TWI674225B - Waterproof breathable assembly having nano-membrane, and substrate cassette and rod structure having waterproof breathable assembly - Google Patents

Abstract

A waterproof and breathable component includes a base body, a cover body and a nanometer film. The cover is fixed and fixed to the base; the nano-membrane is sandwiched between the base and the cover, and has a plurality of nano-scale pores that can only allow gas molecules to pass through the two sides of the nano-film, and the nano-film Both sides have at least part of the surface uncovered by the base and cover. In addition, a substrate cassette having the waterproof and breathable component and a rod structure having the waterproof and breathable component are also mentioned.

Description

Waterproof and breathable component with nano-membrane, and substrate cassette and rod structure having the waterproof and breathable component

The invention relates to a waterproof component and a device having the same, and more particularly to a waterproof and breathable component and a substrate cassette and a rod structure having the same.

With the continuous development of LCD panels, from HD, FULL HD, 4K to 8K, it means that its resolution has been continuously improved. For example, the width and height of 8K UHDTV (4320p) is 7680 × 4320, and the total number of pixels is 16 times that of FULL HD. As product screens become more and more refined, various details in related processes must also have higher requirements. If some fine dust is accidentally dropped on the LCD panel during the production process, defects and defects will be caused.

At present, most panel manufacturers use substrate cassettes to store, transfer, and protect the glass substrates used in the process of manufacturing LCD panels. Therefore, the quality of the substrate cassettes directly affects the yield of the final LCD panel products. As process requirements continue to increase, The requirements for pollution prevention and dust are becoming more and more stringent, and the cleanliness of the corresponding substrate cassette also needs to be improved. Therefore, in order to keep the substrate cassette clean in a panel factory, although the overall environment is in a clean room, there will still be a small amount of dust in the clean room. The amount of dust accumulated in the substrate cassette over the years is also considerable, so the substrate cassette needs to be periodically Wash and then dry.

However, in order to take into account the requirements of structural strength and light weight, the rod structure design of the conventional substrate cassette is mostly a circular or square hollow rod. In addition, in order to avoid that detergent or water remains in the hollow rod body after cleaning, so as to cause pollution during use in the manufacturing process, the end of the rod body is usually closed to form a closed structure. However, after such a structure is cleaned and dried, the air inside the closed structure repeatedly heats up, expands and contracts, and cannot circulate outside the rod, which can cause deformation or even fracture of the rod structure, allowing water and gas to pass through the cover and the rod. The gap between the bodies penetrates into the rod structure, and the accumulated water cannot evaporate completely during the drying process within the rod structure, and eventually overflows and drips on the substrate to cause failure. Or, after cleaning and drying, the cover is abnormally dropped off on the substrate due to the long-term repeated thermal expansion and contraction of the rod structure, causing damage.

The invention provides a waterproof and breathable component, a substrate cassette and a rod structure, which can improve the reliability of the rod structure.

The waterproof and breathable component of the invention comprises a base body, a cover body and a nanometer film. The lid is fixed and fixed on the base; the nano-membrane is sandwiched between the base and the lid, and has a plurality of nano-scale pores that can only allow gas molecules to pass through the two sides of the nano-membrane. It is external, and at least part of the surface of both sides of the nanometer film is not covered by the base and the cover.

In an embodiment of the present invention, the base body is at least partially accommodated in the cover body.

In an embodiment of the present invention, the above-mentioned seat body is embedded in the cover body.

In an embodiment of the present invention, the base body has a through hole, and the nano-membrane covers the through hole.

In an embodiment of the present invention, the cover body has a slot, and an opening direction of the slot is different from an axial direction of the through hole.

In an embodiment of the present invention, the opening direction of the slot is perpendicular to the axial direction of the through hole.

In one embodiment of the present invention, the nano-film is made of a fluoroplastic.

In one embodiment of the present invention, the thickness of the nano film is less than 500 nanometers.

In one embodiment of the present invention, the porosity of the nanometer film is higher than 50%.

In one embodiment of the present invention, the pore density of the nanometer film is more than 1 million per square centimeter.

In one embodiment of the present invention, the air permeability of the nano-membrane is greater than 2 cc / sec (cubic centimeter / second).

In an embodiment of the present invention, the pore diameter of the nanometer film is less than 500 nanometers (nm).

In one embodiment of the present invention, the water pressure resistance of the nanometer film is higher than 50 millimeters of water (mmH2O).

In one embodiment of the present invention, the ingress protection rating (ingress protection rating) of the nanometer film is IP42 or higher.

The substrate cassette of the present invention is suitable for receiving at least one substrate. The substrate cassette includes a frame. The frame includes a plurality of rod bodies disposed in the frame in parallel with each other, and each rod body has a rod-shaped portion. At least one rod body includes the waterproof breathable component, and the rod-shaped portion of the rod body containing the waterproof breathable component has an opening corresponding to the waterproof breathable component. The waterproof and breathable component is assembled in the opening through the base or the cover.

The rod structure of the present invention is suitable for forming a frame or supporting at least one substrate in a substrate cassette. The rod structure includes a rod-shaped portion and the waterproof and breathable component, and the rod-shaped portion has an opening. The waterproof and breathable component is assembled in the opening through the base or the cover.

In an embodiment of the present invention, the rod-shaped portion is made of a carbon fiber reinforced polymer composite material.

In an embodiment of the present invention, the plurality of rod bodies includes at least one support rod, and the support rod is adapted to support at least one substrate.

In an embodiment of the present invention, the rod-shaped portion of the rod body with the waterproof and breathable component is tubular, and the opening is located on the side of the rod-shaped portion of the rod body with the waterproof and breathable component, the top surface of the rod-shaped portion, or The distal end of the rod-shaped portion communicates with the internal space of the rod-shaped portion.

In an embodiment of the present invention, the above-mentioned base body has a through hole, the through hole is opposite to the open hole, and the nano film covers the through hole.

In an embodiment of the present invention, the base is connected to the opening and covers the opening, and the cover covers the base.

In an embodiment of the present invention, the cover is connected to the opening and covers the opening, and the seat is embedded in the cover.

In an embodiment of the present invention, the cover body has a slot, and an opening direction of the slot is different from an axial direction of the opening.

In an embodiment of the present invention, the opening direction of the slot is perpendicular to the axial direction of the opening.

In an embodiment of the present invention, at least one edge position of the slotted opening is lower than the slotted axis.

Based on the above, the substrate cassette of the present invention uses a waterproof and breathable component to cover the openings of the rod-shaped portion of the rod structure, so that during the cleaning and drying process, liquid water or cleaning liquid is blocked by the nano-film on the rod-shaped portion. And allows the gas to flow through the nano-membrane and circulate inside the rod-shaped portion and outside the rod-shaped portion. Thereby, when the substrate cassette is dried after cleaning and the air in the rod-shaped portion is thermally expanded or contracted, the rod-shaped portion will not be deformed due to the expansion and contraction of the air therein, thereby improving its reliability and extending Its service life.

In order to make the above features and advantages of the present invention more comprehensible, embodiments are hereinafter described in detail with reference to the accompanying drawings.

100, 300‧‧‧ substrate cassette

110, 310‧‧‧ frame

112‧‧‧Top frame

114‧‧‧ lower frame

116, 316‧‧‧ side pillars

116a‧‧‧Side Support Rod

118‧‧‧ rear pillar

120, 220, 320 ‧ ‧ ‧ rod body / rod body structure

122, 222‧‧‧

122a, 222a‧‧‧Opening

124, 224‧‧‧Waterproof and breathable components

124a, 224a‧‧‧ seat

124b, 224b‧‧‧nm film

124c, 224c‧‧‧ Lid

224c1‧‧‧ rubber coated recess

224c2‧‧‧ extension

311‧‧‧ connecting rod

330‧‧‧ Linear

D1, D1’‧‧‧ opening direction

D2, D2’‧‧‧ axial

E1‧‧‧ Tenon structure

E2‧‧‧Card hook

F3‧‧‧ snap groove

G‧‧‧Waterproof Adhesive

H, H’‧‧‧ through hole

S, S’‧‧‧ slotted

FIG. 1 is a perspective view of a substrate cassette according to an embodiment of the present invention.

FIG. 2 is a perspective view of the rod structure with the waterproof and breathable component of FIG. 1.

FIG. 3 is a partially enlarged view of the rod structure of FIG. 2 in an area A. FIG.

FIG. 4 is an exploded view of the rod-shaped portion and the waterproof and breathable component of FIG. 2.

FIG. 5 is a partial cross-sectional view of the rod structure of FIG. 3.

FIG. 6 is an exploded view of the waterproof and breathable component of FIG. 5.

FIG. 7 is a perspective view of the waterproof and breathable component of FIG. 5.

FIG. 8 is an exploded view of the waterproof and breathable component of FIG. 7.

FIG. 9 is a perspective view of a rod structure with a waterproof and breathable component according to another embodiment of the present invention.

Fig. 10 is a partial enlarged view of the rod structure of Fig. 9 in an area A '.

FIG. 11 is an exploded view of the rod body and the waterproof and breathable component of FIG. 9.

FIG. 12 is a partial cross-sectional view of the rod structure of FIG. 10.

FIG. 13 is an exploded view of the waterproof and breathable component of FIG. 12.

FIG. 14 is a perspective view of a substrate cassette according to still another embodiment of the present invention.

FIG. 1 is a perspective view of a substrate cassette according to an embodiment of the present invention. Please refer to FIG. 1, the substrate cassette 100 of this embodiment is used to receive a glass substrate or other types of substrates used in a liquid crystal panel manufacturing process, so as to store, transfer, and protect the substrates.

The substrate cassette 100 includes a frame 110. The frame 110 includes a plurality of rods 120. The frame 110 may include at least an upper frame 112, a lower frame 114, a plurality of side pillars 116 connected between the upper frame 112 and the lower frame 114, and a frame 110 connected to the upper frame 112 and the lower frame 114. The rods 120 are respectively connected to the rear pillars 118 to form support rods arranged in the frame 110 in parallel with each other, and are used to support the substrate. In addition, each of the side pillars 116 has a plurality of side struts 116a to assist in supporting the left and right sides of the substrate.

FIG. 2 is a perspective view of the rod structure with the waterproof and breathable component of FIG. 1. FIG. 3 is a partially enlarged view of the rod structure of FIG. 2 in an area A. FIG. FIG. 4 is an exploded view of the rod-shaped portion and the waterproof and breathable component of FIG. 2.

Please refer to FIGS. 2 to 4 at the same time. Each rod body 120 of the substrate cassette 100 in this embodiment includes a rod-shaped portion 122, and at least one of the rod bodies 120 further includes a waterproof and breathable component 124. The rod-shaped portion 122 may be made of various high-strength materials, such as carbon fiber reinforced polymer (CFRP), which has both high strength and light weight.

The rod-shaped portion 122 is tubular, and the rod-shaped portion 122 provided with the rod body 120 of the waterproof breathable component 124 also has an opening 122a corresponding to the waterproof breathable component 124. The opening 122 a is located on the side of the rod-shaped portion 122 and communicates with the internal space of the rod-shaped portion 122. The waterproof and breathable component 124 is assembled in the opening 122a to prevent water or other liquids from entering the inner space of the rod-shaped portion 122 and allow air inside and outside the rod-shaped portion 122 to circulate with each other.

FIG. 5 is a partial cross-sectional view of the rod structure of FIG. 3. FIG. 6 is an exploded view of the waterproof and breathable component of FIG. 5. Please refer to FIGS. 5 and 6. In detail, the waterproof and breathable component 124 includes a base body 124 a, a nano-membrane 124 b, and a cover body 124 c.

The base 124a is connected to the opening 122a of the rod-shaped portion 122 and covers the opening 122a. The cover 124c is fixedly fixed to the base 124a and covers the base 124a. The sub-body 124a is received in the cover 124c. That is, the waterproof and breathable component 124 is assembled in the opening 122a through the base 124a, and the base 124a is hidden in the cover 124c.

In this embodiment, the seat 124a of the waterproof and breathable component 124 has a tenon structure E1, and is assembled in the opening 122a of the rod-shaped portion 122 by the tenon structure E1. However, the present invention is not limited thereto. In other embodiments, the seat body 124a may be assembled into the opening 122a of the rod-shaped portion 122 by other appropriate assembly structures.

FIG. 7 is a perspective view of the waterproof and breathable component of FIG. 5. FIG. 8 is an exploded view of the waterproof and breathable component of FIG. 7. Please refer to FIG. 7 and FIG. 8, the cover body 124c of this embodiment has a hook E2, the base body 124a has an engaging groove E3, and the hook E2 is adapted to be engaged with the engaging groove E3 so that the cover body 124c and the base body 124a Combine. In addition, the cover 124c may be coated with a waterproof adhesive G, so that the cover 124c is glued to the rod-shaped portion 122 with the waterproof adhesive G as shown in FIG. 5. In other embodiments, the cover 124c may be combined with the base 124a and the rod-shaped portion 122 by other suitable methods, which is not limited in the present invention.

Please refer to FIG. 5 and FIG. 6 again. The nano-membrane 124b is sandwiched between the base 124a and the cover 124c. The nano-membrane 124b has a plurality of nano-scale pores that can only allow gas molecules to communicate with the nano-membrane 124b. Both sides of the outer side, and at least a part of both sides of the nano-membrane 124b are not covered by the base 124a and the cover 124c.

Since the nano-membrane 124b has a plurality of nano-sized pores that can only allow gas molecules to communicate with the outside of both sides of the nano-membrane 124b, and liquid molecules that are larger than gas molecules cannot pass through the nano-pores, they can Achieve waterproof and breathable effect. Therefore, the nano film can also be called a waterproof breathable film.

The nano-membrane 124b can be made of fluorine plastic, such as tetrafluoroethylene resin (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), ethylene tetrafluoroethylene polymer (ETFE), polyvinylidene fluoride (PVDF), etc. The use of fluorine plastic can make the nano film 124b wear-resistant, smooth, and hydrophobic, so as to prevent foreign matter such as dust, impurities, and water from adhering to the surface of the nano film 124b to block its pores.

The thickness of the nano-membrane 124b is preferably less than 500 nanometers to avoid its excessive thickness and poor air permeability. The preferred porosity of the nano-membrane 124b is more than 1 million per square centimeter; or its porosity is higher than 50%; or the permeability of the nano-membrane 124b is preferably greater than 2cc / sec, which means more than 2 cubic centimeters of gas per second.

All of these characteristics can increase the gas flow rate of the nano-membrane 124b in a unit time, so as to avoid the situation in which the rod body 120 is too late to discharge the internal excess gas and cause the structure to break.

In addition, the pore diameter of the nano-membrane 124b is preferably less than 500 nanometers, so that the pore diameter is smaller than the liquid water molecules and most foreign particles. Specifically, the ingress protection rating (ingress protection rating) of the nano-membrane 124b can preferably reach IP42 or above, so as to effectively block liquid water molecules and dust.

The cover 124c has a slot S, the base 124a has a through hole H, the through hole H is opposite to the opening 122a located in the rod-shaped portion 122, and the nano-membrane 124b covers the through-hole H of the base 124a, that is, the nano-membrane 124b. The surfaces of the portions corresponding to the through holes H on both sides are not shielded by the base body 124a and the cover body 124c, so that air can pass from the rod-like portion 122 through the openings 122a, the through holes H, the nano-membrane 124b, and the slot S It flows inwardly from the rod-shaped portion 122 or flows backward into the rod-shaped portion 122 from outside the rod-shaped portion 122.

The opening direction D1 (shown in FIG. 5) of the slot S is different from the axial direction D2 (shown in FIG. 5) of the opening 122 a of the rod-shaped portion 122. In addition, the position of at least one edge of the opening of the slot S is lower than the axis of the slot S (that is, the axis overlapping the axis D2 shown in FIG. 5).

In this embodiment, when the opening 122a is located on the side of the rod-shaped portion 122, the opening direction D1 of the slot S is perpendicular to the axial direction D2 of the opening 122a, and the opening direction D1 of the slot S is toward Below is an example. In this way, it is possible to reduce the situation that the cleaning liquid / water or foreign objects directly enter the waterproof and breathable component 124. And even if there is a washing liquid or water flushed in, it can easily flow out again through the slot S to avoid water accumulation inside the slot S after cleaning.

In addition, the nano-film 124b preferably has a water pressure resistance higher than 50 millimeters of water (mmH2O), so that it will not be broken due to insufficient pressure resistance during the cleaning process even when it is impacted by the cleaning liquid or liquid water.

In addition to providing the openings 122a and the waterproof and breathable component 124 on the side of the rod-shaped portion 122, the openings 122a and the waterproof and breathable component 124 can also be located on the top surface of the rod-shaped portion 122. In this case, the waterproof and breathable component 124 can also be At the same time as a support pad supporting the substrate, the slot S is not located on the top of the support pad and is not closed by the substrate.

Under the above arrangement, the substrate cassette 100 uses the waterproof and breathable component 124 to cover the opening 122a of the rod-shaped portion 122, so that water in the cleaning process is blocked by the nano-membrane 124b outside the rod-shaped portion 122, and allows air to The permeable nano-membrane 124b flows through the inside of the rod-shaped portion 122 and outside the rod-shaped portion 122. Thereby, when the substrate cassette 100 is dried after cleaning and the air in the rod-shaped portion 122 heats up and contracts, the rod-shaped portion 122 does not Deformation or even rupture due to the expansion and contraction of the air inside it increases its reliability and prolongs its service life.

In addition to the side or top surface of the rod-shaped portion 122, the waterproof and breathable component can also be provided at the end of the rod body. This is described below with another embodiment.

FIG. 9 is a perspective view of a rod structure with a waterproof and breathable component according to another embodiment of the present invention. Fig. 10 is a partial enlarged view of the rod structure of Fig. 9 in an area A '. FIG. 11 is an exploded view of the rod body and the waterproof and breathable component of FIG. 9.

Please refer to FIGS. 9 to 11. The rod structure 220 in this embodiment includes a rod-shaped portion 222 and a waterproof and breathable component 224. The rod-shaped portion 222 is a tubular hollow rod body and has an opening 222 a. The opening 222 a is located on the rod. The distal end of the shaped portion 222 communicates with the internal space of the rod-shaped portion 222. The waterproof and breathable component 224 is assembled in the opening 222 a to prevent water or other liquids from entering the inner space of the rod-shaped portion 222 and allow air to circulate inside the rod-shaped portion 222 and outside the rod-shaped portion 222.

FIG. 12 is a partial cross-sectional view of the rod structure of FIG. 10. FIG. 13 is an exploded view of the waterproof and breathable component of FIG. 12. Please refer to FIG. 12 and FIG. 13. The waterproof and breathable component 224 includes a base 224 a, a nano-membrane 224 b, and a cover 224 c.

The nano-membrane 224b is sandwiched between the base 224a and the cover 224c. The base 224a can be buried in the cover 224c in a way of burying and injecting, and is accommodated and covered by the cover 224c. The cover 224c is connected to a rod shape. The opening 222a of the portion 222 covers the opening 222a. That is, the waterproof and breathable component 224 is assembled in the opening 222a by the cover 224c, and the base 224a is hidden in the cover 224c.

In detail, the cover 224c in this embodiment has an extending portion 224c2, The extending portion 224c2 extends to the rear end of the base 224a, and the nano-membrane 224b is sandwiched between the extending portion 224c2 of the cover 224c and the rear end of the base 224a. In other embodiments, the base body 224a and the cover body 224c may sandwich the nano-membrane 224b therebetween by other methods, which is not limited in the present invention.

Under the above arrangement, the waterproof and breathable component 224 covers the opening 222a of the rod-shaped portion 222, so that water during the cleaning process is blocked by the nano-film 224b outside the rod-shaped portion 222, and allows air to circulate through the nano-film 224b. Inside the rod-shaped portion 222 and outside the rod-shaped portion 222. Thereby, when the substrate cassette 200 is dried after cleaning and the air in the rod-shaped portion 222 is thermally expanded and contracted, the rod-shaped portion 222 will not be deformed due to the expansion and contraction of the air therein, thereby improving its reliability. degree.

Please refer to FIG. 12 and FIG. 13, the cover 224 c has a slot S ′, the base 224 a has a through hole H ′, the through hole H ′ is opposite to the opening 222 a in the rod-shaped portion 222, and the nano-membrane 224 b covers the base 224 a. The through hole H ′ allows air to flow through the slot S ′, the nano-membrane 224b, the through hole H ′, and the opening 222a to flow from the rod-shaped portion 222 into the rod-shaped portion 222, or from the rod-shaped portion 222. To the outside of the rod-shaped portion 222.

In this embodiment, the opening direction D1 '(shown in Fig. 5) of the slot S' of the cover 224c is perpendicular to the axial direction D2 '(shown in Fig. 12) of the opening 222a of the rod-shaped portion 222. Thereby, the slot S 'is directed downward, so that water can be prevented from being accumulated in the slot S' after the rod-shaped portion 222 is cleaned.

In this embodiment, the cover 224c of the waterproof and breathable component 224 has a plurality of rubber-coated recesses 224c1. After the rubber-coated recess 224c1 is coated with a waterproof adhesive, the cover 224c is adhered to the opening 222a of the rod-shaped portion 222. However, the present invention is not limited to this. In other embodiments, the cover 224c may be assembled into the opening 222a of the rod-shaped portion 222 by other appropriate assembly structures.

As for the material and characteristics of the nano-film 224b used in this embodiment, since its requirements and effects are exactly the same as those of the nano-film 124b used in the previous embodiment, it will not be repeated here.

FIG. 14 is a perspective view of a substrate cassette according to still another embodiment of the present invention. In the present embodiment, the substrate cassette 300 supports the substrate without a supporting rod by a linear body 330 connected between side posts 316 in the frame 310. Therefore, the rod structure 320 is not used as a supporting rod, but Any rod body used to form the frame 310, such as a link or an upright. The present embodiment is applied to the connecting rod 311 as an example, and it can be provided with the same or similar waterproof and breathable component 124 as the first embodiment.

Although the rod structure 320 in this embodiment is different from the rod body 120 in the first embodiment in position and function, it uses a waterproof and breathable component 124 to block outside liquids or foreign objects from entering, and during the baking process, The mechanism of exhausting excess gas due to thermal expansion is the same as that exemplified in the first embodiment, and therefore will not be repeated.

In summary, the substrate cassette of the present invention uses a waterproof and breathable component to cover the openings of the rod-shaped portion of the rod structure, so that the water in the cleaning process is blocked by the nano-membrane outside the rod-shaped portion and allows air to pass through. Nanomembrane circulates inside and outside the rod-shaped portion. Thereby, when the substrate cassette is dried after cleaning and the air in the rod-shaped portion heats up and contracts, the rod-shaped portion will not be deformed due to the expansion and contraction of the air in the rod-shaped portion, thereby improving its reliability, and Extend its service life.

Although the present invention has been disclosed as above with the examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some modifications and retouching without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.

Claims (35)

A waterproof and breathable component includes: a base body; a cover body which is fixedly fixed to the base body; and a nano film sandwiched between the base body and the cover body. Nanometer-sized pores that can allow gas molecules to communicate with the outside of both sides of the nanofilm, and at least part of the surface of both sides of the nanofilm are not covered by the base and the cover. The waterproof and breathable component according to item 1 of the scope of patent application, wherein the base is at least partially accommodated in the cover. The waterproof and breathable component according to item 2 of the scope of patent application, wherein the base is embedded in the cover. The waterproof and breathable component according to item 1 of the scope of patent application, wherein the base body has a through hole, and the nano-membrane covers the through hole. The waterproof and breathable component according to item 4 of the scope of patent application, wherein the cover has a slot, and the opening direction of the slot is different from the axial direction of the through hole. The waterproof and breathable component according to item 5 of the scope of patent application, wherein the opening direction of the slot is perpendicular to the axial direction of the through hole. The waterproof and breathable component according to item 1 of the scope of patent application, wherein the nano-membrane is made of fluoroplastic. The waterproof and breathable component according to item 1 of the scope of patent application, wherein the thickness of the nanometer film is less than 500 nanometers. The waterproof and breathable component according to item 1 of the scope of patent application, wherein the porosity of the nano-membrane is higher than 50%. The waterproof and breathable component according to item 1 of the scope of patent application, wherein the nano-membrane has a pore density of more than 1 million per square centimeter. The waterproof and breathable component according to item 1 of the scope of patent application, wherein the permeability of the nano-membrane is greater than 2cc / sec (cubic centimeter / second). The waterproof and breathable component according to item 1 of the scope of patent application, wherein the pore diameter of the nanometer film is less than 500 nanometers. The waterproof and breathable component according to item 1 of the scope of patent application, wherein the water pressure resistance of the nano-membrane is higher than 50 mm of water column. The waterproof and breathable component according to item 1 of the scope of patent application, wherein the foreign object protection level of the nano-membrane is IP42 or above. A substrate cassette is suitable for accommodating at least one substrate. The substrate cassette includes: a frame including a plurality of rod bodies arranged parallel to each other in the frame, each of the rod bodies having a rod-shaped portion, and at least one of the rods The body includes a waterproof and breathable component according to any one of claims 1 to 14, and the rod-shaped portion of the rod body containing the waterproof and breathable component has an opening corresponding to the waterproof and breathable component. The waterproof and breathable component is assembled in the opening through the base or the cover. The substrate cassette according to item 15 of the patent application scope, wherein the rod-shaped portion is made of carbon fiber reinforced polymer composite material (Carbon Fiber Reinforced Plastic, CFRP). The substrate cassette according to item 15 of the patent application scope, wherein the plurality of rod bodies include at least one supporting rod, and the supporting rod is adapted to support the at least one substrate. The substrate cassette according to item 15 of the scope of patent application, wherein the rod-shaped portion of the rod body having the waterproof and breathable component is tubular, and the opening is located on the rod of the rod body having the waterproof and breathable component. A side surface of the rod-shaped portion, a top surface of the rod-shaped portion, or an end of the rod-shaped portion communicate with an internal space of the rod-shaped portion. The substrate cassette according to item 15 of the patent application scope, wherein the base body has a through hole, the through hole is opposite to the opening, and the nano-membrane covers the through hole. The substrate cassette according to item 15 of the scope of patent application, wherein the base is connected to the opening and covers the opening, and the cover covers the base. The substrate cassette according to item 15 of the scope of patent application, wherein the cover is connected to the opening and covers the opening, and the base is embedded in the cover. The substrate cassette according to item 15 of the scope of patent application, wherein the cover has a slot, and an opening direction of the slot is different from an axial direction of the opening. The substrate cassette according to item 22 of the scope of patent application, wherein at least one side edge position of the opening of the slot is lower than an axis of the slot. The substrate cassette according to item 22 of the patent application, wherein an opening direction of the slot is perpendicular to an axial direction of the opening. The substrate cassette according to item 24 of the scope of patent application, wherein at least one side edge position of the opening of the slot is lower than an axis of the slot. A rod structure is suitable for forming a frame or supporting at least one substrate in a substrate cassette. The rod structure includes: A rod-shaped portion having an opening; and the waterproof and breathable component according to any one of claims 1 to 14, wherein the waterproof and breathable component is assembled in the opening through the base or the cover. hole. The rod structure according to item 26 of the patent application scope, wherein the rod-shaped portion is made of a carbon fiber reinforced polymer composite material. The rod structure according to item 26 of the application, wherein the rod-shaped portion is tubular, and the opening is located at a side of the rod-shaped portion or at the end of the rod-shaped portion and communicates with the internal space of the rod-shaped portion. The rod structure according to item 26 of the patent application, wherein the base body has a through hole, the through hole is opposite to the opening, and the nano-membrane covers the through hole. The rod structure according to item 26 of the application, wherein the base is connected to the opening and covers the opening, and the cover covers the base. According to the rod structure according to item 26 of the patent application scope, wherein the cover is connected to the opening and covers the opening, and the seat is embedded in the cover. The rod structure according to item 26 of the patent application scope, wherein the cover has a slot, and an opening direction of the slot is different from an axial direction of the opening. The rod structure according to item 32 of the scope of patent application, wherein the position of at least one edge of the slot of the opening is lower than the axis of the slot. The rod structure according to item 32 of the patent application, wherein the opening direction of the slot is perpendicular to the axial direction of the opening. The rod structure according to item 34 of the patent application, wherein a position of at least one edge of the slot of the opening is lower than an axis of the slot.