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TWI662875B - Manufacturing mehod of circuit board - Google Patents

Manufacturing mehod of circuit board Download PDF

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Publication number
TWI662875B
TWI662875B TW105137592A TW105137592A TWI662875B TW I662875 B TWI662875 B TW I662875B TW 105137592 A TW105137592 A TW 105137592A TW 105137592 A TW105137592 A TW 105137592A TW I662875 B TWI662875 B TW I662875B
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Taiwan
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insulating layer
circuit
layer
printing process
opening
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TW105137592A
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Chinese (zh)
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TW201820952A (en
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陳育民
吳怡德
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華邦電子股份有限公司
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Publication of TW201820952A publication Critical patent/TW201820952A/en
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Abstract

一種線路板的製造方法,其包括以下步驟:進行第一列印製程,以形成第一絕緣層,第一絕緣層中具有第一線路溝槽;進行第二列印製程,以於第一線路溝槽中形成第一線路層;檢驗第一線路層的實際位置是否偏離第一線路層的預定位置,其中當第一線路層的實際位置偏離預定位置時,判斷實際位置偏離預定位置的偏離量是否大於預定值;當偏離量大於預定值且待形成於第一絕緣層上的第二絕緣層的厚度不大於容許厚度時,進行第一列印製程,以於第一絕緣層上形成第二絕緣層,第二絕緣層中具有開孔,且開孔的位置至少與實際位置部分重疊;進行第二列印製程,以於開孔中形成導通孔。A method for manufacturing a circuit board includes the following steps: performing a first printing process to form a first insulating layer, the first insulating layer having a first circuit trench; and performing a second printing process for the first circuit. A first circuit layer is formed in the trench; it is checked whether the actual position of the first circuit layer deviates from the predetermined position of the first circuit layer, wherein when the actual position of the first circuit layer deviates from the predetermined position, the deviation amount of the actual position from the predetermined position is judged Whether it is greater than a predetermined value; when the deviation is greater than a predetermined value and the thickness of the second insulating layer to be formed on the first insulating layer is not greater than an allowable thickness, a first printing process is performed to form a second on the first insulating layer An insulating layer, the second insulating layer has openings, and the positions of the openings at least partially overlap the actual positions; and a second printing process is performed to form a via hole in the opening.

Description

線路板的製造方法Method for manufacturing circuit board

本發明是有關於一種線路板的製造方法,且特別是有關於一種使用列印製程的線路板的製造方法。The present invention relates to a method for manufacturing a circuit board, and more particularly, to a method for manufacturing a circuit board using a printing process.

在目前的線路板製程中,在形成多層線路板時,大多利用機械鑽孔或雷射鑽孔的方式來在基板上形成垂直的開孔。接著,於基板上與開孔中形成導電層。然後,進行微影製程與蝕刻製程來形成水平的線路圖案。之後,壓合另一基板並重複上述步驟。In the current circuit board manufacturing process, when forming a multilayer circuit board, mechanical drilling or laser drilling is mostly used to form vertical openings on the substrate. Next, a conductive layer is formed on the substrate and in the openings. Then, a lithography process and an etching process are performed to form a horizontal circuit pattern. After that, another substrate is laminated and the above steps are repeated.

然而,上述的線路板製程除了製程步驟繁瑣之外,還具有材料的過度耗費以及環境汙染等缺點。此外,對於多層線路板來說,每一製程步驟(例如鑽孔、微影、蝕刻等)皆會產生公差,因此容易造成線路板良率不佳的問題。However, in addition to the cumbersome process steps, the above-mentioned circuit board manufacturing process also has the disadvantages of excessive material consumption and environmental pollution. In addition, for multi-layer circuit boards, tolerances will occur in each process step (such as drilling, lithography, etching, etc.), so it is easy to cause the problem of poor yield of the circuit board.

本發明提供一種線路板的製造方法,其採用列印製程來製造線路板。The invention provides a method for manufacturing a circuit board, which uses a printing process to manufacture the circuit board.

本發明的線路板的製造方法包括以下步驟:進行第一列印製程,以形成第一絕緣層,所述第一絕緣層中具有第一線路溝槽;進行第二列印製程,以於所述第一線路溝槽中形成第一線路層;檢驗所述第一線路層的實際位置是否偏離所述第一線路層的預定位置,其中當所述第一線路層的實際位置偏離所述預定位置時,判斷所述實際位置偏離所述預定位置的偏離量是否大於預定值;當所述偏離量大於所述預定值且待形成於所述第一絕緣層上的第二絕緣層的厚度不大於容許厚度時,進行所述第一列印製程,以於所述第一絕緣層上形成所述第二絕緣層,所述第二絕緣層中具有開孔,且所述開孔的位置至少與所述實際位置部分重疊;進行所述第二列印製程,以於所述開孔中形成導通孔(conductive via)。The method for manufacturing a circuit board of the present invention includes the following steps: performing a first printing process to form a first insulating layer, wherein the first insulating layer has a first circuit trench; and performing a second printing process for Forming a first circuit layer in the first circuit trench; checking whether the actual position of the first circuit layer deviates from a predetermined position of the first circuit layer, wherein when the actual position of the first circuit layer deviates from the predetermined position When the position is, determine whether the deviation amount of the actual position from the predetermined position is greater than a predetermined value; when the deviation amount is greater than the predetermined value and the thickness of the second insulating layer to be formed on the first insulating layer is not When the thickness is greater than the allowable thickness, the first printing process is performed to form the second insulating layer on the first insulating layer, the second insulating layer has openings, and the positions of the openings are at least Partially overlap with the actual position; performing the second printing process to form a conductive via in the opening.

在本發明的線路板的製造方法的製造方法的一實施例中,當所述實際位置未偏離所述預定位置或所述偏離量不大於所述預定值時,所述線路板的製造方法包括以下步驟:進行所述第一列印製程,以於所述第一絕緣層上形成所述第三絕緣層,其中所述第三絕緣層中具有第二線路溝槽與第一開孔,且所述第一開孔與所述實際位置的重疊面積與所述第一開孔的面積的比例不小於0.75;以及進行所述第二列印製程,以於所述第二線路溝槽中形成第二線路層以及於所述第一開孔中形成所述導通孔,其中所述第二線路層藉由所述導通孔與所述第一線路層電性連接。In an embodiment of the manufacturing method of the manufacturing method of the wiring board of the present invention, when the actual position does not deviate from the predetermined position or the deviation is not greater than the predetermined value, the method for manufacturing the wiring board includes The following steps: perform the first printing process to form the third insulating layer on the first insulating layer, wherein the third insulating layer has a second circuit trench and a first opening, and A ratio of an overlapping area of the first opening and the actual position to an area of the first opening is not less than 0.75; and performing the second printing process to form in the second circuit trench A second circuit layer and the via hole are formed in the first opening, wherein the second circuit layer is electrically connected to the first circuit layer through the via hole.

在本發明的線路板的製造方法的製造方法的一實施例中,當所述偏離量大於所述預定值且待形成於所述第一絕緣層上的所述第二絕緣層的厚度小於所述容許厚度時,所述第二絕緣層中具有第一開孔,所述第一開孔的位置朝向所述預定位置來偏離所述實際位置,且所述線路板的製造方法更包括以下步驟:於形成所述第二絕緣層之後以及於形成所述導通孔之前,進行所述第一列印製程,以於所述第二絕緣層上形成第三絕緣層,其中所述第二絕緣層與所述第三絕緣層的總厚度等於所述容許厚度,所述第三絕緣層中具有第二開孔,且所述第二開孔的位置朝向所述預定位置來偏離所述第一開孔的位置,以與所述預定位置重疊;進行所述第二列印製程,以於所述第一開孔與所述第二開孔中形成所述導通孔;進行所述第一列印製程,以於所述第三絕緣層上形成第四絕緣層,其中所述第四絕緣層中具有第二線路溝槽;以及進行所述第二列印製程,以於所述第二線路溝槽中形成第二線路層,其中所述第二線路層藉由所述導通孔與所述第一線路層電性連接。In an embodiment of the manufacturing method of the manufacturing method of the wiring board of the present invention, when the deviation is greater than the predetermined value and the thickness of the second insulating layer to be formed on the first insulating layer is smaller than When the allowable thickness is described, the second insulating layer has a first opening, and the position of the first opening is deviated from the actual position toward the predetermined position, and the method for manufacturing the circuit board further includes the following steps. : After the second insulating layer is formed and before the via hole is formed, the first printing process is performed to form a third insulating layer on the second insulating layer, wherein the second insulating layer And the third insulating layer has a total thickness equal to the allowable thickness, the third insulating layer has a second opening, and a position of the second opening is away from the first opening toward the predetermined position. Position of the hole to overlap the predetermined position; perform the second printing process to form the via hole in the first opening and the second opening; perform the first printing A process for forming a first layer on the third insulating layer An insulation layer, wherein the fourth insulation layer has a second circuit trench; and performing the second printing process to form a second circuit layer in the second circuit trench, wherein the second circuit The layer is electrically connected to the first circuit layer through the via hole.

在本發明的線路板的製造方法的製造方法的一實施例中,當所述偏離量大於所述預定值且待形成於所述第一絕緣層上的所述第二絕緣層的厚度等於容許厚度時,所述開孔的位置同時與所述實際位置以及所述預定位置重疊,且所述線路板的製造方法更包括以下步驟:於形成所述導通孔後,進行所述第一列印製程,以於所述第二絕緣層上形成第三絕緣層,其中所述第三絕緣層中具有第二線路溝槽;以及進行所述第二列印製程,以於所述第二線路溝槽中形成第二線路層,其中所述第二線路層藉由所述導通孔與所述第一線路層電性連接。In an embodiment of the manufacturing method of the manufacturing method of the wiring board of the present invention, when the deviation is greater than the predetermined value and the thickness of the second insulating layer to be formed on the first insulating layer is equal to an allowable In the thickness, the position of the opening overlaps the actual position and the predetermined position at the same time, and the method for manufacturing the circuit board further includes the following steps: after forming the via hole, performing the first printing A process for forming a third insulation layer on the second insulation layer, wherein the third insulation layer has a second line trench; and performing the second printing process for the second line trench A second circuit layer is formed in the trench, wherein the second circuit layer is electrically connected to the first circuit layer through the via hole.

在本發明的線路板的製造方法的製造方法的一實施例中,當偏離量大於所述預定值且待形成於所述第一絕緣層上的所述第二絕緣層的厚度大於所述容許厚度時,所述線路板的製造方法包括以下步驟:進行所述第一列印製程,以於所述第一絕緣層上形成第三絕緣層,所述第三絕緣層中具有所述開孔與第二線路溝槽,所述開孔的位置同時與所述實際位置以及所述預定位置重疊,且在進行所述第二列印製程以形成所述導通孔時,同時於所述第二線路溝槽中形成第二線路層,其中所述第二線路層藉由所述導通孔與所述第一線路層電性連接。In an embodiment of the manufacturing method of the manufacturing method of the wiring board of the present invention, when the deviation is larger than the predetermined value and the thickness of the second insulating layer to be formed on the first insulating layer is greater than the allowable At the time of thickness, the manufacturing method of the circuit board includes the following steps: performing the first printing process to form a third insulating layer on the first insulating layer, and the third insulating layer has the openings With the second line trench, the position of the opening overlaps with the actual position and the predetermined position at the same time, and when the second printing process is performed to form the via hole, it is simultaneously with the second A second circuit layer is formed in the circuit trench, wherein the second circuit layer is electrically connected to the first circuit layer through the via hole.

在本發明的線路板的製造方法的製造方法的一實施例中,上述第一列印製程例如為三維數位化光處理(digital light processing,DLP)。In an embodiment of the manufacturing method of the manufacturing method of the wiring board of the present invention, the first printing process is, for example, three-dimensional digital light processing (DLP).

在本發明的線路板的製造方法的製造方法的一實施例中,在上述第一列印製程中,所述第一絕緣層形成於成型槽中,所述成型槽的底面例如為可透光的,且所述三維數位化光處理的光束經由所述成型槽的所述底面對所述第一絕緣層進行照射。In an embodiment of the manufacturing method of the method for manufacturing a wiring board according to the present invention, in the first printing process, the first insulating layer is formed in a molding groove, and a bottom surface of the molding groove is, for example, transparent. And the light beam processed by the three-dimensional digitizing light is irradiated through the bottom surface of the molding groove to the first insulating layer.

在本發明的線路板的製造方法的製造方法的一實施例中,上述第二列印製程例如為導電墨水噴印。In an embodiment of the manufacturing method of the manufacturing method of the wiring board according to the present invention, the second printing process is, for example, conductive ink jet printing.

在本發明的線路板的製造方法的製造方法的一實施例中,上述容許厚度例如為所述第一線路層與待形成於所述第一線路層上方的第二線路層之間的預定垂直距離。In an embodiment of the manufacturing method of the manufacturing method of the wiring board of the present invention, the allowable thickness is, for example, a predetermined vertical distance between the first wiring layer and a second wiring layer to be formed above the first wiring layer. distance.

基於上述,在本發明中,在以列印製程形成第一線路層之後,檢驗第一線路層的實際位置是否偏離預定位置,然後再根據檢驗結果進行後續用以形成定義出導通孔的絕緣層的列印製程。因此,當第一線路層的實際位置偏離預定位置時,可以即時地對後續的列印製程進行調整,使得所形成的導通孔可以準確地連接第一線路層與第二線路層。Based on the above, in the present invention, after the first circuit layer is formed by the printing process, it is checked whether the actual position of the first circuit layer deviates from the predetermined position, and then the subsequent insulation layer is formed to define a via hole according to the inspection result. Printing process. Therefore, when the actual position of the first circuit layer deviates from the predetermined position, subsequent printing processes can be adjusted immediately, so that the formed vias can accurately connect the first circuit layer and the second circuit layer.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above features and advantages of the present invention more comprehensible, embodiments are hereinafter described in detail with reference to the accompanying drawings.

在本發明中,在以列印製程形成線路板的一層線路之後,先對這層線路的位置進行檢驗,以判定這層線路的實際位置是否偏離預定位置。如此一來,當這層線路的實際位置偏離預定位置時,可以即時地對後續用以形成定義出導通孔的絕緣層的列印製程進行調整,以使導通孔可以準確地連接這層線路與後續的另一層線路。以下將以各實施例來對本發明進行說明。在以下各實施例中,相同的元件將以相同的元件符號表示。In the present invention, after a layer of the circuit board is formed by a printing process, the position of the layer of the circuit is first checked to determine whether the actual position of the layer of the circuit deviates from the predetermined position. In this way, when the actual position of this layer of circuit deviates from the predetermined position, subsequent printing processes for forming an insulating layer defining a via hole can be adjusted in real time so that the via hole can accurately connect this layer of circuit with Follow up another layer of lines. Hereinafter, the present invention will be described by using various embodiments. In the following embodiments, the same elements will be represented by the same element symbols.

在以下各實施例中,「第一列印製程」表示用來形成絕緣層的印刷製程,其例如是三維數位化光處理。此外,「第二列印製程」表示用來形成導電層的印刷製程,其例如是導電墨水噴印。In each of the following embodiments, the “first printing process” refers to a printing process for forming an insulating layer, which is, for example, a three-dimensional digital photo process. In addition, the "second printing process" refers to a printing process for forming a conductive layer, which is, for example, conductive ink jet printing.

圖1為依照本發明實施例所繪示的線路板的製造方法的流程圖。圖2A至圖2D為依照本發明第一實施例所繪示的線路板的製造方法的流程剖面示意圖。首先,請同時參照圖1與圖2A,在步驟100中,進行第一列印製程,以形成絕緣層200。如圖6所示,在本實施例中,使用列印裝置600來進行第一列印製程。列印裝置600包括光源602、反射元件604、透鏡606、成型槽608以及列印元件610。藉由列印元件610將絕緣層200形成於成型槽608中。成型槽608的底面為可透光的,使得由光源602產生的光束612經由反射元件604改變路徑並穿過透鏡606,自成型槽608的底面進行照射來固化絕緣層200。由於所形成的絕緣層200的表面可能因表面張力而形成曲面,藉由上述的設置可避免光經由曲面來對絕緣層200進行曝光而照成固化誤差。絕緣層200中具有線路溝槽202。在本實施例中,線路溝槽202包括用以定義第一層線路的溝槽202a以及用以定義焊墊的溝槽202b。FIG. 1 is a flowchart of a method for manufacturing a circuit board according to an embodiment of the present invention. FIG. 2A to FIG. 2D are schematic cross-sectional views of a process of a method for manufacturing a circuit board according to a first embodiment of the present invention. First, referring to FIG. 1 and FIG. 2A at the same time, in step 100, a first printing process is performed to form an insulating layer 200. As shown in FIG. 6, in this embodiment, a printing device 600 is used to perform a first printing process. The printing device 600 includes a light source 602, a reflective element 604, a lens 606, a molding groove 608, and a printing element 610. The insulating layer 200 is formed in the molding groove 608 by the printing element 610. The bottom surface of the molding groove 608 is transparent, so that the light beam 612 generated by the light source 602 changes the path through the reflecting element 604 and passes through the lens 606, and is irradiated from the bottom surface of the molding groove 608 to cure the insulating layer 200. Since the surface of the formed insulating layer 200 may form a curved surface due to surface tension, the above setting can prevent light from exposing the insulating layer 200 through the curved surface to cause curing errors. The insulating layer 200 has a line trench 202 therein. In this embodiment, the circuit trench 202 includes a trench 202 a for defining a first-layer circuit and a trench 202 b for defining a bonding pad.

然後,請同時參照圖1與圖2B,在步驟102中,進行第二列印製程,於線路溝槽202中形成線路層204。詳細地說,位於溝槽202a中的線路層204可視為多層線路板中的第一層線路,而位於溝槽202b中的線路層204可視為用以與外部元件連接的焊墊。Then, referring to both FIG. 1 and FIG. 2B, in step 102, a second printing process is performed to form a circuit layer 204 in the circuit trench 202. In detail, the wiring layer 204 located in the trench 202 a can be regarded as a first layer of wiring in a multilayer circuit board, and the wiring layer 204 located in the trench 202 b can be regarded as a bonding pad used to connect with external components.

接著,在步驟104中,檢驗所形成的線路層204的實際位置是否偏離預定位置,以及在步驟106中,當實際位置偏離預定位置時,判斷實際位置偏離預定位置的偏離量是否大於預定值。在以第一列印製程形成絕緣層200時,受到製程環境、人為操作或其他因素影響,線路溝槽202的位置或形狀可能會產生偏差。由於後續步驟中所形成的線路層與導通孔的位置皆為預定的,因此上述的偏差有可能會對線路板的良率造成影響。當線路層204的實際位置未偏離預定位置或上述的偏差在容許範圍內(偏離量不大於預定值)時,對所形成的線路板的良率影響有限而可被接受。然而,當上述的偏差超過容許範圍時,有可能會造成電訊號的傳輸效率降低,甚至造成斷路。如此一來,將造成線路板的良率大幅降低。因此,在本發明中,在形成線路層204之後,立即對線路層204的位置進行檢驗,並根據檢驗的結果即時地對後續製程進行調整。上述檢驗線路層204的位置的方式例如是自動光學影像檢測。Next, in step 104, it is checked whether the actual position of the formed circuit layer 204 deviates from the predetermined position, and in step 106, when the actual position deviates from the predetermined position, it is determined whether the deviation amount of the actual position from the predetermined position is greater than a predetermined value. When forming the insulating layer 200 in the first printing process, the position or shape of the circuit trench 202 may be affected by the process environment, human operation, or other factors. Since the positions of the wiring layer and the vias formed in the subsequent steps are predetermined, the above-mentioned deviation may affect the yield of the circuit board. When the actual position of the circuit layer 204 does not deviate from the predetermined position or the above-mentioned deviation is within an allowable range (the deviation is not greater than a predetermined value), the yield rate of the formed circuit board is limited and can be accepted. However, when the above-mentioned deviation exceeds the allowable range, it may cause the transmission efficiency of the telecommunication signal to decrease, or even cause a disconnection. In this way, the yield of the circuit board will be greatly reduced. Therefore, in the present invention, after the circuit layer 204 is formed, the position of the circuit layer 204 is inspected immediately, and subsequent processes are adjusted in real time according to the inspection result. The method for checking the position of the circuit layer 204 is, for example, automatic optical image detection.

然後,請同時參照圖1與圖2C,在本實施例中,線路層204的位置經檢驗之後,判定並未偏離預定位置(或偏離量不大於預定值)。因此,在步驟108中,進行第一列印製程,於絕緣層200上形成絕緣層206。絕緣層206中具有線路溝槽208與開孔210。由於線路層204的實際位置並未偏離預定位置(或偏離量不大於預定值),因此開孔210與線路層204的實際位置的重疊面積與開孔210的面積的比例能夠不小於0.75,亦即後續形成於開孔210中的導通孔能夠與線路層204有效地對準。線路溝槽208用以定義第二層線路,開孔210用以定義連接第一層線路與第二層線路的導通孔。在本實施例中,由於線路層204的位置並未偏離預定位置(或偏離量不大於預定值),因此所形成的開孔210的位置能夠精確地與線路層204的預定位置對準,如圖2C中的虛線方框所示。Then, please refer to FIG. 1 and FIG. 2C at the same time. In this embodiment, after the position of the circuit layer 204 is checked, it is determined that the position does not deviate from the predetermined position (or the deviation is not greater than the predetermined value). Therefore, in step 108, a first printing process is performed to form an insulating layer 206 on the insulating layer 200. The insulating layer 206 includes a line trench 208 and an opening 210. Since the actual position of the circuit layer 204 does not deviate from the predetermined position (or the amount of deviation is not greater than a predetermined value), the ratio of the area of the overlap between the opening 210 and the actual position of the circuit layer 204 to the area of the opening 210 can be not less than 0.75, That is, the vias formed in the openings 210 can be effectively aligned with the circuit layer 204. The circuit trench 208 is used to define a second-layer circuit, and the opening 210 is used to define a via hole connecting the first-layer circuit and the second-layer circuit. In this embodiment, since the position of the circuit layer 204 is not deviated from the predetermined position (or the deviation is not greater than a predetermined value), the position of the formed opening 210 can be accurately aligned with the predetermined position of the circuit layer 204, such as This is shown by the dashed box in Figure 2C.

之後,請同時參照圖1與圖2D,在步驟110中,進行第二列印製程,於線路溝槽208與開孔210中形成線路層212。詳細地說,位於線路溝槽208中的線路層212可視為多層線路板中的第二層線路,而位於開孔210中的線路層212可視為用以連接第一層線路與第二層線路的導通孔。由於導通孔與線路層204的預定位置精確地連接,因此可以避免所形成的線路板良率不佳的問題。Thereafter, referring to both FIG. 1 and FIG. 2D, in step 110, a second printing process is performed to form a circuit layer 212 in the circuit trench 208 and the opening 210. In detail, the circuit layer 212 in the circuit trench 208 can be regarded as the second layer circuit in the multilayer circuit board, and the circuit layer 212 in the opening 210 can be regarded as the connection between the first layer circuit and the second layer circuit. Vias. Since the via is accurately connected to a predetermined position of the wiring layer 204, the problem of poor yield of the formed wiring board can be avoided.

在本實施例中,圖2D所示的線路板為具有二層線路的線路板,但本發明不限於此。在其他實施例中,當線路板具有更多層線路時,可如上所述在形成每一層線路之後對線路的位置進行檢驗,再進行後續的製程。如此一來,可確保所形成的導通孔能夠與線路層精確地連接。In this embodiment, the circuit board shown in FIG. 2D is a circuit board having a two-layer circuit, but the present invention is not limited thereto. In other embodiments, when the circuit board has more layers of lines, the position of the lines may be checked after forming each layer of lines as described above, and subsequent processes may be performed. In this way, it can be ensured that the formed vias can be accurately connected to the wiring layer.

圖3A至圖3E為依照本發明第二實施例所繪示的線路板的製造方法的流程剖面示意圖。請同時參照圖1與圖3A,如圖2B所述,於絕緣層200中形成線路層204。在步驟104中,檢驗所形成的線路層204的實際位置是否偏離預定位置。在本實施例中,部分線路層204(區域204a)的位置偏離預定位置300。接著,在步驟106中,判斷實際位置偏離預定位置的偏離量是否大於預定值。在本實施例中,上述的偏離量大於預定值。此時,由於區域204a的位置偏離預定位置300且偏離量大於預定值,因此必須即時對後續製程進行調整,以避免後續形成的導通孔無法與線路層204精確地連接。FIG. 3A to FIG. 3E are schematic cross-sectional flowcharts of a method for manufacturing a circuit board according to a second embodiment of the present invention. Please refer to FIG. 1 and FIG. 3A at the same time. As shown in FIG. 2B, a circuit layer 204 is formed in the insulating layer 200. In step 104, it is checked whether the actual position of the formed wiring layer 204 deviates from a predetermined position. In this embodiment, the position of a part of the circuit layer 204 (the area 204 a) is deviated from the predetermined position 300. Next, in step 106, it is determined whether the deviation amount of the actual position from the predetermined position is greater than a predetermined value. In this embodiment, the above-mentioned deviation amount is larger than a predetermined value. At this time, since the position of the region 204a deviates from the predetermined position 300 and the deviation is greater than a predetermined value, subsequent processes must be adjusted immediately to avoid that the vias formed later cannot be accurately connected to the circuit layer 204.

此外,基於所形成的線路板的最終厚度,兩層線路層之間的垂直距離具有預定值(在本文中亦稱為容許厚度)。因此,形成於兩層線路層之間的絕緣層的厚度必須不大於容許厚度。在本實施例中,在用以定義導通孔的絕緣層的厚度不大於容許厚度的條件下,對用以形成導通孔的製程進行調整。In addition, based on the final thickness of the formed wiring board, the vertical distance between the two wiring layers has a predetermined value (also referred to herein as an allowable thickness). Therefore, the thickness of the insulating layer formed between the two circuit layers must not be greater than the allowable thickness. In this embodiment, the process for forming the via is adjusted under the condition that the thickness of the insulating layer used to define the via is not greater than the allowable thickness.

然後,請同時參照圖1與圖3B,在步驟112中,進行第一列印製程,於絕緣層200上形成絕緣層302。絕緣層302中具有開孔302a。開孔302的位置朝向預定位置300來偏離區域204a的位置,且一部分與區域204a重疊。接著,進行第一列印製程,於絕緣層302上形成絕緣層304。此時,絕緣層302與絕緣層304的總厚度小於容許厚度。絕緣層304中具有開孔304a。開孔304a的位置朝向預定位置300來偏離開孔302a的位置,且一部分與開孔302a重疊。然後,進行第一列印製程,於絕緣層304上形成絕緣層306。此時,絕緣層302、絕緣層304與絕緣層306的總厚度小於容許厚度。絕緣層306中具有開孔306a。開孔306a的位置朝向預定位置300來偏離開孔304a的位置,且一部分與開孔304a重疊。之後,進行第一列印製程,於絕緣層306上形成絕緣層308。此時,絕緣層302、絕緣層304、絕緣層306與絕緣層308的總厚度等於容許厚度。絕緣層308中具有開孔308a。開孔308a的位置朝向預定位置300來偏離開孔306a的位置,且一部分與開孔306a重疊。此時,開孔308a的位置與預定位置300重疊。接著,請參照圖3C,進行第二列印製程,以於開孔302a、304a、306a、308a中形成與區域204a連接的導通孔310。Then, referring to FIG. 1 and FIG. 3B simultaneously, in step 112, a first printing process is performed to form an insulating layer 302 on the insulating layer 200. The insulating layer 302 has an opening 302a. The position of the opening 302 is deviated from the position of the region 204a toward the predetermined position 300, and a part thereof overlaps the region 204a. Next, a first printing process is performed to form an insulating layer 304 on the insulating layer 302. At this time, the total thickness of the insulating layer 302 and the insulating layer 304 is smaller than the allowable thickness. The insulating layer 304 has an opening 304a. The position of the opening 304a is deviated from the position of the hole 302a toward the predetermined position 300, and a part thereof overlaps the opening 302a. Then, a first printing process is performed to form an insulating layer 306 on the insulating layer 304. At this time, the total thickness of the insulating layer 302, the insulating layer 304, and the insulating layer 306 is smaller than the allowable thickness. The insulating layer 306 has an opening 306a. The position of the opening 306a is deviated from the position of the hole 304a toward the predetermined position 300, and a part thereof overlaps the opening 304a. After that, a first printing process is performed to form an insulating layer 308 on the insulating layer 306. At this time, the total thickness of the insulating layer 302, the insulating layer 304, the insulating layer 306, and the insulating layer 308 is equal to the allowable thickness. The insulating layer 308 has an opening 308a. The position of the opening 308a is deviated from the position of the hole 306a toward the predetermined position 300, and a part thereof overlaps the opening 306a. At this time, the position of the opening 308a overlaps with the predetermined position 300. Next, referring to FIG. 3C, a second printing process is performed to form a via hole 310 connected to the region 204a in the openings 302a, 304a, 306a, 308a.

然後,請同時參照圖1與圖3D,在步驟114中,進行第一列印製程,於絕緣層308上形成絕緣層312。絕緣層312中具有線路溝槽312a。之後,請參照圖3E,進行第二列印製程,於線路溝槽312a中形成線路層314。在本實施例中,由於區域204a的位置偏離預定位置300,若直接形成垂直的導通孔(如圖2D中的導通孔),將造成線路層204(區域204a)無法精確地與線路層314連接。因此,藉由使開孔302a、304a、306a、308a逐漸朝向預定位置300偏移的方式來形成同時連接區域204a且與預定位置300重疊的導通孔310,使得線路層204以及線路層314能夠精確地連接。Then, referring to FIG. 1 and FIG. 3D at the same time, in step 114, a first printing process is performed to form an insulating layer 312 on the insulating layer 308. The insulating layer 312 has a line trench 312a. After that, referring to FIG. 3E, a second printing process is performed to form a circuit layer 314 in the circuit trench 312a. In this embodiment, because the position of the region 204a is deviated from the predetermined position 300, if a vertical via (such as the via in FIG. 2D) is directly formed, the circuit layer 204 (region 204a) cannot be accurately connected to the circuit layer 314. . Therefore, by forming the via holes 302a, 304a, 306a, and 308a gradually shifting toward the predetermined position 300, a via hole 310 that simultaneously connects the region 204a and overlaps the predetermined position 300 is formed, so that the wiring layer 204 and the wiring layer 314 can be accurately地 连接。 Ground connection.

在本實施例中,線路層204與線路層314之間形成有四層絕緣層,但本發明不限於此。在其他實施例中,可視實際情況(例如區域204a與預定位置300之間的偏離程度、線路層204與線路層314之間所能容納的絕緣層的層數等)來調整絕緣層的層數。In this embodiment, four insulating layers are formed between the circuit layer 204 and the circuit layer 314, but the present invention is not limited thereto. In other embodiments, the number of layers of the insulation layer may be adjusted according to the actual situation (such as the degree of deviation between the region 204a and the predetermined position 300, the number of layers of the insulation layer that can be accommodated between the circuit layer 204 and the circuit layer 314, etc.). .

圖4A至圖4C為依照本發明第三實施例所繪示的線路板的製造方法的流程剖面示意圖。首先,請同時參照圖1與圖4A,在本實施例中,與第二實施例相同,在步驟104中,檢驗後判定形成於絕緣層200中的部分線路層204(區域204a)的實際位置偏離預定位置300。接著,在步驟106中,判斷實際位置偏離預定位置的偏離量大於預定值。然後,在步驟112中,進行第一列印製程,於絕緣層200上形成絕緣層400。此時,絕緣層400的厚度等於容許厚度。絕緣層400中具有開孔400a。在本實施例中,開孔400a的位置同時與區域204a以及預定位置300重疊,亦即開孔400a的位置涵蓋區域204a與預定位置300。接著,請參照圖4B,進行第二列印製程,以於開孔400a中形成與區域204a連接的導通孔402。FIG. 4A to FIG. 4C are schematic cross-sectional flowcharts of a method for manufacturing a circuit board according to a third embodiment of the present invention. First, please refer to FIG. 1 and FIG. 4A at the same time. In this embodiment, as in the second embodiment, in step 104, the actual position of a part of the circuit layer 204 (area 204a) formed in the insulating layer 200 is determined after inspection. Deviated from the predetermined position 300. Next, in step 106, it is determined that the deviation amount of the actual position from the predetermined position is larger than a predetermined value. Then, in step 112, a first printing process is performed to form an insulating layer 400 on the insulating layer 200. At this time, the thickness of the insulating layer 400 is equal to the allowable thickness. The insulating layer 400 has an opening 400a therein. In this embodiment, the position of the opening 400a overlaps with the area 204a and the predetermined position 300, that is, the position of the opening 400a covers the area 204a and the predetermined position 300. Next, referring to FIG. 4B, a second printing process is performed to form a via hole 402 connected to the region 204a in the opening 400a.

之後,請同時參照圖1與圖4C,在步驟114中,如圖3D至圖3E所述,進行第一列印製程,於絕緣層400上形成具有線路溝槽312a的絕緣層312。然後,進行第二列印製程,於線路溝槽312a中形成線路層314。After that, please refer to FIG. 1 and FIG. 4C at the same time. In step 114, as shown in FIG. 3D to FIG. 3E, a first printing process is performed to form an insulating layer 312 having a line trench 312a on the insulating layer 400. Then, a second printing process is performed to form a circuit layer 314 in the circuit trench 312a.

在本實施例中,由於區域204a的位置偏離預定位置300,若直接形成垂直的導通孔(如圖2D中的導通孔),將造成線路層204(區域204a)以及線路層314無法精確地連接。因此,藉由在絕緣層400中形成尺寸較大的導通孔402,使得導通孔402的位置能夠涵蓋區域204a與預定位置300,以精確地與線路層204以及線路層314連接。In this embodiment, since the position of the region 204a is deviated from the predetermined position 300, if a vertical via (such as the via in FIG. 2D) is directly formed, the circuit layer 204 (region 204a) and the circuit layer 314 cannot be accurately connected. . Therefore, by forming the via hole 402 with a relatively large size in the insulating layer 400, the position of the via hole 402 can cover the area 204a and the predetermined position 300 to be accurately connected to the circuit layer 204 and the circuit layer 314.

圖5A至圖5B為依照本發明第四實施例所繪示的線路板的製造方法的流程剖面示意圖。首先,請同時參照圖1與圖5A,在本實施例中,與第二實施例相同,在步驟104中,檢驗後判定形成於絕緣層200中的部分線路層204(區域204a)的實際位置偏離預定位置300。接著,在步驟106中,判斷實際位置偏離預定位置的偏離量大於預定值。FIG. 5A to FIG. 5B are schematic cross-sectional views of a process of a method for manufacturing a circuit board according to a fourth embodiment of the present invention. First, please refer to FIG. 1 and FIG. 5A at the same time. In this embodiment, as in the second embodiment, in step 104, the actual position of a part of the circuit layer 204 (area 204a) formed in the insulating layer 200 is determined after inspection. Deviated from the predetermined position 300. Next, in step 106, it is determined that the deviation amount of the actual position from the predetermined position is larger than a predetermined value.

在本實施例中,由於兩層線路層之間的垂直距離過小,亦即用以定義導通孔的絕緣層的厚度大於容許厚度,因此並無法如同第二實施例與第三實施例,對用以形成兩層線路層之間的導通孔的製程進行調整。In this embodiment, because the vertical distance between the two circuit layers is too small, that is, the thickness of the insulating layer used to define the via is greater than the allowable thickness, it cannot be used in the same way as in the second and third embodiments. The process is adjusted by forming a via hole between two circuit layers.

然後,在步驟116中,進行第一列印製程,於絕緣層200上形成絕緣層500。絕緣層500具有線路溝槽502與開孔504。在本實施例中,開孔504的位置同時與區域204a以及預定位置300重疊。然後,請參照圖5B,進行第二列印製程,於線路溝槽502與開孔504中形成線路層506。詳細地說,位於線路溝槽502中的線路層506可視為多層線路板中的第二層線路,而位於開孔504中的線路層506可視為用以連接第一層線路與第二層線路的導通孔。Then, in step 116, a first printing process is performed to form an insulating layer 500 on the insulating layer 200. The insulating layer 500 includes a line trench 502 and an opening 504. In this embodiment, the position of the opening 504 overlaps the area 204a and the predetermined position 300 at the same time. 5B, a second printing process is performed to form a circuit layer 506 in the circuit trench 502 and the opening 504. In detail, the circuit layer 506 in the circuit trench 502 can be regarded as the second layer circuit in the multilayer circuit board, and the circuit layer 506 in the opening 504 can be regarded as the connection between the first layer circuit and the second layer circuit. Vias.

在本實施例中,由於區域204a的位置偏離預定位置300,若直接形成垂直的導通孔(如圖2D中的導通孔),將造成線路層204(區域204a)以及線路層314無法精確地連接。因此,在無法形成額外的絕緣層的情況下,藉由在絕緣層500中形成尺寸較大的導通孔,使得導通孔的位置能夠涵蓋區域204a與預定位置300,以精確地與第一層線路層以及第二層線路層連接。In this embodiment, since the position of the region 204a is deviated from the predetermined position 300, if a vertical via (such as the via in FIG. 2D) is directly formed, the circuit layer 204 (region 204a) and the circuit layer 314 cannot be accurately connected. . Therefore, in the case where an additional insulating layer cannot be formed, by forming a larger via hole in the insulating layer 500, the position of the via hole can cover the region 204a and the predetermined position 300, so as to accurately communicate with the first-layer circuit. Layer and the second circuit layer.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed as above with the examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some modifications and retouching without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.

100、102、104、106、108、110、112、114、116‧‧‧步驟100, 102, 104, 106, 108, 110, 112, 114, 116‧‧‧ steps

200、206、312、302、304、306、308、400、500‧‧‧絕緣層200, 206, 312, 302, 304, 306, 308, 400, 500‧‧‧ insulation

202、208、312a、502‧‧‧線路溝槽202, 208, 312a, 502‧‧‧line trench

202a、202b‧‧‧溝槽202a, 202b‧‧‧Trench

204、212、314、506‧‧‧線路層204, 212, 314, 506‧‧‧ line layer

210、302a、304a、306a、308a、400a、504‧‧‧導通孔開孔210, 302a, 304a, 306a, 308a, 400a, 504‧‧‧ via hole opening

204a‧‧‧區域204a‧‧‧area

300‧‧‧預定位置300‧‧‧ scheduled location

310、402‧‧‧導通孔310, 402‧‧‧via

600‧‧‧列印裝置600‧‧‧printing device

602‧‧‧光源602‧‧‧light source

604‧‧‧反射元件604‧‧‧Reflective element

606‧‧‧透鏡606‧‧‧ lens

608‧‧‧成型槽608‧‧‧Forming groove

610‧‧‧列印元件610‧‧‧Printing element

圖1為依照本發明實施例所繪示的線路板的製造方法的流程圖。 圖2A至圖2D為依照本發明第一實施例所繪示的線路板的製造方法的流程剖面示意圖。 圖3A至圖3E為依照本發明第二實施例所繪示的線路板的製造方法的流程剖面示意圖。 圖4A至圖4C為依照本發明第三實施例所繪示的線路板的製造方法的流程剖面示意圖。 圖5A至圖5B為依照本發明第四實施例所繪示的線路板的製造方法的流程剖面示意圖。 圖6為在本發明實施例中所使用的列印裝置的示意圖。FIG. 1 is a flowchart of a method for manufacturing a circuit board according to an embodiment of the present invention. FIG. 2A to FIG. 2D are schematic cross-sectional views of a process of a method for manufacturing a circuit board according to a first embodiment of the present invention. FIG. 3A to FIG. 3E are schematic cross-sectional flowcharts of a method for manufacturing a circuit board according to a second embodiment of the present invention. FIG. 4A to FIG. 4C are schematic cross-sectional flowcharts of a method for manufacturing a circuit board according to a third embodiment of the present invention. FIG. 5A to FIG. 5B are schematic cross-sectional views of a process of a method for manufacturing a circuit board according to a fourth embodiment of the present invention. FIG. 6 is a schematic diagram of a printing apparatus used in an embodiment of the present invention.

Claims (7)

一種線路板的製造方法,包括:進行第一列印製程,以形成第一絕緣層,所述第一絕緣層中具有第一線路溝槽;進行第二列印製程,以於所述第一線路溝槽中形成第一線路層;檢驗所述第一線路層的實際位置是否偏離所述第一線路層的預定位置,其中當所述第一線路層的所述實際位置偏離所述預定位置時,判斷所述實際位置偏離所述預定位置的偏離量是否大於預定值;當所述偏離量大於所述預定值且待形成於所述第一絕緣層上的第二絕緣層的厚度不大於容許厚度時,進行所述第一列印製程,以於所述第一絕緣層上形成所述第二絕緣層,所述第二絕緣層中具有第一開孔,且所述第一開孔的位置至少與所述實際位置部分重疊,所述容許厚度為所述第一線路層與待形成於所述第一線路層上方的第二線路層之間的預定垂直距離;以及進行所述第二列印製程,以於所述第一開孔中形成導通孔,其中當所述偏離量大於所述預定值且待形成於所述第一絕緣層上的所述第二絕緣層的厚度小於所述容許厚度時,所述第二絕緣層的所述第一開孔的位置朝向所述預定位置來偏離所述實際位置,且所述線路板的製造方法更包括:於形成所述第二絕緣層之後以及於形成所述導通孔之前,進行所述第一列印製程,以於所述第二絕緣層上形成第三絕緣層,其中所述第二絕緣層與所述第三絕緣層的總厚度等於所述容許厚度,所述第三絕緣層中具有第二開孔,且所述第二開孔的位置朝向所述預定位置來偏離所述第一開孔的位置,以與所述預定位置重疊;進行所述第二列印製程,以於所述第一開孔與所述第二開孔中形成所述導通孔;進行所述第一列印製程,以於所述第三絕緣層上形成第四絕緣層,其中所述第四絕緣層中具有第二線路溝槽;以及進行所述第二列印製程,以於所述第二線路溝槽中形成所述第二線路層,其中所述第二線路層藉由所述導通孔與所述第一線路層電性連接。A method for manufacturing a circuit board includes: performing a first printing process to form a first insulating layer, the first insulating layer having a first circuit trench; and performing a second printing process to the first A first circuit layer is formed in the circuit trench; it is checked whether the actual position of the first circuit layer deviates from a predetermined position of the first circuit layer, wherein when the actual position of the first circuit layer deviates from the predetermined position When the deviation of the actual position from the predetermined position is greater than a predetermined value; when the deviation is greater than the predetermined value and the thickness of the second insulating layer to be formed on the first insulating layer is not greater than When the thickness is allowable, the first printing process is performed to form the second insulating layer on the first insulating layer, the second insulating layer has a first opening, and the first opening is The position of at least partially overlaps the actual position, and the allowable thickness is a predetermined vertical distance between the first circuit layer and a second circuit layer to be formed above the first circuit layer; and Two-print process A via hole is formed in the first opening, wherein when the deviation is greater than the predetermined value and a thickness of the second insulating layer to be formed on the first insulating layer is smaller than the allowable thickness A position of the first opening of the second insulation layer is deviated from the actual position toward the predetermined position, and the method of manufacturing the circuit board further includes: after forming the second insulation layer; and Before forming the vias, the first printing process is performed to form a third insulating layer on the second insulating layer, wherein the total thickness of the second insulating layer and the third insulating layer is equal to In the allowable thickness, the third insulating layer has a second opening, and a position of the second opening is away from a position of the first opening toward the predetermined position so as to overlap the predetermined position; Performing the second printing process to form the via hole in the first opening and the second opening; performing the first printing process to form the third insulating layer A fourth insulating layer, wherein the fourth insulating layer has a first A circuit trench; and performing the second printing process to form the second circuit layer in the second circuit trench, wherein the second circuit layer communicates with the first via the via hole. The line layer is electrically connected. 如申請專利範圍第1項所述的線路板的製造方法,其中當所述實際位置未偏離所述預定位置或所述偏離量不大於所述預定值時,所述線路板的製造方法包括:進行所述第一列印製程,以於所述第一絕緣層上形成所述第二絕緣層,其中所述第二絕緣層中具有所述第二線路溝槽與所述第一開孔,且所述第一開孔與所述實際位置的重疊面積與所述第一開孔的面積的比例不小於0.75;以及進行所述第二列印製程,以於所述第二線路溝槽中形成所述第二線路層以及於所述第一開孔中形成所述導通孔,其中所述第二線路層藉由所述導通孔與所述第一線路層電性連接。The method for manufacturing a circuit board according to item 1 of the scope of patent application, wherein when the actual position does not deviate from the predetermined position or the deviation is not greater than the predetermined value, the method for manufacturing the circuit board includes: Performing the first printing process to form the second insulating layer on the first insulating layer, wherein the second insulating layer has the second circuit trench and the first opening, And the ratio of the overlapping area of the first opening to the actual position to the area of the first opening is not less than 0.75; and the second printing process is performed in the second circuit trench Forming the second circuit layer and forming the via hole in the first opening, wherein the second circuit layer is electrically connected to the first circuit layer through the via hole. 如申請專利範圍第1項所述的線路板的製造方法,其中當所述偏離量大於所述預定值且待形成於所述第一絕緣層上的所述第二絕緣層的厚度等於所述容許厚度時,所述第一開孔的位置同時與所述實際位置以及所述預定位置重疊,且所述線路板的製造方法更包括:於形成所述導通孔後,進行所述第一列印製程,以於所述第二絕緣層上形成所述第三絕緣層,其中所述第三絕緣層中具有所述第二線路溝槽;以及進行所述第二列印製程,以於所述第二線路溝槽中形成所述第二線路層,其中所述第二線路層藉由所述導通孔與所述第一線路層電性連接。The method for manufacturing a circuit board according to item 1 of the scope of patent application, wherein when the deviation is greater than the predetermined value and the thickness of the second insulating layer to be formed on the first insulating layer is equal to the thickness In the allowable thickness, the position of the first opening overlaps the actual position and the predetermined position at the same time, and the method for manufacturing the circuit board further includes: after forming the via hole, performing the first row A printing process to form the third insulation layer on the second insulation layer, wherein the third insulation layer has the second line trench; and the second printing process is performed to The second circuit layer is formed in the second circuit trench, wherein the second circuit layer is electrically connected to the first circuit layer through the via hole. 如申請專利範圍第1項所述的線路板的製造方法,其中當所述偏離量大於所述預定值且待形成於所述第一絕緣層上的所述第二絕緣層的厚度大於所述容許厚度時,所述線路板的製造方法包括:進行所述第一列印製程,以於所述第一絕緣層上形成所述第二絕緣層,所述第二絕緣層中具有所述第一開孔與所述第二線路溝槽,所述第一開孔的位置同時與所述實際位置以及所述預定位置重疊,且在進行所述第二列印製程以形成所述導通孔時,同時於所述第二線路溝槽中形成所述第二線路層,其中所述第二線路層藉由所述導通孔與所述第一線路層電性連接。The method for manufacturing a wiring board according to item 1 of the scope of patent application, wherein when the deviation is larger than the predetermined value and the thickness of the second insulating layer to be formed on the first insulating layer is larger than the thickness At the allowable thickness, the method for manufacturing the circuit board includes: performing the first printing process to form the second insulating layer on the first insulating layer, and the second insulating layer having the first insulating layer An opening and the second circuit trench, the position of the first opening overlaps the actual position and the predetermined position at the same time, and when the second printing process is performed to form the via hole And simultaneously forming the second circuit layer in the second circuit trench, wherein the second circuit layer is electrically connected to the first circuit layer through the via hole. 如申請專利範圍第1項所述的線路板的製造方法,其中所述第一列印製程包括三維數位化光處理。The method for manufacturing a circuit board according to item 1 of the scope of patent application, wherein the first printing process includes three-dimensional digital light processing. 如申請專利範圍第5項所述的線路板的製造方法,其中於所述第一列印製程中,所述第一絕緣層形成於成型槽中,所述成型槽的底面為可透光的,且所述三維數位化光處理的光束經由所述成型槽的所述底面對所述第一絕緣層進行照射。The method for manufacturing a circuit board according to item 5 of the scope of patent application, wherein in the first printing process, the first insulating layer is formed in a molding groove, and a bottom surface of the molding groove is transparent. And the three-dimensional digitized light beam is irradiated through the bottom surface of the molding groove to the first insulating layer. 如申請專利範圍第1項所述的線路板的製造方法,其中所述第二列印製程包括導電墨水噴印。The method for manufacturing a circuit board according to item 1 of the scope of patent application, wherein the second printing process includes conductive ink printing.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11163499A (en) * 1997-11-28 1999-06-18 Nitto Boseki Co Ltd Manufacturing method of printed wiring board and printed wiring board by this manufacturing method
US20070286946A1 (en) * 2006-05-09 2007-12-13 Canon Kabushiki Kaisha Wiring module, method and apparatus for manufacturing wiring module
TW200938042A (en) * 2007-02-23 2009-09-01 Infermata Systems Ltd Method and apparatus for rapid fabrication of functional printed circuit board
TW201108906A (en) * 2009-08-11 2011-03-01 Sony Chem & Inf Device Corp Method for producing laminated substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11163499A (en) * 1997-11-28 1999-06-18 Nitto Boseki Co Ltd Manufacturing method of printed wiring board and printed wiring board by this manufacturing method
US20070286946A1 (en) * 2006-05-09 2007-12-13 Canon Kabushiki Kaisha Wiring module, method and apparatus for manufacturing wiring module
TW200938042A (en) * 2007-02-23 2009-09-01 Infermata Systems Ltd Method and apparatus for rapid fabrication of functional printed circuit board
TW201108906A (en) * 2009-08-11 2011-03-01 Sony Chem & Inf Device Corp Method for producing laminated substrate

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