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TWI504091B - Electrostatic discharge protection device - Google Patents

Electrostatic discharge protection device Download PDF

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Publication number
TWI504091B
TWI504091B TW103116091A TW103116091A TWI504091B TW I504091 B TWI504091 B TW I504091B TW 103116091 A TW103116091 A TW 103116091A TW 103116091 A TW103116091 A TW 103116091A TW I504091 B TWI504091 B TW I504091B
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pass filter
electrically connected
low pass
protection device
resistor
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TW103116091A
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TW201543780A (en
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Chieh Wei He
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Macronix Int Co Ltd
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Description

靜電放電保護裝置Electrostatic discharge protection device

本發明是有關於一種靜電放電保護裝置,且特別是有關於一種具有低通濾波器的靜電放電保護裝置。The present invention relates to an electrostatic discharge protection device, and more particularly to an electrostatic discharge protection device having a low pass filter.

靜電放電(electrostatic discharge,ESD)是影響積體電路之可靠度(reliability)的主要因子,故積體電路中都會加入靜電放電保護裝置的設計。此外,隨著半導體製程技術進步至深次微米(deep sub-micron)的尺寸,現有積體電路的電子產品在量產前往往必須通過元件層級(component-level)與系統層級(system-level)的ESD測試。其中,當積體電路完成封裝時,會先進行元件層級的ESD測試。此外,當積體電路安裝在電子產品後,將進一步地進行系統層級的ESD測試。Electrostatic discharge (ESD) is the main factor affecting the reliability of the integrated circuit. Therefore, the design of the electrostatic discharge protection device is added to the integrated circuit. In addition, as semiconductor process technology advances to deep sub-micron size, existing integrated circuit electronic products must pass component-level and system-level prior to mass production. ESD test. Among them, when the integrated circuit completes the package, the ESD test of the component level is performed first. In addition, system-level ESD testing will be performed further after the integrated circuit is installed in the electronic product.

在系統層級的ESD測試下,靜電放電能量會更加的強大。因此,現有的靜電放電保護裝置大多無法致使積體電路通過系統層級的ESD測試,進而降低積體電路的可靠度。Electrostatic discharge energy is even more powerful at system level ESD testing. Therefore, most of the existing electrostatic discharge protection devices cannot cause the integrated circuit to pass the system level ESD test, thereby reducing the reliability of the integrated circuit.

本發明提供一種靜電放電保護裝置,利用低通濾波器導引靜電訊號,以致使積體電路通過系統層級的ESD測試。The present invention provides an electrostatic discharge protection device that uses a low pass filter to direct an electrostatic signal such that the integrated circuit passes the system level ESD test.

本發明的靜電放電保護裝置,包括保護電路、第一電阻與低通濾波器。保護電路包括第一元件與第二元件。其中,第一元件與第二元件相互串接在電源配線與接地配線之間,且第一元件與第二元件之間具有連接節點。低通濾波器、保護電路與第一電阻相互串接在輸入焊墊與內部電路之間。The electrostatic discharge protection device of the present invention comprises a protection circuit, a first resistor and a low pass filter. The protection circuit includes a first component and a second component. The first component and the second component are connected in series between the power supply wiring and the ground wiring, and the first component and the second component have a connection node. The low pass filter, the protection circuit and the first resistor are connected in series between the input pad and the internal circuit.

基於上述,本發明的靜電放電保護裝置設有低通濾波器,並可透過低通濾波器將靜電訊號導引至接地配線。藉此,靜電放電保護裝置將可致使積體電路通過系統層級的ESD測試,進而提升積體電路的可靠度。Based on the above, the electrostatic discharge protection device of the present invention is provided with a low-pass filter and can guide the electrostatic signal to the ground wiring through the low-pass filter. Thereby, the electrostatic discharge protection device can cause the integrated circuit to pass the system level ESD test, thereby improving the reliability of the integrated circuit.

為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。The above described features and advantages of the invention will be apparent from the following description.

圖1為依據本發明一實施例之靜電放電保護裝置的電路示意圖。參照圖1,靜電放電保護裝置100適用於一積體電路,且所述積體電路包括輸入焊墊101與內部電路102。其中,內部電路102可透過輸入焊墊101接收一輸入訊號,且內部電路102包括由PMOS電晶體M11與NMOS電晶體M12所組成的輸入緩衝器。此外,靜電放電保護裝置100用以避免來自輸入焊墊101的靜電訊號對內部電路102造成損害。1 is a circuit diagram of an electrostatic discharge protection device in accordance with an embodiment of the present invention. Referring to FIG. 1, the electrostatic discharge protection device 100 is applied to an integrated circuit, and the integrated circuit includes an input pad 101 and an internal circuit 102. The internal circuit 102 can receive an input signal through the input pad 101, and the internal circuit 102 includes an input buffer composed of a PMOS transistor M11 and an NMOS transistor M12. In addition, the electrostatic discharge protection device 100 is used to prevent damage to the internal circuit 102 caused by electrostatic signals from the input pad 101.

靜電放電保護裝置100包括保護電路110、電阻120與低通濾波器130。其中,低通濾波器130、保護電路110與電阻120相互串接在輸入焊墊101與內部電路102之間。此外,保護電路110包括第一元件111與第二元件112。其中,第一元件111與第二元件112相互串接在電源配線L11與接地配線L12之間,且第一元件111與第二元件112之間具有一連接節點N1。The electrostatic discharge protection device 100 includes a protection circuit 110, a resistor 120, and a low pass filter 130. The low pass filter 130, the protection circuit 110 and the resistor 120 are connected in series between the input pad 101 and the internal circuit 102. Further, the protection circuit 110 includes a first element 111 and a second element 112. The first element 111 and the second element 112 are connected in series between the power supply line L11 and the ground line L12, and the first element 111 and the second element 112 have a connection node N1.

在一實施例中,如圖1所示,第一元件111可例如是二極體D1,且第二元件112可例如是NMOS電晶體M1。此外,二極體D1的陰極電性連接電源配線L11,且二極體D1的陽極電性連接至連接節點N1。NMOS電晶體M1的汲極電性連接至連接節點N1,NMOS電晶體M1的閘極透過電阻R11電性連接至接地配線L12,且NMOS電晶體M1的源極電性連接至接地配線L12。In an embodiment, as shown in FIG. 1, the first element 111 can be, for example, a diode D1, and the second element 112 can be, for example, an NMOS transistor M1. In addition, the cathode of the diode D1 is electrically connected to the power supply wiring L11, and the anode of the diode D1 is electrically connected to the connection node N1. The gate of the NMOS transistor M1 is electrically connected to the ground connection L1, and the gate of the NMOS transistor M1 is electrically connected to the ground line L12, and the source of the NMOS transistor M1 is electrically connected to the ground line L12.

低通濾波器130具有輸入端IN1與輸出端OUT1。此外,低通濾波器130的輸入端IN1電性連接輸入焊墊101,且低通濾波器130的輸出端OUT1電性連接NMOS電晶體M1的汲極與電阻120的第一端。再者,電阻120的第二端電性連接內部電路102。在一實施例中,如圖1所示,低通濾波器130包括電阻R12與電容C1。其中,電阻R12電性連接在低通濾波器130的輸入端IN1與輸出端OUT1之間。電容C1的第一端電性連接低通濾波器130的輸出端OUT1,且電容C1的第二端電性連接至接地配線L12。The low pass filter 130 has an input terminal IN1 and an output terminal OUT1. In addition, the input terminal IN1 of the low-pass filter 130 is electrically connected to the input pad 101, and the output terminal OUT1 of the low-pass filter 130 is electrically connected to the drain of the NMOS transistor M1 and the first end of the resistor 120. Furthermore, the second end of the resistor 120 is electrically connected to the internal circuit 102. In an embodiment, as shown in FIG. 1, the low pass filter 130 includes a resistor R12 and a capacitor C1. The resistor R12 is electrically connected between the input terminal IN1 and the output terminal OUT1 of the low-pass filter 130. The first end of the capacitor C1 is electrically connected to the output terminal OUT1 of the low-pass filter 130, and the second end of the capacitor C1 is electrically connected to the ground line L12.

當內部電路102正常操作時,電源配線L11與接地配線L12分別用以傳送電源電壓VDD與接地電壓GND,且內部電路102可透過輸入焊墊101接收輸入訊號。另一方面,當靜電事件發生時,亦即當輸入焊墊101出現靜電訊號時,靜電訊號相當於一高頻訊號,因此低通濾波器130可用以濾除靜電訊號。除此之外,保護電路110中的第一元件111可提供導通至電源配線L11的放電路徑,且保護電路110中的第二元件112可提供導通至接地配線L12的放電路徑。因此,當靜電事件發生時,大量的靜電訊號可透過低通濾波器130導引至接地配線L12,且其餘的靜電訊號可透過保護電路110導引至電源配線L11或是接地配線L12。此外,電阻120可用以阻隔靜電訊號流入內部電路102。When the internal circuit 102 operates normally, the power supply wiring L11 and the ground wiring L12 are respectively used to transmit the power supply voltage VDD and the ground voltage GND, and the internal circuit 102 can receive the input signal through the input pad 101. On the other hand, when an electrostatic event occurs, that is, when an electrostatic signal is applied to the input pad 101, the electrostatic signal is equivalent to a high frequency signal, so the low pass filter 130 can be used to filter out the electrostatic signal. In addition to this, the first element 111 in the protection circuit 110 can provide a discharge path that is conducted to the power supply wiring L11, and the second element 112 in the protection circuit 110 can provide a discharge path that is conducted to the ground wiring L12. Therefore, when an electrostatic event occurs, a large amount of electrostatic signals can be guided to the ground wiring L12 through the low-pass filter 130, and the remaining electrostatic signals can be guided to the power wiring L11 or the ground wiring L12 through the protection circuit 110. In addition, the resistor 120 can be used to block electrostatic signals from flowing into the internal circuit 102.

如此一來,靜電放電保護裝置100可避免來自輸入焊墊101的靜電訊號對內部電路102造成損害。值得注意的是,當靜電事件發生時,低通濾波器130可將大量的靜電訊號導引至接地配線L12。因此,靜電放電保護裝置100可以承受符合系統層級之ESD測試標準的靜電訊號。換言之,在應用上,靜電放電保護裝置100將可致使積體電路通過系統層級的ESD測試,進而提升積體電路的可靠度。As a result, the electrostatic discharge protection device 100 can prevent the internal circuit 102 from being damaged by the electrostatic signal from the input pad 101. It is worth noting that when an electrostatic event occurs, the low pass filter 130 can direct a large amount of electrostatic signals to the ground wiring L12. Therefore, the ESD protection device 100 can withstand electrostatic signals that meet the ESD test standards of the system level. In other words, in application, the ESD protection device 100 will cause the integrated circuit to pass the system level ESD test, thereby improving the reliability of the integrated circuit.

舉例來說,圖2為依據本發明一實施例之靜電放電保護裝置在系統層級之ESD測試下的模擬示意圖。在圖2中,靜電放電保護裝置100所適用的積體電路更包括焊墊210。其中,輸入焊墊101與焊墊210分別用以接收輸入電壓VD21與VD22,且電感L21-L22與電阻R21-R22用以表示輸入電壓VD21與VD22的等效電路。此外,ESD產生器220用以產生符合系統層級之ESD測試標準的靜電訊號。例如,ESD產生器220可例如是產生符合IEC61000-4-2標準下的靜電訊號。For example, FIG. 2 is a schematic diagram of simulation of an ESD protection device under system-level ESD testing according to an embodiment of the invention. In FIG. 2, the integrated circuit to which the electrostatic discharge protection device 100 is applied further includes a pad 210. The input pads 101 and the pads 210 are respectively used to receive the input voltages VD21 and VD22, and the inductors L21-L22 and R21-R22 are used to represent the equivalent circuits of the input voltages VD21 and VD22. In addition, the ESD generator 220 is used to generate an electrostatic signal that meets the system level ESD test standard. For example, the ESD generator 220 can, for example, generate an electrostatic signal in accordance with the IEC61000-4-2 standard.

值得一提的是,積體電路是安裝在電子產品後才進行系統層級的ESD測試。此外,在實際的測試過程中,可透過靜電槍(ESD gun)對電子產品上的任何縫隙或是開口處進行放電測試,並可依據電子產品受影響的程度來評估電子產品的可靠度。相對地,在電路模擬上,圖2實施例是利用ESD產生器220與兩焊墊101與210之間的耦合效應來模擬實際的測試環境。It is worth mentioning that the integrated circuit is installed in the electronic product before the system level ESD test. In addition, during the actual test, the ESD gun can be used to test the discharge of any gap or opening in the electronic product, and the reliability of the electronic product can be evaluated according to the degree of influence of the electronic product. In contrast, in circuit simulation, the FIG. 2 embodiment utilizes the coupling effect between the ESD generator 220 and the two pads 101 and 210 to simulate the actual test environment.

具體而言,輸入焊墊101與焊墊210之間可產生一寄生電容C2。當ESD產生器220產生靜電訊號時,焊墊210將接收到靜電訊號,且來自焊墊210的靜電訊號可透過寄生電容C2耦合至輸入焊墊101。此外,當靜電訊號出現在輸入焊墊101時,低通濾波器130中的電容C1相當於短路。藉此,大量的靜電訊號將可透過低通濾波器130導引至接地配線L12,且其餘的靜電訊號可透過保護電路110導引至電源配線L11或是接地配線L12。藉此,靜電放電保護裝置100將可致使積體電路通過系統層級的ESD測試,進而提升積體電路的可靠度。Specifically, a parasitic capacitance C2 can be generated between the input pad 101 and the pad 210. When the ESD generator 220 generates an electrostatic signal, the pad 210 will receive an electrostatic signal, and the electrostatic signal from the pad 210 can be coupled to the input pad 101 via the parasitic capacitance C2. Further, when an electrostatic signal appears on the input pad 101, the capacitance C1 in the low pass filter 130 corresponds to a short circuit. Thereby, a large amount of electrostatic signals can be guided to the ground wiring L12 through the low-pass filter 130, and the remaining electrostatic signals can be guided to the power wiring L11 or the ground wiring L12 through the protection circuit 110. Thereby, the electrostatic discharge protection device 100 can cause the integrated circuit to pass the ESD test of the system level, thereby improving the reliability of the integrated circuit.

值得一提的是,雖然圖1實施例列舉了保護電路110、電阻120與低通濾波器130的連接型態,但其並非用以限定本發明。本領域具有通常知識者可依據設計所需,以任意的排列組合將保護電路110、電阻120與低通濾波器130串接在輸入焊墊101與內部電路102之間。It should be noted that although the embodiment of FIG. 1 cites the connection patterns of the protection circuit 110, the resistor 120 and the low-pass filter 130, it is not intended to limit the present invention. A person skilled in the art can serially connect the protection circuit 110, the resistor 120 and the low-pass filter 130 between the input pad 101 and the internal circuit 102 in an arbitrary arrangement according to the design requirements.

舉例來說,圖3為依據本發明另一實施例之靜電放電保護裝置的電路示意圖。圖3所列舉的靜電放電保護裝置300與圖1所列舉的靜電放電保護裝置100相似。與圖1主要不同之處在於,圖3中的低通濾波器330是電性連接在保護電路110與電阻120之間。For example, FIG. 3 is a circuit diagram of an electrostatic discharge protection device according to another embodiment of the present invention. The electrostatic discharge protection device 300 illustrated in FIG. 3 is similar to the electrostatic discharge protection device 100 illustrated in FIG. The main difference from FIG. 1 is that the low pass filter 330 in FIG. 3 is electrically connected between the protection circuit 110 and the resistor 120.

具體而言,低通濾波器330的輸入端IN1電性連接NMOS電晶體M1的汲極與輸入焊墊101,且低通濾波器330的輸出端OUT1電性連接電阻120的第一端。此外,電阻120的第二端電性連接內部電路102。與圖1實施例相似地,當輸入焊墊101出現靜電訊號時,低通濾波器330可將大量的靜電訊號導引至接地配線L12,且其餘的靜電訊號可透過保護電路110導引至電源配線L11或是接地配線L12。藉此,靜電放電保護裝置300將可致使積體電路通過系統層級的ESD測試,進而提升積體電路的可靠度。Specifically, the input terminal IN1 of the low-pass filter 330 is electrically connected to the drain of the NMOS transistor M1 and the input pad 101, and the output terminal OUT1 of the low-pass filter 330 is electrically connected to the first end of the resistor 120. In addition, the second end of the resistor 120 is electrically connected to the internal circuit 102. Similar to the embodiment of FIG. 1, when an electrostatic signal is generated on the input pad 101, the low-pass filter 330 can guide a large amount of electrostatic signals to the ground wiring L12, and the remaining electrostatic signals can be guided to the power supply through the protection circuit 110. Wiring L11 or ground wiring L12. Thereby, the electrostatic discharge protection device 300 can cause the integrated circuit to pass the ESD test of the system level, thereby improving the reliability of the integrated circuit.

圖4為依據本發明又一實施例之靜電放電保護裝置的電路示意圖。圖4所列舉的靜電放電保護裝置400與圖1所列舉的靜電放電保護裝置100相似。與圖1主要不同之處在於,圖4中的電阻420是電性連接在輸入焊墊101與保護電路110之間,且圖4中的低通濾波器430是電性連接在保護電路110與內部電路102之間。4 is a circuit diagram of an electrostatic discharge protection device according to still another embodiment of the present invention. The electrostatic discharge protection device 400 illustrated in FIG. 4 is similar to the electrostatic discharge protection device 100 illustrated in FIG. The main difference from FIG. 1 is that the resistor 420 in FIG. 4 is electrically connected between the input pad 101 and the protection circuit 110, and the low-pass filter 430 in FIG. 4 is electrically connected to the protection circuit 110. Between internal circuits 102.

具體而言,電阻420的第一端電性連接輸入焊墊101。低通濾波器430的輸入端IN1電性連接電阻420的第二端與NMOS電晶體M1的汲極,且低通濾波器430的輸出端OUT1電性連接內部電路102。與圖1實施例相似地,當輸入焊墊101出現靜電訊號時,低通濾波器430可將大量的靜電訊號導引至接地配線L12,且其餘的靜電訊號可透過保護電路110導引至電源配線L11或是接地配線L12。藉此,靜電放電保護裝置400將可致使積體電路通過系統層級的ESD測試,進而提升積體電路的可靠度。Specifically, the first end of the resistor 420 is electrically connected to the input pad 101. The input terminal IN1 of the low-pass filter 430 is electrically connected to the second end of the resistor 420 and the drain of the NMOS transistor M1, and the output terminal OUT1 of the low-pass filter 430 is electrically connected to the internal circuit 102. Similar to the embodiment of FIG. 1, when an electrostatic signal is generated on the input pad 101, the low-pass filter 430 can guide a large amount of electrostatic signals to the ground wiring L12, and the remaining electrostatic signals can be guided to the power supply through the protection circuit 110. Wiring L11 or ground wiring L12. Thereby, the electrostatic discharge protection device 400 can cause the integrated circuit to pass the ESD test of the system level, thereby improving the reliability of the integrated circuit.

此外,雖然圖1實施例列舉了低通濾波器130的實施型態,但其並非用以限定本發明。舉例來說,在一實施例中,低通濾波器130包括一電容,且所述電容的第一端電性連接低通濾波器130的輸入端IN1與輸出端OUT1,且所述電容的第二端電性連接至接地配線L12。換言之,就圖1、3、4實施例而言,本領域具有通常知識者可依據設計所需,將低通濾波器130、330與430中的電阻R12移除,並僅利用電容C1來實現低通濾波器130、330與430。Moreover, although the embodiment of FIG. 1 exemplifies the implementation of the low pass filter 130, it is not intended to limit the invention. For example, in an embodiment, the low-pass filter 130 includes a capacitor, and the first end of the capacitor is electrically connected to the input terminal IN1 and the output terminal OUT1 of the low-pass filter 130, and the capacitor is The two ends are electrically connected to the ground wiring L12. In other words, with respect to the embodiments of Figures 1, 3, and 4, those skilled in the art can remove the resistor R12 in the low pass filters 130, 330, and 430 according to the design requirements, and only use the capacitor C1. Low pass filters 130, 330 and 430.

再者,圖5為依據本發明再一實施例之靜電放電保護裝置的電路示意圖。圖5所列舉的靜電放電保護裝置500與圖1所列舉的靜電放電保護裝置100相似。與圖1主要不同之處在於,圖5中的低通濾波器530更包括齊納二極體ZD5。Furthermore, FIG. 5 is a circuit diagram of an electrostatic discharge protection device according to still another embodiment of the present invention. The electrostatic discharge protection device 500 illustrated in FIG. 5 is similar to the electrostatic discharge protection device 100 illustrated in FIG. The main difference from FIG. 1 is that the low pass filter 530 in FIG. 5 further includes a Zener diode ZD5.

具體而言,齊納二極體ZD5的陰極電性連接電阻R12的第一端,且齊納二極體ZD5的陽極電性連接至接地配線L12。藉此,當輸入焊墊101出現靜電訊號時,低通濾波器530除了可以利用電容C1將靜電訊號導引至接地配線L12以外,還可利用齊納二極體ZD5將靜電訊號導引至接地配線L12。換言之,低通濾波器530可以利用齊納二極體ZD5來增加用以導引靜電訊號的放電路徑,進而可以濾除更多的靜電訊號。除此之外,齊納二極體ZD5具有較低的崩潰電壓,因此可以加快靜電放電保護裝置500的反應速度。Specifically, the cathode of the Zener diode ZD5 is electrically connected to the first end of the resistor R12, and the anode of the Zener diode ZD5 is electrically connected to the ground wiring L12. Therefore, when the input pad 101 has an electrostatic signal, the low-pass filter 530 can guide the electrostatic signal to the grounding line L12 by using the capacitor C1, and can also guide the electrostatic signal to the ground by using the Zener diode ZD5. Wiring L12. In other words, the low pass filter 530 can use the Zener diode ZD5 to increase the discharge path for guiding the electrostatic signals, thereby filtering out more electrostatic signals. In addition to this, the Zener diode ZD5 has a low breakdown voltage, so that the reaction speed of the electrostatic discharge protection device 500 can be accelerated.

值得一提的是,在另一實施例中,齊納二極體ZD5的陰極與陽極也可分別電性連接至電阻R12的第二端與接地配線L12,且此時的齊納二極體ZD5也可用以導引靜電訊號。此外,在圖5實施例的教示下,本領域具有通常知識者可依據設計所需,在低通濾波器330與430中分別設置一齊納二極體ZD5,以提升靜電放電保護裝置300與400的反應速度。It is worth mentioning that in another embodiment, the cathode and the anode of the Zener diode ZD5 can also be electrically connected to the second end of the resistor R12 and the ground wiring L12, respectively, and the Zener diode at this time. ZD5 can also be used to guide electrostatic signals. In addition, in the teachings of the embodiment of FIG. 5, a person skilled in the art can separately set a Zener diode ZD5 in the low pass filters 330 and 430 according to the design requirements to enhance the electrostatic discharge protection devices 300 and 400. The speed of the reaction.

圖6為依據本發明另一實施例之靜電放電保護裝置的電路示意圖。圖6所列舉的靜電放電保護裝置600與圖1所列舉的靜電放電保護裝置100相似。與圖1主要不同之處在於,圖6中的靜電放電保護裝置600更包括齊納二極體ZD6。FIG. 6 is a circuit diagram of an electrostatic discharge protection device according to another embodiment of the present invention. The electrostatic discharge protection device 600 illustrated in FIG. 6 is similar to the electrostatic discharge protection device 100 illustrated in FIG. The main difference from FIG. 1 is that the electrostatic discharge protection device 600 in FIG. 6 further includes a Zener diode ZD6.

具體而言,靜電放電保護裝置600所適用的積體電路更包括焊墊610。此外,齊納二極體ZD6的陰極電性連接焊墊610,且齊納二極體ZD6的陽極電性連接至接地配線L12。藉此,當焊墊610出現靜電訊號時,齊納二極體ZD6可先將靜電訊號導引至接地配線L12。如此一來,透過寄生電容C6耦合至輸入焊墊101的靜電訊號將可大幅地減少,進而可以更進一步地提升靜電放電保護裝置600的防護能力。換言之,在圖6實施例的教示下,本領域具有通常知識者可依據設計所需,針對積體電路中的焊墊設置相應的齊納二極體,以進一步地提升靜電放電保護裝置的防護能力。Specifically, the integrated circuit to which the electrostatic discharge protection device 600 is applied further includes a pad 610. In addition, the cathode of the Zener diode ZD6 is electrically connected to the pad 610, and the anode of the Zener diode ZD6 is electrically connected to the ground wiring L12. Therefore, when the solder pad 610 has an electrostatic signal, the Zener diode ZD6 can first guide the electrostatic signal to the ground wiring L12. As a result, the electrostatic signal coupled to the input pad 101 through the parasitic capacitance C6 can be greatly reduced, and the protection capability of the ESD protection device 600 can be further improved. In other words, in the teachings of the embodiment of FIG. 6, those skilled in the art can set corresponding Zener diodes for the pads in the integrated circuit according to the design requirements, so as to further improve the protection of the electrostatic discharge protection device. ability.

綜上所述,本發明的靜電放電保護裝置設有低通濾波器。藉此,靜電放電保護裝置可透過低通濾波器將大量的靜電訊號導引至接地配線。因此,靜電放電保護裝置可以承受符合系統層級之ESD測試標準的靜電訊號。換言之,在應用上,靜電放電保護裝置可致使積體電路通過系統層級的ESD測試,進而提升積體電路的可靠度。In summary, the electrostatic discharge protection device of the present invention is provided with a low pass filter. Thereby, the electrostatic discharge protection device can guide a large amount of electrostatic signals to the ground wiring through the low-pass filter. Therefore, the ESD protection device can withstand electrostatic signals that meet the system-level ESD test standards. In other words, in application, the ESD protection device can cause the integrated circuit to pass the system level ESD test, thereby improving the reliability of the integrated circuit.

雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any one of ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the present invention. The scope of the invention is defined by the scope of the appended claims.

100、300、400、500、600‧‧‧靜電放電保護裝置
110‧‧‧保護電路
111‧‧‧第一元件
112‧‧‧第二元件
120、R11、R12、R21、R22、420‧‧‧電阻
130、330、430、530‧‧‧低通濾波器
IN1‧‧‧低通濾波器的輸入端
OUT1‧‧‧低通濾波器的輸出端
D1‧‧‧二極體
C1‧‧‧電容
M1、M12‧‧‧NMOS電晶體
M11‧‧‧PMOS電晶體
101‧‧‧輸入焊墊
102‧‧‧內部電路
N1‧‧‧連接節點
L11‧‧‧電源配線
L12‧‧‧接地配線
VDD‧‧‧電源電壓
GND‧‧‧接地電壓
210、610‧‧‧焊墊
220‧‧‧ESD產生器
VD21、VD22‧‧‧輸入電壓
L21、L22‧‧‧電感
C2、C6‧‧‧寄生電容
ZD5、ZD6‧‧‧齊納二極體
100, 300, 400, 500, 600‧‧‧ Electrostatic discharge protection devices
110‧‧‧Protection circuit
111‧‧‧ first component
112‧‧‧second component
120, R11, R12, R21, R22, 420‧‧‧ resistance
130, 330, 430, 530‧‧‧ low pass filter
Input of the IN1‧‧‧ low-pass filter
Output of OUT1‧‧‧ low-pass filter
D1‧‧‧ diode
C1‧‧‧ capacitor
M1, M12‧‧‧ NMOS transistor
M11‧‧‧ PMOS transistor
101‧‧‧Input pad
102‧‧‧Internal circuits
N1‧‧‧ connection node
L11‧‧‧Power Wiring
L12‧‧‧ Grounding Wiring
VDD‧‧‧Power supply voltage
GND‧‧‧ Grounding voltage
210, 610‧‧‧ solder pads
220‧‧‧ESD Generator
VD21, VD22‧‧‧ input voltage
L21, L22‧‧‧ inductance
C2, C6‧‧‧ parasitic capacitance
ZD5, ZD6‧‧‧ Zener diode

圖1為依據本發明一實施例之靜電放電保護裝置的電路示意圖。 圖2為依據本發明一實施例之靜電放電保護裝置在系統層級之ESD測試下的模擬示意圖。 圖3為依據本發明另一實施例之靜電放電保護裝置的電路示意圖。 圖4為依據本發明又一實施例之靜電放電保護裝置的電路示意圖。 圖5為依據本發明再一實施例之靜電放電保護裝置的電路示意圖。 圖6為依據本發明另一實施例之靜電放電保護裝置的電路示意圖。1 is a circuit diagram of an electrostatic discharge protection device in accordance with an embodiment of the present invention. 2 is a schematic diagram of simulation of an electrostatic discharge protection device under system ESD test according to an embodiment of the invention. 3 is a circuit diagram of an electrostatic discharge protection device according to another embodiment of the present invention. 4 is a circuit diagram of an electrostatic discharge protection device according to still another embodiment of the present invention. FIG. 5 is a circuit diagram of an electrostatic discharge protection device according to still another embodiment of the present invention. FIG. 6 is a circuit diagram of an electrostatic discharge protection device according to another embodiment of the present invention.

100‧‧‧靜電放電保護裝置100‧‧‧Electrostatic discharge protection device

110‧‧‧保護電路110‧‧‧Protection circuit

111‧‧‧第一元件111‧‧‧ first component

112‧‧‧第二元件112‧‧‧second component

120、R11、R12‧‧‧電阻120, R11, R12‧‧‧ resistance

130‧‧‧低通濾波器130‧‧‧Low-pass filter

IN1‧‧‧低通濾波器的輸入端Input of the IN1‧‧‧ low-pass filter

OUT1‧‧‧低通濾波器的輸出端Output of OUT1‧‧‧ low-pass filter

D1‧‧‧二極體D1‧‧‧ diode

C1‧‧‧電容C1‧‧‧ capacitor

M1、M12‧‧‧NMOS電晶體M1, M12‧‧‧ NMOS transistor

M11‧‧‧PMOS電晶體M11‧‧‧ PMOS transistor

101‧‧‧輸入焊墊101‧‧‧Input pad

102‧‧‧內部電路102‧‧‧Internal circuits

N1‧‧‧連接節點N1‧‧‧ connection node

L11‧‧‧電源配線L11‧‧‧Power Wiring

L12‧‧‧接地配線L12‧‧‧ Grounding Wiring

VDD‧‧‧電源電壓VDD‧‧‧Power supply voltage

GND‧‧‧接地電壓GND‧‧‧ Grounding voltage

Claims (10)

一種靜電放電保護裝置,包括:一保護電路,包括一第一元件與一第二元件,其中該第一元件與該第二元件相互串接在一電源配線與一接地配線之間,該第一元件與該第二元件之間具有一連接節點,該第一元件為一二極體,該二極體電性連接在該電源配線與該連接節點之間,該第二元件為一NMOS電晶體,該NMOS電晶體的汲極電性連接該連接節點,該NMOS電晶體的閘極透過一第二電阻電性連接至該接地配線,該NMOS電晶體的源極電性連接至該接地配線;一第一電阻;以及一低通濾波器,其中該低通濾波器、該保護電路與該第一電阻相互串接在一輸入焊墊與一內部電路之間。 An ESD protection device includes: a protection circuit comprising a first component and a second component, wherein the first component and the second component are connected in series between a power supply wiring and a ground wiring, the first Between the device and the second component, the first component is a diode, the diode is electrically connected between the power wiring and the connection node, and the second component is an NMOS transistor. The gate of the NMOS transistor is electrically connected to the connection node, and the gate of the NMOS transistor is electrically connected to the ground wiring through a second resistor, and the source of the NMOS transistor is electrically connected to the ground wiring; a first resistor; and a low pass filter, wherein the low pass filter, the protection circuit and the first resistor are connected in series between an input pad and an internal circuit. 如申請專利範圍第1項所述的靜電放電保護裝置,其中該低通濾波器的輸入端電性連接該輸入焊墊,該低通濾波器的輸出端電性連接該NMOS電晶體的汲極與該第一電阻的第一端,該第一電阻的第二端電性連接該內部電路。 The electrostatic discharge protection device of claim 1, wherein the input end of the low pass filter is electrically connected to the input pad, and the output end of the low pass filter is electrically connected to the drain of the NMOS transistor. And the first end of the first resistor, the second end of the first resistor is electrically connected to the internal circuit. 如申請專利範圍第1項所述的靜電放電保護裝置,其中該低通濾波器的輸入端電性連接該NMOS電晶體的汲極與該輸入焊墊,該低通濾波器的輸出端電性連接該第一電阻的第一端,該第一電阻的第二端電性連接該內部電路。 The electrostatic discharge protection device of claim 1, wherein the input end of the low pass filter is electrically connected to the drain of the NMOS transistor and the input pad, and the output end of the low pass filter is electrically Connecting the first end of the first resistor, the second end of the first resistor is electrically connected to the internal circuit. 如申請專利範圍第1項所述的靜電放電保護裝置,其中該第一電阻的第一端電性連接該輸入焊墊,該低通濾波器的輸入端 電性連接該第一電阻的第二端與該NMOS電晶體的汲極,且該低通濾波器的輸出端電性連接該內部電路。 The electrostatic discharge protection device of claim 1, wherein the first end of the first resistor is electrically connected to the input pad, and the input end of the low pass filter The second end of the first resistor is electrically connected to the drain of the NMOS transistor, and the output end of the low pass filter is electrically connected to the internal circuit. 如申請專利範圍第1項所述的靜電放電保護裝置,其中該低通濾波器具有一輸入端與一輸出端,且該低通濾波器包括:一第二電阻,電性連接在該低通濾波器的輸入端與輸出端之間;以及一電容,其第一端電性連接該低通濾波器的輸出端,該電容的第二端電性連接至該接地配線。 The ESD protection device of claim 1, wherein the low pass filter has an input end and an output end, and the low pass filter comprises: a second resistor electrically connected to the low pass filter The input end and the output end of the capacitor; and a capacitor, the first end of which is electrically connected to the output end of the low pass filter, and the second end of the capacitor is electrically connected to the ground wiring. 如申請專利範圍第5項所述的靜電放電保護裝置,其中該低通濾波器更包括:一齊納二極體,其陰極電性連接該第二電阻的第一端或是第二端,該齊納二極體的陽極電性連接至該接地配線。 The electrostatic discharge protection device of claim 5, wherein the low-pass filter further comprises: a Zener diode, the cathode of which is electrically connected to the first end or the second end of the second resistor, The anode of the Zener diode is electrically connected to the ground wiring. 如申請專利範圍第1項所述的靜電放電保護裝置,其中該低通濾波器具有一輸入端與一輸出端,且該低通濾波器包括:一電容,其第一端電性連接該低通濾波器的輸入端與輸出端,該電容的第二端電性連接至該接地配線。 The ESD protection device of claim 1, wherein the low pass filter has an input end and an output end, and the low pass filter comprises: a capacitor, the first end of which is electrically connected to the low pass An input end and an output end of the filter, and the second end of the capacitor is electrically connected to the ground wiring. 如申請專利範圍第1項所述的靜電放電保護裝置,其中該靜電放電保護裝置適用於一積體電路,該積體電路包該輸入焊墊、該內部電路與一焊墊,且該靜電放電保護裝置更包括一齊納二極體,其中該齊納二極體的陰極電性連接該焊墊,該齊納二極體的陽極電性連接至該接地配線。 The electrostatic discharge protection device of claim 1, wherein the electrostatic discharge protection device is suitable for an integrated circuit, the integrated circuit includes the input pad, the internal circuit and a pad, and the electrostatic discharge The protection device further includes a Zener diode, wherein a cathode of the Zener diode is electrically connected to the pad, and an anode of the Zener diode is electrically connected to the ground wiring. 一種靜電放電保護裝置,包括: 一保護電路,包括一第一元件與一第二元件,其中該第一元件與該第二元件相互串接在一電源配線與一接地配線之間,且該第一元件與該第二元件之間具有一連接節點;一第一電阻;以及一低通濾波器,其中該低通濾波器、該保護電路與該第一電阻相互串接在一輸入焊墊與一內部電路之間,該低通濾波器具有一輸入端與一輸出端,且該低通濾波器包括:一第二電阻,電性連接在該低通濾波器的輸入端與輸出端之間;以及一電容,其第一端電性連接該低通濾波器的輸出端,該電容的第二端電性連接至該接地配線。 An electrostatic discharge protection device comprising: A protection circuit includes a first component and a second component, wherein the first component and the second component are connected in series with each other between a power supply wiring and a ground wiring, and the first component and the second component are a connection node; a first resistor; and a low pass filter, wherein the low pass filter, the protection circuit and the first resistor are connected in series between an input pad and an internal circuit, the low The pass filter has an input end and an output end, and the low pass filter comprises: a second resistor electrically connected between the input end and the output end of the low pass filter; and a capacitor, the first end thereof The output end of the low pass filter is electrically connected, and the second end of the capacitor is electrically connected to the ground wiring. 一種靜電放電保護裝置,包括:一保護電路,包括一第一元件與一第二元件,其中該第一元件與該第二元件相互串接在一電源配線與一接地配線之間,且該第一元件與該第二元件之間具有一連接節點;一第一電阻;以及一低通濾波器,其中該低通濾波器、該保護電路與該第一電阻相互串接在一輸入焊墊與一內部電路之間,該低通濾波器具有一輸入端與一輸出端,且該低通濾波器包括:一電容,其第一端電性連接該低通濾波器的輸入端與輸出端,該電容的第二端電性連接至該接地配線。An ESD protection device includes: a protection circuit comprising a first component and a second component, wherein the first component and the second component are connected in series between a power supply wiring and a ground wiring, and the a connection node between the component and the second component; a first resistor; and a low pass filter, wherein the low pass filter, the protection circuit and the first resistor are connected in series with each other on an input pad Between an internal circuit, the low-pass filter has an input end and an output end, and the low-pass filter includes: a capacitor, the first end of which is electrically connected to the input end and the output end of the low pass filter, The second end of the capacitor is electrically connected to the ground wiring.
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Publication number Priority date Publication date Assignee Title
TWI596992B (en) * 2016-09-06 2017-08-21 奕力科技股份有限公司 Electrostatic discharge protection device and protection method of electrostatic discharge
CN115603295A (en) * 2021-06-28 2023-01-13 瑞昱半导体股份有限公司(Tw) Electrostatic discharge protection circuit
TWI870110B (en) * 2023-11-17 2025-01-11 立積電子股份有限公司 Electrostatic discharge protection circuit

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Publication number Priority date Publication date Assignee Title
TWI596992B (en) * 2016-09-06 2017-08-21 奕力科技股份有限公司 Electrostatic discharge protection device and protection method of electrostatic discharge
CN115603295A (en) * 2021-06-28 2023-01-13 瑞昱半导体股份有限公司(Tw) Electrostatic discharge protection circuit
TWI870110B (en) * 2023-11-17 2025-01-11 立積電子股份有限公司 Electrostatic discharge protection circuit

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