TWI503231B - Apparatus and process for producing laminated sheet - Google Patents

Description

Manufacturing device of laminated sheet and manufacturing method of laminated sheet

The present invention relates to a manufacturing apparatus of a laminated sheet and a method of manufacturing a laminated sheet.

In recent years, in order to reduce the size and thickness of electronic components and electronic devices, it is required to reduce the size and thickness of circuit boards used. In response to this requirement, a multi-layered circuit substrate is used and the layers thereof are thinned.

In the circuit board of the multilayer structure, for example, a sheet in which a resin composition sheet (resin layer) is laminated and adhered on both surfaces of the fiber base material is used (for example, see Patent Document 1).

This sheet is produced by superposing a B-stage resin composition sheet on both sides of a fibrous base material and pressurizing the laminated body.

(Patent Document 1) Japanese Patent Laid-Open Publication No. 2003-340952

However, in such a production method, there is a possibility that the pressure of the fiber base material of the resin layer is insufficient, and as a result, the resin layer is peeled off from the fiber base material.

Further, such a problem is not limited to the case where the fiber base material and the resin layer are laminated, and even when the resin layers are laminated to each other, and the prepreg containing the fiber base material is laminated to each other.

The present invention has been made in view of such problems.

That is, according to the present invention, there is provided a manufacturing apparatus for a laminated sheet which is obtained by joining a sheet having a resin layer to one side or both sides of a thin plate-shaped substrate. a laminated sheet; the pair of first rolls that are joined to each other by the outer peripheral surface and the outer peripheral surface; and the outer peripheral surfaces are mutually abutted to each other, and the pair of the substrates fed by the first roll are fed out The second roller is disposed on the downstream side of the first roller in the substrate transfer direction, and is disposed on the upstream side of the second roller in the substrate transfer direction, and is disposed on the first roller that is fed by the pair of first rollers a third roller on the front side and the back side of the substrate; and a decompression means for decompressing a space surrounded by the pair of first rolls, the pair of second rolls, and the third roll; a pair of first rolls that feed the substrate into the space, and between the one of the third rolls and the one of the second rolls on the front side or the back side of the substrate, facing the space The sheet is fed inwardly, and the second roller is formed by press-bonding the base material and the resin layer of the sheet, and conveying the laminated sheet containing the base material and the sheet to a roller outside the space.

Here, the outer peripheral surfaces of the rolls are in contact with each other, and are not limited to the case where the rolls are in direct contact with each other, and may be in contact with each other via a substrate or the like.

According to the invention, the space in the space surrounded by the pair of first rolls, the pair of second rolls, and the third rolls can be depressurized by the pressure reducing means.

The substrate and the sheet are supplied in the space, and the space is decompressed by a pressure reducing means to pressurize the substrate and the sheet. Since the pressure-bonded base material and the sheet are further pressure-bonded between the second rolls, the base material and the sheet are strongly pressed, and peeling is less likely to occur between the base material and the sheet.

Furthermore, according to the present invention, a method of manufacturing a laminated sheet using the above-described manufacturing apparatus can also be provided.

According to the present invention, there is provided a manufacturing apparatus and a method of producing a laminated sheet which can reliably perform bonding of a substrate constituting a laminated sheet and a resin layer.

Hereinafter, embodiments of the present invention will be described based on the drawings. In the drawings, the same components are denoted by the same reference numerals, and the detailed description is omitted as appropriate.

<First embodiment>

1 is a schematic cross-sectional side view showing a first embodiment of the laminated sheet manufacturing apparatus of the present invention, FIG. 2 is a cross-sectional view taken along line AA of FIG. 1, and FIG. 3 is a cross-sectional view taken along line BB of FIG. An enlarged view of a region [C] surrounded by a single chain line in Fig. 1, and Fig. 5 is a DD line sectional view of a laminated sheet of a region [C] surrounded by a one-point chain line in Fig. 1. Fig. 10 is a cross-sectional view showing a laminated sheet of the present invention, Fig. 11 is a cross-sectional view showing a substrate produced by using the laminated sheet shown in Fig. 10, and Fig. 12 is a cross-sectional view showing a semiconductor device manufactured using the substrate shown in Fig. 11. In the following description, the upper side of the drawing is referred to as "upper" or "upper", and the lower side is referred to as "lower" or "lower". 10 to 12 are exaggerated and enlarged in the thickness direction (upward and downward directions in the drawing).

The laminated sheet manufacturing apparatus 30 shown in Fig. 1 is an apparatus for manufacturing the laminated sheet 40 of the configuration shown in Fig. 10.

<Laminated film>

First, the laminated sheet 40 will be described with reference to FIG. Moreover, when the laminated sheet 40 is cut into a predetermined size in the longitudinal direction, the prepreg 1 is obtained.

The laminated sheet 40 shown in Fig. 10 has a strip shape (long scale shape) as a whole, and has a thin plate-like (flat-plate) fibrous base material (substrate) 2; one surface (upper surface) of the fibrous base material 2 a first resin layer (resin layer) 3 composed of a solid or semi-solid first resin composition, and a second resin composition which is solid or semi-solid on the other surface (lower surface) side of the fiber substrate 2 The second resin layer (resin layer) 4 is formed. Each of the resin layers 3 and 4 is in a B-stage state. The laminated sheet 40 is cut into a predetermined size and used.

The fibrous base material 2 has a function of enhancing the mechanical strength of the laminated sheet 40.

The fiber base material 2 may, for example, be a glass fiber base material such as a glass woven fabric or a glass nonwoven fabric, and may include a polyamide resin fiber, an aromatic polyamide resin fiber, or a wholly aromatic polyamide resin fiber. Polyurethane resin fiber such as amine fiber, polyester resin fiber such as polyester resin fiber, aromatic polyester resin fiber or wholly aromatic polyester resin fiber, polyimine resin fiber, polyparaphenylene Benzobis a synthetic fiber base material composed of a woven fabric or a non-woven fabric as a main component such as an azole or a fluororesin fiber, and an organic fiber such as a paper fiber base material containing kraft paper, cotton wool paper, mixed paper of cotton velvet and kraft pulp, or the like as a main component A fibrous substrate or the like of a substrate or the like.

In addition, any of the above fibers may be used as the fiber base material, and two or more types may be used.

Among these, the fibrous base material 2 is preferably a glass fiber base material. By using such a glass fiber base material, the mechanical strength of the prepreg 1 obtained by cutting the laminated sheet 40 can be further enhanced. Further, there is an effect that the coefficient of thermal expansion of the prepreg 1 can be reduced.

Examples of the glass constituting the glass fiber substrate include E glass, C glass, A glass, S glass, D glass, NE glass, T glass, H glass, and quartz glass. Among these, the glass is preferably S glass, quartz glass or T glass. Thereby, the coefficient of thermal expansion of the glass fiber substrate can be relatively reduced, so that the coefficient of thermal expansion of the laminated sheet 40 can be reduced as much as possible.

The average thickness T of the fiber base material 2 is not particularly limited, but is preferably 150 μm or less, more preferably 100 μm or less, still more preferably about 10 to 50 μm. By using the fiber base material 2 having such a thickness, the mechanical strength of the prepreg 1 (the laminated sheet 40) can be ensured and the thickness thereof can be reduced. Further, the workability of the prepreg 1 can be improved.

The first resin layer 3 is provided on one surface side of the fiber base material 2, and the second resin layer 4 is provided on the other surface side. Further, the first resin layer 3 is composed of a first resin composition, and the second resin layer 4 is composed of a second resin composition. The first resin composition and the second resin composition may be the same composition or may be different. In the present embodiment, the same composition is used.

As shown in FIG. 10, in the present embodiment, the first resin composition (first resin layer 3) is impregnated in one of the thickness directions of the fiber base material 2 (hereinafter referred to as "the first impregnation portion 31"). The second resin composition (second resin layer 4) is impregnated into the remaining portion of the fibrous base material 2 which is not impregnated with the first resin composition ( This portion is referred to as "the second impregnation portion 41"). Thereby, the first impregnation portion 31 of one of the first resin layers 3 and the second impregnation portion 41 of one of the second resin layers 4 are placed in the fiber base material 2. In the fiber base material 2, the first impregnation portion 31 (the lower surface of the first resin layer 3) is brought into contact with the second impregnation portion 41 (the upper surface of the second resin layer 4). In other words, the first resin composition is impregnated into the fibrous base material 2 from the upper surface side of the fibrous base material 2, and the second resin composition is impregnated into the fibrous base material 2 from the lower surface side of the fibrous base material 2, thereby forming a resin composition. The material fills the voids in the fibrous substrate 2.

In the present embodiment, the thickness of the first impregnation portion 31 is equal to the thickness of the second impregnation portion 41.

In addition, the thickness of the portion (the first non-impregnated portion 32) excluding the first impregnation portion 31 of the first resin layer 3 and the portion excluding the second impregnation portion 41 of the second resin layer 4 (the second non-impregnation portion 42) ) the thickness is equal. The thickness of the first non-impregnated portion 32 and the thickness of the second non-impregnated portion 42 are, for example, 2 to 20 μm. Further, the thickness of the first impregnation portion 31 and the thickness of the second impregnation portion 41 may be different, and the thickness of the first non-impregnation portion 32 and the thickness of the second non-impregnation portion 42 may be different. Further, reference numeral 20 schematically shows the boundary between the impregnation portions 31 and 41.

As shown in FIG. 1 , the first resin layer 3 is supplied to the laminated sheet manufacturing apparatus 30 as a first support (sheet) 5 a in the form of a thin plate. The sheet 5a includes a first resin layer 3, a support substrate (not shown) that supports the resin layer 3, and a protective sheet 51 that protects the first resin layer 3. The support substrate is placed on the opposite side of the protective sheet 51 while holding the first resin layer 3 . Therefore, although not shown in Figure 1, it is in the first The 2 roller 72a contacts the first resin layer 3 via the support substrate.

In the same manner, the second resin layer 4 is supplied to the laminated sheet manufacturing apparatus 30 as a second support (sheet) 5b having a thin plate shape. The sheet 5b includes a second resin layer 4, a support substrate (not shown) that supports the resin layer 4, and a protective sheet 51 that protects the second resin layer 4. The support substrate is placed on the opposite side of the protective sheet 51 while holding the second resin layer 4 . Therefore, although not shown in FIG. 1, the second roller 72b contacts the second resin layer 4 via the support substrate.

The protective sheet 51 is preferably, for example, a resin film. The resin material constituting the resin film may, for example, be a polyester such as a fluorine resin, a polyimide, a polybutylene terephthalate or a polyethylene terephthalate, or a polyethylene. Further, among the resin materials constituting the resin film, among these, polyethylene terephthalate or polyethylene is preferred because of its excellent heat resistance and low cost. Moreover, it is preferable that the resin film is subjected to a peelable treatment on the side of the resin layer side of the resin film. Thereby, the protective sheet 51 and the resin layer can be easily separated as will be described later.

As the support substrate, the same thing as the protective sheet 51 can be used.

The average thickness of the protective sheet 51 or the support substrate is not particularly limited, but is preferably about 8 to 70 μm, more preferably about 12 to 40 μm.

It is preferable that the first resin composition and the second resin composition have the following composition.

Each of the resin compositions contains, for example, a curable resin, and optionally contains at least one of a curing aid (for example, a curing agent, a curing accelerator, and the like) and an inorganic filler.

Examples of the curable resin include urea (urea) resin, melamine resin, maleic imine compound, polyurethane resin, unsaturated polyester resin, and benzoic acid. a thermosetting resin such as a ring resin, a bisallyl nalenimine compound, a vinyl benzyl resin, a vinyl benzyl ether resin, a benzocyclobutene resin, a cyanate resin, or an epoxy resin; An ultraviolet curable resin, an anaerobic resin, or the like. Among these, the curable resin is preferably a combination in which the glass transition temperature is 200 ° C or higher. For example, it is preferred to use an epoxy resin or a cyanate resin containing a spiro ring, a heterocyclic formula, a trimethylol type, a biphenyl type, a naphthyl group, a fluorene type, a novolac type, or a cyanate resin (including Prepolymer of cyanate resin), maleic imine compound, benzocyclobutene resin, with benzoic acid Ring resin.

In the above-mentioned curable resin, by using a thermosetting resin, after the substrate 10 (see FIG. 11) to be described later is produced, and the crosslinking density is increased in the resin layers 3 and 4 after curing, the cured resin can be obtained. The heat resistance of the layers 3, 4 (the resulting substrate) is improved.

By using the thermosetting resin and the filler in combination, the thermal expansion coefficient of the prepreg 1 (hereinafter also referred to as "low thermal expansion") can be reduced. Furthermore, the electrical characteristics (low dielectric constant, low dielectric loss tangent) of the prepreg 1 can be improved. Examples of the epoxy resin include a phenol novolak type epoxy resin, a bisphenol type epoxy resin, a naphthalene type epoxy resin, a fluorene type epoxy resin, and an aryl alkylene type epoxy resin.

Among these, the epoxy resin is preferably a naphthalene type or an arylalkyl group-type epoxy tree. fat. By using a naphthyl group or an arylalkylene type epoxy resin, the heat-resistant solder heat resistance (solder heat resistance after moisture absorption) and flame retardancy can be improved in the cured resin layers 3 and 4 (the obtained substrate). . Examples of the naphthalene type epoxy resin include HP-4700, HP-4770, HP-4032D, HP-5000, HP-6000, and Nippon Chemical Co., Ltd., NC-7300L, manufactured by DIC Co., Ltd. ECN-375, etc. made by Iron Chemical Co., Ltd. Examples of the arylalkylene-based epoxy resin include NC-3000, NC-3000L, NC-3000-FH, Nippon Chemical Co., Ltd., NC-7300L, and Nippon Steel Chemical Co., Ltd., manufactured by Nippon Kayaku Co., Ltd. (share) system ESN-375 and so on. The term "aryl extended alkyl type epoxy resin" refers to an epoxy resin which contains a combination of one or more aromatic groups and an alkylene group such as a methylene group in a repeating monomer, and has heat resistance, flame retardancy and mechanical strength. superior. Further, in terms of a halogen-free wiring board, it is preferred to use an epoxy resin which does not substantially contain a halogen.

The cyanate resin can be obtained, for example, by reacting a halogenated cyanide compound with a phenol or a naphthol, and if necessary, prepolymerizing by a method such as heating. Further, a commercially available product thus prepared can also be used.

The cyanate resin may, for example, be a bisphenol type such as a novolak type cyanate resin, a bisphenol A type cyanate resin, a bisphenol E type cyanate resin, or a tetramethyl bisphenol F type cyanate resin. Cyanate resin, naphthol aralkyl type cyanate resin, and the like.

Further, the cyanate resin preferably has two or more cyanate groups (-O-CN) in the molecule. For example, 2,2'-bis(4-cyanooxyphenyl)isopropylidene, 1,1'-bis(4-cyanooxyphenyl)ethane, bis(4-cyanooxy-3) ,5-dimethylphenyl) Methane, 1,3-bis(4-cyanooxyphenyl-1-(1-methylethylidene))benzene, bis(4-cyanooxyphenyl) sulfide, bis(4-cyanooxy) Phenyl)ether, 1,1,1-gin(4-cyanooxyphenyl)ethane, ginseng (4-cyanooxyphenyl)phosphoric acid, bis(4-cyanooxyphenyl)phosphonium, 2 , 2-bis(4-cyanooxyphenyl)propane, 1,3-, 1,4-, 1,6-, 1,8-, 2,6- or 2,7-dicyanooxynaphthalene, 1,3,6-Tricyanomethoxynaphthalene, 4,4-dicyanooxybiphenyl, and phenol novolac type, cresol novolac type, dicyclopentadiene type, and the like The cyanate resin obtained by the reaction, the cyanate resin obtained by the reaction between the naphthol aralkyl type polyhydric naphthol and the cyanogen halide. Among these, the phenol novolac type cyanate resin is excellent in flame retardancy and low thermal expansion property, and 2,2-bis(4-cyanooxyphenyl)isopropylidene and dicyclopentadiene type cyanic acid. The ester resin is excellent in control of crosslinking density and moisture resistance reliability. In particular, the phenol novolac type cyanate resin is preferred from the viewpoint of low thermal expansion. Further, one or two or more kinds of other cyanate resins may be further used in combination, and are not particularly limited.

The cyanate resin may be used singly or as a cyanate resin having a different weight average molecular weight, or the above cyanate resin and its prepolymer may be used in combination.

By using such cyanate resins, heat resistance and flame retardancy can be effectively exhibited.

Further, the curable resin may be used in combination of two or more kinds. For example, when the epoxy resin is used as the curable resin, the cyanate resin can be used in combination for further improving the flame retardancy, and the maleidene compound can be used in combination for further improving the heat resistance. Further, when the cyanate resin is used as the curable resin, the above epoxy resin can be used in combination for further improving heat resistance, flame retardancy and the like.

The content of the curable resin is not particularly limited, but is preferably 5 to 70% by mass, more preferably 10 to 50% by mass based on the entire resin composition. When the content of the curable resin is less than the above-mentioned lower limit, depending on the type of the curable resin, etc., the varnish viscosity of the resin composition is too low, and it is difficult to form the prepreg 1. On the other hand, when the content of the curable resin is more than the above-described upper limit, the amount of the other components is too small, and the mechanical strength of the prepreg 1 may be lowered depending on the type of the curable resin or the like.

Further, the resin composition preferably contains an inorganic filler. By making the prepreg 1 thin (for example, having a thickness of 35 μm or less), the substrate 10 having excellent mechanical strength can be obtained. Furthermore, the low thermal expansion of the substrate 10 can also be improved.

Examples of the inorganic filler include cerium oxide such as talc, alumina, glass, and molten cerium oxide, mica, aluminum hydroxide, and magnesium hydroxide. Further, in accordance with the purpose of use of the inorganic filler, a crushed or spherical shape is appropriately selected. Among these, the inorganic filler is preferably cerium oxide, and more preferably molten cerium oxide (especially spherical molten cerium oxide) from the viewpoint of superior low thermal expansion property.

Further, in addition to the components described above, the resin composition may be blended with other components as needed within the range not inhibiting the effects of the present invention. Examples of the other component include a tackifier such as ORBEN or BENTONE, a polysulfonium-based, a fluorine-based, a polymer-based antifoaming agent or a leveling agent, a tackifier such as a coupling agent, and a flame retardant. A coloring agent such as phthalocyanine/blue, phthalocyanine/green, iodine/green, disazo yellow, carbon black, anthraquinone, and the like.

<Laminar sheet manufacturing apparatus (manufacturing method of laminated sheets)>

Next, the laminated sheet manufacturing apparatus 30 used in the embodiment of the laminated sheet manufacturing method of the present invention, which is used in the production of the laminated sheet 40, will be described with reference to Figs. 1 to 5 .

First, an outline of the laminated sheet manufacturing apparatus 30 will be described.

The laminated sheet manufacturing apparatus 30 includes a first roller 71a and 71b that are disposed opposite to each other, and a second roller that feeds the substrate 2 fed by the pair of first rollers 71a and 71b and is disposed opposite to each other. 72a and 72b are disposed on the downstream side in the sheet conveying direction of the first rolls 71a and 71b, and are disposed on the upstream side in the sheet conveying direction of the second rolls 72a and 72b, and are held by the pair of first rolls 71a and 71b. The two third rolls 73a and 73b which are disposed on the substrate 2 to be delivered.

Each of the rollers 71a, 71b, 72a, 72b, 73a, and 73b is disposed such that the rotation axes are parallel to each other.

Further, the laminated sheet manufacturing apparatus 30 has a pressure reduction in the space 70 surrounded by the pair of first rolls 71a and 71b, the pair of second rolls 72a and 72b, and the two third rolls 73a and 73b. Decompression means 8.

The pair of first rolls 71a and 71b are rolls that feed the substrate 2 into the space 70. The support 5a belonging to the sheet is fed into the space 70 between the third roller 73a disposed on one side (for example, the surface side) of the substrate 2 and the second roller 72a. Further, the second rolls 72a and 72b pressurize the resin layer 3 of the base material 2 and the support 5a, and feed the laminated sheet 40 including the base material 2 and the support 5a to the outside of the space 70.

In the laminated sheet manufacturing apparatus 30, the fiber base material 2 and the support bodies 5a and 5b have a long shape and are continuously conveyed along the longitudinal direction thereof.

Next, the laminated sheet manufacturing apparatus 30 will be described in detail.

As shown in Fig. 1, the laminated sheet manufacturing apparatus 30 includes a casing 6, first rollers 71a and 71b, second rollers 72a and 72b, and third rollers 73a and 73b housed in the casing 6, and a pair of casings. The decompression means 8 for decompressing in 6 is used. The configuration of each unit will be described below.

As shown in Fig. 2, the casing 6 has a pair of wall portions 61 that are disposed to face each other with a space therebetween, and is formed, for example, in a box shape. The constituent material of the wall portion 61 is not particularly limited, and examples thereof include various metals such as iron, stainless steel, and aluminum, or alloys containing the same. Further, in addition to such a metal material, a resin material such as polyethylene or polytetrafluoroethylene may be used as a constituent material of the wall portion 61.

Here, the wall portion 61 is preferably a flat plate, but is not limited thereto. The first rolls 71a and 71b, the second rolls 72a and 72b, and the third rolls 73a and 73b constitute a cylindrical body that is open along both end faces in the sheet conveying direction. The wall portion 61 may be any one that closes the opening of the cylindrical body. Further, the pair of wall portions 61 are particularly preferably formed so as to straddle the respective rollers 71a, 71b, 72a, 72b, 73a, and 73b.

The first rolls 71a and 71b and the second rolls 72a and 72b and the third rolls 73a and 73b are placed between the two wall portions 61 of the casing 6. These roller system rotation axes are parallel to each other. Further, these rollers are coupled to a motor (not shown) via, for example, a gear mechanism (not shown) in which a large number of gears are disposed. Moreover, if the motor is activated, Then, the power is transmitted via the gear mechanism, and each roller is rotated. Needless to say, the driving of each roller is not limited to the gear mechanism, and the motor may be individually driven and driven by each roller as needed.

Moreover, these rolls have the same composition except for the difference in size. Hereinafter, the configuration of the first roller 71a will be representatively described, and the other rollers have the same structure.

As shown in FIG. 2, the first roller 71a has a cylindrical outer shape, and is composed of a main body portion 74 located at an intermediate portion in the longitudinal direction thereof and a shaft 75 located at both end sides of the main body portion 74. The outer diameter of each of the shafts 75 is reduced in diameter from the outer diameter of the body portion 74, respectively.

The first roller 71a is inserted into each of the bearings 76 provided in the wall portion 61, and is rotatably supported by the wall portion 61 by the bearing 76.

Further, the first roller 71a is a solid body in the configuration shown in Figs. 1 and 2, but is not limited thereto, and may be, for example, a hollow body. In the case of using a hollow body, it is more preferable to circulate the heat medium in each roll as needed to heat the roll. The heat medium at this time is not particularly limited, and examples thereof include water and oil.

In addition, the constituent material of the first roller 71a is not particularly limited, and for example, the materials listed in the constituent materials of the wall portion 61 can be used. The outer peripheral surface 741 of the main body portion 74 of the first roller 71a may be subjected to a treatment for preventing the outer peripheral surface 741 from being worn. As such a treatment, for example, a method of forming a film of DLC (Diamond Like Carbon) on the outer peripheral surface 741 can be mentioned. Moreover, as a constituent material of the first roller 71a, it is included in the constituent material of the wall portion 61. In addition to the materials listed, various rubber materials such as nitrile rubber, butyl rubber, urethane rubber, polyfluorinated fluororubber, and fluororubber may be used.

The first roller 71a and the first roller 71b are disposed to be parallel to each other in the horizontal direction, and the outer peripheral surface 741 of the main body portion 74 is in contact with each other (pressure-bonded) via the fiber base material 2 (see FIGS. 1 and 2). When the first roller 71a and the first roller 71b are rotated, the long-length fibrous base material 2 can be conveyed to the right side in the longitudinal direction of FIG. 1 along the longitudinal direction thereof. Thereby, the sheet-like fibrous base material 2 is conveyed to the inside of the space 70 to be described later.

The second roller 72a and the second roller 72b are disposed at positions different from the first rollers 71a and 71b, that is, in the transport direction (downstream side) of the fiber base material 2 with respect to the first rollers 71a and 71b. Further, the second roller 72a and the second roller 72b are disposed to be parallel to each other in the horizontal direction, and the outer peripheral portion 741 of the main body portion 74 passes through the fiber base material 2, the first resin layer 3, and the above-mentioned support base provided on the resin layer 3. The material (not shown), the second resin layer 4, and the support base material (not shown) provided in the resin layer 4 are brought into contact with each other (pressure-bonded). When the second roller 72a and the second roller 72b are rotated, the first resin layer 3 and the second resin layer 4 can be pressure-bonded (bonded) to the fiber base material 2 (see FIG. 1).

The laminate of the fiber base material 2, the resin layers 3 and 4, and the support substrate (not shown) is pressed in the thickness direction by the second roller 72a and the second roller 72b. At this time, the resin layers 3 and 4 are pressed. Immersion into the fibrous substrate 2. Further, as described above, the heat transfer can be performed by circulating the heat medium in the second rolls 72a and 72b. Thereby, the first resin layer 3 and the second resin layer 4 are raised to the fiber substrate 2 The adhesion.

In addition, the first resin layer 3 and the second resin layer 4 can be easily impregnated into the fiber base material 2 by using the second rolls 72a and 72b as heating rolls.

The laminated sheet 40 is sent out to the outside of the space 70 to be described later by the second rolls 72a and 72b. Here, it is preferable that the laminated sheet 40 is sent out in an atmosphere of atmospheric pressure or more by the second rolls 72a and 72b. In the present embodiment, the downstream side of the second rolls 72a and 72b in the sheet conveyance direction is atmospheric pressure, and the laminated sheets 40 are conveyed under atmospheric pressure by the second rolls 72a and 72b.

The third rolls 73a and 73b are placed while holding the fiber base material 2. The third roller 73a is disposed on the downstream side in the sheet conveying direction of the first roller 71a disposed on one surface side (surface side) of the fiber base material 2. In addition, the third roller 73a is disposed on the upstream side in the sheet conveying direction of the second roller 72a disposed on one surface side (surface side) of the fiber base material 2.

The third roller 73b is disposed on the downstream side of the first roller 71b disposed on the other surface side (back surface side) of the fiber base material 2 in the sheet conveying direction. In addition, the third roller 73b is disposed on the upstream side in the sheet conveying direction of the second roller 72b disposed on the other surface side (back surface side) of the fiber base material 2.

The third roller 73a and the third roller 73b are spaced apart from each other in the vertical direction (vertical direction), and are disposed to face each other in parallel. When the third roller 73a is rotated, the protective sheet 51 can be peeled off (rolled up) from the first resin layer 3 of the first support 5a (see FIG. 1). In the same manner, when the third roller 73b is rotated, the protective sheet 51 can be peeled off from the second resin layer 4 of the second support 5b (see FIG. 1).

In addition, the third roller 73a is formed such that the outer peripheral surface 741 of the main body portion 74 abuts against the outer peripheral surface 741 of the main portion 74 of the first roller 71a and the outer peripheral surface 741 of the main portion 74 of the second roller 72a. On the other hand, the third roller 73b is formed such that the outer peripheral surface 741 of the main body portion 74 abuts against the outer peripheral surface 741 of the main portion 74 of the first roller 71b and the outer peripheral surface 741 of the main portion 74 of the second roller 72b. With this arrangement, in the laminated sheet manufacturing apparatus 30, the space 70 surrounded by the wall portions 61 of the casing 6, the first rollers 71a and 71b, the second rollers 72a and 72b, and the third rollers 73a and 73b is formed. . The space 70 is decompressed by the action of the decompression means 8 (see Fig. 3).

As shown in Fig. 2, between the two ends of the respective main body portions 74 of the first rolls 71a and 71b (the second rolls 72a and 72b and the third rolls 73a and 73b are the same) and the wall portions 61 are interposed. Sealing material 62. Each of the seal members 62 is composed of an annular elastic body and is inserted into the annular recessed portion 612 formed in the wall portion 61 in a compressed state. Thereby, the airtightness of the space 70 is surely maintained, and when the space 70 is decompressed by the decompression means 8, the decompression can be quickly and surely performed.

The constituent material of the sealing material 62 is not particularly limited, and examples thereof include natural rubber, isoprene rubber, butadiene rubber, styrene-butadiene rubber, nitrile rubber, chloroprene rubber, butyl rubber, and acrylic resin. Rubber, ethylene-propylene rubber, epichlorohydrin rubber, urethane rubber, polyoxyethylene rubber, fluororubber-like rubber materials (especially those treated with sulfur), or styrene, polyolefin, Polyvinyl chloride, polyurethane, polyester, polyamine, polybutadiene, trans-polyisoprene, fluororubber, chlorinated polyethylene For each of the thermoplastic elastomers, one type or a mixture of two or more types may be used.

As shown in FIG. 1, the outer diameters (sizes) of the first rolls 71a and 71b, the second rolls 72a and 72b, and the third rolls 73a and 73b are different from each other. In the present embodiment, the magnitude relationship is (third roller) < (first roller) < (second roller). Further, the sizes of the rollers of the first rolls 71a and 71b, the second rolls 72a and 72b, and the third rolls 73a and 73b are arbitrary, but are preferably as small as possible, for example, in the case of a sheet having flexibility. The degree to which the sheet does not wrinkle when applied to the roll. Specifically, the diameter is preferably from 75 to 300 mm, more preferably from 100 to 200 mm.

In the case of a triangle formed by connecting the center of the first roller 71a and the second roller 72a and the third roller 73a, the angle of the center of the third roller 73a of the triangle is preferably 60°. Less than 180°. The triangle formed by connecting the center of the first roller 71b and the second roller 72b and the third roller 73b is also the same.

As shown in FIG. 3, the decompression means 8 has a pump 81 and a connection pipe 82 that connects the pump 81 to the opening 611 formed in each of the wall portions 61. The pump 81 is disposed outside the casing 6, and for example, a vacuum pump can be applied.

The decompression means 8 is such that the inside of the space 70 surrounded by the rolls becomes a lower air pressure than the outer area of the space 70. When the pressure reducing means 8 is driven, the air pressure in the space 70 becomes lower than the area on the upstream side in the sheet conveying direction of the first rolls 71a and 71b and the area on the downstream side in the sheet conveying direction of the second rolls 72a and 72b. Negative pressure. The decompression means 8 is made up of rollers 71a, 71b, 72a, 72b, 73a, 73b The air pressure inside the enclosed space 70 is reduced. In the region on the upstream side in the sheet conveying direction of the first rolls 71a and 71b, the first rolls 71a and 71b are at a pressure equal to or higher than atmospheric pressure (in the present embodiment, at atmospheric pressure).

In the same manner, the region on the downstream side in the sheet conveying direction of the second rollers 72a and 72b is equal to or higher than the atmospheric pressure in the second roller 72a and 72b (in the present embodiment, at atmospheric pressure).

Each of the connecting pipes 82 is a rigid pipe made of, for example, a metal material such as stainless steel.

Each of the openings 611 opens into the space 70 and communicates with the space 70. Further, in the configuration shown in FIG. 3, the opening portion 611 is formed in each of the double-walled wall portions 61. However, the opening portion 611 is not limited thereto. For example, the opening portion 611 may be formed only on one of the wall portions 61.

Then, by operating the pump 81, the gas (air G) in the space 70 can be sucked by the openings 611, whereby the space 70 can be depressurized. Further, by this, a force for bringing the adjacent rollers closer to each other is generated and further pressure-bonded, whereby the airtightness of the space 70 can be more reliably maintained.

Next, a method of manufacturing the laminated sheet 40 by the laminated sheet manufacturing apparatus 30 will be described.

First, before the first rolls 71a and 71b and the second rolls 72a and 72b and the third rolls 73a and 73b are rotated, the decompression means 8 is actuated to suck the gas in the space 70, and the space 70 is first decompressed.

The air pressure in the space 70 becomes a negative pressure, for example, 800 Pa or less, 100 Pa. the above.

Then, as shown in FIG. 1, when the first roller 71a and the first roller 71b are rotated, the fiber base material 2 is fed into the space 70 between the rolls (continuously supplied).

The fiber base material 2 is wound, for example, on a supply roller (not shown), and is supplied into the space 70 by the supply roller via the first roller 71a and the first roller 71b.

When the second roller 72a and the third roller 73a are rotated, the first support 5a is sent out into the space 70 between the rollers (continuously supplied). In the first support 5a, the protective sheet 51 is taken up (pulled) along the outer circumferential surface of the third roller 73a, whereby the protective sheet 51 is peeled off from the first resin layer 3. The first resin layer 3 having the supporting substrate of the protective sheet 51 is peeled off, and the fibrous base material 2 is gradually approached along the second roller 72a. Moreover, the peeled protective sheet 51 is sent out to the direction different from the second rolls 72a and 72b by the 1st roll 71a and the 3rd roll 73a. Specifically, the first roller 71a and the third roller 73a are fed outward (outside the space 70).

Further, the first resin layer 3 is in a B-stage state and is in a solid, semi-solid or liquid state.

When the second roller 72b and the third roller 73b are rotated, the second support 5b is sent out into the space 70 (continuously supplied) between the rollers. In the second support 5b, the protective sheet 51 is wound around the third roller 73b, whereby the protective sheet 51 is peeled off from the second resin layer 4. The second resin layer 4 having the support substrate peeled off from the protective sheet 51 is slowly approached to the fiber base along the second roller 72b. Material 2. Moreover, the peeled protective sheet 51 is sent out to the direction different from the second rolls 72a and 72b by the 1st roll 71b and the 3rd roll 73b. Specifically, the first roller 71b and the third roller 73b are fed outward between the first roller 71b.

Further, the second resin layer 4 is in a B-stage state and is in a solid, semi-solid or liquid state.

By peeling off the protective sheet 51 in the space 70 immediately before the first resin layer 3 and the second resin layer 4 are pressed against the fiber base material 2, the protective sheet 51 can be prevented from interfering with each resin layer. In the case of pressure bonding, each resin layer can be protected by the protective sheet 51 before pressure bonding.

Further, the fiber base material 2 and the first resin layer 3 having the support base material and the second resin layer 4 having the support base material pass between the second roll 72a and the second roll 72b at a time.

At this time, the support substrate provided in the first resin layer 3 is in contact with the second roller 72a, and the support substrate provided on the second resin layer 4 is in contact with the second roller 72b. The first resin layer 3 and the second resin layer 4 are in direct contact with the fiber base material 2.

In addition, as shown in FIG. 4, the first resin layer 3 is pressed against the fiber base material 2 from the upper side by the pressure contact force (contact force) F1 between the second roller 72a and the second roller 72b, and the second resin layer 2 is pressed. The resin layer 4 is pressure-bonded to the fibrous base material 2 from the lower side.

The laminated sheet 40 composed of the fibrous base material 2 and the first resin layer 3 having the supporting base material and the second resin layer 4 having the supporting base material is continuously discharged between the second roller 72a and the second roller 72b. .

Further, here, the fiber substrate 2 or the like is continuously supplied or discharged, which means In addition to the fact that the fiber substrate or the like is intermittently supplied or discharged as in the form of a sheet. For example, it means that the state in which the fibrous base material 2 or the like exists in the space 70 and the state in which it does not exist are alternately switched in a short period of time. Among them, the conveyance of the fiber base material 2 or the like can be stopped as needed.

Further, as described above, the space 70 is depressurized by the operation of the decompression means 8. Thereby, as shown in FIG. 4, the depressurization F2 generated in the space 70 can assist the adhesion between the fiber base material 2 and the first resin layer 3, and the pressure between the fiber base material 2 and the second resin layer 4. .

The pressure-bonding force caused by the pressure-bonding force F1 is bonded to the pressure-reducing force F2, and the bonding of the reinforcing fiber base material 2 and the first resin layer 3 and the joining of the fiber base material 2 and the second resin layer 4 are performed. Thereby, the resin layers 3 and 4 can be impregnated inside the fiber base material 2. Then, for example, regardless of the thickness or composition of the first resin layer 3 or the second resin layer 4, the laminated sheet 40 in which the respective resin layers are reliably and firmly bonded to the fiber base material 2 can be produced.

In addition, by using the second roller 72a and the second roller 72b as the heating roller, the resin layers 3 and 4 can be surely impregnated into the inside of the fiber base material 2.

When the gas inside the fiber base material 2 is sucked by decompressing the space 70, and the resin layers 3 and 4 are impregnated by the second roll 72a and the second roll 72b, it is difficult to impregnate the fiber base material. 2 A void occurs in the inner resin layer.

Further, in the laminated sheet manufacturing apparatus 30, the space to be decompressed is reduced by the spaces 70 surrounded by the first rolls 71a and 71b, the second rolls 72a and 72b, and the third rolls 73a and 73b as much as possible. Pressure space. By this, the product can be The layer manufacturing apparatus 30 is miniaturized. Further, when the decompression means 8 is actuated, the decompression can be quickly performed. Further, since the space for which the pressure is to be reduced can be reduced, the space 70 can be made high in vacuum. Specifically, by forming the opening portion 611 by the wall portion 61 and directly absorbing the gas in the space 70 from the opening portion 611, the inside of the space 70 can be decompressed only, and the space 70 can be made highly vacuumed. .

Further, when the fiber base material 2 is joined to the first resin layer 3, even if air remains between these, the air can be extruded by the pressure contact force F1, so that it is possible to surely prevent the air from being bonded under the residual air. In the case (the same applies when the fiber base material 2 and the second resin layer 4 are joined).

Here, FIG. 5 is a cross-sectional view showing the fiber base material 2 and the resin layers 3 and 4 in the D-D direction of FIG. The width dimension orthogonal to the conveyance direction of the fiber base material 2 is smaller than the width dimension orthogonal to the conveyance direction of the first resin layer 3 and the second resin layer 4.

The fiber base material 2, the first resin layer 3, and the second resin layer 4 are pressure-bonded by the pair of second rolls 72a and 72b. In this case, one end portion (one end portion on the transport direction side) in the width direction of the first resin layer 3 and one end portion (one end portion on the transport direction side) in the width direction of the second resin layer 4 are pressed (hot pressed) The other end portion in the width direction of the first resin layer 3 and the other end portion in the width direction of the second resin layer 4 are pressure-bonded (thermally bonded). The end portions in the width direction of the resin layers 3 and 4 are fused to each other to form a joint portion, and the fiber base material 2 is wrapped in the first resin layer 3 and the second resin layer 4 in a shape. That is, the product Both ends of the layer 40 in the width direction are sealed.

The fibrous base material 2 is a porous material in which a plurality of pores are formed. The pores formed in the fiber base material 2 communicate with each other through the other holes in the sheet conveying direction, and further communicate with the front and back surfaces of the fiber base material 2. Therefore, even the fibrous base material 2 located outside the space 70 is internally connected to the space 70. The gas inside the fiber base material 2 outside the space 70 is sucked by the decompression means 8 through the holes and spaces 70 inside the fiber base material 2.

As described above, the resin layers 3 and 4 are impregnated inside the fiber base material 2 by the pair of second rolls 72a and 72b. However, it is not in a state in which the inside of the fiber base material 2 is completely buried by the resin layers 3 and 4 (complete impregnation). In the laminated sheet 40 obtained between the second roller 72a and the second roller 72b, the pores inside the fibrous base material 2 are communicated to the pores on the front and back surfaces of the fibrous base material 2 in the space 70 via the other holes.

Therefore, the gas inside the fiber base material 2 outside the space portion 70 is sucked by the decompression means 8 through the holes and the space 70 inside the fiber base material 2.

On the other hand, the resin layers 3 and 4 are heated by the pair of second rolls 72a and 72b, and the viscosity is lowered. Therefore, the resin layers 3 and 4 are also formed in the laminated sheet 40 which is sent out from the space 70. Impregnation towards the fibrous substrate 2.

Then, as described above, the gas inside the fiber base material 2 outside the space 70 is sucked by the pressure reducing means 8 through the hole and the space 70 inside the fiber base material 2, and the suction continues to the resin layers 3, 4 Immersion to the inside of the fiber base material 2 to some extent. That is, the gas inside the fiber substrate 2 is depressurized During the period of attraction of 8, the resin layers 3 and 4 were impregnated into the fibrous base material 2. Thereby, the resin layers 3 and 4 are more easily impregnated into the fibrous base material 2, and voids are prevented from occurring inside the fibrous base material 2.

In addition, since the joint portions which melt-bond the end portions of the resin layers 3 and 4 are formed at both end portions in the width direction of the laminated sheet 40, it is possible to prevent the gas from being on the outer surface side of the fiber base material 2 outside the space 70. The case of flowing into the inside of the fibrous base material 2. Therefore, the gas inside the fiber base material 2 of the laminated sheet 40 located outside the space 70 can be surely sucked by the decompression means 8.

Further, in the manufacturing apparatus 30, the impregnation of the resin layers 3 and 4 toward the fiber base material 2 is performed while the laminated sheet 40 sent from the space 70 is conveyed.

In the present embodiment, the downstream side of the second rolls 72a and 72b in the sheet conveying direction is atmospheric pressure, and the laminated sheets fed by the second rolls 72a and 72b are pressurized by atmospheric pressure. Thereby, the impregnation of the first resin layer 3 and the second resin layer 4 with respect to the fiber base material 2 can be performed.

<Substrate>

Next, the substrate 10 using the prepreg 1 will be described with reference to FIG. The substrate 10 shown in FIG. 11 has a laminate 11 and a metal layer 12 provided on both surfaces of the laminate 11.

The laminated body 11 includes two prepregs 1 that are disposed inside the second resin layer 4 and a fibrous base material 13 that is held between the second resin layers 4 .

The same as the above-mentioned fiber base material 2 can be used for the fiber base material 13. also, In the present embodiment, since the second resin layer 4 has the above-described characteristics (flexibility), at least a part of the fiber base material 13 is surely embedded (embedded) in the second resin layer 4.

The metal layer 12 is a portion processed into a wiring portion, and is formed by, for example, bonding a metal foil such as a copper foil or an aluminum foil to the laminated body 11 and plating copper or aluminum on the surface of the laminated body 11. Further, in the present embodiment, since the first resin layer 3 has the above characteristics, the metal layer 12 can be held with high adhesion, and the metal layer 12 can be formed as a wiring portion with high processing precision.

The peeling strength between the metal layer 12 and the first resin layer 3 is preferably 0.5 kN/m or more, more preferably 0.6 kN/m or more. As a result, the connection reliability in the semiconductor device 100 (see FIG. 12) obtained by processing the metal layer 12 into a wiring portion is further improved.

In the substrate 10, two prepregs 1 in which the metal layer 12 is formed on the first resin layer 3 are prepared, and in the state in which the prepreg 1 holds the fiber base material 13, for example, vacuum lamination can be used. Manufacturing.

In addition, the substrate 10 may be omitted from the fiber base material 13 and may be a laminate including the second resin layers 4 of the two prepregs 1 being directly joined to each other, or the metal layer 12 may be omitted.

<semiconductor device>

Next, the semiconductor device 100 using the substrate 10 will be described with reference to FIG. In FIG. 12, the fiber base materials 2 and 13 are omitted, and the first resin layer 3 and the second resin layer 4 are integrally shown.

The semiconductor device 100 shown in FIG. 12 includes a multilayer substrate (a circuit board (multilayer printed wiring board)) 200, a pad portion 300 provided on the upper surface of the multilayer substrate 200, and a wiring portion 400 provided on the lower surface of the multilayer substrate 200. The semiconductor element 500 mounted on the multilayer substrate 200 is connected to the pad portion 300 by the bumps 501.

The multilayer substrate 200 includes a substrate 10 provided as a core substrate, three prepregs 1a, 1b, and 1c provided on the upper side of the substrate 10, and three prepregs 1d and 1e provided on the lower side of the substrate 10. 1f. The fiber base material 2, the first resin layer 3, and the second resin layer 4 constituting the prepregs 1a to 1c are arranged in the order of the substrate 10, and the fiber base materials 2 and 1 which constitute the prepregs 1d to 1f, respectively. The arrangement order of the resin layer 3 and the second resin layer 4 from the substrate 10 is the same. That is, the prepregs 1a to 1c and the prepregs 1d to 1f are vertically inverted.

Further, the multilayer board base 200 includes a circuit portion 201a provided between the prepreg 1a and the prepreg 1b, a circuit portion 201b provided between the prepreg 1b and the prepreg 1c, and a prepreg. a circuit portion 201d between 1d and the prepreg 1e; and a circuit portion 201e provided between the prepreg 1e and the prepreg 1f.

Further, the multilayer substrate 200 includes a conductor portion 202 that is provided to penetrate the respective prepregs 1a to 1f, and electrically connect adjacent circuit portions or circuit portions and pad portions.

The metal layers 12 of the substrate 10 are each processed into a predetermined pattern, and the processed metal layers 12 are electrically connected to each other by a conductor portion 203 provided through the substrate 10.

Further, in the semiconductor device 100 (multilayer substrate 200), four or more prepregs 1 may be provided on one side of the substrate 10. Further, the semiconductor device 100 may include a prepreg other than the prepreg 1 .

<Second embodiment>

Fig. 6 is a schematic side view showing a second embodiment of the laminated sheet manufacturing apparatus of the present invention.

In the following, the second embodiment of the laminated sheet manufacturing apparatus, the laminated sheet manufacturing method, and the laminated sheet of the present invention will be described with reference to the drawings, but the description will be focused on the differences from the above-described embodiments, and the description of the same matters will be omitted. .

This embodiment is the same as the above-described first embodiment except that the laminated sheet manufacturing apparatus further includes an adjusting means (abutting force adjusting means).

The laminated sheet manufacturing apparatus 30A shown in Fig. 6 is provided for, when the space 70 is decompressed, for the purpose of reducing the pressure F2, for the adjacent rolls, for example, the first rolls 71a and 71b or the first The pressure contact force F1 between the two rollers 72a and 72b is maintained at almost constant adjustment means (abutment force adjustment means) 9.

The adjustment means 9 has a compression coil spring 91 that biases the first rollers 71a, 71b in a direction in which they are spaced apart from each other.

Further, the adjustment means 9 may have a compression coil spring 91 that biases the second rollers 72a, 72b in a direction in which they are spaced apart from each other.

The shaft 75 of the first roller 71a is supported by a block spring seat 92 which is abutted against one end surface of the compression coil spring 91. Similarly, the shaft 75 of the first roller 71b is another block-like piece that is abutted by the other end surface of the compression coil spring 91. The spring seat 92 is supported.

Further, the compression coil spring 91 is provided between the spring seat 92 of the first roller 71a and the spring seat 92 of the first roller 71b in a compressed state. As a result, the first roller 71a is biased upward, and the first roller 71b is biased downward, that is, the biasing force F3 that increases the direction in which the first roller 71a and the first roller 71b are displaced from each other.

With the adjustment means 9 of such a configuration, even if, for example, the space 70 is excessively decompressed and an excessive pressure contact force F1 is generated, the force F3 acts in such a manner as to offset the excess. Thereby, it is possible to surely prevent the laminate sheet 40 from being excessively pressed, and the laminate sheet 40 is unintentionally crushed to cause deformation.

<Third embodiment>

Fig. 7 is a schematic side view showing a third embodiment of the laminated sheet manufacturing apparatus of the present invention.

In the following, the third embodiment of the laminated sheet manufacturing apparatus, the laminated sheet manufacturing method, and the laminated sheet of the present invention will be described with reference to the drawings, but the description will be focused on the differences from the above-described embodiments, and the description of the same matters will be omitted. .

This embodiment is the same as the second embodiment except that the configuration of the adjustment means is different.

The adjusting means 9 of the laminated sheet manufacturing apparatus 30B shown in Fig. 7 has a pressure sensor (detecting portion) 93 for detecting the pressure in the space 70, and the adjacent rollers, for example, the first rollers 71a, 71b. The moving mechanism 94 that moves toward each other in the approaching/distance direction of each other or the second rollers 72a and 72b.

The pressure sensor 93 is disposed within the space 70. As the pressure sensor 93, for example, a configuration in which the pressure applied to the diaphragm (the diaphragm) is deformed in accordance with the film can be used.

The moving mechanism 94 includes a cylinder 95, a pump 96 for actuating the cylinder 95, a solenoid valve 97 provided between the cylinder 95 and the pump 96, and a control unit 98 having a function of controlling the operation of the pump 96 and the solenoid valve 97.

The cylinder 95 is coupled to the first roller 71b (72b), and the first roller 71b (72b) can be moved in the vertical direction, that is, in the direction in which the first roller 71a (72a) approaches/disengages. Further, the first roller 71a (72a) is fixed in position.

The adjustment means 9 of such a configuration can switch the solenoid valve 97 based on the detection result of the pressure sensor 93 obtained by the control unit 98, and adjust the position of the first roller 71b (72b) by the operation of the pump 96. Thereby, even if, for example, the space 70 is excessively decompressed and an excessive pressure contact force F1 is generated, the position of the first roller 71b (72b) can be adjusted to the lower side so as to cancel the excess. Thereby, it is possible to surely prevent the laminated sheet 40 from being excessively crushed, and the laminated sheet 40 is unintentionally crushed and deformed.

<Fourth embodiment>

Fig. 8 is a schematic cross-sectional side view showing a fourth embodiment of the laminated sheet manufacturing apparatus of the present invention.

In the following, the fourth embodiment of the laminated sheet manufacturing apparatus, the laminated sheet manufacturing method, and the laminated sheet of the present invention will be described with reference to the drawings, but the description will be focused on the differences from the above-described embodiments, and the description of the same matters will be omitted. .

This embodiment is the same as the above-described first embodiment except that the arrangement of the rolls is different.

The laminated sheet manufacturing apparatus 30C shown in Fig. 7 is disposed between the first rolls 71a and 71b and the second rolls 72a and 72b, and arranges three sets of third rolls 73a and 73b, third rolls 73c and 73d, and a third roll. 73e, 73f. The structures of the third rolls 73c, 73d, 73e, and 73f are the same as those of the third rolls 73a and 73b.

More specifically, three third rollers 73a, 73c, and 73e are disposed on the downstream side in the sheet conveying direction of the first roller 71a and on the upstream side in the sheet conveying direction of the second roller 72a.

In the same manner, three third rollers 73b, 73d, and 73f are disposed on the downstream side in the sheet conveying direction of the first roller 71b and on the upstream side in the sheet conveying direction of the second roller 72b.

Each of the rolls is disposed such that the rotation axes are parallel to each other, and each of the rolls is spanned between the pair of wall portions 61.

In addition, three third rollers are disposed on the downstream side of the first roller 71a in the sheet conveying direction and on the upstream side of the second roller 72a, but may be an odd number of three or more. In the same manner, three third rollers are disposed on the downstream side of the first roller 71b in the sheet conveying direction and on the upstream side of the second roller 72b, but may be an odd number of three or more. In addition, three or more odd-numbered third rollers are disposed on the downstream side of the first roller 71a in the sheet conveying direction and on the upstream side of the second roller 72a, and are on the downstream side of the sheet conveying direction of the first roller 71b. On the upstream side of the 2 roller 72b, only one third roller may be disposed.

Among the first roller, the second roller, and the third roller, adjacent rollers are in contact with each other to form a tubular body. Specifically, on the outer surface side (for example, the surface side) of the fiber base material 2, the outer peripheral surface of the first roll 71a is brought into direct contact with the outer peripheral surface of the third roll 73a. Moreover, the outer peripheral surface of the third roller 73a and the outer peripheral surface of the third roller 73c are brought into contact via the resin layer 3. Further, the outer circumferential surface of the third roller 73c is brought into direct contact with the outer circumferential surface of the third roller 73e. Further, the outer circumferential surface of the third roller 73e and the outer circumferential surface of the second roller 72a are brought into contact via the resin layer 3'.

Similarly, on the other surface side (for example, the back side) of the fiber base material 2, the outer peripheral surface of the third roll 73b is brought into direct contact with the outer peripheral surface of the first roll 71b. Moreover, the outer peripheral surface of the third roller 73b and the outer peripheral surface of the third roller 73d are brought into contact via the resin layer 4. Further, the outer circumferential surface of the third roller 73d is brought into direct contact with the outer circumferential surface of the third roller 73f. Further, the outer circumferential surface of the third roller 73f and the outer circumferential surface of the second roller 72b are brought into contact via the resin layer 4'.

Then, a space 70 is formed by the first roller, the second roller, and the third roller, and the decompressed space 70 is formed by the decompression means 8.

By arranging the rolls in this manner, the first resin layer 3' and the second resin which are different in composition (or the same) as the first resin layer 3 except for the first resin layer 3 and the second resin layer 4 can be produced. The layer 4 constitutes a laminated sheet 40 of the second (or the same) second resin layer 4'.

In the laminated sheet manufacturing apparatus 30C, the third roller disposed adjacent to one surface of the substrate 2 and the second roller disposed on the one surface side of the substrate 2 are adjacent to the second roller. Supply of at least 2 places between the 3rd rolls In any of the places, a sheet (for example, the first resin layer 3 or the second resin layer 4) is supplied into the space 70, and is supplied from the supply portion different from the supply portion of the supply sheet. The second sheet (for example, the first resin layer 3' or the second resin layer 4') is supplied into the space.

Specifically, the first resin layer 3 is supplied into the space 70 between the third roller 73a and the third roller 73c. The first resin layer 3' is supplied into the space 70 between the second roller 72a and the third roller 73e. The second resin layer 4 is supplied into the space 70 between the third roller 73b and the third roller 73d. The second resin layer 4' is supplied into the space 70 between the second roller 72b and the third roller 73f.

Any of the resin layers is in a B-stage state.

Further, in the present embodiment, the adjustment means of the second embodiment and the third embodiment may be employed.

Further, the width dimension of the resin layer 4' and the resin layer 3' in the direction orthogonal to the sheet conveying direction can be larger or smaller than the width dimension of the substrate 2.

In the same manner as in the above-described embodiment, the end portions of the resin layers 3 and 4 along the sheet conveying direction are pressure-bonded (melt-bonded) to each other, and the base material 2 and the resin layers 3 and 4 are formed. The inside of the resin layer 4' and the resin layer 3' are bonded to each other along the sheet conveying direction (melt bonding), and the base material 2 and the resin layers 3 and 4 are inside. The composition of the package.

In the same manner as in the above-described embodiments, the gas inside the fiber base material 2 of the laminated sheet 40 sent out from the space 70 is sucked by the pressure reducing means 8, and the resin layers 3 and 4 are impregnated into the fiber base material 2.

According to the fourth embodiment, the same effects as those of the first embodiment can be exhibited, and the following effects can be exhibited.

In the present embodiment, the rollers are arranged in such a manner as to surround a space 70. Thereby, the space to be decompressed can be made one.

Further, in the present embodiment, the plurality of resin layers 3, 3', 4, 4' and the fiber base material 2 can be pressure-bonded by the second rolls 72a and 72b at a time. Thereby, the fiber substrate 2 is prevented from being pressed by the plurality of rollers by a plurality of times, and deformation of the fiber base material 2 can be prevented.

<Fifth Embodiment>

Fig. 9 is a schematic cross-sectional side view showing a fifth embodiment of the laminated sheet manufacturing apparatus of the present invention.

In the following, the fifth embodiment of the laminated sheet manufacturing apparatus, the laminated sheet manufacturing method, and the laminated sheet of the present invention will be described with reference to the drawings, but the description will be focused on the differences from the above-described embodiments, and the description of the same matters will be omitted. .

This embodiment is the same as the above-described first embodiment except that the arrangement of the rolls is different.

The laminated sheet manufacturing apparatus 30D shown in Fig. 9 is a device in which the fourth rolls 74a and 74b and the fifth rolls 75a and 75b of the two sets are added to the laminated sheet manufacturing apparatus of the first embodiment.

The fourth rolls 74a and 74b are disposed on the downstream side of the second rolls 72a and 72b in the sheet conveyance direction, and the laminated sheets from the second rolls 72a and 72b are supplied between the fourth rolls 74a and 74b (fiber base 2, 1 resin layer 3, second resin layer 4 Laminated body). The fourth rollers 74a and 74b are disposed to face each other while sandwiching the laminated sheets.

The structures of the fourth rolls 74a and 74b and the fifth rolls 75a and 75b are the same as those of the first rolls 71a and 71b. Among them, the fourth rolls 74a and 74b are preferably heated rolls similarly to the second rolls.

The fifth rollers 75a and 75b are arranged to hold the sheets fed by the second rollers 72a and 72b. The fifth rollers 75a and 75b are disposed on the downstream side in the sheet conveying direction of the second rollers 72a and 72b, and are located on the upstream side in the sheet conveying direction of the fourth rollers 74a and 74b.

The first to fifth rolls are spanned between the pair of wall portions 61, and the rotation axes are parallel to each other. The outer peripheral surface of the fifth roller 75a is in direct contact with the outer peripheral surface of the second roller 72a. Further, the outer peripheral surface of the fifth roller 75a is in contact with the fourth roller 74a indirectly via the resin layer 3'. Similarly, the outer circumferential surface of the fifth roller 75b is in direct contact with the outer circumferential surface of the second roller 72b. Further, the outer peripheral surface of the fifth roller 75b is in contact with the fourth roller 74b indirectly via the resin layer 4'. Thereby, the second rolls 72a and 72b, the fifth rolls 75a and 75b, and the fourth rolls 74a and 74b constitute a tubular body, and the second space 77 surrounded by the rolls is formed. Further, an opening 613 that communicates with the space 77 is formed in the wall portion. The pipe of the decompression means 8 is connected to the opening 613, and the gas in the second space 77 is sucked by the pump through the pipe to decompress the inside of the second space 77.

In the present embodiment, the decompression means can decompress only the space (spaces 70, 77) surrounded by the rolls, and the other areas are not depressurized.

That is, the first rolls 71a and 71b are bordered by the first rolls 71a and 71b. The region on the upstream side in the sheet conveying direction is equal to or higher than atmospheric pressure (atmospheric pressure in the present embodiment).

In addition, in the region on the downstream side in the sheet conveying direction of the fourth rollers 74a and 74b, the fourth roller 74a and 74b are at a pressure equal to or higher than atmospheric pressure (in the present embodiment, atmospheric pressure).

With such a manufacturing apparatus 30D, a laminated sheet can be manufactured as follows.

First, the gas (air) in the spaces 70 and 77 is sucked by the decompression means, and the inside of the spaces 70 and 77 is decompressed.

Then, similarly to the above-described embodiment, the first resin layer 3 is laminated on the surface side of the fiber base material 2 in the space 70, and the second resin layer 4 is laminated on the back surface side. Thereafter, the fiber base material 2, the first resin layer 3, and the second resin layer 4 are pressure-bonded by the second rolls 72a and 72b. The laminated sheets fed by the second rolls 72a and 72b are supplied into the space 77. On the other hand, the resin layer 3' is supplied to the space 77 between the fifth roller 75a and the fourth roller 74a.

Further, between the fifth roller 75b and the fourth roller 74b, the resin layer 4' is supplied toward the space 77.

The resin layer 3' is supplied onto the resin layer 3, and the resin layer 4' is supplied onto the resin layer 4.

Further, the laminated sheet composed of the resin layer 4', the resin layer 4, the fibrous base material 2, the resin layer 3, and the resin layer 3' is supplied between the fourth rolls 74a and 74b, and the fourth rolls 74a and 74b are used. Pressure bonding. At this time, the resin layer 4', the resin layer 4, the fiber base material 2, the resin layer 3, and the resin layer are formed by the fourth rolls 74a and 74b. The laminated sheet composed of 3' is heated, and the resin layers 3 and 4 are impregnated into the fibrous base material 2.

Thereafter, the laminated sheets are sent out to the outside of the space 77 by the fourth rolls 74a and 74b (an environment of atmospheric pressure or higher (in the present embodiment, in an atmospheric pressure environment)).

Further, in the present embodiment, the adjustment means of the second embodiment and the third embodiment may be employed. The adjustment means may be provided to adjust the pressure-adhesive force of the fourth rollers 74a, 74b, or may be provided to adjust the pressure-adhesive force of the second rollers 72a, 72b.

In the same manner as in the above-described embodiments, the gas inside the fiber base material 2 of the laminated sheet fed from the space 70 is sucked by the pressure reducing means 8, and the resin layers 3 and 4 are impregnated into the fiber base material 2. Specifically, in the present embodiment, the laminated sheet which is sent out to the second space 77 by the space 70 is sucked by the rollers 74a and 74b while the gas inside the fibrous base material 2 is sucked by the decompression means 8 to carry out the resin. 3, 4 impregnation of the fibrous substrate 2. Further, the gas inside the fiber base material 2 which is sent out to the outer laminated sheet 40 by the second space 77 is sucked by the decompression means 8, and the impregnation of the resin substrates 3, 4 with the fiber base material 2 is further performed.

According to the fifth embodiment, the same effects as those of the first embodiment can be exhibited, and the following effects can be exhibited.

By the laminated sheet manufacturing apparatus 30D, it is possible to press-bond each layer of each layer, whereby the laminated sheet 40 in which the respective layers are firmly pressed can be obtained.

Further, in the present embodiment, the laminated body (the first stage is pressed) of the resin layer 4, the fibrous base material 2, and the resin layer 3 is pressed by the second rolls 72a and 72b, and the fourth step is applied. The rolls 74a and 74b are pressure-bonded to the laminated sheet (second stage pressure-bonding) composed of the resin layer 4', the resin layer 4, the fiber base material 2, the resin layer 3, and the resin layer 4'. Therefore, the pressure-adhesive force of the first stage and the pressure-bonding force of the second stage can be changed to obtain a laminated sheet of a desired pressure-bonding state.

Further, in the present embodiment, the spaces to be decompressed 70, 77 are formed in plural by the arrangement of the rolls, and the volume of each of the spaces 70, 77 can be made small. Therefore, the pressure in each of the spaces 70 and 77 can be quickly reduced.

Further, the width dimension of the resin layer 4' and the resin layer 3' in the direction orthogonal to the sheet conveying direction can be larger or smaller than the width dimension of the substrate 2.

In the same manner as in the above-described embodiment, the end portions of the resin layers 3 and 4 along the sheet conveying direction are pressure-bonded (melt-bonded) to each other, and the base material 2 and the resin layers 3 and 4 are formed. The inside of the resin layer 4' and the resin layer 3' are pressure-bonded (fused-bonded) to each other along the sheet conveying direction to form a joint portion, and the base material 2 and the resin layer 3 are formed. 4 is composed of inner package.

Although the laminated sheet manufacturing apparatus, the laminated sheet manufacturing method, and the laminated sheet of the present invention have been described above with reference to the embodiments shown in the drawings, the present invention is not limited thereto, and the laminated sheet manufacturing apparatus and the respective components constituting the laminated sheet can be utilized. Any component of the same function is replaced. Further, any constituent may be added.

In addition, the laminated sheet manufacturing apparatus, the laminated sheet manufacturing method, and the laminated sheet of the present invention may be a combination of any two or more of the above-described respective embodiments.

Further, the laminated sheet manufacturing apparatus is provided with a pair of third rollers in the configuration shown in Fig. 1. However, the present invention is not limited thereto, and for example, three or more odd arrays may be provided.

Further, although the outer diameters of the main portions of the first roller, the second rollers, and the third rollers are different from each other in the configuration shown in FIG. 1, the present invention is not limited thereto. For example, the outer diameter of the main body portion may be different from each other. the same.

Further, the laminated sheet manufacturing apparatus may be configured to dry the laminated sheet sent from the space.

Further, in the configuration shown in FIG. 10, the laminated sheet is bonded to each other on both surfaces of the fibrous base material. However, the laminated layer is not limited thereto, and the resin layer may be bonded only to one surface of the fibrous base material. The laminated sheet of such a configuration can also be manufactured by a laminated sheet manufacturing apparatus.

In addition, in the configuration shown in FIG. 10, the laminated sheet is impregnated with the first resin composition and the second resin composition in the fiber base material, but the present invention is not limited thereto, and may be, for example, the following. The first example is a laminated sheet in which the first resin composition is impregnated as a whole in the thickness direction of the fiber base material, and the second resin composition is not impregnated.

The second example is a laminated sheet in which the second resin composition is impregnated as a whole in the thickness direction of the fiber base material, and the first resin composition is not impregnated. The third example is a laminate in which a part of the thickness direction of the fiber base material is impregnated with the first resin composition and the second resin composition is not impregnated. The fourth example is impregnated with the second resin composition in one of the thickness directions of the fibrous substrate, and is not impregnated with the first resin composition. Layered piece. In the laminated sheets of the above four examples, the composition of the first resin composition and the second resin composition may be different from each other, or the compositions may be identical to each other. Further, the laminated sheet of such a configuration can also be produced by a laminated sheet manufacturing apparatus.

In the configuration shown in FIG. 10, the laminated sheet is a fiber substrate. However, the laminated sheet is not limited thereto. For example, it may be a substrate having a printed wiring board or the like instead of the fibrous base material.

In the above-described embodiments, the laminated sheet of the fiber base material 2 and the resin layers 3 and 4 is produced. However, the laminated sheet is not limited thereto. For example, another resin layer may be laminated on at least one surface of the resin layer to form a laminate. sheet. Further, a laminate sheet may be formed by laminating a resin layer or other prepreg on at least one side of the prepreg. Further, a resin layer may be laminated on at least one side of the non-woven fabric.

Further, the present invention is based on the following constituents.

(1) A manufacturing apparatus for a laminated sheet having a resin layer composed of a solid or semi-solid resin composition on one surface side, and bonding the resin layer of the thin-plate-shaped support continuously supplied to a thin plate-like base a laminated sheet produced by one or both sides of the material; characterized by comprising: a housing having a pair of wall portions disposed opposite to each other; and being disposed between the pair of wall portions, the outer peripheral surfaces abutting each other a roller that is disposed between the pair of wall portions and different from the pair of first rollers, wherein the outer circumferential surface abuts against the pair of second rollers; and is disposed between the pair of wall portions and disposed The first pair of the above rolls and the upper Between the pair of second rollers, at least one pair of third rollers; and at least one of the pair of wall portions having a pair of the first roller and the pair of first rollers a pair of the second roller and the opening of the space opening surrounded by the pair of third rollers, and the decompression means for decompressing the space by sucking the air in the space by the opening; The base material is fed between the pair of first rolls, and the base material and the resin layer are pressure-bonded between the pair of second rolls. At this time, the space is decompressed by the pressure reducing means. .

(2) The apparatus for producing a laminated sheet according to (1), wherein when the space is depressurized, the pressure-sensitive adhesive between the base material and the resin layer is assisted by the pressure reduction.

(3) The apparatus for manufacturing a laminated sheet according to (1) or (2), wherein the support system has a support sheet supporting the resin layer, and the third roll has a pressure-sensitive adhesive layer between the base material and the resin layer. Previously, the function of the above-mentioned support sheet was peeled off by the above resin layer.

(4) The apparatus for manufacturing a laminated sheet according to any one of (1) to (3), wherein the laminated sheet is bonded to the resin layer on both surfaces of the substrate, and the second roller of the pair The resin layer is pressure-bonded to both sides of the substrate at a time.

(5) The apparatus for manufacturing a laminated sheet according to any one of (1) to (4), wherein the pressure reducing means includes a pump and a connecting pipe connecting the pump and the opening.

(6) The apparatus for manufacturing a laminated sheet according to any one of (1) to (5), further comprising: abutting the pair of first rolls when the space is decompressed The contact force between the force and the pair of second rollers is maintained at a constant abutting force maintaining means.

(7) The apparatus for manufacturing a laminated sheet according to (6), wherein the abutting force maintaining means has a compression force for biasing the pair of first rolls and the pair of second rolls in a direction away from each other Coil spring.

(8) The apparatus for manufacturing a laminated sheet according to (6), wherein the abutting force maintaining means includes: a detecting unit that detects a pressure in the space; and the first one of the pair is determined based on a detection result of the detecting unit A moving mechanism in which the rollers move in the direction in which they approach/disengage, and the second pair of rollers are moved in the direction in which they approach/disengage.

(9) The apparatus for manufacturing a laminated sheet according to any one of (1) to (8) further comprising: each of the walls between the respective walls and the end portions of each of the first rolls a sealing material between the portion and the end portions of each of the second rolls.

(10) A method of producing a laminated sheet, characterized in that the laminated sheet is produced by using the apparatus for producing a laminated sheet according to any one of (1) to (9).

(11) A laminated sheet produced by the apparatus for producing a laminated sheet according to any one of (1) to (9).

(12) The laminated sheet according to (11), wherein the laminated sheet is cut in the longitudinal direction thereof, and the cut sheet is a prepreg.

The present application claims priority based on the Japanese Patent Application No. 2011-076663, filed on March 30, 2011, and the Japanese Patent Application No. 2012-065013, filed on March 22, 2012. Access herein.

1, 1a, 1b, 1c, 1d, 1e, 1f‧‧‧ prepreg

2‧‧‧Fiber substrate

3, 3'‧‧‧1st resin layer

4, 4'‧‧‧ second resin layer

5a‧‧‧1st support (sheet)

5b‧‧‧2nd support (sheet)

6‧‧‧Shell

8‧‧‧Decompression

9‧‧‧Adjustment means

10‧‧‧Substrate

11‧‧‧Layer

12‧‧‧metal layer

13‧‧‧Fiber substrate

20‧‧‧ border

30, 30A, 30B, 30C, 30D‧‧‧ laminated sheet manufacturing equipment

31‧‧‧1st impregnation

32‧‧‧1st Non-Immersion Department

40‧‧‧Layered film

41‧‧‧2nd Impregnation Department

42‧‧‧2nd Non-Immersion Department

51‧‧‧Protected sheet

61‧‧‧ wall

62‧‧‧ Sealing material

70‧‧‧ space

71a, 71b‧‧‧1st roll

72a, 72b‧‧‧ second roller

73a, 73b, 73c, 73d, 73e, 73f‧‧‧ third roller

74‧‧‧ Body Department

74a, 74b‧‧‧4th roller

75‧‧‧Axis

75a, 75b‧‧‧5th roller

76‧‧‧ bearing

77‧‧‧Second space

81‧‧‧ pump

82‧‧‧Connecting tube

91‧‧‧Compressed coil spring

92‧‧‧ spring seat

93‧‧‧Pressure sensor (detection department)

94‧‧‧Mobile agencies

95‧‧‧ cylinder

96‧‧‧ pump

97‧‧‧ solenoid valve

98‧‧‧Control Department

100‧‧‧Semiconductor device

200‧‧‧Multilayer substrate

201a, 201b, 201d, 201e‧‧‧ Circuit Department

202, 203‧‧‧ conductor

300‧‧‧Mats

400‧‧‧Wiring Department

500‧‧‧Semiconductor components

501‧‧‧Bumps

611‧‧‧ openings

612‧‧‧ recess

613‧‧‧ openings

741‧‧‧ outer perimeter

F1‧‧‧adhesive force (abutment force)

F2‧‧‧Reducing pressure

F3‧‧‧Additional forces

G‧‧‧Air

Fig. 1 is a schematic cross-sectional side view showing a first embodiment of a laminated sheet manufacturing apparatus of the present invention.

Figure 2 is a cross-sectional view taken along line A-A of Figure 1.

Figure 3 is a cross-sectional view taken along line B-B of Figure 1.

Fig. 4 is an enlarged view of a region [C] surrounded by a one-dot chain line in Fig. 1.

Fig. 5 is a cross-sectional view taken along line D-D of the laminated sheet of the region [C] surrounded by a one-dot chain line in Fig. 1.

Fig. 6 is a schematic side view showing a second embodiment of the laminated sheet manufacturing apparatus of the present invention.

Fig. 7 is a schematic side view showing a third embodiment of the laminated sheet manufacturing apparatus of the present invention.

Fig. 8 is a schematic cross-sectional side view showing a fourth embodiment of the laminated sheet manufacturing apparatus of the present invention.

Fig. 9 is a schematic cross-sectional side view showing a fifth embodiment of the laminated sheet manufacturing apparatus of the present invention.

Figure 10 is a cross-sectional view showing a laminated sheet of the present invention.

Fig. 11 is a cross-sectional view showing a substrate produced by using the laminated sheet shown in Fig. 10.

Figure 12 is a cross-sectional view showing a semiconductor device manufactured using the substrate shown in Figure 11.

2‧‧‧Fiber substrate

4‧‧‧2nd resin layer

3‧‧‧1st resin layer

5b‧‧‧2nd support (sheet)

5a‧‧‧1st support (sheet)

8‧‧‧Decompression

6‧‧‧Shell

40‧‧‧Layered film

30‧‧‧Laminated sheet manufacturing equipment

61‧‧‧ wall

51‧‧‧Protected sheet

71a‧‧‧1st roll

70‧‧‧ space

72a‧‧‧2nd roller

71b‧‧‧1st roll

73a‧‧‧3rd roller

72b‧‧‧2nd roller

74‧‧‧ Body Department

73b‧‧‧3rd roller

741‧‧‧ outer perimeter

611‧‧‧ openings

Claims (16)

A manufacturing apparatus for a laminated sheet, wherein a sheet having a resin layer is bonded to one side or both sides of a thin plate-shaped substrate to produce a laminated sheet; and the laminated sheet has a peripheral surface that abuts against each other and sends out the substrate a first roller; a pair of second rollers that are joined to each other by the first roller and that are disposed on the downstream side of the substrate transport direction of the first roller; The third roller is disposed on the upstream side of the substrate transport direction of the second roller, and is disposed on the front surface and the back surface of the substrate which are fed by the pair of first rollers; a pressure reducing means for reducing pressure in a space surrounded by the first roller, the second roller, and the third roller; and the pair of first rollers are rollers for feeding the substrate into the space; On the front side or the back side of the substrate, the sheet is fed into the space by one of the third rolls and one of the second rolls, and the second roll is applied to the substrate and the sheet. The resin layer is pressure-bonded and will contain the above substrate and the above-mentioned sheet Ply fed to the outside of the roll in the space. The apparatus for manufacturing a laminated sheet according to claim 1, wherein the first roller, the second roller, and the third roller are spanned on the wall of the pair. Inter-office The decompression means is connected to an opening formed in the wall portion, and the space surrounded by the pair of first rolls, the pair of second rolls, the third rolls, and the pair of wall portions Decompression is carried out inside. The apparatus for manufacturing a laminated sheet according to claim 1, wherein the sheet is fed to the space between the other second roller and the other third roller; and the second roller is configured as The resin layer of the sheet is pressure-bonded to one surface of the substrate, and the resin layer of the sheet is pressure-bonded to the other surface of the substrate. The apparatus for manufacturing a laminated sheet according to the third aspect of the invention, wherein the substrate and the sheet are elongated and continuously supplied into the space; the substrate is a fibrous substrate; and the substrate is a width dimension in which the transport direction is orthogonal to each other is smaller than a width dimension of the respective sheets in a direction orthogonal to the transport direction; and the pair of second rollers is configured to form the resin of the pair of sheets The end portions in the width direction of the layer are pressed against each other, and at least one of the resin layers of the sheet is impregnated into the substrate. The apparatus for manufacturing a laminated sheet according to the fourth aspect of the invention, wherein the second roller is configured to feed the laminated sheet to the outside from the space, and the downstream side of the second roller in the sheet conveying direction is at least atmospheric pressure. For example, the manufacturing device of the laminated sheet of the fourth application patent scope, wherein The space inside the fiber base material that is fed by the pair of second rolls is communicated with the space inside the fiber base material inside the space, and the pair of second rolls makes The resin layer of the above sheet is impregnated into the above fibrous substrate. The apparatus for manufacturing a laminated sheet according to the second aspect of the invention, wherein the pressure reducing means includes a pipe connected to the opening and a pump connected to the pipe. The manufacturing apparatus of the laminated sheet according to the first aspect of the invention, wherein the sheet comprises the resin layer and a protective sheet for protecting the resin layer; and the protective sheet is configured to be supplied to the space. The sheet is sent out to a direction different from the pair of second rolls, and the resin layer and the protective sheet are peeled off. The apparatus for manufacturing a laminated sheet according to the first aspect of the invention, wherein one of the front surface and the back surface of the base material is a downstream side of the substrate conveyance direction of one of the first rolls, and the base of the second roll Three or more odd-numbered third rolls are disposed on the upstream side in the material conveying direction, and the decompression means is reduced in a space surrounded by the first roll, the second roll, and all of the third rolls And a second roller disposed adjacent to the one surface side of the substrate and the second roller disposed on the one surface side of the substrate and the third roller adjacent to the second roller In at least two of the supply locations, the sheet is supplied to the space by any supply; The second sheet is supplied into the space by the supply portion different from the supply portion of the sheet, and the pair of second rollers are paired with the substrate, the sheet, and the second sheet. Press-adhesive pressure roller. The apparatus for manufacturing a laminated sheet according to the first aspect of the invention, further comprising: a pair of fourth rollers disposed to face each other on a downstream side of the laminated sheet conveying direction of the second roller; and a second roller disposed on the second roller The downstream side of the laminated sheet conveyance direction is disposed on the upstream side of the laminated sheet conveyance direction of the fourth roll, and is disposed on the fifth roll of the front and back surfaces of the laminated sheet fed by the pair of second rolls; a first space belonging to the space surrounded by the pair of first rolls, the pair of second rolls, and the third roll, and the pair of second rolls and the pair of fourth rolls, a second space surrounded by the fifth roller; the decompression means is configured to decompress each space; the second layer of the pair of rollers is supplied to the second space; and the laminated sheet belongs to a second sheet is fed into the second space between the fifth roller and one of the fourth rollers on the front surface or the back surface side; and the laminated sheet and the second sheet are formed on the fourth roller system Pressure-adhesive pressure roller. A manufacturing apparatus for a laminated sheet according to item 1 of the patent application, wherein There is provided an adjustment means for adjusting the pressure-adhesive force caused by the pair of second rollers. The apparatus for manufacturing a laminated sheet according to claim 11, wherein the adjusting means has a compression coil spring that biases the pair of second rolls in the direction of the separation. The apparatus for manufacturing a laminated sheet according to claim 11, wherein the adjusting means includes: a detecting unit that detects a pressure in the space; and the second roller of the pair is pressed according to a detection result of the detecting unit A moving mechanism that moves in the direction of its approach/distance. The manufacturing apparatus of the laminated sheet according to the first aspect of the invention, wherein the resin layer of the sheet is composed of a solid, semi-solid or liquid resin composition. A method for producing a laminated sheet, which is characterized in that the laminated sheet is produced by using a manufacturing apparatus for a laminated sheet of the first application of the patent application. The manufacturing method of the laminated sheet of the fifteenth aspect of the invention, wherein the width dimension of the base material in a direction orthogonal to the conveying direction is smaller than a width dimension of the sheet in a direction orthogonal to the conveying direction; The method includes: feeding the substrate belonging to the fiber substrate continuously to the space between the first pair of the first rolls; and between the one of the second rolls and the third roll, a step of continuously feeding the sheet having the resin layer; and between the other second roller and the other third roller facing upward a step of continuously feeding the sheet having the resin layer; and applying the resin layer of each of the sheets to the fiber substrate by the pair of second rolls, and making the fiber substrate The resin layer is impregnated, and the end portions of the resin layer in the width direction of the respective sheets are adhered to each other; and the laminated sheet of the substrate and the sheet is fed out to the space by the second roller. a step of attracting a gas inside the fiber base material located in the space by the decompression means to attract a gas in the fiber base material outside the space, and locating the fiber base outside the space In a state in which the gas in the material is attracted, a step of impregnating the fiber substrate with each of the resin layers is further performed.