TWI529380B - Optical auxiliary measuring device and measuring method for applying the same - Google Patents
Optical auxiliary measuring device and measuring method for applying the same Download PDFInfo
- Publication number
- TWI529380B TWI529380B TW103128119A TW103128119A TWI529380B TW I529380 B TWI529380 B TW I529380B TW 103128119 A TW103128119 A TW 103128119A TW 103128119 A TW103128119 A TW 103128119A TW I529380 B TWI529380 B TW I529380B
- Authority
- TW
- Taiwan
- Prior art keywords
- suction
- unit
- tested
- measuring
- port
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title claims description 64
- 238000000034 method Methods 0.000 title claims description 11
- 238000005259 measurement Methods 0.000 claims description 62
- 239000000758 substrate Substances 0.000 claims description 14
- 238000005086 pumping Methods 0.000 claims description 13
- 238000012360 testing method Methods 0.000 claims description 8
- 238000004891 communication Methods 0.000 claims description 5
- 238000000691 measurement method Methods 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 2
- 230000002950 deficient Effects 0.000 claims 3
- 238000001179 sorption measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 230000004308 accommodation Effects 0.000 description 2
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
本發明是有關於一種光學元件的量測,特別是指一種光學輔助量測裝置及應用該裝置的量測方法。 The present invention relates to the measurement of an optical component, and more particularly to an optical auxiliary measurement device and a measurement method using the same.
參閱圖1,傳統的光學鏡頭9是組裝好放置在托盤8內,接著進行光學特性的量測。由於光學鏡頭9的鏡筒91後端的光學鏡片通常較大,因此鏡筒91的壁面很薄,而光學鏡頭9又是藉由鏡筒91後端而放置於托盤8的抵靠面81上,因此托盤8的抵靠面81的精度必須很高才能確保光學鏡頭9放置時光軸I是垂直於托盤8延伸方向。 Referring to Fig. 1, a conventional optical lens 9 is assembled and placed in a tray 8, followed by measurement of optical characteristics. Since the optical lens at the rear end of the lens barrel 91 of the optical lens 9 is generally large, the wall surface of the lens barrel 91 is thin, and the optical lens 9 is placed on the abutting surface 81 of the tray 8 by the rear end of the lens barrel 91. Therefore, the accuracy of the abutment surface 81 of the tray 8 must be high to ensure that the optical axis I is perpendicular to the direction in which the tray 8 extends when the optical lens 9 is placed.
參閱圖2,另一種托盤8是以塑膠托盤82與玻璃83做結合,玻璃83能透光且玻璃83表面的平整度較高。 Referring to Fig. 2, another type of tray 8 is a combination of a plastic tray 82 and a glass 83. The glass 83 can transmit light and the surface of the glass 83 has a high flatness.
綜上所述,由於光學鏡頭9與托盤8都是藉由本身的重量分別放置於托盤8內及測量平台(圖未示)上,容易因為擺放位置不穩固而造成量測誤差,因此量測的重覆精度不高。 In summary, since the optical lens 9 and the tray 8 are respectively placed in the tray 8 and the measuring platform (not shown) by their own weight, it is easy to cause measurement error due to the unstable positioning position. The accuracy of the measurement is not high.
因此,本發明之第一目的,即在提供一種量測重覆精準度高的光學輔助量測裝置。 Accordingly, it is a first object of the present invention to provide an optically assisted measuring device having a high accuracy of measurement.
又,本發明之第二目的,即在提供一種應用上 述裝置的量測方法。 Moreover, the second object of the present invention is to provide an application The measuring method of the device.
於是本發明光學輔助量測裝置,輔助對於至少一待測物進行光學量測,該光學量測輔助裝置包含:一吸取單元,及一承載單元。 Therefore, the optical auxiliary measuring device of the present invention assists optical measurement of at least one object to be tested, and the optical measuring auxiliary device comprises: a suction unit, and a carrying unit.
該吸取單元用於吸取該待測物,且包括一本體、至少一貫穿設置於該本體的量測孔,及一設置於該本體內的氣體流道。該量測孔具有形成於該本體表面且相反設置的一第一端口及一第二端口。該氣體流道具有至少一形成於該本體表面鄰近該第二端口處的吸取口,及至少一形成於該本體表面的抽氣接口。該本體表面鄰近該吸取口處形成一接觸面。 The suction unit is configured to pick up the object to be tested, and includes a body, at least one measuring hole disposed through the body, and a gas flow path disposed in the body. The measuring hole has a first port and a second port formed on the surface of the body and oppositely disposed. The gas flow channel has at least one suction port formed on the surface of the body adjacent to the second port, and at least one air suction port formed on the surface of the body. The body surface forms a contact surface adjacent to the suction port.
該承載單元包括一基板及至少一由該基板頂面向下凹陷形成的放置槽,該放置槽可用於放置該待測物。 The carrying unit includes a substrate and at least one placement groove formed by recessing the top surface of the substrate, and the placement groove can be used for placing the object to be tested.
另外,本發明光學量測方法,應用如前述的光學量測輔助裝置來進行,該光學量測方法包含以下步驟:一準備步驟:將該待測物放置於該承載單元的放置槽內;一吸取步驟:將該吸取單元的接觸面靠近該待測物後,透過該抽氣接口對於該氣體流道進行抽氣,進而使得該吸取口產生吸力,藉此吸取該待測物;一量測步驟:將該吸取單元連同所吸取的該待測物移入一量測設備,該量測設備透過該吸取單元的量測孔對於吸附於該接觸面的該待測物進行光學量測;及一脫離步驟:於該量測步驟後,將該吸取單元 連同所吸取的該待測物移至該承載單元上方,且進行該吸取單元與該承載單元間的對位,使得該吸取單元所吸取的待測物對準該承載單元的放置槽,接著下移該吸取單元將所吸取的待測物放置於該承載單元的放置槽內,最後停止對於該氣體流道進行抽氣,使得該待測物脫離該吸取單元。 In addition, the optical measuring method of the present invention is performed by using the optical measuring auxiliary device as described above, and the optical measuring method comprises the following steps: a preparing step: placing the object to be tested in a placing slot of the carrying unit; a suction step: after the contact surface of the suction unit is close to the object to be tested, the gas flow path is evacuated through the air suction interface, so that the suction port generates suction force, thereby sucking the object to be tested; Step: moving the suction unit together with the sample to be tested into a measuring device, and the measuring device optically measures the object to be tested adsorbed on the contact surface through the measuring hole of the suction unit; Disengagement step: after the measurement step, the suction unit And moving the object to be tested to the top of the carrying unit, and performing alignment between the picking unit and the carrying unit, so that the object to be tested sucked by the picking unit is aligned with the placing slot of the carrying unit, and then The suction unit moves the sample to be tested into the placement slot of the carrying unit, and finally stops pumping the gas flow path, so that the object to be tested is separated from the suction unit.
本發明的功效在於:藉由該吸取單元主動且強力地吸取該待測物,在移動至該量測設備進行光學量測過程中,該待測物穩固地被吸附,使得量測穩定性較佳且重覆量測精度高。 The effect of the present invention is that the object to be tested is actively and strongly absorbed by the suction unit, and the object to be tested is stably adsorbed during the optical measurement to the measuring device, so that the measurement stability is better. Good and repeat measurement accuracy is high.
1‧‧‧吸取單元 1‧‧‧ suction unit
11‧‧‧本體 11‧‧‧Ontology
111‧‧‧接觸面 111‧‧‧Contact surface
112‧‧‧外擴段 112‧‧‧Extended section
113‧‧‧容設段 113‧‧‧ Included paragraph
12‧‧‧量測孔 12‧‧‧ Measuring hole
121‧‧‧第一端口 121‧‧‧First port
122‧‧‧第二端口 122‧‧‧Second port
13‧‧‧氣體流道 13‧‧‧ gas flow path
131‧‧‧吸取口 131‧‧‧ suction port
132‧‧‧抽氣接口 132‧‧‧Exhaust interface
14‧‧‧閥孔 14‧‧‧ valve hole
15‧‧‧氣閥件 15‧‧‧ gas valve parts
16‧‧‧控制件 16‧‧‧Controls
17‧‧‧軟質環體 17‧‧‧Soft ring
2‧‧‧承載單元 2‧‧‧bearing unit
21‧‧‧基板 21‧‧‧Substrate
22‧‧‧放置槽 22‧‧‧Place slot
23‧‧‧頂塊 23‧‧‧Top block
7‧‧‧量測設備 7‧‧‧Measurement equipment
90‧‧‧待測物 90‧‧‧Test object
901‧‧‧前端部 901‧‧‧ front end
902‧‧‧後端部 902‧‧‧ back end
X‧‧‧第一方向 X‧‧‧ first direction
Y‧‧‧第二方向 Y‧‧‧second direction
本發明之其他的特徵及功效,將於參照圖式的較佳實施例詳細說明中清楚地呈現,其中:圖1是一示意圖,說明現有一種托盤供光學鏡頭容置以進行光學量測;圖2是一示意圖,說明現有另一種托盤供光學鏡頭容置以進行光學量測;圖3是本發明光學輔助量測裝置的一第一較佳實施例的立體圖;圖4是一局部仰視圖,說明該第一較佳實施例的一為環形開口的吸取口的外觀態樣;圖5是一剖視圖,說明該第一較佳實施例一吸取單元用於吸取位於一承載單元的二待測物;圖6是一示意圖,說明該第一較佳實施例的該吸取單元吸取該等待測物至一量測設備進行光學量測; 圖7是本發明光學輔助量測裝置的一第二較佳實施例的立體圖;圖8是一剖視圖,說明該第二較佳實施例一吸取單元用於吸取位於一承載單元的二待測物;圖9是一示意圖,說明該第二較佳實施例的該吸取單元吸取該等待測物至一量測設備進行光學量測;圖10是一示意圖,說明該第二較佳實施例透過抵推一氣閥件進行將量測不合格的待測物脫離該吸取單元;圖11是一示意圖,說明該第二較佳實施例的吸取單元所吸附量測合格的待測物回放至該承載單元的放置槽;圖12是一示意圖,說明該第二較佳實施例的吸取單元的另一態樣;圖13是本發明光學輔助量測裝置的一第三較佳實施例的局部剖視圖;圖14是一局部仰視圖,說明本發明光學輔助量測裝置的一第四較佳實施例的一為多數圓形開口的組合的吸取口的外觀態樣;及圖15是一示意圖,說明本發明光學輔助量測裝置的一第五較佳實施例的一吸取單元吸取一待測物進行光學量測。 Other features and advantages of the present invention will be apparent from the following detailed description of the preferred embodiments of the accompanying drawings, wherein: FIG. 1 is a schematic diagram illustrating a conventional tray for optical lens accommodation for optical measurement; 2 is a schematic view showing another conventional tray for optical lens accommodation for optical measurement; FIG. 3 is a perspective view of a first preferred embodiment of the optical auxiliary measurement device of the present invention; FIG. 4 is a partial bottom view, FIG. 5 is a cross-sectional view showing the suction unit of the first preferred embodiment for sucking two objects to be tested in a carrying unit. FIG. 6 is a schematic diagram showing the suction unit of the first preferred embodiment sucking the waiting object to a measuring device for optical measurement; Figure 7 is a perspective view of a second preferred embodiment of the optical assistant measuring device of the present invention; Figure 8 is a cross-sectional view showing the second preferred embodiment of a pick-up unit for picking up two objects to be tested in a carrying unit FIG. 9 is a schematic diagram showing the suction unit of the second preferred embodiment sucking the waiting object to a measuring device for optical measurement; FIG. 10 is a schematic view showing the second preferred embodiment transmitting Pushing a gas valve member to remove the unacceptable test object from the suction unit; FIG. 11 is a schematic view showing that the sample to be tested by the suction unit of the second preferred embodiment is played back to the load bearing unit Figure 12 is a schematic view showing another aspect of the suction unit of the second preferred embodiment; Figure 13 is a partial cross-sectional view showing a third preferred embodiment of the optical auxiliary measuring device of the present invention; 14 is a partial bottom view showing a configuration of a suction port of a combination of a plurality of circular openings in a fourth preferred embodiment of the optical assistant measuring device of the present invention; and FIG. 15 is a schematic view illustrating the present invention Optical aid A fifth preferred embodiment of a suction device a suction unit for optical measurement analytes.
在本發明被詳細描述之前,要注意的是,在以下的說明內容中,類似的元件是以相同的編號來表示。 Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals.
參閱圖3、圖4及圖5,本發明光學量測輔助裝 置的一第一較佳實施例,用於對多數待測物90進行光學量測,在本實施例中該等待測物90分別為一光學鏡頭,該光學量測輔助裝置包含:一吸取單元1,及一承載單元2。 Referring to FIG. 3, FIG. 4 and FIG. 5, the optical measuring auxiliary device of the invention The first preferred embodiment is configured to perform optical measurement on a plurality of objects to be tested 90. In the embodiment, the waiting object 90 is an optical lens, and the optical measuring auxiliary device comprises: a suction unit. 1, and a carrying unit 2.
該吸取單元1用於吸取該等待測物90,且包括一本體11、多數分別沿一第一方向X及一垂直該第一方向X的第二方向Y彼此間隔貫穿設置於該本體11的量測孔12,及一設置於該本體11內的氣體流道13。該等量測孔12分別具有形成於該本體11表面且相反設置的一第一端口121及一第二端口122。該氣體流道13具有多數形成於該本體11表面且分別鄰近該等第二端口122處的吸取口131,及二形成於該本體11表面且外接一抽氣幫浦(圖未示)的抽氣接口132。該本體11表面鄰近該等吸取口131處分別形成一接觸面111。該本體11對應各量測孔12的內周面具有一銜接該第一端口121的外擴段112,及一由該外擴段112遠離該第一端口121的一端延伸至該第二端口122且供待測物90的前端部901容設的容設段113,各外擴段112是由該第二端口122朝該第一端口121逐漸外擴延伸,在本實施例中,該外擴段112為圓錐面,以在進行量測時,從而取得較大的量測視角。該等吸取口131分別為一分別環繞該量測孔12的第二端口122的環形開口(見圖4)。特別說明的是,該待測物90光學鏡頭可分為前端突出具有前端部901的態樣,以及前端平整不具有前端部901的態樣,當該待測物90是具有前端部901的態樣時,該本體11若具有該容設段113則能使更待測物90定位更精確,有助於 量測的精度。因此,本實施例是以具有該容設段113的態樣作說明,當然該本體11也可以不設置該容設段113(見圖13),不應以本較佳實施例所揭露的態樣為限。 The suction unit 1 is configured to suck the waiting object 90, and includes a body 11 , and a plurality of the plurality of first directions X and a second direction Y perpendicular to the first direction X are respectively spaced apart from each other and disposed on the body 11 . The hole 12 and a gas flow path 13 disposed in the body 11. Each of the measuring holes 12 has a first port 121 and a second port 122 formed on the surface of the body 11 and oppositely disposed. The gas flow channel 13 has a plurality of suction ports 131 formed on the surface of the body 11 and adjacent to the second ports 122, and two are formed on the surface of the body 11 and externally connected to a pumping pump (not shown). Air interface 132. A contact surface 111 is formed on the surface of the body 11 adjacent to the suction ports 131. The inner peripheral surface of the body 11 corresponding to each of the measuring holes 12 has an outer protruding portion 112 that is connected to the first port 121, and an end of the outer protruding portion 112 that is away from the first port 121 extends to the second port 122. And in the receiving section 113 of the front end portion 901 of the object to be tested 90, each of the outer expansion segments 112 is gradually extended and extended by the second port 122 toward the first port 121. In this embodiment, the external expansion Segment 112 is a conical surface for measurement while taking a larger measurement viewing angle. The suction ports 131 are respectively annular openings respectively surrounding the second port 122 of the measuring hole 12 (see FIG. 4). Specifically, the optical lens of the object to be tested 90 can be divided into a state in which the front end protrudes from the front end portion 901, and a state in which the front end is flat without the front end portion 901, and when the object to be tested 90 has the front end portion 901 In this case, if the body 11 has the receiving section 113, the position of the object to be tested 90 can be more accurately positioned, which helps The accuracy of the measurement. Therefore, the embodiment is described with the aspect of the receiving section 113. Of course, the body 11 may not be provided with the receiving section 113 (see FIG. 13), and should not be disclosed in the preferred embodiment. The sample is limited.
該承載單元2包括一基板21及多數由該基板21頂面向下凹陷形成的放置槽22。該等放置槽22分別沿著該第一方向X及該第二方向Y彼此間隔設置且該等放置槽22間的相對位置對應於該等量測孔12間的相對位置。該等放置槽22可分別用於放置該等待測物90。 The carrying unit 2 includes a substrate 21 and a plurality of placement slots 22 formed by recessing the top surface of the substrate 21. The placement slots 22 are spaced apart from each other along the first direction X and the second direction Y, and the relative positions between the placement slots 22 correspond to the relative positions between the equal measurement apertures 12. The placement slots 22 can be used to place the waiting object 90, respectively.
其中,利用該光學輔助量測裝置進行該等待測物90的光學量測方法包含以下步驟:一準備步驟:參閱圖3及圖5,將該等待測物90分別放置於該承載單元2的放置槽22內;一吸取步驟:將該吸取單元1的該等量測孔12分別對準該等放置槽22後,下移該吸取單元1使得該等接觸面111分別靠近該等待測物90,同時該等待測物90的前端部901分別容置於該等量測孔12內,為對應於該容置段113,接著打開該抽氣幫浦透過該等抽氣接口132對於該氣體流道13進行抽氣,進而使得該等吸取口131產生吸力,藉此吸取該等待測物90進而使所述待測物90吸附於接觸面111上;一量測步驟:參閱圖6將該吸取單元1連同所吸取的該等待測物移入一量測設備7。該量測設備7依序透過該吸取單元1的量測孔12對於分別吸附於該等接觸面111的該等待測物90進行光學量測。量測結果直接以陣列 方式顯示於螢幕上,量測合格的待測物90即標示為綠色或圈標記,而量測不合格的待測物90即標示為紅色或叉標記,以方便操作者識別;及一脫離步驟:參閱圖3及圖5,於該量測步驟後,將該吸取單元1連同所吸取的該等待測物90移至該承載單元2上方,且進行該吸取單元1與該承載單元2間的對位,使得該吸取單元1所吸取的待測物90分別對準該承載單元2的放置槽22,接著下移該吸取單元1將所吸取的待測物90放置於該承載單元2的放置槽22內,最後關閉該抽氣幫浦停止對於該氣體流道13進行抽氣,使得該等待測物90脫離該吸取單元1。 The method for optically measuring the waiting object 90 by using the optical auxiliary measuring device comprises the following steps: a preparation step: referring to FIG. 3 and FIG. 5, the waiting object 90 is placed on the carrying unit 2 respectively. In the slot 22, a suction step is performed: after the equal measuring holes 12 of the suction unit 1 are respectively aligned with the placing grooves 22, the suction unit 1 is moved downward so that the contact surfaces 111 are respectively close to the waiting object 90, At the same time, the front end portion 901 of the waiting object 90 is respectively received in the measuring hole 12, corresponding to the receiving portion 113, and then the air pumping pump is opened through the air suction port 132 for the gas flow path. 13 is pumping, so that the suction ports 131 generate suction, thereby sucking the waiting object 90 and thereby adsorbing the object to be tested 90 on the contact surface 111; a measuring step: refer to FIG. 1 is moved into a measuring device 7 together with the waiting sample. The measuring device 7 sequentially optically measures the waiting object 90 respectively adsorbed on the contact faces 111 through the measuring holes 12 of the suction unit 1 . Measurement results directly in the array The method is displayed on the screen, and the measured object to be tested 90 is marked as a green or circle mark, and the untested object to be tested 90 is marked as a red or cross mark to facilitate operator identification; and a separation step Referring to FIG. 3 and FIG. 5, after the measuring step, the suction unit 1 is moved to the top of the carrying unit 2 together with the sucking object 90, and between the picking unit 1 and the carrying unit 2 is performed. The alignment of the object to be tested 90 is aligned with the placement slot 22 of the carrier unit 2, and then the suction unit 1 is moved down to place the sampled object 90 to be placed on the carrier unit 2 In the tank 22, the pumping pump is finally closed to stop pumping the gas flow passage 13 so that the waiting object 90 is disengaged from the suction unit 1.
經由上述說明可知,本發明光學量測輔助裝置藉由該吸取單元1主動且強力地吸取該待測物90,在移動至該量測設備7進行光學量測過程中,該待測物90穩固地被吸附,使得量測穩定性較佳且重覆量測精度高。 It can be seen from the above description that the optical measurement auxiliary device of the present invention actively and strongly absorbs the object to be tested 90 by the suction unit 1 , and the object to be tested 90 is stabilized during the optical measurement process by moving to the measuring device 7 . The ground is adsorbed, so that the measurement stability is better and the repeat measurement accuracy is high.
參閱圖7及圖8,本發明光學量測輔助裝置的一第二較佳實施例,大致上相同於該第一較佳實施例,不同之處在於:該吸取單元1還包括多數分別貫穿設置於該本體11鄰近該等量測孔12處並連通該氣體通道13的閥孔14,及多數分別可於一第一位置及一第二位置間移動地設置於該等閥孔14的氣閥件15,當各氣閥件15位於該第一位置時,該氣閥件15使得相對應的吸取口131與該等抽氣接口132間為不連通狀態,當各氣閥件15位於該第二位置 時,該氣閥件15使得該吸取口131與該等抽氣接口132間為連通狀態。 Referring to FIG. 7 and FIG. 8 , a second preferred embodiment of the optical measurement aiding device of the present invention is substantially the same as the first preferred embodiment, except that the suction unit 1 further includes a plurality of separate through settings. The valve body 14 adjacent to the equal measuring hole 12 and communicating with the gas passage 13 , and a plurality of air valves respectively disposed in the valve hole 14 movably between a first position and a second position When the gas valve member 15 is in the first position, the gas valve member 15 is in a non-connected state between the corresponding suction port 131 and the air suction ports 132, and when the gas valve members 15 are located at the first Two position At this time, the gas valve member 15 brings the suction port 131 into communication with the air suction ports 132.
該承載單元2包括一基板21、多數由該基板21頂面向下凹陷形成的放置槽22,及多數凸設於該基板21頂面且分別鄰近該等放置槽22的頂塊23。該等放置槽22可分別用於放置該等待測物90。該等放置槽22分別沿著該第一方向X及該第二方向Y彼此間隔設置,且該等放置槽22間的相對位置對應於該等量測孔12間的相對位置。 The carrying unit 2 includes a substrate 21, a plurality of placement slots 22 formed by recessing the top surface of the substrate 21, and a plurality of top blocks 23 protruding from the top surface of the substrate 21 and adjacent to the placement slots 22. The placement slots 22 can be used to place the waiting object 90, respectively. The placement slots 22 are spaced apart from each other along the first direction X and the second direction Y, and the relative positions between the placement slots 22 correspond to the relative positions between the equal measurement apertures 12.
當該吸取單元1疊設於該承載單元2上且該等吸取口131對應於該等放置槽22內的待測物90時,該承載單元2的頂塊23分別凸伸進該等閥孔14頂推該等氣閥件15皆移動至該第二位置,從而使得該等吸取口131與該等抽氣接口132間皆為連通狀態,以全部吸取位於該等放置槽22內的待測物90。 When the suction unit 1 is stacked on the load-bearing unit 2 and the suction ports 131 correspond to the objects to be tested 90 in the placement slots 22, the top blocks 23 of the load-bearing unit 2 respectively protrude into the valve holes. 14 pushing the valve members 15 to move to the second position, so that the suction ports 131 and the air extraction ports 132 are in a connected state, so as to all absorb the measured objects located in the placement slots 22 90.
其中,利用該光學輔助量測裝置進行該等待測物90的光學量測方法包含以下步驟:一準備步驟:將該等待測物90分別放置於該承載單元2的放置槽22內;一吸取步驟:將該吸取單元1的該等量測孔12分別對準該等放置槽22後,下移該吸取單元1使得該等接觸面111分別接近該等待測物90,同時該等待測物90的前端部901分別容置於該等量測孔12內,且該承載單元2的頂塊23分別凸伸入該等閥孔14而頂推該等氣閥件15至該第二位置,使得該等吸取口131與該等抽氣接口132間為 連通狀態,接著打開該抽氣幫浦透過該等抽氣接口132對於該氣體流道13進行抽氣,進而使得該等吸取口131產生吸力,藉此吸取該等待測物90;一量測步驟:參閱圖9,將該吸取單元1連同所吸取的該等待測物90移入該量測設備7。該量測設備7依序透過該吸取單元1的量測孔12對於分別吸附於該等接觸面111的該等待測物90進行光學量測,量測結果直接以陣列方式顯示於螢幕上,量測合格的待測物90即標示為綠色或圈標記,而量測不合格的待測物90即標示為紅色或叉標記,以方便操作者識別;一選別步驟:參閱圖10,於該量測步驟後,根據顯示於螢幕上的量測結果,將對應於量測結果為不合格的待測物90的氣閥件15透過該閥孔14抵推至該第一位置,使得對應於為量測結果為不合格的待測物90的吸取口131與該等抽氣接口132為不連通狀態,從而讓為量測結果為不合格的待測物90預先脫離該吸取單元1;及一脫離步驟:參閱圖11,於該量測步驟後,將該吸取單元1連同所吸取的該等待測物90移至該承載單元2上方,且進行該吸取單元1與該承載單元2間的對位,使得該吸取單元1所吸取的待測物90分別對準該承載單元2的放置槽22,接著下移該吸取單元1將所吸取的待測物90放置於該承載單元2的放置槽22內,此時該承載單元2的頂塊23分別凸伸入該等閥孔14而頂推該等氣閥件15至該第二位置,使得該等吸取口131與該等抽氣接口132間為 連通狀態,最後關閉該抽氣幫浦停止對於該氣體流道13進行抽氣,使得該等待測物90脫離該吸取單元1。 The optical measurement method for the waiting object 90 by using the optical auxiliary measuring device comprises the following steps: a preparation step: placing the waiting object 90 in the placement slot 22 of the carrying unit 2; a suction step After the equal measuring holes 12 of the suction unit 1 are respectively aligned with the placing grooves 22, the suction unit 1 is moved downward so that the contact surfaces 111 are respectively close to the waiting object 90, and the waiting object 90 is waiting. The front end portions 901 are respectively received in the measuring holes 12, and the top blocks 23 of the carrying unit 2 respectively protrude into the valve holes 14 to push the gas valve members 15 to the second position, so that the The suction port 131 and the pumping interface 132 are a state of communication, and then opening the pumping pump to evacuate the gas flow passage 13 through the air suction ports 132, thereby causing the suction ports 131 to generate suction force, thereby sucking the waiting object 90; a measuring step Referring to FIG. 9, the suction unit 1 is moved into the measuring device 7 together with the sampled object 90 sucked. The measuring device 7 sequentially optically measures the waiting object 90 respectively adsorbed on the contact surfaces 111 through the measuring hole 12 of the suction unit 1 , and the measurement results are directly displayed on the screen in an array manner. The qualified test object 90 is marked as a green or circle mark, and the test object 90 that is not qualified is marked as a red or cross mark to facilitate operator identification; a sorting step: refer to FIG. 10, in the quantity After the measuring step, according to the measurement result displayed on the screen, the valve member 15 corresponding to the object to be tested 90 whose measurement result is unacceptable is pushed through the valve hole 14 to the first position, so that the corresponding The measurement result is that the suction port 131 of the unqualified object to be tested 90 is in a non-connected state with the pumping ports 132, so that the object to be tested 90 whose measurement result is unqualified is disengaged from the picking unit 1 in advance; Step 11: After the measuring step, the suction unit 1 is moved to the top of the carrying unit 2 together with the sucking object 90, and the pair between the picking unit 1 and the carrying unit 2 is performed. a position such that the object to be tested 90 sucked by the suction unit 1 respectively Aligning the placement slot 22 of the carrying unit 2, and then moving the suction unit 1 to place the sucked object to be tested 90 into the placement slot 22 of the carrying unit 2, at which time the top block 23 of the carrying unit 2 is respectively convex. Extending into the valve holes 14 and pushing the gas valve members 15 to the second position, such that the suction ports 131 and the suction ports 132 are In the connected state, the pumping pump is finally closed to stop pumping the gas flow path 13 so that the waiting object 90 is separated from the suction unit 1.
值得一提的是,參閱圖12,上述各吸取口131與該等抽氣接口132的導通控制不以上述氣閥件15於閥孔14移動進行導通控制為限,也可以一電連接該等氣閥件15的控制件16電控該等氣閥件15,以進行各吸取口131與該等抽氣接口132的導通控制,在該等待測物90的吸取及脫離更能靈活的控制,其中,該等氣閥件15分別為一電控二通閥件。 It should be noted that, referring to FIG. 12, the conduction control of each of the suction ports 131 and the air suction ports 132 is not limited to the conduction control of the gas valve member 15 in the valve hole 14 , and may be electrically connected. The control member 16 of the valve member 15 electrically controls the gas valve members 15 to perform conduction control of the suction ports 131 and the suction ports 132, and is more flexible in controlling the suction and disengagement of the workpiece 90. The gas valve members 15 are respectively an electronically controlled two-way valve member.
藉此,該第二較佳實施例也能達到與該第一較佳實施例的相同的優點及功效。除此之外,該等氣閥件15分別於該等頂塊23相配合能增加量測過程中的便利性,以提昇其應用性,如能根據量測結果快速地淘汰量測不合格的待測品90,並快速地進行下輪的量測。 Thereby, the second preferred embodiment can also achieve the same advantages and effects as the first preferred embodiment. In addition, the matching of the valve members 15 on the top blocks 23 can increase the convenience in the measurement process, so as to improve the applicability, such as the rapid elimination of the unqualified measurement according to the measurement results. The product to be tested 90, and the measurement of the lower wheel is performed quickly.
參閱圖13,本發明光學量測輔助裝置的一第三較佳實施例,大致上相同於該第一較佳實施例,不同之處在於:該吸取單元1還包括多數設置於該本體11表面且分別環繞各吸取口131內外側的軟質環體17,且該本體11不設置該容設段113。在本實施例中,各軟質環體17為一彈性橡膠環圈。 Referring to FIG. 13, a third preferred embodiment of the optical measurement aid of the present invention is substantially the same as the first preferred embodiment, except that the suction unit 1 further includes a plurality of surfaces disposed on the surface of the body 11. And surrounding the soft ring body 17 on the inner side of each of the suction ports 131, and the body 11 is not provided with the receiving portion 113. In this embodiment, each of the soft ring bodies 17 is an elastic rubber ring.
藉此,該第三較佳實施例也能達到與該第一較佳實施例的相同的優點及功效,除此之外,各軟質環體17更能提昇該吸取單元1與該待測物90間的氣密性。 Therefore, the third preferred embodiment can also achieve the same advantages and functions as the first preferred embodiment. In addition, each soft ring body 17 can enhance the suction unit 1 and the object to be tested. 90 airtightness.
參閱圖14,本發明光學量測輔助裝置的一第四 較佳實施例,大致上相同於該第一較佳實施例,不同之處在於:該吸取口131為三個間隔環繞該量測孔12的圓形開口的組合。較佳地,該吸取口131為二個間隔環繞該量測孔12的圓形開口的組合。值得一提的是,組成該吸取口131的圓形開口的數量部以上述為限,也可為任意數量。 Referring to Figure 14, a fourth of the optical measurement aid of the present invention The preferred embodiment is substantially identical to the first preferred embodiment except that the suction port 131 is a combination of three circular openings spaced around the measurement aperture 12. Preferably, the suction port 131 is a combination of two circular openings spaced around the measuring hole 12. It is to be noted that the number of the circular openings constituting the suction port 131 is limited to the above, and may be any number.
藉此,該第四較佳實施例也能達到與該第一較佳實施例的相同的優點及功效,除此之外,藉由三個圓形開口進行各待測物的吸取,不僅吸取穩定性佳,且不易漏氣。 Therefore, the fourth preferred embodiment can achieve the same advantages and functions as the first preferred embodiment. In addition, the suction of each object to be tested is performed by three circular openings, and not only the suction is taken. Good stability and not easy to leak.
參閱圖15,本發明光學量測輔助裝置的一第五較佳實施例,大致上相同於該第一較佳實施例,不同之處在於:該吸取單元以吸取該等待測物的後端進行光學量測,且該等量測孔的形狀是對應於該量測設備的器具的形狀以供該量測設備的器材由該量測孔的第一端口進入設置,從而方便進行各待測物的光學量測。在本實施例中,該等量測孔的形狀分別為圓筒狀。 Referring to FIG. 15, a fifth preferred embodiment of the optical measuring aid of the present invention is substantially the same as the first preferred embodiment, except that the pick-up unit picks up the back end of the waiting object. Optically measuring, and the shape of the measuring hole is a shape corresponding to the instrument of the measuring device for the device of the measuring device to enter the setting by the first port of the measuring hole, thereby facilitating the respective objects to be tested Optical measurement. In this embodiment, the shapes of the equal measuring holes are respectively cylindrical.
藉此,該第五較佳實施例也能達到與該第一較佳實施例的相同的優點及功效。 Thereby, the fifth preferred embodiment can also achieve the same advantages and effects as the first preferred embodiment.
綜上所述,本發明光學量測輔助裝置藉由該吸取單元1主動且強力地吸取該待測物90,在移動至該量測設備7進行光學量測過程中,該待測物90穩固地被吸附,使得量測穩定性較佳且重覆量測精度高。 In summary, the optical measurement auxiliary device of the present invention actively and strongly absorbs the object to be tested 90 by the suction unit 1 , and the object to be tested 90 is stabilized during the optical measurement process by moving to the measuring device 7 . The ground is adsorbed, so that the measurement stability is better and the repeat measurement accuracy is high.
惟以上所述者,僅為本發明之較佳實施例而已,當不能以此限定本發明實施之範圍,即大凡依本發明 申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。 However, the above is only the preferred embodiment of the present invention, and the scope of the present invention cannot be limited thereto, that is, according to the present invention. The simple equivalent changes and modifications made by the scope of the patent application and the contents of the patent specification are still within the scope of the invention.
1‧‧‧吸取單元 1‧‧‧ suction unit
11‧‧‧本體 11‧‧‧Ontology
111‧‧‧接觸面 111‧‧‧Contact surface
112‧‧‧外擴段 112‧‧‧Extended section
113‧‧‧容設段 113‧‧‧ Included paragraph
12‧‧‧量測孔 12‧‧‧ Measuring hole
121‧‧‧第一端口 121‧‧‧First port
122‧‧‧第二端口 122‧‧‧Second port
13‧‧‧氣體流道 13‧‧‧ gas flow path
131‧‧‧吸取口 131‧‧‧ suction port
2‧‧‧承載單元 2‧‧‧bearing unit
21‧‧‧基板 21‧‧‧Substrate
22‧‧‧放置槽 22‧‧‧Place slot
90‧‧‧待測物 90‧‧‧Test object
901‧‧‧前端部 901‧‧‧ front end
Claims (11)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310752250 | 2013-12-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201525432A TW201525432A (en) | 2015-07-01 |
| TWI529380B true TWI529380B (en) | 2016-04-11 |
Family
ID=53588961
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103128119A TWI529380B (en) | 2013-12-31 | 2014-08-15 | Optical auxiliary measuring device and measuring method for applying the same |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN104748943B (en) |
| TW (1) | TWI529380B (en) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1470861A (en) * | 2002-07-22 | 2004-01-28 | 力捷电脑股份有限公司 | Lens detecting tool |
| CN101169587A (en) * | 2006-10-27 | 2008-04-30 | 鸿富锦精密工业(深圳)有限公司 | Carrying device, its use method and lens module measuring device |
| CN201153119Y (en) * | 2008-01-04 | 2008-11-19 | 科毅科技股份有限公司 | Light-emitting auxiliary calibration positioning device |
| US8477284B2 (en) * | 2008-10-22 | 2013-07-02 | Nikon Corporation | Apparatus and method to control vacuum at porous material using multiple porous materials |
| TWM470948U (en) * | 2013-08-14 | 2014-01-21 | Synpower Co Ltd | Inspection stage and optical inspection apparatus |
-
2014
- 2014-08-15 TW TW103128119A patent/TWI529380B/en active
- 2014-09-19 CN CN201410482334.7A patent/CN104748943B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| TW201525432A (en) | 2015-07-01 |
| CN104748943B (en) | 2018-09-21 |
| CN104748943A (en) | 2015-07-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106185259B (en) | Electronic component handling apparatus and electronic component inspection device | |
| TWI509723B (en) | Carrier substrate separation system and method | |
| US20150069723A1 (en) | Vacuum chuck | |
| JP6385408B2 (en) | Transfer unit, transfer device and holding unit | |
| JP2008270626A (en) | Substrate adsorption device and substrate transfer device | |
| WO2020084983A1 (en) | Substrate bonding device, calculation device, substrate bonding method, and calculation method | |
| TW201814310A (en) | Sorting machine for electronic component testing and teaching point adjustment method thereof | |
| CN118952818A (en) | Laminating device and display device manufacturing equipment including the same | |
| TWI529380B (en) | Optical auxiliary measuring device and measuring method for applying the same | |
| CN114677926A (en) | A microdisplay bonding system and bonding method | |
| CN106185301A (en) | Electronic component handling apparatus and electronic component inspection device | |
| KR20250142285A (en) | Picker and hand including the same | |
| JP2015013737A (en) | Work suction device and work suction method | |
| CN111868494A (en) | Inspection device and inspection method for inspecting three-way valve device for leakage | |
| JP2013146834A (en) | Suction nozzle and part mounting device | |
| TWM543826U (en) | Assembling structure of connecting suction nozzle | |
| CN106501276A (en) | The apparatus and method that pressure is applied to FPD screen back light source in optical detection | |
| TW201608668A (en) | Carrying device | |
| JPH1126553A (en) | Adsorption collet | |
| TWI545073B (en) | A device for the operation of a pickup - type electronic component picker and its application | |
| WO2019071482A1 (en) | Vacuum laminating machine and laminating method | |
| KR101601210B1 (en) | Device for adhering and pressing semiconductor package | |
| TWM543858U (en) | Assembly structure of suction nozzle connection | |
| TWI390267B (en) | Apparatus for assembling lens module | |
| TWI407168B (en) | Tray assembly, method of using same and apparatus for testing lens module |