TWI686669B - Photosensitive resin composition for light shielding film, light shielding film using the same, and color filter including that film - Google Patents
Photosensitive resin composition for light shielding film, light shielding film using the same, and color filter including that film Download PDFInfo
- Publication number
- TWI686669B TWI686669B TW104110361A TW104110361A TWI686669B TW I686669 B TWI686669 B TW I686669B TW 104110361 A TW104110361 A TW 104110361A TW 104110361 A TW104110361 A TW 104110361A TW I686669 B TWI686669 B TW I686669B
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- component
- shielding film
- resin composition
- photosensitive resin
- Prior art date
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- 239000011342 resin composition Substances 0.000 title claims abstract description 69
- 239000011347 resin Substances 0.000 claims abstract description 47
- 229920005989 resin Polymers 0.000 claims abstract description 47
- 239000002253 acid Substances 0.000 claims abstract description 44
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 239000002904 solvent Substances 0.000 claims abstract description 21
- 239000003999 initiator Substances 0.000 claims abstract description 12
- 239000000178 monomer Substances 0.000 claims abstract description 9
- 239000003513 alkali Substances 0.000 claims abstract description 7
- -1 fluorene-9,9-diyl group Chemical group 0.000 claims description 35
- 239000011248 coating agent Substances 0.000 claims description 24
- 238000000576 coating method Methods 0.000 claims description 24
- 150000001875 compounds Chemical class 0.000 claims description 24
- 239000007787 solid Substances 0.000 claims description 20
- 150000008064 anhydrides Chemical class 0.000 claims description 19
- 238000011161 development Methods 0.000 claims description 19
- 239000002270 dispersing agent Substances 0.000 claims description 19
- OFOBLEOULBTSOW-UHFFFAOYSA-N Malonic acid Chemical compound OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims description 17
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 claims description 17
- 239000006229 carbon black Substances 0.000 claims description 17
- 150000003628 tricarboxylic acids Chemical class 0.000 claims description 15
- 239000007864 aqueous solution Substances 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 10
- 150000000000 tetracarboxylic acids Chemical class 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 9
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- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 claims description 7
- 238000002156 mixing Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 6
- 125000000217 alkyl group Chemical group 0.000 claims description 3
- 125000004432 carbon atom Chemical group C* 0.000 claims description 3
- 125000005843 halogen group Chemical group 0.000 claims description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 3
- 239000000376 reactant Substances 0.000 claims description 3
- 238000000206 photolithography Methods 0.000 abstract description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 26
- 239000000243 solution Substances 0.000 description 22
- 238000000034 method Methods 0.000 description 19
- 239000004593 Epoxy Substances 0.000 description 16
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- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 13
- 238000003786 synthesis reaction Methods 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 12
- 238000011156 evaluation Methods 0.000 description 11
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- 239000007788 liquid Substances 0.000 description 10
- PJANXHGTPQOBST-UHFFFAOYSA-N stilbene Chemical compound C=1C=CC=CC=1C=CC1=CC=CC=C1 PJANXHGTPQOBST-UHFFFAOYSA-N 0.000 description 10
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- 238000012360 testing method Methods 0.000 description 10
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- KWYUFKZDYYNOTN-UHFFFAOYSA-M potassium hydroxide Inorganic materials [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 8
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- KMOUUZVZFBCRAM-UHFFFAOYSA-N 1,2,3,6-tetrahydrophthalic anhydride Chemical compound C1C=CCC2C(=O)OC(=O)C21 KMOUUZVZFBCRAM-UHFFFAOYSA-N 0.000 description 6
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 6
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- 238000001723 curing Methods 0.000 description 5
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- 230000035945 sensitivity Effects 0.000 description 5
- 238000003756 stirring Methods 0.000 description 5
- 125000001424 substituent group Chemical group 0.000 description 5
- 239000004094 surface-active agent Substances 0.000 description 5
- AYEKOFBPNLCAJY-UHFFFAOYSA-O thiamine pyrophosphate Chemical compound CC1=C(CCOP(O)(=O)OP(O)(O)=O)SC=[N+]1CC1=CN=C(C)N=C1N AYEKOFBPNLCAJY-UHFFFAOYSA-O 0.000 description 5
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical class C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 4
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- 239000004215 Carbon black (E152) Substances 0.000 description 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
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- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
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- 125000004203 4-hydroxyphenyl group Chemical group [H]OC1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 3
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- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 244000028419 Styrax benzoin Species 0.000 description 3
- 235000000126 Styrax benzoin Nutrition 0.000 description 3
- 235000008411 Sumatra benzointree Nutrition 0.000 description 3
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- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 125000003118 aryl group Chemical group 0.000 description 3
- 229960002130 benzoin Drugs 0.000 description 3
- 239000012965 benzophenone Substances 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
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- QGKMIGUHVLGJBR-UHFFFAOYSA-M (4z)-1-(3-methylbutyl)-4-[[1-(3-methylbutyl)quinolin-1-ium-4-yl]methylidene]quinoline;iodide Chemical compound [I-].C12=CC=CC=C2N(CCC(C)C)C=CC1=CC1=CC=[N+](CCC(C)C)C2=CC=CC=C12 QGKMIGUHVLGJBR-UHFFFAOYSA-M 0.000 description 2
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- 239000011230 binding agent Substances 0.000 description 1
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- IFDVQVHZEKPUSC-UHFFFAOYSA-N cyclohex-3-ene-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCC=CC1C(O)=O IFDVQVHZEKPUSC-UHFFFAOYSA-N 0.000 description 1
- RZIPTXDCNDIINL-UHFFFAOYSA-N cyclohexane-1,1,2,2-tetracarboxylic acid Chemical compound OC(=O)C1(C(O)=O)CCCCC1(C(O)=O)C(O)=O RZIPTXDCNDIINL-UHFFFAOYSA-N 0.000 description 1
- QSAWQNUELGIYBC-UHFFFAOYSA-N cyclohexane-1,2-dicarboxylic acid Chemical compound OC(=O)C1CCCCC1C(O)=O QSAWQNUELGIYBC-UHFFFAOYSA-N 0.000 description 1
- STZIXLPVKZUAMV-UHFFFAOYSA-N cyclopentane-1,1,2,2-tetracarboxylic acid Chemical compound OC(=O)C1(C(O)=O)CCCC1(C(O)=O)C(O)=O STZIXLPVKZUAMV-UHFFFAOYSA-N 0.000 description 1
- YZFOGXKZTWZVFN-UHFFFAOYSA-N cyclopentane-1,1-dicarboxylic acid Chemical compound OC(=O)C1(C(O)=O)CCCC1 YZFOGXKZTWZVFN-UHFFFAOYSA-N 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- JNWGOCSTXJQFEP-UHFFFAOYSA-N hexane-1,1,1,2-tetracarboxylic acid Chemical compound CCCCC(C(O)=O)C(C(O)=O)(C(O)=O)C(O)=O JNWGOCSTXJQFEP-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 125000002883 imidazolyl group Chemical group 0.000 description 1
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- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 1
- 229910052808 lithium carbonate Inorganic materials 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
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- 150000005309 metal halides Chemical class 0.000 description 1
- LVHBHZANLOWSRM-UHFFFAOYSA-N methylenebutanedioic acid Natural products OC(=O)CC(=C)C(O)=O LVHBHZANLOWSRM-UHFFFAOYSA-N 0.000 description 1
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- 238000006384 oligomerization reaction Methods 0.000 description 1
- 150000001451 organic peroxides Chemical class 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- MIVZUXGHPJSKRI-UHFFFAOYSA-N pentane-1,1,1,2-tetracarboxylic acid Chemical compound CCCC(C(O)=O)C(C(O)=O)(C(O)=O)C(O)=O MIVZUXGHPJSKRI-UHFFFAOYSA-N 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 238000003918 potentiometric titration Methods 0.000 description 1
- 150000003141 primary amines Chemical group 0.000 description 1
- 125000004076 pyridyl group Chemical group 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 125000000168 pyrrolyl group Chemical group 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 150000003335 secondary amines Chemical group 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 description 1
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- QJVXKWHHAMZTBY-GCPOEHJPSA-N syringin Chemical compound COC1=CC(\C=C\CO)=CC(OC)=C1O[C@H]1[C@H](O)[C@@H](O)[C@H](O)[C@@H](CO)O1 QJVXKWHHAMZTBY-GCPOEHJPSA-N 0.000 description 1
- 239000011975 tartaric acid Substances 0.000 description 1
- 235000002906 tartaric acid Nutrition 0.000 description 1
- 150000003505 terpenes Chemical class 0.000 description 1
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- 238000010998 test method Methods 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
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- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
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- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- QXJQHYBHAIHNGG-UHFFFAOYSA-N trimethylolethane Chemical compound OCC(C)(CO)CO QXJQHYBHAIHNGG-UHFFFAOYSA-N 0.000 description 1
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Landscapes
- Optical Filters (AREA)
- Materials For Photolithography (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
Abstract
Description
本發明涉及一種遮光膜用感光性樹脂組成物、及使其硬化而成的遮光膜,詳細而言涉及一種適於在透明基板上形成微細的遮光膜的鹼性水溶液顯影型遮光膜用感光性樹脂組成物、及使其硬化而成的遮光膜,硬化而所得的遮光膜可以在形成彩色濾光片的黑色矩陣等時適宜地利用。 The present invention relates to a photosensitive resin composition for a light-shielding film and a light-shielding film made by curing it, and more particularly to a photosensitive solution for an alkaline aqueous solution-developable light-shielding film suitable for forming a fine light-shielding film on a transparent substrate The resin composition and the light-shielding film obtained by curing it, and the light-shielding film obtained by curing can be suitably used when forming a black matrix of a color filter or the like.
彩色液晶顯示裝置以控制光的透射量或反射量的液晶部與彩色濾光片為構成元件,該彩色濾光片的製造方法通常使用如下的方法:在玻璃、塑料片材等透明基板的表面形成黑色的矩陣,繼而順次以條紋狀或馬賽克狀等彩色圖案而形成紅、綠、藍的不同的色相。 The color liquid crystal display device has a liquid crystal portion and a color filter that control the amount of light transmission or reflection as constituent elements. The method of manufacturing the color filter generally uses the following method: on the surface of a transparent substrate such as glass or plastic sheet A black matrix is formed, and successively different color hues of red, green, and blue are formed with color patterns such as stripes or mosaics.
最近數年來,在液晶電視、液晶顯示器、彩色液晶移動電話等各種領域中使用彩色液晶顯示裝置。彩色濾光片是影響彩 色液晶顯示裝置的視認性的重要的構件之一,為了提高視認性、亦即獲得鮮明的圖像,需要對構成彩色濾光片的紅(R)、綠(G)、藍(B)等像素進行比以前更高的色純度化,且在黑色矩陣中達成高遮光化,因此必需在感光性樹脂組成物中添加比現在更多量的著色劑。 In recent years, color liquid crystal display devices have been used in various fields such as liquid crystal televisions, liquid crystal displays, and color liquid crystal mobile phones. Color filters affect color One of the important components of the visibility of the color liquid crystal display device, in order to improve the visibility, that is, to obtain a clear image, the red (R), green (G), blue (B), etc. constituting the color filter The pixels have higher color purity than before, and high blackout is achieved in the black matrix. Therefore, it is necessary to add a larger amount of coloring agent to the photosensitive resin composition than now.
而且,在液晶顯示裝置中活躍地進行用以使視角、對比度、響應速度等特性提高的改善,接著有彩色濾光片的面板的結構複雜化,對樹脂黑色矩陣圖案的基板的密接性、絕緣性等要求特性變嚴格。 In addition, the liquid crystal display device is actively improving the viewing angle, contrast, response speed and other characteristics, and the structure of the panel with the color filter is complicated, and the adhesion and insulation of the resin black matrix pattern substrate Requirements such as sex become stricter.
然而,樹脂黑色矩陣用遮光材料(黑色色材)一般已知有碳黑,但碳黑的電阻低,因此存在成為引起顯示裝置的誤操作的原因的情況。特別是在獲得廣視角的平面轉換(In Plane Switching,IPS)方式的液晶顯示裝置中,在液晶層面內方向施加電場,因此如果黑色矩陣的電阻值低,則不能正常地施加電場,在液晶取向上產生混亂而成為顯示不均的原因。 However, the resin black matrix light-shielding material (black color material) is generally known as carbon black, but carbon black has a low resistance, and thus may cause a malfunction of the display device. In particular, in an In Plane Switching (IPS) liquid crystal display device that obtains a wide viewing angle, an electric field is applied in the direction of the liquid crystal plane. Therefore, if the resistance value of the black matrix is low, the electric field cannot be normally applied. Upward chaos is the cause of uneven display.
因此,作為使用碳黑而使黑色矩陣的電阻變大的方法,應用在碳黑的表面被覆樹脂的技術(參照專利文獻1),但是如果為了使電阻變高而增加樹脂被覆量,則在充分保持光圖案化性上能夠實現的遮光度有限,變得難以實現所要求的水準的高遮光、高電阻。因此,開發了使用能夠以比較高的電阻實現高遮光的鈦黑作為遮光材料的技術(參照專利文獻2),但擔心光圖案化性或保存穩定性不足。 Therefore, as a method of increasing the resistance of the black matrix using carbon black, a technique of coating resin on the surface of carbon black (refer to Patent Document 1), but if the amount of resin coating is increased in order to increase the resistance, it is sufficient The degree of shading that can be achieved while maintaining the light patternability is limited, making it difficult to achieve the required level of high shading and high resistance. Therefore, a technology using titanium black that can achieve high light shielding with a relatively high resistance as a light shielding material has been developed (refer to Patent Document 2), but there is a concern that the light patternability and storage stability are insufficient.
現在所使用的黑色矩陣一般是指體積電阻率(施加電壓為1V~10V)為1×1010Ω.cm以上,在所述專利文獻2中記載了1×1012Ω.cm的體積電阻率。其中,其是施加數V左右的交流電流而測定的數值,一般情況下施加電壓越變大則體積電阻率值越變小,因此擔心在10V的施加電壓下體積電阻率值進一步降低。 The black matrix used now generally refers to a volume resistivity (applied voltage of 1V~10V) of 1×10 10 Ω. cm or more, described in Patent Document 2 1×10 12 Ω. Volume resistivity in cm. Among them, it is a value measured by applying an alternating current of about several V. In general, the larger the applied voltage, the smaller the volume resistivity value. Therefore, there is a concern that the volume resistivity value will be further lowered at an applied voltage of 10V.
[專利文獻1]日本專利特開2001-207079號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2001-207079
[專利文獻2]日本專利特開2008-260927號公報 [Patent Document 2] Japanese Patent Laid-Open No. 2008-260927
本發明是鑒於所述問題點而成者,其目的在於提供具有如下性質的遮光膜用感光性樹脂組成物:維持高遮光與高電阻(在感光性樹脂組成物中,光密度OD為3.5/μm以上且不足4.0/μm,在施加10V電壓時保持1×1012Ω.cm以上的體積電阻率,而且OD為4.0/μm以上,在施加10V電壓時保持1×1011Ω.cm以上的體積電阻率),即使在形成例如10μm以下的細線的情況下顯影密接性也優異,且還可以形成8μm或6μm的細線,還可以充分確保與玻璃基板的密接性。本發明還提供一種使用該感光性樹脂組成物,利用光微影法而形成的遮光膜圖案等硬化物,進一步提供包含該硬化物的彩色濾光片或觸控面板。 The present invention was made in view of the above problems, and its object is to provide a photosensitive resin composition for a light-shielding film having the following properties: maintaining high light-shielding and high resistance (in the photosensitive resin composition, the optical density OD is 3.5/ μm or more and less than 4.0/μm, maintain a volume resistivity of 1×101 2 Ω·cm or more when a voltage of 10V is applied, and maintain an OD of 4.0/μm or more and maintain a pressure of 1×10 11 Ω·cm or more when a voltage of 10V is applied Volume resistivity), even when forming fine lines of, for example, 10 μm or less, is excellent in developing adhesion, and can also form fine lines of 8 μm or 6 μm, and can sufficiently ensure the adhesion to the glass substrate. The present invention also provides a cured product such as a light-shielding film pattern formed by photolithography using the photosensitive resin composition, and further provides a color filter or a touch panel including the cured product.
本發明者等人為了解決所述課題而進行了研究,結果發現通過調配具有特定結構及酸值的含有聚合性不飽和基的鹼可溶性樹脂而作為包含含有聚合性不飽和基的鹼可溶性樹脂、光聚合性單體、光聚合起始劑、遮光成分、及溶劑的感光性樹脂組成物的含有聚合性不飽和基的鹼可溶性樹脂,可製成光圖案化特性優異的感光性樹脂組成物,可獲得高遮光與高電阻的特性優異的遮光性硬化膜,從而完成本發明。 The inventors of the present invention conducted studies to solve the above-mentioned problems, and as a result, they found that by preparing a polymerizable unsaturated group-containing alkali-soluble resin having a specific structure and acid value as an alkali-soluble resin containing a polymerizable unsaturated group, The polymerizable unsaturated group-containing alkali-soluble resin of the photosensitive resin composition of the photopolymerizable monomer, photopolymerization initiator, light-shielding component, and solvent can be made into a photosensitive resin composition having excellent photopatterning characteristics. The invention can be completed by obtaining a light-shielding cured film excellent in characteristics of high light-shielding and high resistance.
亦即,本發明的主旨如下所述。 That is, the gist of the present invention is as follows.
(1)本發明是一種遮光膜用感光性樹脂組成物,其是包含下述(A)成分~(E)成分作為必須成分的遮光膜用感光性樹脂組成物:(A)含有聚合性不飽和基的鹼可溶性樹脂,其是使下述通式(I)所表示的化合物與(甲基)丙烯酸的反應物進一步與多元羧酸或其酸酐反應而所得、(B)具有至少1個乙烯性不飽和鍵的光聚合性單體、(C)光聚合起始劑、(D)選自由黑色有機顏料、混色有機顏料及遮光材料所構成的群組的1種以上遮光成分、及(E)溶劑;其特徵在於:(A)成分是使作為所述多元羧酸或其酸酐的(a)二羧酸或三羧酸或其酸酐、及(b)四羧酸或其酸二酐以(a)/(b)
的莫耳比成為0.01~0.5的範圍進行反應而獲得,且酸值為80mgKOH/g~120mgKOH/g的含有聚合性不飽和基的鹼可溶性樹脂;
其中,在通式(I)中,R1及R2獨立地表示氫原子、碳數為1~5的烷基、或鹵素原子,X表示-CO-、-SO2-、-C(CF3)2-、-Si(CH3)2-、-CH2-、-C(CH3)2-、-O-、或茀-9,9-二基或單鍵,n表示平均值0~10。 In the general formula (I), R 1 and R 2 independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogen atom, and X represents -CO-, -SO 2 -, and -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, or 茀-9,9-diyl or single bond, n represents the average value of 0 ~10.
(2)本發明也是根據(1)所述的遮光膜用感光性樹脂組成物,其中:(A)成分與(B)成分的質量比例(A)/(B)為50/50~90/10,相對於(A)成分與(B)成分的合計100質量份而含有2質量份~30質量份的(C)成分,且在遮光膜用感光性樹脂組成物的包含由於光硬化而成為固體成分的成分的固體成分中包含40質量%~70質量%的(D)成分。 (2) The present invention is also the photosensitive resin composition for a light-shielding film according to (1), wherein the mass ratio of (A) component to (B) component (A)/(B) is 50/50 to 90/ 10, containing 2 parts by mass to 30 parts by mass of the (C) component relative to 100 parts by mass of the (A) component and (B) component in total, and the inclusion of the photosensitive resin composition for the light-shielding film due to light curing becomes Solid component The solid component contains 40 to 70% by mass of the component (D).
(3)本發明也是根據(1)或(2)所述的遮光膜用感光性樹脂組成物,其中:更包含(F)分散劑,使(D)成分與(A)成分的一部分及(F)分散劑一同預先分散於(E)成分的一部分中之後,與剩餘的(A)成分、(B)成分、(C)成分、及剩餘的(E)成分混合而製造。 (3) The present invention is also a photosensitive resin composition for a light-shielding film according to (1) or (2), which further contains (F) a dispersant, and makes a part of (D) component and (A) component and ( F) After dispersing the dispersant in a part of the (E) component in advance, it is manufactured by mixing with the remaining (A) component, (B) component, (C) component, and the remaining (E) component.
(4)本發明也是根據(1)~(3)中任一項所述的遮光膜用感光性樹脂組成物,其中:(D)遮光成分是碳黑。 (4) The present invention is also the photosensitive resin composition for a light-shielding film according to any one of (1) to (3), wherein (D) the light-shielding component is carbon black.
(5)本發明也是根據(1)~(4)中任一項所述的遮光膜用感光性樹脂組成物,其中:用以形成在光密度OD為3.5/μm以上且不足4.0/μm時,施加10V電壓時的體積電阻率成為1×1012Ω.cm以上的塗膜。 (5) The present invention is also a photosensitive resin composition for a light-shielding film according to any one of (1) to (4), which is used to form when the optical density OD is 3.5/μm or more and less than 4.0/μm , The volume resistivity when a voltage of 10V is applied becomes 1×10 12 Ω. Coating film above cm.
(6)本發明也是根據(1)~(4)中任一項所述的遮光膜用感光性樹脂組成物,其中:用以形成在光密度OD為4.0/μm以上時,施加10V電壓時的體積電阻率成為1×1011Ω.cm以上的塗膜。 (6) The present invention is also a photosensitive resin composition for a light-shielding film according to any one of (1) to (4), which is used to form when a 10 V voltage is applied when the optical density OD is 4.0/μm or more The volume resistivity becomes 1×10 11 Ω. Coating film above cm.
(7)本發明也是一種遮光膜,其特徵在於:使根據(1)~(6)中任一項所述的遮光膜用感光性樹脂組成物硬化而形成。 (7) The present invention is also a light-shielding film characterized by being formed by hardening the photosensitive resin composition for a light-shielding film according to any one of (1) to (6).
(8)本發明也是一種彩色濾光片,其特徵在於包含遮光膜,所述遮光膜是將根據(1)~(6)中任一項所述的遮光膜用感光性樹脂組成物塗布於透明基板上,進行預烘烤後,利用紫外線曝光裝置進行曝光、利用鹼性水溶液進行顯影、及後烘烤而製作。 (8) The present invention is also a color filter, characterized by comprising a light-shielding film coated with the photosensitive resin composition for a light-shielding film according to any one of (1) to (6) After being prebaked on the transparent substrate, it is exposed by an ultraviolet exposure device, developed by an alkaline aqueous solution, and post-baked.
本發明的遮光膜用感光性樹脂組成物在OD為3.5/μm左 右的高遮光的遮光膜中,即使在10V的施加電壓下也可以維持體積電阻率為1×1012Ω.cm以上的高電阻,即使在形成線寬為10μm、進一步為8μm、6μm的細線的情況下,顯影密接性也優異,且可充分確保與玻璃基板的密接性。 The photosensitive resin composition for a light-shielding film of the present invention can maintain a volume resistivity of 1×10 12 Ω even in a high-light-shielding light-shielding film having an OD of about 3.5/μm even under an applied voltage of 10V. The high resistance of cm or more enables excellent adhesion in development even when thin lines with a line width of 10 μm, further 8 μm, and 6 μm are formed, and the adhesion to the glass substrate can be sufficiently ensured.
以下,關於本發明而加以詳細說明。 Hereinafter, the present invention will be described in detail.
(A)成分的含有聚合性不飽和基的鹼可溶性樹脂是使通式(I)所表示的環氧化合物與(甲基)丙烯酸(其表示“丙烯酸及/或甲基丙烯酸”)反應,使所得的具有羥基的化合物與(a)二羧酸或三羧酸或其酸酐、及(b)四羧酸或其酸二酐反應而所得的環氧(甲基)丙烯酸酯酸加成物。通式(I)所表示的環氧化合物表示雙酚類與表鹵醇反應而所得的環氧化合物或其同等物。(A)成分同時具有聚合性不飽和雙鍵與羧基,因此可對感光性樹脂組成物提供優異的光硬化性、良好的顯影性、圖案化特性,從而使遮光膜的物性提高。 (A) The alkali-soluble resin containing a polymerizable unsaturated group of the component is to react the epoxy compound represented by the general formula (I) with (meth)acrylic acid (which means "acrylic acid and/or methacrylic acid") to make An epoxy (meth)acrylate acid adduct obtained by reacting the obtained compound having a hydroxyl group with (a) a dicarboxylic acid or a tricarboxylic acid or its anhydride, and (b) a tetracarboxylic acid or its acid dianhydride. The epoxy compound represented by the general formula (I) means an epoxy compound obtained by reacting bisphenols and epihalohydrin or an equivalent thereof. (A) The component has both a polymerizable unsaturated double bond and a carboxyl group. Therefore, it can provide the photosensitive resin composition with excellent photocurability, good developability, and patterning characteristics, thereby improving the physical properties of the light-shielding film.
[化2]
其中,於通式(I)中,R1及R2獨立地表示氫原子、碳數為1~5的烷基、或鹵素原子,X表示-CO-、-SO2-、-C(CF3)2-、-Si(CH3)2-、-CH2-、-C(CH3)2-、-O-、或、茀-9,9-二基或單鍵,n是0~10的平均值。 In the general formula (I), R 1 and R 2 independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogen atom, and X represents -CO-, -SO 2 -, and -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, or, Fu-9,9-diyl or single bond, n is 0~ The average of 10.
提供通式(I)的環氧化合物的雙酚類可列舉雙(4-羥基苯基)酮、雙(4-羥基-3,5-二甲基苯基)酮、雙(4-羥基-3,5-二氯苯基)酮、雙(4-羥基苯基)碸、雙(4-羥基-3,5-二甲基苯基)碸、雙(4-羥基-3,5-二氯苯基)碸、雙(4-羥基苯基)六氟丙烷、雙(4-羥基-3,5-二甲基苯基)六氟丙烷、雙(4-羥基-3,5-二氯苯基)六氟丙烷、雙(4-羥基苯基)二甲基矽烷、雙(4-羥基-3,5-二甲基苯基)二甲基矽烷、雙(4-羥基-3,5-二氯苯基)二甲基矽烷、雙(4-羥基苯基)甲烷、雙(4-羥基-3,5-二氯苯基)甲烷、雙(4-羥基-3,5-二溴苯基)甲烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基)丙烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基-3-氯苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5-二甲基苯 基)醚、雙(4-羥基-3,5-二氯苯基)醚、9,9-雙(4-羥基苯基)茀、9,9-雙(4-羥基-3-甲基苯基)茀、9,9-雙(4-羥基-3-氯苯基)茀、9,9-雙(4-羥基-3-溴苯基)茀、9,9-雙(4-羥基-3-氟苯基)茀、9,9-雙(4-羥基-3-甲氧基苯基)茀、9,9-雙(4-羥基-3,5-二甲基苯基)茀、9,9-雙(4-羥基-3,5-二氯苯基)茀、9,9-雙(4-羥基-3,5-二溴苯基)茀、4,4'-聯苯酚、3,3'-聯苯酚等。其中,可特別優選使用通式(I)中的X是茀-9,9-二基的雙酚類。 Examples of the bisphenols that provide the epoxy compound of the general formula (I) include bis(4-hydroxyphenyl) ketone, bis(4-hydroxy-3,5-dimethylphenyl) ketone, and bis(4-hydroxy- 3,5-dichlorophenyl) ketone, bis(4-hydroxyphenyl) ash, bis(4-hydroxy-3,5-dimethylphenyl) ash, bis(4-hydroxy-3,5-di Chlorophenyl) ash, bis(4-hydroxyphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dimethylphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dichloro Phenyl) hexafluoropropane, bis(4-hydroxyphenyl) dimethyl silane, bis(4-hydroxy-3,5-dimethylphenyl) dimethyl silane, bis(4-hydroxy-3,5 -Dichlorophenyl)dimethylsilane, bis(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dichlorophenyl)methane, bis(4-hydroxy-3,5-dibromo Phenyl)methane, 2,2-bis(4-hydroxyphenyl)propane, 2,2-bis(4-hydroxy-3,5-dimethylphenyl)propane, 2,2-bis(4-hydroxyl -3,5-dichlorophenyl)propane, 2,2-bis(4-hydroxy-3-methylphenyl)propane, 2,2-bis(4-hydroxy-3-chlorophenyl)propane, bis (4-hydroxyphenyl) ether, bis(4-hydroxy-3,5-dimethylbenzene Group) ether, bis(4-hydroxy-3,5-dichlorophenyl) ether, 9,9-bis(4-hydroxyphenyl) stilbene, 9,9-bis(4-hydroxy-3-methylbenzene Radicals) stilbene, 9,9-bis(4-hydroxy-3-chlorophenyl) stilbene, 9,9-bis(4-hydroxy-3-bromophenyl) stilbene, 9,9-bis(4-hydroxy- 3-fluorophenyl) stilbene, 9,9-bis(4-hydroxy-3-methoxyphenyl) stilbene, 9,9-bis(4-hydroxy-3,5-dimethylphenyl) stilbene, 9,9-bis(4-hydroxy-3,5-dichlorophenyl) stilbene, 9,9-bis(4-hydroxy-3,5-dibromophenyl) stilbene, 4,4'-biphenol, 3,3'-biphenol, etc. Among them, bisphenols in which X in the general formula (I) is fluorene-9,9-diyl can be particularly preferably used.
用以衍生為(A)的鹼可溶性樹脂的通式(I)的化合物是使所述雙酚類與表氯醇反應而所得的具有2個縮水甘油醚基的環氧化合物。在該反應時,一般隨著二縮水甘油醚化合物的寡聚物化,n通常混合存在有多個值,因此成為平均值0~10(並不限為整數),優選的n的平均值是0~3。如果n的平均值超過上限值,則在製成使用鹼可溶性樹脂(所述鹼可溶性樹脂是使用該環氧化合物而合成的樹脂)的感光性樹脂組成物時,組成物的黏度過於變大而變得不能很好地進行塗布,無法充分賦予鹼可溶性而造成鹼性顯影性變得非常差。 The compound of the general formula (I) used to derive the alkali-soluble resin of (A) is an epoxy compound having two glycidyl ether groups obtained by reacting the bisphenols with epichlorohydrin. In this reaction, generally, as the oligomerization of the diglycidyl ether compound, n usually has a plurality of values mixed together, so the average value is 0 to 10 (not limited to an integer), and the preferred average value of n is 0 ~3. If the average value of n exceeds the upper limit, the viscosity of the composition becomes too large when a photosensitive resin composition using an alkali-soluble resin (the alkali-soluble resin is a resin synthesized using the epoxy compound) is prepared. On the other hand, the coating cannot be applied well, and the alkali solubility cannot be sufficiently imparted, and the alkali developability becomes very poor.
其次,使例如作為含有不飽和基的單羧酸的丙烯酸或甲基丙烯酸或其兩者與通式(I)的化合物反應,使(a)二羧酸或三羧酸或其酸酐、及(b)四羧酸或其酸二酐與由此獲得的具有羥基的反應物反應。此時,在(a)/(b)的莫耳比成為0.01~0.5的範圍內進行反應。由此反應而獲得具有環氧(甲基)丙烯酸酯酸加成物的結構的含有聚合性不飽和基的鹼可溶性樹脂。 Next, for example, acrylic acid or methacrylic acid, which is an unsaturated group-containing monocarboxylic acid, or both, is reacted with the compound of the general formula (I), and (a) dicarboxylic acid or tricarboxylic acid or its anhydride, and ( b) The tetracarboxylic acid or its acid dianhydride reacts with the reactant having a hydroxyl group thus obtained. At this time, the reaction is performed in a range where the molar ratio of (a)/(b) becomes 0.01 to 0.5. By this reaction, a polymerizable unsaturated group-containing alkali-soluble resin having a structure of an epoxy (meth)acrylate acid adduct is obtained.
環氧(甲基)丙烯酸酯酸加成物中所利用的(a)二羧酸或三羧酸或其酸酐可使用鏈式烴二羧酸或三羧酸或其酸酐或者脂環式二羧酸或三羧酸或其酸酐、芳香族二羧酸或三羧酸或其酸酐。此處,鏈式烴二羧酸或三羧酸或其酸酐例如存在有琥珀酸、乙醯基琥珀酸、馬來酸、己二酸、衣康酸、壬二酸、檸蘋酸、丙二酸、戊二酸、檸檬酸、酒石酸、氧代戊二酸、庚二酸、癸二酸、辛二酸、二甘醇酸等化合物,還可以是進一步導入有任意取代基的二羧酸或三羧酸或其酸酐。而且,脂環式二羧酸或三羧酸或其酸酐例如存在有環丁烷二羧酸、環戊烷二羧酸、六氫鄰苯二甲酸、四氫鄰苯二甲酸、降冰片烷二羧酸等化合物,還可以是進一步導入有任意取代基的二羧酸或三羧酸或其酸酐。進一步而言,芳香族二羧酸或三羧酸或其酸酐例如存在有鄰苯二甲酸、間苯二甲酸、偏苯三甲酸等化合物,還可以是進一步導入有任意取代基的二羧酸或三羧酸或其酸酐。 As the (a) dicarboxylic acid or tricarboxylic acid or its anhydride used in the epoxy (meth)acrylate acid adduct, chain hydrocarbon dicarboxylic acid or tricarboxylic acid or its anhydride or alicyclic dicarboxylic acid can be used Acid or tricarboxylic acid or its anhydride, aromatic dicarboxylic acid or tricarboxylic acid or its anhydride. Here, the chain hydrocarbon dicarboxylic acid or tricarboxylic acid or its anhydride is, for example, succinic acid, acetyl succinic acid, maleic acid, adipic acid, itaconic acid, azelaic acid, citracallic acid, malonic acid Compounds such as acid, glutaric acid, citric acid, tartaric acid, oxoglutaric acid, pimelic acid, sebacic acid, suberic acid, diglycolic acid, etc., or dicarboxylic acid or an optional substituent may be further introduced Tricarboxylic acid or its anhydride. Further, for example, alicyclic dicarboxylic acid or tricarboxylic acid or its anhydride includes, for example, cyclobutane dicarboxylic acid, cyclopentane dicarboxylic acid, hexahydrophthalic acid, tetrahydrophthalic acid, norbornane dicarboxylic acid The compound such as carboxylic acid may be a dicarboxylic acid or tricarboxylic acid or an anhydride thereof to which an optional substituent is further introduced. Furthermore, aromatic dicarboxylic acid or tricarboxylic acid or its anhydride, for example, compounds such as phthalic acid, isophthalic acid, trimellitic acid, etc. may be present, or a dicarboxylic acid or an optional substituent may be further introduced Tricarboxylic acid or its anhydride.
而且,環氧(甲基)丙烯酸酯酸加成物中所利用的(b)四羧酸或其酸二酐可使用鏈式烴四羧酸或其酸二酐或脂環式四羧酸或其酸二酐、或者芳香族多元羧酸或其酸二酐。此處,鏈式烴四羧酸或其酸二酐例如存在有丁烷四羧酸、戊烷四羧酸、己烷四羧酸等,還可以是進一步導入有任意取代基的四羧酸或其酸二酐。而且,脂環式四羧酸或其酸二酐例如存在有環丁烷四羧酸、環戊烷四羧酸、環己烷四羧酸、環庚烷四羧酸、降冰片烷四羧酸等,還可以是進一步導入有任意取代基的四羧酸或其酸二酐。另外, 芳香族四羧酸或其酸二酐例如可列舉均苯四甲酸、二苯甲酮四羧酸、聯苯四羧酸、聯苯醚四羧酸或其酸二酐,還可以是進一步導入有任意取代基的四羧酸或其酸二酐。 Furthermore, as the (b) tetracarboxylic acid or its acid dianhydride used in the epoxy (meth)acrylate acid adduct, a chain hydrocarbon tetracarboxylic acid or its acid dianhydride or an alicyclic tetracarboxylic acid or Its acid dianhydride, or aromatic polycarboxylic acid or its acid dianhydride. Here, the chain hydrocarbon tetracarboxylic acid or its acid dianhydride exists, for example, butane tetracarboxylic acid, pentane tetracarboxylic acid, hexane tetracarboxylic acid, etc., and may also be a tetracarboxylic acid or a tetracarboxylic acid to which an optional substituent is further introduced. Its acid dianhydride. In addition, for example, alicyclic tetracarboxylic acid or its acid dianhydride includes cyclobutane tetracarboxylic acid, cyclopentane tetracarboxylic acid, cyclohexane tetracarboxylic acid, cycloheptane tetracarboxylic acid, and norbornane tetracarboxylic acid. It may be a tetracarboxylic acid or an acid dianhydride to which an optional substituent is further introduced. In addition, Examples of the aromatic tetracarboxylic acid or its acid dianhydride include pyromellitic acid, benzophenone tetracarboxylic acid, biphenyltetracarboxylic acid, diphenyl ether tetracarboxylic acid or its acid dianhydride. Optional tetracarboxylic acid or its acid dianhydride.
環氧(甲基)丙烯酸酯酸加成物中所使用的(a)二羧酸或三羧酸或其酸酐與(b)四羧酸或其酸二酐的莫耳比(a)/(b)如上所述為0.01~0.5,優選為0.02以上且不足0.1。如果莫耳比(a)/(b)偏離所述範圍,則不能獲得用以製成本發明的高遮光且高電阻、而且具有良好的光圖案化性的感光性樹脂組成物的最適宜的分子量,因此並不優選。另外,莫耳比(a)/(b)越小則鹼溶解性越變大,存在分子量變大的傾向。 Molar ratio of (a) dicarboxylic acid or tricarboxylic acid or its anhydride to (b) tetracarboxylic acid or its acid dianhydride used in epoxy (meth)acrylate acid adduct (a)/( b) As described above, it is 0.01 to 0.5, preferably 0.02 or more and less than 0.1. If the molar ratio (a)/(b) deviates from the above range, the most suitable molecular weight of the photosensitive resin composition for producing the high-light-shielding, high-resistance, and good light patternability of the present invention cannot be obtained. , So it is not preferred. In addition, the smaller the molar ratio (a)/(b), the greater the alkali solubility and the greater the molecular weight tends to be.
環氧(甲基)丙烯酸酯酸加成物可通過所述步驟,利用已知的方法(例如日本專利特開平8-278629號公報或日本專利特開2008-9401號公報等中所記載的方法)而製造。首先,使(甲基)丙烯酸與通式(I)的環氧化合物反應的方法例如存在有:將與環氧化合物的環氧基等莫耳的(甲基)丙烯酸添加於溶劑中,在催化劑(三乙基苄基氯化銨、2,6-二異丁基苯酚等)的存在下,一面吹入空氣一面在90℃~120℃下進行加熱、攪拌而使其反應的方法。其次,作為使酸酐與反應產物環氧丙烯酸酯化合物的羥基反應的方法存在有:將環氧丙烯酸酯化合物與酸二酐及酸單酐的規定量添加於溶劑中,在催化劑(四乙基溴化銨、三苯基膦等)的存在下,在90℃~130℃下進行加熱、攪拌而使其反應的方法。 The epoxy (meth)acrylate acid adduct can pass the above-mentioned steps using known methods (for example, the method described in Japanese Patent Laid-Open No. 8-278629 or Japanese Patent Laid-Open No. 2008-9401, etc.) ) While manufacturing. First, a method of reacting (meth)acrylic acid with an epoxy compound of the general formula (I) includes, for example, adding a molar (meth)acrylic acid such as an epoxy group with an epoxy compound to a solvent, in a catalyst In the presence of (triethylbenzyl ammonium chloride, 2,6-diisobutylphenol, etc.), a method of reacting by heating and stirring at 90°C to 120°C while blowing air. Next, as a method of reacting the acid anhydride with the hydroxyl group of the reaction product epoxy acrylate compound, there is a method in which a predetermined amount of the epoxy acrylate compound and the acid dianhydride and acid monoanhydride are added to the solvent, and the catalyst (tetraethyl bromide In the presence of ammonium chloride, triphenylphosphine, etc.), the method of heating, stirring and reacting at 90 ℃ ~ 130 ℃.
關於含有聚合性不飽和基的鹼可溶性樹脂(A)的重量平 均分子量(Mw),優選為4000~20000的範圍,更優選為4500~7000之間。如果重量平均分子量(Mw)不足4000,則發現難以在1V~10V之間維持使用(A)的感光性樹脂組成物的高電阻的傾向,而且如果重量平均分子量(Mw)超過20000,則在製成高遮光的感光性樹脂組成物時,變得容易殘留顯影殘渣或未曝光部的殘膜。另外,(A)的酸值是80mgKOH/g~120mgKOH/g的範圍。如果該值小於80mgKOH/g,則在使用(A)的感光性樹脂組成物的鹼性顯影時變得容易殘留殘渣;如果超過120mgKOH/g,則鹼性顯影液在使用(A)的高遮光的感光性樹脂組成物中的滲透過於變快,從而產生剝離現象,因此均不優選。另外,關於(A)的含有聚合性不飽和基的鹼可溶性樹脂,可使用其僅僅1種,也可以使用2種以上的混合物。 About the weight of the alkali-soluble resin (A) containing a polymerizable unsaturated group The average molecular weight (Mw) is preferably in the range of 4,000 to 20,000, and more preferably in the range of 4,500 to 7,000. If the weight average molecular weight (Mw) is less than 4000, it is found that it is difficult to maintain the high resistance of the photosensitive resin composition using (A) between 1V and 10V, and if the weight average molecular weight (Mw) exceeds 20,000, the In the case of a highly light-shielding photosensitive resin composition, it becomes easy to leave a developing residue or a residual film in an unexposed portion. In addition, the acid value of (A) is in the range of 80 mgKOH/g to 120 mgKOH/g. If the value is less than 80 mgKOH/g, residues tend to remain during alkaline development using the photosensitive resin composition of (A); if it exceeds 120 mgKOH/g, the alkaline developer has high light shielding using (A) The penetration in the photosensitive resin composition becomes too fast and peeling occurs, which is not preferable. In addition, as for the alkali-soluble resin containing a polymerizable unsaturated group of (A), only one type thereof may be used, or a mixture of two or more types may be used.
其次,(B)具有至少1個乙烯性不飽和鍵的光聚合性單體例如可列舉(甲基)丙烯酸-2-羥基乙酯、(甲基)丙烯酸-2-羥基丙酯、(甲基)丙烯酸-2-羥基己酯等具有羥基的(甲基)丙烯酸酯類,乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、亞丁二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基乙烷三(甲基)丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇四(甲基)丙烯酸酯、甘油(甲基)丙烯酸酯、山梨糖醇五(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、或二季戊四醇六(甲基)丙烯酸酯、山梨糖醇 六(甲基)丙烯酸酯、膦腈的環氧烷改性六(甲基)丙烯酸酯、己內酯改性二季戊四醇六(甲基)丙烯酸酯等(甲基)丙烯酸酯類,可使用這些的1種或2種以上。另外,(B)具有至少1個乙烯性不飽和鍵的光聚合性單體並不具有游離的羧基。 Next, (B) the photopolymerizable monomer having at least one ethylenically unsaturated bond includes, for example, 2-hydroxyethyl (meth)acrylate, 2-hydroxypropyl (meth)acrylate, (methyl ) 2-hydroxyhexyl acrylate and other (meth)acrylates with hydroxyl groups, ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, triethylene glycol di(meth) Base) acrylate, tetraethylene glycol di(meth)acrylate, butylene glycol di(meth)acrylate, trimethylolpropane tri(meth)acrylate, trimethylolethane tri(meth) Base) acrylate, pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol tetra(meth)acrylate, glycerol (meth)acrylate, Sorbitol penta(meth)acrylate, dipentaerythritol penta(meth)acrylate, or dipentaerythritol hexa(meth)acrylate, sorbitol (Meth)acrylates such as hexa(meth)acrylate, phosphazene alkylene oxide modified hexa(meth)acrylate, caprolactone modified dipentaerythritol hexa(meth)acrylate, etc. can be used 1 or 2 or more. In addition, (B) the photopolymerizable monomer having at least one ethylenically unsaturated bond does not have a free carboxyl group.
這些(A)成分與(B)成分的調配比例以質量比(A)/(B)計而言可為50/50~90/10,優選為60/40~80/20。如果(A)成分的調配比例以(A)/(B)計而言少於50/50,則產生如下問題:光硬化後的硬化物變脆,而且在未曝光部中塗膜的酸值低,因此對鹼性顯影液的溶解性降低,圖案邊緣成為鋸齒狀變得不清晰;而且,如果以(A)/(B)計而言多於90/10,則可能會產生如下問題:樹脂中所占的光反應性官能基的比例少而並不充分地形成交聯結構,另外樹脂成分中的酸值度過高,曝光部中的相對於鹼性顯影液的溶解性變高,因此所形成的圖案變得比目標線寬更細,變得容易產生圖案缺口等。 The mixing ratio of these components (A) and (B) can be 50/50 to 90/10 in terms of mass ratio (A)/(B), preferably 60/40 to 80/20. If the compounding ratio of (A) component is less than 50/50 in terms of (A)/(B), the following problems arise: the cured product after photocuring becomes brittle, and the acid value of the coating film in the unexposed portion Low, so the solubility in alkaline developer is reduced, and the edges of the pattern become jagged and unclear; and if it is more than 90/10 in terms of (A)/(B), the following problems may occur: The proportion of photoreactive functional groups in the resin is small and the cross-linked structure is not sufficiently formed. In addition, the acid value in the resin component is too high, and the solubility in the exposed portion with respect to the alkaline developer becomes high, so The formed pattern becomes thinner than the target line width, and it becomes easy to cause pattern notch and the like.
而且,(C)成分的光聚合起始劑例如可列舉苯乙酮、2,2-二乙氧基苯乙酮、對二甲基苯乙酮、對二甲基胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、對第三丁基苯乙酮等苯乙酮類,二苯甲酮、2-氯二苯甲酮、p,p'-雙二甲基胺基二苯甲酮等二苯甲酮類,苯偶醯、安息香、安息香甲醚、安息香異丙醚、安息香異丁醚等安息香醚類,2-(鄰氯苯基)-4,5-苯基聯咪唑、2-(鄰氯苯基)-4,5-二(間甲氧基苯基)聯咪唑、2-(鄰氟苯基)-4,5-二苯基聯咪唑、2-(鄰甲氧基苯基)-4,5-二苯基聯咪唑、2,4,5-三芳基聯咪唑等聯咪唑系化合物 類,2-三氯甲基-5-苯乙烯基-1,3,4-噁二唑、2-三氯甲基-5-(對氰基苯乙烯基)-1,3,4-噁二唑、2-三氯甲基-5-(對甲氧基苯乙烯基)-1,3,4-噁二唑等鹵代甲基二唑化合物類,2,4,6-三(三氯甲基)-1,3,5-三嗪、2-甲基-4,6-雙(三氯甲基)-1,3,5-三嗪、2-苯基-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-氯苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基萘基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(3,4,5-三甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲硫基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪等鹵代甲基均三嗪系化合物類,1,2-辛二酮,1-[4-(苯硫基)苯基]-,2-(O-苯甲醯肟)、1-(4-苯磺醯基苯基)丁烷-1,2-二酮-2-肟-O-苯甲酸酯、1-(4-甲磺醯基苯基)丁烷-1,2-二酮-2-肟-O-乙酸酯、1-(4-甲磺醯基苯基)丁烷-1-酮肟-O-乙酸酯等O-醯基肟系化合物類,苄基二甲基縮酮、噻噸酮、2-氯噻噸酮、2,4-二乙基噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮等硫化合物,2-乙基蒽醌、八甲基蒽醌、1,2-苯並蒽醌、2,3-二苯基蒽醌等蒽醌類,偶氮雙異丁基腈、過氧化苯甲醯、過氧化枯烯等有機過氧化物,2-巰基苯並咪唑、2-巰基苯並噁唑、2-巰基苯並噻唑等硫醇化合物等。其中,自容易獲得高感度的遮光膜用感光性樹脂組成物的觀點考慮,優選使用O-醯基肟系化合物類。而且,還可以使用2種以上這些光聚合起始劑。另外,本發明中所謂的“光聚合起始劑”,以包含增感劑的含義而使用。 Furthermore, the photopolymerization initiator of the component (C) includes, for example, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminophenylacetone, and dichloro Acetophenone, trichloroacetophenone, p-tert-butylacetophenone and other acetophenones, benzophenone, 2-chlorobenzophenone, p,p'-bisdimethylaminobenzophenone Benzophenones such as ketone, benzoin, benzoin, benzoin methyl ether, benzoin isopropyl ether, benzoin isobutyl ether and other benzoin ethers, 2-(o-chlorophenyl)-4,5-phenylbiimidazole , 2-(o-chlorophenyl)-4,5-bis(m-methoxyphenyl)biimidazole, 2-(o-fluorophenyl)-4,5-diphenylbiimidazole, 2-(o-methyl Oxyphenyl)-4,5-diphenylbiimidazole, 2,4,5-triarylbiimidazole and other biimidazole-based compounds Class, 2-trichloromethyl-5-styryl-1,3,4-oxadiazole, 2-trichloromethyl-5-(p-cyanostyryl)-1,3,4-oxo Halogenated methyl diazole compounds such as diazole, 2-trichloromethyl-5-(p-methoxystyryl)-1,3,4-oxadiazole, 2,4,6-tri(tri (Chloromethyl)-1,3,5-triazine, 2-methyl-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-phenyl-4,6-bis (Trichloromethyl)-1,3,5-triazine, 2-(4-chlorophenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-( 4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methoxynaphthyl)-4,6-bis(trichloro Methyl)-1,3,5-triazine, 2-(4-methoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-( 3,4,5-trimethoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methylthiostyryl)-4, 6-bis(trichloromethyl)-1,3,5-triazine and other halogenated methyl s-triazine compounds, 1,2-octanedione, 1-[4-(phenylthio)phenyl ]-,2-(O-benzoyl oxime), 1-(4-benzenesulfonyl phenyl) butane-1,2-dione-2-oxime-O-benzoate, 1-( 4-Methanesulfonylphenyl)butane-1,2-dione-2-oxime-O-acetate, 1-(4-methylsulfonylphenyl)butane-1-oneoxime-O -Acetate and other O-acyl oxime compounds, benzyl dimethyl ketal, thioxanthone, 2-chlorothioxanthone, 2,4-diethylthioxanthone, 2-methylthioxanthone Sulfur compounds such as ketones, 2-isopropylthioxanthone, anthraquinones such as 2-ethylanthraquinone, octamethylanthraquinone, 1,2-benzoanthraquinone, 2,3-diphenylanthraquinone, Organic peroxides such as azobisisobutylnitrile, benzoyl peroxide, cumene peroxide, thiol compounds such as 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole, etc. . Among them, from the viewpoint of easily obtaining a photosensitive resin composition for a light-shielding film with high sensitivity, it is preferable to use O-acyl oxime-based compounds. Furthermore, two or more kinds of these photopolymerization initiators can also be used. In addition, the "photopolymerization initiator" in the present invention is used to include a sensitizer.
這些光聚合起始劑或增感劑可以單獨使用其僅僅1種,除此以外還可以將2種以上組合使用。而且,還可以添加雖然其自身並不作為光聚合起始劑或增感劑而起作用,但通過組合使用而可使光聚合起始劑或增感劑的能力增大的化合物。此種化合物例如可列舉如果與二苯甲酮組合使用而具有效果的三乙醇胺、三乙胺等三級胺。 Only one of these photopolymerization initiators or sensitizers may be used alone, or two or more of them may be used in combination. Furthermore, it is also possible to add a compound that can increase the ability of the photopolymerization initiator or sensitizer by using it in combination although it does not function as a photopolymerization initiator or sensitizer. Examples of such compounds include tertiary amines such as triethanolamine and triethylamine which have an effect when used in combination with benzophenone.
至於(C)成分的光聚合起始劑的使用量,以(A)成分與(B)成分的合計100質量份為基準而言可以是2質量份~30質量份,優選為5質量份~25質量份。在(C)成分的調配比例不足2質量份的情況下,光聚合的速度變慢,感度降低;另一方面,在超過30質量份的情況下,可能會產生如下問題:感度過強,成為圖案線寬相對於圖案遮罩而變粗的狀態,無法相對於遮罩而再現忠實的線寬,或者圖案邊緣成為鋸齒狀而無法變清晰(sharp)。 As for the usage amount of the photopolymerization initiator of the component (C), based on the total of 100 parts by mass of the component (A) and the component (B), it may be 2 to 30 parts by mass, preferably 5 parts by mass. 25 parts by mass. When the blending ratio of the component (C) is less than 2 parts by mass, the photopolymerization rate becomes slower and the sensitivity decreases; on the other hand, when it exceeds 30 parts by mass, the following problems may occur: In a state where the line width of the pattern is thickened relative to the pattern mask, the faithful line width cannot be reproduced relative to the mask, or the edge of the pattern becomes jagged and cannot be sharpened.
(D)成分是選自黑色有機顏料、混色有機顏料或遮光材料的遮光成分,可以是耐熱性、耐光性及耐溶劑性優異的成分。此處,黑色有機顏料例如可列舉苝黑、苯胺黑、花青黑等。混色有機顏料可列舉將選自紅、藍、綠、紫、黃色、花青、品紅等的2種以上顏料混合而進行模擬黑色化而成的顏料。遮光材料可列舉碳黑、氧化鉻、氧化鐵、鈦黑等。遮光成分還可以適宜選擇2種以上而使用,特別是在遮光性、表面平滑性、分散穩定性、與樹脂的相容性良好的方面而言,優選碳黑。而且,在想要使用碳黑 更進一步提高遮光膜的電阻值的情況下,也可以使用以染料、顏料、樹脂等被覆碳黑表面而成的表面被覆碳黑。 (D) The component is a light-shielding component selected from black organic pigments, mixed-color organic pigments, or light-shielding materials, and may be a component excellent in heat resistance, light resistance, and solvent resistance. Here, examples of the black organic pigment include perylene black, aniline black, and cyanine black. Examples of the mixed color organic pigment include pigments obtained by mixing two or more pigments selected from the group consisting of red, blue, green, purple, yellow, cyanine, and magenta to simulate blackening. Examples of the light-shielding material include carbon black, chromium oxide, iron oxide, and titanium black. The light-shielding component can also be used by appropriately selecting two or more kinds, and in particular, carbon black is preferable in terms of good light-shielding properties, surface smoothness, dispersion stability, and compatibility with resins. Moreover, when you want to use carbon black When the resistance value of the light-shielding film is further increased, it is also possible to use a carbon black surface-coated surface coated with a dye, pigment, resin, or the like.
而且,(E)成分的溶劑例如可列舉甲醇、乙醇、正丙醇、異丙醇、乙二醇、丙二醇等醇類,α-松油醇或β-松油醇等萜烯類等,丙酮、甲基乙基酮、環己酮、N-甲基-2-吡咯烷酮等酮類,甲苯、二甲苯、四甲基苯等芳香族烴類,溶纖劑、甲基溶纖劑、乙基溶纖劑、卡必醇、甲基卡必醇、乙基卡必醇、丁基卡必醇、丙二醇單甲醚、丙二醇單乙醚、二丙二醇單甲醚、二丙二醇單乙醚、三乙二醇單甲醚、三乙二醇單乙醚等二醇醚類,乙酸乙酯、乙酸丁酯、溶纖劑乙酸酯、乙基溶纖劑乙酸酯、丁基溶纖劑乙酸酯、卡必醇乙酸酯、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等乙酸酯類等,通過使用這些溶劑進行溶解、混合,可製成均一的溶液狀組成物。 Furthermore, the solvent of the component (E) includes, for example, alcohols such as methanol, ethanol, n-propanol, isopropanol, ethylene glycol, and propylene glycol, terpenes such as α-terpineol or β-terpineol, and acetone. , Methyl ethyl ketone, cyclohexanone, N-methyl-2-pyrrolidone and other ketones, toluene, xylene, tetramethylbenzene and other aromatic hydrocarbons, cellosolve, methyl cellosolve, ethyl Cellosolve, carbitol, methyl carbitol, ethyl carbitol, butyl carbitol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol Glycol ethers such as monomethyl ether, triethylene glycol monoethyl ether, ethyl acetate, butyl acetate, cellosolve acetate, ethyl cellosolve acetate, butyl cellosolve acetate, carbitol Acetate, ethyl carbitol acetate, butyl carbitol acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate and other acetates are dissolved and mixed by using these solvents , Can be made into a uniform solution composition.
而且,這些遮光成分優選預先與(F)分散劑一同分散於溶劑中而製成遮光性分散液,然後調配為遮光膜用感光性樹脂組成物。此處,使其分散的溶劑成為(E)成分的一部分,因此如果是在所述(E)成分中所列舉的化合物則可使用,例如可適宜使用丙二醇單甲醚乙酸酯、乙酸-3-甲氧基丁酯等。關於形成遮光性分散液的(D)遮光成分的調配比例,可以是相對於本發明的遮光膜用感光性樹脂組成物的所有固體成分而言在40質量%~70質量%的範圍內使用,特別優選40質量%~60質量%的範圍。如果少於40質量%,則作為高遮光用途而言,遮光性變得不充分。如果超 過70質量%,則本來成為黏合劑的感光性樹脂的含量減少,因此產生有損顯影特性且損及膜形成能力等而並不優選的問題。 Furthermore, these light-shielding components are preferably dispersed in a solvent together with the (F) dispersant in advance to prepare a light-shielding dispersion liquid, and then formulated into a photosensitive resin composition for a light-shielding film. Here, the solvent in which it is dispersed becomes part of the (E) component, so it can be used if it is the compound listed in the (E) component, for example, propylene glycol monomethyl ether acetate, acetic acid-3 can be suitably used -Methoxybutyl ester, etc. The formulation ratio of the (D) light-shielding component forming the light-shielding dispersion liquid can be used in the range of 40% by mass to 70% by mass relative to all solid components of the photosensitive resin composition for light-shielding film of the present invention. Particularly, the range of 40% by mass to 60% by mass is preferable. If it is less than 40% by mass, the light-shielding property becomes insufficient for high light-shielding use. If super If it exceeds 70% by mass, the content of the photosensitive resin originally used as a binder is reduced, and thus there is a problem that development characteristics are impaired, film formation ability, etc. are impaired, which is not preferable.
而且,在遮光性分散液中,為了使遮光成分穩定地分散而使用(F)分散劑,在該目的中可使用各種高分子分散劑等公知的分散劑。作為分散劑的例子,可並無特別限制地使用現有顏料分散中所使用的公知的化合物(以分散劑、分散濕潤劑、分散促進劑等名稱而市售的化合物等),例如可列舉陽離子性高分子系分散劑、陰離子性高分子系分散劑、非離子性高分子系分散劑、顏料衍生物型分散劑(分散助劑)等。特別適宜的是具有咪唑基、吡咯基、吡啶基、一級胺基、二級胺基或三級胺基等陽離子性官能基作為在顏料上的吸附點,胺值為1mgKOH/g~100mgKOH/g、數量平均分子量處於1千~10萬的範圍的陽離子性高分子系分散劑。關於該分散劑的調配量,相對於遮光成分而言為1質量%~30質量%,優選為2質量%~25質量%。 Furthermore, in the light-shielding dispersion liquid, the (F) dispersant is used in order to stably disperse the light-shielding component, and for this purpose, various well-known dispersants such as various polymer dispersants can be used. As examples of the dispersant, known compounds used in the dispersion of existing pigments (compounds commercially available under the names of dispersants, dispersing wetting agents, dispersion accelerators, etc.) can be used without particular limitation, and examples include cationic Polymer-based dispersant, anionic polymer-based dispersant, nonionic polymer-based dispersant, pigment derivative-type dispersant (dispersion aid), etc. Particularly suitable is to have an imidazolyl group, a pyrrolyl group, a pyridyl group, a primary amine group, a secondary amine group or a tertiary amine group and other cationic functional groups as the adsorption point on the pigment, the amine value is 1mgKOH/g~100mgKOH/g 1. Cationic polymer-based dispersant whose number average molecular weight is in the range of 1,000 to 100,000. The blending amount of the dispersant is 1% by mass to 30% by mass, preferably 2% by mass to 25% by mass relative to the light-shielding component.
另外,在製備遮光性分散液時,除了所述分散劑以外而共分散(A)成分的含有聚合性不飽和基的鹼可溶性樹脂的一部分,由此而在製成遮光膜用感光性樹脂組成物時,可製成容易將曝光感度維持為高感度、顯影時的密接性良好且難以產生殘渣的問題的感光性樹脂組成物。(A)成分的調配量優選為遮光性分散液中的2質量%~20質量%,更優選為5質量%~15質量%。如果(A)成分不足2質量%,則無法獲得共分散的效果(感度提高、密接性提高、殘渣減低等效果)。而且,如果是20質量%以上,則 特別是在遮光材料的含量大時,遮光性分散液的黏度高,變得難以均一地分散或者非常需要時間,變得難以獲得用以獲得高電阻的塗膜的感光性樹脂組成物。而且,所得的遮光性分散液可通過與剩餘的(A)成分、(B)成分、(C)成分、及剩餘的(E)成分混合而製成遮光膜用感光性樹脂組成物。 In addition, when preparing the light-shielding dispersion liquid, a part of the alkali-soluble resin containing the polymerizable unsaturated group of the component (A) is co-dispersed in addition to the dispersant, thereby forming a photosensitive resin composition for the light-shielding film In the case of a photosensitive resin composition, a photosensitive resin composition that can easily maintain the exposure sensitivity at a high sensitivity, has good adhesion during development, and is less likely to cause residue problems. (A) The formulation amount of the component is preferably 2% by mass to 20% by mass in the light-shielding dispersion liquid, and more preferably 5% by mass to 15% by mass. If the component (A) is less than 2% by mass, the effect of co-dispersion (effects such as improved sensitivity, improved adhesion, and reduced residue) cannot be obtained. Moreover, if it is 20% by mass or more, then In particular, when the content of the light-shielding material is large, the viscosity of the light-shielding dispersion liquid is high, and it becomes difficult to uniformly disperse or it takes much time, and it becomes difficult to obtain a photosensitive resin composition for obtaining a coating film with high resistance. Moreover, the obtained light-shielding dispersion liquid can be made into the photosensitive resin composition for light-shielding films by mixing with the remaining (A) component, (B) component, (C) component, and remaining (E) component.
而且,在本發明的感光性樹脂組成物中,可以視需要調配硬化促進劑、熱聚合抑制劑、增塑劑、填充材料、溶劑、流平劑、消泡劑、偶聯劑、表面活性劑等添加劑。熱聚合抑制劑可列舉對苯二酚、對苯二酚單甲醚、鄰苯三酚、第三丁基兒茶酚、吩噻嗪等,增塑劑可列舉鄰苯二甲酸二丁酯、鄰苯二甲酸二辛酯、磷酸三甲苯酯等,填充材料可列舉玻璃纖維、二氧化矽、雲母、氧化鋁等,消泡劑或流平劑可列舉矽酮系、氟系、丙烯酸系的化合物。而且,表面活性劑可列舉氟系表面活性劑、矽酮系表面活性劑等,偶聯劑可列舉3-(縮水甘油氧基)丙基三甲氧基矽烷、3-異氰酸基丙基三乙氧基矽烷、3-脲基丙基三乙氧基矽烷等矽烷偶聯劑。 Furthermore, in the photosensitive resin composition of the present invention, a hardening accelerator, a thermal polymerization inhibitor, a plasticizer, a filler, a solvent, a leveling agent, a defoaming agent, a coupling agent, and a surfactant can be formulated as necessary And other additives. Examples of thermal polymerization inhibitors include hydroquinone, hydroquinone monomethyl ether, pyrogallol, tertiary butyl catechol, and phenothiazine, and plasticizers include dibutyl phthalate, Dioctyl phthalate, tricresyl phosphate, etc., fillers include glass fiber, silica, mica, alumina, etc., antifoaming agent or leveling agent include silicone, fluorine, acrylic Compound. Further, the surfactant includes fluorine-based surfactants, silicone surfactants, and the like, and the coupling agent includes 3-(glycidoxy)propyltrimethoxysilane, 3-isocyanatopropyltris Silane coupling agent such as ethoxysilane, 3-ureidopropyltriethoxysilane.
本發明的感光性樹脂組成物含有所述(A)成分~(E)成分作為主成分。在除了溶劑的固體成分(固體成分中包括在硬化後成為固體成分的單體)中,包含合計為80質量%、優選90質量%以上的(A)成分~(D)成分。(E)溶劑的量根據目標黏度而變化,可以是在感光性樹脂組成物中以70質量%~90質量%的範圍包含(E)溶劑。 The photosensitive resin composition of this invention contains the said (A) component-(E) component as a main component. The solid component excluding the solvent (the solid component includes a monomer that becomes a solid component after curing) contains components (A) to (D) in a total amount of 80% by mass, preferably 90% by mass or more. (E) The amount of solvent varies depending on the target viscosity, and the photosensitive resin composition may contain (E) the solvent in the range of 70% by mass to 90% by mass.
本發明中的遮光膜用感光性樹脂組成物例如作為彩色濾光片遮光膜形成用感光性樹脂組成物而優異,遮光膜的形成方法存在有如下所述的光微影法。可列舉如下的方法:首先,將感光性樹脂組成物塗布於透明基板上,其次使溶劑乾燥(預烘烤),然後在如上所述而所得的覆膜上放置光遮罩,照射紫外線而使曝光部硬化,進一步進行使用鹼性水溶液而使未曝光部溶出的顯影,從而形成圖案,進一步為進行後乾燥而進行後烘烤(熱燒成)。 The photosensitive resin composition for a light-shielding film in the present invention is excellent as, for example, a photosensitive resin composition for forming a light-shielding film of a color filter, and a method for forming a light-shielding film includes a photolithography method as described below. The following methods may be mentioned: first, the photosensitive resin composition is applied on a transparent substrate, and secondly, the solvent is dried (pre-baking), and then a photomask is placed on the coating film obtained as described above, and ultraviolet rays are irradiated to The exposed portion is hardened, and further developed by using an alkaline aqueous solution to elute the unexposed portion to form a pattern, and further post-baked (thermally fired) for post-drying.
塗布感光性樹脂組成物的透明基板除了玻璃基板以外,可例示在透明膜(例如聚碳酸酯、聚對苯二甲酸乙二酯、聚醚碸等)上蒸鍍或圖案化有ITO或金等透明電極的基板等。在透明基板上塗布感光性樹脂組成物的溶液的方法除了公知的溶液浸漬法、噴霧法以外,還可以採用使用輥塗機、砂塗機、狹縫塗布機或旋轉機的方法等任意方法。利用該些方法而塗布為所期望的厚度後,將溶劑除去(預烘烤),由此而形成覆膜。預烘烤可通過利用烘箱、加熱板等進行加熱而進行預烘烤。預烘烤的加熱溫度及加熱時間可根據所使用的溶劑而適宜選擇,例如在60℃~110℃的溫度下進行1分鐘~3分鐘。 In addition to the glass substrate, the transparent substrate coated with the photosensitive resin composition may be exemplified by ITO or gold deposited on a transparent film (for example, polycarbonate, polyethylene terephthalate, polyether ash, etc.) or patterned on it. Transparent electrode substrate, etc. The method of applying the solution of the photosensitive resin composition on the transparent substrate may be any method such as a method using a roll coater, a sand coater, a slit coater, or a rotary machine in addition to the well-known solution dipping method and spray method. After coating to a desired thickness by these methods, the solvent is removed (pre-baked), thereby forming a coating. The pre-baking can be performed by heating using an oven, a hot plate, or the like. The heating temperature and heating time of the pre-baking can be appropriately selected according to the solvent used, for example, at a temperature of 60°C to 110°C for 1 minute to 3 minutes.
在預烘烤後所進行的曝光可利用紫外線曝光裝置而進行,經由光遮罩而進行曝光,由此而僅僅使與圖案對應的部分的抗蝕劑感光。曝光裝置及其曝光照射條件可適宜選擇,使用超高壓水銀燈、高壓水銀燈、金屬鹵素燈、遠紫外線燈等光源而進行曝光,使塗膜中的感光性樹脂組成物光硬化。 The exposure performed after the pre-baking can be performed using an ultraviolet exposure device and exposed through a photomask, thereby only sensitizing the resist corresponding to the pattern. The exposure device and its exposure and irradiation conditions can be appropriately selected. An ultrahigh-pressure mercury lamp, a high-pressure mercury lamp, a metal halide lamp, a far-ultraviolet lamp, and other light sources are used for exposure to light-harden the photosensitive resin composition in the coating film.
曝光後的鹼性顯影是出於將未曝光的部分的抗蝕劑除去的目的而進行,利用該顯影而形成所期望的圖案。適於該鹼性顯影的顯影液例如可列舉鹼金屬或鹼土類金屬的碳酸鹽的水溶液、鹼金屬的氫氧化物的水溶液等,特別是可使用含有0.05質量%~3質量%碳酸鈉、碳酸鉀、碳酸鋰等碳酸鹽的弱鹼性水溶液,在23℃~28℃的溫度下進行顯影,可使用市售的顯影機或超聲波清洗機等精密地形成微細的圖像。 The alkaline development after exposure is performed for the purpose of removing the resist of the unexposed portion, and the desired pattern is formed by the development. Examples of the developing solution suitable for the alkaline development include aqueous solutions of carbonates of alkali metals or alkaline earth metals, and aqueous solutions of hydroxides of alkali metals. In particular, sodium carbonate and carbonic acid containing 0.05% by mass to 3% by mass can be used. The weakly alkaline aqueous solution of carbonate such as potassium and lithium carbonate is developed at a temperature of 23°C to 28°C, and a fine image can be precisely formed using a commercially available developing machine or ultrasonic cleaner.
於顯影後,優選在180℃~250℃的溫度及20分鐘~60分鐘的條件下進行熱處理(後烘烤)。以提高經圖案化的遮光膜與基板的密接性等為目的而進行該後烘烤。其與預烘烤同樣地通過利用烘箱、加熱板等進行加熱而進行。本發明的經圖案化的遮光膜是經過以上的利用光微影法的各步驟而形成。 After development, it is preferable to perform heat treatment (post-baking) at a temperature of 180°C to 250°C and a condition of 20 minutes to 60 minutes. This post-baking is performed for the purpose of improving the adhesion between the patterned light-shielding film and the substrate. It is performed by heating with an oven, a hot plate, etc. like pre-baking. The patterned light-shielding film of the present invention is formed through the above steps using photolithography.
本發明的感光性樹脂組成物適於如上所述地利用曝光、鹼性顯影等操作而形成微細的圖案。而且,本發明的遮光膜用感光性樹脂組成物可作為塗布材料而適宜地使用,特別適合作為在液晶的顯示裝置或成像元件中所使用的彩色濾光片用墨水,由此而形成的遮光膜可用作彩色濾光片、液晶投影用黑色矩陣、遮光膜、觸控面板用遮光膜等。 The photosensitive resin composition of the present invention is suitable for forming fine patterns by operations such as exposure and alkaline development as described above. Furthermore, the photosensitive resin composition for a light-shielding film of the present invention can be suitably used as a coating material, and is particularly suitable as a light-shielding ink for color filters used in liquid crystal display devices or imaging devices, thereby forming light-shielding The film can be used as a color filter, a black matrix for liquid crystal projection, a light-shielding film, a light-shielding film for touch panel, etc.
本發明中所得的高遮光、高電阻的遮光膜在OD為3.5/μm以上且OD不足4.0/μm時,在10V的施加電壓下成為1×1012Ω.cm以上的體積電阻率。而且,即使在OD為4.0/μm以上的遮光水準中,在10V的施加電壓下也可以確保1×1011Ω.cm 以上的體積電阻率,優選在10V的施加電壓下可以確保1×1012Ω.cm以上的體積電阻率。另外,使用本發明的感光性樹脂組成物而形成的圖案在後烘烤時難以過熱,將圖案的剖面形狀維持為矩形,適於形成圖案側面相對於基材垂直的形狀的遮光膜圖案。 The high light-shielding and high-resistance light-shielding film obtained in the present invention becomes 1×10 12 Ω at an applied voltage of 10V when the OD is 3.5/μm or more and the OD is less than 4.0/μm. Volume resistivity above cm. Moreover, even in a light-shielding level with an OD of 4.0/μm or more, 1×10 11 Ω can be ensured under an applied voltage of 10V. The volume resistivity of cm or more is preferably 1×10 12 Ω under an applied voltage of 10V. Volume resistivity above cm. In addition, the pattern formed using the photosensitive resin composition of the present invention is difficult to overheat during post-baking, and the cross-sectional shape of the pattern is maintained as a rectangular shape, which is suitable for forming a light-shielding film pattern in which the side surface of the pattern is perpendicular to the substrate.
以下,基於實施例及比較例而對本發明的實施形態加以具體說明,但本發明並不限定於這些例子。 Hereinafter, the embodiments of the present invention will be specifically described based on Examples and Comparative Examples, but the present invention is not limited to these examples.
首先,表示本發明的(A)含有聚合性不飽和基的鹼可溶性樹脂的合成例。合成例中的樹脂的評價可如下所述地進行。 First, a synthetic example of the (A) alkali-soluble resin containing a polymerizable unsaturated group of the present invention is shown. The evaluation of the resin in the synthesis example can be carried out as follows.
[固體成分濃度] [Solid content concentration]
將合成例中所得的樹脂溶液1g含浸於玻璃過濾器[重量:W0(g)]中而進行稱量[W1(g)],根據在160℃下加熱2hr後的重量[W2(g)],由下式而求出。 1 g of the resin solution obtained in the synthesis example was impregnated into a glass filter [weight: W 0 (g)] and weighed [W 1 (g)], and the weight [W 2 ( g)], obtained from the following formula.
固體成分濃度(重量%)=100×(W2-W0)/(W1-W0)。 Solid content concentration (% by weight)=100×(W 2 -W 0 )/(W 1 -W 0 ).
[酸值] [Acid Value]
使樹脂溶液溶解於二噁烷中,使用電位滴定裝置[平沼產業股份有限公司製造、商品名COM-1600],用1/10N-KOH水溶液進行滴定而求出。 The resin solution was dissolved in dioxane, and it was determined by titration with a 1/10N-KOH aqueous solution using a potentiometric titration device [Hiramu Industries Co., Ltd., trade name COM-1600].
[分子量] [Molecular weight]
用凝膠滲透色譜儀(gel permeation chromatography,GPC)[東曹(Tosoh)股份有限公司製造、商品名為HLC-8220GPC、溶劑:四氫呋喃、管柱:TSKgel SuperH-2000(2根)+TSKgel SuperH-3000 (1根)+TSKgel SuperH-4000(1根)+TSKgel Super-H5000(1根)[東曹股份有限公司製造]、溫度:40℃、速度:0.6ml/min]進行測定,設為標準聚苯乙烯[東曹股份有限公司製造、PS-寡聚物試劑盒]換算值而求出重量平均分子量(Mw)。 Gel permeation chromatography (GPC) [manufactured by Tosoh Co., Ltd., trade name HLC-8220GPC, solvent: tetrahydrofuran, column: TSKgel SuperH-2000 (2 pieces) + TSKgel SuperH- 3000 (1 root) + TSKgel SuperH-4000 (1 root) + TSKgel Super-H5000 (1 root) [manufactured by Tosoh Corporation], temperature: 40°C, speed: 0.6 ml/min] Styrene [manufactured by Tosoh Co., Ltd., PS-oligomer kit] was converted to a weight average molecular weight (Mw).
而且,合成例及比較合成例中所使用的略號如下所示。 The abbreviations used in Synthesis Examples and Comparative Synthesis Examples are as follows.
BPFE:9,9-雙(4-羥基苯基)茀與氯甲基氧雜環丙烷的反應物。在通式(I)的化合物中,X為茀-9,9-二基、R1、R2為氫的化合物。 BPFE: the reactant of 9,9-bis(4-hydroxyphenyl) stilbene and chloromethyloxirane. In the compound of the general formula (I), X is a compound of fluorene-9,9-diyl, and R 1 and R 2 are hydrogen.
BPDA:3,3',4,4'-聯苯四羧酸二酐 BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride
THPA:1,2,3,6-四氫鄰苯二甲酸酐 THPA: 1,2,3,6-tetrahydrophthalic anhydride
TPP:三苯基膦 TPP: Triphenylphosphine
PGMEA:丙二醇單甲醚乙酸酯 PGMEA: propylene glycol monomethyl ether acetate
[合成例1] [Synthesis Example 1]
在帶回流冷凝器的1L四口燒瓶中加入BPFE 244.3g(0.50mol)、丙烯酸72.1g(1.0mol)、TPP 0.45g、及PGMEA 334g,在100℃~105℃的加熱下進行12hr攪拌而獲得反應產物。 In a 1 L four-necked flask with a reflux condenser, 244.3 g (0.50 mol) of BPFE, 72.1 g (1.0 mol) of acrylic acid, 0.45 g of TPP, and 334 g of PGMEA were added, and the mixture was heated for 12 hours under heating at 100°C to 105°C. The reaction product is obtained.
其次,在所得的反應產物中加入BPDA 94.15g(0.32mol)及THPA 22.82g(0.15mol),在115℃~120℃的加熱下進行6hr攪拌,獲得含有聚合性不飽和基的鹼可溶性樹脂溶液(A)-1。所得的樹脂溶液的固體成分濃度為56.5wt%,酸值(固體成分換算)為102mgKOH/g,利用GPC分析的Mw是5200。 Next, BPDA 94.15g (0.32mol) and THPA 22.82g (0.15mol) were added to the resulting reaction product, and stirred under heating at 115°C to 120°C for 6hr to obtain an alkali soluble resin solution containing a polymerizable unsaturated group (A)-1. The solid content concentration of the obtained resin solution was 56.5 wt%, the acid value (solid content conversion) was 102 mgKOH/g, and the Mw analyzed by GPC was 5200.
[合成例2] [Synthesis Example 2]
在帶回流冷凝器的1L四口燒瓶中加入BPFE 244.3g(0.50 mol)、丙烯酸72.1g(1.0mol)、TPP 0.45g、及PGMEA 318g,在100℃~105℃的加熱下進行12hr攪拌而獲得反應產物。 In a 1L four-necked flask with a reflux condenser, add 244.3g (0.50 mol), 72.1 g (1.0 mol) of acrylic acid, 0.45 g of TPP, and 318 g of PGMEA were stirred under heating at 100° C. to 105° C. for 12 hr to obtain a reaction product.
其次,在所得的反應產物中加入BPDA 94.15g(0.32mol)及THPA 3.04g(0.02mol),在115℃~120℃的加熱下進行6hr攪拌,獲得含有聚合性不飽和基的鹼可溶性樹脂的溶液(A)-2。所得的樹脂溶液的固體成分濃度為56.5wt%,酸值(固體成分換算)為90mgKOH/g,利用GPC分析的Mw為4600。 Next, BPDA 94.15g (0.32mol) and THPA 3.04g (0.02mol) were added to the resulting reaction product, and stirred under heating at 115°C to 120°C for 6hr to obtain an alkali-soluble resin containing a polymerizable unsaturated group. Solution (A)-2. The solid content concentration of the obtained resin solution was 56.5 wt%, the acid value (solid content conversion) was 90 mgKOH/g, and the Mw analyzed by GPC was 4600.
[合成例3] [Synthesis Example 3]
在帶回流冷凝器的1L四口燒瓶中加入BPFE 219.9g(0.45mol)、丙烯酸64.9g(0.9mol)、TPP 0.45g、及PGMEA 294g,在100℃~105℃的加熱下進行12hr攪拌而獲得反應產物。 In a 1L four-necked flask equipped with a reflux condenser, add 219.9 g (0.45 mol) of BPFE, 64.9 g (0.9 mol) of acrylic acid, 0.45 g of TPP, and 294 g of PGMEA, and stir for 12 hours under heating at 100 to 105° The reaction product is obtained.
其次,在所得的反應產物中加入BPDA 94.15g(0.32mol)及THPA 3.04g(0.02mol),在115℃~120℃的加熱下進行6hr攪拌,獲得含有聚合性不飽和基的鹼可溶性樹脂溶液(A)-3。所得的樹脂溶液的固體成分濃度為56.5wt%,酸值(固體成分換算)為97mgKOH/g,利用GPC分析的Mw為5500。 Next, BPDA 94.15g (0.32mol) and THPA 3.04g (0.02mol) were added to the resulting reaction product, and stirred for 6 hours under heating at 115°C to 120°C to obtain an alkali soluble resin solution containing a polymerizable unsaturated group (A)-3. The solid content concentration of the obtained resin solution was 56.5 wt%, the acid value (solid content conversion) was 97 mgKOH/g, and the Mw analyzed by GPC was 5500.
[比較合成例1] [Comparative Synthesis Example 1]
在帶回流冷凝器的1L四口燒瓶中加入BPFE 244.3g(0.50mol)、丙烯酸72.1g(1.0mol)、TPP 0.45g、及PGMEA 329g,在100℃~105℃的加熱下進行12hr攪拌而獲得反應產物。 In a 1L four-necked flask with a reflux condenser, add 244.3g (0.50mol) of BPFE, 72.1g (1.0mol) of acrylic acid, 0.45g of TPP, and 329g of PGMEA, and stir for 12 hours under heating at 100°C to 105°C. The reaction product is obtained.
其次,在所得的反應產物中加入BPDA 73.56g(0.25mol)及THPA 38.03g(0.25mol),在115℃~120℃的加熱下進行6hr 攪拌,獲得含有聚合性不飽和基的鹼可溶性樹脂的溶液(A)-4。所得的樹脂溶液的固體成分濃度為56.5wt%,酸值(固體成分換算)為70mgKOH/g,利用GPC分析的Mw是3600。 Next, BPDA 73.56g (0.25mol) and THPA 38.03g (0.25mol) were added to the resulting reaction product, and heating was performed at 115°C to 120°C for 6hr Stir to obtain a solution (A)-4 of an alkali-soluble resin containing a polymerizable unsaturated group. The solid content concentration of the obtained resin solution was 56.5 wt%, the acid value (solid content conversion) was 70 mgKOH/g, and the Mw analyzed by GPC was 3600.
[製備例1]染料被覆碳黑的製備 [Preparation Example 1] Preparation of dye-coated carbon black
將碳黑1000g與水混合而製備漿料10L,在95℃下攪拌1小時,放置冷卻後進行水洗。將其再次與水進行混合處理而製備漿料10L,添加70%的硝酸42.9g而在40℃下進行4小時攪拌。將其放置冷卻而進行水洗,然後再次與水混合而製備漿料10L,添加13%的次氯酸鈉水溶液769.2g而在40℃下進行6小時攪拌。將其放置冷卻而進行水洗,然後再次與水混合而製備漿料10L,添加純度為38.4%的染料(直接深黑(Direct Deep BLACK))38.1g而在40℃下進行1小時攪拌,其後進一步添加硫酸鋁10.1g而在40℃下進行1小時攪拌。將其放置冷卻後進行水洗,對其進行過濾乾燥而獲得染料被覆碳黑。 1000 g of carbon black was mixed with water to prepare 10 L of slurry, which was stirred at 95° C. for 1 hour, left to cool, and then washed with water. This was mixed again with water to prepare 10 L of slurry, and 42.9 g of 70% nitric acid was added and stirred at 40° C. for 4 hours. This was left to cool and washed with water, and then mixed with water again to prepare a slurry of 10 L. 769.2 g of a 13% sodium hypochlorite aqueous solution was added and stirred at 40° C. for 6 hours. It was left to cool and washed with water, and then mixed again with water to prepare a slurry of 10 L. 38.1 g of a dye (Direct Deep BLACK) with a purity of 38.4% was added and stirred at 40° C. for 1 hour, after which Further, 10.1 g of aluminum sulfate was added and stirred at 40°C for 1 hour. After leaving it to cool, it was washed with water, and it was filtered and dried to obtain dye-coated carbon black.
(實施例1~實施例4、比較例1) (Example 1 to Example 4, Comparative Example 1)
其次,基於遮光膜用感光性樹脂組成物及其硬化物的製造的實施例及比較例而對本發明進行具體的說明,但本發明並不限定於這些例子。此處,以後的實施例及比較例的遮光膜用感光性樹脂組成物及其硬化物的製造中所使用的原料及略號如下所示。 Next, the present invention will be specifically described based on Examples and Comparative Examples of the production of the photosensitive resin composition for a light-shielding film and its cured product, but the present invention is not limited to these examples. Here, the raw materials and abbreviations used in the production of the photosensitive resin composition for light-shielding films and cured products thereof in the following Examples and Comparative Examples are shown below.
(含有聚合性不飽和基的鹼可溶性樹脂) (Alkali-soluble resin containing polymerizable unsaturated groups)
(A)-1成分:所述合成例1中所得的鹼可溶性樹脂的溶液 (A)-1 component: the solution of the alkali-soluble resin obtained in Synthesis Example 1
(A)-2成分:所述合成例2中所得的鹼可溶性樹脂的溶液 (A)-2 Component: the solution of the alkali-soluble resin obtained in Synthesis Example 2
(A)-3成分:所述合成例3中所得的鹼可溶性樹脂的溶液 (A)-3 component: the solution of the alkali-soluble resin obtained in Synthesis Example 3
(A)-4成分:所述比較合成例1中所得的鹼可溶性樹脂的溶液 (A)-4 component: the solution of the alkali-soluble resin obtained in Comparative Synthesis Example 1
(光聚合性單體) (Photopolymerizable monomer)
(B):二季戊四醇六丙烯酸酯與二季戊四醇五丙烯酸酯的混合物(日本化藥股份有限公司製造、商品名為DPHA) (B): A mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate (manufactured by Nippon Kayaku Co., Ltd., trade name DPHA)
(光聚合起始劑) (Photopolymerization initiator)
(C):乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]-,1-(O-乙醯肟)(日本巴斯夫公司製造、產品名為豔佳固(Irgacure)OXE02) (C): Ethyl ketone, 1-[9-ethyl-6-(2-methylbenzyl)-9H-carbazol-3-yl]-,1-(O-acetoacetoxime) (Japan (Made by BASF, the product name is Irgacure OXE02)
(遮光性分散顏料) (Light-shielding dispersed pigment)
(D)-1:碳黑濃度為25.0質量%、高分子分散劑濃度為5.0質量%的丙二醇單甲醚乙酸酯分散液(固體成分為30.0%) (D)-1: Propylene glycol monomethyl ether acetate dispersion liquid (solid content 30.0%) with carbon black concentration of 25.0% by mass and polymer dispersant concentration of 5.0% by mass
(D)-2:用珠磨機對製備例1中所製備的染料被覆碳黑300.0g、胺基甲酸酯系分散劑24.0g、合成例2中所得的鹼可溶性樹脂的溶液146.0g、丙二醇單甲醚乙酸酯729.6g進行分散而所得的分散液(固體成分為33.9%) (D)-2: 300.0 g of the dye-coated carbon black prepared in Preparation Example 1, 24.0 g of the urethane-based dispersant, and 146.0 g of the solution of the alkali-soluble resin obtained in Synthesis Example 2 using a bead mill, Dispersion liquid obtained by dispersing 729.6 g of propylene glycol monomethyl ether acetate (solid content: 33.9%)
(溶劑) (Solvent)
(E)-1:丙二醇單甲醚乙酸酯 (E)-1: Propylene glycol monomethyl ether acetate
(E)-2:環己酮 (E)-2: Cyclohexanone
(矽烷偶聯劑) (Silane coupling agent)
(F):3-巰基丙基三甲氧基矽烷(商品名:KBM-803;信越化學股份有限公司製造) (F): 3-mercaptopropyltrimethoxysilane (trade name: KBM-803; manufactured by Shin-Etsu Chemical Co., Ltd.)
(表面活性劑) (Surfactant)
(G):BYK-330(畢克化學公司製造) (G): BYK-330 (Bike Chemical Company)
以表1中所示的比例對所述調配成分進行調配,製備實施例1~實施例4及比較例1的感光性樹脂組成物。另外,表1中的數值均表示質量份。而且,溶劑一欄中的(E)-1是不含含有不飽和基的樹脂的溶液(含有聚合性不飽和基的鹼可溶性樹脂的溶液)中的PGMEA(與(E)-1相同)、及遮光性分散液中的PGMEA(與(E)-1相同)的量。 The formulation components were blended in the ratios shown in Table 1 to prepare the photosensitive resin compositions of Examples 1 to 4 and Comparative Example 1. In addition, the numerical values in Table 1 all represent parts by mass. Furthermore, (E)-1 in the column of solvent is PGMEA (same as (E)-1) in a solution containing no unsaturated group-containing resin (a solution containing a polymerizable unsaturated group-containing alkali-soluble resin), And the amount of PGMEA (same as (E)-1) in the light-shielding dispersion liquid.
[評價] [Evaluation]
使用實施例1~實施例4及比較例1的遮光膜用感光性樹脂組成物而進行以下所記載的評價。將這些評價的結果表示於表2中。 The photosensitive resin compositions for light-shielding films of Examples 1 to 4 and Comparative Example 1 were used for the evaluation described below. The results of these evaluations are shown in Table 2.
<顯影特性(圖案線寬/圖案直線性)的評價> <Evaluation of development characteristics (pattern line width/pattern linearity)>
用旋塗機將所述所得的各感光性樹脂組成物以後烘烤後的膜厚成為1.1μm的方式塗布在125mm×125mm的玻璃基板(康寧1737)上,在90℃下進行1分鐘預烘烤。其後,將曝光間距調整為100μm,在乾燥塗膜上覆蓋10μm或6μm的負型光遮罩,用i射線照度為30mW/cm2的超高壓水銀燈照射80mJ/cm2的紫外線,進行感光部分的光硬化反應。 Each photosensitive resin composition obtained above was applied onto a 125 mm×125 mm glass substrate (Corning 1737) with a spin coater so that the film thickness after baking was 1.1 μm, and pre-bake at 90° C. for 1 minute grilled. After that, the exposure pitch is adjusted to 100 μm, a negative coating of 10 μm or 6 μm is covered on the dried coating film, and the ultraviolet light of 80 mJ/cm 2 is irradiated with an ultra-high pressure mercury lamp with an i-ray illuminance of 30 mW/cm 2 to perform the photosensitive part. Photo-hardening reaction.
其次,將該曝光後的塗板在25℃、0.05%氫氧化鉀水溶液中、1kgf/cm2的噴淋顯影壓力下,進行自圖案開始出現的顯影時間(出像時間=BT)起+20秒及+30秒的顯影後,進行5kgf/cm2壓力的噴霧水洗,將塗膜的未曝光部除去而在玻璃基板上形成像素圖案,其後使用熱風乾燥機而進行230℃、30分鐘的熱後烘烤,其後評價相對於10μm線及6μm線的遮罩寬度的線寬、圖案直線性。在即使顯影時間超過80秒也不出現圖案圖像的情況下,設為無法顯影。另外,各評價方法如下所示。 Next, the exposed coated plate was subjected to a development time (image-out time = BT) +20 seconds from the start of the pattern at 25° C. in a 0.05% potassium hydroxide aqueous solution under a spray development pressure of 1 kgf/cm 2 . After +30 seconds of development, a spray water wash with a pressure of 5 kgf/cm 2 was performed to remove the unexposed part of the coating film to form a pixel pattern on the glass substrate, and thereafter, a hot air dryer was used to heat at 230° C. for 30 minutes. After post-baking, the line width and pattern linearity with respect to the mask width of the 10 μm line and the 6 μm line were evaluated. When the pattern image does not appear even if the development time exceeds 80 seconds, it is assumed that the development cannot be performed. In addition, each evaluation method is as follows.
圖案線寬:使用測長顯微鏡(尼康公司製造的“XD-20”)而測定遮罩寬度為10μm及6μm的圖案線寬。 Pattern line width: The pattern line width of the mask width of 10 μm and 6 μm was measured using a length measuring microscope (“XD-20” manufactured by Nikon Corporation).
圖案直線性:用顯微鏡觀察後烘烤後的10μm或6μm的遮罩圖案,將未發現相對於基板的剝離或圖案邊緣部分的鋸齒狀的 情況評價為“○”,將發現一部分的情況評價為“△”,將經整體發現的情況評價為“×”。 Pattern linearity: Observe the mask pattern of 10 μm or 6 μm after post-baking with a microscope, and no peeling from the substrate or jagged edges of the pattern will be found The case evaluation was "○", the case where a part was found was evaluated as "△", and the case where the whole was found was evaluated as "×".
<OD/μm的評價> <Evaluation of OD/μm>
用旋塗機將所述所得的各感光性樹脂組成物以後烘烤後的膜厚成為1.1μm的方式塗布在125mm×125mm的玻璃基板(康寧1737)上,在90℃下進行1分鐘預烘烤。其後,並不覆蓋負型光遮罩而用i射線照度為30mW/cm2的超高壓水銀燈照射80mJ/cm2的紫外線,進行感光部分的光硬化反應。 Each photosensitive resin composition obtained above was applied onto a 125 mm×125 mm glass substrate (Corning 1737) with a spin coater so that the film thickness after baking was 1.1 μm, and pre-bake at 90° C. for 1 minute grilled. After that, the ultra-high-pressure mercury lamp with an i-ray illuminance of 30 mW/cm 2 was irradiated with 80 mJ/cm 2 of ultraviolet rays without covering the negative-type photomask, and the photo-curing reaction of the photosensitive part proceeded.
其次,將該曝光後的塗板在25℃、0.05%氫氧化鉀水溶液中、1kgf/cm2的噴淋顯影壓力下進行60秒的顯影,然後進行5kgf/cm2壓力的噴霧水洗,其後使用熱風乾燥機而進行230℃、30分鐘的熱後烘烤,然後使用麥克貝斯透射密度計而評價光照射部的OD。進一步測定光照射部的膜厚,將OD值除以膜厚而得的值作為OD/μm。 Next, the exposed coated plate was developed at 25° C. in a 0.05% potassium hydroxide aqueous solution at a spray development pressure of 1 kgf/cm 2 for 60 seconds, and then spray-washed at a pressure of 5 kgf/cm 2 , and then used A hot air dryer was used to perform post-baking at 230° C. for 30 minutes, and then the OD of the light-irradiated portion was evaluated using a Macbeth transmission densitometer. The film thickness of the light-irradiated portion was further measured, and the value obtained by dividing the OD value by the film thickness was taken as OD/μm.
<與玻璃基板的密接性的評價> <Evaluation of adhesion to glass substrate>
用旋塗機將所述所得的各感光性樹脂組成物以後烘烤後的膜厚成為1.1μm的方式塗布在125mm×125mm的玻璃基板(康寧1737)上,在90℃下進行1分鐘預烘烤。其後,並不使用負型光遮罩而以i線照度30mW/cm2的超高壓水銀燈且以80mJ/cm2進行整體曝光,使用熱風乾燥機在230℃下進行30分鐘的熱後烘烤。其次,關於所述所得的後烘烤基板,利用基於JIS K6856-1994的3點彎曲密接試驗方法的評價法,如下所述地評價與玻璃基板的密 接強度。將所述進行了後烘烤的帶有塗膜的基板、及未塗布樹脂組成物的玻璃基板(康寧1737)(沒有塗膜的基板)分別切斷為20mm×63mm的長條狀而準備試片。將進行了後烘烤的帶有塗膜的基板與沒有塗膜的基板,經由一定量的密封劑環氧系接著劑以重合寬度成為8mm的方式將兩基板(試片)貼合。重合時的密封劑環氧系接著劑的形狀為圓形且直徑為約5mm。其後,將重合的試片在90℃下實施20分鐘的預烘烤,其次在150℃下實施2小時的後烘烤,製成三點彎曲試片。進一步製成將20mm×63mm的沒有塗膜的基板試片彼此也用與所述相同的方法貼合而成的比較試驗用樣品。 Each photosensitive resin composition obtained above was applied onto a 125 mm×125 mm glass substrate (Corning 1737) with a spin coater so that the film thickness after baking was 1.1 μm, and pre-bake at 90° C. for 1 minute grilled. Thereafter, without using a negative light mask, an ultrahigh-pressure mercury lamp with an i-line illuminance of 30 mW/cm 2 and an overall exposure of 80 mJ/cm 2 were used, and hot post-drying was performed at 230° C. for 30 minutes using a hot air dryer . Next, regarding the obtained post-baked substrate, the adhesion strength with the glass substrate was evaluated as follows using the evaluation method based on the three-point bending adhesion test method of JIS K6856-1994. The post-baked substrate with a coating film and the glass substrate (Corning 1737) without a resin composition (a substrate without a coating film) were cut into strips of 20 mm × 63 mm to prepare a test sheet. The substrate with a coating film and the substrate without a coating film that have been post-baked are bonded together via a certain amount of sealant epoxy-based adhesive so that the overlap width becomes 8 mm. The sealant epoxy-based adhesive when superimposed has a circular shape and a diameter of approximately 5 mm. Thereafter, the superimposed test pieces were subjected to pre-baking at 90°C for 20 minutes, followed by post-baking at 150°C for 2 hours to prepare three-point bending test pieces. Further, a sample for comparison test in which 20 mm×63 mm uncoated substrate test pieces were also bonded to each other by the same method as described above was prepared.
在所述所得的試片中,以重合部位成為中心的方式,將帶有塗膜的基板與沒有塗膜的基板貼合而成的樣品、或者比較試驗用樣品用2點的支撐體進行支撐(2點的支撐體的間隔為3cm),使用艾安德(ORIENTEC)(制)商品名UCT-100而以1mm/min的速度自重合部的正上方向正下方施加負載,而使貼合部剝離。在此時,讀取剝離時的負載,除以密封劑環氧系接著劑的塗布面積,將每單位面積的負載作為密接強度。而且,在121℃、100%RH、2atm、及5小時的條件下實施壓力鍋試驗(Pressure Cooker Test,PCT)後,實施同樣的密接強度試驗,求出PCT前後的密接強度。在PCT前後的比較試驗用樣品的密接強度分別設為100時,將各組成中的密接強度表示為相對值。在PCT前後,將為70以上的情況作為“○”。 In the obtained test piece, a sample obtained by laminating a substrate with a coating film and a substrate without a coating film, or a sample for a comparative test, is supported by a two-point support body so that the overlapping portion becomes the center (The spacing between the support points at 2 points is 3 cm), using a brand name UCT-100 of ORIENTEC (manufactured by ORIENTEC) and applying a load at a speed of 1 mm/min from directly above and below the overlapping portion to make it fit Department. At this time, the load at the time of peeling was read and divided by the coating area of the sealant epoxy adhesive, and the load per unit area was taken as the adhesion strength. Furthermore, after performing a pressure cooker test (PCT) under the conditions of 121° C., 100% RH, 2 atm, and 5 hours, the same adhesion strength test was performed to determine the adhesion strength before and after PCT. When the adhesion strengths of the samples for comparative tests before and after PCT were each set to 100, the adhesion strength in each composition was expressed as a relative value. Before and after the PCT, the case of 70 or more is regarded as "○".
<體積電阻率的評價> <Evaluation of volume resistivity>
用旋塗機將所述所得的各感光性樹脂組成物以後烘烤後的膜厚成為3.0μm的方式塗布在125mm×125mm的玻璃基板(康寧1737)上,在90℃下進行1分鐘預烘烤。其後,使用熱風乾燥機在230℃下進行180分鐘的熱後烘烤,然後使用靜電計(吉時利(Keithley)公司製造、“6517A型”),測定施加電壓為1V~10V的體積電阻率。以1V的間隔,在各施加電壓下各保持60秒的電壓的條件下進行測定,將施加1V時與施加10V時的體積電阻率表示於表2中。 The photosensitive resin composition obtained above was applied onto a 125 mm×125 mm glass substrate (Corning 1737) with a spin coater so that the film thickness after baking was 3.0 μm, and pre-baked at 90° C. for 1 minute. grilled. After that, hot post-drying was performed at 230°C for 180 minutes using a hot air dryer, and then using an electrometer (Keithley (Keithley), "6517A model"), the volume resistance of the applied voltage of 1V to 10V was measured rate. The measurement was carried out under the condition that each of the applied voltages maintained a voltage of 60 seconds at an interval of 1V, and the volume resistivity at the time of applying 1V and at the time of applying 10V was shown in Table 2.
在使用實施例1~實施例4的遮光膜用感光性樹脂組成物的情況下,在BT+20秒時存在線寬一定程度地變粗的傾向,有必要使顯影時間變長一定程度,但具有充分的光圖案化性,在OD 為3.8/μm時,施加電壓為10V時的體積電阻率成為1×1013Ω.cm,可知可實現所需的1×1012Ω.cm以上的體積電阻率。其中,特別是實施例4,即使在提高了遮光度的OD為4.0/μm時,體積電阻率維持為1×1013Ω.cm,可知可實現高遮光高電阻化且與玻璃基板的密接強度(密封密接)也高。可知這些效果可通過將含有不飽和基的鹼可溶性樹脂共分散於碳黑分散體而獲得顯影密接性等的改善效果,且可充分地表現高電阻、適於高密封密著的染料被覆碳黑的特徵。 When the photosensitive resin composition for light-shielding films of Examples 1 to 4 is used, the line width tends to become thicker to a certain extent at BT+20 seconds, and it is necessary to increase the development time to a certain extent, but It has sufficient optical patternability. When the OD is 3.8/μm, the volume resistivity when the applied voltage is 10V becomes 1×10 13 Ω. cm, it can be seen that the required 1×10 12 Ω can be achieved. Volume resistivity above cm. Among them, especially in Example 4, even when the OD of the improved shading degree is 4.0/μm, the volume resistivity is maintained at 1×10 13 Ω. cm, it can be seen that high light shielding and high resistance can be achieved, and the adhesion strength (sealed adhesion) with the glass substrate is also high. It can be seen that these effects can be achieved by co-dispersing the unsaturated group-containing alkali-soluble resin in the carbon black dispersion to improve development adhesion and the like, and can sufficiently exhibit high resistance and are suitable for dye-coated carbon black with high seal adhesion. Characteristics.
在比較例1中,雖然體積電阻率在施加1V時可確保1×1012Ω.cm以上,但在施加10V時不足1×1012Ω.cm,體積電阻率降低,可知並不滿足目前的液晶顯示器的彩色濾光片用途等的高遮光、高電阻的要求特性。 In Comparative Example 1, although the volume resistivity can ensure 1×10 12 Ω when 1V is applied. cm or more, but less than 1×10 12 Ω when 10V is applied. cm, the volume resistivity is reduced, and it can be seen that it does not satisfy the required characteristics of high light shielding and high resistance in current color filter applications for liquid crystal displays.
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| JP6321176B2 (en) * | 2014-07-31 | 2018-05-09 | 富士フイルム株式会社 | UV sensing sheet, UV sensing set and UV sensing method |
| JP6713746B2 (en) * | 2015-10-08 | 2020-06-24 | 日鉄ケミカル&マテリアル株式会社 | Photosensitive resin composition for light-shielding film having spacer function, light-shielding film, liquid crystal display device, method for producing photosensitive resin composition for light-shielding film having spacer function, method for producing light-shielding film, and production of liquid crystal display device Method |
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| JP6758070B2 (en) * | 2016-03-31 | 2020-09-23 | 日鉄ケミカル&マテリアル株式会社 | A method for manufacturing a photosensitive resin composition for a light-shielding film, a display substrate provided with a light-shielding film obtained by curing the photosensitive resin composition, and a display substrate. |
| JP6838866B2 (en) * | 2016-04-28 | 2021-03-03 | 東京応化工業株式会社 | Photosensitive resin composition |
| WO2018012383A1 (en) * | 2016-07-13 | 2018-01-18 | 株式会社Adeka | Curable composition, cured product and method for producing cured product |
| JP6777745B2 (en) | 2016-09-12 | 2020-10-28 | 富士フイルム株式会社 | Composition, film manufacturing method, near-infrared cut filter manufacturing method, solid-state image sensor manufacturing method, image display device manufacturing method, and infrared sensor manufacturing method |
| JP7280017B2 (en) * | 2017-03-31 | 2023-05-23 | 日鉄ケミカル&マテリアル株式会社 | Photosensitive resin composition, light shielding film, liquid crystal display device, and method for manufacturing liquid crystal display device |
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| JP7437872B2 (en) * | 2018-10-29 | 2024-02-26 | 日鉄ケミカル&マテリアル株式会社 | Photosensitive resin composition for partition walls, cured product thereof, and manufacturing method thereof |
| JP7188115B2 (en) * | 2019-01-21 | 2022-12-13 | 三菱ケミカル株式会社 | Alkali-soluble resin, photosensitive resin composition, cured product, and image display device |
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