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TWI690001B - Stage apparatus, process equipment and operation method of the process equipment - Google Patents

Stage apparatus, process equipment and operation method of the process equipment Download PDF

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Publication number
TWI690001B
TWI690001B TW107144052A TW107144052A TWI690001B TW I690001 B TWI690001 B TW I690001B TW 107144052 A TW107144052 A TW 107144052A TW 107144052 A TW107144052 A TW 107144052A TW I690001 B TWI690001 B TW I690001B
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machine
row
wire
machine body
area
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TW107144052A
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TW202022957A (en
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蔡耀德
莊智陽
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日月光半導體製造股份有限公司
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Priority to TW107144052A priority Critical patent/TWI690001B/en
Priority to CN201910445361.XA priority patent/CN111293045B/en
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Publication of TW202022957A publication Critical patent/TW202022957A/en

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    • H10W72/07168
    • H10W72/07502

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  • Multi-Process Working Machines And Systems (AREA)

Abstract

A stage apparatus includes a stage body, a working area and at least one workpiece placement area. The stage body includes a front portion, a rear portion and two side portions. The rear portion is opposite to the front portion. The side portions extend between the front portion and the rear portion. The working area is located on the stage body for processing a workpiece to be processed. The working area is open toward the front portion. The workpiece placement area is located at one of the side portions of the stage body for placing the workpiece. The position of the workpiece placement area corresponds to a position between the working area and the rear portion.

Description

機台裝置、製程設備及製程設備之作動方法Machine device, process equipment and actuation method of process equipment

本發明係關於一機台裝置、一製程設備及一製程設備之作動方法,以及係關於可從該機台裝置之該後部分取放工件之機台裝置、包含該機台裝置之製程設備以及該製程設備之作動方法。The present invention relates to a machine device, a process equipment, and an actuating method of a process equipment, and to a machine device that can pick and place a workpiece from the rear part of the machine device, a process device including the machine device, and Actuation method of the process equipment.

現行大部分的打線機器(Wire Bond machine)係以操作員進行供料及取料,如此不但耗費人力且恐增加機台閒置率。有鑑於此,部分的打線製程工作站改以自動化設備代替操作員進行供料及取料以建立一自動化系統。常用的自動化設備分別為天車系統(Over Head Vehicle Controller)及無人搬運車(Automated Guided Vehicle, AGV)。其中,天車系統將軌道架設於廠房之天花板,並透過ㄧ懸吊設備進行貨料之運送。該懸吊設備係以直上直下之方式進行供料及取料之動作,然而打線機器的料盒(magazine)係為上下兩層配置(即,上層料盒係位於下層料盒之正上方),因此天車系統並無法越過上層料盒夾取下層料盒。Most of the current wire bonding machines (Wire Bond machine) are fed and retrieved by the operator, which not only consumes manpower but also increases the machine idle rate. In view of this, some wire-bonding process workstations are replaced with automated equipment to replace the operator for feeding and retrieving to establish an automated system. Commonly used automation equipments are Over Head Vehicle Controller and Automated Guided Vehicle (AGV). Among them, the overhead crane system erected the track on the ceiling of the factory building and transported the goods through the suspension equipment. The suspension equipment is used for feeding and retrieving in a straight up and down manner. However, the magazine of the stringing machine is arranged in two layers (that is, the upper magazine is located directly above the lower magazine), so The crown block system cannot cross the upper magazine and remove the lower magazine.

無人搬運車係為在廠房地面行駛的無人車且其具有一機械手臂。現行廠房機台配置以面對面方式進行擺設(亦即,一排打線機器之前面(前側)係面對另一排打線機器之前面(前側)),且該二排打線機器間之走道寬約100公分。該走道係供操作員進行作業(例如故障之排除)所站立之用。由於無人搬運車寬度約80公分,若於走道上增設無人搬運車,可能會發生無人搬運車與操作員碰撞的工安問題。The unmanned vehicle is an unmanned vehicle traveling on the floor of the plant and has a mechanical arm. The current plant equipment configuration is arranged in a face-to-face manner (that is, the front face of one row of wire-bonding machines (front side) faces the front face of another row of wire-bonding machines (front side)), and the walkway between the two rows of wire-bonding machines is about 100 Cm. This aisle is for the operator to stand for operation (such as troubleshooting). Since the width of the unmanned van is about 80 cm, if an unmanned van is added to the aisle, there may be an industrial safety problem where the unmanned van collides with the operator.

根據一項態樣,在一些實施例中,一種機台裝置包括一機台本體、一工作區及至少一工件置放區。該機台本體具有一前部分、一後部分及二側部分,該後部分係相對該前部分,該等側部分係延伸於該前部分及該後部分之間。該工作區位於該機台本體,用以對一待加工工件進行加工。該工作區係朝向該前部分開放。該工件置放區位於該機台本體之該等側部分中之一各別者,用以置放工件。該工件置放區之位置係對應於該工作區與該後部分之間。According to one aspect, in some embodiments, a machine device includes a machine body, a work area, and at least a workpiece placement area. The machine body has a front part, a rear part and two side parts, the rear part is opposite to the front part, and the side parts extend between the front part and the rear part. The working area is located on the machine body and used to process a workpiece to be processed. The working area is open towards the front part. The workpiece placement area is located in one of the side portions of the machine body for placing the workpiece. The position of the workpiece placement area corresponds to between the working area and the rear portion.

根據另一態樣,在一些實施例中,一種製程設備包括一移動通道、至少一機台裝置及一搬運裝置。該機台裝置包括一機台本體及一工作區。該機台本體具有一前部分及一後部分,該後部分係相對該前部分。該工作區位於該機台本體,且朝向該前部分開放,以供一作業員進行作業。該機台裝置之後部分係朝向該移動通道。該搬運裝置位於該移動通道,以從該機台裝置之後部分進行取放作業。According to another aspect, in some embodiments, a process equipment includes a moving channel, at least one machine device, and a handling device. The machine device includes a machine body and a working area. The machine body has a front part and a rear part, and the rear part is opposite to the front part. The working area is located on the machine body and is open toward the front part for an operator to perform work. The rear part of the machine device faces the moving channel. The conveying device is located in the moving aisle to perform pick-and-place operations from behind the machine device.

根據另一態樣,在一些實施例中,一種製程設備之作動方法包括:(a)提供複數個機台裝置,每一機台裝置包括一機台本體及一工作區,該機台本體具有一前部分及一後部分,該後部分係相對該前部分,該工作區位於該機台本體,且朝向該前部分開放;其中,該等機台裝置係排成至少一排,且該等機台裝置之後部分係朝向一移動通道;(b)提供一搬運裝置於該移動通道;及(c)利用該搬運裝置從該等機台裝置之後部分進行料盒取放作業,且該機台裝置在該工作區進行加工。According to another aspect, in some embodiments, a method for actuating a process equipment includes: (a) providing a plurality of machine devices, each machine device including a machine body and a working area, the machine body having A front part and a rear part, the rear part is opposite to the front part, the working area is located on the machine body and is open towards the front part; wherein the machine devices are arranged in at least one row, and the The rear part of the machine device faces a moving channel; (b) provides a conveying device in the moving channel; and (c) uses the conveying device to carry out picking and placing operations on the material boxes from the rear parts of the machine devices, and the machine The device processes in this work area.

貫穿圖式及詳細描述使用共用參考編號來指示相同或類似組件。本發明之實施例自結合附圖進行之以下詳細描述將更容易理解。Common reference numbers are used throughout the drawings and detailed description to indicate the same or similar components. Embodiments of the present invention will be more easily understood from the following detailed description in conjunction with the accompanying drawings.

以下揭露內容提供用於實施所提供標的物之不同特徵的諸多不同實施例或實例。下文描述組件及配置之特定實例以揭示本發明之某些態樣。當然,此等僅為實例且並不意欲為限制性。舉例而言,在隨後描述中將第一特徵形成於第二特徵上方或其上可包含括其中第一特徵與第二特徵以直接接觸方式形成或安置的實施例,且亦可包括其中可在第一特徵與第二特徵之間形成或安置額外特徵使得第一特徵與第二特徵可不直接接觸的實施例。另外,本發明可在本文中所提供之各種實例中重複參考編號及/或字母。此重複係出於簡約及清楚之目的且自身並不指示所論述之各種實施例及/或組態之間的關係。The following disclosure provides many different embodiments or examples for implementing different features of the provided subject matter. Specific examples of components and configurations are described below to reveal certain aspects of the invention. Of course, these are only examples and are not intended to be limiting. For example, forming the first feature above or on the second feature in the subsequent description may include embodiments in which the first feature and the second feature are formed or arranged in direct contact, and may also include in which the Embodiments in which additional features are formed or arranged between the first feature and the second feature so that the first feature and the second feature may not be in direct contact. In addition, the present invention may repeat reference numbers and/or letters in the various examples provided herein. This repetition is for simplicity and clarity and does not indicate the relationship between the various embodiments and/or configurations discussed.

在一個比較實施例的打線機器(或打線機台)中,供/出料盒(magazine)係置放於靠近該打線機器之前面(前側)之載台,以利操作員搬運供/出料盒,而進行供/出料之作業。再者,該打線機器之打線區係朝向該打線機器之前面(前側),以利操作員面對該打線機器之前面(前側)進行打線區的故障的排除。亦即,供/出料盒(magazine)所置放之位置(即該等載台)係對應於該打線機器之前面(前側)與該打線機器之打線區之間。In a wire bonding machine (or wire bonding machine table) of a comparative embodiment, a supply/discharge magazine (magazine) is placed on a stage close to the front surface (front side) of the wire bonding machine to facilitate the operator to handle supply/discharge Box and carry out the supply/discharge operation. Furthermore, the threading area of the wire-bonding machine is oriented toward the front face (front side) of the wire-bonding machine, so that the operator can face the front face (front side) of the wire-bonding machine to troubleshoot the wire-bonding area. That is, the position where the magazine is placed (ie, the stages) corresponds to the front surface (front side) of the wire bonding machine and the wire bonding area of the wire bonding machine.

此外,該打線機器包括二個升降裝置(Elevator),其中一個升降裝置具有一夾頭以將載台上之供料盒搬運至該打線區之進料端,且另一個升降裝置具有一夾頭以將載台上之出料盒搬運至該打線區之出料端。該等升降裝置夾頭係朝向該等載台(即該打線機器之前面(前側))。亦即,該等升降裝置所在之位置係對應於該打線機器之背面(背側)與該打線機器之打線區之間。惟,由於操作員所佔之位置與供/出料盒皆鄰近於該打線機器之前面(前側),當設置自動化設備(例如:無人搬運車(Automated Guided Vehicle, AGV))取代操作員時,由於該自動化設備(例如:無人搬運車(Automated Guided Vehicle, AGV))需從該打線機器之前面(前側)進行自動供/出料,如此,容易發生該自動化設備(例如:無人搬運車(Automated Guided Vehicle, AGV))與進行故障排除的作業員碰撞之工安問題。In addition, the stringing machine includes two elevators (Elevator), one of which has a chuck to carry the supply box on the stage to the feeding end of the wire-lined area, and the other elevator has a chuck In order to transport the discharge box on the stage to the discharge end of the wire bonding area. The chucks of the lifting devices are directed toward the carriers (that is, the front side (front side) of the wire bonding machine). That is, the positions of the lifting devices correspond to the back side (back side) of the wire bonding machine and the wire bonding area of the wire bonding machine. However, since the position occupied by the operator and the supply/discharge box are close to the front (front side) of the wire-bonding machine, when an automatic device (such as an Automated Guided Vehicle (AGV)) is installed to replace the operator, Since the automated equipment (for example: Automated Guided Vehicle (AGV)) needs to be supplied/discharged automatically from the front (front side) of the wire-bonding machine, the automated equipment (for example: Automated Guided Vehicle (Automated) Guided Vehicle, AGV)) Work safety problems in case of collision with the troubleshooting operator.

另一方面,廠房機台配置以面對面方式進行擺設(亦即,一排打線機器之前面(前側)係面對另一排打線機器之前面(前側)),如果在該二排打線機器間之走道設置一軌道及一自動搬運裝置(例如:機械手臂),其中該自動搬運裝置(例如:機械手臂)可在該軌道上移動,以從該等打線機器之前面(前側)進行自動供/出料作業。然而,如此一來,因為該等打線機器與該自動搬運裝置形成一個封閉區域,當打線機器發生異常及/或故障時必須將該自動搬運裝置關閉,使操作員進入該區域進行處理以及故障的排除,以防止操作員與該自動搬運裝置發生碰撞,如此恐增加打線機器的閒置率。On the other hand, the plant machine configuration is arranged in a face-to-face manner (that is, the front face of a row of wire-bonding machines (front side) faces the front face of another row of wire-bonding machines (front side)). The aisle is provided with a track and an automatic handling device (for example: a robotic arm), where the automatic handling device (for example: a robotic arm) can move on the track for automatic supply/exit from the front (front side) of the wire-bonding machines Material operations. However, in this way, because the wire-bonding machines and the automatic handling device form a closed area, when the wire-bonding machine is abnormal and/or malfunctions, the automatic handling device must be shut down to allow the operator to enter the area for processing and failure. Exclude to prevent the operator from colliding with the automatic handling device, so as to increase the idle rate of the wire bonding machine.

承上,若多台打線機器搭配多台自動搬運裝置形成複數個封閉區域,當其中一台打線機器發生異常及/或故障時,僅需關閉其中一個區域內之自動搬運裝置及打線機器,而不會造成全部區域的打線機器停擺,可增加打線機器的稼動率。舉例而言,12台打線機器可分成A、B、C三個封閉區域,其中每4台打線機器共用一台自動搬運裝置,當A區之一台打線機器發生異常及/或故障時,僅需將A區的自動搬運裝置進行關閉,B區及C區則可繼續正常運作。但是,如此需增加自動搬運裝置的數量,且會使A區的所有打線機器閒置,導致打線機器成本增加以及產能下降。According to the above, if multiple wire-bonding machines are combined with multiple automatic handling devices to form a plurality of closed areas, when one of the wire-bonding machines is abnormal and/or malfunctions, only the automatic handling device and the wire-bonding machine in one of the areas need to be closed, and It will not cause the wire-bonding machine to shut down in all areas, which can increase the utilization rate of the wire-bonding machine. For example, 12 wire-bonding machines can be divided into three enclosed areas A, B, and C, where every 4 wire-bonding machines share an automatic handling device. When one of the wire-bonding machines in Zone A is abnormal and/or faulty, only The automatic handling device in area A needs to be closed, and areas B and C can continue to operate normally. However, in this way, the number of automatic handling devices needs to be increased, and all wire-bonding machines in Zone A will be idle, resulting in an increase in the cost of wire-bonding machines and a decrease in production capacity.

本發明提供一種操作員與自動搬運裝置可在不同側作業的機台裝置,如此,操作員可於該機台裝置之前面(前側,或正面)進行異常或故障之排除,該自動搬運裝置是於該機台裝置之後面(後側,或背面)進行供/出料,以達到人機分道的功效。因此,不但可避免該自動搬運裝置與操作員碰撞的工安意外,更可減少該機台裝置的閒置率。The present invention provides a machine device that allows an operator and an automatic handling device to work on different sides. In this way, the operator can remove abnormalities or malfunctions in front of the machine device (front side, or front). The automatic handling device is The feeding/discharging is performed on the back side (rear side or back side) of the machine device to achieve the effect of man-machine separation. Therefore, not only can industrial accidents in which the automatic handling device collides with the operator be avoided, but also the idle rate of the machine device can be reduced.

圖1說明根據本發明之一些實施例之機台裝置1的前視立體組合圖。圖2說明圖1中所展示之機台裝置1的後視立體組合圖。圖3說明圖1中所展示之機台裝置1的立體分解圖。圖4說明圖1中所展示之機台裝置1的前視部分立體組合圖,其中省略第一防護罩181及第二防護罩182。該機台裝置1包括一機台本體10、一工作區12、一打線裝置2、至少一工件置放區(包括例如一第一工件置放區14及一第二工件置放區16)、至少一第一載台(包括例如一第一上載台41及一第一下載台42)、至少一第二載台(包括例如一第二上載台43及一第二下載台44)、至少一升降載具(包括例如一第一升降載具46及一第二升降載具48)、至少一防護罩(包括例如一第一防護罩181及一第二防護罩182)、一鍵盤191及一電腦螢幕192。FIG. 1 illustrates a front perspective assembled view of a machine device 1 according to some embodiments of the present invention. FIG. 2 illustrates a rear perspective assembled view of the machine device 1 shown in FIG. 1. FIG. 3 illustrates an exploded perspective view of the machine device 1 shown in FIG. 1. FIG. 4 illustrates a front perspective partial assembled view of the machine device 1 shown in FIG. 1, with the first protective cover 181 and the second protective cover 182 omitted. The machine device 1 includes a machine body 10, a working area 12, a wire bonding device 2, at least one workpiece placement area (including, for example, a first workpiece placement area 14 and a second workpiece placement area 16), At least one first stage (including for example a first upload station 41 and a first download station 42), at least one second stage (including for example a second upload station 43 and a second download station 44), at least one Lifting vehicle (including for example a first lifting vehicle 46 and a second lifting vehicle 48), at least one protective cover (including for example a first protective cover 181 and a second protective cover 182), a keyboard 191 and a Computer screen 192.

該機台本體10具有一前部分101(或者又可稱為「前面」、「正面」、「前側」或「前方」)、一後部分102(或者又可稱為「後面」、「背面」、「後側」或「後方」)及二側部分(包含一第一側部分103(例如左側部分、左側面或左側方)及一第二側部分104(例如右側部分、右側面或右側方))。該前部分101係為操作員所面對的部分。亦即,當該操作員59(圖6)對該機台裝置1進行異常的排除或故障的排除時,該操作員59(圖6)所站立之位置(操作員站立區11)係鄰近該前部分101,且面朝向該前部分101。該後部分102係相對該前部分101。亦即,該後部分102係遠離該操作員59(圖6)所站立之位置。該等側部分(包含該第一側部分103及該第二側部分104)係延伸於該前部分101及該後部分102之間。該第一側部分103係相對該第二側部分104。The machine body 10 has a front part 101 (or "front", "front", "front" or "front"), and a rear part 102 (or "back" or "back") , "Rear side" or "rear" and two side parts (including a first side part 103 (eg left side part, left side or left side) and a second side part 104 (eg right side part, right side or right side )). This front part 101 is the part that the operator faces. That is, when the operator 59 (FIG. 6) performs abnormal troubleshooting or troubleshooting of the machine device 1, the position where the operator 59 (FIG. 6) stands (operator standing area 11) is adjacent to the The front part 101, and the face faces the front part 101. The rear part 102 is opposite to the front part 101. That is, the rear portion 102 is away from the position where the operator 59 (FIG. 6) is standing. The side portions (including the first side portion 103 and the second side portion 104) extend between the front portion 101 and the rear portion 102. The first side portion 103 is opposite to the second side portion 104.

該工作區12係位於該機台本體10,用以對一待加工工件56進行加工。該工作區12係朝向該前部分101開放。在一實施例中,該工作區12係大致位於該機台本體10之中間位置,且該工作區12與該前部分101之間無任何阻擋之物,因此,該操作員59(圖6)可越過該機台本體10之前部分101而針對位於該工作區12之構件進行異常的排除或故障的排除。亦即,該工作區12之位置係位於該機台本體10之前部分101及該機台本體10之後部分102之間。The working area 12 is located on the machine body 10 for processing a workpiece 56 to be processed. The working area 12 is open toward the front part 101. In one embodiment, the working area 12 is located approximately in the middle of the machine body 10, and there is no obstruction between the working area 12 and the front portion 101. Therefore, the operator 59 (FIG. 6) It is possible to go over the front part 101 of the machine body 10 to eliminate abnormalities or troubles of the components located in the working area 12. That is, the position of the working area 12 is located between the front portion 101 of the machine body 10 and the rear portion 102 of the machine body 10.

在一實施例中,該機台裝置1係為一打線機器,該打線裝置2係位於該工作區12,且附著至該機台本體10,用以對該待加工工件56進行打線加工。該打線裝置2包括一工作平台20、一線盒22、一進給裝置24及一打線機構26。該工作平台20係用以承載及移動該待加工工件56。該線盒22係用以儲存一導線54。該進給裝置24係用以調整來自該線盒22之該導線54之方向,使得該導線54可以朝下方進給。該打線機構26係接受來自該進給裝置24之導線54。該打線機構26具有一打線頭264(圖5),用以將該導線54連接至該待加工工件56。In one embodiment, the machine device 1 is a wire-bonding machine, and the wire-bonding device 2 is located in the working area 12 and is attached to the machine body 10 for wire-bonding the workpiece 56 to be processed. The wire bonding device 2 includes a working platform 20, a wire box 22, a feeding device 24 and a wire bonding mechanism 26. The working platform 20 is used to carry and move the workpiece 56 to be processed. The wire box 22 is used to store a wire 54. The feeding device 24 is used to adjust the direction of the wire 54 from the wire box 22 so that the wire 54 can be fed downward. The wire-bonding mechanism 26 receives the wire 54 from the feeding device 24. The wire bonding mechanism 26 has a wire bonding head 264 (FIG. 5) for connecting the wire 54 to the workpiece 56 to be processed.

該至少一工件置放區(包括例如該第一工件置放區14及該第二工件置放區16)位於該機台本體10之該等側部分(包含該第一側部分103及該第二側部分104)中之一各別者,用以置放工件。該工件置放區(包括例如該第一工件置放區14及該第二工件置放區16)之位置係對應於該工作區12與該後部分102之間。亦即,該工件置放區(包括例如該第一工件置放區14及該第二工件置放區16)係比該工作區12更靠近該後部分102。該工作區12係比該工件置放區(包括例如該第一工件置放區14及該第二工件置放區16)更靠近該前部分101。該工件置放區(包括例如該第一工件置放區14及該第二工件置放區16)係位於靠近該工作區12之二側(例如一進料端32及一出料端34(圖3))之位置。在一實施例中,該第一工件置放區14係位於該第一側部分103且鄰近於該工作區12之進料端32,該第二工件置放區16係位於該第二側部分104且鄰近於該工作區12之出料端34。如圖1及圖3所示,該工作區12之進料端32係為第一側板31之透孔,且該工作區12之出料端34係為第二側板33之透孔。The at least one workpiece placement area (including, for example, the first workpiece placement area 14 and the second workpiece placement area 16) is located at the side portions of the machine body 10 (including the first side portion 103 and the first One of the two sides 104) is used to place the workpiece. The position of the workpiece placement area (including, for example, the first workpiece placement area 14 and the second workpiece placement area 16) corresponds to between the working area 12 and the rear portion 102. That is, the workpiece placement area (including, for example, the first workpiece placement area 14 and the second workpiece placement area 16) is closer to the rear portion 102 than the working area 12. The working area 12 is closer to the front portion 101 than the workpiece placement area (including, for example, the first workpiece placement area 14 and the second workpiece placement area 16 ). The workpiece placement area (including, for example, the first workpiece placement area 14 and the second workpiece placement area 16) is located near two sides of the work area 12 (such as a feed end 32 and a discharge end 34 ( Figure 3)). In one embodiment, the first workpiece placement area 14 is located on the first side portion 103 and is adjacent to the feed end 32 of the working area 12, and the second workpiece placement area 16 is located on the second side portion 104 and adjacent to the discharge end 34 of the working area 12. As shown in FIGS. 1 and 3, the feed end 32 of the working area 12 is a through hole of the first side plate 31, and the discharge end 34 of the working area 12 is a through hole of the second side plate 33.

如圖2所示,該至少一第一載台(包括例如該第一上載台41及該第一下載台42)位於該第一工件置放區14,且附著至該機台本體10,用以承載一料盒(magazine)57(圖6)。在一實施例中,該第一上載台41係位於該第一下載台42之正上方,且該工作區12之該進料端32係位於該第一上載台41及該第一下載台42之間。該第一上載台41係鄰近於該工作區12之該進料端32之上方,且該第一下載台42係鄰近於該工作區12之該進料端32之下方。此外,如圖1所示,該至少一第二載台(包括例如該第二上載台43及該第二下載台44)位於該第二工件置放區16,且附著至該機台本體10,用以承載一料盒。在一實施例中,該第二上載台43係位於該第二下載台44之正上方,且該工作區12之該出料端34係位於該第二上載台43及該第二下載台44之間。該第二上載台43係鄰近於該工作區12之該出料端34之上方,且該第二下載台44係鄰近於該工作區12之該出料端34之下方。As shown in FIG. 2, the at least one first stage (including, for example, the first upload stage 41 and the first download stage 42) is located in the first workpiece placement area 14 and is attached to the machine body 10 for To carry a magazine (magazine) 57 (Figure 6). In one embodiment, the first uploading station 41 is located directly above the first downloading station 42, and the feed end 32 of the working area 12 is located at the first uploading station 41 and the first downloading station 42 between. The first upload station 41 is adjacent to the feed end 32 of the work area 12, and the first download station 42 is adjacent to the feed end 32 of the work area 12. In addition, as shown in FIG. 1, the at least one second stage (including, for example, the second upload stage 43 and the second download stage 44) is located in the second workpiece placement area 16 and is attached to the machine body 10 For carrying a box. In one embodiment, the second uploading station 43 is located directly above the second downloading station 44 and the discharge end 34 of the work area 12 is located at the second uploading station 43 and the second downloading station 44 between. The second upload station 43 is adjacent to the discharge end 34 of the work area 12, and the second download station 44 is adjacent to the discharge end 34 of the work area 12.

如圖1所示,該第二下載台44具有一突出緣441、一凹槽442及一前檔片443。該突出緣441係位於該第二下載台44之後端,且該凹槽442及該前檔片443係位於該第二下載台44之前端。亦即,該第二下載台44之該突出緣441係朝向該機台本體10之後部分102,且該第二下載台44之該凹槽442及該前檔片443係朝向該機台本體10之前部分101。在一實施例中,該第一上載台41、該第一下載台42及該第二上載台43之形狀與該第二下載台44大致相同。As shown in FIG. 1, the second download station 44 has a protruding edge 441, a groove 442 and a front bumper 443. The protruding edge 441 is located at the rear end of the second download station 44, and the groove 442 and the front stopper 443 are located at the front end of the second download station 44. That is, the protruding edge 441 of the second download station 44 faces the rear part 102 of the machine body 10, and the groove 442 and the front stopper 443 of the second download station 44 face the machine body 10 Before part 101. In one embodiment, the shapes of the first upload station 41, the first download station 42 and the second upload station 43 are substantially the same as the second download station 44.

該至少一升降載具(包括例如該第一升降載具46及該第二升降載具48)係位於該機台本體10之該等側部分(包含該第一側部分103及該第二側部分104)中之一各別者,且附著至該機台本體10之前部分101。在一實施例中,該第一升降載具46係位於該第一側部分103,且附著至該機台本體10之前部分101;該第二升降載具48係位於該第二側部分104,且附著至該機台本體10之前部分101。如圖2至圖4所示,該工作區12之位置係對應於該升降載具(包括例如該第一升降載具46及該第二升降載具48)及該工件置放區(包括例如該第一工件置放區14及該第二工件置放區16)之間。該工作區12之該進料端32係位於該第一升降載具46及該至少一第一載台(包括例如該第一上載台41及該第一下載台42)之間。該工作區12之該出料端34係位於該第二升降載具48及該至少一第二載台(包括例如該第二上載台43及該第二下載台44)之間。The at least one lifting vehicle (including, for example, the first lifting vehicle 46 and the second lifting vehicle 48) is located at the side portions of the machine body 10 (including the first side portion 103 and the second side Part 104) is one of the individual and attached to the front part 101 of the machine body 10. In one embodiment, the first lifting vehicle 46 is located on the first side portion 103 and is attached to the front portion 101 of the machine body 10; the second lifting vehicle 48 is located on the second side portion 104, And attached to the front part 101 of the machine body 10. As shown in FIGS. 2 to 4, the position of the working area 12 corresponds to the lifting vehicle (including, for example, the first lifting vehicle 46 and the second lifting vehicle 48) and the workpiece placement area (including, for example, Between the first workpiece placement area 14 and the second workpiece placement area 16). The feed end 32 of the working area 12 is located between the first lifting vehicle 46 and the at least one first stage (including, for example, the first uploading station 41 and the first downloading station 42). The discharge end 34 of the working area 12 is located between the second lifting vehicle 48 and the at least one second stage (including, for example, the second upload stage 43 and the second download stage 44).

如圖4所示,該升降載具(包括例如該第一升降載具46及該第二升降載具48)係鄰近於操作員站立區11,亦即,該升降載具(包括例如該第一升降載具46及該第二升降載具48)比該至少一第一載台(包括例如該第一上載台41及該第一下載台42)及該至少一第二載台(包括例如該第二上載台43及該第二下載台44)係更靠近該操作員站立區11。換言之,該升降載具(包括例如該第一升降載具46及該第二升降載具48)之位置係對應於該操作員站立區11及該工作區12之間。As shown in FIG. 4, the lifting vehicle (including, for example, the first lifting vehicle 46 and the second lifting vehicle 48) is adjacent to the operator standing area 11, that is, the lifting vehicle (including, for example, the first A lifting vehicle 46 and the second lifting vehicle 48 are better than the at least one first platform (including, for example, the first uploading platform 41 and the first downloading platform 42) and the at least one second platform (including, for example, The second uploading station 43 and the second downloading station 44 are closer to the operator standing area 11. In other words, the position of the lifting vehicle (including, for example, the first lifting vehicle 46 and the second lifting vehicle 48) corresponds to the operator standing area 11 and the working area 12.

如圖2及圖3所示,該第一升降載具46具有一第一架體461、一第一水平軌道462、一第一垂直軌道463、複數個第一馬達464、及一第一夾頭50。該第一水平軌道462係水平地設置於該機台本體10之該第一側部分103且鄰近於該第一工件置放區14。該第一水平軌道462係前後延伸。該第一架體461係為為一垂直主結構,其位於該第一水平軌道462上且可在該第一水平軌道462上前後移動。該第一垂直軌道463係垂直地附著在該第一架體461上,且上下延伸。該第一夾頭50係位於該第一垂直軌道463上,且可在該第一垂直軌道463上上下移動。該第一夾頭50係朝向該機台本體10之後部分102,用以夾取位於該第一工件置放區14之該至少一第一載台(包括例如該第一上載台41及該第一下載台42)上之一料盒57(圖6)。在一實施例中,該第一夾頭50包括一第一上夾爪501及一第一下夾爪502。該第一下夾爪502係可以穿過該第一上載台41及該第一下載台42之凹槽而接觸該料盒57(圖6)之下表面。該等第一馬達464係附著至該第一架體461上。在一實施例中,該第一升降載具46具有三個第一馬達464,其分別控制該第一架體461在水平方向的前後移動、該第一夾頭50在垂直方向的上下移動,以及該第一上夾爪501與該第一下夾爪502的各自移動。As shown in FIGS. 2 and 3, the first lifting vehicle 46 has a first frame 461, a first horizontal rail 462, a first vertical rail 463, a plurality of first motors 464, and a first clamp Head 50. The first horizontal rail 462 is horizontally disposed on the first side portion 103 of the machine body 10 and adjacent to the first workpiece placement area 14. The first horizontal rail 462 extends back and forth. The first frame body 461 is a vertical main structure, which is located on the first horizontal rail 462 and can move back and forth on the first horizontal rail 462. The first vertical rail 463 is vertically attached to the first frame 461 and extends up and down. The first chuck 50 is located on the first vertical rail 463 and can move up and down on the first vertical rail 463. The first chuck 50 is directed toward the rear portion 102 of the machine body 10 for clamping the at least one first stage (including, for example, the first upper stage 41 and the first A download box 42) on a feed box 57 (Figure 6). In one embodiment, the first chuck 50 includes a first upper jaw 501 and a first lower jaw 502. The first lower jaw 502 can pass through the grooves of the first loading platform 41 and the first downloading platform 42 to contact the lower surface of the magazine 57 (FIG. 6 ). The first motors 464 are attached to the first frame 461. In an embodiment, the first lifting vehicle 46 has three first motors 464, which respectively control the forward and backward movement of the first frame 461 in the horizontal direction, and the vertical movement of the first chuck 50 in the vertical direction, And the respective movements of the first upper jaw 501 and the first lower jaw 502.

如圖3及圖4所示,該第二升降載具48具有一第二架體481、一第二水平軌道482、一第二垂直軌道483、複數個第二馬達484、及一第二夾頭52。該第二水平軌道482係水平地設置於該機台本體10之該第二側部分104且鄰近於該第二工件置放區16。該第二水平軌道482係前後延伸。該第二架體481係為為一垂直主結構,其位於該第二水平軌道482上且可在該第二水平軌道482上前後移動。該第二垂直軌道483係垂直地附著在該第二架體481上,且上下延伸。該第二夾頭52係位於該第二垂直軌道483上,且可在該第二垂直軌道483上上下移動。該第二夾頭52係朝向該機台本體10之後部分102,用以夾取位於該第二工件置放區16之該至少一第二載台(包括例如該第二上載台43及該第二下載台44)上之一料盒57(圖6)。在一實施例中,該第二夾頭52包括一第二上夾爪521及一第二下夾爪522。該第二下夾爪522係可以穿過該第二上載台43及該第二下載台44之凹槽(例如:凹槽442)而接觸該料盒57(圖6)之下表面。該等第二馬達484係附著至該第二架體481上。在一實施例中,該第二升降載具48具有三個第二馬達484,其分別控制該第二架體481在水平方向的前後移動、該第二夾頭52在垂直方向的上下移動,以及該第二上夾爪521與該第二下夾爪522的各自移動。As shown in FIGS. 3 and 4, the second lifting vehicle 48 has a second frame 481, a second horizontal rail 482, a second vertical rail 483, a plurality of second motors 484, and a second clamp Head 52. The second horizontal rail 482 is horizontally disposed on the second side portion 104 of the machine body 10 and adjacent to the second workpiece placement area 16. The second horizontal rail 482 extends back and forth. The second frame 481 is a vertical main structure, which is located on the second horizontal rail 482 and can move back and forth on the second horizontal rail 482. The second vertical rail 483 is vertically attached to the second frame body 481 and extends up and down. The second chuck 52 is located on the second vertical rail 483 and can move up and down on the second vertical rail 483. The second chuck 52 is directed toward the rear portion 102 of the machine body 10 for clamping the at least one second stage (including, for example, the second upper stage 43 and the first The second download station 44) has a feed box 57 (Figure 6). In one embodiment, the second chuck 52 includes a second upper jaw 521 and a second lower jaw 522. The second lower jaw 522 can pass through the grooves (for example: grooves 442) of the second loading table 43 and the second downloading table 44 to contact the lower surface of the magazine 57 (FIG. 6). The second motors 484 are attached to the second frame 481. In one embodiment, the second lifting vehicle 48 has three second motors 484, which respectively control the forward and backward movement of the second frame body 481 in the horizontal direction, and the vertical movement of the second chuck 52 in the vertical direction, And the respective movements of the second upper jaw 521 and the second lower jaw 522.

該至少一防護罩(包括例如該第一防護罩181及該第二防護罩182)係用以覆蓋且罩住該升降載具(包括例如該第一升降載具46及該第二升降載具48),以保護該升降載具(包括例如該第一升降載具46及該第二升降載具48)且防止操作員碰到該升降載具(包括例如該第一升降載具46及該第二升降載具48)而發生公安意外事件。舉例而言,該第一防護罩181係覆蓋該第一升降載具46,且該第二防護罩182係覆蓋該第二升降載具48。The at least one protective cover (including, for example, the first protective cover 181 and the second protective cover 182) is used to cover and cover the lifting vehicle (including, for example, the first lifting vehicle 46 and the second lifting vehicle 48) to protect the lifting vehicle (including, for example, the first lifting vehicle 46 and the second lifting vehicle 48) and prevent the operator from touching the lifting vehicle (including, for example, the first lifting vehicle 46 and the The second lifting vehicle 48) and a public security accident occurred. For example, the first protective cover 181 covers the first lifting vehicle 46, and the second protective cover 182 covers the second lifting vehicle 48.

該電腦螢幕192係位於該工作區12之上方,且朝向該機台本體10之前部分101,以供操作員觀看。該鍵盤191係位於該機台本體10之前部分101,以供操作員輸入指令以操作該機台裝置1。如圖4所示,該升降載具(包括例如該第一升降載具46及該第二升降載具48)係分別位於該鍵盤191之左右二側。The computer screen 192 is located above the work area 12 and faces the front part 101 of the machine body 10 for viewing by the operator. The keyboard 191 is located in the front part 101 of the machine body 10 for the operator to input instructions to operate the machine device 1. As shown in FIG. 4, the elevating vehicle (including, for example, the first elevating vehicle 46 and the second elevating vehicle 48) are located on the left and right sides of the keyboard 191, respectively.

圖5說明圖1中所展示之機台裝置1的打線機構26的立體放大示意圖。該打線機構26包括一張力調整元件261、一對準元件262、一打線頭夾持元件263、一打線頭264及一加熱元件265。該張力調整裝置261係位於該進給裝置24之下方,且接受來自該進給裝置24之導線54。該張力調整裝置261係用以調整該導線54之張力,且持續向下進給該導線54。該對準元件262係位於該張力調整元件261之下方,且接受來自該張力調整元件261之導線54。該對準元件262係用以將該導線54對準該打線頭264。該打線頭夾持元件263係位於該對準元件262之下方,且夾持該打線頭264。該打線頭264係用以接受來自該對準元件262之該導線54,以將該導線54連接至該待加工工件56。該加熱元件265係位於該打線頭夾持元件263之下方,用以加熱該導線54之末端。FIG. 5 illustrates a schematic enlarged perspective view of the threading mechanism 26 of the machine device 1 shown in FIG. 1. The threading mechanism 26 includes a force adjusting element 261, an alignment element 262, a threading head holding element 263, a threading head 264, and a heating element 265. The tension adjusting device 261 is located below the feeding device 24 and accepts the wire 54 from the feeding device 24. The tension adjusting device 261 is used to adjust the tension of the wire 54 and continuously feed the wire 54 downward. The alignment element 262 is located below the tension adjusting element 261 and receives the wire 54 from the tension adjusting element 261. The aligning element 262 is used to align the wire 54 with the wire head 264. The threading head clamping element 263 is located below the alignment element 262 and clamps the threading head 264. The wire bonding head 264 is used to receive the wire 54 from the alignment element 262 to connect the wire 54 to the workpiece 56 to be processed. The heating element 265 is located below the wire-clamping element 263 to heat the end of the wire 54.

圖6說明根據本發明之一些實施例之製程設備6的立體示意圖。該製程設備6包括一移動通道62、至少一個機台裝置1及一搬運裝置58。該機台裝置1係與圖1至圖4之機台裝置1相同,其包括一機台本體10、一工作區12、一打線裝置2、至少一工件置放區(包括例如一第一工件置放區14及一第二工件置放區16)、至少一第一載台(包括例如一第一上載台41及一第一下載台42)、至少一第二載台(包括例如一第二上載台43及一第二下載台44)、至少一升降載具(包括例如一第一升降載具46及一第二升降載具48)、至少一防護罩(包括例如一第一防護罩181及一第二防護罩182)、一鍵盤191及一電腦螢幕192。該機台本體10具有一前部分101及一後部分102,該後部分102係相對該前部分101。該機台裝置1之後部分102係朝向該移動通道62。該工作區12位於該機台本體10,且朝向該前部分101開放,以供一作業員59進行作業(例如:異常或故障排除之作業)。該搬運裝置58係位於該移動通道62,以從該機台裝置1之後部分102進行取放作業(例如:料盒57之取放作業)。FIG. 6 illustrates a schematic perspective view of a process device 6 according to some embodiments of the invention. The process equipment 6 includes a moving channel 62, at least one machine device 1 and a handling device 58. The machine device 1 is the same as the machine device 1 of FIGS. 1 to 4 and includes a machine body 10, a working area 12, a wire bonding device 2, and at least one workpiece placement area (including, for example, a first workpiece Placement area 14 and a second workpiece placement area 16), at least one first stage (including, for example, a first uploading station 41 and a first downloading station 42), at least one second stage (including, for example, a first Two uploading stations 43 and a second downloading station 44), at least one lifting vehicle (including for example a first lifting vehicle 46 and a second lifting vehicle 48), at least one protective cover (including for example a first protective cover 181 and a second protective cover 182), a keyboard 191 and a computer screen 192. The machine body 10 has a front part 101 and a rear part 102. The rear part 102 is opposite to the front part 101. The rear part 102 of the machine device 1 faces the moving channel 62. The working area 12 is located on the machine body 10 and is open toward the front portion 101 for an operator 59 to perform operations (eg, abnormal or troubleshooting operations). The conveying device 58 is located in the moving path 62 to perform pick-and-place operations from the rear part 102 of the machine device 1 (for example, pick-and-place operations of the magazine 57).

在一實施例中,該製程設備6更包括一軌道583及一移動平台582。該軌道583係位於該移動通道62。該移動平台582係位於該軌道583上,且可在該軌道583上移動(例如:滑動)。該搬運裝置58之下端係固設於該移動平台582上,使得該搬運裝置58係可在該軌道583上左右移動。在一實施例中,該搬運裝置58係可為一六軸機械手臂,且其前端具有一夾頭581,用以夾取且搬移該料盒57。可以理解的是,該搬運裝置58也可以是無人搬運車。In one embodiment, the process equipment 6 further includes a track 583 and a mobile platform 582. The track 583 is located in the moving channel 62. The mobile platform 582 is located on the rail 583 and can move (eg, slide) on the rail 583. The lower end of the conveying device 58 is fixed on the moving platform 582, so that the conveying device 58 can move left and right on the rail 583. In an embodiment, the conveying device 58 can be a six-axis robot arm, and a chuck 581 is provided at the front end thereof for gripping and transporting the magazine 57. It can be understood that the transport device 58 may also be an unmanned transport vehicle.

如圖6所示,該作業員59係站立在該操作員站立區11,其係鄰近該機台本體10之該前部分101,亦即,該作業員59係站立在該機台裝置1之前方。同時,該搬運裝置58係鄰近該機台本體10之該後部分102,而從該等機台裝置1之後部分102進行取放作業(例如:料盒57之取放作業),亦即,該搬運裝置58係位於該機台裝置1之後方。由於該作業員59與該搬運裝置58係分別位於該機台裝置1之前後不同側,因此,不會發生該搬運裝置58碰撞該作業員59之工安事件。此外,該作業員59與該搬運裝置58各自之作業係為獨立而不會互相影響,因此,當該操作員59對該機台裝置1進行異常的排除或故障的排除時,該搬運裝置58仍可繼續其作業,而不需停機,如此,可減少該機台裝置1的閒置率,以提高產能。As shown in FIG. 6, the operator 59 stands in the operator standing area 11, which is adjacent to the front part 101 of the machine body 10, that is, the operator 59 stands in front of the machine device 1 square. At the same time, the conveying device 58 is adjacent to the rear part 102 of the machine body 10, and pick-and-place operations are performed from the rear part 102 of the machine devices 1 (for example: pick-and-place operation of the magazine 57), that is, the The conveying device 58 is located behind the machine device 1. Since the worker 59 and the conveying device 58 are located on different sides of the front and rear of the machine device 1, respectively, there will be no work safety incident in which the conveying device 58 collides with the worker 59. In addition, the respective operations of the operator 59 and the conveying device 58 are independent and will not affect each other. Therefore, when the operator 59 performs abnormal elimination or fault elimination of the machine device 1, the conveying device 58 It can still continue its operation without downtime. In this way, the idle rate of the machine device 1 can be reduced to increase productivity.

圖7至圖15說明根據本發明之一些實施例之製程設備6之作動方法。參考圖7,利用該搬運裝置58之夾頭581從該機台裝置1之後部分102(圖6)將一第一料盒571放置於該機台裝置1之該第一下載台42。該第一料盒571內容納至少一待加工工件56。在一實施例中,該第一料盒571內裝滿複數個待加工工件56,亦即,該第一料盒571係為貨盒。該第一料盒571具有一開口,其朝向該工作區12。7 to 15 illustrate the actuation method of the process device 6 according to some embodiments of the present invention. Referring to FIG. 7, a first magazine 571 is placed on the first download station 42 of the machine device 1 from the rear part 102 (FIG. 6) of the machine device 1 using the chuck 581 of the conveying device 58. The first stock box 571 contains at least one workpiece 56 to be processed. In one embodiment, the first box 571 is filled with a plurality of workpieces 56 to be processed, that is, the first box 571 is a cargo box. The first magazine 571 has an opening, which faces the working area 12.

參考圖8,利用該搬運裝置58之夾頭581從該機台裝置1之後部分102(圖6)將一第二料盒572放置於該機台裝置1之該第二上載台43。該第二料盒572內並沒有容納任何工件,亦即,該第二料盒572係為空盒。該第二料盒572具有一開口,其朝向該工作區12。此時之狀態如圖9之立體示意圖所示,該第一料盒571(貨盒)位於該機台裝置1之該第一下載台42上,且該第二料盒572(空盒)位於該機台裝置1之該第二上載台43上。可以理解的是,該第二料盒572也可以由該作業員59以人工方式放置於該機台裝置1之該第二上載台43上。Referring to FIG. 8, a second cartridge 572 is placed on the second uploading table 43 of the machine device 1 from the rear part 102 (FIG. 6) of the machine device 1 using the chuck 581 of the conveying device 58. The second cartridge 572 does not contain any workpieces, that is, the second cartridge 572 is an empty box. The second magazine 572 has an opening, which faces the working area 12. The state at this time is shown in the perspective schematic view of FIG. 9, the first magazine 571 (cargo box) is located on the first download station 42 of the machine device 1, and the second magazine 572 (empty box) is located On the second uploading table 43 of the machine device 1. It can be understood that the second magazine 572 can also be manually placed on the second uploading table 43 of the machine device 1 by the operator 59.

接著,參考圖10,利用該第一升降載具46夾取該第一料盒571至該機台裝置1之該工作區12之進料端32。在一實施例中,該第一升降載具46沿著該第一水平軌道462朝後方移動,以利用該第一升降載具46之該第一夾頭50(包括該第一上夾爪501及該第一下夾爪502)夾取該第一料盒571。接著,該第一升降載具46沿著該第一水平軌道462朝前方移動,且該第一夾頭50連同該第一料盒571一起沿著該第一垂直軌道463朝上方移動,使得該第一料盒571之開口面對該工作區12之進料端32。Next, referring to FIG. 10, the first lifting carrier 46 is used to clamp the first magazine 571 to the feeding end 32 of the working area 12 of the machine device 1. In one embodiment, the first lifting vehicle 46 moves rearward along the first horizontal rail 462 to utilize the first chuck 50 (including the first upper jaw 501) of the first lifting vehicle 46 And the first lower jaw 502) grip the first magazine 571. Then, the first lifting vehicle 46 moves forward along the first horizontal rail 462, and the first chuck 50 moves upward along the first vertical rail 463 together with the first magazine 571, so that the The opening of the first magazine 571 faces the feed end 32 of the working area 12.

參考圖11,與圖10上述動作之同時,利用該第二升降載具48夾取該第二料盒572至該機台裝置之1該工作區12之出料端34。在一實施例中,該第二升降載具48沿著該第二水平軌道482朝後方移動,以利用該第二升降載具48之該第二夾頭52(包括該第二上夾爪521及該第二下夾爪522)夾取該第二料盒572。接著,該第二升降載具48沿著該第二水平軌道482朝前方移動,且該第二夾頭52連同該第二料盒572一起沿著該第二垂直軌道483朝下方移動,使得該第二料盒572之開口面對該工作區12之出料端34。Referring to FIG. 11, at the same time as the above-mentioned action of FIG. 10, the second lifting carrier 48 is used to clamp the second magazine 572 to the discharge end 34 of the working area 12 of the machine device. In one embodiment, the second lifting vehicle 48 moves rearward along the second horizontal rail 482 to utilize the second chuck 52 (including the second upper jaw 521) of the second lifting vehicle 48 And the second lower jaw 522) grip the second magazine 572. Then, the second lifting vehicle 48 moves forward along the second horizontal rail 482, and the second chuck 52 moves downward along the second vertical rail 483 together with the second magazine 572, so that the The opening of the second magazine 572 faces the discharge end 34 of the working area 12.

接著,該機台裝置1從該進料端32抽取該第一料盒571內之待加工工件56以於該工作區12進行加工(例如:利用該打線裝置2(圖1、圖3、圖4及圖5)進行打線加工),且將加工後之工件放入該第二料盒572。進行一段時間後,該第一料盒571內之所有待加工工件56皆加工完成,且皆被置入該第二料盒572。此時,該第一料盒571係為空盒,且該第二料盒572係為貨盒。Next, the machine device 1 extracts the workpiece 56 to be processed in the first magazine 571 from the feed end 32 for processing in the working area 12 (for example: using the wire bonding device 2 (FIG. 1, FIG. 3, FIG. 4 and FIG. 5) Perform wire bonding processing), and put the processed workpiece into the second magazine 572. After a period of time, all the workpieces 56 to be processed in the first magazine 571 are processed and placed in the second magazine 572. At this time, the first cartridge 571 is an empty box, and the second cartridge 572 is a cargo box.

接著,參考圖12,利用該第一升降載具46將該第一料盒571放置於該機台裝置1之該第一上載台41。在一實施例中,該第一夾頭50連同該第一料盒571一起沿著該第一垂直軌道463朝上方移動,且該第一升降載具46沿著該第一水平軌道462朝後方移動,以將該第一料盒571放置於該機台裝置1之該第一上載台41。Next, referring to FIG. 12, the first magazine 571 is placed on the first loading table 41 of the machine device 1 using the first lifting carrier 46. In an embodiment, the first chuck 50 and the first magazine 571 move upward along the first vertical rail 463, and the first lifting vehicle 46 moves backward along the first horizontal rail 462 Move to place the first magazine 571 on the first loading table 41 of the machine device 1.

同時,參考圖13,利用該第二升降載具48將該第二料盒572放置於該機台裝置1之該第二下載台44。在一實施例中,該第二夾頭52連同該第二料盒572一起沿著該第二垂直軌道483朝下方移動,且該第二升降載具48沿著該第二水平軌道482朝後方移動,以將該第二料盒572放置於該機台裝置1之該第二下載台44。此時之狀態如圖14之立體示意圖所示,該第一料盒571(空盒)位於該機台裝置1之該第一上載台41上,且該第二料盒572(貨盒)位於該機台裝置1之該第二下載台44上。Meanwhile, referring to FIG. 13, the second magazine 572 is placed on the second download station 44 of the machine device 1 by using the second lifting vehicle 48. In one embodiment, the second chuck 52 and the second magazine 572 move downward along the second vertical rail 483, and the second lifting vehicle 48 faces rearward along the second horizontal rail 482 Move to place the second magazine 572 on the second download station 44 of the machine device 1. The state at this time is shown in the three-dimensional schematic diagram of FIG. 14, the first magazine 571 (empty cassette) is located on the first upload stage 41 of the machine device 1, and the second magazine 572 (cargo cassette) is located On the second download station 44 of the machine device 1.

接著,參考圖15,利用該搬運裝置58從該機台裝置1之後部分102收取該第二料盒572(貨盒),且將該第二料盒572(貨盒)搬運至一儲料設備(例如第一儲料櫃64或第二儲料櫃66(圖16))。接著,該搬運裝置58從該機台裝置1之後部分102將該第一料盒571(空盒)從該機台裝置1之一第一上載台41搬運至該第二上載台43上。接著,利用該搬運裝置58之夾頭581從該機台裝置1之後部分102(圖6)將一貨盒放置於該機台裝置1之該第一下載台42,以重複上述步驟。Next, referring to FIG. 15, the second storage box 572 (cargo box) is picked up from the rear part 102 of the machine device 1 using the transport device 58, and the second storage box 572 (cargo box) is transported to a storage device (For example, the first storage cabinet 64 or the second storage cabinet 66 (FIG. 16)). Next, the conveying device 58 conveys the first magazine 571 (empty box) from the first loading table 41 of one of the machine devices 1 to the second loading table 43 from the rear part 102 of the machine device 1. Next, a chuck 581 of the conveying device 58 is used to place a box on the first download station 42 of the machine device 1 from the rear part 102 of the machine device 1 (FIG. 6) to repeat the above steps.

圖16說明根據本發明之一些實施例之製程設備6a的立體示意圖。該製程設備6a包括一移動通道62、複數個機台裝置1a,1b及一搬運裝置58。每一該等機台裝置1a,1b係與圖1至圖4之機台裝置1大致相同,其不同處在於每一該等機台裝置1a,1b更加裝一顯微鏡裝置於該工作區12上方。該等機台裝置1a,1b係排成至少一排。在一實施例中,該等機台裝置1a,1b係排成二排,即一第一排67及一第二排68。該第一排67包括該等機台裝置1a,該第二排68包括該等機台裝置1b,且該第一排67係大致平行該第二排68。每一該等機台裝置1a之該機台本體具有一前部分及一後部分102a,該後部分102a係相對該前部分。該等機台裝置1a之後部分102a皆係朝向該移動通道62。此外,每一該等機台裝置1b之該機台本體具有一前部分及一後部分102b,該後部分102b係相對該前部分。該等機台裝置1b之後部分102b皆係朝向該移動通道62。FIG. 16 illustrates a schematic perspective view of a process apparatus 6a according to some embodiments of the present invention. The process equipment 6a includes a moving channel 62, a plurality of machine devices 1a, 1b and a conveying device 58. Each of these machine devices 1a, 1b is substantially the same as the machine device 1 of FIGS. 1 to 4, except that each of these machine devices 1a, 1b is further equipped with a microscope device above the working area 12 . The machine devices 1a, 1b are arranged in at least one row. In one embodiment, the machine devices 1a, 1b are arranged in two rows, namely a first row 67 and a second row 68. The first row 67 includes the machine devices 1a, the second row 68 includes the machine devices 1b, and the first row 67 is substantially parallel to the second row 68. The machine body of each of the machine devices 1a has a front part and a rear part 102a, and the rear part 102a is opposite to the front part. The rear part 102a of the machine device 1a faces the moving channel 62. In addition, the machine body of each of the machine devices 1b has a front part and a rear part 102b, and the rear part 102b is opposite to the front part. After the machine tools 1b, the portion 102b faces the moving channel 62.

如圖16所示,該移動通道62係位於該第一排67及該第二排68之間,因此,該第一排67之該等機台裝置1a之後部分102a係面對該第二排68之該等機台裝置1b之後部分102b。該搬運裝置58係位於該移動通道62,以從該等機台裝置1a,1b之後部分102a,102b進行取放作業(例如:料盒之取放作業)。As shown in FIG. 16, the moving passage 62 is located between the first row 67 and the second row 68, therefore, the portion 102a behind the machine devices 1a of the first row 67 faces the second row 68 is the part 102b after the machine device 1b. The conveying device 58 is located in the moving channel 62 to perform pick-and-place operations from the parts 102a, 102b behind the machine devices 1a, 1b (for example, pick-and-place operations of magazines).

在一實施例中,該製程設備6a更包括一軌道583、一移動平台582(圖6)及一儲料設備(包括例如:第一儲料櫃64及第二儲料櫃66)。該軌道583係位於該移動通道62。該移動平台582(圖6)係位於該軌道583上,且可在該軌道583上移動(例如:滑動)。該搬運裝置58之下端係固設於該移動平台582上,使得該搬運裝置58係可在該軌道583上移動。在一實施例中,該搬運裝置58係可為一六軸機械手臂,且其前端具有一夾頭581(圖6),用以夾取且搬移料盒。可以理解的是,該搬運裝置58也可以是無人搬運車。該移動通道62係連通至該儲料設備(Stocker)(包括例如:第一儲料櫃64及第二儲料櫃66)。如圖16所示之實施例,該第一儲料櫃64及該第二儲料櫃66係分別位於該移動通道62之二端。在一實施例中,該搬運裝置58係將加工完成後之貨盒(例如圖13之第二料盒572)搬運至該第二儲料櫃66儲存,且該搬運裝置58係從該第一儲料櫃64取出待加工之貨盒(例如圖7之第一料盒571)及空盒(例如圖8之第二料盒572)。在另一實施例中,該搬運裝置58係僅從該第一儲料櫃64取出待加工之貨盒(例如圖7之第一料盒571),亦即,該第一儲料櫃64僅儲存待加工之貨盒(例如圖7之第一料盒571),而不儲存空盒(例如圖8之第二料盒572)。In an embodiment, the process equipment 6a further includes a rail 583, a mobile platform 582 (FIG. 6), and a storage device (including, for example, a first storage cabinet 64 and a second storage cabinet 66). The track 583 is located in the moving channel 62. The mobile platform 582 (FIG. 6) is located on the rail 583 and can move (for example, slide) on the rail 583. The lower end of the transport device 58 is fixed on the mobile platform 582 so that the transport device 58 can move on the rail 583. In one embodiment, the conveying device 58 can be a six-axis robotic arm, and a chuck 581 (FIG. 6) at the front end is used to pick up and move the magazine. It can be understood that the transport device 58 may also be an unmanned transport vehicle. The moving channel 62 is connected to the stocker (including the first stocker 64 and the second stocker 66). In the embodiment shown in FIG. 16, the first storage cabinet 64 and the second storage cabinet 66 are respectively located at the two ends of the moving channel 62. In one embodiment, the handling device 58 transports the processed box (such as the second box 572 in FIG. 13) to the second storage cabinet 66 for storage, and the handling device 58 is moved from the first The storage cabinet 64 takes out the box to be processed (such as the first box 571 in FIG. 7) and the empty box (such as the second box 572 in FIG. 8). In another embodiment, the handling device 58 only takes out the box to be processed from the first storage cabinet 64 (for example, the first storage box 571 in FIG. 7 ), that is, the first storage cabinet 64 only Store the boxes to be processed (such as the first box 571 in FIG. 7), but not store the empty boxes (such as the second box 572 in FIG. 8).

以下說明根據本發明之一些實施例之製程設備6a(圖16)之作動方法。首先,提供複數個機台裝置1a,1b。該等機台裝置1a,1b係排成至少一排。在一實施例中,該等機台裝置1a,1b係排成二排,即該第一排67及該第二排68。該第一排67包括該等機台裝置1a,該第二排68包括該等機台裝置1b,且該第一排67係大致平行該第二排68。每一該等機台裝置1a包括一機台本體及一工作區,該機台本體具有一前部分及一後部分102a,該後部分102a係相對該前部分。該等機台裝置1a之後部分102a皆係朝向該移動通道62。此外,每一該等機台裝置1b包括一機台本體及一工作區,該機台本體具有一前部分及一後部分102b,該後部分102b係相對該前部分。該等機台裝置1b之後部分102b皆係朝向該移動通道62。如圖16所示,該移動通道62係位於該第一排67及該第二排68之間,因此,該第一排67之該等機台裝置1a之後部分102a係面對該第二排68之該等機台裝置1b之後部分102b。The operation method of the process device 6a (FIG. 16) according to some embodiments of the present invention is described below. First, a plurality of machine devices 1a, 1b are provided. The machine devices 1a, 1b are arranged in at least one row. In one embodiment, the machine devices 1a, 1b are arranged in two rows, namely the first row 67 and the second row 68. The first row 67 includes the machine devices 1a, the second row 68 includes the machine devices 1b, and the first row 67 is substantially parallel to the second row 68. Each of these machine devices 1a includes a machine body and a working area. The machine body has a front part and a rear part 102a, and the rear part 102a is opposite to the front part. The rear part 102a of the machine device 1a faces the moving channel 62. In addition, each of these machine devices 1b includes a machine body and a working area. The machine body has a front part and a rear part 102b, and the rear part 102b is opposite to the front part. After the machine tools 1b, the portion 102b faces the moving channel 62. As shown in FIG. 16, the moving passage 62 is located between the first row 67 and the second row 68, therefore, the portion 102a behind the machine devices 1a of the first row 67 faces the second row 68 is the part 102b after the machine device 1b.

接著,提供一搬運裝置58於該移動通道62。該搬運裝置58係可在該移動通道62中移動,以從該等機台裝置1a,1b之後部分102a,102b進行取放作業(例如:料盒之取放作業)。在一實施例中,該搬運裝置58係從該第一儲料櫃64取出待加工之貨盒(例如圖7之第一料盒571)及空盒(例如圖8之第二料盒572)至一機台裝置1a,1b。在另一實施例中,該空盒(例如圖8之第二料盒572)也可以由該作業員59以人工方式放置於該等機台裝置1a,1b上。接著,進行上述圖7至圖15之動作。接著,該搬運裝置58係將加工完成後之貨盒(例如圖13之第二料盒572)搬運至該第二儲料櫃66儲存。Next, a transport device 58 is provided on the moving channel 62. The conveying device 58 can be moved in the moving channel 62 to perform pick-and-place operations from the parts 102a, 102b after the machine devices 1a, 1b (for example, pick-and-place operations of the magazine). In one embodiment, the handling device 58 takes out the box to be processed (such as the first box 571 in FIG. 7) and the empty box (such as the second box 572 in FIG. 8) from the first storage cabinet 64 To a machine device 1a, 1b. In another embodiment, the empty box (for example, the second magazine 572 in FIG. 8) can also be manually placed on the machine devices 1 a and 1 b by the operator 59. Next, the operations of FIGS. 7 to 15 described above are performed. Next, the conveying device 58 conveys the processed box (for example, the second magazine 572 in FIG. 13) to the second storage cabinet 66 for storage.

除非另有規定,否則諸如「在...上面」、「在...下面」、「上」、「左」、「右」、「下」、「頂部」、「底部」、「垂直」、「水平」、「側面」、「較高」、「下部」、「上部」、「在...上方」、「在...下方」等等之空間描述為相對於圖中所展示之定向指示。應理解,本文中所使用之空間描述僅出於說明之目的,且本文中所描述之結構之實際實施方案可以任一定向或方式進行空間配置,只要此配置不背離本發明之實施例的優點。Unless otherwise specified, such as "above", "below", "up", "left", "right", "down", "top", "bottom", "vertical" , "Horizontal", "side", "higher", "lower", "upper", "above", "below", etc. are described as relative to the picture Directional instructions. It should be understood that the spatial descriptions used herein are for illustrative purposes only, and the actual implementation of the structures described herein can be spatially configured in any orientation or manner, as long as this configuration does not depart from the advantages of embodiments of the present invention .

如本文中所使用,術語「大約」,「基本上」,「基本」和「約」用於描述及考慮小變化。在結合事件或情形使用時,該等術語可係指其中事件或情形明確發生的情況以及其中事件或情形接近於發生的情況。舉例而言,當結合數值使用時,該等術語可係指小於或等於彼數值之±10%的變化範圍,諸如小於或等於±5%、小於或等於±4%、小於或等於±3%、小於或等於±2%、小於或等於±1%、小於或等於±0.5%、小於或等於±0.1%,或小於或等於±0.05%。舉例而言,若兩個數值之間的差小於或等於該等值之平均值的±10% (例如小於或等於±5%、小於或等於±4%、小於或等於±3%、小於或等於±2%、小於或等於±1%、小於或等於±0.5%、小於或等於±0.1%,或小於或等於±0.05%),則該等值可被認為基本上相同或相等。As used herein, the terms "approximately", "essentially", "essentially" and "approximately" are used to describe and consider small changes. When used in conjunction with an event or situation, these terms may refer to a situation in which the event or situation clearly occurs and a situation in which the event or situation is close to occurring. For example, when used in combination with numerical values, these terms may refer to a variation range of less than or equal to ±10% of that value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3% , Less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. For example, if the difference between two values is less than or equal to ±10% of the average of the values (eg, less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or Equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%), then these values can be considered to be substantially the same or equal.

若兩個表面之間的位移不大於5 µm,不大於2 µm,不大於1 µm,或不大於0.5 µm,則兩個表面可被認為共面或基本上共面。If the displacement between the two surfaces is not greater than 5 µm, not greater than 2 µm, not greater than 1 µm, or not greater than 0.5 µm, then the two surfaces may be considered coplanar or substantially coplanar.

本文中所使用,除非上下文另有明確指示,否則單數術語「一(a)」、「一(an)」和「該」可包括複數對象。在一些實施例之描述中,提供在另一組件之「上」或「上方」之組件可囊括其中後一組件直接在前一組件上(例如,實體接觸)的狀況,以及其中一或多個介入組件可位於前一組件與後一組件之間的狀況。As used herein, unless the context clearly indicates otherwise, the singular terms "a", "an" and "the" may include plural objects. In the description of some embodiments, a component provided "above" or "above" another component may include the state in which the latter component is directly on the previous component (eg, physical contact), and one or more of them The intervening component may be located between the previous component and the latter component.

另外,數量、比率及其他數值有時在本文中以範圍格式呈現。應理解,此範圍格式是出於便利及簡潔起見而使用且應靈活地理解為包含明確規定為範圍之限制的數值,而且亦包含彼範圍內囊括之所有個別數值或子範圍,猶如每一數值及子範圍為明確規定的。In addition, quantities, ratios, and other numerical values are sometimes presented in a range format herein. It should be understood that this range format is used for convenience and brevity and should be flexibly understood to include the numerical values explicitly defined as the limits of the range, and also includes all individual numerical values or sub-ranges included in the range, as if each Values and sub-ranges are clearly defined.

雖然已參考本發明之特定實例描述並說明本發明,但此等描述及說明並非限制性。熟習此項技術者應理解,在不背離如隨附申請專利範圍所界定之本發明之真實精神及範疇的情況下,可做出各種改變且可替代等效物。說明可不必按比例繪製。由於製造過程及容差,因此本發明中之精巧呈現與實際設備之間可存在差異。可存在本發明之未具體說明之其他實施例。說明書及圖式應視為說明性而非限制性。可進行修改以使特定情況、材料、物質組合物、方法或程序適應本發明之目的、精神及範疇。所有此等修改意欲屬於隨附申請專利範圍之範疇內。雖然已參考以特定次序執行之特定操作來描述本文中所揭示之方法,但應理解,可在不背離本發明之教示的情況下將此等操作組合、細分或重新排序以形成等效方法。因此,除非本文中特別指明,否則操作之次序及分組並非本發明的限制。Although the invention has been described and illustrated with reference to specific examples of the invention, these descriptions and illustrations are not limiting. Those skilled in the art should understand that various changes can be made and equivalents can be substituted without departing from the true spirit and scope of the invention as defined by the scope of the accompanying patent application. The description need not be drawn to scale. Due to the manufacturing process and tolerances, there may be a difference between the delicate presentation in the present invention and the actual equipment. There may be other embodiments of the invention that are not specifically described. The description and drawings should be regarded as illustrative rather than restrictive. Modifications can be made to adapt a particular situation, material, material composition, method, or procedure to the purpose, spirit, and scope of the invention. All such modifications are intended to fall within the scope of the accompanying patent application. Although the methods disclosed herein have been described with reference to specific operations performed in a specific order, it should be understood that such operations can be combined, subdivided, or reordered to form equivalent methods without departing from the teachings of the present invention. Therefore, unless specifically indicated herein, the order and grouping of operations are not limitations of the present invention.

1:機台裝置 1a:機台裝置 1b:機台裝置 2:打線裝置 6:製程設備 6a:製程設備 10:機台本體 11:操作員站立區 12:工作區 14:第一工件置放區 16:第二工件置放區 20:工作平台 22:線盒 24:進給裝置 26:打線機構 31:第一側板 32:進料端 33:第二側板 34:出料端 41:第一上載台 42:第一下載台 43:第二上載台 44:第二下載台 46:第一升降載具 48:第二升降載具 50:第一夾頭 52:第二夾頭 54:導線 56:待加工工件 57:料盒 58:搬運裝置 59:操作員 62:移動通道 64:第一儲料櫃 66:第二儲料櫃 67:第一排 68:第二排 101:前部分 102:後部分 102a:後部分 102b:後部分 103:第一側部分 104:第二側部分 181:第一防護罩 182:第二防護罩 191:鍵盤 192:電腦螢幕 261:張力調整元件 262:對準元件 263:打線頭夾持元件 264:打線頭 265:加熱元件 441:突出緣 442:凹槽 443:前檔片 461:第一架體 462:第一水平軌道 463:第一垂直軌道 464:第一馬達 481:第二架體 482:第二水平軌道 483:第二垂直軌道 484:第二馬達 501:第一上夾爪 502:第一下夾爪 521:第二上夾爪 522:第二下夾爪 571:第一料盒 572:第二料盒 581:夾頭 582:移動平台 583:軌道1: Machine device 1a: Machine device 1b: Machine device 2: wire bonding device 6: Process equipment 6a: Process equipment 10: machine body 11: Operator standing area 12: Work area 14: the first workpiece placement area 16: Second workpiece placement area 20: Working platform 22: wire box 24: Feeding device 26: Stranding mechanism 31: First side panel 32: feed end 33: Second side panel 34: Discharge end 41: The first upload station 42: The first download station 43: Second upload station 44: Second download station 46: The first lifting vehicle 48: Second lifting vehicle 50: the first chuck 52: Second chuck 54: Wire 56: Workpiece to be processed 57: feed box 58: Handling device 59: Operator 62: mobile channel 64: The first storage cabinet 66: Second storage cabinet 67: First row 68: second row 101: front part 102: back part 102a: back part 102b: back part 103: First side part 104: Second side part 181: The first protective cover 182: Second protective cover 191: Keyboard 192: Computer screen 261: Tension adjustment element 262: Align components 263: Clamping element for threading head 264: Playing thread 265: Heating element 441: Protruding edge 442: Groove 443: front stop 461: The first body 462: The first horizontal track 463: First vertical track 464: First Motor 481: second frame 482: Second horizontal track 483: Second vertical track 484: Second motor 501: the first upper jaw 502: first lower jaw 521: Second upper jaw 522: Second lower jaw 571: The first box 572: Second box 581: Chuck 582: Mobile platform 583: Orbit

當與附圖一起閱讀時,可自以下詳述描述容易理解本發明之一些實施例之態樣。應注意,各種結構可能並未按比例繪製,且為論述的清晰性可任意增加或減小各種結構之尺寸。    圖1說明根據本發明之一些實施例之機台裝置的前視立體組合圖。    圖2說明圖1中所展示之機台裝置1的後視立體組合圖。    圖3說明圖1中所展示之機台裝置1的立體分解圖。    圖4說明圖1中所展示之機台裝置1的前視部分立體組合圖,其中省略第一防護罩及第二防護罩。    圖5說明圖1中所展示之機台裝置1的打線機構的立體放大示意圖。    圖6說明根據本發明之一些實施例之製程設備的立體示意圖。    圖7根據本發明之一些實施例說明製程設備之作動方法之實例之一或複數個階段。    圖8根據本發明之一些實施例說明製程設備之作動方法之實例之一或複數個階段。    圖9根據本發明之一些實施例說明製程設備之作動方法之實例之一或複數個階段。    圖10根據本發明之一些實施例說明製程設備之作動方法之實例之一或複數個階段。    圖11根據本發明之一些實施例說明製程設備之作動方法之實例之一或複數個階段。    圖12根據本發明之一些實施例說明製程設備之作動方法之實例之一或複數個階段。    圖13根據本發明之一些實施例說明製程設備之作動方法之實例之一或複數個階段。    圖14根據本發明之一些實施例說明製程設備之作動方法之實例之一或複數個階段。    圖15根據本發明之一些實施例說明製程設備之作動方法之實例之一或複數個階段。    圖16說明根據本發明之一些實施例之製程設備的立體示意圖。When read together with the drawings, some embodiments of the present invention can be easily understood from the following detailed description. It should be noted that various structures may not be drawn to scale, and the size of various structures may be arbitrarily increased or decreased for clarity of discussion. FIG. 1 illustrates a front perspective assembled view of a machine device according to some embodiments of the present invention. FIG. 2 illustrates a rear perspective assembled view of the machine device 1 shown in FIG. 1. Fig. 3 illustrates an exploded perspective view of the machine device 1 shown in Fig. 1. FIG. 4 illustrates a front perspective partial assembled view of the machine device 1 shown in FIG. 1, wherein the first protective cover and the second protective cover are omitted. Fig. 5 illustrates an enlarged schematic view of the wire-bonding mechanism of the machine device 1 shown in Fig. 1. FIG. 6 illustrates a perspective schematic view of a process equipment according to some embodiments of the present invention. FIG. 7 illustrates one or more stages of an example of an operation method of a process equipment according to some embodiments of the present invention. FIG. 8 illustrates one or more stages of an example of an actuation method of a process equipment according to some embodiments of the present invention. Fig. 9 illustrates one or more stages of an example of an actuation method of a process equipment according to some embodiments of the present invention. FIG. 10 illustrates one or more stages of an example of an actuation method of a process equipment according to some embodiments of the present invention. FIG. 11 illustrates one or more stages of an example of an operation method of a process equipment according to some embodiments of the present invention. FIG. 12 illustrates one or more stages of an example of an operation method of a process equipment according to some embodiments of the present invention. FIG. 13 illustrates one or more stages of an example of an operation method of a process equipment according to some embodiments of the present invention. FIG. 14 illustrates one or more stages of an example of an operation method of a process equipment according to some embodiments of the present invention. Figure 15 illustrates one or more stages of an example of the method of actuating a process equipment according to some embodiments of the present invention. FIG. 16 illustrates a perspective schematic view of a process equipment according to some embodiments of the present invention.

1:機台裝置 1: Machine device

2:打線裝置 2: wire bonding device

10:機台本體 10: machine body

11:操作員站立區 11: Operator standing area

12:工作區 12: Work area

14:第一工件置放區 14: the first workpiece placement area

16:第二工件置放區 16: Second workpiece placement area

20:工作平台 20: Working platform

22:線盒 22: wire box

24:進給裝置 24: Feeding device

26:打線機構 26: Stranding mechanism

31:第一側板 31: First side panel

32:進料端 32: feed end

33:第二側板 33: Second side panel

41:第一上載台 41: The first upload station

43:第二上載台 43: Second upload station

44:第二下載台 44: Second download station

54:導線 54: Wire

56:待加工工件 56: Workpiece to be processed

101:前部分 101: front part

102:後部分 102: back part

103:第一側部分 103: First side part

104:第二側部分 104: Second side part

181:第一防護罩 181: The first protective cover

182:第二防護罩 182: Second protective cover

191:鍵盤 191: Keyboard

192:電腦螢幕 192: Computer screen

441:突出緣 441: Protruding edge

442:凹槽 442: Groove

443:前檔片 443: front stop

Claims (24)

一種機台裝置,其包括:    一機台本體,具有一前部分、一後部分及二側部分,該後部分係相對該前部分,該等側部分係延伸於該前部分及該後部分之間;    一工作區,位於該機台本體,用以對一待加工工件進行加工,其中,該工作區係朝向該前部分開放;及    至少一工件置放區,位於該機台本體之該等側部分中之一各別者,用以置放工件,其中,該工件置放區之位置係對應於該工作區與該後部分之間。A machine device comprising: a machine body having a front part, a rear part and two side parts, the rear part is opposite to the front part, and the side parts extend over the front part and the rear part A working area, located on the machine body, for processing a workpiece to be processed, wherein the working area is open toward the front part; and at least one workpiece placement area, located on the machine body, etc. One of the side parts is used to place the work piece, wherein the position of the work piece placement area corresponds to between the work area and the rear part. 如請求項1之機台裝置,更包括一打線裝置,位於該工作區,且附著至該機台本體,用以對該待加工工件進行打線加工。The machine device according to claim 1 further includes a wire bonding device located in the work area and attached to the machine body for wire bonding processing of the workpiece to be processed. 如請求項2之機台裝置,其中該打線裝置包括:    一工作平台,用以承載一待加工工件;    一線盒,用以儲存一導線;    一進給裝置,用以調整該導線之方向,且進給該導線;及    一打線機構,接受來自該進給裝置之導線,其中該打線機構包括一打線頭,用以將該導線連接至該待加工工件。For example, the machine device of claim 2, wherein the wire bonding device includes: a working platform for carrying a workpiece to be processed; a wire box for storing a wire; a feeding device for adjusting the direction of the wire, and Feed the wire; and a wire-bonding mechanism to accept the wire from the feeding device, wherein the wire-bonding mechanism includes a wire-bonding head for connecting the wire to the workpiece to be processed. 如請求項1之機台裝置,其中該工作區之位置係位於該機台本體之前部分及該機台本體之後部分之間。As in the machine device of claim 1, wherein the position of the working area is between the front part of the machine body and the back part of the machine body. 如請求項1之機台裝置,其中該等側部分包括一第一側部分及一第二側部分,該第一側部分係相對該第二側部分;該至少一工件置放區包括一第一工件置放區及一第二工件置放區,其中,該第一工件置放區係位於該機台本體之第一側部分,且鄰近於該工作區之一進料端,該第二工件置放區係位於該機台本體之第二側部分,且鄰近於該工作區之一出料端。The machine apparatus according to claim 1, wherein the side portions include a first side portion and a second side portion, the first side portion is opposite to the second side portion; the at least one workpiece placement area includes a first A workpiece placement area and a second workpiece placement area, wherein the first workpiece placement area is located on the first side portion of the machine body and is adjacent to a feed end of the working area, the second The workpiece placement area is located on the second side portion of the machine body and is adjacent to a discharge end of the work area. 如請求項5之機台裝置,更包括至少一第一載台及至少一第二載台,該至少一第一載台位於該第一工件置放區,且附著至該機台本體,用以承載一料盒(magazine);該至少一第二載台位於該第二工件置放區,且附著至該機台本體,用以承載一料盒。The machine device of claim 5 further includes at least one first stage and at least one second stage, the at least one first stage is located in the first workpiece placement area and is attached to the machine body for To carry a magazine; the at least one second stage is located in the second workpiece placement area and is attached to the machine body for carrying a magazine. 如請求項6之機台裝置,其中該至少一第一載台包括一第一上載台及一第一下載台,該第一上載台係位於該第一下載台之上方,該工作區之該進料端係位於該第一上載台及該第一下載台之間;該至少一第二載台包括一第二上載台及一第二下載台,該第二上載台係位於該第二下載台之上方,該工作區之該出料端係位於該第二上載台及該第二下載台之間。The machine device according to claim 6, wherein the at least one first stage includes a first uploading station and a first downloading station, the first uploading station is located above the first downloading station, the The feeding end is located between the first uploading station and the first downloading station; the at least one second loading station includes a second uploading station and a second downloading station, and the second uploading station is located at the second downloading station Above the stage, the discharge end of the work area is located between the second uploading station and the second downloading station. 如請求項1之機台裝置,更包括至少一載台,位於該工件置放區,且附著至該機台本體,用以承載一料盒。The machine device according to claim 1 further includes at least one carrier, located in the workpiece placement area, and attached to the machine body for carrying a material box. 如請求項8之機台裝置,其中該載台具有一突出緣及一凹槽,該突出緣係位於該載台之一後端,該凹槽係位於該載台之一前端。The machine device according to claim 8, wherein the carrier has a protruding edge and a groove, the protruding edge is located at a rear end of the carrier, and the groove is located at a front end of the carrier. 如請求項1之機台裝置,更包括至少一升降載具,位於該機台本體之該等側部分中之一各別者,且附著至該機台本體之前部分。The machine device according to claim 1 further includes at least one lifting vehicle located on one of the side parts of the machine body and attached to the front part of the machine body. 如請求項10之機台裝置,其中該升降載具具有一夾頭,該夾頭係朝向該機台本體之後部分,用以夾取位於該工件置放區之一料盒。The machine tool device according to claim 10, wherein the lifting vehicle has a chuck heading toward the rear part of the machine body for clamping a material box located in the workpiece placement area. 如請求項10之機台裝置,其中該工作區之位置係對應於該升降載具及該工件置放區之間。The machine device according to claim 10, wherein the position of the working area corresponds to between the lifting vehicle and the workpiece placing area. 一種製程設備,其包括:    一移動通道;    至少一機台裝置,其包括:    一機台本體,具有一前部分及一後部分,該後部分係相對該前部分;及    一工作區,位於該機台本體,且朝向該前部分開放,以供一作業員進行作業;其中該至少一機台裝置之後部分係朝向該移動通道;及    一搬運裝置,位於該移動通道,以從該機台裝置之後部分進行取放作業。A process equipment, including: a mobile channel; at least one machine device, including: a machine body having a front part and a rear part, the rear part being opposite to the front part; and a working area located in the The machine body is open toward the front part for an operator to perform operations; wherein the at least one machine device is partly oriented toward the moving aisle behind; and a handling device is located in the moving aisle to remove the machine device After that, pick and place operations are carried out. 如請求項13之製程設備,更包括一軌道,位於該移動通道,且該搬運裝置係可在該軌道上移動。The process equipment of claim 13 further includes a track located on the moving path, and the handling device can move on the track. 如請求項13之製程設備,其中該搬運裝置係為一六軸機械手臂。The process equipment according to claim 13, wherein the handling device is a six-axis robot arm. 如請求項13之製程設備,更包括一儲料設備(Stocker),該移動通道係連通至該儲料設備。If the process equipment of claim 13 further includes a stocker (Stocker), the moving channel is connected to the stocker. 如請求項13之製程設備,其中,該至少一個機台裝置包括複數個機台裝置,該等機台裝置係排成至少一排,且該等機台裝置之後部分皆係朝向該移動通道。The process equipment according to claim 13, wherein the at least one machine device includes a plurality of machine devices, the machine devices are arranged in at least one row, and the subsequent parts of the machine devices are all directed toward the moving channel. 如請求項17之製程設備,該等機台裝置係排成一第一排及一第二排,該第一排係大致平行該第二排,該移動通道係位於該第一排及該第二排之間,且該第一排之該等機台裝置之後部分係面對該第二排之該等機台裝置之後部分。As in the process equipment of claim 17, the machine devices are arranged in a first row and a second row, the first row is substantially parallel to the second row, and the moving channel is located in the first row and the first row Between the two rows, and the parts behind the machine devices in the first row face the parts behind the machine devices in the second row. 一種製程設備之作動方法,其包括:    (a)提供複數個機台裝置,每一機台裝置包括一機台本體及一工作區,該機台本體具有一前部分及一後部分,該後部分係相對該前部分,該工作區位於該機台本體,且朝向該前部分開放;其中,該等機台裝置係排成至少一排,且該等機台裝置之後部分係朝向一移動通道;    (b)提供一搬運裝置於該移動通道;及    (c)利用該搬運裝置從該等機台裝置之後部分進行料盒取放作業,且該機台裝置在該工作區進行加工。A method for actuating process equipment, including: (a) providing a plurality of machine devices, each machine device includes a machine body and a working area, the machine body has a front part and a rear part, and the rear part The part is opposite to the front part, the working area is located on the machine body, and is open toward the front part; wherein, the machine devices are arranged in at least one row, and the part of the machine devices is facing a moving channel (B) Provide a handling device in the moving aisle; and (c) Use the handling device to carry out pick-and-place operations for the material boxes from the machine devices, and the machine device is processed in the work area. 如請求項19之作動方法,其中在(a)中,該等機台裝置係排成一第一排及一第二排,該第一排係大致平行該第二排,該移動通道係位於該第一排及該第二排之間,且該第一排之該等機台裝置之後部分係面對該第二排之該等機台裝置之後部分。The actuation method of claim 19, wherein in (a), the machine devices are arranged in a first row and a second row, the first row is substantially parallel to the second row, and the moving channel is located at Between the first row and the second row, and the rear parts of the machine devices in the first row face the rear parts of the machine devices in the second row. 如請求項19之作動方法,其中在(b)中,該搬運裝置係可在該移動通道中移動。The actuating method of claim 19, wherein in (b), the handling device is movable in the moving path. 如請求項19之作動方法,其中(c)包括:    (c1)利用該搬運裝置從該機台裝置之後部分將一第一料盒放置於該機台裝置之一第一下載台,其中第一料盒內容納至少一待加工工件;    (c2)利用該搬運裝置從該機台裝置之後部分將一第二料盒放置於該機台裝置之一第二上載台,其中該第二料盒係為空盒;    (c3)利用一第一升降載具夾取該第一料盒至該機台裝置之該工作區之進料端,且利用一第二升降載具夾取該第二料盒至該機台裝置之該工作區之出料端;    (c4)該機台裝置抽取該第一料盒內之待加工工件以於該工作區進行加工,且將加工後之工件放入該第二料盒;    (c5)利用該第一升降載具將該第一料盒放置於該機台裝置之一第一上載台,且利用該第二升降載具將該第二料盒放置於該機台裝置之一第二下載台;及    (c6)利用該搬運裝置從該機台裝置之後部分收取該第二料盒。As in the operation method of claim 19, wherein (c) includes: (c1) using the conveying device to place a first magazine on a first download station of the machine device from behind the machine device, wherein the first At least one workpiece to be processed is contained in the box; (c2) using the conveying device to partially place a second box on the second upload stage of the machine device from behind the machine device, wherein the second box is It is an empty box; (c3) Use a first lifting carrier to clamp the first material box to the feeding end of the working area of the machine device, and use a second lifting carrier to grab the second material box To the discharge end of the working area of the machine device; (c4) the machine device extracts the workpiece to be processed in the first material box for processing in the work area, and places the processed workpiece into the first Two material boxes; (c5) using the first lifting vehicle to place the first material box on a first uploading table of the machine device, and using the second lifting vehicle to place the second material box on the One of the second download stations of the machine device; and (c6) using the handling device to partially receive the second magazine from the machine device. 如請求項22之作動方法,其中(c6)更包括:    (c61)利用該搬運裝置將該第二料盒搬運至一儲料設備(Stocker)。As in the operation method of claim 22, (c6) further includes: (c61) using the handling device to transport the second box to a storage device (Stocker). 如請求項22之作動方法,其中(c6)之後,該作動方法更包括:    (c7)利用該搬運裝置從該機台裝置之後部分將該第一料盒從該機台裝置之一第一上載台搬運至第二上載台。As in the operation method of claim 22, after (c6), the operation method further includes: (c7) using the conveying device to partially upload the first magazine from one of the machine devices after the machine device The table is moved to the second uploading table.
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