方形狀的p型單結晶矽基板。在此,不特別限定半導體基板1的厚度以及尺寸,但作為一例,半導體基板1的厚度是200μm,半導體基板1的面方向中的外形尺寸是156mm×156mm。 First, as the semiconductor substrate 1, as shown in FIG. 16, for example, a square p-type single crystal silicon substrate that is most frequently used for solar cells for civilian use is prepared. Here, the thickness and size of the semiconductor substrate 1 are not particularly limited, but as an example, the thickness of the semiconductor substrate 1 is 200 μm, and the outer dimension of the semiconductor substrate 1 in the plane direction is 156 mm×156 mm.

因為以線鋸切片冷卻固化熔融的矽形成的矽錠製造半導體基板1,表面上留下切片時的損傷。於是,首先也兼著除去損傷層,經由浸泡半導體基板1在酸溶液或加熱的鹼溶液中蝕刻表面,除去切出半導體基板1時發生而存在半導體基板1的表面附近的損傷區域。作為鹼溶液的一例,舉出氫氧化鈉水溶液。 Since a silicon ingot formed by cooling and solidifying molten silicon is cut by a wire saw, the semiconductor substrate 1 is manufactured, and the damage during slicing remains on the surface. Therefore, first, as well as removing the damaged layer, the surface is etched in an acid solution or a heated alkaline solution by immersing the semiconductor substrate 1 to remove the damaged region that occurs near the surface of the semiconductor substrate 1 when the semiconductor substrate 1 is cut out. As an example of the alkali solution, a sodium hydroxide aqueous solution is mentioned.

其次,步驟S10中,作為半導體基板1中受光面側的表面上紋理構造,形成不圖示的微小凹凸。微小凹凸,例如在鹼性水溶液的氫氧化鈉與異丙醇的混合溶液內浸泡半導體基板1,經由進行半導體基板1的濕蝕刻而形成。 Next, in step S10, as the texture structure on the surface of the semiconductor substrate 1 on the light-receiving surface side, minute irregularities (not shown) are formed. The minute irregularities are formed by, for example, immersing the semiconductor substrate 1 in a mixed solution of sodium hydroxide and isopropyl alcohol in an alkaline aqueous solution, and performing wet etching of the semiconductor substrate 1.

其次,步驟S20中,將表面上形成微小凹凸作為紋理構造的半導體基板1投入熱擴散爐內,在n型不純物的磷(P)的空氣中加熱,在半導體基板1的基板全面形成pn接合。根據此步驟,使磷從半導體基板1的表面擴散至半導體基板1,如 第17圖所示,在半導體基板1的表層形成n型不純物擴散層2,形成pn接合。藉此,得到構成pn接合的半導體基板11。 Next, in step S20, the semiconductor substrate 1 formed with fine irregularities on the surface as a texture structure is put into a thermal diffusion furnace, heated in an air of phosphorus (P) of n-type impurities, and a pn junction is formed on the entire substrate of the semiconductor substrate 1. According to this step, phosphorus is diffused from the surface of the semiconductor substrate 1 to the semiconductor substrate 1. As shown in FIG. 17, an n-type impurity diffusion layer 2 is formed on the surface layer of the semiconductor substrate 1 to form a pn junction. With this, the semiconductor substrate 11 constituting the pn junction is obtained.

n型不純物擴散層2的形成,例如將半導體基板1投入熱擴散爐內,三氯氧磷(POCl3)氣體與氧氣的混合空氣中,以例如750℃到900℃左右的溫度進行加熱。擴散至半導體基板1的表層的磷的濃度,可以由三氯氧磷氣體的濃度、空氣溫度及加熱時間等的條件控制。在此,n型不純物擴散層2形成後的表面上,形成以磷的氧化物為主成分的矽氧化膜與磷氧化物的混成物之未圖示的磷玻璃層。因此,n型不純物擴散層2的表面的磷玻璃層,利用氟酸水溶液等的藥劑除去。 For the formation of the n-type impurity diffusion layer 2, for example, the semiconductor substrate 1 is placed in a thermal diffusion furnace, and heated in a mixed air of phosphorus oxychloride (POCl 3 ) gas and oxygen at a temperature of, for example, about 750°C to 900°C. The concentration of phosphorus diffused to the surface layer of the semiconductor substrate 1 can be controlled by conditions such as the concentration of phosphorus oxychloride gas, air temperature, and heating time. Here, on the surface after the formation of the n-type impurity diffusion layer 2, a phosphor glass layer (not shown) of a mixture of a silicon oxide film containing phosphor oxide as a main component and phosphor oxide is formed. Therefore, the phosphorous glass layer on the surface of the n-type impurity diffusion layer 2 is removed with a chemical such as a hydrofluoric acid aqueous solution.

其次,步驟S30中,進行電氣絕緣p型電極的背面電極13與n型電極的受光面電極12之pn分離步驟,如第18圖所示除去半導體基板11的端部的n型不純物擴散層2。n型不純物擴散層2,因為在半導體基板1的表面上同樣形成,所以半導體基板11的受光面11A與背面11B在電氣連接的狀態。因此,半導體基板11中形成背面電極13與受光面電極12時,電氣連接背面電極13與受光面電極12。為了切斷此電氣連接,進行pn分離。例如利用電漿蝕刻的端面蝕刻或利用雷射加工的熔融分離等,例示pn分離。 Next, in step S30, a pn separation step of electrically insulating the back electrode 13 of the p-type electrode and the light-receiving surface electrode 12 of the n-type electrode is performed to remove the n-type impurity diffusion layer 2 at the end of the semiconductor substrate 11 as shown in FIG. . Since the n-type impurity diffusion layer 2 is similarly formed on the surface of the semiconductor substrate 1, the light-receiving surface 11A and the back surface 11B of the semiconductor substrate 11 are electrically connected. Therefore, when the back electrode 13 and the light-receiving surface electrode 12 are formed on the semiconductor substrate 11, the back electrode 13 and the light-receiving surface electrode 12 are electrically connected. In order to cut off this electrical connection, pn separation is performed. For example, pn separation is exemplified by plasma etching end face etching or laser processing melt separation.

其次,步驟S40中,在半導體基板11的受光面側,即n型不純物擴散層2上,為了表面保護以及光電轉換效率改善,如第19圖所示例子,形成氮化矽(SiN)膜作為反射防止膜3。對於反射防止膜3的形成,例如利用電漿化學氣相沉積(Plasma-Enhanced Chemical Vapor Deposition:PECVD)法,使用 矽烷(silane)與氨(ammonia)的混合氣體形成氮化矽膜作為反射防止膜3。反射防止膜3的膜厚以及折射率,設定為最抑制光反射的值。 Next, in step S40, on the light-receiving surface side of the semiconductor substrate 11, that is, on the n-type impurity diffusion layer 2, in order to improve surface protection and improve photoelectric conversion efficiency, as shown in FIG. 19, a silicon nitride (SiN) film is formed as Anti-reflection film 3. For the formation of the anti-reflection film 3, for example, using a plasma chemical vapor deposition (Plasma-Enhanced Chemical Vapor Deposition: PECVD) method, a mixed gas of silane and ammonia is used to form a silicon nitride film as the anti-reflection film 3. The film thickness and refractive index of the anti-reflection film 3 are set to the values that most suppress light reflection.

其次,形成電極。首先,步驟S50中,在半導體基板11的受光面側,以網版印刷印刷受光面電極12。即,如第20圖所示,包含銀以及玻璃熔塊(glass frit)的電極材料膏的銀電極膏12a,在半導體基板11的受光面側的反射防止膜3上,印刷成受光面電極12的形狀。在此,銀電極膏12a,印刷成第7及11圖所示包括複數的第1區域61與複數的第2區域62的受光面匯流排電極12B的形狀。之後,使銀電極膏12a乾燥。 Next, electrodes are formed. First, in step S50, the light-receiving surface electrode 12 is printed on the light-receiving surface side of the semiconductor substrate 11 by screen printing. That is, as shown in FIG. 20, the silver electrode paste 12a containing the electrode material paste of silver and glass frit is printed as the light-receiving surface electrode 12 on the anti-reflection film 3 on the light-receiving surface side of the semiconductor substrate 11 shape. Here, the silver electrode paste 12a is printed in the shape of the light-receiving surface bus electrode 12B including a plurality of first regions 61 and a plurality of second regions 62 as shown in FIGS. 7 and 11. After that, the silver electrode paste 12a is dried.

其次,步驟S60中,在半導體基板11的背面以網版印刷印刷背面電極13。背面集電電極13A的印刷與背面連接電極13B的印刷,哪個先進行都沒問題,但在此顯示先印刷背面連接電極13B的情況。 Next, in step S60, the back electrode 13 is printed on the back surface of the semiconductor substrate 11 by screen printing. It does not matter which of the printing of the back collector electrode 13A and the printing of the back connection electrode 13B is performed first, but the case where the back connection electrode 13B is printed first is shown here.

其次,如第21圖所示,在半導體基板11的背面,包含銀與玻璃熔塊的電極材料膏的銀電極膏13b,印刷成背面連接電極13B的形狀。銀電極膏13b,在半導體基板11的背面的面內,半導體基板11的受光面中受光面匯流排電極12B的第1區域61形成的位置對應的位置上,使用具有開口圖案的印刷光罩印刷。之後,以200℃的溫度讓銀電極膏13b乾燥5分鐘。 Next, as shown in FIG. 21, on the back surface of the semiconductor substrate 11, a silver electrode paste 13b containing an electrode material paste of silver and glass frit is printed in the shape of the back connection electrode 13B. The silver electrode paste 13b is printed on the light-receiving surface of the semiconductor substrate 11 at a position corresponding to the position where the first region 61 of the light-receiving bus electrode 12B is formed on the light-receiving surface of the semiconductor substrate 11, and is printed using a printing mask having an opening pattern . Thereafter, the silver electrode paste 13b was dried at a temperature of 200°C for 5 minutes.

其次,如第21圖所示,在半導體基板11的背面,印刷包含鋁與玻璃熔塊的電極材料膏即鋁電極膏13a成背面集電電極13A的形狀。鋁電極膏13a,在半導體基板11的背面的面內,背面連接電極13B的印刷區域以及除了外緣區域的一部分的背面全體使用具有開口圖案的印刷光罩印刷。又,鋁電 極膏13a的至少一部分印刷成電氣連接至銀電極膏13b的狀態。之後,以200℃的溫度讓鋁電極膏13a乾燥5分鐘。 Next, as shown in FIG. 21, on the back surface of the semiconductor substrate 11, an aluminum electrode paste 13a, which is an electrode material paste containing aluminum and glass frit, is printed into the shape of the back collector electrode 13A. The aluminum electrode paste 13a is printed on the surface of the back surface of the semiconductor substrate 11, the printed area of the back connection electrode 13B, and the entire back surface except for a part of the outer edge area are printed using a printing mask having an opening pattern. Also, at least a part of the aluminum electrode paste 13a is printed in a state of being electrically connected to the silver electrode paste 13b. Thereafter, the aluminum electrode paste 13a was dried at a temperature of 200°C for 5 minutes.

之後,步驟S70中,進行實施印刷膏材的燒成處理的電極燒成,藉由燒成半導體基板11上印刷的電極膏,如第22圖所示,得到作為受光面電極12的受光面柵電極12G以及受光面匯流排電極12B與作為背面電極13的背面集電電極13A以及背面連接電極13B。燒成,係使用紅外線加熱爐,在大氣空氣中以750℃以上且900℃以下左右進行。燒成溫度的選擇,係考慮太陽電池單元10的構造以及電極膏的種類進行。 Then, in step S70, the electrodes subjected to the firing process of the printing paste are fired, and by firing the electrode paste printed on the semiconductor substrate 11, as shown in FIG. 22, the light-receiving surface grid as the light-receiving surface electrode 12 is obtained The electrode 12G and the light-receiving surface bus electrode 12B are connected to the back surface collector electrode 13A and the back surface connection electrode 13B as the back electrode 13. Firing is carried out using an infrared heating furnace at about 750°C to 900°C in atmospheric air. The firing temperature is selected in consideration of the structure of the solar cell 10 and the type of electrode paste.

根據燒成,在半導體基板11的受光面側,燒穿(fire through)貫通受光面電極12的銀絕緣膜的反射防止膜3,電氣連接n型不純物擴散層2與受光面電極12。因此,n型不純物擴散層2,可以得到與受光面電極12良好的電阻性接合。 According to the firing, on the light-receiving surface side of the semiconductor substrate 11, the anti-reflection film 3 of the silver insulating film penetrating through the light-receiving surface electrode 12 is fired to electrically connect the n-type impurity diffusion layer 2 and the light-receiving surface electrode 12. Therefore, the n-type impurity diffusion layer 2 can obtain good resistive bonding with the light-receiving surface electrode 12.

另一方面,在半導體基板11的背面側,燒成鋁電極膏13a以及銀電極膏13b,形成背面集電電極13A與背面連接電極13B的同時,形成鋁與銀構成的未圖示的合金部。 On the other hand, on the back side of the semiconductor substrate 11, the aluminum electrode paste 13 a and the silver electrode paste 13 b are fired to form the back collector electrode 13A and the back connection electrode 13B, and at the same time, an alloy part (not shown) composed of aluminum and silver is formed. .

形成背面集電電極13A之際,鋁電極膏13a,也與半導體基板11的背面的p型單結晶矽反應,經由反應後固化,形成包含鋁的p+層BSF層4。即,在半導體基板11的背面11B側形成的n型不純物擴散層2中背面集電電極13A的正下方區域,利用鋁的擴散轉換成BSF層4。又,在半導體基板11的背面側形成的n型不純物擴散層2中,背面集電電極13A正下方以外的區域,擴散鋁成為p型區域。 When forming the back surface collector electrode 13A, the aluminum electrode paste 13a also reacts with the p-type single crystal silicon on the back surface of the semiconductor substrate 11 and undergoes post-reaction curing to form a p+ layer BSF layer 4 containing aluminum. That is, in the n-type impurity diffusion layer 2 formed on the back surface 11B side of the semiconductor substrate 11, the area immediately below the back surface collector electrode 13A is converted into the BSF layer 4 by aluminum diffusion. In addition, in the n-type impurity diffusion layer 2 formed on the back side of the semiconductor substrate 11, in a region other than directly below the back collector electrode 13A, diffused aluminum becomes a p-type region.

其次,說明關於製造包括本第一實施形態的太陽電 池單元10的太陽電池模組100的方法。第23圖係顯示本發明第一實施形態的太陽電池模組100的製造方法程序的流程圖。 Next, a method of manufacturing the solar cell module 100 including the solar cell unit 10 of the first embodiment will be described. FIG. 23 is a flowchart showing the procedure of the manufacturing method of the solar cell module 100 according to the first embodiment of the present invention.

首先,步驟S110中,經由焊接引線20至一方的太陽電池單元10的受光面匯流排電極12B與另一方的太陽電池單元10的背面連接電極13B而接合,以引線20電氣連接複數的太陽電池單元10,形成太陽電池串50。 First, in step S110, the bus bar electrode 12B of one solar cell 10 is soldered to the light-receiving surface bus bar electrode 12B of the other solar cell 10 and the back electrode 13B of the other solar cell 10 is joined to electrically connect a plurality of solar cells with the lead 20 10. The solar cell string 50 is formed.

其次,步驟S120中,受光面保護部31上,依序積層受光面側密封材33的薄片、太陽電池串50、背面側密封材34的薄片、背面保護部32,形成積層體。 Next, in step S120, on the light-receiving surface protection portion 31, a sheet of the light-receiving surface side sealing material 33, the solar cell string 50, the back surface side sealing material 34, and the back surface protection portion 32 are sequentially stacked to form a laminate.

其次,步驟S130中,安裝積層體至積層(laminate)裝置,以例如140℃以上且160℃以下左右的溫度進行30分鐘前後的熱處理以及積層處理。藉此,積層體的各構件,經由受光面側密封材33以及背面側密封材34一體化,得到太陽電池模組100。 Next, in step S130, a laminate is mounted to a laminate device, and heat treatment and lamination are performed for 30 minutes at a temperature of, for example, 140°C or more and 160°C or less. By this, each member of the laminated body is integrated through the light-receiving surface side sealing material 33 and the back surface side sealing material 34 to obtain the solar cell module 100.

之後,太陽電池模組100的外緣部遍及全周以框架40保持。 Thereafter, the outer edge of the solar cell module 100 is held by the frame 40 over the entire circumference.

如上述,第一實施形態的太陽電池單元10,在受光面匯流排電極12B設置複數的貫通孔60。藉此,太陽電池單元10中,能夠降低受光面匯流排電極12B中使用的電極材料使用量,能夠降低太陽電池單元10的製造成本。 As described above, in the solar battery cell 10 of the first embodiment, a plurality of through holes 60 are provided in the light-receiving surface bus electrode 12B. As a result, in the solar battery cell 10, the amount of electrode material used in the light-receiving surface bus electrode 12B can be reduced, and the manufacturing cost of the solar battery cell 10 can be reduced.

又,第一實施形態的太陽電池單元10,將受光面匯流排電極12B的第1區域61與背面連接電極13B配置在半導體基板11的面內對應的位置,以半導體基板11介於其間,在半導體基板11的厚度方向中相對。藉此,太陽電池單元10,可以抑制起因於製作太陽電池模組100時對太陽電池單元10焊接引線 20之太陽電池單元10彎曲,能夠使製作太陽電池模組100時太陽電池單元10彎曲引起的太陽電池單元10的破損率降低。 Furthermore, in the solar battery cell 10 of the first embodiment, the first region 61 of the light-receiving surface bus electrode 12B and the back connection electrode 13B are arranged at corresponding positions in the plane of the semiconductor substrate 11 with the semiconductor substrate 11 interposed therebetween. The semiconductor substrate 11 is opposed in the thickness direction. Thereby, the solar battery cell 10 can suppress the bending of the solar battery cell 10 caused by welding the lead 20 to the solar battery cell 10 when manufacturing the solar battery module 100, and can cause the solar battery cell 10 to bend when manufacturing the solar battery module 100. The breakage rate of the solar battery cell 10 is reduced.

又,本第一實施形態的太陽電池單元10中,受光面匯流排電極12B,遍及長邊方向形成相同寬度,第2方向中的兩端部是往第1方向平行的直線狀。受光面匯流排電極12B的寬度,與連接至受光面匯流排電極12B的寬度之遍及長邊方向形成相同寬度的引線20的寬度形成相同寬度。於是,製作太陽電池模組100時,第2方向中的受光面匯流排電極12B的兩側受光面匯流排電極的側面12Ba的位置與第2方向中的引線20的兩側引線的橫向方向的側面20b的位置,在半導體基板11的受光面11A的面內方向中位於相同位置。受光面匯流排電極的側面12Ba的位置與引線在橫向方向的側面20b的位置,在半導體基板11的受光面11A的面內方向中位於相同位置。藉此,太陽電池單元10,防止半導體基板11的受光面11A的面內方向中起因於從引線20露出的受光面匯流排電極12B之太陽電池單元10的受光量下降,可以防止光電轉換效率下降。 In the solar battery cell 10 of the first embodiment, the light-receiving surface bus electrode 12B has the same width in the longitudinal direction, and both end portions in the second direction are linear parallel to the first direction. The width of the light-receiving surface bus bar electrode 12B and the width of the lead 20 connected to the light-receiving surface bus bar electrode 12B having the same width in the longitudinal direction form the same width. Therefore, when manufacturing the solar cell module 100, the positions of the side surfaces 12Ba of the light-receiving surface bus electrode 12B on both sides of the light-receiving surface bus electrode 12B in the second direction and the lateral direction of the two sides of the lead 20 in the second direction The position of the side surface 20b is at the same position in the in-plane direction of the light receiving surface 11A of the semiconductor substrate 11. The position of the side surface 12Ba of the light-receiving bus bar electrode and the position of the side surface 20b of the lead in the lateral direction are at the same position in the in-plane direction of the light-receiving surface 11A of the semiconductor substrate 11. Thereby, the solar battery cell 10 prevents the decrease in the amount of light received by the solar battery cell 10 due to the light-receiving surface bus bar electrode 12B exposed from the lead 20 in the in-plane direction of the light-receiving surface 11A of the semiconductor substrate 11, and can prevent the photoelectric conversion efficiency from decreasing .

又,太陽電池單元10,因為可以抑制製作太陽電池模組100時太陽電池單元10彎曲,可以使用更薄的半導體基板11降低半導體基板11的成本,能夠對應廉價太陽電池單元10的實現。 In addition, the solar battery cell 10 can suppress the bending of the solar battery cell 10 when the solar battery module 100 is manufactured, and can use a thinner semiconductor substrate 11 to reduce the cost of the semiconductor substrate 11, and can correspond to the realization of the inexpensive solar battery cell 10.

因此,根據本第一實施形態的太陽電池單元10,達到能夠抑制起因於對太陽電池單元接合引線的太陽電池單元彎曲之效果。 Therefore, according to the solar battery cell 10 of the first embodiment, it is possible to suppress the bending of the solar battery cell due to the bonding wire to the solar battery cell.

[第二實施形態] [Second Embodiment]

第24圖係從受光面側所見本發明第二實施形態的太陽電池單元110之平面圖。第25圖係從面向受光面側的相反側的背面側所見本發明第二實施形態的太陽電池單元110之平面圖。第26圖係本發明第二實施形態的太陽電池模組的構成之主要部分剖面圖。第26圖,係對應第3圖的圖,以太陽電池單元110構成的本第二實施形態的太陽電池模組的主要部分剖面圖。第26圖中的太陽電池單元110的剖面圖,係第24圖中的XXIII-XXIII線中的主要部分剖面圖。第27圖係顯示本發明第二實施形態的太陽電池單元110的受光面電極112的構成條件圖。第28圖係顯示本發明第二實施形態的太陽電池單元110的背面連接電極113B的構成條件圖。 Fig. 24 is a plan view of the solar battery cell 110 of the second embodiment of the present invention seen from the light-receiving surface side. Fig. 25 is a plan view of the solar battery cell 110 according to the second embodiment of the present invention as viewed from the back side opposite to the light receiving surface side. Fig. 26 is a cross-sectional view of a main part of the configuration of a solar cell module according to a second embodiment of the present invention. FIG. 26 is a diagram corresponding to FIG. 3, and is a cross-sectional view of a main part of a solar battery module of the second embodiment configured with solar battery cells 110. FIG. The cross-sectional view of the solar battery cell 110 in FIG. 26 is a cross-sectional view of the main part in the line XXIII-XXIII in FIG. 24. FIG. 27 is a diagram showing the configuration conditions of the light-receiving surface electrode 112 of the solar battery cell 110 according to the second embodiment of the present invention. FIG. 28 is a diagram showing the configuration conditions of the back connection electrode 113B of the solar battery cell 110 according to the second embodiment of the present invention.

本第二實施形態的太陽電池單元110,取代由受光面柵電極12G與受光面匯流排電極12B構成的受光面電極12,包括由受光面柵電極12G與受光面匯流排電極112B構成的受光面電極112。又,太陽電池單元110,取代由背面集電電極13A與背面連接電極13B構成的背面電極13,包括由背面集電電極13A與背面連接電極113B構成的背面電極113。太陽電池單元110,除了受光面電極112以及背面電極113之外,具有與第一實施形態的太陽電池單元10相同的構成。關於太陽電池單元110中與第一實施形態的太陽電池單元10相同的構成,附上相同的符號,省略詳細的說明。 The solar cell 110 of the second embodiment replaces the light-receiving surface electrode 12 composed of the light-receiving surface grid electrode 12G and the light-receiving surface bus electrode 12B, and includes a light-receiving surface composed of the light-receiving surface grid electrode 12G and the light-receiving surface bus electrode 112B. Electrode 112. In addition, the solar battery cell 110 includes a rear electrode 113 composed of a rear collector electrode 13A and a rear connection electrode 113B instead of the rear electrode 13 composed of a rear collector electrode 13A and a rear connection electrode 13B. The solar battery cell 110 has the same configuration as the solar battery cell 10 of the first embodiment except for the light-receiving surface electrode 112 and the rear electrode 113. Regarding the configuration of the solar battery cell 110 that is the same as that of the solar battery cell 10 of the first embodiment, the same symbols are attached, and detailed descriptions are omitted.

受光面匯流排電極112B,與受光面匯流排電極12B的配置不同。背面連接電極113B,與背面連接電極13B的配置不同。The arrangement of the light receiving surface bus electrode 112B is different from that of the light receiving surface bus electrode 12B. The rear connection electrode 113B is different from the rear connection electrode 13B in arrangement.

受光面匯流排電極112B,在太陽電池單元110中設置4條。太陽電池單元110,具有長方形狀半導體基板11,有互相平行的一對端部,第1端邊部與第2端邊部。在此,第1端邊部,係第1方向中的太陽電池單元110的一方端部的一端101側的邊。又,第2端邊部,係第1方向中的太陽電池單元110的另一方端部,與一端101平行,在第1方向中與一端101相反側的另一端102側的邊。各個受光面匯流排電極112B中,在第1方向中從太陽電池單元110的一端101側往另一端102側,配置第1區域611、第1區域612、第1區域613、第1區域614、第1區域615、第1區域616、第1區域617、第1區域618。 Four solar battery cells 110 are provided in the light-receiving surface bus electrode 112B. The solar battery cell 110 has a rectangular semiconductor substrate 11, a pair of end portions parallel to each other, and a first end edge portion and a second end edge portion. Here, the first end side portion is the side on the one end 101 side of the one end portion of the solar battery cell 110 in the first direction. The second end side portion is the other end portion of the solar battery cell 110 in the first direction, parallel to the one end 101, and the other end 102 side opposite to the one end 101 in the first direction. In each light-receiving surface bus electrode 112B, the first region 611, the first region 612, the first region 613, and the first region 614 are arranged from the one end 101 side to the other end 102 side of the solar battery cell 110 in the first direction The first area 615, the first area 616, the first area 617, and the first area 618.

在此,第1方向中的太陽電池單元110的一端101側,係以引線20連接受光面匯流排電極112B的鄰接的太陽電池單元110配置側的端部側,對應第24到26圖中的太陽電池單元110的左側。太陽電池單元110中,以引線20連接受光面匯流排電極112B的鄰接的太陽電池單元110配置側的端部,係受光面側中互相連接側的端部。 Here, the one end 101 side of the solar battery cell 110 in the first direction is connected to the end portion side of the adjacent solar battery cell 110 arrangement side of the light-receiving surface bus bar electrode 112B by the lead 20, which corresponds to The left side of the solar battery unit 110. In the solar battery cell 110, the end of the light-receiving surface bus bar electrode 112B adjacent to the arrangement side of the solar battery cell 110 is connected by a lead 20, and is the end portion of the light-receiving surface side connected to each other.

又,第1方向中的太陽電池單元110的另一端102側,係以引線20連接受光面匯流排電極112B的鄰接的太陽電池單元110未配置側的端部側,對應第24到26圖中的太陽電池單元110的右側。太陽電池單元110中,以引線20連接受光面匯流排電極112B的鄰接的太陽電池單元110未配置側的端部,係受光面側中非互相連接側的端部。 In addition, the other end 102 side of the solar battery cell 110 in the first direction is connected to the end portion side of the adjacent solar battery cell 110 on the light-receiving surface bus bar electrode 112B on the undisposed side by the lead wire 20, corresponding to FIGS. 24 to 26 The right side of the solar cell unit 110. In the solar battery cell 110, the end of the adjacent solar battery cell 110 on the light-receiving surface bus electrode 112B on the non-arranged side is connected by a lead 20, and the end portion of the light-receiving surface side that is not connected to each other.

又,受光面匯流排電極112B的長邊方向中第1區域的長度即第1方向中的第1區域的長度,其第1區域611的長度 是第1區域長度A1、第1區域612的長度是第1區域長度A2、第1區域613的長度是第1區域長度A3、第1區域614的長度是第1區域長度A4、第1區域615的長度是第1區域長度A5、第1區域616的長度是第1區域長度A6、第1區域617的長度是第1區域長度A7、第1區域618的長度是第1區域長度A8。 In addition, the length of the first region in the longitudinal direction of the light-receiving surface bus electrode 112B is the length of the first region in the first direction, and the length of the first region 611 is the length of the first region A1 and the length of the first region 612 Is the length of the first area A2, the length of the first area 613 is the length of the first area A3, the length of the first area 614 is the length of the first area A4, the length of the first area 615 is the length of the first area A5, the length of the first area 616 Is the length of the first area A6, the length of the first area 617 is the length of the first area A7, and the length of the first area 618 is the length of the first area A8.

又,第1方向中,太陽電池單元110的一端101到第1區域611的距離是距離B1、第1區域611與第1區域612之間的距離是距離B2、第1區域612與第1區域613之間的距離是距離B3、第1區域613與第1區域614之間的距離是距離B4、第1區域614與第1區域615之間的距離是距離B5、第1區域615與第1區域616之間的距離是距離B6、第1區域616與第1區域617之間的距離是距離B7、第1區域617與第1區域618之間的距離是距離B8、第1區域618到太陽電池單元110的另一端102的距離是距離B9。 Further, in the first direction, the distance between the one end 101 of the solar battery cell 110 and the first region 611 is the distance B1, and the distance between the first region 611 and the first region 612 is the distance B2, the first region 612, and the first region The distance between 613 is the distance B3, the distance between the first area 613 and the first area 614 is the distance B4, the distance between the first area 614 and the first area 615 is the distance B5, the first area 615 and the first The distance between the regions 616 is the distance B6, the distance between the first region 616 and the first region 617 is the distance B7, the distance between the first region 617 and the first region 618 is the distance B8, the first region 618 to the sun The distance of the other end 102 of the battery cell 110 is the distance B9.

背面連接電極113B,在太陽電池單元110中設置4條。半導體基板11的面內對應第1區域61的位置上,設置與受光面匯流排電極112B的第1區域61的數量相同數量的背面連接電極113B。各個背面連接電極113B中,第1方向中從太陽電池單元110的一端101側往另一端102側,配置背面連接電極1131、背面連接電極1132、背面連接電極1133、背面連接電極1134、背面連接電極1135、背面連接電極1136、背面連接電極1137、背面連接電極1138。 The back surface is connected with electrodes 113B, and four solar battery cells 110 are provided. On the surface of the semiconductor substrate 11 corresponding to the first region 61, there are provided the same number of back surface connection electrodes 113B as the number of the first regions 61 of the light-receiving surface bus electrode 112B. In each back connection electrode 113B, the back connection electrode 1131, the back connection electrode 1132, the back connection electrode 1133, the back connection electrode 1134, and the back connection electrode are arranged from the one end 101 side to the other end 102 side of the solar battery cell 110 in the first direction 1135, back connection electrode 1136, back connection electrode 1137, back connection electrode 1138.

背面連接電極113B,配置在半導體基板11的面內對應第1區域61的位置。因此,半導體基板11的面內,背面連 接電極1131配置在與第1區域611對應的位置,背面連接電極1132配置在與第1區域612對應的位置,背面連接電極1133配置在與第1區域613對應的位置,背面連接電極1134配置在與第1區域614對應的位置,背面連接電極1135配置在與第1區域615對應的位置,背面連接電極1136配置在與第1區域616對應的位置,背面連接電極1137配置在與第1區域617對應的位置,背面連接電極1138配置在與第1區域618對應的位置。 The back surface connection electrode 113B is disposed at a position corresponding to the first region 61 in the surface of the semiconductor substrate 11. Therefore, in the surface of the semiconductor substrate 11, the back connection electrode 1131 is disposed at a position corresponding to the first region 611, the back connection electrode 1132 is disposed at a position corresponding to the first region 612, and the back connection electrode 1133 is disposed at the first region 613 Corresponding positions, the back connection electrode 1134 is arranged at a position corresponding to the first area 614, the back connection electrode 1135 is arranged at a position corresponding to the first area 615, and the back connection electrode 1136 is arranged at a position corresponding to the first area 616. The connection electrode 1137 is arranged at a position corresponding to the first region 617, and the back connection electrode 1138 is arranged at a position corresponding to the first region 618.

在此,上述的第1方向中太陽電池單元110的一端101側,係以引線20連接背面連接電極113B的鄰接太陽電池單元110未配置側的端部側。太陽電池單元110中,以引線20連接背面連接電極113B的鄰接太陽電池單元110未配置側的端部,係背面側中非互相連接側的端部。 Here, in the above-mentioned first direction, the one end 101 side of the solar battery cell 110 is connected to the end portion side of the rear surface connection electrode 113B on the non-arranged side of the solar battery cell 110 by the lead 20. In the solar battery cell 110, the end of the back surface connection electrode 113B adjacent to the non-arranged side of the solar battery cell 110 is connected by the lead 20, and is the end portion of the back surface side that is not connected to each other.

又,第1方向中太陽電池單元110的另一端102側,以引線20連接背面連接電極113B的鄰接太陽電池單元110配置側的端部側。太陽電池單元110中,以引線20連接背面連接電極113B的鄰接太陽電池單元110配置側的端部,係背面側中互相連接側的端部。 In addition, in the first direction, the other end 102 side of the solar battery cell 110 is connected to the end portion side of the rear surface connection electrode 113B adjacent to the arrangement side of the solar battery cell 110 with a lead 20. In the solar battery cell 110, the end of the back surface connection electrode 113B adjacent to the arrangement side of the solar battery cell 110 is connected by a lead 20, and is the end portion of the back surface side connected to each other.

又,第1方向中的背面連接電極113B的長度,其背面連接電極1131的長度是背面連接電極長度C1、背面連接電極1132的長度是背面連接電極長度C2、背面連接電極1133的長度是背面連接電極長度C3、背面連接電極1134的長度是背面連接電極長度C4、背面連接電極1135的長度是背面連接電極長度C5、背面連接電極1136的長度是背面連接電極長度C6、背面連接電極1137的長度是背面連接電極長度C7、背面 連接電極1138的長度是背面連接電極長度C8。 Further, the length of the back connection electrode 113B in the first direction, the length of the back connection electrode 1131 is the back connection electrode length C1, the length of the back connection electrode 1132 is the back connection electrode length C2, and the length of the back connection electrode 1133 is the back connection The electrode length C3, the length of the back connection electrode 1134 is the length of the back connection electrode C4, the length of the back connection electrode 1135 is the length of the back connection electrode C5, the length of the back connection electrode 1136 is the length of the back connection electrode C6, the length of the back connection electrode 1137 is The length of the back connection electrode C7 and the length of the back connection electrode 1138 are the back connection electrode length C8.

又,第1方向中,太陽電池單元110的一端101到背面連接電極1131的距離是距離D1、背面連接電極1131與背面連接電極1132之間的距離是距離D2、背面連接電極1132與背面連接電極1133之間的距離是距離D3、背面連接電極1133與背面連接電極1134之間的距離是距離D4、背面連接電極1134與背面連接電極1135之間的距離是距離D5、背面連接電極1135與背面連接電極1136之間的距離是距離D6、背面連接電極1136與背面連接電極1137之間的距離是距離D7、背面連接電極1137與背面連接電極1138之間的距離是距離D8、背面連接電極1138到太陽電池單元110的另一端102的距離是距離D9。 Further, in the first direction, the distance from one end 101 of the solar battery cell 110 to the back connection electrode 1131 is the distance D1, the distance between the back connection electrode 1131 and the back connection electrode 1132 is the distance D2, the back connection electrode 1132 and the back connection electrode The distance between 1133 is the distance D3, the distance between the back connection electrode 1133 and the back connection electrode 1134 is the distance D4, the distance between the back connection electrode 1134 and the back connection electrode 1135 is the distance D5, the back connection electrode 1135 is connected to the back The distance between the electrodes 1136 is the distance D6, the distance between the back connection electrode 1136 and the back connection electrode 1137 is the distance D7, the distance between the back connection electrode 1137 and the back connection electrode 1138 is the distance D8, the back connection electrode 1138 to the sun The distance of the other end 102 of the battery cell 110 is the distance D9.

半導體基板11,例如是156mm邊長的正方形狀。第1區域長度A1、第1區域長度A2、第1區域長度A3、第1區域長度A4、第1區域長度A5、第1區域長度A6以及第1區域長度A7,例如是5mm。第1區域長度A8,比第1區域長度A1到第1區域長度A7長,例如是11mm。距離B1以及距離B9,例如是0.5mm。距離B2以及距離B8,例如是7mm。距離B3、距離B4、距離B5、距離B6以及距離B7,例如是19mm。 The semiconductor substrate 11 has, for example, a square shape with a side length of 156 mm. The first area length A1, the first area length A2, the first area length A3, the first area length A4, the first area length A5, the first area length A6, and the first area length A7 are, for example, 5 mm. The first area length A8 is longer than the first area length A1 to the first area length A7, and is, for example, 11 mm. The distance B1 and the distance B9 are, for example, 0.5 mm. The distance B2 and the distance B8 are, for example, 7 mm. The distance B3, the distance B4, the distance B5, the distance B6, and the distance B7 are, for example, 19 mm.

背面連接電極長度C1、背面連接電極長度C2、背面連接電極長度C3、背面連接電極長度C4、背面連接電極長度C5、背面連接電極長度C6、背面連接電極長度C7、背面連接電極長度C8,例如是5mm。距離D9比距離D1長,有距離D1<距離D9的關係。例如距離D1=0.5mm、距離D9=6.5mm。 距離D2以及距離D8,例如是7mm。距離D3、距離D4、距離D5、距離D6以及距離D7,例如是19mm。 Back connection electrode length C1, back connection electrode length C2, back connection electrode length C3, back connection electrode length C4, back connection electrode length C5, back connection electrode length C6, back connection electrode length C7, back connection electrode length C8, for example 5mm. The distance D9 is longer than the distance D1, and there is a relationship of distance D1<distance D9. For example, the distance D1=0.5mm and the distance D9=6.5mm. The distance D2 and the distance D8 are, for example, 7 mm. The distance D3, the distance D4, the distance D5, the distance D6, and the distance D7 are, for example, 19 mm.

太陽電池單元110的受光面側,在第1方向中,最好設置受光面匯流排電極112B直到太陽電池單元110的兩端為止。另一方面,太陽電池單元110的背面側,特別在成為引線連接側的另一端102側,在第1方向中,最好加長太陽電池單元110的端面到背面連接電極113B的距離。 On the light-receiving surface side of the solar battery cell 110, in the first direction, it is preferable to provide the light-receiving surface bus bar electrode 112B up to both ends of the solar battery cell 110. On the other hand, on the back side of the solar battery cell 110, particularly on the other end 102 side that becomes the lead connection side, in the first direction, it is preferable to increase the distance from the end surface of the solar battery cell 110 to the back connection electrode 113B.

太陽電池單元110的受光面側,成為凸狀的曲面。即,因為使用包含鋁的電極材料的背面集電電極13A在太陽電池單元110的背面全體形成,起因於鋁與矽的熱膨脹係數的差之彎曲在太陽電池單元110中發生。一般,因為鋁的熱膨脹係數比矽的熱膨脹係數大,電極燒成的熱處理後,在太陽電池單元110中發生受光面側變凸的彎曲。 The light-receiving surface side of the solar battery cell 110 has a convex curved surface. That is, since the back surface collector electrode 13A using the electrode material containing aluminum is formed on the entire back surface of the solar battery cell 110, bending due to the difference in thermal expansion coefficient between aluminum and silicon occurs in the solar battery cell 110. In general, since the thermal expansion coefficient of aluminum is larger than that of silicon, after the heat treatment of electrode firing, the solar cell unit 110 undergoes a convex curvature on the light-receiving surface side.

於是,對太陽電池單元110焊接引線20之際,因為受光面是凸狀,太陽電池單元110與引線20之間,產生太陽電池單元110的受光面的垂直方向上剝離引線20的應力。於是,此剝離的應力,在太陽電池單元110端部變得最大。 Therefore, when the lead 20 is welded to the solar battery cell 110, since the light receiving surface is convex, stress between the solar battery cell 110 and the lead 20 peeling the lead 20 in the vertical direction of the light receiving surface of the solar battery cell 110 occurs. Therefore, this peeling stress becomes the largest at the end of the solar battery cell 110.

在此,在太陽電池單元110的受光面側,由於直到第1方向中的半導體基板11的兩端為止設置受光面匯流排電極112B,可以加強太陽電池單元110端部側的受光面匯流排電極112B與引線20之間的接合強度。即,如上述,直到第1方向中距離B1以及距離B9形成0.5mm的位置為止,形成受光面匯流排電極12G。於是,直到第1方向中的兩端受光面匯流排電極12G為止設置受光面匯流排電極112B,直到第1方 向中的半導體基板11兩端的位置為止設置受光面匯流排電極112B。藉此,太陽電池單元110,可以更加強端部側中的受光面匯流排電極112B與引線20之間的接合強度。於是,藉由第1方向中的受光面匯流排電極112B兩端以第1區域構成,可以加強端部側中的受光面匯流排電極112B與引線20之間的接合強度。第1方向中的受光面匯流排電極112B兩端以第2區域62構成時,因為受光面匯流排電極112B的端部只以連接部63與引線20焊接,接合強度下降。 Here, on the light-receiving surface side of the solar battery cell 110, since the light-receiving surface bus electrode 112B is provided up to both ends of the semiconductor substrate 11 in the first direction, the light-receiving surface bus electrode on the end side of the solar battery cell 110 can be strengthened The bonding strength between 112B and the lead 20. That is, as described above, the light-receiving surface bus electrode 12G is formed until the distance B1 and the distance B9 form a position of 0.5 mm in the first direction. Thus, the light-receiving surface bus electrodes 112B are provided until both ends of the light-receiving surface bus electrodes 12G in the first direction, and the light-receiving surface bus electrodes 112B are provided until the positions of both ends of the semiconductor substrate 11 in the first direction. With this, the solar battery cell 110 can further strengthen the bonding strength between the light-receiving surface bus bar electrode 112B and the lead 20 on the end side. Therefore, since both ends of the light-receiving surface bus electrode 112B in the first direction are constituted by the first regions, the bonding strength between the light-receiving surface bus electrode 112B and the lead 20 on the end side can be enhanced. When both ends of the light-receiving surface bus bar electrode 112B in the first direction are constituted by the second region 62, since the end portion of the light-receiving surface bus bar electrode 112B is welded to the lead wire 20 only by the connecting portion 63, the bonding strength decreases.

又,太陽電池單元110中,半導體基板11,具有長方形狀,具有第1方向中的太陽電池單元110的端部即第1端邊部以及第1方向中與第1端邊部相反側的太陽電池單元110的端部即第2端邊部。於是,相鄰第2端邊部的背面連接電極113B與第2端邊部的距離,比相鄰第1端邊部的背面連接電極113B與第1端邊部的距離長。 In addition, in the solar battery cell 110, the semiconductor substrate 11 has a rectangular shape, and has an end portion of the solar battery cell 110 in the first direction, that is, a first end edge portion, and a sun on the side opposite to the first end edge portion in the first direction The end of the battery cell 110 is the second end side. Therefore, the distance between the back connecting electrode 113B adjacent to the second end side and the second end side is longer than the distance between the back connecting electrode 113B adjacent to the first end side and the first end side.

上述第一實施形態的太陽電池單元10,在第1方向中,對第1方向中的中央位置具有對稱的構成。因此,太陽電池單元10之間以引線20連接時,如第3圖所示,引線20從圖中的左下到右上延續配置,連接相鄰的太陽電池單元10之間的構成,以及對於第3圖所示的相鄰的太陽電池單元10,引線20從圖中的左上到右下延續配置,連接相鄰的太陽電池單元10之間的構成是等價的構成。 The solar battery cell 10 of the first embodiment described above has a symmetrical configuration with respect to the center position in the first direction in the first direction. Therefore, when the solar battery cells 10 are connected by the lead 20, as shown in FIG. 3, the lead 20 continues to be arranged from the lower left to the upper right in the figure, connecting the configuration between adjacent solar battery cells 10, and for the third In the adjacent solar battery cells 10 shown in the figure, the lead wires 20 are continuously arranged from the upper left to the lower right in the drawing, and the configuration connecting the adjacent solar battery cells 10 is equivalent.

相對於此,本第二實施形態的太陽電池單元110,在第1方向中,對第1方向中的中央位置具有非對稱的構成。因此,太陽電池單元110之間以引線20連接時,如第26圖所 示,引線20從圖中的左下到右上延續配置,連接相鄰的太陽電池單元110之間的構成,以及對於第26圖所示的相鄰的太陽電池單元110,引線20從圖中的左上到右下延續配置,連接相鄰的太陽電池單元110之間的構成不是等價的構成。 On the other hand, the solar battery cell 110 of the second embodiment has an asymmetric configuration with respect to the center position in the first direction in the first direction. Therefore, when the solar cells 110 are connected by the lead 20, as shown in FIG. 26, the leads 20 continue to be arranged from the lower left to the upper right in the figure, connecting the configuration between adjacent solar cells 110, and for the 26th In the adjacent solar battery cells 110 shown in the figure, the leads 20 are continuously arranged from the upper left to the lower right in the drawing, and the configuration connecting the adjacent solar battery cells 110 is not an equivalent configuration.

在此,引線20從左下到右上延續配置,連接相鄰的太陽電池單元10之間的構成,如第3圖所示係左右配置的太陽電池單元10中,左側的太陽電池單元10的背面連接電極13B與右側的太陽電池單元10的受光面匯流排電極12B以引線20連接的構成。又,引線20從左上到右下延續配置,連接相鄰的太陽電池單元10之間的構成,係左右配置的太陽電池單元10中,左側的太陽電池單元10的受光面匯流排電極12B與右側的太陽電池單元10的背面連接電極13B以引線20連接的構成。 Here, the lead 20 continues to be arranged from the lower left to the upper right, and connects the structure between adjacent solar battery cells 10. In the solar battery cells 10 arranged on the left and right as shown in FIG. 3, the rear surface of the left solar battery cell 10 is connected The electrode 13B is connected to the light-receiving surface bus electrode 12B of the solar cell 10 on the right side by a lead 20. In addition, the lead wires 20 are continuously arranged from the upper left to the lower right, and are connected between adjacent solar battery cells 10. In the solar battery cells 10 arranged on the left and right, the light-receiving surface bus electrode 12B of the left solar battery cell 10 and the right side The back electrode 13B of the solar battery cell 10 is connected by a lead 20.

具有上述構成的太陽電池單元110的背面側,在太陽電池單元110中的背面側的互相連接側的端部即太陽電池單元110的另一端102側,由於加長太陽電池單元110的端面到背面連接電極113B的距離,即背面連接電極1138到太陽電池單元110的另一端102的距離D9,有以下的效果。 The back side of the solar battery cell 110 having the above configuration is connected to the back side of the solar battery cell 110 at the other end 102 side of the solar battery cell 110 at the end of the solar battery cell 110 connected to each other. The distance of the electrode 113B, that is, the distance D9 from the back connection electrode 1138 to the other end 102 of the solar cell 110 has the following effects.

如第26圖所示,本第二實施形態的太陽電池模組,以引線20連接複數的太陽電池單元110,從一方的太陽電池單元110a的背面側曲線狀連接引線20到另一方的太陽電池單元110b的受光面側。即,本第二實施形態的太陽電池模組,以第26圖中配置在左側的一方的太陽電池單元110的第2端邊部與第26圖中配置在右側的另一方的太陽電池單元110的第1端邊部對向的狀態配置,一方的太陽電池單元110與另一 方的太陽電池單元110在第1方向中相鄰。又,本第二實施形態的太陽電池模組,具有連接一方的太陽電池單元110的背面連接電極113B與另一方的太陽電池單元110的受光面匯流排電極112B之引線20。於是,引線20,連接一方的太陽電池單元110中在第2端邊部側的背面連接電極113B與另一方的太陽電池單元110中在第1端邊部側的受光面匯流排電極112B。 As shown in FIG. 26, the solar battery module of the second embodiment connects a plurality of solar battery cells 110 with a lead 20, and connects the lead 20 to the other solar battery in a curved shape from the back side of one solar battery cell 110a The light-receiving surface side of the unit 110b. That is, in the solar battery module of the second embodiment, the second end of the solar battery cell 110 disposed on the left in FIG. 26 and the other solar battery cell 110 disposed on the right in FIG. 26 The first end sides are arranged to face each other, and one of the solar battery cells 110 is adjacent to the other of the solar battery cells 110 in the first direction. In addition, the solar battery module of the second embodiment includes a lead wire 20 that connects the back connection electrode 113B of one solar battery cell 110 and the light receiving surface bus electrode 112B of the other solar battery cell 110. Then, the lead 20 connects the back connection electrode 113B on the second end side in one solar cell 110 and the light-receiving surface bus electrode 112B on the first end side in the other solar cell 110.

距離D1<距離D9,而且由於從太陽電池單元110a的背面側往旁邊的太陽電池單元110b的受光面側配置引線20,因為彎曲引線20為曲線狀的彎曲部20a的長度變長,引線20的彎曲部20a的彎曲半徑變大,降低對引線20的彎曲部20a的應力集中。尤其,雖然期待太陽電池模組10年以上的壽命而設計,但起因於成為受光面保護部31的受光面玻璃與引線20的線膨脹係數的差等,由於日夜的溫度循環引線20的彎曲部20a中產生重複應力而發生斷線,成為故障的主因。在此,藉由增大引線20的彎曲部20a的彎曲半徑,因為可以縮小施加於彎曲部20a的重複應力,可以實現長期可靠性優異的太陽電池模組。 Distance D1<distance D9, and since the lead 20 is arranged from the back side of the solar cell 110a to the light-receiving surface side of the solar cell 110b on the side, the length of the curved portion 20a of the curved lead 20 becomes longer due to the curved lead 20, The bending radius of the bent portion 20a becomes larger, and the stress concentration on the bent portion 20a of the lead 20 is reduced. In particular, although the solar cell module is expected to be designed for a life span of more than 10 years, it is caused by the difference in linear expansion coefficient between the light-receiving glass serving as the light-receiving surface protection portion 31 and the lead 20, and the bending portion of the lead 20 is cycled due to the temperature of the day and night. In 20a, repetitive stresses occur and disconnection occurs, which becomes the main cause of failure. Here, by increasing the bending radius of the bent portion 20a of the lead 20, the repetitive stress applied to the bent portion 20a can be reduced, and a solar cell module excellent in long-term reliability can be realized.

太陽電池單元110中,受光面側中非互相連接側的端部側以外的第1區域61,即另一端102側以外的第1區域61與背面連接電極113B,最好設置在受光面與背面中對應的位置。即,第1區域611到第1區域617,最好分別設置在背面連接電極1131到背面連接電極1137與太陽電池單元110的面內對應的位置。藉此,第1區域618與背面連接電極1138以外,受光面匯流排電極112B與引線20的固定位置以及利用焊接的背面連接電極113B與引線20的固定位置,在半導體基 板11的面內成為相同的位置。藉此,太陽電池單元110,與上述太陽電池單元10相同,可以抑制起因於製作太陽電池模組時對太陽電池單元110焊接引線20之太陽電池單元110的彎曲。因此,太陽電池單元110,能夠使製作太陽電池模組時太陽電池單元110的彎曲引起的太陽電池單元110破損率降低。 In the solar battery cell 110, the first region 61 other than the end side of the non-interconnecting side of the light receiving surface side, that is, the first region 61 other than the other end 102 side and the back surface connecting electrode 113B are preferably provided on the light receiving surface and the back surface The corresponding position in. That is, the first region 611 to the first region 617 are preferably provided at positions corresponding to the in-plane surfaces of the back connection electrode 1131 to the back connection electrode 1137 and the solar battery cell 110, respectively. With this, the fixed position of the light-receiving surface bus electrode 112B and the lead 20 and the fixed position of the back connection electrode 113B and the lead 20 by soldering are the same in the plane of the semiconductor substrate 11 except for the first region 618 and the back connection electrode 1138 s position. Thereby, the solar battery cell 110, like the above-mentioned solar battery cell 10, can suppress the bending of the solar battery cell 110 caused by welding the lead 20 to the solar battery cell 110 when manufacturing the solar battery module. Therefore, the solar battery cell 110 can reduce the damage rate of the solar battery cell 110 due to the bending of the solar battery cell 110 when the solar battery module is manufactured.

受光面匯流排電極112B中,第1方向的端部側中相鄰的第1區域間的間隔,最好比包含第1方向的中央部中相鄰的第1區域間的間隔之第1方向的內部側中相鄰的第1區域間的間隔短。即,受光面匯流排電極112B中,第1方向的端部側的第2區域的長度,最好比第1方向的內部側的第2區域的長度短。因此,最好形成(距離B2=距離D2=距離B8=距離D8)<(距離B3=距離D3、距離B4=距離D4、距離B5=距離D5、距離B6=距離D6、距離B7=距離D7)。 In the light-receiving surface bus electrode 112B, the interval between the adjacent first regions in the end portion in the first direction is preferably greater than the interval in the first direction including the interval between the adjacent first regions in the central portion in the first direction The distance between the adjacent first regions on the inner side of is short. That is, in the light-receiving surface bus electrode 112B, the length of the second region on the end side in the first direction is preferably shorter than the length of the second region on the inner side in the first direction. Therefore, it is better to form (distance B2=distance D2=distance B8=distance D8)<(distance B3=distance D3, distance B4=distance D4, distance B5=distance D5, distance B6=distance D6, distance B7=distance D7) .

如上述,對太陽電池單元110焊接引線20之際,太陽電池單元110,因為受光面側是凸狀,太陽電池單元110與引線20之間,太陽電池單元110的受光面的垂直方向上剝離引線20的應力在第1方向的端部側變最大。相對於此,藉由使第1方向的端部側的第2區域的長度比第1方向的內部側的第2區域的長度短,可以加強第1方向的端部側的受光面匯流排電極112B與引線20的接合強度。 As described above, when the lead 20 is welded to the solar battery unit 110, the solar battery unit 110 has a convex shape on the light-receiving surface side, and the lead is peeled between the solar battery unit 110 and the lead 20 in the vertical direction of the light-receiving surface of the solar battery unit 110 The stress of 20 becomes the largest on the end side in the first direction. On the other hand, by making the length of the second region on the end side in the first direction shorter than the length of the second region on the inner side in the first direction, the light-receiving surface bus electrode on the end side in the first direction can be strengthened The bonding strength of 112B and the lead 20.

如上述,本第二實施形態的太陽電池單元110中,除了第1區域618與背面連接電極1138以外,受光面匯流排電極112B與引線20的固定位置以及利用焊接的背面連接電極113B與引線20的固定位置,在半導體基板11的面內成為相 同位置。因此,太陽電池單元110,與上述太陽電池單元10相同,能夠使製作太陽電池模組時太陽電池單元110的彎曲引起的太陽電池單元110破損率降低。 As described above, in the solar battery cell 110 of the second embodiment, in addition to the first region 618 and the back connection electrode 1138, the fixed position of the light receiving surface bus electrode 112B and the lead 20 and the back connection electrode 113B and the lead 20 by welding The fixed position of is the same position in the plane of the semiconductor substrate 11. Therefore, the solar battery cell 110 can reduce the breakage rate of the solar battery cell 110 due to the bending of the solar battery cell 110 when the solar battery module is fabricated, similar to the above-described solar battery cell 10.

又,本第二實施形態的太陽電池單元110中,太陽電池單元110中的背面側的互相連接側的端部即太陽電池單元110的另一端102側,加長太陽電池單元110的端面到背面連接電極113B的距離。因此,將連接相鄰的太陽電池單元110的引線20彎曲成曲線狀的彎曲部20a的長度變長。因此,可以降低對引線20的彎曲部20a的應力集中,起因於成為受光面保護部31的受光面玻璃與引線20的線膨脹係數的差等,因為可以減小由於日夜的溫度循環施加至彎曲部20a的重複應力,可以實現長期可靠性優異的太陽電池模組。 Furthermore, in the solar battery cell 110 of the second embodiment, the end portion of the solar battery cell 110 on the interconnecting side, that is, the other end 102 side of the solar battery cell 110, extends the end surface of the solar battery cell 110 to the rear surface The distance of the electrode 113B. Therefore, the length of the bent portion 20a that bends the lead 20 connecting the adjacent solar battery cells 110 into a curved shape becomes longer. Therefore, the concentration of stress on the bent portion 20a of the lead 20 can be reduced due to the difference in linear expansion coefficient between the light-receiving surface glass serving as the light-receiving surface protection portion 31 and the lead 20, etc., because the temperature cycle applied to the bend due to day and night can be reduced The repeated stress of the portion 20a can realize a solar cell module having excellent long-term reliability.

[第三實施形態] [Third Embodiment]

第29圖係本發明第三實施形態的太陽電池單元210構成的剖面圖。第29圖,係通過貫通孔60並沿著受光面電極212的長邊方向的剖面,為了容易理解省略背面集電電極13A的圖示。第30圖係顯示本發明第三實施形態的太陽電池單元210的受光面電極212的構成條件圖。第31圖係顯示本發明第三實施形態的太陽電池單元210的背面連接電極213B的構成條件圖。 FIG. 29 is a cross-sectional view showing the structure of a solar battery cell 210 according to a third embodiment of the present invention. FIG. 29 is a cross section through the through-hole 60 and along the longitudinal direction of the light-receiving surface electrode 212, and the illustration of the rear collector electrode 13A is omitted for easy understanding. FIG. 30 is a diagram showing the configuration conditions of the light-receiving surface electrode 212 of the solar battery cell 210 according to the third embodiment of the present invention. FIG. 31 is a diagram showing the configuration conditions of the back connection electrode 213B of the solar battery cell 210 according to the third embodiment of the present invention.

本第三實施形態的太陽電池單元210,包括取代受光面匯流排電極112B,具有受光面匯流排電極212B的受光面電極212。又,本第三實施形態的太陽電池單元210,包括取代背面連接電極113B具有背面連接電極213B的背面電極213。太陽電池單元210,除了受光面電極212以及背面電極 213以外,具有與第二實施形態的太陽電池單元110相同的構成。關於太陽電池單元210中與第一實施形態的太陽電池單元10或第二實施形態的太陽電池單元110相同的構成,附上相同的符號,省略詳細的說明。 The solar cell 210 of the third embodiment includes a light-receiving surface electrode 212 instead of the light-receiving surface bus electrode 112B, and a light-receiving surface bus electrode 212B. In addition, the solar battery cell 210 of the third embodiment includes a back electrode 213 having a back connection electrode 213B instead of the back connection electrode 113B. The solar cell 210 has the same configuration as the solar cell 110 of the second embodiment except for the light-receiving surface electrode 212 and the back electrode 213. Regarding the configuration of the solar battery cell 210 that is the same as that of the solar battery cell 10 of the first embodiment or the solar battery cell 110 of the second embodiment, the same symbols are attached, and detailed descriptions are omitted.

受光面匯流排電極212B,與受光面匯流排電極112B的配置不同。背面連接電極213B,與背面連接電極113B的配置不同。 The arrangement of the light receiving surface bus electrode 212B is different from that of the light receiving surface bus electrode 112B. The rear connection electrode 213B is different from the rear connection electrode 113B in arrangement.

受光面匯流排電極212B,與受光面匯流排電極112B相同,在太陽電池單元210中設置4條。又,各個受光面匯流排電極212B中,與受光面匯流排電極112B相同,沿著第1方向配置第1區域611、第1區域612、第1區域613、第1區域614、第1區域615、第1區域616、第1區域617、第1區域618。背面連接電極213B,與背面連接電極113B相同,沿著第1方向,遍及太陽電池單元210的大致全長分散8處配置成間隔踏腳石狀,設置成4列。 The light-receiving surface bus electrode 212B is the same as the light-receiving surface bus electrode 112B, and four solar battery cells 210 are provided. In addition, in each light-receiving surface bus electrode 212B, the first region 611, the first region 612, the first region 613, the first region 614, and the first region 615 are arranged along the first direction in the same manner as the light-receiving surface bus electrode 112B. , The first area 616, the first area 617, the first area 618. The back connection electrodes 213B are arranged in four steps along the first direction, and are arranged at intervals of 8 steps along the first direction over the substantially entire length of the solar cell 210.

半導體基板11的面內對應第1區域61的位置上,設置與受光面匯流排電極212B的第1區域61的數量相同數量的背面連接電極213B。 On the surface of the semiconductor substrate 11 corresponding to the first region 61, the back surface connection electrodes 213B are provided in the same number as the number of the first regions 61 of the light-receiving surface bus electrode 212B.

於是,受光面匯流排電極212B中位於第1方向中的端部側以外即第1方向中位於內部側之第1區域61與背面連接電極213B,從半導體基板11的面內方向的垂直方向透視半導體基板11時,第1方向中的中心位置位於相同位置。即,第1方向中,第1區域612的中心位置,與背面連接電極1132的中心位置位於相同位置。關於第1區域613的中心位置與背 面連接電極1133的中心位置、第1區域614的中心位置與背面連接電極1134的中心位置、第1區域615的中心位置與背面連接電極1135的中心位置、第1區域616的中心位置與背面連接電極1136的中心位置以及第1區域617的中心位置與背面連接電極1137的中心位置也相同。 Then, the first region 61 of the light-receiving surface bus bar electrode 212B located outside the end side in the first direction, that is, located on the inner side in the first direction, and the back surface connecting electrode 213B are seen through in the vertical direction of the in-plane direction of the semiconductor substrate 11 In the case of the semiconductor substrate 11, the center position in the first direction is at the same position. That is, in the first direction, the center position of the first region 612 is located at the same position as the center position of the back connection electrode 1132. The center position of the first area 613 and the center position of the back connection electrode 1133, the center position of the first area 614 and the center position of the back connection electrode 1134, the center position of the first area 615 and the center position of the back connection electrode 1135, The center position of the first region 616 is the same as the center position of the back connection electrode 1136 and the center position of the first region 617 is the same as the center position of the back connection electrode 1137.

另一方面,受光面匯流排電極212B中位於第1方向中的端部側的第1區域611與背面連接電極1131,從半導體基板11的面內方向的垂直方向透視半導體基板11時,第1方向中的中心位置不是位於相同位置。即,第1方向中,第1區域611的中心位置,與背面連接電極1131的中心位置不同。同樣地,第1方向中,第1區域618的中心位置,與背面連接電極1138的中心位置不同。 On the other hand, when the first region 611 located on the end side in the first direction of the light-receiving surface bus bar electrode 212B is connected to the back electrode 1131, and the semiconductor substrate 11 is seen through from the vertical direction of the in-plane direction of the semiconductor substrate 11, the first The center position in the direction is not at the same position. That is, in the first direction, the center position of the first region 611 is different from the center position of the back connection electrode 1131. Similarly, in the first direction, the center position of the first region 618 is different from the center position of the back connection electrode 1138.

第1方向的內部側中相鄰的2個第1區域61的配置間距,係全部相同的配置間距。又,第1方向的內部側中相鄰的2個背面連接電極213B的配置間距,係全部相同的配置間距。於是,第1方向的內部側中相鄰的2個第1區域61的配置間距與第1方向的內部側中相鄰的2個背面連接電極213B的配置間距,是相同的配置間距。第1區域61的配置間距,是第1方向中第1區域61的中心位置間的距離。背面連接電極213B的配置間距,是第1方向中背面連接電極213B的中心位置間的距離。 The arrangement pitch of two adjacent first regions 61 on the inner side in the first direction is the same arrangement pitch. In addition, the arrangement pitch of two adjacent back surface connection electrodes 213B on the inner side in the first direction is the same arrangement pitch. Therefore, the arrangement pitch of two adjacent first regions 61 on the inner side in the first direction is the same as the arrangement pitch of two adjacent back surface connection electrodes 213B on the inner side in the first direction. The arrangement pitch of the first regions 61 is the distance between the center positions of the first regions 61 in the first direction. The arrangement pitch of the back connection electrodes 213B is the distance between the center positions of the back connection electrodes 213B in the first direction.

即,第1區域612與第1區域613的配置間距、第1區域613與第1區域614的配置間距、第1區域614與第1區域615的配置間距、第1區域615與第1區域616的配置間距、第1區域616與第1區域617的配置間距、背面連接電 極1132與背面連接電極1133的配置間距、背面連接電極1133與背面連接電極1134的配置間距、背面連接電極1134與背面連接電極1135的配置間距、背面連接電極1135與背面連接電極1136的配置間距、背面連接電極1136與背面連接電極1137的配置間距,是相同的配置間距。 That is, the arrangement pitch of the first area 612 and the first area 613, the arrangement pitch of the first area 613 and the first area 614, the arrangement pitch of the first area 614 and the first area 615, the first area 615 and the first area 616 Arrangement pitch, the arrangement pitch of the first region 616 and the first region 617, the arrangement pitch of the back connection electrode 1132 and the back connection electrode 1133, the arrangement pitch of the back connection electrode 1133 and the back connection electrode 1134, the back connection electrode 1134 and the back connection The arrangement pitch of the electrode 1135, the arrangement pitch of the back connection electrode 1135 and the back connection electrode 1136, and the arrangement pitch of the back connection electrode 1136 and the back connection electrode 1137 are the same arrangement pitch.

第1區域長度A2、第1區域長度A3、第1區域長度A4、第1區域長度A5、第1區域長度A6以及第1區域長度A7,是相同的。背面連接電極長度C2、背面連接電極長度C3、背面連接電極長度C4、背面連接電極長度C5、背面連接電極長度C6以及背面連接電極長度C7,是相同的。於是,第1區域長度A2比背面連接電極長度C2長。 The first area length A2, the first area length A3, the first area length A4, the first area length A5, the first area length A6, and the first area length A7 are the same. The back connection electrode length C2, the back connection electrode length C3, the back connection electrode length C4, the back connection electrode length C5, the back connection electrode length C6, and the back connection electrode length C7 are the same. Therefore, the length A2 of the first region is longer than the length C2 of the back connection electrode.

距離B3、距離B4、距離B5、距離B6以及距離B7,是相同的。距離D3、距離D4、距離D5、距離D6以及距離D7是相同的。於是,距離D3比距離B3長。 The distance B3, the distance B4, the distance B5, the distance B6, and the distance B7 are the same. The distance D3, the distance D4, the distance D5, the distance D6, and the distance D7 are the same. Thus, the distance D3 is longer than the distance B3.

因此,(第1區域長度A2+距離B3)=(第1區域長度A3+距離B4)=(第1區域長度A4+距離B5)=(第1區域長度A5+距離B6)=(第1區域長度A6+距離B7)=(背面連接電極長度C2+距離D3)=(背面連接電極長度C3+距離D4)=(背面連接電極長度C4+距離D5)=(背面連接電極長度C5+距離D6)=(背面連接電極長度C6+距離D7)。 Therefore, (first area length A2+distance B3)=(first area length A3+distance B4)=(first area length A4+distance B5)=(first area length A5+distance B6)=(first area length A6+distance B7) ) = (Back connection electrode length C2+ distance D3) = (back connection electrode length C3 + distance D4) = (back connection electrode length C4 + distance D5) = (back connection electrode length C5 + distance D6) = (back connection electrode length C6 + distance D7) ).

因為使第1方向中第1區域612的中心位置與第1方向中背面連接電極1132的中心位置一致,第1方向中,太陽電池單元210的一端101到第1區域612的中心位置的距離與太陽電池單元210的一端101到背面連接電極1132的中心 位置的距離,形成相同的距離。即,形成(距離B1+第1區域長度A1+距離B2+第1區域長度A2/2)=(距離D1+背面連接電極長度C1+距離D2+背面連接電極長度C2/2)。 Because the center position of the first region 612 in the first direction matches the center position of the back connection electrode 1132 in the first direction, the distance between the end 101 of the solar cell 210 and the center position of the first region 612 in the first direction is The distance from one end 101 of the solar battery cell 210 to the center position of the back connection electrode 1132 forms the same distance. That is, (distance B1+first region length A1+distance B2+first region length A2/2)=(distance D1+back connection electrode length C1+distance D2+ back connection electrode length C2/2) is formed.

因為使第1方向中第1區域617的中心位置與第1方向中背面連接電極1137的中心位置一致,第1方向中,太陽電池單元210的另一端102到第1區域617的中心位置的距離與太陽電池單元210的另一端102到背面連接電極1137的中心位置的距離,形成相同的距離。即,形成(距離B9+第1區域長度A8+距離B8+第1區域長度A7/2)=(距離D9+背面連接電極長度C8+距離D8+背面連接電極長度C7/2)。 Since the center position of the first region 617 in the first direction matches the center position of the back connection electrode 1137 in the first direction, the distance from the other end 102 of the solar cell 210 to the center position of the first region 617 in the first direction The distance from the other end 102 of the solar battery cell 210 to the center of the back connection electrode 1137 is the same distance. That is, (distance B9+first region length A8+distance B8+first region length A7/2)=(distance D9+back connection electrode length C8+distance D8+back connection electrode length C7/2) is formed.

第1區域長度A1,比背面連接電極長度C1長。從半導體基板11的面內方向的垂直方向透視半導體基板11時,第1方向中,背面連接電極1131,配置在第1區域611的內側重疊第1區域611的位置,即第1方向中,背面連接電極1131,在第1區域611內包含的位置上。 The length A1 of the first region is longer than the length C1 of the back connection electrode. When the semiconductor substrate 11 is seen through from the vertical direction of the in-plane direction of the semiconductor substrate 11, the back surface connection electrode 1131 is arranged inside the first region 611 to overlap the first region 611 in the first direction, that is, in the first direction, the back surface The connection electrode 1131 is at a position included in the first area 611.

第1區域長度A8,比背面連接電極長度C8長。從半導體基板11的面內方向的垂直方向透視半導體基板11時,第1方向中,背面連接電極1138,配置在第1區域618的內側重疊第1區域618的位置,即第1方向中,背面連接電極1138,在第1區域618內包含的位置上。 The length A8 of the first region is longer than the length C8 of the back connection electrode. When the semiconductor substrate 11 is seen through from the vertical direction of the in-plane direction of the semiconductor substrate 11, the back surface connection electrode 1138 is arranged inside the first region 618 to overlap the first region 618 in the first direction, that is, in the first direction, the back surface The connection electrode 1138 is at a position included in the first region 618.

背面連接電極長度C1及背面連接電極長度C8,與背面連接電極長度C2相同。 The back connection electrode length C1 and the back connection electrode length C8 are the same as the back connection electrode length C2.

第1方向中,第1方向的端部側中相鄰的2個第1區域61的配置間距,比第1方向的內部側中相鄰的2個第1區 域61的配置間距短。即,受光面匯流排電極212B中,第1方向的端部側中相鄰的2個第1區域61間的間隔,比包含第1方向的中央部中相鄰的2個第1區域61間的間隔之第1方向的內部側中相鄰的2個第1區域61間的間隔短。因此,距離B2以及距離B8,比距離B3、距離B4、距離B5、距離B6以及距離B7短。 In the first direction, the arrangement pitch of two adjacent first regions 61 on the end side in the first direction is shorter than the arrangement pitch of two adjacent first regions 61 on the inner side in the first direction. That is, in the light-receiving surface bus bar electrode 212B, the distance between two adjacent first regions 61 on the end side in the first direction is greater than that between two adjacent first regions 61 on the central part in the first direction The interval between two adjacent first regions 61 on the inner side in the first direction of the interval is shorter. Therefore, the distances B2 and B8 are shorter than the distances B3, B4, B5, B6, and B7.

第1方向中,第1方向的端部側中相鄰的2個背面連接電極213B的配置間距,比第1方向的內部側中相鄰的2個背面連接電極213B的配置間距短。即,一列的背面連接電極213B中,第1方向的端部側中相鄰的2個背面連接電極213B間的間隔,比包含第1方向的中央部中相鄰的2個背面連接電極213B間的間隔之第1方向的內部側中相鄰的2個背面連接電極213B間的間隔短。因此,距離D2以及距離D8,比距離D3、距離D4、距離D5、距離D6以及距離D7短。 In the first direction, the arrangement pitch of the two adjacent back surface connection electrodes 213B on the end side in the first direction is shorter than the arrangement pitch of the two adjacent back surface connection electrodes 213B on the inner side in the first direction. In other words, the distance between two adjacent rear connection electrodes 213B on the end side in the first direction in the rear connection electrodes 213B in a row is greater than that between the two adjacent rear connection electrodes 213B in the central portion in the first direction The interval between two adjacent back surface connection electrodes 213B on the inner side in the first direction of the interval is shorter. Therefore, the distances D2 and D8 are shorter than the distances D3, D4, D5, D6, and D7.

本第三實施形態的太陽電池單元210中,第1方向中的受光面匯流排電極212B的第1區域長度的合計,比第二實施形態的太陽電池單元110的受光面匯流排電極112B的第1區域長度的合計大幅加長。即,如第30圖所示,太陽電池單元210中的第1區域長度的合計,即第1區域長度A1到第1區域長度A8的合計,係76mm。另一方面,如第27圖所示,第二實施形態的太陽電池單元110的受光面匯流排電極112B中的第1區域長度的合計,即第1區域長度A1到第1區域長度A8的合計,係46mm。 In the solar battery cell 210 of the third embodiment, the total length of the first region of the light-receiving surface bus electrode 212B in the first direction is higher than that of the light-receiving surface bus electrode 112B of the solar battery cell 110 of the second embodiment. 1 The total length of the area is greatly increased. That is, as shown in FIG. 30, the total length of the first region in the solar battery cell 210, that is, the total length of the first region A1 to the first region A8 is 76 mm. On the other hand, as shown in FIG. 27, the total length of the first region in the light-receiving surface bus electrode 112B of the solar cell 110 of the second embodiment, that is, the total length of the first region A1 to the length of the first region A8 , Department 46mm.

對受光面匯流排電極212B焊接引線20,主要進行第1區域61與引線20的焊接。因此,第1方向中受光面匯流 排電極212B與引線20的連接區域的長度,近似第1區域長度的合計。因此,第1區域長度的合計,可想為第1方向中受光面匯流排電極212B與引線20的連接區域的長度。 The lead 20 is welded to the light-receiving surface bus bar electrode 212B, and the first region 61 and the lead 20 are mainly welded. Therefore, the length of the connection area between the light-receiving surface bus electrode 212B and the lead 20 in the first direction is approximately the total length of the first area. Therefore, the total length of the first region can be thought of as the length of the connection region between the light-receiving surface bus electrode 212B and the lead 20 in the first direction.

又,本第三實施形態的太陽電池單元210中,第1方向中的受光面匯流排電極212B的第1區域長度的合計,比第1方向中背面連接電極213B長度的合計長。因此,本第三實施形態的太陽電池單元210中,第1方向中受光面匯流排電極212B與引線20的連接區域的長度,比第1方向中背面連接電極213B與引線20的連接區域的長度長。即,如第31圖所示,背面連接電極長度C1到背面連接電極長度C8的合計,係48mm。另一方面,如第30圖所示,第1區域長度的合計,即第1區域長度A1到第1區域長度A8的合計,係76mm。 Furthermore, in the solar battery cell 210 of the third embodiment, the total length of the first region of the light-receiving surface bus bar electrode 212B in the first direction is longer than the total length of the back connection electrode 213B in the first direction. Therefore, in the solar battery cell 210 of the third embodiment, the length of the connection region of the light-receiving surface bus electrode 212B and the lead 20 in the first direction is longer than the length of the connection region of the back connection electrode 213B and the lead 20 in the first direction long. That is, as shown in FIG. 31, the total length of the back connection electrode C1 to the back connection electrode length C8 is 48 mm. On the other hand, as shown in FIG. 30, the total length of the first area, that is, the total length of the first area A1 to the length of the first area A8 is 76 mm.

太陽電池單元210,因為使用包含鋁的電極材料的背面集電電極13A在太陽電池單元210的背面全體形成,電極燒成的熱處理後,在太陽電池單元210中發生受光面側變凸的彎曲。因此,凸狀曲面的太陽電池單元210的受光面側,比太陽電池單元210的背面側施加更多電極與引線20之間剝離引線20的應力。 The solar battery cell 210 is formed on the entire back surface of the solar battery cell 210 by using the back-side collector electrode 13A using an electrode material containing aluminum. After the heat treatment of the electrode firing, the solar battery cell 210 has a convex curvature on the light-receiving surface side. Therefore, on the light-receiving surface side of the convexly curved solar battery cell 210, more stress for peeling the lead 20 between the electrode and the lead 20 is applied than the back surface side of the solar battery cell 210.

太陽電池單元210中,形成第1方向中的受光面匯流排電極212B與引線20的連接區域的長度,比第1方向中的背面連接電極213B的長度長。於是,太陽電池單元210中,形成第1方向中的受光面匯流排電極212B與引線20的連接區域的長度,比第二實施形態的太陽電池單元110中第1方向中的受光面匯流排電極112B與引線20的連接區域的長度長。因此,太陽電池單元210,由於確保第1方向中的受光面匯流排電極212B與 引線20的連接區域的長度長,提高第1方向中的受光面匯流排電極212B與引線20的接合強度,可以抑制引線20的剝離。 In the solar battery cell 210, the length of the connection region forming the light-receiving surface bus electrode 212B and the lead 20 in the first direction is longer than the length of the back connection electrode 213B in the first direction. Therefore, in the solar battery cell 210, the length of the connection area where the light-receiving surface bus electrode 212B in the first direction and the lead 20 are formed is longer than that of the light-receiving surface bus electrode in the first direction in the solar battery cell 110 of the second embodiment The length of the connection area between 112B and the lead 20 is long. Therefore, in the solar battery cell 210, since the length of the connection area of the light-receiving surface bus electrode 212B and the lead 20 in the first direction is long, and the bonding strength of the light-receiving surface bus electrode 212B and the lead 20 in the first direction can be improved, The peeling of the lead 20 is suppressed.

另一方面,塗佈以及燒成使用包含銀的電極材料之銀膏而形成的銀膏電極之背面連接電極213B,比銀膏電極之受光面電極212,在燒成處理後的狀態中,形成玻璃成分較多的構成。銀膏電極,在燒成處理後,大半部分以銀與玻璃構成。銀膏電極中,銀具有使電流流動的功能。銀膏電極中,玻璃具有維持半導體基板11與電極的接合強度的機能。 On the other hand, the back connection electrode 213B of the silver paste electrode formed by applying and firing the silver paste containing the silver electrode material is formed in a state after firing than the light-receiving surface electrode 212 of the silver paste electrode A composition with a large glass composition. After firing, the silver paste electrode is mostly made of silver and glass. In the silver paste electrode, silver has a function of flowing current. In the silver paste electrode, glass has a function of maintaining the bonding strength between the semiconductor substrate 11 and the electrode.

比較銀膏電極的受光面電極212與銀膏電極的背面連接電極213B時,受光面電極212,為了降低電極中的電阻,使電極材料中銀的比率比背面連接電極213B高。受光面電極212中,為了降低電極中的電阻,最好盡量提高電極材料中銀的比率。另一方面,在太陽電池單元210的背面側,根據半導體基板11的集電功能,由使用包含鋁的電極材料的背面集電電極13A擔當。因此,背面連接電極213B中,藉由降低電極材料中銀的比率,提高電極材料中玻璃成分的比率,可以提高與半導體基板11的接合強度。 When comparing the light-receiving surface electrode 212 of the silver paste electrode with the back surface connection electrode 213B of the silver paste electrode, the light-receiving surface electrode 212 has a higher ratio of silver in the electrode material than the back connection electrode 213B in order to reduce the resistance in the electrode. In the light-receiving surface electrode 212, in order to reduce the resistance in the electrode, it is preferable to increase the silver ratio in the electrode material as much as possible. On the other hand, on the back side of the solar battery cell 210, the current collector electrode 13A using an electrode material containing aluminum is responsible for the current collecting function of the semiconductor substrate 11. Therefore, in the back connection electrode 213B, by reducing the ratio of silver in the electrode material and increasing the ratio of the glass component in the electrode material, the bonding strength with the semiconductor substrate 11 can be improved.

因此,太陽電池單元210,藉由使燒成處理後的狀態的背面連接電極213B中在電極材料中的玻璃成分的比率,比燒成處理後的狀態的受光面電極212中在電極材料中的玻璃成分的比率更高,能夠維持半導體基板11與背面連接電極213B之間的接合強度在背面連接電極213B不剝離的高水準。藉此,太陽電池單元210,即使縮短第1方向中背面連接電極213B的長度合計,比第1方向中受光面匯流排電極212B的第1區域 長度的合計更短,也能夠維持半導體基板11與背面連接電極213B之間的接合強度在背面連接電極213B不剝離的程度。 Therefore, in the solar battery cell 210, the ratio of the glass component in the electrode material in the back connection electrode 213B in the fired state is higher than that in the electrode material in the light-receiving surface electrode 212 in the fired state. The ratio of the glass component is higher, and the bonding strength between the semiconductor substrate 11 and the back connection electrode 213B can be maintained at a high level without peeling off the back connection electrode 213B. Thereby, even if the total length of the back connection electrode 213B in the first direction is shorter than the total length of the first region of the light-receiving bus bar electrode 212B in the first direction, the solar cell unit 210 can maintain the semiconductor substrate 11 and The bonding strength between the back connection electrodes 213B is to the extent that the back connection electrodes 213B do not peel off.

如上述,本第三實施形態的太陽電池單元210中,受光面匯流排電極212B的第1區域61與背面連接電極213B,配置在半導體基板11面內對應的位置。因此,太陽電池單元210,與上述太陽電池單元10以及太陽電池單元110相同,能夠使製作太陽電池模組時的太陽電池單元210彎曲引起的太陽電池單元210破損率降低。 As described above, in the solar battery cell 210 of the third embodiment, the first region 61 of the light-receiving surface bus bar electrode 212B and the back surface connecting electrode 213B are arranged at corresponding positions in the plane of the semiconductor substrate 11. Therefore, the solar battery cell 210, like the solar battery cell 10 and the solar battery cell 110 described above, can reduce the damage rate of the solar battery cell 210 due to the bending of the solar battery cell 210 when the solar battery module is manufactured.

又,本第三實施形態的太陽電池單元210中,在太陽電池單元210中的背面側中互相連接側的端部之太陽電池單元210的另一端102側,加長太陽電池單元210的端面到背面連接電極213B的距離。藉此,與第二實施形態的太陽電池單元110相同,可以降低對引線20的彎曲部20a的應力集中,因為起因於成為受光面保護部31的受光面玻璃與引線20的線膨脹係數差等,由於日夜的溫度循環對彎曲部20a施加的重複應力可以縮小,可以實現長期可靠性優異的太陽電池模組。 Furthermore, in the solar battery cell 210 of the third embodiment, at the other end 102 side of the solar battery cell 210 at the interconnecting end of the solar battery cell 210 on the back side, the end surface of the solar battery cell 210 is extended to the back The distance to connect the electrode 213B. Thereby, as in the solar battery cell 110 of the second embodiment, the stress concentration on the bent portion 20a of the lead 20 can be reduced because of the difference in linear expansion coefficient between the light-receiving glass serving as the light-receiving surface protection portion 31 and the lead 20, etc. Since the repetitive stress applied to the bent portion 20a by the temperature cycle during the day and night can be reduced, a solar cell module with excellent long-term reliability can be realized.

又,本第三實施形態的太陽電池單元210中,使第1方向中受光面匯流排電極212B與引線20的連接區域長度,比第1方向中背面連接電極213B與引線20的連接區域長度長。因此,太陽電池單元210,藉由確保第1方向中受光面匯流排電極212B與引線20的連接區域長度長,提高第1方向中受光面匯流排電極212B與引線20的接合強度,可以抑制引線20的剝離。 Furthermore, in the solar battery cell 210 of the third embodiment, the length of the connection area of the light receiving surface bus electrode 212B and the lead 20 in the first direction is longer than the length of the connection area of the back connection electrode 213B and the lead 20 in the first direction . Therefore, by ensuring that the length of the connection area of the light-receiving surface bus electrode 212B and the lead 20 in the first direction is long, the bonding strength of the light-receiving surface bus electrode 212B and the lead 20 in the first direction can be increased to suppress the lead 20 peel.

顯示以上的實施形態的構成,顯示本發明內容的一例,也能夠讓實施形態的技術之間組合,也能夠與其它眾所 周知的技術組合,在不脫離本發明的主旨的範圍內,也能夠省略、變更一部分構成。 The structure of the above embodiment is shown, and an example of the content of the present invention is shown. It is also possible to combine the technologies of the embodiments and other well-known technologies. It can also be omitted without departing from the scope of the gist of the present invention. Change part of the structure.

12B‧‧‧受光面匯流排電極 12B‧‧‧Receiving surface bus electrode

60‧‧‧貫通孔 60‧‧‧Through hole

61‧‧‧第1區域 61‧‧‧ Region 1

62‧‧‧第2區域 62‧‧‧ Region 2

63‧‧‧連接部 63‧‧‧Connect

X、Y‧‧‧方向 X, Y‧‧‧ direction

Claims (12)

一種太陽電池單元,其特徵在於包括:半導體基板,具有pn接合;受光面匯流排電極,在上述半導體基板中的受光面側往第1方向延伸設置;以及複數的背面連接電極,在面向上述半導體基板中的上述受光面的相反側的背面側,沿著上述第1方向分散配置設置;其中,上述受光面匯流排電極,沿著上述第1方向設置往上述受光面匯流排電極的厚度方向貫通的複數的貫通孔;上述背面連接電極,配置在上述半導體基板的厚度方向中相對上述受光面匯流排電極中除了複數的貫通孔之外的區域的位置上,其中,上述受光面匯流排電極包括:複數的第1區域,在上述第1方向中,不設置上述貫通孔;以及複數的第2區域,在上述第1方向中,設置上述貫通孔;其中,上述背面連接電極,配置在上述複數的第1區域與上述半導體基板的厚度方向中相對的位置上,其中,上述第1方向的端部側相鄰的上述第1區域間的間隔,比上述第1方向的內部側相鄰的上述第1區域間的間隔短。 A solar cell unit comprising: a semiconductor substrate having a pn junction; a light-receiving surface bus bar electrode extending in the first direction on the light-receiving surface side of the semiconductor substrate; and a plurality of back connection electrodes facing the semiconductor The back side of the substrate opposite to the light-receiving surface is dispersedly arranged along the first direction; wherein the light-receiving surface bus electrode is provided along the first direction and penetrates in the thickness direction of the light-receiving surface bus electrode A plurality of through holes; the back connection electrode is disposed in a position of the semiconductor substrate in the thickness direction relative to the light-receiving surface bus bar electrode except for the plurality of through holes, wherein the light-receiving surface bus bar electrode includes : A plurality of first regions in which the through-holes are not provided in the first direction; and a plurality of second regions in which the through-holes are provided in the first direction; wherein the back surface connection electrode is disposed in the plurality of The first region of the semiconductor substrate is located at a relative position in the thickness direction of the semiconductor substrate, wherein the interval between the first regions adjacent to the end side in the first direction is greater than that of the first region adjacent to the inner side in the first direction The interval between the first regions is short. 如申請專利範圍第1項所述的太陽電池單元,其中,上述受光面匯流排電極,係在上述半導體基板的面內與上述第1方向直交的第2方向中兩端部往上述第1方向平行的直線 狀。 The solar battery cell according to item 1 of the patent application scope, wherein the light-receiving surface bus electrode is directed to the first direction in both ends of the second direction that is perpendicular to the first direction in the plane of the semiconductor substrate Parallel straight line shape. 如申請專利範圍第1或2項所述的太陽電池單元,其中,上述第1方向中的受光面匯流排電極兩端由上述第1區域構成。 The solar battery cell according to item 1 or 2 of the patent application range, wherein both ends of the light-receiving surface bus bar electrode in the first direction are constituted by the first region. 如申請專利範圍第1或2項所述的太陽電池單元,其中,上述第1方向中,上述受光面匯流排電極的第1區域,比上述半導體基板的厚度方向中配置在相對位置的上述背面連接電極長。 The solar battery cell according to claim 1 or 2, wherein in the first direction, the first region of the light-receiving surface bus bar electrode is arranged at a position opposite to the back surface in the thickness direction of the semiconductor substrate The connection electrode is long. 如申請專利範圍第3項所述的太陽電池單元,其中,上述第1方向中,上述受光面匯流排電極的第1區域,比上述半導體基板的厚度方向中配置在相對位置的上述背面連接電極長。 The solar battery cell according to item 3 of the patent application range, wherein in the first direction, the first region of the light-receiving surface bus bar electrode is arranged at a relative position to the back surface connection electrode in the thickness direction of the semiconductor substrate long. 如申請專利範圍第1或2項所述的太陽電池單元,其中,上述半導體基板具有長方形狀,具有上述第1方向中上述太陽電池單元的端部即第1端邊部以及上述第1方向中與上述第1端邊部相反側的上述太陽電池單元的端部即第2端邊部;相鄰上述第2端邊部的上述背面連接電極與上述第2端邊部的距離,比相鄰上述第1端邊部的上述背面連接電極與上述第1端邊部的距離長。 The solar battery cell according to claim 1 or 2, wherein the semiconductor substrate has a rectangular shape, and has a first end edge portion of the solar battery cell in the first direction and the first direction The end of the solar cell opposite to the first end is the second end; the distance between the back connecting electrode adjacent to the second end and the second end is greater than that of the adjacent The distance between the back connection electrode of the first end side and the first end side is long. 如申請專利範圍第3項所述的太陽電池單元,其中,上述半導體基板具有長方形狀,具有上述第1方向中上述太陽電池單元的端部即第1端邊部以及上述第1方向中與上述第1端邊部相反側的上述太陽電池單元的端部即第2端邊部; 相鄰上述第2端邊部的上述背面連接電極與上述第2端邊部的距離,比相鄰上述第1端邊部的上述背面連接電極與上述第1端邊部的距離長。 The solar battery cell according to item 3 of the patent application range, wherein the semiconductor substrate has a rectangular shape and has a first end edge portion of the solar battery cell in the first direction and the first direction and the The end of the solar cell unit opposite to the first end, that is, the second end; The distance between the back connection electrode adjacent to the second end side and the second end side is longer than the distance between the back connection electrode adjacent to the first end side and the first end side. 如申請專利範圍第4項所述的太陽電池單元,其中,上述半導體基板具有長方形狀,具有上述第1方向中上述太陽電池單元的端部即第1端邊部以及上述第1方向中與上述第1端邊部相反側的上述太陽電池單元的端部即第2端邊部;相鄰上述第2端邊部的上述背面連接電極與上述第2端邊部的距離,比相鄰上述第1端邊部的上述背面連接電極與上述第1端邊部的距離長。 The solar battery cell according to item 4 of the patent application range, wherein the semiconductor substrate has a rectangular shape, and has a first end edge portion which is an end of the solar battery cell in the first direction and the first direction and the above The end of the solar cell opposite to the first end is the second end; the distance between the back connecting electrode adjacent to the second end and the second end is greater than that of the adjacent The distance between the back connection electrode at the one end side and the first end side is long. 如申請專利範圍第5項所述的太陽電池單元,其中,上述半導體基板具有長方形狀,具有上述第1方向中上述太陽電池單元的端部即第1端邊部以及上述第1方向中與上述第1端邊部相反側的上述太陽電池單元的端部即第2端邊部;相鄰上述第2端邊部的上述背面連接電極與上述第2端邊部的距離,比相鄰上述第1端邊部的上述背面連接電極與上述第1端邊部的距離長。 The solar battery cell according to item 5 of the patent application range, wherein the semiconductor substrate has a rectangular shape and has a first end edge portion which is an end portion of the solar battery cell in the first direction and a The end of the solar cell opposite to the first end is the second end; the distance between the back connecting electrode adjacent to the second end and the second end is greater than that of the adjacent The distance between the back connection electrode at the one end side and the first end side is long. 一種太陽電池模組,其特徵在於包括:複數的太陽電池單元,如申請專利範圍第1至9項中任一項所述;引線,在上述第1方向中相鄰的2個上述太陽電池單元中,連接一方上述太陽電池單元的上述受光面匯流排電極與另一方上述太陽電池單元的上述背面連接電極。 A solar battery module, comprising: a plurality of solar battery cells, as described in any one of patent application items 1 to 9; a lead, two adjacent solar battery cells in the first direction In this, the light-receiving surface bus electrode of one of the solar battery cells is connected to the back connection electrode of the other of the solar battery cells. 一種太陽電池模組,其特徵在於包括: 申請專利範圍第6至9項中任一項所述的2個太陽電池單元,在一方太陽電池單元的上述第2端邊部與另一方太陽電池單元的上述第1端邊部對向的狀態下配置,在上述第1方向中相鄰;以及引線,連接上述一方太陽電池單元的上述背面連接電極與上述另一方太陽電池單元的上述受光面匯流排電極;其中,上述引線,連接上述一方太陽電池單元中上述第2端邊部側的上述背面連接電極與上述另一方太陽電池單元中上述第1端邊部側的上述受光面匯流排電極。 A solar battery module is characterized by comprising: The two solar battery cells according to any one of claims 6 to 9 in a patent application state where the second end of one solar battery cell is opposed to the first end of the other solar battery cell The lower arrangement is adjacent in the first direction; and the lead wire connects the back connection electrode of the one solar battery cell and the light-receiving bus bar electrode of the other solar battery cell; wherein the lead wire connects the one solar battery The back connection electrode on the second end side of the battery cell and the light receiving surface bus electrode on the first end side of the other solar cell. 如申請專利範圍第10或11項所述的太陽電池模組,其中,上述受光面匯流排電極的寬度與上述引線的寬度相等;上述引線,在上述半導體基板的面內與上述第1方向直交的第2方向中上述受光面匯流排電極的兩側側面的位置以及上述第2方向中上述引線的兩側側面的位置位於相同位置,重疊連接至上述受光面匯流排電極。 The solar cell module according to claim 10 or 11, wherein the width of the light-receiving surface bus electrode is equal to the width of the lead; the lead is perpendicular to the first direction in the plane of the semiconductor substrate The positions of both side surfaces of the light-receiving surface bus electrode in the second direction and the positions of both side surfaces of the lead in the second direction are located at the same position, and are overlapped and connected to the light-receiving surface bus electrode.
TW107112729A 2017-06-21 2018-04-13 Solar battery unit and solar battery module TWI692113B (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
??PCT/JP2017/022889 2017-06-21
PCT/JP2017/022889 WO2018235202A1 (en) 2017-06-21 2017-06-21 Solar cell and solar cell module
WOPCT/JP2017/022889 2017-06-21
PCT/JP2017/045880 WO2018235315A1 (en) 2017-06-21 2017-12-21 Solar cell and solar cell module
??PCT/JP2017/045880 2017-12-21
WOPCT/JP2017/045880 2017-12-21

Publications (2)

Publication Number Publication Date
TW201906186A TW201906186A (en) 2019-02-01
TWI692113B true TWI692113B (en) 2020-04-21

Family

ID=64735546

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107112729A TWI692113B (en) 2017-06-21 2018-04-13 Solar battery unit and solar battery module

Country Status (3)

Country Link
JP (1) JP6785964B2 (en)
TW (1) TWI692113B (en)
WO (2) WO2018235202A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117790596B (en) 2021-08-27 2025-11-07 晶科能源股份有限公司 Photovoltaic cell, cell assembly and preparation process
CN116314376A (en) * 2023-03-09 2023-06-23 浙江晶科能源有限公司 Solar cells and photovoltaic modules

Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007173288A (en) * 2005-12-19 2007-07-05 Sharp Corp Solar cell, solar cell string and solar cell module
JP2007288113A (en) * 2006-04-20 2007-11-01 Sharp Corp Solar cell, solar cell string and solar cell module
JP2008282990A (en) * 2007-05-10 2008-11-20 Sharp Corp SOLAR CELL, SOLAR CELL MANUFACTURING METHOD, SOLAR CELL STRING AND SOLAR CELL MODULE
JP4284368B2 (en) * 2007-02-23 2009-06-24 京セラ株式会社 Manufacturing method of solar cell
US20090194144A1 (en) * 2008-01-31 2009-08-06 Sanyo Electric Co., Ltd. Solar cell module and method of manufacturing the same
JP2010027778A (en) * 2008-07-17 2010-02-04 Shin-Etsu Chemical Co Ltd Solar cell
US20100116323A1 (en) * 2006-01-27 2010-05-13 Yoshio Katayama Interconnector, Solar Cell String Using the Interconnector and Method of Manufacturing Thereof, and Solar Cell Module, Using The Solar Cell String
JP2011009460A (en) * 2009-06-25 2011-01-13 Kyocera Corp Method for manufacturing solar cell module, and device for manufacturing solar cell module
WO2011058653A1 (en) * 2009-11-13 2011-05-19 三菱電機株式会社 Solar cell
US20130255784A1 (en) * 2012-03-30 2013-10-03 Applied Materials, Inc. Gas delivery systems and methods of use thereof
US20160111574A1 (en) * 2013-06-28 2016-04-21 Panasonic Intellectual Property Management Co., Ltd. Solar cell module and method of manufacturing same
TW201633553A (en) * 2015-03-11 2016-09-16 精曜有限公司 Solar cell, solar cell module and manufacturing method thereof
CN106033782A (en) * 2015-03-11 2016-10-19 英属开曼群岛商精曜有限公司 Solar cell, solar cell module and manufacturing method thereof
CN106206763A (en) * 2014-10-31 2016-12-07 比亚迪股份有限公司 Solar battery cell, cell piece array, battery component and preparation method thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006278710A (en) * 2005-03-29 2006-10-12 Kyocera Corp Solar cell module and manufacturing method thereof
JP4040659B2 (en) * 2006-04-14 2008-01-30 シャープ株式会社 Solar cell, solar cell string, and solar cell module
WO2013090607A2 (en) * 2011-12-14 2013-06-20 Dow Corning Corporation A photovoltaic cell and an article including an isotropic or anisotropic electrically conductive layer

Patent Citations (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007173288A (en) * 2005-12-19 2007-07-05 Sharp Corp Solar cell, solar cell string and solar cell module
US20100116323A1 (en) * 2006-01-27 2010-05-13 Yoshio Katayama Interconnector, Solar Cell String Using the Interconnector and Method of Manufacturing Thereof, and Solar Cell Module, Using The Solar Cell String
JP2007288113A (en) * 2006-04-20 2007-11-01 Sharp Corp Solar cell, solar cell string and solar cell module
JP4284368B2 (en) * 2007-02-23 2009-06-24 京セラ株式会社 Manufacturing method of solar cell
JP2008282990A (en) * 2007-05-10 2008-11-20 Sharp Corp SOLAR CELL, SOLAR CELL MANUFACTURING METHOD, SOLAR CELL STRING AND SOLAR CELL MODULE
US20090194144A1 (en) * 2008-01-31 2009-08-06 Sanyo Electric Co., Ltd. Solar cell module and method of manufacturing the same
JP2010027778A (en) * 2008-07-17 2010-02-04 Shin-Etsu Chemical Co Ltd Solar cell
JP2011009460A (en) * 2009-06-25 2011-01-13 Kyocera Corp Method for manufacturing solar cell module, and device for manufacturing solar cell module
WO2011058653A1 (en) * 2009-11-13 2011-05-19 三菱電機株式会社 Solar cell
US20130255784A1 (en) * 2012-03-30 2013-10-03 Applied Materials, Inc. Gas delivery systems and methods of use thereof
US20160111574A1 (en) * 2013-06-28 2016-04-21 Panasonic Intellectual Property Management Co., Ltd. Solar cell module and method of manufacturing same
CN106206763A (en) * 2014-10-31 2016-12-07 比亚迪股份有限公司 Solar battery cell, cell piece array, battery component and preparation method thereof
TW201633553A (en) * 2015-03-11 2016-09-16 精曜有限公司 Solar cell, solar cell module and manufacturing method thereof
CN106033782A (en) * 2015-03-11 2016-10-19 英属开曼群岛商精曜有限公司 Solar cell, solar cell module and manufacturing method thereof

Also Published As

Publication number Publication date
TW201906186A (en) 2019-02-01
JPWO2018235315A1 (en) 2019-11-07
WO2018235315A1 (en) 2018-12-27
JP6785964B2 (en) 2020-11-18
WO2018235202A1 (en) 2018-12-27

Similar Documents

Publication Publication Date Title
US8975506B2 (en) Solar cell module and photovoltaic power generator using the same
JP5289625B1 (en) Solar cell module
CN102077359B (en) Solar battery unit and manufacturing method thereof
US9608140B2 (en) Solar cell and solar cell module
CN101765920B (en) Solar cell module
JP4738149B2 (en) Solar cell module
JPWO2008090718A1 (en) Solar cell, solar cell array and solar cell module
JP6495649B2 (en) Solar cell element and solar cell module
CN107195696A (en) A kind of MWT solar battery sheets and the MWT solar cell modules being made using it
WO2016068237A1 (en) Solar cell module
JP4299772B2 (en) Solar cell module
TWI692113B (en) Solar battery unit and solar battery module
WO2018173125A1 (en) Solar cell and solar module
JP5173872B2 (en) Solar cell module and solar cell element structure
US9362425B2 (en) Solar cell device and method for manufacturing the same
EP3125300B1 (en) Solar cell and solar cell module using same
JP2011003721A (en) Solar cell and method for manufacturing the same
JP2016178280A (en) Solar cell element and solar cell module using the same
JP2011222585A (en) Solar cell and method for manufacturing the same
JP6224480B2 (en) SOLAR CELL DEVICE, ITS MANUFACTURING METHOD, AND SOLAR CELL MODULE

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees